Operating Instructions - University of Notre Dame
Contents
1. Keith Darr Rev 1 5 10 31 2008 Authorized Users List Name Email Advisor Date Shengin Wang swang6 nd edu Zhu 04 25 08 Yu chen Chang ycheng nd edu Chang 07 28 08 Dan Ho dho nd edu Zhu 09 15 08 Qingling Hang qhang nd edu Jena 09 19 08 Keith Darr Rev 1 5 10 31 2008 Operations 1 Turn on the lamp power supply a The lamp power supply is below and to the right of the copier b The power switch is the left white switch On the lamp power supply press and release the start switch a The right switch should be pressed down and then released b Allow 3 5 minutes for proper lamp warm up Press the Power On switch located on the copier s main control console a The switch will illuminate as well as the Start Ready indicator switch Unlatch the door and open it 5 If you need to change the plate holders are not trained to do so contact lab staff a If you have been trained and you need to change the master and copy plate holders use the following steps i The two selected printing frames are secured in a diagonal orientation by four screws on each ii When installing the printing frame in the master chamber orient the two nylon locating guides toward the lower right side iii When installing the printing frame in the copy chamber orient the two gu2. the machine off Turn off lamp power supply Develop the copy plate Rev 1 5 10 3 1 2008 Developing Emulsion plate Oy CON Sy ie cr Use PD 86 developer to develop the emulsion plate for 5 min Rinse the plate in DI water for 1 min Put the plate in fixer PF 95 for 3 min Rinse the plate in DI water for 1 min Rinse the plate with methanol Place the plate in the slotted Teflon plate holder and let air dry a Alternatively blow dry the plate with nitrogen Chromium plate 1 Develop the plate in AZ917 20 25 seconds to remove the exposed resist Rinse in DI water for 1 minute Etch the exposed chromium in CR 4 until the chromium is removed average time 90 sec 4 Rinse in DI water for 1 minute Keith Darr Rev 1 5 10 31 2008 Rinse the plate with methanol to remove the remaining resist Strip any residual photoresist in the Drytech Appendix Filter 2 rn For Emulsion l plates i S Filter 3 for Emulsion p a7es i ah y n Figure 1 Tamarack Filter Placement Keith Darr Rev 1 5 10 3 1 2008
3. 05 Wu Bin bwu nd edu Seabaugh 02 28 05 John Timler jtimler nd edu Seabaugh 02 28 05 Jie Su jsu nd edu Bernstein 04 14 05 Sangeetha Swaminathan sangi utk edu Wu 06 16 05 John Baeton baetenjGmsoe edu Wu 06 16 05 Mike Coogan mcoogan9Ond edu Chang 08 12 05 Qing Liu qliul nd edu Bernstein 9 14 05 John Simon jsimon nd edu Jena 09 30 05 David Deen ddeen nd edu Xing 10 19 05 Wentao Luo wluo nd edu Chang 10 24 05 Siddhartta Maheshisaui smaheshiu nd edu Chang 10 24 05 Qinxin Zhang qzhang nd edu McGiun 10 25 05 Aaron Prager aprager nd edu Snider 10 25 05 Juan Jiang jjiang nd edu A E Miller 10 25 05 Loukas Tsagalas Itsagala nd edu D A Hill 06 23 06 Adams Tong atong nd edu Snider 08 31 06 Tom Zimmerman tzimmer2 nd edu_ Xing 02 14 06 Jia Gao jguo nd edu Liu 12 21 06 Peter Hoffman phoffman2 nd edu Zhu 3 22 07 Zhen Wang zwang3 nd edu Bohn 4 11 07 Xiangning Luo xluo nd edu Jena 10 04 07 Gilad Yossifon yossifon nd edu Chang 06 08 07 Sagnik Basuray sbasuray nd edu Chang 10 08 07 Nishant Chetwani nchetwan nd edu Chang 10 08 07 Nan Sun nsun nd edu Ruggiero 12 19 07 Prashant Deshlahra pdeshlah nd edu Bernstein 02 04 08 Ireneusz Janki ijanik nd edu Carmichael 04 30 08 Yenchun Lee ylee4 nd edu Snider 06 04 08 Lisa Cole Icole5 mail rochster edu Roeder 06 18 08 Xiu Xing xxing nd edu Fay 06 18 08 Andy Carter acarter nd edu Bernstein 07 01 08 Jason Kulick jkulick nd edu Bernstein 07 01 08 Connor Griffith grifcj gmail com Porod 07 01 08
4. Tamarack Series 142 Vacuum Contact Printer Operation For the Micro Electronics Laboratory At University of Notre Dame Department of Electrical Engineering This user manual is not be removed from the Mask Making Room This includes making copies A downloaded copy can be obtained from the web at the following link http www nd edu ee ndnf or contact Keith Darr for a copy of this manual Purpose The Tamarack Series 142 Vacuum Contact Printer is used to produce a copy of a master plate at a sizing ratio of 1 1 The Series 142 is able to image a patterned emulsion plate to a photoresist coated chromium plate or from a patterned and etched chromium plate to a photoresist coated chromium plate with an identical pattern transfer With filters installed the Tamarack is capable of exposing emulsion plates using either a patterned emulsion plate or a patterned chromium plate as a master plate If the user chooses to use the machine for this purpose then they should expect the resulting emulsion pattern to be a negative image of the master plate Reference Documents Tamarack Vacuum Contact Printer Series 142 Technical Manual Rev 9 76 Operation instruction and procedural documentation provided by Tatyana Orlova Additional Equipment Required None Materials Required Emulsion coated plate 5 X 5 127 X 127 mm Photoresist coated chrome reticle plates 5 X 5 127 X 127 mm or 4 X 4 100 X 100 mm AZ917 Developer CR 4 Chromi
5. ides toward the left and opposite the single guide on the master frame 1 In this manner the white guides alternate and do not interfere with each other when the door is 6 Load master plate in master chamber with the pattern side out 7 Press Master switch to apply a holding vacuum to the master plate a The switch will illuminate 8 Load copy plate in copy chamber with the chemical side up and raise the door a little so the copy vacuum starts 9 Check to see that the copy plate has good vacuum by trying to move it 10 Carefully raised the door and latch the door shut 11 Press the Purge switch The switch will illuminate 12 Wait 5 seconds and press the Purge switch again to stop the purge cycle The switch light will extinguish 13 Apply and hold some pressure to the door and press the Chamber Vacuum button The switch will illuminate a Look at the 3 gauges and make sure that they are all around 20 then let go of the door If there is no change on the gauge then apply slightly more pressure to ensure that the vacuum system seals Keith Darr 6 Rev 1 5 10 31 2008 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 Keith Darr Press the Copy Force switch to apply force to clamp the master and copy plates together The switch will illuminate a The left vacuum gauge and the middle one will decrease in vacuum Make sure that they stabilize and
6. read around 9 Set desired exposure time on the Timer a Emulsion plate 12 00 seconds b Chromium plate 20 00 seconds Check the filters in the slots inside the printer Figure 1 in Appendix a For a chrome copy use only the rear filter i Itis difficult to see Itis behind the rubber and should always be in b To make an emulsion copy use all three filters i The emulsion plate filters will be inserted in the two slots on the front side of the rubber Press Exposure Start wait until you hear the shutter close a Shutter Open switch will also illuminate but during shutter open time only Press the Exposure Start switch again a The exposure lamp will extinguish but the shutter will not open again Press the Copy Force switch to remove the forces clamping the plates together The switch light will extinguish Press the Purge button to separate the two plates Wait 5 seconds then press Purge again Wait 3 4 seconds then press the Chamber vacuum Unlatch and carefully open the door a The vacuum holding the copy plate will be released automatically and the Copy indicator light will extinguish Remove the copy plate While holding the master plate depress the Master switch to remove the vacuum on the master plate The switch will extinguish Return the door to the closed position and latch it shut Press the Power On switch on the copier to turn
7. um photomask etchant PF 95 Photomask Fixer PD 86 Photomask Negative Developer Protective Equipment Required Safety glasses Latex Gloves Engineering and or Administrative Controls Only authorized users may operate this piece of equipment Training To obtain training on this machine please contact Keith Darr office 221 Cushing phone 1 5497 email kdarr nd edu Problems For problems clarification of procedures or general information pertaining to this machine please contact one of the following personnel Keith Darr 631 5497 kdarr nd edu Mike Thomas 631 7493 Thomas 20 nd edu Mark Richmond 631 6478 Richmond 7 nd edu In Case of Emergency Please Contact Notre Dame Security at 911 MSDS s can be located in the EE Department office or in Room 244 near the door Keith Darr 2 Rev 1 5 10 31 2008 Table of Contents Page Contents 4 5 Authorized Users 6 7 Operations 8 Developing 9 Appendix Keith Darr Rev 1 5 10 31 2008 Authorized Users List Name Email Advisor Date Jie Wu jww nd edu Chang 04 29 04 Minjun Huang mbuang nd edu Hall 05 05 04 Diana Hou dou nd edu Chang 05 27 04 Zach Gagnon zgagnon nd edu Chang 05 27 04 Wei He whe nd edu Lieberman 10 05 04 Yong Tang ytang2 nd edu Fay 01 20 05 Ning Su nsu nd edu Fay 01 20
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