KEI 595 Quick Reference Guide
Contents
1. 1 Voltage source is OFF 0 00V 0 01V and Model 595 is set to measure capacitance Voltage source is set to DC waveform and Model 595 is set to measure capacitance Software revision level displayed as part of diagnostics Troubleshooting diagnostics Phases signal zero and calibration reference Overload overrange input applied OL for negative value Instrument is waiting for a trigger bus external or front panel SHIFT then Bus Error Instrument programmed while not in remote or illegal command or com mand option sent Number Error Calibration voltage source waveform parameter or program value beyond allowable range Trigger Overrun Error Instrument triggered during a measurement conversion RAM Test Failure ON while RAM memory is being tested If message remains the test failed ROM Test Failure ON while ROM memory is being tested If message rernains the test failed Flashing Decimal Points in Exponents Power up calibration constants are not in use due to nonvolatile memory error on power up or calibration adjustment without storage Decimal Points Turned On in Exponent Calibration program is in use SHIFT SHIFT Several of the front panel buttons have a secondary func tion These functions are labeled in yellow as is the SHIFT button Secondary functions are selected by first pressing the SHIFT button and then pressing the desired feature but ton More inform2. Reading no prefix Plotter prefix Plotter no prefix 38 Analog Output Autopen X1 gain Pen up X1 gain Pen down X1 gain Same as 01 Autopen X10 gain Pen up X10 gain Pen down X10 gain Same as O4 Continuous on Talk One shot on Talk Continuous on GET One shot on GET Continuous on X One shot on X Continuous on External Trigger One shot on External Trigger Clear SRQ mask Reading overflow Not used Staircase done Reading done Ready Error 39 EO and Bus Hold ott EE Send EOI hold off on X Do not send EOI hold off on X Send EOI do not hold off on X Do not send EOI do not hold off on No terminator STATUS COMMANDS Digital Calibration Annn nnE nn Calibration value using exponent Self Test and NVRAM Storage JO Perform self test J1 J15 No operation J16 Charge injection compensation J17 J18 No operation 40 Send machine status word Send error status word Send data status word Send delay time Send high and low limits of voltage source Send voltage source level If in staircase waveform will change to DC pause Only changing capacitance correction will cause waveform to change to DC NOTE If a measurement is changed to DC the output voltage is moved to the next level where the ef fective step is off in order to preserve the direction of the measurement 41 POWER UP DEFAULT CONDITIONS Dispiay Function Range Zero Check Supp
3. 034A HPIB Interface and a 9872A extended UO ROM DIRECTIONS 1 2 With the power off connect the Model 595 to the 98034A HPIB interface installed in the 9825A From the front panel set the primary address of the Model 595 to 28 Enter the lines in the program below using the STORE key after each line Line numbers are automatically assigned by the 9825A Press the 9825A RUN key and type in the desired com mand string at the command prompt For example to place the instrument in the current function and 200zA range type in F1R8X and press the CONT key The instrument reading string will then appear on the computer print out A typical display is NIVX 0 59500E 4 00 000 59 PROGRAM B BIM A 251sE L 20 1 DEU s 5355 d 2 EEN S953 SENT COMMAND STRIHG PS 4URT 5951s Bs DRED SSS ta FET At p yr GTOS COMMENTS Dimension data strings Define 595 at ad dress 28 Place 595 in remote Prompt for command string Address 595 to listen send string Address 595 to talk input data Print data string on printer Repeat NOTE For conversion to numeric variable modify the pro gram as follows PRT VALAIS 60 DEC LSI 11 The following program sends a command string to the Model 595 from a DEC LSI 11 minicomputer and displays the instrument reading string on the DEC CRT terminal The LSI 11 must be configured with 16K words of RAM
4. 1 means that corrected capacitance has been enabled 2 To toggle corrected capacitance on or off press either one of the voltage source ADJUST buttons 3 To exit press SHIFT then EXIT Note that the Model 595 always powers up with corrected Capacitance off IEEE 488 Address This program is used to display or change the IEEE 488 ad dress The Model 595 is set to address 28 at the factory The following addresses or codes may be used with the Model 595 Address O 30 Normal IEEE 488 address 40 41 Talk only Data to printer 42 43 Talk only Data to plotter OPERATION 1 Press the MENU button until IEEE appears on the display 2 Press either ADJUST A or V button until the desired value is shown on the display 3 Press SHIFT then EXIT to return to normal operation Note that the IEEE 488 address is stored in permanent memory 24 Display Alpha or Numeric The display program sets the Model 595 to display in either alpha or numeric characters OPERATION 1 Press MENU until dISP appears on the display if dISP u appears then the display is set to alpha characters If dISP 6 appears then the display is set to the numeric function 2 Press either of the voltage source ADJUST buttons to toggle the display between the alpha and numeric functions 3 To store the selection and leave the program press SHIFT then EXIT Note that the display mode selected is stor
5. 1 goad ide ce Bee Wai eae 63 CONDENSED SPECIFICATIONS CAPACITANCE Maximum Aliowable Accuracy Q t at Half Range C Reso 1 Year 18 28 C Delay Time 0 07sec Range lution rdg counts Step V 0 1V 200pF 10fF 1 0 10 90 000pA 2nF 100fF 08 2 0 900nA 20nF 1pF 0 6 2 9 000nA Exclusive of noise for Step V 0 05V and Delay Time one second CURRENT Temperature Accuracy Coetficient Reso 1 Year 18 28 C 0 18 C amp 28 40 C Range lution rdg counts rdg counts C 20pA 1fA 1 5 14 0 15 3 200pA 10fA 15 2 015 0 3 2nA 100fA 0 25 6 0 015 3 20nA TpA 0 25 1 0 015 0 3 200nA_ 10pA 01 4 0 01 3 2A 100pA 07 1 0 01 0 3 20A 1nA 01 4 0 01 3 200unA 10nNA Di 1 0 01 0 3 When properly zeroed VOLTAGE SOURCE OUTPUT 20 00V to 20 00V in 0 01V increments ACCURACY 1 YEAR 18 28 C 0 2 10mV MAXIMUM OUTPUT CURRENT 2mA active current limit at lt 4mA ANALOG OUTPUTS C I OUTPUT LEVEL 1V represents 10 000 display counts on X1 gain 1000 display counts on X10 gain VOLTAGE OUTPUT LEVEL 1V represents 10V on voltage source output MAXIMUM OUTPUT VOLTAGE 2V GENERAL MAXIMUM INPUT 30V peak DC to 60Hz sine wave MAXIMUM COMMON MODE VOLTAGE 30V maximum DC to 60Hz sine wave ENVIRONMENT Operating 0 to 40 C relative humidity 70 non condensing up to 35 C Storage 25 to 65 C WARM UP 2 hours to rated accuracy except input bias current lt 10
6. 52Q0PO0T6G0D000M00K0Y0 OEFAULT CONDITIONS SHOWN ERROR STATUS Ul MODEL NO onc IDDCO NO REMOTE conFLIcT TRIGGER NUMBER SELF TEST PREF Ix OVERRUN 5 1 0 t70 1 0 00 DATA STATUS u2 VOLTAGE SOURCE STORAGE MODEL NO TEMPORARY CAL BIT ENABLED 1 0 1 0 00000 lt TERH gt lt TERM gt SAYOM SNLVLS IEEE 488 ADDRESS SELECTION A front panel program is used to display and change the IEEE 488 primary address of the Model 595 The instru ment may be set to primary addresses 0 to 30 and IEEE 488 codes 40 to 43 as long as no other instrument on the bus is set to the same value To select an IEEE 488 address or code simply press the MENU button until IEEE appears Then press either voltage source ADJUST button until the desired value appears Press SHIFT then EXIT to store the value 46 TALK ONLY OPERATION In Talk Only operation the instrument will control the bus and output data to a listening device No controller may be on the bus The listening device may be a listen only printer or an addressable printer with its address set to 3 When the instrument is in Talk Only the front panel TALK indicator light will turn on To place the instrument in Talk Only perform the following steps 1 Using the front panel PROGRAM MENU button display the present IEEE 488 address value 2 Using the voltage source ADJUST buttons select one of the following Taik Only parameters A 40 Talk Only with prefix on dat
7. CTIONS The Model 595 is supplied with two Model 4801 Low Noise BNC Cables Use these cables or similar low noise cables when making measurements with the Model 595 A typical capacitance measurement can be made with the test set up illustrated in Figure 2 which shows a packaged Capacitor in a test box MEASUREMENT SETUP FOR CAPACITOR IN TEST BOX VOLTAGE C I SOURCE LOw NOISE METER OUTPUT COAX CABLE INPUT BNC CONNECTORS METAL TEST BOX INSULATOR TEFLON KEL F Figure 2 Typical Capacitance Measurement Connections 29 Refer to Figure 3 to see how to make current measurement connections The set up in Figure 3 shows connections made with the Model 595 s voltage source VOLTAGE Gail d SOURCE METER OUTPUT INPUT MODEL cn REAR HI PANEL GUARD METAL TEST BOX Figure 3 Typical Current Measurement Connections 30 EXAMPLE MEASUREMENTS The following examples describe typical capacitance and current measurements For more information about these measurements including CV and IV examples refer to the Model 595 Instruction Manual CAPACITANCE MEASUREMENT Follow the steps outlined below to make a capacitance measurement The first column indicates what button should be pressed the second column shows what will be displayed on the Model 595 and the last column describes the results of the action taken In this example the device under test DUT has a value of about 500pF The initia
8. KEITAHLEY Model 595 Quasistatic CV Meter Quick Reference Guide A GRE Zeg CAS U ARSO C ON FD Et INTRODUCTION This reference and programming guide contains condensed specifications descriptions of the various features and in formation for using the Model 595 Also IEEE 488 program ming information and several example programs written for commonly used controllers are also included to get the Model 595 up and running on the bus The Model 595 Quasistatic CV Meter measures capacitance using a unique feedback charge method This method cor rects capacitance readings for background leakage current A built in IEEE 488 interface plotter driver and labeled grid program enable the Model 595 to plot IV or quasistatic CV curves for a variety of semiconductor materials and components 1986 Keithley Instruments Inc Instrument Division Cleveland Ohio U S A Document Number 595 903 011 Rev A 1 TABLE OF CONTENTS CONDENSED SPECIFICATIONS 3 MODEL 595 FEATURES 7 20 FRONT PANEL PROGRAMS 21 26 MEASUREMENT CONNECTIONS 29 34 IEEE PROGRAMMING 35 49 PROGRAMS 50 IBM PC Or XT is assess Oy wees tov wd Bae ear 51 POE LZ sus geste td eat Ri tient a no SG KO 53 l a e e E yu a u S wau Sama an Ra Ny S apay 55 cae SEENEN 57 FY DO EES 59 DEC LONT ere ard eth toe Sts Fe enacts dente 61 PEWVRCBM 200
9. OMMENTS l CLE CB NAS s GFIBMB CALL IEF IND CHAS PERDOS Z HA DEUS CALL IEF INE CNASs RO 49 Ux 2e CALL IEFAL rMS33S2 KR DpUzZe Hipz CALL LPPOKE i PRIAN LU Gp Wx 1 CALL IESRE BEDAN sizi rB INPUT COMMANDE STRINGS s CHEE Sa IF CMD EXIT THEN 15 26 IF CHD THEN cp 146 CALL IEHRTiMS I CMDS 3 118 RUS SPACES 1802 124 CALL IBRDCMS9Sxs RDS 136 PRINT RLS 146 GOTO eg 150 s CALL TEONLEMS95 s UX 6B CALL IEQHL ERDAS Lo 1 176 EHI Clear screen Find board descriptor Find instrument descriptor Set primary address to 28 Set timeouts Set REN true Prompt for command See if program is to be halted Check for null input Address 595 to listen send string Define reading input buffer Address 595 to talk get reading Display the string Repeat Close the instrument file Close the board file NOTE For conversion to numeric variable make the follow ing changes 126 RD LALIMIDEERDS 331495 125 PRINT ET 52 APPLE Il APPLE Il IEEE 488 INTERFACE The following program sends a command string to the Model 595 from an Apple Ii computer and displays the in strument reading string on the computer CRT The computer must be equipped with the Apple II IEEE 488 interface installed in slot 3 DIRECTIONS 1 2 With the power off connect the Model 595 to the IEEE 488 interface installed in the Apple computer Using the front pan
10. PHTSTF ir IMPUTs TE CALL IBUNT GETO 12 FHT cit 62 FORMAT Les TEST SETUF COMMENTS Turn off IB errors Allow 5 error 15 s Allow 1 second bus timeout Set line feed as terminator Turn on remote input primary address Prompt for command string Program instrument Address 595 to lis ten send string Get data from instru ment Untalk the 595 Repeat PET CBM 2001 The following program sends a command string to the Model 595 from a PET CBM 2001 computer and displays the instrument reading string on the computer CRT As the PET CBM computer has a standard IEEE 488 interface no additional equipment is necessary DIRECTIONS 1 2 With the power off connect the Model 595 to the PET CBM IEEE 488 interface Using the front panel program feature set the primary address of the Model 595 to 28 Enter the lines of the program below using the RETURN key after each line is typed Type RUN and press the RETURN key Type in the desired command string at the command prompt For example to place the instrument in the current function and 200zA range type in F1R8X and press the RETURN key The instrument reading string will then appear on the CRT A typical display is NIVX 0 59500E 12 00 000 63 PROGRAM COMMENTS 1 OPEN 1 28 Open file 1 primary address 28 26 IHPUTr COMMAND STRING 2 E 34 PRINT is BS 4 INPUT H1 A oH IF ST Z THEN Ap 66 P
11. RINT oz r GOTO Da Prompt for input command string Address 595 to listen send string Address 595 to talk input data If bus timeout input again Display reading string Repeat NOTES 1 H conversion to numeric variable is required modify the program as follows 68 A VALCMIDS ASs 5314535 T PRINT A SD GOTO 26 2 The PET INPUT statement terminates on a comma Thus when reading Model 595 command strings which include commas you should input each portion of the string into a separate string variable For example in the G2 default mode to obtain and display the channel number the program above can be modified as follows 40 INPUT L A CS 64 PRINT AF s CS Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITAHLEY Keithley Instruments Inc 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 e Fax 440 248 6168 1 888 KEITHLEY 534 8453 www keithley com Copyright 2000 Keithley Instruments Inc Printed in the U S A 04 2001
12. Y SOURCE to select the programrned output voltage 2 Press either ADJUST button to change the programmed output voltage 3 To quickly adjust these voltage source parameters press SHIFT then the appropriate ADJUST button DISPLAY SOURCE The DISPLAY SOURCE feature displays the programmed output voltage On power up the Model 595 is programmed for O OOV The indicator light will flash when the output current ex ceeds 2mA The current limit will prevent the output cur rent from exceeding 4mA OPERATION 1 Press the DISPLAY SOURCE button to view the pro grammed output voltage 2 Press the voltage source ADJUST A or Y button to in crease or decrease the programmed output voltage 3 Use to change the polarity of the voltage source value when displayed The nErr message will appear if a sign change conflicts with the voltage source limits 7 WAVEFORM Block WAVEFORM L oFrFFr o ov Joc ister don SELECT The Model 595 is capable of sourcing either DC or step ped voltage to the device under test The SELECT A Y buttons are used to select the voltage waveform OFF 0 0V OFF sets the voltage source to 0 00V 0 01V This can be used to set the voltage source to zero without having to use the ADJUST buttons If capacitance is selected an OFF message will appear on the display since a step is necessary to measure capacitance 18 DC When DC is selected the voltage source will outpu
13. a string De NCV1I 1 23456E 12 01 820 1 23400E 12 B 41 Talk Only without prefix on data string je 1 23456E 12 01 820 1 23400E 12 3 Press the SHIFT button and then the program EXIT but ton The instrument will start talking when the measure ment sequence is started 4 Change the IEEE 488 code or go to one shot to stop talking 47 IEEE Plot In JEEE Plot the instrument will output voltage and capacitance Q t or current data to an JEEE 488 plotter for the purpose of plotting the CV IV or Q t V curves of stair case measurements A grid can also be drawn with the labels corresponding to the selected function range voltage source limit and Y Hi Y Lo values of the Model 595 To use IEEE Plot connect an IEEE 488 plotter to the bus connector of the Mode 595 set plotter address to 5 before power up and perform the following steps 1 From the front panel set up the Model 595 to make stair case measurements capacitance or current First com plete the configuration of the voltage source and meter block for the measurement Do not start the staircase at this time 2 Use the program MENU button to display the present IEEE address of the instrument 3 Using the voltage source ADJUST buttons set the ad dress to 42 or to 43 to reverse the direction of the X axis Install plotter pen 1 4 Press the SHIFT button and then the program EXIT button 5 Plot a grid as follows A Press t
14. am sends a command string to the Model 595 from an HP 85 computer and displays the in strument reading string on the computer CRT The com puter must be equipped with the HP82937 GPIB Interface and an UO ROM DIRECTIONS A With the power off connect the Model 595 to the HP82937A GPIB interface installed in the HP 85 computer Using the front panel program feature set the primary address of the Model 595 to 28 Enter the lines in the program below using the END LINE key after each line Press the HP 85 RUN key and type in the desired com mand string at the command prompt For example to place the instrument in the current function and 200zA range type in F1R8X and press the END LINE key The instrument reading string will then appear on the CRT A typical display is NIVX 0 59500E 4 00 000 55 PROGRAM 14 DIM At 4o E 4A CH REMOTE 728 Z DISP COMMAND STRING 46 INPUT At Si OUTPUT Pos AF Th GI FHTER 728 E L rH DISF BS Sp GOTO 36 94 FHTI COMMENTS Dimension strings Place 595 in remote Prompt for command Input command string Address 595 to listen send string Address 595 to talk input reading Display reading string Repeat NOTE For conversion to numeric variable change line 70 as follows fe DISP UAL CECS 56 HP 9816 The following program sends a command string to the Model 595 from a Hewlett Packard Model 9816 computer and d
15. and an IBV 11 IEEE 488 interface The software must be configured with the IB software as well as FORTRAN and the RT 11 operating system DIRECTIONS 1 Using the front panel program feature set the primary address of the Model 595 to 28 2 With the power off connect the Model 595 to the IBV 11 IEEE 488 interface cable 3 Enter the program below using the editor under RT 11 and the name IEEE FOR A Compte using the FORTRAN compiler as follows FOR TRAN IEEE 5 Link with the system and IB libraries as follows LINK IEEE IBLIB 6 Type RUN IEEE and press the RETURN key 7 The display will read ENTER ADDRESS 8 Type in 9 and press the RETURN key 9 The display will read TEST SETUP 10 Type in the desired command string and press the RETURN key For example to program the instrument for the current function and 200zA range type in FIR8X and press RETURN 11 The instrument data string will appear on the computer display A typical display is NIVX 0 59500E 12 00 000 61 PROGRAM FROGRAM IEEE INTEGERS FF I KIF LOGICAL 1 MSG Z079 IMPUTCSA gt DOS 1 1 11 CALL IESTER CONTINUE CALL IESTEF 15 5 CALL IETIMNG deg gt Tut CALL IBTERMS 154 CALL IEF EH 4 TYPES S FORMAT les EHTEF ADDRESS 53 ACCEPT 14 PRIADR 1H FORMAT Te 12 TYPE 15 OH dE CALL GETSTR 5 MS r21 CALL IESEDI MSG s 15 PRIADRF gt I ITBRECHW INPUT 20s FPF I RDF IMFUT C I 1 N CALL
16. ation can be found in the instruction manual 50 IBM PC or XT KEITHLEY MODEL 8573A INTERFACE The following program sends a command string to the Model 595 from an IBM PC or XT computer and displays the instrument reading string on the CRT The computer must be equipped with the Keithley Model 8573A IEEE 488 Interface and the DOS 2 00 operating system Model 8573A software must be installed and configured as described in the Model 8573A instruction manual DIRECTIONS 1 2 With the power off connect the Model 595 to the IEEE 488 interface installed in the IBM computer Using the front panel program feature set the primary address of the Model 595 to 28 Type in BASICA on the computer keyboard to get into the IBM interpretive BASIC language Place the interface software disk in the default drive type LOAD DECU and press the return key Add the lines below to lines 1 6 which are now in memory Modify the address in lines 1 and 2 as describ ed in the Model 8573A Instruction Manual Run the program and type in the desired command string For example to place the instrument in the current func tion and 2004A range type in FiR8X and press the return key The instrument reading string will then appear on the display For example the display might show NIVX 0 59500E 4 00 000 To exit the program type in EXIT at the command prompt and press the return key 51 PROGRAM C
17. ation on these secondary functions can be found in the following text METER Block METER CURRENT RANGE Jo Cla CAPACITANCE Qr L Joo C jv SUPPRESS ZERO CHECK CORR Jo Ja C Co STORE Co jo MEASUREMENT FUNCTIONS CURRENT The CURRENT button places the Model 595 in the current measurement function Any one of eight ranges 20pA to 200LA may be used with this function OPERATION Enable ZERO CHECK Press CURRENT function button Select the appropriate range ZERO CORRect the instrument if it is not reading zero it is best to do this on the 20pA range 5 Connect the signal to the rear panel and C METER INPUT 6 Turn ZERO CHECK off gt GA CAPACITANCE Q t The CAPACITANCE button places the Model 595 in the capacitance measurement function There are three capacitance ranges 20nF 2nF and 200pF OPERATION 1 Enable ZERO CHECK 2 Press CAPACITANCE button 3 Select the desired range 4 Connect the device to be measured between the rear panel VOLTAGE SOURCE OUTPUT and C I METER INPUT 5 Turn ZERO CHECK off Q t displays the current flowing through the device at the end of the delay time Note the capacitance function must be enabled to select Q t OPERATION 1 Follow steps 1 5 under capacitance 2 Press SHIFT then Q t to display Q t SUPPRESS The SUPPRESS button allows the user to compensate for external offsets present in the test set up by sub
18. cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test sys tem and discharge any capacitors before connecting or dis connecting cables or jumpers installing or removing switching cards or making internal changes such as install ing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safe ty of the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operat ing information and as shown on the instrument or test fix ture panels or switching card When fuses are used in a product replace with same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connec tions for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while pow er is applied to the device under test Safe operation requires the use of a lid interlock If Bo J is present connect it to safety earth ground using the wire recommended in the user
19. ce FO Current F1 200pF 20pA 2nF 200pA 20nF 2nA 20nA 200nA 2 pA 20 pA 200 A 35 Zero check off Zero check on Zero check on and zero corrected Suppress off gt Suppress on using new value Filter off Filter 1 Filter 2 Filter 3 DC measurements VOLTAGE SOURCE COMMANDS High Limit Set high limit of voltage source where nn nn 20 00V to 20 00V Lan nn Set low limit of voltage source L 20 where nn nn 20 00V to 20 00V Voltage Source Vnn nn Set voltage source bias level VO where nn nn LO limit to HI limit 36 Step Voltage 1OmV step 20mvV step 50mvV step 100mvV step 10mV step 20mvV step 50mvV step 100mV step Delay Time Set delay time for staircase and square wave where nnn nn 000 07sec to 199 99sec WAVEFORM COMMANDS Waveform Voltage source off 0 0 volts DC output voltage source level Square wave output voltage source step V Staircase output voltage source step V 37 READING OUTPUT COMMANDS Capacitance normalization off Capacitance normalization on Take new Cs value Capacitance displayed not corrected Q t displayed capacitance not corrected Capacitance displayed capacitance corrected Q t displayed capacitance corrected TERMINATE ON EACH READING Reading prefix Reading no prefix Plotter prefix Plotter no prefix TERMINATE ON EACH NON STAIRCASE READING Reading prefix
20. documentation The AN symbol on an instrument indicates that the user should refer to the operating instructions located in the man ual The A symbol on an instrument shows that it can source or measure 1000 volts or more including the combined effect of normal and common mode voltages Use standard safety precautions to avoid personal contact with these voltages The WARNING heading in a manual explains dangers that might result in personal injury or death Always read the as sociated information very carefully before performing the indicated procedure The CAUTION heading in a manua explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replace ment components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component Note that selected parts should be purchased only through Keithley Instru ments to maintain accuracy and functionality of the prod uct If you are unsure about th
21. e 0 07sec to 199 99sec is used to allow the device under test to respond to the change in step voltage before the measurement Delay time is important when performing capacitance and CV measurements on MOS capacitors Delay Time must be long enough for the device to reach equilibrium It is not as critical when performing simple Capacitance current or IV measurements Figure 1 shows in greater detail where the delay time oc curs The total time of the voltage step is delay time plus T1 T1 is the period necessary for the Model 595 to finish the measurement and is typically 0 04sec The total time of the voltage step delay time plus T1 time is called the step time 15 Q gt Q3 fto Q1 ty ral t DELAY TIME RELEASE DISCHARGE INTEGRATOR INTEGRATOR DISCHARGE 23 0 03 0 SE EE Vti Q L DELAY TIME t CXe correcten CXT STEPy READING VOLTAGE Wil STEPV 2 Figure 1 integrator Charge vs Time Curve for a Capacitance Measurement OPERATION 1 Press the DELAY TIME button to view present delay time 2 Press ADJUST A or Y button to increment or decrement the time On power up delay time is set to O 07sec ADJUST A Y The voltage source ADJUST buttons are used to increase or decrease the values of A LIMIT Y LIMIT STEP V DELAY TIME and the programmed output voltage The ADJUSTs are also used with the front panel programs 16 OPERATION 1 Select the parameter to be adjusted i e Press DISPLA
22. e applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not ap ply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes con taminated and operation is affected the board should be re tumed to the factory for proper cleaning servicing SAFETY PRECAUTIONS 1 Before operation ground the instrument through a prop erly earth grounded power receptacle 2 Before servicing disconnect the instrument from the power line and all other equipment Consult the Model 595 Instruction Manual for service information 3 Do not touch any terminals while the instrument is turned on or connected to any test equipment WARNING The maximum common mode input voltage the voltage between input low and chassis ground is 30V peak Exceeding this value may create a shock hazard CAUTION The maximum voltage between input high and input low is 30V peak Exceeding this value may cause damage to the instrument Current inputs that exceed 3mA may be erroneously displayed as an on scale reading DISPLAY MESSAGES Message Description
23. ed in permanent memory Plotter Parameters The following front pane programs can only be accessed from the menu when the Model 595 s IEEE 488 address has been set to code 42 or 43 Grid The grid program allows the user to plot a grid on an HPGL compatible plotter HP7470A or equivalent with the Model 595 acting as a controiler The plotter must be set to ad 25 dress 5 The grid will be plotted according to the function range and limits that the Model 595 is currently set to at the time the grid is initiated OPERATION 1 With the IEEE 488 code set to 42 or 43 press the MENU button until the message Grid appears on the display 2 Press either of the voltage source ADJUST buttons and the plotter will draw and label the grid The front panel buttons are inoperable while the grid is being drawn Y HI Y Lo The Y HI Y Lo programs are used to set the upper and lower plot limits of the Y axis The limits range between 2 0 in 0 1 increments with 2 0 corresponding to a full 20 000 count display and 0 1 corresponding to 1000 counts OPERATION 1 With the IEEE 488 code set to 42 or 43 press the MENU button until the message Y HI or Y Lo appears 2 Press the ADJUST A or V button until the desired value is displayed 3 Press SHIFT then EXIT to store the value and leave the program Note that the instrument will default to Y HI 2 and Y Lo 2 on power up 26 REAR PANEL FEATURES The foll
24. el program feature set the primary address of the Model 595 to 28 Enter the lines in the program below using the RETURN key after each line Run the program and type in the desired command string at the command prompt For example to place the in strument in the current function and 200gA range type in FIR8X and press the return key The instrument reading string will then appear on the CRT A typical display is NIVX 0 59500E 4 00 000 53 PROGRAM 16 2 CHRS 262 Z INFUT s COMMAND STRING 1 E Z PR S 44 INS 26 PRINT RA BB PRINT UT j Z BF 7a PPINT LF17 20 PRINTS RD EHE C3S2 E 81 D st CRE S2 GET R SS FRIHT A 24 IF ASC i i 1I3 THEN GOTO 94 35 C C3 AF Se GOTO 82 94 PRINT e SLITS 104 FREQ 118 IN G 126 PRINT CS 134 GOTO Z Jr NOTES COMMENTS Terminator Prompt for and enter string Set output to IEEE bus Define input from IEEE bus Remote on Address 595 to listen send string Line feed on Strings initially empty Read a character Echo the character End of input if CR Add characters to string Untalk the 595 Define output to CRT Define input from keyboard Display reading string Repeat 1 If conversion to numeric variable is required make the following changes 126 CHUALEMIDECCSs S 1452 125 PRINT 2 The Apple l INPUT statement terminates on commas 54 HP 85 The following progr
25. fA after 2 hours lt 5fA after 8 hours at 23 C POWER 105 125V or 210 250V internal switch selected 50Hz to 60Hz 15VA max 90 110V and 180 220V ver sion available upon request Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Al though some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and fol low all installation operation and maintenance information carefully before using the product Refer to the manual for complete product specifications If the product is used in a manner not specified the protec tion provided by the product may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine
26. he program MENU button until the Grid message is displayed 48 B Tostart the grid plot press one of the voltage source ADJUST buttons A grid will be plotted and labels will be placed on the X and Y axes The labels on the X axis correspond to the programmed high and low voltage limits The labels on the Y axis corres pond to the Y HI and Y Lo program settings Y HI 2 corresponds to a full 20 000 count display while Y HI 47 corresponds to a 1000 count display Adjust Y HI and Y Lo to crop the plot 6 Press the SHIFT button then program EXIT The measure ment plot will begin when the staircase is started 7 To pause and restart the plot press SELECT A to pause and SELECT W to continue NOTES 1 The display can be toggled between capacitance and O t while plotting without affecting the plot 2 Changing functions ranges zero check or voltage source settings will cause the staircase and plot to stop When the staircase is restarted keep in mind that the labels on the plot correspond to the original function range and voltage limits but the new plot parameters correspond to the new Model 595 settings 49 PROGRAMS The following programs are designed to be a simple aid to the user They are not intended to suit specific needs Each program is designed to send a device dependent command string to the instrument and obtain and display an instru ment reading string Detailed programming inform
27. isplays the instrument reading string on the computer CRT The computer must be equipped with the HP82937 GPIB Interface and BASICA 2 0 DIRECTIONS 1 With the power off connect the Model 595 to the HP82937A GPIB interface installed in the 9816 computer Using the front panel program feature set the primary address of the Model 595 to 28 Type EDIT and press the EXEC key Enter the lines in the program below using the ENTER key after each line Press the 9816 RUN key and type in the desired com mand string at the command prompt For example to place the instrument in the current function and 200A range type in F1IR8X and press the ENTER key The instrument reading string will then appear on the CRT A typical display is NIVX 0 59500E 4 00 000 57 PROGRAM COMMENTS S DIM EB 501 14 REMOTE 728 Place 595 in remote 2A IHPLIT COMMAND STRING Prompt for and input At command 36 OUTPUT 722 AF Address 595 to listen send string dp ENTER 722 BS Address 595 to talk input reading A PRIWT BS Display reading String 6G GOTO 24 Repeat ra END NOTE For conversion to a numeric variable change the pro gram as follows 44 ENTER P2538 S PEIHT B 58 HP 9825A Use the following program to send a command string to the Model 595 from a Hewlett Packard Model 9825A and display the instrument reading string on the computer printer The computer must be equipped with the HP98
28. l measurement configuration is power OFF with connections as illustrated in Figure 2 The circuit is broken at the capacitor under test je the probe is lifted from the wafer Button Press Display Remarks 1 POWER rr Memory test RAM r o Memory test ROM 0 000 nF 2OnF capacitance range ZERO CHECK on square wave 2 ZERO CHECK 0 001 nF ZERO CHECK off measuring stray capa citance of fixture 3 RANGE Y 0012 nF Go to range of desired resolution DUT will be about 500pF 31 4 SUPPRESS 0000 nF 5 ZERO CHECK 0000 nF 6 Connect 4562 nF capacitance in fixture 7 ZERO CHECK 8 SHIFT then nF STORE Co 4562 nF 9 C Co 1 0000 10 SHIFT then 0000 nA Q t 11 CAPACITANCE 1 0000 12 C Co 4562 nF SUPPRESS on stray value will be sub tracted from all readings ZERO CHECK on while connecting device Display is value of D U T minus fixture strays ZERO CHECK off to resume measurement This value is stored as Co for normaliza tion of capacitance The measured capacitance is nor malized to Co The magnitude of current through the DUT at the time of each capacitance measurement De after delay time NOTE Suppress and Co apply only to the capacitance measure ment not to Q t Return to normalized capacitance display C Co off This value depends on the capacitor under test any strays present etc 32 CURRENT MEASUREMENT This example uses a 1M0 resist
29. ons to the device under test Zero check is also used with zero correct to cancel internal offsets in the Model 595 Zero correction is not applicable to capacitance or Q t but should be performed for the cur rent function on the 20pA range The zero correct value is stored in permanent memory 11 OPERATION Press the CURRENT button and select the 20pA range 2 Press the ZERO CHECK button and be sure the ZERO CHECK indicator light is on The Model 595 input amplifier is now configured to read its own internal offset 3 Press SHIFT then CORRect to zero correct the instru ment Note that if zero check was not enabled the zero correct operation will enable zero check first 4 The proper range may now be selected and ZERO CHECK released to make a measurement 12 VOLTAGE SOURCE Block VOLTAGE SOURCE A LIMIT PRESET ADJUST jo C Ia W LIMIT PRESET jo STEP V asp D DELAY TIME DISPLAY SOURCE FLASHES L JO C jinas 2mA MAX I LIMIT LIMIT PRESET The A Y LIMIT buttons set the maximum and minimum voltages that the voltage source will output to protect the device under test from destructive voltage levels On power up the limits are set to 20V PRESET allows the user to quickly set the output voltage value to the maximum or minimum limit without using the ADJUST buttons 13 OPERATION 1 Press the LIMIT or Y button to display the upper or lower voltage limit value 2 Use
30. or in a test box The voltage source is set to 1V to cause 1pA input current to flow I 1V MQ 14A The initial measurement configuration is POWER off with input cables attached to the Model 595 The input circuit is temporarily disconnected at the test box on the voltage source output side Button Press Display 1 POWER r r r o 0 000 nF 2 CURRENT 0002 nA 3 RANGE Y 0 002 pA press twice 4 SHIFT then 0 000 pA CORR 5 RANGE A 0000 pA 33 Remarks Memory test RAM Memory test ROM 20nF capacitance range ZERO CHECK on square wave Place unit in CUR RENT function Set unit to 20pA range Corrects for internal offsets Go to RANGE of desired resolution press five times for this example CONNECT RESISTOR 6 SELECT 0000 pA Select DC waveform 7 DISPLAY 00 00 V Displays voltage SOURCE sourced 8 ADJUST A 01 00 V Adjust voltage source to 1V out 9 DISPLAY O000 pA Return unit to meter SOURCE display 10 ZERO CHECK 9835 pA Read value from display This value depends on the resistor under test leakage cur rents etc Variation Also try using SUPPRESS on readings and ad just voltage source to 1 5V 34 IEEE 488 PROGRAMMING Execute device dependent commands received since last A METER COMMANDS a Meter Voltage source High limit of voltage source Low limit of voltage source Step voltage Delay time Capacitance Current Capacitan
31. owing features are found on the rear panel of the Model 595 AC RECEPTACLE Connects to three wire line cord LINE FUSE Provides protection on the AC power line cord IEEE 488 Connects the instrument to the IEEE 488 bus IEEE 488 interface functions are marked above the connector GUARD Provides binding post connection for shields or the LO terminal of an external voltage source C I METER INPUT Teflon insulated BNC Inner conductor is input HI outer conductor is GUARD VOLTAGE SOURCE OUTPUT Isolated BNC connector In ner conductor is output Hi outer conductor is GUARD Voltage is sourced from this output to bias devices when making current or capacitance measurements Referenced to GUARD C I ANALOG OUTPUT 5 way binding posts that correspond to meter display C Q t or l Referenced to IEEE common V ANALOG OUTPUT 5 way binding posts that correspond to voltage at which C Q t or measurement was taken Referenced to IEEE common PEN LIFT Two 5 way binding posts pen lift and IEEE com mon Normally a TTL high output pen up TTL low during a staircase waveform pen down Minimizes recorder pen blotting 27 METER COMPLETE OUTPUT Isolated BNC connector pro vides negative going TTL output pulse after a reading is completed Referenced to IEEE common EXTERNAL TRIGGER INPUT Isolated BNC connector Negative edge triggered TTL level Referenced to IEEE common 28 MEASUREMENT CONNE
32. procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the manual The procedures ex plicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits and perform safe installations and repairs of products Only properly trained service personnel may perform installation and service procedures Keithley products are designed for use with electrical sig nals that are rated Installation Category I and Installation 5 02 Category II as described in the International Electrotechni cal Commission IEC Standard IEC 60664 Most measure ment control and data I O signals are Installation Category I and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Installa tion Category II connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category J sources unless otherwise marked or described in the Manual Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSD states that a shock hazard exists when voltage levels greater
33. ress Filter High Limit Low Limit Voltage Source Step Voltage Delay Time Waveform C Co Modifiers Capacitance Prefixes Analog Output Triggers SRO Mask EOI Terminator 42 Meter Capacitance 20nF 2nA Zero check on Suppress off Filter off High limit 20V Low limit 20V Zero voltage progammed 50mvV step 000 07sec Square wave output voltage source step V Capacitance nor malization off Capacitance dis played not corrected Reading prefix Autopen X1 gain Continuous trig gered by external trigger Clear SRO mask Send EOI hold off on X CR LF t CAPACITANCE PREFIX CAPACITANCE qA DATA ER Z 0 59500 12 301 826 1 23400 E l2 NeNORMAL MANTISSA EXPONENT READING MANTISSA EXPONENT VOLTAGE O OVERRANGE Z ZERO CHECK CVI CAPACITANCE VOLTAGE Q CURRENT CURRENT DATA STAING 0 59500 E i MANTISSA EXPONENT READING Se YOLTAGE O OVERRANGE Z ZERO CHECK I XeCURRENT VOLTAGE PLOTTER MEASUREMENT FORMAT PD 01825 e 12346 PD PEN DUNN VOLTAGE 25 G6 F1 QUAING A 0 69500E 12 12 230 0 69602 12 230 STAIRCASE IF WAVEFORM IS DC OR OFF CAPACITANCE READING IS 999999999999 IVWHO4 Viya SERIAL POLL STATUS BYTE ANO0 9NIGY33 AQY3 3NOG JSYJJIYIS I JOJ I AQNO 3148 110d TY1335S SS AB Dap AOT4YXJAD 9N10Y3 SNI LHOTSA WwHiO3d NOI 11SOd 118 lt lt MACHINE STATUS U0 S95F0R3ZIN0C0w2
34. t a con stant voltage equal to the voltage source programmed value The DC waveform may be employed for current measurements f the capacitance function is selected the DC message will appear on the display since a step is necessary to measure capacitance STEP The STEP waveform is the fundamental signal required for Capacitance measurements Two STEP waveforms are available square wave and staircase The instrument powers up with square wave enabled Select square wave for Capacitance and current measurements at specific test voltages and staircase for CV IV and Q t V measurements The characteristics of this waveform are tailored using the controls within the VOLTAGE SOURCE block 19 PROGRAM PROGRAM MENU EXIT MENU EXIT The Model 595 has several features available through front panel programs These programs may be accessed by press ing the MENU button Every time the MENU button is press ed a different program will be displayed Prograrn parameters are changed with the voltage source ADJUST buttons Exit the program mode and store the parameters by press ing the SHIFT then EXIT buttons The instrument will return to the previous display mode 20 FRONT PANEL PROGRAMS Frequency The line frequency program is used to set the Model 595 to the available line frequency This program is accessed as part of the calibration procedure and does not usually appear in the menu Refer to Section 8 of
35. than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at a times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be ex posed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operat ing at or above 1000 volts no conductive part of the cir cuit may be exposed Do not connect switching cards directly to unlimited power cir cuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument make sure the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main in put power disconnect device must be provided in close prox imity to the equipment and within easy reach of the operator For maximum safety do not touch the product test
36. the display will read triG 1 3 Press SHIFT then EXIT to exit the trigger program 4 The Model 595 will now require a trigger to begin measurements bus external or press SHIFT then Note that the Model 595 always powers up in continuous trigger 22 Analog Output X1 X10 The analog output program allows the user to set the CI analog output gain to X1 or X10 X1 is used for readings over 10 full range and X10 is used for readings less than 10 of full range OPERATION 1 Press MENU until Aout is displayed Aout 1 means X1 gain Aout 10 means X10 gain 2 Press either of the voltage source ADJUST buttons to toggle gain between X1 and X10 3 Press SHIFT then EXIT to leave the analog output program Note that the instrument always powers up in X1 gain Corrected Capacitance The corrected capacitance program uses the Q t measure ment to cancel the effects of DC error leakage currents on capacitance readings It must be determined that the device under test has completely responded to the change in voltage used in the measurement and that the Q t cur rent is only related to DC errors such as leakage current or low oxide resistance For proper use of this program refer to the User s Manual application section on Proper Use of Corrected Capacitance Program 23 OPERATION 1 Press the MENU button until cCAP is displayed cCAP O signifies that correction is off cCAP
37. the Model 595 Instruction Manual for detailed information about the line frequency program Calibration An advanced feature of the Model 595 is its digital calibra tion program This program does not normaily appear in the menu Refer to Section 8 of the Model 595 Instruction Manual for detailed information about the calibration program Filter The Model 595 has three digital filters to minimize the ef fects of noise on individual measurements and plotted curves Filter 1 is used when there are 20 or more samples in the fundamental change area of the curve Filter 2 with 50 or more samples and Filter 3 with slowly changing DC signals or when there are 200 or more samples in the fun damental change area of the curve 21 OPERATION 1 Press the MENU button until Filt appears 2 Press either of the voltage source ADJUST buttons until the desired filter number appears O no filter 1 Filter 1 2 Filter 2 3 Filter 3 3 To exit press SHIFT then EXIT The filter selected will remain enabled until the instrument is powered off Trigger The trigger program allows a stimulus to trigger the Model 595 to take a measurement on either a one shot or con tinuous basis OPERATION 1 Press the MENU button until the message triG appears 2 Press either voltage source ADJUST button until the display reads triG 0 to put the instrument in continuous trigger When the instrument is in one shot trigger
38. the voltage source ADJUST buttons to change either limit in TOmV increments 3 To quickly set the output voltage value to the maximum or minimum limit press SHIFT then LIMIT PRESET A or V STEP V Step V determines the step size a small incremental change in voltage when either the square wave or staircase waveform is selected The step size may be 0 01V 0 02V 0 05V or 0 10V When plotting a curve step V can be set so that the curve contains the desired number of samples the larger the step size the fewer number of samples in the curve OPERATION 1 Press STEP V to select the step voltage 2 Select the step size with the ADJUST buttons 3 To toggle the waveform between square wave and stair case press SHIFT then STEP V Front Panel Trigger The button is used to change the polarity of the voltage step and voltage source This button can also be used to trigger a single reading from the front panel 14 OPERATION 1 Press STEP V to display the step voltage or DISPLAY SOURCE to display the programmed output voltage 2 Press to change the polarity of the displayed value Note Pressing SHIFT then will trigger a measurement from the front panel This is convenient if an external trig ger source is unavailable DELAY TIME The time from the voltage step to the final charge measure ment for a capacitance calculation or from the step to the measurement in current is the delay time Delay tim
39. tracting the offset value from subsequent readings Suppress may be used with capacitance or current measurements but does not apply to Q t readings The instrument can be tog gled between Q t and capacitance without losing the stored value OPERATION 1 Select desired function and range 2 Input the offset or baseline level to the Model 595 3 Press the SUPPRESS button The SUPPRESS indicator light will turn on and the display will zero 4 SUPPRESS can be turned off again by pressing the SUP PRESS button C Co STORE Co C Co allows the user to normalize capacitance to a stored capacitance value Co C C applies only to the capacitance reading even while Q t is being displayed Once a value of Co is stored it will be retained in memory until a new value is stored or the instrument is turned off 10 OPERATION 1 Set up the desired capacitance measurement 2 Press SHIFT then STORE Co The next reading will be stored as Co 3 Press C Co to normalize the capacitance readings to Co RANGE The Range buttons select the desired range of measure ment for the Model 595 Always use the range that allows the greatest amount of resolution OPERATION 1 To uprange press the RANGE A button 2 To downrange press the RANGE Y button ZERO CHECK and CORRect Zero check is used to protect the input amplifier of the Model 595 from overloads and switching transients when changing instrument functions or connecti
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