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User Manual PZ244E - Physik Instrumente

1. gt Ifthe center of the load to be affixed is far above or to the side of the moving platform adjust the controller settings before start up or contact our customer service department p 35 P 54x Nanopositioners PZ244E Version 1 0 0 23 5 Installation P J NOTICE Screws that are too long The P 54x can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 40 gt Only use screws of the correct length for the respective mounting holes INFORMATION The arrows in the figures see Dimensions p 40 show the positive direction of motion Center of load at the optimum position Figure 4 Example of an optimally affixed load Center of load at an unsuitable position Figure 5 High set up and center of load far above the moving platform 24 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 6 Long lever and center of load on the side of the moving platform Prerequisite v You have read and understood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length see Dimensions p 40 Suitable tools Affixing the Load gt Only affix loads to the threaded holes intended for this purpose see Dimensions p 40 and with suitable screws Observe the specified torque range p 41 while doing so gt Affix the load so that it is
2. erra 10 1 2 Maximum Ratings eee 10 1 3 Ambient Conditions and Classifications 10 2 Dimensions liegen 10 3 Torque for Stainless Steel Screws A2 70 occccoonnccnccccconnos 10 4 Pin PASSION asar nennen een Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual eres 1 Symbols and Typographic CONVONtIONS ccccccccccccconnccnnnccnnonononccnnnnnonononannnnnnononononanenonns 1 Other Applicable DOCUMENTS ccccccccccconnccnnnncccnononnncnnnononononancnnnnnononnnannnnnnnnnononananennnnnnns 3 LOW MIO AGING Manuals pur rennt tabaco 4 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 54x x stands for the different models p 10 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 4 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment
3. 3 2 Model OY CSW nenn Pianos dns sn Si nd nen ERE EAN ROE ra E e di 10 3 3 PLIOAUSE WCW eme a E TE E ee ee 11 3 4 COPE Of DENVEIY sanieren 11 3 5 Recommended Piezo Controllers ooocccccoconcnncoccnnnccoonnncnnanonnonononnononcnononos 12 3 6 Technical I Ce MM em A ee ee 13 3 6 1 PICMA Piezo Actuators anne 13 3 6 2 FS GSS nennen 13 3 6 3 POSIHON A en e Eai 13 3 6 4 ID Chip Only Models with Sub D Connector 14 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation cccccoconccnnnccconnnnnncconononnnnnoonncnnnnononnnnnnnnnons 17 5 2 Connecting the P 54x to the Protective Earth Conductor cccooccncccccccnccconcnnnnonos 19 5 3 Mounting the P 54X ici era 21 5 4 iD assests arincernncaivainconidstenetenig dvnscatsiesraiensdinsnasnotdouisseatied duaniesinanedanstsaueseinsu sate 23 6 Start Up and Operation 27 6 1 General Notes on Start Up and Operation rea 27 6 2 Operating the P 54X ccccccesccccccsesseeeecceesseceecceeuseeeecssaueeeesseaseeeeessaaaeeeesssaaseeees 29 6 3 Discharging the P 54X ccccccsssseecceeseeeceescecceeseecceaeeecseueeeeseeseeessaueeessanseesseess 29 10 11 Maintenance 7 1 General Notes on Maintenance 7 2 Cleaning the P 54X 2uuusnennnennenennnnnnnnnnnennnn nennen nennnn nenne Troubleshooting Customer Service Technical Data 10 1 ODECINCANONS pares adia ssa 10 1 1 Data Table
4. gt Actions to take to avoid the situation P 54x Nanopositioners PZ244E Version 1 0 0 1 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 2 Version 1 0 0 Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 4 on our website E 610 00 Piezo Amplifier 1 Channel OEM Module E 500 Modular Piezo Controller PZ62E E 509 C2A Control Module for Capacitive Sensors PZ77E E 509 53 Control Module for Strain Gauge Sensors E 503 3 Channel Amplifier PZ62E E 505 Single Channel High Performance PZ62E Amplifier P 5xx P 6xx P 7xx Piezo Positioning Systems PZ240EK Short Instructions P 54x Nanopositioners PZ244E Version 1 0 0 1 About this Document gt I 1 4 Downloading Manuals INFO
5. 4 0 7 0 1 0 3 0 2 2 5 0 4 4 0 2 loop resolution Linearity deviation 0 03 0 03 0 03 0 2 0 2 Repeatability lt 5 lt 5 lt 5 lt 10 lt 10 Pitch lt 5 lt 5 lt 3 lt 5 lt 5 lt 5 Yaw lt 10 lt 10 lt 3 lt 10 lt 10 lt 10 Mechanical properties Stiffness in motion 0 47 0 4 10 0 47 0 4 0 47 direction Unloaded resonant 255 230 1550 255 230 255 frequency Resonant frequency 200 190 200 190 200 100g Resonant frequency 180 1230 180 180 200g Resonant frequency 150 145 150 145 150 300 g Push pull force 100 30 100 30 100 30 100 30 100 30 100 30 capacity in motion direction Load capacity 20 20 20 20 20 20 P 542 20L X Y 250 um x 250 um 0 4 lt 5 lt 10 0 4 230 190 145 100 30 20 P 54x Nanopositioners PZ244E Version 1 0 0 Unit nm nm urad urad N um Hz Hz Hz Hz N Tolerance min 20 0 typ typ typ typ typ 20 20 20 20 20 max max 37 10 Technical Data Drive properties Piezoceramics Electrical capacitance per axis Dynamic operating current coefficient per axis Miscellaneous Operating temperature range Material Mass Cable length Sensor connection Voltage connection P 541 2CD 2CL PICMA P 885 4 2 9 2 20 to 80 Alumi num 0 75 1 5 Sub D Special LEMO Sub D Special LEMO P 542 2CD 2CL PICMA P 885 TES 4 8 20
6. 509 C2A control module for capacitive sensors and E 503 3 channel amplifier Optional E 517 interface and display module E 500 modular piezo controller with E 509 C2A control module for capacitive sensors and 2x E 505 1 channel high performance amplifier Optional E 517 interface and display module E 712 digital piezo controller modular system for 2 4 up to 6 axes E 725 digital piezo controller for up to 3 axes E 761 digital piezo controller for up to 3 axes PCI card em E em O do MN TIL IL DK MIS 12 Version 1 0 0 PZ244E P 54x Nanopositioners 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 6 Technical Features 3 6 1 PICMA Piezo Actuators P 54x stages are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and are therefore far superior to conventional actuators in respect to performance and lifetime The monolithic piezoceramic block is protected against humidity and failure due to increased leakage current by a ceramic insulation layer In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are therefore backlash maintenance and wear free 3 6 2 Flexure Guides P 54x stages have flexure guides flexures for frictionless motion and high guiding accuracies A flexure guide is an element which is fre
7. PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Product View The illustration serves as an example and can differ from your stage model Figure 1 Example of product view 1 Moving platform 2 Cable outlet 3 Protective earth connection 4 Base body 3 4 Scope of Delivery Stage according to order p 10 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers PZ240EK Short instructions for piezo positioning systems P 54x Nanopositioners PZ244E Version 1 0 0 11 3 Product Description P J 3 5 Recommended Piezo Controllers To operate a P 54x you need a piezo controller The device is selected depending on the type of application The table below lists suitable controllers Controller 2 x E 610 00 piezo amplifier 1 channel OEM module 30 to 130 V E 500 modular piezo controller with E 503 3 channel amplifier E 500 modular piezo controller with 2x E 505 1 channel high performance amplifier E 500 modular piezo controller with E 509 53 control module for strain gauge sensors and E 503 3 channel amplifier Optional E 517 interface and display module E 500 modular piezo controller with E 509 53 control module for strain gauge sensors and 2x E 505 1 channel high performance amplifier Optional E 517 interface and display module E 500 modular piezo controller with E
8. The P 54x is equipped with an M4 hole for fastening the protective earth conducior This hole is located next to the cable exit and is marked with the protective earth conductor symbol see Dimensions p 40 Prerequisite v You have read and understood the General Notes on Installation p 17 v The stage is not connected to the electronics Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 protective earth screw set p 11 for connecting the protective earth conductor Suitable screwdriver P 54x Nanopositioners PZ244E Version 1 0 0 19 5 Installation PI Figure 2 Mounting of the protective earth conductor profile view 1 Base body of the P 54x 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 54x to the protective earth conductor he 2 If necessary fasten a suitable cable lug to the protective earth conductor Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P 54x as shown in the profile view Tighten the M4 screw with at least three rotations and a torque of 1 2 Nm to 1 5 Nm Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 20 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 I
9. out of the controller P 54x Nanopositioners PZ244E Version 1 0 0 17 5 Installation P J NOTICE Damage from unsuitable cables Unsuitable cables can damage the Stage and the electronics gt Only use cables provided by PI for connecting the P 54x to the electronics NOTICE SA Damage from incorrect mounting LN Incorrect mounting of the P 54x or incorrectly mounted parts can damage the P 54x gt Only mount the P 54x and the loads on the mounting fixtures holes intended for this purpose NOTICE Damage due to incorrectly tightened screws Incorrectly tightened screws can cause damage gt Observe the torque range p 41 given for the screws used during installation INFORMATION Extended cables can affect the performance of the P 54x gt Do not use cable extensions If you need longer cables contact our customer service department p 35 18 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the P 54x to the Protective Earth Conductor INFORMATION In the case of P 54x stages with Sub D connectors ground loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics gt Ifa ground loop occurs contact our customer service department p 35 INFORMATION gt Observe the applicable standards for mounting the protective earth conductor
10. to 80 Alumi num 0 75 1 5 Sub D Special LEMO Sub D Special LEMO P 541 2DD PICMA P 885 9 25 20 to 80 Alumi num 0 75 1 5 Sub D Special Sub D Special P 541 2SL PICMA P 885 4 2 9 2 20 to 80 Alumi num 0 73 1 5 LEMO LEMO P 542 2SL PICMA P 885 15 4 8 20 to 80 Alumi num 0 73 1 5 LEMO LEMO P 541 20L PICMAO P 885 4 2 9 2 20 to 80 Alumi num 0 7 1 5 LEMO PI P 542 Unit Tolerance 20L PICMA P 885 75 UF 20 4 8 UA 20 Hz x um 20 to 80 A Alumi num 0 7 kg 5 1 5 m 10 mm LEMO With digital controller Non linearity of direct drive stages measured with analog controllers is up to 0 1 typ 10 1 2 Maximum Ratings P 54x stages are designed for the following parameters 38 Maximum Operating Voltage Frequency Unloaded Consumption P 541 2DD 20 to 120 V P 541 20L P 541 2CD P 541 2CL P 541 2SL P 542 20L P 542 2CD P 542 2CL P 542 25L 20 to 120 V 20 to 120 V PZ244E Version 1 0 0 Maximum Operating 517 Hz per axis 85 Hz per axis 77 Hz per axis Maximum Power 91 W per axis 7 W per axis 11 W per axis P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 54x Area of application For indoor
11. to a protective earth conductor before start up p 19 gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 54x to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the P 54x gt Avoid impacts that affect the P 54x gt Do not drop the P 54x gt Do not exceed the maximum permissible stress and load capacities according to the specifications p 37 gt Only hold the P 54x externally by the base body 6 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 2 Safety The P 54x is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 54x 2 3 Organizational Measures User manual gt Always keep this user manual available by the P 54x The latest versions of the user manuals are available for download p 4 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the P 54x on to other users also turn over this user manual as well as other relevant information provided by the manufactur
12. AAA no yq 5 General Safety Instructions ccccccccccoconnnccnnnnononononnncnonononononancnnnnnnnononannnennnnnonononanennnns 5 Organizational Measures oooccccnncccnccononccnnonononononnncnnnnnonononanennnnnnnnnnnnnnnnnnnnnonnnnnnnnnnnnnnns 7 2 1 Intended Use The P 54x is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the P 54x is intended for fine positioning as well as the fast and precise movement of small objects The specifications of the P 54x apply to horizontal mounting The motion takes place horizontally in two axes The intended use of the P 54x is only possible in combination with suitable drive and control electronics p 12 available from Pl The electronics is not included in the scope of delivery of the P 54x The electronics must provide the required operating voltages To ensure proper performance of the servo control system the electronics must also be able to read out and process the signals from the position sensors 2 2 General Safety Instructions The P 54x is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 54x gt Only use the P 54x for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any f
13. O Target sensor signal channel 2 movable part of the capacitive sensor Not connected Not connected movable part of the capacitive sensor Shield of Target sensor signal channel 1 G N N N N N N N PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS LEMO connectors Figure 9 LEMO connector side view 10 Technical Data LEMO connectors according to model one connector per axis Connector Front View Inner Input connector Inner Output connector Inner Input connector Piezo voltage 20 to 120 V Probe sensor signal nonmoving part of the capacitive sensor Target sensor signal movable part of the capacitive sensor Connector Shell Cable shield Cable shield Output Sensor signal 2 4 GND Ground of the supply voltage P 54x Nanopositioners PZ244E Version 1 0 0 Supply voltage for Cable shield strain gauge sensor Output Sensor signal 1 43 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufaciurer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environ
14. PZ244E P 54x Nanopositioners User Manual Version 1 0 0 Date 21 03 2013 PI This document describes the following products P 541 XY nanopositioning system with large clear aperture P 541 20L 100 um x 100 um without sensors P 541 2CD 2CL 100 um x 100 um capacitive sensors P 541 2SL 100 um x 100 um strain gauge sensors P 541 2DD 45 um x 45 um direct drive capacitive sensors P 542 XY nanopositioning system with large clear aperture P 542 20L 200 um x 200 um without sensors P 542 2CD 2CL 200 um x 200 um capacitive sensors P 542 2SL 200 um x 200 um strain gauge sensors 2CD 2DD with Sub D connector 20L 2CL 2SL with LEMO connector Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI WS _ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10021919C2 German patent no 10234787C1 German patent no 10348836B3 German patent no 102005015405B3 German patent no 102007011652B4 US patent no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2013 Physik Instru
15. RMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 35 The current versions of the manuals are found on our website To download a manual proceed as follows 1 2 3 Open the website http www pi portal ws Click Downloads Click the corresponding category e g P Piezo Actuators Nanopositioning amp Scanning Systems Click the corresponding product code e g P 541 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Open the Manuals directory c Open the Release News e g X xxx_Releasenews_V_x_x_x pdf on the CD of the product d Find the user name and password in the User login for software download section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login If Documents 0 Files is still being displayed no manuals are available Contact our customer service department p 35 Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo IS
16. are equipped with a full bridge circuit that is insensitive to thermal drift and assure optimum position stability in the nanometer range 3 6 4 ID Chip Only Models with Sub D Connector An ID chip is located in the Sub D connector of the stage When the stage Is calibrated at the factory with digital electronics the calibration data is saved together with specific product information on the ID chip When switched on digital electronics read the data from the ID chip of the connected stage Stages whose ID chip contains the calibration data can therefore be connected to any suitable digital electronics without a new calibration For more information on the ID chip see the manual of the controller used 14 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking Mechanical overload from incorrect handling An impermissible mechanical overload of the moving platform of the P 54x can cause damage to the piezo actuators sensors and piezo levers of the P 54x as well as losses of accuracy gt Only hold the P 54x externally by the base body 1 Unpack the P 54x with care 2 Compare the contents against the items covered by the contract and against the packing list co Inspect the contents for signs of damage If paris are missing or you notice signs of damage contact Pl immediately 4 Keep all packaging materials in case the product needs to be returned P 54x Nanopo
17. aults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 54x P 54x Nanopositioners PZ244E Version 1 0 0 5 2 Safety P J The P 54x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 54x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 54x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 54x in the case of malfunction of failure of the system If touch voltages exist touching the P 54x can result in minor injuries due to electric shock gt Connect the P 54x
18. centered and that the center of load is on the moving platform Avoid high set ups with the center of load far above the moving platform Avoid long levers with the center of load on the side of the moving platform P 54x Nanopositioners PZ244E Version 1 0 0 25 PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccccnccnnccccooncnnncconnnnnnnononnnnnnnononncnnnnnnnos 27 Operating the A een A 29 Discharging ING 0 APA EEN Een en A Ean 29 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 54x in the case of malfunction of failure of the system If touch voltages exist touching the P 54x can result in minor injuries due to electric shock gt Connect the P 54x to a protective earth conductor before start up p 19 gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 54x to the protective earth conductor before Starting it up again NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 54x in environments that increase the electrical conductivity can lead to the destruction
19. chanical system only offer optimum performance as a complete calibrated system The electronics must be ordered separately For suitable electronics see Recommended Piezo Controllers p 12 The P 54x is also available on request as a customized version for vacuum operation P 54x Nanopositioners PZ244E Version 1 0 0 9 3 Product Description P J 3 2 Model Overview The following standard versions of the P 54x are available A SE P 541 20L XY Nanopositioning System with Large Aperture 100 um x 100 um Open Loop P 541 2CD XY Nanopositioning System with Large Aperture 100 um x 100 um Parallel Kinematics Capacitive Sensors P 541 2CL XY Nanopositioning System with Large Aperture 100 um x 100 um Parallel Kinematics Capacitive Sensors LEMO Connectors P 541 2SL XY Nanopositioning System with Large Aperture 100 um x 100 um Strain Gauge Sensors P 541 2DD XY Nanopositioning System with Large Aperture High Speed Direct Drive 45 um x 45 um Parallel Kinematics Capacitive Sensors P 542 20L XY Nanopositioning System with Large Aperture 200 um x 200 um Open Loop P 542 2CD XY Nanopositioning System with Large Aperture 200 um x 200 um Parallel Kinematics Capacitive Sensors P 542 2CL XY Nanopositioning System with Large Aperture 200 um x 200 um Parallel Kinematics Capacitive Sensors LEMO Connectors P 542 2SL XY Nanopositioning System with Large Aperture 200 um x 200 um Strain Gauge Sensors 10 Version 1 0 0
20. e from static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3 6 3 Position Sensors For position controlled operation the P 54x is equipped either with capacitive sensors or strain gauge sensors depending on the model p 10 Capacitive sensors Capacitive sensors measure the position directly on the moving platform direct metrology and work without contact Neither friction nor hysteresis interferes with the motion which allows excellent linearity values to be achieved in combination with the high position resolution In connection with suitable electronics capacitive sensors achieve the best resolution stability and bandwidth P 54x Nanopositioners PZ244E Version 1 0 0 13 3 Product Description P J Strain gauge sensors SGS Strain gauge sensors derive the position information from their expansion They are attached at a suitable position in the drivetrain where they measure the displacement of the moving stage part against the base body This type of position measurement Is done with contact and indirectly since the position of the moving platform is derived from a measurement on the lever guide or piezo stack The sensors
21. er gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the P 54x after having read and understood this user manual Personnel qualification The P 54x may only be started up operated maintained and cleaned by authorized and qualified staff P 54x Nanopositioners PZ244E Version 1 0 0 7 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 Product Description In this Chapter Features and AppliCatiONS oooccccccnncoccnncconnnoconononanonononononnnnonnnnnonannnonannnnnnnnonenenenanos 9 Model Overview aaa nn nnn nn nn nennen nn nun ann nnn nn n ann ene nennen 10 o AAA APP a ca nase re Tran re na Dee ae a 11 SCODE OFDEIVELY scene ee ee ee ee ee ee ee 11 Recommended Piezo Controllers arara 12 Technical Features cion iii ies 13 3 1 Features and Applications P 54x stages are piezo actuator driven precision positioning systems with up to two motion axes Piezo actuators expand when an electric voltage is applied The motion of the piezo actuators and levers is used by the P 54x to achieve travel ranges of up to 200 um per axis with resolutions in the nanometer range In order to achieve the specifications stated in the data table p 37 the stage is calibrated at the factory as a system component with suitable electronics The electronics and me
22. ers PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for downloading p 4 on our website P 54x Nanopositioners PZ244E Version 1 0 0 35 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data IC CHC AON S ee 37 PNET S10 gs CORO PRN DDR a a en rn gene GA ae ne RR 40 Torque for Stainless Steel Screws A2 70 oooococoncccnccccoccconoconooncnnonononnnonononancnnnononanenns 41 RAS SIG MC a rf a een A O 41 10 1 Specifications 10 1 1 Data Table P 541 P 542 P 541 P 541 P 542 P 541 2CD 2CD 2DD 2SL 2SL 20L 2CL 2CL Active axes X Y X Y X Y X Y X Y X Y Motion and positioning Integrated sensor Capa Capa Capa SGS SGS citive citive citive Open loop travel 150 um x 250 um x 60 um x 150 um x 250 um x 150 um x 20 to 120 V 150 um 250 um 60 um 150 um 250 um 150 um Closed loop travel 100 um x 200 um x 45 um x 100 um x 200 um x 100 um 200 um 45 um 100 um 200 um Closed loop open 0 2 0 3 0
23. mentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany P 54x Nanopositioners PZ244E Version 1 0 0 45
24. mente Pl GmbH amp Co KG Karlsruhe Deutschland The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the Source Original instructions First printing 21 03 2013 Document number PZ244E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download on our website http www pi ws PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual ccccccconccnccccconncnnnccconnnnnnnnnnnnnns 1 1 2 Symbols and Typographic Conventions eee 1 1 3 Other Applicable DOCUMENTS ccccccccccocnnccnnnccconononnccnnnononononancnnnnnnnonnnnnnnnnnnnnononnnans 3 1 4 Downloading Manuals cccccooncnccconcnncconnnncononcnnonnnconconannncnnnncnnononrnnconannnnnnancnnonaness 4 2 Safety 5 2 1 las IS AMO nn NER ERIERER RO RR 5 2 2 General Safety Instructions cccccccccnccnncccooncnnncononnnnnnnononnnnnnononnnnnnnononnnnnnnnnnanenos 5 2 3 Organizational Measures cccoonnccccconcnncconnnncononcnnonononnononnnnnnonnnnnonannnnononennonennnnnnnos 7 3 Product Description 9 3 1 Features and AppliCatiONS oooccccocnnnnccconnnnoconcnnnnnnnnnnnnannncononcnnononnnnnnnannnnonanens 9
25. ng operated 6 2 Operating the P 54x gt Follow the instructions in the manual of the used piezo controller for start up and operation of the P 54x 6 3 Discharging the P 54x The P 54x must be discharged in the following cases If the P 54x is not used but the controller remains switched on to ensure temperature stability Before demounting e g before cleaning and transporting the P 54x and for modifications The P 54x is discharged through the internal discharge resistor of the controller from PI Discharging a P 54x that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Setthe piezo voltage to O V on the controller P 54x Nanopositioners PZ244E Version 1 0 0 29 6 Start Up and Operation gt I In open loop operation gt Setthe piezo voltage to O V on the controller Discharging a P 54x that is not connected to the controller gt Connect the stage to the switched off controller from PI 30 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance rea 31 as e o qn A 31 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws The P 54x is maintenance free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in
26. nstallation 5 3 Mounting the P 54x NOTICE Warping of the P 54x due to mounting on uneven surfaces Mounting the P 54x on an uneven surface can warp the P 54x Warping reduces the accuracy gt Mount the P 54x on an even surface The recommended evenness of the surface is lt 20 um gt For applications with great temperature changes Only mount the P 54x on surfaces that have the same or similar thermal expansion properties as the P 54x e g surfaces made of aluminum NOTICE Y Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically tensile stress can result in particular alignments that reduces the preload of the piezo actuator and thus destroys it gt If you want to mount the P 54x vertically contact our customer service department p 35 NOTICE Protruding screw heads Protruding screw heads can damage the P 54x gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion P 54x Nanopositioners PZ244E Version 1 0 0 21 5 Installation P J Figure 3 Mounting holes in the base body Prerequisite v You have read and understood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length see Dimensions p 40 Suitable tools Mounting the stage on a surface 1 Position the stage on an even surface 2 Fasten the stage t
27. o the mounting holes see figure with suitable screws Observe the specified torque range p 41 while doing so 22 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads High torques during fastening of the load as well as high loads can overload the moving platform of the P 54x A mechanical overload can cause damage to the piezo actuators sensors and piezo levers of the P 54x as well as losses of accuracy gt Observe the torque range p 41 given for the used screws when fastening the load gt Do not exceed the maximum permissible load NOTICE a Warping of the P 54x due to affixing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 54x Warping reduces the accuracy gt Only affix loads on the P 54x whose contact surface with the moving platform of the stage has an evenness of at least 20 um gt For applications with great temperature changes Only affix loads on the P 54x that have the same or similar thermal expansion properties as the P 54x e g loads made of aluminum NOTICE Center of load at unsuitable position If the center of load is located far outside of the moving platform e g high set ups and long levers the P 54x can be damaged from high strain on the flexure guides high torques and oscillations
28. of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 54x in environments that can increase the electric conductivity gt Only operate the P 54x within the permissible ambient conditions and classifications p 39 P 54x Nanopositioners PZ244E Version 1 0 0 27 6 Start Up and Operation P J NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramics of the actuator gt When the P 54x is not used but the controller remains switched on to ensure temperature stability discharge the P 54x p 29 NOTICE Operating voltages that are too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 54x gt Only operate the P 54x with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 38 for which the P 54x is specified gt Only operate the P 54x when the operating voltage is properly connected see Pin Assignment p 41 NOTICE Uncontrolled oscillation Oscillations can ca
29. positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the P 54x 7 2 Cleaning the P 54x Prerequisites v You have discharged the piezo actuators of the P 54x p 29 v You have disconnected the P 54x from the controller Cleaning the P 54x gt Clean the surfaces of the P 54x with a cloth slightly dampened with a mild cleanser or disinfectant e g alcohol or isopropanol gt Donotdo any ultrasonic cleaning P 54x Nanopositioners PZ244E Version 1 0 0 31 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or limited motion The cable is not gt Check the cable connections connected correctly Excessive load gt Do not exceed the permissible stress and load capacities according to the specifications p 37 The load was After changing the load to be changed moved perform a zero point adjustment see controller manual Reduced accuracy Warping of the base gt Only mount the P 54x on surfaces body or the moving with the following characteristics platform Evenness of at least 20 um The thermal expansion properties are similar to those of the P 54x e g surfaces made of aluminum Only affix loads with the following characteristics on the P 54x The contact surface of the load with the moving platform of the stage has an evenness of at least 20 um The thermal expansion properties are similar to
30. sitioners PZ244E Version 1 0 0 15 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation cccoonnccccooncnncoonnnncnoncnnnnnannnnnnononnnnononnnnnnrnnnananonnos 17 Connecting the P 54x to the Protective Earth Conductor 2 20002220002020e nennen 19 Mo n ng the PESA susanne een eines 21 AIG NE A on A AA 23 5 1 General Notes on Installation Dangerous voltage and residual charge on piezo actuators A The P 54x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 54x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 54x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off Pl controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled
31. those of the P 54x e g loads made of aluminum P 54x Nanopositioners PZ244E Version 1 0 0 33 8 Troubleshooting The stage starts oscillating or positions inaccurately PI When stages whose ID chip p 14 does not contain any calibration data or LEMO connectors are used the axis displacement has to be recalibrated after the P 54x or the controller has been replaced P 54x or controller has been replaced Axes were mixed up during connection only with LEMO connectors Servo control parameters incorrectly set because e g the load was changed Open loop operation near the resonant frequency gt Perform a recalibration of the axis displacement see controller manual or contact our customer service department p 35 Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices Immediately switch off the servo mode of the corresponding stage axes Check the settings of the servo control parameters on the controller Adjust the servo control parameters on the controller according to the load change In open loop operation only operate the stage with a frequency that is below the resonant frequency lf the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 35 34 Version 1 0 0 PZ244E P 54x Nanoposition
32. use irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes A change in the load and or dynamics requires the servo control parameters to be adjusted The stage is operated near its resonant frequency If you notice oscillations gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the stage INFORMATION The arrows in the figures see Dimensions p 40 show the positive direction of motion 28 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation INFORMATION Systems are calibrated at the factory to achieve optimum performance Replacing the system components will cause a loss in performance when stages are used whose ID chip p 14 does not contain any calibration data or when analog controllers are used gt Note the assignment of the stage axes to the controller channels which is given by the calibration label of the piezo servo controller gt If the piezo servo controller or the stage has to be replaced recalibrate the axis displacement see controller manual or contact our customer service department p 35 INFORMATION Sound and vibration e g footfall impacts can be transmitted to the Stage and can affect its performance with regard to position stability gt Avoid transmitting sound and vibration while the Stage is bei
33. use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Orange ages Proicciondass Degree of protection IP20 according to IEC 60529 P 54x Nanopositioners PZ244E Version 1 0 0 39 10 Technical Data P I 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Standard tolerance according to DIN ISO 2768 f H Roughness Ra 1 6 10x45 Figure 7 P 54x 40 Version 1 0 0 PZ244E P 54x Nanopositioners PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Torque for Stainless Steel Screws A2 70 Serew Sze Minimum Torque menmun Torge M1 6 0 06 Nm 0 12 Nm 10 4 Pin Assignment Sub D mix connector 25W3 Only for P 54x 2CD 2DD A1 inner conductor Output Probe sensor signal channel 2 nonmoving part of the capacitive sensor A1 outer conductor GND Shield of Probe sensor signal channel 2 A2 inner conductor Not connected A2 outer conductor Not connected A3 inner conductor Output Probe sensor signal channel 1 nonmoving part of the capacitive sensor A3 outer conductor GND Shield of Probe sensor signal channel 1 P 54x Nanopositioners PZ244E Version 1 0 0 41 10 Technical Data 42 Version 1 0 0 PI Signal Function OOO

User Manual PZ244E - Physik Instrumente

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