ANT95-L Series Stage User`s Manual
Contents
1. 33 5 1 1 Model NUmbers u uu seks 35 5 2 r s xc 36 5 3 Basic Specifications 38 5 4 Z Axis Installation 39 5 4 1 Securing the Stage to the Mounting 39 5 4 2 Attaching the Payload to the Stage 41 Appendix A Warranty and Field 43 Appendix B Technical 45 2 laa es eet eee 47 Reader s Comments 49 www aerotech com ill Table of Contents ANT95 L Series Stage User s Manual 17 www aerotech com ANT95 L Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 1 3 Figure 1 4 Figure 1 5 Figure 1 6 Figure 1 7 Figure 1 8 Figure 1 9 Figure 1 10 Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 5 Figure 3 6 Figure 5 1 Figure 5 2 Figure 5 3 Figure 5 4 Figure 5 5 Ty2. 1 11 1 Optional Features Ul ssc ul uu eile bec S SY Sos 2 1 1 2 Model Numbers 5 1 25 51015 ae oa sat oes 6 1 3 Safety Procedures and Warnings 10 1 4 EC Declaration of Incorporation 12 Chapter 2 Installation___ a a l 13 2 1 Unpacking and Handling the Stage 14 2 2 Preparing the Mounting Surface 15 2 3 Securing the Stage to the Mounting Surface 17 2 4 Attaching the Payload to the Stage 19 2 5 Electrical Installation _ _ 20 Chapter 3 Operating 21 3 1 Environmental Specifications 21 3 2 Accuracy and Temperature Effects
3. 24 Table 3 4 Feedback and Motor Pin Assignments 30 Table 5 1 Model Numbering System 35 Table 5 2 ANT95 L Z Series Specifications 38 Table B 1 Current Changes 1 03 00 45 Table B 2 Archived Changes 46 www aerotech com vii List of Tables ANT95 L Series Stage User s Manual viii www aerotech com ANT95 L Series Stage User s Manual Overview Chapter 1 Overview This chapter introduces standard and optional features of the ANT95 L explains the model numbering sys tem and gives general safety precautions N OTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com 1 1 Standard Features The ANT95 L is a compact high performance stage for use in applications where a small footprint is required The linear motor is completely cog free allowing for extremely tight velocity control Figure 1 1 Typical ANT95 L Stage www aerotech com Chapter 1 1 Overview ANT95 L Seri
4. PALLA Hall fect A Brushless motor commutation tack ouput id Hatte Hal Efect Brushless motor commutation rack ouput 14 COS Cosine Incremental encoder output either TTL line driven or amplified sine wave type sig nal Sine Incremental encoder output either TTL line driven or amplified sign wave type sig nal pomum 3 7 Vacuum Operation Please contact the factory for information regarding operation in a vacuum environment 30 Chapter 3 www aerotech com ANT95 L Series Stage User s Manual Maintenance Chapter 4 Maintenance This chapter will cover information about the lubrication and inspection process and cover which lubricants are recommended for use NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Lubricant inspection and replenishment in ANT95 L series stages depends on conditions such as duty cycle speed and the environment An inspection interval of once per month is recommended until a trend develops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces In general it is recommended that stages operating in a clean envi
5. 21 3 3 Basic Specifications 22 3 4 Load Capability 25 3 5 Magnetic Actuator Limit 28 3 5 1 Actuator Limit Operation 28 3 5 2 Limit Switch Wiring 28 3 6 Standard Motor Wiring 29 3 7 Vacuum Operation 30 Chapter 4 Maintenance c ec ece cece ec DAL LL a a raan 31 4 1 Service and Inspection Schedule 31 4 2 Cleaning and Lubrication 32 4 2 1 Recommended Cleaners and Lubricants 32 4 2 2 Important Notes on Lubrication 32 4 2 3 Lubrication and Cleaning Process 32 Chapter 5 5 2 33 5 1 Standard Features
6. Securing the Stage to the Mounting Surface To access the mounting holes of the ANT95 L stage slide the carriage all the way to either end of travel as shown in Figure 2 4 The stage is designed to use four M4 by 8 mm long or 8 by 3 8 in long socket head cap screws SHCS to secure it to the mounting surface For X Y configurations the upper stage should mount to the tabletop of the lower stage with M4 by 6 mm long SHCS A mounting plate is necessary if an ANT95 50 L is used as the upper axis Torque the mounting screws to 2 3 N m 20 The ANT95 L stages also have four M6X1 0 10 mm deep threaded holes in the base for mounting if desired Refer to Section 1 2 for dimensions If used M6 screws should be tightened to 8 N m or 71 in Ib NOTE The ANT95 L 75 mm and 100 mm travel stages are only available for lower axis X axis con figurations The stage must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING www aerotech com Chapter 2 17 Installation ANT95 L Series Stage User s Manual Figure 2 4 Mounting Hole Locations 18 Chapter 2 www aerotech com ANT95 L Series Stage User s Manual Installation 2 4 Attaching the Payload to the Stage To prevent damage to delicate payloads test the operation of the stage before attaching any payload to the stage tabletop Proceed with the electrical installation and test the motion control system in accordance with the system d
7. 20 30 40 50 60 70 80 90 100110 120 130 140 150 Offset Distance mm Figure 3 5 Load Capability of ANT95 100 L Stage www aerotech com Chapter 3 27 Operating Specifications ANT95 L Series Stage User s Manual 3 5 Magnetic Actuator Limit 3 5 1 Actuator Limit Operation ANT95 L series stages are provided with a magnetic limit switch The limit switch signals when the stage has reached its maximum useable travel distance in either direction The limit switches on the ANT95 25 L and the ANT95 50 L are mounted on a small printed circuit board On the ANT95 75 L and the ANT95 100 L the limits are integral to the optical encoder feedback device The triggers on the ANT95 L series are two magnets that are mounted to the bottom of the stage table If the stage is driven beyond the electrical limit it will encounter the mechanical stop Although the operating speed of the stage may be relatively slow damage to the stage could result WARNING 3 52 Limit Switch Wiring Standard ANT95 L stages include limit switch wiring integrated into the main wiring connector Limit switches on ANT95 L stages are configured normally closed The input to the controller is seen as a logic 0 typical 0 4 V 12 8 mA when no limit condition is present When the limit switch is activated a 5 V source through a pull up resistor causes a logic 1 typically 4 8 5 V to be seen by the controller input 5V Pull Up Resistor Limit Input To Control
8. Capability of ANT95 25 L Stage 26 Load Capability of ANT95 50 L Stage 26 Load Capability of ANT95 75 L Stage 27 Load Capability of ANT95 100 L Stage 27 28 Typical ANT95 L Z Series Positioning Stage 33 ANT95 L Z with Component Labeling 34 ANT95 25 L Z Dimensions 36 ANT95 50 L Z Dimensions 37 ANT95 L Z Mounting Pattern Pneumatics Cylinder Clearance 39 www aerotech com V List of Figures vi ANT95 L Series Stage User s Manual www aerotech com ANT95 L Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering System 5 Table 3 1 Environmental Specifications 21 Table 3 2 ANT95 L Series Specifications 22 Table 3 3 954 Motor Specifications
9. EITHER SIDE 6MM TUBE STAGE MOUNTING 17 4 8 THRU ALL CLEARANCE FOR M4 SHCSJ REGULATOR KNOB FOR COUNTERBALANCE ADJUSTMENT DIMENSIONS MILLIMETERS Figure 5 3 ANT95 25 L Z Dimensions 36 Chapter 5 www aerotech com ANT95 L Series Stage User s Manual ANT95 L Z 28 1 2 HARDSTOP TRAVEL DOWEL PIN MOUNTING 2X 040 40 CUSTOMER MOUNTING 25 23XM4x07 40 1 2 NORMAL 26 1 2 LIMIT TRAVEL COUNTERBALANCE AIR SUPPLY MOTOR FEEDBACK 16 TUBE CABLE EXIT EITHER SIDE STAGE MOUNTING 17X Q 48 THRU ALL ICLEARANCE FOR M4 SHCS REGULATOR KNOB FOR COUNTERBALANCE ADJUSTMENT DIMENSIONS MILLIMETERS Figure 5 4 ANT95 50 L Z Dimensions www aerotech com Chapter 5 37 ANT95 L Z ANT95 L Series Stage User s Manual 5 3 Basic Specifications Basic ANT95 L Z series positioning stage specifications are shown in Table 5 2 Resolution is dependent on the encoder resolution and controller interpolation Table 5 2 ANT95 L Z Series Specifications Mechanical Spec 25 L Z 50 L Z Maximum Accel 1g 10 m s No 1g 10 m s No 1g 10 m s No 1g 10 m s No eration Load Load Load Load In Position Stability Maximum Force 7 75 7 75 9 5N 9 5N Continuous Load Capacity Vertical 5 0 kg 11 Ib 5 0 kg 11 Ib 5 0 kg 11 Ib 5 0 kg 11 Ib 0 46 kg 1 0 Ib 0 46 kg 1 0 Ib 0 52 kg 1 1 Ib 0 52 kg 1 1 Ib Stage M
10. aerotech com ANT95 L Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure for the ANT95 L stage including handling the stage prop erly preparing the mounting surface to accept the stage securing the stage to the mounting surface attach ing the payload and making the electrical connections Installation must follow the instruction in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING www aerotech com Chapter 2 13 Installation ANT95 L Series Stage User s Manual 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Set the stage on a smooth flat and clean surface Before operating the stage it is important to let the stage stabilize at room temperature All ANT95 L series stages are packaged with a shipping clamp installed to prevent stage table movement Locate and remove the red anodized bracket that bolts the stage table to the base Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference If any damage has occurred during shipping report it immediately Figure 2 1 Shipping Clamp on ANT95 25 L Improper stage handling could adversely affect the stage s performan
11. all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards Chapter 1 www aerotech com ANT95 L Series Stage User s Manual Overview Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requirements A A A A A A 2 2 2 2 2 2 Z Z z z z Z O O O O 0 0 www aerotech com Chapt
12. listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The optimal operating temperature is 20 C 2 C 68 F 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Humidity Operating 40 percent to 50 percent RH The optimal operating humidity is 50 percent RH Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 or below sea level Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ANT95 L stages are not suited for dusty or wet environments This equates to an ingress sure protection rating of IPOO Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING 3 2 Accuracy and Temperature Effects The accuracy specification of ANT95 L
13. ANT95 L Series Stage User s Manual P N EDS 146 Revision 1 03 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 Phone 412 963 7470 Fax 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 03 00 November 4 2010 Revision 1 02 00 July 12 2010 Revision 1 01 00 April 18 2010 Revision 1 00 00 November 2 2009 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2010 ANT95 L Series Stage User s Manual Table of Contents Table of Contents Table of s u iii LiStiOf FIQUIOS ERR EE V Eist or Tables eh D E ED E EE Er vii Chapter 1 Overview 1 1 1 Standard Features
14. G 2X 040 Y 40 UNDERSIDE DOWEL PIN MOUNTING 40 70 25 0 TYP CUSTOMER MOUNTING 13XM4x07 Y 4 0 16 37 5 TYP 140 140 1 2 HARD STOP 100 0 1 2 HARD STOP TRAVEL 12 5 13 0 1 2 NOMINAL 1 2 UMIT TRAVEL TRAVEL STAGE MOUNTING XM6x10 100 STAGE MOUNTING 125 75 0 4X 4 50 THRU CLEARANCE FOR M4 SHCS 1150 DIMENSIONS MILLIMETERS Figure 1 7 ANT95 25 L Dimensions 6 Chapter 1 www aerotech com ANT95 L Series Stage User s Manual Overview DOWEL PIN MOUNTING 2X 40 F 40 UNDERSIDE DOWEL PIN MOUNTING 940970 25 0 TYP CUSTOMER MOUNTING 23X M4x0 7 Y 5 0 28 0 28 0 1 2 HARD STOP 1 2 HARD STOP TRAVEL TRAVEL 141 8 25 0 26 0 1 2 NOMINAL 1 2 LIMIT TRAVEL TRAVEL STAGE MOUNTING 20 9 100 0 4X M6x1 0 10 0 STAGE MOUNTING 156 8 4X b 4 50 THRU CLEARANCE FOR M4 SHCS Figure 1 8 ANT95 50 L Dimensions www aerotech com Chapter 1 7 Overview ANT95 L Series Stage User s Manual 475 CUSTOMER MOUNTING 27xM4x07 Y 5 0 25PIN MOTOR FEEDBACK CONNECTOR HEIGHT 26MM 2X 5 8 THRU ALL 40 5 1 2 HARDSTOP TRAVEL DOWEL PIN MOUNTING 2X 040 Y 40 37 5 1 2 NORMAL TRAVEL 25 TYP f D STAGE MOUNTING food 75 4 10 Y 10 STAGE MOUNTING tud 125 405 4 04 50 THRU CLEARANCE FOR SHCS DIMENSIONS MILLIMETERS Figure 1 9 ANT95 75 L Dimensions Chapter 1 www aerotech com ANT95 L Series Stage User s
15. Manual Overview CUSTOMER MOUNTING 27x M4x0 7 Y 50 25PIN MOTOR FEEDBACK CONNECTOR HEIGHT 26MM 2X 58 THRU ALL DOWEL PIN MOUNTING 53 1 2 HARDSTOP 2X 40 V 40 TRAVE L 210 94 50 51 1 2 NORMAL 1 2 LIMIT TRAVEL TRAVEL e 225 STAGE MOUNTING ied 75 TYP 8 M6x1 0 Y 10 53 425 10 TYP 125 STAGE MOUNTING 4 04 50 THRU TYP 175 95 ICLEARANCE FOR M4 SHCS DIMENSIONS MILLIMETERS Figure 1 10 ANT95 100 L Dimensions www aerotech com Chapter 1 9 Overview 1 ANT95 L Series Stage User s Manual 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING eo To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect
16. Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty orout Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 43 Warranty and Field Service On site Warranty Repair On site Non warranty 44 Repair Company Address ANT95 L Series Stage User s Manual If an Aerotech product cannot be made functional by telephone assistance or by sending a
17. SiS 29 Environmental Specifications 21 1 inspection schedule 31 L Limit Switch Wiring 28 Lubricants recommended 32 Lubrication u ll Posted ee ALI feet be 32 lubrication and cleaning process 32 lubrication 31 www aerotech com Index M Magnetic Actuator Limit 28 model numbers 14 Motor Specifications 22 N Normally Closed Limit Switches 28 Optional Features 2 Overview 1 P Preparing the Mounting Surface 15 s safety 10 Securing the Stage to the Mounting Surface 17 service schedule 31 Specifications 22 Standard Features 1 U Unpacking and Handling the Stage 14 w Warnings 10 2 Z Axis Installation 39 47 ANT95 L Series Stage User s Manual Index 48 Index www aerotech com Reader s Comments ANT95 L Series Stage Manual P N EDS146 Nov
18. ass 0 8 kg 1 8 Ib 0 8 kg 1 8 Ib 1 2 kg 2 7 Ib 1 2 kg 2 7 Ib Aluminum Body Black Hardcoat Finish MTBF Mean Time Between Failure 1 Certified with each stage 2 In Position Jitter listing is 3 sigma value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller 5nm 5nm 5nm 5nm 38 Chapter 5 www aerotech com ANT95 L Series Stage User s Manual ANT95 L Z 5 4 Z Axis Installation The following statements apply to the ANT95 L Z Failure to observe these precautions could damage equip ment Improper stage handling could adversely affect the stage s performance Use care when moving the stage WARNING 5 4 1 Securing the Stage to the Mounting Surface The following steps outline the stage mounting procedure Refer to Figure 5 5 for part location and descrip tion The stage must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING 1 Verify that the lower shipping bracket is secure Remove the upper shipping bracket It is attached to the linear axis base with a M6 socket head cap screw e Remove the pneumatics cover It is attached to the vertical angle bracket with four M3 button head Scre
19. ate available from Aerotech is required to use the ANT95 50 L as the top Y axis stage in an X Y con figuration At this time the ANT95 L 75 mm and 100 mm travel stages are only available for lower X axis stages in any configuration Custom configurations such as X Z and X Y Z systems are also common and readily available Contact Aerotech for more details on optional features and configurations Figure 1 6 ANT95 50 L XY Configuration 4 Chapter 1 www aerotech com ANT95 L Series Stage User s Manual Overview 1 1 2 Model Numbers The stage model number indicates the optional features on a particular stage To determine the options on your stage referto Table 1 1 for an explanation of the numbering system Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product infor mation at www aerotech com Table 1 1 Model Numbering System 100 L 100 mm 4 in travel stage with linear motor and limits Breadboard mounting plate Accessories to be ordered as a separate line item PLUS High Accuracy Option NC Normally closed end of travel and home limit switches standard P M NOTE Internal signal multipliers are available with A3200 amplifier products Www aerotech com Chapter 1 5 Overview ANT95 L Series Stage User s Manual 1 2 Dimensions DOWEL PIN MOUNTIN
20. ce Use care when mov ing the stage WARNING Lift the stage only by the base WARNING Do not use the stage table as a lifting point WARNING 14 Chapter 2 www aerotech com ANT95 L Series Stage User s Manual Installation 2 2 Preparing the Mounting Surface The mounting surface should be flat and have adequate stiffness in order to achieve the maximum per formance from the ANT95 L When an ANT95 L series stage is mounted to a non flat surface the stage can be distorted as the mounting screws are tightened see Figure 2 2 and Figure 2 3 Any distortion will decrease the overall accuracy of the stage Adjustments to the mounting surface must be done before the stage is secured Mounting to a Flat Surface Figure 2 2 Mounting to a Flat Surface www aerotech com Chapter 2 15 Installation ANT95 L Series Stage User s Manual Note the curved surface of the granite Mounting Surface Mounting to a Curved Surface exaggerated Figure 2 3 Mounting to a Curved Surface NOTE Tomaintain accuracy the mounting surface should be flat within 1 um per 50 mm NOTE The stage base is precision machined and verified for flatness prior to stage assembly at the fac tory If machining is required to achieve the desired flatness it should be performed on the mounting sur face rather than the stage base Avoid shimming if possible 16 Chapter 2 www aerotech com ANT95 L Series Stage User s Manual Installation 2 3
21. connecting the stage to the appropriate drive chassis with the cable provided Connect the provided cable to the 25 pin connector on the stage Labels on the drive indicate the appropriate connections Refer to your drive manual for additional installation and operation information In some cases if the system is uniquely configured a drawing show ing system interconnects is supplied The electrical wiring from the motor and encoder are integrated into one main connector at the factory Refer to Chapter 3 Operating Specifications for standard motor wiring and connector pin outputs Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING The stage s protective ground is located on pin 10 and 22 of the 25 pin connector on the stage If you are using cables other than those provided by Aerotech you must connect pin 10 and 22 to a ground connection WARNING 20 Chapter 2 www aerotech com ANT95 L Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications The surrounding environment and operating conditions can affect the performance and service life of the stage This chapter provides information on ideal environmental and operating conditions Also included are instructions for estimating load capability given various loading situations 3 1 Environmental Specifications The environmental specifications for the ANT95 L are
22. cts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter
23. ember 4 2010 Revision 1 03 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject 2 Well organized Clearly presented Well illustrated H 1 How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples Nam seria erp Name Aerotech Subsidiary Email Order Maiyourcommentsto Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
24. er 1 11 Overview ANT95 L Series Stage User s Manual 1 4 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH herewith declares that the product Aerotech Inc ANT95 L Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that itis not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date 12 AEROTECH GmbH S d West Park 90 D 90449 N mberg Alex Weibel bs 2277 Engineer Verifying Compliance Pittsburgh PA November 4 2010 Chapter 1 www
25. er to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com 5 1 Standard Features The ANT95 L Z series takes the compact ANT95 25 L and ANT95 50 L stages and integrates them with a vertical angle bracket and pneumatic counterbalance system Figure 5 1 Typical ANT95 L Z Series Positioning Stage www aerotech com Chapter 5 33 ANT95 L Z ANT95 L Series Stage User s Manual Upper Shipping Clamps Pneumatics Cover K Air Inlet Figure 5 2 ANT95 L Z with Component Labeling 34 Chapter 5 www aerotech com ANT95 L Series Stage User s Manual ANT95 L Z 5 1 1 Model Numbers The stage model number indicates the features on a particular stage To determine the options on your stage refer to Table 5 1 for an explanation of the numbering system Table 5 1 Model Numbering System ANT95 Z Series Linear Motor Stage 25 L Z 25 mm 1 in vertical travel stage with linear motor and limits 50 L Z 50 mm 2 in vertical travel stage with linear motor and limits Accessories to be ordered as a separate line item PLUS High Accuracy Option www aerotech com Chapter 5 35 ANT95 L Z ANT95 L Series Stage User s Manual 5 2 Dimensions 14 1 2 HARDSTOP TRAVEL DOWEL PIN MOUNTING 2X 040 y 40 CUSTOMER MOUNTING 13XM4x07 Y 40 12 5 1 2 NORMAL TRAVEL 13 1 2 LIMIT TRAVEL MOTOR FEEDBACK COUNTERBALANCE AIR SUPPLY CABLE EXIT
26. es Stage User s Manual 1 1 1 Optional Features An adapter place available from Aerotech is required to mount the ANT95 L stages on breadboard mounting tables Contact Aerotech for more details on optional features and configurations STAGE MOUNTING 4 0 7 THRU BREADBOARD MOUNTING PATTERN 4X M6 OR 1 4 20 BOLT C BORE SLOT DIMENSIONS MILLIMETERS Figure 1 2 Option Dimensions ANT95 25 L STAGE MOUNTING C BORE 8X M4x0 7 THRU DEPTH 141 8 BREADBOARD MOUNTING 8 4X M6 OR 1 4 20 BOLT C BORE SLOT 10 0 95 0 DIMENSIONS MILLIMETERS Figure 1 3 MP Option ANT95 50 L 2 Chapter 1 www aerotech com ANT95 L Series Stage User s Manual STAGE MOUNTING 4x M4x0 7 THRU 31 7 12 20 DIMENSIONS MILLIMETERS Figure 1 4 Option ANT95 75 L STAGE MOUNTING 22 1 50 8 4x M4x0 7 THRU al 87 200 a 80 542 55 213 152 4 101 6 600 401 50 100 125 150 288 30 1 13 22 5 50 42 5 BREADBOARD MOUNTING PATTERN 95 8x M6 OR 1 4 20 SHCS C BORE SLOTS DIMENSIONS MILLIMETERS Figure 1 5 MP Option ANT95 100 L www aerotech com Chapter 1 BREADBOARD MOUNTING PATTERN 8x M6 OR 1 4 20 SHCS C BORE SLOTS Overview a Overview ANT95 L Series Stage User s Manual The ANT95 L 25 mm and 50 mm travel stages are designed to be easily joined together in X Y con figurations Precision Alignments can also be performed by Aerotech if required A 6 mm thick mounting pl
27. int mounting if possible when attaching the payload to the stage NOTE For valid accuracies the mounting interface should be flat within 2 um to 5 um Do not attach payload to the stage table with screws that are too long It can bottom out and deform the lower axis tabletop WARNING 5 Repeat Step 11 of Section 5 4 1 with the payload attached 6 Remove the lower shipping bracket 7 Reconnect electrical power www aerotech com Chapter 5 41 ANT95 L Z ANT95 L Series Stage User s Manual 42 Chapter 5 www aerotech com ANT95 L Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod u
28. l adjustments DANGER Drive the stage table to one end of travel and remove power to the stage Remove any accumulated dust or debris that is visible inside of the assembly Remove any dirty or dried lubricant from the v channels of the linear bearing rails Use a clean lint free cloth with a side to side motion A swab soaked in isopropyl alcohol may be used to remove stubbom debris 4 Apply athin continuous film of lubricant to the exposed v channels of the cross rollers on both ends of the stage A good quality natural bristle artist s brush makes an excellent applicator Do not use any applicator that could scratch or otherwise damage the v channels 5 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides The stage table should move freely with little resistance Repeat steps 2 through 4 for any areas covered by the original table position Restore power to the stage drive the stage table back to its original position to redistribute lubricants 32 Chapter 4 www aerotech com ANT95 L Series Stage User s Manual ANT95 L Z Chapter 5 ANT95 L Z This chapter covers the standard features of the ANT95 L Z series Because the ANT95 L Z incorporates the ANT95 25 L and ANT95 50 L many of the topics covered previously in this manual still apply to the ANT95 1 2 N OTE Aerotech continually improves its product offerings and listed options can be superseded at any time Ref
29. ler NC Limit Switch Normally Closed Figure 3 6 Limit Switch Wiring 28 Chapter 3 www aerotech com ANT95 L Series Stage User s Manual Operating Specifications 3 6 Standard Motor Wiring Stages fitted with standard motors and encoders come from the factory completely wired and assembled For reference connector pin outputs and general wiring information is given in Table 3 4 and the following figures Pin outputs are defined in 3 6 NOTE Refertothe other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration NOTE If you are using your own cables to connect the stage ensure that the motor and ground wires can handle current higher than the continuous current listed in Table 3 3 The voltage rating of the wire insulation must be greater than the maximum bus voltage listed in Table 3 3 www aerotech com Chapter 3 29 Operating Specifications ANT95 L Series Stage User s Manual OW e eoo Table 3 4 Feedback and Motor Pin Assignments Pin _ S 2 ineremental encoder output Complementofoos Ls Sms meemewenesereutComkmemdin 0000 Incremental encoder either the spleen of Marker with a line driven TTL type encoder or 2 5 VDC bias level with amplified sine wave type encoder cow Common ground for feedback connectorwiing
30. m vertical load carrying capacity of ANT95 L stages with a 25 mm travel is 5 kg and the maximum vertical load carrying capacity of ANT95 L stages with a 50 75 and 100 mm travel is 7 kg Figure 3 2 through Figure 3 5 show the rated load ing for the 25 L 50 L 75 L and 100 L stages for various cantilever distances and application forces Fig ure 3 1 depicts the three loading conditions used in Figure 3 2 and Figure 3 3 Ls Lhr Lip Vertical Cantilevered Loading Horizontal Cantilevered Loading andL S Figure 3 1 Stage Orientations for L hr L hp www aerotech com Chapter 3 25 Operating Specifications ANT95 L Series Stage User s Manual 10 0 9 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 0 0 0 Applied Load kg 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 Offset Distance mm Figure 3 2 Load Capability of ANT95 25 L Stage 10 0 9 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 0 0 0 0 10 20 30 40 50 60 70 80 90 100110 120 130 140 150 Applied Load kg Offset Distance mm Figure 3 3 Load Capability of ANT95 50 L Stage 26 Chapter 3 www aerotech com ANT95 L Series Stage User s Manual Operating Specifications 10 0 9 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 Applied Load kg Offset Distance mm Figure 3 4 Load Capability of ANT95 75 L Stage 10 0 9 0 8 0 7 0 6 0 5 0 4 0 Applied Load kg 3 0 2 0 1 0 0 0 0 10
31. nd having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech c
32. ocumentation Document all results for future reference For information on electrical con nections refer to the Electrical Installation section later in this chapter the documentation of the motion con trol system delivered with the stage and the wiring drawings in Chapter 3 Operating Specifications The payload must be flat rigid and comparable to the stage in quality NOTE Aerotech recommends using 3 point mounting if possible when attaching the payload to the stage NOTE For valid accuracies the mounting interface should be flat within 2 um 5 um Refer to Section 3 4 for information on cantilevered loads and load positioning Do not attach a payload to the stage table with screws that are too long A screw passing through the stage table can come into contact with internal parts affecting travel and pos sibly damaging the stage WARNING www aerotech com Chapter 2 19 Installation ANT95 L Series Stage User s Manual 2 5 Electrical Installation Electrical installation requirements will vary depending on stage options Instructions in this manual are for stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system Contact Aerotech for further information regarding stages that are otherwise configured Aerotech motion control systems are adjusted at the factory for optimum performance When the ANT95 L series stage is part of acomplete Aerotech motion control system setup involves
33. om ANT95 L Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 03 00 Section s Affected General Information Section 1 4 Added section Section 3 1 Added section Chapter 2 Installation Section 2 3 Section Added safety information and warnings 2 5 Section 5 4 1 and Section 1 3 Section 3 6 Added note about current requirements of motor and ground wires www aerotech com Appendix B 45 Technical Changes ANT95 L Series Stage User s Manual Table B 2 Archived Changes Section s Revision Affected General Information 1 02 00 Section 1 1 1 ANT95 50 L mounting plate modified for compatibility with ANT95 3 V 1 01 00 Section 1 2 Added stage limit travel dimension 1 01 00 Section 5 2 Added stage limit travel dimension 46 Appendix B www aerotech com Index ANT95 L Series Stage User s Manual Index A Actuator Limit Operation 28 ANT95 L Z 33 Attaching the Payload 19 B BLMC 142 Specifications 22 C ness 20 Cleaners recommended 32 Cleaning 32 D Declaration of Incorporation 12 Dimensions 6 E Electrical 20 OMCOD
34. operation of the stage before attaching the pay load to the stage table 10 11 12 13 14 40 Connect and turn on the air supply to the counterbalance The tabletop should still be resting on the lower axis shipping clamp If the tabletop starts to slowly rise dial back the air supply pressure using the regulator knob Manually lift the tabletop and then slowly allow gravity to lower the tabletop while adjusting the air supply pressure until the tabletop reaches equilibrium The system is now balance Remove the lower shipping bracket Proceed with the electrical installation and test the motion control system in accordance with the sys tem documentation For information on electrical connections refer to Section 3 6 Standard Motor Wir ing Chapter 5 www aerotech com ANT95 L Series Stage User s Manual ANT95 L Z 5 4 2 Attaching the Payload to the Stage The following steps outline the payload mounting procedure 1 Complete the steps outlined in Section 5 4 1 2 Confirm that all electrical power is disconnected prior to making any mechanical adjustments Do not turn off air supply to system Adjustments to the pneumatic pressure will be required in later steps 3 Manually center the tabletop and reattach the lower shipping bracket This bracket was removed in Step 13 of Section 5 4 1 4 Attach the payload to the stage The tabletop should still be resting on the lower axis shipping clamp NOTE Use three po
35. pical ANT95 L Stage 1 MP Option Dimensions ANT95 25 L 2 MP Option ANT95 50 L 2 MP Option ANT95 75 L 3 MP Option ANT95 100 L 3 ANT95 50 L XY Configuration 4 ANT95 25 L Dimensions 6 ANT95 50 L Dimensions 7 ANT95 75 L Dimensions 8 ANT95 100 L Dimensions 9 Shipping Clamp on ANT95 25 L 14 Mounting to a Flat Surface 15 Mounting to a Curved Surface 16 Mounting Hole Locations 18 Stage Orientations for Lhr and Ls 25 Load
36. ronment be lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris lubricated every six months is recommended If the application process uses only a small portion of travel for most of the duty cycle it is recommended that the stage be periodically driven through full travel to redistribute the lubrication in the bearings The motor is completely non contact and requires no lubrication www aerotech com Chapter 4 31 Maintenance ANT95 L Series Stage User s Manual 4 2 Cleaning and Lubrication 4 2 1 Recommended Cleaners and Lubricants For standard linear roller bearings Kluberplex BEM 34 132 grease is recommended For high speed applications those near max speed at a duty cycle of 50 frequent maintenance with stand ard lubricants is required 4 2 2 Important Notes on Lubrication When cleaning and or lubricating components of the ANT95 L series stages 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the linear motion guides for any damage or signs of wear 4 2 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow Before beginning lubrication see Section 4 2 1 for recommended lubricants To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanica
37. series stages is measured at the center of travel 25 mm above the table with the stage in a horizontal position Aerotech ANT95 L stages are designed for and built in a 20 C 68 F environment The environmental temperature must be controlled to within 0 25 C per 24 hours to ensure the stage specifications are repeatable over an extended period of time Contact the factory for more details www aerotech com Chapter 3 21 Operating Specifications ANT95 L Series Stage User s Manual 3 3 Basic Specifications Basic ANT95 L series positioning stage specifications are shown in Table 3 2 Resolution is dependent on encoder resolution and controller interpolation Specifications for the standard motor are given in Table 3 3 Specifications listed in this manual are for your reference For the latest product information see the Aero tech website Table 3 2 ANT95 L Series Specifications ANT95 25 L ANT95 50 L Mechanical Specifications ANT95 25 L PLUS ANT95 50 L PLUS Travel 25 mm 1 in 50 mm 2 in 3 0 120 250 10 3 0 120 250 10 yin yin yin yin Resolution ig Mean Time Between Fail 30 000 Hours 1 Certified with each stage 2 In Position Jitter listing is 3 sigma value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoin
38. t dependent Consult the factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller 22 Chapter 3 www aerotech com ANT95 L Series Stage User s Manual Operating Specifications Table 3 2 ANT95 L Series Specifications continued ANT95 75 L ANT95 100 L Mechanical Specifications ANT95 75 L PLUS ANT95 100 L PLUS sid 75 mm 3 in 100 mm 4 in uin uin Min uin Resolution Eme m pd Mean Time Between Fail 30 000 Hours 1 Certified with each stage 2 In Position Jitter listing is 3 sigma value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult the factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller www aerotech com Chapter 3 23 Operating Specifications ANT95 L Series Stage User s Manual Table 3 3 ANT95 L Motor Specifications ANT95 ANT95 ANT95 ANT95 25 L 50 L 75 L 100 L Performance Specifications 5 Continuous Force No Cooling 2 N Ib 7 7 1 72 97 2 18 97 2 18 2 90 Peak Force 9 N Ib 30 7 6 9 38 7 8 7 38 7 8 7 43 7 9 8 Electrical Specifications 5 BEMF Constant Line to Line Max V m s 2 86 3 78 3 78 4 77 Viin s 0 07 0 10 0 10 0 12 Continuo
39. us Current No Cooling Amppk 3 10 2 94 2 94 2 62 Amprms 2 19 2 08 2 08 1 86 Peak Current Stall Amppk 12 40 11 76 11 76 10 49 Amprms 8 77 8 31 8 31 7 42 N Amppk 2 48 3 28 3 28 4 13 Ib Amppk 0 56 0 74 0 74 0 93 56 Force Constant Sine Drive 59 N Amprms 3 51 4 64 4 64 5 85 Ib Amp 0 79 1 04 1 04 1 32 rms Ib VW 0 27 0 31 0 31 0 36 Thermal Resistance No Cooling 1 52 Mechanical Specifications Magnetic Pole Pitch mm in 16 00 16 00 16 00 16 00 0 63 0 63 0 63 0 63 1 Performance is dependant upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All performance and electrical specifications 10 6 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing 24 Chapter 3 www aerotech com ANT95 L Series Stage User s Manual Operating Specifications 3 4 Load Capability Symmetrically distribute application loads whenever possible the payload should be centered on the stage table and the entire stage should be centered on the support structure With the stage lying flat horizontal and the application load vertically applied and symmetrically distributed the maximu
40. ws 4 25mm travel only Manually lift the Z Axis tabletop while sliding off the pneumatics cover so that the cyl inder rod end does not catch on the cover slot Manually set the Z Axis tabletop back down on the lower shipping bracket 6 Mountthe Z Axis assembly using one of the available customer mounting patterns shown in Section 5 2 You can manually move the base of the pneumatics cylinder to the left or right to gain access to mount ing holes in the vertical angle bracket A long ball end T handle is recommended Cylinder Base Mounting Hardware Figure 5 5 95 1 4 Mounting Pattern Pneumatics Cylinder Clearance Www aerotech com Chapter 5 39 ANT95 L Z ANT95 L Series Stage User s Manual 7 Torque the mounting screws to 2 3 N m 20 in Ibs NOTE lf the Z Axis assembly is mounted to the tabletop of any ANT95 series stage you must use M4 hardware Do not attach the Z Axis assembly to another ANT95 series stage with hardware that is too long It will bottom out and deform the lower axis tabletop WARNING 9 Verify that the pneumatics cylinder is again centered vertically in the assembly To verify this manually lift and lower the stage while watching the base of the cylinder If you see the cylinder shifting around from front to back or from right to left adjust until movement is minimized Reattach the pneumatics cover by reversing steps 3 and 4 NOTE To prevent damage to delicate payloads test the
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