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649A Pressure Controller with Mass Flow Meter User Manual
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1. DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service personnel only KEEP AWAY FROM LIVE CIRCUITS Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary and ensure that the material used is compatible with sealing materials PURGE THE INSTRUMENT After installing the unit or before its removal from a system be sure to purge the unit completely with a clean dry gas to eliminate all traces of the previously used flow material USE PROPER PROCEDURES WHEN PURGING This instrument must be purged under a ventilation hood and gloves must be worn to protect personnel DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion do not operate this product in an explo
2. Carbon Dioxide 0 2016 Carbon Monoxide 0 2488 Carbon Tetrachloride 0 1655 Carbon Tetraflouride 0 1654 Freon 14 Chlorine 0 1144 Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen 0 2613 2 322 Deuterium 1 722 0 1799 Diborane B H He 0 508 Dibromodifluoromethane CBr F 0 15 Dichlorodifluoromethane CCLE 0 1432 Freon 12 Dichlorofluoromethane CHCLF 0 140 Freon 21 Dichloromethysilane CH SiCL 0 1882 Table continued on next page 61 Appendix D Gas Correction Factors SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l E 0 C FACTOR Dichlorosilane 0 150 1 2 Dichlorotetrafluoroethane 0 160 Freon 114 1 1 Difluoroethylene Freon 1132A 2 2 Dimethylpropane 0 3914 Ethane 0 4097 Fluorine Fluoroform Freon 23 Freon 11 0 1357 Freon 12 0 1432 Freon 13 0 153 Freon 13 B1 0 1113 Freon 14 0 1654 Freon 21 0 140 Freon 22 0 1544 Freon 23 0 176 Freon 113 0 161 Freon 114 0 160 Freon 115 0 164 Freon 116 0 1843 Freon C318 0 1866 Freon 1132A 0 224 2 857 Helium 1 241 0 1786 Hexafluoroethane 0 1843 6 157 Freon 116 Hydrogen 3 419 0 0899 Hydrogen Bromide 0 0861 3 610 Table continued on next page 62 Appendix D Gas Correction Factors SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l e 0 C FACTOR Hydrogen Chloride 0 1912 Hydrogen Fl
3. 13 Trip Poirt A 6 5VDC 14 TripPort B 7 15VDC 15 Cressis Ground 8 Set Point M serais III 000098221 Moens UNI N EMN 649A12T21CAVR Flow 20 SCCM Gas N2 Pressure 100 TORR MKS Instruments Inc Madein the USA Figure 2 Back View of the Type 649 Controller Side View The flow meter adjustments are located on the inlet side of the 649 controller MFM Adjust O Zero 9 sm 0 50 12 7 Y 0 74 18 8 gt 1 48 37 6 Figure 3 Side View Inlet of the Type 649 Controller 14 Chapter Two Installation Dimensions Bottom View Mounting Hole Outlet Fitting 0 38 9 5 ES v Z x P SAG C Lk 038 9 5 A PEN TN NDA Jl d Tuy P xy Inlet Fitting e Mounting Hole lt gt 8 32 UNC 2B x 0 340 DP 0 79 20 3 18 80 7 2 places Figure 4 Bottom View of the Type 649 Controller 15 Setup Chapter Two Installation Setup This section covers how to install the 649 controller into your system Fittings The 649 pressure controller is available with the following fittings e Cajon 4 VCR male compatible e Cajon 8 VCR male compatible Mounting Hardware The 649 controller has two mounting holes located on the bottom or base of the unit Use 8 32 UNC 2B hardware to mount the unit Refer to Figure 4 page 15 shows the location and dimension of the mounting hole Gas Pressure The control valve housed inside the 649 controller enclosure is rated for a
4. 8 values positions 8 and 9 repeat the values of positions O and 1 1 Send your set point signal If you are using multiple set points send the most critical set point 2 Change the set point in the direction that you expect the system to deviate in and observe the controller response A properly tuned controller will reach the new set point rapidly without overshoot e Ifthe controller is too slow to reach the set point increase the P term e Ifthe pressure fluctuates around the set point decrease the P term e Ifthe pressure overshoots the set point and then settles to the correct pressure increase the I term 3 Repeat steps 1 and 2 until the response of the controller is optimized 4 Change the set point in the opposite direction and observe the response Although the response may vary slightly it should be acceptable If it is not acceptable follow the guidelines in steps 1 and 2 to tune the controller 38 Chapter Four Operation How To Adjust the Trip Point Values How To Adjust the Trip Point Values Equipment required digital volt meter DVM 4 8 mm hex or open ended wrench Caution Y Only qualified individuals should perform the adjustments You must comply with all the necessary ESD and handling precautions while adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments Each trip point has a test jack that allows you to measure the trip point s
5. Factor GCF for Flow Metering A Gas Correction Factor GCF is used to indicate the ratio of flow rates of different gases which will produce the same output voltage from a mass flow meter The GCF is a function of specific heat density and the molecular structure of the gases Since flow meters are usually calibrated with nitrogen nitrogen is used as the baseline gas GCF 1 Appendix D Gas Correction Factors page 61 lists the gas correction factors for the most commonly used gases If the gas you are using is not listed in the appendix you must calculate its GCF using the following equation GCF 0 3106 S d Cp where GCF Gas Correction Factor for gas X d Standard Density of gas X g l at 0 C and 760 mmHg Cp Specific Heat of gas X cal g C 0 3106 Standard Density of nitrogen Specific Heat of nitrogen S Molecular Structure correction factor where S equals 1 030 for Monatomic gases 1 000 for Diatomic gases 0 941 for Triatomic gases 0 880 for Polyatomic gases Note ud 1 When using the GCF the accuracy of the flow reading may vary by 5 however the repeatability will remain 0 2 of F S 2 All MKS readouts have Gas Correction Adjustment controls to provide direct readout 34 Chapter Four Operation How To Check the Pressure Transducer Zero Chapter Four Operation How To Check the Pressure Transducer Zero Check the pressure transducer zero before operating the unit initially an
6. P Term The controller responds much faster however some overshoot occurs Controller Response with Increased I Term Reducing the P term to 0 and increasing the I term to 5 yields 8 Settling Time Settling Time gt lt 7 l P 0 S 6 SetPoint _ l 5 Signal A g a 4 YW p 2 Time Figure 12 Controller Response with Increased I Term The response of the controller is quick yet no overshoot occurs This combination of P term and I term yields the best control for our example system 30 Chapter Three Overview Priority of Commands Priority of Commands The 649 controller has an established hierarchy that it uses to determine which commands take precedence The commands and operating modes are listed according to the order of priority from highest to lowest e Valve Close Command e Valve Open Command e Set Point Recognition Operating Mode e Closed Loop Control Operating Mode Valve Close and Valve Open Commands The valve override commands immediately move the valve to the appropriate position either closed or open These valve commands take precedence over any other operation The overline indicates that the valve commands are active when their respective pins are pulled low For example if the valve is currently operating under pressure control to maintain a desired pressure and the Valve Open pin pin 4 is pulled low the valve will move to the fully open position The Valve Close command has the high
7. controller in a flowing system where gas is continually added and evacuated Do not use the controller in a dead ended system a system which cannot remove excess pressure The 649 controller is not designed to vent excess pressure to the atmosphere 12 Chapter Two Installation Dimensions e Verify that your pressure system can withstand pressure equal to the full scale range of the pressure transducer Y our pressure system may be exposed to the full scale pressure since the 649 controller will control over the entire full scale range of the pressure transducer As a precaution you may choose to install a safety valve in your system to vent excess pressure Dimensions Note el All dimensions are listed in inches with millimeters referenced in parentheses Front and Back Views The front of the 649 controller has an arrow to indicate the direction of gas flow through the unit The back of the unit has the serial number tag and the pinout for the 15 pin Type D connector A A CD MUS m Type 649 a e mz mA 5 29 d 5 50 134 4 139 8 FLOWEEEEEEEEED En E Y Y 4 VCR 6 66 169 2 lt 8 VCR 7 11 180 6 Figure 1 Front View of the Type 649 Controller 13 Dimensions Chapter Two Installation PIN SIGNAL PIN SIGNAL 1 Valve Test Point 9 HowQut 2 Pressure Sig Output 10 Optional Input 3 Valve Close 11 Signa 4 Valve Qpen 12 Signal Common 5 Poner Common
8. function XXXXXX For outputs Indicates that the output is active low Chapter One General Information Customer Support Customer Support Standard maintenance and repair services are available through all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of your Type 649 instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an ERA Number Equipment Return Authorization Number from the MKS Calibration and Service Center before shipping The ERA Number expedites handling and ensures proper servicing of your instrument Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Warning All returns to MKS Instruments must be free of harmful corrosive radioactive or toxic materials Customer Support Chapter One General Information This page intentionally left blank Chapter Two Installation How To Unpack the Type 649 Unit Chapter Two Installation How To Unpack the Type 649 Unit MKS has carefully packed the Type 649 unit so that it will reach you in perfect operating order Upo
9. independently and controls an open collector output that can be connected to an external relay Each trip point has an adjustment pot a status LED and a test jack Refer to Figure 6 page 23 for the location of the trip point adjustment pots and LEDs The test jacks are located inside of the unit under the enclosure as shown in Figure 14 page 41 Refer to How To Adjust the Trip Point Values page 39 for instructions on changing the trip point values Action of the Trip Points The trip points can be turned on when the pressure is above or below the trip point value depending upon the location of jumpers on the Transducer board The initial configuration is e Trip Point A is set to trip high it is on when the pressure is above the trip point it is off when the pressure is below the trip point value e Trip Point B is set to trip low itis on when the pressure is below the trip point it is off when the pressure is above the trip point value When on the trip point is connected through the collector of an NPN transistor to power ground Refer to Trip Point Specifications page 49 for the ratings You can use the unit s trip point output available on pins 13 and 14 of the I O connector for further process control The complete pinout for the I O connector is listed in Table 2 page 18 To change the action of a trip point refer to How To Select the Trip Point Action page 40 Note id The trip points react to the pressure signal
10. located downstream of the 649 controller Therefore the 649 controller controls the pressure of the process chamber located downstream Example Assume that your 649 controller is positioned for downstream control The 649 controller is positioned before the controlled pressure volume so it will regulate the pressure of the gas entering the pressure system Figure 5 page 17 shows the correct location for the 649 controller When the actual pressure reading is less than the set point value the 649 controller opens the valve to increase the amount of gas entering the system As the valve opens gas enters the pressure system so the pressure rises to meet the set point value When the actual pressure reading is greater than the set point value the 649 controller closes the valve to decrease the amount of gas entering the system As the valve closes less gas enters the pressure system so the pressure drops to meet the set point value 25 Flow Measurement Overview Chapter Three Overview Flow Measurement Overview The 649 controller measures the mass flow rate of a gas Flow Path Upon entering the 649 controller the gas stream passes first through the metering section of the instrument for its mass flow to be measured The gas moves on through the control valve which regulates the pressure according to the given set point and then exits the instrument at the established pressure The metering section consists of one of the foll
11. maximum inlet pressure of 1034 kPa Ensure that the inlet pressure is consistent with the overpressure limit of the pressure transducer This will eliminate damage to the transducer should the valve open fully Refer to Applications with a Large Differential Pressure page 33 for more information The control valve is not a positive shutoff valve Some leakage across the valve may occur Refer to Appendix A Product Specifications page 47 for the leak integrity specifications If necessary install a separate positive shutoff valve in your system Caution Take care not to expose the pressure transducer to pressures above its full scale range Pressures exceeding 310 kPa or twice the full scale pressure whichever is greater may damage the pressure transducer 16 Chapter Two Installation Setup Installing the Unit The 649 Pressure Controller should be mounted to provide downstream pressure control Connect the controller so that the flow arrow points toward the system whose pressure you need to control Note a Connect the 649 controller to your system so that the gas flows in the direction of the flow arrow on the front of the unit Downstream Pressure Control Downstream pressure control occurs when the 649 controller is positioned before the controlled pressure volume in the gas flow path so that the 649 unit controls the pressure downstream of the 649 controller itself The gas enters the 649 controller on the flow meter s
12. only not the flow signal 32 Chapter Three Overview Applications with a Large Differential Pressure Applications with a Large Differential Pressure Applications with a large differential pressure between the inlet and outlet or a large inlet pressure may require special precautions e Ifthe inlet pressure is more than two times the pressure transducer full scale pressure or 310 kPa whichever is greater You must ensure that the valve will never be fully opened to the pressure transducer Pressures in excess of 310 kPa or two times the pressure transducer full scale whichever is greater may damage the pressure transducer e The inlet pressure on the valve is 1034 kPa This is the maximum inlet pressure rating of the valve The force of high inlet pressure on the valve may inhibit valve movement A normally closed valve may be unable to open Labels The 649 controller carries a serial number label which identifies the serial number model number calibration gas full scale flow rate and pressure range It also displays the CE Mark which indicates compliance with European directives The serial number label is located on the back of the unit sera DINEI 000098221 Model 649A12T21CAVR Flow 20 SCCM Gas N2 C Pressure 100 TORR MKS Instruments Inc Madein the USA Figure 13 Serial Number Label 33 The Gas Correction Factor GCF for Flow Metering Chapter Three Overview The Gas Correction
13. the 649 unit is not a positive shutoff valve You may need to install a separate positive shutoff valve in your system Design Features of the Integral Mass Flow Meter The design of the integral mass flow meter incorporates an advanced flow sensor U S Patent Foreign Patents Pending and an optimized bypass The latest generation two element sensing circuit provides accurate repeatable performance even in low flow ranges 10 sccm Low temperature effect from ambient temperature change and a low attitude sensitivity effect are also ensured The newly optimized sensor bypass arrangement minimizes the flow splitting error for gases with different densities which dramatically improves measurement accuracy when gases other than the calibration gas are used 1 U S Patent 5461913 foreign patents pending How This Manual is Organized Chapter One General Information Cleanliness Features The design of the pressure controller ensures extremely low external leakage and minimizes a key source of particle generation outgassing and permeation The design also incorporates minimal wetted surface area To further ensure its cleanliness the 649 controller undergoes precision machining as well as a proprietary cleaning process The instrument is assembled and double bagged in a Class 100 clean room How This Manual is Organized This manual is designed to provide instructions on how to set up install and operate a Type 649 unit Befor
14. 121004 P1 Rev C 07 08 MKS Type 649A Pressure Controller with an Integral Mass Flow Meter Copyright O 2007 by MKS Instruments Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Baratron is a registered trademark of MKS Instruments Inc Andover MA Cajon and VCR are registered trademarks of Cajon Company Macedonia OH Viton is registered trademark of DuPont Dow Elastomers Inc Wilmington DE Kel F is a registered trademark of 3M Minneapolis MN Elgiloy is a registered trademark of Elgiloy Limited Partnership Elgin IL Protected by U S Patent 5461913 foreign patents pending Table of Contents Table of Contents safety Information n e er id ive p cea e cie e do 1 Symbols Used in This Instruction Manual eese 1 Symbols Found on the Unit 0 0 cescesecssecseeeeseeeeaeesseeeaaecsaecaeeeeeseeseeeseaeeeaeeeaaeenaes 2 Chapter One General Information sees eene ona nc nan con en rennen 5 Introductions lees s tenet a ie tee teh eis ts 5 Design Features of the Integral Mass Flow Meter eee 5 Cleanliness Features de at e duc tee tad ne eae 6 How This Manual is Organized eese nennen nennen nennen 6 Man
15. 15 VDC 5 250 mA maximum during first five seconds at start up 200 mA at steady state 100 ft 310 kPa or 200 F S whichever is greater 0 to 5 VDC 0 to 10 VDC initial configuration 0 to 5 VDC jumper selectable 0 to 5 V or 0 to 10 V matches the pressure signal output Absolute pressure capacitance manometer Normally closed Kel F Viton metal or Kalrez lt 0 4 um Ra electropolished 1 6 kg 316L VIM VAR stainless steel Inconel Nickel Elgiloy 48 Appendix A Product Specifications Environmental Specifications Environmental Specifications Ambient Operating Temperature Range 0 to 50 C Storage Temperature Range 20 to 80 C Storage Humidity Range 0 to 95 Relative Humidity non condensing Trip Point Specifications Trip Points Two open collector transistors adjustable from 1 to 100 full scale Rated Current 30 VDC 250 mA State On above or below trip point jumper selectable Hysteresis 3 Full Scale factory set Status LEDs Green when the transistor is on Settings 0 to 5 Volts corresponds to 1 to 100 full scale Due to continuing research and development activities these product specifications are subject to change without notice 49 Trip Point Specifications Appendix A Product Specifications This page intentionally left blank 50 Appendix B Model Code Explanation Model Code Appendix B Model Code Explanation Model Code The options of your 649 un
16. 2 Note ud If the point on the graph falls close to the maximum flow rate for an orifice you may choose to use the next largest orifice number 1000000 1000 E z 3 E 9 100000 100 E 5 1 2 10000 0 i E 1000 e 1 2 E p E 100 01 3 gt 2 10 E 0 01 1 i 0 001 1 10 100 1000 Index Number Figure 15 Flow Range Selection 4 Check the orifice size of your 649 controller included in the model number 57 How To Verify the Orifice Selection Appendix C Valve Orifice Selection Using Different Gases The valve orifice selection data is based on nitrogen gas If you will be using a gas other than nitrogen you need to compensate for the density difference between nitrogen and your process gas before you can select the appropriate valve orifice 1 To calculate an orifice sizing factor use the equation DEI Orifice Sizing Factor Gas Density Appendix D Gas Correction Factors page 61 lists the standard density for common gases 2 To calculate the valve orifice index number for the new gas valve orifice index number for nitrogen x orifice sizing factor new valve index number 3 Proceed with step 3 of How To Verify the Orifice Selection page 57 to determine the correct orifice size Example 1 Using Sulfur Hexafluoride SF Following the example in How To Verify the Orifice Selection page 56 using 100 sulfur hexafluoride SFg 1 Calculate the orifice sizing factor using the equation above The s
17. 21 for the location of the trip point adjustments 4 Measure the value of TP B by inserting a positive test probe into the test jack labeled TP B and the ground probe into the test jack labeled Gnd 5 Usea small screwdriver to adjust the pot for TP B to set TP B to 2 375 Volts The trip points will be off when the pressure reading is between 6 333 to 6 999 kPa Should the pressure deviate from this range the appropriate trip point will turn on and its LED will illuminate Trip Point A will turn on when the pressure exceeds 6 999 kPa and Trip Point B will turn on when the pressure falls below 6 333 kPa 42 Chapter Four Operation How To Change the Pressure Output Signal Range How To Change the Pressure Output Signal Range The pressure output signal can be a 0 to 10 Volt initial setting or O to 5 Volt signal To change the range of the pressure output signal and therefore the set point input you must remove the cover of the 649 pressure controller and reposition two jumpers on the Transducer board Note ud The range of the pressure output signal determines the range used for the 3 set point input signal The initial configuration is for a O to 10 Volt pressure output signal Therefore a set point input signal of 10 Volts is equal to 100 of full scale If you change the range of the pressure output signal to 0 to 5 Volts a 2 5 Volt set point signal would be 50 of full scale 1 Stop the gas flow through the 649 pressure co
18. Metal M Viton V Kel F F Kalrez D Fittings B The choice of fittings is indicated by a single letter code Fittings Ordering Code Cajon 4 VCR male R Cajon 8 VCR male T 53 Model Code Appendix B Model Code Explanation This page intentionally left blank 54 Appendix C Valve Orifice Selection General Information Appendix C Valve Orifice Selection General Information The 649 controller is available in four valve orifice sizes You should confirm that the valve orifice in your 649 controller is the correct size for your application before you install it into your system The orifice is not adjustable and is only replaceable at the factory This selection guide is valid with any valve plug seat material Checking the Valve Orifice Size The valve orifice number is included in the model code number of your 649 controller The nominal flow rate range for the orifice numbers are listed in Table 5 Refer to Appendix B Model Code Explanation page 51 for a description of the model code Valve Orifice Size Orifice Size Model Code Entry Z Nominal Range sccm of N with 101 3 kPa AP A 2 E CM HET NNI o x Table 5 Valve Orifice Size 55 How To Verify the Orifice Selection Appendix C Valve Orifice Selection How To Verify the Orifice Selection The correct orifice depends on three pieces of information the upstream pressure the downstream pressure and the flow rate These instructions assume that yo
19. al with respect to time Therefore as time passes the integral term acts to position the valve to reduce the error signal to zero An increase in the integration time increases the period of time over which the error signal is generated and the system response gets slower Figure 9 shows the effects of the Integral term o 3 Set Point Signal Pressure Signal TX eter S Integral term set too high integration time N y A O too short system overshoots the set point Time 5 Set Point Signal p pressure Signal D A Integral term set too low integration time rs N E AE Set Se too long system slow to reach set point Time Figure 9 Effects of the Integral Control Adjusting the Integral Control The Integral 1 term adjustment is located on the top of the 649 unit as shown in Figure 6 page 23 The control is a 10 position dial where the O setting has the longest integration time the 9 position setting has the shortest integration time The initial setting is 0 Note ud To shorten the integration time increase the I term setting v 28 Chapter Three Overview Tuning the 649 Pressure Controller Tuning the 649 Controller Tuning the 649 controller involves adjusting the Proportional and Integral terms to optimize the response of the controller in your system Since every system is different the optimum settings for the P term and I term will vary Also the response of the system to increasing an
20. d decreasing pressures may vary Tune the system to provide the best response in the direction of pressure change that you anticipate The following graphs show the response of the 649 controller to changes in the set point The set point changed from 533 Pa 2 Volts to 800 3 Volts and back again Note ud The following three graphs were generated on a system consisting of a 649 controller with a 1333Pa pressure transducer 1000 sccm flow of nitrogen gas 207 kPa inlet pressure and 1 liter system volume Tuning with nitrogen may not offer maximum performance if another gas is used for processing The same P and I term values may not create the same effect in your system Controller Response with the Initial Values The initial values P 0 I 0 yield Settling Time Settling Time po Set Point S i e Signal X o 5 a 4 g 2 Time Figure 10 Controller Response with Initial P Term and I Term Values The controller response is slow to reach the set point however there is no pressure overshoot and no oscillation Increase the P term to create a faster response 29 Tuning the 649 Pressure Controller Chapter Three Overview Controller Response with Increased P Term Increasing the P term to 1 while holding the I term at 0 yields 8 Settling Time Settling Time oJ gt K lt e 6 Set Point L 20 Signal A 5 pus o EN i 2 A EUR A DUE Time Figure 11 Controller Response with Increased
21. d then periodically as required The zero can be set or reset by adjusting the zero potentiometer located on the top cover of the 649 controller or on the front panel of an MKS Power Supply Readout if you are using one Note ud The outlet port serves as the pressure transducer inlet port Figure 1 page 13 shows the flow direction arrow To zero the pressure transducer within the 649 controller you must pump the unit with the power on down to a pressure less than the pressure transducer s resolution 0 01 of Full Scale Note ud The zero adjustment must be made at a pressure less than the pressure transducer s resolution 0 01 of F S In addition you should position the unit in the same orientation as it will be positioned when installed in your system Zeroing a pressure transducer above its stated minimum resolution creates a zero offset relative to true absolute pressure All subsequent readings are then linear and accurate relative to the offset value Note ud If your system cannot achieve a sufficiently low pressure to set the pressure transducer zero you may use a vacuum leak detector with sufficient vacuum pumping to achieve a proper zeroing pressure In this case mount the unit on the leak detector in the same plane of orientation as it will be during actual use 35 How To Adjust the Pressure Transducer Span Chapter Four Operation 1 Install the 649 controller in a system and connect a power supply read
22. e A add 45 Zero Adjustment 3 ore nta RU p tee t ee pnt De gen 45 Appendix A Product Specifications eese nennen ene enr a 47 Table of Contents Performance Specifications speed ela 47 Physical Specifications ette de e hae e E E e s 48 Environmental Specifications eese ener nnne nennen nennen 49 Trip Point Specifications eau tea e EDO ee 49 Appendix B Model Code Explanation essere eene nennen nennen 51 Model Code eiae tata lata isa 51 Appendix C Valve Orifice Selections mosirar e E E nono nono ccoo nro nennen nennen 55 General Information icti eee ice ipe oc ia 55 Checking the Valve Orifice Size sissies rene 55 How To Verify the Orifice Selection enne 56 Using Ditterent Gases de d e HS d e eda dte t E 58 Appendix D Gas Correction FactolS oooonocnnncnnonononcnonoconaconnconncnnn conc nnna nono conan cnn a e rennen rene 61 Ini qme E 65 Table of Contents vi List of Figures List of Figures Figure 1 Front View of the Type 649 Controller eese 13 Figure 2 Back View of the Type 649 Controller eene 14 Figure 3 Side View Inlet of the Type 649 Controller eee 14 Figure 4 Bottom View of the Type 649 Controller eee 15 Figure 5 Downstream Pressure Control eese neret nennen nennen 17 Figure 6 Top View of the Type 649 Cont
23. e installing your Type 649 unit in a system and or operating it carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual In addition observe and obey all WARNING and CAUTION notes provided throughout the manual Chapter One General Information this chapter introduces the product and describes the organization of the manual Chapter Two Installation explains the environmental requirements and describes how to mount the instrument in your system Chapter Three Overview gives a brief description of the instrument and its functionality Chapter Four Operation describes how to use the instrument and explains all the functions and features Chapter Five Maintenance lists any maintenance required to keep the instrument in good working condition Chapter Six Troubleshooting provides a reference should the instrument malfunction Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the model code Appendix C Valve Orifice Selection presents the information used to select the appropriate flow range for nitrogen and other gases Appendix D Gas Correction Factors lists the gas correction factors of commonly used gases Manual Conventions The following conventions apply throughout this manual XXXXXX For inputs Indicates that the line must be pulled low to activate the
24. e introduce another signal such as a zero corrected pressure signal into the control circuitry of the 649 controller When a signal on pin 10 is introduced the controlled voltage which goes to the control loop is the mid value between the Pressure Output signal pin 2 and the signal at pin 10 The Trip Point Outputs Pins 13 and 14 The 649 controller offers two alarm trip points Trip Point A and Trip Point B Each trip point has an LED and adjustment pot on the top cover The trip points are open collector transistors The trip points can be set from 1 to 100 of full scale by adjusting the appropriate trip point pot located on the top of the unit The trip point setting is a O to 5 VDC signal available inside of the unit Use the appropriate trip point output signal to control a relay or another piece of equipment such as a valve or as a digital input to a computer The trip point signal is pulled to ground when the trip point is on The voltage value of the pin is 5 Volts when the respective trip point is off Refer to Trip Points page 32 for a complete description of the trip points 21 Initial Configuration Chapter Two Installation Initial Configuration The 649 pressure controller is shipped from the factory with the configuration listed in Table 3 Trip Point A Setting 100 F S 1 to 100 F S Action Trip high TH Trip low TL Trip Point B Setting 1 F S 1 to 100 F S Action Trip low TL Trip high TH P Te
25. est priority Therefore if both the Valve Open and Valve Close commands are issued the valve will move to the fully closed position Set Point Recognition Operating Mode The 649 controller can control pressure within its specifications over the range from 5 to 100 of full scale Under certain conditions the 649 is capable of controlling below 5 down to 1 although performance in this control range is application dependent If the set point signal is less than 1 of full scale the set point recognition becomes effective The 649 controller positions its valve in the fully closed position Increase the set point signal to a value greater than 196 of full scale to resume pressure control Closed Loop Control Operating Mode When the 649 controller operates in closed loop control mode it compares the pressure signal from its transducer pin 2 or any signal on the Optional Input pin pin 10 to the set point The 649 controller positions its valve to achieve or maintain the set point pressure or other variable if the Optional Input is used in the system Closed loop control mode has the lowest priority The 649 controller defaults to closed loop control in the absence of any higher priority commands Refer to O Connector page 18 for more information on the Optional Input function 31 Trip Points Chapter Three Overview Trip Points The 649 controller provides two trip points Trip Point A and Trip Point B Each trip point operates
26. etting The test jacks are located inside the unit Figure 14 page 41 shows the location of the test jacks and a ground connection The trip point adjustment pots located on the top of the unit allow you to vary the trip point setting The range of the trip point setting is O to 5 Volts corresponding to 0 to 100 of pressure transducer full scale Note The trip point range is from 0 to 5 Volts regardless of the range of the set point input and pressure output signals 1 Stop the gas flow through the 649 controller 2 Remove any leads or wires attached to the connector on the 649 controller 3 Usea4 8 mm hex wrench or open ended wrench to remove the hex nuts on each side of the I O connector Refer to Figure 6 page 23 for the location of the hex nuts on the I O connector Place the hex nuts aside for safe keeping 4 Position the controller with the front side facing you and pull up on the enclosure to remove it The board assembly will be visible with the Transducer board facing you and the Control board behind it 5 Insert the positive test probe into the test jack labeled TP A and the ground probe into the test jack labeled Gnd Insert the probes sufficiently to obtain a good reading There is no back plane in the test jacks to stop the probe 6 Use a small screwdriver to adjust the trip point adjustment pot labeled TP A 39 How To Select the Trip Point Action Chapter Four Operation Refer
27. g control valve closed loop electronics and patented thermal mass flow sensor The closed loop control circuitry enables the unit to function as a proportional integral PI controller The combination of a pressure controller and mass flow meter in one unit makes the 649 pressure controller the ideal solution for backside wafer cooling applications In addition the unit s compact size and small footprint reduce space requirements compared to multi component systems The 649 pressure controller is available with full scale pressure ranges from 1333 Pa to 13 3 kPa and full scale flow rates from 10 to 5000 sccm nitrogen equivalent The 649 unit is metal sealed the valve plug material can be metal Viton Kel F or Kalrez The unit can have either Cajon 4 VCR male or equivalent or 8 VCR male or equivalent male fittings One Type D connector located on the top of the unit accepts the input power and has both the pressure input and output and flow output signals You can connect the 649 controller to an MKS Type 247 or 246 Mass Flow Controller Power Supply Readout or a Type 647 Mass Flow and Pressure Programmer Display unit The 649 pressure controller provides two user settable alarm trip points The pressure trip points can be set from 1 to 100 of full scale Each trip point controls an open collector transistor An LED light located on the top of the unit indicates the trip point status Caution The control valve within
28. he same amount of flow However since the point on the graph is very near the top of the range for orifice number 1 you may choose orifice number 2 if control in the lower end of the flow range is not critical 59 How To Verify the Orifice Selection Appendix C Valve Orifice Selection Example 3 Using 30 Hydrogen H2 and 70 Nitrogen N2 Using a mixture of gases such as 30 hydrogen and 70 nitrogen may impact the orifice size Following the example in How To Verify the Orifice Selection page 56 with this gas mixture 1 Calculate the orifice sizing factor using the equation page 58 The standard density of H is 0 0899 and N is 1 250 so the orifice sizing factor is AM 1 18 Orifice Sizing Factor 0 0899 0 3 1 250 0 7 Since the gas mixture is largely nitrogen the orifice sizing factor is close to 1 Calculate the valve index number using the equation page 58 175 x 1 18 207 valve index number for 3026H 2 70 6N Use the index number and the maximum flow rate to determine the orifice number from Figure 15 page 57 Using the maximum flow rate in our example of 1000 sccm and an index number of 207 the correct orifice number would be number 2 60 Appendix D Gas Correction Factors Appendix D Gas Correction Factors SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C gl 0 C FACTOR Air 0 240 Ammonia 3 0 492 Argon 0 1244 Arsine sH 0 1167 Boron Trichloride 0 1279 Bromine 0 0539
29. ide and flows in the direction of the flow arrow on the front of the unit The outlet of the instrument is the controlled pressure port Type 649 ee an rm Py E FLO VV A Controller Pressure Port y ne d _ Controlled TS gt HI MOS Volume O d Gas Flow Figure 5 Downstream Pressure Control Note ud The 649 controller is designed for downstream pressure control only That is it controls the pressure of a system located downstream of the 649 controller 17 Electrical Information Chapter Two Installation Electrical Information l O Connector The 649 controller has one 15 pin male Type D connector that provides the pressure output set point input and trip point output signals Refer to Figure 6 page 23 for the location of the connector ML ME NE l C 9 1 ee s rs O iis vc spy As vo O T7 RN So Table 2 I O Connector Pinout Pressure Signal Output Pin 2 The 649 controller allows you to access the pressure signal from the pressure transducer correct it in some way and re introduce it into pin 10 of the I O connector to be used as the input signal in closed loop control This function is useful if you need to correct for a zero offset Pin 2 accesses the pressure signal as it travels from the pressure transducer to the control circuitry Pin 10 re introduces the signal into the 649 controller Set Point Input Pin 8 18 Chapter Two Installation Elec
30. it are identified in the model code when you order the unit The model code is identified as follows 649AXXXYYYZAB where 649A XXX YYY Z A B Type Number Pressure Range Flow Rate Valve Orifice Size Valve Plug Seat Material Fittings Type Number 649A This designates the model number of the instrument 51 Model Code Appendix B Model Code Explanation Full Scale Pressure Range XXX The full scale pressure range is indicated by a two digit one letter code Full Scale Pressure Range Ordering Code 1 33 x 10 Pa 10 Pa 133 322 11T 2 66 x 10 Pa 20 Pa 133 322 21T 6 66 x 10 Pa 50 Pa 133 322 S1T 1 33 x 10 Pa 100 Pa 133 322 12T 1 33 x 10 Pa 1000 Pa 133 322 13T Flow Rate N equivalent Full Scale Y YY The flow rate full scale is indicated by a two digit one letter code Flow Rate Full Scale Ordering Code 10 sccm 11C 20 sccm 21C 50 sccm 51C 100 sccm 12C 200 sccm 22C 500 sccm 52C 1000 sccm 13C 2000 sccm 23C 5000 sccm 53C Valve Orifice Size Z The valve orifice size is designated by a single number or letter code Refer to Appendix A Product Specifications page 47 for more information Valve Orifice Ordering Code 100 sccm A 200 sccm 1 1000 sccm 2 5000 sccm 3 52 Appendix B Model Code Explanation Model Code Valve Plug Seat Material A The valve plug seat material is specified by a single letter code Valve Plug Seat Material Ordering Code
31. itive precision electronic instruments How To Unpack the Type 649 Unit Unpacking Checklist Standard Equipment e Type 649 Unit e Type 649 Instruction Manual this book Optional Equipment e Electrical Connector Accessories Kit 649A K1 e Interface cables refer to Interface Cables page 11 10 Chapter Two Installation Chapter Two Installation Interface Cables Interface Cables Use a CB6495 1 xx or CB649 1 xx cable where xx indicates the length to connect the 649 controller to an MKS Type 247 or 246 Mass Flow Controller Power Supply Readout or a Type 647 Mass Flow and Pressure Programmer Display unit The standard cable CB649 1 10 is 10 feet in length Note ud To order a metal braided shielded cable add an S after the cable type designation For example for an overall metal braided shielded cable order CB649S 1 for order CB649 1 for a non shielded cable Generic Shielded Cable Description Should you choose to manufacture your own cables follow the guidelines listed below 1 The cable must have an overall metal braided shield covering all wires Neither aluminum foil nor spiral shielding will be as effective using either may nullify regulatory compliance 2 The connectors must have a metal case which has direct contact to the cable s shield on the whole circumference of the cable The inductance of a flying lead or wire from the shield to the connector will seriously degrade the shield s effectivenes
32. l to external 10 scc sec He Through closed metal or Kel F valve lt 2 F S N2 at 172 kPa to atm differential Through closed elastomer valve 1 x 10 scc sec He Maximum Operating Differential Pressure 1034 kPa Pressure Control Range 5 to 100 F S Resolution measurement lt 0 1 F S Temperature Coefficient Pressure Flow Zero lt 40 04 F S C lt 0 05 F S C Span lt 0 04 Reading C lt 0 08 Reading C 2 Includes controller error linearity hysteresis and repeatability 3 Includes the controller error only 4 An overall metal braided shielded cable properly grounded at both ends is required during use 5 Consistent with the overpressure limit of the transducer 47 Physical Specifications Physical Specifications Burst Pressure Dimensions Fittings Full Scale Ranges Pressure Input Power Maximum Cable Length Overpressure Limit Output Signals Flow Pressure Set Point Input Pressure Transducer Valve Options Type Seat Material Surface Finish Weight Wetted Materials excluding valve seat Appendix A Product Specifications gt 1 03 x 10 3 81 cm x 12 07 cm less fittings x 14 1 cm max Cajon 4 VCR male compatible 8 VCR male compatible 1 33 x 10 Pa 10 Pa 133 322 2 66 x 10 Pa 20 Pa 133 322 6 66 x 10 Pa 50 Pa 133 322 1 33 x 10 Pa 100 Pa 133 322 1 33 x 10 Pa 1000 Pa 133 322 10 20 50 100 200 500 1000 2000 5000 sccm
33. mation Chapter Five Maintenance General Information Periodically check for wear on the cables and inspect the enclosure for visible signs of damage Zero Adjustment For best accuracy and repeatability you should check the zero setting for both the pressure transducer and the flow meter periodically and reset it if necessary Refer to How To Check the Pressure Transducer Zero page 35 and How To Zero the Integral Mass Flow Meter page 37 for instructions on setting the zero The frequency of checking the zero is dependent on the specific accuracy and repeatability required by your process Itis also recommended that the instrument be recalibrated annually if no other time interval has been specifically established Refer to the inside of the back cover of this instruction manual for a complete list of MKS Calibration and Service centers 45 Zero Adjustment Chapter Five Maintenance This page intentionally left blank 46 Appendix A Product Specifications Performance Specifications Appendix A Product Specifications Performance Specifications Accuracy Pressure Transducer 0 5 Reading Pressure Controller lt 0 1 F S 3 Mass Flow Meter 1 0 F S CE Compliance Electromagnetic Compatibility EMC Directive 89 336 EEC Control Adjustments Integral 10 positions 0 through 9 Proportional 8 positions 0 through 7 positions 8 and 9 repeat settings O and 1 Control Repeatability 0 2 F S Leak Integrity Interna
34. n or the like which if not correctly performed or adhered to could result in injury to personnel Warning V The WARNING sign denotes a hazard It calls attention to a Caution b The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note ud The NOTE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight Symbols Found on the Unit The following table describes symbols that may be found on the unit On Supply IEC 417 No 5007 J Frame or chassis IEC 417 No 5020 NS Both direct and alternating current IEC 417 No 5033 a A Caution refer to accompanying documents ISO 3864 No B 3 1 Definition of Symbols Found on the Unit Off Supply IEC 417 No 5008 y Equipotentiality IEC 417 No 5021 0 3 Three phase alternating current Earth ground IEC 417 No 5017 Direct current IEC 417 No 5031 Class ll equipment IEC 417 No 5172 a A Caution risk of electric shock ISO 3864 No B 3 6 A Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit IEC 617 2 No 020206 Safety Information Protective earth ground IEC 417 No 5019 No Alternating current IEC 417 No 5032 Safety Information
35. n receiving the unit however you should check for defects cracks broken connectors etc to be certain that damage has not occurred during shipment Note ud Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Opening the Package The 649 controller is assembled leak tested with helium and calibrated in a clean room environment The instrument is double bagged in this environment to ensure maintenance of its particle free condition during shipment Itis very important to remove the bags according to clean room practices To maintain at least a minimal level of clean room standards follow the instructions below 1 Remove the outer bag in an ante room garmenting room or transfer box Do not allow this outer bag to enter the clean room 2 Remove the inner bag in the clean room Caution e Only qualified individuals should perform the installation and any user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument Proper handling is essential when working with all highly sens
36. ntroller 2 Remove the power supply and any other leads or wires attached to the connector on the 649 controller 3 Use a 4 8 mm hex wrench or open ended wrench to remove the hex nuts on each side of the VO connector Refer to Figure 6 page 23 for the location of the hex nuts on the I O connector Place the hex nuts aside for safe keeping 4 Position the controller with the front side facing you and pull up on the enclosure to remove it The MKS logo is displayed on the front of the unit The board assembly will be visible with the Transducer board facing you The Control board is connected to the back of the Transducer board 5 Locate the jumper block labeled JP2 on the right hand side of the Transducer board Refer to Figure 14 page 41 for the location of the JP2 jumper block 6 Position the jumper vertically according to the silkscreening on the board Position the jumper on the right hand side for O to 10 Volt operation the left hand side for O to 5 Volt operation 7 Locate the jumper block labeled JP1 above jumper block JP2 8 Position the jumper over the pins for 5 Volt operation Remove the jumper on JP1 for 10 Volt operation 9 Slide the enclosure cover over the unit 10 Attach the hex nuts removed in step 3 to the I O connector 43 How To Change the Pressure Output Signal Range Chapter Four Operation 11 Reconnect the leads and wires 44 Chapter Five Maintenance General Infor
37. oduct Location and Requirements Chapter Two Installation Product Location and Requirements e Ventilation requirements include sufficient air circulation e Maintain the normal operating temperature between 0 and 50 C e Maximum differential pressure is 1034 kPa consistent with the overpressure limit of the pressure transducer Refer to Applications with a Large Differential Pressure page 33 for more information e Pressure transducer overpressure limit 310 kPa or 2 times full scale whichever is greater e Provide power input at 15 VDC 45 250 mA 1 Maximum voltage current at startup is 15 VDC 45 E 250 mA 2 Typical steady state voltage current should be 15 VDC 45 200 mA e Warm up time 5 minutes e Use high purity gas and filters in line upstream of the controller e Mount the 649 controller in an upright position if possible although any mounting orientation is satisfactory Refer to Installing the Unit page 17 for more information e Install a separate positive shutoff valve if your system cannot tolerate some leakage across the control valve in the 649 controller The control valve is not a positive shutoff valve so some leakage across the valve may occur gases Your corporate policy on handling these gases supersedes the instructions in this manual MKS assumes no liability for the safe handling of such materials Warning Vi Follow your corporate policy for handling toxic or hazardous e Install the 649
38. out The pressure signal is available on pin 2 of the I O connector Use either pin 11 or 12 as the ground Refer to Table 2 page 18 for the pinout of the connector 2 Pump the system down to a pressure below the resolution of the pressure transducer Table 4 lists the recommended pressure levels Highest Pressure for Zero Adjustment of the Pressure Transducer 1 33 x 10 Pa 10 Pa 133 32 lt 6 66 x 102 Pa 1 33 x 10 Pa 100 Pa 133 32 lt 6 66 x 10 Pa Table 4 Highest Pressure for Zero Adjustment of the Pressure Transducer 3 Using a small screwdriver adjust the ZERO pot until the readout displays zero 0000 Refer to Figure 6 page 23 for the location of the ZERO pot How To Adjust the Pressure Transducer Span Only adjust the SPAN pot in conjunction with a calibration transfer standard Do not adjust the span setting if a calibration transfer standard is not available Instead contact an MKS Service Center for calibration 36 Chapter Four Operation How To Zero the Integral Mass Flow Meter How To Zero the Integral Mass Flow Meter Ensure that no gas flow is entering the 649 controller 1 Apply gas at a regulated pressure to the 649 controller 2 Close the positive shutoff valve downstream of the instrument 3 Command the control valve open by connecting the valve open pin to signal ground On the Type D connector connect pin 4 valve open to pin 11 or 12 signal ground A positive flow may occ
39. ow 13 17 Flow output signal 19 20 Flow path 24 Flow range 22 24 G Gas correction factor 32 59 65 Index I I O connector 18 Inlet pressure 16 Installation 13 Integral control 20 21 23 26 27 36 L Label 31 M Manual conventions 6 Manual organization 6 Measurement technique 24 Model code 49 Mounting 16 17 O Optional input 19 Orientation 12 17 33 Overpressure limit 31 P PI control 23 Pinout I O connector 18 Power 50 Pressure control signal 21 Pressure output range 41 Pressure output signal 18 20 Pressure inlet 16 Process control 20 23 26 Proportional control 20 21 23 25 27 36 Index R Range 50 Returning the product 7 9 S Safety procedures and precautions 2 Set point 19 Set point input 20 Set point recognition 29 Span adjustment 34 Specifications environmental 47 physical 46 trip points 47 T Transducer board 38 Trip point action 38 Trip point values 37 Trip points 19 20 30 Tuning 25 28 U Unpacking opening 9 V Valve commands 29 Valve orifice 53 58 Valve test point 18 Z Zero 66 mass flow meter 35 transducer 33 34
40. ow Path ipee tee ile 26 Measurement Technique ette e ety eed 26 Tuning the 649 Pressure Controller esee 27 Proportional Lettre ett ttt bie HP eee eek e De b KEER 27 Integral Terra 28 Tuning the 649 Controller esee 29 Priority of Comniatids ite iege peciit ue eese tetti ead 31 Trip Poms asc itn ln it OE ER D ebat bota 32 Action of the Trip Points piede oe ene 32 Applications with a Large Differential Pressure 33 Labels inest tette temet t deut n eie e Ee UR Eres 33 The Gas Correction Factor GCF for Flow Metering ooooococccnnoccconocononcnononacnnnncnnnaconnnoss 34 Chapter Four Operation edere de e re e ete ene eo e edu iei 35 How To Check the Pressure Transducer Zero eene 35 How To Adjust the Pressure Transducer Span esee 36 How To Zero the Integral Mass Flow Meter ooooconoccnoconocononononcnannonnnonnncnnncon nono emen 37 How To Tune the 649 Controlleren eiennenn teen nemen rennen 38 How To Adjust the Trip Point Values cee ceeecseeeeeeeeeeeesecesecesecsaecsseesseesseesseeeees 39 How To Select the Trip Point Action oooonnccnoccnocaconcconnconnnonnnonn nono nono nono nono n cnn rennen 40 How To Use Trip Points as Error Indicators eene 42 How To Change the Pressure Output Signal Range eere 41 Chapter Five Maintenance x e a li lso 45 General InformatiOD 546 12 e Een tee e E
41. owing e A sensor tube for ranges lt 10 sccm N equivalent e A sensor tube and parallel bypass for ranges gt 10 sccm N equivalent The geometry of the sensor tube in conjunction with the specified full scale flow rate ensures fully developed laminar flow in the sensing region The bypass elements in those instruments containing them are specifically matched to the characteristics of the sensor tube to achieve a laminar flow splitting ratio which remains constant throughout each range Measurement Technique The flow measurement is based on differential heat transfer between temperature sensing heater elements which are attached symmetrically to the sensor tube This senses the thermal mass movement which is converted to mass flow via the specific heat Cp of the gas The resulting signal is amplified to provide a 0 to 5 VDC output which is proportional to mass flow 26 Chapter Three Overview Tuning the 649 Pressure Controller Tuning the 649 Pressure Controller Tuning optimizes the way the 649 unit controls your system The Proportional P and Integral I terms adjust the response of the 649 controller The controller responds to changes in either the pressure of the system or the value of the set point Proportional Term The Proportional P or gain term is used as a constant to create a valve drive signal that is proportional to the error signal The error signal is multiplied by the proportional control setting th
42. rm Position O 8 settings 0 through 7 on a 10 position dial 8 repeats setting 0 and 9 repeats setting 1 I Term 10 settings 0 through 9 Input must match the pressure output signal range Table 3 Initial Configuration 22 Chapter Three Overview General Information Chapter Three Overview General Information Figure 6 shows the top view of the 649 pressure controller The user adjustable controls for pressure zero pressure span the P term the I term and the trip points are located on the top of the controller The trip point settings can be measured through two test jacks located under the enclosure on the Transducer board Refer to Figure 14 page 41 for the location of the test jacks TB Povand TP A Pot and Pressure Zero Pot States LED Indicator Status LED Indicator N N 7 l O Connector Pressure Span Pot FE ML eZ 3e 6 Pressure ya La P A l N LC A ES Proportional lt Y Adjustment Integral Adjustment Hex Nuts Figure 6 Top View of the Type 649 Controller Pressure Control Range The 649 controller can control pressure over a range of 5 to 100 of full scale This means that a 649 controller with a 13 3 kPa pressure transducer can control pressure from 6 66 to 133 kPa whereas a unit with a 13 3 kPa pressure transducer can control pressure from 666 Pa to 13 3 kPa 23 General Information Chapter Three Overview Flow Range The flow adjustments are located on the inlet side of the controller The adju
43. roller eese 23 Figure 7 Location of the Mass Flow Meter Adjustments seen 24 Figure 8 Effects of the Proportional Control eese 27 Figure 9 Effects of the Integral Control eese nennen 28 Figure 10 Controller Response with Initial P Term and I Term Values s 29 Figure 11 Controller Response with Increased P Term 30 Figure 12 Controller Response with Increased I Term eee 30 Figure 13 Serial Number Eabeb 2 etta c tiara 33 Figure 14 Jumper Positions on the Transducer Board 41 Figure 15 Flow Range Selection eese neret conc conan enne 57 vii List of Figures viii List of Tables Table 1 Table 2 Table 3 Table 4 Table 5 Table 6 List of Tables Definition of Symbols Found on the Unit essere 2 TO Connector PrnoUut itr ede dete ete ete pe e ee Ree 18 Initial Configuration 2 2 2 im HR oed a tl E ee utt dtes 22 Highest Pressure for Zero Adjustment of the Pressure Transducer 36 Valve Orifice SIZE dde en odd uie Haie hee 55 Valve Orihice Index Number tee Pete lee Lee e Cei ne Eee det eee 56 List of Tables Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual procedure practice conditio
44. s The shield should be grounded to the connector before its internal wires exit 3 With very few exceptions the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length A 6 35 mm piece of 22 wire may be undesirably long since it has approximately 5 nH of inductance equivalent to 31 ohms at 1000 MHz After picking up the braid s ground keep wires and braid flat against the case With very few exceptions grounded metal covers are not required over terminal strips If one is required it will be stated in the Declaration of Conformity or in the instruction manual 5 In selecting the appropriate type and wire size for cables consider A The voltage ratings B The cumulative I R heating of all the conductors keep them safely cool C TheIR drop of the conductors so that adequate power or signal voltage gets to the device D The capacitance and inductance of cables which are handling fast signals such as data lines or stepper motor drive cables and E That some cables may need internal shielding from specific wires to others please see the instruction manual for details regarding this matter 11 Pr
45. sive environment unless it has been specifically certified for such operation Safety Information USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications and compatible with the intended use of the instrument Assemble and tighten fittings according to manufacturer s directions CHECK FOR LEAK TIGHT FITTINGS Before proceeding to instrument setup carefully check all plumbing connections to the instrument to ensure leak tight installation OPERATE AT SAFE INLET PRESSURES This unit should never be operated at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source a suitable burst disc should be installed in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants of any kind to enter the unit before or during use Contamination such as dust dirt lint glass chips and metal chips may permanently damage the unit Chapter One General Information Introduction Chapter One General Information Introduction The MKS Type 649A Pressure Controller with an Integral Mass Flow Meter combines pressure control and flow metering capabilities into one compact unit The 649 pressure controller includes a Baratron capacitance manometer proportionin
46. stments include the flow zero and flow span pots Flow Zero Pot MFM Adjust A ze 9 Flow Span Pot Figure 7 Location of the Mass Flow Meter Adjustments A Typical Control System The 649 Pressure Controllers are used in a wide variety of control systems most of which share several characteristics Typically a control system consists of four basic parts e Pressure transducer e Control electronics e Control valve e Pressure system whose pressure is being controlled The 649 Pressure Controller provides the first three components The pressure transducer is an MKS Baratron capacitance manometer The 649 unit contains the electronics necessary for pressure control The control valve included in the 649 controller is a proportional control valve The pressure system can be any process whose pressure you need to control In addition the 649 controller is capable of metering the mass flow of the gas during the pressure control operation 24 Chapter Three Overview How The 649 Pressure Controller Works How The 649 Pressure Controller Works The 649 controller compares the pressure reading to the set point and positions the valve to maintain or achieve the set point pressure The controller functions as a PI Proportional Integral controller Both the Proportional P term and the Integral I term have adjustable dials on the top of the 649 controller Downstream pressure control is defined as having the process chamber
47. tandard density of SFg is 6 516 so the equation is 122 0 44 Orifice Sizing Factor 6 516 2 Calculate the valve index number using the equation above 175 x 0 44 77 valve index number for SF 3 Use the index number and the maximum flow rate to determine the orifice number from Figure 15 page 57 Using the maximum flow rate of 1000 sccm in our example and an index number of 77 the correct orifice number would be 2 Since sulfur hexafluoride is heavier than nitrogen the point on the graph is very near the top of the range for orifice number 2 Therefore you may choose orifice number 3 if control in the lower end of the flow range is not critical 58 Appendix C Valve Orifice Selection How To Verify the Orifice Selection Example 2 Using Helium He Following the example in How To Verify the Orifice Selection page 56 using 100 helium 1 Calculate the orifice sizing factor using the equation on page 58 The standard density of He is 0 179 so the orifice sizing factor is Le 2 64 Orifice Sizing Factor 0 179 Calculate the valve index number using the equation on page 58 175 x 2 64 462 valve index number for He Use the index number and the maximum flow rate to determine the orifice number from Figure 15 page 57 Using the maximum flow rate of 1000 sccm and an index number of 462 the correct orifice number would be 1 Since helium is lighter than nitrogen a smaller orifice can deliver t
48. te when the error is more than 5 of the set point value which indicates that the pressure reading has deviated by more than 0 333 kPa This allows the pressure to vary from 6 333 to 6 999 kPa The 649 controller is initially configured with TP A on above the trip point and TP B on below the trip point If you have not changed the action of either trip point you may follow the steps below If you have changed the action of the trip points you need to reset them back to the initial configuration for this example Refer to How To Adjust the Trip Point Values page 37 for instructions 1 Calculate the trip point voltage that corresponds to each trip point value Trip Point Pressure Torr x TP Adjustment Range V Trip Point Voltage V Full Scale Pressure Torr ge V E ge V where the full scale pressure is 13 33 kPa and the TP adjustment range is 5 Volts TIPA 9999kPa V 2 625 Volts 13 33 kPa rpp 9333kPa y 2375 Volts 13 33 kPa 2 Measure the value of TP A by inserting a positive test probe into the test jack labeled TP A and the ground probe into the test jack labeled Gnd The ground connection and the test jacks are located inside the unit on the Transducer board as shown Figure 14 page 39 A 0 to 5 V signal corresponds to a O to 100 full scale pressure 3 Usea small screwdriver to adjust the pot for TP A located on the top of the unit to set TP A to 2 625 Volts Refer to Figure 6 page
49. th the Transducer board facing you and the Control board behind it 5 Locate the jumper blocks labeled JP4 and JP3 in the middle of the Transducer board Refer to Figure 14 for the location of the jumper blocks 40 Chapter Four Operation How To Select the Trip Point Action JP4 Jumper Block M ARM B sets TPA action S E gt Jumpers Block JP1 and JP2 O c determine the range of the pressure output signal JP3 Jumper Block sets TPB action Figure 14 Jumper Positions on the Transducer Board 5 Position the jumper on jumper block JP4 to select the action for TP A Jumper block JP3 controls TP B The board silkscreening defines the jumper positions TH indicates that the trip point will be on when the pressure is above the trip point and TL indicates that the trip point will be on when the pressure is below the trip point 6 Slide the enclosure over the unit and press it in place 7 Attach the hex nuts removed in step 3 to the I O connector 8 Reconnect the leads and wires 41 How To Use Trip Points as Error Indicators Chapter Four Operation How To Use Trip Points as Error Indicators You can use the trip points to indicate when the error signal deviates from a given range The error is defined as the difference between the actual pressure reading and the set point For example assume you have a 13 33 kPa unit and your set point is 6 666 kPa You want the trip points to illumina
50. the Transducer board as shown Figure 14 page 39 A 0 to 5 V signal corresponds to a 0 to 100 full scale pressure 3 Use a small screwdriver to adjust the pot for TP A located on the top of the unit to set TP A to 2 625 Volts Refer to Figure 6 page 21 for the location of the trip point adjustments 4 Measure the value of TP B by inserting a positive test probe into the test jack labeled TP B and the ground probe into the test jack labeled Gnd 5 Use a small screwdriver to adjust the pot for TP B to set TP B to 2 375 Volts The trip points will be off when the pressure reading is between 6 333 to 6 999 kPa Should the pressure deviate from this range the appropriate trip point will turn on and its LED will illuminate Trip Point A will turn on when the pressure exceeds 6 999 kPa and Trip Point B will turn on when the pressure falls below 6 333 kPa 20 Chapter Two Installation How To Use Trip Points as Error Indicators How To Change the Pressure Output Signal Range page 41 for instructions on changing the pressure output range Note ud The 649 controller must have sufficient pressure on its inlet side to achieve the set point Flow Output Signal Pin 9 The flow output signal is available on pin 9 You can introduce this signal into another system to monitor the flow rate The flow output signal is O to 5 Volts which is standard for most thermal mass flow meters Optional Input Pin 10 Use pin 10 to r
51. to Figure 6 page 23 for the location of the trip point adjustment pots Turning the pot clockwise raises the trip point setting 7 Repeat steps 1 and 2 to adjust TP B 8 Slide the enclosure over the unit and press it in place 9 Attach the hex nuts removed in step 3 to the I O connector 10 Reconnect the leads and wires Refer to How To Select the Trip Point Action page 40 to change the action of the trip points How To Select the Trip Point Action Equipment required 4 8 mm hex or open ended wrench The 649 controller is initially configured with TP A set to trip high it is on when the pressure is above the trip point pressure and TP B set to trip low it is on when the pressure is below the trip point pressure To change the action of the trip points you must remove the cover of the unit and change jumpers on the Transducer board Each trip point has a jumper block with the jumper positions labeled TL trip low and TH trip high 1 Stop the gas flow through the 649 controller 2 Remove any leads or wires attached to the connector on the 649 controller 3 Usea4 8 mm hex wrench or open ended wrench to remove the hex nuts on each side of the I O connector Refer to Figure 6 page 23 for the location of the hex nuts on the I O connector Place the hex nuts aside for safe keeping 4 Position the controller with the front side facing you and pull up on the enclosure to remove it The board assembly will be visible wi
52. trical Information The set point input signal can be a 0 to 10 Volt factory setting or O to 5 Volt signal The range of the set point input signal must match the range of the pressure output signal The 649 controller is initially configured for a 0 to 10 Volt pressure output signal Therefore the set point input signal must be 0 to 10 Volts where 10 Volts represents 100 of full scale To change the range of the pressure output signal to 0 to 5 Volts you must reposition jumpers on the Transducer board Refer to N N JP4 Jumper Block M M Bez 1 sets TPA action Gol _Jumpers Block JP1 and JP2 4 _ determine the range of the pressure output signal esc p pa TET i A Y JP3 Jumper Block sets TPB action Figure 14 Jumper Positions on the Transducer Board 1 Position the jumper on jumper block JP4 to select the action for TP A Jumper block JP3 controls TP B The board silkscreening defines the jumper positions TH indicates that the trip point will be on when the pressure is above the trip point and TL indicates that the trip point will be on when the pressure is below the trip point 2 Slide the enclosure over the unit and press it in place 3 Attach the hex nuts removed in step 3 to the I O connector 4 Reconnect the leads and wires 19 How To Use Trip Points as Error Indicators Chapter Two Installation How To Use Trip Points as Error Indicators You can use the trip points to indicate
53. u are using nitrogen gas If you are using a gas other than nitrogen you must complete the additional step in Using Different Gases page 58 Note ud The valves are not calibrated to match the valve orifice selection graph in Figure 15 page 57 The graph displays typical valve behavior 1 Determine the pressure differential delta P by subtracting the outlet pressure from the inlet pressure 2 Use the inlet pressure and the pressure differential to determine the valve orifice index number listed in Table 6 For example if your inlet pressure is 207 kPa and your outlet pressure is at atmosphere 103 kPa the pressure differential delta P is 103 kPa Therefore your valve orifice index number would be 175 Delta Pressure kPa pee se a wo ss s 34 so as ss as 25 20 ves 10 95 e 9 po 000 of we os pum wp e ep pressure 10 p ss arn e Tos of Table 6 Valve Orifice Index Number 56 Appendix C Valve Orifice Selection How To Verify the Orifice Selection 3 Use the index number and your maximum flow rate to determine the orifice size from Figure 15 Each line represents the maximum flow rate for the orifice Choose the orifice number above your point on the graph to ensure that the orifice can deliver the required flow Continuing with the example above the index number is 175 and assuming a maximum required flow rate of 1000 sccm the correct orifice would be number
54. ual Conventions ctricos 6 Customer SUpport medicinas ate RU on He tale shake 7 Chapter Two Install tion 5e aan eo har Teen reete tertias deoa 9 How To Unpack the Type 649 Unit eese rene enne 9 Opening the Package 7 eene nean cto 9 Unpacking Checklist rec rette th e tierce ib tee beri neta 10 Interface Cables uae e aie doe ed eie 11 Generic Shielded Cable Description seen 11 Product Location and Requirements sese eren enr enne enne 12 IBID cT 13 Front and Back VIeWs u uen end ertet urere etel tests 13 Side View uicit one ip ee e egets 14 Bottom Vi Wieren ea a EE N e ets an a tease 15 None ME 16 Fittings oae edet euh 16 Mounting Hard Ware Lee tete edente ida 16 Gas Pressures 3 hee TRI ti ade eate eie 16 Installing the Unt ii 17 Electrical Information nerit aee ettet erneute esito tt andare ta 18 VO Connector mc Ho cte te e Aa 18 Initial Configuration en eere tete E eer eere te ede ee eerta ete tirs 22 lii Table of Contents Chapter Three Overview verse iced a dede eiie dd 23 General Intormati n e dee c tue He ER Ret ede HR ERE et 23 Pressure Control Range civic ibt its eti ge ei Peces 23 Plow Rafge 2 tts edulis e 24 As Typical Control System c nene terere ee e e bat ette eee eee ee 24 How The 649 Pressure Controller Works eese emen 25 Flow Measurement Overview eese neret rennen enr en eren nne 26 Fl
55. uoride 0 3479 Isobutylene 0 3701 Krypton 0 0593 Methane 0 5328 Methyl Fluoride 0 3221 1 518 Molybdenum Hexafluoride 0 1373 9 366 Neon 0 246 0 900 Nitric Oxide 0 2328 1 339 Nitrogen 0 2485 1 250 Nitrogen Dioxide 0 1933 Nitrogen Trifluoride 0 1797 Nitrous Oxide 0 2088 Octafluorocyclobutane 0 1866 Freon C318 Oxygen Pentane 0 398 Perfluoropropane 3 0 194 Phosgene 0 1394 Phosphine 0 2374 Propane 3 0 3885 Propylene 3 0 3541 Silane i 0 3189 Silicon Tetrachloride 0 1270 Silicon Tetrafluoride i 0 1691 Sulfur Dioxide 0 1488 Table continued on next page 63 Appendix D Gas Correction Factors SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l E 0 C FACTOR Sulfur Hexafluoride SF 0 1592 Trichlorofluoromethane CCIF 0 1357 Freon 11 Trichlorosilane SiHCl 0 1380 1 1 2 Trichloro 1 2 2 Trifluoroethane CCLFCCIF or 0 161 Freon 113 C CLF Tungsten Hexafluoride 0 0810 Xenon 0 0378 Empirically defined Consult MKS Instruments Inc for special applications NOTE Standard Pressure is defined as 101 3 kPa Standard Temperature is defined as 0 C 64 Index A Accuracy 51 Ambient temperature 12 47 B Baratron 5 C Commands priority 29 Connector I O 18 19 Control range pressure 21 Control system 22 Customer support 7 D Differential pressure 31 54 Dimensions 13 Downstream control 17 E Electrical information 50 F Fittings 16 50 51 Flow arr
56. ur momentarily while the gas pressure equalizes across the 649 controller Adjust the Zero 1 Once flow through the controller has stopped reached zero flow remove the valve open command 2 Turn the ZERO pot located on the side of the controller until the readout displays zero Refer to Figure 3 page 14 for the location of the ZERO pot 3 Open the positive shutoff valve The controller may indicate a small positive flow lt 2 0 F S due to a leak through its control valve However do not zero out this flow since it represents an actual flow measurement inherent in the system 37 How To Tune the 649 Controller Chapter Four Operation How To Tune the 649 Controller You may need to tune the 649 controller to optimize how it controls your system Tuning consists of varying the P Proportional and I Integral parameters to achieve the fastest smoothest response to changes in the set point value Ideally the 649 controller should respond to a new set point value by rapidly changing the pressure in the system to match the set point with little under or overshoot Refer to How The 649 Pressure Controller Works page 25 and Tuning the 649 Pressure Controller page 27 for a complete description of the effects of the P and I terms The P term and the I term are initially set to position 0 The controls are located on the top of the unit as shown in Figure 6 page 23 Each control has a 10 position dial The P term has only
57. us creating a proportional valve drive signal The higher the proportional control the greater the change in valve drive signal Typically a higher proportional control setting yields a faster response However too high a proportional control setting will cause the pressure to oscillate around the set point Too low a proportional control setting will result in a slow response from the controller Figure 8 shows the effects of the Proportional term 7 Set Point Signal _Pressure Signal 9 3 Gain Proportional term set too high 2 EXTRA NOT causing oscillation 1 Y Pi Ne Time gt Set Point Signal Aso signal o 2 D 4 y E ATA ees CREER NS Gain Proportional term set too low I P causing a slow response LP Time Figure 8 Effects of the Proportional Control Adjusting the Proportional Control The Proportional P term adjustment is located on the top of the 649 unit as shown in Figure 6 page 23 The control is a 10 position dial though it uses only 8 values The last positions 8 and 9 repeat the values of positions O and 1 The initial setting is O As you increase the setting number the value of the term increases by a factor of approximately 2 8 27 Tuning the 649 Pressure Controller Chapter Three Overview Integral Term The action of the Integral I term creates a valve drive signal that is proportional to the magnitude and sign of the area under the error signal curve error sign
58. when the error signal deviates from a given range The error is defined as the difference between the actual pressure reading and the set point For example assume you have a 13 33 kPa unit and your set point is 6 666 kPa You want the trip points to illuminate when the error is more than 5 of the set point value which indicates that the pressure reading has deviated by more than 40 333 kPa This allows the pressure to vary from 6 333 to 6 999 kPa The 649 controller is initially configured with TP A on above the trip point and TP B on below the trip point If you have not changed the action of either trip point you may follow the steps below If you have changed the action of the trip points you need to reset them back to the initial configuration for this example Refer to How To Adjust the Trip Point Values page 37 for instructions 1 Calculate the trip point voltage that corresponds to each trip point value Trip Point Pressure Torr x TP Adjustment Range V Trip Point Voltage V Full Scale Pressure Torr ge V E ge V where the full scale pressure is 13 33 kPa and the TP adjustment range is 5 Volts rra 9999kPa V 2 625 Volts 13 33 kPa rpp 93335 kPa sy 22375 Volts 13 33 kPa 2 Measure the value of TP A by inserting a positive test probe into the test jack labeled TP A and the ground probe into the test jack labeled Gnd The ground connection and the test jacks are located inside the unit on
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