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1. 29 Data e E RETE TS 19 KC 29 BCS E E 18 Pulse Woo ME Ci NER NR 35 Q Quantification Gtandard based 39 R Radiation safety ain cai ciivennldicieisilve cova ena ti rn ea 9 Kee 15 Report EClltaDIe ODIGC LS qus ecsiedris nue uet aE ues eset 30 IR KEE 30 Export to WORD ei Aerkepa steer danh iteivibntu a dti e 30 Fe PUNE ee 30 Templates onnninennesinesnueinsrnsrirrrrerrrrrerrenn 30 EE 57 HODOPU SCIO EE 16 30 Result Tute o EEN 19 9 Satety radiato suspe vds o persa ee TR ius 9 Save FO PR 29 Sb eS Ol aca IMMER LI EE 19 Sell 5alibEdblOPL EE 20 SOW S E 22 Spectra workspace cece eeccceecccceeceseeeeeeneeeeanees 16 Spectrometer EE 18 opectrum Ec A 19 ur Late e EE 19 Spectrum analysis LO en VE dE 20 37 49 WS te WEE 20 owes e e 19 Heferencebased 20 EE 19 Standard b ased osusaetamezazed eoxfatextesad eti dui kac ae 20 Tee 20 True Elei 20 OS CONTON eeh 51 Standard MOF AY NE T T 20 39 Klak eer 41 Standard based analysis 20 39 EENDE 2 56 eee ERIT TET TT eee eee 16 Supply e 10 system control panels ssssssss 16 Index T Title baf ER 18 U Misi SI e 15 User a 0 i re 31 V Volumes QUANTAX xil iE 31 EE 31 W Working distance cu oae feti usan Meet d ha ea et t 35 aert ee 18 See cio CREE E TE TT QE 41 X X ray radiation TT 9 87
2. QUANTAX Energy dispersive X ray spectrometer for electron microscopy e Quick Reference Guide EDS Innovation with Integrity Bruker Nano GmbH Schwarzschildstr 12 12489 Berlin Tel 49 30 670 990 0 Fax 49 30 670 990 30 E mail service berlin bruker nano de Internet www bruker com The reproduction transmission or use of this document or its contents is not permitted without express written authority Offenders will be liable for damages All rights reserved We have checked the contents of this manual for agreement with the hardware and software described Since deviations cannot be precluded entirely we cannot guarantee full agreement However the data in this manual are reviewed regularly and any necessary corrections are included in subsequent editions Suggestions for improvement are welcome Order no DOC M82 EXS057 V3 2013 Bruker Nano GmbH Berlin Germany All trademarks and registered trademarks are the sole property of their respective owners Printed in the Federal Republic of Germany Contents T UEC erc 5 2 Safety Information EEN 7 ME eu EE 9 AMEN BUR T mm 10 Ze aec erc MEE A T Te ne ee 10 Schleed TT 11 3 Ine ESPRIT 90 COU E 13 sl Skan up and Logi iesene a EEEE ANEA EAEN 15 I2 UENIT 15 C cM L e RN A AE E N EEE A EA 18 3A Display and C ntrol ElemeniS E 19 B A ee EE 20 36 FY SIS AUTOMA UO
3. Fig 4 14 1 Image processing 50 4 15 Using stageControl 4 15 Using StageControl Step 1 Select appropriate workspace 2 Click New to acquire an image at the current stage position 3 Click StageControl button to open the position list box 4 Enter a name for the current position and click to add it to the list 5 Move the stage to the next position and repeat steps 2 4 6 Click StageControl button to open the position list box 7 Select a position in the list by clicking on it 8 Click Go to move the stage to the desired position 9 Click New to acquire an image 10 Select object s for analysis 11 Perform measurements as desired Example hints StageControl is accessible in workspaces that use image acquisition all Objects workspaces Imaging Feature and EBSD Continue until all analysis locations are in the list Continue with figure 4 15 2 from here You can use the thumbnail images that are displayed as an aid to identify the right position Points objects lines maps etc are possible 51 Quick Reference Guide 4 Software and Analysis Short Reference O Spectrometer Ki Input mn 30 kcps Range 20 keV 60 kcps Dead time 1296 Spectro sel Imaging v Format 800 x 600 HV 15 0 kv Magnification 2500 WD 23 0 mm EBSD Ca Format 640 x 480 PINS L AS 4 Fig 4 15 1 Adding stage positions Spectrometer v Input rm S0kcps Range
4. Select Spectrometer workspace Move calibration sample into the analysis position and set beam current Spot size to produce an intermediate count rate Select spectrometer ranges to be calibrated Select element and line for calibration Check accuracy and click Start Click Yes to save new calibration data Examples hints Do not mix up energy channel calibration with system factor calibration accessible through the Calibration buttons in every workspace that includes spectra acquisition Ref 4 5 Any element in the mid energy range Mn Zn in a given sample can be used provided it IS contained in a reasonable concentration Preferably use single element standards e g pure copper to avoid peak misidentification improve speed and accuracy Use Ka lines whenever possible Intermediate calibration accuracy is sufficient in most cases Note that the storage of calibration data is not user specific Changes in calibration will also affect all users of the spectrometer Spectrometer WHEEL Imaging system e Format 800 x 600 10 0 kcps Range 20 keV 60 kcps HV 15 0 kV EBSD Camera Format 640 x 480 Magnification 2500 WD 23 0 mm o Energy calibration 59999 cos M 99900 cos wi 39000 cos 75000 cps 2 3000 cps L Fig 4 2 1 Spectrometer calibration 36 4 3 Automatic Standardless Point Analysis 4 3 Automatic S
5. 60 kcps Deadtime 100 gp Imaging system sz Format 800 x 600 Magnification 5766 WD 20 0 mm TiltAngle 0 09 30 07 2008 10 24 47 Me AltRutPL Objects 21 04 2008 09 5i 44 20 0keV 1600X 800x500 Fig 5 1 2 Top section of ESPRIT program window with main menu in fullscreen mode 61 Quick Reference Guide 5 Buttons Icons Controls Quick Guide 0 6 L D e Imaging system Position Assistants Databases Imaging Feature 62 Description Invoke online help system Minimize program Fullscreen mode on Fullscreen mode off Close program Import Export menu icon Load save device presets Configure spectrometer Configure imaging system Drive detector in and out Workspace Assistants Workspace group Databases Workspace Spectra Workspace Imaging Workspace Feature Workspace EBSD Workspace group Objects Workspace Jobs Workspace group System Report editor Hints Context sensitive in the workspaces dialogs Closes window and shuts down program Available I O functions depend on workspace Manages imaging system and spectrometer settings optimized for different analytical tasks Databases EDS Le identical to main menu item Standards in pre 1 9 releases of ESPRIT Refer to ESPRIT Feature manual Refer to QUANTAX CrystAlign manual 5 2 Workspace Buttons and Controls 5 2 Workspace Buttons and Controls his section summarize
6. Accept data D do _ E MAG 2300 DN EEN WDO 230 mm Fig 5 2 14 The Imaging workspace with scan window for magnification calibration For information on the image scan window refer to section 5 2 4 1 Object Description Hints Define line of known length Drag the ends of the line displayed in the image scan window to the desired locations For maximum accuracy use a SEM calibration grid set the image scan window to fullscreen display with the icon and draw a line as long as possible Enter line length Check resulting pixel size Accept new calibration factor 79 Quick Reference Guide 5 Buttons Icons Controls Quick Guide 5 2 7 5 Workspace Microscope Configuration Microscope data exchange Adapt connection parameters Microscope information Fig 5 2 15 The Microscope workspace Note that all settings in this workspace are normally made during system installation Moreover wrong settings will at least lead to a communication failure with the microscope and bear the potential risk of device damage This description is therefore mainly for educational purposes Be circumspect when making changes Object H Description Select Active driver for microscope from dropdown list below Install new microscope driver Initialize microscope Edit working distance Read settings from microscope Hints Edit optimum EDS working distance and permitted deviation Delta Set ranges for mi
7. For mapping use maximum electron beam current the sample can cope with Click on the bar Imaging system to introduce a new value First map a small part of the image to check the performance Note The higher the resolution the higher the map acquisition time Mapping element selection has to be carried out before starting the acquisition e g by identifying the peaks in the sum spectrum of a single pass Terminate acquisition when image quality is sufficient Image mixing can be changed at any time Iry different image mixing modes for optimum results Do not forget to save the project Itself from time to time amp S amp Y Map data Add to project Insert Copy Save Print CA mmm ES a e Standard library ESL 506 Nikv mod 7 Twain export Mig D d Element selection N Map aata Y NU gt Els er Open Map result e SN Add to project e Copy Paste ne Save py 6 A ble of Gave Add to report um ee 11 12 13 14 15 16 17 18 ze PLI Wisi P Sa Eh IK EB sc Ti V Cr Mn EB Co Ni Gil Zn Ga Ge As Se Br Kr s Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Cs Ba La Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Po At Rn LETS Fr Ra AC Ce Pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu 23 Th Pa U Np Pu AmCm Bk Cf Es Fm Md No Lw A X 600 1 4 1 8 X E Kai Measure time 1 32 h i RB uim eme
8. Object number Autamatic numbering f Select all Delete Grid Both O Random Point count Description Select mode Draw points Draw rectangles Draw ellipses Draw polygons Object name Object number Automatic numbering on off Select all objects Delete selected objects Create measurement points automatically Create rectangular point grids Align points roughly with grid lines Position points randomly within field of view Number of points to be created 5 2 5 3 Workspace Line Scan mI BUSES ag Single 800x600 66x49 um 100 points Line scan e Point count 100 Distance um 0 52 miter esults e No filter e Fast med 5 ie Mass percent i an Mass percent norm Atomic percent norm Fig 5 2 7 The workspace Line scan with image scan and profile window 70 5 Buttons Icons Controls Quick Guide Hints Click button to be able to select objects already drawn Enter a name for the objects to be used in the image and for the spectra If Automatic numbering is activated all objects will receive this name plus a consecutive number beginning with the one entered under Object number Otherwise a unique name has to be entered for every new object according to the parameters below Number of points created depends on entry in Point count field 5 2 Workspace Buttons and Controls Use the mouse over the image scan window to drag both ends of
9. Save HyperMap database 8 Process HyperMap data as desired You can perform quantitative analyses line scans phase analyses etc Devices 2 Spectrometer v input 11110 300 kcps Range 20keV 275 kcps Dead time 2696 Spectrometer nun 9 9 kcps Range 60 kcps O Imaging system mat 800 x 600 HV Magnification 2500 V D mm EBSD Camera FoNnat 640 x 480 100 Hz Mapping HyperMap Calibration None e Standard library ESL 506 1 mod E zl New jJ X G AE eee x v GNI X Phases Line Spectrum Map result st PB gt e eg ue Manual E are een r Measuring time s DES Er 3 e E Database e Cycles 10 Ch mh Interlaced measurement te hb f K Free regiork d gt NW H Fi F2 F3 FAI d ei C Use 1 microscope image only A h t Image average s 30 C Switch off microscope Open Save Options Save selection Gr Map data Inputs B E N E F Ne Add to project I1 I2 I3 I4 IS I6 I7 I8 Al si P iS Gl Ar Insert e Map name EUN Save r S d Di MI MET ETATE 4 md Map data Single 800x600 66x49 ym Print Add to report Map number Fr Ra AC Ce pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu Wap size JVap resolution Automa
10. Stage map 1 1 ie 5 eg OI ai Cancel Overlap gt 10 a Stage map 1 2 4 Stage map 1 3 cs Stage map 1 4 6 Stage map 1 5 se Z Stage map 1 6 e 8 Stage map 1 7 9 10 ee 1 age map 1 10 12 EE Stage map 2 1 Edit Move To Start J New jobs System jobs ment imag Defaults Fig 4 17 2 Setting up and running the stage maps 56 4 18 Creating a Report 4 18 Creating a Report Step Example hints 1 Perform an analysis in a Reports can also be composed from workspace of the Objects group files or project entries 2 Select Add to Report from the This will add all results to the report group level Import Export menu mapping sum spectrum image and element miniatures Open the Report editor Add texts or legends draw objects or rearrange items as desired 5 Save your work using the Report Reports can also be sent to Microsoft Import Export menu Word for further processing archiving 6 Print the report Check page Setup before printing 57 Quick Reference Guide v Input HEN 301 kcps Range 20keV 275 kcps X Dead time 23 Realtime 43s Range 20 keV 60 kcps Imaging system ee Format 800 x 600 Format 640 x 480 Magnification 2500 Full Fix e Variable f H ee lil Ps Element images e C Point muttieoinc Line scan Mapping Frrermar GERI AI Jap resolution COE 1 2 i4 1 8 Measure tim
11. aute d Fig 4 4 1 Analysis with direct reference 38 4 5 Standard based Analysis with Library 4 5 Standard based Analysis with Library Step 1 Select workspace Databases and click EDS if you want to change the assigned standard library otherwise continue with step 3 2 Select Standard Library 3 Select workspace and standard based method 4 Bring calibration sample into the analysis position and adjust microscope parameters Click the Calibration button Click Acquire to calibrate the system factor 7 Bring the unknown specimen into the analysis position and click Acquire 8 Click Quantify 9 Check results Example hints The assigned standard library is displayed next to the Calibration button in the Spectra and all Objects workspaces If no EBSD system is installed the EDS button will be activated by default Use the Import Export menu from this workspace to open the desired library Refer to Fig 4 5 2 form here onwards Workspaces Spectrum Point or Objects Method e g Interactive Standard mtd The type of calibration sample is defined by the library and displayed in the dropdown list top left in figure for alternative samples refer to the according manual Do not change microscope parameters afterwards repeat calibration regularly unless automatic quantification after acquisition is enabled The result display will list which elements were quantified based on l
12. image processing window directly from image clipboard will not work both sources must have same color depth math using one grey and one color image will not work Selectable between 0 and 1 0 5 each means equal contribution from both source images Result will be presented in the processing window According to selection below Black and white may be exchanged with other colors by a click on the according color symbol left and right of the controls Different colors may be selected by clicking on the respective color symbols Optional 5 2 Workspace Buttons and Controls Result image Show resulting image in Once clicked changes to Source processing window images to return to source image view 5 2 5 Workspace Group Objects 5 2 5 1 Workspace Point Image scan Fig 5 2 5 The workspace Point with image scan and spectra windows Click into the scan window to set the measurement point For information on the image scan window refer to section 5 2 4 1 The spectra window is described in section 5 2 3 5 2 5 2 Workspace Objects Image scan amp ET SS we ee Polygon Fig 5 2 6 The workspace Objects with image scan and spectra windows In this section you will find a description of the objects below the image scan window The image scan window itself is described in section 5 2 4 1 the spectra window in 5 2 3 69 Quick Reference Guide Object d Loi Lei Object name
13. section 5 2 3 for information on the line scan window to 5 2 5 3 Actually the HyperMap workspace has only two unique icons Object Description Hints ESA Maximum Pixel Spectrum Calculates a synthetic spectrum from the channel maximum values of all spectra in the HyperMap Useful to determine element traces that may be present in only a single pixel AL Show sum spectrum of This icon is only visible when the highlighted phase tab Phases Le selected 14 5 2 Workspace Buttons and Controls 5 2 6 Workspace Jobs Fig 5 2 10 The Jobs workspace Object I t P E No on Typ State Job data Result Overwiew Result details Description Center on selected objects Zoom into view graph Zoom out of view graph Edit job list name Job list header Add new job Edit job properties Move stage to position of highlighted job Add a system job Edit the defaults for all job types Start stop job list processing Hints Moves the selected objects of the job list to the center of the view graph During processing of the job list this line also contains the number of the currently processed job and the estimated processing duration left The header contains job number whether processing of the according job is enabled visible through a check mark job type state either running or finished and the job name and open preview window Button label changes accordingly 75 Qu
14. selected 6 Click Acquire to start spectrum Objects are automatically analyzed in analysis sequence the exact procedure depends on the analysis mode settings 7 Checkresults Use Quick info behind the spectrum name in the spectra list or double click according spectra display line for detailed results Devices Spectrometer v TITTTTTTTTTITTIT 10 0 kcps Range Q Imaging system y format 800x600 KV Magnification 2500 WD 23 EBSD Camera Format 640 x 480 Ab Real time s Live time s Counts Region start keV Region end kev Automatic analysis None Continuous e After acquisition gt Automatic PB ZAF e None Coating correction Carbon only Coating calibration Objects C 12 49 039 41 Na2 30 Mg5 68 AI5 03 Si13 64 S 5 37 Ca3 79 Ti0 28 Fe 12 02 C 33 72 10 92 Ali 91 Si2 63 23 27 Ca0 69 Fe 26 86 Fig 4 7 1 Object analysis 43 Quick Reference Guide 4 8 Fast Line Scan Step 1 Prepare sample and select workspace Line scan Click New to capture image Adjust the scan line if desired 4 Select elements of interest using the interactive identification tool 5 Click Acquire to start line scan 6 Save results Devices 4 Software and Analysis Short Reference Example hints Check the number of data points The element selection can be changed at any time during or after the line sc
15. terminates automatically his means you may choose any of the modes except Manual Quantification settings You can choose the quantification method to be used in evaluating spectra Again only choose non interactive methods You may also set elements for identification based on Line markers Customization of a method also works here as the Method editor is accessible through a click on the method name Result table options This is only applicable when you have chosen to add a System job of the type Result table You may then choose in what units the results are presented and whether quantification errors are displayed or not Result handling What to do with the analysis results By default they will be added to the current project in a new subfolder You can also choose to export all results to separate files If you activate this option you will be prompted to choose a folder where the results will be written to You can also set file types to use for spectra and images It is also possible to add the results to a project In this case you will have to choose an appropriate template from the template folder to use it as a master for the report Should you not choose to store job data during the automated run you may do so afterwards by using the Jobs Import Export menu Be aware that this alternative poses a certain risk of data loss should the automated run fail Stage position This applies only to system jobs of the type Sta
16. the scan line to the desired positions Information on the image scan and spectrum windows under the Spectrum tab can be found in sections 5 2 4 1 and 5 2 3 respectively Object e Point count 3 Distance um Na filter 3 Average Median R s Fast O Mass percent 5 Mass percent norm 5 Atomic percent norm Spectrum Description oet number of points along the scan line oet distance between points along the scan line Use no filter on lines Average over adjacent points of the line scan Use median filter on line scan Number of points to be considered for averaging or median filter Fast line scan qualitative Scale profile window Y axis in mass percent Scale profile window Y axis in mass percent normalized Scale profile window Y axis in atomic percent normalized Acquire line scan Set acquisition parameters Quantify line scan Select quantification method Edit selected quantification method Tab to access profile window Identification tool Autoscale profile window Options for profile window Tab to access spectrum window Hints Will alter the Distance ym between points Will alter the number of points as displayed under Point count Quantify has to be clicked beforehand for this option to work Use to select element profiles to be displayed For details see section 5 2 3 71 Quick Reference Guide 5 Buttons Icons Controls Quick Guide 5 2 5 4 Work
17. tool lt is provided in connection with P B ZAF as well as PhiRhoZ matrix correction During interactive spectrum evaluation the default standard assignment for all selected chemical elements can be changed by the user i e there is always the choice between current references any suitable standard sample from the library or true standardless analysis on an element by element basis If a standard or reference is unavailable e g in case of rare chemical elements ESPRIT automatically uses standardless analyses for these elements Automatic and interactive spectrum analysis QUANTAX performs automatic spectrum analysis during or after spectrum acquisition and supports 21 Quick Reference Guide 3 The ESPRIT Software batch processing for multiple spectra The whole acquisition and analysis process can even be fully automated using the powerful automation tool Jobs see section 3 6 below Interactive spectrum analysis which gives full control over all critical spectrum analysis steps is provided for in depth examination of special samples 6 Modules Spectrum Method Name Spectra correction E i Automatic PB ZAF ALL Escape Tail Shelf Correction of detector effects Escape Tail Shelf Shift ei 4 Identification Comment Automatic Manual automatic element identification quantification with Element identification P B ZAF Q EDS background ee Bremsstrahlung c Sp
18. 20 keV 60 kcps Dead time 12 96 Real time Spectrometer v TLETTTTTTTTTTTTT 9 9 kcps Range 20 keV 60 kcps Imaging system Format 800 x 600 HV 15 0 kv Magnification 2500 WD 23 0 mm EBSD Camera Format 640 x 480 9 No Name Positioni 52 2 Position 2 SE e REGUM CEA L v Acquisition 1 NEN Fig 4 15 2 Moving to a stage position 52 4 16 Analysis Automation Using Jobs 4 16 Analysis Automation Using Jobs Step 1 Move sample to the analysis position and select Objects workspace 2 Click New to acquire an image at the current stage position Create objects for analysis 4 Click Select all to highlight all objects 5 Setup spectra acquisition and evaluation 6 Add the job to the job list using the Import Export menu Select Jobs workspace Add a name for the current job list If desired 9 Highlight job in list and click Edit 10 Click on the arrow next to Results handling 11 Check Export to file and choose a folder where to store the results by clicking on the arrow below 12 Click Start to process job list and perform automated measurements Example hints Be sure to select only automatic acquisition modes and evaluation methods Name the job and select parameters as shown heposition the stage and repeat steps 2 3 4 and 6 until all desired sample regions samples are covered Continue with Fig 4 16 2 from here You can also
19. 43 SS Be REN 44 SEG NE aiia clo EE 45 FST VON Wb METRE 46 Faly Quantitative Mapping E 47 Ser 48 Bee ci 49 imade OCS S e RTT RENE 50 Sig eo e Ero alk EE 51 Analysis Automation Using Jobs 99 olage Mapping Usma JODS EE 55 eain a n BOr MER E EREE 57 Quick Reference Guide 4 Software and Analysis Short Reference 34 4 1 Preparatory Steps This section intends to give the analyst a quick overview of the most important tools of the ESPRIT software so permitting a quick start into analyses with the QUANTAX EDS microanalysis system In depth discussion of specific functions and settings is left to the QUANTAX user manual For ease and comfort of use the relevant sections of these manuals are referenced wherever necessary The procedures described here assume standard default ESPRIT settings They also refer to the use of a scanning electron microscope or similar Users of transmission electron microscopes may use this overview as well but should exercise special care when it comes to microscope specific operations e g stage positioning high voltage or working distance settings 4 1 Preparatory Steps Step 1 Prepare the sample for imaging and microanalysis 2 Putthe electron microscope into operation and adjust high voltage magnification and working distance designated for EDS analysis Start ESPRIT and log in Reset or check system settings 5 Ch
20. 60 kcps Dead time Spectrometer v nin 9 9 kcps Range 20 keV 60 kcps Imaging system Vv Format 800 x 600 HV 15 0 kv Magnification WD 23 0 mm EBSD Camera Format 640 x 480 100 Hz Results a oats Se av None Standard library ESL 506 15kV mod M M Quantify j gt gt Interactive Standards cps eV Assistants unn C nor C Atom C 3 7 Q ej Series ez wt bd Oxygen K series 47 17 47 09 66 74 Sulfur Kseries 23 56 23 52 16 63 Calcium Kseries 29 45 29 40 16 63 Total 100 18 100 00 100 00 Method PhiRhoZ Depth function Element has been quantified with reference Ow Spectra Deconvolution Results Primary energy 14 6 keV a Spectra Tilt angle 0 0 Si EEN g 4 CG d Imaging 5 a i E name Caso4 xF Es lu nM See Description E z Real time s 500 000 Eh CrystAlign 5 Life time s 489 670 S E Objects 3 Specification in Mass O Atomic Jobs S gt Element Concentration Error _ System Oxygen 47 00 CH es 1 Sulfur 23 56 Report Calcium 29 44 E 3 T Sum of concentrations 96 100 00 Loi All b cps ev gt Results Atom norm Sort Element v Acquisition 1 0 00 O 66 57 816 68 Ca 16 75 v CaSO4 XF 0 00 Reference ee Databases 4 6 2 Presentation of quantification results 3 e Spectrum CaSO4 XF spx binii emu
21. ER 8 1 45 Oc Te9 210 fc RTT 65 5 24 Workspace IESEL eegent eenegen Soest ict niet nett diced Eegen 66 D29 Workspace Cron EE 69 ov WOT ee 79 5 2 7 Workspace Group Dvstem He eme nennen nnns 76 on WWO Dae S Fy EE 82 85 1 Introduction QUANTAX is the ideal al purpose energy dispersive microanalysis system for industry research and education Different system levels and various options are provided for scaling and tuning of QUANTAX to a broad range of analysis tasks and application environments QUANTAX microanalysis systems are suitable for scanning electron microscopes transmission electron microscopes electron beam microprobes dual beam devices as well as other X ray spectrometry applications All QUANTAX systems provide state of the art qualitative and true standardless quantitative microanalysis for bulk specimens polished samples thin layers particles and rough surfaces This is accomplished by optimized automatic or interactive spectrum analysis methods fundamental parameter approaches e g P B ZAF and the most exact and comprehensive atomic database available A standard based PhiRhoZ quantification package is optionally available The unique option of combining standard based and standardless analysis methods complete the range of analytical possibilities An intuitive user interface the flexible project management package as well as v
22. Ge As Se Br Kr e No filter e Fast i Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Average e 0 Median 3 o 20 40 60 Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po At Rn d PIENE CH as gt Point number AC Sa SPS Fr Ra AC Ce pr Nd PmSm Eu Gd Tb Dy Ho Er Tm Yb Lu R E Th Pa U Np Pu AmCmBk Cf Es Fm Md No Lw s Se Clear a Auto v New element Fig 4 8 1 Fast line scan 44 4 9 Fully Quantitative Line Scan 4 9 Fully Quantitative Line Scan Step 1 Prepare sample and select workspace Line scan Example hints Use relatively high electron beam current for line scan green to red range 2 Click New to capture image Adjust the scan line if desired Check the number of data points Click Acquire to start line scan Terminate the measurement when the concentration profiles are stable or select an appropriate timing option 5 Check analysis method Use Automatic PB ZAF mtd f elements are known use Preset list or If element markers are already set use identification option Line markers in the method editor this is equivalent to using Element list PB ZAF Ref 4 1 6 Click Quantify to analyze the line Do not terminate measurement yet scan database Repeat quantification until statistics are sufficient 7 Select the desired form of result presentation 8 Save results Line Scan Mode Jom axio scan data 3 3 amp G9 DES v Input 300kcps Range 20keV 275kcp
23. In Sn Sh Te T Xe Ce Ba La Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Po At Rn Tr Ra AS Ce pr Nd PmSm Eu Gd Tb Dy Ho Er Tm Yb Lu Th Pa U Np Pu AmCmDk Cf Es fm Md No Lr E Lines Ragione Fig 4 5 2 Performing the actual quantification 40 4 6 Maintaining Standard Libraries 4 6 Maintaining Standard Libraries Step 1 Select the Databases workspace and then EDS 2 Create a New library or Open an existing library for extension Click the Calibration button Bring calibration sample into the analysis position and adjust microscope parameters 5 Click Acquire to calibrate system factor Click the Add sample button Bring the standard sample into the analysis position and click Acquire 8 Click Validate and enter the known element concentrations for the standards 9 Repeat steps 7 and 8 until all samples are processed Example hints If you use a QUANTAX without EBSD system installed EDS will be selected by default Use the workspace Import Export menu icon The calibration sample is defined during creation of the library function New Do not change microscope parameters afterwards repeat calibration regularly Confirm the assignment for all chemical elements to be referenced to that standard Check or edit the final element to standard assignments using the lower left hand table in the Databases workspace 41 Quick Reference Guide 4 Software and Analysis Short Reference EDX standard libr
24. Local server Fig 3 2 2 ESPRIT main menu area 16 Assistants provides guidance through a range of common analysis procedures Databases EDS allows the administration of standard libraries in connection with standard based EDS analysis In this workspace new standards can be measured and standard samples assigned to chemical elements In ESPRIT version 1 9 Databases EDS replaces the main menu item Standards the functionality remains the same EBSD contains relevant databases for electron backscattered diffraction Refer to the QUANTAX CrystAlign documentation for details Spectra provides acquisition and analysis of X ray spectra without electron beam control This workspace is also suitable for analyzing saved spectra Imaging provides electron beam image capture independent of X ray spectrometry Imaging with QUANTAX is useful to upgrade older analog electron microscopes with digital image capture features The workspace Imaging also provides basic image processing tools and is used to view saved Images Feature provides extensive feature particle analysis and chemical classification tools Refer to the ESPHIT Feature manual for details CrystAlign gives access to the fully integrated EBSD electron backscattered diffraction package QUANTAX CrystAlign Refer to the CrystAlign manual for details Objects consists of a group of workspaces that combine electron beam scanning with X ray spectro
25. Mass narm k Sort Element Hot keys Alt click and hold move right or left Ctrl click and hold move right or left Shift Del Edit spectrum display settings Change X axis units Select all spectra for display Select spectrum for display Units for results display Sort order Description Move a spectrum to the right or to the left Broaden or narrow a spectrum Select several spectra from the list Delete a spectrum from the list 5 2 4 Workspace Imaging EKE y pn 5 Buttons Icons Controls Quick Guide Toggle between energy in keV and channel display Double click on keV or channel fo introduce an energy range Highlighted spectra yellow line in spectra list will always be displayed whether selected or not Either ascending according to atomic number Element or descending depending concentration Value TW Filter Math Colors Stitch e X 183 Y 501 Gray 0 Fraction 17 5 L 1 00 9 0 00 2 0 00 Auto Neutral gum PRS Fig 5 2 4 The workspace Imaging with image scan and image processing windows 66 5 2 Workspace Buttons and Controls 5 2 4 1 Image Scan Window Object Single 800x600 66x49 um Description Preview image Acquire image Set image acquisition mode Activate image drift correction Configure image drift correction Image channel 1 Image channel 2 Access StageControl menu Activate ColorScan Select
26. N gerett 23 3 6 1 Setting up Jobs and Stage e de EE 25 Sous EANO EE e ee eebe iul b qb IUE 2 Sr POMC is te TUUM 29 eeler 29 Ou 1g 91 gt Neen md NND EPUM DN DRM UMP DEM IMEEM Re 30 3 8 Volumes Files and ee e 31 SSC RE e e E E EEE EE E PE EE E EEE 31 4 Software and Analysis Short Reference ccccceccseeeeeeeeeeeeeeeeseeeeeeseeseeanesaseeeaseeeaneseeneneeees 33 Al Preparado 506 ENTER 35 42 el 1 16 9 flO let lee EE 36 4 3 Automatic Standardless Point Anakveis enne 04 4 4 Analysis with Direct Heterence 0c ccccccccccecccceceeeeeeeeeseee esse estan Ime emen nnne nnne nnne nnns 38 4 5 Standard based Analysis with Library EEN 39 4 6 Maintaining Standard Ubrares Hmm 41 4 7 Object Analyse 43 nS Sie ec TTE 44 4 9 Fully Quantitative Line EE ergeet 45 ON E dE e e NRTRRRTENRR 46 ATT Fuly EREECHEN 47 MRA TEV E E EE 48 4 13 Phase IRIS EEN 49 Z ps mage is FOC SSSI FO usui vun Dm tam MEINEM MM MEUM UNE 50 ANIMS e Le ere EE 51 4 106 Analysis Automati n SING EE 53 A T7 otage Mapping Using 09 NN E T OM 55 4 18 Creating ER EE 57 5 Buttons Icons Controls Quick Guide eeeseeseseeeee eene ns 59 5 1 Startup Screen and Main Program VVIFIOOWW EE 61 Bele a O REIR EAE E EN 61 Quick Reference Guide 5 1 2 Main Program Window and General Control 61 5 2 Workspace Buttons and COMMONS EE 63 B2 EE eege 63 5 22 Workspace Databases RE 64 S CE
27. T program window contains the general control buttons common to Windows applications Please note that the icon in the title bar closes ESPRIT completely not just the active workspace The icon invokes the online help system Tei minimizes the program window and the and icons toggle fullscreen mode on and off Devices area he area Devices contains a line for each assigned X ray spectrometer plus a line for the Imaging system and general electron microscope settings and one for the EBSD camera The lines display information on key parameters and the condition of the corresponding devices Clicking one of the triangles to the right of a device name opens a panel for setting device parameters The colored status signals left of the text lines inform on the device status check the online manual for details Clicking onto a spectrometer data line will select this spectrometer for subsequent spectrum acquisition The selection is highlighted in yellow Project area he Project screen area gives access to the content of the current project The current project is maintained through all workspaces it can be built up during one or more work sessions and later be saved to a file The project area can also just serve as a permanent clipboard Measurement and analysis area workspaces This screen area contains the different acquisition and result windows as well as all control elements for the measuring tasks combined to task spe
28. add the results to a report file by activating the Add to report checkbox Afterwards choose a template by clicking on the arrow below hepeat steps 9 to 11 until all jobs in the list are processed 53 Quick Reference Guide 4 Software and Analysis Short Reference Devices Spectrometer e O Imaging system P eni EBSD Camera Forat 640 x 480 li 3 j Automatic Manual O Real time s O Live time s Name n oo Region start keV z E i kik J C Drift correction on Region end keV 7 Get image Automa tah LA Get im Automatic analysis See 2 A O Quantification table Continuous cas After acquisition giereg Caneel None Coating correction Carbon only Coating calibration Fig 4 16 1 Creating a job Job type Objects measureme LI Drift correction on Estimated time 9s x Get image LA Get spectrum D Quantificati v Quantification table v Data export Job setting Image settings Volumes edssData C 2008 11 12 0839 C 2009 02 04 10 38 C 2009 02 04 11 07 C 2009 02 04 11 12 C 2009 02 04 12 25 C Autophase Hypermap Fig 4 16 2 Editing and running jobs and job lists 54 4 17 Stage Mapping using Jobs 4 17 Stage Mapping using Jobs Step 1 Prepare the sample and select the Mapping workspace Click New to acquire an image Set the map area to Fu
29. an If the sample is of unknown composition perform step 5 first and then identify the elements by using the identification tool on the sum spectrum accessible through the Spectrum tab Repeat step 5 if necessary to improve line scan quality Terminate the measurement when the concentration profiles are of sufficient quality or select an appropriate timing option Line scan data 2 fx Add to project Spectrometer Input Hmm 300kcps Range 20keV 275 kcps Dead time 23 9e Realtime 22s a Save Spectrometer s IOTTTOTTTOTTTO 9 9 kcps Range 3 60 kcps e Databases J Print QE Imaging system Format 800 x 600 HV Magnification 2500 WD 23 0 mm Spectra Add to report EBSD Camera Format 640 x 480 erg E Element selection SS Imaging Open Standard library ESL 506 15kV mod Copy E 204 2co0 geseiemg umewng soos Require v Quantify v Crystalign Paste gt Elementlist PB ZAF Sae SE BSE A Objects e Graphic D a LU Jobs Copy mM 2 Save System J 80 Twain export 60 40 UTE UNUS REN S Single 800x600 66x49 um 100 points 3 Table of elements IEN Line scan Free regions z een 20 H S He e Point count 100 Distance um 0 26 F1 F2 F3 F4 FS F6 F7 F8 i P HE p Li Be Inputs B E N o F Ne Filter Results az L 1 b Na Mg 111213 1415 161718 Al si P ROa A 3 op K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga
30. antitative Mapping Hyper mapping vd Data export Add to job list OK Cancel Phas He H F1 F2 F3 F4 FS F6 F7 F8 Li Be B Bl N OF Ne E keim I1 I2 I3 I4 I5 161718 A sj p s a K Ca Sc Ti V Cr Mn Fe Co Ni Bl zn Ga Ge As Se Br Kr Cs Ba La Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Po At Rn 5 e Fr Ra AC Ce Pr Nd PmSm Eu Gd Tb Dy Ho Er Tm Yb Lu Th Pa U Np Pu AmCmBk Cf Es Fm Md No Lw SD Bo StageControl Jobs 3 y amp x v O Spectrometer F TTT 301 kcps 20 keV 275 kcps ne 26 Spectrometer Ki T 10 0 kcps Range 20 keV 60 kcps Imaging syst n 20 HV 15 0 kV Magnification 2500 23 0 mm ro tals Assistants f EBSD Camer 30 100 Hz Databases Jobs position Spectra Jeb 1 Mapping master 10 Estimated time 2 42 min xj Imaging fe State Job type OO Oe Drift correction on Pappea z gurrent position f T Get image ine CrystAlign Mapping sg Rectangle _ d Variable stage area Quantitative Mapping Stage map M Circle mm Objects Hyper mapping SS vd Data export Options Edit a Jobs _ 7 XO 0 001 xi Drift correction on 9 Get inan YO 0 001 Yi System E e Mapping Read current Read current d Quantitative Mapping 30 TENER Hyper mapping Stage Positions mm 11 J v Data export 10 Se 10 Random umber Job list x Y Test job list Grid 10 10 Nr on Typ State Job name e Ge wads 0 0590 1 Mapping master 2
31. apping Job for every grid point stage position and will clone all acquisition settings from the master Job 55 Quick Reference Guide 4 Software and Analysis Short Reference I Un COIS Devices Assistants Add Job Gei O Spectrometer i put nimm 300 kcps Range 20 keV 275 kcps ea e 26 Name O Spectrometer nnn 10 0 kcps Range 20 keV en Databases Mapping master Imaging system nat 800 x 600 HV 15 0 kV ation 2500 Drift correction on Spectra 4 Get image Data EBSD Camera FoNnat 640 x 480 S Mau Calibration None Measuring time Fast map Manual Measuring time s 100 Cycles 10 Switch off microscope Realtime s oz Live time s oz Recommended minimal measure time s 0 04 s Counts 5000 Region start keV kev 0 25 20 00 Region end 800x600 66x49 um Single Total measure time 37 min Options Variable 1 e 1 4 1 2 1 8 es Full Fix Interlaced measurement Use 1 microscope image only D ut at Measure time Image average s 30 Map name None Smooth ER Map data Map number Automatic numbering Object name Element images OK Standard library ESL 506 15kV Nod Acquire e Imaging GEES Feature er CrystAlign Jobs N d Fig 4 17 1 Defining a mapping job as a master for stage mapping Objects Eat T Add to project Add to report Qu
32. arious options for quick and comprehensive report generation complement the analysis toolboxes The software tools are tailored to meet both the needs of the novice as well as the experienced user All QUANTAX systems ESPRIT software includes an online help system and support remote diagnosis and assistance via the Internet This quick reference manual provides a brief general software overview and a practical step by step description of the most common measuring procedures that can be performed with the QUANTAX system A list of the main buttons icons and controls is also included For a complete description of the QUANTAX system as well as maintenance and safety provisions please refer to the QUANTAX user manual The integrated assistants and the online help of the ESPRIT software provide additional support Details on the individual software and hardware parts and additional technical data are contained in separate manuals The individual device manuals can also contain further references regarding operational safety Please follow all safety instructions closely to avoid hazards to personal safety and equipment In case of necessary maintenance reinstallation severe computer breakdown hardware changes etc the Bruker customer support or your local supplier has to be contacted for further assistance and instructions According to the modular structure of QUANTAX not all parts of this manual may apply in detail to a given installation nor shoul
33. ary ESL 506 15kV mod Elevation angle 35 High voltage kV a5 H Calibration sample 200 amp Select the sample to use for calibration E Copper reference 190 Acquisition time 160 Select measure time for calibration eT 140 Manual Real time s 120 Wi 7 11000 E Standard deviation 0 200 System factor Previous calibration Time Standard deviation System factor Results Primary energy 15 0 kev P Tilt angle 0 0 System is calibrated Acquire now keV B ue E Real time s 500 000 Life time s 499 134 Spectrometer v 9 9 kcps Range 20 keV 60 kcps Imaging system HV 15 0kV Magnification 2500 WD 23 0 mm Sulfu 24 00 EBSD Camera Format 640fx 480 100 Hz d SL i aaa Calcium Pa id Sum of concentrations 100 00 i Start acquisition Specification in Mass Atomic Element Concentration Error OD oe o Fig 4 6 1 Creating and maintaining standard libraries 42 4 7 Object Analysis 4 7 Object Analysis Step Example hints 1 Prepare sample and select the Adjust beam current if necessary in MultiPoint workspace Point mode preview Click New to capture an image Position or draw any desired number of points rectangles ellioses or polygons 4 Use Select all to highlight all objects 5 Check if automatic analysis after acquisition Is
34. asis for evaluation at any time during or after acquisition This has the advantage that all kinds of measurements can be performed on this data including point measurements line scans and qualitative and quantitative maps as well as phase analyses he disadvantage is that the databases require enormous amounts of storage space which currently makes HyperMaps beyond 1024 x 768 pixels resolution difficult to manage ESPRIT maintains separate presets for electron image capture mapping and line scans Element Imaging Setting up of element images is provided as a post process of element mapping Different image mixing modes are provided equipped with full control over contrast and brightness settings as well as color contributions of the individual element maps Settings can also be altered and optimized during the scan process ColorScan This tool can be accessed from any workspace with imaging function AutoPhase ESPRIT AutoPhase results can be accessed from both Mapping and HyperMap workspaces through the Phases tab AutoPhase itself is invoked through the according command button in these workspaces AutoPhase determines phase content in mapping images based on a range of different user selectable methods These include histogram based methods automatic binning and principle components analysis clustering and analysis based on predetined objects drawn in the mapping images by the user A set of controls is provided to fin
35. choose to define a Line Rectangle or Circle In these cases you have the choice of activating Variable stage area Simply put this rather abstract concept means that the actual analyzed area is not fixed but depends on the number of grid points the microscope magnification and the overlap of selected fields of view see subsection Stage positions below In this case the current position will be used as a start point for the screening Without variable stage area you will have to enter coordinates X0 YO X1 Y1 to define start and end points Alternatively you can make manual stage moves and read the current position at both locations In case of Circle these two points define the diameter of a circle to be drawn around the center of that line Stage positions Ihe parameters to be set here complement those under Sample area directly apart from Current position where they have no effect You can either choose Random subdivisions of the line rectangle or circle or define a Grid In the first case you will just have to enter a number of fields of view to be measured and Jobs will randomly position them within the object coordinates In the majority of cases the Grid option will make more sense You simply have to define the number of subdivisions in X and Y direction and ESPRIT will automatically calculate grid points and step sizes and overlap in both directions for you It also works the other way round defining Step widths will calcula
36. cific workspaces Ihe screen layout varies between different workspaces 3 4 Display and Control Elements 3 4 Display and Control Elements e In some cases the image detector selection on the microscope console also sets the QUANTAX image source Image capture window Workspaces of the Objects group and the workspace Imaging have a dedicated area for controlling the electron image capture Analysis spots objects scan lines and mapping areas can be defined in the captured image Image capture is controlled directly from the workspace Additionally a special window for fast image preview is provided One or two of the image detectors typically the SE and BSE detector can be connected to the QUANTAX hardware and selected for image capture with QUANTAX Spectrum and Result window Acquired spectra and result diagrams or element images share a common screen area in a workspace The spectrum window provides multiple spectrum display and graphical spectrum comparison Spectrum preview before acquisition is also available In contrast to image preview which is provided by a separate panel the preview spectrum is displayed in the original spectrum window A list of spectra displayed below the spectrum window provides control over display data exchange and spectrum analysis Control buttons A row of control buttons on top of the main display window The buttons allow starting and stopping of previ
37. croscope High voltage Magnification and Working distance 5 2 Workspace Buttons and Controls 5 2 7 6 Workspace Stage Configuration Stage data exchange Adapt connection parameters Microscope stage information Fig 5 2 16 The Stage workspace Note that all settings in this workspace are normally made during system installation Moreover wrong settings may bear the potential risk of device damage or at least communication problems This description is therefore mainly for educational purposes Be circumspect when making changes Object Description Hints Simulate stage Required in demo mode only Stage driver used Initialize stage Available motorized axes Selectable are X Y Z Rotation and Tilt Read stage data from microscope Edit stage data X Y Z in um and Rotation and Tilt im Edit rotation center 81 Quick Reference Guide 5 Buttons Icons Controls Quick Guide 5 2 8 Workspace Report Zoom Pages D o o Properties 1 A ln gan A EE Ah o Boa Mee SIMUEdqiMn Dr e 2255732452919 ES 4 Fixed Pass on Overview image 800 x 600 M L d Mag 2500x E pra Sie Setup 3E a u t I Print 00 NZ a ee S4 CO ee Oe A G EM dr S xA oe FS C NOI SAL gt o 0902 2009 sls on ns E Rem x ee RBS Paga me J D Map_2 Fig 5 2 17 The Report workspace Object Description Hints 5 Zoom to full page Iz Zoom to window width ac Zoom
38. d be taken literally in all cases For instance where the general term electron microscope is written this applies to the whole class of electron beam or dual beam systems SEM includes also STEM microprobes or other scanning devices Also details of the program layout may vary according to the modules actually installed on your system and therefore differ slightly from what is shown in the illustrations and figures 2 Safety Information Ge el geg E Eme 9 El a E O E E 10 2 EECC E 10 24 TSC Oa IC ei WY Um 11 Quick Reference Guide 2 safety Information 2 1 Radiation Safety 2 1 Radiation Safety A DANGER Changes to the original detector installation are strictly prohibited Radiation safety may be impaired by Operation of the QUANTAX EDS microanalysis system is restricted to trained personnel familiar with the system as well as the product documentation general safety precautions and laboratory rules A briefing on safety issues is given at the time of installation or during user training Local state or federal regulations have to be taken into account additionally to the safety instructions given here Additional instructions for specific parts of the QUANTAX system e g the X ray detectors may be contained in the according manuals The QUANTAX EDS microanalysis system may only be used in combination with electron microscopes or similar devices Any other use beyond that is considered non i
39. e Map Filter Average Cmanth Fig 4 18 1 Creating a report Standard library ESL 506 15kV mod 4 Software and Analysis Short Reference Qualitative Map ping o 88888 8 2 8 N Data Add to project Add to report S gt Map rpt Dr Add to job list ux a A Overview image 800 x 600 Report New Close Open Save Export to WORD Template Spectrum E e Marked object To project Save 5 Buttons Icons Controls Quick Guide 5 1 Startup Screen and Main Program Window 5 1 1 Startup Screen 5 1 2 Main Program Window and General Controls 5 2 Workspace Buttons and Controls 5 2 1 Workspace Assistants 5 2 2 Workspace Databases EDS 5 2 3 Workspace Spectra 5 2 4 Workspace Imaging 5 2 5 Workspace Group Objects 5 2 6 Workspace Jobs 5 2 7 Workspace Group System 5 2 8 Workspace Report Quick Reference Guide 5 Buttons Icons Controls Quick Guide 60 5 Startup Screen and Main Program Window 5 1 Startup Screen and Main Program Window 5 1 1 Startup Screen Fig 5 1 1 ESPRIT Startup screen Description Hints User name Password Server selection dropdown list Remember password on this computer Login current user 5 1 2 Main Program Window and General Controls Includes the Devices and the Project screen section Spectrometer e Input MMM 100 kcps Range 20 key
40. e gore 32 Report Templates 30 CONTO Boll Mie D REDE 19 CrystAlign workapace 16 Current reference ee Ee 20 D Data Exchange DEI scdeaskri dr teneo coe va Esas 29 Ee 29 REI EBSD ME 16 Databases E EE 16 Detector Broken WINAOW T 10 Devices screen areg 18 Display options EE 19 E EBD WOFHRSDSOB E 16 Editable objects report 30 Electromagnetic interference ccecce 11 Element IMagINg BE 22 Export ETEN e REET OE TT 31 External QUANTAX Data MES qe 29 PS OOM SE 30 F Feature workspace cece ceccceececeeceeeceaeeeeeeenees 16 File Geiistin Le 31 EMGAMGA eene 31 E Ea E E E 31 eieiei 91 internal TOMAS isorinis 31 Brent 29 Frame average isssssssssse eene 22 G Eileen 31 Grounding mans dee 10 H Help ASSISTIT O ER SN Interactive ssesssssssssse ens 31 Blau CHE 32 FON VOM AOC PARE TET E TT 35 FUNG AUN EEN 19 mio e r AEE edt teu 48 Icon B Mm 18 AMT 19 o m 15 c Tcr 18 Image Detector selecton 19 Image capture e Lee 19 Image PFOCESSING 0c cecces neces eeceeeeceeaeecesneeeenes 50 Imaging WOFKSP ACE 0 cece cecccecee acces eeeee seen eeeaes 16 Import EX OOM dn DIU cae exes rito tos REY Poeno dn tto edo bU 19 Interactive Spectrum analysis 20 J JOD GO E 27 e 2 General ODLUOFIS EE 27 Image settings ssssssssseeH e 27 Map SOLHFICS soersenecdti dedu ubEa Regu Pav t ra td Er et diamo 27 Mapping filte
41. e if found phases are obviously too small Use and adjust if phase edges are not well defined Header of phase list contains phase name info on counts in phase image area covered SE amp BSE contributions elements and their average content in the phase 73 Quick Reference Guide 5 Buttons Icons Controls Quick Guide ERAT Change area units Merge phases Highlight two or more phases with lt CTRL gt mouse click and subsequently click X to merge to a single phase 5 2 5 5 Workspace HyperMap n N f f oj 2 Preview J New jJ z LA Na _ Acquire Jv QMap jJ A E 7 _AutoPhase v Phases Line scan Spectrum Map result oe gt Elementlist PB gt Interactive PB ZAF S em dee st Se SE i TM e mM p w A k mI ET TU T E Single 800x600 66x49 um EI 1r4 OH f Je lt hile 4 O Full Fix Variable 1 2 1 2 X 600 e 1 4 1 8 Y so Measure time 8 min e Jeu e None o None m Smooth Average E o A Sharpen Smooth e Automatic Z A BI IE Uu s T E E M E g E v mL 4 L Cm L i ce Ve Ce zm 3H ee Ome ee f SS Fig 5 2 9 The HyperMap workspace with image scan and map window For a description of the image scan window refer to section 5 2 4 1 A description of the mapping controls and the map results window as well as for AutoPhase can be found in section 5 2 5 4 For information on the spectrum window refer to
42. e tune phase analysis through adjustment of overall sensitivity minimum phase area and edge resolution ESPRIT includes the powerful automation tool Jobs which is accessible through its own main menu entry Jobs allows unattended acquisition and evaluation of images and spectra including control of the microscope stage In fact most of the analytical 23 Quick Reference Guide 3 The ESPRIT Software 24 tasks that can be performed with ESPRIT can be automated using this feature Jobs performs an automatic analysis run by processing all analysis tasks called jobs in a job list The job list is filled either by defining jobs in the according workspaces or by creating them with New jobs It is recommended to use the workspace functions e g in setting up a mapping and then adding the job to the list using the group level Import Export menu It is highly recommended to use automatic acquisition and analysis otherwise the automated run will not be free from user interaction at all Nevertheless should you choose to add interactive steps Jobs will issue an according warning when the run is started If you continue Jobs will stop at every point where user interaction is required and wait for actions This can be very tedious in case of multiple manual spectra or image acquisitions If you create a job within the workspace it will be performed at the current stage position If you create it as a new job in Jobs thi
43. eV 60 kcps Imaging system Vv Format 800 x 600 HV 1 Magnification 2500 WD 23 0 mm EBSD Camera Format 640 x 480 100 Hz pum 3 2 4 Standard ESL 506 15kV mod NIS iiij 25i Preview J New Jv E Mi she EENS Je 7 Leite A v Phases Linescan Spectrum Ma result SE BSE e Method Histogram e PCA Database Clusters E Open Objects Save Save selection Phase data Add to project 8t Insert N Copy amp Save i Print Add to report Single 800x600 66x49 um Twain export imi K S 0 1196 63 Full Fix Variable 1 1 2 Element selection a X 600 1 4 2 1 8 Open amp y 1450 Measure time 8 min J Add to project d zt 0 00 M 100 ER 21 00 a SE Filter lap Filter Mass norm Area e SE BSE C O Na Mg A Si s ca K Ca m None None 143501 8702 3368 514 30 42 36 8 12 9 28 10 80 16 13 7 03 11 95 4 26 4 13 2 80 Paste Smooth O Average L KR 74433 17789 19807 45 32 97 22 17 17 52 67 56 34 145 44 54 86 6 99 7 29 29 34 5 85 v E x Result table Uu p n P Add to project e oO d C E E opy CR F Save g Uu 4 3 Add to report 4 Hon SE i CIE iv Cn iv rmm T EE TI EE 1 r qmm J Ce im Fig 4 13 1 Performing phase analyses 49 Quick Reference Guide 4 14 Image Processing 4 Software and Analysis Short Reference Step Example hints 1 P
44. eck device functions settings and microscope data 6 Select workspace Objects Point 7 Start spectrum preview and check spectrum 8 Adjust beam current according to the desired count rate and readjust image brightness and focus on the SEM if necessary Examples hints High voltage 15 20 kV Magnification 1000x WD as assigned for EDS Image capture Single Analysis methods Automatic PB ZAF mtd Acquisition timing Automatic Precise or Manual Spectra display cps eV keV Automatic analysis After Acquisition Parameters on QUANTAX screen must match microscope settings Use automatic spectrometer settings All status indicators for devices should show green The Spectrum workspace can also be used for simple spectrometry tasks Check energy calibration by setting line markers for known chemical elements Ref 4 2 Spectrum analysis Si Li 1 5 kcps XFlash 5 50 kcps Mapping Count rate indicator green red 35 Quick Reference Guide 4 Software and Analysis Short Reference 4 2 Energy Channel Calibration Correct energy channel or gain calibration is a prerequisite for reliable qualitative and quantitative analysis results Calibration should be checked from time to time weekly and adapted if necessary to compensate for spectrometer drift Calibration should be performed always after switching the signal processing unit on Not required when using standby mode Recommended Devices Step
45. ectra deconvolutioi J Deconvolution Fit Bremsstrahlung background Physical SEM Automatic PU uu EDS quantification V Author EDS quantification Bruker Nano Created 13 07 2006 E Results Overlapped lines deconvolution Changed 13 07 2006 Results Series deconvolution Quantification PU x ji PB ZAF w GE Results Save l i E Ser W Norm At wj Y Add to project Result ox Fig 3 5 1 The ESPRIT method editor for spectra evaluation Method editor Customized analysis strategies so called Methods can be configured for repeated use or routine analysis he method editor provides control over all analysis steps including identification peak devconvolution and quantification strategies A number of predefined methods for common tasks are included with the ESPRIT software Line scan and mapping Line scan and Mapping is provided with fast accelerated or fully quantitative spectrum analysis With fast analysis mapping full control over the scanning process is possible This ranges from slow scanning single frame capture over line averaging to high speed frame averaging modes for noise suppression 22 3 5 Analysis Automation 3 6 Analysis Automation The HyperMap function which records a full spectrum at every point of the map is optionally available This method is also known as position tagged spectrometry or spectral imaging HyperMap stores all data in a hyperspectral database which is the b
46. el System jobs Defaults Start J Fig 3 6 1 The Jobs workspace with job editor open 3 6 1 Setting up Jobs and Stage Positions Create Job EN Job type Sampling Area mm x amp Current pozitior Line Name Rectargle vd Variable stage area Mapping i gt Crele Definitior Options Fdt vd Set microscope stage Xo 0 000 J Xt vd Set microscope data YO 0 000 VE Drift correction on Read curren Read current v Get image ee e Mapping Zeie Sta sitions Quantitative Mapping go ren p Hyper mapping number Overview vd Data export Scan rotation b Stage rotation correction x Y Steps Step width mm i Overlap 9 OK Cai cel Fig 3 6 2 The dialog for creating a new job New jobs can be created either from scratch with New jobs or by first highlighting an existing job and then clicking New jobs In the latter case the highlighted job will be used as a master and the new job s will be one or more duplicates What is explained here applies to both cases General options The exact type and number of parameters depend on the type of job Most of them are self explanatory The common general options are Name assigns the job a name Although this field contains a default preset and a selection by drop down list it is advisable to assign unique names to jobs in order to facilitate later review of results especially when processing long job lists Drift correcti
47. element finder Pa Spectrometer is used for the energy calibration of the currently selected spectrometer Imaging is used for calibrating the QUANTAX image magnification Microscope and Stage contain basic setup parameters for electron microscope and motorized sample stage These are defined during the installation of the QUANTAX system Do not change unless specifically authorized by Bruker customer support Report starts the QUANTAX Report editor that can be used in parallel to all workspaces that provide measurement data acquisition and processing Spectra Imaging Feature EBSD Objects Jobs 17 Quick Reference Guide 3 The ESPRIT Software 3 3 Workspaces cP Should one of the program areas be invisible it is probably just covered up by an adjacent screen area Just drag the strip line to resize areas Fig 3 3 1 Screen area Devices Project edx mapping_23 rtx Information 14 12 2004 El 5 Objects SEM image R Map 14 12 2004 Spectrum regions Cu Pb En Map LJ AL mi EH E Results Fig 3 3 2 Screen area Project Fig 3 3 3 A QUANTAX workspace 18 The different workspaces mentioned above provide all necessary tools for spectra and image acquisition and analysis Arbitrary changing between workspaces can be done without data loss however running measurements will be terminated A warning is issued before termination Title bar The title bar at the top of the ESPRI
48. enhancing details Overlay image with text points lines arrows rectangles and ellipses Can be edited and 67 Quick Reference Guide 5 Buttons Icons Controls Quick Guide Source image 2 C WMO jJ Image math Colors Burn in B Pseudo colors Set limits Stitch Columns Rows Overlap Calculate 68 Set image options Tab to access image filters Smooth image Sharpen image Binarize image Invert image Radius of filter matrix in pixels Strength of filtering operation in percent Center color or grey level of region for binarization Width of region for binarization in colors grey levels Tab to access image arithmetic oource images for performing mathematic operations Dropdown list of available operations oet contribution of source image 1 and 2 Perform selected operation Tab to access artificial image coloring Add color scale used to image Convert to pseudo colors Set black and white limits to color conversion Convert according to RGB color scheme Convert according to palette Load palette for conversion from disk Access image stitching function Number of columns of image tiles to be used Number of rows of image tiles to be used Define overlap source images were recorded with otitch tiles together removed Set legend name or comment For smoothing and sharpening filters For smoothing and sharpening filters Drag and drop from image scan or
49. ew image capture spectrum acquisition automatic and manual spectrum analysis and in special cases validating standard samples and reference measurements Option panels A number of individual option panels and control buttons associated to the display windows are provided These can be opened by clicking onto the icons on the right of the according windows usually contain display options but also tools or the triangles next to the control buttons acquisition and analysis options Also a number of text Icons can be clicked to get access to option panels settings and selection boxes In many cases diagram axis descriptions and column titles can be clicked to toggle selections Active screen items are indicated with small triangles active items will react when the mouse cursor is moved across them 19 Quick Reference Guide 3 The ESPRIT Software Map data Add to project Insert Copy Zapp Print Add to report Twain export Element selection Open Add to project Copy Paste WE Result table Add to project Copy SEWE Add to report Fig 3 4 1The mapping workspace Import Export menu as an example 3 5 Analysis Options 20 Clicking into data lists and thumbnail images results in highlighting them Highlighted items can be selected for different actions e g export to file or spectrum evaluation In some cases multiple objects can be selected to perform batch processing Import E
50. ge move Here you can enter position data and the microscope stage will be moved to that position during processing of the job list 3 Projects and Reports 3 7 Projects and Reports 3 7 1 Projects SEM data his is another set of parameters that only applies to jobs of the type Stage move Here you can set microscope parameters like Magnification High voltage and Working distance SEM optimization Enable or disable SEM Auto Contrast Auto Brightness Auto Focus and Auto stigmation if supported by the SEM Run at job list end Steps to be performed at the end of the jobs list like to Switch HV off or Move stage to start position Projects Project is the name of a special screen area or a data structure that can file objects spectra images data list generated during ESPRIT work sessions except HyperMap Feature analysis and EBSD The hierarchical tree structure of a project facilitates the grouping of data belonging together e g spectra result lists and associated sample images The tree structure is organized automatically in the order objects are sent to the project via the Import Export menus of the specific workspaces Objects saved in a Project can be retained including all primary data relevant settings and attached information Some of the ESPRIT objects can only be saved by embedding them in project files Loading and saving Projects Projects are independent of work sessions different project
51. gend font size Reset all font sizes to defaults Scale spectrum window Y axis In cps ev Logarithmic Y axis scaling Individual Y axis scaling Spectra window X axis will be scaled in keV Display spectrum as bar graphics Show grid in spectrum window Show X Y cursor Show spectra names as legends in spectrum window Display solid spectra Edit element settings Add selection to list of forbidden elements Clear all changes made to element settings Accept all changes made in workspace Hints Use slide control to set element label font size between 8 and 16 pt choose bold print if desired Use slide control to set spectra window X and Y axes label font size between 8 and 16 pt choose bold print if desired Use slide control to set legend font size between 8 and 16 pt choose bold print if desired If off scaling will be in Pulses ev If checked will accept different Y axis scaling for every spectrum in the list If Automatic is checked you may right click drag the mouse across an area of the spectrum window All background spectra will be scaled to this region of the foreground spectrum normalization If off scaling will be in channels If off spectrum will be displayed as line graphics Instead of line cursor parallel to Y axis If off outlines will be displayed Clickable periodic table of elements to edit element settings e g line selection Forbidden elements will not be identified automa
52. ialog boxes and warnings are issued preventing the user from performing unwanted actions 31 Quick Reference Guide 3 he ESPRIT Software Context sensitive help Context sensitive help is available from the dialogs The comprehensive and extensively linked online user manual and tutorial can be accessed from the program window On screen guides Dialogs or options that are not frequently required provide on screen guidance directly from the workspace Assistants The integrated assistants interactively guide through common analysis tasks They provide step by step instructions ranging from sample preparation to creation of reports 32 4 Software and Analysis Short Reference 4 1 4 2 4 3 4 4 4 5 4 6 4 7 4 8 4 9 4 10 4 11 4 12 4 13 4 14 4 15 4 16 4 17 4 18 Table of elements X Pin Lines Energy Width elements Overview Free regions H F1 F2 F3 F4 FS F6 F7 F8 j Li Be BC NOTERE Na Mj Al si Ps Cl Ar K Ca Sc ffi V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Cs Ba La Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Po At Rn Fr Ra AC Ge pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu Th Pa U Np Pu AmCmBk Cf Es Fm Md No Lr Bee 35 ee Geier Eee icit SR T T 36 Automati Standardless E E 97 Analysis with Direct EE eege 38 Standard based Analysis with Library EE 39 Maimntamning Standard OOIE NEN EORR 41 E SS TET E E E S
53. ibrary standards 39 Quick Reference Guide 4 Software and Analysis Short Reference Devices o TTT TTT TT Spectrometer V 9 9 kcps Range 20 keV 60 kcps Imaging system v Format 800 x 600 HV 15 0kV Magnification 2500 WD 23 0 mm EBSD Camera Format 640 x 480 100 Hz Standard library Standardized elements 1 A br Oxygen Hi Fig 4 5 1 Selecting the library for standard based quantification EDX standard library ESL 506 15kV mod Elevation angle 35 High valrageLkV j 15 Calibration sample e select the sample to use for calibration m 180 Acquisition time 160 Select measure time for calibration Automatic Precise U Manual Real time s Calibration data WE TTT TT Standard deviation 0 200 System factor 42237 Previous calibration lime Standard deviation System factor 140 120 Results Primary energy 14 6 keV 0 0 000 9e qu uis Oxygen Kseres 47 17 47 09 6674 Calcium Keeries 29 145 29 10 16 63 Total 100 16 100 00 100 00 Start acquisition Ame System is calibrated now e Hg Ww 9 9 keps Range 20 key 60 keps HV 150kV Magnification 2500 AD en Hz x Free regione m Fi F2 F3 F4 FS F6 F7 FB He d Be B C N OI F Ne Na Mg Al si P E cl ar K Ga Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr Rh Sr Y 7r Nh Mo Tc Ru Rh Pd Ag Cd
54. ick Reference Guide 5 2 7 Workspace Group System 5 2 7 1 Workspace System Specrometer MegaLinki Spectrometer Megsunk2 Rese Reset 5 Buttons Icons Controls Quick Guide Fig 5 2 11 The System workspace Description Generate system report Show license Update license Device name Device connection Device type Reset device Device data Send low level command to device Auto update device list 5 2 7 2 Workspace Display Languages Spectrum Line scan chart settings Chart preview Fig 5 2 12 The workspace Display 76 Hints Required if additional options have been purchased Do not change without necessity Do not change without necessity Do not change without necessity Do not change without necessity Reserved for service engineer use 5 2 Workspace Buttons and Controls Object 2 Chinese e English gt Frangais Deutsch gt Japanese Pycckui Espa ol Label font size Axis font size Legend font size Defaults Counts second Logarithmic Individual scaling Automatic Energy mode Bar graphic Grid visible C X Y Cursor Show legend Filled spectra Mn Forbidden elements in Finder Description Use Chinese interface Use English interface Use French interface Use German interface Use Japanese interface Use Russian interface Use Spanish interface Set label font size Set axis font size Set le
55. in Bet Move object one step forward o Move object to top Dm Move object one step backwards ai Move object to back Fixed Fixed position for selected Cannot be moved or deleted object Pass on Copy object to all report pages Same position on every page useful for creating templates 82 5 2 Workspace Buttons and Controls m lad a es KY L A Ph L bd r 1 Add auto text field Add placeholder Add text field Draw point Draw arrow Draw line Draw rectangle Draw ellipse Select line color Select fill color Select line width Select arrow style Select arrow head size Page setup for printing Print report Hide report editor For later addition of spectra Uses according Windows dialog Insert page below current Add page at end of report Delete current page Edit report properties Undo Merge reports Index Index A Active screen e EE 19 Analysis HEEN accepted brain Ene A etie dE A cs dread 37 ASSIS a eege 16 32 Automatic Spectrum arialyslS uiaiceisrinedsverdanssdaenvesacntmmnarsis 20 PURO e 16 53 Autobihbase ee 22 49 B PeR Brel f Isl rere eee one ET 20 Beryllium Safety E 10 Blind flange original diu teo eden tu coo opas 9 Ee TEEN 19 C GU OU NR 39 Clipboard Current project as 18 LA OO Stott RETE 30 31 Combined analysis ccc cece cece eeceeseeeeeeeeeeaneeens 20 Compatibility electromagnetic 11 Context sensitiv
56. ion v Lines gt Automatic PB ZAF p gamans E ke Coating correction v Regions e None Coating correction Carbon only Coating calibration Spectrum numbers Automatic numbering L1 37 Quick Reference Guide 4 Software and Analysis Short Reference 4 4 Analysis with Direct Reference Step 1 Prepare unknown sample and reference Select workspace 2 Select standard based method disable automatic spectrum analysis 3 Bring reference into analysis position and adjust microscope parameters 4 Click Acquire to acquire spectrum Click Validate and enter the known element concentrations for the reference 6 Bring the unknown sample into analysis position and click Acquire Click Quantify Check results Example hints Objects Point or Spectrum e g Interactive Standards mtd For precise analysis use low to medium electron beam currents yellow to green area If an interactive quantification method was selected element identification and background fitting will have to be performed before entering element concentrations Finally confirm the element assignment for all chemical elements that shall be quantified according to that reference Don t change any relevant microscope settings beam current focus high voltage Elements quantified according to the reference will be denoted by two asterisks 5 amp Devices O Spectrometer sv Input HH 30 kcps Range 20 keV
57. ith upanddown Continue this process with all unidentified element peaks X ray spectrum save in print as Project gt amp Report gt v 2110 BN 10 XF spx Wm 0 56 Fig 5 2 1 The Assistants workspace replacing the standard main menu 63 Quick Reference Guide 5 Buttons Icons Controls Quick Guide Object Description Perform step go to Provide additional help info text Position indicator gt Overview List all assistants Close Assistant workspace 5 2 2 Workspace Databases EDS Hints Marks the step currently selected for performance Displays normal main menu For description of Databases EBSD please refer to the OUANTAX CrystAlign manual The description of the spectra window can be found in section 5 2 3 below EDS m y d Standard library Standardized elements 4 Element standards for Sulfur 2 o CasO4 BLS 60 19 05 2005 CuFes2 BLS 65 19 05 2005 PbS BLS 66 19 05 2005 standardless Fig 5 2 2 The workspace Databases EDS with spectra window displayed Object Description Selected element Edit Cliff Lorimer factors Radio buttons select standard for quantification Radio buttons select standard for peak deconvolution Edit Standard properties Add sample to standards database Hints Clickable periodic table display for standard processing All elements for which a standard is available have a light yello
58. kspace Buttons and Controls on A al e i 0 00 I ri oo mm pm Spectrum Phases e Histogram PCA Auto O Clusters Sensitivity D False color palette Binary and ternary diagrams Draw objects for analysis Drawing tool Map options Map brightness control Map gamma control Map color intensity control Element contribution control phase contribution control Phases tab Access spectrum window Access Phases window Use histogram method enable PCA and auto binning Use clustering method Use drawn objects Phase detection sensitivity control Minimum phase area control Enable and control edge cleanup tool Phase info Use as an alternative to standard mapping colors Points rectangles ellipses and polygons not to be mixed up with the drawing tool Use to control color intensity of element phase to switch contribution to map or phase image on off check box or change the associated color by clicking on the color field Refer to section 5 2 3 VVorks directly on the element intensities OMap concentrations optionally perform Principal Components Analysis before binning optionally create bins Automatically instead of fixed Size Use a cluster method from feature analysis to create phase image Use objects drawn with the Ea tool to determine phases optionally recycle objects drawn for Last analysis Reduce if found phases are obviously too many Increas
59. lectronic equipment This is not a disadvantage under normal circumstances because the QUANTAX system works under the same conditions as electron microscopes and the laboratory environment is designed to meet the requirements of these instruments Bruker devices fulfill all requirements regarding active electromagnetic compatibility emission rules 11 3 The ESPRIT Software 3 1 3 2 99 3 4 3 9 3 6 3 7 3 8 3 9 arap ma LO UE 15 BVA UME deg E EAS E E EE A A AA A A E ede ee 15 E E E E A T 18 Display and Control Element ac nee nn eo en ne 19 Anay e B eure E 20 AN GI liom AN e gals idl gaa Renner E cee ere Ee 23 BSC e Ee RE 29 Volumes Files and Folders sss II II eee Ree riis 31 Her ele cc E EE 91 Quick Reference Guide 3 The ESPRIT Software 14 3 1 Start up and Login 3 1 Start up and Login Get System functions especially concerning the measurement system e g calibrations will affect sub sequent users t is advised to exercise special caution here 3 2 Main menu The ESPRIT software runs on the QUANTAX server and the client workstations However the user only has to start the client application the server software and communication drivers will start and log in automatically A desktop icon ma and an entry in the Start menu serve for starting ESPRIT A username and password are required for logging in With multiple client installations a user can log in fro
60. ll image Size 4 Setup acquisition time b Select elements to be mapped using the identification tool 6 Add the mapping setup to the job list 7 Change to the Jobs workspace 8 Highlight the job just created and click New jobs 9 Enter a meaningful name for the mapping jobs to be generated 10 Select Rectangle as scanning area and activate Variable stage area 11 Define the Grid into which the scanning area is to be subdivided 12 Define horizontal and vertical Overlap of maps 13 Click OK 14 Click Start to process the job list and perform the stage mapping Example hints If you want to map quantitatively do not forget to reduce the OMap size otherwise your stage mapping may take excessively long Note that you can also choose HyperMap same applies here Choose automatic acquisition either in Cycles or seconds Measuring time Give this job a meaningful name Refer to Fig 4 17 2 from here onwards This ensures that this job will be used as a master to clone all mapping Jobs from Before doing so you may also edit the master job s Results handling properties If you wish to store all results directly to disk instead of just adding the to the current project You may also assign a name to the job list Ref 4 16 e g 10 steps horizontally and 10 steps vertically Note that the number of grid points is identical to the number of maps to be performed Time factor The system will now generate a m
61. m any client workstation and access his private data and user profile on the QUANTAX server With multiple QUANTAX servers in the network the server to connect to is selected during log in procedure A list of available servers is provided below the password entry box Multi user systems On multi user systems several users can access manage and evaluate private and shared data simultaneously The first user to start a measurement will gain access to the spectrometer and imaging system his user will be able to perform measurements from the remote workstation The access to the acquisition hardware remains locked to others as long as this user is logged in The screen area on the left hand side of the QUANTAX program window displays the main menu in form of buttons for selecting a workspace the contents of the main program area or important tools In full screen mode the main menu is displayed as a line at the top of the program window 15 Quick Reference Guide 3 The ESPRIT Software QUANTAX Menu Tree QUANTAX H Server Client Assistants Databases EDS EBSD Spectra Imaging Feature CrystAlign Objects Point Objects Line scan Mapping HyperMap Jobs System System User interface Spectrometer Imaging EBSD SEM Stage Report Fig 3 2 1 ESPRIT menu tree E Assistants Databases Spectra Imaging Feature Cryst lign Objects User edx Server
62. metry Point MultiPoint allows analysis of one or more points with electron beam control Analyze arbitrarily shaped objects under MulitPoint Perform 3 2 Main menu A DANGER Take special care when changing any parameters in the System group of workspaces apart from those mentioned in the text Not only do these changes affect all users of the QUANTAX system they may influence measurement results As a worst case scenario entering wrong Microscope and Stage parameters may damage especially older electron microscopes QUANTAX qualitative or quantitative line scans under Line scan Mapping allows you to generate qualitative or quantitative element maps HyperMap is Brukers position tagged spectrometry tool spectral imaging Mapping and HyperMap also include the phase analysis tool AutoPhase Jobs is the workspace for configuring ESPRIT s powerful analysis automation tool and running unattended fully automatic analysis tasks System comprises all maintenance and service pa nels for system set up calibration license administration and other The System workspace is actually only required for installing a new license file if a software upgrade has been purchased Everything else is set during system installation and should not be changed Display can be used to change the language and the font size of labels and element markers as well as for configuring the list of forbidden elements for the
63. n 9 9 kcps Range 20 keV 60 Databases Dx o e system 2 HV 15 0 k ER gnification 2500 WD 23 0 mm Spectra EE Imagi i Veni m cocan SE e Element selection M e y gt Elementlist M a Open ai ll e Add to project r 6 E ener p E Add to project w EE 3 vi F a i6 Wi K e e ES 2 sooo EE ioo oo Emm 5 e Om Ca 3 zm Element images hoe Fig 4 11 1 Fully quantitative mapping 2e o x 7 K m Ca ve TECUM E tmr M LE d eo LU 47 Quick Reference Guide 4 Software and Analysis Short Reference 4 12 HyperMap Step Example hints 1 Select workspace HyperMap Use relatively high electron beam for good statistics Click New to acquire an image Select area to be mapped and Important Use map resolutions of determine Image resolution 1024 x 768 and below 640 x 480 is sufficient in most cases Larger data files will prove difficult to handle 4 Setup acquisition Preferably use manual start stop or cyclic acquisition total duration depends on pixel dwell time set for the Imaging system 5 Select elements to monitor In contrast to classical mapping you mapping progress can select and deselect elements any time also during acquisition 6 Click Acquire to accumulate Manual start stop For reasonably HyperMap reliable quantification don t terminate acquisition before pixel spectra contain at least 5000 counts
64. nt a 4 Len de Ua K 4 4 7 E it 0 00 EI NND 1 00 DNE INN 31 opm Im E Element images Fig 4 10 1 Fast mapping 46 Cie DRE ur mE n 4 11 Fully Quantitative Mapping 4 11 Fully Quantitative M apping Step Example hints 1 Prepare sample and select Use relatively high electron beam current workspace Mapping for fully quantitative mapping green to red range 2 Click New to capture image Adjust the map area OMap is time consuming Use a low image resolution and as small a map area as possible 4 Select map resolution Normally 1 4 or 1 8 of the image resolution Is sufficient Use the estimated Measurement Time as an indicator 5 Check analysis method Use Automatic PB ZAF mtd or Element list PB ZAF mtd and select elements before mapping Adding elements later is impossible 6 Click QMap to start mapping Mapping will terminate automatically after the last point has been quantified 7 Adjust colors and image controls Image mixing settings can be made at any time Try different image mixing modes for optimum results 8 Save data with Add to Project and element image with Save ETE EE 969 Ce rever ometer ss Input IMM 300 kcps Range 20 keV 275 kcps Dead time 26 9o i E sd Spectrometer H
65. ntended usage The operator not the manufacturer assumes sole liability for all personal injury and material damage arising from non intended usage he QUANTAX microanalysis system uses the X radiation that is generated by the normal electron sample interaction in the electron microscope Microscopes are generally designed to shield this type of radiation sufficiently The QUANTAX detector is installed according to the applicable radiation safety regulations Changes to the original installation and equipment including flanges vacuum sealing support etc are strictly prohibited In case the QUANTAX detector has to be uninstalled make sure that the original blind flange of the electron microscope vendor is used to seal the sample chamber port In case the original flange is not available contact the microscope vendor for support Quick Reference Guide 2 2 Beryllium A DANGER Beryllium is highly toxic If a beryllium window is destroyed despite all caution absolutely all frag ments must be carefully collected and disposed of according to regulations 2 3 Electrical Safety A DANGER High voltage inside Do not remove covers 10 2 Safety Information Beryllium safety issues apply only to X ray detectors with beryllium X ray entrance windows Low energy windows do not contain toxic substances Beryllium is toxic if parts are inhaled or swallowed With X ray detectors however this is onl
66. olders auto text spectra fields image fields result list fields These allow a great degree of automation of report generation ESPRIT reports can be saved retrieved and distributed The complete report can be exported to Microsoft WORD Editable Objects ESPRIT reports do not only contain graphics but also editable data objects These play the same role as objects in a project in the sense that the content can be re edited and processed at any time hus even spectra contained In a report and distributed to another location can be re quantified Almost all types of objects can be exchanged between the current project and an ESPRIT report Report templates Report templates are of the same data type as ESPRIT Reports i e they are as easy to design as a normal report Existing reports can serve as or easily be converted into templates Predefined templates normally contain headers company logos etc plus placeholders for the actual entries Different templates are maintained associated to combined objects line scans and mappings as well as simple print pages ESPRIT default templates can be redesigned or changed using the familiar graphic tools of the report editor 30 3 8 Volumes Files and Folders 3 8 Volumes Files and Folders 3 9 The Help System Volumes and Folders Each user logged in to ESPRIT can access private and public volumes on the QUANTAX server Private data is not visible to other user
67. on on enables image drift correction Get image acquires an image at the job position enabled by default for all jobs that include image acquisition by nature image scan objects measurement and mapping In contrast Get spectrum is activated for spectra and objects measurement jobs Mapping type is a radio button list that can be set to Mapping Quantitative mapping and Hyper mapping In case of spectra or objects analysis you can also define whether Quantification should take place and whether a Quantification table should be added to the output data The quantification table collects all quantitative results from jobs where the according option was selected This quantification table can be saved separately or exported to Excel Data export 25 Quick Reference Guide 26 3 he ESPRIT Software adds all analysis results to the project depending on the type of job Sampling area One of the most important settings for automated analysis is where to measure Jobs offers very flexible options for setting up measurement positions The whole right hand side of the Create Job dialog is dedicated to this task First of all you can choose to measure at the Current position this is what happens automatically if you generate the job in one of the analysis workspaces Additionally it is possible to move the stage manually and click Read current to update the system All other options are intended for screening a sample area You may
68. parking position for electron beam Image settings Set image options Info on scanned image 5 2 4 2 Image Processing Window Object X 29 Y 334 Gray 0 Fraction 19 290 k 1 00 OQ 0 00 0 00 LE Fc Auto Neutral d k Sort lt lt Undo Bi Description Processing window info Gamma correction control Contrast correction control Brightness correction control Auto contrast and brightness Set gamma correction contrast and brightness Change scaling of histogram y axis Undo up to 5 operations Open dialog with drawing tools Hints Opens a live scan window to check image detail and scan settings Single averaging or continuous Can only be done when drift correction is active Normally SE Normally BSE Overlays electron image with an image color coded according to elements present Requires XFlash Detector at high beam currents for proper function Set brightness contrast gamma correction and scan speed for image acquisition Configure legend add name or comment Displays image size in pixels and scanned area in um and how many times the image was overlaid Hints Displays different parameters according to context e g mouse cursor position over image in pixels grey level or color at cursor position fraction original image contained in binary image Returns all controls to center position Choose between Linear Logarithmic and Square root Useful for
69. r NER Sunnie 27 85 Quick Reference Guide Object analysis c 53 EE 27 OMap settings sessssmRH 27 Result bandimg 27 Res l table ODUODIS ss udeos adeps ide Dado aeria 27 Run at job list end 27 Sampling El 25 OE Wille E 27 Spectrum measurement time 27 SEIBge Tig E 55 STAGE position sssssssss daia iedA sioiias 27 Stade OOS IONS uu core routeur tunt Eae tere beet ure tee tas 25 JOOS CONS NET 25 Jobs workspace ssnssissiusinerresrrsrrerrerrrnrrrrrenne 16 L Line average eene 22 Line scan Qualitative essssssssssee eeeueseaneeanees 44 SNC 45 Load FeO e 29 L cal CIV CS NET ETT 91 M Magnification settmg 35 Mains voltage EE 10 Mapping m EE 46 OU AMY REED 46 Vue EONO TT TT 22 Multi user ovastems 15 Multiple OIG ING nascrsdesetiacamnrancdahatanivnn tie aE 19 N Network des 31 Noise suppression Image 22 Not normalized results 20 O Object PTOI pstepqi edge Tp EN 29 Belg 43 Objects workspace ss ssiiesiiesiiesrierrirerrrerre 16 Onine Mantal sessie a 32 Option panels RR 19 P P B ZAF Standard based analysis sssssssss 20 pas SON C rece enone eat Fast einen tens dien VP HUS 15 Phase analyslS eccesso nies Geor ren aeit 22 49 eil 3 Predefined methods rre e ttn rrr rne 22 Preview 86 Soc edO a PR 37 Profile 9c 31 sisi
70. repare sample and select Alternatively load a stored image into workspace Imaging processing window and proceed with step 4 2 Click New to capture image Drag image from capture window Into processing window 4 Select type of processing from the according tab 5 Apply filter or perform other E g start with sharpening or operation as appropriate smoothing The function of the slide controls vary with the chosen filter If desired drag intermediate images to the clipboard visible as small images the bottom of the workspace 6 Save processed image or add it to the project or report Devices ms UT r eee S Input JHHHHHHHHUII 300 kcps Range 20 keV 275 kcps Dead time 26 Spectrometer v Wn 9 9 kcps Range 20 keV 60 kcps Databases 4 o EIE system v met IT HV 15 0 kv 3 Magnification 2500 WD 23 0 mm Oa o Omm Creme up Image processing s e Feature J e E A GEN CG E a uU YEAR E project e E v ie Objects Insert SES Song aum B Image MAG 2500 x HV 15 0 kV WD 23 0 mm SZ 795 Y 495 Gray 75 RGB 85 85 0 z 1 00 SE E Print Image filter Report Add to report D Twain export eee SS Sharpen j Binarize E Invert Radius Strength A 0 00 Ee E d 0 00 em em SS Auto Neutral __ lt lt Undo j E b Sort Pepa a AR EA Nos E V CG win Er d te POR S x 4 E Can keng A Ge eao ef MICH EIL Image smoothed Image inverted Inverted pseudo c
71. s on public volumes all users have the same rights so that any user can access change and delete any file or folder stored here Local drives of the client workstation and network drives connections mapped to drive letters can be accessed as well File formats Additionally to proprietary data formats a number of export or exchange formats are supported Examples are common graphic formats like bmp jog and png EXCEL formats and EMSA MSA spectra Proprietary file formats ensure complete data conservation including all secondary information attached to an object Multiple data can be grouped in project files Graphic export Typical EDS data like spectra and concentration profiles can be exported in form of data or graphic files Graphics are equivalent to what is displayed on the screen Graphic export is possible using common file types or the Windows clipboard User Profile User profiles are stored on the QUANTAX Server in form of hidden files They contain system data and settings associated to the individual user Besides various screen settings they also contain the current analysis methods selected or created by the user Registered users are provided with their private settings independently from which client workstation they log in from Online help system ESPRIT features a multi level helo system Descriptions are provided for all major control elements In case of necessary actions or exceptional situations d
72. s Dead time 26 9e Real time 62s E li eid aic Spectrometer Ki ninm 10 0 kcps ange V 60 kcps Databases J pcr Imaging system e Format 800 x 600 Ak Magnification 2500 WD 23 0mm Spectra Add to report EBSD Camera Format 640 x 480 00 Hz Element selection ItiPc int Li i ion J None EEN SE saeco Standard library ESL 506 15kV mod z Feature EEE O Le DARS C em 2 T RN Sum Gees Sg lementlist PB SE BSE E Mass orm objects Save E 100 anam Graphic 4 P System Save 80 enu MEDIE Wm 60 40 hi ee io0 e Distance pm 0 26 20 Filter Results A e No filter Fast E Average O 0 2 Median cmn norm Point number a Atomic percent norm Fig 4 9 1 Fully quantitative line scan 45 Quick Reference Guide 4 10 Fast Mapping Step 1 Prepare sample and select workspace Mapping 2 Adjust image resolution Click New to capture image 4 Adjust the map area if desired 5 Select elements of interest using the interactive identification tool 6 Click Acquire to start mapping 7 Adjust colors and image controls 8 Save data with Add to Project and element image with Save Bie Spectrometer v Input BINH FA mat 800 x 600 Fonat 640 x 480 100 Spectrometer Imaging system EBSD Camera 301 kcps Range 20keV 275 kcps Dead time 9 9 kcps Range 20 keV A s 3995 Magnification 4 Software and Analysis Short Reference Example hints
73. s all controls for the workspaces Note that some of the controls and buttons are common to several or all workspaces these are dealt with directly below Object Description Hints ei Maximize window to fullscreen Minimize window to normal size Calibration System factor calibration Required for reliable quantitative PhiRhoz analysis Right of the button is the time of the last calibration below the name of the current standard library Do not mix up with energy calibration E Delete highlighted object Does not affect saved items P Zoom image to original size 5 2 1 Workspace Assistants The main menu changes to fullscreen mode when entering the workspace Assistants Databases Spectra Imaging Feature CrystAlign Objects Jobs System Report Devices Element Identification o OOO Assistant Spectrometer v ITT 10 0 kcps Range 20 keV 60 kcps Imaging system e Format 800 x 600 HV 15 0kV Magnification 2500 WD 23 0 mm RN TREE EBSD Camera Format 640 x 480 100 Hz gt Measure new Load from H a directory gt D spectrum gt HOE 04 02 2009 10 34 07 Call periodic system gt Activate Finder gt Move the spectrum cursor to a peak maximum with left mouse button pressed Spectra In the Finder select the top element left of the list gt Check if the position of new line markers fit to the real element peaks Zoom the spectrum w
74. s can be used during the same session incomplete projects can be continued in later sessions Projects are saved to project files for permanent storage Project files can be saved in private public local or network areas and managed like any other data file e g using the Windows Explorer Data exchange Objects embedded in a Project can be exported to a separate file exchanged with a QUANTAX Report and reloaded to the workspace External data files like additional text documents or photographic images can be included in a project as well This is useful for bundling various data regarding a work task 29 Quick Reference Guide 3 The ESPRIT Software 3 7 2 Reports ESPRIT reports formatted result presentations can be produced in two different ways External report All objects to be included into a graphical or text report generated by a third party software tool e g a page processor can be transferred using files saved to local volumes using the export function or via Windows clipboard Both applications can run simultaneously allowing the report to be built up during the course of work Tfransferring data to third party applications with ESPRIT works with a few mouse clicks ESPRIT Reports ESPRIT includes a WYSIWYG editor report editor very similar to well known Office tools However in contrast to these the ESPRIT report editor features context sensitive templates linked data tags and object specific placeh
75. s will invoke a dialog for stage data setup For a description see next subsection 3 6 1 Available types of jobs include Spectra measurement mage scan Objects measurement Mapping qualitative quantitative and HyperMap Feature analysis System jobs Feature analysis jobs are described in the ESPRIT Feature user manual System jobs include those for stage moves Stage move and Finalization and adding a Result table to the output 3 5 Analysis Automation f StageControl Jobs D I Le 8 x gt Ki Spectrometer e Input nm 30 kcps Range 20keV 60kcps Dead time 12 9e Spectrometer 7 IUUUUUUUUI 10 0 kcy Edit Job Settings x Imaging system e Format 800 x 600 EBSD Camera Format 640 x 480 100 Job type Objects measureme Drift correction on Estimated time 9s Get image Get spectrum 4 Quantification s po 4 Quantification table 10 vd Data export G Image settings S Objects v Spectrum measure time S a Quantification settings v mm Result handling 7 ut i r General Spectra 1 I e vi Add to project Filetype spx E vd Create subfolder EH z Export to file Images 5l gt edx i E 10 10 Filetype bmp i mm Add to report gt Test job list Nr on Typ State Job name e eA Object analysis 0 25 0 24 ev ere Edit Move To Haw no H Ke gt Results Atom norm Sort Element OK Canc
76. simple click in the method editor or 3 5 Analysis Options selecting a predefined Method provided that a suitable standard library is at hand PhiRhoZ standard based analysis additionally requires system calibration however administration and data handling are also here completely automatic QUANTAX includes a comprehensive library manager that allows easy build up and maintenance of multiple user related libraries for standard based analysis This provides most accurate results for any analytical task as a special standard library for the purpose can be maintained he use of the standard library installed on your QUANTAX system at delivery time for other than test purposes is discouraged It is included for educational reasons As it is not specially adapted to the measurement conditions of your QUANTAX it will yield results that are inferior to those of the standardless P B ZAF method Reference based analysis QUANTAX reference based analysis is most straightforward and controlled directly from the workspace Reference measurements are stored in the spectrum list together with the spectra of the unknown sample Current references will replace the assignment of standards from a standard library on an element by element basis by default allowing mixed referencing Combined standardless and standard based analysis Combined analysis is no extra option but automatically included within the ESPRIT standard based analysis
77. space Mapping Full Fix Variable 1 450 CH Measure time 1 32 h None gt Smooth Average Sharpen Smooth uj g g f E 4 c g E v LH gr n IE e Si KA Ca KA Fe KA p ISS 1 gl Ca ZW Cs LR Cee ZW Com zm Fig 5 2 8 The Mapping workspace with image scan and map window Object t Full Fix O Variable x Y None Smooth O Sharpen 1 CH 1 2 1 A 1 8 5 Nane O Average 2 Smooth e Automatic t Automatic PB ZAF Map result re 72 Description Full SE image size mapping Fixed size mapping Variable size mapping Entry field for fixed size maps Use no filter on SE image omooth SE image Sharpen SE image Set size of a quantitative map Use no map filter Averaging map filter omoothing map filter Automatic map filter Set filter matrix size Acquire fast map qualitative Set acquisition parameters Acquire quantitative map Load quantification method Edit quantification method Access map results window Element identification tool D o Ski Ska 4 Hints Enter X and Y sizes in fields below Use the mouse over the image scan window to drag the corners of the frame to the desired position Will also display the size of variable maps aS a fraction of the fast map size OMaps are time consuming 1 4 or even 1 8 size are sufficient Default Use to select elements for mapping 5 2 Wor
78. tandardless Point Analysis Devices Step Prepare sample and select workspace Click New to acquire an image Adjust measurement point or sample position Click spectrum Preview Set element line markers Adjust beam current if necessary Check if automatic analysis after measurement is selected Click Acquire Check results Examples hints Workspaces Spectrum Point or Objects Progress in the order from higher to lower peak energies Use low to intermediate count rates for optimum results count rate indicator yellow to green Automatic Manual Spectrometer v mmm N 9 9 kcps Range 20 keV 60 kcps O Realtime s Q ging system v Format 800 x 600 Magnification 2500 WD Live time s D Camera Format 640x480 Image scan i er Fig 4 3 1 Automatic standardless point analysis Erg Gabi E bo Ka Counts 500000 Region start keV Region end keV Multiple D e spe on t M Acquire sum spectrum Acquire single spectrum x Free regions H F1 F2 F3 F4 F5 F6 F7 F8 He Li Be B C Ni r Ne pee Na Mg Al Si P EC ar ipl Saucier E K a Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb T I Xe Automatic analysis Cs Ba La Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Pp At Rn pe Fr Ra AC Ce pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm b Continuous Th Pa U Np Pu AmCmBk Cf Es Fm Md Wo After acquisit
79. te the number of grid points and overlap Changing the Overlap will result in the step sizes and number of grid points being calculated IT you have chosen Line Rectangle or Circle as sample areas a separate job will be generated for every grid point and added to the job list once you 3 5 Analysis Automation 3 6 2 Editing Job properties have clicked OK These jobs are identical except for their names that contain their grid position index in brackets apart from what you have assigned and the stage positions associated to them Note that length of the job list rises considerably with the number of grid points Jobs can be edited using the job editor accessible by highlighting the desired job with the mouse and clicking the Edit button below the job list The avallable options in the job editor dialog depend on the type of job this means not every option described here will apply to every job The parameters that can be set are In most cases the same as for manual performance of the according measurement task They are grouped as described below The parameters of a group can be accessed by activating a drop down with a click on ss on the right of the group name A second click on will close the drop down again If you have used the Add Job dialog in an analysis workspace many parameters will already have values assigned this Is the place to make changes General options The general options for a job are already set d
80. tic numbering LJ Th Pa U Np Pu AmCmBk Cf Es Fm Md No Lw ze Full Fix Variable 1 1 2 Object name Cu Twain export X 600 1 4 i8 New element Element selection 2 y 450 Measure time 8 mi Ho e Open SE Filter Mop Filter spo ese NE p m gend EE j e None Copy Smooth gt average gt 00 M Paste E m Save q P o k Result table g E E KA j Add to project th 7 Copy g E Save v E ies SR Ge ar H Add to report wi Fig 4 12 1 Generating a HyperMap 48 4 13 Phase Analysis QUANTAX 4 13 Phase Analysis Step Example hints 1 Select workspaces Mapping or Phase analyses can be performed on HyperMap qualitative and quantitative maps as well as HyperMaps 2 Select tab Phases 3 Activate option Automatic update Optional step useful when experimenting with methods and parameters as the phase image will update after every change 4 Select method for phase Clusters or Objects normally provide determination best results 5 Adjust parameters Continue until desired results are attained If this is difficult a change of method is advised 6 Save results to project an image Use the Import Export menu icon file or report Remember to store the project from time to time as well ES Spectrometer S Halet 301 kcps Range 20 keV 275 kcps Dead time 23 Spectrometer Ki TEETETTETTTTTTTTT 9 9 kcps Range 20 k
81. tically Otherwise changes will be lost TT Quick Reference Guide 5 Buttons Icons Controls Quick Guide 5 2 7 3 Workspace Spectrometer Energy calibration Fig 5 2 13 The Spectrometer workspace with spectrum window for energy calibration For spectrum window controls please refer to section 5 2 3 Object Description Pulse throughput oelect pulse processor for calibration Energy range Select energy range for calibration Calibrate all pulse processor energy range combinations Calibrate the current energy range only Coarse energy calibration Intermediate energy calibration Precise energy calibration Start calibration procedure Cancel calibration procedure Reset factory default calibration Determine energy resolution for various elements Select element for calibration Select element line for calibration 78 Hints Available are e g 60000 cps 275000 cps 400000 cps and others Depending on the configuration of your spectrometer less or other pulse processors may be listed Available are 10 keV 20 keV default 40 keV and 80 keV Fast but not very precise Default sufficient for most applications Accurate but time consuming Current calibration remains unchanged Without changing current settings Click on the desired element of the displayed periodic table 5 2 Workspace Buttons and Controls 5 2 7 4 Workspace Imaging Define line 1 Define line length
82. uring job creation These options vary according to the type of job defined A commonality Is that they can be edited directly in the Job data section next to the position viewgraph or at the top of the job editor dialog See also section 3 6 1 above Image settings Use this group of parameters to set Image source resolution dwell time and averaging conditions You can also decide whether an image legend is added and what is contained in that legend Objects This group of parameters varies depending on the type of job In case of mapping you can manipulate the area to be mapped using a preview image In case of objects measurement you can rearrange add or delete objects to be analyzed Map settings Use map settings to set up the acquisition mode and time Be sure to choose a mode that automatically terminates acquisition Cycles or Real time You can also decide whether the map image includes a legend and change the selection of elements to be mapped 27 Quick Reference Guide 28 3 The ESPRIT Software OMap settings Here you can set the OMap resolution as a fraction of the fast map size select Interlaced measurement or Fast quantification Mapping filter You can set up the visual appearance of the mixed element image by defining filtering options You can also choose to process the electron image Spectrum measurement time Here you can change the spectrum acquisition mode and time Be sure to choose a mode that
83. w background Required for quantitative TEM analysis 5 2 Workspace Buttons and Controls 5 2 3 Workspace Spectra gt Automatic PB ZAF 1 v CaSO4 XF spx Wm 7 All b cps eV 0 01 he 3 4 5 gt Results Mass norm gt Sort Element 043 83 822 78 Ca 33 39 Fig 5 2 3 Spectra workspace with spectra display Object cps ev Description Activate high speed spectra preview Configure spectra preview Acquire spectrum Configure acquisition settings Validate spectrum Quantify spectrum Load quantification method from disk Edit current method Maximize spectra window Change Y axis units Open interactive element identification tool Search volumes for similar spectra Spectrum arithmetic Auto scale spectra window according to foreground spectrum fe gt _ a Hints Used for reference based quantification Enter known element concentrations here Use method displayed below the button Opens the so called method editor for modification of the current quantification method Toggles between normal and maximized spectrum window display covers project and devices areas Toggles between cps eV and pulses eV A so applies to the similar control above the spectra list Clickable periodic table of elements and peak finder at current cursor position Add subtract multiply spectra 65 Quick Reference Guide keV All v CaSO4 XF spx k Results
84. xport menu he most important option panels are the individual Import Export menus e symbols that are available for separate screen areas and in many pop up dialogs The Import Export menus contain context dependent subsections with options for saving and loading or importing and exporting spectra diagrams images result lists and other items Import Export menus control data transfer to and from the current project as well as to Jobs and to and from Report Direct printing and on screen result checking is also provided through an Import Export menu Standardless spectrum analysis QUANTAX provides advanced true standardless spectrum analysis based on the P B ZAF method The self calibrating P B ZAF analysis provides absolute not normalized results without standardizing or reference measurement and is optimally suited for remote spectrum analysis ESPRIT attaches all the necessary analysis data automatically to the spectra making QUANTAX spectra completely self contained The P B ZAF routine is extraordinarily tolerant to varying acquisition conditions and sample states e g rough surfaces yielding useful quantitative results even with unprepared samples otandardless analysis is also provided for fully quantitative line scan and element mapping Standard based analysis Standard based analysis Is provided on the basis of the P B ZAF and PhiRhoZ matrix correction Performing standard based P B ZAF analysis is as easy as a
85. y possible in the rare case of a window breaking Special care must be taken with XFlash Detectors as they do not contain enough vacuum to suck in the remains of a broken window as a UHV Dewar normally does In case of an accidental destruction of a beryllium window gather all fragments thoroughly and collect them using pieces of adhesive tape The waste has to be labeled and disposed of according to the local safety hazard regulations Wear a filter mask during cleaning up All parts have been designed according to the safety requirements for electrical equipment for measurement control and laboratory use or the European Low Voltage Directive respectively The system must be correctly installed and used only for the purposes it is designed for Especially grounding of the system or system parts as performed during installation must not be changed for any reason In case of any supplements or replacement parts being installed supply voltage settings must be checked and adjusted to the local mains voltage Certain parts of the system may contain dangerous voltages No covers need to be removed during regular operation maintenance should only be carried out by trained and certified personnel 2 4 Electromagnetic Compatibility 2 4 Electromagnetic Compatibility Due to its physical construction the highly sensitive X ray detector may not fully comply with common standards regarding electromagnetic immunity of general e

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