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BetriebBt ib Operating instructions BetriebB etrieb ATH

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1. 500 nca A PEINE Ar DN160 N2DN160 H 450 4 TRI E ud He DN160 H2 DN160 HL 400 d SW NS 350 4 m m a ES gt N 0 300 M ST N ER X g 250 k Q i S a s A 200 i D M a an E 2s FN SS z 150 ERE x amp lt lt SF we 100 lt n s i Ss i rw em Lr es ee 50 d eum a E Sa 0 ee EN 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar 10000 4 1000 T7 um Lett t a ze m gt e e e 7 U P d m y A T IA s T pd 100 lt g J gt a 4 9 z 7 O I LL b d 4 A A 10 lt EE 2 4 Pb a Ar DN160 N2 DN160 He DN160 H2DN160 LLL CT HIT 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar 2 3 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03386 Edition 03 Jan 12 GB 03386
2. L K H CG EXHAUST E DN 25 ISO KF A ER e 9 V V 1 8 BSPP FEMALE ISO 228 IF DISMONTED FILTER WATER COOLIG IN OUT 1 8 NPT FEMALE J SUB D 15HD Remote dry contact control Electrical power supply 48 VDC A B LED Rotating lat speed stand by fault IC PE jinletflange EK et DN 160 ISO F mm 16 159 3 182 5 182 2 254 9 225 200 11 112 6 9 7 inch 0 63 6 27 7 18 7 47 9 94 8 86 7 87 0 43 4 43 0 38 mm 12 159 3 182 5 182 2 254 9 180 128 6 11 3 DN 160 CF F mm 20 180 3 203 5 203 2 275 9 198 181 1 8 6 20 114 1 10 1 inch 0 79 7 1 8 01 8 10 76 7 79 713 0 34 i 4 49 0 39 mm 12 199 3 222 5 222 2 294 5 130 116 1 10 2 DN 100 CF F mm 16 209 3 232 5 232 2 304 9 148 5 130 2 8 6 109 5 9 8 inch 0 63 8 24 9 15 9 14 11 89 5 85 5 13 0 34 4 31 0 39 adixen Vacuum Products Operating instructions ATH 500 M MT 3 4 227 8 94 151 5 94 ELECTRONIC FRONT PANEL in mm inches ep center of gravity gt AIR COOLING VERSION WATER COOLING IN OUT 1 8 NPT FEMALE M4 holes to connect the pump to the hearth on D152 A 400 Technical characteristics of the pumps Dimensions D mm inch D 182 7 16 ATH 500 MT LS HEATER CABLE U 2
3. pressurisation Pa us 114419 065053 with anti suckback valve Characteristics of A filtered dry nitrogen supply with the following characteristics is filtered dry nitrogen required y g Dew point lt 22 C supply Dust lt 1um Oil lt 0 1 ppm Absolute pressure of 1 to 1 2 bar Rough The pump must be disconnected from its installation and isolated decontamination electrically procedure A DANGER Install the pump under an extractor hood It must remain there throughout the operation l General flushing Fit the DN 25 blank flange with anti suckback valve on the exhaust port Flush with dry nitrogen using the injector at an absolute pressure of 1 1 to 1 5 bar for 30 minutes Standard connection accessories available in the manufacturer s product catalog 2 3 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03381 Edition 03 Sept 11 GB 03381 Edition 03 Sept 11 E 100 Shipping procedure for contaminated pumps Fl Pressurize the Blank the inlet port and the pump Purge port Pressurize the pump with dry nitrogen to an absolute pressure of 1 1 bar using the injector adixen Vacuum Products Operating instructions ATH 500 M MT 3 3 GB 03382 Edition 03 Jan 12 Maintenance components ATH 500 M MT Operating instructions Detailed contents Spare parts Instructions of use First level of maintenance needed adixen Vacuum Products Oper
4. C 300 Configuring the ATH 500 M MT pump for the application Pump parameter configuration FACTORY PARAMETERS RS COMMANDS VALUES CONFIGURATION Modify the Standby speed RPM and SBY 15 000 to 50 000 rpm 15 000 Modify the speed contact SET 30 3 to 50 394 threshold Modify the thermostating ork threshold only MT model SEL dd Aao Modify the bearing alert SET 32 0 to 100 2094 threshold 0 Keyboard HHR 1 for standard pump 1 Remote Remote mode OPT 14 2 RS232 OT 5 Profibus 5 for Profibus 1 active i 0 for ATH 500 M Thermostatage mode OPT 29 l CUE Tene 1 for ATH 500 MT Contact mode OPT 33 0 Rotating 1 Accelerating Depends on the pump model RS232 RS485 serial link settings Only with Profibus option FACTORY PARAMETERS RS COMMANDS VALUES CONFIGURATION Transmission speed 9600 bauds Data length Number of STOP bits Oto 255 44 comma Data separating characters Number of controller in a ADR 0 to 255 link Authorize transmission on STA at pre set intervals on DLR ON or OFF OFF the serial link when ON is set M 0 to 4 min 15s or 255 s adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03376 Edition O3 June 2012 Conventions applicable to the syntax of all commands Status values Error messages ADR Syntax Result DEF Syntax Result DLI Syntax Result See also DLR DLR Syntax See also DLI SEP STA Only for R
5. Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor may cause further damage and injury to people B300 m Risk of cut The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime if the pump is not switched on it may be driven by another pump in operation Always connect the pump inlet port before starting the pump Specific operating conditions may exist that require extra caution from users due to the high temperatures generated outer surfaces gt 70 C wear protective gloves and leave the pump to cool before working on the product Pump damage Make sure that exhaust pipe line and pump internal parts are not clogged by process by products e g condensable products If exhaust line is not clear contact the customer service As loss of cooling water creates a significant risk for the pump regularly check the right operation of the cooling circuit A DANGER m Risk of injury by cutting The inlet of the pump musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable A WARNING Cuire shock The turbopump and the controller must only be disconnected from each other when the turbopump is completely at rest and the controller disconnected from the power supply Never unplug the pump by disconnecting the main cable Only the authorized and trained technic
6. GB 03386 Edition 03 Jan 12 G 150 Pumping curves ATH 500 M MT DN100 ISO F with inlet screen without purge 350 Ar DN100 He DN100 H2 DN100 300 Vi 250 O Q Q Q Uu O 200 S Ou 150 100 50 0 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar 10000 1000 E U 9 g D T 100 10 Ar DN100 N2 DN100 He DN100 H2 DN100 1 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar adixen Vacuum Products Operating instructions ATH 500 M MT 1 3 G 150 Pumping curves ATH 500 M MT DN160 ISO F with inlet screen without purge
7. N2 Torr mbar 3 5 4 65 1 28 1 7 exhaust pressure Sound level EN ISO 2151 1m distance at dBA lt 42 nominal speed Vibration level at nominal speed Pump Protection Index better than IP 42 With ISO K ISO F flange better with CF F flange 3 With a low exhaust pressure depends on external conditions of water temperature water flow environment temperature 4 Reduced max flow ultimate pressure without flow speed loss depends on environment conditions Without inlet sreen At full rotational speed cold for M at 65 C for MT water temperature 25 C adixen Vacuum Products Operating instructions ATH 500 M MT 1 4 Maximum permanent premissible A 400 Technical characteristics of the pumps The performances of the pumps ommapower wa 19 Icomwllrpowersupy voe Maximum leakage current not applicable polarity connected to the earth Recommanded cooling water flow fate Wu 8 Cooling water temperature 15 25 Devicenet no kg b 189 Recommended backing pump o LLLAC0 o Environmental conditions Use of the product Indoor only Ambient operating temperature 5 lt T lt 45 Maximum altitude 2000 6562 Transient overvoltages typically present on Category Il the mains supply Pollution degree applicable 2 Maximum relative humidity Maximum relative humidity of 80 for tem perature until 31 C with a linear
8. 100 rpm The RO TATIN G contact is closed when the motor is in acceleration phase It remains closed until the selected speed is reached The ROTATING contact is open when a STOP or INHIBIT action is taken into account The FAULT contact is closed following the appearance of any fault temperature frame motor etc The contact is open if there are no faults At speed 1 6 The AT SPEED contact is closed when the selected speed is reached or when the pump is in overspeed mode in the event of modification of reference speed The AT SPEED contact is opened when a STOP action is taken into account or when the speed decreases under the threshold relay speed selected Independant of the Remote hard mode safety this threshold can be set between 3 and 50 To avoid any bad interpretation of the reading of the contacts we advise to install an one second filtering on the reading of the contacts STANDBY ROTATING FAULT and AT SPEED 2 2 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03371 Edition 04 Jan 12 GB 03372 Edition 02 June 09 B 450 RS 232 or RS 485 link wiring The initial configuration of the serial link is as follows m Type RS 232 m Transmission speed 9600 bauds m Data length 8 bits m Parity NONE m Stop bit 1 RS 232 485 Reception data RD connector wiring TD Transmission data DTR Data terminal ready GND G
9. Edition 03 Jan 12 Pumping curves adixen Vacuum Products Operating instructions ATH 500 M MT ATH500M amp MT DN160 N2 limit 10 000 1 000 0 100 k T DIUID epu 0 001 0 000 0 500 1 000 1 500 2 000 Foreline pressure mbar hPa G 150 C limit of continue operation ATH500M water cooling 25 C Limit of continue operation ATH500M forced air cooling 20 C Limit of continue operation ATH500M T water cooling 20 C T set to 65 C 2 500 3 000 3 500 3 3 F 00956 Edition 09 May 12 G 200 Declaration of contamination Procedure for returning products You wish to return an adixen product for maintenance The equipment will be dismantled and possibly cleaned by a technician from our service centre Pfeiffer Vacuum requires this form to be completed to preclude the potential health risk to its service personnel that can occur when receiving disassembling or repairing potentially contaminated products Please fill in the present declaration of contamination print it and attach it to the product before shipping to your closest service center Equipment returned without this form fully completed and secured to outside of package will be returned to customer unprocessed at his cost If following inspection and quotation customer elects to not proceed with repair he will be subject to service fee to cover product decontamination disassembly cleaning and evaluation costs Please
10. n ii Toxic yes Has the equipment been cleaned yes L no Carcinogenic yes Cleaning detergent method Combustible yes E Corrosive es Is the equipment free from potential harmfull substances yes Explosive yes E no E 4 COPPER PROCESS Radioactive ys Has the equipment been used on a Copper process Others yes L no L P equipment will be accepted only with a written decontamination certificate Biological yes If yes sealed package and specific label are required 5 2 Process and list of hazardous substances or by products which may have come into contact with the equipment pulse name Risks and precautions associated with substances Process description or symbo 6 Legally binding declaration We hereby guarantee that the information in this declaration is correct and complete undersigned am able to provide a true assessment We are aware of our liability toward the contractor for damage resulting from incomplete or inaccurate details we undertake to be responsible for any third party claims based upon claims of contamination or other nonconformity with the statements herein Name of the company organization FO Address fe City PO State Post Code po Country Albanie E mail address PO Phone number PO Signature and company seal Last Name PO First name EE Function Po 06 06 12 adixen Vacuum Products Operating instructions ATH500 M MT F 00956 Edition 09
11. 02 Sept 11 Start up ATH 500 M MT User s Manual Detailed contents Safety instructions for installation Unpacking and storage Pump connections to an installation Equipment installation conditions Maglev pump connection instructions Installations specifications Inlet flange installation conditions B310 Inlet and exhaust connections B330 Nitrogen purge and air inlet valve device connections B333 0 Assembly of the purge kit B340 Water cooling connection B350 Air cooling connection B400 Safety instructions and electrical connections B430 Remote control connection wiring B450 RS 232 or RS 485 link wiring adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03365 Edition 02 Jan 12 B 100 Safety instructions for pump and controller installation Indicates a potentially hazardous situation which if not avoided could result in property damage Indicates a potentially hazardous situation which if not avoided could result in moderate or minor injury It may also be used to alert against unsafe practices Indicates a potentially hazardous situation which if not avoided could result in death or severe injury A DANGER Indicates an imminently hazardous situation that if not avoided will result in death or severe injury extreme situations Overview Before switching on the product study
12. 4 S i ai MCN Exhaust port DN4O ISO KF KO Q Integrated purge 50 sccm Q Wwaerfitigs 1 4 double ring B 340 R5232 or RS485 serial links idem ATH 500M 0 gjemeemem faena 70007 o Pump status indicator Idem ATH 500 M lights Power supply connector Idem ATH 500 M The heating band keeps the inner surface of the pump up to 65 C to avoid condensation 9 Heater pang effects The temperature is controlled by the controller Supply heater band Connect the heater band to the controller Supply water valve Connect the water valve to the controller adixen Vacuum Products Operating instructions ATH 500 M MT 3 4 4 4 A 150 Introduction to the ATH 500 M MT Air cooled ATH 500 M Model The fan must be supplied by an external power supply 48 VDC either ordered as an accessory BE A510 or provided by the customer adixen Vacuum Products Operating instructions ATH 500 M MT GB 03360 Edition 03 May 11 GB 02721 Edition 04 Aug 07 5 active axis A 200 Control loop of the pump The mobile assembly formed by the turbo rotor and the shaft is known as the rotor The rotor is driven by the motor and held in suspension by magnetic fields generated by electromagnets housed in an active bearing The mobile rotor has 5 axes of freedom monitored by 5 active magnetic bearings 3 controlled translations X Y Z Z 2 controlled tiltings X Y Movements in r
13. EB C800 SEL10 m Contact the Customer Service amp Check that the pump is rigidly fixed to the frame Check that there are no vibrations on the pump frame Check that the attachment screws are correctly fastened problem can be caused by an anti vibration flagstone E Contact the Customer Service Connect the serial link Enter the command DEF ER C800 Example of faults unbalance fault magnetic bearing displacement fault over temperature Example of warnings int comm power volt O BC temp E Enter the command LEV10 122 C800 Switch off then switch on the power supply m If the fault persists contact the customer service E 1 1 GB 03380 Edition 01 February 07 Maintenance instructions ATH 500 M MT Operating instructions Detailed contents Shipping procedure for contaminated pumps Inlet port Exhaust port Purge port Exhaust port pressurisation Rough decontamination procedure adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03381 Edition 03 Sept 11 E 100 Shipping procedure for contaminated pumps Don t forget to fill in the safety questionnaire and return it to repair service center see model of document at the end of the manual A WARNING Study the safety instructions related to preventive maintenance D 100 The user must stick this label on the product to warn against A
14. Result IDN Syntax Result LEV1O Syntax Result NSP Syntax Result C 800 Detailed description of RS 232 and RS 485 commands Enables or disables command echoing adrECHON lt CR gt enables all characters received to be echoed over the serial port RS 232 only or adrECHOFF lt CR gt disables all characters received from being echoed over the serial port adr ok Comment This command is disabled in RS 485 operation the value OFF is required Identifies the device which is communicating and its software version adrIDN lt CR gt adr ATH500M Vx yy zz Returns the type and the software revision of variable drive superviser Returns the state of the parameters defined by SET adrLEV10 lt CR gt ftadr nnnnn sssss 00000 0 ccccc eeeee 00000 0000 0000 ij kk II mmm Returns current values nnnnn nominal speed set point in rpm sssss stand by speed set point in rpm ccccc pump working time in hours eeeee electronic working time in hours ii speed threshold for relay 3 to 50 kk temperature set point 30 to 65 Ill bearing threshold O to 100 mmm bearing current value O to 100 Note O 2 not used Switches the speed set point to the nominal speed value adrNSP lt CR gt adr OK The speed set point for the pump is set to its nominal value adixen Vacuum Products Operating instructions ATH 500 M MT GB 03376 Edition 03 June 2012 GB 03376 Ed
15. decrease until 50 relative humidity at 40 C Accept temporary overvoltages on the power line Three phase motor characteristics Max values e Voltage between phases 5 2 4 Supply frequency Phase current gt 25 C apply a derating Change the operating conditions to reduce the nominal power Contact the Customer Service Value for pump and controller Not all the leakage current is necessary evacuated through the earth wire it depends on the pump earth connection regarding the equipment to which the pump is connected adixen Vacuum Products Operating instructions ATH 500 M MT GB 03362 Edition 03 Jan 12 Dimensions mm inch ATH 500M RJ 45 Service and HHR N Nr equidistant holes LED Power supply CY d SENNA CO WHR HI HH HAH HHA C CKNI CQWAOHOHOH HOP RS LOOPS Un 2712 7 27V SNH NII READY 32068 ae PO Cr One C 0a AN H wawatas 4 2 0 CORTON RIS SG YI OP a wr 475 d 023309240 2 152 5 98 959 4999 2702 20 Ord Y PS PE e 3 Jd COH AA H ATENON S HSE N75 56 5 3xM8 FOR HANDLING EQUIPMENT GB 03362 Edition 03 Aug 11 SUB D 9 RS 232 485 pee VERSION REMOTE B A 400 Technical characteristics of the pumps 62 MAXI 2 44
16. device Contact product manufacturer for advice In all cases comply with current local regulations m When units containing control circuits are equipped with dry contact outputs it is the responsability of the customer to use these outputs in compliance with extra low voltage installation and safety standards SELV It concerns Remote Profibus and RS connectors except main power connector Ensure that all electrical wiring is safely secured so that people cannot trip on them Installation protection with circuit breaker The user must supply the product from facilities equipped with a main circuit breaker curve D or C IEC 60947 2 adapted to the power supply in accordance with local regulations and with a minimum short circut interrupting current of 10 kA This protection device should be in close proximity to the pump no further than 7m 25 ft within line of sight of the pump This pump is not equipped with an emergency stop EMO device because it is designed for use on process tools and integration with the process tool EMO Check that the pump is correctly connected to the equipment emergency stop device adixen Vacuum Products Operating instructions ATH 500 M MT 1 4 2 4 ATH 500 electrical connection 48VDC power supply characteristics B 400 Safety instructions and electrical connections m The integrated electronic is connected to the main power with a main cable separately delivered Voltage and c
17. further transport of the equipment or for prolonged storage The packaging depends on the configuration of the pump It can also contain other cardboard boxes for the accessories like inlet screen air inlet valve purge device high temperature sticker electric cable Pollution risk Unclean and contaminated components can increase the pump down time Use only dry and clean pipe lines and wear glooves to make the pump connections l This label indicates that handling the pump can cause muscle strain or back i LPS can injury lie Beg ad end pepe M nique For all product handling use the appropriate handling devices Heavy product It must be removed from its crate only by staff trained in heavy materials handling either manually weight around 18 kg either by screwing hoisting rings in the threated holes located on the pump housing hoisting ring supplied by customer then use slings from a length over 230 mm tighten the pump to the handling device Pump installation with inlet housing facing up connect the pump to the customer s handling device using the threaded holes located at the pump housing ES chapter A400 Risk of tilting although the product meets EEC safety regulations it is advisable to guard against the risk of tilting during handling installation and use BE chapter A for the location of the center of gravity Pump storage If you are storing the new pump keep it wrapped i
18. kit Screws and washers used to secure the pump on the installation Purge plug A plug can be connnected instead of the filter Purge valve kit The purge valve must be driven by the customer not used on the MT version adixen Vacuum Products Operating instructions ATH 500 M MT A 510 Description P N 48V DC 114866 180 264 V 47 63 Hz delivered without power cable Description P N 3 5 m 48 VDC A331328 035 5m A331328 050 Description P N with cable 114461 Flange type P N DN160 ISO F 110676S DN 100 160 CFF 118690 Description P N Plug with o ring 115298S Description P N Purge valve kit 24 VDC 1153035 1 2 Isolation valve at inlet or exhaust pump Copper seals for pumps with CF F flanges Inlet screen Air cooling kit 2 2 A 510 The accessories of the pump The isolation valve is used to maintain the vacuum in the chamber while the pump is reset to atmospheric pressure See the manufacturer s products catalog Flange type P N 100 CF F 303291 160 CF F 303292 kit of 10 parts kit of 5 parts The screen protects the pump inlet against solid particles ZESIIBHON ib DN 100 ISO F 118001 mesh and ring DN 160 ISO F 118002 mesh and ring Description P N Air cooling kit 118543S adixen Vacuum Products Operating instructions ATH 500 M MT GB 03363 Edition 03 Aug 11 GB 03364 Edition
19. mains electricity compressed air water gas before starting work Standard precautions before any maintenance operation Before performing a maintenance operation stop the pump When the pump Is at rest switch off the pump by setting the controller main switch to 0 wait 5 minutes before disconnecting the main cable If this last one remains connected some components will still be energized Be sure that the controller status is visible from the operator otherwise disconnect the cable from the pump Risk of injury by cutting The inlet of the pump musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable m After pumping on corrosive or toxic gases it is strongly recommended to seal the pump with blanking plates in case of return to the repair service centers BB E 100 Don t forget to label in a visible way the product for the operator m Risk due to pumping conditions Remaining process gases in the pump may cause severe injury or death Before removing the pump from the installation continue N2 flow from the process tool for 30 min Nitrogen pressure and flow rate should be identical to the programmed values during process m Chemical supplies coming from the tool as well as the water and the nitrogen need also to be locked out tagged out m During pump removal operator could be in contact with process residues on the inlet and exhaust ports which could cause
20. overload through the drive start stop and enable control circuitry of the variable speed controller The drive start stop includes solid state components If hazards due to accidental contact with moving machinery or unintentional flow or liquid gas or solids exist an additional hardwired stop circuit is required to remove input power It is never required to override this interlock during installation use or maintenance Once activated power will be switch off and the pump will be put in a safe condition When a fault occurs the cause must be corrected before the fault can be cleared It is required to switch power off and on to clear the fault m If the product is used in applications where solid particles or condensable gases are present we advise on avoiding any deposition into the pumping line Contact our customer service m The manufacturer guarantees the right operation of the pump if it is used in an uniform magnetic field up to 0 5 mT From 0 5 to 5 mT the limit of the right operation depends on the cooling and the gas loads Exceeding 5 mT can cause excessive rotor heating due to the eddy generated currents It is therefore necessary to provide suitable shielding in such cases The pump standalone is resistant to radiation at levels up to 10 Gy m The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account use in rack In specific ca
21. risk Unclean and contaminated component use can increase the pumping down time Use only dry and clean pipe lines and wear gloves to make the pump connections After connecting the product to the pumping line check for leaks along the entire line to ensure proper connections pump pipes valves etc adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 At inlet Mounting of the inlet screen At exhaust B 310 Inlet and exhaust connections Check that an inlet screen accessory is installed on the pump if not install it pumps are delivered with inlet screen filter Position the screen 2 into the inlet housing groove 1 bend side opposite to the rotor 8 Position the ring 3 and press it manually into the groove bottom all over its circumference QD Inlet flange It is a mad to install an isolation valve between the chamber to allow chamber a mad without stopping the pump The turbomolecular pumps can t evacuate at atmospheric pressure they are connected to a roughing pump For a transient period they can start to run at atmospheric pressure When pumping on corrosive gases or aggressive gases the gas can cause injury or death The exhaust of the turbopump must be connected to roughing pump line compatible with process gases It is highly recommended to install an isolation valve closed when power is off between the turbo pump and the roughing circuit adixe
22. severe injury or death Ask your safety department for instructions according to the local regulations adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 D 100 Safety instructions for product removal Users are advised Wear gloves protective glasses any appropriated safety equipment Ventilate the premises well Do not eliminate maintenance waste via standard disposal channels Have it destroyed by a qualified company if necessary Install the inlet and exhaust blanking plates thus delivered with the pump or available as accessories E100 The outside of the product and control box can be cleaned with a lint free wiper Avoid using cleaning products that deteriorate printed surfaces and self adhesive labels All other cleaning operations must be done by our service centers Decontamination product dismantling According to the regulations 2002 96 CE about Waste of electrical and electronical equipments and 2002 95 CE about Restriction of Hazardous substances the manufacturer provides a recycling paid service for the end of life of waste electrical and electronic equipment Any obligation of the manufacturer to take back such equipment shall apply only to complete not amended or modified equipment using adixen Vacuum Products original spare parts delivered by adixen Vacuum Products containing i e all its components and sub assemblies This obligation will not cover the shipping cost to an adixe
23. 71 Edition O4 Jan 12 B 430 Remote control connector wiring When units containing control circuits are equipped with dry contact outputs it is the responsability of the customer to use these outputs in compliance with extra low voltage installation and security standards It concerns Remote Profibus and RS connectors excepted main power connector The inputs dry contacts Sub D 15 Pts Fem 12 V DC 20 mA Start Stop The control by voltage Remote 14 15 Active signal starts the pump rotation start stop Inactive signal stops the pump rotation 12 V or 24 V DC Remote 13 15 W hen the Standby is validated the rotational standby speed corresponds to the selected speed W hen the Standby is disabled the rotational speed corresponds to the nominal speed Provided power supply by External power supply the pump 12V DC 20 mA 2 pi 12 24 V DC GND Pump wiring Customer wiring Pump wiring Customer wiring adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 B 430 Remote control connector wiring The output dry gt p i contacts 5 Sub D 15 Pts Fem E Hos Dry contact 30V DC 2Amax Resistive load Standby 4 9 The contact is closed when the standby mode is activated Rotating 2 7 The ROTATING contact is closed when the speed is gt 120 rpm The ROTATING contact is open when the speed if
24. May 12 GB 04070 Edition 03 Jan 12 G 1000 Hand Held Remote for ATHM controller Hand held remote The keyboard is used to control the pump and configure the parameters description Control lights PURGE STD BY n eon T STATUS PREV ENTER START STOP Manvel ree The function of the Description Functions Parameter setting Press to access the parameter setting mode access key mode parameter selection and configuration keys Press to exit the various menus without validating the functions Selection keys Press to move to the next or the previous menu the next or the previous parameter in the displayed menu Press to select or adjust the value of the previously selected parameter L u H z c Configuration Press to validate the selection of a validation key menu a parameter or a value Press to validate an answer to a requested information Display access key Press to leave the setting menu and STATUS display the pump parameters Note to modify the display contrast press by holding down the Status key and adjust the value with the keys A membrane protects the keys Make selection by hand only and do not use hard objects such as pens screwdrivers etc which could damage the keys Fast scroll can be obtained by holding down the keys For all the other keys press several times adixen Vacuum Products Operating instructions ATH 500 M MT 1 4 2 4 HHR Dis
25. NLET WATER COOLING TUBE 1 4 WATER ELECTRICAL VALVE a OUTLET WATER COOLING B le B TUBE 1 4 Y T Rz 4 EXHAUST O Nm 2 2 z ee aT c DN 40 ISO KF CO ACES HT x4 z ON CDD E PESE ERBEN ga LED POWER x17 ae a 2 i pax C A Ie c tal i BS d Y INLET PURGE GAZ a s V 1 4 VCR ELECTRONIC FRONT PANEL 151 5 94 Le 227 8 94 o 4 center of gravity Dimensions in mm inches ES bent M4 hole to connect the Istand by pump to the earth fault on D152 ELECTRICAL POWER SUPPLY 48 VDC A B DN 160 ISO F C PE E PUI eee S D SUB 15HD REMOTE DRY CONTACT CONTROL m eo S D SUB 9 RS 232 485 rl X E ANS a av RJ 45 HHR amp ADIXEN SERVICE m y wt e 2 A niet flange Pee a aca E DN 160 ISO F mm 16 159 3 182 5 182 2 254 9 225 200 11 112 6 9 7 i inch 0 63 6 27 7 18 Zi 9 94 8 86 7 87 0 43 4 43 0 38 mm 12 159 3 182 5 182 2 254 9 180 128 6 11 3 LIHLO CMD CPO O OL KAO ZOE FA inh 079 7 1 8 01 8 10 76 7 79 7 13 0 34 4 49 0 39 ASOS inch 047 7 85 8 76 8 75 11 48 5 12 4 57 0 4 inch 0 63 8 24 9 15 9 14 11 89 5 85 5 13 0 34 4 31 0 39 WATER CABLE 4 4 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03363 Edition 03 Aug 11 The accessories of the pump Power supply external Power line cable Cable to connect the power supply to the pump HHR It ensures Man Machine Hand Held Remote interface for local use Mounting bolts
26. PPLICATIONS research and development high energy physics space simulation accelerators OTHER INDUSTRIES glass coating flat panel display leds deposition coating hard disk manufacturing ADVANTAGES High throughput Quiet and clean vacuum Corrosion proof High MTBF Minimum size volume and weight Smart and compact electronic controller Reliability Maintenance free Battery free Easy integration adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 2 2 ATH 500 M MT Magnetically levitated turbo pumps This product complies with the requirements of European Directives listed in the Declaration of Conformity contained in G 100 of this Manual Copyright Intellectual property The use of adixen products are subject to copyright and intellectual property rights in force in any jurisdiction All rights reserved including copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by adixen Vacuum Products adixen Vacuum Products Operating instructions ATH 500 M MT GB 03357 Edition O4 June 12 GB 03358 Edition OA June 12 Manual reference 114436 Edition 04 June 2012 Translated from original version Chapter A Chapter B Chapter C Chapter D Chapter E Chapter F Chapter G adixen Vacuum Products Operating instructions ATH 500 M M
27. S 232 C 800 Detailed description of RS 232 and RS 485 commands adr address from OOO to 255 a Carriage Return ascii 13 command executed correctly ErrO adjustment error out of bounds Errl command error syntax Err2 parameter error e g non hexadecimal character Err3 context error Err4 checksum error Specifies the address of the device for networking adrADR aaa lt CR gt adr address of the device before the command aaa new address of the device 000 lt aaa lt 255 condition aaa OK ou Err2 This command is used to allocate a specific number to each of the products making up a network Note it is important to note down the number allocated to each device List of the faults adrDEF lt CR gt List of the faults historic and of the active faults adr OK if there is no fault Defines the DataLogger transmission interval adrDLIxxx lt CR gt xxx DataLogger send interval in seconds condition 001 x xxx lt 255 adrok or Err2 Note if ok the interval sent is stored in user memory Enables DataLogger operation adrDLR lt CR gt The main characteristics of the pump and its controller see also STA command are sent over the RS link at the rate defined by the DLI command Note any new characters arriving on the serial port RS 232 will cancel the automatic Datalogger transmission adixen Vacuum Products Operating instructions ATH 500 M MT 1 6 2 6 ECH Syntax
28. S 232 SEPARATOR 0255 44 Data separating chararcter 044 comma RS 232 ADDRESS 0 255 0 N umber of controller in a multiple link BEARING LIFE 0 to 99 20 M odify the bearing alert threshold Warning limit NEW CODING 0 to 65535 0 M odify the access code see Pump User s manual SER NUM Selection Initial configuration HHR XXXXXXXXXX Display the HHR serial number CONTROLLER YYYYYYYYYY Display the front panel serial number CARTRIDGE 2 ZZZZZZZZZZ Display the spindle serial number MMCC06 2 AAAAAAAAA Display the electronical board serial number 1 When the HHR is connected to an OBC controller 2 When the HHR is connected to an ATH 500 pump 4 4 adixen Vacuum Products Operating instructions ATH 500 M MT GB 04070 Edition 03 Jan 12 A PASSION FOR PERFECTION You are looking for a perfect vacuum solution Please contact us Pfeiffer Vacuum Products GmbH Berliner Strasse 43 35614 Asslar Germany T 49 6441 802 0 F 49 6441 802 202 Info pfeiffer vacuum de www pfeiffer vacuum de adixen Vacuum Products 98 avenue de Brogny 74009 Annecy Cedex France T 33 0 4 50 65 77 77 F 33 0 4 50 65 77 89 info adixen fr www adixen com Ww VACUUM Ed 04 Date 06 12 Pin 114436 MNA M
29. T General contents ATH 500 M MT Operating instructions E 100 F 000 F 200 G 100 G 150 G 200 INTRODUCTION Introduction to the ATH 500 M MT Control loop of the pump The pump operating principle The technical characteristics The accessories of the pump START UP Safety instructions for installation Unpacking and storage of the controller Pump connections to an installation Inlet connections Nitrogen connection on the purge port Assembly of the purge kit Water cooling connection Air cooling connection Safety instructions and electrical connections Remote control connection wiring RS 232 or RS 485 link wiring OPERATION Safety instructions for product use The front panel with operating status Configuring the ATH500 M MT pump for the application Detailed description of RS232 and RS485 commands MAINTENANCE Safety instructions for product maintenance Maintenance frequency Diagnosis and troubleshooting MAINTENANCE INSTRUCTIONS Shipping procedure for contaminated pumps MAINTENANCE COMPONENTS Spare parts Instructions of use First level maintenance parts APPENDIX Declaration of conformity Pumping curves Safety Questionnaire G 1000 Hand Held Remote HHR 1 3 Manual reference 114436 Edition 04 June 2012 Translated from original version DANGER 2 3 General contents ATH 500 M MT Operating instru
30. The power supply fan requires a 48 VDC external power supply supplied by the customer The accessory suggested by the manufacturer ER A510 is used to power the pump and the fan Perform wiring of the fan in accordance with the marks of the terminals and son see diagram above ES B400 The power supply should never be switched off as long as the rotor is moving Switch off the power supply before disconnecting the power supply from the ATH 500 M MT adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03370 Edition 03 Jan 12 B 400 Safety instructions and electrical connections Risk of electric shock Make sure that main switch is off during electrical connection Disconnect any main power sources from the product prior to servicing The pump is Class 1 equipment and therefore must be earthed The user must check the electrical installation to which the product is connected it must comply with current standards IEC 364 it must have a standards compliant earth wire properly connected to earth m An IEC 41745019 symbol is located on the electric device Differential circuit breaker In case of insulation defect for personnel protection you must install on the main power supply a type B differential circuit breaker GFI or RCD of 30mA This equipment protection device is compatible with type T T electrical network For other network type T N or I T apply the right protection
31. Translated from original version PTO SALES T m 866 392 0600 pos 626 304 2151 mew ee prb sad cur A PASSION FOR PERFECTION VACUUM ul gt adixen M by PFEIFFER VACUU 4 ATH 500 M MT Magnetically levitated turbopumps GB 03357 Edition O4 June 12 Welcome Dear Customer You have just purchased an adixen magnetically levitated turbo pump We would like to thank you and are proud to count you as one of our customers This product has benefited from adixen Vacuum Products many years of experience in the field of turbomolecular pump design In order to ensure the best possible performance of the equipment and your complete satisfaction in using it we advise you to read this manual carefully before any intervention on your pump and to pay particular attention to the equipment installation and start up section ATH 500 M MT Magnetically levitated turbo pumps i Y adixen This pumping component is designed to gererate vacuum by pumping on gases but no liquids neither solids It is dedicated for running in industrial environments The integrator of this component must provide all operator safety measures mainly against hot surfaces This pumping component must not operate in an area with risk of explosion Consult us to study a solution APPLICATIONS SEMICONDUCTOR APPLICATIONS plasma etching lon implantation sputtering plasma deposition OTHER A
32. WARNING pumped process gas that could be dangerous and toxic and could eMusic van minao CAUSE severe injuries or death It precises that any preventive ur em maintenance operation can only be performed by trained bud personnel Whenever you return the product to an adixen repair service center you must comply with the requirements of the Procedure for returning adixen products fill in the safety questionnaire available in appendix E G200 of the user s manual Risk of injury by cutting Contact with the pump rotor cell may cause cuts Alternatively protective gloves may be worn when servicing the product Pumps to be shipped must initially be decontaminated then pressurized with dry nitrogen see procedure sheet 3 3 To achieve this the user must have the following connection accessories A Inlet port Closing kits including o ring screws and nuts inlet blank flange and hoisting rings can be supplied upon order For other inlet part types contact the customer service Closing kit DN160 ISO F DN160 ISO K DN100 ISO K adixen Vacuum Products Operating instructions ATH 500 M MT 1 3 E 100 Shipping procedure for contaminated pumps Exhaust port DN25 DN40 Centering ring Senpss ESTO ISO KF with seal on ae 083264 083267 Clamping ring Blank off flange 068196 068197 Purge port Description PN NUOTI T IN Plug 1 8 BSPP 1152985 Exhaust port Description DN25 L
33. ad on the system Such axial force has not been observed on a standard pendulum valve The impact of the rotor parts on the housing will create a radial force on the housing This radial force will create a bending moment on the system as a function of the distance to the pump The deceleration of the rotor parts creates a torque value on the pump housing which is transmitted to the system The maximum values of the axial force and the bending moment occur at approximately the same time A delay of up to several ms has been observed for the maximum torque value Pump Loads Rotor Pump fixed to Bending system valve moment b Pendulum plate Axial load a Front view Torque c Top view adixen Vacuum Products Operating instructions ATH 500 M MT 3 5 B 300 Pump connections to an installation Loads transmitted to the ATH 500 M MT 4 5 Estimated transmitted forces system cont in 120 9 T z t x 2 j OY e i i 80 6 i I i E s Ja I 60 D l l i Z z 4 I I i C I I i 40 q 8 lr la I t 9 y i i I D l i I i 20 2 e i lt i l 0 Time ms eee HOUR Bending moment Axial force Pump model Unit ATH 500 M MT o D yms 0 Axial force l o D yms 0 Max axial force occurs if the pump inlet is obstructed with high stiffness parts There is no load if the system has low stiffness i e valve adixen Vacuu
34. adixen Vacuum Products Operating instructions ATH 500 M MT 3 4 B 400 Safety instructions and electrical connections Typical connection In this installation we use A primary isolation valve V1 between the turbo pump and the roughing pump a secondary isolation valve V2 between the turbo pump and the chamber to be pumped a purge valve V3 a venting valve V4 High vacuum isolation valve Air valve Ww V4 x i i PN Integrated electronic Ag is Power supply 48VDC Roughing isolation valve A Power voltage Recommended to connect a wire to the pump to the potential earth even in perturbated electromagnetical environment Legend Minimum electrical connections Optional electrical connections recommended Roughing pump by the manufacturer version M only Electrical connections version MT only Wiring diagram typical WARNING We recommend that you fit a separate earth ground conductor to earth pump Use an un insulated braid or a separate insulated green yellow conductor with a minimum 9AWG 3mm2 conductor Use a M4 x 8 screw and a shakeproof washer fitted to the earth hole from the pump to secure the earth conductor to the pump The impedance between the pump body and the earth connection point must be 0 1 Ohm at 25 A 4 4 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03370 Edition 03 Jan 12 GB 033
35. arge for a time Take precautions concerning the access to the connector pins Wait at least 5 minutes after the pump comes to complete stop before starting any work E Other located hazardous energies Water cooling circuit and nitrogen purge are pressurized hazardous energies Release pressure before servicing 1 for the N2 purge disconnect the gas line 2 for the water cooling circuit disconnect the input connector and leave the output connected Don t forget to put a vessel gt 1 I under the water output E Operation in local mode There is no device to warn that the pump operates in local mode When the pump is not integrated in the equipment host tool the user must provide a device to warn that the pump operates in local mode m The products are factory tested to ensure they will not leak in normal operating conditions It is the user s responsibility to ensure this level of leak tightness is maintained E Specific operating conditions may exist that require extra caution from users due to the high temperatures generated outer surfaces 70 C Wear protective gloves and leave the pump to cool before working on the product 4 6 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03365 Edition 02 Jan 12 GB 03365 Edition 02 Jan 12 B 100 Safety instructions for pump and controller installation Installation cont d A DANGER Safety interlock The pump motor is protected against
36. ating instructions ATH 500 M MT 1 1 GB 01390 Edition 04 May 09 Replacement of parts and use of non genuine parts F 000 Spare parts Instructions of use Our products are designed to comply with current EC regulations and guarantee optimal operating conditions with maximum safety conditions for the user Any modification of the product made by the user is liable to lead to non compliance with the regulations or even to put into doubt the performance of the product and the user s safety Replacement of defective components with parts that are not genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides counterfeiting and unfair trading of parts are condemned under civil and criminal laws The manufacturer urges the user not to use imitation parts or the misappropriation and pirating of intellectual property performed by some dishonest operators The manufacturer supplies maintenance components spare parts or kits to perform the maintenance of its products E P adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 04733 Edition 01 Jan 12 F 200 First level maintenance parts For air inlet P N and purge valve Coil 24 V DC 038066 Dust filter Replace regularly the dust filter ee P N when used in dusty air Dust filter Electrica
37. circuit IN OUT water either direction Check there is no leak adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 B 340 Water cooling connection Water cooling Provide a water inlet pipe and esse Water tn i a tap to adjust the flow rate p connections p to adj Ate MT model Connect the cooling circuit tube 1 4 on the provided fittings in accordance with the flow direction inlet water on the valve Water valve supply Water leak risk maintain the water valve inlet fitting with a flat wrench during the water line connection pipe equipped with connector this to avoid fitting damage A WARNING Do no install water fittings above electrical components there is a risk of electrical discharge in case of a leak at the water fitting connection 2 2 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03369 Edition 03 May 2011 GB 04638 Edition 01 Jan 2012 Fan installation on the pump Fan electrical connection Instructions to disconnect the fan B 350 Air cooling connection The air cooling kit can be separately ordered The installation is the customer s responsability RN IAS O N Fan supply cable 5m length free wire 1 or blue 2 or brown Fan supply 48 VDC 1 2 Fan one When the pump is supplied with an air cooling unit this one is equipped with a power cable
38. connections to an installation Equipment installation conditions WARNING The equipment frame on which the pump is installed must be sufficiently rigid to absorb the kinetic energy of the rotor in case of pump rotor crash For this take into account e the maximum loads to calculate the equipment attachment devices e the flange dimensions e the quality and the number of bolts Do not use bellows on the pump inlet flange and the chamber Reducing adapter must be correctly dimensioned When the pump is connected according to the manufacturer recommendations ER B300 in case of overpressure resulting from an incident the pump enclosure can withstand a maximum static pressure of 11 bar for 1 minute A WARNING pump installation connect the pump to the customer s handling device using the threaded holes located at the pump housing EB A400 The pump can operate in any position Inlet Inlet adixen Vacuum Products Operating instructions ATH 500 M MT 1 5 Magnetically levitated pump connection Instructions Why securing Magnetically levitated pump installation Installations specifications Maglev pump connection instructions 2 5 B 300 Pump connections to an installation M aglev hybrid Turbopumps are designed so as to prevent any safety hazard to the user in standard operating conditions However some operating conditions may generate hazards for the user and the envir
39. contact service centre for any further recommendations We wish to draw your attention to the following points Equipment must be drained of fluids and residue securely packaged and shipped prepaid Concerning the closing of the ports inlet and outlets of the product metallic airtight blank flanges should be used if toxic or copper gases have been pumped The risk may be of the following nature e Chemical Danger to health risks of explosion fire risks for the environment Please indicate the chemical formula and name of the gases or substances that have been in contact with the equipment pump detector gauge or accessory e Biological In case of contamination such as pathogenic germs micro organisms bacteria viruses etc classes 1 to 4 and group E we are currently unable to decontaminate and recycle such material without risk to the safety of our staff Please contact us before sending the product to the service centre e Radioactive In case of contamination our service center is currently unable to decontaminate and recycle such material without risk to the safety of our staff A written evidence of decontamination will be requested prior to any service action Please contact us before sending the product to the service centre e Copper contamination Copper based by products formed in sputtering or etching processes are considered as a poison in some semi conductor processes A specific treatment is required which gene
40. ctions Indicates a potentially hazardous situation which if not avoided could result in property damage Indicates a potentially hazardous situation which if not avoided could result in moderate or minor injury It may also be used to alert against unsafe practices Indicates a potentially hazardous situation which if not avoided could result in death or severe injury Indicated an imminently hazardous situation that if not avoided will result in death or severe injury extreme situations Before switching on the appliance study the user s manual and make sure you follow the safety instructions it gives You can recognise these by the Caution Warning and Danger symbols Good practice tips and manufacturer s recommendations are in a blue box The performance and operational safety of this product are guaranteed pro vided it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the language the manual is written in ensure operators know the safe practices to apply when using the pro duct adixen Vacuum Products Operating instructions ATH 500 M MT GB 03358 Edition O4 June 12 GB 03358 Edition OA June 12 Manual reference 114436 Edition 04 June 2012 Translated from original version General contents ATH 500 M MT Operating instructions Symbols labels OA Warning hazar
41. d a system of overvoltage peak limiting at the input of the power line of the pump contact the Customer service Internally the pole of 48 VDC is connected to the earth adixen Vacuum Products Operating instructions ATH 500 M MT GB 03370 Edition 03 Jan 12 GB 03370 Edition 03 Jan 12 B 400 Safety instructions and electrical connections Pump electrical 1 Identify the main index on the male connector of the pump connection A polarity of 48 VDC B polarity of 48 VDC C Potential Earth D Not connected 2 Identify the main index on the female index connector of the power supply s cable 3 Insert the female connector in accordance to the main index then rotate the ring until locked 48 VDC _ gt N cable plug Plug provided by the customer Ref UTS6JC1045 Supplier Souriau France 4 If the pump is equipped with a fan supply it in 48VDC The external power supply accessory allows to power the fan 48 VDC external power supply accessory Pump power supply Blue cable eyes pump power supply Red cable eyes fan power supply wer line Fan power supply ATH 500MT 5 Check that the heater band and the water valve are both uniquement Supplied connected on HEATER and VALVE electronic front panel ATH 500M 6 If the pump is equipped with a purge valve connect the valve to only the 24 VDC power supply customer supplied
42. dous voltage Caution risk of danger Refer to the operating instructions before use 48 V 12A Power supply Do not touch when the pump is running Use of glove is recommended HLO Lock the electrical connector before using the 7 pump and during operation mme O water Water cooling cet connection Direction of rotation of the pump adixen Vacuum Products Operating instructions ATH 500 M MT 3 3 GB 03359 Edition 02 Jan 12 Introdudion ATH 500 M MT User s Manual Detailed contents Introduction to the ATH 500 M MT Control loop of the pump 5 active axis Unbalanced force rejection control The pump operating principle Pumping principle The hybrid turbo pump in an installation The back up bearings Variation of the pump rotational speed A400 The technical characteristics The performances of the pump The technical characteristics of the electronic The dimensions A510 The accessories of the pump adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03360 Edition 03 May 11 A 150 Introduction to the ATH 500 M MT A magnetically levitated hybrid turbo pump aditen ATHsow I ATH 500 M with Five active axes integrated electronic Rotor position control in 5 directions Unbalanced force rejection control Lowest possible levels of noise and vibration Compensation for any unbalance of the rotor Maintenance free Inert gas pu
43. elation to these axes are monitored by position sensors According to the position data recorded the controller corrects differences to bring the rotor back to its optimum position by varying the current in electro magnets Electronics Bearing Position Position of Reference gt 6 Correction Power eS amplifiers Gp eS magnet Position return adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 2 2 Unbalanced force rejection control A 200 Control loop of the pump The unbalanced force rejection control is an electronic function that monitors the rotor position allowing it to rotate in its own axis of inertia Changes in the rotor balance due to deposit built up during the life time of the pump are automatically compensated by the unbalanced force rejection control It ensures the lowest possible levels of noise and vibration ee ea P E a Stator geometric axis i m e i Rotor geometric axis m j Rotor inertia axis EE i D p EET adixen Vacuum Products Operating instructions ATH 500 M MT GB 02721 Edition 04 Aug 07 GB 03361 Edition 02 June 09 A 210 The pump operating principle Pumping principle The ATH 500 M pump integrates the advantages of a multi staged turbomolecular pump with a spiral helix molecular drag section The turbomolecular section provides high pumping speeds and high ultimate vacuum The molecular drag section
44. ent period they can start to run at atmospheric pressure Our products are designed to comply with current EEC regulations Users making their own modifications to the product are liable to break its compliance with these regulations degrade its EMC electromagnetic compatibility rating and make it unsafe to use The manufacturer declines all liability for the consequences of such operations Handling Do not expose any part of the human body to vacuum The product is supplied with the inlet and exhaust sealed Remove these blanking plates when you are ready to connect the product on your vacuum system As well as don t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line m Heavy product It must be removed from its crate only by staff trained in heavy materials handling either manually weight around 18 kg either by screwing hoisting rings in the threated holes located on the pump housing hoisting ring supplied by customer then use slings from a length over 230 mm tighten the pump to the handling device m Risk of tilting although the product meets EEC safety regulations it is advisable to guard against the risk of tilting during handling installation and use chapter A for the location of the center of gravity Installation A DANGER E Pump connection to the installation It is strongly recommended to secure the maglev turbopump installation to p
45. ers defined by OPT adrSEL10 lt CR gt adr 0 0 1 0 r not used r Returns remote mode choice r 0 keyboard r remote hard r 2 serial link r 5 Profibus adr OK Note O not used 1 not used Returns the state of the parameters defined by OPT which are not defined in SEL 10 adrSEL20 lt CR gt 000 a b c d e f g h i k m n o p q r s t u v w x y 00 11 22 33 44 55 lt CR gt f opt 25 opt 29 n opt 33 Defines the character which separates the parameters in a reply adrSEP nnn lt CR gt nnn 3 digit decimal value of the ascii code of the desired charac ter with leading zeros condition O00 lt nnn lt 255 adr OK or adr ErrX _ if error Allows the user to select the character which separates the parameters retur ned by the DLR STA and LEV commands Default value comma ascii code 044 IF ok the selected value is automatically stored in user memory Defines the internal operating parameters adrSET10 ccccc lt CR gt utilization time of the pump in hours adrSET30 jj lt CR gt speed threshold for relay 3 to 50 ftadrSET31 kk CR thermostating threshold 30 to 65 C ftadrSET32 lll CR bearing threshold O to 100 ftadrSET33 MMM CR bearing current value O to 100 adr OK or ErrX adixen Vacuum Products Operating instructions ATH 500 M MT GB 03376 Edition O3 June 2012 GB 03376 Edition O3 June 2012 C 800 Detailed description of RS 232 and RS 485 command
46. eventive maintenance However the back up ball bearings used in case of accidental shut downs have to be changed when the controller indicates it the percentage of landing time to be deducted depends on the number of incidents For maximum life time of the rotors see EB D 150 In case of a power failure the motor acts like a generator supplying enough power for the magnetic bearings When the rotation speed is too low the pump shuts down and lands on the back up ball bearings The ATHM pump rotation speed can be selected and set between a minimum speed and the maximum speed This makes it possible to optimize pumping characteristics according to each customer application for example high pressure pumping 2A 400 A distinction is made between the following speeds reduced speed STANDBY speed which can be set between the low speed value and the maximum speed nominal speed preselected at factory adixen Vacuum Products Operating instructions ATH 500 M MT 3 3 GB 03362 Edition 03 Jan 12 A 400 Technical characteristics of the pumps The performances of the pumps enee ewzs amp oxr onoo Na purge flange Wessedsozz av Pumping speed Compression ratio ISO 5302 Inlet vacuum max Gas throughput 9 SCCM 10000 1000 SCCM 10000 1000 Maximum continuous exhaust pressure 1 28 1 7 1 35 1 8 1 28 1 7 4
47. h It s mandatory by regulations to connect the turbomolecular pump s exhaust to a rough pumping line compatible with the process gases Check that pump is correctly connected to the equipment BE B310 A DANGER B If any corrosive reactive flammable pyrophoric oxidizing process gases can be sent to the pump then an exhaust extraction system monitor should be used to ensure that gas flow to the pump is stopped when exhaust gas extraction system is lost If flammable materials are sent to the pump the customer will need to provide a hardware based LEL detection in the exhaust extraction system detection capability at 25 of the LEL that will stop chemical supply to the pump when gas is detected over 25 of LEL for that flammable material E For non clean process If loss of purge flow creates a significant risk then the purge flow must be monitored externally and a response to loss of purge flow must be provided by the process equipment and interlocked If pyrophoric materials above the LEL lower explosive limit are sent to the pump then nitrogen should be supplied at a rate to ensure that concentration is diluted to be below the LEL in addition an interlock should be provided to ensure that gas flow to the pump is stopped when nitrogen is lost m The product s EMC rating is obtained on the understanding that it is installed in compliance with EMC rules Specially in environments that are prone to emit interference use s
48. hielded cables and connections on interfaces E Ensure that the product is connected to an electrical installation in compliance with the local and national safety requirements equipped with electrical protection fuses circuit breaker which has a suitable earth ground point properly connected E This pump is not equipped with a lock out tag out LO TO device because it is designed for use on process tools In order to properly secure the pump for installation or and maintenance the entire tool needs to be properly locked out tagged out in accordance with OSHA requirement 29 CFR 1910 147 mw If access to the IEC connector is restricted an additional isolation device should be provided which will be easily accessible by an operator adixen Vacuum Products Operating instructions ATH 500 M MT 3 6 B 100 Safety instructions for pump and controller installation Installation cont d The voltages and currents in use can induce electric shock Isolate and lock out power line to the product before maintaining it or removing the cover Only skilled authorized people may carry out maintenance work If a main isolator is installed by the customer it must be in compliance with local regulations with a minimum interrupting short circuit current of 10kA m Electric shock hazard Some components have capacitors charged to over 60VDC or motor operating as generator When power is switched off they keep their ch
49. ians can perform intervention on the product adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 A DANGER Use only specific cable Lock connector before use Do not unplug when the pump is on 2 2 C 100 Safety instructions for product use Located on the controller this label indicates that the controller musn t be disconnected when the pump is running Standard precautions before any maintenance operations Before performing a maintenance operation stop the pump When the pump is at rest switch off the pump by setting the controller main switch to 0 wait 5 minutes before disconnecting the main cable If this last one remains connected some components will still be energized Be sure that the controller status is visible from the operator otherwise disconnect the cable from the pump adixen Vacuum Products Operating instructions ATH 500 M MT GB 03374 Edition 03 Jan 12 GB 03375 Edition 03 Jan 12 The front panel Rotor indicator lights l 00009 ATH 500 M ATH 500 MT The pump rotational speed is higher than the selected speed decrease of the selected speed during operation Red liting The pump is faulty Red flashing An alert appears Wiring and communication protocol are available in a specific Operating Instructions contact us adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 04243 Edition 03 June 2012
50. ition O3 June 2012 OPT Syntax Result RDI Syntax Result RPM Syntax Result SBY Syntax Result C 800 Detailed description of RS 232 and RS 485 commands Used to select possible user choices adrOPTxx n lt CR gt adr OK xx OPTION OF rvalue PARAMETERS 7 14 Remote mode 0 Keyboard for HHR 1 remote hard give control to remote 2 serial link give control to RS 232 485 Profibus 25 Inhibition 0 inactive mode active inhibition the controller doesn t supply the motor 33 Contact mode nz 0 ROTATING closed contact if speed 120rpm n 1 ACCELERATING closed contact in phase of progress Returns the serial number of the product adrRDI lt CR gt HadrA123456789 lt CR gt Defines the speed set point in stand by value adrRPM nnnnn lt CR gt adr OK or adr ErrX X 1 out of range X 2 parameters X 3 context not in standby mode Switches the speed set point to the stand by value adrSBY lt CR gt adr OK Resets the stand by speed to its Standby stored value and allows it to be modified if a RPM command is sent This configuration is automatically stored in user memory adixen Vacuum Products Operating instructions ATH 500 M MT 3 6 SEL10 Syntax Result Result SEL 20 Syntax Result SEP Syntax Result SET Syntax Result 4 6 C 800 Detailed description of RS 232 and RS 485 commands Returns the state of the paramet
51. l cable of the air P N cooling device Cable A464597 A complete range of connecting accessories is available in the manufacturer s catalogue flanges fittings adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03385 Edition 02 June 12 Detailed contents Appendix ATH 500 M MT User s Manual Declaration of conformity Pumping curves Safety Questionnaire adixen Vacuum Products Operating instructions ATH 500 M MT Hand Held Remote HHR 1 1 GB 03387 Edition 02 Jan 12 G 100 adixen We Alcatel Vacuum Technology France 98 Avenue de Brogny BP 2069 74009 ANNECY FRANCE ISO 9001 CERTIFIED declare under our sole responsibility that the Adixen pomp ATH 500 M to which this declaration relates are in conformity with the following European Directives and Standards 1998 37 EEC MACHINERY DIRECTIVE 2006 95 EEC LOW VOLTAGE DIRECTIVE MF EN 61010 1 Safety requirements for electrical equipment for measurement control and laboratory use 2004 108 EEC ELECTROMAGNETIC COMPATIBILITY HF EN 61000 6 2 EMC Generic immunity standard Industrial environment NF EM 61000 6 4 EMC Generic emission standard Industrial environ Class group 1 This product complies with the requirements of the above Directives and carries the CE marking Annecy le 24 03 09 LANGUE ANGLAIS adixen Vacuum Products Operating instructions ATH 500 M MT 1 1
52. m Products Operating instructions ATH 500 M MT GB 03367 Edition 03 Jan 12 GB 03367 Edition 03 Jan 12 B 300 Pump connections to an installation Inlet flange installation The resulting maximum loads from a crash have to be taken into conditions item 2 account by the pump assembly bolts Design and secure the pump frame so that it can withstand the loads Mounting holes at inlet flanges ATH 500 M MT Inlet flange with centering ring DN160 ISO F DN160 CFF DN100 CFF ou ISO K Type of bolts 1 8 Length of bolts mm Bolt metric grade x Installation torque per bolt N m 30 20 20 20 Total clamping force N wee Number of bolts 03 83 a 9 20 20 Type Number Grade and Torque are mandatory A DANGER For safety reasons it is important to tighten the bolts with a torque wrench according to the specified values lower torque risk of loosened bolts higher torque risk of damaging the bolts A DANGER We strongly recommend the use of ISO F or CF F flanges ISO K type flanges are not recommended to fasten turbomolecular because The ISO K flanges do not prevent accidental rotation of the pump on the equipment flange in case of pump rotor crash This rotation could damage the foreline and the purge gas line which would generate hazards for the user For ISO K flanges we recommend to use a rotatable flange In case of use of claw clamps moun
53. n Speed controller DSP Successive display of last 10 faults fault list with record number 1 to 10 fault title Successive display of last 10 alerts fault list record number 1 to 10 alert title Bearing data the bearing life time 96 and the alert threshold 9 em The bearing life time 96 remaining Display according to connected pump model adixen Vacuum Products Operating instructions ATH 500 M MT 3 4 G 1000 Hand held remote Set up menu Setting limits Initial selection configuration ACCESS CODE 0 to 65535 0 Enter the access code and validate REMO TE CONTROL Keyboard Remote hard Serial link Profibus Profibus Select the remote mode DeviceN et STAN DBY SPEED 15000 to nominal speed of the connected 15000 M odify the standby speed from 15000 pump to nominal speed BUZZER ON OFF OFF Activate or deactivate the buzzer THERMO STAT ON adjustable temp from 30 to 75 C OFF Regulate the pump temperature O FF RELAY AT SPEED 3 to 50 3 M odify the speed contact threshold FIELDBUS PROFILE 1 0 or 1 only for Profibus 0 0 compatible with O BCV4 1 compatible with O BCV3 FIELDBUS ADDRESS Profibus MSB and LSD XX and YY Display the Profibus address or DeviceN et ID and Data Rate DeviceN et address data rate RS 232 SPEED 9K6 19K2 38K4 57K6 9K6 M odify the RS 232 speed RS 232 ECHO ON OFF O FF Authorize or not authorize the echo of characters received on the link R
54. n Vacuum Products Operating instructions ATH 500 M MT GB 03368 Edition 03 Jan 12 GB 03391 Edition 03 Apr 11 Characteristics of filtered dry nitrogen supply Purge device for DN16 port 50 sccm Filtered air or N purge Connection B 330 Nitrogen purge connections A filtered dry nitrogen supply with the following characteristics is required H O concentration lt 1 ppm O concentration lt 1 ppm Dew point 22 C Dust 1 um Oil vapor 0 1 ppm Absolute pressure of 1 to 1 2 bar When the inert gas purge is stopped the pumped gases can pass from rough vacuum side to high vacuum side and damage the maglev bearings It is advised to maintain the purge flow as long as the rotor is running to protect pump internal parts The maximum pressure of the purge must not exceed 2 bar The purge flow is continuous The integrated nitrogen flow reduction device controls the pressure and guarantees a flow rate of 50 SCCM at pressure 1 1 bars When used in dusty conditions replace the filter regularly N NEN uai M A Tio fi ATH mm E A Wii EL z MT Model Connect directly the nitrogen pipe instead of the filter or the purge plug connection 1 8 BSPP or on the VCR connection depending on pump model adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 B 330 Nitrogen purge connections Adjust
55. n Vacuum Products service center Before returning the product fill in the safety form attach it to the product before shipping to the service repair office closest to you How to contactus The overhaul must be performed by manufacturer s trained personnel Contact nearest service center or the service support at the following e mail address support service adixen fr 2 2 adixen Vacuum Products Operating instructions ATH 500 M MT GB 01739 Edition 14 Sept 10 GB 03378 Edition 01 Jan 12 Back up ball bearings The bearing counter Warning messages for pumps maintenance D 150 Maintenance frequency When the pump is running the rotor is levitated magnetically There is therefore no friction between moving and fixed parts The rotor remains levitated by magnetic ball bearings Only the back up ball bearings require maintenance they are designed to withstand many accidental shut downs or many landings of the rotor on the ball bearings at full speed These accidental shut downs occur only in exceptional circumstances broken power supply cable strong shocks faulty electronics It is advisable to check the bearing counter and provide ball bearing maintenance when needed Back up ball bearings are designed to withstand abnormal landings at full speed The wear of the back up ball bearings is internally monitored by the controller based on the rotation speed and the landing duration Initial percentage value i
56. n to its protective film Our product can be stored in the following conditions in a clean dry and contamination free environment at an ambient temperature between 5 C and 50 C for a period of 1 year maximum If you need to store a pump which has run on clean process don t forget to blow out the water line and to purge the pump with N2 Seal the inlet exhaust and purge ports with blanking plates Don t store the pump more than 6 months in a clean and dry environment Never store a pump which has been used on corrosive process Return it to a repair service center 22 E100 adixen Vacuum Products Operating instructions ATH 500 M MT 1 2 2 2 Inlet Exhaust Connection purge device Electrical connectors B 201 Unpacking and storage of the pump The product is supplied with the inlet and exhaust blancked off This prevents foreign bodies entering the pump during transport and storage Do not remove these blanking plates until you are ready to install the product on the vacuum line ASA ISO or CF F blanking flange depends on the model Blanked with a DN40 ISO KF or DN25 ISO KF blanking plate depending on the models Closed with a purge plug The connectors are protected by plastic caps Left them in place for storage of the product adixen Vacuum Products Operating instructions ATH 500 M MT GB 03366 Edition 02 Jan 12 GB 03367 Edition 03 Jan 12 B 300 Pump
57. onment the kinetic energy stored in a maglev turbopump is high In case of a mechanical failure an improperly installed pump could be ejected from the equipment if the kinetic energy was transferred to the pump body It is absolutely necessary to install the pump according to the following installation specifications to secure the user and the equipment The adixen constructor declines any responsibility if the pump installation is not designed in accordance with the installation specifications described in this section Chamber Respect the items 1 and 2 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03367 Edition 03 Jan 12 GB 03367 Edition 03 Jan 12 Worst Case Turbo Pump Crash Scenario Definitions Axial loads a Bending moment b Torque c Loads transmitted to the system item 1 B 300 Pump connections to an installation The kinetic energy of the rotor has to be absorbed by the installation if the pump seizes suddenly The maximum resulting loads have been estimated simulation of a worst case Turbo pump crash with a rotor split into 2 parts at nominal speed The impact of the rotor parts creates the following transient loads The rotor parts can be ejected out of the pump inlet flange and can impact on the plate of the valve or any other part of the system If this is placed close to the turbo pump and if it has high stiffness the impact can create a high axial lo
58. ooling connection In order to avoid corrosion and clogging of the cooling pipes it is recommended to use cooling water with the following characteristics Treated soft water or non corrosive industrial water pH between 7 5 and 11 Hardness lt 7 milli equivalent l 350 mg l of CaCO calcium carbonate 35 F French degree Resistivity 20 000 Q cm gt R gt 1 500 Q cm Solid pollution 100 mg dm Solid particle size maxi 0 2 mm Pressure range 7 bars Temperature 15 C T 40 C for ATH 500M 15 C T 25 C for ATH 500MT Flow rate 60 l h n case of water temperature is 20 C there is a risk of condensation m The use of uncontrolled city water can lead to water circuit clogging due to limestone deposition which may necessitate in the worst case a complete cleaning and overhaul of the water circuit m The presence of micro organisms like aquatic weed and micro biological substances like bacteria can lead to cooling problem in the pump Appropriate water treatment system need to be used to prevent growth of such micro organisms Provide a water inlet pipe and a tap to adjust the flow rate Apply on the fittings supplied by the customer Teflon tape or glue type Loctite to seal the threads connection 1 8 NPT Screw manually the fittings on the pump Connect the water inlet line to one of the water fittings and the other fitting to the water draining
59. play initialization The initialization time is approximately 15 seconds Access to the menus G 1000 Hand held remote start up Before using the HHR check that the electrical connections have been made between the pump and the controller refer to B400 Connect the hand held remote to the controller on Service connector Supply the pump controller The controller performs a self test and identifies the pumps to which it is connected The equipment is identified the program version is displayed than communication test is done In the meantine the Indicator lights HHR V01 00 08 are tested by lighting in succession Checking procedure Finally the working screen corresponding to the connected e HHR V01 00 08 pump is displayed Collecting data KEYB OH CTRL VXX XX XX ATH 1234 M dy to start Enter the sub menus by pressing Spon SER NUM M Display and or select the parameters to be monitored see page 3 Access the parameter programming see page 4 Access the hardwire component serial number see page 4 adixen Vacuum Products Operating instructions ATH 500 M MT GB 04070 Edition 03 Jan 12 GB 04070 Edition 03 Jan 12 G 1000 Hand held remote Display menu DISPLAY Pump and controller status pump temperature pump motor current controller temperature pump rotational speed Controller version HHR version Front panel versio
60. provides a high compression ratio and extends the forevacuum tolerance up to the range of mbar Inlet Dry back up bearings Molecular drag Motor Magnetic levitated bearings Exhaust CX Cooling Flow restriction The gas purge provides an excellent protection for corrosive applications and the rotor cooling adixen Vacuum Products Operating instructions ATH 500 M MT 1 3 2 3 A 210 The pump operating principle The hybrid turbo pump in an installation primary pump IN LET PRESSURE Secondary pumping Secondary vacuum At the pump exhaust the gases are evacuated to atmosphere by a The ATHM compression ratio is set by the design The pumping performances depend on the primary pump and on the installation ATMO SPHERIC PRESSURE Chamber to be pumped Primary Primary vacuum adixen Vacuum Products Operating instructions ATH 500 M MT GB 03361 Edition 02 June 09 GB 03361 Edition 02 June 09 The back up ball bearings No maintenance Battery free Variation of the pump rotational speed A 210 The pump operating principle They are dry lubricated ball bearings They are never used in normal operation since the rotor is not in contact with the ball bearings The back up bearings are only used to protect the pump in accidental air in rushes accidental shocks or power failure By design the pump doesn t include parts liable to wear and doesn t need pr
61. rates extra cost WARNING In the event of chemical contamination please indicate the following gases or substances Reactor Pump Substances Gases introduced Produced Exhaust by reaction reaction gt A B C B e Gases or substances introduced into the reactor and which may be found at the exhaust A e Gases or substances resulting from the reaction or process B e Gases or substances that may possibly be formed inside the pump due to a thermodynamic or chemical reaction condensation deposition precipitation etc C adixen Vacuum Products Operating instructions ATH500 M MT 1 2 2 2 G 200 Declaration of contamination This questionnaire can be downloaded from www adixen com Repair and or maintenance will be carried out on vacuum equipment or components only if a fully completed correct declaration of contamination is provided If it is not the case the corresponding repair will be delayed or omitted A separate declaration must be submitted for each device or each component This declaration can only be completed and signed by an authorised and qualified person 1 EQUIPEMENT 2 REASON FOR RETURN SERVICE REQUIRED mandatory Description Reference P N Serial Ne PO Return N Under warranty Out of warranty 3 EQUIPMENT CONDITION Has the equipment been used yes no C 5 1 PROCESS RELATED CONTAMINATION Chimique Type of pump oil sed
62. revent any safety hazard to the user in standard operating conditions B 300 B Risk of cut injury The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime if the pump is not switched on it may be driven by another pump in operation Always connect the pump inlet port before starting the pump Make sure all parts and chambers connected to the inlet exhaust and purge of the maglev pump can withstand a negative pressure of 1 bar below atmospheric pressure and that they are impervious to damage from vacuum seals etc 2 6 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03365 Edition 02 Jan 12 GB 03365 Edition 02 Jan 12 B 100 Safety instructions for pump and controller installation Installation cont d The user and or OEM are ultimately responsible for operating the equipment in a safe manner The manufacturer has no control over the types of gases exposed to this pump This is the user and or the OEM s responsibility to follow the necessary safety requirements Frequently process gases are toxic flammable corrosive explosive and or otherwise reactive Toxic gases can cause serious injury or death Operators and users must take the appropriate safety recommendations to prevent injury Consult the responsible department for instructions and safety information Hazardous gases through the pump can cause serious injury or deat
63. rge Eliminate corrosion of the motor and magnetic bearing coils Battery free In case of a power failure the pump motor acts like a generator to transform the rotor energy into electrical power to supply the electronic Eledrical power supply 48 V DC acce adixen Vacuum Products Operating instructions ATH 500 M MT 1 4 A 150 Introduction to the ATH 500 M MT ATH 500 M Model For OMM version see its own specific technical sheet Integrated electronic Integrated purge 50 sccm aa equipped with a filter 1 8 NPT female EF B 340 RS232 or RS485 serial links The serial link RS 232 or RS 485 is used to monitor and control the pump from a computer The serial link RS 485 allows the installation and the control of many pumps in a network EE B 450 and C 800 Remote connector The remote control connector is used for the remote control of START STOP STANDBY functions to allow the copy of pump status via dry contact outputs B 430 Pump status indicator lights F C 200 Power supply connector BED Lg a 48 VDC power supply Profibus Devicenet Industrial network connectors and indicator connectors areas Profibus Devicenet 2 4 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03360 Edition 03 May 11 GB 03360 Edition 03 May 11 A 150 Introduction to the ATH 500 M MT ATH 500 MT Model gt E e pen d Water in W 3 ad E S a 1
64. ring Bearing change 16 O J elecronictemp Electronic temp pump temp Pump temp 9 o 20 0 Self check 2 0 J 2 0 J S 233 00 0 2 0 JJ 2 Defines the operating state of the turbomolecular pump adrIMPON lt CR3 gt start pump rotation adrTMPOFF lt CR gt stop pump adr OK or adr Err3 _ if the pump is already in the state requested context error Defines the version of electronics extension frequency converter magnetic bearing ftadrVER CR ftadr Interface VX YY ZZ cartridge VX YY Type XXXXX lt CR gt Interface VX YY ZZ interface board software version Front panel Cartridge VX YY interface board software version Type xxxxx type of connected pump code adixen Vacuum Products Operating instructions ATH 500 M MT GB 03376 Edition O3 June 2012 GB 03377 Edition 03 Jan 12 Maintenance ATH 500 M MT User s Manual Detailed contents Safety instructions for product removal Maintence frequency Diagnosis and Troubleshooting adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 01739 Edition 14 Sept 10 D 100 Safety instructions for product removal Maintenance must be performed by a skilled maintenance operator trained in the relevant health and safety aspects EMC electrical hazards chemical pollution etc Isolate the product from all energy sources
65. round V A RS485 Data set ready DSR V B RS485 DB 9 contacts male connector Examples of possible RS 232 connection RS 232 witha O connector on single controller z ATH 500 M pump Serial link RS 485 Parallel type connection communication will be lost only on the disconnected pump viv a VAN e e e e e eeeoee ON NC M MC E NEC NEC EC Communication box 9 pin male DB RS 232 485 RS 232 485 RS 232 485 RS 232 485 n2 n3 nn End of the line wiring 15K0 1 4W adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03373 Edition 03 Jan 12 ATH 500 M MT User s Manual Detailed contents Operation Safety instructions for product use The front panel with operating status Configuring the ATH 500 M MT for the application adixen Vacuum Products Operating instructions ATH 500 M MT Detailed description of RS 232 and RS 485 commands 1 1 GB 03374 Edition 03 Jan 12 C 100 Safety instructions for product use Before using pump and controller make sure that the mechanical and electrical connections have been made according to the safety recommendations refer to chapter B from pump operating instructions It is highly recommended to use m an inlet screen at the pump inlet an isolation valve between the chamber to be pumped and the pump an isolation valve between the pump and the roughing pump
66. s STA Returns the status of the internal dynamic parameters Syntax adrSTA lt CR gt or STA lt CR gt Result adr sss rrrrr vvv www xxx yyy zzz aa bbbbb ccc ddd ggggggggggggggg 321 gggggggggg lt CR gt adr adress SSS 1 order status 3 2 O TB LOCAL e serial STDBY START SSS 2 2 pump status 2 O a VE T Nom Accele Start Power temp i P ofl ox fox oF or or or Ie tout wer on ov ON ON SSS 3 3 valve status ELLE EE At free free Water Ther inlet Isol speed valve mostat valve dose dose dose Do os oe oe rrrrr speed in rpm zzz Axial vvv Radial aa Current voltage in V www Radial bbbbb Current Value in mA xxx Radial ccc Pump temp C yyy Radial ddd Electronic temp C sss needs to be converted from ASCII to binary 123 adixen Vacuum Products Operating instructions ATH 500 M MT 5 6 6 6 STA continued TMP Syntax Result VER Syntax Result C 800 Detailed description of RS 232 and RS 485 commands Returns the status of the internal dynamic parameters continued g O0 OK 1 ALERT 2 FAULT ee sensor umm OU OD 7 0 X Jmaggsupen HE 3 4 seentese voltage O3 po qc ao 0 JYhrmodod nm 0 JpXrdod 2 0 JYomdad Ww 0 Xb radi Mu 0 ich 15 O bea
67. s set at 10096 When this percentage reaches 096 an alarm is generated pump can t restart and back up ball bearings need to be replaced by authorised Service Center The ball bearing alert threshold can be set on the menu BB C300 The internal memory of the controller also informs the operator when the ball bearings require maintenance jis D200 The life time of the rotor is at least 5 years under normal conditions with clean process Please contact the Service Center to check your application The full overhaul must be performed by manufacturer s trained personnel Only inlet screen coil or pump valve replacement are authorized at the customer s site Contact the nearest service center or the service support at the following e mail address support service adixen fr adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03379 Edition 02 June 09 D 200 Diagnosis and troubleshooting INCIDENT CAUSE No event occurs after power on No mains current Isolate the product from the various energy sources before any maintenance operations During the speed rise the pump starts to vibrate Abnormal working The red light on the front panel lights on The pump is faulty adixen Vacuum Products Operating instructions ATH 500 M MT REMEDY E Check that the pump is powered by a 48 V DC power supply the blue lit lights on E Check the remote control configuration of the pump
68. ses of use on tables make sure that no objects enter the ventilation openings or block the openings when handling the units adixen Vacuum Products Operating instructions ATH 500 M MT 5 6 B 100 Safety instructions for pump and controller installation Labels stuck on the product WARNING This label indi i i WARNING This label indicates that handling the pump can cause muscle strain or back HEAVY OBJET Cam rou rude virgin or bek inary injury i Ur Bing eh od prapor lg ign For all product handling use the appropriate handling devices EF un o AA A A WADBNING EA WARNI G Y HAZARDOUS VOLTAGE ENCLOSED Wohtoge or cerrest barani mheal Y cosa This label indicates that some of the internal parts are energized and could cause electrical shocks in case of contact It advises to disconnect the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pump A AJADKHKIFS A WARNING AA w HOT SURFACE Comieci cout burn Se ial adr weit cipi gear belon This label warns the user against possible risk of injury due to any hand contact with hot surfaces It states that protective gloves should be used before performing any Intervention Avoid causing a shock on a pump when the rotor is moving it can block the DO NOT TOUCH WHEN right operation THE PUMP IS RUNNING Other labels Customer is in charge to stick
69. t the same number of claw clamps in stainless steel as the number of screws recommended for the ISO F flange Equipment installation If the equipment cannot withstand the maximum loads in case of rotor conditions crash please contact the manufacturer for further consultations adixen Vacuum Products Operating instructions ATH 500 M MT 5 5 GB 03368 Edition 03 Jan 12 B 310 Inlet and exhaust connections Vacuum connections Do not expose any part of the human body to vacuum The product is supplied with the inlet and exhaust sealed Remove these blanking plates when you are ready to connect the product on your vacuum system As well as don t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line Risk of injury by cutting Contact with the pump rotor cell may cause cuts Alternatively protective gloves may be worn when servicing the product Make sure all parts and chambers connected to the inlet exhaust and purge of the maglev pump can withstand a negative pressure of 1 bar below atmospheric pressure and that they are impervious to damage from vacuum seals etc For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used Pump installation connect the pump to the customer s handling device using the threaded holes located on the housing of the pump BER A400 Pollution
70. the Operating instructions and make sure you follow the safety instructions You can recognise these by the Caution Warning and Danger symbols Good practice tips and manufacturer s recommendations are in a blue box The performance and operational safety of this product are guaranteed provided it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the language the manual is written in ensure operators know the safe practices to apply when using the product We took care to provide you with a clean product To keep it in this condition unpack it only in contamination free area and at final place of use For emergencies For emergencies and breakdowns contact the manager of your local service center see addresses at back of operating instructions or on our website Make sure the equipment shows no sign of transport damage If it has been damaged take the necessary steps to record this with the carrier and inform the manufacturer In all cases we recommend keeping the packaging reusable materials for further transport of the equipment or for prolonged storage adixen Vacuum Products Operating instructions ATH 500 M MT 1 6 B 100 Safety instructions for pump and controller installation The turbomolecular pumps can t evacuate at atmospheric pressure they are connected to a roughing pump For a transi
71. the flow rate Feed the nitrogen purge Flow rate SCCM throughout pumping according 70 ON 9S to the flow rate and pressure e l l 60 gud value in the scale given 50 40 30 a Absolute pressure at inlet bar 10 11 1 2 13 14 15 Valve with built in This is an accessory directly installed on the ATH500M models purge device E B333 50 sccm The power of the valve is the responsibility of the customer 24 VDC Filtered air or u ATHM When using this valve close it before making a leak detection test 2 2 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03391 Edition 03 Apr 11 GB 04734 Edition 01 Jan 12 B 333 Assembly of the purge kit Installation purge kit on ATH 500M 1 8 BSPP connection Integrated electronic 1 Replace the screws M4 16 of electronic by the screws 5 and the washers and l 2 Remove the silencer or purge plug from the purge port 3 Screw the union on the purge port 4 Install the assembly 2 on the top of the electronic box using screws 5 through the plate 5 Screw N2 gas line in the union 6 Tighten the nuts 3 with the washer 4 7 Test the vacuum tightness adixen Vacuum Products Operating instructions ATH 500 M MT 1 1 GB 03369 Edition 03 May 2011 Characteristics of water cooling Water cooling connections M model B 340 Water c
72. these labels on the ATHM on the most appropriate location to warn the operator regarding the probable hazards This label informs the user that moving parts present inside the pump MOVING PARTS PRESENT coud cause personal injury like crushing Moumgosus cimus A or cutting The user must keep all body parts away from moving Keep hands or feet away from moving parts pa rts WARNING HOT SURFACE Comic wey isna been j De re er or ero piia gece bolas TE The hot surface sticker must be sticked conspicuously on the pump housing The user must label visibly the product to warn against pumped process gas that could be dangerous and toxic and could cause severe injuries or death It precises that any preventive maintenance operation can only be performed by trained personnel FLAMMABLE CORROSIVE AND TOXIC CHEMICALS LOCATED WHITHIN THE ENCLOSURE Explosure may result in severe injury or death Preventive maintenance must be done by trained personnel only 6 6 adixen Vacuum Products Operating instructions ATH 500 M MT GB 03365 Edition 02 Jan 12 GB 03366 Edition 02 Jan 12 B 201 Unpacking and storage of the pump Unpacking Make sure the equipment shows no sign of transport damage If it has been damaged take the necessary steps to record this with the carrier and inform the manufacturer In all cases we recommend keeping the packaging reusable materials for
73. urrent are present on power cable and on the heater power line if installed Avoid to pinch or pull these cables and route them safely m Electric shock hazard The voltages and currents in use can induce electric shock Isolate and lock out power line to the product before maintaining it or removing the cover Only skilled authorized people may carry out maintenance work If a main isolator is installed by the customer it must be in compliance with local regulations with a minimum interrupting short circuit current of 10kA m If access to the IEC connector is restricted an additionnal isolation device should be provided which will be easily accessible by an operator For electrical connection the user must Provide a power switch or a circuit breaker in the electric installation Put it correctly easily accessible by an operator Mark it visibly as an electrical interrupting device of the product The pump runs with a 48 VDC electrical power supply either ordered as an accessory E A510 either supplied by the customer Internal protection fuse Surface mount fuse Time Lag T L 16A Breaking capacity 125A 300ms According to the peak power delivered by the supply power on 48V add an additional protecting system on the pump power input of 48V DC If the pump is connected on a main 48VDC network network within the meaning of the standard 61000 6 it is necessary to add a filter an

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