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1. 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com SAINTECH ION BEAM SYSTEMS SPECIFICATION SERIES III XIAD Dimensions Source diameter 60 mm diameter by 60 mm long 2 5 x 2 5 source weight 1 0 kgs approx 2 2 Ibs Beam power Anode volts selectable to 225 volts anode power 1000 W Anode current to maximum 5 amps under manual or automatic beam control Beam divergence Wide beam divergence in excess of 80 degrees Gas flow Approximately 7sccm argon required to produce 2 amps typical Cooling water minimum 2 3 liters minute Water flow is constantly monitored Power Unit weight approx 28 kgs 60lbs 135mm x 480mm x 406mm Options Available Dual Gas DG Option provides facility to deliver either of two installed gases in either pure gas or specified gas mix ratio Gas mixture is set from the touch screen Mounting Hardware MH Several options are available The mounting brackets are clamped to a special gas feedthrough Complete Series Ill XIAD package includes e XIAD lon Source e XIAD Series IIl Power supply 208 or 230 VAC single phase 50 or 60Hz 10 amps e Gas flow controller supplied 25 sccm oxygen Alicat Scientific e Operational maintenance and service manual e All feedthroughs gas electrical amp water Complete system supplied with all hardware for installation to new or existing vacuum systems All vacuum feedthroughs for2. TELEMARK Saintech lon Beam Systems lon Current Monitor The Saintech lon Current Monitor ICM provides REAL TIME Monitoring of lon Flux throughout lon based Deposition Processes US Patent Nos 6645301 6734434 and 6849854 apply Other patents Pending The lon Current Monitor has been developed to provide essential deposition information for any ion based process The ICM monitors the flux of positive ions and outputs the beam current in units of amps per square centimetre Three amplifier ranges are provided to adequately cover the flux density output from a wide range of commercially available ion beam systems An adjustable bias voltage is provided to reject negatively charged particles electrons The Sensor Head The sensor head incorporates a revolutionary patented design that allows for the continuous monitoring of the ion beam flux even during the evaporation of dielectric materials The sensor head is designed to be ultra low maintenance and is constructed from materials to be compatible with UHV applications The head can safely operate at temperatures compatible with deposition processes to a max 350 deg C Auto ranging of the Output Signal Three auto ranging ion anode current ranges Ion Current Density Monitor provided 10uUA volt 100uA volt 1000uA volt The output signal is displayed in any of the are ane following formats LOG CURRENT e A front panel Digital LCD panel displays the RMS digital i
3. many applications in PVD processes The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems ST55 Features e Power supply now comes with touch screen interface e Touch Screen can be tilted to 45 to allow ease of use e Multi Mode system operation Continuous Pulse Gas Purge Substrate Pre clean all at the touch of the screen e Save regularly used deposition procedures to file Save up to 15 separate files with all operational parameters e lon beam energies up to 230eV e lon Beam power to 1 5 kilowatts e Anode currents to 7 amps e Full time use of high purity oxygen Highly efficient patented gas injection design greatly reduces gas load e Direct water cooling to reduce maintenance radiation load and venting delays e Extremely low maintenance The patented design utilizes a specially coated anode that resists build up of electrically insulating oxide coatings No need to change anodes for different gases e Extremely stable operation in IAD processes due to patented electrode design e Broad beam divergence for large area coverage with a uniform ion flux e Rapid start up Only 3 seconds to stable operation from Start Special Coiled Filaments provide gt 12 hours in pure oxygen per filament e Pulse mode Operation for ion assistance of radiation sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF
4. amp LaF For further information please refer to separate information sheets e Gas Purge Mode provided to allow routine purging of gas lines Automatically switches off at pre set timeout or when gas flow reaches lt 1 of flow range e Pre deposition Clean Mode provided to easily pre clean the substrates immediately prior to deposition e Remote Control amp Monitoring of process parameters A front panel control toggles control from local operator to remote master control and monitoring of all operational parameters 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com SAINTECH ION BEAM SYSTEMS SPECIFICATION SERIES III ST55 Dimensions Source diameter 75 mm diameter by 70 mm long 3 x 2 75 Source weight 1 4 kgs approx 3 Ibs Beam power Anode volts selectable to 225 volts anode power 1500 W Anode current to maximum 7 amps under manual or automatic beam control Beam divergence Wide beam divergence in excess of 80 degrees Gas flow Approximately 8sccm argon required to produce 2 amps typical Cooling water minimum 2 5 liters minute Water flow is constantly monitored Power Unit weight approx 30 kgs 66lbs 135mm x 480mm x 406mm Options Available Dual Filament DF Electronic system detects filament failure and auto switches to second filament Operator is alerted to first filament failure by visual signal on screen Dual Gas DG Option pr
5. diation load e Extremely low maintenance The patented design utilizes a specially coated anode which resists build up of electrically insulating oxide coatings No requiring routine replacemen e Extremely stable operation in IAD processes due to patented electrode design e Broad beam divergence for large area coverage with a uniform ion flux Pulse mode operation for ion assistance of radiation sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF amp LaF For further information please refer to separate information sheets e Remote Control and Monitoring all control through an RS232 interface e Choice of coiled or straight wire filaments Optional Features Available Dual Filament Electronic system detects filament failure and auto switches to second filament e Dual Gas This feature provides use of either pure gas delivery or a mixture of two gases in any ratio 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com 12 2010 TELEMARK Saintech lon Beam Systems ST55 Announcing the Series Ill ST55 ion source system for Physical Vapor Deposition PVD processes The SainTech ST55 lon System has been specially developed to provide a cost effective solution for ion based vacuum processes for medium to large sized deposition systems The ST55 provides an extremely reliable and maintenance free facility for
6. ocedures to file Save up to 15 separate files with all operational parameters e lon beam energies up to 200eV e lon Beam power to 1 0 kilowatts e Anode currents to 5 amps e Full time use of high purity oxygen e Highly efficient patented gas injection design greatly reduces gas load e Direct water cooling to reduce maintenance radiation load and venting delays e Extremely low maintenance The patented design utilizes a specially coated anode that resists build up of electrically insulating oxide coatings No need to change anodes for different gases e Extremely stable operation in IAD processes due to patented electrode design e Broad beam divergence for large area coverage with a uniform ion flux e Rapid start up Only 3 seconds to stable operation from Start Special Coiled Filaments provide gt 12 hours in pure oxygen per filament e Pulse mode Operation for ion assistance of radiation sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF amp LaF For further information please refer to separate information sheets e Gas Purge Mode provided to allow routine purging of gas lines Automatically switches off at pre set timeout or when gas flow reaches lt 1 of flow range e Pre deposition Clean Mode provided to easily pre clean the substrates immediately prior to deposition e Remote Control amp Monitoring of process parameters Remote control through RS232 protocol
7. on current signal complete with appropriate units of either microamps or milliamps e A bar graph display provides visual representation of the RMS ion current signal e The digital RMS signal is available through a connector hp TEs on the rear panel The signal can be viewed on a remote voltmeter or signal logging facility e The real time AC signal can also be output to a cathode ray oscilloscope CRO using a front panel BNC socket AC OUTPUT Saintech lon Beam Systems 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com 12 2010 TELEMARK Saintech lon Beam Systems XIAD Announcing the Series III XIAD ion source system for Physical Vapor Deposition PVD processes The SainTech XIAD lon System has been specially developed to provide a cost effective solution for ion based vacuum processes for medium to large sized deposition systems The XIAD provides an extremely reliable and maintenance free facility for many applications in PVD processes The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems XIAD Features e Power supply now comes with touch screen interface Touch Screen can be tilted to 45 to allow ease of use e Multi Mode system operation Continuous Pulse Gas Purge Substrate Pre clean all at the touch of the screen e Save regularly used deposition pr
8. ovides facility to deliver either of two installed gases in either pure gas or specified gas mix ratio Gas mixture is set from the touch screen Mounting Hardware MH Several options are available The mounting brackets are clamped to a special gas feedthrough Complete Series Ill ST55 package includes e 1755 lon Source e 155 Series Ill Power supply 208 or 230 VAC single phase 50 or 60Hz 10 amps e Gas flow controller supplied 30 sccm Alicat Scientific Operational maintenance and service manual e All feedthroughs gas electrical amp water Complete system supplied with all hardware for Installation to new or existing vacuum systems All vacuum feedthroughs for process cooling water reactant gas and electrical supply are supplied to individual requirements Vacuum chamber flange types supplied to individual S155 Series II power supply Requirements with tilting Touch Screen interface 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com 12 2010
9. process cooling water reactant gas and electrical supply are supplied to individual requirements Vacuum chamber flange types supplied to individual requirements XIAD Series III power supply with Touch Screen interface 1801 SE Commerce Avenue Tel 360 723 5360 sales telemark com Battle Ground WA 98604 USA Fax 360 723 5368 telemark com 12 2010 TELEMARK Saintech lon Beam Systems ST3000 ST3000 Series III 3 0 kW ion beam system for Physical Vapor Deposition processes in large vacuum systems The SainTech ST3000 lon System has been specially developed to provide an extremely reliable and maintenance free facility for many applications in physical vapor deposition processes The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems The ST3000 and lon Assisted Deposition The IAD of thin film growth is a proven technique that provides dense and highly stable films without need of additional substrate heating The ST3000 has further enhanced the IAD process to include deposition onto a wide variety of glasses plastics and metals The ST3000 provides unparalleled film adhesion for both metal and non metal films ST3000 Features e lon beam energies up to 300eV e Anode currents to 15 amps max e Full time use of high purity oxygen argon or nitrogen e Highly efficient design greatly reduces gas load e Water cooled to reduce maintenance and ra
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