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S-5200 Field Emission Scanning Electron Microscope Service Manual

Contents

1.
2. 15V A 8 6 _ 17082 7 0 10 4 5_ 152074 152074 5122 401 C
3. ICW4 pee AD S37IN 18 Bsa one 8125 AW 13 11 Stg X 3 BIB O W URE RFBB QS CORRSE REF
4. Al 1 PHOTO 1 Ne AMP 6P Di CN34 16 4V if m LT10BSCT F10 PR 5A Ci NETTE 910 10k c2 3 2A 3 3k 01 15V ZZ 35v Me LAN pp SK1 T 2OOW 5A 6800u 1 R2 R3 886 0588420 EE 80 3 5 SGVA CN3
5. gt Oundno coe ance R32 isre 51 4 P TOC RAT 275 N R33 V RED ANA N AAA all Hd R12 ANN a m Ras gt as odis pi 6 V GREEN 2 ozo 1a 12 25 jos a2 a a Y s 4 M 5 No lt 7 2 11 grie a iok s B gt 020 R36 pend 5 ria xa gt 220
6. CN50 DIVSIG S iQ DIV 2 1 FASTSIG S 1 57 1 5 1 ELCO 2P 5 9 9 1u C88 0 10 5 6A1 SLOWSIG S ICX15 CN 55 ICX3 2228 HAA31468 M M 556 CNS rw VIDEO S s 3 Jini 9 gt 5V n 6 AN 1 ASIG S GND 2 iu 5 2 v 14 2 DIVSIG S 5 lt 891 _2 95614 EM 7 2 d 01 2 GND 4 275 lt c81 1 57 1 5 ASETE 13 ao O tu c89 2 CN3 15V 5 415 0 14 12 ai GNDL 6 ta v DOE s 022 15 15v 5 NC 8
7. O1pi 1 23pi 1 MAi is Maz lt 13 Lora Ms 264165 2 4165 165 HMS26a165 lt Mai is E 15 o e 15 zo MAL 12 pars MAiciz MAP gt pars MD2 30 MA2 12 m oe MAlCII ane o Maicii pane MD 3 Mag 1 MD2 29 MAD 1 m pora MD2 13 pm MAL 2102 en pera MDi 28z3 MAi io MAP 102 aes ects MD2 28 10 235 pera MD
8. 7 GLOLOMG CN128 1 B W 20 OO DISPLAY MAIN POWER SW B W Mo SEM CONTROL POWER CN29 38 28 28 58 5A 4B 4A 1B OOOO 50 6 RL1 5 571 NOT USE B 0 1 B W B W TRANS PC 1 B W 5V 0 8A for DCPS P C B 25 CN29 67 5V 8 5A 1 10 8 5V 0 8A O C 50 16 4V 3 5A 31 5V 1 5A 16 4V 3 5A 31 5V 1 5A 8 5V 2A 16 4V 4A IELH 1 11 62 104 2 20 16 4V 4A 26 5V 2 8A S W LES gt K FUSE2 SA T TRANS PC 2 for DCPS P C B 4 5V 0 2 3 2 K O O K CN36 11 5V 0 5A 16 4V 2A c for IM IO 7 O 114V 0 2A 16 4 2 q
9. YAMADA 1998 02714 MAE 32125378365 6 SRI 152074 C203 C204 Lil R3 2100 voc Wee 6 A xb HD64F5588F 4 R208 C2 XTAL 2 10k 6 AO EXTAL R203 MDO PAL22V10 a ok ck 10PC NMI L 80 lt 7 gt t cLk RES Hwg P329 ACTL lt 6 gt 2111 STBY 78 ACTL lt 5 3 12 Bee 77 ACTL lt 4 4 15 50 lt 7 gt 5114 Cis ACE 6 15 iE GRESSN P62 TGLK1 4 Ac 8 17 303 BOODC0 384 P61 IRQs 18 28 285 P60 IR PA2 A 5 5 60 TRQ2 cae A 100 P upuacds 454 P77 SCL2 16
10. from IO gt 5V REF 2 T rncs ze 2 1 7 B kas WE Bui I e SOT ps s LA gt ik P gt i Aa a 1 De said a we aa 2 I e z we 9 Se ews n T gt tT CONT owen SECTS 220 e nee s 2 5 ER a w Re RO Ris 4 awn 52 7 I usa7s n 20k 20K 2 Rio AO gt gt oa ae dew sv lt AN W e AW as saw 22 3 op REF gt e on mb 5 mas 555 517 Nope ek 1 a o AN 4 AN d e
11. 90 8 206 PMHV1 Uu 1 15V L PM 9 5 Fel R8 c6 A 7 600 PMHV1 Pc918 100 0 800V i 2 047 15V L PM CIO 415V L PM RAT 19 R11 10k A2 18V_COL 2 6 R12 Hew C11 R5 IV a 01 02 D3 D4 R10 47k bu 2 2k 2 1w 0 047u 0 047u IC1 ae MIS 5 i Ae 2 7 R13 R9 04 Q5 11 17902 600V 600v tolus 3 7 96 18V_coL PC2 100 cs 67 2 2k 17902 COL A 05 4 1_5 WA 2 PC918 s 1 soov 05199 A i 77 R6 047 R17 GND_VA R112 Q7 10k R16 d R7 R113 AC gt i i qe 577 2 WM Q3 GND VA 1 5 77 GND_VA 9 GND_COL PMY 2 v R19 C13 C15 0 800 600 Lw
12. COO Or 942 09 amp AC M 919 6 v4 AN ev lt R113 s R107 vr22 ovi W Res M W os 2 a P2 w p 15v p 5 gt 2 AAA s nes AAA 2 Wi R108 R111 Pr V Wv 27k gt normaro NW ANY NW ANN 2 s R isv 77 7 a 959 1 17082 17082 3 gt 4 gt NORMAL vous 20 PA eae v R91 vR1I6 4 JH id ANN gt 157 gt 20K 015 On J kap 155106 v 1 1 L EE m X k me WV AA bH v rer 3 7 5 R115 R89 gt 10k R95 gt 15v
13. vec BR12 20 24v ys Ooi El uw MPUD 15 85 6 gt gt 2 1 15273 8 2 4 022 1 rc lt 15 gt 3 x QL woss lt 7 gt 2 58187 N 102 1 1 eto 01139 MPUD lt 14 gt 18 p 01 19 85 lt 6 gt 5 lioz y 4 10 A 10k gt gt gt 2 24 zd KMPUD lt T3 gt 17 21716 WOBS lt 5 gt 11 o 5 oo p33 MPUD lt 12 gt 102 425 WOBSC4 14 Jiao 1 22004 3 7 o 2 76 _WO8S lt 5 gt Bek 19 CN137 MPUD lt TO 14 o 2415 W088 25 lt 7 3 4 9 REPTE 5 2 623 r MPUDCS 13 o Q 12 085 lt 1 gt WOSM lt 6 gt 6 inal lt 3 Lvi gt eni3s 123 MPUD lt 8 gt 8 10 9679 085 lt 0 gt WO8M te kir yg 8 c219 5 d 2 WOBM lt 4 gt 13 n ZZ O v2 vcc 810 WOBH N 11 i 10 2200u 3 A ec 1B E ct 24V 24V B9 EN A BR16 A C 4 6 5 4
14. CCT 90091 4 Re us a 1 p 5 iso pO NMI N GR N gt 14 12 3 lt 7 _0 gt vee 1c5 7 54000 PQ160 A OPTION VIDEO AMP XC4000 1 16 2 0 1 29 e 3 0 17 z 4 11 0 BR1 14 5 10k Uy G I 0 TDI ni R 2 I 0 TCK 2 MPUD 0 C 2 DVN3 N 8 IZ0 NC 3 MPUD lt 1 gt 1 17 0 3 9 1 0 NC 4 MPUD lt 2 gt 169 5 4 10 5 MPUD 35 d 15048 MPUD lt 7 11 11 0 5 MPUD lt 4 3B MPUD lt 6 gt 12 11 0 26 7 MPUD lt 5 gt 28 MPUD lt 5 gt 13 5 11 8 MPUD lt 6 gt 18 MPUD lt 4 gt 14 0 B11 9 MPUD 7 cB 0A MPUD 3 0 MPUD lt 2 gt 16221270 ajoj MPUD lt 1 gt 1 170 MPUD lt 0 m swt 9 MPUA lt 0 gt MPUAC gt MPUAC 5 gt uaren em MPUAC 4 gt lt 5 gt 15 4 d d l
15. CNL 1 02 DUN4_N CT 2276 F gt 2 us JO 5 924 vse JP ICW1 13 xD 15439 i E202017 ICS2 CEN ae A4_N 16 2 Isa DEF ZLENSZMU ya E202417 NAE 51 BNK 1 YS R2 18k ALN E20261 BNK LRD v ICQ4 ICS2 o 1 Dm de n Lacer 111 HEN WEN nes c 7 5 N E20201 DBS AGNDA 1001 42 HS CEN n SUN DB4 5 15 amp 2 N euo is eso pies ia ilsa N E202809 gt ia e 12 We N E202117 oh DBZ 9 W3_N OA EE Uref 2 ICVL IM A3_N B21 17 p RFBB e P eap 5 Sale 7 B 16 LSISB E222217 120 98 toute 1 5 Fl 504 eam T 3n rae Se 250 5 Cece N 3B Atenza Y5 WSN 85 375 1 B80 3 1CON WB N 31 335 a Pa 20 2F gt We
16. SW C7 N CNB CNB CNB vec BR1 A BR2 A A 2562 N N Fo LED17 N 413 74 2 LED37 N ASA o v GLOW MAG LED17 SM 3 NAA d ECO A A25 A 27 SW 6 822 74 RED 2 a ECO 825 374 LED16 N 813 K Ay A LED36 N 5 NAA d icu a S LED16 N ERA gt pa Ned PET VV V RED 1 7 NAA EC2 CEDIS N 2230 LED35 N 10 8 AAA EC2 BEAM DIR PHOTO y C s A26 1 244 SW_C5 N LEDi15 LED35 VV 4 gt SLOW 4 CAFC i B 826 gt lt gt lt EC2 B i02 1 PAPAS LED14 N 4 A LED34 N 810 K amp 220 4 42 gt ae Lepia V d LED34 gt sws 5 25 swos CAFC STAGE MEM PHOTO f EOM A GE See oN ee SW c4 N 422 4 LED13 N 15 K LED33 N AnA 6 1 v SE LED13 NJ s LED33 EC2_A 7 5 25 _ 2502 i502 1 602 SLOW 2 CAUTO GN EC2 B 527 Xx Ec3 B at
17. vcc veg A A 5 R230 BR7 ICF4 10k gt 10k 131 18640 CN166 2 MPUD lt 15 gt 9 uUD lt 15 gt 791 1 3 MPUD T45 B UDs 14 Dame 2 68 4 MPUD lt 13 gt 7 D lt 73 gt TMP ACCEL VES is 52458 5 14 5 MPUD lt 12 gt 6 0 lt 12 gt go Der 6 MPUD lt 11 gt 5 0 lt 11 gt 4 5 7 NWPUDCTUS 4 DCTOS BOH 2 8 MPUD S 3 D lt o gt 7458 9 MPUD lt S gt 2 0 lt gt TMP BRAKE 26 50 EM 5 TMP ALARM de 186 25 V40PEN TMP NORMAL He 13 5 A CABLE HEAD SAVE SW 1563 4 WINDOW C ROD STS DISPLAY ON WEN 15640 1 18 IET 7 11 8 17 12 5 160458 DRY PUMP 751 4 13 7 150448 4 S OPTION 4 14 6 1452448 ALS 15 5 WATER E 1372 24 7 16 4 1264 17 B 11940 T8 2 DRY PUMP 2 OPTION BAKE THERMAL OPTION RP THERMA OPTION TRANS THERMA OPTION HV HEAD SET l 077 BAKE 2 7 tu
18. VR7 R59 lt 5k 3 15V ERN VRS R61 C255 A R155 4 j R256 0 1 9 14 C55 47 0 10 CN74 bs 070 6 2 2k 5V BIAS S ICWS 33k 8 100k A TP12 685 EL RENE Am 8304 5 2 R260 A DNE 190 ross neo S 224 ACG 5 1 9r ese R60 2 IN OUT FASTSIG S 1 G No 5 2 5 4 Sv BNC 2 2 3 R257 9 1uR258 11 254 R406 Sy 2 C70 ene 75V ee st ETSN A C250 R 15V os i o ICW3 9 1u C57 0 0 6V ICW7 3 ICU4 ICT3 DG201ABK R62 TONG IRIS aN 2 R403 3 Ik NG R75 DG201ABK m NC VH ICw9 5161 5 3 si 2 5 MIN 6 Dx MO 14 52 02 15 W 216364 ceg UA oou CIN DG201ABK E 1 iS ie 0 1u 3 3k 14_ 52 59 251 R79 Pa 00 s Sls 5 11_ 53 10 BAZ 6 54 D4 7 ne UT M SS oe 7 tk 0 0014 14 5 02 15 6 s4 04 15V NIG 11 53 10 S162 S gt 15v Lb qT5V 5 R83 C74 R87 ES SP 5 R67 5 66 AG v ces gt IN2 GND bon N 4664 IN
19. JP5 ALA IN SIG sS 2 CH2I NV N non Gw DI V ijj GND CED M R108 7k P 13 12 MUL 5 R109 4 7k our CF4 2105 AN OFFSET_S oy 5 10 non Gw ADS534 GW JP8 Y GND B24 R107 Te A our O acd m m SPEM yx i 15 sr ae 4 v2 15V Q a E 3 A CN72 SGVA AG 15 4 c 3 non SM pd Gw 15 WP AA 5 R91 15v AAN 6 O v 51 G2 ar DEO S OUT Q 15 7 vs 20k x2 jas MOD en AAN 2 GND v 743 DIVsiG s IN 16 bd d 4 OUT 15v CH P isv deas eie J P7 nivem 215 25 GND Gw Gw ae a 1 ce4 15v 154 lt 5 15V IN ik e GNE ANN Kis gt T 15 IN A AAA M 15 4 C E R65 Gw um 7 6 R 658 NC D3100 6P 7 jS non GW Z2 X2 10 x essem PS IN n m A voc 4 GW x1 Y2 10 A GND i5v x9 S u vee 15 lt GW 5 1 CF6 gt 15 TP11 ELCO
20. 1 CG4 100 CA 3 A R100 SGVA CN71 OUT VI DEO S Try 51 G1 GND 2 lt 62 IN DI VS G 530 GND 4 PX IN 15 50 4 e C33 c37 c39 c41 dams Cao csi 15 15 19 191 0 19 25V 6 C34 dae 5 _ 52 577 19 0 10 o 19 191 0 19 19 1u GND 25v IN 15v 7 4 4 Ne ED IN 9 oh GND 5 5 FAST_N neos ELCO 10 gt 1 N tl 1 gt 15 voi eee 15 109 A R47 AAA 100 6 3 2 ANN 3 vV SI G1 216 2 gt R48 15v A AAA 14 15 RAGA 7 dx D5 R103 A m ANN z FP NC HZ11 NAN EN non GW A Wis R45 p C R87 gt 5 gt BI 51 2 28 MSS 11 10 1 VW 10v 10v PY R88 157 Gw Ay 15 7 7 3 ANN v SI G2 ne 2 m q oof a 5 15 ALG 490 v Opt Det an m 15V 15v lt gt 9 5 Z n IN 5 lt _5 w
21. FRCS 20P EF125A 4 5200 BUM 1999 B KAGEYAMA 1999 1 Z AB Alt H 471 318391 mm 32125519531 12 40 20 10 CTL gt 14 CN153 EVCCN vee vec BRE 220 vec x vec cnisa vec 5 D 7 0 7
22. 7 C7 6 4 15 15V_BIAS TES 100v R10 R69 1 uh mE p AN 4 gt A ce ha lace a R Res i Noe Ris nie ue Rer a de curse 2 2 o au E am gt 2 2m 100u 12k VV gt VW ler 2 s as waq Z gt 2 Sarok 9 a 10 NAA TA pss nao men a NY HE bree San um 2 i EAU Euas gt 2 2m cm 1 L e 2 vec edo 2245170 S exe 3 ene I A L aay R7 azu m NN Hl EE c43 b GND B de Lo R6 e as pipe V ANN 3 ud pP aan R22 R23 15v AS Sras x Ee 5 ae W al Ris gt 2 MN e 4 POE SSS R7 O4 os 27902 ANA XeooV V X 4 cuis MN lt o9 soov R76 R78 ROT L e Toas Saak Baan lt R77 Z R79 GND_B lt e e soov soov 25 Alt a olz Ww e e e vo cia 777
23. e TRANSI er a O H or aic B d pesky C gt TL3 S 1 85kVv CX ON PUMP1 C 7 pw PE 1 Li NE n amp 7 gt AM 7 FUSE2 gt ena H NEUTRAL w p w 5 e sv Sj GND e P 4 L 2 pce TRANS2 FUSE3 S5SA T e 4 wk oO pesky M AU C ThE Ls i 8 pee suse w C Hg TL6 TL D NS 7 O O 3 2 FUSE4 SACT re io 2 O tive wes OH GROUND TERM NAL BOARD FUSES SAC T TRANS3 k g tLe C DC5kwv 1 esky ON PUMP3 2 Se T 4 e E M SN FUSE6 SAC T gt O ar B w H 2 ei 44 80 D 7771 24 9 mn aa 9 Ba w as i wes By w C 6 xe B w A E t w 9 B wr STO 3X16AWG 1 3mm 2 H UK1015 1X16AWG 1 anm Bio t B Ww 2 444 8 UL1007 1X22AWG anni HH U
24. G 31 0 gt lt T s 1 23v vco sv 4 z 5 R 32 0 gt gt 5 E 21521594 1 R71 L 5 2 sv ZZ 3 gt 20u 2 vaas csesp css csa 452 csi 5 sev 7 57 R70 4i Ay A A AY A gt ax E A A Ay A Y A Y A Y A Y A Y A Y n A n GND a jaj x b b b fae e f 4 4 4 A M Rl alhol x Joc Jor le ajolalolajola 3 Vy WV pv JV o la fo Jo 0 SZ afafofa x eas 4 Balm g N N e el o o e o DG at ALLL LLL l 6 05 cepces c64 qe2 g84 a n n
25. Riss AL eS ONO 4 4 P T Pp 5v 1952257 DIEA c72 c76 75 7 EROR EHE ee ee ip gt gt 9 9 amp amp amp ce qas cas F case coi coros cioa Lu 1 1 1 1 1 1 1 1 2 i ius fut E NR Ln 245 VRT_data lt 7 o Orr Nu cvia Bs VRT_data lt o gt Ss O D1 N Bs gt lt VRT_data 1 gt Ors MALT OMM 4 L ANTP ST EI AAE O pat VRT_data 3 gt gt 77 77 NAN e NTP gt lt VRT_data 4 gt 22 E 220 Y 55 gt lt VRT_data 5 gt A Ly VRT 6 BA D7 N 2 gt lt VRT_data 7 gt D2sBA20 b C1 55 st RA TM aiz PEE x Aoo B zz 2 N SA S 5v 565 N 2532 rer A SUM MRT OWLESARN e Vis s EET PAE Gees eee 2 AEE SS Sots neh pune Sh Ses Tao Sawdi
26. DVN3 E20180 1FF OCO OFF CBS ST 0 es 1 CB7 2 gt J Hciso 2 DEMUX 1 wa USE 534 MP 5 OEO OEF NOT USE MPUD lt 7 gt 18 vO GWAro N UA 4 14 v MM UD lt 6 gt 17 e e lt GWGre N So O22 0DO 0ODF 0095 14 aes GW2rs N Ma MPUD 4 gt 13 o4 P O22 MPUD 3 gt s 9 GWA ENY9 LU MPUD 2 7 A gt 59 _ nO MPUD lt 1 gt oil 4s GW2 MPUD O lt 2 GW1 _N Do eof MP UD lt 7 o gt WL3 N aii Ri R3 42 22 Hos 1 NAA AA Hciso A 104 AAA e AAA val NOT USE 0CC 0cF NA M MP UD lt 7 14 RFBA UD 6 gt T amp ge 1 15V MP UA lt 3 3 s CNOT USE soca socp MP UD lt 5 11 Beis gt 15 2 gt 2 T UD lt 4 gt 10 5 1 R2 e BC2_N 7 MP UD lt 3 gt OUTA 2 E D ncssa MPUD lt 2 gt ps TE W _ soco socs MPUD lt 7 gt ma 19 GM2 MP UD 1 gt 7 Gi 2 NU EN 7 14 MP
27. 0 R222 20k C73 m E10 V4 Wy 0 14 77 0 7 7 R223 0 lt 6 gt 1005 7 05 RFBA C101 0 lt 3 j D 2 12 ns 5 1 13 om R201 1d D 0 1 5 3 2 B AN NW L AGND ae VSH m 93 4 AD7628KN AD7628KN Ex8 2 336mA WEN Soes varr G13N 6 WE BK1_N 19 15 je 0 By DA 20 Pa S R 24 a 4 T coer1 15 1 58210 CN21 aie 7 3W GDEF1 5 4 614 iC X in 3 d 10 IOUTA 80 15 104 AGGA ICE2 AD75374N 2g ee gt 5 Dc 7 7 vrera 4 J lt E CN Ae 2 lt 5 CN163 lt x n gt S outa 2 R243 XU J lt ker 2 3 Wy Y 5 TP6 20209 BANK1 pu W7_N 15 veera _18 YU AAA x gt t6cjws nra 19 zum A0 G Fat 20 0 6 groa 20 XA GDEF oe j 215 VREFA 5y GDEF1 R TOUTA AGNDA DG nios KONA i sey 177 now RFBA 2i 10V 21 4107 OUTA R240 _ p 15v Sak AA R236
28. sv 7 for Hv N9 7 1 cos 1 cre PCBA7 o Lis B I VOON N s O 7 wo z jo Exe 5 n vion N aas 5 5 Wane s s 2 e2 5 AS Esa 5 5 wo s 5 D 3 y s ALs 5 wo a 2 Ee j s 3 D 3 EE Li lt a gt lt 33542 5 2 44 ca b 2 2A O ie 1254 5 D i O gt 1 iion D o Jee 1 cP8 af n 7 E 7 z Li lt gt 2 aE x 5 gt Li lt gt E Wox2 gt BA E E wo ic ze 2 Li gt Wo 0 ale 2 a a Li HY WRT 1 HVRED2 N T1631 A voc BR13 220 BR11 4 7k 1 4 lt 1 175 ES 5 25 7 gt b 7 gt lt 7 5 5 5 5 s y Eu 2 wo s e P s 5 Wo a sa aja PAL D 3 2p 2 D 2 Ls ae aok s D i 2 2 e
29. COMM ence oe POWER SUPPLY RACK xu poo a IU Oo ue CN170 9 PC RL B HIT 4 VM cie RL1 G6c E 3 Ac d is a 470u SET I id Ko NO NO t3 w w s a 2 03 22 C Q amp a 2 3 a 5 6 a 2 40 5 G Ki X x4 al aha ce 2 Y G pan 240 03 DOM Mis m i MALA eet POWER 6P POVERI w K 3o DISPLAY CONSOLE 2 NM co POKER SURP MENDES ms 2 MEIN POWER SUPPLY RACK DIST X gt 2 2000 10 24 32125378716 suis mere sa gt RE gt EMO PROTECTI ON W RING mouri 2000 10 21 Goce ees m ot WER
30. CN17 4 lt Low Mag Cancel ler Reset 4th range 150 0 3rd range M ELUCO SP ICB 2nd range Scan signal 15V 1st range 5273 B2 BOR 8 07 9 o 6 4 5 R3 lt 55 1 08 06 1 dum 1504 0 lt 4 gt 14 o4 15 3rd 539 D 3 17 18 E d PC_DEF D 2 18 92 op 19 155 gt BR 015 GRL1 Ba D gt 3 lho gale 150 DEF 25V eto 20245 14 N d 3 DEF 25U BRS i ICB3 L BS PSGND ote 0 a5 PSGND it DEF 4 13 DEF 25V ALL 5 NW am SEEN 1 D asad pau PSGND O 27 Lis 188 ND P PSGND ove Opie DEF 25U 415040 o GRLL BEG GRLI 052 1053 E 1 eo 44 14 HIF4 2 0 1 eig Tu I oi 054 055 gt mea 1s2074 ICG3 xs 5 GRL1 5 gt 1 i tees 5 2_ 5273 912 Dst as pz A CN163 5555 14 105 06 45 5 44 B12 Beas as SHS BL 2 i 9 Bari FOREN ASG D 2 8 3 ira g gt 8 es
31. 1 FI FO VDO 1 31 gt VDO1 lt 31 7 1 2 vDO10 31 47 ava 2 R lt 31 gt 47 ava 2 G lt 31 gt Vbo10 31 gt 47 ava 2 B 31 gt VbOi 30 as ias gt 3 vboro ao pave R 3O 46 in2 G 30 p 3 B 30 Divs aaa Pasan ase west EIE VETE DERDP A Rvboi z8 4s ia avs vboio za 2 R 2e alias iva B 28 vDOi 27 41i 2 gt ava R 27 22 aijaa ava 27 gt 2 2 274 26 40 gt veoro 26 a0 2 2 gt R 26 26 4022 G 26 2 a0 2a2 B 26 25 gt 2 11 vDO10 25 vpo10 lt 25 gt 11 25 vDOi0 25 L avs 11 G 25 1 25 203 x EET VDoi 24737 ava vooiocaa vboro za 7 2 sva 2 a7 sa 12
32. 1 178317 3 1067 CN42 LT1085CT 2 P 5V IN our 75V C 40 c50 C51 52 53 c56 57 c59 cei 2 664 65 mies 1A 47004 1 tu tu 1 T70 tu T 0 tu tu tu 5v 16V ICF7 TIT SE D13 z RUSE 2 1 HA178M15P 3 p 15V 3 Qo 24155 m our R6 0 16 0 2 3 1 2273 0 6 saf LL gt 15VG 51 10 1 7 014 1 178 15 _3 1596 e 5 2 H c O O lt OUT RES 16 0V 2 2 7k 0 6 22004 b Le 35 vs gt e 15V SVB 0 5 SA lt 36VG 5VG P GND VO GND V1 GND FLA GND HV GND P G RF GND IE GND 9 CR6 22P 015 FusE4 ree 68 1G O We P 36V 0 22 46V 5A 45 013 1 5 2W N gt lt Rex 2 2 2 8 1 2122004 R64 R65 thy sov CN39 16 21 a 22 914 m 4704 F S10VB 5 5w XN zB 8 2k CN39 15 I O 20 4 10k 0569 lt R73 27k CN39 14 0 19 vosc dy 018 R72 4 7K 61 18 66 5V AW 01 MK A c2 Lek ei 32 R33 G3 16 ICE4 gt 2 2 gt 2 2 Rep uPC494 8 2 amp 2 36VG 9 1 15 2 5 4 11 2 A t
33. J pi Y m DCPS CE o STO 8 3mm BLACK Y G YELLOW GREEN B W BLUE KH 8 B ies 5 Sen OC lola 23 Stace UL1815 1x1 AWG 5 5mm Ig 1 8 STAGE 3 1015 1X12AWG 3 3mm Li 1015 2 2 ULi818 1x14AKG 2 13 gt 1215 IXIGRMG 1 3mm R 9 E B CNS B ULIQ1S 1x16AKG 8mm IQ 23 a 3 g IX22AWG 32mm Rn lt FUSES 3 e a Ba 18 AS 83 STAGE 3 O O B5 FUSEI S 1 1 DCPS COL pcb vob 8 1205 22 YG 957 TRANSL cnge x PC COL CE CN161 3 R LOW VOLTAGE 9 Bl 1 R fe ENAC SES HIGH VOLTAGE C a 7020301 O 0 18 es amp R Sg C a CN211 B B B 7 8 Bad RLI GT 0240 RO CNS4 O B1 O AS 3 s l 1 i as kad 1 2030 595952 Ur en 9919 OUTER Di vasc o 4 4 RLS GEC cec aida ri I RL2 666 B DISPLAY 5226 PEE uA 31 2 36 ad o m 30 uae
34. DCPS CE Al 20181504 a B2 R STAGE 2 9 Aa STO 3X8AWG 8 3mm BLACK W WHITE Y G YELLOW GREEN BLUE B W BLUE WHITE B B4 R aa UL1015 1x10AWG 5 5mm 82 GRP AS ea UL1015 1X12AWG 3 3mm P CN5003 p UL1015 1X14AWG 2 5 B3 id g 10 a4 A Me UL1015 1X16AWG 1 3mm n 2 H UL1015 1X18AWG 0 8mm buses 5 195619 6 8 t 5 5 UL1007 1X22AWG 0 2 2 T NOISE W 3 R RH E FILTER D 7 t3 O H Ji R 85 FUSE10 3 15A T DCPS COL pcb 82 MBS 1205 22 Y G Pc TRAB coL ce nk 161 lt 5 G C 24 lt gt 8 R LOW VOLTAGE A2 45V R 82 S ov 100 t 15 R A B3t ov SEQ HIGH VOLTAGE AA PS 15v 95 2 12 102 30 __ B5 ov 5 CN98 CN211 2 85 12345 B R CN170 8 Ac70v 00000 R B W B C BZW G7L DC24V RL2 671 DC24V pusa CN91 CN92 CN94 CN93 TB4 OFZ CATO LOTO TO 0 9 1070 0 00 OUTER BAKE UE26S8E 266 ye gt 1 PC RL pcb Ss F6 F7 004 0 X O OUTER BAKE 9 210 10 F8 w 2 s 4 01 2a T Y G
35. ANN c29 iov eau Ris 1 TN ELI moron EE euo a ee gt nS 1 225 Z HA17408G ove 50 7 J i2 vee pele 7 2 D 6 Z 5 5 x 197 xxr m ps_e I 154 D 5 5 5 aos tas 22 So ede e pale as in mr D 4 2 as ooru tera bers ed s D 3 D 3 E ie D3 P 3 a come gt a3 7 5 2 2 2 Ri 7 gt 15 HD N ie 4 D2 P 2 52 Ms HORN Xe Di iz cu iE LEM es TP amp ANA 3 Boat 1 21 joe D o D o SE Y AAA aa Vra oam 7 p R102 B eun ANN 4 R20 E oR 10 4 MA e VV R19 Sic C O as AS v 920 EE ir P ANN H R104 Ris 10k 10v AR D A A cas UN o au ET E vee 1 T 3 a im nn R103 gt akg 10k A357 p 2222171 9 R2 ged gt 6 8k 5 c36 wA W i 1c13 Ne R7 x AM PE
36. KAGEYAMA 2000 10 5 COTSUKA 2000 10 12 69 37 TRANSFER P C B i JA TRDY 15 a 2 TRDY lt gt as Yu ae 2 a Al gt e 1 iz lon sas gt on a WW A2 3e 2224 ie ee Wee 2360 is ja sails as 1 Pe se a 2552 CEN BLK a 2a
37. lt peor 2 107472 ReaD eack nar a3 3 ins READ BACK i Bass RG M33 1 RRB EACK VPS2 2 Raae Wage 11 READ BACK lt vo a 333 e am READ Back NS ER VO s ras ias s 2 2a ao READ BACK VDS5 25 haee a READ BACK ori ze nese Vo 7 Wings 33 e 2 57 READ BACK VD 7 ci o 2 sai E Ase avi sa VE teca as be Raa SME a aa aa a Taata 25 arid ad Wa toma ery Tdata 1 6 584 M
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41. 6 1 6 1 MAIN UNIT MECHANICAL 6 1 6 2 MAIN WNIF STRUCTURES aia all y ab ety 6 3 6 2 1 Electron GUM ISTIS ITI CREE 6 3 6 2 2 GA TX Unit SUUCTUI TEC 6 4 6 2 3 Objective Lens Unit Structure ua t Re ete ye eet o pete 6 5 6 2 4 Specimen Goniometer Stage 1 6 6 6 2 5 Beam Blanking Unit Structure eee eee eene nnne nennen 6 7 6 2 6 EXB Coil Unit SUCUT E us tret etre dane cde e e Ee Uere e ER hawa 6 7 6 2 7 Beam Monitor Aperture Unit Structure eee eee esee eene tenente nennen 6 8 6 2 8 Movable Objective Aperture Unit 6 9 6 2 9 Secondary Electron Detector SUCHTE apeti onten EEE 6 10 Mi0lM RIA Tio 7 1 74 SYSTEM CONEIGURATI N 55 Z re Ee 7 1 7 2 SOFTWARE ua 7 2 7 3 FIEE ORGANIZATION ici tace eer E aere Pea Tc ease ae eaae 7 3 7 4 WINDOWS AND PROGRAMS I S iS Too 7 6 7 5 INSTALLATION PROCEDURES AND SETTING enne 7 19 7 6 ERROR MESSAGES tits pne eo re e e ve E ED OR
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47. 459 203 22 ti PREIS 5 m 204 2 20 Qa sO o O2 20 40 s O D Dw d k MES que m uno Suis i 5 60a 6P POWER x OOF bs DISPLAY CONSOLE Z Wee 2 1 7 Baki Ne BOLIA 1 ON PUMP POWER SUPPLY Scan besa ue CON POWER SURREY GRGUND Bani eee POWER SUPPLY RACK AS DIST UNI T B AHE 4 MOURI 2000 10 4 EMO PROTECTI 5 5200 w RING N KANE OKA 2000 10 KAGEYAMA 2000 10 321 WER 7 25318116 BE a 2 8 JE AB 12 77 42 EMO PROTECTION WRI NG 1 2 AC200v AC230v MAI N CONSOLE EMERGENCY OFF
48. 8 46 6 7 1 Error e eee RE ede n a 6 46 ADJUSTMENTS 9 1 9 1 ADJUSTMENT OVERVIEW 9 1 Part No 595 8030 iii Table of Contents 9 2 TOLERANCES ayam oe Eod tu 9 1 9 2 1 Evacuation System Specifications 9 1 9 2 2 Micro motion Specifications cccccccccccsscceesseceecceesseceececseacecsceeesaecseaceceeaeeeeaaecseaeeceeeeecsaeeeeaaeceeaeeees 9 2 9 2 3 Electronic Engineering Specifications eese enne ernst nsi 9 2 9 3 ADJUSTMENT PROCEDURES ride e E dig eee ene 9 14 9 3 1 Evacuation System Adjustment Procedures 9 14 9 3 2 Superimposer Adjustment Procedures 9 16 9 5 3 Magnet Field Cancellet 3 24 Ree det de 9 23 9 3 4 Micro adjustment Procedures u s n q S n eene enhn s n nentes erret nennen enne 9 25 9 3 5 Electronic Engineering System Adjustment Procedures eese eene 9 31 10 10 1 101 PERIODIC MAINTENANCE n teer ener rete ee POR ed Eee 10 1 10 1 1 Periodic Maintenance Items and Interval eese tnnt nente nentes 10 1 10 2 PURPOSE OF PERIODIC MAI
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52. 082 DBO RCOM LSB ose s CLOCK VEE 1c3 NR 0 0 rli 823 1 CSCNON P 2 17803 5 v lt 15 1004 C38 ICK2 CN60 Back DBC 107100 2 R29 T R31 DG201ABK 100 JP 100 PHOTO CRT 51 01 W DFE R33 CN22 2 W PCRTX S 2 02 2 s3 03 54 04 v GND 15V F BEET SV v 1524 TP19 ICH2 R DBCY ICF2 2 5 to 4 JP2 W W R34 145 190uC37 AAA 30 PCRTY S 4 T 7 u 15 ACG VIDEO S 5 VGRID S 365 ELCO 8P 6 CN61 osc ESPK 1 5 ESPKOUT P 5 d 6 7 R20 505 2 POUT N 3 PHOTO N 2991 C2V P 10 AC2V P ELCO 6P 603 ELCO 10P 1 E ICE E CNP2 5V AD7628 A 42 MPUD lt 0 gt Deo
53. 12 65 KAI RO 74 R1 R2 RS BLK ea guy 3k sw 220 100V ANN e NWN 4 4 4 NV Olast 2 2na gt 8V 05 HAL178LOS5PA l o gt GND BRB TE AMP 3P 777 DES 1c2 1 SN75372 CNBLK TON AS ay BLK 1 a 7 OF e 24 PES AQv217 AQV217 AQv21 n psv 7 ano veca veed 1 2 50V 1 4 25 1 8 12 5 777 4 V BRI 1 F139 5V pui rd 2 vo s vol C 2 2 C M m yal BR2 t Phot oMOS AQV217 200v 330 Ya vol gt x O 1 c3 F139 1 2 C 1 io H s va Bi Aii 1 GND Q4 BR2 vi 330 GND HE cS d a NEZ GND nC OL GND O GND B5 VT S GND GND GND VT FRC5 16P an ELCO CN178 15v 1 20 E Z orc 5 5200 559 2 4 BLK P C B HN K KAGEYAMA 2000 10 21 KANE OKA 2000 10721 gt s OOTSUKA 2000 10721 12 66 BLK P C B
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55. gt Las y WOATA3 N is ze pas Wo 2 gt 12 xx ri ee mes Mun yt 2 aa TAQ O 2 e s sexo N N ek Ga aki os ssp 20825 GND RESETO N GND 1 21 b Ka FRCS C34 CAD EF125A E y RE 28 E 2 gt A KANEOKA 1999 LA KAGEYAMA 1999 16 s oorsukA 1999 16 20 10 CTL P C B 3 5 12 41 Cen VIK 7 ror CTL1 vcc vcc mvi N OH LENS OHC HEAT SYNC HIGH Er 7 E lt 6 gt el 5 El lt a gt 2 el lt gt CHYEN FRCS 50
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58. JSEM Full Name SEM service Cancel Description SEM service Help Password nds Confirm Password User Cannot Change Password V Password Never Expires Account Disabled Groups Profile Dialin 3 Click on the Group icon to open Group Memberships 4 Not member of select Administrators click on Add and then click on OK Group Memberships x User SEM SEM service OK Cancel dis Help Member of Not member of Administrators Backup perators Guests Power Users Replicator Users lt Add Hemose 5 On New User click on 6 Select User New User Open the New User window and effect the following settings Username S 5200 Part No 595 8030 11 43 Troubleshooting Full Name SEM user Description SEM user Password none Confirm Password none User Must Change Password at Next Logon User Cannot Change Password N Password Never Expires Account Disabled mak MI 7 On New User click on OK 8 User Manager window click on X 11 6 9 Setting the User Environment 1l Click on the Speaker icon Place a checkmark on Mute 2 Select Start Settings Taskbar and open the Taskbar Properties window 11 44 S 5200 Field Emission Scanning Microscope Troubleshooting Serv
59. 330 4 1255 SS 150 5 x 3 3 CNIS Oc 150 p 925 E K 27 ET 8 P R252 2 _ 1 pum 2 10k 2 ag ANN SM 3 L M L M 5 1 R253 a Btu 820 77 159 8255 bones 336m65 28239 77 Glen s ck 15 18 yes ICS5 isu 1cp2 5 WE BKO N 164 19 R258 830 w L TEE aa R293 77 13 W 025 3 1 5 ES R294 Res B727 330 rcs2 14_ sa 15 3996 q S tk 35amA gt 8295 19 15U 4th 11 s3 18 6 34 D4 R295910 7 Lp 150 W 77 3rd A 3 Ut gt 15 d ICKS 89 INS 7 p 15U 2nd v gt 15V ICK4 ES cie RO 7 EXB ref 151 Yok le 5 Su gt 159 DES L 6297 DB4 1u 15U 330 150 DBS DBL B 2 24 1 Dyn Focus DBL gt po YDD DG 3 EL FINE REF DB 4 150 ar 22 9 150 120 Dyn Focus as ICNS 2 219 gt 616 N RFBA Lp 15U 4 DB3 WR 24 12 E ICKS R257 1594 V 7 7680k lu _ TP11 5 REF 77 cs DKTS 8 2407 De 512 WR 19 DX 7 Gelb 1CJ4 i 0922 14 045 CNS2 5 CN15 Alna 7
60. 1999 0326 5 1999 0326 35 PC DEF DEFAMP P C B 12 67 FOCUS C FOCUS F C ALI GN X ALI GN Y 15 x a s Y lt MAG ECO v ECO A ECO B ECO G v A B EC1_G EC2 v EC2 A EC2 B EC2 EC3 v ECA v ECA A B ECA 5 v ECS ECS5 EC5_G 6 v _ _ EC6_G EC7 v EC7 B lt _ ECS8 _ EC8_G ECO 1 7 F273 UNVI 26 25 ECO LED_D7_N gt 305 2525 Eco B LED_D6_N 0456 2 405 LED D5 N 5 LED_D4_N 9 EC LED D3 N lt LED_D2_N s J i UNVS20 LED_D1_N 2x 26 LED_DO_N 7 59 526 gt 2 ALI GN2 459 Ke 3 se CALI Q EC2 x vec 2 27
61. Term HyperT erminal File 11 Specify CA Winnt Profiles All Users Desktop as the directory in which the file is to be saved and click on Save L2 x E3 __________ 12 Hyper Terminal click on X Term HyperT erminal 218 l 13 When You are currently connected appears click on Yes 11 58 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual HyperT erminal 14 Double click on the Vrt Term icon to open the Hyper Terminal Term 15 When You need to install a modem before you can make a connection appears click on No HyperT erminal 16 On Hyper Terminal click on X Term HyperT erminal Dia 28 e 17 When You are currently connected appears click on Yes HyperT erminal Part No 595 8030 11 59 Troubleshooting 11 6 11 Installing the S 5200 Software 1 Insert the 5 5200 software CD ROM into drive 2 selecting Start Programs Windows NT Explorer open the Exploring window 3 Double click on H Setup exe to launch the Installer J Exploring 55200 H File Folder File Folder File Folder File Folder 14KB Application 9 Network Neighborhood Recycle Bin Service Pack 4 4 When Welcome to the EF PC SEM installation program
62. 5 31 Power Supply Unit Table 5 3 C DCPS PCB Use Check Terminal Display LED Fuse EVAC SEQ Analog 15V 1A 1 LD1 F1 F9 15VAA TP3 LD2 F2 F10 ROM Write 12V 1A TP4 LD3 F3 F11 STAGE Logic 5V 2A TP6 LD4 F4 F12 Analog 15V 1 6A TP8 LD5 F5 F13 Analog 15V 1 6A TP10 LD6 F6 F14 24V 1 4A TP11 LD7 F7 F15 24V 1 4A TP13 LD8 F8 F16 5 3 2 Display Unit Table 5 4 DCPS PCB Use Display LED Fuse SGVA PHOTO Scan Gen Photo Def 15V 3A LD1 F1 F10 15V 3A LD2 F2 F11 DEF LENS Col 25V 3 5A LD3 F3 25V 3 5A LD4 F4 SGVA Opt VA Video Amp 15V 2A LD5 F5 F12 15V 2A LD6 F6 F13 DEF LENS Obj 65V 5A LD10 F17 PHOTO 1 2 Photo bias PMHV 15V 1 5A LD7 F7 F14 PMHV Col electrode Bias 18V 1A LD8 F8 18V 1A LD9 F9 MSEM200 Ethernet 12V 3A LD17 F16 F25 FAN Fan IMP N Canceller 15V 0 5A LD18 F26 F28 15V 0 5A LD19 F27 F29 DEF LENS Cond 25V 2 8A LD11 F18 DEF LENS Alignment 15V 3 5A LD12 F19 F23 15V 3 5A LD13 F20 F24 DEF LENS Image shift 30V 1 4A LD14 F21 30V 1 4A LD15 F22 SGVA Interface 5V 1A LD16 15 DEF LENS BLK Blanking 110V 0 2A LD20 F30 BLK Logic for BLK 8V 0 5A LD21 1 Part No 595 8030 5 7 Electric Theory 5 4 Lens System 5 4 1 Functional Descriptions Table 5 5 Controller Name Maximum value Bank Address Bit Root HV reference 10V 0 E20201 03 12 1 COND 1 4A 0 E20205 07 12 274 COND Coarse 1 4 0 E20
63. Part Number Part Name Location 4821153 Fuse LM03 Main unit COL CN 2 J821154 Fuse LM05 Display DCPS F28 F29 F32 3 J821155 Fuse LM10 Main unit PC RL F9 1 J821157 Fuse LM20 Display DEF LENS F1 F2 DCPS 13 Main unit DEF AMP F1 F2 F3 F4 J821158 Fuse LM32 Display DCPS Main unit EVAC F1 10 J821159 Fuse LM50 Display DCPS 8 J821032 Fuse ML10A Display DCPS F17 1 J821042 Fuse NGU N15A Display ACPS 1 J821334 Time lag fuse 218001 Main unit ACPS PC LC 7 J821335 Time lag fuse 218002 Main unit PC RL 2 J821336 Time lag fuse 2183 15 Display ACPS Main unit ACPS 4 J821349 Time lag fuse 218005 Display ACPS Main unit ACPS PC RL 10 J821351 Time lag fuse 218008 Display DEF LENS 1 J821352 Time lag fuse 218010 Main unit PC RL 2 J853101 Pilot lamp 8 V 0 15 A IP power 1 L456759 O ring AS568 110FPM Specimen holder L456801 O ring AS568 211FPM Specimen stage L456802 O ring AS568 212FPM Specimen stage Part No 595 8030 10 15 Maintenance Part Number Part Name Location Q ty L456804 O ring AS568 214FPM Specimen stage L456765 O ring AS568 116FPM Objective lens movable aperture 585 4083 Helicoflex H15014 Specimen stage Helicoflex H150 EDX port Helicoflex H150 BSE port Helicoflex H150 Extra 1 port 385 8819 Helicoflex H150016 Faraday cup port 10 5 2 Recommended Maintenance Parts List The recommended maintenance parts list is
64. HAVE P C DCPS DEF LENS UU Ci ACPS UNIT PERSONAL COMPUTER TRANSFER Figure 5 3 Display Unit 5 2 AC Power Wiring Diagrams and Fuses 5 2 1 Power Supply Unit Table 5 1 Fuses List only AC line Unit Fuse No Type Manufacturer Specifications Approval AC Dist F3 F4 218 001 Little Fuse 250V AC 1A UL IEC SEMKO F5 F6 218 001 Little Fuse 250V UL IEC SEMKO F9 10 218 3 15 Little Fuse 250V AC 3 15A UL IEC SEMKO PC RL F1 218 001 Little Fuse 250V UL IEC SEMKO F5 218 005 Little Fuse 250V AC 5A UL IEC SEMKO F6 F7 218 010 Little Fuse 250V AC 10A UL IEC SEMKO IP PS F1 F6 218 001 Little Fuse 250V AC 5A UL IEC SEMKO Bake F1 SM8 Nagasawa Denki 125V AC 8A UL CSA 22 F9 218 3 15 Little Fuse 250V AC 3 15A UL IEC SEMKO Part No 595 8030 vs
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68. YES X axis encoder cable broken Side LED LD202 red on Bad controller Repair and replace encoder cable Y axis encoder Correctly plug in connector securely encoder connector inserted CN6504 X axis encoder cable correctly connected NO Bad encoder Replace actuator Monitor cable between encoder connectors CN6504 15 1 15 2 with oscilloscope X axis encoder signal output Y axis encoder cable broken Repair or replace encoder cable Bad controller Y axis encoder NO cable securely connected Bad encoder Replace actuator e Monitor cable between encoder connectors CN6504 15 4 15 5 with oscilloscope Y axis encoder signal output Bad controller Part No 595 8030 11 11 Troubleshooting Actuator motor won t stop at origin On return to origin actuator motor overshoots YES NO NO Correctly plug in origin sensor connector CN6504 X axis origin sensor securely connected X axis actuator won t stop X axis sensor signal input YES Bad controller Side LED LD3 YES origin Repair and replace red on sensor cable broken cable Y axis actuator Side LED LD203 X axis origin NO won t stop red on sensor cable securely
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70. Anode heater 1st anode 2nd anode Cathode tip Beam monitor C1 lens Beam alignment coils Z Airlock x Figure 6 3 Electron Gun Configuration Cross sectional Diagram Part No 595 8030 6 3 Mechanical Configuration 6 2 2 C2 Lens Unit Structure This unit consists of a beam blanking coil a movable objective aperture a second condenser lens a stigmator aberration corrected coil and a stigma alignment coil The second condenser lens can be moved horizontally through the use of adjustment screws for an axial and electro optical alignment Figure 6 4 shows a configuration cross sectional diagram of the C2 lens unit Astigmatism correction C2 lens coil Stigma alignment coil BSE converter electrode Figure 6 4 C2 Lens Unit Configuration Cross sectional Diagram S 5200 Field Emission Scanning Electron Microscope Mechanical Configuration Service Manual 6 2 3 Objective Lens Unit Structure The objective lens unit consists of a deflection coil an image shift coil an ExB coil an objective lens pole piece and an objective lens coil A block type pole piece is used in the objective lens The objective lens unit has a structure that allows cooling water to flow in order to prevent heat generation around the objective lens coil Figure 6 5 shows a configuration cross sectional diagram of the objective lens unit Deflection coil k TR NI Image shifting coil IN N Ny ExB coil
71. SET KOS lt BEE EZ BEE Li agi sec LLLI x Figure 8 15 Displaying Uptime Status If the Etc table contains data with a date newer than the data loaded into uptime status data created in the WorkCondition table in the Ras mdb file the system reads the new data into the uptime status data by adding them to the cumulative time and displays them as illustrated in Figure 8 15 Part No 595 8030 8 23 System Operation e PC SEM and StageX T contain the cumulative hours of SEM uptime from the time SEM is started until it is closed Tip contains the cumulative hours of HV from the time the HV is turned on until it is turned off PC SEM Dry Pump TMP Pil Pi2 Pe PC PC Battery PC HD and Battery display the elapsed time from the time these items were replaced since the Exchange date in Figure 8 15 until the present time e V Valve is count of the number of times the HV has been turned on Lock in the lower right portion of the screen indicates the number of times the SEM exe program has ended aborted without a SEMOFF e HV kicked off is a count of the number of times in which HV ON was issued without a corresponding HV OFF during the execution of SEM exe If there are no uptime status data but some data exist in the Etc table the system creates and displays new uptime status data Even if a Ras mdb file does not exis
72. TMP Objective lens TMP N Table 4 1 Main Unit Structure Cross Sectional View Part No 595 8030 4 1 Hardware Evacuation System Standard Evacuation System The Standard Evacuation System is shown in Figure 4 2 60 l s 20 1 5 20 l s 623 OBJ aperture is O SE detector 2 Option X SE detector 1 LV 4 MV 1 Pi 2 QS N2 gas LV 1 leak port 300 l s Dry Pump ESDP12 Figure 4 2 Standard Evacuation System Diagram 4 2 S 5200 Field Emission Scanning Electron Microscope Hardware Service Manual Tandem Evacuation System Option Tandem Evacuation System is shown in Figure 4 3 60 l s 20 1 5 20 l s 623 OBJ aperture ____ detector 2 Option SE detector 1 Pe Pi 2 Contaminatio gas trap Option leak port LV 1 4 6 V 5 Buffer tank 1 1 ESDP12 TMP 50 1 5 Option Figure 4 3 Tandem Evacuation System Diagram Part No 595 8030 4 3 Hardware 4 1 2 Display Unit The Display Unit Block Diagram is shown in Figure 4 4 Control Panel Span IMAGE MEMORY VRT 250L PHOTO CRT Monitor DEF LENS Beam monitor Electron gun amplifier Deflection coil Obje
73. 120V AL 15 i Beam scan 9007 14 bit OBJ aperture Aperture heater C2 lens Stigma coil 12 bit i 1000T Coarse 12 bit Fine 12 bit i Corrective EXB electrode 7P hermetic Stigma AL 12 bit Max X Y 20V 40V SE detector 2 BSE converting electrode SE 2 signal Mix signal Scan U X Y 12 bit IS U AL2 12 bit i Mix ratio variable Scan L LM scan X Y 12 bit i YAG GW Robinson i SE 1 signal IS L X Y 12 bit i zi ExB mesh electrode Ve Vbias ExB central electrode Vbias 7p hermetic ExB facing electrode Ve Vbias EXB coil 1 X Y 8 bit 7Phermetic i 2nd pull up electrode Vse2 _ BNC 0 50V 1st pull up electrode Vse1 lens uu BNC 150 0 100V cy 1550 T Coarse 16 bit Fine 12 bit Specimen Figure 6 2 Electron Optic System Configuration Diagram 6 2 S 5200 Field Emission Scanning Electron Microscope Mechanical Configuration Service Manual 6 2 Main Unit Structures 6 2 1 Electron Gun Structure The electron gun consists of a cathode tip a first anode a second anode a beam monitor aperture a first condenser lens and a beam alignment coil The cathode tip and the first condenser lens can be moved horizontally through the use of adjustment screws for an axial and electro optical alignment Figure 6 3 shows a configuration cross sectional diagram of the electron gun
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76. 98581 LE N CNB 3 w A30 A29 A28 27 26 SW27 N CNB 3 25 59 SW26 N p gt awe CNB 3 SW25 N 5 17 APERTURE 259 i X 52 DL1 3 QS SW24 N fel vec MODE LEDC7 N 816 cL 9N030 830 SW30 N CNB 3 LEDCG N 815 10 R16 3 LEDCS N 814 9 1 LEDC4 N 813 8 8 5 10 B LEDEO N CNB 3 LEDC3 N 812 nb 1 6 SW23 N EE EEDEAZN 810 zt LI E LEDCO N 89 5 6 SELECT fly or 5 SW22 N 5 18 3 SW21 N m CNB 3 Hs SELECT o oN CN119 o 84 9 5451 CNB 3 DES R17 3 1 AS N GL 9N03D EVAC 5020 vi S ciso LEDE1 N CNB 3 5 2 LEDB6 N 15 10 POWER oZ SAN LL LEDBS N 14 an 1 ELCO 2P LEDBA N 15 8 LEDB3 N 315 77 LEDB2 N A E LEDBI N JA10 zr swit CN121 3 LEDBO N s 7155 29 3TK106D IP Sw32 3 o ao c19 N CNB 3 B19 DL3 3 swi2 g O LEDE2 B HE 2 o T
77. lamp should be lit normally The AUTO OPEN side lamp should flash only when the S C AIR LOCK VALVE switch is on the Closed side and the specimen holder is inserted into the specimen chamber When the specimen holder is inserted into the specimen chamber setting the EVAC AIR switch to the AIR position should never cause the specimen exchange chamber to leak The specimen exchange chamber should AIR leak only when the specimen holder is withdrawn and is in the specimen exchange position 9 3 2 Superimposer Adjustment Procedures Preliminary Steps Jumper pins Short J7 Open J3 e Confirming PC settings Open Properties on the screen Confirm that the settings are at 1024 768 75Hz True Color Verify that the power management function is disabled 9 16 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Chroma Key Adjustment 1 Startthe SEM as SYSTEM SEM 2 Rotate the reference voltage adjustment VR2 for the chroma key comparator in the image display area A SEM image appears in the image display area Turning the VR2 right and left causes a noise to appear Set the VR at an intermediate value If a SEM image fails to appear open the Adjustment window for the Superimposer and provisionally set the chroma key to R 80 G 10 B 80 Figure 9 2 3 When values higher or lower than the default value are entered a noise appears For chroma key settings enter an in
78. 1 P 1 124 1 1 Bitmap 7527755555555555555 x4 Bitmap data 1 1 J8 39 OCEANS us LUT Look Up Table Display Memory B lt 640x aboades Input data processing Option n gt it 7 2 1 13 RGB Analog output mj Lt 4 NOPI 100 NOPD100 Em 2 24 color i 2 ro s Input Data Dosplay Data RS SEL Processing Board processing Board T Option Standard Ibit Line Profile data Bitmap data 29 IMAGE MEMORY BLOCK DIAGRAM R16
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83. 3 1 12 Items Needed at Installation Site The items needed at the installation site are shown in Table 3 4 Table 3 4 Items Needed at Installation Site No Item Specification Notes 1 Power Single phase 100V 10V Crimp terminal Capacity 0 52 A onmes Ground No 3 type single ground B 5 3 mm dia 2 Water flow 1 1 5 l min e ee eee If the cooling water circulator is Water temperature 10 20 used use a Re 3 8 tapered female Faucet 3 8 x 1 Tapered female screw screw for the drain port 3 Dry pump Evacuation speed 12 5 m h or more It is recommended that ESDP12 Ultimate pressure 1 6 Pa or more made by Edwards Co be used 4 N gt gas pressure 10 20 kPa The filter decompression valve when using N gas leak and proper ventilation are needed Pipe connection plug Rc 1 4x 1 Tapered male screw 5 The filter decompression valve Compressed air pressure Pipe connection plug 350 500 kPa Rc 1 4 x 1 Tapered male screw pressure meter and pressure protection reducing pressure are needed NOTE Item No 5 is required for the CE and 2 units NOTE The autotransformer is assembled into the power unit for CE and S2 Units 3 8 S 5200 Field Emission Scanning Electron Microscope Installation Service Manual 3 2 Unpacking 3 2 4 Unpacking 1 Remove the top transport wooden frame 1 ea and side wooden frames 4 ea 2 Remove
84. HV pac NN 12 bit 5 Last 1294 05 ISPS 01 E 1st COND 2nd COND 12 bits Fine 2 4 Figure 5 4 Part No 595 8030 5 9 Electric Theory 4 HV Image Shift Lower XY d 42bit Image Shift Io X4 X5 x6 Lpper XY GB4 0 398 Aperture Align X Y Stigmator XY HOV Stigmator XY Stig XY Beam Align X Y HV DAC Gbit ICT5 S Alignment Figure 5 5 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual 10V DAC EXB 3 12bit 64 65 S tig DAC X 12bit IC U4 S tig Stigma lign 0559 EXB3 X Stigma Align XX YX 10V DAE EXB3 12bit ICG4 G5 S tig ICU4 5 tig Stigma A lign IC V5 5 9 EXB3 Y Stigma Align YY DAC 12bit ICK4K5 10V DAC 8bit ICS 4 55 153 023 EXB1 B X Y Q26 Figure 5 6 Part No 595 8030 5 11 Electric Theory 10V DAC 12bit 4 5 Reference ICK5 16bit IC 4K5 08 0 BJ Coarse 0 BJ Fine 10V ICK4 K5 10V DAC DEF Upper Offset 8bit ICE1 E2 E6 X Y D DEF Upper X Y 4 5 DAC ICB4 B5 B6 8bit X DEF Lower X Y DEF Lower Y DAC n 8bit DEF Upper Offset 5 Aat Figure 5 7 5 12 S 5200 Field Emission Scanning Electron Microscope Service Manual 5 5 ECPU247 and Image Memory System 5 5 1 ECPU247 Bloc
85. Hyper terminal Hyper terminal Hyperterminal HyperT erminal a B z 5 Assign 029 to Where area code in Location Information Click on Close Part No 595 8030 11 55 Troubleshooting Location Information Please provide information about your current location so that your calls can be dialed correctly What country region are you in now United States of America What area or city code are you in now 029 If you dial a number to access an outside line what is it The phone system at this location uses Tone dialing Pulse dialing HyperT erminal You need to install modem before you can make a connection Would you like to do this now j 7 When Name is requested type in Vrt Term and click on OK Connection Description 24 x New Connection Enter a name and choose an icon for the connection Name Term Cancel 11 56 5 5200 Field Emission Scanning Microscope Service Manual 8 Assign COMI to Connect using Click on OK Connect To 9 COM1Properties as follows and click on OK Part No 595 8030 Bit per second 9600 Data bit 8 Parity None Stop bits 1 Flow control Hardware COM1 Properties Troubleshooting 11 57 Troubleshooting 10 Select File Save As
86. KAGEYAMA 1999 83 25 a DEF Z ENS P C A N KANEOKA 1999 83 25 at W887 LN z A BISE 371 25218281 5 1999 e3 26 9 35 1690 5 12 37 19 DEF LENS 4 5 R251
87. N SF413B e I 6 F3 F6 G3 CAD SF413B 57GE 40240 um S 5200 zJ zy 2 1 BL 7 4 55 2000 10 21 OPT VA P C B 3A N KANE OKA 2000 10 21 7 JL N 2000 10 21 12 74 39 OPT VA P C B 3 3 KAI RO CY gt PMHV1 O 850V Co cs 600v 600v AN TF2 ue co m s 5 asau OK PM J 777 pe gt R10 11 GND VA AN PM 2 R11 10 2 4 10k R13 lt L gt PM R7 Ce s 17994 gt fi
88. Part No 595 8030 8 5 System Operation Tandem Configuration Flowchart Starting Operation Cooling Water MAIN POWER OPEN SW POWER SW YES Normal AIR COMP Dry Pump NO MDP ON Normal CLOSE LV1 OPEN 4 V3 OPEN LV1 OPEN SW status Keep YES lt ES OLDER LOCK V3 OPEN User operation YES Control OLDER LOCK V3 V4 OPEN lt gt Decision SW status Keep NORMAL OPERATION 8 6 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual Normal Operation DISPLAY WATER VALVE OPEN BUZZER ON AIR LOCK VALVE SW gt Stop Operation HOLDER IN S E C AUTO STOP TIME 3 30set EVAC POWER SW gt gt OFF NO TMP STOP TIME DOWN STOP TIME 0 00 YES ALL VALVE CLOSE SW status Keep YES OFF Dry Pump OFF AIR COMP OFF TMP MAIN POWER OFF User Operation MAIN POWER SW gt gt OFF COOLING WATER CLOSE Part No 595 8030 8 7 Control JUL Decision System Operation Specimen Removing Operation Specimen Inserting Operation HV OFF HOLDER IN SEC SEC SW gt HOLDER IN SEC SEC SW BUZZER ON YES BUZZER ON YES LV1 OPEN SEC AIR REMOVE HOLDER NO MDP YES Normal YE YES V4 OPEN HOLDER FREE
89. REE 12 78 42 EMO PROTECTI W RI NG S2 TYPE 2 2 TRANSL Pc corte ce gt R Acioov 205 20 209 07070 1 B our ade rio 2A 0D ql Hoears3eer PO O gt O MPU 2act 2 2 TRAP HEATER UD lt 15 M 24V gt ILL 200 Ba J Option MPUD IS 2 B B 2 gt MPUD II 2 Cem O O MP UD 10 g 5 MP UD 9 gt S BAKE MP UD 8 y ES e J 2 za RLA 71 PC RL POWER SUPPLY RACK AC DIST UNIT means MP UD 14 gt ae p 16 MPUD IS E Tae MP UD 12 gt D
90. TCP IP Setup 12 When the Windows Setup window appears type in C 1386 and click on Continue Windows NT Setup C i386 13 the Network window click on Close 14 When Microsoft TCP IP Properties appears enter the following information and then click on OK IP Address 172 18 49 223 Subnet Mask 255 255 255 0 The other settings remain unchanged Part No 595 8030 11 39 Troubleshooting Microsoft TCP IP Properties NS WINS Address Routing 1 Intel PRO 100 Management Adapter with Alert on LAN 172 18 49 223 255 255 255 15 When You must shut down and restart your computer appears click on Yes the system restarts Network Settings Change 11 40 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 6 7 Installing the Service Pack 1 When Begin Logon appears press the Ctrl Alt Del keys 2 Enter the user name Administrator the password none and click on OK 3 On Desktop double click on the Service Pack4 icon 5 When Welcome to Windows NT 4 0 Service Pack 4 Setup appears checkmark Accept the license Agreement uncheck Backup files necessary to uninstall and click on Install The installation process begins Windows NT Service Pack Setup 6 When Windows 4 0 Service Pack 4 installation is compl
91. gt lt a 5 4k 0 lt n 16 58 lt MRT EON enable 1 q gt 2 3 TT Serre 5 vee 9 cowr powE as Im Ub Oc E us NSTATUS 1 DATA x i 1 gt 2 9 gt 5 n 1222 4 NS aaa ay T gt vorz o z 0 2 147 0 gt PAN A ASAT in e mlo lalo hio mno x a AAAA LILLG viVivivivivivivivivivivivivivv Boa PIAS lolo o VIVIVIVIY d fo fy 9000 90000 0000 51010100 6000000000000 600 gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt gt el ale a OO Qr erenodsnnngdOunOvzdpnennnaggrensnang a ee ee eee 090509200500 gt 880008466 109 auc EELEE EEE Oe pul 252 gt gt s lt 555255515 z 71 vboz iobis 55 i cas 201 VDO2 11 12 lt RAS 201 VDO2 12 IE aed MAS 13 gt jeva ma 9022 MAS 2 VDO2 14 15 iid sss MWR 201 verz i 2 VDI2 0 7 vus ram
92. nbd diis dv ech Bede 1 10 1 2 1 Standard Specifications e ee Se a ee 1 10 1 2 2 Standard Configuration Q G 1 13 1 2 3 Main Custom Accessories Option 1 13 1 3 LAYOUT 1 15 1 3 1 1 15 1 3 2 SO tW Fe i oe Ae etr ee Pee tere na 1 17 1 4 OUTER APPEARANCE Sees cte e a t ert eret os eaa rele ibd eaa Pai ea e ec e ke S 1 18 2 MH 2 1 2 1 GENERAL PRECAUTIONS oe fei eet dire reda ee ree to re ede te te e tained RN reda 2 1 2 2 WARNING Serei ira a eE e 2 1 2 2 1 Type of 2 1 2 2 2 Warning Labels ee ee te 2 3 2 3 ELECTRICS YSTI Mayn M 2 6 2 3 1 BrECOROT oo 2 6 2 3 2 Safety Circuit Function au cyte 2 6 2 3 3 Hazardous Voltages and Maintenance 2 12 2 4 POTENTIAL MECHANICAL 5 7 2 16 2 5 EARTHOWAKE PROTECTION 1 astaq Hoe ADD eee 2 16 2 5 1 Ceriter of Gravity Locations sa eee OR eco AS 2 17 2 5 2 Earihquake reete t E iet tec
93. vbOrocza 37 12 vDoi 23 3e 13 vooioc2a veoro za avi 23 23 23 G 23 2 2 gt 2 225 pave R22 22 35 sas 1a G 22 22 B 22 21 2 5 vbore zi ie Vboioczi 33 sas ie lt 215 16 B 21 Rvboi z07322 sa av a7 20 17 R 20 32 iz s ava 17 19 0 19 R 19 30 402 G i9 vex ana 19 B lt 194 x VDOT 18 S29 402 Vpoio 1s Vvooio is8 29 402 20 R 18 Vooio i8 29 aaz 3 vooio 29 4A2 20 B 183 5 VDOL 17 gt 7 veor0 17 ooro 27 an 22 R 17 27 22 G 17 veoro 27 22 lt 173 E VDOL 16 S26 404 aaa ava 23 REO vooro re 23 GX16 vooro ana ava 2a B C16 zu Y sz MV ago of gt gt ae oe nu je nu ga un af 4 Oldie m sine ala amp y amp coe 2304 2304 00 y VV yv y za td oc 2 2424 oc 2 oc asf 2 2404 oe 25 8 2 G ET 0000000000 4 lt lt ano
94. 12 Set SEM Inf button This button creates a SemSetng REG file from the file created in Step 11 above Double clicking on this file causes the registry to be overwritten by the contents stored in the file TMP This button which is used in Steps 2 and 10 above provides TMP settings for the system Dry Pump This button which is used in Step 10 above provides Dry Pump settings for the system Text box Displays the processing status and fault indicating messages Close button This button closes the Ras function 7 18 5 5200 Field Emission Scanning Electron Microscope Software Service Manual 7 5 Installation Procedures and Setting Your PC Installing an application program Preliminaries e Close PC SEM Shut down any other programs that are currently running Launch Region from the Control Panel Make sure that the Region specification indicates the Japanese language Installation Load the S 5200 installation CD ROM on the CD ROM drive On the Taskbar select Start and Run Type E Setup exe and click on the OK button 271 BEL TEIT Figure 7 18 a 274 BEL CRT Figure 7 18 b If the drive letter for your CD ROM drive is other than E specify that drive letter After the Installer has checked the available disk space the following screen appears Part No 595 8030 7 19 Software 4X SEM tob Figure 7 19 Click on the OK button
95. 42 ned UF 2035EW 15P NC 961 4 MBW1203 22 79 roo SO 54 1 K K X 7 SW1 5 NC 3 4 w w w w 8 F1 F9 F2 FILTER 1AQ0 IIS 3 CN97 1215 22 AIR COMP 0 amp 1 2 5 4 506 1 20 4 5 01 02 Os s IELH 1 11 62 5A 5o 4 w CN108 h 95109 Yo 5 ewsso 24 8 B 8 B B Y 6 E V FUSE11 E z K w K w DCPS lt gt O 24V X 25 B B W 2 EWS50 5 5 UF 1005 Syse K FUSES TACT K 10 20s P fil 2X 30 4A O aia do mm m 6 1 PE EN B W K FUSE6 1A T Y G 12 CONT2 xe 5 25 DC24V IELH 1 11 62 5A B W 3o Bo w 14 OPTION kl FUSE12 Yo B B 2A 1 B Y G 15 CN169 B B 1 5 10 UF1005 60A 6P POWER 5 K 1 K 3 5 K 1308 EVAC SEQ 100 W 2 w gt w w 4 6 w w 2 p B CONT 5 ELB 850C 508 SC 2SN DC24V B B SNB Current BW G7L DC24V DRY PUMP K K 1 GROUND TERMINAL PIECE w X O DRY PUMP an TELH 1 11 62 104 CAD ERR RE 2 s amp 5 E E K 5 5200 A A MOURI 2000 10 21 DIST UNIT N KANEOKA 2000 10 21 st las 2 JL 7 EU R EE A eem Hum 132125378101 lt KAGEYAMA 2000 10 21 5
96. 45 699 LED95 N L 1 START oS sw vec 22 2 5 12 R15 2 Yo 47 5 amp e 70 LED94 N aso LED7872 S R5 2 SCHIGH irs c VHM 1 29 LED MN R6 2 SCLOW A28 LED73 2 4 ON R7 2 SCAIR JaSt STOP lt SW21 27 LED72 2 e 550 88 2 lt 2 6 SW11 N R18 2 No A26 LED71 2 d SMA R9 2 SECLOW m m LED93 N 25 LED70 2 M 325 R10 2 SECAIR veca 2 1 5022 5 10 vec 30 LED92 N A9 8 065 2 R11 2 SCCLOSE 5 4 7 3 R12 2 SCAUTO Mat E 5 07 so SELECT Clo 815 5 06 D A5 3 814 SWOS N At AS Cy 1 SW5 vi 259 3 1060 ot 81305 5 04 NES 1 5 6 SWO3 N R16 2 47 voce L 87 091 ns VHM 1 O swa 4 sw4 5 1 2 5 7 SWO2 N R17 2 5 o Sw4 7 47 ane veca H L 5 LED90 N F 1 54 9 sc SWS sw4 10 CHAMBER C ee EVAG LOCK LS SWOTEN sw4 11 SEC swa 12 SWOO N sw4 c2 BO swa c3 Oh sw4 c4 GD1A096P100C CAD RE 2 5 5200 BS EET AN k KAWAMURA 1999 03 08 2 P C B 1899 03 08 st las 7 JL 79 AB A eee as A ERDRUTPR 471 25378384 xa 28 K KAGEYAMA 1999 03 08 1 12 13 7 EVACPNL2
97. 7 Select the Error detection disk save and Image file check options and press Complete 8 When requested insert Drive Image 4 0 setup disk 1 of 3 into the floppy disk drive and press OK The English version will be 1 of 2 9 When requested insert Drive Image 4 0 setup disk 2 of 3 into the floppy disk drive and press OK to create the restore CD The English version will be 2 of 2 10 After the restore CD check is completed a completion message will appear Remove the CD when requested If an error occurs contact the person in charge 5 Check the restore CD 1 Insert the restore CD into the CD ROM drive and restart the PC by pressing Alt Cirl Del 2 When the Drive Image 4 0 menu appears press Restore 3 Press the Reference button for an image file selection and select CD ROM drive as the drive selection 4 When S52 PQI appears under File click to select and press OK 5 Select C for disk 1 for the selection of the targeted partition or empty range and press Next 6 The confirmation message shown below appears The selected drive is not empty The disk image can be restored only in the current location Before the image is restored the partition is removed Warning The deletion of the partition deletes all data from the partition 7 Select High Speed for the Disk Write mode When the message ready to restore appears press Complete The process of restoring appears
98. 92 6 I Bas VSE1 POL GDEF 1 5 8180 gt 0215 AAS E2024B WI7 N 11 d 5 PMHU GDEF2 00 HIF4 268 CL ri 15U 4 L 30 0 T CN33 GRLL m lt GND gt BS BLV I Al oy N 1 eg EN ALV 2 250 __e 820 Lh 20 239 FRCS 20 1504 0 150 154 cise cise cisa 162 cis4 cise 178 172 174 oa lu lu tu 1u lu iu 10 lu i lu lu 1u lu O e 185 856 250 ciss ciel cisa cips 169 173 eis LENS 150 8 iu lu iu 8 iu tu 1u lu 4 tu lu tu 1u amp lU iu h 185 eo H 4 25 Bo R319 HS1 1 18k 1594 o THERMO SW 1 Aqves2 Y 6 OHcHS 1 HS1 2 T 2 lt Ls CPU READ IS 30V q 1756 178 cisa cise HEAT SINK DZ L PS gt 5 2 1u lu lu lu BBO NORMAL CLOSE 3 Zz C187 Is tr 22 le GND gt O c179 c181 1 HS2 1 amp iu u amp iu Jci THERMO SW H Z mao 2 HS2 2 5 3 5 5 15 30 0 4 HIF4 22 CNS1 USING NO R319 2 C159 C188 ELUCO 2P as BRA RE Ac 5 5200 gt as HH E A T HH A 14
99. DIST UNIT 1 2 12 3 TRANS2 CN210 CN6501
100. I Memory P controller SEM Image Transfer CN60 pea Selector Video SW CN157 RGB s s GUI Video a Video gt 17 gt Comparator CN25 DAC if ids IMP N p c b New Imposer s Main Structure Previous Imposer Table Figure 5 12 New Imposer Block Diasram 5 11 Monitor New Imposer NSEM100 PCB imposer 271 4220 NSEM200 PCB imposer 271 5200 NMEM100 PCB imposer 271 3950 NMEM200 PCB imposer 271 5203 IMP PCB imposer 537 5800 IMP N PCB imposer 537 5851 Transfer PCB imposer 537 5153 Video Card 537 7016 PC SW PCB imposer 537 5139 m CANCEL PCB imposer 537 5840 Be included in IMP N Others 5 20 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual Adjustments Preliminaries Jumper pins Short J7 Open J3 Variable resistor VRI Turn it fully counterclockwise IC N11 7 Output approximately 2 7 V Adjust the other VRs e Confirming PC settings Open Properties on the screen Verify that the frequency is at 1024 768 75 Hz Make sure that the power management function is disabled Chroma Key Adjustment 1 Start the SEM using SYSTEM SEM 2 Turn the reference voltage tuning knob VR2 for the chroma key detection comparator in the screen display area to bring up a SEM image in the image display area Turning the VR2 right and left causes a
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102. TRANSFER P C B 1 2 2 2 WIRING DIAGRAM FOR OPTION DETECTOR OPT VA P C B 1 3 3 3 OPT PMHV P C B UPPER DETECTOR HEAD AMP P C B EMO PROTECTION WIRING 1 2 2 2 SAFETY PROTECTION WIRING TEMP PROTECTION WIRING 12 1 P N 537 5148 537 5824 537 5865 537 5817 537 5861 537 5862 537 5863 537 5866 537 5864 566 5541 589 5514 537 5144 537 5857 537 5822 537 5821 537 5820 537 5873 537 5858 537 5871 537 5809 537 5810 537 5878 537 5879 537 5851 589 5504 537 5149 271 3736 271 5602 537 5875 537 5877 537 5868 537 5825 537 5856 537 5859 537 5850 537 5854 537 8715 537 5834 537 5835 566 5541 537 8716 537 8717 537 8718 Note OPTION OPTION OPTION OPTION OPTION OPTION OPTION OPTION Page 12 2 12 3 4 12 5 12 6 12 7 11 12 12 12 13 12 14 12 15 12 16 17 12 18 12 19 12 20 12 21 22 12 23 24 12 25 26 12 27 12 28 33 12 34 38 12 39 43 12 44 12 45 12 46 12 47 48 12 49 57 12 58 12 59 12 60 12 61 12 62 12 63 12 64 12 65 12 66 12 67 12 68 12 69 70 12 71 12 72 74 12 75 12 76 12 77 78 12 79 12 80 DISPLAY EO CONT sw sw 1 2 DEF IS STG STO AL THERMISTOR FLOW SW ExB 1 B ExB 2 B umar va sens suus i sms ECPU247 VRT 250L 2 Option Video Ae eve AC100V IN 2j pac oist 12 2 1 BLOCK DIAGRAM 0181566 CN210 apes
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104. our PSE 4 RDATAS N BB 4 13 p4 Qali2 MPUDCT2 Talpe HRD 4 HRD lt 45 9 gt 8 B4 RDATAA N m 7 8105 ase MPUD lt 11 alos 0518 HRD 3 171 2 B9 6 7 52 9216 MPUD lt 10 gt 7102 216 HRD lt 2 gt 4 4 4 10 9 4101 ail MPUD 9 ajoi aE HRD lt 1 gt 106 8 3 00 02 MPUD 8 31 pbs E HRD O gt Al 9 E Ica A2 3 B2 MPUD lt 15 gt HRD 7 I MPUDCTA HRD lt 6 gt MPUD lt 13 gt HRD 5 MPUD lt 12 gt 13 HRD lt 45 MPUD lt 11 gt HRD lt 3 gt HRD lt 3 gt 1 1 10 AS RDATA3 N MPUD lt 10 gt 7 6 HRD lt 2 gt HRD lt 2 gt 15 12 85 RDATA2 N MPUD lt 9 gt 4 5 HRD lt 1 gt HRD lt 1 gt 5 6 RDATAT N MPUD lt 8 gt E HRD lt O gt HRD lt O gt 5 86 RDATAO N 1 2 WO6H N 14 3 4 185 o 34P HRD lt 7 gt HRD 6 gt HRD lt 5 HRD lt 4 HRD lt 3 gt HRD 2 HRD 1 HRD lt O gt MPUD lt 15 1 07 7 19 HRD 7 MPUD lt T4 gt 17106 Qe 18 HRD lt 6 gt MPUD lt TS gt 14 55 Qs 18 HRD lt 5 gt MPUD lt T2 gt 13 54 05112 HRD lt 45 MPUD lt 77 gt 8 p3 0319 HRD 3 MPUDCTO 7 02 4526 HRD lt 2 gt MPUD lt S gt 451 0115 HRD lt gt MPUD lt 8 HRD lt O gt WO4H N 11h 185 Tai vce Icu4 A 15374 _ MPUD lt 15 gt 18 p 0 19 HRD lt 7 gt MPUD lt T4 gt 17 06 Qe 15 HRD lt 6 gt E MPUDCTS 1405 gg 18 _HRD lt 5 ICY1 MPUD lt 129 13 9 0512 10k ICX MPUD lt 11 gt _ 8105 azl HRD 3 15640 15138 MPUD lt 10 gt
105. 13 ies AD iz you new OBATA 1 5 ODATA B 714 AD ii Asem 21 anni o veer o 2t o gt 5 oa ver vec SBATAZII 17 i AD i0 Goes Hsm22a e215 __ 6 is AD 9 gt w E 25 EPF10K10ATC144 1u 8227 e211 gt gt E 2o AD 7 gt lt R212 ODATA 3 gt aa 6 1 e asv k s 5 saves A uns ono FEE R213 L 25 vec ODATA O is Em 100k cl gt AD 2 w M gt m AB i 20 AD o 7e 2 NSTATUS wcowri za 73 iode C 22 Ek 5 5 5 00 880 8 V z UU zz 9 2 9 x 5 5 6 gt 5 5 ofja nm ajn m v a ojn A aaaea te alalalalale 4 O 55 R220 LJ 7 oe 2 22 2 tf fea az c ADC START UA T U 450 gt u 2 44 qu u dn ya 1952 E gt gt 221 1044 o 2 X Mas 0 lt uU A ELuco DETECT Lcx PO NA v v v 5v 5 9 t ese Q O
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108. Pull out the secondary electron detector straight while supporting the flange Remove the shield pipe The shield pipe is a screwed type Loosen the scintillator suppression ring screw using a jeweler s screw driver Remove the scintillator suppression ring Remove the scintillator with tweezers Attach a new scintillator and secure it with a scintillator suppression ring screw 29 90 Sq QA Dw 2 s Put the aperture holder and tighten it with an aperture holder screw gt Insert the secondary electron detector into the flange straight and tighten with the flange screws 4 ea Evacuate the specimen chamber Scintillator suppression ring Shield pipe 10 14 S 5200 Field Emission Scanning Electron Microscope Service Manual 10 4 Estimated Periodic Maintenance Time The estimated periodic maintenance time for each item are shown in Table 10 2 Maintenance Table 10 2 Estimated Periodic Maintenance Time No Item Maintenance Time Note Electron gun baking 2 days FE Tip replacement 5 days Dry pump The maintenance time varies depending on the pump maker Penning gauge 1 day Objective lens movable aperture 1 day Scintillator 1 day 10 5 Maintenance Parts List 10 5 1 Standard Maintenance Parts Lists The standard maintenance parts list is shown in Table 10 3 Table 10 3 Standard Maintenance Parts List
109. You entered incorrect password Note that capital and small letters are distinguished for login names Confirm your input The file for operation condition is not correct If this message is shown check if other application is using files of extension pm1 2 This message will be shown when you have specified the same directory as of the source files for the target directory in Batch Process Move File command Specify other directory than that of source files for the target directory S 5200 Field Emission Scanning Microscope Service Manual is already Exist U ae 5 000 This is not 8 bits image file 2017 2031 2032 2040 2041 2042 2060 2061 2062 2065 2101 2102 2105 2107 2108 Part No 595 8030 Troubleshooting Cause amp Remedy This message will be shown when the input User name or login name is already used Specify other name se at Magnification lower than x This message will be shown when you click the Get Image The size of image exceeds the maximum resolution 2560 x 1920 Image size is not available except 640 x 480 1280 x 960 2560 x 1920 Captured images in memory areas of xxxx will be deleted Are you sure Insufficient memory space temporary drive At least 20 MB free area is necessary for startup Insufficient memory space a temporary drive At least 5 MB free area is necessary for executing this process In
110. is e ae 7 s gt 25 753 he BTN2 P YBOUT P m bes YB G gt ET sex BTNS P 153 55 err Qas SA Wo 2 gt aa as a6 Ls a Bw n esp 17 ae E swi n en Qu WOO 5s EYES z PA N lt gt GND x a laa VREF TDAT N aa Tc57913 43 201 1 m e q O a vec seco BR22 gt py 5 20 NN w Wwe ero crL2 P EVE crua 1 AR RESET P E WV lt Wb 6 B 326 5 s aa gt a2 ror 2 lt az 7 yas as 5 LANDE EU as 8 Oo aawo o gt 19 2 6 P a7 a naiz RESET N WDATAS P TCTL 2 P S o wo 7 o WDATA2 P asa from 2 WOATAI ges 1 P Lseao TERM Lseao RESET2 N 7 z re aL 7 MM as SATUS 2 aro 7 rRCS 26P WDATATAN gt ir doa Mn lt 6 woes ux 5 5 FERES AR B SOIT Sa AS
111. is l o LL a Lb r27 R31 Bai pesa 2 gt 15 t o savi e4 2 I a ne z s R28 R32 LE AUS W DA ay gt 220 gt 220 Raz 152074 V GND eS s 23 5 L ia 26 I a ja gers zZ TETAN BN EET 31 nd E H gt 2 gt 15 gt s gt isv ES elo 20 7 0 7 ve 2 prist o Lt fee gpa r ene emo ak aot 4 HE FS E puya eae pem RR a s E amp gt 5 2 3 zr t wto t t ie fede S e a o To ta To 1u To 1u To 1u To 1u To Ress 2 5 e e CAD EF173A ELI lt gt REAR RE Z 5 500 gt sv oe HB gt 1999 10 2 Qe Ti LT P C 1294 Do 9 o 9 or K KAGEYAMA 1999 1021 SIS JL RU cu Qe ges crue lamalacatc JT eyes 1321125318 m s oorsuka 1999 10 21 IU 31 TI LT CTL P C B 12 63 96881596
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113. voo 29 0105 0119 A M 15Vv M 1057 ier Am 0 2 5 5 L4 10 20148K R123 lt 7 A TPS C117 15 11 150k 2 58 ANG R129 vA EE src is R132 DA m EE 3 7 1k 17082 b NV 14 0 1 15V 4 C106 8130 A AD7537JN A C258 AG 1057 naires 14 3 0 14 0 10V s 13 pas AG 7_ 2 MPUD lt 5 gt 11 pas C256 1H TP111 BIAS PM 15 V C113 0 001 6 MPUD lt 4 gt 10 100p 2 R263 15V SMPLRST N 8 MPUD lt 3 gt 9 083 routa 2 s R263 jupa R136 MPUD lt 2 gt 8_ 2 17087 M 15V 2 MPUD 15 7 o8 AONDA 1 5 2 2 VPMHV S S 5000N A C109 RSS 0 0224 MPUDXO 6 4 14 VSP N S 4700 0 1 VREFA _4 210 15v C114 11 CNT2UPD N 194 upo 15 C116 lt 1 gt 164 21 15V 8 R124 C111 2074 0 2 5 lt gt ____15 Jao s gt 0 022u ICT11 O72 TESTA 15 CNT2 N 565 22 17087 e Kn 2 Loe X 6 WRITE N TEA wn TEE 6 _ 170821 s ea R138 515 4 route 25 Z 3 1708257 2 7 A EI 17082 24 5 8127 59 013 R135 c115 4 10511 12 Ney z C112 15 152074 2 2k voo 20 E C110 Z0TA8K 0 12 Focus D as Ne 15 CN34 15V
114. 0 047u C19 R25 15V L PM 2 1 js R22 825 Seu ENS 06 D7 08 09 R21 Ic2 47k 0 01 2 15V L PM x 0 0474 0 0474 g R24 R20 1 by K 600v 17904 4 7k 10 ici 100 08 690 9001 2 2k 517904 2 9 io C14 C16 D10 2_5 N Me Na GND_VA 600V a 0 10v R26 162 0 047u Bi 513 R29 R114 1k 10k wl R28 AN 6 EPMHV_N z RESET_H 77 GND_VA 18V L COL GND_VA VSE 100V 100V RSO 22 DuPont 200V 159 TR4 600 R33 0 047 470k c24 R37 25 10 1 2 MET 0 01 u 011 D12 SES 11 po R32 1k _ R38 ibe 33k i 4 7k 015 24 a 17904 R31 013 1w R34 EY 2 2k 600v JP2 1 52 Sau R35 A zni 016 415V R fmc 250v 9 24 5 R104 10 mo 45V R58 RY2 RTOS R40 2k AQZ204 10k GND_ COL DuPont On 017 We noia 15V R 2 an VSE1 200 POST ON L SBR 107 4 0 200 2 2 79 SV uu 5 DuPont 50V GND_LOGIC 7 7 D22 015 R591M d R100 2 3 14 1 ke 4 eae 182074 VSE SEL VSE1 200 L 100V H 200V d R48 0 200 VERS 2 2k 18V L cOL C28 R54 18V L COL DuPont 50V GND R 15V R 2151 bak R6 R52 5V 2 2 LBV 250 NN GND LOGIC lt 3 5 0 474 50 u 15V R VSE 100V 9 17904 BR 100V R1 18V_COL 3 1 lt bs TA RAS 018 6000 1w ics 9 0292503 R611M DuPont 200V L
115. 12 Click on Set This operation executes the correction calculations of Focus Comp 1 4 13 Click on Focus Comp Off and then click on None 14 Set Vsel and Vse2 to Auto 15 Click on Save to save the adjustment data Confirmation Re confirm the settings according to Checking the Focus Comp Conditions Adjusting the Reference Magnification HM Mode Adjustment Conditions Accelerating voltage 5 kV 9 42 Emission 10 pA Probe Current mode Normal Specimen holder Rotation holder Specimen Micro scale Sample Height 0 0 mm Image shift Mid point the reset condition R R Off Confirm that the Magnification Adjust in EO Adjustment 1 in both X and Y is 1 000 Set the magnification to 20 k Measure the 10 pitch of the micro scale using the length measurement cursor When the measured values for X and directions are Lx um and Ly um respectively employ the following procedures to register the calibration values 1 Click on the Magnification Adjust of EO Adjustment 1 2 Enter the following values from the keyboard into the numeric input columns of High Mag X Lx 2 4 Ly 2 4 3 Click on Set and Save in that order 4 Click on None S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual NOTE Calibrate the X and Y magnification rates by aligning the micro scale pattern directions to the vertical and horizontal directions respectively using a dedicated rotation holder
116. 2 TERM 1 P O E POWER SUPPLY ov gt DEF LENS WW BAKE 171 x m P pers p c e P C C 2 ez O O ELCO lt EVAC SEQ P C CAD EE EET 4 4 TT f s 5200 z5 E JT E a A FAB T SAFETY PROTECTION W RING A 5 50 2000 10 21 2000 10 21 A 1 KAGEYAMA 2000710 22 43 SAFETY PROTECTION W RING 12 79 DISPLAY Acioov DISPLAY CONSOLE SYSTEM cnar Ti 2 E Aces UNIT SEQ THERMO sw 2 de t 9 HS2 2 HEAT Ps NORMAL CLOSE Eocowr 1 o 5 DN sw 2 A 2 pm sir OVER HEAT LENS TENUES Aii Aii ad ry 85 deg Hsa 2 HEAT sinke Ps maa C NORMAL CLOSE 4 censa Read out by Obj Lens Power
117. 23 295 se RD Perez Hoe N o RD 212 UE RD 6 9 EPI BEEBIEPEREBEBHEENEBEPPPHEPEHPMEBEPE lt 2 L R N 2 N 4 2 22 22 M N A A N N N ul o o NO z U 244 2 ei el dl mre 44 0 vv vv M l 2 uda m 800 4999 s 5 40 aj a aj a gt wf al A el M jaa H lt MEC Y 2 ul O uos gt mu ER A u 0 u 6 m V v H OJ V ul ul lt o 0j 0j ol 2 x ul 4444 9949 F O 3 U uj of YU lt lt lt lt lt lt H H 2 vee A O es n 2 i e 2 E B n P 2 2 FO L DCLK 3 GND 25 _ vec esf 64 NCONFI c nararus 20 NeTATUS TPveCC gt cs crai cis 1 cie DATA 45 gt DATA vecd s ono gt cB Pete ae To te Peas Po te Toru To sos Forau Peas ae 54 1 j x EFos7 i T 55200 BS E AB E 8B 4 TRANSFER P B 2000 10 03
118. 6 5 260 856 A3 5 10 DEF Y U 5 me 7 L 3 DEF Y L ME 8c CN53 CNOBJ 290 16 2 2 399 35 UO 36 AMP 3P 7 87 3563 AB 9 NOT USE B9 10 810 571 36 CN126 ANG n 811 82 ke 2 12 1 Als E pH15V OF 5 FRC5 10P B13 HIF4 26P CN106 1 20 ELUCO 3P CADEF113 RE A 35200 gt E 9 A UM S MASUYAMA 1999 04702 COL CN P C B A N KANEOKA 1999 04 02 at lat 7 JL ES TISUP A 321 9399 a BR K KAGEYAMA 1999 04 02 J 935 1036 L 12 15 9 COL CN P C B CN80
119. AD7628KN OM 10k E20221 23 gt BANK1 NSH cs veers 18 15V A0 G 154 x r D 00 D 5 D Me D 16 gt 15 Dx he D 27 1 VOD 06 5 087 VREFA 4 086 D 5 9 pas gt 084 RFBA 3 GDEF1 DST 2052 12 082 E 7 verra 21 5 NIE To 2 4 R183 5 y 0525 1 ANN 1__ 3 2 22 23 M AC 5 40 GDEF1 AGNDB 24 3 USED NO R161 Y175 R177 184 R200 240 lt b 10V C70 96 100 114 20201 25 27 5 E2020 e NONUSED NO R211 212 2187220 BANK BANK1 19 444 np CAD EF AD G 63 RS E i M m SAA 4 8 at GDEF1 ICA4 SAG 12 36 oD o LO CN Canceller
120. Adjusting the Magnification between HM Mode Ranges Adjustment Conditions See Adjusting the Reference Magnification HM Mode Adjusting the First Range Magnification 1 2 Confirm that the Mag Range Factor in EO Adjustment 1 in both X and Y is 1 000 Using the following magnifications for the first and second ranges load an image of the same object e g debris at Slow 3 and measure the length of the image using the length measurement cursor Set the measurements at the first and second range magnifications to L2 and L3 respectively On the screen the size to be measured must be in a 50 100 mm range Magnification for Range 1 2 5 k measured value L1 Magnification for Range 2 3 0 k measured value L2 Click on Mag Range Factor Enter the following values from the keyboard into the numeric value input column of Range 1 click on Set Save None in that order Input value L1 L2 Confirm that when the size of the same object is measured in magnifications 3 5 k second range and 3 0 k first range any value deviation is within 1 Adjusting the Third Range Magnification 1 Set the magnification to 35 Measure the 5 pitch of the micro scale using the length measurement cursor Click on Mag Range Factor Enter the following values from the keyboard into the numeric value input column of Range 3 When the measured values for X and Y directions are Lx um and Ly um set X Lx 1 2 Y Ly
121. E OTS opes Figure 5 23 Stage Controller Configuration Part No 595 8030 5 29 Electric Theory 5 7 2 Board Determining the Angle Do not start the VRT during this adjustment Otherwise the VRT will tilt more than necessary resulting in damage to the potentiometer 1 Adjust the VR2 so that the voltage of TP7 is 2 3 V 41 4 2 Adjust the so that the voltage of TP8 is 2 3 V 41 4 Adjusting the Zero degree Angle 1 Adjust the VRS so that the voltage of TP9 is the same as TP6 2 Adjust the VR3 and so that the voltage of TP11 is 5 V Confirming the Operation l Start the VRT when the axis is tilted the angle automatically returns to 0 2 Start the SEM Open the stage control panel 3 Move the angle of the axis to confirm that the voltage of TP9 behaves as indicated in the following table Table 5 13 No Angle TP Voltage V 1 0 0 2 5 0 278 3 10 1 111 4 5 0 278 5 10 1 111 Set the axis to 40 or greater confirm that the motor does not move more than 40 Set the axis to 40 or greater confirm that the motor does not move more than 40 Set the angle of the axis to an appropriate value other than 0 turn off both the SEM and VRT Restart the VRT confirm that the axis moves to 0 Start the SEM on the display confirm that the angle is at 0 Turn off both the SEM and VRT again Restart the VRT confirm that the axis does not move
122. Evacuation system will stop Evacuation system will stop Evacuation system will stop The evacuation system will be working normally The cooling water is used for cooling the objective lens Countermeasure Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Then turn it on again If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Wait for about 30 min and check the cooling water supply Then turn the EVAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Wait for about 30 min Then turn the EVAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Check if the dry pump circuit breakers are on Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the pre pumping position and turn the EVAC POWER switch off Then replace the fuse and turn the EVAC POWER switch on again If the error occurs again contact service engineer Turn the EVAC POWER switch off Wait until
123. GND OF 0 4 gt 1 RON 57 Gees J T kA s 2_ OUT 4 gt OE R10 B5 W_N oi J GND lt CN62 AD7537J N 10 4 VN e gt MEIOD EZ cm 2 4 3 B2 GND 5 MP UD lt 6 13 pee 15V 7 5 e MPUD 7 18 55 a7 19 UD lt 5 11 DEA LO MPUD lt 6 gt 17 ae e a FASTIN MPUD 4 10 maw GRES N 2 GRES_N MPUD S 14 j os P3 GWG2tWs N MP UD 3 Sy R N PB j R_N MPUD lt 4 gt A oat GWGlh2 N MPUD 2 DES N AS T DVN3_N MPUD 3 5 es 092 CH2I NV_N MP UD 1 3 52 at ENA_N MPUD 2 gt 7 e 0E N UD 0 6 EO 10 10V 57 MPUD 1 4 PMHV2_N 2 MPUD O 3 gt PMHV1_N WLO_N 19 bo gt ALL estes UA 1 16 vena 11 0 TI HC244 Yor W BC2_N 5N cs RFBB MPUD 7 17 MPUD lt 7 gt 3 18 gt lt C4 UD lt 6 ga 15 ee MP UD lt 6 5 rsv 2725 oure do Bs 13 MPUD 5 gt 7 ANA MPUD S 5 NA j PMHv2 5 MPUD A4 gt lt A5 11 MPUD 4 gt 9 eer lt A R11 O 10V OUT MPUD 2 6 i a 4 AN e O Gnd MPUD lt 1 gt 7487 vob gt MUL A MPUD 0
124. MOn 506 UMS e 5 7 3 Stage Controller S 67A Adjusting the Origin 0 0 of the X Y Stage Adjust the origin of the X Y stage after adjusting its eucentric position axis slope adjustments If the origin of the X Y stage is adjusted before eucentric adjustments the eucentric adjustment will require a re adjustment of the X Y origin The origin is adjusted through the detection of X and Y photocoupler positions which can be performed by aligning the position of the light shielding plate for the photocoupler The origin of the X axis can be adjusted by aligning the light shielding plate and the origin of the Y axis can be adjusted by aligning the photocoupler 5 30 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual Adjusting the origin of the X axis 1 Press the Reset button on the Stage controller panel to return it to the origin The X Y coordinates will be displayed as X 0000 0000 um 2 the monitor display an image in the Low Mag Mode 3 Push and pull the middle axis in the fine tuning nut so that the shade of the specimen will behave as shown in the following figure when the X axis is moved between 1000 and 1000 um This completes the adjustment of the way the X axis swings 1000 um 1000 um Figure 5 24 Image on the TV Monitor during X axis Adjustments Adjusting the Origin of the Y axis 1 Press the Reset button on the Stage contro
125. N R147 777 gt oon 1 23av_ a P 109495 ols a20 2 1 gt 9 R AN d lt R57 R23 2 vosii2o 2 51 2 120 c NE usoa P 24 p a E I Tow S275 gt 2 T mod q 6 6 asa MS R25 lt Ww ANN b aja 270 E dou TT 06 5 N D nee Rise w zl s ew as 4 2 oro volnocun xa 0M uen A N 5 2 xe lt gt az s qL o 6 as a 200 ozo i 5 gt uu ozo I 12 Suu 7 EM 29 ET 5v R79 muc i cris 2 gt an M lt 26 s n 2 25 q gt ozo R59 EM 4 gt 020 2 a 222 120 gt sv n pen Em 5 1 gt c23 ENABLE_N X A wet ok uroi uzaen oun voec E SS R SIG a2 4 gt Qon nus cvs G sic E ta 1 MG ON gt e 20045 02 20 NA ava EHSAN morum gt 28 G VSO_N a2 de P 25 4 FAG 1 XY v 0u x 2 005 LN Z Y42u0X4 sas 00rasv naaa os 12 54 Le LO CN
126. No image rotation at a rotational angle of 0 mage rotation magnification ratio Conditions Accelerating voltage 5 kV Sample height 0 0 mm Magnification 2000 R R 0 90 Specifications Magnification ratio lt 5 for both X and Y e Dynamic focus correctable at a maximum specimen tilting angle e Verification of tilt compensation operation Conditions Accelerating voltage 5 kV Sample height 0 0 mm Magnification 1300 Specimen tilt angle 20 40 Specifications Y correction lt 10 9 12 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Condition Memory When any condition is saved the following items are modified and the previous condition is re loaded the Save and Load operations should work properly This can be verified by substantially shifting the alignment data and checking to see that they return to the original condition e Accelerating Voltage Emission Current e Sample Height Probe Current Mode Notch e Focus Depth e SE Detector e Signal Mix Ratio e Signal Condition Number Low Pass High Pass Mode LM Mode Select e Brightness e Contrast e Focus Coarse Fine e Stigma Beam Alignment Aperture Alignment e Stigma Alignment X e Sigma alignment Y Low Mag Position Low Mag Wobble Performance Guaranteed Resolution 30 kV Conditions Accelerating voltage 30 kV Objective movable aperture No 2 or 3 50 diameter Sample
127. WDATAG P gt s kta d 16s a sa Das WO 5 xe sa Py 4 Harz WOATAS N N 25 gt as oe EA Daas o G au a EAS 9222 aras SEH o ERES E sole dip z 5 N i3 5 2 92 7 Naas WAT A cU WDATA4 P Bab a6 a2 dig ar DE AMD e Wc m ia iA Sare WDATA1 N WOATAA N ol eres aa wo o s gt az woaTAo N _5 aa 1 RESET2 N ice aj vee WDATA3 P 55 7 10 WOATA3 9N as T BR20 220 2 p se 2 s7 2 n s j exi xd 1 P 87 gt lt mess 2 3a crei P 7 60 w AA cTLo P na gt lt lt ve p as gt gt Tas 9 b DNE ZRED N toa 20 T 57 d 28 2 pete 2 37 jee E 2 N z6 se 4 Mazo as 48 azi CTLO N FRCS 50P 5 7 22 we N e gt RSV N aza ZDN joe lt E 4 5 zuP N FRCS 50P from z vec PE TRACK BALL CN2214 1
128. When F10 Setup appears press the F10 key When prompted to select a language specify English and press the Enter key Select Power Power Saver Press the Enter key Set the Power Saver Mode to Disable Press the F10 key Select Custom Power on option Press the Enter key Set State at Power off to On Press the F10 key Select File Save Changes and Exit Press the Enter key SS pO coc Wo oss cp Part No 595 8030 11 31 Troubleshooting 11 32 12 13 14 15 16 17 18 19 20 21 22 When you sure you want to save changes and exit appears insert the Restore CD into the CD ROM drive Press the F10 key The system restarts Setting up the Operating System When Select Language appears select English and press the Enter key When the Compaq Restore CD window appears click on Begin When Please select the operating system and language appears confirm Windows NT 4 0 and English Click on Next When You have chosen to Restore the operating system appears click on Next When Please select the hard drive partitioning appears click on the Arrow button to effect the following changes and then click on Next C 2045 FATI6 Boot partition D 2045 FATI6 2045 FATI6G F 14MB 16 When The contents of your hard disk about to be destroyed appears click on Ne
129. ZuP P NT7 7 lt t2c21 ECIA P ZDN gt Bees Picasa XCE N O ENA N 2221 23 ZRSV P ea MA N 6 17 eB DVN1 N t2cz ECOA P 65 ZWE P 4 pees 4e oN seid xui RN er PSYS N Eri sea GRESI N N 5 t2D2 ISYA N 57 zeri Pe RO N as aro aye za 5 t 2021 5 NA vee leres mS vA 12426 2A P RESEDO N 2021 5 sea CNMI Ba god 12 0 4 6 ia RESET1 N 2 79 d RESES2 N B 55 Ue 45v an c4 Tin d 263 72 LP DAT N 72 5V 3 oR 2531 LPSEL N 74 a PRETTY 5v 2 5 NO lt Lakat SWSEL N 75 ZSET N L2 7 72 e seser GND lt DEL 2A2 SWRED N 76 62 ZRED N resa S Aem e eee GND 54 f 77 a M cur _ re7e O ec alg ee gt 79 XRES N WZ tics x Cercs A x vec tvec Loa AN O sv C O Q CB 2ACMD 1 a 3 F En c21 c22 doour c23 2 227 cza czs eras ao cas caa cas ecas ess ess cse dev ip Umea ua TT acu Toke T apii areca ea a Gul T Sin esau oss I Ta ix kur Tre bU
130. gt lt A7 al Q RA AG 1 100 C JP9 1 5 v lt AN FRCS 10 GND b HC244 Gw 1 2 3 4 la 2 12 MPUD lt 3 gt UNL ce 2 3 6 14 2 o oun 20 Pe uns N 2 19 connected to D G 2 18 MPUD O USED C1 9 14 18 MEANS ORS p pu not USED R5 6 12 13 15 19 1 CB5 HC32 9 10 12 MPUA lt 4 gt 4 17 d 2 2 MPUA lt 3 gt s UNVS20 46 c21 29 2 azo MPUD lt 7 0 gt 6 15 L OGBACHGOdMy eT MP UA lt 1 gt 7 14 NV MPUA O 11 12 4822 10 1i are Q lt 5 CAD SF413B GND o gt gt PS 1 25 p m z 2 c 5 5200 8079 fg FAG FRCS 26 UR 2000 TEF OPT VA P C B 819827 Sr I ___ sese 10 23 HAZIL 1 A 1516245 KAGEYAMA 2000 10 21 x 39 OPT VA C B 1 3 12 72 TP12 pD v
131. vat 2 CAS 20 DQM1i 20 be CAS 20 DQMO 22 met taa CAs 2 DQMi 22 Tas 2 DOMI RAS 2 4 2 3 RAS 20 RAS 254 gt e RAS 2 as eee 20 SS mas 2 se gt 55 nas gt fs lt 15 5 222 Pape cee sxs 222 e NEN RI vec Vas M m 2 vec Vis camp ux 25 ura vee ves lt 62 ved ves Oe vec ves NEM eM ves vaso 2 Veco vasa 24 3 veco sa 3 veco Se vege M eda 2 3 zx 25220174 4 2880005 as 29 4 lt S 4 i 42 Secar Visa veto Varol Verbi Nasa VERLA L 31 L RE Z c 5200 t NIX 25 a A S AB BUM kaGEYAmA 1998 2 IME ND Fe SoBe 1999 7 2 E 3212 972209 s IOS A 3214 318382 12 52 25 1MP N P C B 4 9
132. vee ALG A88 ICB6 4 7477 TAS 39 s 88 7 AB o 12 10k 15273 WOAS lt 7 gt TENET 2 TH MPUD lt 15 gt 51 7 92 WOAS lt 7 gt M 3 102 13 S87 2 2 lt lt lt lt 4k 026 15 135 MPUD lt 14 gt 180 018 WOAS lt 6 gt 5 lt 6 gt 152 4 M SS SoS KMPUDCT3 6 5 ION ON GI Who c BELS TA2 5 v4 02 5 247 n lt 13 AAA 4 2 TH 10611 D z gt _ 7107 388 545 85 lt 3 2 4317 aE 027 75 CN134 C MPUDCTO 145 WOAS lt 5 gt 6 gt WOBM 7 WOSS lt 2 gt 5 lioz vs 4 14 yay 4 lt st MPUD lt 9 gt 156 Q 75519 08 lt 6 085 lt 12 1 1 5 3 v3 MPUD 8 8 55 WOAS lt 0 gt WOAS lt 4 13 yan 8 n 511 WOBM lt 5 gt WO8S lt O gt 14 7 1 d ks 9 85 5512 08 lt 4 gt D28 1 CN 133 WOAH N 11 4 yee 470 10 420913 WOBM lt S gt WOBMC3 3 9 15 y2 5 25 185 3 5 3 A WOBM lt 2 gt W08M 25 6 7 33 DRY PUMP RL 2090915 WOBMCTS WOBMCT gt Jit 12 16 B BRIE 1 16 lt gt WO8M lt 0 gt 13 9 029 16 1521 5 E 470 10 205 lt 5 24V 55 V1 4 7k gt gt gt TAS bs OUTER BAKE 777 ZH A t BR17 A4 T AG BR23 WOAS 3 12 ANS 2 m bs V 31102 85 4 l WOAS 2 1 AS 4 va INNER BAKE TRAP HEAT 5 ETE 1022272 R231 ci
133. 1 Pressing the Set button brings up the password entry screen Figure 8 16 Reset RP Oil Password Reset Cancel u Figure 8 16 Password Entry Screen 2 invalid password causes a message box to be displayed 3 When the correct password is entered Figure 8 17 appears with respect to Tip and Stage X T Normal Reset f Appoint Day for Reset year month hour minute second 1 Cancel Figure 8 17 Uptime Status Table Time setting Screen 1 Selecting the Normal Reset option and pressing the OK button resets the time to the current date and time and cumulative hours to zero By selecting the Appoint Day for Reset option and pressing the OK button you can specify the desired date and time If blank or an invalid value is entered a message appears in the lower portion of the screen A date should be entered in a YY Y MM DD YY MM DD format With regard to PC SEM Dry Pump TMP Pil Pi2 Pe PC PC Battery PC HD and VRT Battery Figure 8 18 is displayed Part No 595 8030 8 25 System Operation DP Oil reset Normal Reset Appoint Day for Reset year month Fe Figure 8 18 Uptime Status Table Time setting Screen 2 Selecting the Normal Reset option and pressing the button causes the same action as described above By selecting the Appoint Day for Reset option and pressing
134. 22 WRITE N 1854 wr s ICF 0 170 routs 23 2 34 anos 24 AYG L 9 _12 Ae arr 11 ICES Lu 0 1u 15V 15V A G AD75374N C233 H 15V c226 3 0 14 MPUD lt fe 221 s 085 C216 ves routa 2 2 MPUDCOS DB1 AGNDA 1 5 223 4 5228 TLTDFUPD N 19 4 uro 11 AN MPUAC 1 gt 164 vrere 21 MPUACO gt 1 AD7537JN 554 TLTDEF N cs 22 MPUD lt 7 gt 14 087 mrBA 3 R224 cs MPUD lt 6 gt 13 pas AA cir route 23 z VEDE os MPUDCS touta 2 m VPUDC23 sess MPUD T gt 7 081 1 lt 0 gt 6 D vob MPUD lt 0 gt 6 1 IL r1 RRUPD N 15V 5 RUPD N 19 upp 15 4 lt it v lt 1 gt 1641 vREFB 21 C218 1 MPUACO gt NG RRY N eras 22 WRITE N R227 17 23 20k vece ae MY 24 15V 0 12 von 20 H gt 2 5230 0 1u ziii d 154 8 R228 IT 15 c228 LA 950 c232 in c224 AB BEST Ana ial ee NG 15V 15V CN21 DEF LENS R149 50 SCANY EO MAGNIFICATION mi ICE12 2 gt 80 NC AD7537JN o MPUD 7 DB7 IOUTA 085 085 a Ed TP14 D83 RFBA 55 E 9 555 081 VREFA 10 COL_DEF_x s MPUD O5 VREFB MAGUPD N 19
135. 7 Conduct baking if the vacuum levels of IP 1 IP2 and 1 3 fail to reach the following levels 2x10 1 2 2x10 Pa IP3 7x10 8 Confirm that the specimen holder is in the specimen exchange chamber at the pre evacuation position 9 Confirm that the switch on the evacuation operation panel is at the OFF position 10 Set the EVAC POWER switch on the evacuation operation panel to the 0 ON position NOTE The system will not start if the EVAC POWER switch is at the 0 position If the EVAC POWER switch is at the 0 position set it to the OFF position and then set it again to the 0 ON position 11 Ifthe S C LOCK switch is not on the side set it to the side Part No 595 8030 8 45 System Operation 8 7 Troubleshooting 8 7 1 E 01 03 04 05 06 07 08 12 8 46 Error Code Failure on the DC power supply 24 V Over heating of a transformer in the power supply the temperature sensor is an optional accessory Over heating of the dry pump the temperature sensor is an optional accessory The dry pump stopped Blown out the fuse connecting to the penning gauge unit The turbo molecular pump stopped TMP 2
136. About HVStatus in 10 bit0 Gun Evacation 0 Good 1 Bad bitl Emission Limit When V1 is open 0 Limiter On 1 Limiter Off When V1 is closed Limiter Off bit2 DEF LENS Power Over Heat 1 Over Heat bit3 Object Lens Over Heat 1 Over Heat In items 3 9 the high bits represent a coefficient and the low bits an exponent These values are substituted into the expression coefficient x a power of 10 6 WorkCondition Table In this table each record consists of 55 fields Field Data Type Meaning 1 PC SEMSUM Text Cumulative hours 2 PC SEMCHGDATE Text Replacement date 3 PC SEMNUM Numeric Index 4 TIPSUM Text 5 TIPCHGDATE Text 6 TIPNUM Numeric 7 VISUM Text 8 VICHGDATE Text 9 VINUM Numeric Part No 595 8030 8 37 System Operation Field Data Type Meaning E 10 DPSUM Tex 4 11 DPCHGDATE 12 DPNUM 13 MAINTMPSUM 14 MAINTMPCHGDATE 15 MAINTMPNUM 16 SUBTMPSUM 17 SUBTMPCHGDATE 18 SUBTMPNUM 19 PIISUM Text 20 PIICHGDATE Text 21 PIINUM Numeric 22 PDSUM Text 23 PDCHGDATE Text 24 PDNUM Numeric 25 PESUM Text 26 PECHGDATE Text 27 PENUM Numeric 28 STAGEXSUM Text 29 STAGEXCHGDATE Text 30 STAGEXNUM Numeric 31 STAGEYSUM Text 32 STAGEYCHGDATE Text 33 STAGEYNUM Numeric 34 STAGETSUM Text 35 STAGETCHGDATE Text 36 STAGETNUM Numeric 37 PCSUM Text 38 PCCHGDATE Text 39 PCNUM Numeric 40 PCBATTERYSUM Text 4 PCBATTERYCHGDATE Text 42 PCBATTERUNUM Numeric
137. Aperture position adjustment knob X axis Figure 6 10 Movable Objective Aperture Unit Cross sectional Diagram Part No 595 8030 6 9 Mechanical Configuration 6 2 9 Secondary Electron Detector Structure The secondary electron detector consists of a scintillator that converts secondary electrons into light and a photoelectric amplifier tube Figure 6 11 shows a cross sectional diagram of the secondary electron detector Ls Post HV Shield pipe Scintillator Figure 6 11 Secondary Electron Detector Cross sectional Diagram 6 10 S 5200 Field Emission Scanning Electron Microscope Software Service Manual 7 Software 7 1 System Configuration Figure 7 1 shows the system configuration of the S 5200 Stage Track ball Controller Figure 7 1 System Configuration PC IBM PC AT compatible personal computer running under Windows NT 4 0 For SEM operations and quick image processing VRT Control computer made by Instruments running under VxWorks and an electro optical system For image memory operations Photo Unit Photo unit Panel Operator panel for persons who are familiar with knob based adjustments Stage Controller Specimen micro adjustment unit Trackball Trackball for the specimen micro adjustment unit EVAC Evacuation system Part No 595 8030 7 1 Software 7 2 Software Configuration Figure 7 2 shows the software configuration of the 5200 PC Programs P
138. EVACPNL3 P C B A 1899 03 08 st las 7 1 79 R As eee ERIRUTPR 471 2 37838 NS j A 58 1999 03 08 8 EVACPNL3 12 14 L 3 EXB1 X 3 EXB1 Y L 3 EXB2 X 3 EX82 y 3 2CON 1CON 3 IS L X IS L Y Tar 3 IS uU Y 3 STG X 3 STG Y 3 STG AL X E S HIGH VAC ALV CLOSE THERMISTOR FLOW SW CN16 ONG gt 15 L1 GBA BLK t3 CN105 A2 SOs 19 6 3w B2 2 L2 1 6035 3 83 An c 3w ELUCO 4 CN 176 L3 17 76073 10 6 3w sU 26 L4 aw Als SOs 3 Q BB 4 o aw ELUCO 6 CN103 A6 1 sg Ex Am 20 AS 4700u eg 35V AU AMP SIG X 3P 100 AB 1 2 7 r 7004 eg v 20 57LE 14 CN101 F5 di 15 A Ae 180 0 3A M 5w for R26 33 A 19 R15 33 dd 5w L6 F6 R17 33 gut o 22 5 5 EO 0 3A M D R27 33 230 819 55 7 Sw eg 2 AL 1 57 o 0 5A M 5 i R28 16 33 We
139. Figure 7 13 Part No 595 8030 7 13 Software Maintenance Screen The 55200 requires regular maintenance of the pump The figure below shows the screen on which scheduled maintenance can be set for operator notification This screen can be started from Option Maintenance of the menu Maintenance intervals can be set in the Maintenance item of the electro optical system adjustment screen Figure 7 9 Maintenance Last Maintenance Date 2000709728 Current Maintenance 200070928 Completion Date 2000 03 28 fea Update Close Figure 14 a SEM Fal EHLE To FALL red AVTFYAG 2000 09 29 Figure 14 b The specified schedule generates a message upon program start up both one month before the scheduled date and when the scheduled date has elapsed FE PO SEM 6200 1 FAL TL SF SARVI ORR BE 15 FacHRB x CIT REVO CRSA BLS OER ATT 2000 10 19 YW IAD RIED PUD SOS E Figure 7 14 SEM 5 5200 f DE SAR VIO BURT AES CL d EXKTEHER ESAR 20 COE OL io TERRI 1014 MEUM EAE io 2000 10 19 ESR VIVERE CUT SBOSU EL TRS RL D athe E S 5200 AR ea UES Figure 7 14 d S 5200 Field Emission Scanning Electron Microscope Software
140. Green During self Lamp OFF analysis DMA Green I O got DMA Lamp ON at LLED 2 Green During self Lamp OFF bass right DMA analysis INT Green Interruption Lamp ON LLED 3 Green During self Lamp OFF occurred when analysis interruption occurs Part No 595 8030 11 3 Troubleshooting Normal Silk ENT Normal Silk Status Screen Color Description Status Screen Color Description after analysis MBSY Green Memory bus Lamp ON LLED 4 Green During self Lamp OFF busy during analysis Memory bus use FAIL Red CPU halted Lamp OFF LLED 5 Green During self Lamp OFF analysis DIAG Red Lamp flashes Lamp OFF LLED 6 Green During self Lamp OFF Self analysis analysis GOL LLED 7 Green During self Lamp OFF Lamp ON Boot analysis error MERR Red Parity error Lamp OFF LLED 8 Green During self Lamp OFF analysis Self analysis After the reset starts analyze the I O function in the board During self analysis LLED flashes and when the analysis result is normal DIAG LED turns OFF If the analysis result is not normal DIAG LED flashes and the coded analysis result will be stored in a specific address 0000F0 in the main memory No Error Code Description 1 00 No error 2 A0 MPU register check error 3 A1 EPROM sun check error 4 A3 Control register function error 5 A4 DMAC register
141. Ka 400 0 3 6892095 1M 50 ae ee Coupling Invert Bandwidth Position Offset DC Off Full 100018 z18div 0 000v cic dedi aaa Figure 9 5 b Video Switch Signal ICG12 16 a Figure 9 5 Video Signal Output ICG12 1 Part No 595 8030 9 21 Adjustments Adjusting the Display Area in the Dual and Full Screen Mode 1 Use the Data Manager to open 640 x 480 size BMP file with a 512 x 480 box cursor drawn at the center Transfer this file back to the image memory 2 Perform Dual display position alignment on the adjustment window so that the size of the box cursor matches the frame for the SEM display area 3 As in the case of the standard adjustment if a noise is produced over the vertical edge of the display area turn the Clock Phase Invert checkbox on the adjustment window on and off Confirm the waveform Fix the phase adjustment so that the fall edges of V sync and H sync and the rise edge of Clk are not close to each other as in the case of the standard screen 4 Confirmation Operation 1 If Dual B in IMP H Start is small a horizontal noise stripe is generated when any of the signals is unselected during the color synthesis process Confirm that this condition does not occur 5 Confirmation Operation 2 If the value of Dual B in IP Output H Start is incorrect an image deviation
142. L8 FB 810 if 60 21 aro 206 We F9 10 Ag AA R50 119 0 5A M 10 R43 s gC MAT 2120 1 0 es F10 R32 10 Wi O 0 5A M 3w 1 OR44 6 sU 14 59 27 8126 280 i 0 R36 10 60 n 50 3 A sng Og 10 816 32 A o 57LE 56 CN102 Ago 1 Bes 2 HIF4 40 ELUCO 2 104 1 B3B XH A 15V CN173 R45 5 are _RL3 P 5842 3 174 1 4 BLK ATQ RL2 MY4 BM AL B2 sz IF4 26P CN16 100 F13 ars hs 2 pretty 2 BM AL X U 819 CN26 BM AL X L Aly 15V F14 15V 20 C is o 5A M 2 L 20 BM AL Y U Ai SIG 1 r 120 26 HIF 4 40P 20 135603 no BM AL Y L 5 BIAS 1 14 V BG 57LE 14P AMP 10P AMP 10P CN26U CN173 101 AS 1 810 3 DEF X U B16 2 5 D B 2 2 C 2 o B2 B2cy b AS s 3o DEF X L n 800V gt 800V 8 0 HRe 40 86 BIAS 2 o 5 so 250
143. Lens 777 Obj I R270 WT RL Oo Over Heat detecting 60 deo 5v cnie OVER HEAT LENS a AA A HEAT SINK A 10 9 THERM STOR 2 m 1 2 _ 4 B10 777 i 7 ANA ANN Peisv F w sw A673 gt 77 bers DEF LENS P C DEF LENS P C dim 4 E 4 58280 MESS SUN PROTECTION wei 2000 21 1 KAGEYAMA 2000 10 22 44 TEMP PROTECTION WRI 12 80
144. Let 00 00 OO OO 2854 oc P 38 oc 2900 E 06 gal of 0000 ajo 60 B 25 96 10 2 2e 1o 4 250 2 oc 1o gt gt gt gt gt gt gt gt gt gt gt gt gt 4 ex I 25 I SL E 4 15 gt B gt vec jvec ages 25 as gt t as s 4 SZ v7 A voo2 lt 15 gt 47 a1 2 R lt 15 gt 15 avi 2 G 15 vDO2 15 4ji ivi 2 B lt 154 VDO2 147a ia pave a 502 14544 h iva VDO2 lt 3 avs 2 1 ava Geis VDOZ 13 44ia ava 5 VDO2 12 gt aalias ava WDO2 12 a4i4 VDO2 12 gt adine le B 12 1 1 5 lt vDo2 1ii aio vo02 VDO2 10 0 272 s R 10 gt VDO2 10 adsas gt 2v2 9 G 103 vboz r0 ad VDO2 9 2 R 9 gt VDO2 9 gt 243 L avs 11 G 9 gt V DO2 9 243 VDO2 8 37 2 12 RB 2 lt gt 32 2 ava 12 G B WDO2 8 3 ava az B 8 gt voo2z lt 7 gt aa 2 7 avi G 7 vDO2 7 7 VDO2 6 ss sas VDO2 6 35 G 6 gt VDO2 6 35 30 B 6 VDO2 5 s5 sas ie 252 ava 5 5 55 5
145. Mu neo je xal WA var so gt igk Dii ME ees VRO uy Rio Da7 m x rer AN Ye AAA 77 V V STU Dt 15 R71 ny d 5 ice D D es ev We W P NE vR24 UR ba ps 56 R73 Ble W 282777 ace m VR does Bv R69 1 CE4 Kd cna 9v tees pase aN tev ise wane VER D nas ake Pe 4 5 gt R67 gt ev 1 i A4 res gt seg D MA 77 vn25 Pa m i me m esp Sey gt E i gek 77 1 VR26 x cno w as 4 x p20 la as 15v mm v k o7 Sa d Ps BL Ww w aes v ev re ANN e cra o 4 woe Ras Y Hes o GND sci 157 0 vi DEO naa AW HN gt veri i w o P Lp asv EI 77 OL ZZ PHOTO iene m m E SEA TAINO g m axe 318 5000742 aonan QI on 2 42 0 4 A SHUUER 7 AE E FA kwz EPI A HRAL 32 2531835 4 00 2 4 am 44 M 2 N t LIOFO N 0 4 12 47
146. O1 2 pias xB P 27 sm 1A31 45 sa SYA P 1A3 is he m SYB P 1As 56 is je SBTNE P quias he SETN2 P BTN3 P los SBTNS P GND n TCs7913 43 201 44 CAD EF125A A HH 1999 04 16 KAGEYAMA 1999 oa16 s oorsukA 1999 16 20 10 CTL 5 5 12 43 ion CNA 1 CNA CNA N F273 SW_D7 N SW_C7 N LED 07 17 7A OZ LED lt 7 gt 0 7 D aol A LED37 N 25Ecb A 25 ECO SW D6 N SW ce N LED_D6 N Ara eS sa 33 LED lt 6 gt LED lt 6 gt 4 oil B9 gt LED36 N 52571 SW_D5 N SW 5 N LED D5 N 539 sa 44 IED S LED zt s al 105 LED35 N
147. YES OLDER LOCK V3 OPEN YES OLDER LOCK V3 V5 OPEN NO i User operation 7 Control lt Decision 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual SC Leak Operation SC Evacuation Operation HOLDER IN S E C LOCK SW IN SEC OFF AUTO STOP TIME 3 30set SC EVAC SW NO BUZZER ON BUZZER SC AIR SW ON YES Dry pump NO MDP Normal Dry Pump YES Normal STOP ALL VALVE CLOSE TMP STOP TIMER DOWN STOP NO TIME 0 00 YES qu Dry Pump NO MDP Normal User operation V4 OPEN YES Norma V5 OPEN 7 Control lt gt Decision Lut Part No 595 8030 System Operation 8 3 Operating Procedures 8 3 1 RAS function Cautions on Using the RAS Function e The RAS function uses a database file RAS mdb which is generated by the SEM function Therefore the RAS function should be used after SEM has been launched at least once e Jn step 2 of C Display EVAC Condition the RAS function receives data from the VME bus Real Time p c which requires a connector e After the installation process is completed execute the file SUM table creation application MakesSUM exe that is contained in the same installation CD This application calculates the SUM values of the files coded in a setup log file
148. c a a nm n a a n n 4245 lt lt lt lt 2424140424140 4 Piedad Soa a sts E LOLAS a 2 20 o is2oza R7 VEU 222 f i MN 57 b 4 Peis gt 120 Pao 2 7 152074 Paso 1 us PLL pasa GND pasa vco vco GND pasa pasa Cease veo our 771 682009424525 F PGA Pass tea s v vaas 1 cmo x Pass TLc29321 BOF BART G Hso 4 pn R 29 gt 35 Altes tae POURI PFD HB R135 i2 vcoour ANN E paso NM R 4 gt mas R 3 gt eee 117 2 SELECT a L 112 2 az pex Pas R 25 gt bi vamo m rac need tpd lt 10ns as A en rid 1 ce Pee a7 m ava 2 2 LD O 2405 ano FLELD Y M wc ses Seen 199 46 _ mrvs 3 WEG ERA i srscAw 2398 32 5MHz eS se O n 08 2 gt ast Mone ass axe 3 2 m aa ss sa ave POR ud 40 n ned 65585 5 s 0 8 5508 49042 lt 042404222 lt 002240000 04 3 5 sa hats 9 9 9 5452040240 lt 2 lt
149. characters are acceptable Comment is too long Up to 80 Use Comment shorter than 80 characters characters are acceptable The new and confirmed Input both new and confirmation passwords again passwords do not match Please Note that capital and small letters are distinguished type them again Cannot delete this login name This login name is not allowed to delete Written data will be combined This message will be shown for confirmation into image OK Written data will be transferred This message will be shown for confirmation into bitmap area for photograph OK Caution All captured images will This message will be shown when All Clear button in the be deleted Are you sure captured Image window is clicked or when you change capture resolution for confirmation 7 23 Software 3004 3010 3011 3013 3015 3016 3021 3022 3023 3030 3040 7 24 Cause amp Remedy Exit SEM Manager This message will be shown for confirmation OK XXXX already Exist Overwrite will be deleted Are you sure will be deleted moved former files Are you sure already Exist Overwrite Yes Overwrite No Save by using different name already Exist Overwrite Yes Overwrite No Append into the existing file Caution After deleting data it cannot be accessed by any other user table it is registered in Are you sure Caution After moving data i
150. eno S VDO2 26 40 2a2 R 263 VDOZ 2 6540202 s G 26 VDO2 2 6540202 s B 264 ES era D r IRE 3 gt 5 i B 25 Cj sos VDO2 gt 5 avs 11 R 25 VDO2 25 34245 ii G 25 TA 5342 oapanuspaesapa ul a iu n ns ava na ROERA 242 ieza Jweozzzameiee 008 243 Gazaevezaaagazenvagzaaveazag EGS VDO2 lt 23 gt 36 a1 av R 234 VDO2 gt avi G 23 gt avi B 234 lt 2 2 gt pave 1a R 22 lt 2 2 gt ave ia 22 VDO2 gt 2 aden pave B 22 Bev e s S vies ele a n n e a n e m e n G G o G 092 21 ays R21 2 1 gt 4 Dava lt 2 1 avs 16 lt 21 1 gt 0 2 ava 27 R 20 VDO2 20 34sa sv 12 G 203 202 20 32 ava 17 B 20 VDO2 lt 19 gt 30 41 ie R lt 194 vDO2 19 3ds avi 1 9 344 avi B lt 194 VDO2 18 229 472 20 R 18 VDO2 gt pws 20 vboz r i4ee noe 20 8 181 o e vm s VDO2 lt 1 7 gt 22 R17 ays 22 G 173 vDOZ L7 2i44 ays 22 B 17 sig smog eo o ce VDO2 16 2 s aa 23 R 16 WDO2 16 24 n 23 G 16 WDO2 16 244n ava 2a B 16 o o ajajaja aja 207 o 27
151. gt nas MAS 26 94 MD3 Mas s 26 485 as 7 Aa s 72 MD3 7 as 5 7 22 cec 22 SGS E gt 6 22 52 5 35 a MD3 23 gt 5 7 gt MA4 5 aa po MD4 23 nc MD4 7 3 4 terr 11 lt 2 2 4 gt 11 lt 6 gt MA4 4 came mt MD4 22 MA4 4 ae 11 MD4 lt 6 3 gt Sade fie 21 3 gt pad vad MA4 3 ane MD4 21 3 mem lt 5 gt 2 paw MD3 20 gt lt gt os D MD3 lt gt gt MA4 gt im ne MD4 20 gt l gt 1 gt ud met MD3 19 1 ae gt 3 gt 1 gt 7 uos 7 MDA4 19 1 ER now 7 0 0 gt um oe 5 MD3 lt 2 gt MA4 0 t iic 5 MD4 18 MA4 0 63 tus 5 v nex MD3 1 Non 4 17 gt v oram MD4 1 bond gt MD3 0 gt gt MDA4 16 oO gt MD4 0 gt 5 boo Ens pes B 20 MWR 20 as 22 ES 16 MWR 22 201
152. 1 24 M 4 q 022 1 C370 01u L 3 R19 82 33k 39k Bos ANY AM Qi 15V _ 15VG 15VG EM GND P GND REF GND Tr GNDV1 GND a 48 15V 15V R49 1 24 470 R16 R17 Ic3 58545855 T2 21K 330 182074 8 57 5 15V g25 Sea Tes 1 VRI 1 5 P eM AN gt _ 57 R24 024 47k 36 gt 17815 gt 15 1708 a 100 i 8 22 1 220 c39 7 4 me 152074 Pyra L cu 182074 6 3 i 124 047 r MIR a 5 010 sac sak u 100u S 42 22 FOTOJ i 152074 15 9 5410 9 4 9 Y 0 033u 15V 152074 15V 15VG GND 1 uarz815 S E 15VG TP1 C7 0 1u Jou 5 It tu 100u 165 Test Q c29 C31 C33 4700p 4700 4700p 3 on gt 15 15 gt 15 4 12 4 12 3 R1 a 457 3 E e 01 c30 c32 C34 m 15v gt 15 4 V R5 4700 62 7906 00 00 2 1 2SK741 T3 4 R58 T 09 2 0 5M v 3 2 G2 D10 GND lt 014 25 27 470 DHM3J120 4 R2 A4 FL L Tr GND Gh P 85 EM PULSE V1 166 15V s lt 612 NORMAL MODE 4 gt R3 10k 0 0654 22 1 5 2 2 R6 n Fout 5 4 3222 100 7 NORMAL MODE Loom C43 184Hz 10uA 47u 9
153. 154111 584 5 484 57705502 581 MPUAC2 gt 402 P75 RXD2 7 15 ADD MPUACT 482 P74 TXD2 PB6 A14 P73 RXD1 PBS A13 ACAS 72 TXD1 PB4 A12 AL 71 1 01 11 EN P7o IRQo PB2 A10 1 Icx5 52212067 lt 7 0 18245 284 DCOD lt 3 gt 6 P33 T10C4 PC7 A07 uQ 284 c KACTLCO 284 R 56 2j m P3o T10C 4 4 A OX ACILCT 142448 5 204 77 283 15 P s Aos ACTL lt 3 gt gt 1538 Vs 2 4 MPUA lt 3 gt 3 285 9 A7 ACTL lt 2 gt X 16 ha 4 204 MPUAC2 gt 2 285 5017062 46 ACTL lt ACILCI 17 lip 3 204 MPUAC1 gt 1 203 7 45 6062 45 ACTL 0O ACTL lt O gt 18 log 2 e t P44 T60C1 25 5 P43 T50C2 17 EDTA Haz P42 T50C1 P16 T P41 T40C2 15 mE 5 Ao P40 T40C 14 TIS d lt P13 sos 3 P57 13002 127 ie 75910 MODE lt 6 gt D 2861 m P56 T30C1 P117 55 5912 MODE lt 4 gt 252212002 Pigs x 54 1 407013 MODE lt 3 gt P53 T10C4 P27 T ET 14 MODE 2 5 6 gt 22945 MODE lt T gt P52 T10C3 P26 x i MOBTIUS P51 T10C2 P25 3 P 2 CN120 P50 T10C1 P24 35 5 5 MODE 522 gt 15245 15248 avon Boa D lt 15 gt alas 0 lt 15 gt slay 15 17 VR EE P207 0 0 lt 14 gt Blac D lt 14 gt 12 16 53 0 lt 13 gt 7 5 7 5 as 13 A18 56125 5 lt 12 gt 6 T4 ATA
154. 3 AD 2 2 Di 2 AD 1 ii ax 15V 207 Parm i2 ao lt 0 ao 45v r3 vee vec a s I 1 DATA 7 O gt 4 4 EP TUE Th R205 PE 13 glo ie DAI You S T min lt lt lt lt lt lt lt lt TP16 A lt i 54 lt lt lt lt lt lt lt lt e209 ul 500 aja sien lt lt gt zl N R206 1 a afola ene ale oa PEE 9 154 159 el 20 k 5 9 ae 5 2 E 25 22 5 i 3 5 DATA CONF DONE cowr DONE ecug xev DCL 325 212 1577 r218 s PSE NcE2 106 4 2k 2k l a fo DT 5 104 ces s R21 MASP OCS 5 v lt o 195 e210 e 5 ODATA B8 J ODATA 15 NT WV aa s lt c220 ATACIA lt R210 7 ODATA i0 ay JATA i3 srj gt Se recs ODATA 11 ODATA 12 io as 9 ODATA 127 ODATA i1 ii ozen A 5 22 739 ODATA 3 3 OBATA 10 Ab 13 gt As ODATA 14
155. At least 10 MB free area is necessary for executing this process Free space in temporary drive is 30 MB or less System may become unstable Please quit S 5200 program and free up the disk space button at a higher magnification than x5 000 This message will be shown when operations such as auto focusing did not end within specified period If it happens frequently contact a service engineer Some commands in the SEM Data Manager handle 8 bit gray scale images only Some commands in the SEM Data Manager handle maximum of 2560 x 1920 pixels Image transfer to Scanning Image window and photo replay support the three image sizes shown in the message only Image transfer to Scanning Image window and photo replay use image memory for storing captured image This message is shown when the necessary area is not empty If you need the captured images in specified areas click No button and save these images And then use the image transfer or photo replay command This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessa
156. Control Address W R Bit Signal EMISSION E200F0 R 8 D o Emission Read 0 5 58 STATUS E200F4 R 8 DO High Vacuum D1 HV OFF HV Hardware reset D2 Overheat Head sink D3 Overheat Lens D4 MLV Manual Valve Close D5 Reserve D6 Reserve D7 Reserve V1 E200F8 W 8 D V1 set 25 49 V LSB VO E200FA W 8 D VO p set 7 326 V LSB VO 11 8 Control E200FC 8 3 0 VO 11 8 set D js 4j Flashing Intensity 1 3 D reserve Part No 595 8030 5 43 Electric Theory Control Address W R Bit Signal HV Control E200FE 8 D7 VO ON V1 ON 05 Flashing ON D i oj EM Limit set 4 15 5 8 3 Adjustment Reference Voltage Check point TP7 HVC P C B Output voltage 10V 0 3V Oscillation Frequency Check point TP15 16 HVC P C B 15 V L PE 11 OV 15 V TIG ane OV 40 jis oi Flashing Time Check point TP1 HVC P C B Adjustment VR6 5 OV Flashing Intensity Table 5 18 Flashing Intensity Intensity Adjustment Indication yA 1 VR1 0 2 VR2 30 40 3 VR3 40 50 Emission Current Check point TP10 HVC P C B 5M 5 4ms 10 u A 5 44 S 5200 Field Emission Scanning Electron Microscope Service Manual Accelerating Voltage Control Check point TPS HVC P C B Output voltage 10V 30kV Check point TP17 HVC P C B Output voltage
157. E Evec tad SW1 4 355 Ke NF NO NO ad NFA NC Wo MBW1283 22 LO0 O0 100 4 540 K K K 5 OS PF 51 5 NC j ou d 3o ui Fg F2 8 1800 ves 87 708 1 2 ET ia 4 1 o IM S cep Y G o trip E y FUSES 1667 Fuses a a 5 8 5 2 SC 2N 0 240 K BR to Bey Ba EJ Y G BAN CN 69 5 MAINS TBI MAIN o POWER POWER o Acaaau Ace32u A sen 0 1 04 mo PE GND 752322 E 99999 0 lt GROUND TERMINAL PIECE 528 DRY PUMP cri AC Power Distribution Unit Current j ET DRY PUMP AC POWER DISTRIBUTION UNIT S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual 5 2 2 Display Unit Unit Fuse No Type Manufacturer Specifications Approval AC PS F1 F2 218 005 Little Fuse 250V AC 5A UL IEC SEMKO F5 F8 F3 F4 218 3 15 Little Fuse 250V AC 3 15A UL IEC SEMKO Part No 595 8030 5 5 9 S CN128 CN41 B W O En O OO DISPLAY MAIN POWER SW 3 mo 20 PICPS74 UI 50 2 SEM CONTROL POWER 24 RLI G L O 2 1 CN25 4B 1B 1A B W 00000 B ATRANSCPC 1
158. Figure 10 5 How to Grip Tip S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual Mounting a New Tip to the Tip Holder 1 Mount the prepared new tip in the holder using tweezers See Figure 10 4 If mounted in reverse order flashing cannot be done 2 Hold the tip parallel not slanted to the holder and tighten the M3 tip holder screws with a hexagonal wrench 3 Replace the spring with a new one 4 Ifthe connector pin heater pin is not aligned with the internal heater adjust so that the spring and the heater pin become straight Figure 10 6 If the heater pin has poor contact INNER BAKING cannot be done 5 Verify that the tip holder surroundings and high voltage ceramic insulator is not contaminated If dust or contamination is detected clean it with an electric vacuum cleaner by attaching a thin pipe to the tip of the vacuum cleaner Clean the tip of the pipe thoroughly beforehand using acetone or ether FE tip Heater pin Ceramic insulator NOTE The spring must be replaced with a new one every time Adjust the spring so that it is aligned with the heater pin Figure 10 6 A Part of Electron Gun Part No 595 8030 10 5 Maintenance Mounting Tip Holder to the Electron Gun Chamber 1 Remove the cover flange from the upper part of the electron gun chamber 2 Check the inside of the electron gun If the dust or contamination is detected clean it with an electric vacuum cleaner
159. L1 F1 85 9 rr O 0 C3 C4 B4 48P 577 554 3 4 a z 1 35V F2 6 2 1 15 2200P 6KV 12 DHM3J120 12 5 z 1 5511 SA eaa ersi 24 4 d gt 24 3 TA DHR20YW102M15kV 18 C23 C20 e C24 C18 2 2 82 C25 C22 19 2 810 C32 C26 gt 3M C33 C30 C27 C34 C31 C28 1 582 100k R3 ANC C WV 500M CADSF 365B F RE Ef 3520 gs HE Ag gt dnd A SUB 1998 HVI 1998 atlas 7 Ju Z AB Hoh A Mas 3213 Q7 A K KAGEYAMA 1998 02 25 J 29910 14 PC HV1 12 27
160. Rotation holder Specimen Mesh Sample Height 0 0 mm R R Off Set the image shift both in X and Y to a mid point shift quantity 0 Perform image adjustments in the Beam AL and Apert AL modes The Apert AL should be adjusted especially accurately Upon completion of the adjustment turn Off the AL mode Click on Image Shift Axis of the EO Adjustment 2 screen Click on X After clicking on the Max of X start the Apert AL mode Adjust the Y alignment knob so as to obtain the current center conditions Perform final adjustments using a numeric input value Repeatedly entering numeric values less than or greater than the current value and clicking on Set in order to determine an optimum point Upon completion of the adjustment process click on Get and Set in that order the Apert AL mode remains in operation Click on the Mid of X Confirm that the Apert AL mode is at the current center Reset the Apert AL mode Upon completion of the adjustment of X click on the Mid of X and then click on Y After clicking on the Max of start the Apert AL mode and adjust the alignment knob so as to obtain the current center conditions Perform final adjustments using a numeric input value Part No 595 8030 9 45 Adjustments 10 completion of the adjustment process click on Get and Set in that order the Apert AL mode remains in operation 11 Confirm that the Apert AL mode remains at the current center even w
161. Small electrical appliance household apparatus Table 3 3 Source of Artificial Noise external noise interference Classification Electrical device with contact Cause Discharge noise spark arc Interference Source Contact neon sign decoration lamp relay electromagnetic conductor thermostat electric kotatsu electric mat refrigerator iron sash register Device with commutator motor Discharge noise spark arc noise by sliding and contacting Electric drill dental engine sewing machine motor vacuum cleaner mixer razor massager Discharge tube Glow discharge Neon discharge tube high pressure mercury discharge lam Control device with semiconductor Phase control noise transient noise Thyristor dimmer inverter High frequency facilities Industrial high frequency facilities Unnecessary signal Industrial high frequency heater high frequency welder microwave oven High frequency medical facilities Unnecessary signal VHF medical equipment UHF medical equipment surgeon s electric knife Ultrasonic facilities Unnecessary signal Flaw detector sounding machine fish finder ultrasonic washer Power facilities Power line transmission line High voltage large current Commercial frequency induction electrostatic induction electromagnetic induction ground leakage current Discharge noise spark arc Coro
162. TVs 170827 z 1 0581 2 5 17081 0 1 19 210 oy 0127 C122 3 42 oou LD1 7 16v vec xG AG vey ELCO 6P CAD EF 131 7 NG NG 15V HIF 4 16P 7 E 4d RE A 5200 SEX N KANEOKA 1999 07 15 SGVA A A K KAGEYAMA 1999 07 15 511887 TRE REE 2 m ES 55 s o0TSUKA 1999 07 15 NT 321 25318398 6 18 SGVA 6 6 12 33
163. Tasso mari 762 lt 1O 120 maro lt G VS_N oe mas MA2 face rovs zag EE CH1 non 758 MA2 6 gt i24 core pas 57 MA2 5 rn ms ss 22 voo 1 POOC702 ew 1 uv i28 53 MA2 129 DNO 752 2 55 1 130 A MA2 tiren irma SLEW gr mar lt gt si 3608 tea Pasa SNe 7 iss 39 EE 66MHZ 1 NT MESES as 3 3V RESET_N yee ee esi 77 F ise cso i23 140 gt d he 41 DQMO 123 1 Foe ae Dam 123 euo 3 143 B 3v YP vee sz NE ef ee onnmen fF nana 88235885222828820322888282322222222237 a niall alo A Afalala lalala gt n o o n gt aa alaala alaala lalalalalalala VIV VIV V V V V VIV Iv Nnm 00 00 01 0 0 000000 0 01 200000 0 0 0000000 m 25522
164. Troubleshooting Cause amp Remedy This message will be shown when the present position data is out of the movable area of the axis If the message is shown frequently contact a service engineer Internal error message Ignore it Click OK An error occurred while transferring files to or from a remote computer Check corresponding setting Cause amp Remedy This message will be shown when the HV is shut off by degradation of the vacuum safety protection activated or setting the specimen holder at the entrance of the specimen exchange chamber First check if the specimen holder is in the specimen chamber Next check the ion pump vacuum If the ion pump vacuum is not good wait until the vacuum of ion pumps recovers to the specified value HV indication will start blinking in yellow And then turn the HV on If this message is shown frequently contact a service engineer This message will be shown when HV is shut off by emission current limiter Make flashing operation and then turn HV on If this message is shown frequently contact a service engineer This message will be shown when 24 hr have passed or 8 hr of accumulative HV on time have passed since last flashing operation Execute flashing within 30 min If you do not flash within 30 min HV will be shut off automatically This message will be shown when HV is shut off automatically Execute flashing and then turn HV on This message will be shown when 24 hr h
165. c2 24 23 22 21 20 A19 A1B DL1 2 GL 9N03D 10 4 9 sle l SC SEC ele VACCUME iic 4 op 012 2 GL 9N03D A16 10 A15 95 14 818 NE LI 11 28 Ato aL 7 4 op DL3 2 GL 9N03D EN Ja 4 ae 17 5 al op 014 2 GL 9N03D 850 10 829 a A 825 5 27 826 2 825 B24 oP A31 B31 cst 32 B32 c32 DAY 015 2 23 GE a C28 8 i oH e 4 24 3 G 4 op DL6 2 GL 9NO3D 821 afe 820 as Ll LI 817 4 op TIME 017 2 GL SN03D C23 10 218 20 515 cis 419 18 2c C17 3 G B12 7 LED85 N LED84 N LED835 N LED82 N LED81 N LED80 N LED75 N LED74 N LED73 N LED72 N LED71 N LED70 N LED65 N LED64 N LED63 N LED62 N LED61 N LED60 N CNA 2 CNA 2 LAG 5 uP oS sw 2 2 810 SWi4 N ciso R13 2 Yo NW gp e lt 1 096 na 1 12 DOWN 1 sw2 ok cio SW13 N R14 2 vio
166. is lit Amplifier Indicator Lamps The amplifier is equipped with the LED indicator lamp to indicate the operational condition Table 5 15 Symbol Color Display LD 8 Green Power ON LD 1201 Green Controller enabled servo ON LD 4204 Red Stop on power failure function running LD 2202 Red Stop on over speed function running LD 3203 Red Stop on overload overheat overcurrent function running LD 5205 Green In position state 5 34 S 5200 Field Emission Scanning Electron Microscope Service Manual Adjusting the Controller Electric Theory Amplifier Unit Adjustment Volume and Check Pins Symbol Volume F V FV 0 OFF VR6 206 L G M G C L VR5 205 X axis Y axis Table 5 16 Adjustment F V signal voltage adjustment F V signal voltage offset adjustment Offset adjustment D A conversion voltage offset adjustment Position loop gain adjustment Speed loop gain adjustment Current limit settings Over speed settings Check pins F V CUR SPD COM Velocity feedback F V signal Motor output current D A conversion voltage signal Signal circuit COM The signals in the 200s represent the Y axis Other than the numbers the X and Y axes indicate the same values with different locations See the layout diagram for the various locations Amplifier Adjustment Although the various volumes are adjusted before the system is shipped power fluctuations may require offset adjustments
167. lt anol 4 4 4 0000000060 3 2 3 254 z 3 s gt gt gt gt gt gt gt gt gt gt gt 6 4 4 of 344 344 4 nsi vec ET u vec ET a2 as d a2 as 417 0 a B a x a sla 1 1 cns v 1 v CO IOO Lvcuie2aa Lvenie2aal Lvenie2aal PE EREEREER E TES voo1 lt 15 gt 47 ia1 ava 2 vbolo ise R i5 az iai avi 2 Gersa seso _ B5 PRI 5525 5312151552 2 Zla veoio 1az 1 2 asiaa pave a G ia geet cS Ssh SS So eee eg eZee 14 Bc pt esie 3 E PLE IEEE EREET gE ies ees VDOi i37aa ias D iva s vbOlocia R 13 gt vboio is ava Geis vporo aya 5 B 13 z 12 43 ias ava 6 vooo R i2 gt voor aa lias G 12 ava B 12 PUES A Ree G HS A Ms d lt 11 voo10 lt 11 R 11 voor G ii voore va cvi s sod WS east VDOI 10 22 9 vooio io ans s R 10 gt vboio ava 5 G io3 vboio B 103 a ane 5 Voor 6 3422 as veciazer ava 6262 Veers s ss avs sa B mac gt lt Jos VBO1 8 32 i2
168. operation Execute flashing within 30 min If you do not flash within 30 min HV will be shut off automatically This message will be shown when HV is shut off automatically Execute flashing and then turn HV on This message will be shown when 24 hr have passed or 8 hr of accumulative HV on time have passed since last flashing operation Execute flashing and then turn HV on This message will be shown when temperature of high power electric circuitry exceeds specified value Turn the EO control switch off Wait for about 30 min Then turn the switch on and start operation If the message is shown frequently contact a service engineer S 5200 Field Emission Scanning Electron Microscope Service Manual 7201 7202 7203 7204 7777 Part No 595 8030 an hour When this message is shown again contact service engineer Detection of an error in the cooling function for the objective lens If the column temperature around the objective lens is about 40 shut down the PC and turn the DISPLAY switch off Wait for more than 5 hours When the temperature of objective lens returns the room temperature turn the DISPLAY switch on and check the cooling water flow and water temperature Water flow 1 to 1 5 L min Water temperature 10 to 20 Temperature has recovered Specified Height mode not allowed Specified Accelerating voltage not allowed Host and SEM Controller are not communicating Confirm that
169. return the target which has shifted from the center of the SEM screen to the center 5 Return the tilt angle to 0 Return the target that has shifted from the center of the SEM screen to the center by means of specimen micro motions 6 the image to 20 Use the tilt axis center adjustment screw to return the target that has shifted from the center of the SEM screen to the center 7 the image to 20 Return the target that has shifted from the center of the SEM screen to the center by means of specimen micro motions 8 Repeat the above steps 4 through 7 Perform adjustments so that ultimately the shift ofthe target from the center of the SEM screen is less than 2 jun Use the length measurement cursor 9 Ata tilt angle of 0 press the Reset button in the Column Use the specimen position correction screw to focus Return the target that has shifted from the center of the SEM screen to the center by means of specimen micro motions 10 Repeat the above steps 4 through 9 Perform adjustments with the target in focus so that the shift of the target from the center of the SEM screen is less than 3 um 11 Turn the tilt drive mechanism clockwise to reset the Tilt gear 12 Ata tilt angle of 5 auto mode confirm that the shift by the target is less than 1 um 13 While performing adjustments using the specimen position correction screw so that the center of the specimen tilt matches th
170. sewer VDI 2 1 lt 6 4 102 102 3 VDI 2 0 6 ma GND 57 2 1 ie 1 s VDIZ 0 5 maaa RSet VOL2 i 4 as ior pp e VDI 2 0 a Vora ressa vorz 0 3 zou ono wae _ gt VDI2 1 2 4o 1 VDI 2 0 2 HETN rovs 1 c P2 02 ms SST MAS 7 VO a asirga i se ii Pons se MAS 6 gt Vol 2 a 0537 150 19 a2 VDr2 6 o mas sz s 0 2 56 4 VDI 2 7 mr VDI 2 3 lt 7 gt a s maa VDI 2 1655 20 2921 VDI 2 3 6 T e voo I 7 2 224 VDI2 1 5 33 20 29 16 Vbr2 3 5 vos 3 VDI 2 1 lt 4 254 a7 VDI2 3 43 53 MA3 lt 3 gt J 222 onn maz 52 VDI 2 1 2 gt 29 206 206 20 VDI 2 3 2 23 SSS ss pe NE 5 204 so 7 VBLZ i izs ae 25 22 vor 321 wao 23 z VDI 2 1 lt gt 208 208 23 VDI 2 GND gt trom 233 as lt a a6 66MHZ 1 po see 25 iaa T eux 5 93 3v ace RESET_N vae aa m PS24 EDO ones pra P 12200 TEST ua 201 Pub rier ue Pas 201
171. 1 0 0 2 5 0 278 3 10 1 111 4 5 0 278 5 10 1 111 Set the angle of the axis to 40 or greater Confirm that the motor does not move more than 40 Set the angle of the axis to 40 or greater Confirm that the motor does not move more than 40 Set the angle of the axis to an appropriate non zero value Turn off both the SEM and VRT Reboot the VRT Confirm that the axis moves to 0 Start the SEM On the display confirm that the angle is at 0 Turn off both the SEM and VRT again Reboot the VRT Confirm that the axis does not move X Y Stage Controller The adjustment VRs for the X Y stage controller are adjusted at the time the system is delivered Therefore they should not be rotated by unauthorized personnel If any adjustment of the VR is needed please contact the factory Confirming the Micro motions of the Specimen 1 9 28 Confirm that the following position settings are in effect when the Go to Home button on the Stage Control window is pressed X axis 0 000 Y axis 0 000 Tilt 0 0 0 1 Confirm the following when the STAGE RESET switch on the evacuation control panel is pressed a short buzzer sounds off and the stage moves upon completion of the motion the short buzzer sounds again and the stage is set to the position indicated in step 1 above Confirming the limiter Set the lowest magnification power in the LM mode Confirm the items below When the trackball is continuously mov
172. 1 74 VDii i 72 amp i 2 1 o gt 3 i s as VIDO 6 ViDO 6 as ies 102 5 vori 1 67 VDI1 1 6ze 152 VDI 1 0 6 pe Boer aa VIDOS ViDO 5 aa 153 1903 8 VDI 1 1 5 VDri i s5z ios 10 5 VDI 1 0 5 a2 3 D lt 4 e i a3 VIDO a ViDo a 3104 9 VDI 1 1 4 VDI a rcas e VDI 1 O lt 4 j PEN Bim no Ses sss 2 1 pisi veracaest Nee l verice cs 23509 D 2 gt s Vibo 2 gt 100 2 aes VDI 1 1 2 VDI 1 1 246 ape VDI 1 lt 2 vost D lt 1 gt 11 38 V1DO 1 VvV1DO 1 12 VDI 1 1 1 VDI 1 1 107 197 11 DI 1 0 15 ado vap 5 D lt o 12 iss ias 37 V1DO O 37 ios aos 12 VDI 1 1 0 VDI 1 120 ios 12VDI 1 0 0 a27 5 Buena vapor sae da xa 2m _asvora 2 lt 7 gt 2253 D 6 14 2a2 3s V2D0 6 V2D0 6 gt as 252 202 1 6 voricreeee e TEARRE 16 33 V2D0 5 V200 5 gt 33 203 203 5 e 20 2 5 7 pale vipadt 17 32 V2DO A V2D0 4 gt 32 204 204 a7 1 4 VDI 1 lt 4 254 jy 204 i7 VDI 1 2 lt 4 w TTY T le D 3 is pas 3e sav i sb verae 8 4 B24 lt
173. 10 6 0 10 10 0 10 10 0 10 CAUTIONS e The allowable amplitude corresponds to image sway of 0 2 mm max on photograph taken at a magnification of 600 000 x e vibration waveform is regarded as sine wave Each frequency component is concentrated on the peak frequency for waves that are not sinusoidal Current technology cannot eliminate ultra low frequency vibrations with a frequency of 1 Hz or less Alinear line connecting each allowable value is interpolated for areas in the range of 1 Hz to 10 Hz e Contact HIG if the floor vibration exceeds the allowable values Measure the vibration if a harmful vibration is suspected Vibration with 10 Hz or more Contact HID if the peak vibration exceeds 10 Hz 3 1 8 Room Temperature and Humidity Room temperature 15 C to 25 C Temperature fluctuations should be less than 5 C during operation of the instrument Humidity 60 or less Part No 595 8030 3 5 Installation 3 1 9 Power Line and Electric Field Noise Image troubles may occur when a device listed in Table 3 3 or its power line is installed nearby or even if it is distant if it is a heavy duty type When selecting of installation site absence of such noise sources shall be confirmed When equipment energized by power of a frequency different from the commercial frequency employed on the SEM XMA or the power line for such equipment is located nearby power synchronous scanning will become ineffective
174. 14 0 14 0 1 1 gt 15 77 e 5 ICU2 ICT2 ICS2 ICW8 ICVB ICF3 ICE6 ICE ICF6 IC r r 512 C136 C137 C138 C139 C140 C142 C143 C150 C151 C153 0 1u 1u 1u 1u To 0 10 0 1 o CAD z BEAR RE A 35200 3 5 2 19 ET EVO SEDES GB K KAGEYAMA 1998 02 19 15 7 7B EVACSEQ P C B 1 5 MPUD 15 8 penran CN153 CEVICCN ICT3 ICY4 ICY3 LS373 LS374 1506 3 1 2715 MPUD lt 15 gt 18 57 0719 HRD lt 7 gt HRD lt 7 gt 11 50 10 RDATA7 N 87 2 171222 2206 _ 14 gt 1706 HRD 6 gt HRD lt 6 gt 13 12 85 RDATAG N ABS 5 14 55 s 15__MPUD lt 13 gt talos Qs Hs HRD lt 5 gt HRD lt 5 gt 5 i
175. 15248 a WI N Sqjcs ourB Alag ti D lt gt E20209 gt us 52 IS 30U 14 D 1 1 CLR AGNDB R37 513 3 DGND 4 7 ALS ey D 2 VDD w B13 D 3 18 15 lt 4 gt IS 30U 8120 4 D lt S gt 15044 17 D lt 6 gt 150 Bio 2 918 eD Bis E 16 26 4 250758 DG 044 33 FRCS 4 3 DB UREFA w POP 5 DBS y DBS Ry X v Sho M DBS 037 Y 258727 Sama DUN4_N B T i DBO CNS2 59 1 Pur 15 384 Ss 4 5 WS_N 18cq cS Lay 250 20235 37 Bi a o ICML WE BK N lB j R mb et Q 10 p isu gf 6 HIF4 4 P AMP 4P gt Y 1 ours 8 132 LOGIC a a p po 14 GND 5123 12 12 2 BU 77 15 C R C ICYS 5 EF 98 CAD m lt X E 23 USING NO RI R24 R28754 228 88 4 4HH E RE 2 c S gena gt C1 20 1967199 5 6 em GC DEF LENS P C RESERVED NO R59 R6 R58 C28 N A C23 24 A KANEOKA 1999 23 26 at Bes 2 FRR LN TRUM AYES PT 321 25318381 L 5 1939 83 25 3 21020 5 19 DEF LENS P C B 1 5 EBLE
176. 1774 sTGe Ae voc 5 5 7 gt lt 51774 sTG7 exe gt lt vod PCN1096P M 17 NC 8850 080 170I H M 37 xX PCN1096P A 777 LED lt 7 gt 2 LEDO7 N B37 gt LED lt 6 gt 5 LEDO6 N LED S e 2 73 LEDOS N LED 4 gt E 2 gt LEDOA N LED 3 gt 12 LEDO3 N 1s2074 LED 15 LEDO2 N LED 1 gt 16 LEDO1 N 38 gt TPL 19 gt LEDOO N vec ass 4 OKO gt cce aes be vece HQ vee d 100u Ne 5 vec vec gt lt OFO O ca vcc vcc 2 lt 7 7 cary voc WT 9 77 2 PCN1096P Nus 8850 080 1701 H PKB24SPC 3601 BYPATH CONDENSORS 1 c2 1 5 1 c6 lt 4 1u lu 1u 1u Oo 1u 777 CAD SF325B 3 S 5200 505 E 4 EMS 1 N o9 BS 2 IL K KAGEYAMA 1997 09 25 YAOI VV Z 5 OOTSUKA 1997 7097 25 21 1 P C B KAI RO 12 44 KAI RO rar ion 4
177. 2 2k Q31 R86 47y TON 885 EXB1 ON L RT11 iem to VIN Noa Zn2 Zn7 1LM4040C12 10 0 Q32 pe TR2 TR7 N1 N2 33 440 GND COL 77 152074 1 5 0 10 REM GND LOGIC CAD 103 RE 5 5200 as A A 35 K KAGEYAMA 2000 10 21 P C B A N KANEOKA 2000 10 21 stilas 7 JL Z AB rco 471 2 21870 3 A 28 S OOTSUKA 2000 10 21 2 12 16 10 PMHV 1 2 90181550 POST CNB4 106 CNB6 RYS 9 418V L COL 1 7 12 13 4 3 1 2 c38 C39 2 7170 14 2 47 16V 77 a 6 1 POST ON L GND_COL RYS GND COL i
178. 23V relative to an input voltage of DC24V Therefore the XY stage controller is set to a non operating value Part No 595 8030 5 33 Electric Theory Overload Detected Parameter Excessive output current armature current Detected Problem e Motor overload NOTE The detected parameter is subject to an inverse time limit Post detection Action Servo off Indicator lamp LD 2303 is lit indictor characteristics such that panel E 2 is lit tf I CONSTANT as illustrated Figure 5 27 I 1 0 54 Appr 1 1 1 Li 1 28 Current A l Figure 5 27 Over heating Excessive rise in output Controller overload used Servo off stage power transistor temperature continuously under an allowable output current anomaly Abnormal rise in ambient temperature Abnormal rise in temperature due to poor radiation Overheating due to a power transistor failure e Indicator lamp LD 2303 is lit indictor panel 2 is lit Over current Excessive output current e Shorting between motor output pins Motor coils Servo off e Indicator lamp LD 2202 is lit indictor panel E 2 is lit Overflow Excessive reserve pulse in the deviation counter 6144 pulses Abnormal F V voltage adjustment Abnormal motor response motor locked falling torque Control board error Servo off Indicator panel E 2
179. 42 SYSTEM GATE ARRAY ara 28 CPU BOARD IMAGE MEMORY BOARD BLOCK DIAGRAM SG NA DEF LENS SG VA RS2320 Ethernet 5 HSCN VSCN CN1 CN2 as 1 pee 2 NSEM100 1 NMEM100 ECPU247 i di m Image Memory Board Photo CRT i i Image Memory NTSC PAL Analog output Standard I Timing DAC F SCSI Bus Interface 32MByte i 1 i 1 1 1 I i s 1 j p4 i 1 pem pisces I CN14 Timing Control C 4 t J1 J2 J3 J4 i I 1 1 CN12 RGB Analog output 256 color Line plofile PARE SEL I 1 1 ate nice cite a Photo Overlay 1010 imopser 2580x 1820d0t6 abit abit Ach digital output o Nor oprocessor wie ps B ch pals loo im eu quaes tlic NTSC PAL Input Data Overlay Analog output Analog I Image Data Bus Input Input mg Processing 3 mage i ous LUT Memory Memory ceaoxasodots gh ie E Controller jt SEL XRAY gt Input NW z 1
180. 43 PCHDSUM Text 44 PCHDCHGDATE Text 45 PCHDNUM Numeric 46 VRTBATTERYNUM Text 8 38 S 5200 Field Emission Scanning Electron Microscope Service Manual System Operation Meaning 47 VRTBATTERYCHGDATE 48 VRTBATTERYNUM 49 LASTDATE 50 LASTCOMMAND 51 LASTPARA 52 SEMOFFERROR 53 HVNERROR 54 MAKEDATAE 55 TABLENUMBER Text Numeric Date time Text Text Numeric Numeric Date time Numeric Date and time of latest data in Etc table Command for the above item Parameter for the above item Number of times SEMOFF was missing Number of consecutive HVNs Date last record was created Sequence number of record In principle each component part consists of three data items cumulative uptime replacement date and index number of times the item has been replaced Part No 595 8030 8 39 System Operation 8 4 Getting Started with the System 841 Confirming the Vacuum Level Before starting the operation of the system confirm the following items regarding the evacuation operation panel lamps P2 and 3 are on e IP2 and have a vacuum level that exceed the following levels 2x10 Pa IP2 2x10 Pa IP3 7x10 Pa In the case of a poor IP vacuum baking processing should be conducted EVAC POWER switch is at the position DP MP WATER and AIR PRES lamp
181. 4500 S 4700 which achieves the highly efficient detection of secondary electrons in a manner that does not produce axial deviations Control over the Detection Ratio between SE Signals and BSE Signals by means of a Secondary Electron Detector The secondary electron detector for the S 5200 can detect SE and BSE signals at a variable ratio which produces an optimum image according to a given application or objective L E E UT vete NN os f H 1 T i4 tS Secondary Electron Image An image using Backscattered Electron Information Specimen A multi layer film on glass Accelerating voltage 5 kV Magnification 50 000 Figure 1 7 Signal Control Function of the Secondary Electron Detector Low acceleration Reflection Electron Detector Optional The S 5200 can accept an optional low acceleration reflection electron detector capable of detecting low acceleration reflected electrons that are generated at a high angle from the specimen The reflection electron detector can achieve relatively high detection sensitivity for reflected electrons with an energy level of 5 kV or less Reflected electron signals can be mixed with secondary electron signals at a variable ratio Figure 1 8 shows an example of the application of the low acceleration reflection electron detector to a semi spherical capacitor insulator for DRAM Part No 595 8030 Introduction Low acceleration re
182. 5 Etrom FPGA160 WES gt 1502 5 a 5851 N 5021 SKERP s 2551 TDAT N S Q s 155 lt MRDY P AAA HL 7 154 B29 lt 5021 SYA P a nes RELAY2 P ESN 2 D pee RELAYS Ne Jg Fen pas TM serna P T ENA N a27 0 15021 SeTN2 P 12 ee RUE 2 EVRED N Gee 562 282 EVSEL N 1 RL2 rA IDvNO 26 t 552 as 2851 VESEL N RL2 af Dyni N e 582 16 VEDAT N Vi DEO DVN2 25 582 17 3831 VUWRT P 1A4 RELAY2 P 4 27 BUNSEN azs 553 RS daas RELAYi P O PVN S eral E DvNS N 2 gt 20 aaa TP140 Mad is BTNi P EE BUNTON BTN F mos f 1 5821 TP24 7 BTN3 P 23 mee ENA M Q DVNI N Cp 5B2 XAOUT P Pes R N RL 22 AO t 552 26 135 DEO PRIPNTER ATE pner ROUT E s mee l o2 N lt 2 552 YBOUT P pass N 25 mee Roan A SE 55 B A lt o gt aro 63 5 bacsi HVWRTSN s 12 rage ni ede 5 2551 HVWRT2N E 22 AV EE C483 HVRED2 N 35
183. 5 kV and from 15 kV to 30 kV Specifications lt 15 um Magnification Center Condition Accelerating voltage 5 kV Sample Height 0 0 mm Magnification 1500 Specifications Slow scanning within a 10 mm diameter from the center of the SEM screen TV scanning within a 10 mm diameter from the center of the SEM screen Image Shift Between Scanning Speeds Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 1500 Procedures Measure the shift based on Slow 3 as a reference Specifications Left side Center Right side Slow 1 1 0 mm 0 5 mm 1 0 mm Slow 2 lt 0 5 mm lt 0 5 lt 0 5 Slow 3 lt 0 5mm lt 0 5mm lt 0 5 mm Part No 595 8030 9 9 Adjustments Between TV 1 and Slow1 Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 5000 Procedures Measure the shift based on Slow 3 as a reference Specifications Left side Center Right side X direction 3 0 mm 2 0 mm 3 0 mm Y direction 3 0 mm 2 0 mm 3 0 mm Line Analysis Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 1500 Procedures X direction Measure any shift between the image and the waveform Y direction Measure the position shift in the Y direction Use
184. 50 10 LLL mE 4 P R13 R14 R15 R16 R17 0 Di 02 wa 470k 470k 470k 470k 470k 4 6 R11 WN WW VN AAA T 150 R1 0032 14 10k e eX C Y E 3 5 RA 01 R12 R19 R20 821 R22 R23 P ZR 220k 470k 470k 470k 470k 470k R2 AAA WA ANN AA NAA NAN 10k AAA 519 R3 tp gt 100 130 120 110 100 KO 80010 K D2 04 06 D8 R24 77 lt 470k R6 Sy 15V 7820k c5 10u 7 7 0 010 T F aa R7 KARE so BC 7 T 10 11 7 R12 18 220k R13 R17 470k R19 R24 470k 118 2 5 CAD F A 5520 gs HE Ag gt FAE 54 K KAGEYAMA 2000 10 21 NZ HEAD AMP P C B N KANEOKA 2000 10 21 Z ut WE Meu BIAS i Maat SS 22 A 2 S 00TUKA 2000 10 21 J 229 lcHEAD AMP Po UO E KAIRO 12 18 ND GUARD cy 2 VU VW y o Gain 0 01V nA 0 1V nA O Iu 1 0V nA RLS 10V nA RLS pS g 5V Se hy FAG nul 12 MONITOR 12 19
185. 5200 guarantees a secondary electronic image resolution of 0 5 nm Ct Cpa halt Figure 1 3 Secondary Electronic Image Resolution Accelerating voltage 30 kV Magnification 600 000 S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual Achieving Nanometer level Observations at a Practical Accelerating voltage Accelerating voltages ranging from 2 kV to 10 kV are frequently used in the observation of cross sectional profiles of semiconductors The S 5200 makes high resolution observations possible at such practical usage conditions Figure 1 4 shows the relationship calculated values between the attainable resolution of the S 5200 and the accelerating voltage The specimen height shown in Figure 1 4 denotes the height of the observation surface based upon the standard specimen position the X ray analysis position The maximum accelerating voltage that can be used under the condition of specimen height 1 5 mm is 10 kV Figure 1 5 1 I 7111 T TT TJ TIT F Y SURGE Standard specimen holder 7 uceniassa 0 1 1 14 100 Accelerating Va amp age kV Figure 1 4 Relationship Calculated Values between Resolution and Accelerating voltage for the S 5200 5 0 Cross sectional height 4 5 mm With cross sectional 40m speciman stub 3 5 specimen thickness 3 0 mn 2mm Max NOTE Uta The cross se
186. 7 2 e PC SEM exe e SEM hlp e PC SEM ent e Ras exe SetlpAdr exe The following principal files exist in the directory c Winnt systems32 which holds shared programs on the PC For a description of these files refer to Section 7 2 Semlmg32 dll e ToyLib dll e PciLib dll Other dll ocx files The following file exists in the directory c Winnt Systems32 drivers WinRt sys The following files exist in the directory C Vrtsys This directory holds VRT control programs When the system Is started the files indicated by are downloaded onto the VRT For a description of these files refer to Section 7 2 e vxWorks e vxWorks sym e vxWorks mapA e vxWorks mapL Ftpserv exe e Ctr bmp Part No 595 8030 7 3 Software Files that are Used The following files stored in the directory c Program Files PC_SEM are either created or used by 55200 programs e SEM mdb Image DB file RasCodeJ mdb RasCodeE mdb Used in a self test program EOAdjust ini Electro optical system adjustment screen file e MesParam ini Measurement parameter file e MesCalib mdb Measurement calibration file e Stage ini Stage registration coordinates file e mpAdj ini Imposer adjustment file The following file is stored in the directory c Vrtsys alignment mem dat Files that are Created The following files are user generated during the operation of the 5200 e Observation parameters
187. 8 V DC 5V DC 7 5V DC 2 14 S 5200 Field Emission Scanning Electron Microscope Service Manual Safety No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes 8 PC DEF P C B 35 V DC 15 V DC 9 EVAC SEQ P C B 24 V DC 15 V DC 12V DC 2 5V DG 10 EVAC PANEL 1 P C B 5V DC 11 EVAC PANEL 2 P C B 5VDC 12 EVAC PANEL 3 P C B 5VDC 13 ST DIST P C B 24 V DC 15 V DC 5V DC 14 XY CONTROLLER 24 V DC 15 V DC 5V DC 15 TILT CONT P C B 15 V DC 10 V DC 5V DG 16 TMP CONTROLLER 100 V AC 17 TMP 18 FE GUN 500 30 000 V DC 19 ION PUMP 1 2 3 5 000 V DC 20 10 KV POWER SUPPLY 10 000 V DC 16 VDC Table 2 7 Hazardous Voltages and Maintenance Type for Photo Unit Option Boards No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes 1 PHOTO 1 2 000 DC 1 600 V DC 100 V DC E 15 V DC 2 PHOTO 2 15 V DC 6 V DC 2VDC 3 PHOTO CRT 10 000 V DC 2 000 V DC 600 V DC 4 10 KV POWER SUPPLY 10 000 V DC 15 V DC Part No 595 8030 2 15 Safety Maintenance Type 4 Procedure Perform the following maintenance procedure for the boards applicable to maintenance type 4 Turn off all power to the instrument Remove the cover Connect all the check terminals to a digital voltmeter and an oscilloscope Clear the work area and turn on the power to the instr
188. AE Ho ILA es s 1 IN 1541 IESU rat xi E 1 Objective lens Pole piece LL W 5 5 us WV gt B lu Objective El lens coil X dE Cooling water pipe Figure 6 5 Objective Lens Unit Configuration Cross sectional Diagram Part No 595 8030 6 5 Mechanical Configuration 6 2 4 Specimen Goniometer Stage Structure The specimen goniometer stage features a side entry design it consists of T Y Tilt and AZ mechanisms Figure 6 6 shows a configuration cross sectional diagram of the specimen goniometer stage Sprin Linear actuater an X axis Thrust lot axis centering nut Round fulcrum Airlock Linear actuator Y axis motor 7 lt lt lt lt lt ndr PATI LE SYSKYSKAX S SPSS i 7 Linear actuater Y axis motor Linear actuater T axis motor Tilt axis centering screw Figure 6 6 Specimen Goniometer Stage Configuration Cross sectional Diagram 6 6 Mechanical Configuration S 5200 Field Emission Scanning Electron Microscope Service Manual 6 2 5 Beam Blanking Unit Structure Figure 6 7 shows a cross sectional diagram of the beam blanking unit Electrode Electrode Electrode Figure 6 7 Beam Blanking Unit Cross sectional Diagram 6 2 6 ExB Coil Unit Structu
189. Amplifier Error Detection Function Cause Detected Problem Post detection Action Power outage Drop in supply voltage Power input less than 14 V Servo off e Indicator lamp LD 4204 is lit indictor panel E 2 is lit Over speed Excessive output voltage Motor fault and motor connection armature voltage error wire bad polarity poor conduction Encoder connection error line breakage A B phases connected in reverse poor conduction Encoder damaged A phase problem e Encoder not connected NOTE For an XY stage controller the maximum output voltage is DC 23V relative to an input voltage of DC24V Therefore the XY stage controller is set to a non operating value Part No 595 8030 11 7 Troubleshooting Cause Overload Detected Parameter Value Excessive output current armature current Detected Problem Motor overload Note The detected parameter is subject to an inverse time limit characteristics such that tf I CONSTANT as illustrated Figure 5 27 Current Figure 5 27 Post detection Action Servo off Indicator lamp LD 2303 is lit indictor panel E 2 is lit Over heating Excessive rise in output stage power transistor temperature Controller overload used continuously under an allowable output current anomaly Abnormal rise in ambient temperature Abnormal rise in temperature due to poor
190. B Sw N Sw C4 N LED_D4 N aa 95 LED A4 LED lt 4 gt ar 2 8107 LED34 N Sw D3 N Sw C3 N LED_D3 N 21 4 LED lt 3 gt LED lt 3 gt DA oa 2117 LED33 N A 26 SW_D2 N SW_C2 N LED_D2 N 22 5 2 92 LED lt 2 gt LED lt 2 gt Ds os 8135 LED32 N 826 SW_D1 N SW C1 N LED_D1 23 5 x LED lt 1 gt LED lt 1 gt 17 x 12 5 lt LED31 N SW_DO N SW N LED_DO N 24 5 ex LED O LED O 18 57 pr 19 8127 LED30 N bai d AT EC2 27 EC2 A Ti K cary SAS Ec2 B B27 2 GND GND 817 A r lt lt vec m 75 O GND d GND 818 11 GND gt GND 819 eee 4 vec 28 gt 228 EC3 A GND gt lt GND 820 B28 gt B28 EC3 B GND gt lt GND 822 F273 M i GND lt GND 22 777 LED 7 MNA LED27 N GND B11 GND 823 gt lt LED lt 6 ae es eu LED26 ECa A A290 Azon _ GND B12 gt lt GND 24 lt 1 LED lt 5 gt z es X LED25 N _ 5290 s29 M M LED A aa 18 56 LED24 N gt LED 3 gt ee ba 12 75 LED23 N LED 2 gt os os 35 7 9 LED22 N 5_ 430 5_ LED 1 gt aby 252 Pas 19 s 5 LED21 N ECS B B39 4 B Sw G3 N A247 SW R3 N LED lt 0 gt 18 BE o
191. Baking power supply will be Stop gun baking Wait for a few hours while the ECO mode is shut off Restart ion pumps And then start gun carrying out baking again Baking timer is not correct Baking power supply will be Press the Baking stop switch Set the Condition INNER TIME gt shut off baking timer correctly and then start gun OUTER TIME 2 baking again Failure of the u i Contact a service engineer Failure of the Pl2 MEE Contact a service engineer EVAC power is off when The evacuation system will Pull out the specimen holder to the the specimen holder is in not be off entrance of the specimen exchange the specimen chamber chamber Error of ECO mode caused ECO mode will not start Settle the problem and then start ECO by mode 1 EVAC power off 2 The specimen holder is in the specimen chamber While the baking is carrying out SEC EVAC AIR switch is set to AIR Timer setting is failed S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 9 Adjustments 9 1 Adjustment Overview Prior to being shipped the S 5200 is adjusted so that it can be used in optimal conditions Because the adjustments are made using special tools and measurement devices if the need for further adjustments arises please adjust only the affected part 9 2 Tolerances 9 2 1 Evacuation System Specifications Ultimate Vacuum Specimen Chamber 6 x 10 Pa max Refer
192. C C j 13 wi 434 is P 6 TM SS Pe36V C 5 01 B24 17 3 LI lt 4 gt 77 po A23 t RB 06 B23 us 1 2 y Nt gt RY2 A220 E 16 EE TIT B220 2 18 60 gt FL ON o 5 lo 8 gt 5 11 lt 4 0 TOES TP2 E ET TI VREF W DG441 t PS25522 R e 77 NN ICN1 77 gt 414244146 SRO 3 A 10k R15 vu 15240 22k M Ang 17 240 ps js 821 2 18 E11 15 14 10k 15 N fe ES C6 A20 15 5 FI2 et F S 4 021 T 820 FI3 i o iy Su 4 2N39 FLASHING h 2 SZ 5819 19 8 pu 0 lt 11 gt p R12 1u 2 16 25 121 lt 3 6 y 9 10 gt 24 100k a 07 1 cs 5 14 D lt 9 gt A G D3 D4 4 SEA ets SR20 B18 13 7 D lt 8 gt 7 182074 s 0 2 x isy A G FLA GND 5v ICM 77 5 m A17 17 18240 s D 75 TES A A 2 ue A18 15 ps _ 045 A R24 2025 5 1002 ICN2 2 56 ook C14 815 4 16 D 1u D 4 E D7 TP18 B15 11 p D lt 2 gt 152074 voec 2 C13 ICN3 RY3 14 6 14 D lt 1 gt 211 gt 2 O tu 1574 ULN2003 2 iger o 15 2380655 15 7 D 0 i Jl n Ly Q3 4 CN39 15 vi 10 26 5 5 Pr R27 5 S 11 5V r 2 gt 5 T ER 3 Nec 77 22x T E 15 0 lt 11 0 gt D R28 BR4 R21 c
193. Control power turns OFF Error message sensor appears Interlock Diagram The interlock diagram is shown in Figure 2 3 Emergency SW Circuit Diagram The emergency SW circuit diagram is shown in Figure 2 4 Part No 595 8030 2 7 8 EMERGENCY OFF SWITCH AC DIST UNIT POWER SUPPLY UNIT IP UL L POST VL COVER LL POST HV POWER GUN UL Be U POSTI L OPTION TRAP EL OPTION EMERGENCY OFF SWITCH EVAQ SEQ 04128 CN130 MAIN UNIT Figure 2 3 Interlock Diagram 8245404 C 62 1Y3H 828 8 31 430 DISPLAY UNIT B d Z O0LOHd PHOTO UNIT OPTION PHOTO Ajayes 5 5200 Field Emission Scanning Electron Microscope Service Manual ECT ral N t gt mam Be UT Part No 595 8030 Safety ircuit Diagram Emergency SW Ci Figure 2 4 2 9 Safety Protection Circuits The protection circuit operations are shown in Table 2 3 No 10 11 12 13 14 15 16 17 18 19 20 Location AC DIST UNIT Table 2 3 Protection Circuit Operations Protection Function Pa
194. EVACSEQ Board Circuit Diagram is shown in Figure 5 40 ay HPU EVAC SEG PUB Figure 5 40 EVACSEQ Board Circuit Diagram HEATERS 5 9 3 Adjusting the EVACSEQ Board Adjusting Pil specimen chamber 1 Set the specimen chamber to the normal atmospheric pressure 2 Adjust the volume VRS so that the voltage of TP12 will be 5 1 0 1 V 3 Setthe vacuum level display option to S C Pi Confirm that the display indicates a value of 9x10 Adjusting Pi2 1 Set the specimen exchange chamber to the normal atmospheric pressure 2 Adjust the volume VR6 so that the voltage of TP13 will be 5 1 0 1 V 3 Set the vacuum level display option to S E C Pi Confirm that the display indicates a value of 9x10 Adjusting Pe 1 Adjust the volume VR4 to a mid point Adjusting IP1 1 Check to see that the IP switch is OFF 2 Adjust the volume VR3 so that the voltage of TP7 will be 00 1 V 5 48 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual OY Adjust the volume 1 so that the voltage of TP6 will be 0 0 1 V Set the vacuum level display option to Confirm that the display indicates 101 Turn on the switch for IP1 Confirm that the LED for is on Confirm that the vacuum level indicator shows a normal value 2x10 2x10 Pa Adjusting IP2 cO 2000 RS As CES Check to see that the IP2 switch is OFF Adjust the
195. Fav 10RC uu Savin vs C19 47u R26 C9 C10 A S3 ZZ o ZZ oo 4 u FLA 12 R4 c2o QR nO oia TiS 5 012 1 621 gt 100 100u Re 0 74 R21 R22 R23 811 N 24K 51k 1 2k EM REF II ANN ANN FLA 1 Ag 5 FLA 5 Q3 cep R13 R14 R15 AB E 2501559 2 2k 51k 1 Vi REF Ons FLA 3 Vi GND 1 WW W Wy 14 33u AT FLA 4 yt 3 3k 87 04 ANN 019 gi er 61544 33u 256458 152074 B6 as gt 33 F GND 5 TE C16 33u REF GN 85 OAS FLA 7 ect Qe er CAD SF365B Y m 4 4 RE AI 200 ae FLA 9 25 al a us b 3209 B2 s A A MOURT 1998 02 25 WY ET HV2 E 81 A 1998 02 25 HAWEZI TESTS gt AUBERT 391 2531831 e A 1998 02 25 221 o 2 16 PC HV2 P C B 1 2 12 25 7 7k FLA FLA2 6 6 FLA 10 ao 840 V1 REF i IC12 122 7 2 Y gt x ic FLA 1
196. Microscope Introduction Service Manual 1 2 2 Standard Configuration Column 1 Display unit 1 Power supply unit 1 Compressor 1 Standard tools 1 set Spares consumables 1 set Instruction manual 1 set NOTE The photographing unit is optional and does not come standard NOTE The dry pump does not come standard and is to be supplied by Hitachi sales 1 2 3 Main Custom Accessories Option Photographing Unit Detector Photographing unit 5 photographing CRT camera 4 x 5 Polaroid film holder 1 exposure 4 x 5 Polaroid film holder 8 exposures 4 x 5 Polaroid film holder 10 exposures 6 x 7 roll film holder Upper backscattered electron detector YAG type backscattered electron detector Transmitted electron image detector with contrast aperture Energy dispersive X ray analyzer EDX Faraday cup objective lens aperture section Contamination Removal Anti contamination trap device Tandem evacuation system Specimen Holder Cross sectional specimen holder STEM mesh specimen holder SH holder Specimen rotation holder 2 axis tilting specimen holder Part No 595 8030 1 13 Introduction Display Others CD measurement DBC Digital Beam Controller connector RS 232C communication interface Ethernet network interface Keyboard mouse sharing function Hi Mouse Video amplifier Photomultiplier power supply Coolant circulator EDX system Autotransformer S 5200 Field Emission Scanning Elec
197. N 1 gt Baa AB RODTIST Fo Bass 5320071 AD pel lt 13 gt Aa AD PCI 12 Me ap rer 115 AD PCI 10 gt Bae d Bass AD sQ AD PCI 7 B2M Re AD peto 820 AB u 292 AB 202 Be AD 2 59 Ae PET a 4 20 Axe 8421717 Ar Baa 5 t 1 i NS y Q i hi 3 t t 3 6 4 gt d uH S NI 1119 14584440044 23244 14 lt lt lt lt lt lt V V V V 4 lt lt lt 2 HHHH HH 444 44 4444 2 44 3335 440 iz 152 9 101040 402225 22 2222 44 44 2 jd 2999 44994 od 8843 lt gt zs 5552 237 vcc lt
198. P83 AN y 5 D CT T gt 5 B53 15 A13 RESET N vcc lt 4 A2 DCTO 4 2 2 16 12 PNLRED N P80 AN8 0 lt 9 gt 3 A1 D lt 8 3 A1 17 11 DEC18 P 386 OU ENG D lt 8 gt 2 Ao 0 lt 8 gt 2 DEC10 P 388 AT 96 6 E his zem 95 5 i DIE i SEW P94 AN 4 53 8182 SCA SW POS AN3 E 3B4 ANE P92 AN 2 25 E ate 2E P91 AN an Tae P90 ANO CC 811 1k A B10 77 5 5 DENIS o LS245 15245 o D lt 7 gt 9 pelt A9 lt 7 gt ur TS 34 48 2 0 lt 5 gt 8 12 AB ACTL lt 6 gt 1254 0 lt 5 gt 7 5 5 13 7 ACTL lt 5 gt 13545 5A 7 N DA a 4 14 6 ACTL lt 4 gt 1454 4A 5 E D lt a gt 15 5 lt 3 gt 154 25 A03 P ouv 0525 4 2 2 16 A ACTL lt 2 gt 16 24 2 i Dci EE 1 17 ACTL lt 1 gt 17 178 01 0 lt 0 gt 21 18 244 ACTL lt O gt 18 aw 22 41809 A00 P 89 825 DIR E DIR 824 87 823 B6 22 85 B21 P vCC B4 B20 B3 B19 D 829 8184 1 212 1 15v sip 5 FRC5 60P Enix CONDENSORS ICU6 58 5 1005 ICP7 ICW6 5 ICX2 ICT ICQ3 ICX4 ICW4 ICV4 ICU4 4 ICS4 gt 5 vcc C103 C104 C105 C106 C107 C108 C110 11 C118 C119 C124 C126 C128 C129 C130 C131 100u 0 1u 0 14 0 1 Ed ET 1u 0 14 1 0 0 1u 0 1u 0 1u 0 1u 0
199. Pressing the Save button shifts the display to End Pressing the End button terminates the file recording process and returns control to the Save button Click on the Close button to terminate the display and return control to the Main Screen 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual D LIE Gage are PT aga Aran n VW Opar w akss F es T Lit Figure 8 4 TMP is Standard Pal IMGs amp Command retransmission ms intervals can dre be changed Figure 8 5 TMP is Tandem Part No 595 8030 8 15 System Operation 3 Save File Sum button File SUM oreate SUM Tas Calculate each file written in 3 St5unst log Button to display SUM Me M Indicate the calculated file Button to save SUM file to floppy disk Save SEM he SUM Table Button to close 05 Figure 8 6 File SUM Screen Function summary This button determines the SUM value for the file necessary for the SEM function it also creates and displays the file containing the SUM value determination results and copies it to a floppy disk 1 Pressing the Save File Sum button displays the File SUM screen Figure 8 6 2 Click on the Register button If a SUM table file 1 does not exist the system creates one Version information on the S 5200
200. Secondary side Fuse F11 2 0A T IP Pi and Pe short overcurrent vacuum display Max 30 XY CONT TILT CTL 5V Primary Fuse F4 3 2A T Stage does not DC DIST side short overcurrent operate 31 UNIT XY CONT TILT CTL 15V Primary Fuse F5 2 0 Stage does not side short overcurrent operate 32 XY CONT TILT CTL 15V Primary Fuse F6 2 0A T Stage does not side short overcurrent operate 33 TILT CTL 24V Primary side Fuse F7 2 0A T Stage does not short overcurrent operate 34 TILT CTL 24V Primary side Fuse F8 2 0A T Stage does not short overcurrent operate 35 XY CONT TILT CTL 5V Primary Fuse F12 3 2A T Stage does not side short overcurrent operate 36 XY CONT TILT CTL 15V Primary Fuse F13 2 0A T Stage does not side short overcurrent operate 37 XY CONT TILT CTL 15V Primary Fuse F14 2 0A Stage does not side short overcurrent operate 38 TILT CTL 24V Primary side Fuse F15 2 0A Stage does not short overcurrent operate 39 TILT CTL 24V Primary side Fuse F16 2 0A Stage does not short overcurrent operate Part No 595 8030 2 11 Safety 2 3 3 Hazardous Voltages and Maintenance Types Hazardous Voltages and Maintenance Type for Each Board The hazardous voltage for each board and the maintenance types are shown in Tables 2 4 2 5 2 6 and 2 7 The maintenance types are as follows Type 1 No power is applied to the instrument Type 2 Power is applied to the instrument The powered circuit is
201. Service Manual Options The figure below shows a screen on which optional functions can be set This screen can be started from Tool Option Setup of the menu Any option parameters set on this screen can be verified on the following version display screen Option Setup soiin v Stage Control Cell Counting Full Panel Connective System Port 1 Aux 2 OTHER2 Aux3 Aus 4 NONE Service Frequency 50 Hz Video Form NTSC E VideoAmp U BSE Video Printer Remove Photo Close Figure 7 15 Connective System Group Add button Remove button Adds an optional feature Options are added by using a factory supplied options disk Deletes optional functions that have been added You can specify the option to be deleted by selected an item on the list of installed options Text box in the Serial Number group Enter the system production number which is set when the system is Stage Control checkbox Cell Counting checkbox Port Group shipped Sets a stage option Sets the Cell Count option for the stage Aux 1 combo box Sets the type of auxiliary port detector Aux 2 combo box Sets the type of auxiliary port detector Aux 3 combo box Sets the type of auxiliary port detector Aux 4 combo box Sets the type of auxiliary port detector Service Group Frequency combo b
202. Set and Save in that order 4 Click on None disconnect In the HM mode set the magnification to 3 0 k set the Apert AL mode and perform shaft adjustments using the alignment knob If the image distortion and peripheral blurring are significantly large in this step release the Apert AL mode and perform the procedure Adjusting the Deflection Top Bottom Row Ratio using the current adjustment conditions 6 Bysetting the magnification to 2 5k first range click on Scan Offset U for EO Adjustment 2 7 Start the Apert AL mode Adjust the alignment knob X Y so that the objective lens current centers are aligned 8 Upon completion of the adjustments click on Get Set and Save in that order Adjustment Specifications The scanning center deviations on the CRT before and after the magnification rate change must be within 2 mm 9 Click on None disconnect Adjusting ExB Adjustment Conditions Accelerating voltage 0 8 kV 9 34 Emission 10 pA Probe Current mode Normal Specimen holder Spring actuated standard specimen holder Specimen Specimen stub with mesh Sample Height 0 0 mm Electrical alignment All mid points the reset condition Image shift Mid point the reset condition S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Axis Adjustment Coarse Adjustment 1 2 6 From Tool open the EO Adjustment 1 screen Turn off ExB Perform a Beam AL mechanical
203. Such adjustments should be performed according to the following procedures Offset Adjustment 1 on the power to move the motor to the origin In this step confirm that the motor has stopped even though the position adjustment for the actuator may not be complete display panel 000 2 Align the FV O pot for both the X and Y axes approximately to the center Figure 5 28 FV 0 Pot 3 Rotate the VR6 X axis and the VR206 Y axis so that the in position LED see the layout diagram lights up 4 Inthecondition up to step 3 rotate the FV O pot to confirm the range in which the in position LED lights up Align the FV O pot approximately to the middle of this range Part No 595 8030 5 35 Electric Theory Light off position 7 Ne Light off position Light on position Align to the center of the range Figure 5 29 Gain Adjustment already adjusted Connect an oscilloscope preferably a memory scope between the pulse check pins F V and COM Input the command pulses at the maximum desired speed Observe the motor response signals F V voltage 1 The type of motor waveform as illustrated in the figure indicates an appropriate gain setting the rule of thumb is a level just before an overshoot or undershoot condition occurs 2 Ifthe motor response waveform is not at an appropriate level adjust L G pot The rotation of the CW increases the gain and the propensity to generate on
204. Tuo 11 T 2 35 20 var 040 Ax BBR 6800 218 C20 3 30 27 sov 7 19 A 850 027 Q6 79k S3B XH A HZ18 MO 1212 18 CN57 84 5 SK5 10 WH 5 16 HiF4 26P 45V CN59 CN58 T 55 FO ONSE CN34 S3B XH A IOC S4B XH A f D5 105 16 4 F5 LT10850T F12 A FAN 2 FAN 1 our PT hy 55v AD HEUS cie 2 2A 6800u iu skia 1 5a R23 R24 Sov ig NETTO GL SPRS 2 0 4 Slow Deft 06 i vA 16 4 586 m LT1085CT 85 C60 i our c 2 5 910 3 3 An k CN156 R26 ub 81 5v SK13 5A 15 2 0A o D5SBA20 Pon CN27 ay 2 2 2 HIF4 16P 4 16 4V 1 LT1085CT F28 0 5A azo 159 dd 5 IN gpg QUT m sax qs 0 5A L 20 _ __ 2200 R74 878 GL SPRS 26 0 5 35 S1VB20 2015 nceller CN29 CN52 7 FTT C25 6 25 1057 16 4 3 27 71085 R79 m 67 5 25 C26 R36 1 3 28 IN our 1019 10 l l 65v ADJ AM C57 3 3K 0 68 3W 5 3A d 2 5 K 4 2 22000 R76 GL SPRS lL 0 R37 0 5 38 F29 0 5 S15VB20 12004 12004 0 82 R39 50 S1VB20 3 5 6 5 20 200v 200v 12k 15 B C29 Jaw 5 X AMP x 5P CN177 OO sate WY R38 a 1910 4700 2 USED NO R17 39 R71 81 160V
205. V 4 Set the vacuum level display to IP2 confirm that the display shows x 10 Pa 5 Tum the switch for IP2 ON 6 Confirm that the 2 LED comes on 7 Confirm that the vacuum level display shows a normal value 2 x 10 9 x 10 Pa Adjusting IP3 1 Confirm that the switch for is OFF 2 Adjust the volume VR202 so that the voltage of TP201 will be 0 0 1 V 3 Adjust the volume VR200 so that the voltage of TP10 will be 0 0 1 V 4 Set the vacuum level display to IP3 confirm that the display shows x 10 Pa 5 Turn the switch for IP3 ON 6 Confirm that the IP3 LED comes on 7 Confirm that the vacuum level display shows a normal value 2 x 10 9 x 10 Confirming the Ultimate Vacuum Level Close the AV 1 valve Perform checks three hours later Specimen chamber 6x 10 Pa or less IP 3 1x 107 Pa less When the S C AIR LOCK VALVE is opened the vacuum level should not be worse than 1 x 10 IP 2 5x 107 less IP 1 5x 10 Pa orless Checking the Evacuation in the Specimen Chamber When the EVAC Lock switch for the S C is in the LOCK position right the specimen chamber should never leak even when the AIR button is pressed Even when the EVAC Lock switch for the S C is on the left side the specimen chamber should not leak when the AIR button is pressed momentarily Leaking should occur only after the AIR button is pressed for at least two seconds The specimen c
206. V3 OPEN YES OLDER LOCK V3 V5 OPEN i User operation Control lt gt Decision 5 56 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual SC Leak Operation SC Evacuation Operation HOLDER IN OFF AUTO STOP TIME 3 30set SC EVAC SW ON NO BUZZER ON BUZZER SC AIR SW ON YES Dry pump NO MDP Normal Dry Pump YES Normal STOP ALL VALVE CLOSE TMP STOP TIMER DOWN STOP NO TIME 0 00 YES qu Dry Pump NO MDP Normal User operation V4 OPEN lt gt Decision qm Part No 595 8030 5 57 Electric Theory 5 9 5 Error Codes E 01 03 04 05 06 07 08 12 5 58 Failure on the DC power supply 24 V Over heating of a transformer in the power supply the temperature sensor is an optional accessory Over heating of the dry pump the temperature sensor is an optional accessory The dry pump stopped Blown out the fuse connecting to the penning gauge unit The turbo molecular pump stopped TMP 2 The turbo molecular pump of 50 liter second is an optional accessory The turbo molecular pump stopped TMP 1 Flow of the cooling water is larger than specified rate The water lamp blinking Table 5 20 Evacuation system will stop Evacuation system will stop Evacuation system will stop Evacuation system will stop
207. Y axis Enable lamp ON X axis Power 15V Figure 5 32 Speed 5 40 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual RS 232C I F Board Setting J1 J2 Settings J1 8000 side 42 54000 side 51 F side OFF 5 side OW Figure 5 33 Put the RS 232C board into the slot shown below and connect the cable to CN6507 on the hyper stage controller unit Stage Controller Figure 5 34 Backside of the Display PARAL I F Board Settings S1 amp S2 Settings ony 151 1 2 3 4 5 8 OFF 7 B ist 1 3 3 OFF 2 OFF Figure 5 35 Part No 595 8030 5 41 Electric Theory 5 7 4 Problem Stage Adjustment When the power the Reset SW is turned on sometimes an ERROR 2 error occurs during low speed operation which can cause a system malfunction in some cases by turning the power or the Reset SW on again the system may return to normal Cause The input command voltage for the V F voltage frequency conversion circuit IC in the stage controller sags during low speed operation due to a temperature drift which causes an impaired pulse transmission condition In the controller board circuits the V F converter is output only when the operating speed command output becomes a positive voltage at point A in the OPAMP at the lowest speed However a temperature increase or other changes in the ambient conditions
208. _ 7102 02 HRD 2 WES N 156 Aye 15 5 6 DEMUX MPUD 9 gt 4101 Qi 5 HRD 1 WE2 N 813 130468 5 EN2B vg PKG MPUD 8 3 po qo 2 HRD 0 WET N 14 125458 8 ys PIO WEO N 814 THis 4A 9 Voom Yen n I WO3H N 11 RES N 11 180 138 2 e 17 185 UE RE2 N 811 172428 2a 3 3 52 v2 513 412 16418 1a 4 2 s vip REO N 312 15 oa 5 1 0 vo 915 1914 m k LS374 MPUD lt 15 gt 185 4 19 lt 7 E DIR MPUD lt 14 gt 17 06 06116 HRD 6 C MPUD lt 13 gt 141 5 5515 HRD lt 5 gt MPUD lt 12 gt 13104 04112 HRD 4 MPUDCTD 8 55 95 2 HRD 3 gt MPUDCTO _7 0 02 6 HRD lt 2 gt MPUD lt 9 gt eB HRD lt gt MPUD lt 8 gt HRD lt O gt WO2H N df 185 oe FRCS 34P 1054 15374 MPUD lt 15 gt 18 p 0 19 HRD lt 7 gt MPUD lt 14 gt 17 06 Qs LE HRD lt 6 gt MPUD lt 15 gt 14 05 05115 HRD 5 MPUD lt 12 gt 13 D4 64 12 HRD 4 MPUD lt 11 8 039 HRD lt 3 gt MPUD lt 70 gt 7102 0216 HRD 2 MPUD lt 9 gt 4101 0115 HRD 1 MPUD 8 3100 qo 2 HRD 0 WOTH N 11 185 oo 1004 15374 MPUD lt 15 gt 18 D7 07119 HRD lt 7 gt MPUD lt 14 gt 17 06 06116 HRD 6 MPUD lt TS gt 14 bs 655 HRD lt 5 gt MPUDCT2 313 p gg 12 HRD 45 MPUDCTTI 8 ps 93 8 HRD lt 3 gt MPUDCTO _7 02 426 HRD lt 2 gt MPUD lt 9 gt 415 Qe HRD 1 gt MPUD 8 31 00 qo 2 HRD 0 WOOH N 11 185 9 CAD 3 s BRAA RE Af 5 5
209. a line set to align the image flush with the mesh and determine the position using a line profile Specifications X direction In all scanning speeds lt 1 0 mm Y direction lt 1 0 mm Power Supply Frequency Procedures Products to be shipped to regions where the power supply frequency is 60 Hz modify the products for 60 Hz compliance and then take pictures of them Specifications No Data Display deviations Image Shift Image Shift RISM Accuracy a shift 70 100 of the maximum shift Relative to Accelerating Voltage Conditions Sample height 0 0 mm Focus 0 0 mm Accelerating voltage 1 5 kV 30 kV Specifications 4 5 0 45 um max Relative to Sample Height Mode Conditions Accelerating voltage 5 kV Sample height 2 0 1 5 mm Focus 0 0 mm Specifications Sample Height 9 10 2 0 1 5 Shift 2 0 0 2 max 7 0 0 7 max S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Direction of Image Shifting Specifications Appropriate movements of the image shift knob and the image are as follows Clockwise turn of X Knob Clockwise turn of Y Knob Cursor Movement Cursor Movement Image Movement Image Movement RR Off RR Off Image Shift gt gt t NOTE When the knobs are turned counterclockwise the motions are reversed Shift Direction Misalignment Specifi
210. after self analysis FPGA16 Red FPGA load error Lamp OFF IHOST Green CPU load error Lamp ON when activated FPGA17 Red FPGA load error Lamp OFF OPDO Green Display option Lamp ON when loaded FPGA18 Red FPGA load error Lamp OFF PHOTO Green Photo output Lamp ON at photo output SCNON Red Scan timing Lamp ON at signal input signal input NOPD100 Table 5 9 Silk Color Description Normal Status BDSEL Green FPGA load error Lamp OFF EXAB Green Double image retrieval display Lamp ON when displaying 1 Red Option board memory selection Lamp ON when selecting 5 6 Super Imposer and Canceller IMP N P C B 5 6 1 Super Imposer The function that a SEM image overlays on the GUI screen in the PC is called super imposer The previous super imposer function used in the S 4700 was improved in the S 5200 The Differences between Previous Imposer and New Imposer Table 5 10 Previous Imposer New Imposer GUI pixels 1024 x 768 1024 x 768 Color 256 Tool color 16 700 000 Frame frequency 70Hz or less 75Hz or less Horizontal frequency 56 2 Horizontal frequency 80kHz Part No 595 8030 5 19 Electric Theory New Imposer Block Diagram FIFO Memory 8 bit CN10 X Memory RGB 8 pit controller mixing RAMDAC Image emory Memory CN20
211. al r 159434 2 82 sis 4 7k LD1 3e MA ig 149 WOAS lt 1 gt 10 AA 6 5 DISPLAY PW ICE6 ICE7 2 e 4 15 TAS amp q D 34 TMP REMOTE WOAS 0 9 Wv 8 15273 5 9 8 2 8 y of ET EE kos NUR 3110 5 Yor 1 CN148 vcc 470 10 bd EVAC RP COMP PW JD gt 9 9S lt 6 gt o ZD SESS o I z 5 Lv4 A MBUDCT22 ejo 02 W09S lt 4 14 n z 1 BRIS 208 MBUDCTIS Z 53 92 6 D ee 24 BS 16 147 4 1241 MPUD lt TO gt 94715 2 lt 7 gt TEES 5 MPUD lt 9 gt 13 Jos o 12 0985 lt 1 gt WO gM gt 7 35 4 2 4 7k gt gt E i SIGNAL TOWER3 MPUD lt B gt 8 p 9 095505 WOSM lt 5 gt ol 12 4S 8 TORS Brig 7 OPTION WOSM 4 9 033 19 146 15273 WOBS 7 13 8 TH d i WOSH N 11 470 10 ld 29 E MPUD 15 alo qS WOBS lt 7 gt 3 3 102 9 50 Tiss l 24V 25 BSE MPUD lt 14 gt 17100 7 16 WOBS lt 6 gt WOBS lt 6 gt 14 yaad Y SIGNAL TOWER2 tX A MPUD lt 13 gt 18 4119 WOBS lt 5 gt bhi 7 5 OPTION 4 MPUDCT2 3 2 W BSCA 1 RRAS MPUDCT1 gt 14103 9345 08535 4 vec tt MEUD lt TO gt 7 Di 05 085 lt 2 gt 5 lt 5 15 AA 4 3 STONAL TOWER 9 5 3 OPTION 4 102 wt R WOBS lt 4 gt EINE 2 2 e ES P SA
212. an electromagnetic lens that is used to focus a minimum diameter electron beam on the specimen Specimen Goniometer Stage The specimen goniometer stage 1s a side entry type It consists of X Y Tilt and AZ mechanisms Beam Monitor Aperture The beam monitor aperture detects the probe current in order to correct brightness changes due to probe current fluctuations It detects the probe current at low accelerating voltages of 7 4kV or less Objective Movable Aperture The objective movable aperture is used to optimize the electron optics by controlling the electron beam current and opening angle It detects the probe current like the beam monitor aperture However it detects the probe current at high accelerating voltages of 7 5kV or more Beam Blanking The beam blanking intercepts the electron beam so that it will not shine on the specimen when electron beam scanning is not being used in order to reduce contamination of the specimen Deflection Coil The deflection coil is used to control the electron beam position There are two types of deflection coils one is to scan the electron beam on the specimen in order to obtain the secondary image and another is to deflect the electron beam in order to adjust the axis ExB The ExB is used to prevent the primary beam from deflecting axis shift due to the electric field of the secondary electron detector S 5200 Field Emission Scanning Electron Microscope Hardware Service Manual Seco
213. and the HV cable head 12 Check the image Figure 10 1 Electron Gun Baking 10 2 S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual NOTE The baking timer should be set as follows Outer bake time 8 hours Delay time 6 hours Inner bake time 4 hours 10 3 2 FE Tip Replacement Precautions Wear plastic gloves and never touch the internal vacuum parts with bare hands when assembling The assembly tools must be washed with an ultrasonic wave or cleaned with acetone ether etc Check the tip point using an optical microscope x100 and use a tip that has a straight sharp point Do not blow on the tip point with a dust spray blower etc Check that the vacuum seal surface and gasket surface of the flange is not scratched If there is a scratch remove it with 800 to 1 000 emery paper Tighten flange bolts with a torque wrench Remove dust etc from the part with a dust spray or blower Returning the Electron Gun Section to Atmospheric Pressure 1 Close valve MV1 GUN Valve 2 Turn Off switches IP 1 2 and 3 on the evacuation panel of the main unit 3 Open MV 2 3 and 4 in this order 4 Change EVAC LOCK switch on the evacuation panel to the release side left 5 Press the AIR button to let air into the specimen chamber and electron gun 6 Remove the HV cable from the electron gun Protect the cable head from dust by wearing the polyethylene gloves 7 Remove the electron gun
214. any of the signals is unselected during the color synthesis process Confirm that this condition does not occur Confirmation operation 2 If the value of Dual B in IP Output H Start is incorrect an image deviation occurs when the same image is color synthesized Confirm that this condition does not occur The correct vertical display position at Full IP Output V Start Offset is when the lower edge of the GUI matches the lower edge of the image However because it is difficult to effect an accurate adjustment of the display position in the coarse adjustment use the same values as the Standard and Dual adjustments and perform the following procedures in a final adjustment 1 Freeze an appropriate SEM image at Full display Use the data entry function to measure the size of the image 2 Save the image If a regenerated size line agrees with the line before it was saved the result is considered acceptable Capture an Image using a Trans Buffer Size l 2 Capture a screen in a 1280x960 size Save the results and re display them using the Data Manager Make Input H Start adjustments the adjustment window so that the joints at every 640 horizontal pixels match When changing the TV mode from NTSC to PAL perform the following operations 5 26 1 2 3 Change image memory jumpers Replace XTAL See PAL Modification Assembly On TOOL Imp Adj of SEM Manager change IP Input V start to 15 gt 1B TOOL Option Set
215. appears click on OK The installation process starts 3 FE PC SEM Setup 5 When FE PC SEM Setup was completed successfully appears click on OK FE PC SEM Setup S 6 Double click on H Common install bat to launch the batch program The batch processing starts 11 60 5 5200 Field Emission Scanning Microscope Service Manual 21 Exploring Common ss dr ae E 5 9 5200 H Network Neighborhood Recycle Bin Service Pack 4 v ae CRT bmp m ftpserv exe ftpserv Install bat PC SEM exe t ll Reasvr32 exe SemLut32 exe SetlniNt REG SetlPAdr exe Shortcut to PC_SE Ver TXT 1KB 40KB 1KB 1KB 23KB 1KB 1KB 15KB 1KB 1KB MS DOS Batch File Bitmap Image Application Application Shortcut MS DOS Batch File Shortcut to MS DOS Registration Entries Shortcut Application Registration Entries Shortcut Application Shortcut Registration Entries Application Shortcut Text Document Registry Editor Troubleshooting 8 Double click on H NewImp NewImp bat to launch the batch program The batch program starts Part No 595 8030 21 Exploring Newlmp D Hep E 55200 Configuration Settings MS DOS Batch File Registration Entries System file Registration Entries 11 61 Troubleshooting 9 When Information
216. are loaded from and defined in the files with an extension pm or pm2 The extension pm denotes a file that is created during High Mag The extension 2 denotes a file that is created during Low Mag These files are saved in the directory c Program Files PC_SEM where program files are stored The following window allows you to load observation conditions and set the requisite parameters Conditions can be loaded and saved using the Load Set and Save buttons on the screen Operating Condition File Name Stored Condition Current Condition Date 2000 09 29 Load Set Vacc 5 0 10 0 Save Cond 5 0 Pr Curr Normal Delete SE D SE Delete Mag Mode High Close Comment New Comment Set Alignment Data Figure 7 3 e Files with the extensions bmp jpg and tif are image files with the active formats SEM can handle these three types of image formats The files are stored in an operator specified directory The following window allows you to save image files Images are saved by depressing the Save button 7 4 S 5200 Field Emission Scanning Electron Microscope Software Service Manual Save Image Direct Save HUE ECTS 1 dXImgData User Sample Key Word Key Word2 Comment File x Bitmap Files bmp _ Save Option E f Off QuickSave Al Saye Save New Folder Cancel Figure 7 4 e Files with the txt extension used to save observation conditions
217. around the controller cause a negative voltage which hinders low speed motions thus generating an ERROR 2 error Point Send operation speed direction WF IC132 1 21154 1 Y E110 109 The numbers inside the parethensis indicate for Y axis control Figure 5 36 Adjustment Procedures l 5 42 Do not make these adjustments immediately before or after the power is turned on Instead they should be performed at least 30 minutes after the power is turned on Connect a frequency monitor e g a synchroscope to the X and Y axes X axis IC153 1 GND IC153 2 Y axis 1 154 1 GND 1 154 2 Turn the offset adjustment VR in the direction shown in the figure X axis 110 Y axis VRI109 After the power is turned on restore the power depress the Reset SW After the stage returns to the origin and the motor stops use the offset VR to adjust the VR110 and VR109 so that the V F output will be 50 Hz 50 pulses S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual 5 8 High Voltage Unit 5 8 1 Block Diagram CPU Flassing current control driver Cathode DCPS Regulation Vext Cockcroft walton First circuit driver Circuit Anode Second Anode Vext Soit control control driver 5 8 2 Address Figure 5 37 Table 5 17
218. background color with the aforementioned chroma key data In the next step draw a vertical white line that is one pixel wide Figure 9 4 After that hide all toolbars untitled Paint Edit View Image Options Cover entire area with chroma key color Draw a white line select so that it will not be displayed Figure 9 4 Phase Adjustments between Synchronization Signals and Clocks Observe the vertical video signal using an oscilloscope Apply synchronization using H sync as well as Delay observe the white line signal While monitoring the video switch signals on the oscilloscope adjust DL7 DL8 for the delay line Figure 9 5 shows an example where synchronization is applied with H sync and video signals are observed In the case of a 1024 x 768 75 Hz GUI property the width of one pixel is approximately 10 ns Therefore make adjustments so that the output signal width will be close to that width An inadequate adjustment causes the white line to be smudged in violet Use the SEM data entry function to enter characters and lines on the image Confirm that the white line does not smudge Make similar checks by increasing and decreasing the brightness of the SEM image S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Coupling amp Impedance DC GND P 222 Ch2 2 001 M20 0ns ch2 1 96 Vi Q WE i0 0mv Te MM
219. bh ie LED12 N 8157 L3 LED32 N AA d 209 EC3_G sws4 sw24 swo4 VC C lt LED12 LED32 SEARCH ABCC WOBBLI ER sw c3 N 822 4 SLOW 1 CALI GN 2 i LED11 N A16 us e LED31 N 12 y gt a o v 3002 RA EXE 1 iud VY LED31 A28 22 ECA Saas ae m SDS FAST 2 CALI GN 1 EC3_B 5828 3x _ LED1O N BISA K AYA LED3O N 822 K 425 CAUTO ALI GN lt REDI 2 CAPTURE y 4 gt Sw C2 N 5 LED1o N LED30 FAST 1 STI GMA ECS i502 i502 1 02 vcc gt vec 5 gt 5 v Wb od T DS vcc 1 gt gt EC4_A 29 A 27 5_ DOW 5 4 RUND MEG emt vec eire Eca_B 5 20 Sw c1 N 42 74 s lt sre vec 612 gt 425 Ecs_G Q C C Ae 1 O02 EC6 in bod LEDOZ7 N 2 AAA 24 LED27 N A5 _ sw21 swii Swo1i 3 O 2 BRT UP SLOW 2 W orn eS C jj epe Sw co N B20 i ANN 5_ lt 3x B LEDOG6 N exe K 48 5 AN LED26 N 85 Sa 4 4 gt Ece G NC czo Aan icu 1 2 1 LEDoe N v SA 5 DC OO DI R PHOTO 220 EC7 sw2o swo swoo iex LEDOS N 42 L3 LED25 N 60 12 v SW R3 N 24 WA LEDOS 57 5 EC6 1 27 EC7 MEM PHOTO EC6_B 831 7_ SW R2 N B24
220. by using the left arrow key Press F10 Select File Save and Close and then press Enter Press F10 when instructed Check Notes Check SCSI SCSI Adaptec 2940 Hardware must be installed in the PC SCSI Adaptec 2940 software driver must be installed in the PC Create a restore CD Preparation F N Turn off the Display Connect a CD R drive Turn on the CD R drive Insert a CD R blank media x12 capable into the CD R drive Insert Drive Image 4 0 setup disk 1 of 3 into the floppy disk drive The English version will be 1 of 2 Turn on the PC Turn on the Display also Insert disk 2 of 3 when prompted and press Enter The English version will be 2 of 2 Insert disk 3 of 3 when prompted and press Enter No English equivalent When the Drive Image 4 0 menu appears press Num Lock 11 28 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual No Item Procedure Check Notes 4 Create a restore CD 1 Click Create image using the mouse 2 Select drive from Create image Select original partition 3 Press the Reference button in the Create image window 4 Select the CD RW drive for the new image file GENERIC CDR BP2 2 21 11x31 5 Type S52 ex S 52 0105 shows a Production No and press OK 6 Select Standard Low or High High level for Compression depending on the expected capacity
221. causing the S 5200 to not operate correctly Virtual Memory Setup A large amount of memory is needed to process 2560 x 1920 SEM images From the Performance tab of the System Properties dialog box set Virtual Memory to 200MB The SEM data manager controls the saved image data files in the database Do not move the image data files change the file names or delete the files using Windows Explorer Discrepancies between the SEM data manager saved data and actual data can cause the SEM data manager to work improperly If such an error occurs delete the data in question using the Remove List function in the Batch Process window of the SEM data manager If the image is needed and the file exists the image can be restored using the Add From File window S 5200 Field Emission Scanning Electron Microscope Safety Service Manual Handling the Computer e Handling the Files The S 5200 program files are stored in the folders shown below Do not delete or move the files in these folders C ProgramFiles Pc_sem C Vrtsys e Folder Properties Do not change the property of the folders shown below such as removing the sharing setting or changing the access C Vrtsys C TEMP Power Failure A momentary voltage reduction in the power supply due to a power failure or lightning strike may damage the PC the basic software the application software or the data It is recommended that an AC Uninterruptible Power Supply UPS be used to prevent problem
222. covers Removing the Tip 1 Loosen the flange tightening bolts 16 places with the attached torque wrench The 4 dia flange is located in the upper section of the electron gun chamber 2 Remove three of the bolts as shown in Figure 10 2 and attach supports A and B as shown Figure 10 3 3 Lift the flange slowly while keeping it horizontal and remove it from the electron gun chamber Though the heater pin may not come off occasionally lift the flange slowly since it is OK to stretch the spring 4 Setthe flange on the table with the flange up 5 Install the 4 dia cover flange to the upper part of the electron gun chamber right away so that the inside does not get contaminated Part No 595 8030 10 3 Maintenance 6 Loosen the two screws that support the tip with a hexagonal wrench See Figure 10 4 7 Remove the tip from the holder with tweezers See Figure 10 5 Supports amp E mounting positian Marked line Figure 10 2 Electron Gun Flange Top View Install tip parallel to the holder Holder M3 screw Large hole M3 screw NOTE Insert tip into the large hole of the pin holder from which the C shape was removed and is not covered with gold plating Figure 10 4 Mounting the Tip 10 4 C shape was removed Support B Support amp Electron qun flange Chamber flange Figure 10 3 Cross Sectional View of Mounting Supports A and B Tweezers
223. detector option Transmitted electron detector option Energy dispersive X ray detector option Side entry method X 3 5 mm Y 2 0 40 7 0 3 mm X axis Y axis T axis Z axis is manually operated Flat specimen 1 5 0 mm x 9 5 mm x 3 5 mm H max Flat specimen 2 4 0 mm x 9 0 mm x 4 0 mm H max Phase specimen 1 2 0 mm x 8 0 mm x 5 0 mm H max H H Automatic pneumatic valve type lon pump 60L sec x 1 ea 20L sec x 2 S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual Vacuum gauge Ultimate vacuum Contamination reduction purge Safety Device Water Supply Drain Accessory port User interface Scanning mode PC Monitor Signal Processing Part No 595 8030 Specification Notes Turbo molecular pump 270L sec x 1 for main evacuation Turbo molecular pump 50 L min for Tadem option Dry pump ESDP 12 x 1 supplied by the customer Penning gauge x 1 Pirani gauge x 2 for evacuation control Electron lt 1 x 10 Pa Specimen chamber main evacuation section 7 x 10 Pa Anti contamination trap Liquid nitrogen dewer is optional purge port 1 4 tapered internal thread assembled Supplied pressure when using purge 10 to 20 kPa For protection against power failure water failure and vacuum failure Flow rate 1 0 to 1 5 L min to cool objective lens Pressure 50 to 100 kPa Temperature 10 to 2
224. e ee Seed p e P e ee 7 21 SYSTEM ROI HM UESTRE 8 1 8 1 SYSTEM OPERATION OUTLINE 1 2 o e Aig eie elena eden rade desea eder ae osea eden are dens 8 1 8 2 FLOWCHART ON ALL OPERATIONS 2 4 21 2002 000000000000000000000000005020 8 1 6 2 1 Evacuation System Flowchart aee eee ee ee esee teen enne eeni tinet tton atas eene ette ater tna eara setae 6 2 8 3 OPERATING PROCEDURES I LL Sa una p u pret Fa ede aae Tea eed aae e Say aseo Dada eda 8 10 8 3 1 RAS JUNCTION i os q u e e Meee eee ales 8 10 84 GETTING STARTED WITH 8 40 8 4 1 Confirming the Vacuum Level 6 40 6 4 2 Starting the DISPLAY tini ese le u ua et ga Rem PN Es 6 41 6 4 3 Filling the Liquid Nitrogen Trap a aa a a entente nnne 6 41 8 5 SYSTEM HAT udin tertie ont te et 8 42 6 5 1 Standard don oe fr er d RI dE ete de a e 6 42 6 5 2 Emergency Shutdown e teen de RR HU E RE decere ete 6 43 8 6 STARTING THES YSTEM iret eC e ed 8 44 8 6 1 Standard Startup ic tec te e quier e Rie eh ba eee 6 44 6 6 2 Starting the system after an emergency shutdown eene eene 6 44 8 7 TROUBLESHOOTING
225. een Ee Rel Ree HUC 2 20 2 6 nha idee de iem kuq dv dett me 2 23 2 6 1 Leakage Detect omenirii n eere EORR eee o a E 2 23 2 6 2 So TIVA TEE 2 23 2 6 3 Persondl Computern use Rep e rete Reagan Ae eoo eene ek 2 23 3 INSIEALLATION Ec Ee oS ESEE ES TES 3 1 3 1 INSTALLATION REQUIREMENTS cccssscccesssececessececssaeeecsesaeeecessseeecsesseeecsesseeeceesaeeeesessececsesaeeeesesaeeeensaas 3 1 3 1 1 General Requirements Installation 3 1 3 1 2 Power SOUTCE iie 3 1 3 1 3 Ground Termat sre ka nc i RUP ES 3 1 3 1 4 Water Supply Gnd Drainage e ret eie xe 3 2 3 1 5 Compressed Air haec nae tet e 3 2 3 1 6 Stray Magnetic Fields tcd e etre dec uu pere G ee ERT OTTER 3 2 3 1 7 VOTATO ei esee oe d ven tue Ue Pe RO 3 5 3 1 6 Room Temperature and Humidity 3 5 3 1 9 Power Line and Electric Field Noise uqanmi entente nennen 3 6 Sill Oe Sound WAVES etin er eise t saq a Su MEE e ee Lee Ue less beacon a eub aqa haqa ad 3 7 3 1 11 and Floor Requirements eese esee eene eee nennen a nenne aypa enne 3 7 3 1 12 Items Needed at I
226. excessive time since last flash Please execute flash Long time has passed since last flash Please execute flash Abnormal temperature rise occurred in the power supply Shut down the PC and turn the DISPLAY switch off Restart the microscope after about half Cause amp Remedy This message will be shown when the present position data is out of the movable area of the axis If the message is shown frequently contact a service engineer Internal error message Ignore it Click OK An error occurred while transferring files to or from a remote computer Check corresponding setting Cause amp Remedy This message will be shown when the HV is shut off by degradation of the vacuum safety protection activated or setting the specimen holder at the entrance of the specimen exchange chamber First check if the specimen holder is in the specimen chamber Next check the ion pump vacuum If the ion pump vacuum is not good wait until the vacuum of ion pumps recovers to the specified value HV indication will start blinking in yellow And then turn the HV on If this message is shown frequently contact a service engineer This message will be shown when HV is shut off by emission current limiter Make flashing operation and then turn HV on If this message is shown frequently contact a service engineer This message will be shown when 24 hr have passed or 8 hr of accumulative HV on time have passed since last flashing
227. file from the Alignment DB button AlignDB bmp These files are located in the directory c Program Files Pc_sem Ras On each screen clicking on the Close button returns control to the screen of Figure 8 15 e Set Install Date button This button allows you to register the date of SEM installation or version upgrade Click on the button A date entry screen Figure 8 24 appears Part No 595 8030 8 29 System Operation Install Date When a date is correctly entered and the OK button is pressed the screen of Figure 8 25 appears Once a date is set the Set Install Date button disappears from view date entered through this button is stored in a setup file 3 For any subsequent change of this date you need to directly modify the file If blank or an invalid date is entered a message will appear Pressing the Close button causes this screen to disappear moa E Ccana maracc alee Be ect 00153 ms Installation _ 000015330 2000 6402 2 date LLLI E 8 30 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual 9 Restore DB from FD button Function summary This button loads a database file from a floppy disk and either rewrites the same file on the hard disk or adds it to the hard disk In the event of damage or loss of the database file Ras mdb this function can be used t
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229. gt Decision SW status Keep NORMAL OPERATION 5 50 S 5200 Field Emission Scanning Electron Microscope Service Manual Normal Operation DISPLAY SW gt AIR LOCK VALVE SW gt ON BUZZER ON Stop Operation Part No 595 8030 HOLDER IN S E C AUTO STOP TIME 3 30 set EVAC POWER SW OFF NO YES OFF YES Dry Pump OFF AIR COMP OFF TMP MAIN POWER OFF ALL VALVE CLOSE MAIN POWER SW OFF 1 User 7 Control lt gt Decision COOLING WATER Electric Theory 5 51 Electric Theory Specimen Removing Operation Specimen Inserting Operation SEC EVAC 5 HOLDER IN SEC lt gt YES BUZZER ON NO MDP YES YES Normal V4 OPEN HOLDER FREE B it j YES NO OLDER LOCK V4 OPEN YES OLDER LOCK V3 V4 OPEN User operation L _ 7 Control lt gt Decision 5 52 S 5200 Field Emission Scanning Electron Microscope Service Manual SC Leak Operation HOLDER IN S E C LOCK SW OFF AUTO STOP TIME 5 00set BUZZER ON SC AIR SW ON NO Normal Part No 595 8030 Electric Theory SC Evacuation Operation HOLDER IN SEC SC SW NO BUZZER ON User operation 7 Control lt Decision 5 53 Electric Theory Tandem Configuration Flowchart Starting Operation Cooli
230. gt AD 5 AD 4 gt AD 3 gt GND GND AD 2 gt AD 1 gt AD o 5V 5v REQ64 5V 22 5v 5v 5v A za CNP1 E AR PH 20 6 0 9 555 429 as 5 iwrA ass 2 0 8 0 pem Bos lt 53 Biol gt 2 4 Were gt lt 7 sQ 9 Pee Aas Sd Bis RST PCI N 9 PCI Me ant Pci Ase REGO 25 Me 2 0 0 AD PCI lt 31 gt B20 AD PCI 30 pen ab Fel 2592 Baz PC 09 ABI PEL 7 Bas AD PCI 26 2582 8240 2 AD lt 24 gt Aze gt _ N 3 gt 62500 FEI 250 AB Pet s pete eMe lt 22 gt Aza gt lt AD PCI 21 B2o gt lt AD PCI 20 63 aD Perros pese 5 0 jene AD FE 192 Baz lt AD PC 16 gt Pew asa d FRAME PCI N Assy TRDY_ PCI N 8220 Aas gt lt b 5 0 0 BEVSEL_PCI_N Me 9 STOP PCI N Aso gt lt LOCK PCI N Bas 0 L PERR_PCI_N 62509 220 81 0 4220 PCI UN e Aaa gt lt 8120 PAR gt PCI
231. gt WMPUD II s aae IMPAJD 10 003 MP UD 9 ae d MAC sa 105 2 5v lors _2 MPUD 15 a2 MPUD 14 sa 7 MPUD 13 gt cwi28 ia lA o s MPUD 12 1s MPUD 11 gt GUN HEAD 1 EES M 1694 8 MPUD 10 gt yar Sei 96 1724 8 3 MPUD lt 9 gt s Read out by ECPU O meen 230 VOLTAGE O e HL GUN 1 PMHV I L vec gt A Lu x 2 gt 5 A O 20 O peas vad ee 3 LO 21 MPD V AQv252 AL a ND 12 S MPUD 14 n s A k gt asia sa 7 MPUD 13 gt Ny gt a Z POST 1 1 15044 a 5 MPUD 11 ENTO T EA 1624 aa MPUD 10 gt V Em 0 17 e ia MPUD S 18 don oa MPUD 8 gt ov gt Tre 2s eo 2 lt PC HVC P C AU PP BON N CN126 CN126 CN17 CN17 2 T1661 A2 A2 is Xx O gt ind 15V 2 2 B11 B2 B13 h Opti on X 25 M gt 9 O O i 3 t EN ov Hv Power Supply O gt gt c76 o 2 A MT MLV crose COVER 1 0 7
232. in H NewImp Win has been successfully appears click on OK Registry Editor 10 Click on X for Exploring 11 Remove S 5200 software CD R 12 Select Start Shut Down 13 Select Shut down the computer Click on Yes Shut Down Windows n 2 v z roo Shut Down 14 Turn off the power for the PC 11 62 z P P 5 59 59 S O O O O Q Circuit Diagrams for the S 5200 Board Unit Name BLOCK DIAGRAM AC DIST UNIT 1 2 2 2 PC RL P C B C DCPS P C B EVASEQ 1 5 5 5 EVACPNL1 P C B EVACPNL2 P C B COL CN P C B PMHV P C B 1 2 2 2 HEAD AMP BEAM MONITOR P C B ACPS UNIT DCPS P C B 1 2 2 2 PC HVC P C B 1 2 2 2 PC HV2 P C B 1 2 2 2 PC P C B SGVA P C B 1 6 6 6 DEF LENS P C B 1 5 5 5 IO CTL P C B 1 5 5 5 PCPANEL1 P C B PCPANEL2 P C B PHOTO 1 P C B PHOTO 2 P C B 1 2 2 2 IMP N P C B 1 9 9 9 HV P C B ION PUMP POWER SUPPLY CPU BOARD IMAGE MEMORY BLOCK DIAGRAM PIF P C B TILT CTL P C B ST DIST BAKE P C B BLK P C B PC DEF DEFAMP P C B NEWPANEL
233. in the stage controller sags during low speed operation due to a temperature drift which causes an impaired pulse transmission condition In the controller board circuits the V F converter is output only when the operating speed command output becomes a positive voltage at point A in the OPAMP at the lowest speed However a temperature increase or other changes in the ambient conditions around the controller cause a negative voltage which hinders low speed motions thus generating an ERROR 2 error Point A Send an operation speed direction VIF 1331 IC154 1 Y BE110 The numbers inside the parethensis indicate for Y axis control Adjustment Procedures 1 Do not make these adjustments immediately before or after the power is turned on Instead they should be performed at least 30 minutes after the power is turned on Connect a frequency monitor e g a synchroscope to the X and Y axes X axis IC153 1 GND IC153 2 Y axis IC154 1 GND IC154 2 Turn the offset adjustment VR in the direction shown in the figure X axis 110 Y axis VR109 After the power is turned on restore the power depress the Reset SW After the stage returns to the origin and the motor stops use the offset VR to adjust the VR110 and VR109 so that the V F output will be 50 Hz 50 pulses Part No 595 8030 11 9 Troubleshooting 11 3 4 Self test and Corrective Action If a fault of malfunction should
234. is downloaded and saved in the SUM file The system determines the SUM value of the file recorded in a system log file 2 The file paths for those files and the SUM value are saved in the SUM file 2 C Program Files Pc_sem St5unst log 3 Ifthe SUM file is already created the system displays a Change SUM Table File screen Figure 8 7 When updating re creating the SUM file you need to enter the password and click on the Yes button When not updating the file click on the Cancel button Refer to the Ras Reset manual for details Change SUM Table File There is the SUM Table File already You wantto change the file If you want to do it input password Password 4 Yes Cancel Figure 8 7 Password Input Screen for Over writing the SUM File When the SUM file update process is completed control automatically returns to the screen shown in Figure 8 6 and a Complete message is displayed 4 Pressing on the Indicate button causes the contents of the SUM file to be displayed If a SUM file is not found a message to that effect appears If the SUM file exists the contents of the SUM table file the file path and the SUM value the file created date and the software version number are 8 16 S 5200 Field Emission Scanning Electron Microscope System Operation Service Manual displayed on the SUM Check Table screen Figure 8 8 Clicking on the Close button returns control to the F
235. m d 1 18 21 29 45749 54 57 5V a LO CAD 99 FEAR F al iE 4 K P _ RE 2 05 5200 4 0 lt BAM 1999 05726 IN d DCPS P C B 9 03 26 st las 7 7AA REE AB TAL AA JK88 s ooTsUKA 1999 03 26 321 25318386 3 4 199 PP gt ye E 14 DGPS P G 5s M 12 21
236. more 3 1 11 Space and Floor Requirements Space The desirable dimensions are 3 5 m x 3 5 m or more The installation layout using a minimum installation area is shown in Figure 3 3 Single phase 100V AC 07 Single phase 100V AC 4kVA Outlet with ground terminal Single ground terminal 10052 less Es EN X m Dry pump 252 Compressor 9 10m Coolant 5 Circulator 9 Weight goo 200x180 x150 H uw Main Unit 1660 600 kg e Display Unit 1200 H 260 kg 1510 _ 18009 1100 Dimension mm Figure 3 3 Installation Layout using Minimum Area Part No 595 8030 3 7 Installation NOTE The dotted line indicates the installation space for the cooling water circulator reference value The actual installation space will vary depending on the maker and model of the cooling water circulator e Wiring and tubing pulling sections need the space of 300 mm The supply and drainage water must meet the specification described in section 3 1 4 Water Supply and Drainage The dimension of the dry pump is for ESDP12 Dry pump supplied by HIG sales The CE 52 power unit is 1 443 mm high and weighs 145 kg Entrance Dimension The entrance dimensions must be 0 9 m width x 1 7 m height or more Floor Strength FloorStrength N m _ AppratusTotalWeight Kg x9 8 eS eee 6 S 3
237. noise to appear Set the VR to an intermediate value If a SEM image does not appear open the adjustment window for the Superimposer and temporarily set the chroma key to R 80 G 10 B 80 Figure 5 14 3 For chroma key settings enter values that are higher or lower than the default value to produce a noise When this happens set appropriate intermediate values Adjusting the Display Area 1 Use the Data Manager to open a previously prepared 640x480 size BMP file and transfer it back to the image memory For adjustment purposes the desirable BMP file is one in which the outermost frame has a box cursor On the standard mode screen set a PLL division ratio for the superimposer adjustment window so that the width of the frame for the area in which the SEM image is displayed will be the closest to the width of the frame for the area to be displayed by the superimposer For ease of adjustment use the Windows application Paint program to create a canvas size sufficiently larger than 640x480 and filled with R 128 G 0 B 128 colors Display this canvas by superimposing it on the SEM Manager Figures 5 13 5 14 2 Inthe next step adjust the Horizontal Start Offset for the IMP Register on the superimposer adjustment window so that the left edge of the area frame in which the SEM image is to be displayed will match the left edge of the area to be displayed by the superimposer 3 Adjust both H start and V start of the IP register so that th
238. occur take corrective action according to the following diagnostic flowchart The actuator won t run Actuator motor won t run when power is turned on NO NO Is control power supply 45V correctly input S power outp Power supply out from the Power failure switching power e Faulty wiring supply Is side LED LD8 green on YES YES YES Faulty controller Faulty wiring between switching power supply Control power 15V correctly and controller input Motor drive 24V power on YES NO Motor cable and connectors connected Check motor cable Check connector Check contact YES NO Faulty controller Approx 20V is output to the ends of motor cable CN6502 1 2 3 4 in the initial state reset to the origin Voltage on between motor cables black white lead wires YES Bad actuator Replace actuator and turn on power again Broken motor coil If actuator won t run due to mechanical lock red LED on controller side comes on e Burned out motor 11 10 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Actuator motor runs erratically Actuator motor runs erratically without command signal input X axis encoder connector securely inserted Correctly plug in encoder connector CN6504 Side LED LD2 red on
239. occurs when the same image is color synthesized Confirm that this condition does not occur 6 The correct vertical display position at Full IP Output V Start Offset is when the lower edge of the GUI matches the lower edge of the image However because it is difficult to effect an accurate adjustment of the display position in the coarse adjustment use the same values as the Standard and Dual adjustments and perform the following procedures in a final adjustment 1 Freeze an appropriate SEM image at Full display Use the data entry function to measure the size of the image 2 Save the image If a regenerated size line agrees with the line before it was saved the result is considered acceptable Capture an Image using a Trans Buffer Size 1 Capture a screen in a 1280 x 960 size 2 Save the results and re display them using the Data Manager Make Input H Start adjustments on the adjustment window so that the joints at every 640 horizontal pixels match When changing the TV Mode from NTSC to PAL perform the Following Operations 1 Change image memory jumpers Replace XTAL See PAL Modification Assembly 2 On TOOL Imp Adj of SEM Manager change IP Input V start to 15 1B 3 In TOOL Option Setup of SEM Manager change NTSC to PAL Then Close Open the SEM Manager 9 22 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 9 3 3 Magnet Field Canceller Block Diagram DEFLENS A
240. of 0 5 ppm or less If an appreciable amount of deposits are found a water filter should be attached 3 1 5 Compressed Air Air pressure 350 to 500 kPa NOTE It is recommended that the applicable filter be used to remove water and oil from the compressed air 3 1 6 Stray Magnetic Fields The stray magnetic field at the installation site should be measured before installation If the intensity of the magnetic field meets the allowable value described in Table 3 1 the image will not be affected Upon receiving an order the Hitachi sales must verify that the stray magnetic field at the customer s site meets the specification If there is a large magnetic clutch or power line near the SEM it may result in sudden variations in the current or the magnetic field If the SEM is installed in an environment with many stray magnetic fields the magnetic field may cause the SEM image to expand contract distort or shift and the electron scanning beam to sway resulting in expansion contraction distortion high frequency noise or streaks in the SEM image Since synchronous scanning mode is used at the power source for recording the SEM images the allowable stray magnetic field is set based on the impact of the power source on the synchronous scanning mode The image distortion varies depending on whether or not the stray magnetic field component is synchronous with the power source frequency The image distortion caused by a synchronous stray mag
241. of high definition image data and of data management through the use of networks To meet these needs Hitachi Instruments has developed an ultra high resolution FE SEM the S 5200 Incorporating the latest in electronic optical technology and PC control systems the S 5200 offers a substantial enhancement of the capabilities of the previous model the S 5000 while at the same time achieving both advanced capabilities and ease of operation including SEM operation under a GUI environment high definition image recording and networking capabilities The external view of the S 5200 SEM is shown in Figure 1 1 Figure 1 1 S 5200 Scanning Electron Microscope External View Part No 595 8030 1 1 Introduction 1 1 2 Features As critical elements for high resolution observations the S 5200 incorporates significant improvements in 1 secondary electronic image resolution 2 signal detection 3 contamination and 4 vibration tolerance floor vibrations compared with the S 5000 As such it is a high resolution high operability in lens SEM with the following features Achieving the Highest Resolution in the World with a Low Accelerating Voltage At 1 kV the S 5200 guarantees a secondary electronic image resolution of 1 8 nm Figure 1 2 Secondary Electronic Image Resolution Accelerating voltage 1 kV Magnification 150 000 Guaranteeing the Highest Resolution in the World at a High Accelerating voltage At 30 kV the S
242. overshooting The adjustment of the L G pot changes the Kp value position loop gain Reducing the L G pot too much can reduce position alignment precision which should be avoided 5 36 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual a Instruction input direction b direction Motor response waveform Overshoot c Loop gain too high 4 Undershoot d Loop gain too low Figure 5 30 Motor Response Waveform 3 If an appropriate waveform cannot be obtained by adjusting the L G gain adjust pot The rotation of the CW increases the gain Adjusting the M G pot changes the speed loop gain Rotate the M G pot clockwise to increase the gain as much as possible without causing the motor response signal F V voltage to oscillate Part No 595 8030 5 37 Electric Theory F V Voltage Adjustment already adjusted The voltage can be verified by measuring the voltage of the F V check pin Standard F V voltage values are listed below If there is a significant difference between the measured value and the standard value use the F V pot to make appropriate adjustments The rotation of the CW increases the voltage F V standard settings Approximately 3V 200 kpps Because F V voltage waveforms contain superimposed ripple components when taking measurements using an oscilloscope please be sure to read average values Output Curren
243. p isv c224 5 USED NO c200 222 R200 222 s a e225 CAD 3 5 gt 157 RE EC s s200 gt 5 4 RE PR x EDGE K S A FAH 4 5 50 kacevama 1998 PL 1999 AB _ TERS FAT 378387 92 s 1999 07 os i 2 25 1MP N 9 9 12 57 ani OULOLOAG 2 skv 52 R3 047u DHM3GB80 _ _ ANS Z A092 1100v VVV PENNI NG GAUGE RA 4 c2 2 5kv 2 5kv Hus E oa7u 7u 1 ca 2 5kv 2 5kv lt RS TPO919 Pic TPO12 AM O PE HV P C B CAD Koioe 1 8 RE s HK HH se BREAK _ B RE C s 520o nb 7 n iL LX 35 710 21 PEEM Esa 2000 10 21 SHRISR 21 PM RE T ots 77 BUYER 1 ALES FAT 321 3 19 i 8 5 OOTSUKA 2000 10 21 WE 21 1 26 KAI RO 12 58
244. radiation Overheating due to a power transistor failure Servo off Indicator lamp LD 2303 is lit indictor panel E 2 is lit Over current Excessive output current Shorting between motor output pins Motor coils Servo off e Indicator lamp LD 2202 is lit indictor panel E 2 is lit Overflow Excessive reserve pulse in e Abnormal F V voltage adjustment Servo off the deviation counter Abnormal motor response motor Indicator panel 2 6144 pulses locked falling torque is lit Control board error Amplifier Indicator Lamps The amplifier is equipped with the LED indicator lamp to indicate the operational condition Symbol Color Display LD 8 Green Power ON LD 1201 Green Controller enabled servo ON LD 4204 Red Stop on power failure function running LD 2202 Red Stop on over speed function running LD 3203 Red Stop on overload overheat overcurrent function running LD 5205 Green In position state S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 3 3 Stage Adjustment Problem When the power or the Reset SW is turned on sometimes an 2 error occurs during low speed operation which can cause a system malfunction In some cases by turning the power or the Reset SW on again the system may return to normal Cause The input command voltage for the V F voltage frequency conversion circuit IC
245. raster rotation to 90 Click on TV dist Adjust RR 90 16 Click on Scan U L Adjust the alignment knob X Y so that the periphery blurring on the right and left and at the top and the bottom is minimized 17 Click on Get Set in that order 18 Upon completion of the adjustment process click on Save to save the adjustment data 19 Click on None to disconnect the adjustment knob Adjustment Specifications See the limit sample Correcting Out of axis Color Aberration ExB 3 Correction Adjustment Conditions Accelerating voltage 0 8 kV Emission 10 pA Probe Current mode Normal Magnification mode LM mode Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm Image shift Mid point the reset condition R R Off Adjusting the Control Coefficients 1 Perform image adjustments under the following conditions accelerating voltage 0 8 kV Sample Height 0 0 mm HM mode Switch to the LM mode Perform image adjustments Click on ExB 3 Adjust 0 8 kV on the EO Adjustment 3 screen Click on Off in ExB 3 Auto On Off Using the stage move a marking on the SEM image to the center of the CRT Click on On in ExB 3 Auto On Off Click on X in ExB 3 Adjust 0 8 kV Adjust the alignment knob X Y so that the movement of the field of view marking is minimized when ExB 3 Auto On Off is toggled between On and Off 9o mp OW cam duas 9 48 S 5200 Field Emission Scanning Electron Microscope
246. replacement Evacuate vacuum Evacuate vacuum uonenoeA dIA L uonenseay dI Test breakdown voltage 10 10 Adjust image axis 9 Check tip Check gasket Obtain tools Remove the bad tip and replace it with a new tip Tightening torque 18 Nm OUTER BAKING 14 hours Set the baking time to complete two hours prior to turning ON all IPs Turn ON IPs Standard Baking Ultimate vacuum IP 1 1 x 10 Pa IP 2 2 x 10 IP 3 lt 7 x 10 Pa V0 30 kV hour or longer Degass tip Set to the flashing strength 2 or 3 When the emission current is 10 uA V1 must be 3 5 to 3 9 kV Verify that the Main Beam can be obtained Standard baking Test breakdown voltage Y Perform FE bombard Test breakdown voltage Y Perform FE bombard Figure 10 10 Tip Replacement Flowchart Vacc 30 kV hour or longer V0 30 kV or 7 kV Emission current 50 LA 4 hours or more Observe image V0 1 kV or 30 kV Standard baking V0 30kV hour or more S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual 10 3 3 Dry Pump Dry Pump Maintenance It is recommended that the ESDP12 dry pump be inspected at least once every ten months if continuously used or every 8 000 hours by a service engineer from Edwards Co One month before the maintenance the message shown below will appear when the SEM
247. starts Message One month remains before the periodic maintenance date of the dry pump that is used with the S 5200 main unit Contact the nearest service person for the periodic maintenance by the date shown e After the maintenance date the message shown below appears when the SEM starts or the HV is applied The periodic maintenance date has passed Stop the evacuation operation to prevent damage and perform the dry pump periodic maintenance When the periodic maintenance is implemented select Menu Option Maintenance and record the maintenance date NOTE For dry pumps other than ESDP12 refer to the instruction manual for each pump Dry Pump Replacement 1 Turn OFF the display power 2 Turn OFF the EVAC SW and wait until the instrument stops completely 3 Turn OFF the main breaker on the power supply unit 4 Remove the power cable from the dry pump side 5 Connect the power cable removed in step 4 to a new dry pump 6 Turn ON the main breaker on the power supply unit 7 Turn ON the EVAC SW and verify that the instrument operate correctly Part No 595 8030 10 11 Maintenance 10 3 4 Penning Gauge Set the specimen chamber to atmospheric pressure and remove the penning gauge from the main unit Clean the penning gauge following the procedure shown in Figure 10 11 Figure 10 11 Penning Gauge Cleaning Procedure Penning Gauge Maintenance Loosen sorews B emovwe the magnet Anode cylinder
248. the ion pump using a step up transformer and a rectification circuit AC Distribution Unit 100V AC is supplied to the baking heater the display and the TMP controller Part No 595 8030 4 7 Hardware Specimen Goniometer Power Supply 5V 15 and 24 DC are supplied in order to operate the X and stage controllers and the Tilt controller Evacuation System Power Supply 5V 12V 15 and 24V DC are supplied in order to operate the EVAQ SEQ 4 8 S 5200 Field Emission Scanning Electron Microscope Service Manual 5 Electric Theory 5 1 System Illustrations 5 1 1 Power Supply Unit POWER SUPPLY UNIT EMERGENCY OFF SWITCH AC DIST UNI IPDC P C TON PUMP POWER SUPPLY ISOLATION TRANSFORMER Figure 5 1 Power Supply Unit Part No 595 8030 Electric Theory 5 1 Electric Theory 5 1 2 Main Unit BLK P C B HEAD AMP BAKE P P B XY CONTROLLER TMP CONTROLLER EMERGENCY OFF SWITCH SEQ UNIT EVAC SEQ P PEHV P C B Main Unit Figure 5 2 5 2 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual 5 1 3 Display Unit CANCEL NMEM200 OPERATION PANEL SGVA PHOTO I F P KEYBOARD TRACK BALL HIGH VOLTAGE POWER SUPPLY PC HVC P
249. the specimen chamber Gun baking was started while the HV cable head is not removed Covers around the electron gun are not attached Over heating of baking heaters when optional temperature sensor is installed Part No 595 8030 The evacuation system will be working normally The cooling water is used for cooling the objective lens Objective lens current will be shut off The Air lamp on the evacuation control panel will be off The power of the turbo molecular pumps will be shut off All valves are closed Alarm buzzer only The evacuation system will not be working normally Alarm buzzer only The evacuation system will not be off Gun baking power supply is shut off Gun baking power supply is shut off Baking power supply will be shut off System Operation Countermeasure Check the cooling water supply The Water lamp is lit when water is supplied When the system is using an air compressor check its power supply and pressure When using house air check the source of the air pressure The system will recover when the air recovers at specific pressure Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to EVAC the EVAC AIR switch on the specimen exchange chamber Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to LOCK the S C LOCK switch on the evacuation control panel Pull out the specimen hold
250. the transport wood to support the instruments attached to the bottom transport wooden frame 1 ea 3 Remove all transport vinyl covers 4 Remove everything from the corrugated cardboard box 3 2 2 Carrying in Move the instrument to the installation site manually or by forklift Do not vibrate or give a strong impact to the instrument while carrying in Move the instrument carefully because many parts are needed to be handled with care 3 2 3 Parts Quantity Check Check the number of delivered parts against the packing list 3 3 Setup 3 3 1 Instrument Layout Install the instrument according to Figure 3 3 3 3 2 Setup Procedures Standard Unit 1 Remove the TMP retaining board attached to the main unit the anti vibration rubber retaining bolt and its spacer 2 Connect the cables and the connectors to the power unit the main unit and the display unit according to the S 5200 Assembling and Wiring Diagrams 1 and 2 Figures 3 4 and 3 5 3 Connect the dry pump to the main unit using the rubber vacuum hose and clamp 4 Connect the power cables of the compressor and dry pump to the CMP and DP terminals on the power unit 5 Check the power and grounding and connect the power source and grounding conductor If the service voltage is other than 100V AC connect the unit to a user supplied voltage converter such as an autotransformer Connect the main unit to the cooling water device using the attached coolant resi
251. to be made Table 9 1 Phase Adjustments Signals to be Checked Adjustment Locations Heras Signal 1 Signal 2 Adjustment Window LD CLK TP2 H TP1 IP clock phase Both H and V must be satisfied V sync 15 Count CLK TP3 H sync TP1 E Clock phase Both H and V must be satisfied V sync TP15 5 After adjusting the phase re adjust the offset value on the adjustment window so that the display area matches the SEM display frame 6 Adjust the value of Window Offset for the adjustment window between 2 and 2 so that the gap between the SEM display area and the area displayed by the Imposer will be smallest Check by moving the screen from the left to the center to the right 7 Save the adjusted value Phase Adjustment for GUI Video and Video Switch Signals 1 Usingasimple method coarse adjustment and the SEM data entry function enter vertical white lines and characters at any position on the screen Adjust the phases of video signals and switch signals so that these characters will be white rather than violet Part No 595 8030 9 19 Adjustments 9 20 Following are the procedures for accurately adjusting the waveform levels NOTE Because this adjustment is made before the system is shipped from the factory it is normally not required The following procedures are intended as a reference only Launch PAINT from Windows Accessories On the full screen completely paint the
252. to commence the installation process When a confirmation message appears upon completion of the installation process click on the OK button to close the installation program Upon completion of the installation process shut down the PC and turn off the power for it After that turn on the power again and start up the PC Refer to the installation manual for further information including required PC settings The installation CD has the following directory structure E Setup exe Common Newlmp English Japanese When the system is started for the first time the following batch programs stored in the directories Common and should be run This process is required only for a new installation it is not needed in subsequent upgrades Common Install bat NewlInsNt bat NewlImp L NewlImp bat 7 20 S 5200 Field Emission Scanning Electron Microscope Service Manual 7 6 Error Messages Host 1001 to 1008 1009 to 1030 2000 2001 2002 2003 2004 2005 2007 2008 2010 2016 2017 Part No 595 8030 Cannot execute at scan speed XXXX Now running in xxxx Mode Executing xxxx ing Invalid input data Invalid data out of range Only a number is acceptable Invalid Data Software Cause amp Remedy These messages will be shown when the operation is inhibited with the present scanning speed Change scanning speed and then do the operation again Th
253. volume VR2 so that the voltage of TP9 will be 00 1 V Adjust the volume VR1 so that the voltage of TP6 will be 0 0 1 V Set the vacuum level display option to IP2 Confirm that the display indicates 101 Turn on the switch for IP2 Confirm that the LED for IP2 is on Confirm that the vacuum level indicator shows a normal value 2x10 9x10 Pa Adjusting IP3 0 deo vss Check to see that the IP3 switch is OFF Adjust the volume VR202 so that the voltage of TP201 will be 0 0 1 V Adjust the volume VR200 so that the voltage of TP10 will be 00 1 V Set the vacuum level display option to IP3 Confirm that the display indicates 101 Turn on the switch for IP3 Confirm that the LED for IP3 is on Confirm that the vacuum level indicator shows a normal value 2x10 9x10 Pa Part No 595 8030 5 49 Electric Theory 5 9 4 Flowchart Standard Configuration Flowchart Starting Operation Standard Piping Cooling Water MAIN POWER OPEN SW gt EVAC POWER SW gt NO gt 1 SC Evacuation Control i Separate page i i ES i AIR COMP Dry Pump NO MDP ON Normal YES Normal Dry Pump ON i 1 m NO Pi 2 10Pa NO Pe 9X10 P3 MP NORMA YES V3 CLOSE YES LV1 OPEN V3 CLOSE V4 OPEN NO YES NO E User operation HOLDER LOC YES L7 Control OLDER LOCK V3 V4 OPEN lt
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255. when the above image file stored by the operator is saved A txt file is created when the associated file format is either bmp or jpg it is saved in the same directory as the image file Log File Listed below are communication log files that are used between a PC operating program and a VRT control program You can specify either to create or not to create these files by setting the Debug option on the Tool System Adjust menu e Socket log e RS log Condition Parameters The 55200 stores observation parameters in a registry under the following key LOCAL MACHINE SOFTWARE 5200 In addition you can specify a temporary file directory in the Thumbnail Directory under the SEM Data Manager tab on the Option Environment Setting menu Part No 595 8030 7 5 Software 7 4 Windows and Programs Starting and Terminating the System The first step in starting your system is to turn on the power for the Display The power for the EO which is normally switched on is interlocked with that for the Display When the PC is booted and Windows starts up you need to log in You can start the system program by clicking on the following icon Figure 7 5 The figure below shows the initialization screen that appears when the operation program is started To enter a service engineer screen you need to enter a user ID and a password specifically assigned for service engineer on 5 5200 Scanning Electron Microscope Cop
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257. xi At anga Ir Monitor Adjust System Adjust Imposer Adjust Photo Unit Adjust Debue Menu Option Setup Figure 7 8 b The figure below shows the Standard Screen Mode screen that allows you to observe images Part No 595 8030 7 7 Software Beam Monit F On OverDrive v Adjust All v Area Marker Scroll Bar Probe Current Normal Signal Control Set Detectors Capture Resolution 1280x960 Figure 7 9 You can adjust the magnification focus and brightness on this screen In addition you can observe images by adjusting the accelerating voltage and the image alignment 7 8 5 5200 Field Emission Scanning Electron Microscope Software Service Manual Electron Optics System Adjustment Screen The figure below shows an adjustment screen for the electron optics system This screen is launched from Tool Adjust on the menu Further details on adjustments may be found in the section on adjustments EO Adjust1 SF Hit 10 Sky E ZZ UK Umi E E Pam E Pam Em zm a Part No 595 8030 7 9 Software The following adjustment screen can be launched from Tool EO Adjust 2 on the menu Adjust2 Pe SUK E 4S 2048 2048 Mag Hance Weg henge 2048 2048 r Mag henge r Mag henge 4 S 2
258. your SEM images at your convenience Windows NT compatible analytical systems SEM Image Output through a Network Connection By connecting the S 5200 to a network by Ethernet you can easily transfer your data to an office PC or a network server PC This eliminates the cumbersome offline transfer of SEM images through the use of floppy disks or MO media Compatibility with Off the shelf Image Processing Software Packages You can easily create reports by purchasing Word and Excel that are widely used in the office environment or Photoshop PageMaker and other DTP packages and by using software that suites a particular task at hand Because some software that is installed on the PC can affect the operation of the SEM please consult with Hitachi Instruments when contemplating the use of such software Also Hitachi Instruments recommends that you use the PC installed as part of the S 5200 system as a dedicated PC and use any off the shelf software by installing it on a separate PC Installing an EDX Analysis System As in the case of conventional systems an optional DBC can be connected to analytical systems available from different manufacturers When using a Windows NT compatible analytical system in conjunction with the S 5200 you can enhance ease of use by installing software option Hi Mouse that allows the sharing of the keyboard and the mouse between the two systems Part No 595 8030 1 9 Introduction 1 2 Specifications 1
259. 0 1 um The difference between the measured vale and the actual value must be within 10 NOTE With the photo CRT and CD measurement units attached the actual image magnification should be measured on the photograph Also only specimens approved by HID can be used Evacuation System Vacuum Measure vacuum for the electron gun first intermediate and second intermediate chambers with a vacuum meter The vacuum must be measured as shown below Electron gun chamber 1 x 10 Pa or less First intermediate chamber 2 x 10 Pa or less Second intermediate chamber 1 x 10 Pa or less e Evacuation speed Measure the duration from when the specimen is exchanged to when the high voltage can be applied The time must be minute or less Structure Check Specimen goniometer stage motion range Move the specimen goniometer stage throughout its range and check the range of motion X axis 3 5 mm Y axis 2 0 mm Z axis 0 3 mm T axis 40 Movable aperture motion check Shift the objective lens movable aperture and the beam monitor aperture from No 0 to No 4 and check that they can move smoothly 3 15 Installation Specimen Exchange Check that the specimen can be moved from the Home Position to the specimen exchange positions described below Also check that the specimen can be exchanged smoothly Specimen exchange positions X axis 0 mm Y axis 0 mm T axis 0 Electron Optics System e Mechanical axis alignmen
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262. 0 C variation 0 5 C or less 10 min Supply faucet Rc 3 8 tapered internal thread x 1 Drain port 20mm dia or more x 1 on floor natural drain For side take off EDX x 1 For faraday cup port objective lens aperture x 1 For anti contamination trap x 1 For YAG backscattered electron detector x 1 For upper backscattered electron detector x 1 For STEM detector x 1 For STEM aperture x 1 Normal scan Reduced area scan Line scan Photo scan Spot position Area analysis Dual mag split screen Oblique Pentium 450 MHz or higher Memory 128 MB HD 6 4 GB or more Microsoft Windows NT Viewing 17 color CRT 1024 x 768 pixels Photographing option Real time image display Automatic image control brightness contrast Gamma control Differential image display empahsizes the outline Reversal image display Auto focus auto stigmator Photo in memory 2560 x 1920 pixels S N improvement by averaging Frame integration 1024 times max Contrast conversion image in memory 2 split screen image display Introduction Item Scanning Speed Electronic Image Shift Frame Memory Image Display Size Operating Condition Storage Signal Selection Signal Control External Control Data Display Data Input Network Recording Device Dimensions Weight Column Display Power supply unit Dry pump Air compressor Weight Specification Color disolay 2 colors overlap display or dummy color e Raster rotation ti
263. 0 Field Emission Scanning Electron Microscope System Operation Service Manual 8 System Operation 8 1 System Operation Outline The basic system operation for this system consists of SEM operations under a GUI environment and evacuation sequence operations Under the GUI environment you can operate the electron beam the condenser lens detected signals and the specimen stage in addition to performing image processing on acquired images In the evacuation sequence operations you can perform evacuation operations using a turbo molecular pump and a dry pump in addition to baking and Eco mode operations 8 2 Flowchart on All Operations You can perform S 5200 SEM operations according to the flowcharts shown below For details please see the individual sections in the Users Manual Checking the vacuum for the column unit Launching DISPLAY Supplying liquid nitrogen option Preliminaries Notes on preparing a specimen Pre processing of specimen Adjusting the specimen height Setting and verifying specimen exchange position Specimen loading procedures Specimen exchange procedures Operatingthe S C AIRLOCK VALVE switch Flushing Setting an accelerating voltage and an emission current Applying an accelerating voltage Settings forthe electron optics system Electron optical axis alignment electromagnetic alignment Setting a magnification Setting the scanning speed Adjusting the image brightness and contrast Adjusting the
264. 048 2048 il 2048 SIT U sias pta ust EU seat s 7 ai fe iki 2048 2048 127 e Ju fel Mer tend Sig 9 Men 1400 0 14000 05 Figure 7 10 b 7 10 5 5200 Field Emission Scanning Electron Microscope Software Service Manual The following adjustment screen can be launched from Tool EO Adjust 3 on the menu Adjusts e fe 2712 gt stat ote e Iv Gan rus DILE 5 e E Figure 7 10 Part No 595 8030 7 11 Software Stage Adjustment Screen The figure below shows an adjustment screen that allows you to correct the flow of stage motion quantity and to improve the precision of stage stopping when moving the coordinates of the stage using the RISM option Stage Adjust Figure 7 11 To enable the setting of the above corrections you need to enable the settings on the following screen Environment Setting Figure 7 12 7 12 5 5200 Field Emission Scanning Electron Microscope Software Service Manual Imposer Adjustment Screen The figure below shows an Imposer adjustment screen that displays SEM images This screen is launched from Tool Imposer Adjustment on the menu Further details on adjustments may be found in the section on adjustments Imposer Adjust
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268. 1 2 Click on Set Save None in that order After changing the magnification repeat the measurement in step 1 Confirm that the measurement error is within 1 Adjusting the Fourth Range Magnification 1 Set the magnification to 300 third range use the length measurement cursor to measure the spacing between the micro scales Let L3 be this value Set the magnification to 350 k fourth range use the length measurement cursor to measure the spacing between the micro scales Let L4 be this value Calculate the value L4 L3 and substitute it into Range 4 Click on Set Save None in that order Change the magnification Measure pattern widths using magnifications of 300 k and 350 k Verify that the following specifications are met Specifications 1 4 L3 L3 within 0 01 within 1 96 Part No 595 8030 9 43 Adjustments Adjusting the LM Mode Magnification Adjustment Conditions Accelerating voltage 5 kV 9 Probe Current mode Normal Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm R R Off LM Mode Select Normal Perform image adjustments using an accelerating voltage of 5 C1 5 normal Sample Height 0 0 mm and HM mode Switch to the LM mode Set the Low Mag Mode Mode Select on the Column SetUp screen to normal and perform focusing adjustments Use a rotation holder to perform adjustments so that the horizontal line of the mesh matches the horizontal line on
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270. 10V 30kV Extracting Voltage Control Check point TP6 HVC P C B Output voltage 32V DC Power Supply on HVC P C B Table 5 19 Output Check Point LED Fuse 5V TP11 LD1 FUSE 1 15V TP12 LD2 FUSE 2 15V TP13 LD3 FUSE 3 36V TP14 LD4 FUSE 4 Part No 595 8030 Electric Theory 5 45 Electric Theory 5 9 EVAC Sequence 5 9 1 EVAC Configuration Standard Evacuation Configuration 5 46 l s EF 20 l s 20 5 OBJ aperture Pet SE detector 2 Option SE detector 1 1 X 9 Leak port E gas Contamination trap 5 Buffer TMP tank 300 Dry ESDP12 Figure 5 38 Evacuation System Standard Configuration Option Electric Theory S 5200 Field Emission Scanning Electron Microscope Service Manual Tandem Evacuation Configuration Objective To increase the attainable vacuum by reducing the back pressure for TMP 300 L s BD 1 5 Cold trap Pipe shaped 20 1 5 Option 20 1 5 L ontamination trap 1 OBJ aperture Pe SE detector 2 option jJ SE detector 1 MV 1 x N2 gas leak port 9 1 5 fo ______ 300 lis Dry Pump ESDP12 TMP 50 I s Option Figure 5 39 Evacuation System Tandem Configuration Option 5 47 Part No 595 8030 Electric Theory 5 9 2 EVACSEQ Board Configuration The
271. 12 T 220 2 222222252 77 235 R23 P fio 0 rs 00 AE 1 2 15244 8 V1 7 4 9 Nea OND 3 LS 1 R22 09 B13 17 3 vi lt 6 3 9k HZ16 HZ16 36v lt 4 16 V1 52 45V B12 15 5 1 lt 4 R29 gt Q 1 5k 11 6 14 V1 lt 3 3 V1 2 a 12 vien up vosc 211 A10 12 1 lt 1 gt P 0 ICM3 ICN3 B10 11 9 1 lt 0 gt 8100 16 26 WT US gt s Ys a amp LAMP fu R40 EE 2 2k SZ 77 2 ICk4 0 0068u C22 n ICH 77 AD7545ALN 0 01u D lt it gt 4 93 rre 20 R38 8 7A 15240 13 T 0 lt 10 gt 5 omo R31 2 RBO R34 ICH5 Qe 1 Bog Q OH L nen 5 nes VREF 2 VREF 10k 75k 75k 10k i R37 54 5 b AN W AN 3 3k 95 ALV CLOSE 0572 5 tu 05 07 6 Kas un 3 Frie He rr D lt 5 10 os c17 c18 eae 2 bio DC 11 3 2 88 2 9 R76 0 047 0 047u ova D10 Bay X 024 our IN 4 lt S 100 4 gt 100 3 17 D lt 2 gt 13 18 bo 0 0014 182074 gt 33 12 DX T gt 14 4 GND m 4 DLOS 15 oso eso 2 9 0 25 1213 2501559 WR E 4 so o 7 R36 0 PS BBG 160 c 7 i 26 36 1 C20 C21 el D 1u ICJ1 777 5 x 7 8 wo v v LS240 REFO1CJ 215V 15 3 82 j 34 0 17 EM47 gt HV GND 15 4 zd vo
272. 15V R 4 13 1 4 019 1 C54 C27 017 fe Re R3 iw 23 200v 8 uPCA494 R106 210 mcm 1 77 4 REF 707 wt R62 Ry4 GND_COL 2 2k 5 RT 77 022 AQZ204 R631M 5 GND_COL 2 3 i 4 pr c 2 R117 ZT irm lt 0 10V vSE1 REF T2 2k GND LOGIC 1075 22k NI E2 ULN2003 R641M 2 R65 5 12 3 16 N12 2 2k EXB1 VSE1 15 1120 3 30V 80V 0 200 100 3 Fe C502 R69 aL DuPont 50V 200V VCC GND 56k G 2 b R118 15 GND_COL oss anak 107 tH 15V R utn2003 C2 R66 Q23 EXB1 L H_N VSE1 ON L 77 Rae 15V R GND_COL 18V_COL 024 74 g EXB1 GND_R Rat RY1 R108 10k 855 15V R 20 15V R 2 2k 5 29220 R42 2 2M 2709 RET VSE 100V 22 275 Agvet 2 2k 100V 77 n 1 9 V 5 2007 777 GND_COL R72 ULN2003 4 R43 ur On 2 GND_COL _ 1 8115 RT V_EXB1 2 s JP1 Zn6 c32Z RUD R71 R73 6 8V 36mA 50 3 0 1 256 2 15 4 p 5 y 708 025 027 DuPont 200V Hz9 R44 Zn7 2 2M 7 7 8 1 GND R 7 7 EXB1_BIAS GND_COL DuPont Open 07 50 GND_COL 7E TR7 796 18V_COL GND_COL 15 33k 3M EXB1 L H N 11 Q26 P C36 R81 C37 F u R78 0 01u 2 470k S E e RB3 GND_LOGIC C34 C35 7902 n Q30 0 1 0 1u R79 51 15V R 250v 2507 100k TOS C33 RBO R82 RON
273. 19A EN a A Lip 5 5200 ST DI ST DID KANEOKA 1999 KAGEYAMA 1999 st las 7 JL 79 gt 321 L2 31839 T re 321223 18399 12 64 32 ST DIST KAI RO F1 r O O 2 c HEATER 200W HEATER 300W ar 1 x 2 F2 15A T HEATER 200W gt amp 2 15ACT 3 HEATER 200W oB ary lt HEATER 200W 2 F5 3 15 T ry Or 4 4 F6 3 15ACT 1 HEATER 200W 2 F7 3 15 T 345 HEATER 200W ary Q oB 5 F8 3 15ACT Prey ary Ca 6 HEATER 200W 2 9 F9 15A T Ye 20 HEATER 200W NEUTRAL 1B IN 1 B OUT F10 1a V N HEATER 70W Q CAD ER 1 5 5200 ms is a 4 BAKE B MOURI 2000 10 21 2000 10 21 Blas 7 JL 1 1 KAGEYAMA 2000 10 21
274. 2 1 Standard Specifications Item Secondary Electron Image Resolution Magnification Electron Optics Electron source Accelerating voltage Lens system Stigmator coil Scanning coil Objective lens aperture Beam blanking Electric field of vision shift Detector Specimen stage Method Traverse range Specimen size Motor drive Specimen size Vacuum System Evacuation control Vacuum pump 1 10 Specification Notes 0 5 nm guaranteed accelerating voltage 30 kV sample height 0 5 mm 1 8 nm guaranteed accelerating voltage 1 kV sample height 1 5 mm The resolution measurement specimen is used to measure the resolution Low magnification mode 60 to 10k x accuracy 10 High magnification mode 800 to 2 000k x accuracy 10 Cold cathode field emission type electron source Butler lens assembled Anode heater assembled 0 5 to 30 kV in 0 1 kV steps 3 stage electromagnetic lens reduction type 8 pole electromagnetic type X Y 2 stage electromagnetic deflection type HM mode 1 stage electromagnetic deflection type LM mode 4 openings selectable type finely adjustable Aperture heating function assembled Electrostatic type synchoronize scanning signal Electromagnetic type at image freezing when sample height 0 NOTE The field of vision shift depends on the sampe height Secondary electron detector ExB method Upper backscattered electron detector option YAG backscattered electron
275. 2 12 45 MAL aro 7 E L 1 MAD 5 Ars MD2 27 gt 235 25 MAI am 22694 1 MDi 2105 e 226 MD2 10 MAI 7 225 275 244 2 Mae gt As MD2 25 MA2 gt 45 MAI 4 Marice ae S pee MD2 24 M MD2 s gt 2 5 oe nos MDI 23 5 ind SH MDI 7 gt 2 5 AN DU MD2 23 MA2 ee 9 2 lt 7 4 gt net ii MDI 22 1 4 gt id net 2 lt E Pr MD2 22 MA2 4 Sa mar 11 MD2 6 gt 2 MAI 3 n MDI 21 1 3 gt pan 3 id nos MD2 21 3 ror MAI 2 vis pen MDI 20 1 gt gt MA2 gt T nae MD2 20 gt 4 gt 2 1 1 MAI 1 pd m 7 MD1 1 9 gt lt 1 gt Bot 7 MA2 1 ex p 7 MD2 19 MA2 1 gt T 7 MA1 0 n 5 MD1 18 0 po 5 MA2 0 ee MD2 18 gt J 0 en nee 5 R PE MD1 17 e pes a MD1 1 De MD2 17 gt oe MD2 1 2 16 Ta gt DOR gt MD2 16 n 2 MD2 0 Hs s boo ass an 200 MMR 10 3e MWR 10 us i 12 as Lo 12 xe Domo 101 T
276. 20 MPUD 7 0 MPUA 1 3 1 RFBB gt 0 os IOUTB i WRITE N 184 wR AGNDB von R56 100 5 O 40 nc AMP 8P R45 5 10k 170 Lor NG 15V CAD EF1 3 m 4 1 5200 A amp HH SGVA P C B 1999 07718 K KAGEYAMA 1999 07715 7 JL BE SE e HEAL ee4 teqo9no 3 ia 321125318396 a 18 SGVA P C B 3 6 12 30 865818 LE N
277. 2000 10 21 12 6 4 C DCPS P C B CN150 1 RX 2 TX 3 4 SG Hs DSR 6 RTS 7 7 7 CTS RI DSUB 9P 151 10 RX 2 TX sy 4 SG 5 DSR 6 RIS de 7 7 5 86 RI 9 DSUB 9P 161 424v Q cno vec O 80 15v UC PO Aa 15V 12 05 eno 805 AMP 10P
278. 21 TP37 7 HVRED1 N 382 5 nim id C 37 lido ivi MS EE 125 7 54 122 AA Tei Peer cid PA xai brat aio Amal b 7 0 gt Wo 7 0 Zz PETERE aas 6 57 a P his n Bis 1 1 1 2 MV 118 sare 5245 Am Ec7B P S aol o Do Bx lt 0 gt 2 D O he 7 4 24200 2821 ide odi nog rx ECGB P as 532 ro D lt oda Was ECSA P 35 Eras Da mise inedia p s as ha ia zest ECSB P 282 4 04 s 5 4 Wo 4 2221 gt et e 130100 pase sm are De n gt D lt 6 D 6 i2 e M Wo 6 gt 2 21 52 D a gt 57 lt gt 4 DAZ D 7 gt _ ae Wo 7 222 ECAA P Bee D 5 gt LEGS EC3B P EE ECSA P 25 2252 NTO Aio 7 Pu 2 2 2 2 56 282 2 6 NTa 09 O O 2 21 ECZA F 57 3821 1 NT2 ao al n af a 59 ss 103 Y I NES 220 ea xs READ P Q 25 READ F is ai XDATA P NTa N sa Wisa NTS N m gt i ex ioo bx t ipa xCLK P NT6 N a7 m 2221
279. 220 FFB1 10 23 TB3 24 v K K z IELH 1 11 62 10A oc for a ee K FUSE2 SACT gt 2 K Noise filter FUSEL 5 Jeor DISPLAY NFL NF2 5 FUSE4 3A lt T gt TRANS lt PC 3 gt LINE 44 2 5 oO OR K K K K NEUTRAL 4 2 2 4 W EN FG FG Bg W z n POWER s FG SUPPLY 5 5 L7 4 Zec 221s a2u AC OUTLET 1 4 Y G TL ELE 27 T gt 5 GROUND PIECE z 260 2218 200 SZ 1015 1X14AWG 2 1015 1X1GAWG 1 3mm UL1 27 1X2 AWG 0 5 2 C J T BLACK WHITE YZG YELLOWZGREEN B BLUE B W BLUE WHITE AC Power Supply Unit 2199 7 S 5200 Field Emission Scanning Electron Microscope Service Manual 5 3 DC Power Supply Systems Electric Theory
280. 23 225225222 m 22 2 2 3 2 2222 2 2 2 NA NA CAD 5 4 FAB RM 1998 1999 oz os AA 7 1999 07 08 YE 12 49 Tdata 2 lt 7 0 gt E D N z 0 2 N lt x 20 25 5 Y d uz 2 4 5 409 gt 20 a PE Ea 28 2 w P 4 ann a A joi EE k RIO 999 8 z ge na us 445 gt gt gt Out 4 4 ay H OF 49 MP gt a amp 2 B 2 5 5 i 5 5 i f rom SROM 5 5 B 9 8 5 3 i 5 DATA
281. 24V di ES E B ELB 50 30 CONT 5 K AC230V 8 SEM AC208vG POWER2 B W O AC200vO K Current 100 671 DC24V Sensor o w GROUND TERMINAL PIECE DRY PUMP oy K ELB 3o 4 A K joe w w w 2 DRY 99 PUMP TELH 1 11 62 108 lt 3 Y G CAD 5 RE C 5 25 x AG a A FAG S S28 A _ 2000 10 2 D Jac DIST UNIT S2 CE A N KANEOKA 2000 10 21 at la 7 JL 7 Edd A TS A 321 25378102 gt FARR lt KAGEYAMA 2000 10 21 4 JE 2 2 AC DEST UNIT S2 CE TYPE 2 2 12 4 ion Y H 5 CN98 ZU zm sus s 98 510 6 B3 B1 3 Al Q JP jp AMP F4 2 NER UN 1 2 Su 5A T MAIN p E Z l POWER 2 NE 2 DCPS O Om 2 BIA F5 8 56 O m N a i Ad us CN92 3 pd AMP Y 3P EVAC 1 P to SEQ 242 14 4 3 I 4 O to AC D INNER O N 82 O A2 2 811 A4 zx 4 O CO F8 iG 26y O T cunei
282. 25 B E N KANEOKA 19987 02 25 AB lt pe SSL EBI x a 321 Aj 78377 2 1998 02 25 221 29910911 12 24 CN390 j PC HV2A40 25 741 6 Ics B1 R47 06441 9 1 2W 1k V03C 6 gt 5 GREY esas XE 1 E 056 7 L O s2 va m La __ 663
283. 261 63 12 2 COND Fine 15mA 0 E20265 67 12 OBJ reference 10V 0 E20271 73 12 OBJ Coarse 5A 0 20247 49 16 OBJ Fine 50mA 0 E2021D 1F 12 Image shift Lower X 250 0 E20209 12 Image shift Lower Y E2020D OF 12 Image shift U L ratio X 150mA 0 E20235 8 Image shift U L ratio Y E20237 8 Aperture Align X 75mA E20269 12 Aperture Align Y E2026B 12 Stigma X 191 0 20211 13 12 Stigma Y 20215 17 12 Beam Align X 230 0 E20231 8 Beam Align Y E20233 8 Stigma Align XX 50mA 0 20251 53 12 Stigma Align XY E20255 57 12 Stigma Align YX E20259 5B 12 Stigma Align YY E2025D 5F 12 ExB1 reference 410V E20219 1B 12 ExB1 B X 340mA 0 E20239 8 ExB1 B Y E2023B 8 ExB1 Bias 50V 1 E20201 03 12 ExB3 B X 218mA 1 20211 13 12 ExB3 B Y E20215 17 12 ExB3 E X 10V 1 E20219 1B 12 ExB3 E Y E2021D 1F 12 Dynamic Focus 180 0 20220 8 Def Upper offset X 1 E20231 8 Def Upper offset Y E20233 8 Def Upper gain X 0 100 1 E20209 OB 12 Def Upper gain Y E2020D OF 12 5 8 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual Controller Name Maximum value 10 Bank Address Bit Def round comp X 1 20221 8 Def round comp Y E20223 8 Def Lower offset X 1 20225 8 Def Lower offset Y E20227 8 VSE1 control 200V 1 E2022D 8 5 4 2 Block Diagram CNS DAC Reference Address Decoder 10 aoo 7 IGM4 1 Reference Voltage
284. 2oo 4 1 ae RE 505 FAG HE 4 AA A K KAGEYAMA 1997 13 LN Me RANE GA s oorsukA 1997 01 13 12 48 24 PHOTO 2 P C B 2 2 vpri i z 0 te benz 17831 1 2 MHz r lt 4 1 x Lveieaaas Lvemieaza Lvcnieaza 7 2 jim am az ViDO 7 vibo 7 az ie VDI 1
285. 3 RLS G6C gt ew L DISPLAY RLI cec 1563204 4 CN123 Oo 3 D xi oo w w 5 RL2 666 81 5 OO O DISPLAY eS a RLS dd STAGE vig e MPG206R W IELH 1 11 62 5A g Sw1 2 eje 83 Ka Se K 322 8 NO 1e 3o B D EVAC SE 51 3 M RL4 82 470 2 4 swi 4 Em Tug 25E NEA NO NO No 44 e NEA ice uS 92 NC Wo MBW1203 22 2795 Bal 44 K K 3 p 5 SW1 5 NC 4 w B REN 8 ay F2 ITa v o O F1 YAS 9 ACT Y 1 1 5 CN97 5 1215 22 AIR COMP 706 1 2 3 4 50 60 91 20 4 5 102 _ IELH 1 11 62 5A K 4 K w CN108 109 w 5 O 550 24 B B B B B Y G_ 6 DCPS1 i n E 3 FUSE11 5A T 24V w K w DCPS wr O O F4 Loo i 24V trip TB3 B 07 e UF1005 K BUSES TAC K 19 205 4 1 2X 3 OOO E Xabs we 17 PE HV PS FUSE3 FUSE4 CIT G H MBS 1215 22 2 1018 B W E K FUSE6 1A T 1 56 CONT2 ACC SC 2N DC24V IELH 1 11 62 5A K 1 B W O w 14 K w FUSE12 B B 2A T 8 Y G 15 o Ej oue z B o5 B W 169 8 8 y ons MAIN TB SEM POWER UF1005 60A 6P POWER1 K 1 K K K 3 5 K K 7 o x O lt 8 SEQ w 2 w T4 5 w 3o O D E SC 2N DC
286. 4 gt 5 aa ye NI m 17 RL19 Yi ist range E E GDEF10 55 Cist V leo y S BM ALON I I Qe MIN N a a pp Ses ER ES Ecc _ 74 OF R32 AL_N RL22 RL23 Tao AMN M O o_o 3 8 W ANN 225 B10 4 sE FERNE Lo W 1st se O 2 S R29 aay oem I 7 2 cemary gt H VAC 2nd range 2nd range mm a Goera H vac 2 range 5 a2 so 5 Lae pip FERE NEAR atn range 7 ae mE M RLia 27 GepEr10 7 one E VW gt ANN 77 8 3 xw D GDEF11 RL GND EL aw RL25 RL28 rd range 3rd 4th T HI FA 26P a a n 4804 E v o ors vu om dieu 08400404 Deis B R34 HFS 1A 5Sw x12 RUS pom s 1 w aw 8235 vAc 2 ast range sd ALV 2 HIFA RL Om 2 1 rira CAD y 4 s 5200 KAGEYAMA 1999 26 PC DEF DEFAMP B A
287. 4 2012 67 MA4 12 gt 53051258 2513 225 es _ 117 Em x 22 C roser s mazio sa MAa o 1 G VS_N ee 8 G rs N ze pari s 4 7 sa MAa e rte 57 4 lt 5 Z Low 2 OND se 0 ESCAS 3V 126 ss I Pooc7oz saf a av pi2 posvasr ss i29 52 4 2 ss 2 si mazi s iai so si xaa sete xad from c Em A7 P43 i38 59 66MHZ 1 ise T as 3 3V RESET_N Pasay one 24 13900 TEST a2 cso 223 12004 PL EXT Domo 223 223 3 3V 143 3 3V YP veo 37 mba i gt see enon mao Mo AAMT PROP RR deen GON NOON NA AR 680 IR EE 522220 2222222290 22222225 02222222 ojn joja o M N m lalalalalalala ssssssss hssss5 0000000 0000000 000006000 000000 2225552 2252555522 2225 5525 22525522 gt gt Van 4 4 H F A
288. 4 77 GND USED 14 16 36 NS 10 13 21 NOT USED C11 12 R1 5 15 PMHV1_N IN PMHV1i_N C GND a es AS PMHV2_N IN PMHV2 N R26 100 GND N FRCS 10 CAD SF428A JU B3 E 4 AL kim ej x 2 2 ERAS RE 5 5200 fis _ d 35 cum P C B A N 2000 10 22 atlas 7 JL m A 2 Z 72 1 A KER 321 3 J 2 J SE 2000 10 21 YE iw Ww 12 75 40 OPT C B c7 160v iu H R18 220k Sr WW c2 2909 CN26 U L Olu E D3 D5 D 57 Dii O 20 3 st s y ToC RIG gt 150 160v R13 R14 R15 R16 R17 s D2 N ea NN 470k 470k 470k 470k 470k 4A R11 2 NAA VN WN VN ANN ANN Zi os Tu 150 dh NELLE AAA e 14 10k 7 NAA C VW S Di R12 R19 R20 R21 R22 R23 d 220k 470k 470k 470k 470k 470k R2 Eu ANN ANN ANN ANN NN ANN AAA cio EON E 100 230 5 24 De 7 lt R24 HT 470k R6 55 15 820k e _ 10u M
289. 403 vA C402 C404 M Nl C101 x 15 MPUD lt 7 0 gt 072 5V 5 15 1522 NG 10512 ICT7 N M ADC10464 x 2074 9 M 1 57 1 5 s 7 dd 170821 10 28 170822 11 27 ADSIG S EN A R262 12 2 2 26 _ MPUD lt Q gt 3c 0 1u pas 25 MPUD lt 1 C102 24 MPUD lt 2 gt 15V 9 085 23 MPUD lt 3 gt 74_ vrer ope 22 MPUD lt 4 gt 10715 PEEK HOLD 087 20 MPUD lt 5 gt AD7537JN 15V ge ADCSELO P 6 50 bas 71877 MPUD lt 6 gt MPUD lt 7 gt 14 oe7 area 3 0 10V ICS7 ADCSELI P 7 1514 pes 718 MPUD lt 7 gt MPUD lt 6 gt 13_ pes TES M i a 185 MSE __ 5 gt 11 Joss CN63 for BIAS PM ovo 5 lt 8 L MPUDC45 10 ae SMPLRST N 1 5 2966 MPUD lt 3 gt 9 loss touta 2 can INT 32 MPUD lt 2 gt 8 1082 AN Alg 5 4415 ADCSTART N MPUD lt c 121416 MPUD lt O gt 5 1 265 JR cs 55 VREFA 4 10 1657 an a ADJ E 185 CNTBRAUPD N 194 upp 00 15 201ABK MPUAC gt 16 vnErFB 21 ovo L z MPUACO 15 28 10 SMPLRST N 164 CNTBRA N 5 22 0 10 x 4 WRITE N 187 we TP3 154 0 cre 23 C104 266 1u AGNDB _2 P 1027 Qu INTEGRAL 12 4 RS R131 V
290. 5 a text file which is the output of files contained in the Installer and outputs the results as a text file SUM table file 1 1 c Program Files Pc_sem Ras Ras_FielsSsUMTable txt This backup for the original default conditions normal state can be useful in identifying problems that may occur later 8 10 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual B 1 2 3 4 5 595 8030 Explanation of the Maintenance Function and the Maintenance Screen 5 5200 Maintenance for NTJapanese 2 isplay EVA Son dto 4 Check File Sum 3 Save File Sum 5 Display Error Log 6 Save File to FD Q Display History Reset work Condition 9 Restore DB from FD Serviceman Only 1035 ave Product Inf 16 11 Save SEM Inf Close 12 Set SEM Inf 13 14 Dry Pump Tandem Standard Figure 8 1 Main Screen Connect to VRT button In order to load the data necessary for the display of operating conditions this button connects the port VRT through which commands are sent and received Display EVAC Condition button This button produces a graphical display of the operating status of the system When started up this button is displayed in a cascading fashion faint color disabled in which case you need to perform Step 1 above Save File Sum button This button determines
291. 5 Adjustments Specification Specimen Measure micro scale 10 pitch 2 4 um Scanning speed Slow3 Accelerating voltage 0 5 kV 1 5 15 30 kV 0 5 4 10 2 16 um 2 64 um 5 30 lt 10 2 28 um 2 52 um Relative to Cond1 No Conditions Specification Sample Height 0 0 mm Probe Current mode Normal mode Magnification 20 k Specimen Measure micro scale 10 pitch 2 4 um Scanning speed Slow3 No 1 16 Accelerating voltage 1 5 30 lt 10 2 16 um 2 64 um Relative to Sample Height Mode Conditions Specification Probe Current mode Normal mode No 5 Magnification 20 k Specimen Measure micro scale 10 pitch 2 4 um Scanning speed Slow3 Accelerating voltage Sample Height mode See the table below HV Sample Height Mode 1 kV 2 0 1 5 5kV 2 0 1 5 30 kV 0 5 1 5 lt 10 2 16 2 64 Magnification Low Mag Reference Magnification Conditions Specification 9 6 Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 1000 Specimen Measure mesh 2 pitch 50 8 um LM Mode Select Normal Magnification accuracy lt 5 48 26 um 53 34 um S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Relative to LM Mode Select Conditions Specification Accelerating voltage 5 k
292. 5 VbO2 a ava a7 F 4 gt G 4 2 3 17 lt soli ava is R 3 3 9 G a vDo2 3 aa 19 VDO2 lt 2 294a p R 2 gt VDO2 gt 25 an2 20 lt 2 gt 20 n2 20 25 27 403 22 VDO2 1 27 ana 22 G 1 Y Jvboz i zz ava 22 0 26lsas 23 R O gt VDO2 lt 0 gt 26 ans 22 0 02 0 56 44 23 B lt 0 gt N 48 o am 18 4 48 54 A 25 4 oc zo 25 25 4 oc R_SEL_B_N 244 25 4 amp 240 4 2424 x Cosi m H ane PU EEIP ew N B 31 0 z a 42 1 E 4 gt ar 299 259 2 mias 257 gt Paz 25 wi S age 1 Y 1 Y voo lt lt sf R 31 0 gt e232 o cap m 5 4 1 y 2 4 i KAGEYAMA 1998 1999 hE AA AAA 3 4 0204 s oorsukA 1999 07 08 OL 25 CMP N P C P 37 S 12 51 696
293. 7 19 5805 LED20 N e Sw G2 N 2 gt SW R2 N is Sw G1 N gt lt 2424 SW R1 N vec lt vec EC6_A ain EC6 A SW_GO N gt lt A2374 SW RO N lt ce vec EC6_B B31 B31 gt EC6 B T 2324 NC Q vcc 2 2 4 1 gt Ics 4 cary vec GND S EC7_A 32 2 EC7_A GND 2 gt lt 5245 F273 B 2 83274 EC7 B e m sss GND gt lt LED_G3 N A13 A 18 ud Oz LED lt 7 gt 3 52 __ 1 LED17 N GND gt 1 LED_G2 N 414 gt 17 sn s 2 LED lt 6 gt 4 lt LED16 N LED Gi1 N A15 4 16 ape et LED 5 gt gt Ana LED15 N LED_Go N A 16j4 154a B 26 9 LED 4 gt 5 los LED14 N 2 GND 77 ES 147 438 5 LED lt 3 gt 13 am Qal 12 21570 LED13 N 8850 080 1701 H c31 GND 5 sTGO 1 gt 2A 7 LED 2 gt am 5 gt lt LED12 N GND STG1 B33 gt lt B19 gt lt STOL GND LED lt 1 gt ee X5 1625 LED11 N 2925 GND sTG2 lt sTG2 GND 814 lt 11 oa 49 LED O 28 57 1 B167 LED10 N c28 gt GND sTG3 gt 185 sTG3 GND 15 4 T s d c27 GND STG4 5 lt Bis gt STG4 GND 816 vec lt 13 voc d e26 gt lt GND 5 5 B35 gt lt sTGS id ES d ez 25 GND sTGe ase gt lt
294. 74 C 4 NA XMAP P 19 2c 38 02 4e 7 4 26P sO E An 5 C143 C C146 C150 C157 C23 BNC lt debe C140 C141 C142 C143 C144 C146 147 o CLL 50227 0 1u J 1u 0 1u 47 79 1 TE 0 1u J Tu O tu TEM 0 1u TEM 0 1u 0 1 UNV1 5 gt 14 CAD EF131 25 KB 4 39 8 K KAGEYAMA S 00TSUKA 12 28 Lco CN ICNS HADR 12 0 gt AD768AR MSB HAD 0815 ROUT HAD 0814 HADR DB13 RIN HADR 0812 HADR lt 8 gt DB11 IOUTA HADR gt DB10 HADR 6 gt 089 IOUTB HADRI 5 gt 4 gt 087 HADR 3 DB6 LCOM HADR lt 2 gt DB5 HADR 1 DB4 HADR lt O gt 083 voo 082 DBO RCOM LSB IVCLK P CLOCK 103 NR 9 VADR lt 11 0 gt AD768AR 0815 ROUT DB14 0813 RIN VADR lt 8 gt 0 12 0811 IOUTA DB10 DB9 IOUTB 087 DB6 LCOM VADR lt 0 gt 085 084 DBS von
295. 8 kV Read the Focus display value Perform image adjustments at an accelerating voltage of 30 kV Read the Focus display value Use a 25 kV accelerating voltage when Sample Height 1 0 Specifications Relative to the focus value in step 1 those in steps 2 and 3 should be within 0 1 NOTE If the above specifications cannot be satisfied perform Focus Comp adjustments Adjusting the Focus Comp normally confirmation only Perform this adjustment only if the change in Focus display value relative to a change in accelerating voltage in Checking the Focus Comp Condition does not satisfy the above specifications Adjustments Adjustment Conditions Accelerating voltage See below Emission 10 pA Probe Current mode Normal Magnification mode HM mode Specimen holder Spring actuated standard specimen holder Specimen Dedicated specimen stub H 0 0 1 0 mm integrated specimen Sample Height See below Electromagnetic alignment All mid points the reset condition Image shift Mid point the reset condition Vsel Vse2 Off NOTE Do not change the Z value for the stage during the following adjustments 1 Set the accelerating voltage to 3 0 kV Sample Height 0 0 mm Perform image adjustments axis focus stigmator Click on Focus Click on Degauss Adjust the focus and the stigmator NOTE Clicking on Degauss can cause the axis to shift Should this occur re do the electromagnetic align
296. 812558126 58128 0653 6260 J gt TP102 L1 2 zome ICH15 15 15V 15 EGI N M ICA4 19104 15275 8840 0 MPUD lt 7 gt 18 p 18 2 1658 HA17805 PSV MPUD lt 6 gt 17 pg 0616 17 leB PSS 1252 169 MPUD lt 5 gt 14 jos 05 15 16 Isp sa PA 2 EVSE2 N 15 4 5125777 1 MPUD lt 4 gt xci Ga 15 48 PAS B4 5 500 20 100 i MPUD 3 8 ps 0319 14 56 Fo2 N 15 MPUD 2 gt 7 25 13 2 97 AS EVCMP N Q 2 MPUD lt 1 gt 4 02 7 92 5 12 8 Ad 4 6126447 16V 5 Di 1B 5 1 SZ 5 A 476 4 MPUDGO 3 po 00 2 11 59 EPMHV N 8 9 7905 R 5V PMCTL N 11 DIR 6 Qreros Teal FRC5 10P ICS9 15v gt 15V 06201 15 3 15 o TP107 VW x 15 15V 56 TEAN reos ICK15 z C261 1 5 5 276 17805 186 PPP BLKAMP z 263 Ts 22 BLKPLT N _ 18078 TSN AE 0 100u ias ta 18 58 sa 4 2 BO 4 15 sa 5 CTL 14 _ 5 y 13 ps 7 C262 2 wc sos Or 11 oa 9 15v O voc A AC2V P 285 58147 x R148 s ACIN P 2 2k jer s SLOW CAMERA AC 5 Av Q1 L 5 16 AC2V 850 25 458 15 FISY sy 10 R145 Pio 0 14 vcc 15V 15 1055 15V HON AEC PVCS NC PCPS T 2 R146 5v 87 R264 s 1055 28 5v
297. 8404 8405 13 INS mun R71 C62 N 95 11 GND qi 20 89 n 1N2 WG C79 82 V R84 C75 R88 205 4 6205 E IN4 v oiy AG 3 3k 5V 10k R72 A g p ICUS 5 BT AS 5 R68 lt gt DG201ABK R85 407 wos 470 3 3k ACG 3 4 od 470 R73 14 02 152074 R86 l Ne 2052 03 0534 6 54 04 5 72 our 8 2 R74 v BIAS2 S 85 VR200 FEE T 2 4 c65 N 1 30 yi x2 1 001u LPFSELS N 166 IN 10 N 4 IN2 GND BMCTLCN J AMP 10P S IN4 v wad 0 10 07 Tu R69 9 ore 4 7k 100 5 1 T15V 15 BM PREAMP CN49 BMIN S gt 1 12 15V 50k MP 7 DAC0832 15 20 HS 12 017 v c 20 C134 MPUDX55 151016 ee 0 1u MPUD lt 4 gt 16 015 MPUD 3 gt a Di 9 ICW11 MPUD 2 5 013 n 5v 3 MPUD T gt 6 012 11 2 Ne 2 o MPUD O 7 011 wata ses 010 poyr2 12 5 4 5v lt p 18 ILE A G 3 9 14 C135 MGAIN N 1 e ITE N 204 wri v c 1804 5 1764 XFER 15V RELAY 5 POWER d BMI N 5 BM2 N 7 G1 N 8 G2 N 9 G3 N 10 CAD EF131 ELCO 10P x WE E 4 RE 29 s s200 SGVA PGB A SEX N KANEOKA 1999 07 15 A K KAGEYAMA 1999 07715 at Wes 2 JL FRE KB A 321 25318398 S O0TSUKA 1999 07 15 6 18 SGVA P C B 4 6 12 31
298. 9 12 Hysteresis Measurement Method Part No 595 8030 9 29 Adjustments Backlash The backlash should be no more than 8 when the magnification is 2 000 and the amount of shift is approximately 50 um Stop lt Start a reverse operation after stop Figure 9 13 Backlash Measurement Method Shift of Image when the Image is Tilted e Shift in image position when the image is tilted At 30 000x magnification and T 5 the shift should be no more than 1 um e Amount of image jump with image tilt reversed At 30 000x magnification and 5 the jump should be no more than 1 um Micro motion Zero Center Magnification 100 LM mode Measurements should be made using an adjustment rotation holder At the mid point of X Y T X 0 000 Y 0 000 T 0 0 the center of the specimen holder should be visible on the SEM screen 9 30 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 9 3 5 Electronic Engineering System Adjustment Procedures Explanation of Abbreviations Cl lens C2 lens First condenser lens Second condenser lens Raster rotation LM mode Low magnification mode HM mode High magnification mode Adjustment Procedures Items Following are adjustment guidelines to be followed before the system is shipped Because adjustments are made using special tools and measurement devices prior to shipment if the need for further adjustments arises please pe
299. A LEDO4 N 822 K q LED24 N PSG bd 4e5 EC7_G C C LEDOA4 A A Sw R1 N lt 24 WOBBLI ER BRA BRS LEDO3 N 730 AVA Zann 2h LED23 N 77 K AAA SW RO N A23 LEDOS N 3 ANAL d LED23 EC7 2 W s CAPTURE AANA LOW MAG 4 AAA EC7 B 832 VW 5 v 9 NC gt LEDO2 N a 5 AAA LED22 N 57 L3 AYA 5 Wv ue V NC 223 LEpo2 VY id LED22 V RUN 220 BEAM 220 LEDO1 N AA K LED21 N AB K STGO 19 LEDO1 SU LED21 GND STGL 19 STAGE GND STG2 lt gt LEDOO N LED20 N Ls GND STG3 18 lt E d LEDOO 57 a LED2O GND 4 STG4 B18 CA ABCC GND 4 a STGS crs e gt vec GND STGe 717 lt gt 5 vec 4 GND STG7 817 vec M vec gt GND TE vcc gt vcc gt lt lt 7 7 2 NS PCN1096P PCN1096P PCN1096P PCN1096P CAD SF326B m AR 5 5200 zm 5 2 E 458 E a A AURA PCPANEL2 RX KANEOKA 1997 0925 77 PRO E pue K KAGEYAMA 1997 09725 THRISS 7 JL 780 BJ EA rey N Qa 5 OOTSUKA 1997 09 25 22 PCPANEL2 PX EB 12 45
300. AIN breaker on the power supply unit to the OFF position 3 Setthe power breaker on the power distribution panel to the OFF position to shut off the power supply 4 Turn off the cooling water Part No 595 8030 8 43 System Operation 8 6 Starting the System 8 6 1 Standard Startup 1 Turn on cooling water 2 Setthe power supply breaker on the power distribution panel to the position 3 Push in the power leak shutoff indicator button white on the MAIN breaker for the power supply unit While holding the POWER switch down set the MAIN breaker to the position 4 Set the IP 1 P 2 and 3 switches for the ION PUMP POWER on the evacuation operation panel to the ON position 5 If the IP 1 IP 2 and P 3 fail to start in Step 4 press the RESET switch for the P 1 P 2 and 3 on the evacuation operation panel for a few seconds This should start the IP 1 2 and IP 3 6 Conduct baking if the vacuum levels of IP1 IP2 and IP3 fail to reach the following levels 2x10 IP2 2x10 Pa IP3 7x10 7 Confirm that the specimen holder is in the specimen exchange chamber at the pre evacuation position 8 Confirm that the JOBJ APT switch on the evacuation
301. AN L 2 2 UN 2 os E RRT PMHV1 5 2 BMV N T lt lt bns 1 lt L gt PM 2522 gR32 LLL RSN soov 10 WMV Qa ro R27 10k qus RA fine 1 7 7 35 gt kus 2748 GND VA GND VA 2 2 2w 1 ek 77 24 ci21i13 PMHV2 0 850v GND COL AN S ion gt 4 11 nb lt 600v 600v R29 Z gt 19 ANANAS oa7u Sine span a55 22k WA 5 Pa PM gt wii J m IL 7 7 R20 GND VA 15 1120 13 mE 9 00190 s oa WA S E u z vec 2 R21 o9 10 VY 10k R23 R17 17904 sj 7 m soov 17904 NN lt 5 H AAA Ge OF 5 cia cie oa7u c20 Ah D10 t PMHV2_S I C2 10k c2 gt 4 PMHYV2 N L 77 72 237 o 10v 98 oix 10k 710k T R24 GND VA ERUIT 77 R36 GND VA GND VA 22 2 2w c1213 PMHY VA IN PMHV1_S S i0 TH L gt PM lt 10 Li 15V USW LINKED car GND ne 20 c PMHYV2 5 IN PMHV2_S 2 30 1 0 Q2 4 6 11 25 2 TZ B2 SNO CAMP Q5 9 2sc1881k 77
302. ANN 20k CY Z R97 E bod AMP 8P 777 crt SET gt 15 vais 51 52 _ cso 77 X R90 vaie 2 gt lt cuis our x v 2 5 iy x s T a s j R102 46v c20 AN A 25v jc23 _ 25 c27 c29 cas Y azm O74 Box me Tr o au 0 au 0 au au R99 gt e a gt Rios x ANN be 21 2 c28 2 cse cas cao cae ANY zay Te su Pea Toa Tea T R109 gt gt gt P 1sv TIT gt gt 77 vee 415V_BIAS T sai v 77 E 6v H v AMP 6P gt 15 6v AK BIAS 4 Riza NNN HA178M12 s as W OF Heater azc PHOTO_N Sana 41 to prea ESPK P p GND B 2 20 os DEF x 25v 1 5 v lt gt 2 O4 ELuco ess ess es cok m AMP BP W eas ese ce P vx 157 16v OF asa vy O4 P b p 6v vx COH Peisv 06 e SO gt AMP i6P CAD RE Z fr lt s s
303. Adjustments Service Manual 9 completion of the adjustment process click on Get Set in that order 10 Click on Y in ExB 3 Adjust 0 8 11 Adjust the alignment knob X Y so that the movement of the field of view marking is minimized when ExB 3 Auto On Off is toggled between On and Off 12 Upon completion of the adjustment process click on Get Set in that order 13 Click on Save Adjustment Specifications The amount of image shift on the CRT when ExB 3 is toggled between On and Off should be within 5 mm at an LM mode magnification of 1 0 k Adjusting the Out of axis Color Aberration Correction Conditions The input value should be set to 0 no adjustments required Part No 595 8030 9 49 Adjustments This page intentionally left blank 9 50 S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual 10 Maintenance 10 1 Periodic Maintenance 10 1 1 Periodic Maintenance Items and Interval The periodic maintenance items and intervals are shown in Table 10 1 Table 10 1 Periodic Maintenance Items and Interval No ltem Interval Note 1 Electron gun baking e IP ultimate vacuum does not reach the values shown below IP 1 1 x 107 Pa less IP 2 2 x 10 Pa or less IP 3 7 x 10 Pa or less f IP is stopped for 3 days or more due to a power failure or vacation e Ifthe tip noise exists e f V1 rises rapidly 2 FE Tip replacement e If Vi initial value rea
304. B P uia GND sT G x Ec2 A 27 d e 6 2 183 GND Ec2 a3 je 7 2 ina GND stic y ecaa aze 5 32 he ina 17 GND s 1i oe oa ECSB P 153 uin GND uio GND GND vec LAE GND A O ma GND 2 FEE GND GND lt lt lt lt lt lt SZ 222222 v n alo n a e SHIFT_x A A29 je zal 2 EC4A P 183 Eca B 37 lee sa 3 EC4B P ina 5_ 47 36 sal ECSA P 153 45v vee ecs_s gt B30 as aim ECS5B P 153 vee MAG A as asa ue e 183 F vcc Ece B aa je ua vec Aux ECT A s 2 he ECTA P 183 vec Ec7 B5 ax EC7B P 153 vee o eon e 20 8850 080 170LH 8850 020 170LH x 112 Leal 12 ics 1 5 N E 2 AL XB N E 2 sx lt gt SYA N 5 1 5 Xx 10 2 stao ass as stao ste STG2 srca Ee stea sTGa ass ESI staa STOS ase Aro stae STG7 s36 510 ETGT Ne GND GND cn 8850 080 170LH GND Bee GND vee
305. B4 Ik R291 2673 Wege HIF4 016 77 CAD EF 25 _ E Ame 55208 gt as a K 4 T NE K KAGEYAMA 1999 23 26 niece ENS KANEOKA 1999 803 25 stitlas 7 JL 7 803 RB LE gt gt 971 75378387 ala 12 38 19 DEF LENS P C B 5 5 gt 7 1 vee A A
306. Because this adjustment is made at the time the system is shipped the volumes that are provided should not be touched NOTE Perform offset adjustments after the TILT angle gain change width is adjusted 5 38 S 5200 Field Emission Scanning Electron Microscope Service Manual DIP Switch Settings RS 232C Specifications Start stop synchronization Data bits 7 8 bits Parity even odd none Stop bits 1 1 5 2 bits Baud rate 1200 4800 9600 Switches e Data bit switch SW103 1 7 bits OFF 8 bits ON default Parity on off switching ON ON OFF OFF default e Parity even odd switching SW103 3 Even ON default Odd OFF e Stop bit switching SW103 4 1 bit ON 1 5 bits OFF 2 bits ON e Baud rate switching SW106 6 12000 baud rate ON 48000 baud rate OFF 96000 baud rate ON Part No 595 8030 Electric Theory Figure 5 31 SW 103 5 OFF default ON ON SW 103 7 OFF ON default ON 5 39 Electric Theory W Command Default Values W command default value SW101 1 SW101 2 1 10 OFF default 100 OFF OFF 1000 ON ON r Data Output yes no SW101 4 Output yes OFF Output no ON default NOTE SW101 3 should remain OFF Alarm Lamp Specification E E DOO OOOOO Alarm lamp LED Y axls Power Ee 5 15W X axis Enable lamp ON Y axis Over Speed Over Load Yavas Over Load
307. C SEM exe Semlmg32 dll WinRT sys ToyLib32 dll PciLib dll FtpServ exe Ras exe SetLPAdr exe Other dll ocx files 7 2 PC PC_SEM exe Semlimg32 dll WinRT sys ToyLib32 dll PciLib dll Ethernet VRT VxWorks RS232C Stage Control EVAC Control Unit Unit Figure 7 2 Software Configuration PC operation program Imposer control program Imposer control driver PC memory status confirmation program PCI program interface For downloading programs on the VRT side and an FTP transfer program on the PC side for uploading images Self test program Program that sets IP addresses used on the system Programs for quick image processing image DB operations and external communications by RS232C S 5200 Field Emission Scanning Electron Microscope Software Service Manual VRT Programs vx Works SEM control program vx Works sym Symbolic file for SEM control programs vx Works mapA Map file for SEM control programs vx Works mapL Map file for SEM control programs Stage control vacuum pump system programs ROM for the stage control unit and the vacuum pump 7 3 File Organization The 5200 program files and the directory structure of the files to be created or used are shown below Program Files The following files exist in the directory c Program Files PC_SEM This directory holds programs that pertain to PC operations For a description of these files refer to Section
308. C interruption check error 7 A8 PTM register check error 8 A9 PTM interruption check error 9 Memory protection function error 10 AD Main memory error 11 B4 RTC register check error 12 B6 EEPROM check error 13 BB FDC register check error 14 BC SPC register check error 15 BD MBSI check error NOTE Because the memory that stores self analysis is backed up with battery if self analysis error occurs do not remove the battery and carry it without putting it in the conductive bag Part No 595 8030 5 17 Electric Theory NSEM200 NMEM200 NOPD100 Board Image Memory Board LED Figure 5 11 LED NSEM200 Table 5 8 Normal Silk ae Normal Silk 25 45 Status Screen Color Description Status Screen Color Description after self analysis FPGA11 Red FPGA load error Lamp OFF FPGA21 Red FPGA load error Lamp OFF FPGA12 Red FPGA load error Lamp OFF FPGA22 Red FPGA load error Lamp OFF FPGA13 Red FPGA load error Lamp OFF FPGA23 Red FPGA load error Lamp OFF FPGA14 Red FPGA load error Lamp OFF FPGA24 Red FPGA load error Lamp OFF 15 Red FPGA load error Lamp OFF FPGA25 Red FPGA load error Lamp OFF 5 18 S 5200 Field Emission Scanning Electron Microscope Service Manual Electric Theory Normal Silk 1 Normal Silk ere Status Screen Color Description Status Screen Color Description
309. CN110 F 1 1 6 LEDB7 N B27 3 3 81 1 4 LEDB6 N 25 555 14 LEDB5 N 829 gt VCC4 4 30 LEDB4 N 830 1018 LEDB3 N x LEDB2 N 12 5 F273 LEDB1 N MPUD 18 55 773 x ve BUDE 3097 eS a x MAE 444 823 LED46 N MPUD lt 13 gt 17 4 06 4 A30 LED75 N osre HANKS 182263 LED45 N MPUD lt 12 gt 45405 45 295 lt LED74 N cs MPUDCTZ2 40 oaa 821 LED44 N MPUD lt T1 gt 7403 25 6 4285 LED73 N MPUDCTT 7405 oste 12 MS B20 LED43 N MPUDCTO2147402 020515 A27 LED72 N 77 MEUD Teed py B19 LED42 N MPUDCS 155407 072 26 LED71 N i64 MPUDCS 13501 910412 10 AZ B18 LED41 N lt gt Boo 0009 25 LED70 N IC24 MPUDCB sepo 9109 S WB 81704 LED40 N KP c 2 15640 ERE NT WI4H N n A 330 MPUD lt 15 gt _3 LEDA7 N AB 17 2 LEDA6 N i4 MPUD lt 13 gt 4 LEDAS N ar fs ere MPUD lt 12 gt T7 LEDAA N As 6 845212 MPUD lt 11 gt 75 LEDA3 N 7 82913 Ic13 eae a3 EU F273 3 LEDAT N F273 MPUDCB 13 9 00 MUD 15 gt 18 sz 12 lt CEPR MPUD lt 14 gt 3 2 25 LED65 N WIAH N 11 832 45408 48 C22 D LEDG4 N Sn ADD AM 98 MPUD lt 129 17H 05 1 021 LED63 N 53102 55 44 Ss 22 EEDE n 7 ED 0 2 6 LED61 N ESET A32 85 MPUDCS e422 92 C18 ED60 N B32 2405 MPUD 8S 13501 96 C17 DR
310. Capacity 6 Maximum current 30A Sensitive current 30 Breaker Capacity 2 5 kA Leakage Current Breaker SEM POWER 2 Capacity 5kVA Maximum current 50A Sensitive current 30 Breaker Capacity 5 kA 2 3 2 Safety Circuit Function Interlock Operations The interlock operations are shown in Table 2 2 Table 2 2 Interlock Operations No Safety Device Operation Mode Notes 1 Emergency SW PS unit All stop 2 Emergency SW Main unit All stop 3 Leakage breaker All stop 4 cover All stop 5 COL CN board cover All stop 6 Baking cover Baking releases Warning buzzer goes Evacuation panel displays off E32 7 Baking HV cable protector Baking releases Warning buzzer goes off Evacuation panel displays E31 8 Post HV protector HV turns OFF 9 PMHV board cover HV turns OFF 10 HV cable position detector HV turns OFF 11 Lens coolant flow meter Valve closes Warning buzzer goes off Evacuation panel displays E13 12 Objective coil temperature Lens current turns OFF sensor 2 6 S 5200 Field Emission Scanning Electron Microscope Service Manual Safety No Safety Device Operation Mode Notes 13 Dry pump motion current Evacuation system stops Warning monitor buzzer goes off 14 Compressed air pressure Valve closes Warning buzzer goes off Evacuation panel displays monitor E14 15 DCPS board temperature
311. D RESET1 N 1 21 FRCS CAD EF125A gt 9 2 FAG 1999 KAGEYAMA 1999 04 s oorsukA 1999 o4 12 42 4 5 cN199 A 5002 for TILT CTL BR21 45v wo 7 o ewer from xv vec EO OU Eus TRACK BALL CN213 1 AAAS et Bw P AM 99 Bwa P SOR Ls2as AAAS 251 BM cde x 7 ANM sw 20 XAI N 18312 XAOUT P G 1 cvs AN Qj evo P 37 m P 5 xB Ya P re se sa YAIN P 1631 XBOUT P 5 xB lt seen 220 s is ha A YBIN P 1531 YA P wo 7 a 2 aa gt yar Bwz _ s YAOUT P 2 42 A WO x6 EE A ee
312. DC VELL Level Memory 2 Gain T I AD converter Contrdller k 5 l lt lt DA converter 7 Figure 9 6 Magnet Field Canceller Block Diagram Adjusting the Magnetic Field Canceller 1l When the push button switch SW1 is pressed check to see that the relay RY10 comes on and turns off in approximately 3 seconds 2 Observe TP11 on the oscilloscope Adjust VR11 and VR12 so that the waveform level remains between 0 and 4 V Prevu 1 Trigger Source ch2 Ch3 p SID 1 007 Ch2 2 007 M2 00ms Ch2 f 2 407 IRef3 100mv 400yus 10 00 M i Mode Source Coupling Slope Level Type Normal Edhe Ch2 DC 2 40 dart Figure 9 7 Input Waveform Part No 595 8030 9 23 Adjustments 3 Place a flux meter near the column unit While monitoring TP12 on an oscilloscope simultaneously observe the output waveform from the flux meter A Trigger Source chi ch2 ch3 0000 00mV Ch2 2 00 V M2 00ms A Ch2 2 40V more Too 100mv 40045 10 00 Source Coupling Slope Level T amp Holdoff Type Ch2 2 40 V Figure 9 8 Observed State 4 Adjust the VR13 so that the magnetic field waveform is at a minimum when V sync on the monitor is at the beginning of another cycle 5 Adjust the VR10 so that the phase of the waveform of the canceller magn
313. Do Qo T 8259 PNLRED N 823 x GD1A096R005C Em c26 3 C27 851 c28 C31 c29 5 gt i c30 A30 3205 z C32 GD1A096R005C MPU 15 FRC5 60P 77 2 62 1 C3 1 C4 1 C5 1 6 1 7 1 68 1 69 1 C1O 1 11 1 12 1 C13 1 6 16 1 C17 1 18 1 19 1 C20 1 21 1 C22 1 23 1 C24 1 C25 1 C26 1 r r 1 r r r 0 14 0 14 0 1 0 1u 0 1u 0 1u 0 1u 0 14 0 1u 0 1u 0 1u 0 1u voce 0 1u Pra 0 14 T O 1u 0 14 0 1u 0 1 0 1u 0 1 0 14 4 e e CAD EF105A 77 BYPATH CONDENSORS wee RE AE 5 5200 x S A um 2 EVACP SREX 1999 03 08 77 3 1 1999 03 08 at la 7 JL S lagna AEII 1999 03 08 321 253 18383 1 B 6 EVACPNL1 P C 12 12 78581596 mmmmmmm ooooooo Eee PCP TT AT ZZZZZZ2Z LED17 N mmmmmmm 9009000 ONURU 2222222 rrerrerrr mmmmmmm 99900000 Gan aon S NG x rr mmmmmmm OOOOOOO RRRARARAR Sperm NT 2222222 mmmmmmmm ZZZZZZ22Z Al 81 82
314. EFA y 16 c ES Tics 15 15V R111 n DE ERU N A sz Sh O PSELO N 1 c94 CN61 DBC 21009 TS 2 v 86 on PFR N 366 IN 5 Totu E ELCO 6P EE c96 2 8 1652 R118 ICP2 R101 15V PSELZ N 954 IN2 GND E pe 1 22k HBLK N 1 A2 3 HBLK N Hu 085 BL PSELS N 854 INS 4 c95 17 5 A INA v DO AT o oe ICP2 15 4 3 4 5V Sie p 15 6 ASN R117 56 10 TOD 2 V V K N 3 ICM2 Riot M E 50 vBLK N ME 105 R106 vec vec 15 Sig 2 8 10k 22 5V In 5v 5 ICM2 NC Z R407 15V 2 POUT N NA 2 1k R107 ICW1 4A SEECN BITS OH cm US 286 Ase aes 8 22 52 2 u aie 2 ELCO 8P 3 lus 3k i JP3 B 5 lt 1 NET 5 S al oe 1 1 gt 12 ESPKOUT P EIN 186 285 A 80 DBC asy CN60 ELCO 8P CAD EP LS 5 BRAA RE 29 s s200 85 n J E a A S AB SGVA P C B RS N KANEOKA 1888 7027715 a K KAGEYAMA 1999 07 15 atlas 2 JL Z R AUBERT 224 ES 28 S OOTSUKA 1999 07 15 m 321 25378398 Pb i Kt 18 SGVA 5 6 12 32 86581596
315. ELCO 8P 77 CAD zs IE RB 4 4AN BAM N KANEOKA 19987 02719 8 K KAGEYAMA 1998 02 19 st las 7 JL 79 YAMADA 19987 02 19 12 10 69581506 fi 136
316. EROR se 11 1 112240 PUN a Sun u Sumaq is p i eei 11 1 442240 11 2 LVDS Board i Auqa qasa maa Wb d teer ie eee aqa Pi SARER ete asss 11 3 1L3 STAGE uu ri eee der ee dede nci ee Nate 11 6 41 34 Malfuncti n iaa eim uie tq d kanaka loa lad 11 6 11 32 Protection Function 52i siet ie E RUNE e 11 7 TADS SIA BCAGJUSTINENE seo ro t os sp GR cod aes neous 11 9 11 3 4 Self test and Corrective Action eese eese eene nennen nennen nennen tenente nennen 11 10 TLA GERROR MESSAGES reat Hr or le ee Hd M ac ete t d IRL ele 11 15 TL4d VEVAC SEO 11 15 TI 42 SoftwatesError siete ee E ee a PUn 11 18 11 5 SETTING THE PC ENVIRONMENT 55 patte tein 11 27 11 6 5 5200 PC DESKPRO EP P450 6B 4 64C SETUP PROCEDURES esee 11 31 lt n RR AAG OR e P ere 11 31 1L6 2 Hardware Setup ee ee aee ee Hier Repo Entente tere ee et 11 31 11 06 35 BIOS Seitings i utate bete pet eit epe tee teda 11 31 11 6 4 Setting up the Operating n ntes entente enne 11 32 T 1 6 5 Sere
317. Explain the operation and maintenance of the instrument based on the instruction manual 3 4 3 Hand over Record each check item s result on the installation check form Record the necessary items in the installation confirmation report and obtain approval from the customer s person in charge 3 17 Installation This page intentionally left blank 3 18 S 5200 Field Emission Scanning Electron Microscope Hardware Service Manual 4 Hardware 4 1 System Configuration The major components of the system are the main unit the display unit and the power supply unit The main unit consists of the electron gun the C1 and C2 lenses the objective lens the specimen goniometer stage the secondary electron detector and the evacuation system The display unit consists of the power supplies the control system the image display system and the operation system The power supply unit consists of AC distribution evacuation system power supply specimen goniometer power supply and ion pump power supply units 411 Main Unit Main Unit The main unit cross sectional view is shown in Figure 4 1 1 60 l s Electron source gt Beam monitor aperture 2 20 1 5 First condenser lens Beam blanking Objective movable aperture Airlock valve V 1 B p IP 3 20 1 6 ae aay 00 Second condenser lens TMP Jis li p Deflection coil Ll r es Specimen Secondary electron oe
318. GND C 6 Me 927 44 GND gt gt GND rz GND E c 1 2 cie 1M GND u u u u u u u mm 100 1 1 o a 1 1 GND 047u e 10 GND gt gt 28 GND s 5290 lt gt lt gt 57 an 1 c2 c20 0 047u 1A Ls245 gt gt gt LED_G3_N kar CZ Bis LED G2 N PS 6B ea _ 2 an LED G1 N lan sa 4 _ 1 O s MS LED_GO_N P 5 eee SW_G3_N 5 3B 3 CRST_N icsi SW_G2_N O 33 5 2 7 BRST_N 1c2 20 SW_G1_N 5 aA s CREAD 2 gt lt lt E A334 SW_GO_N 2 oA BREAD_NrI 122 C 0 gt lt os lt d GND C E oR Q GND rs e GND 2 5 EC6 NIE MI lt Ol EN apr S 4 2 O GND O 7 0 275 Aes GND S oy 354 83154 GND x O GND a d 25 1 x uPD4702 uPD4702 15 CD lt 7 7 CD lt 7 gt 11 A5 SW_D7_N A32 14 CD 6 ene 63 CD 6 12 Ae 05 SW D6 N 2 9 cos CD 5 cp s5 5 CD 5 az Sw D5_N S 12 CD lt 4 Goa lt 4 CD lt 4 gt 14 SW_D4_N BREAD_N Z fn HE CD 3 CD 3 15 5 SW D3_ N 3e oc coa 7 gt 2 CD 2 ie gt Sw D2 N ces CD 1 cp i CD 1 17 SW 1 vec 5 Dp o CD O 18 12 X Sw DO N CAR
319. If this happens frequently contact a service engineer This message will be shown when the operation does not end within specified time period If the message is shown frequently contact a service engineer S 5200 Field Emission Scanning Microscope Service Manual 5400 5401 5402 5403 5406 5407 5982 6510 X axis is out of range MAX Please check sample size with Stage Control Window X axis is out of range MIN Please check sample size with Stage Control Window Y axis is out of range MAX Please check sample size with Stage Control Window Y axis is out of range MIN Please check sample size with Stage Control Window T axis is out of range MAX T axis is out of range MIN Stage presently moving Host not found HV Evacuation System 7012 7030 7100 7101 7102 7200 HV forced OFF due to one of the following items Cause Degradation of vacuum Safety protection activated Setting the specimen holder at the entrance of the specimen exchange chamber Emission current limit error Long time has past since last flash Please execute flashing or HV OFF HV turned off due to excessive time since last flash Please execute flash Long time has passed since last flash Please execute flash Abnormal temperature rise occurred in the power supply Shut down the PC and turn the DISPLAY switch off Restart the microscope after about half Part No 595 8030
320. K FUSE1 5A T 2 5 E z O s CN27 16 4V 2A 16 4V 2A 5 2 CN31 13 3V 3A_ 16 4 1 5 OYE M 19 4V 1 5A 33V 3 5A Noise filter 19 4V 1 5A 33V 3 5A gt e IM IO DISPLAY NF 1 NF2 4 5 FUSE4 3A T TRANS PC 3 3 1 1 3 8 B W AC100V VL 7K AX K m K O O K for PC P C B gt 4 4 5 NEUTRAL C Ww BOCs m FUSE3 CN42 8 3V 1A 40 2 5 PUE TB2 16 4V 0 5A m Dae u 16 4V 0 5A O lt p DCPS1 pises NES 5A T 15 A T YFG Y G LINE 5V 8 gt AA 1 4 Bi OO e m NEUTRAL POWER OV 7 2 5 5 1220 22 w SUPPLY i ENES 7 0 EWS150 5 C 5 LHC Y G ZAC 2215 00U AC OUTLET FUSE 4 QUAS 4 Y7G 9 1 5 K O 2 5 2 t W wW GROUND FG FUSES PIECE O 5 Y G 57 57 zs UL1015 1X14AWG 2 0mm CARGA 52 xz _ 041015 1X16AWG 1 3mm 54 2 UL1007 1X20AWG 0 5mm K BLACK W WHITE Y G YELLOW GREEN B BLUE B W BLUE WHITE CAD 7 Gp HEAR A 5 5200 ics J s A 4 HB gt s Ut DE A 54 A MOURI 2000 10 21 Nj j A N KANEOKA 2000 10 21 kok 7 _ oR ACB A 321 2 3 19 124 LM Kk KAGEYAMA 2000 10 721 Z TO ACPS UNIT KAIRO 12 20 from S 4700 Change
321. K106D 821 GL 9NO3D eee 54 2 B22 19 823 2 1 515 1 ES D 2 B26 zt xA UE so 850 SW33 N CN8 3 827 LEDB7 N 3t 6 i 2 B3 bs 200 LEDE3 N CNB 3 830 swi4 HE 2 IPTRSI cB Le ma VHM 1 vec so 87 SW34 N 515 SW35 N LEDAZ N fazio 4 R1 3 1 25 LEDA6 N 23 LEB S 544 R2 3 IP2 cum LEDS 3 09 PED ESSN 626 y LEDES LEDAS N 4220 83 3 a IP2RST 92205 LEDES N c27 LEDA4 N 21 ok 4 R4 3 DEGUS VHM 1 C24P LEDE7 N 655 30 LEDAS N A20 G SERS Soa R5 3 HEAT L LEDA2 N 19 86 3 AIR oor B GD1A096P100C LEDA1 N MEO BEDT S R7 3 WATER 3 2 60 LEDAO N LEDO 3 220 R8 3 TMP IP3RST Le PTL 1 s50 5 10 2 LEDD7 N 516 DED OTS e R9 3 FLOW O 5410 3 LEDD6 N 050 d 810 3 TRAP BAKE O 310 4 LEDDS N 140 M R11 3 GUN BAKE 510 4 LEDD4 N uo LED TES R12 3 ECO zs O swio 5 LEDD3 N 020 LEDI S ON R20 3 CLOCK 510 6 LEDD2 N Ere 0 3 lt AAA R13 3 ALARM 5 10 7 LEDDI N LED9 3 14 3 0 814 5 ACCEL 5 10 8 LEDDO N BEDS 53 EA R15 3 POWER 5 10 9 910 10 o 1 5 10 11 ASI O 5410 12 EM HIF4 16P C31 A32 B32 C32 Seal CAD EF107A 25 x RE 2 S 5200 ES E AB K S AB A A K KAWAMURA 1999 03 08
322. L1015 1x20AWG 0 5m UL3239G 22AWG ann A UL3239 20kv DC 20AWG 0 5 K BLACK W WHITE B BLUE B W BLUE WI TE 2 XC 55200 gt MOURI 2000 10 ION PUMP POWER SUPPLY N KANEOKA 2000 10 21 KAGEYAMA 2000 10 21 27 1 ON PUMP POWER SUPPLY 12 59 VRT 250L SERIES 247 BLOCK DIAGRAM MC68ECO20 16 MHz RS232C x4 RS232C 72214 option CLK DRIV ERR DB MC68882 MBSI LSI CONTROL LTACH 16 MHz 16 MHz SRAM lt 32KB TIMER MID REG 0 4 FECH ADDR PTM AA ADDR Adi X B lt l I IDL U V II y ls IEEXYTTZEESIESGIEZZICNSETJEHITTITIERTTLV TESTEM M BUF with PTY a f DRAM 4NbitX18 THE STE Foses I3 EPROM Z xdi Pis CETT qM Jl EEPROM MORY c L j PROTECTION i Lm IL l ques 5 5 gt pes es 227 Fd a PA PS Data BATTERY E p 17 Memory E XP fs Yo 4 8 DE N VME BUS I F 3 6 50
323. LED 2 Green During self Lamp OFF bass right DMA analysis INT Green Interruption Lamp ON LLED 3 Green During self Lamp OFF occurred when analysis interruption occurs 5 16 S 5200 Field Emission Scanning Electron Microscope Service Manual Electric Theory Normal Silk 1 Normal Silk S Status Screen Color Description Status Screen Color Description after analysis MBSY Green Memory bus Lamp ON LLED 4 Green During self Lamp OFF busy during analysis Memory bus use FAIL Red CPU halted Lamp OFF LLED 5 Green During self Lamp OFF analysis DIAG Red Lamp flashes Lamp OFF LLED 6 Green During self Lamp OFF Self analysis analysis LLED 7 Green During self Lamp OFF Lamp ON Boot analysis error Red Parity error Lamp OFF LLED 8 Green During self Lamp OFF analysis Self analysis After the reset starts analyze the I O function in the board During self analysis LLED flashes and when the analysis result is normal DIAG LED turns OFF If the analysis result is not normal DIAG LED flashes and the coded analysis result will be stored in a specific address 0000F0 in the main memory Table 5 7 No Error Code Description 1 00 No error 2 A0 MPU register check error 3 A1 EPROM sun check error 4 A3 Control register function error 5 A4 DMAC register error 6 A5 DMAC
324. LL BLK Le a 2 7 54 aloe es Pm Seq A rem BRIS eon oir 7 T O of a RAM 15 RAM 1 c9 1 C11 vec BR6 BR7 gt 17 4 Lig 17 1 cz gt 16 7 24 2 16 24 BR16 a ais x pr 15 1M TDATA 7 429 4 E 1 M OTDATA 7 TDATA 7 2 TDATA lt 7 gt 28 28 6 gt oe TM_TDATA 6 gt 6 2 7 ast 62 a 155 5 lt se sa 5 se sa ERES a9 rDATA S Aii 25 aii 4 gt lt x IM TDATA A TDATA A 22 21053 toaTAca gt aid aeria RAM D i5 cru S 1M gt lt 14 s M 1 M_TDATA 3 gt XA ty ari TDATA 3 1706 zo RAM_D 14 gt 26 1706 20 1 M 2 434 gt lt 28 MT DIT 28 2 2 7 12 gt lt 2 27 AB 1705 19 27 1 FAM Di A35 gt lt 25 M_TDATA 1 gt TDATA 1 gt E s 3 gt 4 TDATA 1 ee amp az riok as TDATA O 6 lt Joe oA M TDATA O TDATA O os s Ara as 37 e Jas 37 1702 as X AS 1 02 Li BR17
325. N 3 2 254 CN145 1 vec 470 10 DRY PUMP P amp P gt 185 10k 4 017 He 20 s r Lock 185 O 2 PROS 122 3 2 1107 3 PIP 016 035 10 144 O EvAC READY WOSM 7 D 15 4 l 255 m 11 WOSM lt 6 gt 1 11 5 34 TMP STOP 4 7k gt gt 2 WOOM lt 5 gt 0514 19 7 1 o Brig 10 WOSMCAS I 036 16 143 WOBS lt 3 gt 11 AS 4 TH EVAC READY 3 gt 08 lt 5 gt 3 ALS 152 5 la 24 31102 5 3 W09M lt 2 gt WO9M lt 2 gt 6 7 3 TMP START WOBS lt 2 gt 12 AS 2 J ELCO 12P gt 16 at a 3 p 09 lt 0 gt WOSM lt O gt 13 9 15 142 1 N125 470 10 26 w 1 35 WV WOBS lt 1 gt 8 8 77 Wee wW 3 k 558 16 WOBSCO el i 10 1 PW CN190 8 1 1 voc r 5 3 VACM COM L 875 RY5 Ke 7966 5 ELCO 4P gt h E 4 VACM LOW lt s Oat VACM HI R305 47 DIP 1T 05D NN 127 gt ey RYG t 70 WATER LINK LENS appt p Ne R89 10 e Le 9 Tory AN NV So APERTURE BT 5 10W G B 1114C US ICES ICE4 DIP 1T 05D 8302 BNC 3 3k 1 15273 ELCO 8P PTSTS rd wa 2 RY12 E 3 6 APTSTS N MH pe S HL BERE REED L 9016 ROL GE MPUD lt 13 g
326. NES ori na ma MA Rae 4 2 206 29 20 5 ss mai o 27 207 a gt Jaar 0 mao 1 39 222 26 20a Jaaa 23 Lx 25 gt ew GNP 727 3 Lows n MEUS 59 vede qe 1 Me 4 2 24 I 333v aap 2 4 a B aion a RESET_N Priam vee 5 zoe 24 Mite Ba ao a 1o harg asr lano 29 139 a2 101 ET aq Rain tte reca anes perro Bomo 101 a2 4 a fies YW Pi FLO ie vere ron pono 101 GGMHZ 1 fas gt lt 11 i Rii2 gt 2 45v lt ara CNET F333 2 7 Wena 6 MHZ 3 A gt J Es vet a YP veo v v Meo ES PEE gm enaao oaa A aS MEER is E E Is N te PD 0 DIC 283 tepa FEN 33 jj Raas EPGA CLK 3 3v CVD 1 3 lt 7 O gt s gt am VW n 27 ss 252 AJAJAJA TATANA
327. NTENANCE ueni nn deze iet Ra puce rapa 10 1 10 3 METHOD OF PERIODIC MAINTENANCE 5266 10 1 10 3 1 Electron Gun Baking cse agua ese ete tede eH de ete tte Lee ee n 10 1 10 59 22 EEST Replacement dei em nt ash seus cast e tienes 10 3 T0337 DIY Pumps Sus suma e etate a ote ee aet teet 10 11 10 3 4 lt PENNING Gauge ti teet dee e ete et EE a E 10 12 40 35 Obje ctive Movable Apertuf ait itti tee e CERE DLE RH POUR 10 13 10 3 6 Scintillator Replacement aaa entente nente nennen nennen tenens enne 10 14 104 ESTIMATED PERIODIC MAINTENANCE 10 15 10 5 MAINTENANCE PARTS EIS Dis aeo d e Du ee e 10 15 10 5 1 Standard Maintenance Parts Lists sessi eene tenen nennen etnies 10 15 10 5 2 Recommended Maintenance Parts List entente nentes tne enne 10 16 10 33 Consumables LIST s oe 10 16 10 6 OPERATION CHECK AFTER THE PERIODIC 10 17 11 TROUBEESHOOTING ZE u u ii ii EA 11 1 11 1 OVERVIEW OF TROUBLESHOOTING toti codrii Su a Qu a aQ upa ga sa 11 1 FAULT DIAGNOSTICS 2 tnt ee E EHE RE
328. O 40 AN 5 SW30 N 83 WIIH N on i 330 LEDD7 N Ke s cL J LEDD6 N TN 26 MPUAC3 gt BZ1 E LEDD5 N S NUPUS PKB24SPC 3601 LEDDA N 8 MPUACIS IC 6 LEDDS N CN8 1 IC6 10 FOR CNA 1 LEDD2 N I LEDD1 N BR3 1 MPUD lt 15 LEDDO N ACTEC 4 MPUDC15 13 12 Ey CMPUDCTA z9 2 3 enza 16 HEN MPUD lt 14 gt 8 9 7 MATS 830 LED26 N MPUDC132185405 56 0 25 ra MUDES 9 048 EUN 37 16 IS B27 PEDO SEN MPUD lt 10 gt 1394 05 ast 12 C MPUACD gt s2 va EAWISu N MeUD lt 70 gt 4 5 3 B26 LED22 N MPUDK9 gt 4051 4155 j EUR eed MPUDCS 3 2 2 8254 LED21 N MPUDCB gt 724 LED MPUD lt 8 gt 18 w i 82454 LED20 N W19H N 11 WI2H N u ct MPUD lt 15 gt MPUD lt 15 gt 3c N 777 cL i MPUD 14 51 N 135 1 MPUD 12 gt N CMBUDCTD S N MPUDCTO T ACTL 3 N MPUD lt 9 gt 1 d 1 10 gt N 17 lt 1 gt BR4 1 MPUD lt 8 gt CO N ra 1c3 WS eso 16 WICH N 820 i Zits 103 Q LED85 N WICH N 11 820 LS840 3 gt ae AMT EIS 61509 LED84 N 2 S B18 MPUD lt 15 gt MPUAC2 gt 628 1409 083 Bo D alias 17 MPUD lt 145 gt w 62 513 LED82 N E E25 D las MPUDC135 2519 S ALL 628 C12 081 pex D 5 ED PUBS ES 62 D 6 0 lt 11 gt AAA ieee 7 gt 5 825 Bo tg WISH N 1 s 330 e
329. OUTA 100u Eds PHOTO_X S i Nr m Wu a 20 5 Kae 1 gt 10v W R209 MPUD lt 4 gt 10 rrea 5 R36 PHOTO_Y S MPUD lt 5 gt 9 oss 17057 AMY MPUD lt 6 gt 8 lose 19 54 820 x MPUD lt 7 gt 7 os7 2 1000 R37 4_ vrera we 16 NG p7 WW o cs 415 XATTPOS N NG 104 vrera oa 98 MPUACO gt M i e 4 AGND 1 5 15 8 0 voo 17 C40 wx 2 5 s 850 3 6 NG 5 154 15 ICE6 R42 87 15V 15k AD7628 A C44 AN AB GND MPUD lt 0 gt DRO ut 100u MEUD 1 pat b R39 oo 15V BB lt 20 5 c A 7 MPUDCSS tes 10v4 a 17 AG AS MPUD lt 4 gt RFBA 3 57 76 R40 15k MPUD lt 5 gt 085 170877 AM 2 m 89 MPUD lt 6 gt osa nroa 19 5 RRYIN S MPUD lt 7 gt 087 1905 C45 3 15 A10 15V jud WN 009 C47 vrera we 516 WRITE N NG H 810 cs 415 5 4 104 DA PSE gt D AG AGND 1 at 15V voo 17 ops 170821 15V CAD EF131 E x 565 5200 F E al A gag BAM N KANEOKA 1999 707715 E SGVA P C B 1999 07715 gt 8 s ooTsUKA 1999 07 15 H at las 7 79 12125318398 BB aE
330. PH P A O _ b O 795 m ETERUL w uo 4 R44 y A 2 2k EM REF ters f 5082 2810 FLA 2 O 4d RN 10 FLA 3 180 d qr L lt A i FLA 4 gt L 180 4 gow wee 5 REF GND FLA 5 20 L LS FLA 6 DO T D 180 d F15V gt Ma FLA O 180 5 T r O Rae i 5 24 7 gt FLA 8 80 FL H 80 R42 i 4 7K Vus gt 05 FLA 9 0 L 1 57 ELS R38 4 115 EN 690 5 FLA 1 O AN P 15v Mp Y 028 D30 D33 D34 D35 120 20 FLA 12 O C A 4 lt A E z EM PULSE 0 0014 e e b de E gt b CAD 5136 S KR 2 T T T SQ A MOURI N KANEOKA 664 EYAMA 1998 02 25 YE 12 26 BL Egress Le LUJU C1 0 01u CN390 63P
331. PORE max uec MA1 12 ais gt 2 0 2 gt 4 ins occid MWR 101 6 Lvcniea74 ivereazas aas TES pone gt BLKO BLANKI NG az 151 iei 2 BLK am _2 25 veo ae HSO sync ae HS N 26 raz ies ivsor is iia GND maz vso N v sync N VS N aa 5 5 Maia Sinan arabe 2197 MAI 10 226 vcL k2 _ e mp sa pes 3390 Maio 1 82 2320 ios es Ei REA as aes _e mo 224 MAL 110 ma 22 oO aor aa aa eee MM mI Di v our gt i2 be ems rem Ray maiz VEO FIN zl HES 1 01 mes am VCO M BACCH iore alt b 202 5 _ t5641 229 eno E 509 1 25 Jas nor user 35 DNE I POOC702 Saf av gt lt 128 SO 4 i7 aaa Gee ori 22 1 aas ae PE
332. R33 B akyu L gt 777 as VN A e icra A V s pis T lt 75 R31 1 5 3 Sa AD I i te GND_B e gee Ras cas R28 W sv N L RR 77 i E AA 3 lt lt uM AS Vv Vv EV 226P Rei 4 R30 215v pis 4h 2 weg We ane E Siok es Rag Der xme r 200v r 7 HY us 7 VY 1708D ANN C26 0 0010 s 77 aR 2 w 0669 rerz be osa 95 p iis 35 477 5 15 7 R36 oe R37 15 vq4 re asv_ei as R57 L gt AM 4 ese Rsa cb 522 AM R38 22k Miep 15V 100K me Boe pes o 25GND ANA 1 gt gt Raz 52 1 AC 10k m R51 r4 q 352074 s S A ESPK P AAA EN io 600v s gt Wy 77 qoem oii lt R55 An 15V PHOTO_N o Der x pou coy 522 R pum 1 AE 77 Y 1 9 1 5 Ds gt w 1 neo 525 E E ANA d ESPK P N A lt o 2 TES pues D n
333. RY CARRY Borrow 18 sorrow BRST_N ug a CRST_N a EC7 BRL d xm al 1 2 4 7k t i 4 gt gt N m N m gt INV va 2 gt lt gt gt cs 1 1u 1 CAD EFO23 IER qu tum AS 2 529 al JE NEW PANEL N 1998 24 3H BB 32 o KAGEYAMA 1998 24 7 JL Z Bde AB 2 1 y 0 S OOTSUKA 1998 03 24 7 L5 KAI RO 12 68 NEW PANEL B 12v TRST_N GND TMs TDI NTA 1 NTB t NTC NT D 5v 2222 PRSNTL N vec PRESENT2_N GND GND GND GND GND RST_N 5V GND GNT_N REQ_N GND 5V AD 31 gt AD 30 gt AD 29 gt GND AD 28 gt AD 27 gt AD 26 gt AD 25 GND AD 24 c BE 1 DsEL AD 23 gt GND AD 22 AD 21 AD 20 AD 19 GND 3 3v N 3 gt AD 18 gt AD 17 gt AD 16 gt c BE GND FRAME_N RDY_N GND TRDY_N DEVSEL_N GND GND STOP_N LOCK N 3 PERR_N 5 DONE SBO_N SERR_N GND PAR c BE AD 15 gt N 1 AD 14 GND AD 13 AD 12 AD 11 AD 10 GND GND AD 9 gt VV VV C BE AD 07 3v 3v AD 6
334. Ras Ras ini C Programs Files Pc_sem Ras_EvacCondition txt C Temp socket log 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual Select File 1 Ras mdb Selection button 2C Logging File Ras EvacCondition txt 3 C socketlog Figure 8 12 File Selection Screen 2 Select the file to be loaded onto the FD and click on the Save button Only one file can be selected at a time 3 selecting option 1 in Figure 8 12 and pressing the Save button you can copy the stage and pump settings files Ras ini The reason for the provision of these files is that with these files and the Ras exe file maintenance personnel can keep track of the operating status of your system without visiting your site NOTE Hitachi recommends that you copy the Ras mdb file to a floppy disk at regular intervals such as once a week or once a month As long as the Ras function is saved on a floppy disk as a backup file in the event of loss or damage to the Ras mdb file the problem can be repaired To deal with such an eventuality you may need to use the function described in Step 11 below 4 During the execution of option 1 in Figure 8 13 i e during the copying of the Ras mdb file to a floppy disk if the disk runs out of space or the Ras mdb file cannot be fitted on one floppy disk the screen shown in Figure 8 13 appears Appoint Data Ras mdb Password
335. S 5200 Field Emission Scanning Electron Microscope Service Manual Please read through this manual carefully before using the instrument Before using the instrument read the safety instructions and precautions carefully Keep this manual in a safe place nearby so it can be referred to whenever needed Copyright Hitachi Ltd 2001 All rights reserved Printed in USA Part No 595 8030 NOTICE Information contained in this document is subject to change without notice for improvement No part of this manual may be reproduced or transmitted in any form or by any means without the express written permission of Hitachi Hitachi assumes no liability for any direct indirect or consequential damages arising from use not described in this manual This document does not provide any warranty or permission for industrial properties or any rights to grant license lawfully and without infringement S 5200 Field Emission Scanning Electron Microscope Table of Contents Service Manual Table of Contents 1 INTRODUCTION uaea e Rye e ense 1 1 14 DESCRIPTION OF THE INSTRUMENT cscesscssesssesscsscesseescnsecseseecesecsaeeasesscnaecaseascaecsaseeesaecsaeeateasenaeeatens 1 1 1 1 1 1 1 1 1 2 Features Ss RW 1 2 1 2 SPECIFICATIONS 5 aaa bat
336. Set the S C AIR LOCK VALVE switch on the evacuation panel to the CLOSE position Pull out the specimen holder to the specimen exchange chamber the pre evacuation position Set the EVAC POWER switch to the 0 OFF position NOTE The timer TMP stop time 5 minutes operates after which the power for the evacuation system shuts off NOTE If the timer heater cool off time 30 minutes operates after which the TMP stop timer sets in P 2 and IP 3 switches for the ON PUMP POWER the evacuation operation panel to the OFF position Set the Set the OBJ APT HEAT DEGAS mode is on the HEAT DEGAS lamp flashes and the MAIN breaker for the power unit to the OFF position Set the power breaker on the power distribution panel to the OFF supply Turn off the cooling water position to shut off the power S 5200 Field Emission Scanning Electron Microscope System Operation Service Manual 8 5 2 Emergency Shutdown If an emergency shutdown is needed for some reason perform the following procedures to shut the system down 1 Press the emergency shutdown switch on the evacuation operation panel or the power supply unit Power Supply Unit Column Unit Evacuation Control Panel Figure 8 31 Location of the Emergency Shutdown Switches 2 M
337. Specimen Holder Type and Sample Height Mode above conditions Please in the message are correct change the condition with the corresponding dialog Window if the above setting are different from the actual ones Caution The sample holder may touch the objective lens if an incorrect Holder Type is selected Holder Type 3503 The combination of the present Change the setting of Sample Height mode or accelerating 3506 accelerating voltage and Sample voltage Height Mode which has been 3508 selected is not allowed Change the settings so that the following relation is satisfied 3600 It is necessary to carry out the Carry out the maintenance of the scroll pump maintenance of the scroll pump used with the S 5200 within 1 month Please contact to the nearest service organization and carry out the maintenance by the following date 3601 The time has exceeded the date Shutdown the evacuation system and carry out the when the maintenance of the maintenance of the scroll pump scroll pump is required Please shutdown the evacuation system of the S 5200 and carry out the maintenance of the scroll pump Please contact to the nearest service organization for the maintenance of the scroll pump 11 22 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 3802 3810 3815 3901 4200 4201 4300 4301 4500 4501 4502 4700 Part No 595 8030 Overwrite captured image in This
338. T2 a ze Rae ors xu AM AN bw n E F Ree AC 7 ors vu NAA j 2 L 5 Q Qr RLO RLS R47 5 2 3 c d DEF 435v RL Goera cs2 y DEF asv 4 7 7 2w SIE 7 toou Te2 1 c2 4 O Pate rem R53 M R74 R16 Pa 19 gt Cr ANN ABC 0 47 AAA AAA aq 1 6A 2w W W Aa fom 12 MW 2 7 1000 ciz sw cry 1 3 NNI 222 PALO x cis x B 2880 1 20 nio Perd Lower L R5O gt gt Wy Q W W 1 6A 47 gee bee 100p Rea ANN J 2 cae ud css 1000p 100u 4 m 4 cse 4 5 2 100p RL24 Lower V Late inse 777 21 1 2 220 T RL28 gt R22 o Ba Der 35v 5 4 R24 O 5 2 FA 26P gt gt gt R25 nas L 77 mas neo lt m gt O R55 1 42 AAA b 1 L 2 nL6 Q gt Gper2 Re22 220 o RL29 4 sv gt xu a RL16e RLS As xL PS vort R28 ar vi 150 RLi RL2 RLA a7 SION eae Oot eM gt
339. TR O O 4 2 Speers 20 4 2 2 20 to rans O 3 d p3 _ O 4 5 3 4 O 0 0 AT isk 5e DAS Y 3p i OUTER BAKE OD 2 INNER d _ 27 to AC DIS 3 O O 5 5768 E 4 SER V N KANEOKA 1996 10 31 HTUP ES 12 5 c p CN 211 CN118 24v Q 24 81 ov 5 2 9 D1 AI FUSE 2 m 3 LT1085CT A3 15V IN our 3 2 i e ADs 910 10k EVAC SEQ i P 2200u R1 R2 Bs
340. The turbo molecular pump of 50 liter second is an optional accessory The turbo molecular pump stopped TMP 1 Flow of the cooling water is larger than specified rate The water lamp blinking Evacuation system will stop Evacuation system will stop Evacuation system will stop Evacuation system will stop Evacuation system will stop Evacuation system will stop Evacuation system will stop The evacuation system will be working normally The cooling water is used for cooling the objective lens Countermeasure Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Then turn it on again If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Wait for about 30 min and check the cooling water supply Then turn the EVAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Wait for about 30 min Then turn the EVAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Check if the dry pump circuit breakers are on Wait until the turbo molecular pump stops Then turn the E
341. UD 6 gt DI F22 N MP UD lt 0 Tass 74 14 5 15 DI 2 N 4 O 55 os VREFA ee gt 157 4 MPUD A An oap NORM2 N WLO N 19 upp UD lt 3 os 49 GM1_N UA 1 16 5 1 MP UD 2 gt m a2 75E DI F12_N MP UA 0 UD 1 DI F11 BCI_N 2 15v heisa Di BQ lt REBB c2 15V CN46 Opt UD 0 gt b lt NORM1_N is rN PENDET 7 po 2 ai rP16 7 0D7 NOT USE VU WERE 225 4i5v4 2705 1 oure 23 RS Obs CNOT USE N n 4 ee SE 1 s cle vs 522 WAS5_N 4005 NOT USE 2 Ly 74522 VVV J PMHV1_S 2 MP UA lt 1 gt vapor WL4 N Oe RA E vx RA O 10V OUT MP UA 0 1 W13_N 7 5 vs 12 W12 N g0p2 NU DGND ES P 15 CO Guo sopi 1 CA6 voo 15 WLO_N 1 CA1 v o 5 N s Hessa 522 MPUD lt 7 gt Pre RE hoz 415v AAN e 5 GSEL1_N I i4 6 T lt V V V _ 2 SI GSEL1_N OUT 14 MP UD 5 gt 5 os 915 S GSEL1_N gt 1j MP UD 4 oats 22 SI GSELO 51 GSELO_N OUT Wwe MP UD 3 gt lt s LPF3_N aa PMHV1_N A UD 2 36 59 LPF2_N OUT 1CBS UD lt 1 gt Em 45 LPF1 N E ey Qu AIG i mE R MP UD 0 42 LPFO
342. US II oru Alpe R7 77 777 820k P O 777 PM HV Bop E R12 18 220k R13 R17 470k R19 R24 470k 11R 2 5M va HH BRAK f 5 5200 KAGEYAMA 2 map 21 ber DETECTOR es tai dn 1mH AB 2 21 alles 2 TSM Moat FUER 41 UPPER DETECTOR HEAD P C B DIP D m p S OOTUKA 1cooo 21i KAI RO 12 76 MAI N CONSOLE EMERGENCY OFF MAIN CONSOLE ist roo EMERGENCY OFF POWER SUPPLY RACK EH ic 15 z6 x FS zs ass aspe ar Wes O_o PC RL B T mE d c NUN 1 O No _ gt E s rz x 470u scs ZR 55
343. V Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 1000 Specimen Measure mesh 2 pitch 50 8 um Scanning speed Slow3 LM Mode Select Wide X Ray Magnification accuracy lt 5 48 26 um 53 34 um Relative to Accelerating Voltage Conditions Specification Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 1000 Specimen Measure mesh 2 pitch 50 8 um Scanning speed Slow3 LM Mode Select Normal Accelerating voltage 0 5 kV 1 kV 5 kV 15 kV 30 kV 0 5 4 10 45 72 um 55 88 um 5 30 kV lt 5 48 26 um 53 34 Relative to Sample Height Mode Conditions Specification Part No 595 8030 Probe Current mode Normal mode No 5 Magnification 1000 Specimen Measure mesh 2 pitch 50 8 um Scanning speed Slow3 Accelerating voltage Sample Height mode See the table below HV Sample Height mode 0 5 kV 2 0 0 5 1kV 2 0 1 5 5 2 0 1 5 30 kV 0 5 1 5 lt 10 45 72 um 55 88 um 9 7 Adjustments Split Dual MAG Magnification Ratio Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Magnification 1300 x 1 Specimen Mesh Scanning speed Slowl Specifications x 5 Magnification ratio 5 x 5 0 25 x 10 Magnification ratio 10 x 10 0 5 Misalignment of Masks and High Magnification Images Specifications F
344. V AG 19 4VAC 16 4 V AG 13 3 VAC 11 5VAC 8 5 V AC 5V DC 2 DC PS P C B 114 V AC 1 67 5 V AC 33 V AC 31 5 V AC 26 5 V AC 19 4 V AC 16 4 V AC 13 3 V AC 11 5 V AC 8 5 V AC 110 V DC 65 V DC 35 V DC 30 V DC 25 V DC 18 V DC 15 V DC 12 V DC 8V DC 5V DC 3 DEF LENS P C B 46 V AC 1 16V AC 7 5 V AC 36 V DC 15 V DC 5V DC 4 PC HVC P C B 46 V AC 1 16V AC 7 5 V AC 36 V DC 15 V DC 5V DC Part No 595 8030 2 13 Safety No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes P C B 500 30 000 V DC HVC1 P C B 500 30 000 V DC IMP N P C B 15 V DC 5V DC 3 3 V DC n 1 28 V DC IO CTL P C B 5V DC IMAGE MEMORY 12V DC NSEM200 P C B 5 V DC 10 ECPU247 VRT 250L 5 VDC 5 11 SGVA P C B 15 12 5 10 VAC 5V DC 1 5 V DC 12 PHOTO IF P C B 15 V DC 5 10 V DC 13 PC 100 V AC 14 MONITOR 100 V AC 15 OPERATION PANEL 5V DC Table 2 6 Hazardous Voltages and Maintenance Type for Main Unit Boards No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes 1 BAKE P C B 100V DC 1 70 V DC 2 PENNING POWER 1 100 V DC 1 SUPPLY 3 800 V DC 1 200 V 100 V DC 80 V DC 50 V DC 18 V DC 15 V DC 6 8 V DC 5V DC 4 COL CNP C B 30 V DC 25 V DC 15 V DC 5 HEAD AMP P C B 600 V DC 15 V DC 6 BLKP C B 100 V DC 1 15 V DC
345. VAC POWER on If the error occurs again contact a service engineer Pull out the specimen holder to the pre pumping position and turn the EVAC POWER switch off Then replace the fuse and turn the EVAC POWER switch on again If the error occurs again contact a service engineer Turn the EVAC POWER switch off Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Turn the EVAC POWER switch off Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Check the cooling water supply The Water lamp is lit when water is supplied S 5200 Field Emission Scanning Electron Microscope Service Manual E13 E 14 18 19 20 25 31 32 33 Flow of the cooling water is smaller than specified rate The water lamp goes out Insufficient air pressure for the pneumatic valves S E C AIR switch is on when the specimen holder is in the specimen chamber S C LOCK switch on the evacuation control panel is released when the specimen holder is in the specimen chamber The specimen holder is not at the entrance of the specimen exchange chamber when process was started S C LOCK switch on the evacuation control panel is set to LOCK when the specimen chamber is in the air leak process EVAC power is on when the specimen holder is out
346. VR6 LM for SGVA board Adjusting the Deflection Top Bottom Row Ratio Adjustment Conditions Accelerating voltage 3 kV Emission 10 pA Probe Current mode Normal Magnification mode HM mode Specimen holder Spring actuated standard specimen holder Specimen Specimen stub with a micro scale Sample Height 2 0 mm Image shift Mid point the reset condition R R Off Adjusting the First Range 1 Set the magnification to 5 0 k minimum magnification first range Perform an axis adjustment 2 Click on Scan Adjustment on the EO Adjustment 2 screen 3 Click on Mag Range 1 in Scan U L Ratio on the EO Adjustment 2 screen 9 38 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Using a Slow 2 or even slower scanning speed e g Reduce 2 adjust the alignment knob X so as to minimize the peripheral blurring in the X direction at the center of the screen Upon completion of the adjustment in the X direction click on Get and Set in that order Similarly adjust the alignment knob Y so as to minimize the peripheral blurring in the Y direction at the center of the screen Upon completion of the adjustment in the Y direction click on Get and Set in that order NOTE If a magnification is changed before step 7 Get Set the adjustment condition will be cleared to the initial state before the adjustment was made Therefore the magnification should not be changed during the adjustment process This i
347. W M 6 UD lt 12 gt 77 5 UD lt 11 gt 4 MPUD lt 10 gt ULN2003 3 MPUD 9 gt 1 eos 2 MPUD B PO vec 7 ii du oC 77 777 7 7 G6AK 274P ROE N C41 9 01 O O CN131 185 am 70 OX AMP 20P HIF4 3 EXP ICW1 RE Te p 469 9 C85 T 77 MPU 8 gt 05 122 180 P W SW Os 615 mu R 55 WODH N oc 19 T 08 09 777 152074 0 470 R47 70 54v uA 10u D6 AW01 30 MPUD lt 15 gt R49 MPUD lt 14 gt S330 MPUD 15 MPUD 12 1 MPUD lt 11 gt o MPUD lt 10 gt 201 MPUDXS 9 MPUD lt 8 gt a WOEH N IP2 011 TP13 152074 0 7 7 AA R219 4 127 R29 9 AN Meu AN DG201ABK 2 2M 5221 82k 5 R220 R222180k Pets 52 D2 15V R51 he 6 560k 17458 lt MPUD 15 gt t MPUD lt 14 gt v MPUD lt 13 gt 15V MPUD lt 12 gt MPUL TO Oo 2 WOFH N PI2 77 Y ELCO 4P 7 D18 019 810 152074 20 CAD RE Z 5 5200 EVACSEQ P C B KB 2 RX N KANEOKA 1998 02 19 jag 2 Jp 7 K KAGEYAMA 1998 02 19 YAMADA 1998 02 19 12 9 MPUD lt 15 8
348. Wallpaper Eqit Pattern Browse Display 6 Genter Cancel Apply 18 Select Start Shut Down Select Close all programs and log on as a different user and click on Yes mj Compaq Information Center gt Shut Down Windows Are you sure you want to Shut down the computer Programs Ls CN Documents Edy End d Bun Shut Down Restart the computer Windows NT Workstation 19 When Begin Logon appears press the Ctrl Alt Del keys 20 Enter the user name S 5200 the password none and click on OK 21 When Internet Explorer appears click on X Part No 595 8030 11 51 Troubleshooting Welcome Microsoft Internet Explorer infer Explorer 4 0 to Internet Explorer 4 0 rt for a quick tour Tue a pA Start the Quick Tour Channels to Win Tour 22 Select Start Settings Taskbar to open Taskbar Properties Compaq Information Center gt Programs 4 Documents eee s Control Panel 31 Printers Shut Down 23 Select the Taskbar Options tab Set the checkboxes as follows and click on OK V Always on top V Auto hide Show small icons in Start menu V Show Clock 11 52 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Taskbar Prope
349. X Y Adjust the current center of the objective lens On the EO Adjustment 2 screen click on Get Set and Save in that order On the EO Adjustment 2 screen click on None to disconnect the adjustment knob Turn on the C2 lens Perform an Apert AL mechanical adjustment on the C2 lens Perform the operation by adjusting the focus and the stigmator as necessary Adjust the stigma alignment X Y Perform the normal Apert AL electromagnetic adjustment again A mechanical axis adjustment performed after a stigma alignment will cause the stigma alignment to shift Therefore any axis misalignment following the stigma alignment should be adjusted by means of an electromagnetic alignment Apply an accelerating voltage of 15 kV Click on Reset All on the Alignment screen S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 15 Perform a Beam AL electromagnetic adjustment 16 Openthe EO Adjustment 2 screen Check the 5 KV entry on the Axial Comp HM 17 Start the Apert AL mode Rotate the alignment knob X Y Adjust the current center of the objective lens 18 Onthe EO Adjustment 2 screen click on Get Set and Save in that order 19 Onthe EO Adjustment 2 screen click on None Axis Adjustment Specifications Electromagnetic alignments Beam AL Apert AL Stig AL should work properly on accelerating voltages 0 5 kV 5 kV and 30 kV Adjusting the Orthogonality Adjustment Condition
350. Z aoe EMG aa ar Jave Tdata 1257 as Tdata i 4 aie EEG Taata 1 37 nae ss Taata 1227 A Ba axa d aan iras Taata rais zen a gt favs vco our Tdata 1 o Ala ae 23 vo 2 Ph ds T ready 15 LEE 4 S Masi Tdata 1 7 0 n 21 vco ouri 9 Ser wayuta Pis oc P424 6 vp lt 5 gt i gt a Ha uv pu vo s ss qE dese cit as 7 lt ghari to TRNS pcb be 1 pe FIELD gt 538 verk 7 ay ji am 2 ons 252 265 as je ves 3 R22 a aaa nerk n VD a rass 4471420 im 5 Roa 2 a Bii LA chi VDI 1 1 4 gt irs aes 5 R95 2 i arz PIXEL ica 1 1 3 ai ias ia m ae say R92 a anes ET Eee a ne az 2 ODD EVEN_N VDI 2 1 7 0 1 37 as i2 Roo 2i 242 5 een mia 24 ras ava HS HBLK N vor2 2 lt 7 gt o TM S UBL M R101 AA 15 FIELD Ks PI x Voi 2 1 6 gt 35 saa R102 2 1 VDI2 1 5 VCLK PI X NW sss s sar eis Bese EM US aros Nw 16 O VBLK Ai Tv CLK cnl 2 32 keaz N R104 2 824 a9 jr 9 VDI2 1 3 ox ee ET O HBLK_N aa VDI 2 1 2 29 226
351. _COL i 10k Rize 178 5 m 1 vo 6 zl 10k ad 19 EXB 3 Y S REF 5V 5v EXB1H CN82 1 E 810 R93 5 T 33k 2 EXB14 1 77 BIAS EXB1 GND COL GND_COL ate 7 77 2 CND_COL GND COL 18V COL FROM SG VA CN63 EXB1L 2 wa 200 GND_COL 1 C47 PMHVI S PMHV1 REF 0 10 R94 GND COL 1u 33k DuPont Short 2 3 EXBIL EXB EXBB BIAS EXB1 A2 R95 PMHV2 S PMHV2 REF O 10V 33k EXB1_BIAS 4 BIAS 0 5 A3 R96 R97 R98 Z R99 EPMHV N PMHV1 2 OFF 4 7 4 7 4 7 4 7 5 B3 77 bi GND_LOGIC GND_COL GND_VA GND_R GND_COL AS CAD EF103C BS A zi S 5200 EE E EAB RE ERI 77 A SUN K KAGEYAMA 2000 10 21 P C B GND_VA 5 A N KANEOKA 2000 10 21 st las 7 JL Z REE AB A a 471 2 21870 A S OOTUKA 2000 10 21 2 10 2 2 12 17 90 9 o JULOLCMC 160V lu H R18 220 C1 A C2 ju CN26 U L 01u 7 T D3 D5 D7 09 011 2 30 40
352. a A KAGEYAMA 5 COTSUKA 12 50 2 9 gt LEFT lt Bf
353. a service engineer The turbo molecular pump of 50 liter second is an optional accessory E 08 The turbo molecular pump Evacuation system will stop Turn the EVAC POWER switch off Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Part No 595 8030 11 15 Troubleshooting E12 13 14 E 17 18 19 E 20 25 31 32 33 11 16 Flow of the cooling water is The evacuation system will larger than specified rate be working normally The cooling water is used for The water lamp blinkin p 9 cooling the objective lens Flow of the cooling water is The evacuation system will smaller than specified rate working normally The cooling water is used for cooling the objective lens Objective lens current will be shut off Insufficient air pressure for The Air lamp on the the pneumatic valves evacuation control panel will be off The power of the turbo molecular pumps will be shut off The water lamp goes out S E C AIR switch is on All valves are closed when the specimen holder is in the specimen chamber S C LOCK switch on the Alarm buzzer only evacuation control panel is released when the specimen holder is in the specimen chamber The specimen holder is not The evacuation system will at the entrance of the not be working normally specimen exchange chamber whe
354. acuation system running Evacuation system halted nning vacuum maintained in the system Figure 1 11 Operation of the Evacuation System in the Energy saving Mode Eco Mode 1 8 S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual Comfortable SEM Operation in GUI Environment In the S 5200 SEM operation functions are built upon Windows NT that excels in network security and is an operating system of choice for many companies For focusing and stigma adjustments the S 5200 supports knob based adjustments as in conventional systems For those of you who are familiar with the S 5000 and S 4000 SEM systems the S 5200 can be provided with an optional operator panel that has the same functionality as the conventional systems Window Display of SEM Images When looking for spots of interest on a specimen or searching for optimal values by varying the focus or image quality you may want a SEM image display that faithfully follows changes in the knob Ideally such a SEM image display should be embedded in the window and overlaid on a suitable position on the monitor Toward this end Hitachi Instruments has developed special hardware and software that provide a comfortable operating environment Data File Storage and Re reading of SEM Images SEM images written to the image memory can be stored on the hard disk of your PC as BMP also TIFF or JPEG format files As in the case of any other PC files you can retrieve
355. als such as Pt Pd or Au Pd after baking 8 4 2 Starting the DISPLAY 1 Confirm that the EO CONTROL switch is at the 1 position Set the DISPLAY switch to the 1 position in normal operations it is not necessary to set the EO CONTROL switch to the position and press the PC power supply switch to turn on the PC This step may be skipped in the case of a system in which the power for the PC is interlocked with the DISPLAY switch 2 Selecting the normal mode on the Boot Selection Screen causes a login screen to be displayed When this happens press the Ctrl Alt Delete keys simultaneously When a login name and a password have been entered Windows NT is started 3 Clicking on the S 5200 icon which is automatically launched if it is registered in the Start Menu causes a login dialog window for the S 5200 to be displayed Enter your login name and the password and click on The SEM operation screen appears 8 4 3 Filling the Liquid Nitrogen Trap For observation conditions that are susceptible to the effects of specimen contamination due to hydrocarbons such as high magnification observations and low accelerating voltage observations an optional anti contamination trap should be used If the system is equipped with an optional anti contamination trap fill the trap dewar with liquid nitrogen The trap chilled by liquid nitrogen absorbs the gas surrounding
356. as 104 10 egy i24 M 124 2 a7 RAS 104 gt EG RAS 19 SeMHZ en Ras 124 coms 2 594 RAS 2 s ss Tso 10 cus RAS Tso 10 as os tso 1 RAS so i Vas e was 2 ies vss CMS Vas ea Ate vee ves eae ves 5 ves 9 12 ES vaso 2 Veco vasa Sa veco sa a Se eae d veso n verat Mese 4 b 242 4 VES Vasa Vase 4 1 vilo vaso z as Cupid wees 722019 eter ass PA L MA3 13 gt maaa o gt lors 1 2 cria 264165 264165 nms264165 HMS26a165 lt lt 15 lt 1 lt 3 ak 15 20 MAS 2122 Ais pers s o MA3 i2 MBS Mad gt aid pars 30 gt EU pass Ea 2112 a Mascii 255 3 eis Lic 13 m 2102 on pers 52844 MA3 i0 Ai pera gt I o Arm pars MD4 28 lO ait pera ae axe 259 MD3 22125 E 27
357. as been changed Preset count has been passed Number of cell counting was over Height Mode are set to the above conditions Please change the condition with the corresponding dialog Window if the above setting are different from the actual ones Caution The sample holder may touch the objective lens if an incorrect Holder Type is selected Holder Type The combination of the present accelerating voltage and Sample Height Mode which has been selected is not allowed Change the settings so that the following relation is satisfied It is necessary to carry out the maintenance of the scroll pump used with the S 5200 within 1 month Please contact to the nearest service organization and carry out the maintenance by the following date The time has exceeded the date when the maintenance of the scroll pump is required Please shutdown the evacuation system of the S 5200 and carry out the maintenance of the scroll pump Please contact to the nearest service organization for the maintenance of the scroll pump Overwrite captured image in memory area of No Are you sure Delete Calibration No Are you sure Current Holder Type and Sample This message will be shown when applying HV Check if the current Specimen Holder Type and Sample Height Mode in the message are correct Change the setting of Sample Height mode or accelerating voltage Carry out the maintenance of the scroll pump Shutdown the evacuation syst
358. ator stops when controller protection on NO Side LED Overheat stop function red on Bottom of controller abnormally hot 90 on thermostat kicks in at Actuator motor cable shorted or coil inside motor shorted Over current stop function running Counter overflow stop function running YES Side LED LD3 203 red on Actuator overloaded Overload stop Replace actuator function running Input reset signal Verify operation If problem persists it s bad controller Power fault stop Control power 5V low function running 2 power YES Side LED LD4 204 red on YES gt Over speed halt function running See Actuator Motor runs erratically Side LED LD3 203 red on 11 14 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 4 Error Messages 11 4 1 EVAC SEQ Error Codes Table 11 3 EVAC SEQ Error Codes 01 Failure on the DC power Evacuation system will stop Pull out the specimen holder to the supply 24 V entrance of the specimen exchange chamber and turn the EVAC POWER switch off Then turn it on again If the error occurs again contact a service engineer E03 Over heating of a Evacuation system will stop Pull out the specimen holder to the transformer in the power entrance of the specimen exchange supply c
359. ave passed or 8 hr of accumulative HV on time have passed since last flashing operation Execute flashing and then turn HV on This message will be shown when temperature of high power electric circuitry exceeds specified value Turn the EO control switch off Wait for about 30 min Then turn the switch on and start operation If the message is shown frequently contact a service engineer 11 25 Troubleshooting 7201 7202 7203 7204 7777 11 26 an hour When this message is shown again contact service engineer Detection of an error in the cooling function for the objective lens If the column temperature around the objective lens is about 40 shut down the PC and turn the DISPLAY switch off Wait for more than 5 hours When the temperature of objective lens returns the room temperature turn the DISPLAY switch on and check the cooling water flow and water temperature Water flow 1 to 1 5 L min Water temperature 10 to 20 Temperature has recovered Specified Height mode not allowed Specified Accelerating voltage not allowed Host and SEM Controller are not communicating Confirm that power is on Cause amp Remedy This message will be shown when temperature of the objective lens coil exceeds specified value or cooling water flow value is not enough If the message is shown frequently contact a service engineer This message will be shown when the message code 7200 or 7201 has a
360. axis on the right of the screen Part No 595 8030 8 27 System Operation J k l i EG l l l i i hi Figure 8 21 Vacuum System Data Display Screen Display of the Emission DB and Emission socket buttons Figure 8 22 The vertical axis on the left of the screen represents emission current values The vertical axis on the right of the screen represents extracting voltage values The red marks on the horizontal axis on the screen indicate flashing Figure 8 22 Emission Current Display Screen 8 28 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual Display of the Alignment DB button Figure 8 23 The values of the vertical axis on the left of the screen are in units of digits E limn hn E 05 Papaki c ie E E Due F in Figure 8 23 Alignment Data Display Screen The Snap Form button shown in Figures 8 21 through 8 23 represents the function that reads a given screen as a bitmap file Refer to C 2 4 above The following file names apply The bitmap file from the Vacuum DB button EvacDB bmp The bitmap file from the Vacuum Save button EvacSave bmp The bitmap file from the Vacuum socket button EvacSock bmp The bitmap file from the Emission DB button EmisDB bmp The bitmap file from the Emission socket button EmisSock bmp The bitmap
361. b Specimen stub Figure 1 6 Tip of the Standard Specimen Holder The Standard Holder and the Cross sectional Holder for the S 5000 can be used with Some Restrictions Specimen holders for the S 5000 can be used on the S 5200 with the following cautionary notes The STD position on the same surface as the holder axis for the S 5000 corresponds to a Specimen Height 1 5 mm position on the S 5200 At this position eucentric tilting cannot be performed e Specimen tilt angles are subject to restrictions Depending on the type of holder used the following specimen tilt angles can be supported Standard specimen holder for the S 5000 maximum tilt angle 15 Cross sectional specimen holder for the S 5000 maximum tilt angle 10 e Because the S 5200 may require the tilting of a specimen for side take off during X ray analysis specimen holders designed for the S 5000 may not operate properly for X ray analysis purposes due to a tilt restriction e Some S 5000 specimen holders cannot be used on the S 5200 If you encounter specific problems in this regard please contact Hitachi Instruments 1 4 5 5200 Field Emission Scanning Electron Microscope Introduction Service Manual Highly Efficient Detection of Secondary Electrons based on the ExB Method that does not produce Axial Deviations The S 5200 incorporates an ExB secondary electron detector that is field proven as an Upper detector used with the S
362. by attaching a thin pipe to the tip of the vacuum cleaner Clean the tip of the pipe thoroughly using acetone or ether beforehand 3 Install a new metal gasket Before installation verify that both sides of the gasket and the surface of the flange are not contaminated 4 Install the tip in the electron gun chamber so that the tip terminal comes to the front of the electron gun chamber Figure 10 7 The electron gun is aligned parallel by supports A and B 5 Attach the INNER BAKING terminal to the anode heater terminal and check for continuity with an ohmmeter The heater resistance is about 30 at room temperature Figure 10 7 If there is no continuity lift the electron gun section again and reinstall 6 Detach supports A and B install the bolts and tighten the nuts with a torque wrench Nut tightening torque must be increased in the following sequence 10 Nm 12 Nm gt 15 Nm 18 Nm Tighten the nut diagonally as shown in Figure 10 8 Set the marked line to the front Spring Terminal Receptacle Fixed to the electron gun camber side INNER BAKE Guiding Electron gun flange heater terminal support fabout 30 ohms If a wide is detectable here the terminal 12 not placed correctly Implement the procedure over again Tip Chamber flange Marked line Electron gun flange Figure 10 7 Mounting into the Electron Gun Chamber 10 6 S 5200 Field Emission Scanning Electron Microscope Maintena
363. cations lt 5 Orthogonality Orthogonality under Adjustment Conditions HM LM Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Specimen Mesh Specifications Both HM LM x 0 5 Orthogonality under Other Conditions e High Mag Mode Conditions Accelerating voltage 1 5 30 kV Sample height 2 0 0 0 1 5 mm Specimen Mesh Specifications lt 2 Low Mag Mode Conditions Accelerating voltage 1 5 30 Sample height 0 0 mm Specimen Mesh Specifications lt 2 Part No 595 8030 9 11 Adjustments Image Rotation Correction High Mag Mode Conditions Accelerating voltage 1 5 30 Sample height 2 0 0 0 1 5 mm Specifications lt 5 based an accelerating voltage of 5 kV and a sample height of 0 0 Low Mag Mode between Accelerating Voltage and Sample Height Conditions Accelerating voltage 1 5 30 Sample height 2 0 0 0 1 5 mm LM Mode Select Normal Specifications lt 5 based on High Mag when High Mag is switched to Low Mag Low Mag Mode between LM Mode Selects Conditions Accelerating voltage 5 kV Sample height 0 0 mm LM Mode Select Normal Wide X ray Specifications lt 5 based on High Mag when High Mag is switched to Low Mag Raster Rotation Function lt 0 15 1 over scrollbar freely variable on the scrollbar track numeric value input
364. cations the following low magnification distortion adjustments should be performed Part No 595 8030 9 39 Adjustments Adjusting the Low Magnification Distortion adjusting peripheral blurring normally confirmation only NOTE This step should be performed only if the distortion limit sample specifications of Adjusting the Deflection Top Bottom Row Ratio are not satisfied Adjustment Conditions Accelerating voltage 3 kV Emission 10 pA Probe Current mode Normal Magnification mode HM mode Specimen holder Spring actuated standard specimen holder Specimen Specimen stub with micro scale mesh Sample Height 2 0 mm micro scale 0 5 mm mesh Image shift Mid point the reset condition R R Off 1 Set the micro scale to the position Sample Height 2 0 mm Perform image adjustments Click on Scan Adjustment on the EO Adjustment 2 screen Click on Scan Rot Adjust H 2 0 on the EO Adjustment 2 screen Be 229 Set the magnification to 5 0 k Under a Reduce 2 scanning condition move the scanning area to the upper part of the screen Adjust the alignment knob X Y so as to minimize the peripheral blurring in the right and left corners 5 While keeping the Reduce 2 scanning condition move the scanning area to the lower part of the screen confirm the peripheral blurring in the right and left corners and confirm that it is approximately equal to the peripheral blurring in the upper part of the screen 6 Upon complet
365. ches 6 5 kV e f V1 initial value reaches 5 5 kV or more e f V1 is 6 0 kV but the stable emission cannot be obtained 3 Dry pump 10 months or 8 000 hours The interval varies depending on the pump EDSP12 maker Penning gauge 6 months 5 Objective lens movable When astigmatism cannot be obtained with aperture o STIGM 6 Scintillator replacement 3 years 10 2 Purpose of Periodic Maintenance It is very important to perform periodic maintenance to maintain the instrument in the best condition 10 3 Method of Periodic Maintenance 10 3 1 Electron Gun Baking Perform the electron gun baking according the Figure 10 1 Part No 595 8030 10 1 Maintenance Pull out the HV cable head and remove the column cover Insert the HV cable head into the baking interlock in the display section Secure the gun heater with the heater band Connect the Inner Bake lead wire to the heater terminal Either side of the lead wire red or white can be connected Connect the Outer and Inner Bake lead wires to the Bake Fuse board located in the back of the column OUTER BAKE A SAD INNER BAKE Attach the baking safety cover Set the baking timer and start 7 After baking has stopped allow six more hours for the column to completely cool Check the vacuum Remove the safety cover and the outer and inner baking lead wires 11 Reattach the column cover
366. conds default 5 seconds after it was issued The time interval for command re issuance can be changed in the Command Send Interval combo box on the screen When vacuum data are received the system displays a new screen In other words when an operating status screen is displayed commands are automatically sent at fixed intervals and data are received and displayed until the Close button is pressed Pressing the Snap Form button causes the screen to be generated as bitmap file and saved on a floppy disk in which case you need to have a floppy disk handy If there is not enough available space on the floppy disk a Copy the bitmap file to hard disk message Figure 8 3 appears Pressing the Yes button causes the file to be saved in the directory c Program Files Pc_sem Ras with the file name EVACCond bmp Pressing the No button returns control to the screen shown in Figure 8 4 or 8 5 Copy to Hard Disk Insufficient memory space in a floppy disk Copy the bitmap file to hard disk pass C PROGRAM FILES PC_SEM Ras EVACCond bmp Cancel Figure 8 3 Bitmap File Whenever the Save button is pressed during the screen display any subsequently received vacuum data are stored in the file c Program Files Pc_sem Ras Ras_EvacCondition txt The file created in this step can be used in C 8 for trend analysis using the Display History option using the Vacuum Save button and viewed as a graph
367. consumption 4 0kVA Continuous power is required The in house wiring to the switchboard must be pipe wiring as much as possible The distance between the column unit and the wall breaker panel must be 1 5m or more Make sure to use a SW with fuse or a circuit breaker on the breaker panel e The input AC cord between the main unit and the breaker panel must be 10m long M5 crimp terminal inside diameter 5 3mm outside diameter 9 5mm is put on the tip of the input cord e An autotransformer comes with the power unit for CE S2 structure 3 1 3 Ground Terminal Connect the instrument to a ground terminal having a ground resistance of 100Q or less No 3 type ground Do not share the ground terminal with any other electric power equipment independent earth grounding is essential Part No 595 8030 3 1 Installation 3 1 4 Water Supply and Drainage Water flow rate 1 0 to 1 5 lit min Water pressure 50 to 100 kPa 0 5 to 1 kgf cm Water temperature 10 to 20 C Temperature variation 0 5 10 min Water supply faucet 3 8 tapered internal thread Drain port 1 port natural drainage use one tapered internal thread when the cooling water circulator is used e 1 15 recommended that the custom cooing water circulator be used The water faucet and drain port must be near the column unit The drain port must be located at a lower level than the column unit Use water with a chlorine residue
368. covered or insulated Type 3 Power is applied to the instrument The powered circuit is exposed and it is possible to contact accidentally The exposed voltage is 30V rms 42 2V peak and 60 VDC or 240 VA or less Type 4 Power is applied to the instrument The powered circuit is exposed and it is possible to contact accidentally The exposed voltage is 30V rms 42 2V peak and 60 VDC or 240 VA or more NOTE Boards that do not require daily maintenance are marked as in the Notes column Table 2 4 Hazardous Voltages and Maintenance Type for PS Unit boards No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes 1 PC RL P C B 100 VAC 1 70 V AC 24 V DC 200 V AC CD S2 0200 power 100 V AC supply only 70 V AC 24 V AC 2 DCPS COL P C B 70 V AC 4 24 V 17V AC 16 V AC 14 V AC 8V 24 V DC 12 V DC 5V DG 3 TRANS 0 200 230 V AG CE S2 0200 power supply only 1 4 TRANS 1 100 V 1 16 14 V AC 5 TRANS 2 100 V AC u 24 V AC 17 V AC 8 V AC 6 IP DC P C B 1 085 V AC 1 5 000 V AC 7 TRANS 1 2 3 1 085 V AC 1 100 V AC 6 5 V AC 2 12 S 5200 Field Emission Scanning Electron Microscope Safety Service Manual Table 2 5 Hazardous Voltages and Maintenance Type for Display Unit Boards No Unit Name Voltage Type 1 Type 2 Type 3 Type 4 Notes 1 AC PS P C B 114VAC 1 100 V AG 67 5 V AG 40 VAC 33 V AC 31 5 V AG 26 5
369. ct the adjustment knob Correcting for TV Distortion Adjustment Conditions Accelerating voltage 3 kV Emission 10 pA Probe Current mode Normal Magnification mode HM mode Specimen holder Spring actuated standard specimen holder Specimen Specimen stub with a micro scale Sample Height 2 0 mm Image shift Mid point the reset condition R R Off 1 Perform image adjustments at Sample Height 42 0 2 Set the magnification to 5 0 lowest magnification first range set the scanning speed to Fast TV 3 Turn off the raster rotation link set the raster rotation to 135 4 Click on TV dist Adjust RR 135 on the EO Adjustment 3 screen 5 Click on Scan U L Adjust the alignment knob X Y so that the periphery blurring on the right and left and at the top and the bottom is minimized 6 Click on Get to display the current value 7 Click on Scan Rot Part No 595 8030 9 47 Adjustments 8 Adjust the alignment knob X Y so that the periphery blurring on the right and left and at the top and the bottom is minimized 9 Click on Get to display the current value 10 Repeat steps 5 through 9 to minimize periphery blurring 11 Click on Set 12 Set the raster rotation to 0 Click on TV dist Adjust RR 0 13 Click on Scan U L Adjust the alignment knob X Y so that the periphery blurring on the right and left and at the top and the bottom is minimized 14 Click on Get Set in that order 15 Set the
370. ctional height can be increased by 1 mm by using a special cross sectional holder 0 5 10 20 25 30 Maximum Observable Accelerating Voltage kW Figure 1 5 Relationship between Specimen Height and Maximum Observable Accelerating voltage Part No 595 8030 1 3 Introduction Quick style Standard Specimen Holder without a Fastening Screw For setting a specimen stub on the specimen holder the conventional method S 5000 involves fixing a holding fixture with a fastening screw after the specimen stub is aligned At most semiconductor customer sites however the specimen height is generally constant so that the specimen stub is always fixed at the same position on the specimen holder In view of this fact the S 5200 features a quick specimen stub fixing method that does not use screws and that eliminates the specimen stub alignment step Figure 1 6 Further because the S 5200 uses a focusing range that is a 3 5 mm continuous area you need not be super accurate in setting a specimen height You still need to be careful not let the specimen stick out from the specimen holder With the S 5200 you can set the specimen stub on the specimen holder by dropping the specimen stub onto the specimen stub carrier on the specimen holder and moving a spring actuated specimen stub attachment latch Specimen stub attachment latch Spring ackuated By moving the latch to the holder grip side you the speciment stu
371. ctive lens Secondary electron detector Figure 4 4 Display Unit Block Diagram 4 4 S 5200 Field Emission Scanning Electron Microscope Hardware Service Manual 41 3 Power Supply Unit Block Diagram The Power Supply Unit Block Diagram is shown in Figure 4 5 POWER SUPPLY UNIT ION PUMP BAKING HEATER DISPLAY EVACUATION SYSTEM EVAC SEQ POWER SUPPLY SPECIMEN XY STAGE CONTROLLER POWER SUPPLY TILT CONT TMP CONTROLLER CONTROLLER 501 PENNING POWER SUPPLY AC 100V AIR COMPRESSER DRY PUMP OPTION 1 Figure 4 5 Power Supply Unit Block Diagram Part No 595 8030 4 5 Hardware 4 2 Basic Principals 4 2 1 Main Unit Basic Principals Electron Gun The field emission electron gun consists of the 1 and 2 anodes The extracting voltage is applied between the cathode and the 1 anode Electrons are emitted from the cathode Furthermore the electrons will be accelerated with an accelerating voltage The surface of the cathode must be cleaned occasionally to remove absorption gas Condenser Lens C1 C2 Lens The condenser lens is an electromagnetic lens that is used to focus the electron beam emitted from the electron gun It is mainly used to control the reduction condition of the irradiated electron beam incident on the objective lens and the beam current Objective Lens The objective lens is
372. d Meaning Applicable Parameters Meaning SEMON SEM exe started SYSTEM SEM Login name SEMOFF SEM exe ended SYSTEM SEM Login name HVN HV On 20000 100 0 1 10 4435 Se below HVF HV Off 0 FLSH Flashing 2 0 Flashing intensity The following HV On parameters apply from left to right 22 22 22 High voltage settings v emission current x0 1 current high voltage current emission current value and current extraction voltage v 5 Evacation Table In this table each record consists of 10 fields Field Data Type Meaning 1 Date Date time type Record creation date Date the record was read 2 Valve Numeric Long 3 Lock Numeric Long 4 Pe Numeric Long 5 Numeric Long 6 Pi2 Numeric Long 7 IPI Numeric Long 8 IP2 Numeric Long 9 IP3 Numeric Long 8 36 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual 10 HVStatus Numeric Long All numeric type data in this table are converted into the binary format before they are used in Ras About Valve in 2 610 Evac Power 0 1 ON bitl MV1 0 OFF 1 bit2 V1 0 1 bit3 V2 0 1 bit4 V3 0 1 ON 515 V4 0 1 About Lock in 3 DP THERMAL SWI 0 OFF 1 ON bitl DP THERMAL SW2 0 OFF 1 ON bit3 WATER SW 0 OFF 1 ON bit4 COMP SW 0 OFF 1 ON bit7 Stge Lock 0 FREE 1 LOCK
373. d at the lowest magnification rate e Switching the SE Detectors SE BSE Mix should not cause a problem BSE is optional The TMP WATER and AIR PRESS lamps should light up normally e The TMP lamp and the TMP controller should display normally The evacuation sequence should be manually operable When switched to IP 1 2 or 3 the IP vacuum meter should operate normally When the specimen exchange chamber is switched from EVAC to AIR the PE meter should operate normally When the vacuum level in the specimen chamber declines the high pressure OFF indicator should come on e Cautions on specimen exchange should be provided on the name plate e Exchange of specimens specimen holder in out operations should occur smoothly When the main valve is manually closed the compressor should not start in less than 2 hours Check the heater objective aperture Specifications Heat 12V 10 Degas 13 2V 10 The menus and icons should operate normally The magnetic field canceller should operate normally e The voltage applied to the electrodes Vsel Vse2 in the objective lens unit should be within the normal range Vsel 200 V 0 V 100 V Vse2 50 V 9 4 The maximum Ie setting in the HV Control should be at 20 uA There should be no leakage of the cooling water for the objective lens S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Focus R
374. d be in the 3 5 4 0 kV range when the system is shipped 9 3 Adjustment Procedures 9 3 1 Evacuation System Adjustment Procedures Adjusting Pi 1 Specimen Chamber 1 Bring the specimen chamber to the atmospheric pressure 2 Adjust the volume VRS so that the voltage of TP12 will be 5 1 0 1 V 3 Setthe vacuum level display to S C Pi confirm that the display shows 9 x 10 Adjusting Pi 2 1 Bring the specimen chamber to the atmospheric pressure 2 Adjust the volume VR6 so that the voltage of TP13 will be 5 1 0 1 V 3 Setthe vacuum level display to S E C Pi confirm that the display shows 9 x 10 Adjusting Pe 1 Adjust the volume to a mid point Adjusting IP1 1 Confirm that the switch for is OFF 2 Adjust the volume VR3 so that the voltage of TP7 will be 0 0 1 V 3 Adjust the volume VR1 so that the voltage of TP6 will be 0 0 1 V 4 Set the vacuum level display to IP1 confirm that the display shows x 107 5 Turn the switch for ON 6 Confirm that the LED comes on 7 Confirm that the vacuum level display shows a normal value 2 x 10 2 x 10 Pa 9 14 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Adjusting IP2 1 Confirm that the switch for IP2 is OFF 2 Adjust the volume VR201 so that the voltage of TP200 will be 0 0 1 V 3 Adjust the volume VR2 so that the voltage of TP9 will be 0 0 1
375. d copyright Version Group Serial Number Displays the Serial Number that is specified on the Option Setup screen Operation Part Displays the version information on the PC operation program Control Part Displays the version information on the VRT operation program Options list box Displays option information that is set on the Option Setup screen NOTE During normal login version information is displayed in two digits e g 1 0 for service engineer login it is displayed in three digits e g 1 0 1 7 16 S 5200 Field Emission Scanning Electron Microscope Software Service Manual Self Test The figure below shows the main screen for the self test program This screen displays settings windows for various self test modes This program is stored in the directory c Program Files PC_SEM 5 5200 Maintenance for NT Japanese Display EVA Son Check File Sum H Save File Sum Display Error Log Save File to FD Display History l Reset Work Condition Restore DB from FD Serviceman Only Save Product Inf Save SEM Inf Close Set SEM Inf TMP Dry Pump 5 tandard Standard Figure 7 17 The buttons on this screen have the following functions 1 Connect to VRT button This button connects the system to a command send receive port VRT for the loading of data necessary for the display of the system s operating status 2 Display EVAC Cond
376. e GND 2 bd 14 crus gt HEGE y 2 LPFO_N is R28 RSS NORM1I N 1 4 eT I 100 AAA 2 9 E N 100 E R2 gt 15 LPF1_N ze VM R29 z xx OFFSET S Duct cio DI F11 N 26 15 v lt gt 15 A AA 14 6 NN 44 5 VW 4 A gt 7 LPF2 N DI F12_N 9 gt 15 6 GND 11 R30 cii ak 0 4 rs HR 1 dai LPF3 ROS d 100 KAA N R35 4 VN VVV 226KHZ 10k BI yet AL 7 OUT 15V Buy gt 15v R31 v ve ay CHA R39 NAA 4 OUT 15Vv H gt 157 4 15 v lt So Sk AD534 V Bi 15 4 pi f yy co ooru h 10 ALG 53500 dB xi 152074 152074 Y2 AN Ny 3 vi R40 AG pe 1 5 7 5 4 zi gt RE TE AE USED 1 21 22 24 29 39 42 CAD SF413B Z2 x2 10 G 5 5200 His GUNJ 1 2000 1021 OPT VA P C B N KANEOKA 2000 10 22 atlas 7 JL aie AB 2 K KAGE Y AMA gt 247 3 12 73 OUT KAI RO Opt Det CN44
377. e Screen Saver settings 3D TEXT bulletin board As a rule an NG comment is output when a character is set However in NT the characters Your text goes here are deemed acceptable 1 Clicking on the Save Product Inf button causes the serial number 4 to be loaded 4 Registry value SerialNumber in the file HKEY_LOACL_MACHINE SOFTWARE S5200 OptionSetup If the system fails to get this value a message appears on the screen and the processing terminates prematurely 2 item file is created after the serial number is successfully loaded At the same time this step makes two copies the EOAdjust init file 5 one with the original name and the other with a modified name Taking a lot number and a subcode from the serial number creates the copy with a modified name For example if the serial number is HI S004 0005 the last two digits from S004 and the last two digits from 0005 are taken to form a file name 04 05 ini the from EOAdjust 5 c Program Files Pc_sem EOAdjust ini 3 The three files thus created are stored in a special folder temporarily in the directory c Program Files Pc_sem Ras The folder is also created by taking a lot number and a subcode from the serial number as described in step 2 above In the above example the folder name would be 52 04 05 the 52 from 5 5200 4 Subsequently a message appears asking the user wh
378. e aforementioned box cursor is coincident with the SEM display area Part No 595 8030 5 21 Electric Theory uj EE TEST P mjaa LB 3 SEM Manager Paint Figure 5 13 Chroma Key Adjustment Color eT izza Output H Start Diret Output V Stat Input H Simi Input Stan Figure 5 14 Imposer Adjustment Screen 5 22 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual If noise is produced over the vertical edge of the display area when the PLL division ratio is changed turn the Clock Phase Invert and IP Clock Phase Invert checkboxes on and off Confirm the waveform Fix the phase adjustment so that the fall edges of V synch and H sync and the rise edge of Clk are not very close to each other Figure 5 15 shows the phase of the H synch fall edge and that of the Clk fall edge In a the Clock Phase Invert checkbox is turned on to increase the margin Stop HH Stop u Coupling i 3 Coupling H ji amp Impedance H H i 5 i amp Impedance DC u DC GND gt siml 200mv Ch2 2 00 V i GEH 200mv cn2 2 00 v 1M 50 i 8 1 40043 49 60 DOMO 50 Invert Bandwidth Position Offset Fine Scale ui Probe 200mv _ i Setup Cou
379. e an anti freeze coolant circulator if cooling water may freeze during winter e Monitor the cooling water temperature A large difference between the cooling water temperature and the room temperature may cause dew condensation 2 6 3 Personal Computer Data Backup Data may not be able to be used due to breakdown or incorrect operation of the instrument The content of the hard disk HD must be periodically transferred to a floppy disk FD or an optical magnetic disk MO as an emergency measure This periodic transfer is called back up Computer Application Do not install any application software other than the software for this instrument in the PC This may cause not only unpredictable displays but damage the instrument or prevent the software for the instrument from operating correctly If other applications are installed and the instrument stops operating correctly Hitachi will not be responsible for the instrument Computer Virus If the program or data is scrambled suddenly or an unpredictable operation or display is shown on the monitor the PC may be infected with a virus The computer virus is a licentious program that manipulates the PC or destroys the data by sneaking into the PC The program to detect remove a virus from the PC is called a virus check program The PC can be infected with a virus when an infected exchangeable storage media such as the Part No 595 8030 2 23 Safety floppy disk is used or through netwo
380. e execute combine command and save the image to add new data in the image 2121 The number of written items Number of texts or graphics exceeds allowable number exceeds the maximum Delete some of texts or graphics to add new one More items cannot be input 2130 Number of tool buttons is out of Not all buttons are able to be placed in the toolbar range Please delete less Select buttons you will use frequently important buttons 2140 Invalid file name The file name possibly includes characters not allowed 2 lt gt 2141 File name is too long Up to 255 Use file name shorter than 255 characters including folder characters are acceptable for a name and extension file name including folder name 2142 Invalid User name The User name possibly includes characters not allowed lt gt 2143 User is too long Up to 64 Use User name shorter than 64 characters characters are acceptable 2144 Invalid Sample name The Sample name possibly includes characters not allowed Aiit SS sen 2145 Sample name is too long Upto Use Sample name shorter than 40 characters 40 characters are acceptable 2146 Invalid Keyword The Keyword possibly includes characters not allowed 2147 Keyword is too long Up to 20 Use Keyword shorter than 20 characters characters are acceptable 2149 Comment is too long Up to 80 Use Comment shorter than 80 characters characters are acceptable 2200 The new and c
381. e in focus position when the Reset button of the Column SetUp is pressed gradually tighten the specimen micro motion fixing screws four screws 9 26 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Field of vision A Tilt axis center adjustment screw ea Tilt axis driving mechanism Specimen holder Tilt axis micro motion fixing screw Z axis adjustment knob Specimen position correction screw Figure 9 11 Micro motion Adjustment Method Adjusting the TILT Board Determining the Angle NOTE Do not start the VRT during this adjustment If the VRT is started before this adjustment the board will tilt more than necessary resulting in damage to the potentiometer 1 Adjust the VR2 so that the voltage of TP7 will be 2 3 V 41 4 2 Adjust the so that the voltage of TP8 will be 2 3 V 41 4 Adjusting the 0 1 Adjust the VRS so that the voltage of TP9 will be the same as 2 Adjust the VR3 and VR4 so that the voltage of TP11 will be 5 V Checking the Operation 1 Start If tilted the axis will automatically return to 0 2 Start the SEM Open the Stage Control Panel 3 Move the angle of the axis Confirm that the voltage of TP9 conforms to the figures given in Table 9 2 Part No 595 8030 9 27 Adjustments 397 902 Qu IUe um Table 9 2 Tilt Board Adjustment Specifications No Angle TP9 Voltage V
382. e reason In order for the restoration process to work you need to create this file when the system is running normally Hitachi recommends that you press this button at least once after SEM is installed to create a backup file The actual restoration process is described in Step 14 below 1 Press the Save SEM Inf button Pressing this button causes registry information 6 to be written to a file Because it can be updated to a new file this file does not require a password or an overwrite confirmation The file created in this step will be saved under the no extension read only hidden file 7 6 Allinformation under the directory HKEY_LOCAL_MACHINE SOFTWARE S5200 7 c Program Files Pc_sem Ras SemSetng Upon completion of the file creation process a Complete message appears on the screen If the creation process fails a message appears indicating that the file has not been set up 12 Set SEM Inf button Function summary Based upon the file created in Step 11 above this button creates a registry revision file If the SemSetng file 7 does not exist this button is displayed in a cascading fashion disabled 1 Press the Set SEM Inf button A password entry screen appears see Figure 8 16 2 the password is correctly entered a c Program Files Pc sem Ras Semsetng REG file created to be erased upon termination of RAS function message appears For detail
383. e stage is moved only in the X direction by coordinate driving NOTE The stage should be adjusted near the mid point within a 0 1 mm range 2 Click on Rotation Offset on the EO Adjustment 1 screen to enter an R R adjustment value including the sign in the HM input box Adjustment accuracy within 0 5 3 Click on Set to register the adjustment data 4 Click on Save to save the adjustment data 9 46 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 5 Click on None to disconnect the adjustment knob Adjusting the LM Mode Image Rotation Adjustment Conditions Accelerating voltage 5 kV Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm R R Auto Rotation Offset LM 0 1 Perform focusing using the stage Z in the HM mode 2 Perform image adjustments using the normal LM mode selected on Mode Select in Column SetUp 3 Adjust the raster rotation so that the direction of image shift matches the horizontal line on the screen when the stage is moved only in the X direction by coordinate driving NOTE The stage should be adjusted near the mid point within a 0 1 mm range 4 Click on Rotation Offset on the EO Adjustment 1 screen to enter an adjustment value including the sign in the LM input box Adjustment accuracy within 0 5 5 Click on Set to register the adjustment data 6 Click on Save to save the adjustment data 7 Click on None to disconne
384. ed to the left a buzzer sounds when the X position indicator on the Stage Control window exceeds 3 600 and the indicator window lights in red When the trackball is moved further to the left both the position indicator and the micro motions stop in the 3 600 3 650 range Similarly when the trackball is continuously moved to the right the buzzer sounds when the position exceeds 3 600 and the indicator window lights in red when the trackball is moved further to the right both the position indicator and the micro motions stop in the 3 600 3 650 range S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual When the trackball is continuously moved upward a buzzer sounds when the Y position indicator on the Stage Control window exceeds 2 000 and the indicator window lights in red When the trackball is moved further upward both the position indicator and the micro motions stop in the 2 000 2 050 range Similarly when the trackball is continuously moved downward the buzzer sounds when the position exceeds 2 000 and the indicator window lights in red when the trackball is moved further downward both the position indicator and the stage stop in the 2 000 2 050 range 4 Confirming the micro motions and the direction of motion of the CRT screen When the trackball is turned to the right the image should move to the right When the trackball is turned upward the image s
385. een Color Description Status Screen Color Description after self analysis FPGA17 Red FPGA load error Lamp OFF OPDO Green Display option Lamp ON when loaded FPGA18 Red FPGA load error Lamp OFF PHOTO Green Photo output Lamp ON at photo output SCNON Red Scan timing Lamp ON at signal input signal input NOPD100 Silk Color Description Normal Status BDSEL Green FPGA load error Lamp OFF EXAB Green Double image retrieval display Lamp ON when displaying EPGAOP1 Red Option board memory selection Lamp ON when selecting 11 3 Stage 11 3 1 Malfunction Errors are displayed on an axis by axis basis E 2 indicates an error in the amp unit Error on the X axis X axis display unit Error on the Y axis Y axis display unit If an error occurs only on one of the two axes the axis that does not have an error displays the current value as 9 199 is lt Restoring the Origin gt When started or reset the system X Y Stage controller returns to the origin as follows 1 X and Y axes simultaneously begin to move to the origin 2 The origin is detected from one direction as shown below 3 After the move to the origin is complete the X Y Stage controller transmits its status 4 maximum moving speed is 200 kpps S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Fhoto interrupter CIN OFF 200kpps 200kpps Direction Origin Direction 11 3 2 Protection Function
386. elative to Sample Height and Accelerating Voltage Relative to Accelerating Voltage Conditions Sample Height 0 0 mm Probe Current mode Normal mode No 5 Procedures Read off Focus indicator values under accelerating voltages of 0 8 kV 5 kV and 30 kV Specification The difference between the maximum and minimum measured Focus values should be within 0 1 mm Relative to Sample Height Conditions Accelerating voltage 5 kV Probe Current mode Normal mode No 5 Procedures Read off Focus indicator values under sample heights 2 0 0 0 and 1 5 mm Specification The difference between the maximum and minimum measured Focus values should be within 0 1 mm Magnification High Mag Reference magnification Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 20 k Specimen Measure micro scale 10 pitch 2 4 um Specification Magnification accuracy lt 5 2 28 um 2 52 um Relative to Probe Current Mode Conditions Accelerating voltage 5 kV Sample Height 0 0 mm No 5 Magnification 20 k Specimen Measure microscale 10 pitch 2 4 um Scanning speed Slow3 Probe Current mode Analysis mode Specification Magnification accuracy lt 5 2 28 um 2 52 um Relative to Accelerating Voltage Conditions Sample Height 0 0 mm Probe Current mode Normal mode No 5 Magnification 20 k Part No 595 8030 9
387. em and carry out the maintenance of the scroll pump This message will be shown for confirmation when you select a capture area where image already exists or when you capture an image when image exists in the next capture area This message will be shown for confirmation when you delete a calibration data 7 25 Software 3815 A date of the maintenance for Check the date of the maintenance for the scroll pump and the scroll pump will be update to click the OK button the following date Are you sure 3901 The limit is bytes You entered too long a login name or password 4200 Option disk is invalid The option disk is not for this instrument Use the correct disk 4201 Serial number is invalid The serial number is incorrect Or the option disk is not for this instrument 4300 Failure in auto focus This message will be shown when auto focusing failed in focus detection Check if the observed specimen has fine surface structure the image brightness or contrast is adequate or the OBJ aperture is aligned correctly 4301 Failure in auto stigma This message will be shown when auto stigma failed Check if the observed specimen has fine surface structure the image brightness or contrast is adequate the OBJ aperture is aligned correctly or stigma alignment is adjusted correctly 4500 Input value or measured value is This message will be shown when ratio of correct value and not correct measured value in the calibrat
388. en Settings un a hee te e RR it 11 33 11 6 6 Installing the Network 11 35 S 5200 Field Emission Scanning Electron Microscope Table of Contents Service Manual 11 6 7 Installing the Service Pack L sua dede 11 41 FLOS Adding 11 42 11 6 9 Setting the User 11 44 11 6 10 Setting the Hyper Terminal n n u 11 55 11 6 11 Installing the 5200 Software 11 60 Part No 595 8030 v Table of Contents vi This page intentionally left blank S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual 1 Introduction 1 1 Description of the Instrument 1 1 1 Overview The scanning electron microscope SEM is used in diverse fields from research and development to quality control in manufacturing operations SEMs with advanced capabilities are essential for the observation of ultra microstructures in the fields of electronics functional materials thin films and other materials science fields as well as in biotechnology such as yeasts and pharmaceuticals With the increasing availability and advances in personal computers PC there has been increasing importance of SEM operation under a Graphical User Interface GUI environment of the digitalization
389. ence Value 1 5 x 10 Pa max IP 2 5 x 10 Pa max IP 3 5 x 10 Pa max Checking the Evacuation of the Specimen Chamber When the EVAC LOCK switch for the S C is in the LOCK position right the specimen chamber should never leak even when the AIR button is pressed Even when the EVAC LOCK switch for the S C is on the left side the specimen chamber should not leak when the AIR button is pressed momentarily Leaking should occur only after the AIR button is pressed for at least two seconds The specimen chamber should leak only when the specimen holder is pulled out when the specimen exchange chamber is in a leak enabled state The specimen chamber should not leak when the holder is in any other position e The AIR LOW and HIGH lamps should not come on simultaneously The AUTO OPEN CLOSE lamp for the S C AIR LOCK VALVE switch should come on and blink without any problems Checking the Evacuation of the Specimen Exchange Chamber Specimen Exchange Chamber Evacuation time ESDP12 For the specimen exchange chamber the EVAC lamp should light up within 15 seconds of evacuation from the atmospheric pressure Anti rotation Solenoid Stopper Operation for the Specimen Holder Miss operation Interlock insertion of the specimen holder when the specimen exchange chamber is at the atmospheric pressure should never cause the specimen holder to rotate under the AIR condition The stopper should operate i
390. ension support and table support using the supplied screws 4 ea Remove the screws 4 ea securing the display section to the monitor table Remove the monitor table from the display section remove the top cover from the display section and attach it by rotating it 180 Pull the monitor table forward as shown in Figure 3 7 and secure the display section and the monitor table using the screws 4 ea removed in step 5 Monitor 1 Display section storage section Table support Figure 3 6 Standard Display Top View Table extention support Figure 3 7 S2 Display Top View 3 13 Installation 3 4 Installation Summary 3 4 1 Installation Test Resolution Test The secondary electron image resolution must be 0 5 nm for the conditions 1 and 1 8 nm for the conditions 2 using the measurement conditions and methods described below Measurement Conditions Accelerating voltage 30 kV 1 Display magnification 600 000 x 150 000 x Specimen height 0 5 mm 1 5 mm Distance between specimen 2 5 mm 1 5 mm and pole piece bottom Condenser lens 1 5 10 5 10 Observation mode Normal Normal Objective lens movable aperture 50 um dia No 2 3 50 dia No 2 3 Specimen Platinum particles on carbon Au coated magnetic tape NOTE Only specimens approved by HID can be used Measurement Methods Without the photo CRT unit Standard configurat
391. er back on e Turning the power on while the unit is being repaired may result in electric Repair Inspection shock or being caught in the mechanism 2 2 2 Warning Labels The locations of the Warning labels are shown in Figure 2 1 and 2 2 Part No 595 8030 2 3 tc AjoJeg snl WARNING Wa COH cht ban t Ve wel toned te side Figure 2 1 Warning Label Locations on the Main Unit 0208 969 Hed 9 Hazardous Voltage f Can cause death or severe injety Turn off power before servicing 560 3385 Hazardous Voltage 308 100V Can cause death or severe injury Turn off power before servicing Hazardous Voltage 2kV 600 1907 Can cause death or severe injury off power before servicing 595 4161 Hazardous Yaltage 1007 Can cause death or severe injury Ture off power before servicing 560 3381 560 3385 560 3381 Figure 2 2 Warning Label Locations the Display and Power Supply 595 4767 560 3381 enuey uoirssiul3 4 0025 5 Ajayes Safety 2 3 Electric System 2 3 1 Breaker Main Breaker with handle key lock Capacity 6 kVA Maximum current 30A Breaker Capacity 30 kA Leakage Current Breaker SEM POWER 1
392. er failure or voltage declining below Check the power supply The breaker often turns off 90 V When switched on the pump makes a booming noise and does not start Vacuum level won t increase Vacuum leak due to a faulty vacuum Locate and repair the leaks plumbing Contamination inside the vacuum pipes Degas the pipes Pipes too narrow or long Increase the inner diameter and reduce the length as much as possible High noise Leaky pipes on the pump suction side Repair the leaks A strange noise may occur for the first 5 to 6 seconds of evacuation This is not a problem NOTE If the dry pump itself should break down the pump will be disassembled checked cleaned and repaired at a designated factory Please consult the dealer from whom your system was purchased Part No 595 8030 11 1 Troubleshooting 11 2 2 Compressor Table 11 2 shows a list of compressor self test items Symptom No increase in pressure Takes long time for pressure to rise Cause Leaks from the drain or stop valve Table 11 2 Compressor Self test Items Corrective Action If the leak continues after the drain is closed replace the compressor Faulty packing screws or seal Retighten the unit or replace the packing Faulty safety valves Replace with a new unit Clogged suction filter Clean or replace it Worn out piston ring Clean or replace it Faulty starting un
393. er to the entrance of the specimen exchange chamber Release the S C LOCK switch on the evacuation control panel until air leak is completed Insert the specimen holder to the entrance of the specimen exchange chamber Press the Baking stop switch Remove the HV cable from the electron gun and insert it to the HV cable holder at the side of the display unit And then start gun baking again Press the Baking stop switch Attach covers to the electron gun part And then start gun baking again Stop gun baking Contact a service engineer 8 47 System Operation E 34 35 36 37 38 E 51 52 97 99 8 48 lon pump 1 power supply is Baking power supply will be Stop gun baking Wait for a few hours shut off while gun baking shut off Restart ion pumps And then start gun The gun baking may cause baking again deterioration of gun vacuum and in some cases ion pump power supply will be shut off lon pump 1 vacuum When vacuum of the ion Stop gun baking Wait for a few hours degraded pump 1 degraded to lower Restart ion pumps And then start gun than the specified value baking again baking power supply will be stopped Cover around the trap heat Trap heat power supply is Press the Trap Heat stop switch Attach is not attached shut off covers to the trap heat part And then start the trap heat is an optional trap heat again accessory Gun baking was started
394. error 6 A5 DMACC interruption check error 7 A8 PTM register check error 8 A9 PTM interruption check error 9 Memory protection function error 10 AD Main memory error 11 B4 RTC register check error 12 B6 EEPROM check error 13 BB FDC register check error 14 BC SPC register check error 15 BD MBSI check error NOTE Because the memory that stores self analysis is backed up with battery if self analysis error occurs do not remove the battery and carry it without putting it in the conductive bag S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual NSEM200 NMEM200 NOPD100 Board Image Memory Board LED NSEM200 NMEM200 NOPD100 Board LED NSEM200 Normal a Color Description en p Color Description es analysis FPGA11 Red FPGA load error Lamp OFF FPGA21 Red FPGA load error Lamp OFF 12 Red FPGA load error Lamp OFF FPGA22 Red FPGA load error Lamp OFF FPGA13 Red FPGA load error Lamp OFF FPGA23 Red FPGA load error Lamp OFF FPGA14 Red FPGA load error Lamp OFF FPGA24 Red FPGA load error Lamp OFF FPGA15 Red FPGA load error Lamp OFF FPGA25 Red FPGA load error Lamp OFF FPGA16 Red FPGA load error Lamp OFF IHOST Green CPU load error Lamp ON when activated Part No 595 8030 11 5 Troubleshooting Normal Silk 2224 Normal Silk Status Scr
395. ese messages will be shown when the operation is inhibited with the present scanning mode or the present executing function Change scanning mode or wait until the present executing function ends Then do the operation again This message will be shown when input data is not correct Confirm acceptable data and then input again This message will be shown when input data is too large or too small Confirm acceptable range of data and then input again This message will be shown when you input keys other than numerals This message will be shown when input data is not correct Confirm acceptable data and then input again The name is used in the system S 5200 uses this login name Use other name Specified value is invalid Set the value so as to satisfy the following equation MeasurementPoint 1 x MultiPitch MeasurementPitch x SummingLine lt 480 Invalid login name The password you typed is incorrect Specified file is different from the condition file for S 5200 SEM Parameters will be initialized Specified file not moved because source and destination directories are the same is already Exist CD Measurement option Combination of parameters results in number of measurement lines Change parameters following the equation shown in the message Use a login name already registered S 5200 is the default login name Note that capital and small letters are distinguished f
396. essages will be shown when the operation is inhibited with the present scanning mode or the present executing function Change scanning mode or wait until the present executing function ends Then do the operation again This message will be shown when input data is not correct Confirm acceptable data and then input again This message will be shown when input data is too large or too small Confirm acceptable range of data and then input again This message will be shown when you input keys other than numerals This message will be shown when input data is not correct Confirm acceptable data and then input again The name is used in the system S 5200 uses this login name Use other name Specified value is invalid Set the value so as to satisfy the following equation MeasurementPoint 1 x MultiPitch MeasurementPitch x SummingLine lt 480 Invalid login name The password you typed is incorrect Specified file is different from the condition file for S 5200 SEM Parameters will be initialized Specified file not moved because source and destination directories are the same CD Measurement option Combination of parameters results in number of measurement lines Change parameters following the equation shown in the message Use a login name already registered S 5200 is the default login name Note that capital and small letters are distinguished for login names Confirm your input
397. estart ion pumps And then start gun carrying out baking again Baking timer is not correct Baking power supply will be Press the Baking stop switch Set the Condition INNER TIME gt shut off baking timer correctly and then start gun OUTER TIME 2 baking again Failure of the Po Contact a service engineer Failure of the Pl2 Po Contact a service engineer EVAC power is off when The evacuation system will Pull out the specimen holder to the the specimen holder is in not be off entrance of the specimen exchange the specimen chamber chamber Error of ECO mode caused ECO mode will not start Settle the problem and then start ECO by mode 1 EVAC power off 2 The specimen holder is in the specimen chamber While the baking is carrying out SEC EVAC AIR switch is set to AIR Timer setting is failed Part No 595 8030 11 17 Troubleshooting 11 4 2 Software Error Code Host 1001 to 1008 1009 to 1030 2000 2001 2002 2003 2004 2005 2007 2008 2010 2016 11 18 Table 11 4 Error Messages Cannot execute at scan speed XXXX Now running in xxxx Mode Executing xxxx ing Invalid input data Invalid data out of range Only a number is acceptable Invalid Data Cause amp Remedy These messages will be shown when the operation is inhibited with the present scanning speed Change scanning speed and then do the operation again These m
398. ete appears click on Restart the system restarts 7 When Begin Logon appears press the Ctrl Alt Del keys Part No 595 8030 11 41 Troubleshooting 8 Enter the user name Administrator the password none and click on OK 9 When known Year 2000 issues detected this system appears click OK No known Year 2000 issues detected on this system 10 Onthe Service Pack4 window click on X to close the window File Edit View Help 11 6 8 Adding a User 1 Select Start Programs Administrative Tools Common gt User Manager Open User Manager Accessories Ld Backup 25 Internet Explorer Disk 3 Event Viewer Command Prompt Performance Monitor SEM db Remote Access Admin User Manager f Administrative Tools Common windows NT Diagnostics Matrox PowerDesk NT Startup aJ Windows NT Explorer 2 Select User New User Open New User Enter the following settings Username SEM Full Name SEM service Description SEM service Password PCsem 11 42 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Confirm Password PCsem User Must Change Password at Next Logon User Cannot Change Password V Password Never Expires Account Disabled
399. ether the file is to be copied to the floppy disk Co py Inspect ion File Complete to make the inspection data file Copy the file to floppy disk i i Cancel Figure 8 28 Message asking whether the File is to be copied to the FD 8 32 S 5200 Field Emission Scanning Electron Microscope System Operation Service Manual Pressing the YES button causes the three files to be copied to the FD on a folder by folder basis If a floppy disk is not loaded on drive A a message to that effect appears in the text box of Figure 8 28 5 Whether you press the YES button to end the copying process or the Cancel button to abort it either Figure 8 29 or Figure 8 30 appears if a file named EOAdjust ini is not found or the file is set incorrectly Figure 8 29 EOAdjust ini File not Found EO Setting Error Spat Se Sate Se ae tk Sete Se oe Tk ee ae Pe ee Ph ee ee ee Figure 8 30 EOAdjust Setting Error Settings Te 20 pA Flashing Intensity 24 hours Flashing HV Total 8 hours If any of the above three parameters is set differently the screen in Figure 8 30 appears Clicking on the Close button returns control to the Main Screen Part No 595 8030 8 33 System Operation 11 Save SEM Inf button Function summary This button creates a backup file for SEM registry settings By using this file you can restore the system to normal condition in the event of damage to the registry for som
400. etic field matches the waveform of the monitor magnetic field A Trigger Source chi Ch2 Ch3 Ch4 200mv Ch2 2 00 V M1 00ms Ch2 f 2 407 E i 1012 Ref3 100m 40045 51 00 Mode Source Coupling Slope Level Type Normal Edge ch2 Dc 7 240 q Holdoff Figure 9 9 Inadequate Adjustment 9 24 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Trigger source chi ch2 Ch3 ch4 200mv Ch2 2 00 V lt 1 00 5 Ch2 2 40 more 1072 100mv 9005 ui 51 00 Mode Normal amp Holdoff Source Coupling Slope Level Ch2 DC 2 40 V Figure 9 10 Complete Adjustment 9 3 4 Micro adjustment Procedures Adjustment conditions Accelerating voltage 15 kV Sample height 0 0 mm R R ON 0 Specimen holder Rotation holder with mesh Micro motion Zero center Adjustment Adjusting the Origin of Micro motions The zero center position in terms of both X and Y is determined by detecting the position of the photocoupler Therefore this adjustment can be made by aligning the light shielding plate for the photocoupler The origin of the X axis can be adjusted by adjusting the light shielding plate Similarly the origin of the Y axis can be adjusted by adjusting the position of the photocoupler NOTE After the eucentric position is adjusted tilted axis adjustment any adju
401. flection electron image 2 kV High acceleration reflection electron image 10 kV S 5200 low acceleration reflection electron detector S 5200 low acceleration reflection electron detector Specimen DRAM cross section semi spherical capacitor insulator Magnification 200 000 0 2m Figure 1 8 Low acceleration Reflection Electron Image and High acceleration Reflection Electron Image Minimum Dose through the use of Electrostatic High speed Beam Blanking Viewing specimens sensitive to contamination such as cross sectional observations of a semiconductor often reveals the presence of contamination residues in the upper left portion or the left edge of the resulting SEM image This problem results when the beam stops for a fixed time at the starting point of scanning signals X Y due to the fact that in power supply synchronized beam scanning the timing of scanning is synchronized with the power frequency In specimens sensitive to contamination such as semiconductor cross sectional specimens a stationary beam over the specimen can result in contamination deposition which can leave contamination residues in the upper left portion or the left edge of the resulting SEM image To prevent such contamination residues the S 5200 incorporates an electrostatic high speed beam blanking unit as a standard feature The high speed beam blanking unit for the S 5200 blocks the beam when the beam becomes stationary at the starting point of scanning si
402. focus and correcting for non point aberration stigma Operating the stage Beam blanking function Recording an image Preparing the image to be recorded Setting the capture conditions Image capturing Direct save Saving a captured image Shooting a photograph Loading a specimen Applying an accelerating Adjusting the electron Observing the specimen Recording the image Notes on using the SEM Data Manager SEM Data Manager Registering an image with the SEM Data Manager Operating the SEM Data Manager Gradation conversion Image processing Saving a processed image Shutting an accelerating voltage Moving a sample to a specimen exchange position and verifying the result Display termination operation Image processing Shutdown operation Part No 595 8030 8 1 System Operation 8 2 1 Evacuation System Flowchart Standard Configuration Flowchart Starting Operation Standard Piping Cooling Water MAIN POWER OPEN SW gt ON EVAC POWER SW gt ON i SC Evacuation Control Separate page AIR COMP i ON Dry Pump NO MDP Normal YES Normal j Dry Pump ON NO Pe lt 9X10 Pa MP NORMA Pi 1 NO lt 10Pa V4 OPEN TMP ACCEL i 95 V3 OPEN 3 DyPUMPON YES EVAC V3 CLOSE V4 OPEN HOLDER FRE OLDER LOCK V3 V4 OPEN NORMAL OPERATION SW status V3 CLOSE LV1 OPEN 2305 Sw sta
403. g status table that is created and revised based on the Etc table containing SEM starting ending times HV on off times and so forth in the database file Ras mdb This button also displays graphs of the vacuum state created by the SEM function emission current values alignment information files that are created by pressing the Save button on the Display EVAC Condition screen in Step 2 above any vacuum data in the socket log file and emission data Restore DB from FD button This button either replaces the database file Ras mdb on a floppy disk with the same file on the hard disk or creates adds both files Execution of this function requires a database file on the floppy disk This function can be used if the database file is lost or damaged for some reason e g a PC breakdown In order to use this function you need to periodically back up the Ras mdb file to a floppy disk using the function described in Step 8 above Save Product Inf button This button creates a file Ras Insp txt that reflects the factory default settings for the system The file can be copied to a floppy disk Save SEM Inf button This button creates a backup file for the information contained in the registry HKEY LOCAL MACHINESSOFTWARE 5200 Set SEM Inf button This button creates a SemSetng REG file from the file created in Step 11 above Double clicking on this file causes the registry to be overwritten by the contents stored in t
404. gnals X Y which eliminates the possibility of contamination residues in the upper left portion or the left edge of an SEM image The beam blanking unit electromagnetic system for conventional systems e g S 5000 blocks the beam only when the image is frozen therefore it cannot eliminate the contamination residues that are produced at the starting point of beam scanning Completely Dry Vacuum System through the use of a Turbo Molecular Pump and a Dry Pump Scroll Pump A significant cause contributing to a reduction in throughput in the evaluation of semiconductor cross sections is contamination of the specimen The S 5200 incorporates a completely dry evacuation system based on a turbo molecular pump pumping rate 270 L s and a dry pump sales department supplied that facilitate the observation of cross sections without requiring a liquid nitrogen trap contamination trap Because a single dry pump implements the functions of two roughing vacuum pumps oil rotation pumps that are used in conventional systems the S 5200 achieves improvements in both energy and space savings Furthermore when necessary it is also possible to achieve further improvement in the level of vacuum attained in the specimen chamber by 1 6 S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual configuring an optional tandem evacuation system wherein a small turbo molecular pump pumping rate 50 L s is connected to the exhaust ou
405. grams PC SEM exe PC operation program SemImg32 dll Imposer control program WinRT sys Imposer control driver ToyLib32 dll Confirmation program such as the size of PC memory PciLib dll PCI program interface FtpServ exe PC FTP transfer program to download the VRT program or return the image Ras exe Self diagnostic program SetIPAdr exe Program to set the IP address used by the instrument Other dll ocx Programs used for simple image processing image DB and RS232C external communication Part No 595 8030 1 17 Introduction VRT Programs vxWorks SEM control program e vxWorks sym SEM control program symbol file e vxWorks mapA SEM control program map file e vxWorks mapL SEM control program map file Stage Control and Vacuum Evacuation Program e Stage control unit Vacuum evacuation ROM 1 4 Outer Appearance The S 5200 main display and power supply units are shown in Figures 1 16 1 16 and 1 17 Standard and CE S2 structures respectively Figure 1 15 S 5200 Main Unit Figure 1 16 S 5200 Display S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual Standard Structure CE S2 Structure option Figure 1 17 S 5200 Power Supply Unit Part No 595 8030 1 19 Introduction This page intentionally left blank 1 20 S 5200 Field Emission Scanning Electron Microscope Service Manual 2 Safety 2 1 General Precautions Before operating the machine read the follo
406. h mesh Sample Height 0 0 mm Electrical alignment All mid points execute Reset All on the alignment screen Image shift Mid point the reset condition R R Off Part No 595 8030 9 33 Adjustments Axis Adjustment Coarse Adjustment 1 Perform a mechanical shaft adjustment brightness control of the electron gun under C1 Off C2 Off conditions Perform this step under normal observation conditions without using the Beam AL mode Perform a mechanical shaft adjustment brightness control of the lens by setting 1 5 Perform this step under normal observation conditions without using the Beam AL mode By setting the objective lens aperture to No 1 100 um diameter perform an aperture brightness control mechanical adjustment Perform this step under normal observation conditions without using the Beam AL mode By setting C2 ON perform the mechanical axis adjustment of the C2 lens in the Apert AL mode Coarse adjustment acceptable Deflection Offset Adjustment between Magnification Ranges 1 Bysetting the LM mode normal click on Scan Offset L for EO Adjustment 2 2 Adjust the alignment knob X Y so that the image shift will be at a minimum when the magnification is switched from 180 third range to 150 second range Perform the adjustment by aligning the position of the 150 magnification image to the position of the 180 magnification image 3 Upon completion of the adjustments click on Get
407. hamber and turn the EVAC POWER the temperature sensor is switch off Wait for about 30 min and check an optional accessory the cooling water supply Then turn the EVAC POWER on If the error occurs again contact a service engineer E 04 Over heating of the dry Evacuation system will stop Pull out the specimen holder to the pump entrance of the specimen exchange the temperature sensor is chamber and turn the EVAC POWER an optional accessory switch off Wait for about 30 min Then turn the POWER on If the error occurs again contact a service engineer 05 The dry pump stopped Evacuation system will stop Pull out the specimen holder to the entrance of the specimen exchange chamber and turn the EVAC POWER switch off Check if the dry pump circuit breakers are on Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer E 06 Blown out the fuse Evacuation system will stop Pull out the specimen holder to the pre connecting to the penning pumping position and turn the EVAC gauge unit POWER switch off Then replace the fuse and turn the EVAC POWER switch on again If the error occurs again contact a service engineer E 07 The turbo molecular pump Evacuation system will stop Turn the POWER switch off Wait stopped until the turbo molecular pump stops Then TMP 2 turn the EVAC POWER on If the error occurs again contact
408. hamber should leak only when the specimen holder is pulled out when the specimen exchange chamber is in a leak enabled state The specimen chamber should not leak when the holder is in any other position The AIR LOW and HIGH lamps should not come on simultaneously The AUTO OPEN CLOSE lamp for the S C AIR LOCK VALVE switch should come on and blink without any problems Part No 595 8030 9 15 Adjustments Checking the Evacuation of the Specimen Exchange Chamber Specimen Exchange Chamber Evacuation Time ESDP12 For the specimen exchange chamber the EVAC lamp should light up within 15 seconds of vacuum evacuation from the atmospheric pressure Operation of the Anti rotation Solenoid Stopper for the Specimen Holder Mis operation Interlock The insertion of the specimen holder when the specimen exchange chamber is at the atmospheric pressure should never cause the specimen holder to rotate under the AIR condition The stopper should operate in 20 45 seconds after the specimen exchange chamber is evacuated and the EVAC lamp flashes the EVAC lamp remains continuously lit The specimen holder can move from the specimen exchange chamber to the specimen chamber only when the EVAC lamp for the specimen exchange chamber is flashing When the EVAC lamp remains lit the specimen holder should not be insertable into the specimen chamber Checking the Evacuation The EVAC AIR switch should operate normally and the
409. hat the white lines are not tinged Also confirm the same effect by increasing and decreasing the brightness of the SEM image S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual h3 Coupling Impedance DC Boe cha 2 00 V 3 Q EE 10 0 2 q IM 50 Probe Setup Coupling Invert Bandwidth Position Offset DC Off 10 0mv ade Full 3 18 div 0 000 V Figure 5 17 a Video Signal ICG12 3 Figure 5 17 b Video Switch Signal ICG12 16 ae C eee I Figure 5 17 c Video Signal Output ICG12 1 Part No 595 8030 5 25 Electric Theory Adjusting the Display Area in the Dual Full Screen Mode 1 Use the Data Manager to open a 640 480 size BMP file with a 512x480 box cursor drawn at the center Transfer this file back to the image memory Perform a Dual display position alignment on the adjustment window so that the size of the box cursor matches the frame for the SEM display area As in the case of the standard adjustment if a noise is produced over the vertical edge of the display area turn the Clock Phase Invert checkbox on the adjustment window on and off Confirm the waveform Fix the phase adjustment so that the fall edges of V sync and H sync and the rise edge of Clk are not close to each other as in the case of the standard screen Confirmation operation 1 If Dual B in IMP H Start is small a horizontal noise stripe is generated when
410. he file Sets the system and TMP This button is used in Steps 2 and 10 above Sets the system and the Dry Pump This button is used in Step 10 above Text box Displays the processing status and fault indicating messages Close button This button closes the Ras function 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual C Functions of the Buttons 1 Connect to VRT button Function summary In order to load the data necessary for the display of operating conditions described in C 2 below this button connects the port VRT through which commands are sent and received Click on the Main Screen Connect to VRT button When successfully connected the Main Screen Connect to VRT button is displayed in a cascading fashion faint color with the button disabled and remains disabled until the Ras function is closed Figure 8 2 The port remains connected until the Close button on the main screen is pressed and the Ras function is closed 5 5200 Maintenance for NTJapanese Display EVAC Condition Connect to VA Check File Sum H Save File Sum Display Error Log Save File to FD Display History Reset Work Condition Restore DB from FD Serviceman Only Save Product Inf Save SEM Inf Close Set SEM Inf Dry Pump Tanden m VRT Connect OK H Figure 8 2 Successful connection to the VRT If a connection fails c
411. he process to be executed Delete unnecessary files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified Please input file name Input a file name and then click the Save Button Please input user name Input or select a user name and then click the Save button Auto increment counter has reached 99 Please use another file name Please input comment File name is duplicated Quick saving allows up to 99 files for a name Use another file name CD Measurement option Calibration Input a comment before clicking the Apply button This message will be shown when you have specified a file name already used Use other name 11 19 Troubleshooting 2109 File name is too long Up to 255 characters are acceptable for a file name including drive name folder name and extension 2110 User table is not empty Delete To delete a user name image lists in the user table shall be all lists or images by using empty Use Batch Process Remove List command removes Remove List Command or database list only or Delete Image command deletes Delete Image Command before images deleting User table 2120 A number of written items Number of texts or graphics exceeds allowable number exceed the maximum Carry out Delete some of texts or graphics to add new one Combine Or onc
412. height 0 5 mm Probe Current mode Normal mode Magnification 600 k Specimen Platinum sputtering particles on carbon Image recording Polaroid film Capture image 1280 x 960 Specifications Resolution 0 5 nm limited sample Guaranteed Resolution 1 kV Conditions Accelerating voltage 1 kV Objective movable aperture No 2 or 3 50 diameter Sample height 1 5 mm Probe current mode Normal mode Magnification 150 k Specimen Gold particles on carbon Image recording Polaroid film Capture image 1280 x 960 Specifications Resolution 1 8 nm resolution limited sample Image Drift Measurement Conditions Accelerating voltage 5 kV Sample height 0 0 mm Probe Current mode Normal mode Procedures Take measurements 1 5 hours after the display and the HV are turned on Specifications Drift 30 nm 10 minutes max Part No 595 8030 9 13 Adjustments Tip Emission Stability Measurement Conditions Accelerating voltage 30 kV Sample height 0 5 mm Probe current mode Normal mode Magnification 600 k Specimen Platinum sputtering particles on carbon Procedures Record images on Capture 1280 x 960 1 hour and 2 hours after flashing Specifications See the limited sample Tip Rounding Procedures Apply an accelerating voltage of 15 kV emission current 10 uA after flashing re set the emission current value 2 hours later Specifications Extracting voltage lt 5 3 kV The default flashing value shoul
413. hen the Mid of Y is clicked 12 Reset the Apert AL mode Set Y to Mid 13 Click on Save to save the adjustment data 14 Click on None to disconnect the adjustment knob Adjusting the Maximum Image Shift Value Adjustment Conditions Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm Focus 0 0 perform focusing using the Z knob by pressing Reset in Column SetUp R R Off 1 By adjusting the stage Z align the image to the focus position Sample Height 0 mm 2 Click on Image Shift X Max on the EO Adjustment screen Using the adjustment length measurement cursor measure the amount of image shift that is caused when Min is clicked from Image Shift X Max 4 Enter the image shift quantity um in the Image Shift Full Width X 5 Perform similar adjustments on the image shift Y 6 Click on Set to register the data 7 Click on Save to save the data 8 Click on None to disconnect the adjustment knob NOTE The Sample Height should be set accurately using the focus reference If the focus setting deviates from Sample Height 0 0 mm the accuracy of RISM due to an image shift will be reduced Adjusting the HM Mode Image Rotation Adjustment Conditions Accelerating voltage 5 kV Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm R R Auto Rotation Offset HM 0 1 Adjust the raster rotation so that the direction of image shift matches the horizontal line on the screen when th
414. hould move upward 5 When values 40 and 40 are entered in the Tilt input box of the Stage Control window and the specimen is tilted the Tilt indicator should be within the ranges of 40 0 0 3 and 40 0 0 3 T gt Tiltdirection T gt Tilt direction V Specimen Micro motion Test This test is performed by pressing the Reset button with Vacc 15 kV Sample Height 0 0 mm Micro motion Shift Read off the limit display value on the Stage Control window Attach an angle indicator plate to the stage compare it with the value displayed on the window and confirm that the extent of Tilt error is within 1 Specifications 3 600 3 650 mm 2 000 2 050 mm 40 0 3 Amount of Micro motion Flow Check the amount of micro motion flow using the following method and parameters Magnification 50 000 Probe Current mode normal C1 5 both X and Y within 1 mm 1 Fix aspecimen target on the SEM screen Move the trackballs X and independently to move the target approximately 1 um and then stop it 2 Set the scanning speed to Slow 3 20 seconds Using the length measurement cursor measure the amount of shift produced by one minute of motion The amount of shift should be no more than 0 2 um NOTE Do not freeze the image during the measurement 3 Hysteresis reproducibility of parallel movement When the magnification is 50 000 the hysteresis should be no more than 0 2 um Figure
415. hquake Protection Diagram for the Power Supply Unit 2 22 S 5200 Field Emission Scanning Electron Microscope Safety Service Manual 2 6 Miscellaneous 2 6 1 Leakage Detection This instrument does not come with a water leakage detector Leakage may occur due to a crack or corrosion in the flow route caused by the quality or pressure change of the cooling water If a cooling water circulator cannot be used obtain and install a water supply kit The water supply kit comes with a decompression regulator and a leakage censor to prevent massive water leaks in emergency situations 2 6 2 Cooling Water e Use water with a chlorine residue of 0 5 ppm max If the chlorine residue is higher use a cooling water circulator High chlorine residue can cause water leakage due to corrosion in the flow route The water flow rate must be 1 to 1 5 lit min 1 system The temperature must be 10 C to 20 C Temperature variation must be 0 5 C max for 10 minutes cooling water supply port must be tightly connected to the hose using a pipe taper screw to avoid detaching The drain hose must be connected and firmly attached to drain Detaching the hose from the drain may cause flooding Make sure to close the cooling water supply faucet after use e Flexible PVC is used for the drain hose The hose must be replaced periodically and checked for leaks before use because the hose can become hard or cracked after prolonged use Us
416. ice Manual ci Compaq Information Center gt Programs W Documents Control Panel ss Printers w Taskbar cn Settings S Windows NT Workstation 3 Select the Taskbar Options tab Set the checkboxes as shown below and click OK N Always on top N Auto hide Show small icons in Start menu N Show Clock Taskbar Properties Taskbar Options Start Menu Programs Sound R 4 Show small icons Start menu Show Clock 4 Control Panel double click on the System icon Part No 595 8030 11 45 Troubleshooting System 5 System Properties select the Performance tab On Virtual Memory click on Change System Properties wa 6 On Virtual Memory set both Initial Size Maximum Size to 200MB Click on Set 11 46 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Virtual Memory DRIVE 7 Virtual Memory click on OK 8 System Properties select the Startup Shutdown tab Set Show list for for the boot system to 0 seconds Part No 595 8030 11 47 Troubleshooting System Properties Windows NT Workstation Version 4 00 d m SystemPiooAMEMORY DMP evicting mj 9 On System Properties click on OK 10 When You must restart your computer appears cl
417. ick on Yes The system restarts System Settings Change Q 11 When Begin Logon appears press the Ctrl Alt Del keys 12 Enter the user name SEM and the password PCsem Click on OK 13 When Internet Explorer appears click on X 11 48 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Welcome Microsoft Internet Explorer Microsoft ernet Explorer 4 0 Welcome to Internet Explorer 4 0 Start for a quick tour T a p A c Start the Quick Tour Channels to Win Tour 14 Select Start Setting Taskbar to open the Taskbar Properties window Documents Programs 72 8 Control Panel Printers Settings Shut Down Windows Workstation 15 Select the Taskbar Options tab Set the checkboxes as follows and click on OK N Always on top N Auto hide Show small icons in Start menu N Show Clock Part No 595 8030 11 49 Troubleshooting Taskbar Properties Windows q T lt q 16 Move the mouse cursor to the background Right click the mouse Select Properties from the menu 17 On Display Properties select the Background tab and set Pattern Wallpaper to None 11 50 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Display Properties Background Screen Saver Appearance Plus Settings Pattern
418. ie D 3 gt ij wo i cie SW G1 N Sw D2 N A10 1394 5 D 2 gt 33 n REC 5 ras gt Pa sw Sw N 12 1 aa e oa D 0 gt 2 0 SWSEL N H9 hio e or ec af a SWRED rica NA r ra yp LED Gs a 2025 roe 2 2 D gt WO i ara LED G2 WO O 02 DS xa le 24 Aia Yor LED Gi LeSEL N 9 coo pO tacsa e E 1 E are LED_Go Lewer P gt E ics cr2 o o7 ima LED_D7 N ad wo 6 oe oe a lee LED D6 N wo s o o Tae se LED D5 N ij wo a mee qa Eram ae LED Da N s les Sf ae LED D3 N 7 Wo 2 de LED D2 N uu E 32 LED D1 N pe eo 33 LED LPDAT N ai RESETO a GND tac2 GND vee GND 7 vec xz Ba GND A BR2 4 7K GND Be GND ag 7 57 GND 4 55555555 GND gt gt gt gt gt gt 5 GND 5245 io GND TORUSSE eco A A25 5e m 1231 mix GND ecoles lt uas i7 e adus ECOB P 1 iz GND Focus Fr A 28 xe a wa EC1A P 1ca GND is 5 ECI
419. ielum Code Mean SEM Manager SR Tak da TET PT GOD 10 Ss 2008 SEM a SEM Manapa E POO 204237 2004 SEM Manaper 7102 oo Te Pe CLE du ELIE ER w VES 1 Lil VT I TTE 102 92007 TAF PIU EET ono ALET JEUDI CVO 022754 22754 5004 SEM hanana Oo D7 I3 32543 2802 tel Fle 1 OVON 12 A3 AARTE TIMERE E 3003 SSF T UC OT 12 Sele 3003 corel Figure 8 11 Error Table Display Screen For the meanings of the codes the system references the file c Program Files Pc_sem RasCodeJ mdb in the case of a Japanese operating system in other cases English it references file c Program Files Pc_sem RasCodeE mdb These files created in the respective operating systems are provided because an English OS cannot read a file created under a Japanese language OS Checking the Error checkbox causes the display of errors only Save Log to FD button Function summary This button copies database files and debug files to a floppy disk 8 20 1 Pressing the Main Screen Save Log to FD button displays the screen shown in Figure 8 12 The required files 3 are searched for and any non existing file names are displayed in a faint color with the button disabled 3 C Program Files Pc_sem Ras mdb C Program Files Pc_sem
420. ile SUM screen Figure 8 6 SUM Check Table Version not find the Yersion File C WINDOWS Setup132 exe 4 C WINDOWS SYSTEM stk it432 dll O0xFFD24BE5 C WINDOWS S YS B40032 DLL 0xFFB00871 C WINDOWS S YS TEM ven2232 0lb 0 94917 C WINDOWS SYSTEM olepro32 dll 0441 C WINDOWS SYSTEM msvert20 dll BE C WINDOWS SYSTEM msvert40 dll 0 4 324 C WINDOWS S YSTEM JP32 DLL C WINDOWS Setup132 exe 6 1 C WINDOWS SYSTEM olepro32 dll 0441 C WINDOWS S YS TEM Sem lmage32 Dil 21 CAXWINDOWSXSYSTEMXWinSub DII DxFF2D4903 TF MX Pai Shara dll n nano 1 Create date fl 999 06 04 16 26 23 Figure 8 8 SUM Check Table Screen 5 Clicking on the Save to FD button causes the SUM table file to be copied to a floppy disk The floppy disk should be saved as a backup for the table file 6 Clicking on the Close button returns control to the Main Screen 4 Check File Sum button Function summary This button displays on the screen a comparison of the current file status SUM value and the SUM table file 2 created in Step 3 above 1 Click on the Main Screen Check File Sum button If a SUM file is not found a message to that effect appears in the text box on the Main Screen and the processing is termina
421. ile not initialize X axis Cannot execute while not initialize Y axis Cannot execute while not initialize T axis Stage over run error X CCW Stage over run error X CW Stage over run error Y CW Specimen exchange position error X Allowable value 10 um Specimen exchange position error Y Allowable value 10 um 1 Specimen exchange position error T Allowable value 0 1 deg Time out error X axis Time out error Y axis Time out error T axis Cause amp Remedy The axis position is at the limit You can drive the stage towards reverse direction The axis position is at the limit You can drive the stage towards reverse direction If it happens frequently contact a service engineer Possibly the initialization is in progress Wait for a few minutes If the message is shown even when about 10 minutes have passed shut the stage power off once and then turn it on This message will be shown when operation on the GUI and by the track ball are generated simultaneously This message will be shown when operation on the GUI and by the operation panel are generated simultaneously Initialization of the axis is in progress Wait until initialization ends These messages will be shown when the axis is driven over its limit It will be recovered automatically This message will be shown when the stage can not be set at the home position correctly Restart the stage power switch
422. in YES YES YES Bad controller Bad controller Y axis origin sensor signal input NO NO Y axis origin sensor securely connected Correctly plug in origin sensor connector CN6504 YES YES Y axis origin sensor cable broken Repair and replace cable Y axis origin sensor cable securely connected NO e f actuator is touching machine LD3 amp LD203 overload stopping come on YES Bad controller 11 12 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Actuator motor stops at origin but indicator does not show 0 000 On return to origin actuator stops at origin but indicator does not show 0 000 and motor remains in shift mode Control power 5V Voltage for switching power input as felerence Reference voltage 4 67V 0 01V value when loaded Voltage for switching power Control power Reference voltage 14 91V 0 04V 15V input as 14 72V 0 04V reference value when loaded Readjust controller offset voltage Controller resets itself Controller resets itself when running or stopped Control power 5V NO input as reference value Adjust switching power voltage e Reference voltage 4 67V 0 01 NOTE Below 4 65V the IC function when loaded resets controller Bad controller Part No 595 8030 11 13 Troubleshooting Actuator motor stops Actu
423. input section Table Name Table data Setting Alignment Table name 1 He Emission 3000 rs 2000 Default value Number of data each Etc 3000 table possess current Evacation 1000 WorkCondition Ras mdb file size Atleast 754K Byte free area is necessary for copy Figure 8 13 Copying to FD Failed Part No 595 8030 8 21 System Operation 8 22 To do nothing press the OK button In this case control returns to Figure 8 13 For each table the number of data points to be loaded is given as a default value as shown in the figure the Setting column For example if the Alignment table contains 20 000 data points the FD copying process loads 1 000 new data points with a date equal to the current date In the case of Figure 8 13 the copying process requires an available space of 754 kbytes on the floppy disk which a blank disk can accommodate Alternatively you can reduce the file size provided that you enter the password In the password column shown in the figure type sar which causes a data count change column to appear on the screen Figure 8 14 Ras mdb Table Name Table data Setting Change 1000 500 Alignment Emission 3000 2500 Error 2000 3000 Etc 3000 J 1000 Evacation 1000 500 WorkCondition 500 33 Figure 8 14 Data Count Change Screen On this screen you can specify any number of data points As shown in the Error table exa
424. ion Compare the image with a standard supplied image on the viewing monitor and verify that they are identical Image acquisition conditions Pixel 640 x 480 Acquisition time 80 sec e With the photo CRT unit Optional configuration Record a resolution image in direct photo mode exposure time 80 sec and check the gap between the particles on the photograph The gaps must be 0 30 mm for the conditions 1 and 0 27 mm for the conditions 2 Magnification Test Check that the magnification is within 10 of the display magnification using the measurement conditions and methods below Measurement Conditions Accelerating voltage 5 0kV Display magnification 2 000 x Specimen height 0 0 mm Condenser lens 1 5 Observation mode Normal Specimen 3 14 1 000 grids 25 4 um pitch 5 5200 Installation Service Manual Measurement Methods Without the photo CRT and CD measurement units Standard configuration Measure the grid width with the coarse measurement cursor measurement resolution 0 5 um The difference between the measured vale and the actual value must be within 10 With the photo CRT unit Optional configuration Measure the grid width on the photograph The difference between the display magnification and the photographing magnification must be within 10 With CD measurement unit optional configuration Measure the grid width with the measurement cursor measurement resolution
425. ion of the adjustment click on Get and Set in that order and then click on None 7 Align the mesh to the Sample Height 0 5 mm position Perform image adjustments 8 Click on Scan Adjustment on the EO Adjustment 2 screen 9 Click on Scan Rot Adjust H 0 5 on the EO Adjustment 2 screen 10 Set the magnification to 1 5 Perform the same adjustments as Sample Height 42 0 mm 11 Upon completion of the adjustment click on Get and Ser in that order and then click on None 12 Upon completion of the San Rot Adjust adjustments click on Save to save the adjustment data Checking the Focus Comp Condition Adjustment Conditions Accelerating voltage See below Emission 10 pA Probe Current mode Normal Magnification mode HM mode Specimen holder Spring actuated standard specimen holder Specimen Dedicated specimen stub H 0 0 1 0 mm integrated specimen Sample Height 0 0 mm Image shift Mid point the reset condition R R Off 9 40 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Perform image adjustments with an accelerating voltage of 5 kV and Sample Height 0 0 Adjust the Z knob for the stage so that the image is in focus with the Reset button of the Column SetUp screen pressed the Focus display value 0 0 NOTE After performing the adjustments in Step 1 do not move the Z knob until this confirmation is completed Perform image adjustments at an accelerating voltage of 0
426. ion operation is out of range 4501 Magnification is out of step Magnification is set in stepwise by magnification operation range Please adjust and also changed finely by focusing operation Calibration magnification of measured data is possible only when the step set magnification value When this message is shown once make magnification operation using mouse on the magnification area or using the knob on the operation panel option And then continue measurement operation 4502 Please execute calibration This message will be shown when you click the Apply button before the Calibration Factors are calculated 4700 Communication time out error This message will be shown when the control of the between SEM and STAGE motorized stage failed Try once to restart the display unit Please check the wiring for RS and the stage controller 232C and re start the system 7 26 S 5200 Field Emission Scanning Electron Microscope Service Manual Stage Error Code 5000 5001 5002 5003 5006 5007 5020 5021 5023 5025 5026 5040 5041 5043 5075 5080 5085 5090 5101 5102 5103 5104 5200 5201 5203 Sec exchange position error Allowable value 0 1 deg 5366 Time out error Y axis 5368 Part No 595 8030 Message X axis parameter error Max X axis parameter error Min Y axis parameter error Max Y axis parameter error Min T axis parameter error Max T axis parameter error Min Cann
427. ion tool to the electron gun as shown Figure 10 9 2 Attach the HV cable 3 Set the IP vacuum meter to display the 2 vacuum 4 not OPEN select bombard to turn HV ON Set to 20 kV select bombard in the EO Adjustment 1 window and HV to ON When the 1 is 5 Verify that there is no discharge or HV leakage using the IP 2 vacuum meter Increase to 25 kV and then 30 kV in ten minutes intervals 6 Set VO to 30 kV and verify that there is no discharge by moving the electron gun X and Y axis Check it at least one hour cable Discharge protection jig Electron gun axis adjustment knob Electron qun NOTE Make sure that the discharge protection tool and the interior of the electron gun insulator are free from dust Figure 10 9 Breakdown Voltage Test 10 8 S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual Tip Rounding Operation 1 Walt until the flashing interval at degassing is between 30 seconds and 1 minute or IP 1 vacuum recovers 2 Set the flashing strength to 1 and perform flashing Set the flashing strength to 1 and verify that the meter range is 0 to 10 If not adjust it 3 Repeat the flashing operation several times until there is no more out gas from the Tip It is OK if the deteriorated vacuum of IP 1 is 1 x 10 Pa or less at flashing 4 Set the flashing strength to 2 and repeat the flashing operation several times until there is
428. isplay unit Error on the Y axis Y axis display unit If an error occurs only on one of the two axes the axis that does not have an error displays the current value as 229 is Restoring the Origin When started or reset the system X Y Stage controller returns to the origin as follows 1 X and Y axes simultaneously begin to move to the origin 2 The origin is detected from one direction as illustrated in Figure 5 26 3 After the move to the origin is complete the X Y Stage controller transmits its status 4 The maximum moving speed is 200 kpps 5 32 S 5200 Field Emission Scanning Electron Microscope Service Manual Photo interrupter 200kpps Direction Protection Function Amplifier Error Detection Function Detected Parameter Power outage Drop in supply voltage Approx say Approx Electric Theory ON OFF 20 im 200kpps Stop 20 Jim Origin Direction Figure 5 26 Table 5 14 Detected Problem Post detection Action e Power input less than 14 V Servo off e Indicator lamp LD 4204 is lit indictor panel E 2 is lit Over speed Excessive output voltage armature voltage Motor fault and motor connection error wire bad polarity poor conduction Encoder connection error line breakage A B phases connected in reverse poor conduction Encoder not connected NOTE For an XY stage controller the maximum output voltage is DC
429. ition button This button graphically displays the operating status of the system on the screen When the system is started this button is cascaded faint color disabled To use this button Step 1 above should be performed 3 Save File Sum button Determines the SUM value of the file necessary for SEM functions and creates and displays the file SUM table file To re do the file creation process you need to enter the password 4 Check File Sum button Displays on the screen a comparison of the current file status SUM value and the SUM value from Step 3 5 Display Error Log button Errors and output messages that are generated during the start up of the SEM are recorded in a database file Ras mdb This screen displays the contents and meanings of such messages Part No 595 8030 7 17 Software 6 Save Log to FD button Selects and copies the following three files to a floppy disk the database file Ras mdb created by the SEM function the file Ras EvacCondition txt that is created when the Save button on the Display EVAC Condition screen is pressed and the debugger file socket log created by the SEM exe file 7 Reset WorkCondition button This button resets the table WorkCondition a table of chips used in the SEM and cumulative hours for oil battery and other items that need to be replaced in the database file Ras mdb Pressing this button causes the cumulative data to be zer
430. k Diagram The ECPU247 Block Diagram is shown in Figure 5 8 5 5 2 Image Memory Block Diagram The Image Memory Block Diagram is shown in Figure 5 9 Part No 595 8030 Electric Theory 5 13 6 fl Em E Gabe saray Figure 5 8 ECPU247 Block Diagram Asoay 0508 9668 ON Hed 91 9 EE board NSEMIOO 4v F am BUS Tao face If T TO CRT THY 82 Analog 23 19 r NTSC PAL ent ey rief Amaley 1 1 424 2568 2 88 296 coler rem vun U BUS 9 Pc posee ni Cod o A ch in Analog Tepat __ u gt Tin An Lu Lek Up Toble i holy Em i NES Ope j H Wi ia SS 2 he TE T begt date processing option Figure 5 9 Image Memory Block Diagram enuey adoosouolp uo429 3 uoissiu3 4 0029 5 Asoay J 231129 3 Electric Theory 5 5 3 ECPU247 Board CPU Board LED Figure 5 10 ECPU247 Board LED Table 5 6 Normal Silk ar Normal Silk Status Sc ee Color Description Status Sereen Color Description after self analysis RUN Green CPU running Lamp ON LLED 1 Green During self Lamp OFF analysis DMA Green I O got DMA Lamp ON at L
431. lder at the side of the display unit And then start gun baking again Press the Baking stop switch Attach covers to the electron gun part And then start gun baking again Stop gun baking Contact a service engineer 5 59 Electric Theory E 34 35 36 37 38 E 51 52 97 99 5 60 lon pump 1 power supply is Baking power supply will be Stop gun baking Wait for a few hours shut off while gun baking shut off Restart ion pumps And then start gun The gun baking may cause baking again deterioration of gun vacuum and in some cases ion pump power supply will be shut off lon pump 1 vacuum When vacuum of the ion Stop gun baking Wait for a few hours degraded pump 1 degraded to lower Restart ion pumps And then start gun than the specified value baking again baking power supply will be stopped Cover around the trap heat Trap heat power supply is Press the Trap Heat stop switch Attach is not attached shut off covers to the trap heat part And then start the trap heat is an optional trap heat again accessory Gun baking was started Baking power supply will be Stop gun baking Wait for a few hours while the ECO mode is shut off Restart ion pumps And then start gun carrying out baking again Baking timer is not correct Baking power supply will be Press the Baking stop switch Set the Condition INNER TIME gt shut off baking timer correctly and the
432. lerating voltage is applied the HV indicator lamp located in the column unit should come on Flashing Flashing should be actuated when the Flashing Execute sequence on the HV Control is executed The flashing operation should be cancelable flashing intensity should be displayed in the emission indicator INT intensity should be set using the Column option INT2 is normally used e Check the flashing intensities Flashing intensity 1 Specification 0 10 uA Flashing intensity 2 Specification 30 40 pA Flashing intensity 3 Specification 40 50 pA 9 2 S 5200 Field Emission Scanning Electron Microscope Service Manual Adjustments Axis Adjustment The Gun axis and the condenser lens axis should be smoothly adjustable The BM and the objective movable aperture should be smoothly adjustable The electromagnetic alignment operation should work at the full accelerating voltage and in various modes e During the beam alignment the aperture shadow should be round e Astigmatism should be corrected at the full accelerating voltage and in various modes The alignment knob and image motions should behave appropriately as follows Conditions Sample Height 0 0 mm Probe Current mode Normal mode No 5 RR 0 X Knob turned Clockwise Y Knob turned Clockwise Cursor Motion Image Motion Cursor Motion Image Motion RR Off RR Off Beam Alignment g
433. liminates the cumbersome mechanical axis adjustment Figure 1 10 shows probe current properties changes with respect to condenser lens conditions in the analysis mode and another operating mode high resolution observation mode 10 Analysis mode 7 101 Normal mode zw Vago 15KV Emission eA bj Aperture 50 m 10 l 4 u 4 T Condenser Lens Condition Figure 1 10 Relationship between Standard Probe Current and Condenser Lens Conditions Evacuation System in the Energy saving Operating Mode Eco Mode With the S 5200 you can set the evacuation system so that you can start observations at a specified time on the following day by turning off the power for the system except for the ion pump for the electron gun after finishing image observations For example if you need to start your observations at 9 00 a m on the following morning after turning off the power at 6 00 p m you can set the evacuation system to run automatically so that a sufficiently high vacuum level will be attained by the specified time 9 00 a m on the following morning Even during a long vacation the system can run in the energy conservation mode with the power for the evacuation system turned off during the vacation in such a manner that image observations can be started upon the end of the vacation Starting time of observation ECO mode starts y 4 hours lt gt a Evacuation system Ev
434. ling the objective lens Objective lens current will be shut off The Air lamp on the evacuation control panel will be off The power of the turbo molecular pumps will be shut off All valves are closed Alarm buzzer only The evacuation system will not be working normally Alarm buzzer only The evacuation system will not be off Gun baking power supply is shut off Gun baking power supply is shut off Baking power supply will be shut off Electric Theory Countermeasure Check the cooling water supply The Water lamp is lit when water is supplied When the system is using an air compressor check its power supply and pressure When using house air check the source of the air pressure The system will recover when the air recovers at specific pressure Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to EVAC the EVAC AIR switch on the specimen exchange chamber Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to LOCK the S C LOCK switch on the evacuation control panel Pull out the specimen holder to the entrance of the specimen exchange chamber Release the S C LOCK switch on the evacuation control panel until air leak is completed Insert the specimen holder to the entrance of the specimen exchange chamber Press the Baking stop switch Remove the HV cable from the electron gun and insert it to the HV cable ho
435. ller panel to return it to the origin Confirm that the light shielding plate stops at 000 um after the origin of the photocoupler is adjusted and confirmed 2 Move the Y axis to either 1000 um or 1000 um by moving the Y axis control field 3 Asin the case of the X axis move the viewing field in the Low Mag Mode Confirm the splitting in the and directions when the Y axis is moved as illustrated in the figure Micro adjust the view field range by operating the photocoupler origin adjustment screw shown in the figure 4 After the origin adjustment depress the Reset button again to return the Y axis to the 000 um position Re check the splitting of the view field and confirm the splitting after the adjustment of the photocoupler position 5 Until the splitting adjustment is complete repeatedly adjust the photocoupler and depress the Reset button Part No 595 8030 5 31 Electric Theory 1000 um 1000 um Figure 5 25 Image on the TV Monitor during Y axis Adjustment X Y Stage Controller The VRs for the adjustment of the X Y Stage controller are adjusted at the time the system is shipped from the factory Therefore these VRs should not be rotated by unauthorized personnel If you need to adjust any of the VRs please contact factory personnel Error Display Errors are displayed on an axis by axis basis X 2 E 2 indicates an error in the amp unit Error on the X axis X axis d
436. loader Repaired at service center a Faulty pressure meter indicator Replace with a new unit m Pressure increased Faulty pressure valves Adjust or replace it 1 the maximum Faulty pressure meter indicator Replace with a new unit Faulty push solenoid Repaired at service center Piston air valve impeded Repaired at service center Strange noise Faulty bearings Repaired at service center Worn out ridering Replace the ridering Faulty installation Install on level floor Sliding part burned in Repaired at service center Motor heats up Faulty motor Repaired at service center g Motor makes no booming Faulty pressure valves Replace p 986 Protector turned on Pause and restart Decrease in voltage Replace the wires with standard Motor makes a booming wires noise Air valve leaks Replace with a new unit Faulty starting unloader Repaired at service center NOTE When requesting repair service please provide the following information 1 Model 2 How the problem occurred 3 Your address S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 2 3 VRT Board LED Display on the ECPU247 Board CPU Fe d i 1 i 1 i J 1 ECPU247 Board LED Normal Silk Normal Silk Status Screen Color Description Status Screen Color Description after self analysis RUN Green CPU running Lamp ON LLED 1
437. lt 42 lt 005 lt lt 225 5422 4 82 37 ava 12 30u G 298 500 08004292009 5 gt 5 gt O O Lo x sa qa mise LD 1 panar ajo from FPGA 35 2 2 a3 misi LD 2 282 202 ajajajaja alojoj c c o o c o o 6 N N N N N N a alo x T VW M 5 avs 9 iaa LD 3 jana ava a7 33 9 nias LD L SSW 4 2 7 26 ans 23 gt Vee gt gt gt Ve 6 22 7 62274 of Jaco 1 P 244 or H M 5 1 5V d es amp gt 4 1 23v 2uy 3 oy 1 c gt VW 7 a c30 2 4 20u El Les 5 sov sov 5 5 F GREEN 2 2 RESET_N on USED LOCAT ON NO x 5 y ce 27 R9 R70 R71 72 C9 C30 C50 c56 C130 C131 CAD 2 x E zs m FAG EF 4 i KAGEYAMA 1998 1999 5 oorsuka 1999 12 53 19
438. lt compensation e CD measurement function option TV Slow 0 5 to 40 msec frame for viewing mode 40 to 320 sec frame for capture and image recording mode 15 um at WD 12 mm 640 x 480 pixel memory x 11 1280 x 960 pixel memory x 11 2560 x 1920 pixel memory x 2 Standard 640 x 480 pixels x 1 2 split screen display 512 x 480 pixels x 2 Full screen 1024 x 700 pixels x 1 SE secondary electron signal BSE Upper backscattered electron option X ray signal AUX signal 2 systems DBC Digital Beam Control option RS 232C communication interface option Keyboardd mouse sharing function Fully automatic data display on monitor Film no Accelerating voltage Magnification Micron bar Micron value Focus position sample height value Date Time Data display on image and in white on black screen selectable on image by using the keyboard Photographing CRT option 4 x 5 Polaroid film holder unit option 4 x 5 roll film holder unit option Various external memories option Width x Depth x Height 890 1030 1050 880 520 600 252 400 230 400 200 180 Weight 600 Kg 260 Kg 75 Kg 25 Kg 18 Kg 40 Kg 160 mm Notes NOTE Due to the 82 93A modification the height and weight of the power supply unit are 1443 mm and 145 Kg respectively NOTE The dry pump is to be supplied by Hitachi Sales The dimension weight of ESDP12 is shown above 1 12 S 5200 Field Emission Scanning Electron
439. magnetic shield is provided in the electron gun unit Adjusting the Axes and Registering Axis Correction Values The following operation should be performed in the HM mode with an magnetic shield for the electron gun installed If a magnetic shield needs to be installed later due to baking requirements provisionally perform the following axis adjustment without a magnetic shield and re do the axis adjustment after a magnetic shield has been installed Adjustment Conditions Probe Current mode Normal D alee D 10 11 12 13 14 9 36 Specimen holder spring actuated standard specimen holder Specimen Specimen stub with mesh Sample Height 0 0 mm Image shift mid point the reset condition Set the accelerating voltage to 1 kV Pull out the BM aperture and the objective aperture the 0 position Click on Reset All on the Alignment screen to set the electromagnetic alignment to a mid point Set C1 C2 Off Perform a Beam AL mechanical axis adjustment on the electron gun Set the BM aperture to 1 Perform a Beam AL mechanical axis adjustment on the BM aperture Set the objective aperture to No 2 50 um diameter Perform a Beam AL mechanical axis adjustment on the objective aperture The C2 lens should remain Off Set C1 5 Perform a Beam AL mechanical axis adjustment on the C1 Open the EO Adjustment 2 screen Click on 7 kV on Axial Comp HM Start the Apert AL mode Rotate the alignment knob
440. ment in the Beam AL and Apert AL modes CAUTION Perform focusing as accurately as possible using an approximate magnification of 5 0 k Inadequate focus adjustments can decrease the control accuracy of the optical system e g magnification computation image rotation computation and the accuracy of Sample Height settings Repeat the Degauss and focus adjustments two or three times Confirm that clicking on Degauss does not cause a fuzzy image Click on Get NOTE Do not Save at this stage Execute the SAVE command after performing the adjustments Comp1 Comp4 Part No 595 8030 9 41 Adjustments 5 Perform image adjustments by setting the accelerating voltage to 20 kV with the Sample Height remaining at 0 0 mm NOTE Before performing this adjustment make sure that Vsel and Vse2 are Off NOTE If the stage Z has been inadvertently moved re do the procedures beginning with step 1 6 Click on Focus Comp2 Repeat steps 3 and 4 7 Setthe accelerating voltage to 10 kV and Sample Height 1 0 mm Perform image adjustments after moving the stage X Y to the position of the specimen to be focused on with Height 1 0mm The specimen height should not be changed using the Z knob 8 Click on Focus Comp3 Repeat steps 3 and 4 9 accelerating voltage to 25kV without moving the stage Z 10 Ifthe stage Z has been inadvertently moved re do the procedures beginning with step 7 11 Click on Focus Comp4 Repeat steps 3 and 4
441. message will be shown for confirmation when you memory area of No select a capture area where image already exists or when Are you sure you capture an image when image exists in the next capture area Delete Calibration No This message will be shown for confirmation when you Are you sure delete a calibration data A date of the maintenance for Check the date of the maintenance for the scroll pump and the scroll pump will be update to click the OK button the following date Are you sure The limit is bytes You entered too long a login name or password Option disk is invalid The option disk is not for this instrument Use the correct disk Serial number is invalid The serial number is incorrect Or the option disk is not for this instrument Failure in auto focus This message will be shown when auto focusing failed in focus detection Check if the observed specimen has fine surface structure the image brightness or contrast is adequate or the OBJ aperture is aligned correctly Failure in auto stigma This message will be shown when auto stigma failed Check if the observed specimen has fine surface structure the image brightness or contrast is adequate the OBJ aperture is aligned correctly or stigma alignment is adjusted correctly Input value or measured value 15 This message will be shown when ratio of correct value and not correct measured value in the calibration operation is out of range Magnificati
442. moving or renaming the images on a user may cause troubles when opening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles When images are registered in multiple user names deleting moving or renaming the images on a user may cause troubles when opening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles This message will be shown when Printing images in Dual Screen mode When you click the No button the image on the screen specified by the Record A B buttons will be printed This message will be shown when closing the program while HV is still ON If you click the OK button HV will be shut Off S 5200 Field Emission Scanning Electron Microscope Service Manual Would you save measurement 3100 3200 3201 3210 3220 3502 3503 3506 3508 3600 3601 3802 3810 Part No 595 8030 data Software Cause amp Remedy This message will be shown when closing the CD Measurement without saving measured data Click Yes and save data if it is necessary Please insert additional option Insert the option disk following the message disk Delete this option This message will be shown for confirmation Are you sure The password has been successfully changed This message shows that the password h
443. mple of Figure 8 14 specifying a data count greater than the actual number of data points will not cause an error In this case the system copies all existing data Although a zero can be entered a column with nothing specified will cause an error and display a message When finished with the input of changes press the OK button When this happens the system will restart the copying process according to the specified number of data points If an error still persists as shown in Figure 8 13 repeat the process by further reducing the number of data points Upon completion of the copying process the screen displays Complete as shown in Figure 8 12 You can return from the screen in Figure 8 14 to the screen in Figure 8 13 by pressing the x button located in the upper right portion of the screen S 5200 Field Emission Scanning Electron Microscope System Operation Service Manual 7 Reset WorkCondition button Function summary This button resets the contents of the table WorkCondition in the database file c Program Files Pc_sem Ras mdb Refer to the Ras Reset manual for details 8 Display History button Function Summary This button calculates and displays cumulative SUM uptime hours by reading data from the Etc table in the database file Ras mdb a Displaying the Uptime Status Press the Main Screen Display History button 4 2mm 5 xx D00004 JSET 20009523 7
444. n not find the Version No File SUM Result 1 C4 WINDOWS Setup132 exe OxFFEA6FE4 2 C WINDOWS SYSTEM stk it432 dll OxFFD24BE5 OK 3 C WINDOWS SYSTEM V B40032 DLL OxFFBOO871 OK 4 CXWINDOWSXSYSTEMXven2232 olb OxFFE94917 OK 5 CXWINDOWSXSYSTEMXolepro32 dll 044 OK C XWINDOWSXSYSTEMXmsvcrt20 dll OxFFFFIBE OK 7 C WINDOWS SYSTEM msvert40 dll xFF4FA324 OK 8 C WINDOWS SYSTEM VB4 JP32 BLL OxFFFCAC6B OK 9 C WINDOWS Setup132 exe OxFFEA6FE4 OK C3 WINDOWSXS YSTEMXolepro32 dll 044 OK 11 CXWINDOWSXSYSTEMXSemlmage32 DIl OxFFFASFF2 OK OV OK E Indistinct former version Figure 8 10 Comparison Screen between SUM Files and Current Files 5 Display Error Log button Function summary Errors and messages that are generated at the time the SEM function is started are recorded in a database file Ras mdb This button displays the times of error message generation and the meanings of the message codes 1 Pressing the Main Screen Display Error Log button causes the system to reference the table Error in the database file c Program FilesPc sem WRas mdb If this table does not exist a message to that effect appears on the Main Screen If the table is found the dates the codes and their meanings are displayed as illustrated in Figure 8 11 Part No 595 8030 8 19 System Operation 2 R
445. n 20 45 seconds after the specimen exchange chamber is evacuated and the EVAC lamp flashes the EVAC lamp remains continuously lit e The specimen holder can move from the specimen exchange chamber to the specimen chamber when the EVAC lamp for the specimen exchange chamber is flashing When the EVAC lamp remains lit the specimen holder should not be insertable into the specimen chamber Part No 595 8030 9 1 Adjustments Checking the Evacuation The EVAC AIR switch should operate normally and the lamp should be lit normally e The AUTO OPEN side lamp should flash only when the S C AIR LOCK VALVE switch is on the Close side ad the specimen holder is inserted into the specimen chamber When the specimen holder is inserted into the specimen chamber setting the EVAC AIR switch to the AIR position should never cause the specimen exchange chamber to leak The specimen exchange chamber should AIR leak only when the specimen holder is withdrawn and is in the specimen exchange position 9 2 2 Micro motion Specifications See the Specimen Micro motion Test section of 9 3 4 9 2 3 Electronic Engineering Specifications Accelerating Voltage The system should permit the application of an accelerating voltage corresponding to the Sample Height mode Sample Height Mode Applicable Accelerating Voltage Range 2 0 0 5 5kV 1 5 0 5 10 1 0 0 5 25 0 5 1 5 0 5 30 When the Acce
446. n EVAC process was started S C LOCK switch on the Alarm buzzer only evacuation control panel is set to LOCK when the specimen chamber is in the air leak process EVAC power is on when The evacuation system will the specimen holder is out not be off the specimen chamber Gun baking was started Gun baking power supply is while the HV cable head is shut off not removed Covers around the electron Gun baking power supply is gun are not attached shut off Over heating of baking Baking power supply will be heaters shut off when optional temperature sensor is installed Countermeasure Check the cooling water supply The Water lamp is lit when water is supplied Check the cooling water supply The Water lamp is lit when water is supplied When the system is using an air compressor check its power supply and pressure When using house air check the source of the air pressure The system will recover when the air recovers at specific pressure Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to EVAC the EVAC AIR switch on the specimen exchange chamber Pull out the specimen holder to the entrance of the specimen exchange chamber Or set to LOCK the S C LOCK switch on the evacuation control panel Pull out the specimen holder to the entrance of the specimen exchange chamber Release the S C LOCK switch on the evacuation control panel until air leak is c
447. n active magnetic field canceller Part No 595 8030 3 3 Installation 272220222 x AY E Distortion amount A AS CIR a x x k x h k k s Image expansion contraction Image distortion Figure 3 1 Power Frequency Stray Magnetic Field AC Magnetic Field High frequency noise Image shift IRSE Image distortion locations DC magnetic field fluctuations Figure 3 2 Asynchronous Power Stray Magnetic Field DC Magnetic Field 3 4 S 5200 Field Emission Scanning Electron Microscope Installation Service Manual 3 1 7 Vibration Before installing the instrument measure floor vibration at the installation site The image will not be disturbed if the conditions given in Table 3 2 are met The instrument performance will not be degraded on account of vibration in a reinforced concrete or steel frame building if there is no vibration source nearby such as large machine tools or transportation facilities trains etc and if the instrument is placed on the first floor Vibration with 10 Hz or less Table 3 2 Allowable Vibration Allowable Value X and Y direction Allowable Value Z direction Frequency Hz Amplitude ump p Frequency Hz Amplitude ump p 0 5 10 0 5 15 1 0 10 3 0 15 1 5 5 3 5 15 2 0 6 4 0 12 2 5 8 4 5 10 3 0 10 5 0 8 4 0 10 5 5 8 5 0
448. n of the axis is in progress Wait until initialization ends These messages will be shown when the axis is driven over its limit It will be recovered automatically This message will be shown when the stage can not be set at the home position correctly Restart the stage power switch If this happens frequently contact a service engineer This message will be shown when the operation does not end within specified time period If the message is shown frequently contact a service engineer 7 27 Software Error Code 5400 5401 5402 5403 5406 5407 5982 6510 Message X axis is out of range MAX Please check sample size with Stage Control Window X axis is out of range MIN Please check sample size with Stage Control Window Y axis is out of range MAX Please check sample size with Stage Control Window Y axis is out of range MIN Please check sample size with Stage Control Window T axis is out of range MAX T axis is out of range MIN Stage presently moving Host not found HV Evacuation System Error Code 7012 7030 7100 7101 7102 7200 7 28 Message HV forced OFF due to one of the following items Cause Degradation of vacuum Safety protection activated Setting the specimen holder at the entrance of the specimen exchange chamber Emission current limit error Long time has past since last flash Please execute flashing or HV OFF HV turned off due to
449. n start gun OUTER TIME 2 baking again Failure of the u i Contact a service engineer Failure of the Pl2 MEE Contact a service engineer EVAC power is off when The evacuation system will Pull out the specimen holder to the the specimen holder is in not be off entrance of the specimen exchange the specimen chamber chamber Error of ECO mode caused ECO mode will not start Settle the problem and then start ECO by mode 1 EVAC power off 2 The specimen holder is in the specimen chamber While the baking is carrying out SEC EVAC AIR switch is set to AIR Timer setting is failed S 5200 Field Emission Scanning Electron Microscope Mechanical Configuration Service Manual 6 Mechanical Configuration 6 1 Main Unit Mechanical Configuration Figures 6 1 and 6 2 show a mechanical configuration cross sectional diagram of the main unit and a configuration diagram of the electron optics system Electron gun Electron source 1 60 1 5 Beam monitor aperture 1st condenser lens IP 2 20 l s Air lock valve V 1 Beam blanking IP 3 20 l s Objective movable aperture 2nd condenser lens Specimen Specimen stage Figure 6 1 Main Unit Mechanical Configuration Cross sectional Diagram Part No 595 8030 6 1 Mechanical Configuration FE Electron source BM amplifier BM signal aperture Beam AL i BLK 1 2 steps i i i 7P hermetic
450. na noise insulator of poor insulation poor contact arc discharge by corrosion of metal Electric railways Discharge noise spark arc Trolley car vehicle devise rectifier Reflection Reflection by vehicle Internal combustion Automobile Discharge noise Ignition system engine Miscellaneous Generator voltage regulator wiper horn winker Wireless High power transmission Signal radiation Broadcasting equipment radar communication equipment equipment equipment Unnecessary radiation High frequency from transmitter 3 6 Signal in own system constitutes interference with other systems S 5200 Field Emission Scanning Electron Microscope Installation Service Manual 3 1 10 Sound Waves Both low and high frequency sound waves air vibration are harmful to the instrument and will cause image interference When selecting an installation site it must be checked whether there is a noise source If such equipment exists near the SEM the noise level must be measured If conversation is possible only in a loud voice due to noisy equipment sonic disturbance may occur The allowable noise level at the installation site is 80 dB C property with a frequency of 200 Hz or less In the area of 200 Hz or more image distortion may occur even with 70 dB C property depending on its frequency It is necessary to analyze the sound to determine the impact of each noise frequency of 200 or
451. nce Service Manual NOTE Tighten 1 through 16 in this order Figure 10 8 Nut Tightening Sequence Evacuating the Electron Gun Turn ON the EVAC switch to evacuate the specimen chamber and electron gun Wait 1 2 hours after the HIGH lamp flashes to display the vacuum of the specimen chamber Install the baking heater on the electron gun chamber Remove the IP 1 connector from the ion pump and turn ON 1 on the evacuation panel Because high voltage is applied to the IP 1 connector do not touch it to avoid electric shock 5 Set the OUTER BAKING timer only Do not attach INNER BAKING terminal rod Set the OUTER BAKING timer to 14 hours or more Set the OUTER BAKING to complete two hours prior to turning ON all IPs Turn OFF the IP 1 switch on the evacuation panel and connect the IP 1 connector Turn ON switches IP 1 2 and 3 Close valves MV 2 3 and 4 Close the associated valve as each IP turns ON ND Check the evacuation condition in one hour or so Verify that the ultimate vacuum of each IP is 1 x 10 Pa or less 10 Attach the INNER BAKING terminal rod to the electron gun and connect the connector 11 Start normal Baking See Figure 10 1 12 Verify that the ultimate vacuum of each and that there is no vacuum leakage IP 1 lt 1 x 10 IP 2 lt 2 x 10 Pa IP 3 1 x 10 Pa Part No 595 8030 10 7 Maintenance Breakdown Voltage Test 1 Attach the discharge protect
452. ndary Electron Detector The secondary electron detector consists of a scintillator to convert secondary electrons into light and a photo multiplier tube It is mainly used to intercept the secondary electrons emitted from the specimen when scanned with the electron beam Evacuation System The ion pumps are used to evacuate the electron gun section The turbo molecular pump and dry pump are used to evacuate the specimen chamber etc 4 2 2 Display Unit Basic Principals PC It is mainly used to operate the instrument and record the images ECPU VRT 250L It is used to receive control commands from the PC and convert them into signals to control each section 10 CTL It is used to convert the control signals from the ECPU into the proper I O control signal for each unit Image Memory NSEM200 It is used to digitize the analog image data from the SGVA store them in the image memory and transfer them to the IMP N IMP N It is used to superimpose the digital image data from the Image Memory NSEM200 onto the PC s GUI SGVA It is mainly used to control the deflection scanning signal and the video signal DEF LENS It is mainly used to control the deflection coil that deflects the current for each lens and the electron beam HVC It is used to control the accelerating voltage the extracting voltage and the emission current 4 2 3 Power Supply Unit Basic Principals Ion Pump Power Supply 5 2kV DC is supplied to
453. netic field AC magnetic field normally yields a mildly distorted expansion and contraction Figure 3 1 whereas the image distortion caused by an asynchronous stray magnetic field DC magnetic variation appears as an image shift or high frequency noise Figure 3 2 When a direct current DC magnetic field in the stray magnetic field changes slowly a flowing image will appear Therefore the allowable values for the synchronous power source component the asynchronous power source component and the temporal change drift will vary Because the degree of impact on the electron scanning beam varies for the horizontal and vertical directions the allowable values of each direction varies The allowable values described in Table 3 1 are stipulated as the values for high resolution observation 3 2 S 5200 Field Emission Scanning Electron Microscope Installation Service Manual If the settings other than shown below are used and the value is less than the allowable value the image may still be distorted Generally the impact of the stray magnetic field fluctuation of the electron scanning beam by the stray magnetic field is inversely proportional to the square root of the accelerating voltage if other conditions remain fixed Table 3 1 Allowable Stray Magnetic Field excluding magnetic field drift AC Magnetic Field DC Magnetic Field Change Resolution Settings effective value peak to peak 200 nT 50 nT 200 nT 50 nT Probe curre
454. ng Water MAIN POWER OPEN SW gt ON EVAC POWER SW gt ON NO D AIR COMP Dry Pump NO MDP ON Normal YES Normal SC Evacuation Control fPe 9X10 P3 YES EVAC V3 CLOSE V4 OPEN Dry Pump NO Normal YES Normal Z YES YES 4 V4 OPEN HOLDER FREE lt gt gt NO OLDER LOCK V3 OPEN YES OLDER LOCK V3 V4 OPEN M NO AIR SW status Keep NORMAL OPERATION 5 54 V3 CLOSE LV1 OPEN 7305 V3 OPEN LV1 OPEN SW status NO EVAC f Keep 1 User operation 7 Control lt gt Decision S 5200 Field Emission Scanning Electron Microscope Service Manual Normal Operation DISPLAY SW gt ON WATER VALVE OPEN AIR LOCK VALVE SW gt ON BUZZER ON Stop Operation HOLDER IN S E C AUTO STOP TIME 3 30set EVAC POWER SW OFF NO YES ALL VALVE CLOSE SW status YES OFF Dry Pump OFF AIR COMP OFF TMP MAIN POWER OFF User Operation L L 7 Control lt gt Decision MAIN POWER SW gt OFF COOLING WATER CLOSE Part No 595 8030 Electric Theory 5 55 Electric Theory Specimen Removing Operation Specimen Inserting Operation E HV OFF HOLDER IN SEC SEC SW gt AIR YES BUZZER ON NO MDP YES Normal gt YES V4 OPEN HOLDER FREE YES NO OLDER LOCK
455. no more out gas It is OK if the deteriorated vacuum of IP 1 is 1 x 107 Pa or less at flashing Set the flashing strength to 2 and verify that the meter range is 30 to 40 uA If not adjust it 5 Check an initial value of V1 when the accelerating voltage is 1 kV and the emission current is 10 If the initial value of V1 is 3 5 to 3 9 kV it is not necessary to round the tip 6 Setthe flashing strength to 3 and repeat the flashing operation several times when the initial value of is 3 5 kV or less Set the flashing strength to 3 and verify that the meter range is 40 to 50 LA when flashing If not adjust it 7 Check the initial value of V1 again 8 Repeat steps 6 and 7 until the initial value of V1 becomes 3 5 to 3 9 kV FE Bombard 1 Setthe accelerating voltage to 30 kV and the emission current to 10 WA and observe for about 30 minutes 2 Select bombard in the EO Adjustment 1 window and set the emission current to 50 uA 3 Setthe accelerating voltage to 7 kV 30 kV and bombard for 4 hours or more 4 Set the emission current to 10 and check the image quality Check Items after the Tip Replacement e Set the accelerating voltage to 1 kV or 30 and check the image quality Repeat electron gun baking and FE bombarding if the tip noise exists Part No 595 8030 10 9 Maintenance Tip Replacement Procedure Flowchart The Tip Replacement Procedure Flowchart is shown in Figure 10 10 Prepare tip
456. nstallation 5 uu Guau Suku aa snnt 3 6 Part No 595 8030 i Table of Contents 3 2 aes 3 9 3 2 1 Unpacking AME 3 9 3 2 2 3 9 3 2 3 Qua nitty CHO CK ER 3 9 3 3 T 3 9 3 3 1 Instrument Layos ieie 3 9 3 3 2 Setup PIOCEAUTES 3 9 3 3 3 Display Modification For 52 Uhnhit n nanas 3 13 3 4 INSTALLATION SUMMARY ku denon oe 3 14 3 4 1 Installation Test xe ed e ee Ee ees Raed ea REOR 3 14 3 4 2 Operation and Maintenance a eee n eee enel ee persecuti eee ege rl e fente 3 17 3 4 3 asisqa irn 3 17 4 HARDWARE a li qa SS 4 1 4 1 SYSTEM CONFIGURATION abiere certa ete e terrea ee be Le Ree ree kasqa 4 4 1 1 Main UNU Emm 4 1 4 1 2 Display Unit ysis she ea e eee UR A hee T E fe des 4 4 4 1 3 Power Supply Unit Block Diagram 4 5 4 2 BASIC PRINCIPAES eee Dept bes elei ma ee e reet 4 6 4 2 1 Mam Basic Principals a mw teet beet eer re Pere P Eee ERR as 4 6 4 2 2 Display Unit Ba
457. nt Normal Accelerating voltage 30 kV Magnification 600 000 x 300 nT 70 nT 300 nT 70 nT Specimen height 0 5 mm Probe current Normal e Since the power synchronous component AC magnetic field is an effective value multiply the allowable value by 2 8 if P P value peak to peak is used for evaluation Accelerating voltage 1 kV Magnification 150 000 x Specimen height 1 5 mm DC magnetic field fluctuation indicates sudden change of the stray magnetic field with time e The allowable value of the AC magnetic field will cause image distortion expansion contraction and curvature of 0 5 mm at the specified magnification e allowable value of the DC magnetic field fluctuation will cause a disturbance image shift or high frequency noise of 0 2 mm on the image at the specified magnification e Since a stable DC component does not cause electron line sway it does not affect the image if the amount is around 30 or 40 uT e allowable values shown in Table 3 1 indicate the values at the specified resolution settings If the settings are other than this the image becomes more susceptible to the stray magnetic field The lower the accelerating voltage the more the image is susceptible to the stray magnetic field e Ifthe value exceeds the allowable value shown in Table 3 1 one of the solutions shown below is required gt Consider another facility location gt Install a magnetic shield box gt Install a
458. ntal line on the CRT 8 Setthe magnification to 500 Adjust the following trimmer so that the horizontal and vertical mesh lines are parallel to the horizontal and vertical lines of the length measurement cursor SGVA board VR2 LM Adjustment Specification an orthogonality of 0 5 maximum at the adjustment point Part No 595 8030 9 37 Adjustments Trimmer Adjustment of Scanning Amplitudes HM LM Modes Adjustment Conditions Accelerating voltage 5 kV Emission 10 pA Probe Current mode Normal Magnification mode HM LM modes Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm Image shift Mid point the reset condition R R Off The following adjustments should be performed after confirming that both Magnification Adjust and Mag Range Factor are 1 000 on the EO Adjustment 1 screen 1 Perform image adjustment in the HM mode 2 Set Slow 2 and magnification 2 0 Using a length measurement cursor measure the mesh pitch Adjust the following trimmers so that the measured value will be 25 4 1 0 um Amplitude in X direction VR3 HM for SGVA board Amplitude in Y direction VRS HM for SGVA board 3 Perform image adjustment in the LM mode 4 Slow 1 and magnification 500 Using a length measurement cursor measure 4 pitches of the mesh Adjust the following trimmers so that the measured value will be 100 5 um Amplitude in X direction VR4 LM for SGVA board Amplitude in Y direction
459. ntensity 1 0 5 pA VR3 Intensity 2 30 40 pA VR2 FL2 Intensity 3 40 50 one FL3 Confirming the EO Adjustment Default value Until the adjustment of EO Adjustment items is completed perform adjustments using the following default values EO1 EO2 EO3 Ic1 122 Adjustment on the EO Adjustment 2 screen indicates stand alone Display adjustment values EO Adjustment EO Adjustment2 Soir PAK 00 KA 00 Ky rn Oring MEE Pim f n C of e C X Mey te Mid So ili gt SX offe S 2 1400 0 14000 43 0 9 32 5 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual EO Adjustment3 9 e fe e Sar 1712 2 e fe Figure 9 16 EO Adjustment 3 Screen Entering Current Values for the C1 and C2 Lenses Confirm that the C1 C2 lens current values on the Display adjustment recording paper agree with the 121 122 adjustment settings on the EO Adjustment 2 screen Adjusting the Offset between Deflection Magnification Ranges Adjustment Conditions Accelerating voltage 3 kV Emission 10 pA Probe Current mode Normal Aperture No 1 100 diameter Specimen holder Spring actuated standard specimen holder Specimen Specimen stub wit
460. o cleared and any replacement date to be changed to the current system date and time 8 Display History button This button displays on the screen the contents of the operating status table that is created and revised based on the Etc table containing SEM starting ending times HV on off times and so forth in the database file Ras mdb This button also displays graphs of the vacuum state created by the SEM function emission current values alignment information files that are created by pressing the Save button on the Display EVAC Condition screen in Step 2 above any vacuum data in the socket log file and emission data 9 Restore DB from FD button This button either replaces the database file Ras mdb on a floppy disk with the same file on the hard disk or creates adds both files Execution of this function requires a database file on the floppy disk This function can be used if the database file is lost or damaged for some reason e g a PC breakdown In order to use this function you need to periodically back up the Ras mdb file to a floppy disk using the function described in Step 8 above 10 Save Product Inf button This button creates a file Ras_Insp txt that reflects the factory default settings for the system The file can be copied to a floppy disk 11 Save SEM Inf button This button creates a backup file for the information contained in the registry HKEY LOCAL MACHINE SOFTWARE SS5200
461. o restore the file provided that the file had periodically e g once a week or once a month been backed up to a floppy disk using Step 8 above When completely rewriting an existing database file from a floppy disk select the REWRITE button in Figure 8 26 When adding an FD file to a file on the hard disk select the SYNTHESIZE button Indicates data retention periods N Figure 8 26 Database File Revision Selection Screen A confirmation screen appears when the REWRITE or SYNTHESIZE button is pressed Figure 8 27 Figure 8 27 Confirmation Screen the REWRITE button pressed The OK button executes the command A message appears on the Main Screen upon completion of the command Clicking on the Close button returns control to the Main Screen 10 Save Product Inf button Function summary This button saves in a file Ras_Insp txt the data necessary for filling out a check sheet before the system is shipped e Saved information e SEM version e Total time Part No 595 8030 8 31 System Operation Total Flashing time NT version information Product ID e CSD service pack version Time zone settings e Logos sys file yes or no Option Setup information Serial Number Stage Axis STAGE OPTION Stage Cotnrol Version DETECTOR RD500W 1 AUX 2 AUX 3 AUX 4 FREQUENCY VIDEO FORMAT VIDEO AMP VIDEO PRINTER FULL PANEL PHOTO Option Setup Software information
462. oard A E E A 5 16 5 6 SUPER IMPOSER AND CANCELLER 2 1 2 0010 0 6 000000000000000000000000000000000550 5 19 5 6 1 SUPET eo 5 19 5 6 2 Magnet Field Cangelleti 5 27 57 STAGE CONTROLLER au ele sa e led a aede 5 29 5 7 1 Stage Controller Configuration 5 29 5 7 2 yc TET 5 30 5 7 3 X Y Stage Coniroller 8S 074 tiet ea ete eta e ete pla eee et baee eene 5 30 5 7 4 NUPTIAE 5 42 5 8 HIGH VOLTAGE UNIT ite oT a e och eda te 5 43 5 8 1 BLOCK DIG STAND mE 5 43 S 5200 Field Emission Scanning Electron Microscope Table of Contents Service Manual 6 7 9 5 8 2 WO ACS ea cack abies 5 43 5 8 3 RE 5 44 5 9 cito ere e dos t Ege ee Eie de 5 46 5 9 EVAG Configuration s ees oe tn iet COREL ror oie ei 5 46 5 9 2 EVACSEQ Board Configuration deci eiit tere erii sedans HE Dee eed 5 48 5 9 3 Adjusting the EVA CSEO a agua ma a a n a as 5 48 5 9 4 Ia qn E Een 5 50 5 9 5 EV TOPE OOS siete 5 58 MECHANICAL CONFIGURATIONNN
463. off the amount of image shift should be less than 5 mm on the CRT at an LM mode magnification of 1 0 less than 5 um on the specimen Upon completion of the adjustment process click on Get and Set in that order This operation saves the ExB adjustment data On the Adjustment Screen click on Save to save the adjustment data Click on None disconnect on the Adjustment screen Adjusting the Position in which the Electronic Gun is to be mounted mechanical Adjustment Conditions Accelerating voltage 1 kV Emission 10 pA Probe Current mode Normal Specimen holder Spring actuated standard specimen holder Specimen Specimen stub with mesh Sample Height 0 0 mm Electrical alignment All mid points the reset condition Image shift Mid point the reset condition Part No 595 8030 9 35 Adjustments Set Cl C2 Off BM aperture Off objective aperture Off Perform a Beam AL mechanical axis adjustment on the electron gun FE tip In the Beam AL mode adjust the electron gun mounting location by rotating the adjustment screw so that the outline flair is uniform when a round image is displayed on the CRT After making the adjustment fasten the fixing screw for the electron gun to secure it Fix another screw on the adjustment screw double screws Install a magnetic shield on the electron gun Note that the axis correction condition described below registered value can vary depending upon whether or not a
464. ommands for requesting data cannot be sent which prevents the display of system operating status as described in 2 If a connection failure occurs check to see whether the SEM exe program is being started whether an IP address is set incorrectly or whether there are any loose wire connections 2 Display EVAC Condition button Function summary This button produces a graphical display of the operating status of the system on the screen 1 Clicking on the Main Screen Display EVAC Condition button brings up the screen shown in Figures 8 4 and 8 5 This button cannot be pressed if a connection to the VRT failed in C 1 above Part No 595 8030 8 13 System Operation 8 14 in which case you need to perform the operation in C 1 Every time it receives a command the VRT returns data This screen allows you to set the timing in which commands are to be sent The default is to transmit a command once every five seconds The screen display varies depending on whether the pump being used is a DP or a TMP Figures 8 4 8 5 Pump settings can be changed on the main screen more on this later in C 15 The system operating status is displayed on the screen in different colors The vacuum level measured with a vacuum gauge is displayed on the right of the screen The text box located in the lower portion of the screen displays an illegal state or a comment on illegal data The READ command is re issued a specified number of se
465. ompleted Insert the specimen holder to the entrance of the specimen exchange chamber Press the Baking stop switch Remove the HV cable from the electron gun and insert it to the HV cable holder at the side of the display unit And then start gun baking again Press the Baking stop switch Attach covers to the electron gun part And then start gun baking again Stop gun baking Contact a service engineer S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual E 34 35 36 37 38 E 51 52 97 99 lon pump 1 power supply is Baking power supply will be Stop gun baking Wait for a few hours shut off while gun baking shut off Restart ion pumps And then start gun The gun baking may cause baking again deterioration of gun vacuum and in some cases ion pump power supply will be shut off lon pump 1 vacuum When vacuum of the ion Stop gun baking Wait for a few hours degraded pump 1 degraded to lower Restart ion pumps And then start gun than the specified value baking again baking power supply will be stopped Cover around the trap heat Trap heat power supply is Press the Trap Heat stop switch Attach is not attached shut off covers to the trap heat part And then start the trap heat is an optional trap heat again accessory Gun baking was started Baking power supply will be Stop gun baking Wait for a few hours while the ECO mode is shut off R
466. on is out of step Magnification is set in stepwise by magnification operation range Please adjust and also changed finely by focusing operation Calibration magnification of measured data is possible only when the step set magnification value When this message is shown once make magnification operation using mouse on the magnification area or using the knob on the operation panel option And then continue measurement operation Please execute calibration This message will be shown when you click the Apply button before the Calibration Factors are calculated Communication time out error This message will be shown when the control of the between SEM and STAGE motorized stage failed Try once to restart the display unit Please check the wiring for RS and the stage controller 232C and re start the system 11 23 Troubleshooting Stage 5000 5001 5002 5003 5006 5007 5020 5021 5023 5025 5026 5040 5041 5043 5075 5080 5085 5090 5101 5102 5103 5104 5200 5201 5203 5365 5366 5368 11 24 X axis parameter error Max X axis parameter error Min Y axis parameter error Max Y axis parameter error Min i i T axis parameter error Max T axis parameter error Min Cannot execute while drive X axis Cannot execute while drive Y axis Cannot execute while drive T axis Cannot execute while drive stage by track ball Cannot execute while drive stage by panel Cannot execute wh
467. on the screen to show the progress Part No 595 8030 11 29 Troubleshooting No ltem Procedure 9 When the message The image has been restored Do you want to see the results appears select Yes to confirm the results 10 When a message asking to restart the computer appears remove the CD R and press Restart 11 Confirm that the SEM starts properly Check Notes 11 30 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 6 5200 PC DESKPRO EP P450 6b 4 64c Setup Procedures 11 6 1 Required Items e PC DESKPRO EP P500 6b 4 64c Network board Intel PRO 100 COMPAQ e Transfer board Restore CD DESKPRO ED Series Ver 4 1 e Windows 4 0 CD ROM Windows NT Service 4 CD ROM Intel PRO 100 CD ROM Network board device driver e S 5200 software CD ROM e SCSI board Refer to the manual that comes with SCSI for SCSI driver installation procedure 11 6 2 Hardware Setup Make sure that the power for the PC is off remove the cover Switch the CD and FD drives placing them sideways Insert the expansion memory pe ND S S Install the Network Video and Imposer boards in the following slots PCI Empty PCI SCSI board PCI Network board PCI Transfer board PCI ISA Empty ISA Empty 11 6 3 BIOS Settings Turn ON the power for the PC When F1 Save Change appears press the F1 key The system restarts
468. onfirmed Input both new and confirmation passwords again passwords do not match Please Note that capital and small letters are distinguished type them again 2202 Cannot delete this login name This login name is not allowed to delete 3001 Written data will be combined This message will be shown for confirmation into image OK 3002 Written data will be transferred This message will be shown for confirmation into bitmap area for photograph OK 11 20 S 5200 Field Emission Scanning Microscope Service Manual Caution All captured images will 3003 3004 3010 3011 3013 3015 3016 3021 3022 3023 3030 Part No 595 8030 be deleted Are you sure Exit SEM Manager OK already Exist Overwrite will be deleted Are you sure XXXX will be deleted moved former files Are you sure already Exist Overwrite Yes Overwrite No Save by using different name already Exist Overwrite Yes Overwrite No Append into the existing file Caution After deleting data it cannot be accessed by any other user table it is registered in Are you sure Caution After moving data it cannot be accessed by any other user table it is registered in Are you sure Caution After renaming data it cannot be accessed by any other user table it is registered in Are you sure Print both A and B images Troubleshooting Cause amp Remed
469. operation panel is at the OFF position 9 Set the EVAC POWER switch on the evacuation operation panel to the position 10 Ifthe S C LOCK switch is not on the side set it to the LOCK side 8 6 2 Starting the system after an emergency shutdown 1 Confirm that that system is in the normal operating condition Turn the emergency shutdown switch in the direction indicated in Figure 8 32 to reset the switch to its original position Figure 8 32 Resetting the Emergency Shutdown Switch 2 Turn on the cooling water 8 44 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual 3 Set the power supply breaker on the power distribution panel to the position 4 Push in the power leak shutoff indicator button white on the MAIN breaker for the power supply unit While holding the POWER switch down set the MAIN breaker to the position 5 Set the IP 2 and IP 3 switches for the ION PUMP POWER on the evacuation operation panel to the position 6 The IP 1 IP 2 and IP 3 fail to start in Step 4 press the RESET switch for the IP 1 2 and 3 on the evacuation operation panel for a few seconds This should start the 1 IP 2 and 3
470. or both x5 and x10 v V lt 20 h H lt 20 Current Center Measuring the Normal Mode Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode Magnification 5000 Procedure Adjust the axis electromagnetic at C1 5 Measure image shifts at C1 5 1 516 Specification lt 5 um Measuring the Analysis Mode Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Probe Current mode Normal mode Magnification 5000 Procedure Adjust the axis electromagnetic at C1 5 Measure image shifts at C1 5 1 5 16 Specifications 5 um 9 8 S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual Compatibility between Normal Mode and Analysis Mode Images Conditions Accelerating voltage 5 kV Sample Height 0 0 mm Magnification 5000 Procedures 1 In the Normal and Analysis modes adjust the axis electromagnetic at 5 and adjust the image astigmatism focus respectively 2 Measure the image shift when the Normal mode is switched to the Analysis mode focus and perform astigmatism adjustments in each mode Specifications lt 10 Voltage Center Conditions Accelerating voltages 15 5 kV 30 kV Sample Height 0 0 mm Magnification 5000 Procedures 1 Perform electromagnetic alignments under accelerating voltages 15 kV 5 kV and 30 kV 2 Measure image shifts when the Accelerating voltage is changed from 15 kV to
471. or login names Confirm your input You entered incorrect password Note that capital and small letters are distinguished for login names Confirm your input The file for operation condition is not correct If this message is shown check if other application is using files of extension pm1 2 This message will be shown when you have specified the same directory as of the source files for the target directory in Batch Process Move File command Specify other directory than that of source files for the target directory This message will be shown when the input User name or login name is already used Specify other name 7 21 Software Us ificati 5 000 This is not 8 bits image file 2031 2032 2040 2041 2042 2045 to 2047 2060 2061 2062 2065 2101 2102 2105 2107 2108 2109 7 22 Cause amp Remedy e at Magnification lower than x This message will be shown when you click the Get Image The size of image exceeds the maximum resolution 2560 x 1920 Image size is not available except 640 x 480 1280 x 960 2560 x 1920 Captured images in memory areas of xxxx will be deleted Are you sure Insufficient memory space a temporary drive At least 20 MB free area is necessary for startup Insufficient memory space in a temporary drive At least 5 MB free area is necessary for executing this process Insufficient memory space in a temporary drive
472. ot execute while drive X axis Cannot execute while drive Y axis Cannot execute while drive T axis Cannot execute while drive stage by track ball Cannot execute while drive stage by panel Cannot execute while not initialize axis Cannot execute while not initialize Y axis Cannot execute while not initialize T axis Stage over run error X CCW Stage over run error X CW Stage over run error Y CCW Stage over run error Y CW Stage over run error Z CCW Stage over run error Z CW Stage over run error T CCW 1 1 Stage over run error T CW Specimen exchange position error X Allowable value SES Aon exchange position error Allowable value Time out error T axis 10 um 10 um Software Cause amp Remedy The axis position is at the limit You can drive the stage towards reverse direction The axis position is at the limit You can drive the stage towards reverse direction If it happens frequently contact a service engineer Possibly the initialization is in progress Wait for a few minutes If the message is shown even when about 10 minutes have passed shut the stage power off once and then turn it on This message will be shown when operation on the GUI and by the track ball are generated simultaneously This message will be shown when operation on the GUI and by the operation panel are generated simultaneously Initializatio
473. ov 055 20 02 a n s 11085 Saal ov j LD2 3 2A M C2 qa BUT 910 10 3k gt V SEQ E 84 R5 826 1 fe 84 asy D5SBA20 ICs 03 FUSES LT1085CT E SES afn m a E 3 2A M AD Ce NN 12 evac SEQ Pa u R7 R8 R9 GL 5PR as 055 20 5 AMP 6P TPS 10 210 4 CN6501 CN5003 04 54518 619 LT1085CT M M N L NUN IN ana 1218 3 3k 215 330 LD4 po 259 24 E R10 R1 a R12 1 gi C 10000uX3 S10VB20 TP7 105 05 FUSES LT1085CT FUSE13 2 m 3 SES 2 2 2ACT al cs IN yy OUT 910 10k a C14 3 3k 105 m 15V tz Fo Eu E 82 u RI3 R14 R15 82 82 GND S10VB20 TPO BS IC6 D6 FUSES 3 LT1085CT _ AL 5 C15 LD6 2A T C7 ous 910 10k 3 3k GND 22 9 E u x R16 17 UM FUSE T4 R18 83 B4 15 S10VB20 Y 07 10 FUSEY 3 LT1085CT 4 24V 2A T Hb OE 910 C16 Pu 20V 84 R19 R20 Lagu R21 84 GND S10VB20 120 D8 46 FUSES E E s A IN OUT m C17 a m LD8 uu 207 1 44 85 R22 R23 1004 FUSE16 R24 8 E o 24 L 510 20 10 CAD P PEES 7 E a 5 x amp ng pe EUN 2200070 T A 3459 A MOURI 2000 10 21 A N KANEOKA 2000 10 21 at ltt 2 L 7 REE AB E A 32125318704 1 K KAGEYAMA
474. overcurrent Fuse F8 1A T Heater turns off Cannot create due to fusing high vacuum All system maintenance 24V Fuse F9 1A T Entire system turns off due to fusing Relay 24V circuit short overcurrent Fuse FUSES 4 1A T Entire system turns off due to fusing PE HV power short overcurrent Fuse 20565 6 1A T Cannot apply HV Cannot turn of PE HV 2 10 S 5200 Field Emission Scanning Electron Microscope Service Manual No Location Protection Function Part Part No If Fault Detected Safety Notes 21 Stage power supply line Fuse FUSES 10 1A T Stage operation Stage control short overcurrent stops 22 EVAC 5V short overcurrent Fuse FUSE11 1A T EVACSEQ and IP turn off due to fusing 23 EVAC 24V short overcurrent Fuse FUSE12 1A T EVACSEQ and IP turn off due to fusing 24 EVAC SEQ 15V Primary side Fuse F1 3 2A T IP Pi and Pe short overcurrent vacuum display Max 25 EVAC SEQ 15V Primary side Fuse F2 3 2A T IP Pi and Pe short overcurrent vacuum display Max 26 EVAC SEQ 12V Primary side Fuse F3 3 2A T Aperture heater short overcurrent turns off 27 EVAC SEQ 15V Secondary side Fuse F9 2 0A T IP Pi and Pe short overcurrent vacuum display Max 28 EVAC SEQ 15V Secondary side Fuse F10 2 0A T IP Pi and Pe short overcurrent vacuum display Max 29 EVAC SEQ 12V
475. ox Video Form combo box Video Amp checkbox Video Printer checkbox Full Panel checkbox Part No 595 8030 Sets the signal frequency Sets the image signal type NTSC PAL Sets a video amp option Sets a video printer option Sets an operator panel option 7 15 Software Photo checkbox Sets a photograph option U BSE checkbox Sets a variable SE BSE Mix ratio option Close Closes the Option Setup screen NOTE 1 The addition of a Connective System option requires a factory supplied option disk Option disks whose serial number does not match the serial number of the system will be rejected NOTE 2 Depending on whether the Video Form is NTSC or PAL settings on the Imposer Adjust screen or Dip Switch settings may be required Refer to the section on adjustments for details NOTE 3 Some options require the re booting of the system It is good practice to re boot the system whenever a new option is set The Option Setup screen can be used only in the Standard Screen Mode Version Display The figure below shows a screen that displays program version information and option settings About SEM Hitachi 5 5200 Scanning Electron Microscope Copyright C Hitachi Ltd 1999 2000 All rights reserved Version Options Serial Number Mrs ae Operation Part Ver 1 0 3 Ideo Frinter Ver 0 0 0 Photo Control Part Figure 7 16 This screen displays Hitachi s logo an
476. pecimen chamber When introducing air into the specimen chamber such as for cleaning the objective lens aperture check to see that no liquid nitrogen is in the anti contamination trap The introduction of air into the specimen chamber with the anti contamination trap still chilled can cause fogging and deterioration of the vacuum Turn off the 8 40 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual switch wait for 20 30 minutes and then let the specimen chamber leak This is to prevent the objective lens aperture from coming into contact with hot air and becoming oxidized The alarm buzzer will sound off if the SC SEC switch on the evacuation operation panel is changed to the SC side in order to let the air in with the APT still at the ON position After Cleaning the Aperture When the HIGH lamp of S C VACUUM lights up after the evacuation has started set the OBJ APT switch to the DEGAS side wait for one hour and then set the switch to the HEAT side The purpose of this step is to maintain the aperture at a temperature higher than the normal operating temperature in order to cause any adsorbed gas to be released Aperture Cleaning Method When using the SEM at a low accelerating voltage and a high magnification e g 1 kV 20 000 or higher the aperture should be sputter coated with materi
477. pening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles When images are registered in multiple user names deleting moving or renaming the images on a user may cause troubles when opening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles This message will be shown when Printing images in Dual Screen mode When you click the No button the image on the screen specified by the Record A B buttons will be printed 11 21 Troubleshooting 3040 HV will be turned off This message will be shown when closing the program while OK HV is still ON If you click the OK button HV will be shut Off 3100 Would you save measurement This message will be shown when closing the CD data Measurement without saving measured data Click Yes and save data if it is necessary 3200 Please insert additional option Insert the option disk following the message disk 3201 Delete this option This message will be shown for confirmation Are you sure 3210 The password has been This message shows that the password has been changed successfully changed 3220 Preset count has been passed Number of cell counting was over 3502 Current Holder Type and Sample This message will be shown when applying HV Check if Height Mode are set to the the current
478. peram OND CONF_ DONE 27 aret BCLK MEE 2 5 nceo wce 3399 amp eee Tdata 2 lt 7 0 gt veer 294 Lass WORE SH vec nr 293 55 2 FT abd 101 B SEL B N Taata 100 Tdata 2 lt 2 gt aa G_SEL_A_N Por aa E R SEL B N TR SEL A Naa VV B_SEL_A_N us C w R_SEL_A_N eres airway mias FI FO WELK TR SEL B N as Eee EPF10K10ATC144 V Riza 20 SEL j N st 21 Tdata 2 0 22 23 24 o _____ _ vea o o VRT_dat a lt 7 gt 26 eee see GNDI NT Di V our mero 22 from NSTATUS TR aka NEONFIG vRT datac c Revit pien bE o VRT_data 7 0 a 5 8 95 88048 8 2 2 9 3099 22 9 H 9 4 5 65 5 5 HE gt lt 2 fia is i Alt 27 Y 57 4 Ola n lt N zi zl i zi Y 2 2 al N gt gt 4 0 no 4 9 j V Zi 41447 Es lt d U z 240 8 u J lt Ht URUT 4 025 4 4 i i aM Ay A im s il iV v Y 5 54 S Tdata 2 7 4 13 o gt 2 0 0 20 ane c 1 lt 3 2 0 gt 2 40 58 gt
479. pling Invert Bandwidth Position Offset ort ull 0 000 1X DC off Full 200v soomdiv 0 000 SETUP Coupling DC a Little phase margin b Adequate phase margin Figure 5 15 Phase Adjustment between Sync Signals and Clocks Table 5 12 shows the signals to be checked and the places where adjustments are to be made Table 5 12 Phase Adjustments Signal to be Checked Adjustment Location Remarks Signal 1 Signal 2 Adjustment Window H TP1 LD CLK TP2 sync UPU phase Porn miar be V sync TP15 satisfied H sync TP1 Count CLK TP3 yne TP Glock phase Both H and V must be V sync TP12 satisfied After adjusting the phases re adjust the offset values in the adjustment window so that the display area will match the display frame of the SEM Adjust the Window Offset value of the adjustment window between 2 and 2 so that the gap between the SEM display area and the area indicated by the imposer will be at minimum Check the result by moving the screen from the left to the center and to the right Save the adjusted values Part No 595 8030 5 23 Electric Theory Phase Adjustment of GUI Video Signals and Video Switch Signals 5 24 As a quick method coarse adjustment use the SEM data entry function to enter white vertical lines and characters at any position on the image and perform phase adjustments of the video and switch signals so that the characters
480. power is on Software Cause amp Remedy This message will be shown when temperature of the objective lens coil exceeds specified value or cooling water flow value is not enough If the message is shown frequently contact a service engineer This message will be shown when the message code 7200 or 7201 has appeared and the temperature has recovered to normal value You may continue operation If message code 7200 or 7201 is shown frequently contact a service engineer This message will be shown when specifying the Sample Height that exceeds allowed value at the present accelerating voltage Use allowed Sample Height mode This message will be shown when specifying the accelerating voltage that exceeds allowed value at the present Sample Height Use allowed accelerating voltage The S 5200 system uses a microprocessor for controlling the hardware The microprocessor is linked with PC using Ethernet The message Host and SEM Controller are not communicating Confirm that power is on shows that there has been some failure on the initial connection of this Ethernet If this message appears click OK button on this message dialog and turn EO CONTROL switch off Then turn this switch on again and start S 5200 program If the error message appears again and your SEM is using a motorized stage check if the power switch of the stage controller is turned on 7 29 Software This page intentionally left blank 7 30 5 520
481. ppeared and the temperature has recovered to normal value You may continue operation If message code 7200 or 7201 is shown frequently contact a service engineer This message will be shown when specifying the Sample Height that exceeds allowed value at the present accelerating voltage Use allowed Sample Height mode This message will be shown when specifying the accelerating voltage that exceeds allowed value at the present Sample Height Use allowed accelerating voltage The S 5200 system uses a microprocessor for controlling the hardware The microprocessor is linked with PC using Ethernet The message Host and SEM Controller are not communicating Confirm that power is on shows that there has been some failure on the initial connection of this Ethernet If this message appears click OK button on this message dialog and turn EO CONTROL switch off Then turn this switch on again and start S 5200 program If the error message appears again and your SEM is using motorized stage check if the power switch of the stage controller is turned on S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 5 Setting the PC Environment Creating the File The S 5200 program file and the directory structure for files to be used and created are shown below Program Files The following files exist in the directory c Program Files PC_SEM This directory holds programs that pertain to PC operations PC_SEM e
482. puter Name to S 5200 Click on OK Identification Changes Eso 2 7 7071 tie You Cite ean 228577070 5 When Network Configuration appears click on OK Network Configuration 6 Network window select the Identification tab and click on Change 7 Change Workgroup to PCSEM Click on OK 11 36 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual Identification Changes 27657707 8 When Network Configuration appears click OK Network Configuration Q ae 9 Onthe Network window select the Protocols and click on Add Part No 595 8030 11 37 Troubleshooting Y NWLink IPX SPX Compatible Transport Y NwLink NetBIOS 10 When the Select Network Protocols window appears select TCP IP protocol Click on OK Select Network Protocol Y NetBEUI Protocol Y NWLink IPX SPX Compatible Transport Y Point To Point Tunneling Protocol J Streams Environment 11 When If there is a DHCP server on your network appears click on No 11 38 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual
483. r of written items Number of texts or graphics exceeds allowable number exceed the maximum Carry out Delete some of texts or graphics to add new one Combine Or once execute combine command and save the image to add new data in the image The number of written items Number of texts or graphics exceeds allowable number exceeds the maximum Delete some of texts or graphics to add new one More items cannot be input Number of tool buttons is out of Not all buttons are able to be placed in the toolbar range Please delete less Select buttons you will use frequently important buttons Invalid file name The file name possibly includes characters not allowed 2 lt gt File name is too long Up to 255 Use file name shorter than 255 characters including folder characters are acceptable for a name and extension file name including folder name Invalid User name The User name possibly includes characters not allowed 537 2 lt gt User is too long Up to 64 Use User name shorter than 64 characters characters are acceptable Invalid Sample name The Sample name possibly includes characters not allowed 2 lt gt Sample is too long Upto Use Sample name shorter than 40 characters 40 characters are acceptable Invalid Keyword The Keyword possibly includes characters not allowed 5 2 lt gt Keyword is too long Up to 20 Use Keyword shorter than 20 characters
484. ram 1 Ethernet cable ECPU board CN157 IMP board x PHOTO2 board PHOTO1 board enue aS 0009 5 93 BAKE board CN123 EVAC SEQ board 98 EM SW CN169 EVAC SEQ board OUTER BAKE BAKE board CN26 SG VA board DRY PUMP CN53 DEF LENS board 16 DEF LENS board BAKE board TMP Image 72 CN161 SEQ memory COL CN board board board IN I CN6501 XY CONT N A board Trackball CN5003 TILT CN8 N CN5002 IO board ue CN6507 board XY CONT board Coolant OUT DC PS board Coolant IN PC DEF board CN63 SG VA board CN17 DEF LENS board CN53 DC PS board CN122 EVAC SEQ board CN163 DEF LENS board Figure 3 5 S 5200 Block Diagram 2 5200 Installation Service Manual 3 3 3 Display Modification For 52 Unit The procedure to modify a standard display Figure 3 6 to a S2 display Figure 3 7 is shown below 1 Sao 9 d Remove the screws 4 ea secured the display section and the PC storage section Pull the PC storage section forward Remove the left side cover from the PC storage section and install it by rotating it 180 Secure the display section and the PC storage section using the screws removed in step 1 Secure the table ext
485. rd was read 2 Numeric Long 3 Numeric Long 4 ApertureX Numeric Long 5 ApertureY Numeric Long 6 StigmaXX Numeric Long 7 StigmaXY Numeric Long 8 StigmaYX Numeric Long 9 StigmaYY Numeric Long 10 LowMagPositionX Numeric Long 11 LowMagPositionY Numeric Long 2 Emission Table In this table each record consists of 3 fields Field Data Type Meaning 1 Date Date time Record creation date Date the record was read 2 EmissionCurrent Numeric Long Emission current value uA microamperes 3 Vtext Numeric Long Extraction voltage V In graphs the emission currents are plotted as value x 0 1 For example the value 110 means 11 0 pA In graphs the extraction voltages are plotted as value x 0 001 For example the value 4359 means 4 359 Part No 595 8030 8 35 System Operation 3 Error Table In this table each record consists of 2 fields Field Data Type Meaning 1 Date Date time Record creation date Date the record was read 2 Code Numeric Long Generated code Although the table name is Error because all codes generated other than 0000 are loaded a given code does not necessarily mean an error 4 Etc Table In this table each record consists of 3 fields Field Data Type Meaning 1 Date Date time Record creation date Date the record was read 2 Command Text 3 Parameters Text Comman
486. re Figure 6 8 shows a cross sectional diagram of the ExB coil unit H feces T i us Electrode Electrode Figure 6 8 ExB Coil Unit Cross sectional Diagram 6 7 Part No 595 8030 Mechanical Configuration 6 2 7 Beam Monitor Aperture Unit Structure The aperture plate is a molybdenum plate that is 101m thick with the following hole diameters 0 1 mm 0 1 mm 0 1 mm and 0 1 mm The aperture unit can be moved horizontally through the use of a tuning knob for an axial and electro optical alignment Figure 6 9 shows a cross sectional diagram of the beam monitor aperture unit Aperture position 7 559 knob Aperture position Y axis selection knob Aperture plate Aperture position adjustment knob X axis Figure 6 9 Beam Monitor Aperture Unit Cross sectional Diagram 6 8 S 5200 Field Emission Scanning Electron Microscope Mechanical Configuration Service Manual 6 2 8 Movable Objective Aperture Unit Structure The aperture plate is a molybdenum plate that 15 10um thick with the following hole diameters 30 um 50 um 50 um and 100 um The aperture unit can be moved horizontally through the use of a tuning knob for an axial and electro optical alignment Figure 6 10 shows a cross sectional diagram of the movable objective aperture unit Aperture position lt adjustment knob Aperture plates Bellows Aperture position selection knobs Terminal BNC
487. reset _ Duda DauB H Stat Orisa 17 2 m Dapa H inpar Stan Figure 9 2 Imposer Adjustment Screen S 5200 Field Emission Scanning Electron Microscope Adjustments Service Manual 4 Ifthe noise extends to the vertical edge of the display area when the PLL division ratio is changed turn the Clock Phase Invert and IP Clock Phase Invert checkboxes inside the adjustment window on and off Confirm the waveform Fix the phase adjustment so that the fall edges of V sync and H sync and the rise edge of are not close to each other Figure 9 3 shows the phases of the H sync fall edge and the Clk rise edge In a the Clock Phase Invert is turned ON because of an inadequate amount of available margin Stop HH stop i i Chl Coupling i Chl Coupling 5 2 8 amp Impedance i i i i M QR Impedance Dc i Dc GND GND m S 200mv Ch2 2 00 v i O 200mv 2 00 v Ref3 100 40095 i 49 60 1M 50 100 400us 149 60 4 1M 50 Coupling Invert Bandwidth Position Offset plone Coupling Invert Bandwidth Ae ae Position Offset pone DC off ul div s00mdiv 0 000 V DC off Full div 300mdiv 0 000 No margin b Adequate margin Figure 9 3 Phase Adjustment between Synchronization Signals and Clocks Table 9 1 shows the signals to be checked and the places where adjustments are
488. rform adjustments only on the affected part Setting the flashing intensity Confirming the EO Adjustment default value Entering current values for the and C2 lenses Adjusting the offset between deflection magnification ranges Adjusting ExB Adjusting the position in which the electronic gun is to be mounted mechanical Adjusting the axes and registering axis correction values Adjusting the orthogonality Coarse adjustment of scanning amplitudes HM LM modes Adjusting the deflection top bottom row ratio Adjusting the low magnification distortion adjusting peripheral blurring normally confirmation only Checking the Focus Comp condition Adjusting the Focus Comp normally confirmation only Adjusting the HM mode reference magnification second range Adjusting the magnification between HM mode ranges Adjusting the LM mode magnification Adjusting the image shift top bottom row ratio Correcting the image shift axis Adjusting the maximum image shift value Adjusting the HM mode image rotation Adjusting the LM mode image rotation Correcting for TV distortion Correcting out of axis color aberration ExB 3 correction Part No 595 8030 9 31 Adjustments Setting the Flashing Intensity Regarding flashing intensity values 1 2 and 3 adjust the trimmer see below for HV tank PC HVC board so that the emission display during the flashing will show the following values lt Emission Display Specifications at Flashing gt I
489. rk Do not use a file that may be infected with a virus If the file may cause the PC to be infected with a virus run the virus check program The users of the instrument are responsible for obtaining the virus check program and removing computer viruses However some virus check programs may not remove the virus Make sure to back up the hard disk beforehand Computer Setting Change The settings described below are applied to the PC in this instrument in order to run the S 5200 program Do not change these settings 2 24 Network Setup In the S 5200 the user interface PC and the SEM control processor are connected using Ethernet The SEM controller gets the SEM control program from the PC when the computer is logged on Therefore if the network connection is changed the instrument will not start Display Setup The S 5200 comes with the imposer to display the SEM image The 1024 x 768 pixels 65536 or more colors and 75 Hz Refresh Rate are selected to operate this imposer correctly If these settings are changed the image may be distorted Task Setup for SEM In the S 5200 an FTP server program starts automatically to transfer the files between the PC and the SEM when the computer is logged on If the setup is changed or stopped the S 5200 will not operate properly Power Management Setup Set Energy Save to OFF for the PC power management If Energy Save is set to ON the commands between the PC and the SEM may be interrupted
490. rom the Home Position to the specimen exchange position and be exchanged smoothly Part No 595 8030 10 17 Maintenance No ltem Operation Check Mechanical axis adjustment Check that the electron gun and condenser lenses first and second can be aligned smoothly Result Must be able to align smoothly Safety device At power failure all valves must close When the vacuum has degraded the protection circuit must turn off the HV circuit When water flow is interrupted the HV circuit must be turned off If the specimen holder is not inserted in the specimen chamber HV cannot be applied When the compressed air pressure drops below 250 kPa all valves must close Must operate normally Miscellaneous The dry pumps and compressor must be free from abnormal sounds The objective lens cooling water must not leak Any problems must not be found 10 18 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 Troubleshooting 11 1 Overview of Troubleshooting The S 5200 SEM is comprised of complex mechanisms and electrical circuits which can create unexpected problems Troubleshooting should be performed according to the safety information provided in Chapter 2 11 2 Fault Diagnostics 11 2 1 Dry Pump Table 11 1 shows a list of dry pump self test items Table 11 1 Dry Pump Fault Diagnostic Items Symptom Cause Action Pump won t run Pow
491. rt Part No Fault Detected Notes Leakage detection Leakage detector ELB 50 Circuit breaker SEM POWER1 opens Leakage detection Leakage detector ELB 30A Circuit breaker SEM POWER2 opens Emergency stop Switch EM SWITCH Circuit breaker opens lon pump HV protection Switch IP COVER INTERLOCK Outer bake heater short overcurrent Overcurrent IELH 20A Circuit breaker detector trips turning off the heater Display short overcurrent Overcurrent IELH 20A Circuit breaker detector trips turning off the display Stage short overcurrent Overcurrent IELH 5A Stage operation detector stops TMP short overcurrent Overcurrent IELH 5A TMP operation Cannot create detector stops high vacuum in evacuation system Compressor short overcurrent Overcurrent IELH 5A Evacuation valve Buzzer sounds detector stops ACC short overcurrent Overcurrent IELH 5A For ACC Optional detector DP short overcurrent Overcurrent IELH 10A Evacuation detector system stops Relay 24V circuit short overcurrent Fuse 1 1 Entire system turns off due to fusing Entire system hold 100V AC Fuse F2 1A T Relay turns off except 24V due to fusing Evacuation system self hold Fuse F3 1A T Evacuation 100V AC system except DP turns off due to fusing EVAC PS primary side Fuse 24 5 1A T EVACSEQ and short overcurrent IP turn off due to fusing IP PS primary side short overcurrent Fuse F6 7 1A T IP turns off Cannot turn on IP power Inner bake heater short
492. rties Windows q lt q 24 Move the mouse cursor to the background Right click the mouse Select Properties from the menu 25 On Display Properties select the Background tab and set Pattern Wallpaper to None Part No 595 8030 11 53 Troubleshooting Display Properties Background Screen Saver Appearance Plus Settings Pattern Wallpaper 50 Gray Boxes Critters Diamonds 2 Browse folie 6 enter 26 Select Start Shut Down Select Close all programs log on as a different user and click on Yes Compaq Information Center gt 5 hut D own Windows Ed Programs Rall Are you sure you want to Documents Edy sen Shut down the computer Restart the computer Help Es m 0 ce x 11 54 5 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 6 10 Setting the Hyper Terminal 1 When Begin Logon appears press the Ctrl Alt Del keys 2 Type the user name Administrator the password none and click on OK 3 Click on X on the Control Panel window E Control Panel ae B 6 m Accessibility Add Remove Console Date Time Devices Display Lupe Frograms a P 8 Fonts Intel R Internet Keyboard Matrox Display Modems PROSet Properties 4 Open Start Programs Accessories
493. ry files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified Please input file name Input a file name and then click the Save Button Please input user name Input or select a user name and then click the Save button Auto increment counter has reached 99 Please use another file name Please input comment File name is duplicated File name is too long Quick saving allows up to 99 files for a name Use another file name CD Measurement option Calibration Input a comment before clicking the Apply button This message will be shown when you have specified a file name already used Use other name Up to 255 characters are acceptable for a file name including drive name folder name and extension S 5200 Field Emission Scanning Electron Microscope Software Service Manual Error Code 2110 2120 2121 2130 2140 2141 2142 2143 2144 2145 2146 2147 2149 2200 2202 3001 3002 3003 Part No 595 8030 User table is not empty Delete To delete a user name image lists in the user table shall be all lists or images by using empty Use Batch Process Remove List command removes Remove List Command or database list only or Delete Image command deletes Delete Image Command before images deleting User table A numbe
494. s Accelerating voltage 5 kV Emission 10 pA Probe Current mode Normal Magnification mode HM LM modes Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm Image shift Mid point the reset condition R R Off 1 Set the magnification mode to the HM mode Sample Height 0 0 mm 2 Onthe EO Adjustment 1 screen click on Off for Completely turn off the Raster rotation 3 J Adjust the image Align the specimen rotation angle using the adjustment rotation holder so that the mesh line on Slow 2 matches the horizontal line on the CRT If there is a significant image distortion or blurring on the periphery to an extent that impairs the adjustment process perform the procedure Adjusting the Deflection Top Bottom Row Ratio using the current adjustment conditions 4 Select Too Debug Menu Measure to display the length measurement cursor Use this cursor as a reference line for the determination of orthogonality 5 Set the magnification to 2 0 first range Adjust the following trimmer so that the horizontal and vertical mesh lines are parallel to the horizontal and vertical lines of the length measurement cursor SGVA board VR1 HM Adjustment Specifications an orthogonality of 0 5 maximum at the adjustment point 6 Setthe magnification mode to the LM mode 7 Adjust the image Align the specimen rotation angle using the adjustment rotation holder so that the mesh line on Slow 2 matches the horizo
495. s refer to the Reset Reference 13 TMP setting combo box TMP settings can be changed according to the specifications on the system These settings saved in the Ras ini file 3 are used as default values when RAS is started next time 14 Dry Pump setting combo box Dry Pump settings can be changed according to the specifications on the system These setting saved in the Ras ini file as described above are used as default values when RAS is started next time 15 Text box The text box is used to display the processing status and various messages 16 Close button This button closes the RAS function 8 34 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual D About the Database File Ras mdb This section provides a detailed explanation of the database file Ras mdb c Program Files Pc sem Ras mdb that is created by SEM The database file consists of six tables 1 Alignment table maximum of 1 000 records 2 Emission table maximum of 3 000 records 3 Error table maximum of 2 000 records 4 Etc table maximum of 3 000 records 5 Evacation table maximum of 1 000 records 6 WorkCondition table maximum of 500 records NOTE This file cannot exist unless the SEM exe program is started A table by table description follows 1 Alignment Table In this table each record consists of 11 fields Field Data Type Meaning 1 Date Date time Record creation date Date the reco
496. s For handing the vacuum parts L474074 Air filter To open and close the valve 45891500 Cooling water filter To cool off DP OBJ 10 6 Operation Check after the Periodic Maintenance The operation check Items after the periodic maintenance are shown in Table 10 6 Table 10 6 Operation Check Items after the Periodic Maintenance No Item Operation Check Result 1 Image quality Set the accelerating voltage to 1 kV or 30 kV and No distortion must be the magnification to be more than the customer s present actual use and check the image quality 2 Evacuation system e Vacuum Measure vacuum for the electron gun first Electron gun intermediate and second intermediate chambers 1x 10 Pa or less with a vacuum meter 1st intermediate chamber 2 x 10 Pa or less 2nd intermediate chamber 1x 107 or less Evacuation speed Measure the duration from when the specimen Must be 1 minute or less is exchanged to when the high voltage can be applied Evacuation sequence Check that high vacuum can be obtained Must operate normally 3 Each section Movable aperture operation check Shift the objective movable aperture and beam monitor aperture from No 0 to No 4 and check that they can move smoothly Must be able to change between 4 positions smoothly Specimen exchange Check that the specimen can be moved from the Home Position to the specimen exchange positions Also check that the specimen can be exchanged smoothly Must move f
497. s also true of other magnification range adjustments Adjusting the Second Range 1 Select 1 kV Acceleration and set the magnification to 7 0 minimum magnification for the second range Click on Mag Range 2 in Scan U L Ratio on the EO Adjustment 2 screen As in first range adjustment procedures 4 7 adjust the deflection top bottom row ratio for the second range Adjusting the Third Range At 1 kV Acceleration set the magnification to 70 k third range no image adjustments required Click on Mag Range 3 in Scan U L Ratio on the EO Adjustment 2 screen Enter from the keyboard the top bottom row ratio adjustment value the registered value for Mag Range 2 for the second range on the display window for Mag Range 3 Click on Set Adjusting the Fourth Range 1 2 3 Set the magnification to 700 k fourth range no image adjustments required Click on Mag Range 4 in Scan U L Ratio on the EO Adjustment 2 screen Enter from the keyboard the top bottom row ratio adjustment value the registered value for Mag Range 2 for the second range on the display window for Mag Range 4 Click on Set Saving the Adjustment Conditions Upon completion of the deflection top bottom row ratio adjustments for the magnification ranges click on Save and None in that order Adjustment Specifications The image distortion should be the same as the limit sample If these adjustments fail to satisfy the distortion limit sample specifi
498. s are on HIGH lamp for S C VACUUM and S E C VACUUMI is on e AUTO lamp for GUN VALVE is flashing HIGH lamp for S C VACUUM and S E C VACUUM is on e The AUTO lamp for VALVE is flashing The OBJ APT switch is at the position When the objective lens aperture becomes contaminated due to an electron beam irradiation the resulting electrical charge can generate an irregular electric field with a reduction in image quality and an image drift due to micro electric discharges This phenomenon is especially pronounced at low accelerating voltages The amount of contamination can be reduced by more than one order of magnitude by heating the aperture to approximately 150 C lt Normal operating method gt The switch on the evacuation operation panel should always be set to the HEAT position If the evacuation power supply POWER is 1 the heating continues even if the display power DISPLAY POWER is turned OFF 0 The switch should be set to the OFF side only when introducing the atmosphere into the specimen chamber An image drift can occur for 30 minutes after the switch is changed from the OFF side to the HEAT side lt Maintenance operation gt Introducing air into the s
499. s caused by momentary voltage reductions Personal Computer PC Do not disconnect the power to the PC independently Make sure to turn OFF the power with the display power DISPLAY switch after the SEM system program is closed and the Windows NT program is shutdown If the PC is powered off while the HD or FD is being accessed the stored data and software may be damaged If the PC freezes press and Delete simultaneously and select the process that has stopped and then select Close Part No 595 8030 2 25 Safety This page intentionally left blank 2 26 S 5200 Field Emission Scanning Electron Microscope Installation Service Manual 3 Installation 3 1 Installation Requirements 3 1 1 General Requirements Installation Site When installing the Model S 5200 the SEM room should not be neara transformer substation e near an elevator near high power equipment such as an electric furnace or its power supply e near a spark discharge device or a high frequency apparatus e filed with gas that corrodes metals exposed to direct sunlight or a strong draft dusty subjected to severe vibrations supplied with a ground wire common to other electric equipment adjacent to radio or sound wave sources 3 1 2 Power Source Alternating single phase 100V AC Order an autotransformer when the voltage is other than 100V Voltage fluctuation 10 Frequency 50 or 60 Hz Energy
500. scram Cose Magnet 1l Disassemble Anode cylinder NOTE Remove the O ring from the cathode assy Using a bamboo stick to avoid scratching it These parts become dirty Glass NOTE Boil the cathode assy and the anode cylinder for 10 to 15 minutes Leave them in the air for about 10 minutes and clean them by rubbing with cotton moistened with cold water Cleaning Assembling Cathode NOTE Attach the cathode without touching the anode Cross Sectional View 10 12 S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual 10 3 5 Objective Movable Aperture Replacing the Objective Movable Aperture SOP 290 Re ques ps gt 11 Set the specimen chamber to atmospheric pressure Remove the flange by loosening the fixed screws 4 ea Pull out the objective movable aperture straight while supporting the flange Remove the aperture holder screw using a jeweler s screw driver Remove the aperture holder with tweezers Remove the objective aperture plate from the aperture board with tweezers Clean the aperture holder and aperture board Put the aperture plate on the aperture board after baking or coating Put the aperture holder on the plate and tighten the aperture holder screw Insert the objective aperture section straight into the flange and tighten the flange screws 4 ea Evacuate the specimen chamber Cleaning the Objective Aperture Plate 1 U
501. screen appears press the Ctrl Alt Del keys Log on by entering the user name Administrator the password none and clicking on OK Internet Explorer is installed S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 6 5 Screen Settings 1 When Begin Logon appears press the Ctrl Alt Del keys 2 Logon by entering the user name Administrator the password and clicking on OK 3 When Internet Explorer appears uncheck Show this next time you log in and click on Close 7 Welcome Microsoft Internet Explorer Ix Lare a P a Quick Tour Channels to Win Show this next time you log in 4 Move the mouse cursor to the background Right click the mouse Select Properties from the menu 5 On Display Properties select the Background tag and set Pattern Wallpaper to None Background Screen Saver Appearance Plus Settings Pattern Wallpaper Arrange Icons gt Line up Icons Diamonds 21 Edit Patten Browse Haste Aste Shorteut Display 6 Center New Properties Cancel Apply 595 8030 11 33 Troubleshooting 6 Display Properties set Settings to 16777216 Colors Small Font 1024 x 768 75 Hertz Click on OK Display Properties x Background Screen Saver Appearance Plus Settings Color Palet
502. se the evaporator for baking an aperture plate Refer to the instruction manual comes with the evaporator for handling of the evaporator Attach the molybdenum in the evaporator Establish a high vacuum in the evaporator and bake the molybdenum board only Increase the current until the molybdenum is white hot Be careful not to apply too much current because the molybdenum board may fuse Wait ten minutes after baking and put air into the evaporator Put the objective aperture plate on the center of the molybdenum board Establish a high vacuum in the evaporator heat the molybdenum board until it is white hot and bake the objective aperture plate Be careful not to continuously apply a high current because the objective aperture will melt Wait ten minutes after baking and put air into the evaporator Take out the objective aperture plate with tweezers Coat the baked objective aperture plate on both sides 10 to 20 nm thick with platinum palladium Pt Pd using an ion coater Part No 595 8030 10 13 Maintenance 10 3 6 Scintillator Replacement Precautions e Make sure to turn off the DISPLAY switch when scintillator is being replaced e Do not touch the surface of the scintillator e Wear plastic gloves when assembling the parts inside the vacuum Do not touch the parts with bare hands Scintillator Replacement Procedure Establish the specimen chamber to atmospheric pressure Remove the flange by loosing the screws 4 ea
503. shaft adjustment of the electron gun under C1 C2 Off objective aperture Off conditions Perform a Beam AL mechanical shaft adjustment of the C1 lens by setting C1 5 By setting the BM aperture to 1 400 um diameter perform an aperture Beam AL mechanical shaft adjustment By setting the objective lens aperture to No 1 100 diameter perform an aperture Beam AL mechanical shaft adjustment By setting C2 On perform Apert AL mechanical adjustment coarse adjustment acceptable NOTE When adjusting ExB always use an accelerating voltage of 0 8 kV Setting ExB l 259 7 8 In the LM mode perform focus and stigmator adjustments ExB off NOTE When the EO Adjustment 1 screen is closed ExB will be on In this case re open the EO Adjustment 1 screen and reset to off Move the stage and move the mark to the center of the CRT using the crossbar cursor Turn on the ExB on the EO Adjustment 1 screen Click on ExB adjustment item Adjust the alignment knob so that the mark in step 2 will be at the center of the CRT If the image shifts extensively when ExB is turned on and off perform a coarse adjustment at a low magnification increase the magnification to 1 0 k LM mode turn the ExB on and off again and perform adjustments so that the amount of image shift will be at a minimum After the adjustment turn the ExB ON EXB Adjustment Specifications When the ExB is turned on and
504. shown in Table 10 4 Table 10 4 Recommended Maintenance Parts List Part Number Part Name Location Notes 589 3565 Scintillator Upper detector 3 years K433004 Pirani gauge ball Evacuation system 3 years J386042 Optical electron image multiplier Secondary electron detector 5 years Photomultiplier R6249 580 4289 Tip Electron gun 2 years Vinyl hose for cooling water Evacuation system Objective lens 5 years Evacuation rubber tube Evacuation system 5 years PC monitor PC 3 years Hard disk PC 3 years Keyboard PC 3 years Mouse PC 3 years NOTE Life expectancy not guaranteed 10 5 3 Consumables List The consumables list is shown in Table 10 5 Table 10 5 Consumables List Part No Part Use Notes G370009 Conductive coating To protect nonconductive specimen 30 g pack from ionizing radiation G370250 Metal abrasive For cleaning vacuum parts 50 g pack G743002 Bamboo stick For cleaning vacuum parts 10 ea pack 5370061 Cotton For cleaning vacuum parts 5370057 Gauze For cleaning vacuum parts 5269003 Aluminum foil For cleaning vacuum parts 585 4267 Vacuum grease in tube For sealing hermetically fixed part 10 16 S 5200 Field Emission Scanning Electron Microscope Maintenance Service Manual Part No Part Use Notes 537 2320 Objective lens aperture plate 0 03 0 05 0 1 mm dia Acetone For cleaning 533 1337 Molybdenum board For aperture plate baking 263001 Polyethylene glove
505. sie Princip lg ui iiia te t pere 4 7 4 2 3 Power Supply Unit Basic Principals aoaaa sana qhu esee eee aap entente sentent 4 7 5 100 0 3 ST TL Yu u i smua isuu tw 5 1 5 1 SYSTEM ILLUSTRATIONS ani l a eit Pete 5 1 5 1 1 Uniti 5 1 5 1 2 Man Gag Le GOT TOC 5 2 5 1 3 Display Units esten eto E Rep ate ee 5 3 52 AC POWER WIRING DIAGRAMS AND FUSES EE 5 3 5 2 1 Power Supply cud teet ree ta ee Peer 5 3 5 2 2 Display Unito sse St tette esee ate et e 5 5 5 3 PC POWER SUPPLY SYSTEMS rit eoo saute eee tru eye ER ERR de EHE DERE ds 5 7 5 3 1 Power Supply Unit is We ee LC gas 5 7 5 3 2 Display Unit as tee e vd e ala en e 5 7 5 4 DEENS SYSTEM te eat io ote onde tae Poner Pone YE dU 5 8 5 4 1 functional Descriptions niece teet eee to e ee ete 5 8 5 4 2 BLOCK Diagram TREE 5 9 5 5 ECPU247 AND IMAGE MEMORY 5 13 5 5 1 ECPU247 Block Diagram iet eee E EE E EA E EA AE 5 13 5 5 2 Image Memory Block Diagram eni E EE EEE 5 13 5 5 3 ECPU247 Board CPU B
506. stant hose Connect the main unit to the compressed air equipment using the attached pressure resistant tube Turn ON the power on the breaker panel Soo Turn ON the breakers on the common power unit 10 Turn ON the power of the ion pump to evacuate the electron gun section Wait until the vacuum of the ion pump reaches to 1 x 10 Pa or less and perform electron gun baking See Figure 10 1 Part No 595 8030 3 9 Installation 11 12 Turn ON the EVAC SW to evacuate Turn ON the Display SW and check that the instrument operates normally CE and 2 Units Compressor and dry pump to be obtained locally 3 10 1 12 13 Remove the TMP retaining board attached to the main unit the anti vibration rubber retaining bolt and its spacer Connect the cables and the connector to the common power unit the main unit and the display unit according to the S 5200 Block Diagrams 1 and 2 Figures 3 4 and 3 5 Connect the dry pump power cable according to the dry pump installation manual Connect the dry pump to the main unit using the vacuum rubber hose and clamp Check the power and grounding and connect the power source and grounding conductor Verify that the autotransformer primary side connection in the power unit is applicable to the service power voltage Connect the main unit to the cooling water device using the attached coolant resistant hose Connect the compressor power cable according to the compressor ins
507. stment of the zero center should be re checked The position of the zero center can be shifted by eucentric adjustments If the zero center position becomes mis aligned it should be re adjusted 1 2 3 Turn off the image shift option After performing image adjustments in the HM mode set the magnification to the lowest power Using the trackball align the target on the specimen to the center of the Scanning Image window SEM screen Adjust the image in the LM mode Use the Low Mag Position function of the Alignment window to bring the target in Step above to the center of the Scanning Image window SEM screen Press the Stage Reset switch on the evacuation panel to set the stage coordinates X and Y to 0 000 0 000 Set the magnification to the lowest power Perform micro adjustments X Y mechanism of the specimen so that the center of the rotation holder will be at the center of the SEM screen Part No 595 8030 9 25 Adjustments Adjusting the Center of the Specimen Micro motion Tilt Axis Eucentric Position 1 Loosen the four specimen screws to an extent that does not cause a vacuum leak 2 Seta 1300 magnification rate Move the target specimen to the center of the Scanning Image window SEM screen Use the Area Maker to display the center 3 Turn the tilt drive mechanism counterclockwise Release the Tilt gear so that manual tilt adjustments can be made 4 Manually tilt the image Using the Z axis knob
508. sufficient memory space temporary drive At least 10 MB free area is necessary for executing this process Free space in temporary drive is 30 MB or less System may become unstable Please quit S 5200 program and free up the disk space button at a higher magnification than x5 000 This message will be shown when operations such as auto focusing did not end within specified period If it happens frequently contact a service engineer Some commands in the SEM Data Manager handle 8 bit gray scale images only Some commands in the SEM Data Manager handle maximum of 2560 x 1920 pixels Image transfer to Scanning Image window and photo replay support the three image sizes shown in the message only Image transfer to Scanning Image window and photo replay use image memory for storing captured image This message is shown when the necessary area is not empty If you need the captured images in specified areas click No button and save these images And then use the image transfer or photo replay command This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for the process to be executed Delete unnecessary files and keep more space than specified This message will be shown when vacant area of the hard disk is not enough for t
509. sy g 020 FROM DCPS CN55 Al 15V L PM EXB3XH 377 C55 25v 22 1004 R90 9 184 EXB 3 10k 3 EXB3 E 10 10 18V L COL 18V_COL 82 549 18V_COL Xm C56 25V 1 22 100 r1 R88 682 AS GND_COL 77 2 5 3 18v_COL 20 10k 657 25 100 R87 i 42 Ores R89 652 AL EXB 3 x_S BS 1 10k ah R9 GND_COL 0 1u EXB3 REPE TAV ESN 12 d 8 NAA 1 10V 10V css 27 25 10 100u 18V COL GND_COL 77 Icg 2 Ne I GND_COL 777 Icg gt 5 gt He ZZ c59 16 47u SNOW SOL 18V COL OF Ores u 754 18V_COL oo EXB3YH GND_VA 77 R124 GND_COL 6 10 10 FROM DEF LENS 165 18V_COL 18V_COL RA c R121 R123 0 1u Q4 EXB1 ON L EXB1 OFF 20k 10k 5 87 R120 10k R122 C43 A2 EXB 3 Y_S ae 10k NER R125 GND COL 1u POST ON L POST ON EXB3 REF 5V 5V gt 10k EXB3 E 10V 10V 2 FIM Wee 2 GND_COL mee 15V R GND_COL EXB3YL 56 22 25v 47 18V COL 18V COL GND_R VSE2 ON L 84 VSE1 ON L 5 VSE_SEL L 200V 85 TP VSEI CN81 5 1 5 2 EXBI S EXB BIAS REF 0 10 B6 VSE1 1 VSE 07 200V 4100V Ne DuPont 50V 200V EXB 3 X S EXB3 REF 5 5 TP VSE2 87 7 7 9 GND_COL R127 B VSE2 3 VSE2 15k GND_COL GND_LOGIC 50V 25 DuPont 200V 18V_COL 418V COL vsEi REF 97 10 4 0 1 9 TOT aI EXB1 L H_N 77 126 2910 a GND
510. t Whereas in the conventional system S 5000 the installation of a bright field aperture for transmission electron image STEM image observations restricted the available specimen tilt angle to 15 The S 5200 does not require such restrictions due to a bright field aperture Improved Vibration Tolerance Through the adoption of a high performance internal anti vibration mount and an improvement in the column structure the S 5200 offers a threefold improvement in tolerance to floor vibrations Figure 1 9 shows the allowable floor vibration amplitude for the guaranteed resolution magnification 600 000 of the S 5200 Taleranee s5200 Tolerance for 5 5000 0 1 2 3 4 5 6 7 8 8 10 Frequency Hz Figure 1 9 Floor Vibration Tolerance of the S 5200 Horizontal Vibrations Part No 595 8030 1 7 Introduction Achieving both the High resolution Mode and the EDX Analysis Mode without requiring the Switching of Aperture Holes Whereas the conventional system S 5000 required the switching of aperture holes each time high resolution observations and EDX analyses were repeated which required the mechanical axis adjustment of the aperture the S 5200 as in the case of the S 4700 you can switch the high resolution observation mode to the analysis mode that requires a large probe current simply by operating the mouse without touching the aperture which e
511. t 3 gt VEVA D A MPUA lt 2 gt cc MPUACS 640 B MPUAC TS vece MPUD lt 0 gt 18478 gt zal 2 MPUA lt 0 gt Ww MPUA lt O gt MPUD 1 170468 sa 3 MPUAC 1 gt 760458 sa 4 MPUA lt 2 gt N A MPUD lt 2 gt 15048 4A CS MPUAC 3 gt s MPUD lt T4458 sa 6 MPUAC4 gt MPUD lt 37428 2A 7 MPUA 5 2418 a oA 9 524 Q E DIR FRC5 26P 25 Q oy MPUACS 0 L 4 TP28 XCLK P 37922 H v XDATA P M PFSELZ N PFSELT N PFSELO N M HADR lt O gt 2 HADR lt 1 gt 2 VCLK P 18 2 XMDATA P 584 HADR lt 2 gt 3 ENA N AO 7 3 VCLK P 184 2 1 2 1 lt DVNZ 5 4 PBMO P 184 1 HADR 3 D 5 DVN m 18 5 184 HADR lt 47 D 6 DVN4 N A5 EVEN N 14 6 HADR lt 5 gt D 7 e VBLK N 13 14 LCAROMO HADR lt 6 gt R 48 WIRD P 2 IBLK N 312 8 7 gt G GRES N PIXEL P 11 9 Be s rere HADR lt S gt 185 yg HADR lt S gt HADR lt 10 gt Mio 5 n 7256 5 A13 M HADR lt 11 gt M P E HADR lt 12 gt VADR lt O gt VADR lt 1 gt VADR lt 2 gt PIXEL P 465 VADR lt 3 gt 9 VADR lt 4 gt HBLK N 280 69 VADR lt 5 gt VBLK N 9 D 70 EVEN N 71 VADR lt 6 gt 72 VADR 7 gt 73 gt PS 74 87 VADR lt 9 gt 3t q 75 VADR lt 10 gt gt 75 85 gt _ 27 4 4 U 79 PROGRAM OEZ 4 XDONE P 80 81 CN75 5 RI D gt 47k b 1520
512. t 38 p 24 39 755 5 14 45 5W G6B 1174C US Tyag3 gt T MPUDCTZ2 3 02 9 2 13 VCC4 O 5 2 LMPUDCII 34 0 Q 15 5 RYT 827 7 0 10 gt 71 4 6 11 Sh ICB3 MPUD lt 9 gt 97 9 7 10 e 2 ot 5 63055 R304 L MPUD lt 8 gt 13 D a 12 WOCS lt D gt d x m E cm IE 6 8k Sik E P 1M 05 56 PRT WOCH N 11 T 2 APRT G E RY8 77 101 tle 7 RYE se TMP50 ON OFF HS 50014 ICE3 p41 VO6C 74 DIP 1M 05D sQ 87 VOCS 16 1 eG ve AE WOCS lt O gt 2 ULN2003 IE TE R301 is G68 1114C US AMP 16P oc 12 042 1 060 n CN126 N 6 8275 1261 1 RY 2 RY12 READY G6B 1114C uUS gt CABLE SET amp LM 8 1 HIGH VACUUM DIP 1M 05D Bic RY10 RY10 ui FRC5 10P 6 32 7 1 sj Om n DIP 1M 05D 2 WOCS lt 7 0 gt FRC5 10P CAD 3 RAK RE ES s s gt E al E A p _ RE 3 5200 T i A RE N KANEOKA 1998 02 19 Z zi EVAS SAT R see K KAGEYAMA 1998 02 19 at la 7 JL RB A 5 Sar HEAL eeemeoeoot O YAMADA 1998 092714 321 253 1836 5 5 EVACSEQ 5 5 12 11 LO CN
513. t Check that the electron gun and condenser lenses first and second can be aligned smoothly Objective lens astigmatism correction Check that the astigmatism can be corrected in the conditions described below Measurement Conditions Accelerating voltage 0 5 kV Display magnification 50 000 x Specimen height 0 0 mm Condenser lens 1 5 Observation mode Normal Checking Each Section s Operation Frame memories must function normally e Memory photographing must work with the photo CRT unit attached e Each function key must operate normally Safety Devices Operation Check e At power failure all valves must close When the vacuum has degraded the protection circuit must turn off the high voltage circuit When water flow is interrupted the high voltage circuit must be turned off e If the specimen holder is not inserted in the specimen chamber high voltage cannot be applied When the compressed air pressure drops below 250 kPa all valves must close 3 16 5 5200 Installation Service Manual Other Checks e Scratches or other anomalies must not be visible The evacuation sequence must operate normally dry pumps and air compressor must be free from abnormal sounds The objective lens cooling water must not leak Accessories The accessories should be installed according to their installation section in the instruction manual shipped with the main unit 3 4 2 Operation and Maintenance
514. t cannot be accessed by any other user table it is registered in Are you sure Caution After renaming data it cannot be accessed by any other user table it is registered in Are you sure Print both A and B images HV will be turned off OK This message will be shown when the file name for saving already exists If you click the OK button the file will be overwritten This message will be shown for confirmation Click Cancel button if you do not want to delete it This message will be shown for confirmation if the original file may be deleted after moving it This message will be shown when saving the image on the SEM Data Manager Click Yes to overwrite When you click the No button the Save Image dialog window will be shown for saving the image with new file name This message will be shown when the specified file name for saving measured data already exists If you click the Yes button the existing data in the file will be overwritten by new one If you click the No button the existing data in the file will be kept and new data is added following the existing data When images are registered in multiple user names deleting moving or renaming the images on a user may cause troubles when opening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles When images are registered in multiple user names deleting
515. t t t LM Position gt gt T T NOTE The motion is reversed when a knob is turned counterclockwise Beam Monitor The signal should switch to the BM movable aperture at an accelerating voltage of 7 4 kV or less and to the Objective movable aperture at 7 5 kV or greater When the emission increases or decreases and deviates from the safe region the Beam Monit lamp red on the Scanning Image window should flash When the Adjust switch is pressed the BMC should operate and the lamp green should come on When the accelerating voltage gt 10 KV the beam monitor should turn off when the Adjust switch is pressed AFC AST ABC The Auto Focus AFC should operate normally e The Auto Stigma AST should operate normally e The Auto Brightness Contrast Control ABCC should operate normally The Baking Heater terminal should be covered The INNER OUTER BAKE timer should operate normally Part No 595 8030 9 3 Adjustments The INNER BAKE HEATER should operate normally The INNER BAKE should have an AC 70V 10 power supply Name Plate e The main unit has the correct name plate and lot number Products intended for export should have patent plate attached Products to be shipped to NSA should have FCC labels attached The side connector in the Display must be removed and a Service Only label must be affixed Other e modes no shade should be generate
516. t Limit Adjustment already adjusted The output current can be monitored using the voltage of a CUR check pin 5A 1A relationship holds between the CUR pin voltage and the output current The current limit value can be adjusted by operating the C L pot The current limit value can be checked by applying a sudden acceleration to the motor and by setting the peak value of the resulting start up current Over speed Adjustment If the output voltage grows excessively an abnormal condition is detected A detection level can be set by means of the VR5 X axis and the VR205 Y axis Because the maximum output voltage is approximately DC 23V relative to an input voltage of DC 24V the XY Stage controller is set to a non operating value If the XY Stage controller runs turn the volume in the direction of CW Controller Adjustment Volume Symbol Adjustment VR104 TILT angle gain adjustment VR103 TILT angle offset adjustment VR107 X axis command speed adjustment VR110 X axis command speed offset adjustment VR108 Y axis command speed adjustment VR109 Y axis command speed offset adjustment TILT Angle Adjustments Adjust the TILT angle display Use the offset adjustment volume to adjust the 0 display Use the gain adjustment volume to adjust the maximum angle display Command Speed Adjustments already adjusted This step performs an adjustment of the maximum speed and offset for the X and Y axes
517. t or no uptime status tables exist in that file the screen shown in Figure 8 15 is displayed In this case however buttons other than Vacuum save Vacuum socket and Emission socket are disabled If TMP on the screen is Standard no Sub TMP items are displayed The Set button will be explained in Item b below In the warning indicators Wng a yellow lamp comes on when usage approaches 85 the value coded in the Life Time column on the screen and a red lamp lights up when this value is exceeded The button in the Trend column from top to bottom graphically display the following data Evacuation table data in a database file Ras mdb the file created by the Save button on the operating status display screen in Step 2 above 3 Vacuum data GET STRD in the socket log debug file Emission table data in the database file Emission current data GET EMIS in the socket log debug file and Alignment table data in the database file The Set Install Date button will be explained in Item e later The Snap Form button loads the named screen as a bitmap file Refer to Item 2 4 The file name is WorkCond bmp Clicking on the Close button returns control to the Main Screen 8 24 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual b Resetting the Various Parts The various parts can be reset by pressing the Set button on the screen shown in Figure 8 15
518. tallation manual Connect the main unit to the compressed air equipment using the attached pressure resistant tube Turn ON the power on the switchboard Turn ON the breakers on the common power unit Turn ON the power of the ion pump to evacuate the electron gun section Wait until the vacuum of the ion pump reaches to 1 x 10 or less and perform electron gun baking See Figure 10 1 Turn ON the EVAC SW to evacuate Turn ON the Display SW and check that the instrument operates normally LEE HV cable Purple word instal lt p Items already connected before installation Items to be attached or detached at installation CN49 SG VA board IP 1 PS unit 2 PS unit IP 3 PS unit Anti vibration rubber fastening bolt EVAC PNNL 3 ST DIST CN199 IO board TMP control unit TMP control unit indicates that the iterm is optional Items in brackets are located on the supply side Monitor Mouse CD Uu 4 z h H 1 BLK SG VA board Keyboard Mouse 100 V AC HO BSE detector Canceller coil LE E Keyboard Monitor EVAC PNNL 1 EVAC PNNL 2 Video AMP board OPTION i EVAC SEQ board CN153 IO board CN128 AC PS CN22 PHOTO board Figure 3 4 S 5200 Block Diag
519. tate created by the Screen Save button 3 Vacuum socket button The vacuum state of the socket log created by SEM exe program 3 Emission DB button The emission current value of the database file Ras mdb Emission socket button The emission current value of the socket log created by the SEM exe program Alignment DB button Alignment information on the database file Ras mdb When a button is pressed the system confirms the existence of the file if a file is not found it displays a message If a file is found the system checks the file and displays the starting and ending dates of the data on the screen Figure 8 20 Trend Appoint Vacuum It is able to show the data for about three months Appoint the day from when you want to see There is the data from 2000 07 10 to 2000 07 12 Day Appoint 2000 0771 0 v To 2000 077 1 0 Y Graph Appoint Figure 8 20 Date Graph and Time Specification Screen Clicking on the OK button of Figure 8 20 causes data with a specified time period to be displayed on a full screen A graph can be specified only for the display of vacuum data Display of Vacuum DB Vacuum Save and Vacuum socket buttons Figure 8 21 The values of IP 1 IP 2 and 3 represent the values of the vertical axis on the left of the screen The values of Pe 1 Pi 1 and Pi 2 represent the values of the vertical
520. te Desktop Area 16777216 Colors Less More iii Li 1024 by 768 pixels Font Size Refresh Frequency List All Modes Test Display Type Cancel Apply 7 When You have not tried these new settings successfully appears click on OK Display Settings LX You have not tried these new settings successfully Please press the Test button to preview this new graphics mode If you want to keep this selection anyway choose OK 11 34 S 5200 Field Emission Scanning Microscope Troubleshooting Service Manual 11 6 6 Installing the Network Driver 1 Select Start Settings Control Panel to open Control Panel ci Compaq Information Center gt Em Programs 5 Documents 5 Settings Corto Panel Printers 5 ale AJ End Taskbar 40 Shut Down 2 Control Panel double click on the Network icon 3 Onthe Network window select the Identification tab Click on Change Identification Services Protocols Adapters Bindings Windows uses the following information to identify your computer on the network You may change the name for this computer and the workgroup or domain that it will appear in Computer Name fi 201638117 Workgroup WORKGROUP 22 OK Cancel 595 8030 11 35 Troubleshooting 4 Change Com
521. ted Figure 8 9 Part No 595 8030 8 17 System Operation 8 18 Figure 8 9 No Sum table file Message Ifa SUM file is found 1 The version of the S 5200 as of the time when the SUM file was created and the current version are displayed in the Table s version and Present Register Version fields on the SEM file comparison screen Figure 8 10 ii Determines the current SUM value of the file recorded in a SUM table file 2 and compares the result with the SUM value in the SUM file The result of the comparison is displayed on the SEM file comparison screen The File column displays the file paths of the files that are checked The SUM column indicates the current SUM value of each file The Result column shows the results of comparisons as follows OK Matching SUM values NG File Changed Mismatched SUM values NG File not found File not found The entire results are displayed on the SEM file comparison screen All NG Number of NG files Clicking on the Close button returns control to the Main Screen S 5200 Field Emission Scanning Electron Microscope System Operation Service Manual Current software version Software version when the table was created Date and time when the table was created Result the file reference Table s Version Can not find the Version Table make date 1999 06 04 16 26 23 Present Register Versio
522. termediate value of those values Adjusting the Display Area 1 Use the Data Manager to open a previously created BMP file 640 x 480 in size and transfer it back to the image memory For ease of adjustment the BMP file should be one in which a box cursor is drawn on its outermost frame On the Standard Mode screen set the PLL division ratio for the Superimposer Adjustment window so that the width of the frame for the area in which the SEM image is displayed is closest to the width of the frame for the area that the Superimposer displays For ease of adjustment use the Windows application Paint to create a canvas substantially larger than 640 x 480 fill it with 128 G 0 128 colors and display this area by superimposing it on the SEM Manager Figures 9 1 9 2 Adjust the Horizontal Start Offset for the IMP Register on the Superimposer Adjustment window so that the left edge of the frame in which the SEM image is displayed is coincident with the left edge of the area displayed by the Superimposer Adjust H start and V start of the IP register so that the box cursor is coincident with the SEM display area Part No 595 8030 9 17 Adjustments uj zia LB Manager Paint Figure 9 1 Chroma Key Adjustment IMP Register Aosa Add Siandad Dusha Dua PHS __ Z E 106 ca IP P
523. the button you can set any desired date In this case the cumulative time will be the length of time that has elapsed since a date was entered With regard to V Valve the screen shown in Figure 8 19 will be displayed V1 Valve Reset EI Appoint Exchange Date year month day f Count Open and Close Valve 545 times Cancel Figure 8 19 Uptime Status Table Time setting Screen 3 On this screen you can change both the replacement date and the number of times the valves are opened and closed This part of the uptime status data is reset and stored For details refer to the Reset Reference c Displaying Previous next Data on Various Parts By pressing the scrollbar on the screen shown in Figure 8 15 you can alternately display the extent to which an older or newer part than a given part has been used Each time the scrollbar is pressed upward a newer date will be displayed Conversely each time the scrollbar is pressed downward an older date will be displayed If you continue to press the scrollbar until the end of data is reached a No more data message appears in the lower portion of the screen 8 26 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual d Trend Function The buttons on the screen in Figure 8 15 generate different graphs as follows Vacuum DB button The vacuum state of the database file Ras mdb Vacuum Save button The vacuum s
524. the SUM value of the file necessary for the SEM function it also creates and displays the file SUM table file Re doing the file creation process requires the password For details refer to the RasReset manual Check File Sum button This button displays on the screen the results of a comparison of the current file status SUM value and the SUM value obtained in Step 3 above Display Error Log button 8 11 System Operation 6 7 8 9 10 11 12 13 14 15 16 8 12 This button displays the contents and meanings of any errors and output messages that are generated at SEM startup time and recorded in a database file Ras mdb Save Log to FD button This button selects and copies the following three files to a floppy disk the database file Ras mdb created by the SEM function the file Ras EvacCondition txt that is created when the Save button on the screen is pressed and the debug file socket log created by the SEM exe program Reset WorkCondition button This button resets the table WorkCondition a table of chips used in the SEM and cumulative hours for oil battery and other items that need to be replaced in the database file Ras mdb Pressing this button causes the cumulative data to be zero cleared and any replacement date to be changed to the current system date and time Display History button This button displays on the screen the contents of the operatin
525. the screen Set the magnification to 500 Load the image using either Slow 3 or Slow 4 Using the adjustment length measurement cursor measure the 4 pitch 101 6 Lx2 Ly2 of the mesh Click on Magnification Adjust of EO Adjustment 1 Enter the following values into the input box X Y of the LM 2nd Range Click on Set Input value X Lx2 101 6 Input value Y Ly2 101 6 Adjustment precision 101 641 um within 1 For the third and fourth ranges enter the same values as the second range from the keyboard Click on Set Click on Save to save the data and then click on None Adjusting the Image Shift Top Bottom Row Ratio Adjustment Conditions Accelerating voltage 5 kV 9 44 HE sim 2 Specimen holder Rotation holder Specimen Mesh Sample Height 0 0 mm R R Off Reset the Image Shift to the mid point to perform axis adjustments electromagnetic The Apert AL should be aligned accurately Click on Image Shift X Max on the EO Adjustment 1 screen to maximize the X shift Click on Image Shift U L Ratio of the EO Adjustment 1 screen Start of Apert AL mode Adjust the alignment knob X only so as to eliminate any horizontal image fluctuations due to the wobble The vertical image fluctuations will remain When the horizontal image fluctuations have been removed click on Get to display the current value Perform final adjustments using a numeric S 5200 Field Emission Scanning Electron Microscope Adjustments Ser
526. the specimen and thus prevents any contamination of the specimen The capacity of the trap dewar is approximately 0 9 liter Filling the trap for the first time may require approximately 1 3 liters of liquid nitrogen At a 24 C room temperature the trap once filled can last approximately five hours NOTE When transferring liquid nitrogen into the trap set a special funnel on the inlet Be sure to wear leather gloves and protective goggles To prevent frost bite do not let your skin come into direct contact with the liquid nitrogen To prevent oxygen deficiency be sure that the environment in which the liquid nitrogen is handled has adequate ventilation NOTE When the anti contamination trap has been filled with liquid nitrogen do not let the specimen chamber leak bringing it into the atmospheric pressure Leakage can cause the formation of frost on the anti contamination trap creating vacuum deterioration Before letting the specimen chamber leak empty out any liquid nitrogen and wait for a few hours The cold trap itself is unaffected by the introduction of air into the specimen chamber even if some liquid nitrogen remains in the trap Part No 595 8030 8 41 System Operation 8 5 System Halt 8 5 1 8 42 Standard Shutdown Shut down the DISPLAY 1 Shut down the accelerating voltage 2 Return the specimen holder to the Home Position 3 Close the SEM screen 4 Shut down the PC 5 Turn off the DISPLAY switch
527. the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Turn the EVAC POWER switch off Wait until the turbo molecular pump stops Then turn the EVAC POWER on If the error occurs again contact a service engineer Check the cooling water supply The Water lamp is lit when water is supplied S 5200 Field Emission Scanning Electron Microscope Service Manual E13 E 14 18 19 20 25 31 32 33 Flow of the cooling water is smaller than specified rate The water lamp goes out Insufficient air pressure for the pneumatic valves S E C AIR switch is on when the specimen holder is in the specimen chamber S C LOCK switch on the evacuation control panel is released when the specimen holder is in the specimen chamber The specimen holder is not at the entrance of the specimen exchange chamber when process was started S C LOCK switch on the evacuation control panel is set to LOCK when the specimen chamber is in the air leak process EVAC power is on when the specimen holder is out the specimen chamber Gun baking was started while the HV cable head is not removed Covers around the electron gun are not attached Over heating of baking heaters when optional temperature sensor is installed Part No 595 8030 The evacuation system will be working normally The cooling water is used for coo
528. tlet for the main turbo molecular pump pumping rate 270 L s in a cascading fashion Further Reductions in Contamination through Optional Features In observations that are susceptible to the effects of contamination e g high magnification rate observations at a low accelerating voltage and cryogenic observations an effective contamination preventive measure can be achieved by chilling the area around the specimen with a liquid nitrogen trap For this purpose the S 5200 contains a built in liquid nitrogen trap with a larger specimen envelope area than conventional traps in the objective lens unit By installing an optional trap unit a liquid nitrogen dewar on the objective lens unit you can provide a chilling trap function around the specimen The optional trap unit is equipped with a special heater that removes gas from the trap Use of YAG type Backscattered Electron Detector option without Restrictions on Specimen Tilt Whereas in the conventional system S 5000 the use of a YAG type backscattered electron detector restricted the available specimen tilt angle to 8 the S 5200 does not require such restrictions due to the fact that the YAG type backscattered electron detector is installed above the objective lens Also the S 5200 can simultaneously detect both reflected electrons and X rays the side take off method Use of an optional Bright Field Aperture for Transmission Electron Images without Restrictions on Specimen Til
529. tron Microscope Introduction Service Manual 1 3 Layout 1 3 1 Hardware Standard Layout The S 5200 standard layout is shown in Figure 1 12 The auto camera and cooling water circulator are options e The recommended dry pump is ESDP12 The dry pump is supplied by Hitachi Sales e For the CE S2 structure the height and weight for the power supply unit are 1443 mm and 145 kg respectively The dry pump and compressor are to be obtained by the customer Compressor Cooling Power Dry pump water source circulator Weight Ld Column Auto camera Figure 1 12 S 5200 Standard Layout Part No 595 8030 1 15 Introduction Circuit Diagram The S 5200 circuit diagram is shown in Figure 1 13 3 LEM Eee Tal ua se n DISPLAY EO CONT 5 M 3838 Bi 8 Figure 1 13 S 5200 Circuit Diagram 1 16 FFE TY ie 8 3 1 BLOCK DIAGRAM S 5200 Field Emission Scanning Electron Microscope Introduction Service Manual 1 3 2 Software The S 5200 software structure is shown in Figure 1 14 Refer to Chapter 7 for details PC PC_SEM exe Semlmg32 dll WinRT sys ToyLib32 dll PciLib dll Ftpserv exe Ethernet VRT VxWorks RS232C Stage Control EVAC Control Unit Unit Figure 1 14 S 5200 Software Structure PC Pro
530. ttings that are needed to provide earthquake protection It is recommended that earthquake protection be applied based on local government regulations 2 16 S 5200 Field Emission Scanning Electron Microscope Safety Service Manual 2 5 1 Center of Gravity Locations The Center of Gravity Locations are shown in Figures 2 5 Main Unit 2 6 Display Unit and 2 7 Power Supply Unit 1030 Figure 2 5 Center of Gravity Location for the Main Unit Part No 595 8030 2 17 Safety Figure 2 6 Center of Gravity Location for the Display Unit 2 18 S 5200 Field Emission Scanning Electron Microscope Safety Service Manual AC BIZTELBUTION UNIT 5 09009 Figure 2 7 Center of Gravity Location for the Power Supply Part No 595 8030 Safety 2 5 2 Earthquake Protection The earthquake protection diagrams are shown in Figures 2 8 Main Unit 2 9 Display Unit and 2 10 Power Supply Unit A 1 5 Adiuster _ BASE Mounting hole for Fixing boit Figure 2 8 Earthquake Protection Diagram for the Main Unit 2 20 0208 969 Hed 2 1 5 8 80 H 10 Support braket exagon head bolt 1 5 Support braket Hexagon head bolt Figure 2 9 Earthquake Protection Diagram for the Display Unit C C 1 5 enuey edoosoJoiN uoJjoe 3 uoissiu 4 0029 5 Ajayes Safety Figure 2 10 Eart
531. tus 4 Adjust the VR13 so that the magnetic field waveform is at a minimum when V sync on the monitor is at the beginning of another cycle 5 Adjust the VR10 so that the phase of the waveform of the canceller magnetic field matches the waveform of the monitor magnetic field A Trigger Source chi Ch2 Ch3 Ch4 200mv Ch2 2 00 V M1 00ms Ch2 f 2 407 E i 1012 Ref3 100m 40045 51 00 Mode Source Coupling Slope Level Type Normal Edge ch2 Dc 7 240 Holdoff Figure 5 21 Inadequate Adjustment 5 28 S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual Trigger source chi Ch2 Ch3 els zs FTT 1 80 200 2 2 00 V M1 00ms A Ch2 2 40V i 1 of 2 ef3 100 4005 i 51 00 Mode Source Coupling 5lope Level Type Normal Edge Ch2 DC F 2 40 v amp Holdoff Figure 5 22 Complete Adjustment 5 7 Stage Controller 5 7 1 Stage Controller Configuration Diagram A configuration diagram of the Stage Controller is shown in Figure 5 23 Mztur as n d Cim 8 s rii iFmcs 40 XY Control a 10 board E ans CHI 850115 T eter Por BSE irat CHOC Z ET da E FEM Dk HAA ee 1
532. tus NO EVAC User operation L 7 Control lt gt Decision S 5200 Field Emission Scanning Electron Microscope Service Manual Normal Operation Stop Operation Part No 595 8030 DISPLAY SW WATER VALVE OPEN AIR LOCK VALVE SW BUZZER HOLDER IN S E C AUTO STOP TIME 3 30 set EVAC POWER SW OFF NO YES TMP STOP TIME DOWN STOP TIME 0 00 YES ALL VALVE CLOSE MAIN POWER SW OFF YES OFF SW status Keep Dry Pump OFF AIR COMP OFE TMP MAIN POWER OFF C User L 7 Control lt gt Decision COOLING WATER System Operation 8 3 System Operation Specimen Removing Operation SEC EVAC HV OFF HOLDER IN SEC SEC SW gt AIR 8 4 Specimen Inserting Operation NO BUZZER ON NO MDP No YES YES Normal YES V4 OPEN HOLDER FREE OLDER LOCK V4 OPEN YES lt gt YES OLDER LOCK V3 V4 OPEN User operation Control lt gt Decision 5 5200 Field Emission Scanning Electron Microscope System Operation Service Manual SC Leak Operation SC Evacuation Operation HOLDER IN S E C LOCK SW OFF AUTO STOP TIME 5 00set HOLDER IN SEC SC EVAC SW gt ON NO BUZZER ON BUZZER ON SC AIR SW ON NO Normal User operation Control lt gt Decision
533. ument After checking the check terminal turn off all power to the instrument Remove the digital voltmeter and the oscilloscope Perform the maintenance work Attach the cover SO 400 mb Oy me UA 19 Turn on power to the instrument 2 4 Potential Mechanical Hazards Potential hazards during maintenance are shown in Table 2 8 Table 2 8 Potential Hazards during Maintenance Item Potential Hazard Jamming Fingers may be caught while replacing a cover etc Powder dust Abrupt air release from the air compressor may cause dust to fly out of the compressed air tank Fall The instrument may fall if the proper transportation methods not used The normal handling may cause the column unit and mounting base to fall when they are placed on the anti vibration machine Heavy object Lifting heavy objects such as the dry pump during maintenance may cause injury Long and continuous Staring at the monitor and operating the keyboard for a long time without breaks may operation cause eye fatigue and damage your wrists 2 5 Earthquake Protection In recent years earthquake protection Model Codes for non structural building components and equipment are being applied Architects engineers and contractors are relied upon to know understand design and install earthquake protection in accordance with the requirements of those codes Follow the Hitachi drawings showing the locations of fixed metal fi
534. units Touching the internal parts or circuits while the instrument is on may result in death or serious injury due to electric shock Part No 595 8030 2 1 Safety Safety High Temperature Warning WARNING The electron gun and the ion pump are heated to 250 C or higher in order to keep the electron gun in a high vacuum While operating the surface temperature of the dry pump rises to about 70 C Do not touch these sections to avoid burns gt High Temperature Low Temperature Warning WARNING Wear protection glasses and gloves when liquid nitrogen is injected in the anti contamination trap option gt Low Temperature Heavy Equipment Warning WARNING Do not lift heavy equipment such as weights or the dry pump manually It may cause injury gt Heavy Equipment Pace Maker Warning Label WARNING e This ion pump for this instrument has a permanent magnetic field People who use a pacemaker must stay at least 0 6m from the instrument Pacemaker 2 2 S 5200 Field Emission Scanning Electron Microscope Safety Service Manual Repair Inspection Label TN WARNING e When repairing or checking the electrical parts of the system follow the customer s procedures Make sure that the main power or the switchboard is turned off and that no one except the person working turns the pow
535. up of SEM Manager change NTSC to PAL Then Close Open the SEM Manager S 5200 Field Emission Scanning Electron Microscope Electric Theory Service Manual 5 6 2 Magnet Field Canceller Block Diagram DEFLENS ADC VELL Level Memory 2 Gain T C Ps Timing CHIGO Y 2 x gt AD converter 5 l DA converter VRIS Figure 5 18 Magnet Field Canceller Block Diagram Adjustment 1 When the pushbutton switch SW 1 is depressed check to see that the relay 10 comes and turns off in approximately 3 seconds 2 Observe TP11 on the oscilloscope Adjust VR11 and VR12 so that the waveform level remains between 0 and 4 V PreVu 1 Trigger Source chi ch2 ch3 p ch4 MM 1 007 2 2 00 M2 00ms Ch2 f 2 40 more 100 400 10 00 I Source Coupling Slope Level Type Normal Edge ch2 DC 2 40V g Holdoff Figure 5 19 Input Waveform Part No 595 8030 5 27 Electric Theory 3 Place a flux meter near the column While monitoring TP12 on an oscilloscope simultaneously observe the output waveform from the flux meter A Trigger Source chi ch2 ch3 0000 00mV Ch2 2 00 V M2 00ms A Ch2 2 40V more Too 100mv 40045 10 00 Source Coupling Slope Level E amp Holdoff Type Ch2 2 40 V Figure 5 20 Observation Sta
536. ur 8 2 rem 8 B7 poy z2 62 Lt FEED BACK A6 5 15 lt 5 BBG 16 4 EM lt 4 gt OUT IN As Cy 20 13 35 850 ug EMC2 MO 11 EMC1 gt ae BAG 126 8 EMCO CAD 18 i pr y j e5V 2 4 RAE RE 200 lt 7 0 E SAA a iE B2 o 1 PC HVC P C B gt 3 BAX A MOURT 1998 02 25 s Ba e T 7 N KANEOKA 1998 02 25 871 7 EE 3 iwi mi Ex MER 3712537837 1998 02 25 I i 2 15 PC HVC 1 2 12 23
537. vice Manual input value X Repeatedly entering numeric values less than or greater than the current value and clicking on Set in order to determine an optimum point Exit from the Apert AL mode Click on Image Shift X Mid to reset the image shift to a mid point Click on Image Shift Y Max on the EO Adjustment 1 screen to maximize the shift Click on Image Shift U L Ratio of the EO Adjustment screen if already checked this operation can be skipped Start of Apert AL mode Adjust the alignment knob Y only so as to eliminate any vertical image fluctuations due to the wobbler The horizontal image fluctuations will remain When the vertical image fluctuations have been removed click on Get to display the current value Perform final adjustments using a numeric input value Y Repeatedly entering numeric values less than or greater than the current value and clicking on Set in order to determine an optimum point Exit from the Apert AL mode Click on Image Shift Y Mid to reset the image shift to a mid point Click on Set to register the adjustment data Click on Save to save the adjustment data Click on None to disconnect the adjustment knob Correcting the Image Shift Axis Perform this adjustment after the adjustments from Setting the Flashing Intensity through Adjusting the Image Shift Top Bottom Row Ratio are all complete Adjustment Conditions Accelerating voltage 5 kV Specimen holder
538. will be white rather than violet Following is a description of procedures for accurately making accurate adjustments on a waveform level The following description is intended as a reference these adjustments are normally not required because the system is shipped with these adjustments already made Launch Paint from the Windows Accessories and fill the background color with the aforementioned chroma key on the full screen Draw a white vertical one pixel wide Figure 5 16 Hide the entire toolbar untitled Paint Edit View Image Options Cover entire area with chroma key color Draw white line Select so that it will not be displayed Figure 5 16 Phase adjustment between Sync Signals and Clocks On the oscilloscope observe the video signals represented by the vertical line Apply synchronization at H sync TPI Apply Delay to observe the signals represented by a white line While monitoring the video switch signals on the oscilloscope adjust the delay lines DL7 DL8 Figure 3 shows the monitoring of video signals by applying synchronization at H sync When GUI properties are 1024x768 and 75 Hz the width of one pixel is approximately 10 ns in which case make adjustments so that the output signal width will be close to the pixel width An incomplete adjustment results in a white line tinged with violet Use the SEM data entry function to enter characters and lines on the image to make sure t
539. wing safety instructions carefully e Follow all the precautions described on the machine and in the manual Failure to do so can cause injury to you or damage to the machine Keep in mind that the hazard warnings in this manual or on the machine cannot cover every possible case as it is impossible to predict and evaluate all circumstances beforehand Be alert and use your common sense e The worker is responsible for room ventilation when chemicals are to be used Insufficient ventilation may be harmful Do not modify the machine replace parts use unspecified parts or use the machine without the proper safety devices The machine has alert labels consisting of a symbol and a word as shown in Table 2 1 Alert Label Table 2 1 Safety Alert Labels Description Indicates an imminently hazardous situation that if not avoided will result in death or serious injury Indicates a potentially hazardous situation that if not avoided can result in death or serious injury Indicates a hazardous situation that if not avoided will or can result in minor or moderate injury or serous damage to the instrument 2 2 Warnings 2 2 1 Type of Warnings Electric Shock Warning WARNING Electric Shock Voltages up to 200V AC and 30kV DC are used inside this instrument Touching the parts may result in electric shock Do not remove the covers from the column control or power
540. x A po 252200 RM N KANEOKA 1998 02 19 s 4 EVACSEQ P C B 1998 02 19 Wat 2 JL N A we 321 A 21926 2 A 55 0 YAMADA 1998 02 19 295102 gt 12 8 122 211 CN122 g ICU2 lt _ULN2003 _ 3 iih STL sts m A Pw oo C86 104 77 MPUD 82 2 9 ULN2003 2 4 5 9 lt 15 gt 24 lt 2 gt P2 Tm 8 MPUD lt 14 gt sw B20 2 5 5 ca 7 518215 P
541. xe e SEM hlp e PC SEM ent e Ras exe e SetlpAdr exe The following principal files exist in the directory c Winnt systems32 which holds shared programs on the PC e Semlmg32 dll e ToyLib dll e PciLib dll Other dll ocx files The following file exists in the directory c WinntNSystems32 drivers WinRt sys The following files exist in the directory c Vrtsys This directory holds VRT control programs When the system is started the files indicated by are downloaded onto the VRT e vxWorks e vxWorks sym e vxWorks mapA e vxWorks mapL Ftpserv exe e Ctr bmp Part No 595 8030 11 27 Troubleshooting NOT If the software is restored or the PC is changed due to the PC malfunction reset or reinstall the program according the procedure shown below No ltem Check BIOS Verify that secondary drive 0 is set to PIO Mode 4 3 4 S 5200 Restore CD Creation Procedure After the PC is turned on press F10 when lt F10 Setup gt is displayed at the right bottom of the screen When the language menu appears select Japanese and press Enter Select storage IDE drive timing from the menu Verify that secondary drive 0 is set to PIO Mode 4 If secondary drive 0 is not set to PIO Mode 4 follow the procedure shown below to correct the setting 1 Select secondary drive 0 by using the down arrow key to move the cursor Change the setting from Enhanced DMA example to PIO Mode 4
542. xt When WARNING appears click on Yes When For the Restore process to continue appears click on Reboot the system restarts When Select the applications you would like to restore to your system appears click on Next When You have chosen to Restore the software appears click on Next When Please remove the Compaq Restore CD appears replace the Restore CD ROM in the CD ROM drive with the Windows NTCD ROM Click on Next When The operating system you have selected requires Service Pack appears replace the Windows NT CD ROM in the CD ROM drive with the service pack CD ROM Click on Next When The Compaq Restore CD has formatted and prepared the hard disk appears click on Begin Setup When Please remove the CD from your CD ROM drive appears take out the service pack CD ROM from the drive Click on OK the system restarts When Please read the following license agreement is displayed click on I Agree When Name and Organization appears type in S 5200 and HITACHI Click on Next When Registration appears type in your license number Click on Next When Windows NT Setup appears click on Next When Date and Time properties appears set the region as Tokyo and click on Close the restoring process begins When The Compaq Restore CD process is complete appears press the Enter key The system restarts When the Begin Logon
543. y This message will be shown when All Clear button in the captured Image window is clicked or when you change capture resolution for confirmation This message will be shown for confirmation This message will be shown when the file name for saving already exists If you click the OK button the file will be overwritten This message will be shown for confirmation Click Cancel button if you do not want to delete it This message will be shown for confirmation if the original file may be deleted after moving it This message will be shown when saving the image on the SEM Data Manager Click Yes to overwrite When you click the No button the Save Image dialog window will be shown for saving the image with new file name This message will be shown when the specified file name for saving measured data already exists If you click the Yes button the existing data in the file will be overwritten by new one If you click the No button the existing data in the file will be kept and new data is added following the existing data When images are registered in multiple user names deleting moving or renaming the images on a user may cause troubles when opening the images on other user names When this happens removing the images using Batch Process Remove List command from the users will solve the troubles When images are registered in multiple user names deleting moving or renaming the images on a user may cause troubles when o
544. yright C 1 999 2000 Hitachi Ltd All rights reserved Initial Logo Figure 7 6 To terminate the operation program select File Exit on the menu When the following message is displayed select OK to terminate the program Q SEM M Manage A TLE Figure 7 7 7 6 S 5200 Field Emission Scanning Electron Microscope Software Service Manual Operation Screen The figure below shows the operation screen from which you can launch various setting screens for the operation of the SEM and display an accelerating voltage and other high voltage status information You can operate the 55200 principally from this screen and the Scanning Image Window screen that displays Standard Dual Full images Of the Title Menu and Toolbar options on this screen you can toggle the Toolbar between the show hide modes You can also customize the buttons on the Toolbar that is displayed on the screen launched from Tool Toolbar Settings on the menu 3 Hitachi S 5200 Scanning Electron Microscope File Edit Setup Operate Scan Image Analysis Option Tool Window Help ajajaj eje n Figure 7 8 a The following menu Tool is displayed for the service engineer s login Service engineer mainly performs the processing from this menu Hitachi 5 5200 Scanning Electron Microscope Fie Edit Setup Operate Scan m Analysis Option Window Help Adjust ON Vace 4 E ED EJ

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