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Dual Controller - Agilent Technologies

1. 2 LED verts qui indiquent la modalit op rationnelle s lectionn e LED local allum lorsque la modalit op rationnelle LOCAL est s lectionn e LED S riel allum lorsque la modalit op rationnelle SERIELLE est s lectionn e LET Eloign allum lorsque la modalit op rationnele ELOIGNE 1 0 est s lectionn e 3 Interrupteur HV ENABLE actif ind pendamment de la modalit op rationnelle s lectionn e Pour alimenter la haute tension du panneau de contr le du REMOTE 1 0 ou de la ligne serielle il faut que l interrupteur HV ENABLE soit place dans la position ON 4 HV1 on off et HV2 on off boutons utilis s pour brancher d brancher la fonctionnalit des circuits de haute tension 66 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 5 LEDs lorsque le LED ON est allum le circuit relatif HV haute tension haut voltage est branch lorsque le LED PROT eest allum la modalit op rationnelle pour la pompe correspondante a t s lectionn e 6 Groupe de six boutons de fonction avec les caract ristiques suivantes bouton ENTER utilis pour confirmer une s lection qui a t effectu e avec le bouton CHANGE bouton CHANGE CONFIG utilis pour visualiser toutes les options diponibles bouton MENU utilis pour entrer dans le menu de configuration bouton MODE utilis pour s lectionner la modalit op rationnelle
2. Figure 7 Output voltage change over vs pressure Powering On the Controller from the Front Panel LOCAL Mode To switch on the H V the external interlock must be closed connector inserted If no external connection is made insert the interlock closing jumper that are provided with the unit Proceed as follows to power on the controller and enable the voltage on the H V connectors Insert the cable from the pump and the interlock loopback pin of the H V cable into the related connectors on the rear panel Set the power switch on the rear panel to the ON position Set the ENABLE HV switch on the front panel to the ON position Press the HV 1 2 ON OFF buttons ON LED lit Dual Controller User Manual 87 900 094 01 1 97 194 4 Instructions for Use With only one H V circuit installed both rows on the display are dedicated to pump number one while with two circuits installed each row is dedicated to a different pump Starting the Pump To start the pump press the corresponding HV ON OFF button the ON LED will come on Stopping the Pump To stop the pump press the corresponding HV ON OFF button the ON LED will go off Maintenance The Dual controller does not require any maintenance Any form of servicing on the unit must be performed by authorized personnel If servicing is needed contact Agilent Technical Support or subscribe to the Agilen
3. Dual Controller User Manual 87 900 094 01 1 75 194 3 Mode d emploi Messages d erreur 76 194 FOUND substitution Pour certains types de panne le controleur proc de a un autodiagnostic et affiche l un des messages d erreur indiqu s dans le tableau suivant Tab 2 MESSAGE DESCRIPTION INTERVENTION PANNES DE HAUTE TENSION 1 OU 2 HV X La haute tension HV a t 1 Placer l interrupteurV ENABLE sur ERROR teinte par un interlock ON et r p ter la proc dure PANNELL recu par le panneau frontal d allumage de la haute tension INTERLOCK ou par la couverture 2 V rifier que la couverture soit l interrupteur HV install e correctement ENABLE dispos sur OFF ou bien couverture enlev e par l unit HV X La haute tension HV a t 1 Contr ler que soient install s les ERROR teinte par un interlock interrupteurs de fermeture avec les REMOTE recu par le Remote 1 0 interlock externes avec pontets INTERLOCK 2 V rifier que l interlock externe soit Ferm HV X La haute tension HV a t 1 Sila pompe utilise un cable HV avec ERROR teinte cause d un interlock de s curit contr ler que CABLE interlock du cable HV le connecteur a l extr mit de la INTERLOCK pompe soit introduit correctement et que le pin de fermetrure l extr mit de l unit soit introduit dans le connectur dur le panneau post rieur 2 Sila pompe utilise un cable HV p le simple sans interlock v rifier que le po
4. Tableau dorsal du Dual Contr leur Le dessin suivant reporte les contr les et connecteurs sur le panneau post rieur du contr leur Dual La configuration report e dans le sch ma consiste en deux cartes haut voltage HV de deux cartes Set Point Remote Control une carte d interface RS 232 422 et la liaison deux mesureurs Eyesys Gauges Dual Controller User Manual 87 900 094 01 1 69 194 3 Mode d emploi 70 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 Utilisation Modes de fonctionnement Le Dual contr leur peut fonctionner dans les modalit s suivantes LOCAL ELOIGNE I O input output SERIEL Dans le mode LOCAL toutes les commandes sont activ es par le panneau frontal Dans le mode ELOIGNE I O toutes les commandes sont activ es par un ordinateur loign reli par l interm diaire d un connecteur de input output plac sur le panneau post rieur Dans le mode SERIEL toutes les commandes sont activ es par un ordinateur externe reli par l interm diaire d une interface s rielle RS 232 422 485 La modalit op rationnelle s lectionn e est m moris e par le syst me et donc des le r tablissement de la tension suite a sa chute le contr leur Dual reviendra la modalit op rationnelle o il tait au moment de la chute de tension Lorsque une modalit op rationnelle est s lectionn e
5. falsches Funktionieren des Hochspannungs Steuerkreises an HV X ERROR ZERO MEAS Der Mikroprozessor des Dual Controllers hat festgestellt das an dem Hochspannungsausgang der aktiv sein sollte sowohl Spannung als auch Strom fehlen FEHLER GAUGE 1 ODER GAUGE 2 GAUGE X ERROR PANEL INTERLOCK GAUGE X ERROR GAUGE NOT FOUND Der Schalter HV ENABLE steht auf AUS oder das Geh use wurde von der Einheit entfernt finden Dual Controller User Manual 87 900 094 01 1 Der Mikroprozessor kann die HW zur Gauge Steuerung nicht Gebrauchsanleitung 2 STORUNGSBEHEBUNG Wenn notig den START Modus wahlen so dass der Controller arbeiten kann bis der Kurzschluss Strom erreicht wird 1 Die Unversehrtheit der Hochspannungskabel pr fen 2 Das Kabel von der lonenpumpe abnehmen und pr fen ob es in der Pumpe oder im Kabel einen Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Agilent zwecks Reparatur oder Austausch kontaktieren Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Agilent zwecks Reparatur oder Austausch kontaktieren 1 Den Schalter HV ENABLE auf EIN setzen und die Prozedur zum Einschalten der Hochspannung wiederholen 2 Sicherstellen dass das u Geh use richtig montiert ist Das Netzteil des Dual Controller aus und wieder einschalten Bleibt der Fehler
6. 1 Dual Controller User Manual 000 e 5 Technical Information Dual Controller Description 107 Algorithm for the Distribution of the Available Power 108 Controller Specifications 109 Output Voltages 111 Controller Outline 113 Fuse Holder 114 Interconnections 115 Start Mode of Operation 116 Protect Mode of Operation 117 Step Mode of Operation118 Optional Gauge Connector 119 Remote 1 0 Connector 121 Female Remote 1 0 Connector Output Signal 122 Female Remote 1 0 Connector Input Signal 123 Remote Power On 125 Optional Male Serial Connector 127 Usage 130 General 130 Abbreviations 130 Startup 131 Original Instructions i Agilent Technologies 103 194 5 Technical Information 104 194 Operating Modes 132 Messages Associated to the Mode Button 132 High Voltage Commands 133 Unit Configuration 137 Messages Associated to the Menu Button 137 Pressure Unit selection 137 Channel Selection 137 Pump Type Selection 139 Vmax 142 Imax 142 Pmax 142 Iprotect 142 Spare Pump Pressure Reading Setting 142 Step Fixed Operating Mode can be changed with any type of pump 143 Vstep 1 can be changed for the SPARE pump only 144 Istep 1 can be changed for the SPARE pump only 144 Vstep 2 can be changed for the SPARE pump only 144 Istep 2 can be changed for the SPARE pump only 144 Set point 1 or Set point 2 selection valid for all pumps 145 Messages Associated to the MiniGauge Menu Button 145 Auto Tur
7. Demarrage de la pompe Pour faire d marrer la pompe appuyer sur le bouton HV ON OFF le ON LED s allumera Arr t de la pompe Pour arr ter la pompe appuyer sur le bouton HV ON OFF le ON LED s teindra Entretien Le controleur Dual n a besoin d aucun entretien N importe quel entretien sur l unit doit tre effectu par un personnel technique autoris En cas de panne contacter le Support technique Agilent ou bien s abonner au Agilent Advanced Exchange Service o le controleur endommag est remplac par un controleur reconditionn En cas de mise au rebut du contr leur proc der a son limination conform ment aux r glementations nationales en la mati re 74 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en ceuvre le processus de collecte et mise au rebut
8. Multigauge Compatible Protocol 179 Protocol Errors 179 MultiVac Compatibile Serial Error Coding 180 Binary Protocol 180 Ascii Protocol 181 Multigauge Compatible Protocol 181 Dual Controller Error Status 181 Specific Protocol Settings 183 Ack Nack Mode 183 Write Reply 183 Multiple Commands 183 Automatic Serial Mode 184 Compatibility with MultiVac 185 Accessories Options 187 106 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Dual Controller Description The Dual Controller base is available in versions which differ in the factory set input voltage and in the internal configuration Models 929 7000 1 2 3 and 929 7008 09 10 11 require an input voltage from 100 to 120 Vac frequency of 50 60 Hz Models 929 7004 5 6 7 and 929 7012 13 14 15 require an input voltage from 200 to 240 Vac frequency of 50 60 Hz The models are provided with a front panel with an LCD alphanumeric display to indicate the operating conditions parameters of the Ion pump and a keyboard and a rear panel with input output connectors The figure below shows the Dual controller The controller unit can be operated via Front panel switches Remote signals via rear panel connectors RS 232 485 422 serial link option A maximum power of 420 W is delivered simultaneously on the two channels while a maximum power of 400 W is delivered on a single channel If a total of more than 420 W is requested the power de
9. No channel Status 30h not ok Dual controller no reset 31h ok reset iN performed Remote error Error returned Reply No channel Integer See the Protocol error by the Dual table controller due to an invalid data exchange Interlock Reads the Read No channel BitField See the Interlock table Status status of the 1 DUAL Controller doesn t reply to this command Dual Controller User Manual 87 900 094 01 I 163 194 5 Technical Information Command Code Value Tab 26 Command Name Binary ASCII MultiGauge Compat General Usage Protocol Commands ascii hex ascii hex ascii hex 2 der na HV on off A0 41h30h AO 41h30h 30 30h30h ni urea a TT pe firmware version EA ED _ A n on a Dsp firmware version EI 66h30h El 66h30h 04 30h34h device number FO Anh FO AGngoh O1 donsih device type F1 46h30h F1 46h30h 11 31h31h Vmeas S0 53h30h SO 53h30h 07 30h37h na er ei a ce nn 00 ee cicci i VA Controller error status CE CS 06 aeh remote error 10 21h30h 10 21h30h 12 31h32h E Interlock status JO 5Dh30h JO 5Dh30h 13 31h33h 164 194 Dual Controller User Manual 87 900 094 01 I Technical Information 5 HV on off Command Coding Tab 27 Mode Code Description Write 0 30h HV power off Write 1 31h HV power on in compliance to the Start Protect and Fixed Step selection made using the related commands Read oo 0 30h HV off Read 1 31h HV on Read 1 31h HV on in start step V Read 2 32h HV on in start fixed V
10. 1 Technical Information 5 Remote Power On Proceed as follows to turn on the HV from the Remote I O Connection 1 Switch on the DUAL 2 Switch the unit to the Remote I O mode of operation by pressing the related button on the front panel Connect the HV cable with the corresponding cable interlock 4 Press the HV ENABLE button on the front panel 5 Close the Interlock contact on the corresponding Remote I O connector pins 11 30 6 Close the Output On Off contact on the corresponding Remote I O connector pins 13 32 7 Close the corresponding Confirm Contact on the Remote I O Connector 12 31 The following figures show possible interconnections that switch on the HV through the Remote I O e 12 Confirm re 31 e 13 ee 32 Output OFF Interlock ee 30 e23 Power Supply Figure 20 Remote 1 0 Connection DUAL Dual Controller User Manual 87 900 094 01 I 125 194 5 Technical Information S Interlock Closed Open S HV ON OFF Closed Open S Confirm Closed Open Figure 21 Timing If S1 and S2 are not both closed a transition Open to Closed of S3 does not switch on the H V 126 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Optional Male Serial Connector The Dual controller uses an RS 232 422 485 serial interface The following tables provide this connector s
11. 100nA Pressure value at 5000V with I 1uA Channels No channel Dual Controller User Manual 87 900 094 01 1 Format Status Possible Values 30h normal mode 31h serial configuration mode 10 6000 step 10 expressed in ms x10 10 6000 step 10 expressed in ms x10 10 6000 step 10 expressed in ms x10 1 0E 15 min 1 1E 9 PIuA P100nA P10uA in read on SPARE pump max 1 2E 9 PTOuA 175 194 5 Technical Information Command Description Mode Channels Format Possible Values 5000V with Write min 7 4E 8 P100pA I 10uA P100uA Pressure value at Read HV1 HV2 Exp Torr P10uA PImA in read on 5000V with Write SPARE pump I 100uA PIMA Pressure value at Read HV1 HV2 Exp Torr P100uA P10mA in read u mn Me _ eo ES P10mA Pressure value at Read HV1 HV2 Exp Torr max 7 5E 8 PImA 5000V with Write min 7 4E 5 P100mA um P100mA Pressure value at Read HV1 HV2 Exp Torr P10mA P400mA in read 5000V with Write on SPARE pump I 100mA P400mA Pressure value at Read HV1 HV2 Exp Torr max 7 5E 5 P100mA 5000V with Write 1 0E2 I 400mA reinitialize Reloads the Write No channel Status 1 reloads the defaults in eeprom defaults in EEPROM EEPROM setpoint Histeresys Read No channel Integer histeresys percentage range Write of the setPoint Remote 1 0 value 0 100 step 1 DUAL Controller doesn t reply to this command and the display will show SYSTEM ERR 5 turn off and
12. 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 094 01 I j Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited
13. 900 094 01 1 Utilisation AVERTISSEMENT Mode d emploi 3 CABLE POMPE ila I BRANCHEMENT DE TERRE DE LA POMPE Figure 2 Connexions des masses L interlock du cable est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue Lorsqu on utilise un cable sans connecteur d interlock fermer l interlock avec le connecteur de fermeture pr vu cet effet Dans ce paragraphe on indique les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe USE de l appendice Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et pneumatiques et se reporter la notice de la pompe connect e Afin d viter des accidents aux personnes et l appareillage dans le cas o la pompe doit tre plac e sur une table v rifier qu elle soit stable Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e au syst me ou n est pas ferm e avec la bride de fermeture Dual Controller User Manual 87 900 094 01 1 65 194 3 Mode d emploi Contr les ou indicateurs du panneau frontal du contr leur Dual Le tableau qui suit indique la d finition et la fonctionnalit des contr les et des indicateurs CHANGE START START PROT 1 Prot 2
14. 900 094 01 I 141 194 5 Technical Information 142 194 The same sequences can be seen in the following pages Vmax HV DT vae i ew I Tt ide tafe tote II IT Imax elvis fma a Pmax ajvo ll emal low Iprotect nivlillilolelelelele t mab Spare Pump Pressure Reading Setting When this page is displayed the operator should store the pressure value corresponding to the pump current of 100 nA with 5000 V applied on the pump in use Dual Controller User Manual 87 900 094 01 1 Technical Information 5 In other words program the conversion table from current to press Store the pressure value for other three pump current values 10 ua 10 mA 400 mA Since an exponential value is displayed press the CHANGE button to change the mantissa of the pressure and then confirm by pressing the ENTER button now press the CHANGE button to modify the exponent and then press ENTER to confirm the selection made Storing these values allows the Dual to convert the pump current into pressure values even if the operating voltage is different from 5000 V The correction factor due to the different voltage is automatically applied by the Dual software in order to obtain a continuous correct pressure reading Step Fixed Operating Mode can be changed with any type of pump al o o e e miolale la xeo lv or a lwlal o ejele Mlolele LIT T sirlefef vl I IT If the STEP V mode
15. HV ENABLE switch set to OFF or unit cover removed HV powered off due to an interlock received from Remote 1 0 HV power off caused by an HV cable interlock HV circuit has not been detected HV powered off caused by an HV circuit failure CORRECTIVE ACTION 1 Set the HV ENABLE switch to ON and repeat the H V power on procedure 2 Make sure that the cover is installed correctly 1 Check that the loopback plugs with the external interlock jumpered are installed 2 Make sure that the external interlock is closed ca nia ce with safety interlock check that the connector at the pump end is inserted correctly and that the loopback pin at the unit end is inserted into the related socket on the rear panel 2 Ifthe pump uses an single pole HV cable without interlock check that the jumper is correctly inserted between the Interlock cable HV plug and Repeat the Dual power on procedure if the problem persists contact Agilent for repair or exchange Contact Agilent for repair or exchange Dual Controller User Manual 87 900 094 01 1 MESSAGE HV X ERROR HV OVERTEMP REMOTE 1 0 NOT FOUND R 1 0 FAULT PROTECT SHORT CIRCUIT HV X ERROR OVER oo DESCRIPTION Temperature sensors inside the Dual have detected a temperature which exceeds the safety threshold detected The overcurrent protection was triggered with the PROTECT mode of operation sel
16. Host message Tquery Minimum time frame for query transmission n byte x byte time Tresponse Minimum time frame for reply transmission n byte x byte time Trelease Maximum time frame within which the RS485 line can be freed 2 byte time Within this time frame the controller must free the serial line upon completion of reply transmission Such time out is relevant in the RS485 mode only 2 Equivalent to the transmission time of a single byte at the selected baud rate and assumes the following values 8 33 msec at 1200 4 16 msec at 2400 2 08 msec at 4800 1 04 msec at 9600 A data exchange session will therefore assume the timing shown in the following figure Tmin lt T lt Tmax Trelease FRAME FROM FRAME FROM VAACUM OUMP HOST CONTROLLER Figure 30 Timing Dual Controller User Manual 87 900 094 01 I 153 194 5 Technical Information Data Exchange Error Management The following data exchange errors are handled during reception by the controller Tab 19 Error Type Possible Cause Overrun Problems with the Dual controller s data exchange driver Frame error Line noise incorrect baud rate or data corruption Full buffer Too many bytes or data corruption Bad header Inexistant or incorrect header Time out Unrespected time out Treset When a data exchange error occurs the Dual controller does not react in any way to the command received but replies with an NACK message except in cases when an RS485 s
17. Information 148 194 Auto On Pressure Threshold Selection miele ele sfeialu ifto rfp tats ol Telle l Proceed as follows to activate the High Voltage in the event that the pressure measured by the MiniB A Gauge is lower than a certain threshold High Voltage Auto On meja a o ejo o n ulv t Auto ON H V Pressure Threschold Select miei a jefola wiyis Cirle fel ely tots fo elfo al Th At this point the voltage values are displayed The detailed sequence can be seen in the following flow chart Dual Controller User Manual 87 900 094 01 1 NOT INSTALLED MiniGauge ai Type Selection MINI B A CONVECTORR Calibration Selection Atmosphere Calibration Vacuum Calibration Emission On Off Selection Degas Selection Gas Type Selection Manual Setting Is the other Gauge a Convector Auto on Gauge Selection Pon Gauge Setting Technical Information 5 Auto on HV1 Selection Pon Hv1 Setting Auto on HV2 Selection Pon Hv2 Setting Figure 29 Dual Controller User Manual 87 900 094 01 1 Main Menu 149 194 5 Technical Information Messages Associated to the Menu Button Related to the Serial Channel The serial menu described below can be accessed if SERIAL was selected during the channel selection phase As for the previous menu also in this case you can u
18. Istruzioni per l uso 1 Figura 1 Imballo del controller Il controller Dual configurato in fabbrica per funzionare con le seguenti tensioni di alimentazione Modelli 929 7000 1 2 3 e 929 7008 09 10 11 tensione di ingresso da 100 a 120 Vac frequenza di 50 60 Hz Modelli 929 7004 5 6 7 e 929 7012 13 14 15 Tensione di ingresso da 200 a 240 Vac frequenza di 50 60 Hz Installazione Il controller Dual provvisto di un cavo di alimentazione a 3 fili dotato di spina approvata a livello internazionale Utilizzare sempre questo cavo di alimentazione inserendo la spina in una presa di alimentazione munita di collegamento a terra onde evitare scariche elettrostatiche All interno del controller si sviluppano delle alte tensioni che possono provocare delle lesioni gravi o addirittura la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa elettrica Dual Controller User Manual 87 900 094 01 1 15 194 1 Istruzioni per l uso aida Il controller pu essere utilizzato sia come unit da tavolo che come modulo installato in un rack In ogni caso deve essere posizionato in modo tale che l aria possa circolare liberamente attraverso fori di areazione presenti sulla copertura Nel caso in cui il controller viene utilizzato come modulo rack DEVE essere installato in un adattatore alto quattro unit rack per evitare che cada all interno del rack stes
19. Lexington protocol exclusion The following table lists the incompatibilities that remain even though full compatibility MultiVac has been set Dual Controller User Manual 87 900 094 01 I 185 194 5 Technical Information Tab 41 Command Modification HV on off Cannot be used on the gauges Unit of measure Also implements Pascal 02h reply uC firmware version Identifier for VPc ver 0 1 Device number Pump correspondence table modified Dual error status Returns the Dual error codes according to the table Serial reset Implemented on all versions Full meas hv Eliminated Was available on MultiVac 3 0 and later versions only MultiGauge Full status Eliminated Was available on MultiVac 3 0 and later versions only MultiGauge 186 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 The following commands therefore remain unchanged HV on off V meas I meas Pr meas fixed step start protect Vmax Imax Pmax Iprotect Vstep1 Istepl Istep2 SetPt1 SetPt2 P100nA P10uA P10mA P400mA The part relating to the Gauges will not guarantee compatibility since the Gauge cards implemented have been changed with respect to MultiVac In addition configuration commands were unavailable on the MultiVac Accessories Options Tab 42 DESCRIPTION PART NUMBER Rack Adapter 929 0064 High Voltage cables H V bakeable cable radiation resistant 13 929 0705 ft 4 m long wit
20. Mode d emploi anid Le contr leur peut tre utilis soit comme unit de table que comme module install dans une armoire De toute fa on il doit tre plac de mani re a ce que l air puisse circuler librement travers les trous d a ration pr sents dans la couverture Lorsque le contr leur est utilis comme module armoire il DOIT tre install dans un adaptateur d une hauteur de quatre unit s armoire afin d viter qu il ne tombe l int rieur de l armoire m me Le panneau frontal du contr leur n est pas pr vu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur Dual dans des milieux expos s aux agents atmosph riques pluie neige glace En pr sence de poussi re de gaz corrosifs ou dans des milieux explosifs ou fort risque d inflammabilit Si le contr leur est install dans une armoire enlever les quatre pieds de mani re ce qu il soit plac avec au moins 30 mm d espace en haut et en bas Pendant le fonctionnement il est n cessaire de respecter les conditions d environnement suivantes temp rature de 0 C 45 C humidit relative 0 90 non condensante Pour relier le controleur a la pompe utiliser le cable sp cial fourni en option Voir l appendice Technical Information pour toutes informations d taill es sur ces connexions et sur d autres connexions ainsi que sur l installation des cartes optionnelles 64 194 Dual Controller User Manual 87
21. Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Dual Controller User Manual 87 900 094 01 1 DUAL Controller DUAL Controller Dual Controller User Manual 87 900 094 01 1 3 194 DUAL Controller 4 194 Dual Controller User Manual 87 900 094 01 1 Contents Contents 1 Istruzioni per l uso 9 Informazioni generali 11 Descrizione del controller 12 Immagazzinamento 14 Preparazione per l installazione 14 Installazione 15 Uso1 Procedure operative 23 Manutenzione 26 Smaltimento 27 Messaggi di errore 28 2 Gebrauchsanleitung 33 Allgemeines34 Beschreibung des Controllers 35 Lagerung 37 Vor der Installation 37 Installation 38 Gebrauch 40 Bedienung 46 Dual Controller User Manual 87 900 094 01 1 5 194 Contents 6 194 Wartung 49 Entsorgung 50 Fehlermeldungen 51 Mode d emploi 57 Indications Generales 59 Description du controleu
22. Read 3 33h HV on in protect step V Read 4 34h HV on in protect fixed V Read 3 2Dh33h Power off caused by Interlock Panel Read 4 2Dh34h Power off caused by Remote 1 0 Interlock 3 2Dh33h Power off caused by Cable Interlock Read 8 2Dh38h Power off caused by HV Overtemperature Read 2Dh37h Power off caused by Remote I O not Present or Remote 1 0 Fault Dual Controller User Manual 87 900 094 01 I 165 194 5 Technical Information Device Number and Device Type Commands Coding Tab 28 Channel Device Number Device Type HV1 HV2 0 30h Spare E HVI V2 Th B0080 CO mS HV1 HV2 3 33h 150 SC Tr 7 HVI HV2 ss sts AOSC T ET ee u cu TONER ar e HVLHV2 6 3h 500 Diode ND 7 HVI HV2 3h 300 Diode ND VI HV2 8 OD HV1 HV2 g 39h 75 55 40 D ND E HVI HV2 OA 20 25Diode ND auget Gauge OS Covet Gaugel Gauge2 1 31h Mini B A _Gaugel Gauge gt 3h Cold Cathode es 8m nn sa SI 2 E Seid Po 3h RS485 When reading if the required device is missing DUAL replies 3Fh 166 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Interlock Status Coding Tab 29 BitField Interlock type active if 1 01h Reserved always 0 02h Front Panel Interlock equal to bit 20h Oh ooo HVI Remote 1 0 Interlock 74 HUT Cable interlock 10h Reserved always 0 n oi NETTA Front Panel interlock equal to bit 20n 40h HV2 Remote 1 0 Interlock 80h HV2 Cable interlock In the follo
23. T type fuses of the following characteristics x 100 120 Vac SA 200 240 Vac 4A 114 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Interconnections The following figure shows the Controller inter connections HV CONNECTORS REMOTE I O SERIAL PORT MULTI GAUGE EYESYS CONNECTORS Figure 14 Controller Interconnection Female Remote I O connector Optional female Gauge connector s Optional serial male connector Dual Controller User Manual 87 900 094 01 I 115 194 5 Technical Information Start Mode of Operation Tab 4 Pump size type Max voltage and polarity Models with negative H V card Te Tee ss a a ZZ E 150 StarCell MW 275 55 40 StarCell 7000V 250mA 200W Ste 000V TS0mA BW Spare 7000 V 400 mA 400 W Short circuit current Max power 150 Diode Noble Diode 75 Diode Noble Diode 7000V0 40mA MOW 7000 V 7000 V 55 Diode Noble Diode 40 Diode Noble Diode 20 Diode Noble Diode 7000 V 150 mA 150 W Spare 7000 V 400 mA 400 W 116 194 Dual Controller User Manual 87 900 094 01 I Protect Mode of Operation Technical Information 5 When the current value exceeds the trip current for more than 0 2 seconds the power supply turns off the high voltage and an error message is displayed Tab 5 PUMP SIZE TYPE PROTECT TRIP CURRENT Models with negative H V card Dual Control
24. Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
25. auc a aa TT Gea a none eter NNN NSE RRR dala landa immane SR SEITE REESE RE SERRE RE SERIE cececaccacaceaseseseaseaccacessesadeadecadsnsacnacacsccaccadacandencccsreesesseseceseesasensesssassesscsssacsbcssacsccssecsbessecscsecccceceueccatenetaccececuaceteanstdeseseny Startup Plug the controller power cord into a suitable power source Set the main power switch on the rear panel to the ON position The display comes on and the following is displayed lee olo tated elle let Display of the uC software version lle efua Delle Display of the DSP software version Dual Controller User Manual 87 900 094 01 I 131 194 5 Technical Information Upon completion of the initialization routine the Dual controller will return to the condition it was in when powered off If the high voltage was on at power off when powered back on again the Dual controller will re enable it f allowed to do so by all the interlocks Operating Modes Messages Associated to the Mode Button The MODE button is used to change the Dual controller s current operating mode Pressing the MODE button displays the mode currently set Pressing this key cyclically alternates between one of the three modes available LOCAL REMOTE I O SERIAL as shown below Ielelmlelr el hijri I I I slefebiab PTT The three LEDs located underneath the LCD indicate the operating mode that the controller is in 132 194 Dual Control
26. bestehen Agilent zwecks Reparatur oder Austausch kontaktieren E a cir 53 194 2 Gebrauchsanleitung 54 194 MELDUNG ERROR GAUGE FAULT BESCHREIBUNG STORUNGSBEHEBUNG Gauge wurde eine St rung entdeckt zwischen Dual Controller und Gauge pr fen 2 Sicherstellen dass das Eichnormal richtig arbeitet wenn es vom Dual Controller getrennt ist Bleibt der Fehler bestehen Agilent zwecks Reparatur oder Austausch Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 MELDUNG BESCHREIBUNG STORUNGSBEHEBUNG GAUGE X Das Eichnormal wurde vom Das Eichnormal wieder anschlie en ERROR Dual Controller getrennt und die Einschaltprozedur GAUGE NOT wiederholen CONNECT SYSTEM Nur f r Diagnosen durch den Agilent Service Den Hauptschalter des ERROR Dual Controllers aus und wieder einschalten Bleibt der Fehler ER 1 10 bestehen Agilent zwecks Reparatur oder Austausch kontaktieren Dual Controller User Manual 87 900 094 01 1 55 194 2 Gebrauchsanleitung Fehlermeldungen 56 194 Dual Controller User Manual 87 900 094 01 1 Dual Controller User Manual Mode d emploi Indications Generales 59 Description du controleur 60 Emmagasinage 62 Preparation pour l installation 62 Installation 63 Utilisation 65 Contr les ou indicateurs du panneau frontal du contr leur Dual 66 Proc dure de r glage du contraste de l cran LCD du el Contr leur pompe ionique DUAL 67 Tab
27. contr leur Dual a releve contr leur Dual si le probl me persiste ZERO MEAS que soit la tension que le contacter Agilent pour la r paration ou la courant ne sont pas substitution pr sents a la sortie HV qui devait tre active ERREURS DE FONCTIONNEMENT DES MESUREURS 1 OU 2 GAUGE X L interrupteur HV ENABLE 1 Placer l interrupteur HV ERROR est plac sur OFF ou bien la ENABLE sur ON et r p ter la PANEL couverture a t enlev e par procedure d allumage INTERLOCK l unit 2 V rifier que la couverture soit GAUGE X Le microprocesseur ne rel ve Eteindre l alimentateur du contr leur ERROR pas l HW de gestion mesureur Dual et ensuite le r allumer Si le GAUGE NOT probl me persiste contacter Agilent FOUND pour la r paration ou la substitution GAUGE X Un dysfonctionnement a t 1 Verifier le cable de liaison entre ERROR relev dans le mesureur le contr leur et le mesureur GAUGE Eyesys 2 V rifier que le mesureur FAULT fonctionne correctement losrsqu il est d branch du contr leur Dual Si le probleme persiste contacter Agilent pour GAUGE X Le mesureur a t d branch Rebrancher le mesureur et r p ter la ERROR par le contr leur Dual proc dure d alimentation GAUGE NOT CONNECT SYSTEM ERRORS SYSTEM Aux fins du Support technique Agilentt pour le diagnostic Eteindre et Dual Controller User Manual 87 900 094 01 1 79 194 3 Mode d emploi MESSAGE DESCRIPTION INTERVENTION ER 1 10 po
28. de base a 230 Vac avec 1 carte haute tension 929 7004 Hv n gative Unit de base a 230 Vac avec 2 cartes haute tension 929 7005 60 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 DESCRIPTION NUMERO DE PI CE Unit de base 230 Vac avec 1 carte haute tension 929 7006 HV positive Unit de base 230 Vac avec 2 cartes haute tension 929 7007 HV positive Unit de base 120 Vac avec 1 carte haute tension 929 7008 HV negative et carte RS 232 Unite de base 120 Vac avec 2 cartes haute tension 929 7009 HV n gative et 1 carte RS 232 Unit de base 120 Vac avec 1 carte haute tension 929 7010 HV positive et carte RS 232 Unit de base 120 Vac avec 2 cartes haute tension 929 7011 HV positive et 1 carte RS 232 Unit de base 230 Vac avec 1 carte haute tension 929 7012 HV n gative et 1 carte RS 232 Unit de base 230 Vac avec 2 cartes haute tension 929 7013 HV n gative et 1 carte RS 232 Unit de base a 230 Vac avec 1 carte haute tension 929 7014 HV positive et 1 carte RS 232 Unit de base a 230 Vac avec 2 cartes haute tension positive 929 7015 et 1 carte RS 232 Le contr leur Dual est en mesure de g rer jusqu a 2 pompes ioniques de 20 1 s a 500 1 s avec polarit positive ou n gative Il permet d effectuer des lectures fiables de pression jusqu 10 Torr en am liorant ainsi les prestations de la pompe en ce qui concerne le champ entier op rationnel Avec 2 mesureurs
29. le syst nme acceptera uniquement les commandes de la modalit relative mais il est en mesure de visualiser des informations et d acqyerir des signaux et des donn es contemporairement de toutes les interfaces Dual Controller User Manual 87 900 094 01 1 71 194 3 Mode d emploi L unit est projet e afin de fonctionner dans les modalit s suivantes mode START mode PROTECTED Dans le mode START le contr leur fournit toute la puissance ind pendamment des conditions de la pompe jusqu a atteindre le courant de court circuit Cette modalit de fonctionnement doit tre utilis e pour actionner la pompe a haute pression Dans le mode PROTECTED le controleur limite le courant a la sortie et teint la haute tension lorsque la valeur du courant d passe le seuil pendant plus de 0 2 secondes Dans des conditions de fonctionnement normal on pr f re utiliser cette modalit puisque en cas de panne de pompe ionique ou cable caus e par un court circuit ou une haute charge la haute tension s teint Se r f rer a l appendice Technical Information pour des informations d taill es sur les modalit s op rationnelles Mode de fonctionnement Step Le mode Step doit tre choisi pour am liorer les performances de la pompe et effectuer des lectures a une pression tr s basse sans influer sur le courent de dispersion Dans le mode Step le Dual controleur choisit la tension en sortie la plus convenable selon la pression d
30. selezionata una qualsiasi modalit operativa il sistema accetter solamente i comandi della relativa modalit per in grado di visualizzare informazioni e acquisire segnali e dati contemporaneamente da tutte le interfacce Dual Controller User Manual 87 900 094 01 1 23 194 1 Istruzioni per l uso L unit progettata per funzionare nelle seguenti modalit modalit START modalit PROTECTED Nella modalit START il controller fornisce tutta la potenza indipendentemente dalle condizioni della pompa fino a raggiungere la corrente di corto circuito Questa modalit di funzionamento deve essere utilizzata per avviare la pompa ad alta pressione Nella modalit PROTECTED il controller limita la corrente in uscita e spegne l alta tensione quando il valore di corrente supera la corrente di soglia per oltre 0 2 secondi In condizioni di normale funzionamento questa la modalit preferita in quanto in caso di guasto alla pompa ionica o al cavo causato da corto circuito o alto carico l alta tensione si spegner Fare riferimento Technical Information per informazioni dettagliate sulle modalit operative Modalit operativa Step La modalit Step deve essere scelta alfine di ottimizzare le prestazioni della pompa e consentire le letture a pressione molto bassa senza influenzare la corrente di dispersione Nella modalit Step il controller Dual sceglie la tensione in uscita pi appropriata secondo l
31. supplied as option Refer to the appendix entitled Technical Information for detailed information on these and other connections Dual Controller User Manual 87 900 094 01 1 Usage Instructions for Use 4 TER gt lt gt Pump Ground Figure 2 Ground Connections The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted Close the interlock using the appropriate counter connector when using a cable which is not equipped with the interlock connector This section provides you with the major operating procedures For more information and for the procedures that concern connections or specific options refer to the section USAGE in the Technical Information appendix Before using the controller perform all electrical and pneumatic connections and refer to the manual of the connected pump To avoid injury to persons or damage to the equipment if the pump needs to be placed on a table make sure that the table is stable Never activate the pump if the input flange is not connected to the system or if it is not closed with the blank off flange Dual Controller User Manual 87 900 094 01 1 89 194 4 Instructions for Use Controls and Indicators on the Dual Controller Front Panel The following figure shows the Dual controller front panel The following table gives the definition and function of the controls and indica
32. 1 HV2 Status 30h negative polarity 31h positive Vmax Vmax variable Read HV1 HV2 Integer V 3000 7000 step 100 Write Imax Imax variable Read HV1 HV2 Integer MA 100 400 step 10 E Write Pmax Pmax variable Read HV1 HV2 Integer W 100 400 step 10 Write Iprotect Iprotect variable Read HV1 HV2 Integer mA 10 100 step 10 Write Vstep1 Vstep1 variable Read HV1 HV2 Integer V 3000 7000 step 100 Write Istep1 Istep1 variable Read HV1 HV2 Exp A 1 0E 9 1 0E1 rr 7 Write Vstep2 Vstep2 Read HV1 HV2 Integer V 3000 7000 step 100 Write Istep2 Istep1 variable Read HV1 HV2 Exp A 1 0E 9 1 0E1 Write SetPt1 SetPt1 variable Read HV1 HV2 Exp Torr 1 0E 9 1 0E1 have to be Set Point 1 Write greater than SP2 SetPt2 SetPt2 variable Read HV1 HV2 Exp Torr 1 0E 9 1 0E1 SI Set Poit 2 We Remote 1 0 Reads the status Read HV1 HV2 BitField See Remote 1 0 table Output of the Remote 1 0 _ outputs Remote 1 0 Reads the status Read HV1 HV2 BitField See Remote 1 0 table Input of the Remote 1 0 inputs Dual Controller User Manual 87 900 094 01 I 169 194 5 Technical Information High Voltage Commands Tab 31 Command Name Binary ASCII MultiGauge Compat General Usage Protocol Commands ASCII Hex ASCII Hex ASCII Hex A bd ____u _mm __ _b_____ start protect CO 43h30h CO 43h30h 61 36h31h OO on a se e cc ve NE E Imax lO 49h30h lO 49h30h 64 36h34h Pmax JO Anh JO ann 65 33h
33. 1X10 1X10 1X10 1X10 PRESSURE Torr Figure 11 Recorder Output Pressure 112 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Controller Outline The outline dimensions for the Dual controllers are shown in the following figures ON PROT GON PRIT Enable HV 0000 ur land AIT O DUAL O on orF aN orF Jon Pump Centrelter rer 5 56 141 2 EL L 8 32 211 4 Figure 12 Controller Model Dimensions Dual Controller User Manual 87 900 094 01 I 113 194 5 Technical Information Fuse Holder The following figure shows the location of this assembly FUSE HOLDER Figure 13 Rear Panel Proceed as follows to replace one or both fuses Remove the assembly by levering in position A with a small screwdriver Replace the fuse Use only
34. 1h36h allowed Li 3 iii gr implemented OOOO Di Write not allowed to channel ON 64 36h34h Write not allowed to channel OFF 128 21h32h38h a NO N a Dual Controller User Manual 87 900 094 01 1 179 194 5 Technical Information MultiVac Compatibile Serial Error Coding Tab 39 Full Compatible MV Value Description 1 31h Not used 2 32h Error in the power supply unit n code 4 34h Parameter error Il dar i pane B 16 hh Out of limits error 32 33h32h Unallowed step error 64 36h34h Attempt to modify values with en pump powered on 128 31h32h38h Attempt to read measurements eae with pump powered off So So _ _____ SMR __ 512 3b5h31h32h Intervention on non existing RAT II i TTT pump ANOT u N nn emp dt __Ee 2048 32h30h34h38h Intervention on non present ER remote 1 0 error 4096 34h30h39h36h Write attempt made in ee REMOTE COMM mode 8192 38h31h39h32h Modification allowed on SPARE pump only In the following example is shown a bad command send to the DUAL Binary Protocol u 04 AO 31 V 81h 30h 34h 41h 80h 33h 31h 76h e05A03 13T Ih 30h 35h 41h 30h 33h 21h 33h 54h 180 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Ascii Protocol 04 AO 3 1 0377 24h 30h 34h 41h 30h 33h 81h 80h 33h 37h 37h 05 AO 3 3 0385 24h 30h 35h 41h 30h 33h 21h 33h 30h 33h 38h 35h Multigauge Compatible Protocol 3 30 23h 33h 33h 30h 3Fh Dh gt 3 00 3 3Eh 33h 30h 30h 21h 33h Dh
35. 230 Vca con 2 schede alta tensione positive 929 7007 OS Unita base da 120 Vca con 1 scheda alta tensione negativae 1 929 7008 scheda RS232 Unita base da 120 Vca con 2 schede alta tensione negative e 1 929 7009 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 DESCRIZIONE PART NUMBER Unit base da 120 Vca con 1 scheda alta tensione positiva e 1 929 7010 scheda RS232 Unit base da 120 Vca con 2 schede alta tensione positive e 1 929 7011 scheda RS232 Unit base da 230 Vca con 1 scheda alta tensione negativa e 1 929 7012 scheda RS232 Unit base da 230 Vca con 2 schede alta tensione negativee 1 929 7013 scheda RS232 Unit base da 230 Vca con 1 scheda alta tensione positiva e 1 929 7014 scheda RS232 Unit base da 230 Vca con 2 schede alta tensione positive e 1 929 7015 scheda RS232 Il controller Dual in grado di gestire fino a due pompe ioniche dalla 20 l s alla 500 l s con polarit positiva o negativa Permette di eseguire delle letture affidabili di pressione fino a 10 Torr ottimizzando quindi le prestazioni della pompa sull intero campo operativo Con due misuratori Eyesys opzionali possibile eseguire letture di pressione con differenti precisioni e campi di musura Il controller Dual pu essere gestito nelle modalit LOCAL REMOTE I O e SERIAL attraverso le interfacce RS 232 422 e 485 le interfacce RS422 e RS485 sono opzionali Contattare l ufficio vendite della Agilent per ordi
36. 250VAC 0 2A Other modes Open at 150VDC 0 5A at 30VDC Relay contact 0 5A at 250VAC 0 2A PU OVO OS RASE aaa OV to 5V Min impedance 1 MQ OV to 7V Min impedance 1 MQ 10 30VAC 1 5W the optoisolated input Description HV On Closed RULES P lt Pthreshold set point 2 Closed P gt Pthreshold set point 2 Open P lt Pthreshold set point 1 Closed P gt Pthreshold set point 1 Open Interlock OK Closed Interlock FAULT Open HV Off after FAULT Closed Other condition Open Serial mode Closed Protect ON Closed Protect OFF Open OV P lt 10 1 Torr DV P 10 Torr Logarithmic OV gt OKV IV gt TKV Linear External voltage to power Not used Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Figure 18 Typical Output Connection Female Remote 1 0 Connector Input Signal Tab 10 Pin Signal Maximum Ratings Description 11 positive External interlock 8 to 30 VDC VAC 15 mA max Interlock closed The H V output of 30 negative Digital input the corresponding H V channel is enabled Interlock open The H V output of the corresponding H V channel is disabled 12 positive Confirm HV ON 8 to 30 VDC VAC 15 mA max Active on the positive edge If a 31 negative Digital input positive edge is detected the H V output is switched on if both interlock and output ON OFF are closed 13 positive Output ON OFF 8 to
37. 30 VDC VAC 15 mA max Output ON OFF open The H V 32 negative Digital input output of the corresponding channel is switched OFF Output ON OFF closed The H V output of the corresponding channel is enabled 14 positive Start Protect 8 to 30 VDC VAC 15 mA max Closed Protect selected 33 negative mode Open Start selected Digital input Dual Controller User Manual 87 900 094 01 I 123 194 5 Technical Information Pin Signal Maximum Ratings Description 15 positive Communication 8 to 30 VDC VAC 15 mA max Active on the positive edge If a 34 negative select positive edge is detected the DUAL Digital input switches alternatively from Serial Communication operation to Remote 1 0 operation and vice versa 16 positive StepV FixedV 8 to 30 VDC VAC 15 mA max Closed Step V 35 negative mode Open Fixed V Digital input The External Interlock it will operates independently from the operational mode Local Remote Communication Remote 1 0 In any operational mode the Interlock must be closed to start the pump The input signals are only active if the operational mode is set to Remote The output signals are active in all operational modes EXTERNAL DUAL INTERNAL 5000 i i T D f i EXTERNAL VOLTAGE 8 to 30 Vdc AC or INTERNAL VOLTAGE Pin 6 positive Pin 23 Negative Figure 19 Typical Input Connection 124 194 Dual Controller User Manual 87 900 094 01
38. 4 01 I 151 194 5 Technical Information Hardware Signals Management The RX TX and GND signals are present on the data exchange line There is no flow control implemented through RTS CTS and the DTR and DSR signals are not handled The RS232 RS422 and RS485 physical interfaces are implemented The RS485 requires software addressing and therefore a binary protocol is needed Transmission Format and Timeout The serial data transmission parameters are listed below Tab 17 Speed 1200 2400 4800 9600 baud 7 I E EE fe Data bit 8 D 1 All the baud rates indicated are supported the default rate is 9600 Data exchange is performed in the Half Duplex mode To guarantee a synchronized data flow and to prevent conflicts the timings indicated in the table below must be respected 152 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Tab 18 Treset Maximum delay between consecutive bytes of the same data 2 byte time packet The controller can reinitialize reception if this time frame expires without data exchange Tmin Minimum time frame before a reply can be initiated The 4 msec controller s reply message cannot begin until the expiry of this time frame which is initiated at the end of the Host message Tmax Maximum time frame within which a reply can be given The 100 msec controller s reply message cannot begin until the expiry of this time frame which is initiated at the end of the
39. 5 Iprotect KO 4Bh30h KO 4Bh30h 66 36h36h Viste LO 4Ch30h LO 4Ch30h 67 SE u nn u NS eC OS a Er nn _ ca a SEA nr ai mE stn E Istep2 O0 4Fh30h O0 4Fh30h 70 3730h un 1 ur 0 oo Ser 00 sthgon OO Sinson 72 Sn E Remote 1 0 Output g0 67h30h g0 67h30h 73 37h33h Remote 1 0 Input h0 68h30h h0 68h30h 74 37h34h 170 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Remote 1 0 Commands Coding Tab 32 Bitfield Remote 1 0 Input Remote 1 0 Output 01h id 1 0 board always 1 High Voltage enable 02h 1 0 board OK always Set Point active Oh Stepmode SetPointlactie 08n Remotemode Intedockactie i 10h Protect mode High Voltage fault u Ti mode 1 u rea amp 4 o va 80h Remotel Ointerlock Notused always 0 Ct The following example shows the reading on the High Voltage 1 the status of the Start Protect Binary Protocol 04 COI X 81h 30h 34h 48h 30h 31h 3Fh 78h e 04 CO 10W 1h 30h 34h 48h 30h 31h 30h 77h Ascii Protocol 04 CO 1 0391 40h 30h 34h 43h 30h 31h 3Fh 30h 33h 39h 31h 04 CO 1 0 0348 24h 30h 34h 48h 80h 31h 80h 30h 33h 34h 38h Dual Controller User Manual 87 900 094 01 1 171 194 Technical Information 5 Multigauge Compatible Protocol 161 23h 31h 36h 31h 3Fh Dh gt 1 610 5Eh 31h 36h 31h 30h Dh MiniGauge Commands Tab 33 Command emiss degas on off gas correction auto on auto on value
40. 56 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Furthermore the physical measurements visible from the serial line will always have the related unit of measure indicated This applies above all for pressure measurements that are not subject to the settings made on the Dual controller The RS485 mode is normally used in a data exchange network where the software addressing of the different nodes connected maximum 32 is only made possible by means of the binary protocol Therefore in the RS485 mode the Dual controller will only recognize the binary protocol and will ignore any data exchange performed using the ASCII and MultiGauge Compatible Protocol In the Remote I O mode only the commands present on the digital outputs of the Remote I O Fixed Step Local Remote Start Protect pump on off are read only active The write commands are enabled in the automatic mode only In addition the remote mode cannot be selected during a menu editing phase using the front panel Dual Controller User Manual 87 900 094 01 I 157 194 5 Technical Information Binary Protocol Host to Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Tab 22 Field No of bytes Value Description Header 1 81h Header for the serial RS232 command 81h A0h RS422 Header and ad
41. Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschlu und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel USAGE im Anhang zu Technical Information Vor Benutzung des Controllers m ssen s mtliche elektrischen und pneumatischen Anschl sse ausgef hrt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden Steht die Pumpe auf einem Tisch muss auf stabilen Stand geachtet werden da sonst die Gefahr von Verletzungen und Ger tesch den besteht Die Pumpe nie einschalten wenn der Eingangsflansch nicht am System angeschlossen bzw nicht mit dem Schlie flansch abgedeckt ist Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Schalter und Anzeigen auf der vorderen Schalttafel Die folgende Abbildung zeigt die vordere Schalttafel des Dual Controllers und die Tabelle erlautert die Bedeutung und Funktion der Schalter und Anzeigen CHANGE CONFIG i start START Prot 1 PROT 2 2 gr ne LEDs zur anzeige der gew hlten Betriebsart LED LOKAL an wenn der lokale Modus gew hlt ist LED SERIELL an wenn der Modus SERIELL gew hlt ist 3 Schalter HV ENABLE ist unabh ngig von der gew hlten Betriebsart aktiv Um die HV von der vorderen Schalltafel den Fern E As oder ber die serielle Verbindung aus einzuschalten muss dieser Schalter auf EIN stehen 4 Taste
42. C11 Software Error configuration register 3 33h test mode invalid uC 68HC11 operating mode Software Error 4 34h copyright violation of the signature in the ROM or Software Error the ROM was corrupted 5 35h eeprom fault checksum or non volatile memory Software Error write errors Factory defaults are automatically loaded 6 36h version number incompatible uC and Dsp versions Software Error 7 37h hv dsp not found the Dsp does not respond during Software Error the uC initialization phase 8 38h dsp fault the Dsp does not respond during normal Software Error o operation 9 39h invalid option option card not configured correctly Software Error 10 31h30h unknow option generic execution error Software Error 182 194 Dual Controller User Manual 87 900 094 01 I Technical Information 5 Specific Protocol Settings Ack Nack Mode Setting the appropriate bit via the Serial Property command enables the Dual to transmit the Acknowledge 06h flow control Write Reply Setting the appropriate bit via the Serial Property command enables the Dual to provide a reply after a write command with the typical read communication Example HV power on header A011 chk reply HV on header A011 chk reply HV not on header A010 chk Multiple Commands Setting the appropriate bit via the Serial Property command enables multiple command function With this function it is possible to transmit to the Dual query command sequences with
43. Dual Controller Models 929 7000 929 7001 929 7002 929 7003 929 7004 929 7005 929 7006 929 7007 929 7008 929 7009 929 7010 929 7011 929 7012 929 7013 929 7014 929 7015 Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi User Manual 87 900 094 01 1 05 2011 u Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 094 01 1 Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance o
44. Dual Controller Error Status Value Error Type Error Reference High Voltage errors 1 31h High Voltage off due to front panel interlock Panel Interlock activation 2 32h High Voltage off due to Remote 1 0 interlock Remote Interlock activation 3 33h High Voltage off due to Cable HV interlock Cable Interlock activation De eee ey Kor Bund 5 35h High Voltage off due to a general DSP determined HV Fault 6 36h High Voltage off due to an HV module HV Overtemperature overtemperature determined by the DSP 7 37h Remote 1 0 card not present or faulty R 1 0 not found 8 38h Remote 1 0 card present but faulty R 1 0 fault Dual Controller User Manual 87 900 094 01 I 181 194 5 Technical Information Value Error Type Error Reference 9 39h High Voltage off due to the protect function Protect activation 10 31h30h High Voltage off due to shortcircuit protection Short Circuit nn activation a 11 31h31h High Voltage off due to an HV module overvoltage Over Volt Curr or overcurrent determined by the DSP 12 31h32h High Voltage off due to the zero measurement Zero Meas protection activation MiniGauge errors 1 31h MiniGauge off due to front panel interlock Panel Interlock activation uu 2 32h The selected Minigauge was not recognized Gauge not found re 33h The Minigauge is signaling a Fault condition Gauge fault A 34h The selected Minigauge was disconnected Gauge not connected 2 32h config register incorrect value in the uC 68H
45. Eyesys Gauges optionnels l on peut effectuer la lecture de pression avec les diff rentes pr cisions et les diff rents champs de mesure Le contr leur Dual peut tre g r en mode LOCAL ELOIGNE I O ET SERIEL par l interm diaire des interfaces RS 232 422 et 485 les interfaces RS422 et RS485 sont optionnelles Dual Controller User Manual 87 900 094 01 1 61 194 3 Mode d emploi Contacter le bureau de ventes Agilent pour commander les systemes avec RS 422 485 et les mesureurs Eyesys Gauge Les modalit s selon lesquelles les commandes op rationnelles sont fournies d pendent de la modalit op rationnelle ou se trouve le controleur Dans le mode LOCAL toutes les commandes sont fournies par l interm diaire du panneua frontal Dans le mode ELOIGNE I O toutes les commandes sont fournies par l interm diaire de signaux I O relay contacts directement sur le connecteur Remote Control plac sur le panneau post rieur Dans le mode SERIEL toutes les commandes sont fournies par l interm diaire d un ordinateur locale reli l interface RS 232 422 485 Emmagasinage Pour transporter et emmagasiner le contr leur il faut observer les conditions suivantes d environnement temp rature de 20 C a 70 C humidit relative 0 95 non condensante Preparation pour l installation 62 194 Le controleur est fourni dans un emballage de protection sp cial si l on constate des dommages
46. HV X ERROR The Dual controller s Repeat the Dual power on procedure ZERO MEAS microprocessor has if the problem persists contact detected that both voltage Agilent for repair or exchange and current were missing from the H V output that should have been active GAUGE X The HV ENABLE switch is 1 Set the HV ENABLE switch to ERROR set to OFF or the cover has ON and then repeat the power PANEL been removed from the unit on procedure INTERLOCK 2 Make sure that the cover is installed correctly GAUGE X The microprocessor does not Switch the Dual controller power ERROR detect the Gauge control H W supply unit off and then on again If GAUGE NOT the problem persists contact Agilent FOUND for repair or exchange GAUGE X A malfunction has been 1 Check the connection cable ERROR detected in the connected between the Dual controller and GAUGE Eyesys Gauge Gauge FAULT 2 Make sure that the Gauge works correctly when disconnected from the Dual controller If the problem persists contact Agilent for repair or exchange GAUGE X The Gauge has been Reconnect the Gauge and repeat the ERROR disconnected from the Dual power on procedure GAUGE NOT controller CONNECT SYSTEM ERRORS SYSTEM For Agilent Service diagnostic purpose only Switch OFF and ON again ERROR the power to the DUAL system if the problem persists contact Agilent ER 1 10 for repair or exchange 102 194 Dual Controller User Manual 87 900 094 01
47. Il contrasto del display nonostante sia impostato dalla fabbrica necessiter di essere regolato qualora si verifichi una delle seguenti condizioni La retroilluminazione attiva ma sul display non visualizzato nessun carattere La retroilluminazione attiva ma sul display visualizzata una matrice a quadretti neri Dual Controller User Manual 87 900 094 01 1 19 194 1 Istruzioni per l uso necessario eseguire la procedura di regolazione Figura 4 Per eseguire la procedura di regolazione del contrasto del display accendere il controller e al termine dell inizializzazione premere il tasto ENTER collocato sul pannello anteriore tenendolo premuto fino a quando non ottenuta l impostazione desiderata Rilasciando il pulsante ENTER il valore di contrasto sar salvato nella memoria dell unit 20 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 START START PROT1 J PROT2 Rs amp AH Sara Sent DUAL O Figura 5 Quando l unit accede alla modalit di regolazione del contrasto il display visualizza il relativo messaggio e i LED del display iniziano a lampeggiare Pannello posteriore del controller Dual La seguente figura riporta i controlli e connettori sul pannello posteriore del controller Dual La configurazione riportata nella figura consiste in due schede ad alta tensione HV due schede Set Point Remote Control u
48. NOT CONNECT SYSTEM ERRORS SYSTEM Ad uso del Supporto tecnico Agilent per la diagnostica Spegnere e ERROR riaccendere il controller Dual se il problema persiste contattare ER 1 10 Agilent per la riparazione o sostituzione Dual Controller User Manual 87 900 094 01 1 31 194 1 Istruzioni per l uso Messaggi di errore 32 194 Dual Controller User Manual 87 900 094 01 1 Dual Controller User Manual Gebrauchsanleitung Allgemeines 34 Beschreibung des Controllers 35 Lagerung 37 Vor der Installation 37 Installation 38 Gebrauch 40 Schalter und Anzeigen auf der vorderen Schalttafel 41 Kontrasteinstellung auf dem LCD Bildschirm des Controllers mit lonenpumpe DUAL 42 Hintere Schalttafel des Dual Controllers 44 Bedienung 46 Betriebsarten 46 Stufenbetrieb 47 Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus 48 Starten der Pumpe 49 Stoppen der Pumpe 49 Wartung 49 Entsorgung 50 Fehlermeldungen 51 Ubersetzung der Originalanleitungen gt Agilent Technologies 33 19 2 Gebrauchsanleitung Allgemeines VORSICHT 34 194 Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei Nichtbeachtung auch teilweise der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der einheimischen hier
49. a pressione all interno della pompa vedere la figura seguente 24 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 Figura 7 Cambiamento della tensione in uscita vs pressione Accensione del controller dal pannello frontale modalit LOCAL Per accendere l alta tensione HV occorre che l interlock esterno sia chiuso connettore inserito Nel caso in cui non venga eseguita alcuna connessione esterna inserire i ponticelli di chiusura e interlock forniti con l unit Procedere come segue per alimentare il controller e abilitare la tensione sui connettori di alta tensione H V Inserire il cavo proveniente dalla pompa ed il pin di interlock loopback del cavo H V nei relativi connettori sul pannello posteriore Predisporre l interruttore di alimentazione sul pannello posteriore nella posizione di ON Predisporre l interruttore ENABLE HV sul pannello anteriore nella posizione ON Premere i pulsanti HV 1 2 ON OFF LED ON si accende Dual Controller User Manual 87 900 094 01 1 25 194 1 Istruzioni per l uso Con un solo circuito H V installato entrambe le righe del display sono dedicate alla pompa numero uno mentre con due circuiti installati ogni riga dedicata ad una p
50. ader command channel command data terminator Dual controller to Host reply format header response channel command data terminator where Tab 24 Field No of Bytes Value Description Header command l 25h Header Header response 1 3Eh Header gt Channel 1 30h No Channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 D 35h Serial Communication Command 2 See commands description n Data M ve commands description Terminator 1 0Dh Carriage Return Field No of Bytes Value Description 160 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Following are shown a typical command with the answers of the DUAL in the three different formats The command is the status at the the High Voltage 1 Binary Protocol 04 A01 Z 81h 30h 34h 41h 30h 81h 3Fh 7Ah e04A010u 1h 30h 34h 41h 80h 31h 30h 75h Ascii Protocol 04 AO 0389 40h 30h 34h 41h 30h 31h 3Fh 30h 33h 38h 39h 04 A01 0346 24h 30h 34h 41h 80h 31h 80h 38h 34h 36h Multigauge Compatible Protocol 1 30 23h 31h 33h 30h 3Fh Dh gt 1300 SEh 31h 33h 30h 30h Dh Dual Controller User Manual 87 900 094 01 1 161 194 Technical Information List of Commands The commands that have been implemented are described in the following tables General Commands Tab 25 Command Local remote HV on off Unit of measure uC firmware version DSP firmware version Device nu
51. al pannello frontale modalit LOCAL 25 Avvio della pompa 26 Traduzione delle istruzioni originali li Agilent Technologies 9 1 1 Istruzioni per l uso Informazioni generali Spegnimento della pompa 26 Manutenzione 26 Smaltimento 27 Messaggi di errore 28 10 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 Informazioni generali AVVERTENZA ATTENZIONE Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il MiniVac un alimentatore ad alta tensione e bassa potenza utilizzato per alimentare le pompe Ioniche Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nella sezione Technical Information Questo manuale utilizza le seguenti convenzioni I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi l
52. annungskarte n Tab 1 BEZEICHNUNG BESTELLNUMMER Dual Modelle Grundmodell 120 VWs mit 2 HV Karten m negativer Polung 929 7001 Grundmodell 120 VWs mit 1 HV Karte m positiver Polung 929 7002 Grundmodell 230 VWs mit 1 HV Karte m negativer Polung 929 7004 Grundmodell 230 VWs mit 1 HV Karte m positiver Polung 929 7006 Grundmodell 230 VWs mit 2 positiven HV Karten 929 7007 Grundmodell 120 VWs mit 1 HV Karte m negativer Polung und 929 7008 RS 232 Karte Grundmodell 120 VWs mit 2 HV Karten m negativer Polung 929 7009 und einer RS 232 Karte I O SISSI IN n O rr rr EN Dual Controller User Manual 87 900 094 01 1 35 194 2 Gebrauchsanleitung des Controllers BEZEICHNUNG BESTELLNUMMER Grundmodell 120 VWs mit 1 HV Karte m positiver Polung 929 7010 und RS 232 Karte Grundmodell 120 VWs mit 2 HV Karten m positiver Polung und 929 7011 einer RS 232 Karte Grundmodell 230 VWs mit 1 HV Karte m negativer Polung und 929 7012 RS 232 Karte Grundmodell 230 VWs mit 2 HV Karten m negativer Polung 929 7013 und einer RS 232 Karte Grundmodell 230 VWs mit 1 HV Karte m positiver Polung 929 7014 und RS 232 Karte Grundmodell 230 VWs mit 2 HV Karten m positiver Polung und 929 7015 einer RS 232 Karte Der Dual Controller kann bis zu 2 Ionenpumpen von 20 1 s bis 500 1 s mit positiver oder negativer Polung steuern Er gewahrleistet eine zuverl ssige Ablesung von Druckwerten bis zu 10 Torr und verbessert die Leistung der Pumpe inner
53. ans la pompe voir le dessin suivant 72 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 Figure 7 Changement de la tension en sortie par opposition la pression Allumage du contr leur du panneau frontal modalit LOCAL Pour allumer le haut voltage H V il faut que l interlock externe soit ferm connecteur branch Au cas o aucune connexion externe n est effectu e brancher les pontets de fermeture interlock en dotation avec l unit Proc der comme il suit pour alimenter le contr leur et rendre apte la tension sur les connecteurs de haut voltage HV Introduire le cable provenant de la pompe et le pin d interlock de fermeture du cable HV dans les connecteurs relatifs sur le panneau post rieur Disposer l interrupteur d alimentation sur le panneau post rieur en positon ON Disposer l interrupteur ENABLE HV sur le panneau ant rieur en position ON Appuyer sur les boutons HV 1 2 ON OFF ON LED s allume Dual Controller User Manual 87 900 094 01 1 73 194 3 Mode d emploi Avec un seul circuit H V install les lignes du display sont d di es a la pompe num ro un tandis qu avec deux circuits install s chaque ligne est d di e a une pompe diff rente
54. ase read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United S
55. auto on hv1 auto on value hv1 172 194 Description Emission on off Mini B A degas mode value Emission auto on mode Emission auto on value Auto on High Voltage 1 mode Auto on High Voltage 1 value Gas Correction Mode Read Write Write Read Write Read Write Read Read Write Read Write Read Channels Gauge 1 Gauge 2 Gauge 1 Gauge 2 Gauge 1 Gauge 2 Gauge 1 Gauge 2 Gauge 1 Gauge 1 Gauge 2 Gauge 1 Gauge 2 Format Status Status Status Exp Torr Status Exp Torr Integer Possible Values 30h emiss Off 31h emiss On 32h emiss Auto Mini B A and 30h off 31h on Mini B A only 10 999 Mini B A only 30h disable 31h enable ConvecTorr only 1 0E 2 1 0E1 ConvecTorr only 30h disable 31h enable Mini B A and ColdCathode only 1 0E 8 1 0E1 Mini B A and ColdCathode only Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Possible Values 30h disable 31h enable Mini B A and ColdCathode only 1 0E 8 1 0E1 Mini B A and Description Mode Channels Format Auto on High Read Voltage 2 mode Write Command auto on hv2 Gauge 1 Status Gauge 2 auto on value hv2 Gauge 1 Exp Torr Gauge 2 Auto on High Read Voltage 1 value Write MiniGauge Commands Tab 34 Command Name MultiGauge Compat General Usage Protocol Commands auto o
56. bit 1 read only nn 0 none 1 odd 2 even 3 not valid The following example shows a reading of the serial property Binary Protocol 04xb 0 81h 30h 34h 78h 62h 30h 8Fh 1h Oh e 1 1 xb 000000100 lh 81h 81h 78h 62h 30h 30h 30h 30h 30h 30h 81h 30h 30h 2Ah Ascii Protocol 04 xb 0 0493 40h 30h 34h 78h 62h 30h 3Fh 30h 34h 39h 38h 11 xb 0 00000100 0785 24h 81h 81h 78h 62h 30h 80h 30h 30h 30h 30h 81h 30h 30h 50h 30h 37h 38h 35h 178 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Multigauge Compatible Protocol 0 81 23h 30h 38h 31h 3Fh Dh gt 0 81 00000100 3Eh 30h 38h 31h 30h 80h 30h 30h 31h 30h 30h Dh The answer means that the unit is in ACK NACK mode Protocol Errors Tab 38 Value u Sth Lu 32h S 33h T A LU a 35h 6 36h 7 37h 8 88h 9 38h If incongruencies are detected in the composition of the data packet sent to the Dual controller in other words a correct reception but an incorrect data format the Dual controller will reply with an error code identified by the 21h command according to the following table Description Value In Full Comp Mv Reserved checksum error ee 0 _ 30h en E Non existent command code 1 an E Channel not valid for the selected command 2 Sth Di Write mode not allowed for the selected command 4096 34h30h39h36h Di Unvalid or non congruent data transmitted 4 34h Write value exceeding the allowed limits or step not 16 3
57. boutons START PROT 1 et START PROT 2 utilis s pour s lectionner Procedure de r glage du contraste de l cran LCD du el Contr leur pompe ionique DUAL Le contr leur pompe ionique DUAL est pourvu d un cran LCD install dans le panneau ant rieur de l unit Le contraste de l afficheur nonobstant le fait qu il est d j tabli lusine aura besoin d tre r gl si une des conditions suivantes a lieu La retroillumination est active mais sur l afficheur n est affich aucun caract re La retroillumination est active mais sur l afficheur est affich e une matrice carreaux noirs Dual Controller User Manual 87 900 094 01 1 67 194 3 Mode d emploi Il est n cessaire d effectuer la procedure de r galage Figure 4 Pour effectuer la proc dure de r glage du contraste de l cran allumer le contr leur et la fin de l initialisation appuyer sur la touche ENTER plac e sur la panneau ant rieur en gardant appuy jusqu l obtention d sir e En laissant la touche ENTER la valeur de contraste sera sauvegard e dans la m moire de l unit 68 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 wu Contrast LCD Adjustment DUAL O Figure 5 Lorsque l unit arrive a la modalit de r glage du contraste l afficheur affiche le relatif message et les LED de l afficheur commencent a clignoter
58. d Not Used Interlock Status Common External Voltage Power Interlock status N O Fault Common External Voltage Ground Fault N O Remote Mode Common Not Used Remote Mode N O Protect Common Not Used Protect Mode N O Figure 17 Remote 1 0 Connector The following figure gives the connector pinout with related signals description Dual Controller User Manual 87 900 094 01 I 121 194 Technical Information Female Remote 1 0 Connector Output Signal Tab 9 Pin 10 N O 29 common 9 N 0 28 common 8 N 0 27 common 24 N 0 25 common 4 N O 5 common 21 N 0 22 common 1 N 0 2 common 18 positive 19 ground 37 positive 19 ground 6 power 23 ground 17 36 3 7 20 26 122 194 Signal High Voltage on Digital output Set point 2 Digital output Set point 1 Digital output Interlock status Digital output Fault Digital output Remote mode Digital output Protect mode Digital output Pressure recorder output Analog output Voltage recorder output Analog output External voltage Power Maximum Ratings Relay contact 0 5A at 250VAC 0 2A e SELLES Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Relay contact 0 5A at
59. di vendita Dual Controller User Manual 87 900 094 01 1 27 194 1 Istruzioni per l uso Messaggi di errore Per certi tipi di guasti il controller esegue un test di autodiagnostica e visualizza uno dei seguenti messaggi riportati nella tabella seguente Tab 2 MESSAGGIO DESCRIZIONE ERROR PANEL INTERLOCK ERROR REMOTE INTERLOCK ERROR CABLE INTERLOCK L alta tensione HV stata spenta da un interlock ricevuto dal pannello frontale o dalla copertura l interruttore HV ENABLE predisposto su OFF oppure copertura rimossa dall unit L alta tensione HV stata spenta da un interlock ricevuto dal Remote 1 0 spenta a causa di un interlock del cavo HV L alta tensione HV stata AZIONE CORRETTIVA i DEE A TENSE 1 Impostare l interruttore HV ENABLE su ON e ripetere la procedura di accensione dell alta tensione H V Assicurarsi che la copertura sia installata correttamente Controllare che siano installati gli interruttori di richiusura con relativi interlock esterni ponticellati Assicurarsi che l interlock esterno sia chiuso _ Nel caso in cui la pompa utilizza un cavi HV con interlock di sicurezza controllare che il connettore all estremit della pompa sia inserito correttamente e che il pin di richiusura all estremit dell unit sia inserito nel relativo connettore sul pannello posteriore Nel caso in cui la pompa utilizza un cavo HV a polo
60. dress for the serial RS485 129 160 Header 1 01h Header for the serial RS232 response 01h 20h RS422 Header and address for the serial RS485 Length 2 Data packet length in BCD command channel data fields ALES Command 2 See commands description byte 0 command byte 1 Channel 1 30h No channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 35h Serial Communication Data n See commands description Checksum 1 XOR of all bytes checksum excluded in and with 7Fh 158 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 ASCII Protocol Host to Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Tab 23 Field No of bytes Value Description Header command 1 40h Header Header response 1 24h Header Length 2 Data packet length in BCD _ command channel data fields only Command 2 See commands description byte 0 command byte 1 Channel 1 30h No channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 35h Serial Communication Data n See commands description Checksum 4 Sum of all bytes checksum excluded represented in BCD Dual Controller User Manual 87 900 094 01 I 159 194 5 Technical Information MultiGauge Compatible Protocol Host to Dual controller command format he
61. dura di accensione dell alta tensione H V Ripetere la procedura di accensione del Dual se il problema persiste contattare Agilent per la riparazione o sostituzione 1 Assicurarsi che i connettori esterni Remote 1 0 siano collegati come descritto in questo documento 2 Ripetere la procedura di accensione del Dual se il problema persiste contattare Agilent per la riparazione o SOSTITUZIONE iii 29 194 1 Istruzioni per l uso 30 194 MESSAGGIO HV X ERROR PROTECT ERROR SHORT CIRCUIT ERROR OVER VOLT CURR ERROR ZERO MEAS DESCRIZIONE scattata la protezione di sovracorrente quando stata selezionata la modalit operativa PROTECT circuito sull uscita H V Sono stati rilevati dei valori errati di tensione e corrente sull uscita H V Questo errore indica un guasto del circuito di controllo H V Il microprocessore del controller Dual ha rilevato che sia la tensione che la corrente non sono presenti sull uscita H V che doveva essere attiva stato rilevato un corto AZIONE CORRETTIVA Nel caso fosse necessario selezionare la modalit START in modo che il controller possa operare fino al raggiungimento della corrente di corto circuito 1 Controllare l integrit del cavo dell alta tensione H V 2 Rimuovere il cavo dalla pompa ionica e assicurarsi che non ci sia un corto circuito nella Ripetere la procedura di accensione del Dual se il problema
62. ected A short circuit was detected on the H V output Incorrect voltage and Dual Controller User Manual 87 900 094 01 1 Remote 1 0 card not Remote 1 0 circuit failure Instructions for Use 4 CORRECTIVE ACTION 1 Make sure that the environmental temperature of Dual controller operation is not over 45 Make sure that the ventilation slots on the cover are not obstructed Make sure that the fan blades rotate freely and that the air channeled inside the Dual controller is not blocked by dust or foreign matter Wait a few minutes for the temperature inside the unit to cool down and then repeat the HV power on procedure Repeat the Dual power on procedure if the problem persists contact Agilent for repair or exchange 1 Make sure that the Remote 1 0 external connectors are connected as indicated in this manual Repeat the Dual power on procedure if the problem persists contact Agilent for If necessary select the START mode so that the controller can work until the short circuit current is reached Check the integrity of the HV cable Remove cable from ion pump and check if there is a short Repeat the Dual power on procedure if the problem persists contact 101 194 4 Instructions for Use MESSAGE DESCRIPTION CORRECTIVE ACTION VOLT CURR detected on the H V Agilent for repair or exchange output This error indicates a malfunction of the H V control circuit
63. ee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual WARNING The warning messages call the operator s attention to a specific procedure or operation that could cause serious injury if not performed correctly The caution messages are provided before procedures that could cause damage to the equipment if not complied with Notes provide you with important information extracted from the text Dual Controller User Manual 87 900 094 01 1 83 194 4 Instructions for Use Controller Description Agilent s Dual controller is a flexible ion pump controller which is pre configured at the factory according to the customer s requirements The Dual controller is available with Front panel with keypad display 16x2 and microprocessor card Remote I O card Serial data exchange card optional 24 Vdc 20 W power supply unit for the Eyesys Gauge optional Power supply card with integrated DSP for output voltage management High voltage card s The configurations are listed in the following table Tab 1 DESCRIPTION PART NUMBER Dual Models u ee ra UT Li NU E 120 Vac basic unit with 1 positive HV 929 7002 120 Vac basic unit with 2 positive IS 929703 1290 Vac basic unit with gt HV TOOL 230 Vac basic unit with 2 negative HV s 929 7005 230 Vac basic unit wi
64. er User Manual 87 900 094 01 1 Den Schalter HV ENABLE auf EIN setzen und die Prozedur zum Einschalten der Hochspannung wiederholen Sicherstellen dass das Geh use richtig montiert ist Sicherstellen dass die R ckkoppelungs St psel mit den Verriegelungsbr cken installiert sind Sicherstellen dass die externe Verriegelung geschlossen ist Wenn die Pumpe ein Hochspannungskabel mit einer Sicherheitsverriegelung benutzt sicherstellen dass der Stecker auf der Pumpenseite richtig eingesetzt ist und der R ckkoppelungsstift auf der Seite des Controllers in die entsprechende Buchse auf der hinteren Schalttafel eingesteckt ist Wenn die Pumpe ein einpoliges Hochspannungskabel ohne Verriegelung benutzt sicherstellen dass die Br cke richtig zwischen der HV Steckdose des Verriegelungskabels und Erde 51 194 2 Gebrauchsanleitung 52 194 MELDUNG HV X ERROR HV NOT HV FAULT HV X ERROR HV OVERTEMP ERROR REMOTE 1 0 HV X ERROR R 1 0 FAULT BESCHREIBUNG Der Hochspannungskreis kann nicht gefunden werden Hochspannung wegen Fehler im Hochspannungskreis abgeschaltet Die Warmesensoren im Dual Controller messen eine Temperatur die ber der Sicherheitsschwelle liegt Die Karte f r Fern E As kann nicht gefunden werden Fehler im Kreis f r Fern E As STORUNGSBEHEBUNG Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehe
65. erial line is used If an unrecoverable error crash error occurs on the Dual controller the serial line will not be able to handle any type of data exchange 154 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Software Protocol The Dual controller automatically detects the type of software protocol used by analyzing the header and provides its related reply The three protocols have equivalent data fields which comply with the following formats Tab 20 Type No of Bytes Description Read 1 3FNS performs reads on the Dual controller Status 1 0 30h false off ee Integer 5 xxxxx represented in BCD4 on 5 digits always positive BitField 8 Like the integer type but with meanings associated to the number s single bits Exponential 1 x xEsxx where x is BCD digits E is the 45h character and s is the o sign String n Sequence of n characters included within the 20h and Fh range III n n N 3 the h notation following a number indicates that the number is expressed in hexadecimal format 4BCD the number is represented by digits included within the 0 and 9 range ASCII 30h 39h Status can also assume values greater than 1 The commands have a read and a write mode By specifying the type of read operation being performed the Host queries the Dual controller which in turn replies in a format compliant with the command sent As
66. esioni personali messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo Dual Controller User Manual 87 900 094 01 1 11 194 1 Istruzioni per l uso Descrizione del controller 12 194 Il controller Dual della Agilent un controller per le pompe ioniche modulare e flessibile L unit configurata in fabbrica a seconda delle esigenze del cliente Il controller Dual disponibile con Pannello frontale con tastierina display 16x2 e scheda processore Scheda di I O remoto Scheda di comunicazione seriale opzionale Alimentatore da 24 Vcc 20 W per il misuratore Eyesys Gauge opzionale Scheda di alimentazione con DSP integrato per la gestione delle tensioni in uscita Scheda e di alta tensione Tab 1 DESCRIZIONE PART NUMBER u EL _ _ __ Di Unit base da 120 Vca con 1 scheda alta tensione negativa 929 7000 E Unit base da 120 Vca con 2 schede alta tensione negative 929 7001 Unit base da 120 Vca con 1 scheda alta tensione positiva 929 7002 Unit base da 120 Vea con 2 schede alta tensione positive 920 7003 lu Unit base da 230 Vca con 1 scheda alta tensione negativa 929 7004 t S i Unit base da 230 Vea con 2 schede alta tensione negative 929 7005 Unit base da 230 Vea con 1 scheda alta tensione positiva 929 7008 Unita base da
67. f this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety
68. fare riferimento al paragrafi UTILIZZO nell appendice Technical Information Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata Per evitare danni alle persone ed all apparecchiatura nel caso in cui la pompa debba essere posizionata su di un tavolo assicurarsi che quest ultimo sia stabile Non mettere mai in funzione la pompa se la flangia di ingresso non collegata al sistema o se non chiusa con la flangia di chiusura Dual Controller User Manual 87 900 094 01 1 17 194 1 Istruzioni per l uso Controlli ed indicatori del pannello frontale del controller Dual Nella seguente figura viene riportato il pannello frontale del controller Dual La tabella che segue indica la definizione e la funzionalit dei controlli e indicatori CHANGE i START START PROT 1 PROT 2 ON OFF Figura 3 Pannello frontale sacessesscossesscsccecoscorscsosensscesessesens sseccccececsosocerscsocssscassenececcsrecsceenscsececseserscecsesesseses ste sense REES senses sess sassecssessesssessecssnansen TEE SEE sensess Socsccnsee sea secsees sentence eee eee see eee ses see Sense sen 2 LED verdi che indicano la modalit operativa selezionata LED Local acceso quando selezionata la modalit operativa LOCAL LED Serial acceso quando selezio
69. firm MiniGauge Type Selection mjela slelilelelr lelalulele miel slelulelelr e alulele me se leer Jelalulele ddi wife ela PT Dual Controller User Manual 87 900 094 01 I 145 194 5 Technical Information 146 194 The Calibration message provided below is displayed only if Convectorr was previously selected mieit lelalu i elelalriiloin If you confirm YES the display will guide you through atmospheric and High vacuum calibration The message Emission indicated below is displayed only if miniB A was previously selected Usually you can select between OFF and ON but if the miniB A is undergoing its power on phase the following message will be displayed The message for Degas ON OFF selection is the following The message for Gas Type selection is the following eja jelals rivlele By using the CHANGE and ENTER buttons you can select and confirm one of the following options Dual Controller User Manual 87 900 094 01 1 Technical Information 5 SPARE CORRECT AIR HELIUM HYDROGEN OXYGEN The message Gas Correction shown below is only displayed if the SPARE Correct option was previously selected Auto Turn on Sequence If 2 of miniB A and 1 Convector Gauge are installed the miniB A can be powered on when the Convector pressure is below a predetermined threshold MiniB A Gauge Auto On Dual Controller User Manual 87 900 094 01 I 147 194 5 Technical
70. h Interlock 929 0710 H V bakeable cable radiation resistant 13 999 0712 ft 4 m long H V bakeable cable radiation resistant 13 ft 4 m long for vaclon Pumps Se nn hh a __ _ _ n rr ae RS422 computer interface option Ask for Modified Standard P N ST 7777 E Eyesys gauges option Ask for Modified Standard P N Dual Controller User Manual 87 900 094 01 I 187 194 5 Technical Information Accessories Options 188 194 Dual Controller User Manual 87 900 094 01 1 gn Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the sa
71. halb des ganzen Arbeitsbereichs Mit zwei optionalen Eyeses Normalen k nnen Druckmessungen unterschiedlicher Genauigkeiten in verschiedenen Bereichen vorgenommen werden Der Dual Controller kann in Modus LOKAL FERN E A und SERIAL uber die Schnittstellen RS 232 422 und 485 gesteuert werden die RS232 und RS485 Karte sind Optionen Zum Bestellen von Systemen mit RS 422 485 und Eyesys Gauge ein Verkaufsb ro von Agilent kontaktieren 36 194 Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Wie dem System Steuerbefehle bergeben werden hangt von der Betriebsart des Controllers ab Im LOKAL Modus werden alle Befehle ber die vordere Schalttafel eingegeben Im Modus Fern E A kommen alle Befehle ber Fern E A Signale Relaiskontakte die an den Stecker f r Fernsteuerung auf der R ckseite angeschlossen sind Im SERIAL Modus kommen die Befehle ber einen lokalen Computer der an die RS 232 422 485 Schnittstelle angeschlossen ist Lagerung Bei Transport und Lagerung der Controller m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 20 C bis 70 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportschaden m ssen sofort der zust ndigen Ortlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial mufs korrekt entsorgt werden Es ist vollst ndig rec
72. he ENTER button The same information can be seen in the following flow chart vom Pressure Unit Selection Channel Selection Pump Type Gauge Serial Comm Selection Selection Selection Figure 26 fl 138 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Pump Type Selection The following message is now displayed via p ulmje Jslelilelelr iL Islolo islek jrid LL Use the CHANGE button to select the pump then confirm the selection made by pressing the ENTER button In case the Spare Pump is selected the operations that can be done are shown in the following flow chart Dual Controller User Manual 87 900 094 01 I 139 194 5 Technical Information Pump Type Selection SPARE Vmax Setting Imax Setting Pmax Setting Iprotect Setting P100nA Setting P10pA Setting P10mA Setting P400mA Setting Step Fixed Selection lt o 4 m T Vstep1 Setting Istep1 Setting Vstep2 Setting Istep2 Setting Set point 1 Setting Set point 2 Setting Main Menu Figure 27 140 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 In case a Standard Pump is selected the parameters can just be read and the operations that can be done are shown in the following flow chart STANDARD PUMP Istep2 Visualization Set point 1 Setting Set point 2 Setting Figure 28 Dual Controller User Manual 87
73. he two pumps enters into the short circuit range the start phase is resumed In this case priority is assigned to the pump that is in the short circuit range if both pumps are in this range priority is assigned to the one that entered this range first If the HV output voltage drops below 150 V with a current equivalent to 80 of the short circuit value for a time frame exceeding 5 seconds the related output is disabled and the following message is displayed HV X ERROR SHORT CIRCUIT 108 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Figure 8 Dual Controllers Controller Specifications Tab 3 Input Voltage 100 to 120 Vac 200 to 240 Vac Frequency 50 60 Hz Ewe 600 VA maximum Output for pump Voltage 7 000 Vdc 2 10 maximum programmable via software between 3 000 V and Short circuit current 7 000 V at 100 V steps Power 400 mA 400 W maximum programmable via software between 100 W and 400 W at 10 W steps Output current 400 mA 10 programmable via software between 100 mA and 400 mA at 10 mA steps m Operating temperature Oto Storage temperature 20 C to 0 C Fuse Dual Controller User Manual 87 900 094 01 I 109 194 5 Technical Information Line voltage Two 4 A slow blow for 200 or 240 input Voltage Two 8A slow blow for 100 or 120 input Voltage measurement Resolution lt 50 V Accuracy 2 of Vmax Current measureme
74. in the same data packet by linking 1 up to 6 query commands to the command channel data fields Dual Controller User Manual 87 900 094 01 I 183 194 5 Technical Information 184 194 In the case of multiple commands the data format has the following limitations Format errors in only one of the commands sent will cause an error with the entire packet With the multiple command it is not possible to read the strings eg software version Multiple commands are not enabled with the Lexington protocol The query has to be as follows command channel data query 8 byte space next command chk The reply data are collected in 12 byte packets as follows command channel data answer n space Following is an example of a multiple command where a space is indicated with the letter s query HV1 state HV2 state Vmax chl Vmax ch2 header A01 ssssssssA02 ssssssssH 01 ssssssssH02 ssssssss chk reply HV1 off HV2 on Vmax chl 5000V Vmax ch2 7000V header A010ssssssssA021ssssssssH0105000 ssssssssH0207000ssss chk Automatic Serial Mode Setting the appropriate bit via the Serial Property command enables the automatic Serial Mode function When the Dual receives a serial write command it automatically switches to the Serial Mode state in which it can accept the serial command If a read command is recelved instead the operating mode remains unaltered If this bit is not set the se
75. inue to provide high voltage regardless of the current supplied The high voltage is disabled if during operation in the PROTECT mode the current delivered exceeds the I we level 136 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Unit Configuration Using the Menu button accesses this configuration menu If the high voltage is enabled the controller settings cannot be modified they can only be changed with H V set to Off Messages Associated to the Menu Button When pressing the Menu button the device enters into the cycle configuration program that must be terminated in order to return to the Main Menu The unit automatically exits from this menu if nothing is pressed within a preset time of 15 sec Pressure Unit selection When pressing Main menu button the first time it is possible to select the pressure unit of measure in fact the display shows the last unit set Pressing the CHANGE button allows to change the unit of measure the following units can be selected mbar Torr and Pascal Clelalels slulrele Julml r SITL loldi TT Channel Selection L sjelele e t lelulalninlelt lulilelu Ivlolelrlalejel Jil Dual Controller User Manual 87 900 094 01 I 137 194 5 Technical Information Press the CHANGE button to display the options available on the second row HIGH VOLTAGE 1 HIGH VOLTAGE 2 GAUGE 1 GAUGE 2 SERIAL COMM Confirm by pressing t
76. is selected and the high voltage is disabled the four parameters that regulate the operating mode two voltage values and two current values can be displayed and changed Dual Controller User Manual 87 900 094 01 I 143 194 5 Technical Information 144 194 Vstep 1 can be changed for the SPARE pump only ivi vfsp dy Istep 1 can be changed for the SPARE pump only va i o e e o i dah haf dal fe x Pp ne Vstep 2 can be changed for the SPARE pump only ayfa Ivjslelele 2 e pit Istep 2 can be changed for the SPARE pump only aiva Llilslelelel2 Joan At this point the unit switches to the set point selection menu the set points can be changed on all pump models Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Set point 1 or Set point 2 selection valid for all pumps ava sfelefefelaleiriele r y l lola fol lelke Tel fe At this point it is possible to use the CHANGE and ENTER buttons to change and confirm the values for the mantissa and exponent Pressing the ENTER button to confirm the selection made returns you to the menu of the voltages on the two channels Messages Associated to the MiniGauge Menu Button If GAUGEI or GAUGE2 was set during the channel selection phase you can access the minigauge menu described below As in the case of the previous menu also in this case use the CHANGE button to change the parameters and the ENTER button to con
77. isplaykontrasteinstellung auf den Controller zugreifen und nach dem Bootstrap die ENTER Taste betatigen die sich auf der vorderen Schalttafel befindet und diese solange gedruckt halten bis die gewunschte Einstellung erreicht wurde Dann die Taste ENTER loslassen der Kontrastwert wird dann im Speicher der Einheit abgespeichert werden Dual Controller User Manual 87 900 094 01 1 43 194 2 Gebrauchsanleitung Contrast LCD Adjustment START START PROT1 PROT2 Locu fora forata O O DUAL O Abbildung 5 Wenn die Einheit auf die Modalitat yur Kontrasteinstellung zugreift erscheint auf dem Display eine Nachricht und die LEDs auf dem Display beginnen zu blinken Hintere Schalttafel des Dual Controllers Die folgende Abbildung zeigt die Schalter und Anschlufsstellen der hinteren Schalttafel des Dual Controllers Die gezeigt Konfiguration besteht aus zwei HV Karten zwei Karten Set Point Remote Control einer Karte RS 232 422 Computer Interface und Anschluss zu zwei Eyesys Gauges 44 194 Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Abbildung 6 Hintere Schalttafel 1 Sicherungsfach 024 Me _L_L_ HV2 Fischer Stecker 3 Verriegelung f r das HV Kabel am HV2 Stecker WI Fischer Stocker 5 Verriegelung f r das HV Kabel am HV1 Stecker nn 6 37 poliger Stecker f
78. it 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed _JToxic C Corrosive C Reactive C Flammable C Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure ta toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model Ep Agile
79. leau dorsal du Dual Contr leur 69 Utilisation 71 Modes de fonctionnement 71 Mode de fonctionnement Step 72 Allumage du contr leur du panneau frontal modalit LOCAL 13 D marrage de la pompe 74 Arr t de la pompe 74 Traduction de la mode d emploi originale lt i Agilent Technologies 57 19 3 Mode d emploi Fehlermeldungen Entretien 74 Mise au rebut 75 Messages d erreur 76 58 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 Indications Generales AVERTISSEMENT ATTENTION Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareillage Agilent d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages d avertissement attirent l attention de l op rateur sur une
80. ler User Manual 87 900 094 01 1 Technical Information 5 When H V is ON it is not possible to change the Dual controller s operating mode High Voltage Commands If after being powered on the Dual controller is set to the LOCAL mode the LCD will display a message concerning the pump s selected If for example the controller has only one H V channel the following is displayed ajv solo Islelzirie If for example the controller has two H V channels the following is displayed ivi stole ste r r peivie PTT Tslelol sles frie To switch on the high voltage all the interlocks cable Remote I O connector and front panel must first be closed then press the HV1 and or HV2 buttons The voltage and pressure values will be displayed if only one H V card is present If two cards are present the display will only show the values of the two voltages Dual Controller User Manual 87 900 094 01 I 133 194 5 Technical Information 134 194 The following is displayed if only one card is present The lighting of the LED located above the H V On Off button continuously informs the operator whether the high voltage is present or not By pressing the CHANGE CONFIG button the display will show in sequence the current and pressure values of the pump and the pressure values of the Eyesys Gauges if installed The following is displayed if an HV card is installed 3 0 E 9 Tloji
81. ler User Manual 87 900 094 01 1 a ie nn 117 194 5 Technical Information Step Mode of Operation When the current reaches the value listed in the table the controller changes the voltage output Tab 6 Pump size type Current value for switching Current value for switching from 7 0 to 5 KV from 5 to 3 KV Models with negative H V card 500 StarCell DOxID4A 25x109A i 300 StarCell 5 5 x 104A 16x105A 150 StarCell 30x 104A BSxIO6A 40 55 75 1 3 x 104A 3 8 x 106 A E Startell 3 20 StarCell 6 5 x 105 A 1 9 x 106A Spare User selection User selection _ Models with positive H V card 500 Diode 1 4x 103A 3 9x 105A n Noble Dig i 300 Diode 7 2 x 104 A 2 1 x 105A Noble Diode 150 Diode 3 6 x 104A 9 5 x 105 A Noble Diode 40 55 75 Diode 2 2x104A 6 7 x 106 A Noble Diode 20 Diode Noble 2x104A 2 7 x 105A Diode Spare User selection User selection 118 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Figure 15 Output voltage change over vs pressure Optional Gauge Connector Signal Ground FEMALE Pressure Signal Input CONNECTOR Power Ground Calibration Output 24 V Power Emission Status Input Signal Ground FEMALE Emission ON OFF Output Pressure Signal Input CONNECTOR Degas Status Input Po
82. livered by the controller is distributed by means of an appropriate algorithm resident in the DSP The Dual is a power supply designed to meet a wide range of requirements It is a compact unit specifically designed to operate ion pumps with both positive and negative polarity from 20 1 s to 500 1 s and up to 400 W output power Dual Controller User Manual 87 900 094 01 I 107 194 5 Technical Information The unit is programmed with pre defined pump settings and the user can tailor for his purpose the voltage short circuit current maximum power pressure versus current curve for one more pump not included in the pre defined type of pumps Using a patented operation principle the controller is capable of reading pressure down to the 10 Torr range while optimising the pumping speed in the entire operating range Algorithm for the Distribution of the Available Power During the start up phase priority is given to the pump that is started first Consequently this pump is provided with all the power required while the second pump is provided with the power that remains Upon completion of this start up phase the controller if necessary will proportionally distribute the available power according to the maximum power that the pumps can require If more than 420 W are requested to reach a stabilized condition the controller will act on the pump power supply voltage so as to maintain constant the power delivered If one of t
83. long as a write operation can be carried out the write and read formats for the same command coincide Dual Controller User Manual 87 900 094 01 I 155 194 5 Technical Information The write modes will have the following possible replies ACK command correctly received and executed run a query to check that the value has been written typical for High Voltage Gauge power on power off Error unexecutable command due to a context error 21h see Protocol Errors Value command received and executed the value is immediately returned in the same format of the write command the query is not required The commands are associated to the channel which is specified in the Channel field The following table indicates the values that can be assigned in this field Tab 21 Value Channel Description 0 30h No channel The command does not act on any specific channel but overall on the entire Dual controller e g firmware version read 1 3th High Voltage 1 The command acts on a Channel 1 corresponding to the eee 2 32h High Voltage 2 The command acts on a Channel 2 corresponding to the High Voltage 2 module 3 33h Gaugel The command acts on a Channel 3 corresponding to the MiniGauge 1 module 4 34h Gauge2 The command acts on a Channel 4 corresponding to the MiniGauge 2 module 5b 35h Serial The command acts on a Channel 5 corresponding to the Serial Communication module ER 1
84. mber Device type 162 194 Description Local or serial operating mode On off High Voltage measure on Dual controller uC micro central firmware version Versione firmware DSP Pump number set on the specified channel Type of device set on the specified channel Unit of Mode Read Write Read Write Read Write Read Read Read Write Read Channels No channel Gaugel Gauge2 Serial Channel no HV1 HV2 Gaugel Gauge2 Serial HV1 HV2 No channel No channel No channel HV1 HV2 Format Status Status Status String String Status String Possible Values 30h local 31h Remote 1 0 32h serial See HV on off command in the codes table 30h Torr 31h mBar 32h Pascal 18 characters e g VPo 1 0 24 04 98 16 characters e g VPd 10 24 04 98 See device table Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Command Description Mode Channels Format Possible Values V meas Voltage Read HV1 HV2 Integer 00000 if powered off measurement V meas Current Read HV1 HV2 Exp A 0 0E 00 if powered measurement off Pr meas Pressure Read HV1 HV2 Exp 0 0E 00 if powered measurement Gaugel Torr off i Gauge nn Dual Controller Reads the Read HV1 HV2 Integer See Error Status Table Error Status error status on Gaugel the selected Gauge2 channel Serial no channel Serial reset Resets the Write
85. me form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking
86. mmands are entered through the front panel Inthe REMOTE I O mode all the commands are entered through remote I O signals Relay contacts which are connected to the Remote Control connector on the rear panel Inthe SERIAL mode all the commands are through a local computer connected to the RS 232 422 485 interface The following environmental conditions must be met when transporting and storing the controller Temperature 20 C to 70 C Relative humidity 0 95 non condensing Prior to Installation 86 194 The controller comes in a special protective packaging if there is any sign of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 Figure 1 Controller Packaging The Dual controller is preset at the factory to operate with the following power supply voltages Models 929 7000 1 2 3 and 929 7008 09 10 11 input voltage of 100 to 120 Vac frequency of 50 60 Hz Models 929 7004 5 6 7 and 929 7012 13 14 15 input voltage of 200 to 240 Vac frequency of 50 60 Hz Installation WARNING The Dual controller is equipped with a three wire
87. n auto on hv1 auto on value hv1 auto on hv2 Hex 69h30h 63h30h 64h30h 6Eh30h gas correction 6Ch30h 6Dh30h Hex 69h30h 64h30h 6Fh30h ASCII Hex 52 35h32h lu 50 35h30h 03 35h33h 54 35h34h ee 57 sem 08 35h38h 61h30h E O En The following example shows how to turn on the eyesys mini B A GAUGE on the channel 3 Dual Controller User Manual 87 900 094 01 I 173 194 5 Technical Information Binary Protocol u0410 3 1 81h 30h 34h 69h 30h 33h 31h 5Eh ACK 6h Ascii Protocol 0410 3 1 0417 40h 30h 34h 69h 30h 35h 31h 30h 34h 31h 37h ACK 6h Multigauge Compatible Protocol 352 1 23h 33h 35h 32h 81h Dh E 6h 174 194 Dual Controller User Manual 87 900 094 01 I Configuration Commands Tab 35 Command serial config serial property short circuit current delay Technical Information 5 The following commands are enabled in the configuration mode only This mode is accessed through the serial property command enabling the configuration reset the system to exit Description Enables write access to the configuration parameters Serial protocol characteristics Short circuit voltage Short circuit current Short circuit intervention time Protect intervention time Protect at power on function enable delay time f I V Pressure calculation constant f I V Pressure calculation constant Pressure value at 5000V with I
88. n Agilent zwecks Reparatur oder Austausch kontaktieren Agilent zwecks Reparatur oder Austausch kontaktieren 1 Sicherstellen dass die Umgebungstemperatur nicht ber der f r den Dual Controller zul ssigen H chsttemperatur von 45 C liegt 2 Sicherstellen dass die Ventilationsschlitze im Geh use nicht behindert sind 3 Sicherstellen dass die Ventilatorfl gel sich frei drehen k nnen und die im Dual Controller umgeleitete Luft nicht durch Staub oder Fremdk rper blockiert ist Warten Sie einige Minuten bis die Temperatur im Ger t gesunken ist und wiederholen die Prozedur zum Einschalten der Hochspannung Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Agilent zwecks Reparatur oder Austausch kontaktieren 1 Sicherstellen dass die externen Anschl sse der Fern E As so verbunden sind wie in diesem Handbuch angegeben 2 Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Agilent zwecks Reparatur _ oder Austausch kontaktieren Dual Controller User Manual 87 900 094 01 1 MELDUNG HV X ERROR PROTECT HV X ERROR SHORT CIRCUIT ERROR OVER VOLT CURR BESCHREIBUNG Bei gewahlter Betriebsart PROTECT trat ein Uberstrom auf Im Hochspannungsausgang wurde ein Kurzschluss entdeckt Im Hochspannungsausgang wurden falsche Spannungs und Stromwerte entdeckt Dieser Fehler zeigt
89. n Br cke zum Schlie en einsetzen Zum Einschalten des Controllers und zur Aktivierung von Spannung an den Hochspannungssteckern wie folgt vorgehen Das Kabel von der Pumpe und den Ruckkoppelungsstift der Verriegelung am Hochspannungskabel in die betreffenden Stecker auf der hinteren Schalttafel einsetzen Den Netzschalter auf der hinteren Schalttafel auf EIN stellen Den Schalter ENABLE HV auf der vorderen Schalttafel auf EIN stellen Die Tasten HV 1 2 ON OFF dr cken die ON LED geht an 48 194 Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Wenn nur ein Hochspannungskreis installiert ist gelten beide Zeilen auf dem Display fur die Pumpe Nr 1 Sind zwei Kreise installiert bezieht sich jede auf eine der beiden Pumpen Starten der Pumpe Zum Starten der Pumpe auf die entsprechende Taste HV ON OFF drucken die ON LED geht an Stoppen der Pumpe Zum Stoppen der Pumpe auf die entsprechende Taste HV ON OFF drucken die ON LED geht aus Wartung Die Dual Controller sind wartungsfrei Eventuell erforderliche Eingriffe mussen von dazu befugtem Fachpersonal ausgefuhrt werden Bei Storungen kann der Agilent Reparaturdienst in Anspruch genommen werden oder schliefsen Sie einen Vertrag fur Agilent Advanced Exchange Service ab mit dem ein defekter Controller gegen einen generaluberholten ausgetauscht wird Eine eventuelle Verschrottung mufs unter Einhaltung der einschlagigen landesubliche
90. n HV1 ein aus und HV2 ein aus benutzt zum Ein Ausschalten der Operation der Hochspannungskreise 5 LEDs wenn die LED EIN an ist ist der betreffende Hochspannungskreis aktiviert Ist die LED PROT an wurde f r die betreffende Pumpe der Schutzmodus gew hlt Dual Controller User Manual 87 900 094 01 1 41 194 2 Gebrauchsanleitung 6 Gruppe von 6 Funktionstasten mit folgenden Funktionen ENTER Taste zum Best tigen der mit der CHANGE Taste vorgenommenen Wahl CHANGE CONFIG Taste zur Anzeige aller verf gbaren Optionen MENU Taste zum Zugriff auf das Konfigurationsmen MODE Taste zur Wahl der Betriebsart Tasten START PROT 1 und START PROT 2 zur Wahl des Anlaufschutz Modus fir die betreffende Pumpe Kontrasteinstellung auf dem LCD Bildschirm des Controllers mit lonenpumpe DUAL Der Controller mit Ionenpumpe DUAL ist mit einem LCD Bildschirm ausgestattet der sich auf der vorderen Schalttafel der Steuereinheit befindet Bei Eintreten einer der folgenden Bedingungen muss der Displaykontrast neu geregelt werden auch wenn er werkseitig voreingestellt ist Die Beleuchtung von hinten ist in Betrieb genommen aber auf dem Display erscheint kein Buchstabe Die Beleuchtung von hinten ist in Betrieb genommen aber auf dem Display erscheint eine Matrize mit schwarzen K stchen 42 194 Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Es muss eingestellt werden Abbildung 4 Zur D
91. n Vorschriften erfolgen Dual Controller User Manual 87 900 094 01 1 49 194 2 Gebrauchsanleitung Entsorgung 50 194 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU Landern gultig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmull entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Dual Controller User Manual 87 900 094 01 1 Fehlermeldungen Gebrauchsanleitung 2 In einigen Storungsfallen zeigt das Selbstdiagnosesystem des Controllers die in der nachstehenden Tabelle zusammengefafsten Meldungen an Tab 2 MELDUNG ERROR PANEL INTERLOCK ERROR REMOTE INTERLOCK ERROR CABLE INTERLOCK BESCHREIBUNG STORUNGSBEHEBUNG FEHLER HOCHSPANNUNG 1 ODER 2 Hochspannung durch eine 1 Verriegelung von der vorderen Schaltflache oder Geh use ausgeschaltet HV ENABLE auf AUS 2 gesetzt oder Geh use entfernt Hochspannung von einer 1 Verriegelung von den Fern E As abgeschaltet HV von einer Verriegelung 1 eines Hochspannungskabel abgeschaltet Dual Controll
92. n on Sequence 147 MiniB A Gauge Auto On 147 Auto On Pressure Threshold Selection 148 High Voltage Auto On 148 Auto ON H V Pressure Threschold Select 148 Messages Associated to the Menu Button Related to the Serial Channel 150 Serial Interface 151 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 General 151 General Definitions of the Hardware Protocol 151 Hardware Signals Management 152 Transmission Format and Timeout 152 Data Exchange Error Management 154 Software Protocol 155 Binary Protocol 158 ASCII Protocol 159 MultiGauge Compatible Protocol 160 Binary Protocol 161 Ascii Protocol 159 Multigauge Compatible Protocol 161 List of Commands 162 General Commands 162 Command Code Value 164 HV on off Command Coding 165 Device Number and Device Type Commands Coding 166 Interlock Status Coding 167 Binary Protocol 16 7 Ascii Protocol 167 Multigauge Compatible Protocol 168 Binary Protocol 168 Ascii Protocol 168 Multigauge Compatible Protocol 168 High Voltage Commands 169 High Voltage Commands 170 Remote 1 0 Commands Coding 171 Binary Protocol 1 1 Ascii Protocol 171 Multigauge Compatible Protocol 172 Dual Controller User Manual 87 900 094 01 I 105 194 5 Technical Information MiniGauge Commands 172 MiniGauge Commands 173 Binary Protocol 174 Ascii Protocol 174 Multigauge Compatible Protocol 174 Configuration Commands 175 Binary Protocol 178 Ascii Protocol 178
93. na scheda d interfaccia RS 232 422 ed il collegamento a due misuratori Eyesys Dual Controller User Manual 87 900 094 01 1 21 194 1 Istruzioni per l uso Figura 6 Pannello posteriore 1 Sede porta fusibile 3 a ri er d 3 Bloccaggio del cavo HV sul connettore HV 4 Connettore Fischer HV1 VE 5 Blocceggio dl cavo HV sul connettore IV ioiskiiiii n 6 Connettorea37 pin per Remote ORZ 7 Connettore a 37 pin per Remote 1 0 HV1 de Cee MORTE E LA E et LL 10 Presa di alimentazione u ET eee 22 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 Procedure operative Modalit operative Il Dual controller pu funzionare nelle seguenti modalit LOCAL REMOTE I O input output SERIAL Nella modalita LOCAL tutti i comandi sono attivati dal pannello frontale Nella modalita REMOTE I O tutti i comandi sono attivati da un personal computer remoto collegato tramite il connettore di input output collocato sul pannello posteriore Nella modalita SERIAL tutti i comandi sono attivati da un personal computer esterno collegato tramite l interfaccia seriale RS 232 422 485 La modalit operativa selezionata viene memorizzata dal sistema e quindi al ripristino della tensione in seguito alla sua caduta il controller Dual ritorner nella modalit operativa nella quale era al momento dalla caduta di tensione Quando viene
94. nare i sistemi con RS 422 485 e misuratori Eyesys Dual Controller User Manual 87 900 094 01 1 13 194 1 Istruzioni per l uso Le modalit con cui i comandi operativi vengono impartiti al sistema dipendono dalla modalit operativa in cui si trova il controller Nella modalit LOCAL tutti i comandi vengono impartiti attraverso il pannello frontale Nella modalit REMOTE I O tutti i comandi vengono impartiti attraverso segnali I O remoti relay contacts direttamente sul connettore Remote Control posto sul pannello posteriore Nella modalit SERIAL tutti i comandi vengono impartiti attraverso un personal computer locale collegato all interfaccia RS 232 422 485 immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali Temperatura da 20 C a 70 C Umidit relativa da 0 a 95 senza condensa Preparazione per l installazione Il controller viene fornito in un imballo protettivo speciale nel caso in cui Si presentassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente 14 194 Dual Controller User Manual 87 900 094 01 1
95. nata la modalit operativa SERIAL LED Remote acceso quando selezionata la modalit operativa P REMOTE 1 0 3 Interruttore HV ENABLE attivo indipendentemente dalla modalita operativa selezionata Per alimentare l alta tensione dal pannello di controllo dal Remote 1 0 o dalla linea seriale occorre che l interruttore HV ENABLE sia predisposto nella posizione ON 4 Pulsanti HV1 on off e HV2 on off utilizzati per abilitare disabilitare la funzionalit dei circuiti di alta tensione 18 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 5 LED quando acceso il LED ON il relativo circuito HV alta tensione abilitato mentre quando acceso il LED PROT stata selezionata la modalit operativa per la pompa corrispondente 6 Gruppo di sei pulsanti di funzione con le seguenti caratteristiche Pulsante ENTER utilizzato per confermare una selezione che stata effettuata con il pulsante CHANGE Pulsante CHANGE CONFIG utilizzato per visualizzare tutte le opzioni disponibili Pulsante MENU utilizzato per entrare nel menu di Configurazione Pulsante MODE utilizzato per selezionare la modalit operativa Pulsanti START PROT 1 e START PROT 2 utilizzati per selezionare Procedura di regolazione del contrasto dello schermo LCD del Controller a pompa ionica DUAL Il Controller a pompa ionica DUAL dotato di uno schermo LCD installato nel pannello anteriore dell unit
96. nection to two Eyesys Gauges Dual Controller User Manual 87 900 094 01 1 93 194 4 Instructions for Use Figure 6 Rear Panel i i ie E EE O I E Trirrirrr rq I II 1 Fuse holder compartment p 2 Fischer HV2 connector nn TTT 4 Fischer HVI connector 5 Interlock for the HV cable on connector V1 OOOO a 7 87 pin connector for Remote VO VI 8 9 pin Multi Gauge Eyesys connectors n I interface connector m eee dl 11 Main power switch 94 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 Operating Procedures Operating Modes The Dual controller can work in the following operating modes LOCAL REMOTE I O input output SERIAL In the LOCAL mode all the commands are given through the front panel In the REMOTE I O mode all the commands are given from a remote computer through the input output connector located on the rear panel In the SERIAL mode All the commands are given from an external computer through the RS 232 422 485 serial line The selected mode of operation is stored by the system and therefore even if a power failure occurs when the power is restored the Dual controller will return to the mode of operation that it was in prior to the blackout When any one mode of operation is selected the system will only accept the commands of that related mode while being able
97. nt Measurement range 10 nA to 400 mA Resolution 10 nA Accuracy gt 10 uA 2 1 lt 10 uA 10 Pressure Analog REC OUT 0 to 5 Vdc log See Rec Out diagram Minimum recorder input impedence 1 MOhm Voltage Analog REC OUT 0 to 7 Vdc line See Rec Out diagram i Minimum recorder input impedence 1 MOhm Measurement updates On the display tr lt 2 s On the recorder tr lt 0 1 s n OA 110 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 In compliance with norms EN 55011 class A group 1 EN 61000 3 2 Harmonic Current Emission EN 61000 3 3 Flicker EN 61000 4 2 ESD EN 61000 4 4 Burst EN 61000 4 3 Radiated RF immunity EN 61010 1 Safety Installation category Il Pollution degree 2 Interconnecting cables Power cord 3 wire 3 meter long with European or US plug Weight both models With 1 H V 10 Kg 22 4 Ibs With 2 H V 11 5 Kg 25 8 Ibs Output Voltages Provided below are the output voltage diagrams Curren Figure 9 Output Voltage VS Current Curve Dual Controller User Manual 87 900 094 01 I 111 194 5 Technical Information 7 Va KV Figure 10 Recorder Output Voltage O1 UT gt CN U1 on RECORDER OUTPUT V
98. nt Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Contact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High voltage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum Over temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Ple
99. ntet soit correctement introduit entre la prise du c ble HV O interlock et le sol HV X Le cuircuit de haute Repeter la procedure d allumage du ERROR tension HV n a pas t contr leur Dual si le probleme persiste HV NOT relev contacter Agilent pour la r paration ou la Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 MESSAGE DESCRIPTION INTERVENTION HV X La haute tension a t Conctater Agilent pour la r paration ou la ERROR teinte cause d un substitution HV FAULT dysfonctionnement dans le circuit HV HV X Les capteurs de 1 V rifer que la temp rature ERROR temp rature l int rieur environnante durant le HV du contr leur Dual ont fonctionnement du contr leru ne OVERTEMP relev une temp rature qui soit pas sup rieure 45 d passe les limites de 2 V rifier que les trous d a ration sur s curit la couverture ne soient pas obstru s 3 V rifier que les palettes du ventilateur tournent librement et que l air apport l int rieur du contr leur Dual ne soit pas obstru par la poussi re ou par un mat riau tranger Attendre quelques minutes de mani re ce que la temp rature interne de l unit se refroidisse et ensuite r p ter la proc dure d allumage de la haute tension HV HV X La carte Remote 1 0 n a R p ter la procedure d allumage du ERROR pas t relev e contr leur Dual si le probl me subsiste REMOTE contacter Agilentt pour la r
100. ompa diversa Avvio della pompa Per avviare la pompa premere il relativo pulsante HV ON OFF si accender il LED ON Spegnimento della pompa Per fermare la pompa premere il relativo pulsante HV ON OFF si spegner il LED ON Manutenzione Il controller Dual non richiede alcun intervento di manutenzione Qualsiasi tipo di intervento sull unit deve essere eseguito da personale tecnico autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere nel rispetto delle normative nazionali specifiche 26 194 Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali
101. on the power to reset the error 176 194 Dual Controller User Manual 87 900 094 01 1 Tab 36 Command Name General Usage Commands serial config mode short circuit volt short circuit current protect time protect delay prDelta2 P100nA P400mA reinitialize eeprom setPoint histeresys Dual Controller User Manual 87 900 094 01 1 Hex 78h61h serial property 78h62h 78h63h 78h64h short circuit time 78h65h Zen 78h67h prDeltal 78h68h 78h69h XI 78h6Ah 78h6Bh 78h6Ch 78h71h 78h72h 78h73h ASCII ASCII Xa xb XC xd Xe xf Xg xh Hex i 78h62h 78h63h 78h64h 78h65h au 78h67h 78h68h 78h69h 78h6Ah 78h6Bh 78h6Ch _ T8h6Eh 78h6Fh 78h73h Technical Information MultiGauge Compat Protocol ASCII Hex 83 38h33h 86 38h36h 89 38h39h 90 38h30h 91 39h31h LSM _ 94 39h34h 96 39h36h 18h72h 98 38h38h 5 ee 81 38h31h 82 38h32h 84 38h34h dc i a 87 38h37h 88 38h38h LL 177 194 5 Technical Information Tab 37 Bitfield Remote 1 0 Input Remote 1 0 Output an DSi IU gp EG a Pb pei a l 02h Disabled reply on Write Enables reply on Write Oho Disables Ack Nack mode 2 0 Enables Ack Nack mode ho Disables multiple commands Enables multiple commands E 10h Disables automatic serial mode Enables automatic serial mode 3 20h Notused i Noise n n Wa Parity coding mm 80h Parity
102. ontroller nicht in das Gestell f llt Die vordere Schalttafel des Dual Controllers ist nicht geeignet das gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht Wenn der Controller in einem Gestell installiert werden soll m ssen alle vier F e abmontiert und ber und unterhalb wenigstens 30 mm 1 2 Zoll Platz gelassen werden W hrend des Betriebs m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 0 C to 45 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend F r den Anschlufs des Controllers an die Pumpe mufs das optional gelieferte Kabel benutzt werden Detailliertere Hinweise zu weiteren Anschlufsarten sowie zum Einsatz von Zusatzkarten finden Sie im Anhang Technical Information Dual Controller User Manual 87 900 094 01 1 39 194 2 Gebrauchsanleitung Gebrauch 40 194 DUAL KABEL PUMPE cl TRIO PUMPEN ERDE Abbildung 2 Erdung Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung mit dem entsprechenden Gegenstecker schlie en wenn ein Kabel ohne Verriegelungsstecker benutzt wird In diesem Kapitel sind die wichtigsten
103. paration ou 1 0 la substitution NOT FOUND HV X Dysfonctionnement dans 1 V rifier que les connecteurs ERROR le circuitRemote 1 0 externes Remote 1 0 soient reli s R 1 0 comme d crit dans ce document FAULT 2 R p ter la proc dure d allumage du contr leur Dual si le probl me persiste contacter Agilentt pour la HV X La protection de Si n cessaire s lectionner le mode ERROR surcourant a t START de mani re a ce que le contr leur PROTECT d clench e lorsque la puisser atteindre le courant de court modalit op rationnelle circuit PROTECT a t Dual Controller User Manual 87 900 094 01 1 77 194 3 Mode d emploi MESSAGE DESCRIPTION INTERVENTION selectionn e HV X Un court circuit a la sortie 1 Contr ler l int grit du cable de la ERROR HV a t releve haute tension SHORT 2 D tacher le cable de la pompe CIRCUIT ionique et v rifier s il ya un cout circuit dans la pompe ou dans le _ cable 78 194 Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 MESSAGE DESCRIPTION INTERVENTION HV X Des valeurs erron es de R p ter la proc dure d allumage du ERROR voltage et de courant sur contr leur Dual si le probl me persiste OVER la sortie HV ont t contacter Agilentt pour la r paration ou VOLT CURR relev es la substitution Cette erreur indique un dysfonctionnement du circuit de contr le HV HV X Le microprocesseur du R p ter la procedure d allumage du ERROR
104. particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Retum is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to
105. persiste contattare Agilent per la riparazione o sostituzione Ripetere la procedura di accensione del Dual se il problema persiste contattare Agilent per la riparazione o sostituzione ERRORI DI FUNZIONAMENTO DEI MISURATORI 1 0 2 GAUGE X ERROR PANEL INTERLOCK GAUGE X ERROR GAUGE NOT FOUND GAUGE X ERROR GAUGE FAULT L interruttore HV ENABLE predisposto su OFF oppure la copertura stata rimossa dall unita Il microprocessore non rileva l HW di gestione misuratore stato rilevato un malfunzionamento nel misuratore Eyesys collegato 1 Predisporre l interruttore HV ENABLE su ON e quindi ripetere la procedura di accensione 2 Assicurarsi che la copertura sia installata correttamente Spegnere l alimentatore del controller Dual quindi riaccenderlo Se il problema persiste contattare Agilent per la riparazione o sostituzione 1 Controllare il cavo di collegamento tra il controller Dual ed il misuratore 2 Assicurarsi che il misuratore __funzioni correttamente quando __ Dual Controller User Manual 87 900 094 01 1 Istruzioni per l uso 1 MESSAGGIO DESCRIZIONE AZIONE CORRETTIVA scollegato dal controller Dual Se il problema persiste contattare Agilent per la __fiparazione o sostituzione GAUGE X Il misuratore stato scollegato Ricollegare il misuratore e ripetere la ERROR dal controller Dual procedura di alimentazione GAUGE
106. pinout in the different configurations Tab 11 Pin RS232 1 N C di Receive dati E 3 Transmitdata a A en N e a 3 EV 2 _ rr o e 8 NG E Jc DIU S 6 1 Figure 22 RS232 Connector Dual Controller User Manual 87 900 094 01 I 127 194 5 Technical Information Tab 12 Pin RS422 1 Transmit Data neg zz CONNECTOR Figure 23 RS422 Connector 128 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Pin RS485 1 Data neg Data neg Figure 24 RS485 Connector Dual Controller User Manual 87 900 094 01 I 129 194 5 Technical Information Usage General Make all vacuum manifold and electrical connections and refer to Ion pump instruction manual before to operating the DUAL controller WARNING To avoid injury to personnel and damage to the equipment if the pump is lying on a table make sure it is steady Never operate the pump if the pump inlet is not connected to the system or blanked off Abbreviations This section provides the notations that are used during message display Unit of measure Pa pressure Be Volt Voltage eee mA current Amp current 130 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Abbreviations Tab 15 Hvi HighVoltaget HV2 High Voltage 2 4 MET mimi Gauge RR
107. pouvant s tre produits pendant le transport contacter tout de suite le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Le mat riel est enti rement recyclable et il est conforme aux directives CEE 85 399 en mati re de protection de l environnement Dual Controller User Manual 87 900 094 01 1 Mode d emploi 3 Figure 1 Emballage du contr leur Le contr leur Dual est fabriqu en usine afin de pouvoir fonctionner selon les voltage suivants d alimentation Mod les 929 7000 1 2 3 et 929 7008 09 10 11 tension d entr e de 100 120 Vca fr quence de 50 60 Hz Mod les 929 7004 5 6 7 et 929 7012 13 14 15 tension d entr e de 200 240 Vca fr quence de 50 60 Hz Installation Le contr leur Dual est pourvu d un c ble d alimentation a trois fils pourvu d une prise norme internationale Utiliser toujours ce cable d alimentation en introduisant la prise dans une prise d alimentation munie de liaison au sol afin d viter les d charges lectrostatiques A l interieur du contr leur se d veloppent des hautes tensions qui peuvent provoquer des l sions graves ou carr ment la mort Avant d effectuer n importe quelle op ration d installation ou d entretien du contr leur le d brancher de la prise lectrique Dual Controller User Manual 87 900 094 01 1 63 194 3
108. power cord with an internationally approved plug Always use this power cord and insert the plug into an appropriately grounded power outlet to avoid electrostatic discharges High voltages that could cause serious injury or even death are generated inside the controller Before performing controller installation or maintenance disconnect the unit from the power outlet Dual Controller User Manual 87 900 094 01 1 87 194 4 Instructions for Use CAUTION The controller can be used either as a desktop unit or as a rack module In any 88 194 case it must be positioned in a way that the air can circulate freely through the ventilation slots on the cover If the controller is used as a rack module it MUST be inserted into a four rack high adapter to prevent it from falling inside the rack itself The Dual controller front panel is not designed to support the weight of the unit Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice in the presence of dust corrosive gases or in a highly flammable or explosive environment If the controller is installed in a rack remove its four feet and place it so as to leave at least 30 mm 1 2 inches of free space above and below The controller must be used in the following environmental conditions Temperature 0 C to 45 C Relative humidity 0 90 non condensing To attach the controller to the pump use the specific cable
109. procedure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves lesions Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage Les notes contiennent des renseignements importants isol s du texte Dual Controller User Manual 87 900 094 01 1 59 194 3 Mode d emploi Description du controleur Le contr leur Dual de la Agilentt est un controleur pour les pompes ioniques modulaires et flexibles L unit est fabriqu e en usine selon les exigences du client Le contr leur Dual de la Agilentt est disponible avec Un panneau frontal avec clavier display 16x2 et carte processeur Carte de I O loign e Carte de communication s rielle partielle Alimentateur a 24 Vcc 20 W pour le mesureur Eyesys Gauge optionnel Carte d alimentation avec DSP int gr pour la gestion des tensions en sortie Carte de haute tension Les configurations sont indiqu es dans le tableau suivant Tab 1 DESCRIPTION NUMERO DE PIECE Modeles Dual Unit de base a 120 Vac avec 1 carte haute tension 929 7000 haut voltage HV n gative Unit de base a 120 Vac avec 2 cartes haute tension 929 7001 HV n gative Unit de base a 120 Vac avec 1 carte haute tension 929 7002 HV positive Unit de base a 120 Vac avec 2 carte haute tension 929 7003 HV positive Unit
110. r 60 Emmagasinage 62 Preparation pour l installation 62 Installation 63 Utilisation 65 Utilisation 7 Entretien 74 Mise au rebut 75 Messages d erreur 76 Instructions for Use 81 General Information 83 Controller Description 84 Storage 86 Prior to Installation 86 Installation 87 Usage 89 Operating Procedures 95 Dual Controller User Manual 87 900 094 01 1 Contents Maintenance 98 Disposal 99 Error Messages 100 5 Technical Information 103 Dual Controller Description 107 Controller Specifications 109 Controller Outline 113 Fuse Holder 114 Interconnections 115 Start Mode of Operation 116 Usage 130 Startup 131 Operating Modes 132 Unit Configuration 137 Serial Interface 151 Software Protocol 155 Listof Commands 162 Specific Protocol Settings 183 Accessories Options 187 Dual Controller User Manual 87 900 094 01 1 7 194 Contents 8 194 Dual Controller User Manual 87 900 094 01 1 Dual Controller User Manual Istruzioni per l uso Informazioni generali 11 Descrizione del controller 12 Immagazzinamento 14 Preparazione per l installazione 14 Installazione 15 Uso 17 Controlli ed indicatori del pannello frontale del controller Dual 18 Procedura di regolazione del contrasto dello schermo LCD del Controller a pompa ionica DUAL 19 Pannello posteriore del controller Dual 21 Procedure operative 23 Modalita operative 23 Modalit operativa Step 24 Accensione del controller d
111. r Fern E A HV2 FST poliger Stecker f r Fem E A HVI eee a amp polige Stecker for Muti Gauge Eyeaye OO 4 S poliger Stecker der seriellen Schnittstelle E w Stecker fir Netlabel Be 11 Hauptschalter Dual Controller User Manual 87 900 094 01 1 45 194 2 Gebrauchsanleitung Bedienung 46 194 Betriebsarten Der Dual Controller kann in den folgenden Modi arbeiten LOKAL FERN E A Ein Ausgang SERIELL Bei LOKAL werden alle Befehle ber die vordere Schaltafel gegeben Bei FERN E A kommen alle Befehle von einem abgesetzten Computer uber den E A Stecker auf der hinteren Schalttafel Bei SERIELL kommen alle Befehle von einem externen Computer der ber eine serielle Schnittstelle RS 232 422 485 angeschlossen ist Das System speichert welche Betriebsart gewahlt ist und setzt daher bei Wiederanlauf nach einem Stromausfall mit der Betriebsart fort die vor der Unterbrechung gewahlt war Wenn eine Betriebsart gew hlt ist nimmt das System nur die in diesem Modus g ltigen Befehle an Es kann aber gleichzeitig Informationen anzeigen und Signale und Daten von allen Schnittstellen entgegennehmen Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Der Controller kann in folgenden Betriebsarten betrieben werden START Modus PROTECTED Modus In der Betriebsart START arbeitet der Controller unabhangig vom Pumpenzustand bei voller Leistung bis zum voreingestellten Kurzschlufsstromwert Diese Bet
112. rial write command is not accepted the reply will be an error code and the Dual will remain in the selected operating mode either Local or Remote I O Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Compatibility with MultiVac The Binary and ASCII protocols are implemented for the most part by the protocol used on the MultiVac but are characterized by certain differences consisting of new features and certain Dual controller structural variations with respect to the MultiVac The new features implemented are the following Multiple commands Ack Nack mode Reply on write mode Even and odd parity management New serial commands MiniGauge serial commands Configuration serial commands The structural variations mostly concern the command set and formats In particular it is not possible to make up for the differences resulting from the hardware implementation such as the presence of the HV microcontroller the Remote I O the MiniGauge options and the configuration commands These differences can be limited by using the Serial Property command to set the full compatibility MultiVac bit to 1 Its purpose is to render compatible the already existing programs but introduces certain limitations that advise against its use with new applications In the case of a full compatibility MultiVac the following settings will also be made Multiple command disable Reply on write disable
113. riebsart mufs zur Steuerung von Pumpen bei Hochdruck gewahlt werden In der Betriebsart PROTECTED werden der Stromausgangswert des Controllers begrenzt und die Hochspannung abgeschaltet sobald der Strom den voreingestellten Schwellenwert langer als 0 2 Sekunden uberschreitet Bei Normalbetrieb ist dies der bevorzugte Modus da bei Versagen von Ionenpumpe oder Kabel wegen Kurzschluss oder Uberlastung der Starkstrom abschaltet Detaillierte Angaben zu den beiden Betriebsarten finden sich im Anhang Technical Information Stufenbetrieb Stufenbetrieb muss gewahlt werden um die Pumpenleistung zu erhohen und bei sehr niedrigem Druck ohne Einfluss des Leckstroms ablesen zu k nnen Im Stufenbetrieb w hlt der Dual Controller die beste Ausgangsspannung entsprechend dem Pumpeneingangsdruck siehe die folgende Abbildung Dual Controller User Manual 87 900 094 01 1 47 194 2 Gebrauchsanleitung Abbildung 7 Anderung der Ausgangsspannung in Funktion des Drucks Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus Um die Hochspannung einschalten zu k nnen muss die externe Verriegelung geschlossen sein Stecker eingesteckt Wenn kein Anschluss nach au en gemacht werden soll die mit der Einheit gelieferte
114. rjr The following is displayed if two H V cards are installed ajya fetes elle lame uivlelllsl lsl elle jal mie Dual Controller User Manual 87 900 094 01 1 Technical Information 5 If one H V card is installed with multigauge option pressing the CHANGE CONFIG button again displays the following If two H V cards are installed the following are displayed wives lat elle ere avel aij Tel le Jrlelele In a dual H V card and multigauge configuration pressing the CHANGE CONFIG button again displays the multigauge pressure as indicated below mfe ji a js e 8 rlojele m G 2 s s e s t o rjr Pressing the CHANGE CONFIG button again returns to the voltage value display The same indication can be seen on the following flow diagram Dual Controller User Manual 87 900 094 01 I 135 194 5 Technical Information Voltage Pump Voltage CH1 Pressure Voltage CH2 CHANGE CHANGE Current Pump CH1 Current Pressure CH2 Current CHANGE CHANGE Are the MG CH1 Pressure installed CH2 Pressure CHANGE MG1 Pressure Are the MG MG2 Pressure installed YES MG1 Pressure MG2 Pressure The START PROT 1 and START PROT 2 buttons enable disable the PROTECT operating mode when this mode is enabled the corresponding LED on the front panel comes on Figure 25 The START PROT 1 and 2 buttons are active even with H V set to ON In the START mode the controller will cont
115. se the CHANGE button to change the parameters and the ENTER button to confirm them sel slalulo rare It is possible to select between 9600 4800 2400 and 1200 Address Selection Parity Selection sell II ear iry The following values can be chosen NONE ODD EVEN 150 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Serial Interface General After having described the connector and the pinouts in the different configurations this section provides information on Dual controller s serial interface In particular bear in mind that compatibility with the existing protocols on the MultiVac Binary and ASCII has been maintained as far as the data format and different commands are concerned Furthermore a new protocol called MultiGauge Compatible is introduced It derives from the Mini B A Eye Sys specifications and implements the data format above all while the majority of the commands are new General Definitions of the Hardware Protocol The Dual controller implements the following data exchange protocols MultiGauge Derived from the protocol used for the MiniGauge Eyesys Compatible Protocol CI O With respect to the three native protocols compatibility is guaranteed at format level header terminator checksum etc while the different commands are implemented in compliance with the characteristics of the Dual controller Dual Controller User Manual 87 900 09
116. singolo senza interlock controllare che il ponticello sia correttamente inserito tra la presa del cavo HV HV X Non stato rilevato il circuito Ripetere la procedura di accensione _ 28 194 Dual Controller User Manual 87 900 094 01 1 MESSAGGIO ERROR HV NOT FOUND HV X ERROR HV FAULT HV X ERROR all interno del controller Dual HV hanno rilevato una OVERTEMP temperatura che va oltre limiti di sicurezza DESCRIZIONE di alta tensione HV spenta a causa di un guasto nel circuito HV HV X ERROR REMOTE 1 0 NOT FOUND HV X ERROR R 1 0 FAULT Remote 1 0 Dual Controller User Manual 87 900 094 01 1 o sostituzione L alta tensione HV stata sensori di temperatura Non stata rilevata la scheda Guasto al circuito Remote 1 0 Istruzioni per l uso 1 AZIONE CORRETTIVA del Dual se il problema persiste contattare Agilent per la riparazione Contattare Agilent per la riparazione o sostituzione 1 Assicurarsi che la temperatura ambientale durante il funzionamento del controller non sia superiore ai 45 2 Assicurarsi che fori di aerazione sulla copertura non siano ostruiti 3 Assicurarsi che le palette della ventola girino liberamente e che l aria coinvogliata all interno del controller Dual non sia ostruita da polvere o da materiale estraneo Attendere qualche minuto in modo che la temperatura interna dell unit si raffreddi e quindi ripetere la proce
117. so Il pannello frontale del controller Dual non previsto per reggere il peso dell unit Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia neve ghiaccio nella presenza di polvere gas corrosivi o in ambienti esplosivi o ad alto rischio di infiammabilit Nel caso in cui il controller viene installato in un rack rimuovere quattro piedini in modo che venga posizionato con almeno 30 mm di spazio sotto e sopra Durante il funzionamento occorre che siano rispettate le seguenti condizioni ambientali Temperatura da 0 C a 45 C Umidit relativa 0 90 senza condensa Per collegare il controller alla pompa utilizzare il cavo specifico disponibile come opzione Fare riferimento all appendice Technical Information per informazioni dettagliate su questi ed altri collegamenti 16 194 Dual Controller User Manual 87 900 094 01 1 Uso AVVERTENZA Istruzioni per l uso 1 RE Cc Ground Pump Figura 2 Collegamenti delle masse L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata Chiudere l interlock con l apposito contro connettore se si utlizza un cavo senza connettore di interlock In questo paragrafo vengono riportate le principali procedure operative Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni
118. t Advanced Exchange Service where the faulty controller is replaced by a refurbished one If the controller needs to be scraped proceed to do so in compliance with the specific national norms 98 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Dual Controller User Manual 87 900 094 01 1 99 194 4 Instructions for Use Error Messages 100 194 For certain types of failure the controller performs an autodiagnostic test and displays one of the messages indicated in the following table Tab 2 MESSAGE DESCRIPTION HIGH VOLTAGE 1 OR 2 ERRORS HV X ERROR PANEL INTERLOCK HV X ERROR REMOTE INTERLOCK CABLE INTERLOCK HV X ERROR HV NOT FOUND HV X ERROR HV FAULT HV switched off by an interlock received from the front panel or cover
119. tates Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287
120. th 1 positive HY 928 7008 230 Vac basic unit with 2 positive HV s 9297007 ieee a ec aa erga ni Pa Chemise CC RS 232 card 84 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 DESCRIPTION PART NUMBER 120 Vac basic unit with 2 positive HV cards and one 929 7011 RS 232 card 230 Vac basic unit with 1 negative HV and RS 232 card 929 7012 230 Vac basic unit with 2 negative HV cards and one 929 7013 en 230 Vac basic unit with 1 positive HV and RS 232 card 929 7014 230 Vac basic unit with 2 positive HV cards and one 929 7015 RS 232 card The Dual controller can control up to two ion pumps from 20 l s to 500 1 s with positive or negative polarity Reliable pressure are measured at up to 10 Torr Variable voltages allow the pump performance to be optimized on the entire operational field With two optional Eyesys Gauges pressure readings can be taken with different accuracy and fields of measurement The Dual controller can be controlled in the LOCAL mode REMOTE I O mode and in the SERIAL mode via the RS 232 422 and 485 ports the RS422 and RS485 are optional To order systems with RS 422 485 and Eyesys Gauges contact the Agilent sales office Dual Controller User Manual 87 900 094 01 1 85 194 4 Instructions for Use Storage The ways in which the operating commands are entered into the system differ depending on the controller s mode of operation Inthe LOCAL mode all the co
121. the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 ATA Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable C1 Billable gt New PO hard copy must be submitted with this form 3B JExchange _ Repair _ Upgrade _ Consignment Demo _ calibration _ Evaluation Return for Cred
122. to simultaneously display information and acquire signals and data from all the interfaces Dual Controller User Manual 87 900 094 01 1 95 194 4 Instructions for Use The unit is designed to work in the following modes START mode PROTECTED mode In the START mode the controller provides all the power regardless of the pump s conditions until reaching the short circuit current This mode of operation must be used to start the pump at High Pressure In the PROTECTED mode the controller limits the output current and switches off the high voltage when the current exceeds the threshold current for more that 0 2 seconds In normal operation this is the preferred mode as any failure of the ion pump or cable due to short circuit or high load will cause the high current to switch off Refer to the appendix entitled Technical Information for detailed information on the modes of operation Step Mode of Operation The Step mode has to be chosen in order to increase the performance of the pump and to read at very low pressure without influence of leakage current In Step mode the Dual controller chooses the best output voltage according to the pressure into the pump see the following figure 96 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4
123. tors CHANGE i START START PROT 1 PROT 2 Figure 3 Front Control Panel 2 Green LEDs indicating the selected operating mode Local LED on when the LOCAL operating mode is selected Serial LED on when the SERIAL operating mode is selected Remote LED on when the REMOTE 1 0 operating mode is selected 3 HV ENABLE switch active regardless of the operating mode selected To power on the HV from the front control panel from Remote 1 0 or from the serial line the HV ENABLE switch must be set to the ON position 4 HV1 on off and HV2 on off buttons used to enable disable the operation of the high voltage circuits 5 LEDs when the ON LED is lit the corresponding HV circuit is enabled While when the PROT LED is lit the Protect operating mode has been selected for the corresponding pump 90 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 6 Group of six function buttons with the following functions ENTER button used to confirm a selection that has been made with the CHANGE button CHANGE CONFIG button used to display all of the different options available MENU button used to enter into the configuration menu MODE button used to select the operating mode START PROT 1 and START PROT 2 buttons used to select the Start Sequence to Adjust the LCD Contrast of the DUAL Ion Pump Con
124. troller The DUAL ion pump controller is equipped with a LCD display located on the controller front panel The contrast of the display is factory set Anyway a contrast adjustment will be needed if one of the following conditions would be true backlights are on but no characters appear on the display backlights are on but a black squares matrix appear on the display Dual Controller User Manual 87 900 094 01 1 91 194 4 Instructions for Use Adjustment needed Figure 4 In order to perform the display contrast regulation power on the controller and after the startup press the ENTER button on the front panel Then keep it pushed until the proper setting is obtained Releasing the enter button will cause the storage of the contrast value into the unit memory 92 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 ta E START fl START PROT1 J PROT2 DUAL O Figure 5 When the unit enters into the contrast adjustment modality a specific message will appear on the display and all the LED indicators placed under the diplay will start to blink together Rear Panel of the Dual Controller The following figure shows the controls and connections on the rear panel of the Dual controller The configuration shown in the following figure consists of two H V cards two Set Point Remote Control cards and one RS 232 422 Computer Interface card and the con
125. ur la r paration ou la substitution 80 194 Dual Controller User Manual 87 900 094 01 1 Dual Controller User Manual Instructions for Use General Information 83 Controller Description 84 Storage 86 Prior to Installation 86 Installation 8 Usage 89 Controls and Indicators on the Dual Controller Front Panel 90 Sequence to Adjust the LCD Contrast of the DUAL lon Pump Controller 91 Rear Panel of the Dual Controller 93 Operating Procedures 95 Operating Modes 95 Step Mode of Operation96 Powering On the Controller from the Front Panel LOCAL Mode 97 Starting the Pump 98 Stopping the Pump 98 Original Instructions Agilent Technologies 31 1 4 Instructions for Use Messages d erreur Maintenance 98 Disposal 99 Error Messages 100 82 194 Dual Controller User Manual 87 900 094 01 1 Instructions for Use 4 General Information This equipment is intended for professional use Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent Agilent declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein by the improper use of the equipment by untrained personnel by unauthorized interventions or by negligence in complying with any specific national rule or regulation The following sections provide you with all the information needed to guarant
126. wer Ground Degaus ON OFF Output 24 V Power Mini B A Connector Figure 16 Connector Dual Controller User Manual 87 900 094 01 I 119 194 5 Technical Information The following table gives the connector pinout in the ConvecTorr configuration Tab 7 Pin ConvecTorr Da 24 V Power fh Pressure Signal Input 7 Signal Ground Be ut a ae Connecting cables between EYESYS GAUGES and DUAL available on request See Accessories List at the end of the Instruction Manual The following table gives the connector pinout in the Mini B A configuration Tab 8 Pin Mini B A 24 V Power ST Power Groun dl Be Pressure Signal Input Signal Ground Degas ON OFF Output rer III II I II I 120 194 Dual Controller User Manual 87 900 094 01 1 Technical Information 5 Remote 1 0 Connector FEMALE CONNECTOR Recorder outputs Ground Voltage recorder output Pressure recorder output Not Used Not Used StepV FixedV mode Negative StepV FixedV mode Positive Communication select Negative Communication select Positive Start Protect mode Negative Start Protect mode Positive Output ON OFF Negative Output ON OFF Positive Confirm HV ON Negative Confirm HV ON Positive External Interlock Negative External Interlock Positive REM OTE High voltage ON Common High voltage ON N O I O Set Point 2 Common Set Point 2 N O Set Point 1 Common Set Point 1 N O Not Use
127. wing example shown the use of the command HV ON OFF to power up the channel 1 in the three protocols Binary Protocol 04 AO I 1 81h 30h 34h 41h 30h 31h 31h 74h ACK 6h Ascii Protocol 04 AO 11 0375 40h 30h 34h 41h 80h 31h 31h 30h 33h 37h 35h ACK 6h Dual Controller User Manual 87 900 094 01 I 167 194 5 Technical Information 168 194 Multigauge Compatible Protocol 1301 23h 31h 33h 30h 31h Dh ACK 6h The answer ACK or 6h is given only if the mode ACK NACK is selected if not with this type of command nothing Is provided by the DUAL The following example command is used to read the current of the channel 1 or 2 Binary Protocol 04 T02 1 8lh 30h 34h 54h 80h 32h 3Fh 6Ch e 10 T02 8 9E 04 O lh 3lh 30h 54h 30h 32h 38h 2Eh 39h 45h 2Dh 30h 34h 15h Ascii Protocol 04 T02 0409 40h 30h 34h 54h 30h 32h 3Fh 30h 34h 30h 39h 10 TO 2 4 4 E 04 0679 24h 31h 30h 54h 30h 32h 34h 2Eh 34h 45h 2Dh 30h 34h 30h 36h h 39h Multigauge Compatible Protocol 108 23h 31h 30h 38h 3Fh Dh gt 1 08 1 9 E 04 3Eh 31h 30h 38h 31h 2Eh 39h 45h 2Dh 30h 34h Dh Dual Controller User Manual 87 900 094 01 I High Voltage Commands Technical Information 5 Tab 30 Command Description Mode Channels Format Possible Values fixed step fixed step mode Read HV1 HV2 Status 30h fixed nn ee E start protect start protect Read HV1 HV2 Status 30h start P mode Write 31h protect Psel Power supply Read HV
128. yclebar und entspricht der EG Richtlinie 85 399 fur Umweltschutz Dual Controller User Manual 87 900 094 01 1 37 194 2 Gebrauchsanleitung Abbildung 1 Die Dual Controller sind fabrikseitig f r folgende Versorgungsspannungen ausgelegt Modelle 929 7000 1 2 3 und 929 7008 09 10 11 Eingangsspannung 100 120 VWs Frequenz 50 60 Hz Modelle 929 7004 5 6 7 und 929 7012 13 14 15 Eingangsspannung 200 240 VWs Frequenz 50 60 Hz Installation WARNUNG Der Dual Controller wird mit einem Netzkabel mit 3 Leitern und mit einem 38 194 den internationalen Normen entsprechenden Netzstecker geliefert Es sollte immer dieses Netzkabel benutzt werden das an eine vorschriftsm ig geerdete Steckdose anzuschlie en ist um Stromentladungen zu vermeiden Im Inneren des Controllers entstehen hohe Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 VORSICHT Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu eine ungehinderte Zirkulation der K hlluft durch die im Geh use vorne und unten eingelassen Luft ffnungen gew hrleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in einer vier Rackeinheiten hohen Adapter Einheit installiert werden um zu vermeiden da der C
129. zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Die Hinweise enthalten wichtige Informationen die im Text hervorgehoben werden Dual Controller User Manual 87 900 094 01 1 Gebrauchsanleitung 2 Beschreibung des Controllers Der Dual Controller der Firma Agilent ist ein Gerat zur Steuerung von flexiblen Ionenpumpen das nach den spezifischen Angaben des Kunden fabrikseitig vorkonfiguriert wird Der Dual Controller kann in folgender Konfiguration geliefert werden Vordere Schalttafel mit Tastenfeld Display 16x2 und Mikroprozessor Karte Fern E A Karte Karte f r seriellen Datenaustausch Option Netzger t 24 V 20 W f r das Eyesys Gauge Option Stromversorgungskarte mit integriertem DSP zur Verwaltung der Ausgangsspannung Hochsp

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