2ls ionpump manual 4
Contents
1. 1 58 40 0 gt Model 919 0523 11 87 900 091 01 A TECHNICAL INFORMATION HTa 1 41 35 9 lt gt 2 99 75 9 3 06 77 7 20 75 19 1 20 77 19 5 Model 919 0524 2 42 61 4 1 65 42 0 Magnet model 919 0038 INSTALLATION Pump Assembling Before installing the pump into the system the pump must be assembled To assemble the pump proceed as follows see the following figure 1 Remove the pump parts from the packaging 2 Remove the fixing clip 3 from the magnet 2 3 Insert the pump 1 into the magnet 4 Fix the pump to the magnet by means of the Pump assembly fixing clip 12 87 900 091 01 A Pump Installation To install the pump into the system proceed as follows 1 During installation keep the pump and system clean Avoid touching surfaces which will ultimately be under vacuum When the Vaclon pump is open to the atmosphere take care to avoid introducing foreign particles oil solder flux or any volatile substances Before attaching the pump clea2. Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply C Toxic Corrosive L Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name anne Customer Authorized Signature cece ccc c cece cece cece ees Dott Ile sea Datei sss RE NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA L LL Customer ID Equipment Hu AL Request for Return VARIAN gt lt RO FAILURE REPORT TURBO PUMPS and TURBO
3. Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accor dance with the specific national standards 87 900 091 01 A TECHNICAL INFORMATION DESCRIPTION OF THE PUMP NOTE The Varian Vaclon 2 l s pumps are ion pumps and The part numbers in the table are relevant to the are available in the following versions pump without the magnet The magnet part numbers is 919 0038 PART NUMBER MODEL 919 0520 Dis pump nice The 2 pump is a pump which operates on the principle of ion gettering in the pressure range from 919 0521 2 1 5 pump 4 O D 180 SST tube 10 to less than 10 mbar A roughing pump is needed to lower the system pressure from DEMENS er seo TEE 919 0523 2 pump 34 O D 180 SST tube vacuum proc 919 0522 2 pump 3 8 O D 180 copper tube 919 0524 2 pump 4 O D 90 SST tube tee style M Model 919 0523 gt Magnet model 919 0038 Model 919 0524 IAIN GGL
4. Pump main assemblies 9 87 900 091 01 A OPERATING NOTES Vaclon pumps operate as a single cell Penning discharge A potential of about 3 kV is applied to the anode cell the cathodes are at ground potential Electrons are constrained from going directly to the anode by the presence of an axial magnetic field of about 1200 gauss A self shielding insulator isolates the anode from ground potential When the Vaclon pump is operating properly with magnet installed the current drawn is proportional to pressure see the figure in the following page After the system is rough pumped to below 10 mbar the pump can be started by simply switching on the Vaclon pump control unit A current draw on the control unit will indicate that the pump discharge has started The pump can operate in any position and can be supported on the mounting flange NOTE Always wait at least 30 seconds after turning off the high voltage switch before disconnecting the power supply leads This should allow the power supply output capacitor to discharge adequately TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following table details the main technical specifications of the 2 1 5 lon Pump Nominal pumping speed for Nitrogen 2 Operating at 5x1 0 mbar 8000 hours Operating voltage 3300 Vdc 10 Maximum starting pressure 1x10 mbar with MicroVac control unit Ultimate pressare 10 mbar Internal volume 0
5. Position an ihrem Eintrittsflansch h ngend eingebaut werden Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen GEBRAUCH S mtliche Hinweise f r den korrekten Betrieb der Pumpen sind im Handbuch der Steuereinheit enthalten Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen Es wird empfohlen die Pumpe auf einen Druck von 1x10 mbar zu bringen um einen rascheren Anlauf zu gew hrleisten Zu diesem Zweck empfiehlt es sich keine Olversiegelte mechanische Pumpe zu verwenden Falls hingegen eine derartige Pumpe benutzt werden mu soll an der Vakuumleitung eine Falle eingesetzt werden um den durch die Wasser und Old mpfe aus der mechanischen Pumpe erzeugten Druck zu verringern Es ist zu versuchen die Zeit auf ein Mindestma zu reduzieren w hrend der die mechanische Pumpe zum System und zur lonenpumpe ge ffnet ist da sich ihre Dampfe bei Dr cken unter 1x1 0 mbar im System verbreiten und dessen Verunreinigung verursachen Bei Systemen die vollkommen lfrei sein m ssen erweisen sich f r den obengenannten Vorgang Turbopumpen als geeigneter Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung k nnen die Anlaufzeit verl ngern und eine k rzere Standzeit der Pumpe verursachen Die Ablagerungen der Titanverbindungen Wasserdampf wenn sie der Luft ausgesetzt werden Dadurch bewirkt beim anschlie en
6. la fermeture de la soupape la rouvrir pour un pr pompage suppl mentaire D s que la pression diminue la tension remonte et la soupape de pr vide doit tre referm e 5 Lorsque l on porte la pompe la pression atmosph rique utiliser de l azote sec de fa on viter l absorption de vapeur aqueuse par les parois de la pompe ETES Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures appropri es chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs ES ATTENTION Ne pas approcher de dispositifs lectroniques de la pompe Le champ magn tique environnant cette derni re peut entra ner des dysfonctionnements desdits dispositifs MAINTENANCE Les pompes de la s rie 2 1 5 ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr A EXT Avant toute intervention sur la pompe la d brancher de la haute tension En cas de mise au rebut d une pompe proc der son limination dans le respect des normes nationales en vigueur 87 900 091 01 A GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions im proper use by untraine
7. made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION COIN NRI T UTER Contact person Name rdiet dea jr ao ai Ship Method nissen Shipping Collect 0r Europe only VAT reg Number eee e eee eee e eens USA only Taxable _ Non taxable Customer Billo fia PRODUCT IDENTIFICATION TYPE OF RETURN check appropriate box Paid Exchange Repair C Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration
8. retirer de son emballage avant le moment de l installation afin d viter toute pollution due la poussi re INSTRUCTIONS D UTILISATION INSTALLATION Ne pas installer et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige des poussi res des gaz de combat ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 C et 85 C 35 ATTENTION La pompe doit tre conserv e scell e jusqu ce qu elle soit pr te tre branch e au syst me A ET Pour viter toute l sion aux personnes ne pas brancher la haute tension la pompe avant que celle ci soit install e dans le syst me et avant que toutes les brides d entr es soient correctement assembl es ou ferm es 87 900 091 01 A Le fonctionnement de la pompe n est optimis que si celle ci est utilis e avec l une des unit s de contr le Varian sp cifiques MicroVac 35 ATTENTION Lors de l utilisation des pompes le respect des normes de s curit n est garanti que par l usage des unit s de contr le et des c bles Varian 35 ATTENTION Le passage pour la connexion du c ble de haute tension est con u pour l utilisation du c ble Varian P N 929 0706 accoupl l
9. turn the bakeout off and then on again when low pressure is restored e Bake the 2 l s pump for 24 hours Longer bakeout periods are recommended when the pump has been used with heavy gas load applications e Wait until the pump cools down to room temperature and recovers its initial pressure before using it in the application 87 900 091 01 A UNUSUAL OPERATING CONDITIONS If the pump current reads lower than normal for the pressure the discharge may have been extinguished To check for the pump being out of strike discharge extinguished remove the magnet and observe the residual current If the current is the same with and without the magnet in place no discharge exists in the pump TECHNICAL INFORMA To restart the discharge tap the pump body with a penny held between the thumb and forefinger or heat the pump body locally with a small soldering iron This should liberate surface gas within the pump and restart the discharge NEVER strike the pump with hand tools If the magnet strength is below its rated level the pump discharge and speed will be reduced and the discharge may extinguish at a pressure below 1 x 10 mbar PUMP TROUBLESHOOTING CORRECTION PROCEDURE Leak check the vacuum system with a helium leak detector POSSIBLE CAUSE Air leaks which limit pressure to above 10 Torr mbar and cause longer starting time SYMPTOM 1 Slow starting more than 30 minutes 2 Sl
10. 064 litres Maximum baking temperature 400 without magnet C 150 with magnet Material Body AISI 304 Cathode Titanium Anode AISI 304 Magnet Sm Co Weight 0 66 0 3 net Ibs kg 1 33 0 6 with magnet PUMP CURRENT A 10 10 10 PUMP PRESSURE mbar Pressure vs Current curve 87 900 091 01 A OUTLINE DRAWING TECHNICAL INFORMATION The following figure shows the outline drawing for the 2 pump and the magnet all dimensions are in inches mm 1 97 50 0 4 40 111 7 1 41 35 8 1 41 35 9 1 33 O D MINI 1 58 40 0 Model 919 0520 2 91 73 8 1 41 35 9 CS WW 1 58 40 0 0 77 19 5 Model 919 0521 6 36 161 5 3 37 85 6 1 58 40 0 Model 919 0522 7 40 187 9 4 41 111 9 2 91 73 8 AN NA
11. 13 Fax 33 1 69 28 23 08 11 01 Sales and Service Offices Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 To
12. 4 VARIAN gt lt vacuum technologies 2 l s lon Pum p MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI Model 919 0520 Model 919 0521 Model 919 0522 Model 919 0523 Model 919 0524 Magnet 919 0038 INSTRUCTION MANUAL 87 900 091 01 A APRIL 2002 2 l s lon Pump ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Asincerely u fp Lo f Sergio PIRAS Vice Presi
13. CONTROLLERS POSITION PARAMETERS L Does not start Noise Vertical Power Rotational Speed L Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure L Mechanical Contact Overtemperature Other Temp 2 Purge flow Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak L Vacuum leak LC High voltage problem C Solenoid failure LC Damaged flange Error code on display L Other Damaged sealing area L Other Customer application Customer application LEAK DETECTORS INSTRUMENTS LC Cannot calibrate L No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us
14. ONE La pompa deve essere tenuta sigillata finch non pronta per essere collegata al sistema EN Per evitare lesioni alla persona non collegare l alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse 87 900 091 01 A Il funzionamento delle pompe ottimizzato solo con l uso della apposita unit di controllo Varian MicroVac ISS ATTENZIONE Il rispetto delle normative di sicurezza nell uso delle pompe garantito solo con l uso delle unit di controllo e dei cavi Varian ISS ATTENZIONE Il passante per la connessione del cavo di alta tensione previsto per l uso con il cavo Varian P N 929 0706 in congiunzione con l unit di controllo Varian MicroVac P N 929 0200 o P N 929 0201 Solo in questo caso disponibile la funzione H V Cable oafety Interlock che fa si che l alta tensione venga spenta quando il relativo cavo viene scollegato dalla pompa La pompa puo essere installata in qualsiasi posizione Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto o in posizione orizzontale Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso Per informazioni dettagliate sull installazione della pompa vedere l appendice Technical Information USO T
15. PERATING CONDITIONS saute Intr there ee a 14 PUMP TROUBLESHOOTING is cale elle 14 2 l s PUMP REPLACEMENT PARTS AND ACCESSORIES 14 INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe della serie 21 5 sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information Questo manuale utilizza le seguenti convenzioni N EN messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali 35 ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure c
16. alsiasi intervento sulla pompa scollegarla dall alta tensione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche 87 900 091 01 A ALLGEMEINE HINWEISE Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzdokumentationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen Bestimmungen bernimmt Firma Varian keinerlei Haftung Die Pumpen der Serie 2 l s sind lonenpumpen die aufgrund ihrer Reinheit ihrer F higkeit alle Arten von Gas zu pumpen und ihres vibrations und wartungsfreien Betriebes allgemein f r Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnte 33 ACHTUNG Die Warnhinweise vor bestimmten P
17. d persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The 2 1 5 series pumps are ion pumps commonly used to cre ate ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equip ment Detailed information is supplied in the appendix Techni cal Information This manual uses the following standard protocol N ZEIG The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not fol lowed correctly could lead to serious injury 35 cAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 10096 recyclable and complies with EEC Directive 85 399 35 CAUTION In order to prevent outgassing problems
18. den Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs so da sich die Anlaufzeit verl ngert GEBRAUCHSANWEISUNGEN Bedienungsschritte Es ist nach dem diesbez glichen Handbuch vorzugehen f r den Gebrauch der Pumpe sind die folgenden Bedienungsschritte zu beachten 1 Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10 mbar oder einen niedrigeren Druck bringen 2 Die Steuereinheit an eine entsprechende Versorgungsquelle anschlie en und einschalten 3 Sofern der Betriebsstart bei einem Druck von ber 1x10 mbar erfolgt zeigt MicroVac High Load an 4 W hrend des Anlaufes der lonenpumpe soll das Vorvakuumventil ge ffnet bleiben bis ein angemessener Anlaufdruck erreicht ist Wenn die Spannung der lonenpumpe nach Schlie ung des Ventils abf llt ist das Ventil f r eine zus tzliche Vorvakuumpumpung zu ffnen Sobald der Druck sinkt steigt die Spannung erneut an und ist das Vorvakuumventil zu schlieRen 5 Wenn die Pumpe auf atmosph rischen Druck gebracht wird sollte Trockenstickstoff verwendet werden damit die W nde der Pumpen keinen Wasserdampf aufnehmen N REGINE Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge zu befolgen Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen 33 ACHTUNG Keine elektronisch
19. dent and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TELE N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc 4 VARIAN gt lt ISTRUZIONIPERIEUSO sea nee 1 BGEBRAVUEHSANEE HUNG Arne 3 MODE Aii Lo NT a reagire 5 Bip Oo Bp et ee ete mn et ert ne te ete eee eer en 7 TECAHNICAGINFORMA TION See 9 DESCRIPTION OFTHE PUMP Eee 9 OPERATING NOTES Heeres 10 TECHNICAL SPECIPICA TION aaa ne iena a a ein 10 ECCE 11 INSTALLATION orco ee en ee en Bee CU COE aura 12 PUMP ASSCMDINNG as T 12 PUMP NSTalalo o eut 13 CONTROL UNIT CONNECTION es ae 13 BAKEO T a a 13 UNUSUAL O
20. do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection NOTE Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust INSTRUCTIONS FOR USE INSTALLATION Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk Dur ing operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C 35 cAUTION The pump should be kept sealed until it is ready for attachment to the vacuum system N EI To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off 87 900 091 01 A The pump operation is optimized using the special Varian Mi croVac controller only 35 CAUTION The safety specifications agreement using the pump is guaran teed using the Varian controller and cable only 35 cAUTION The High Voltage cable feedthrough is designed for use with cable Varian P N 929 0706 in conjunction with Varian Mi croVac controller P N 929 0200 or 929 0201 Only in
21. en Ger te in die N he der Pumpe bringen Das darum befindliche Magnetfeld kann zu Funktionsst rungen der Ger te f hren WARTUNG Die Pumpen der Serie 2 1 5 erfordern keine Wartung S mtliche Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden RESINE Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen 87 900 091 01 A INDICATIONS G N RALES Cet appareilage a t con u en vue d une utilisation professionnelle Il est conseill lutilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian avant d utiliser l appareil Varian d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d op rations non autoris es d utilisation impropre par du personnel non form ou contraires aux r glementations nationales sp cifiques Gr ce leur propret leur capacit de pomper tous les types de gaz leur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie 2 l s sont des pompes ioniques g n ralement utilis es pour des applications de vide ultra pouss Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des r
22. enseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants A EXT Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale dont la mauvaise ex cution peut provoquer de graves l sions 35 ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut provoquer des dommages irr versibles l appareillage NOTE Les notes contiennent des renseignements importants extrapol s du texte PR PARATION DE L INSTALLATION La pompe est fournie dans un emballage de protection sp cial si l on constate des signes d endommagement imputables au transport contacter aussit t le revendeur local Pendant l op ration de d ballage veiller tout particuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement DS ATTENTION En vue d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e NOTE La pompe ne peut tre endommag e si elle reste simplement expos e l atmosph re Il est quoi qu il en soit conseill de ne pas la
23. gen um die angegebenen technischen Merkmale zu gew hrleisten LS ACHTUNG Die Pumpe soll versiegelt bis sie f r den Anschlu an das System bereit ist FALSCH N Um Personensch den zu vermeiden darf die Hochspannungsleitung der Pumpe erst angeschlossen werden wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder naecchlinecan eind 87 900 091 01 A Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgesehener Varian Steuereinheiten MicroVac optimiert 33 ACHTUNG Die Einhaltung der Sicherheitsvorschriften im Gebrauch der Pumpen wird nur durch den Einsatz der Kontroll und Verkabelungssysteme Varian garantiert 33 ACHTUNG Der Durchgangsisolator f r den Anschlu des Hochspannungskabels ist f r den Gebrauch des Kabels Varian P N 929 0706 in Verbindung mit der Kontrolleinheit Varian MicroVac P N 929 0200 o P N 929 0201 vorgesehen Nur in diesem Fall steht die Funktion H V Cable Safety Interlock zur Verf gung die f r die Ausschaltung der Hochspannung sorgt sobald das entsprechende Kabel von der Pumpe gel st wird Die Pumpe kann in einer beliebigen Position installiert werden Aus praktischen Gr nden wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut Die Pumpen k nnen auch in einer beliebigen
24. he se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente ISS ATTENZIONE Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata NOTA La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere ISTRUZIONI PER L USO INSTALLAZIONE Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per ottenere le specifiche tecniche dichiarate la temperatura ambiente deve essere compresa tra 0 C e 85 C ISS ATTENZI
25. in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich Argentina Varian Argentina Ltd Sucursal Argentina Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Australia Varian Australia Pty Ltd 679 701 Springvale Road Mulgrave Victoria ZZ 3170 Australia Tel 61 395607133 Fax 61 395607950 Benelux Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Brazil Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 3845 0444 Fax 55 11 3845 9350 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 1000031 P R China Tel 86 10 6608 1530 Fax 86 10 6608 1534 France and Wallonie Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38
26. ll Free 800 882 7426 Other Countries Varian Vacuum Technologies F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Internet Users Customer Service amp Technical Support vit customer service varianinc com Worldwide Web Site www varianinc com vacuum Order On line www evarian com Representatives in most countries 4 lt VARIAN
27. n the system thoroughly Chemical cleaning is the most complete cleaning method for the vacuum system however do not attempt it when pockets and crevices exist that will prevent thorough rinsing Degreasing with an acetone or methanol followed by water rinsing is usually sufficient 2 To achieve maximum pumping speed connect the pump to the system with a tube that has the shortest length and the largest diameter possible 3 For ultrahigh vacuum work joints should be tungsten inert gas welded hydrogen brazed or vacuum brazed Do not use flux in making joints for ultrahigh vacuum 4 Gaskets in the system should be of soft metal such as annealed copper aluminum or gold 5 After the pump is sealed in place leak check the entire system 6 Assemble the magnet to the pump CONTROL UNIT CONNECTION N TRIER The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit N ZEN To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off 13 TECHNICAL INFORMATION Connect the control unit to the ion pump with the coaxial high voltage cable assembly as follows 1 Push
28. ow pump down due to Vapours and gases admitted to a Heat the system walls thereby absorption of vapours on pump and system walls system are absorbed on the walls of accelerating the desorption the system and pump Subsequent reduction in pressure depends on the rate of depletion of this vapour process Baking mobilizes the vapours so they can be cracked and pumped by discharge Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and are very difficult to remove even by baking 3 Slow starting or slow pump down High voltage feedthrough is leaking Replace the feedthrough 4 Current higher than expected at lon pump leakage current causing Highpot the pump any given pressure higher pressure reading 2 1 5 PUMP REPLACEMENT PARTS AND ACCESSORIES PART NUMBER 919 0520 919 0521 919 0522 919 0523 919 0524 Magnet Samarium Cobalt 919 0038 HV Bakeable cable radiation resistant 13 4 m long with safety 929 0706 interlock Control Unit MicroVac 120 Vac input 929 0200 MicroVac 220 Vac input 929 0201 For a complete overview of Varian s extensive vacuum product line please refer to the Varian Vacuum Catalogue 14 87 900 091 01 A al VARIAN gt Request for Return 9001 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be
29. que car ses vapeurs se r pandent dans le syst me des pressions inf rieures 1x10 mbars causant une contamination de celui ci Dans les syst mes o l huile doit tre compl tement absente il est pr f rable d effectuer ladite op ration l aide d une pompe Turbo Des d p ts hygroscopiques et l absorption d hydrog ne dans le compos de titane peuvent provoquer par effet du vieillissement de la pompe l allongement du temps de d marrage Pendant l exposition l air le d p t du compos de titane absorbe de la vapeur d eau et cette action a pour cons quence qu au d marrage suivant le chauffage de la pompe entra nera la dispersion de la vapeur et d une partie de l hydrog ne pomp e pr c demment ce qui aura pour effet d allonger le temps de d marrage INSTRUCTIONS D UTILISATION Proc dure d utilisation Se reporter au manuel correspondant et observer la proc dure suivante pour l utilisation de la pompe 1 A l aide d une pompe de pr vide porter le syst me une pression de 1x1 0 mbars ou inf rieure 2 Brancher l unit de contr le une source d alimentation appropri e et l allumer 3 Si la mise en route est effectu e une pression sup rieure 1x10 mbars le MicroVac indiquera High Load 4 Laisser la soupape de pr vide ouverte pendant le d marrage de la pompe ionique tant qu une pression de d marrage appropri e n a pas t atteinte Si la tension de la pompe ionique descend apr s
30. rozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden VOR DER INSTALLATION Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Beim Auspacken vorsichtig vorgehen damit die Pumpe nicht f llt oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz 33 ACHTUNG Um Entgasungsprobleme zu vermeiden d rfen die Komponenten die mit dem Vakuum in Kontakt kommen nicht mit blo en H nden ber hrt werden Stets Handschuhe oder einen anderen geeigneten Schutz tragen ANMERKUNG Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden GEBRAUCHSANWEISUNGEN INSTALLATION Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht W hrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und 85 C betra
31. the female end of the cable connector over the high voltage feedthrough 2 Push the male end of the cable connector into the socket on the control unit rear panel Refer to the control unit instruction manual N TRIER Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit BAKEOUT When a 2 1 5 ion pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system This can be done by heating the pump and all the components in the system and is generally required to achieve less than 10 mbar base pressures e pump body can be baked up to 400 C if the magnet and the H V cable connector have been removed e the bakeout is done with magnets and H V cable connected the maximum allowable temperature is 150 C and the pump control unit can be left on in order to be able to monitor the pressure variations During the bakeout cycle the pressure must not increase above 5x10 mbar if this value is reached
32. this case the H V Cable Safety Interlock function is available This function switch off the high voltage when the relevant cable is disconnected from the pump The pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up or placed horizontally Pumps can be supported by the mounting flange in any posi tion For detailed information about the pump installation see the appendix Technical Information USE All the instructions for the correct use of the pump are con tained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x1 0 mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that this pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x1 01 mbar and cause contamination In Sys tems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During expo sure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some pre
33. uale del controller MicroVac ed osservare la seguente procedura per l uso della pompa 1 Tramite una pompa di pre vuoto portare il sistema ad una pressione di 1x1 0 mbar od inferiore 2 Collegare l unit di controllo ad una apposita fonte di alimentazione ed accenderla 3 Se l avvio avvenuto ad una pressione superiore 1x1 0 mbar il MicroVac indicher High Load 4 Lasciare la valvola di pre vuoto aperta durante l avvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio Se la tensione della pompa ionica scende dopo la chiusura della valvola riaprirla per un pre pompaggio aggiuntivo Appena la pressione diminuisce la tensione cresce nuovamente e la valvola di pre vuoto deve essere chiusa 5 Quando si porta la pompa alla pressione atmosferica usare azoto secco in modo da evitare l assorbimento di vapore acqueo da parte delle pareti della pompa EN Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi ISS ATTENZIONE Non avvicinare dispositivi elettronici alla pompa Il campo magnetico attorno ad essa pu provocare dei malfunzionamenti dei dispositivi stessi MANUTENZIONE Le pompe della serie 2 1 5 non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato EN Prima di effettuare qu
34. unit de contr le Varian Micro Vac P N 929 0200 ou P N 929 0201 Dans ce cas uniquement la fonction H V Cable safety Interlock est op rationnelle Cette fonction pr voit la coupure de la haute tension lorsque le c ble correspondant est d branch de la pompe La pompe peut tre install e dans toutes les positions Par facilit elle est g n ralement mont e en position verticale avec bride d entr e en partie haute ou en position horizontale Les pompes peuvent galement tre suspendues dans toutes les positions l aide de leur bride d entr e Pour plus de d tails sur l installation de la pompe consulter l appendice Technical information UTILISATION Toutes les instructions pour le fonctionnement correct de la pompe sont fournies dans la notice de l unit de contr le Il est conseill de lire attentivement cette notice avant d utiliser la pompe Il est recommand de porter la pompe une pression de 1x1 03 mbars de fa on obtenir un d marrage plus rapide Pour faire il est pr f rable de ne pas utiliser une pompe m canique scell e l huile mais au cas o il serait n cessaire d utiliser une telle pompe il est recommand d introduire un dispositif de retenue le long de la ligne de vide afin de r duire la pression due aux vapeurs d eau et d huile engendr es par la pompe m canique Essayer de r duire au minimum le temps o la pompe m canique est ouverte vers le syst me et vers la pompe ioni
35. utte le istruzioni per il corretto funzionamento della pompa sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Si raccomanda di portare la pompa ad una pressione di 1x1 03 mbar in modo da ottenere un avvio pi rapido A questo scopo meglio non utilizzare una pompa meccanica sigillata con olio ma se deve essere utilizzata una tale pompa si raccomanda di inserire una trappola lungo la linea di vuoto per ridurre la pressione causata dai vapori di acqua e di olio provenienti dalla pompa meccanica Cercare di ridurre al minimo il tempo in cui la pompa meccanica aperta verso il sistema e verso la pompa ionica poich i suoi vapori si diffondono nel sistema a pressioni inferiori a 1x10 mbar causando una contaminazione dello stesso Nei sistemi in cui l olio deve essere completamente assente meglio utilizzare pompe Turbo per la suddetta operazione Depositi igroscopici e l assorbimento dell idrogeno all interno del composto di titanio possono provocare l allungamento del tempo di avvio con l invecchiamento della pompa Durante l esposizione all aria il deposito del composto di titanio assorbe vapore acqueo in conseguenza di ci al successivo avvio il riscaldamento della pompa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio ISTRUZIONI PER L USO Procedure di uso Fare riferimento al man
36. viously pumped hydrogen thus the starting time may be lengthened INSTRUCTIONS FOR USE Operating procedure Refer to the MicroVac control unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a roughing pressure of 1x10 mbar or lower in the vacuum system 2 Plug the control unit into a suitable power source and switch the power ON 3 When the start up is at a pressure higher than 1x1 0 mbar MicroVac controller will show an High Load condition 4 Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve should be closed 5 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls N TRIER When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases 35 CAUTION Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning MAINTENANCE The 2 l s series pumps do not require any maintenance work performed on the pump must be carried out by authorized personnel N ZEIGE
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