最高峰 。
Contents
1. Floor unit mm SEMI E63 x71 N2 AN FOUP SEMI E47 1 E62 300mmFOUP FOUP FOUP FOUP BOLTS FOUP Entegris F300 Auto Pod A300 G3 SPECTRA FOUP 300E FOUP 300EX KT 3003 SF300 02 1189 SEMI E63 z71 z76 SEMI E47 1 E62 300mmFOUP2. 1 386mm 472mm 493mm BOLTS 30kg 8sec FOUP gt 8sec FOUP 11sec FOUP gt 8sec FOUP UM Front Retaining Feature FOUP 70mm 0 1mm FDP FIMS FDP 165 0mm 167 0mm 30L min ANR 6 mm 61 1OkPa G 6 mm 10L min ANR 6 mm MAX 60dB Aeq DC24V 5 3A 2A 50A RS232C 2m 4m 6m Keyence BL 601 SR 610 Carrier ID Omron V640 Reader Brooks LF80 LF60eco LF60Solid Writer Crossing Automation ATR9100 PB 90 CID 1O E84 DMS HB1 DMG HB1 Ethe
3. TYPE Jl NY NY dy a A TAS300 FOUP Front Opening Unified Pod FOUP Wofere Port ras3o0 type o SEMI Standard E15 1 0305 E57 0600 E62 0306 E63 1104 E64 1105 E110 1102 S2 0706 S8 0308 S14 0704 FIMS FDP Facial Datum Plane BOLTS Rlane 70 173 FDP When FOUP is undocked 40 CID 5 lt he Bilateral Datum Plane H BOLTS 493 MSDS
4. rnet SECS Info Pad Info Pad A B Pin Info Pad C D 2 2 FOUP TDK 272 8558 2 15 7 TEL 047 378 9227 http www tdk co jp fa
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