anest-iwata.co.jp Dry Scroll Vacuum Pump
Contents
1. Trade name Oil free scroll vacuum pump Model ISP 50 ISP 90 ISP 250C ISP 5OOC ISP 1000 Pumping Speed Ann 50 60 90 108 250 300 500 600 1000 1200 Ultimate pressure po lt 20 15 lt 5 x1 6 lt 1 Motor power kW 0 1 0 15 0 4 0 6 14 Sings PE th thermal protector 100 115 200 230 with thermal protector Voltage v OE m2 d eram dun 200 208 230 380 415 460 Noise level dB A 48 at air flush57 52 at air flush57 58 at air flush66 60 at air flush68 67 at air flush74 Weight kg gi G 5 p Ee z 23 38 56 Leak tightness Pa m s E Sore ESSE es Water Vapor Capacity g day 3 at air flush 5 at air flush 25 at air flush Air flush L min 4 9 10 Inlet connection NW 25 40 Outlet connection NW 16 25 40 Cooling system air cooled Ambient temperature C 5 40 10 40 Ultimate pressure is measured as total pressure Noise is measured in an anechoic room Synchrotron Facility Evacuation units for beamlines in Applications Synchrotron and Accelerator Facilities Sputtering equipment Vacuum deposition equipment 0 Surface modification Electron beam process lon plating equipment Vacuum furnace Heat treatment furnace Gas recovery devices Laboratory use Vacuum equipment Vacuum packaging machine 0 Leak detectors Others De2. Aur Mus SAO Inlet A NWO Rete ra mit Hours meter M LETT za 74 a A aao Outlet m Nw25 Reia nut s F a3 du x x 2 885 s Bf flush RE 1 8 DVSLYU Alcmit AER SEES ERR EE AU ORRICK YEO If ZA TE oes an c EESSU C ORFS TECA amp SEUBERO SWS HED CT Introducing the HC model with increased durability in DVSL series It lasts three times longer than the standard model thanks to the specialized finishing which is applied to the sliding surface It is highly recommended to end users who process water vapor frequently BZ TAIEDVSL 501CERUCS Product dimensions are the same as the DVSL 501C CI HHRISH ERROR Hxc WE X Numbers and values are comparison to our current products and reference only Results are varied depending upon application and condition of use DVSL 1002 pe M50 Duel mag inel p J LU HWD grz Ni Er as kl neu EH DRY SCROLL VACUUM PUMP Excellence in continuous operation between atmosphere and vacuum and in displacing water vapor i FH E Application HERIO Fixed scroll Be RAO 02 77v 7 Vacuum Chuck 095 121 77185 amp Roughing for TMP Gas pocket Inlet OBZ Hux Vacuum Transport 07 7 Bi Deaerator ecd gt RAO OSZE Vacuum Forming 977 81 Gas Substitution den inlet E E Outlet RART E
3. SECAD CCT REC Be sure to read instruction manual and understand it fully before use ORTO mOVI LEE ES Ge When maintenance interval has been reached be sure to contact our distributor OZ DAZK 7 Mika AB nex CeR7NECXERBREE SDMEC who sold it to you e ERBRS F ERR RS CEM LET EE THE tS CAE LER SIERBRS ZU Q The guarantee period is based on instruction manual Maintenance interval and the zu guarantee period are different Please contact Vacuum Pump Dept of ANEST IWATA Corporation before exporting OAASOAA cada CUN S Ene BAB MMH ERIS PEZ 8454 0 AE EE ESSA OD ELLA O CHIESE CRUS OC SELL SH pumps shown on this catalog to out side of Japan WADECESL Si i ad L A OD A Precaution on installation ORK HAE A TRE OR VRPTICRBL TKR Danger of explosion and fire OAH ICP SBIHBANTVECA lnstall in an area which is not exposed to explosives flammable gas or other related c Asz be o E _ ji things Heme DENERA ETTEN Pumps shown in this catalog do not have breaker for avoiding motor burnout by OA MISE FIVUSH BAN CTWEKA installing Avoid motor burnout using breaker BRSRBHzEH LOERRICS EB ROI kea PRRU CK ZERO Electric source cord is not included in the pump Use electric source cord which is SYHAT TV aVEZ FIX EXU instructed by instruction manual D cH i This vacuum pump requires regular maintenance as described in the instruction OAR MISEMNEXYTTVADBE TCS manual Instal
4. 481 O751AKY TB Cryopump Regeneration BZa7 ie Vacuum Drying Intake cycle completed Position No 1 0QU 77AH Leak Test 02 7 ux Vacuum Packing No 4 No 3 EE Py BDVSL f SE mstructure lt J P seal PITIA Tip seal EHR OE2 Position No 3 Position No 2 BT ibis Principle of compression Inlet No 1 No 2 No 3 No 4L Ms f Exhaust valve BR Outlet 17235572 d M Pak BERI O Fixed Scroll azzo Orbiting Scroll Bly Fy Wi Flush I7777220Hfi D do 6 Wa Ri OD m AACR 3587 5Utd c0X ed moisture to remain in pump This remaining moisture can cause H Specifications ERA 44V2U AZB VB R7 7 Trade name Oil free Scroll Vacuum Pump eodd DVSL 100C L min Displacement 50 60Hz 1007120 DVSL 500C DVSL 501C DVSL 501C HC DVSL 1002C 845 1010 BREEN Ultimate pressure Pa lt 30 KW 03 Motor power 5060Hz sings Hase 100 115 200 230 2 4 zm Voltage Three phase 200 220 Bere Noise level dB A H Singie phase x69 at air flush7 4 Three phase Water vapor 100 at air flush 250 at air flush 500 at air flush IZ77v v185 amp Air flush 5 at air flush 10 at air flush 20 at air flush Inlet connection Outlet c
5. P4 Ios Dry Scroll Vacuum Pump qY ISP series Air cooled LR104996 B Dimensions sp Ee Poke CSAICE 400 370 bd S We B Dimensions Dry Scroll Vacuum Pump J EB E3 Us du SY ies Single Phase Motor Three Phase Motor Vertical Inlet Horizontal Inlet RoHS Conformity CSA Conformity CE Conformity Air Flush S Air Flush Purpose of Air Flush Pumping of humid gas by vacuum pump can cause condensed moisture to remain in pump This remaining moisture can cause failure to ultimate pressure or pump Air Flush operation is necessary to remove remaining moisture inside Air Flush operation also recovers ultimate pressure ll Pumping speed ISP 500C ISP 250C ISP 1000 ISP 90 1000 How to select ISP 500C T V SEC E Si xe o o Q op on Q E 5 A ISP 500 Pumping Speed of vacuum pump ipe ai Inlet Pressure Pa T Three phase V Vertical Inlet S Single phase H Horizontal Inlet Torr The model name of ISP 1000 is ISP 1000 TVA THA ISP 50 is change to ISP 50 SV1 single phase 100V ISP 50 SV2 single phase 200V
6. l the pump where there is enough ventilation and maintenance TRF AED OT AGRA D IA SBP lca TCE available S Try to Dry n 947 An ZI REO TERRI RSS OD D PET 30383 C CDU d Iry to Di y 2 SOY INK Models specifications and photos are subject to change without notice HAOR KOTICZEDWET COABAAS Xuaumt cEmJUcCu xd MEHIA LI Wa ANEST IWATA Corporation ANEST IWATA T223 8501 3176 TELOT20 917 144 deme PHSDSOCHALVCEITES TEL 045 591 1112 FAX 045 593 1539 3176 Shinyoshida cho Kohoku ku Yokohama Japan TEL 045 591 1112 FAX 045 593 1539 http www anest iwata co jp E Mail ispinfo anest iwata co jp Printed in Japan CAT No AP V6 2011 3 3 2 MA 39
7. m Pump Dept of ANEST IWATA Corporation before exporting pumps which are shown on this catalog to out side of Japan ISO 9001 ISO 14001 CM 005 A Precaution on installation Danger of explosion and fire Install in an area which is not exposed to explosives flammable gas or other hazordous environment Pumps which are shown in this catalog do not have a circuit breaker for protecting motor from burnout Install a circuit breaker to protect motor from burnout Electric power cable is not included Use electric power cable which is complied with local electric regulator This vacuum pump is required periodic maintenance at interval which is shown on the instruction manual Install the pump where sufficient ventilation and an open area for maintenance procedures are available Try to Dry Models specifications and photos are subject to change without notice B More Information 39 PRINTEDWITH SOY INK Trademark of Americ Ml anest wata Corporation ANEST IWATA 3176 Shinyoshida cho Kohoku ku Yokohama 223 8501 Japan Telephone 81 45 591 1112 Facsimile 81 45 593 1539 http www anest iwata co jp E Mail ispinfo anest iwata co jp ANEST IWATA UN P CAT No AP V 5 2010 88 2 0K 47 5 DRY SCROLL VACUUM PUMP DWVSL series Air cooled h24AZ7U Ib EZi72 kupia LIL single phase CES Aao Inlet F4 Nw Pi NA AI
8. onnection NW25 with Re 3 8 NW25 with Rc 1 2 NW16 with Exhaust valve NW25 with Exhaust valve Rc1 Zo he 73 Cooling system air cooled ARBRE n Ambient temperature pae INITP ITH JYR Back up material Fluorine rubber M EAT SICLED ITT SOGHERO trii C o BL HA 0D FE ffi 8 0 RR e iL Ne ZU SUAS HSN CTHDBORMODPSHRSNET As the orbiting scroll orbits as shown in the illustration from No 1 position to No 4 position crescent shaped gas pockets are gradually reduced At the last stage compressed gas is exhausted through the center port RUD CHAT SERY TAB CAA D EU Ed ERU AKAD HEAR ROMEO RACKSBEDSVES ETC ABICE DLP AD AYVAEBENTVET LPI FY Y LEE ICCC UAB REALT Ra uu 0 ultimate ning moisture inside the pump Air Flush operation dose not ony pump remaining L L zmin ons i LH SSS Sas ps a mz Pumping Speed Inlet HE E59 DVSL 501C HCO ERUREIEDVSL 501CERI TFS Pumping speed of DVSL 501C HC is the same as the Services 1 8 OOOH HU HEDNORLRY FEPSCEETAL amp 7 TA F EAICH EAN TES BtiRU UAt22 BURY 72 RAR LEI CPAWEE lt C EOS SE EE 15 5 U 18 0008 CORE HR 7 HERVA TARER IOXVIF VA MEER TINA TKS AVI TF VARBORE BEUVIT OMESETIOCHUET After Sales amp Maintenance Services Yokohama Service Center We ANEST IWATA Corpora
9. tion put emphasis on before amp after sales services in consideration that vacuum At Yokohama Service Center maintenance and repair work of our pumps are operated over long time of more than 8 000 hours a year vacuum pumps maintenance training and vacuum seminars are In order to run vacuum pumps for such long time and safely please conduct regular maintenance by always available maintenance standards of every year or 8 000 hours iA UAX7Hh7 7 llService Network 2222222222223 IS IooooIIII33333300000 ea B r3U UAt74 HEATEO FIYA ERZETT OTHE i yr WHE E TEL 86 0 21 6407 9713 MALAYSIA ELICIT Shanghai Service Center eM AUSTRALIA Maintenance and repair work for Chinese market are available Address ANEST IWATA SHANGHAI Corporation TEL 86 0 21 6407 9713 A amp EOCEIS Precaution on Usage OC OBZARYUTIls UYAR CT This vacuum pump is suitable for use on Clean processes only QA AIUBEGRA BE SEAOD SERTEO d 257 A BREDA San AR Do not use explosive flammable toxic or corrosive substances and substances MESE TIRE VC eU which contain chemicals solvents or particles ANEST IWATA will not perform R E um maintenance work on any pumps which have been used for hazardous substances OHA ASEHALERERY MME Cd Sat CARSER 5 SUC Do not disassemble reassemble or alter pump and parts on user s side
10. vice handling system Construction Dry Scroll Vacuum Pump Inlet Outlet Exhaust valve Orbiting scroll Fixed scroll 1 No 1 tlet Fixed scroll No 2 Gas pocket v etin Orbiting scroll 5 n d Ou Air flush V f Cooling fan 1 3 mur Motor Intake cycle completed Position No 1 Fan Cover YA Cooling fan 2 J si al a Position No 3 Position No 2 l I uu Fiked scroll 2 Hour meter S Principle of pumping As the orbiting scroll orbits as shown in the illustration from the No 1 position to the No 4 position crescent shaped gas pockets are gradually reduced At the last stage compressed gas is exhausted through the center port A Precaution on Usage Q This vacuum pump is designed for use on Clean processes only Do not use explosive flammable toxic or corrosive substances or substances which contain chemicals solvents or particles ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances Do not disassemble reassemble or alter pump and parts on user s side Be sure to read operating instruction manual and understand it fully before use When maintenance interval becomes due be sure to contact your distributor O The warranty terms and conditions are on instruction manual Maintenance interval and the warranty terms and conditions are period are different Please contact Vacuu
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