取 扱 い 説 明 書
Contents
1.2. 4 A A A I Ni
3. MPa MPa L min m h lt
4. 5 6 8 1 2 0
5. He H 1
6. 1 2 3 10 20 4 2 5
7. 3 7 7 11 A
8. 1 2 3 4 1 5 1 5 DMF 5
9. 1 2 3 4 5
10. 14 15 0MP a
11. 4 0 1 5 9 13
12. 6 0 7
13. 11 12
14. 1 4 C02 N20 C2H4 CH4 1L min 1L min 5
15. A i i
16. 16 N 17 18
17. A 2 YR 70V A CO Nz0 1L min 0 Nz Ar Air Hz He m H 05 Nz Ar Air 55 8 M16x1 5 Hz He 8 M16x1 5 0 Nz Ar Air Hs He 16 m H 05 Nz Ar Air 55 EE 8 M16x1 5 Hz He 8
18. 2 4 6 1 2 fEL 011 758 2223 TEL 028 633 5120 IlEL 022 388 6446 fgL 029 823 0071 ll 03 3582 7961 lEL 048 720 5679 0436 20 7001 lL 045 506 1414 lEL 052 331 4147 fEL 0749 27 2811 lgL 06 6751 5101 fEL 086 444 1047 lEL 087 885 2478 IEL 082 823 8205 lEL 093 533 8910 gg 0120 800 117
19. 6 7 8 10
20. 3 4 5 2 lt 3 9 1 2 1 6 2 O
21. M16x1 5 02 N2 Ar Air Hs He Et Ps I a 8 5 M12x1 0 7080s Hz He 110 Hz He 110 ME WP Et WP HPg WE Pa m H 02 N2 Ar Air 55 Hz He 110 02 N2 Ar Air W22 14 He W21 14 Hz W22 14 AA 1 H C H 2 3
22. 9 20 10 20
23. No 1101259H N NN SNSNNNRNNNNN SNSNNNNN N NN YR 70 YR 70V GYR 70 GYR 70V YR 70 YR 70V YR 70F YR 70SUS A 544 0004 4 11 17 fEL 06 6751 1151 FAX 06 6752 0577 1
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