SPC-100
Contents
1. AfSte MMe edereMeesnr lees oceanic MEs3 Production 8 clO SetsO Bike Be CHEM Two or three kinds of PC B s can be processed automatically W75mmLi FOR CONIFER ULE RE When the PC B is W75mm or less three pieces of P C B s e5 c L1ICOmmMLA FOBRCHNISSMA RUE can be processed at the same time boge ATV av When the PC B is L120mm or less six pieces of PC B s can be processed at the same time option PESRIED FSZV IOI SLY SH aC OSEE SO hone scientists l ooon he OTH OG Model REE 130x300mm 84 YFYI UYY ATV Sy Substrate dimensions Max 1 30x 300mm 8 inch Wafer option Sige AES PESRIEF Ss Electrode Parallel planer PESRIE switch Svar 13 56Mhz Max6OOW RFA hkVvFYZ RF Power supply 13 56Mhz Max 6OOW RF auto matching SEA O 4U RYZF 800I min Exhaust system Rotary pump SOO min DLLM VAIO IyY FO 3 Ar Of GEIA PTY av He Process gas Mass flow controller Ar O2 additional option He zE WxDxH SPC 1 00B 700X750 X 1 880mm 9D kJ EXO EBBER lt SPC 1 00H 1 200x580x 1 300mm tl wy RER lt External dimensions WxDxH SPC 1 00B 700x750x 1 880mm excluding the light tower and monitor SPC 100H 1 200 X 580 X 1 800mm excluding the P C B input unit ZET Sc Safety Notes CHEAORIIC RIRE Ek HRMYOSAIELK CIAT Read the operating Manual carefully before using the machine FETCIL Sales OES AWNAFI OV ZX Hitachi High Technologies Corporation esx AT Lob Industrial and Product2. FIAVHEPRB ysxvou BW I7FTZ Plasma Cleaning System Plasma Cleaner HITACHI i Bl SPC 100 AR Ret PNY ST Tt VIICSBIFSHAREORME 7V y IFY IRITI BIA ABE 0AE Ery a WORM LPHIEH LOB RMOMLE BIE UT JIAVHFRECT This plasma cleaning system improves the bonding strength for wire bonding the bonding strength for flip chip bonding the filing capability for underfiling and the adhesiveness for resin sealing E CRIO YI AREKO F ADEA AS FERJIT HSK SPC 100B SERA JO Yy EDI HAHH VAY YAXN SPC 100H x SPC 100B 1 1 Hf GSPC 1OOH Ky F VAGEET _ The building block concept makes it possible to change SPC 100B from manual to automatic system by the retrofitting of SPC 100H lt gt Manual Plasma Cleaner SPC 100B For experimental research and small volume production lt gt Automatic Board Transfer System Magazine system SPC 100H After SPC 100B is installed SPC 100H can be retrofitted f Ky SRE u Retrofitting TT a SPC 100B FHWID AV FRE SPC 100H SREE Hvara SPC 100B Manual Plasma Cleaner SPC 100H Automatic board transfer system Processing time 12 30 sec boat amk AHE BARS KMax60O0w LB0OOMMOMEIVU 7 RF power source Max600w Processing Area of 1300mm High Density and Large Area Processing aT TE Muse Plasma Processing in Wafer Level Package Procsss Bf IFI I IV Y TCTCOEBRKME FTFVaAY Direct Processing Possible for 8 inch Wafer option Sle StE
3. ion System Dept Att T 105 8717 RR AKHA Ae48145 24 14 Nishi Shimbashi 1 chome Minato ku Tokyo 105 8717 Japan Ban S4 rILI Y 03 3504 5909 6183 TEL 81 3 3504 6183 IE EE S URL http www hitachi hitec com oversea URL http www hitachi hitec com products BEIT Manufacturer ORAH AWNAFITYAYIVXYY Hitachi High Tech Instruments Co Ltd AL 1370 0596 fF REAREA RETIRE 1 1 1 1 1 1 Sakata Oizumi Machi Ora Gun Gunma 370 0596 Japan 0276 61 7930 FAX 0276 61 8710 TEL 81 276 61 7930 FAX 81 276 61 8710 URL http www hitachi hitec hti com URL http Awww hitachi hitec hti com ELROD BP AS LICRESOCERMDOKI OCS SRHIKS Specifications and any aspects of the machine s appearance are subject to change without prior notice Ewa AL CUES This brochure was printed on recycled paper
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