6514型エレクトロメータ基本操作説明書
Contents
1. 4 00000000 MEDN 00000 UU aT 0000000000 000000000000 00 00 000000000000 1500 OOUQUUUUUUUUUUUUU 2 0000000000 000000000000 00000000000000000000 IlOI Ul2. 20000000 NPLC 00000800 SLOWQMED 5 60 5 5 Jl 5 00000000000 5500000000 Stow 0000000000 0 MED 0000000 55000000000 JUD MED 0000000 FAST 00000000
3. 0000000 0 000000 10 TRAC POIN 20 20000 TRAC FEED SENS TRAC FEED CONT NEXT TRAC DATA CALC3 FORM CALC3 DATA OOUOUOUODUUO0U0DU0O00 TRAC DATA CALC3 DATA 0000 Model 6514 J 000000 Rel mX b 0 0 0 Percent 70707777777 777 7777 7777777777 777777 77777 7 7 OU 6514 nstruction Manual 7 7 7 7777 100
4. UUUUDUUDUUDUUDUDUDUDUuuuun 0000000 100000 8 000000 400000000 7 8 SCPI 72772177777 7 7 7 7 7 7 0 fre 2777 7 SENSe 1 VOLTage NPLCycles lt n gt 0 019 10 SENSe 1 CURRent NPLCycles lt n gt 001 0 SENSe 1 RESistance NPLCycles lt n gt 000000 0 010 10 SENSe 1 CHARge NPLCycles lt n gt 0 019 10 M0000 DISPlay DIGits lt n gt SENSe 1 MEDian RANK lt n gt 5 SENSe 1 MEDian STATe lt b gt SENSe 1 AVERage TCONtrol lt name gt MOVing O00 REPeat SENSe 1 AVERage COUNt lt n gt 100 SENSe 1 AVERage STATe lt b gt Rel OOOO CALCulate2 NULL STATe lt b gt rel
5. O High 11 000000 il 27707777777771771777777 0000100000 100002 00000 OK L1 12 17 477000000 000000000 SHIFT 1000000 LIMIrI 000 LIMIT2 10000 contro UI DDDDDDDUDDUUDUDDUDDDDD 9 999999 9 099999T 0000000000000 0000 0 10 DUDUDDDDDDDDDDDDDDDDDDUDUDUUDUDUDDDDDD MT OO00O00000000A 000000000000000000 0000000000000 5 0000 0D00000000000000000 scr 000000 2000000 OOOOOOOCOOCOCOOOOOO0000000000000 D Model 6514 Instruction Manual 00000 0 00000
6. 5 O 0000000 00 000 mX b 0000000000000 0000000000000 14 0000000 000 7 14 SCPI JmX b 77000000 CALCulate FORMat lt name gt PERCent CALCulate KMATh MMFactor lt n gt mxX b TU OO000000MO0000 9 99999 20 9 99999e20 CALCulate KMATh MBFactor lt n gt mxX b TO 00000 00 00 9 99999 20 9 99999 20 CALCulate KMATh MUNits lt name gt mX b 000100000 20000 CALCulate KMATh PERcent lt n gt 9 99999e20 9 99999 20 CALCulate KMATh PERcent ACQuir CALCulate STA Te lt b gt CALCulate DATA 00000000 15 00 0000 15 mX b CALC FORM MXB mX b 8000000 CALC KMAT MMF2 2 CALC KMAT MBF 0 5 0 5 CALC STAT CALC DATA 0000000 00
7. SCPID 000g 4000000 4 SCPI 777 7 OOU0 SENSe 1 FUNCtion lt name gt VOLTaee CURRent RESistance OOO CHARge SENSe 1 XXX RANGe lt n gt gt 000 SENSe 1 XXX RANGe AUTO lt b gt ON OFF SENSe 1 VOLTage GUARd lt b gt OOO00000000 O00 000 SENSe 1 RESistance GUARd lt b gt SYSTem ZCHeck lt b gt ONG OFFOOUOO READ 10000 QOO00000000 XXX VOLTage CURRent RESistance 0 O CHARge 20v 00000000000 H 6 05 RST GPIB SENS FUNC VOLT 100000000 SENS VOLT RANG 20 20 000000 SENS VOLT GUAR SYST ZCH OFF READ 1000
8. ZCHK lID D Q lll 0 AUTO 1 _ 19 I oom y oO oO 1 oo o o 1 oo o col OVO Oo oO Ya fas Bo ajo oa 2 lt ooo lt ooo lt 5 oo CI oO Oo ojo oO oO fo Oo Oo jo oO ogl m o
9. 10000 m Y x 1 1 4 tie 0000x 0000000000000 Medel 6514 7 EEE MATT 7 7777 7 7 717 777777 7 7 7 SCPI OU 000 5 900 9 SCPI 777777777 TRACe CLEar FREE TRACe POINts lt gt 10 2500 TRACe FEED lt gt SENSe IJJCALCulate l CALCulate2 TRACe FEED CONTrol lt gt NEVer NEXT TRACe TSTamp FORMat lt gt ABSolute DELta TRACe DATA FORMat ELEMents lt list gt UUUDDUDJDUDDUUuDUUUDUDHUDREADII z TIMEX STATus CALCulate3 FORMat lt name gt O0000 0 0 0 MINimum JMAXimum JMEAN SDEViation 0 0 0 PKPK CALCulate3 DATA Model 147070700 16
10. THEY INSTRUMENTS INC 0000 K THE INSTRUMENTS INC KEITHLEY Keithley Instruments Inc Sales offices BELGIUM CHINA FINLAND FRANCE GERMANY GREAT BRITAIN INDIA ITALY JAPAN KOREA NETHERLANDS SWEDEN TAIWAN 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY 534 8453 www keithley com Bergensesteenweg 709 B 1600 Sint Pieters Leeuw 02 363 00 40 Fax 02 363 00 64 Yuan Chen Xin Building Room 705 12 Yumin Road Dewai Madian Beijing 100029 8610 8225 1886 Fax 8610 8225 1892 Tiet j ntie 2 02130 Espoo Phone 09 54 75 08 10 Fax 09 25 10 51 00 3 all e des Garays 91127 Palaiseau C dex 01 64 53 20 20 Fax 01 60 11 77 26 Landsberger Strasse 65 82110 Germering 089 84 93 07 40 Fax 089 84 93 07 34 Unit 2 Commerce Park
11. RDG NO 1 000000800 OOUOUU MIND 0 MAX 0 Peak to Peak O Average 0 a N 15 Medel 51477070007 7 lU 5
12. Ooo eS re at Eire m smo ono 1 JAT Seo Opogpo 9 0 9 EJ 2 iS oo ae oo oO iaee Co so oo oO o ea ee oo elf 9 OOO oo O oo vay a oo oO o aa oOo oOo on 2 5 gt Ooo e gt Sy Hm oo m 088 o ao 25 2 50 oo Sie Cuma so si ono oo 5 toOTO oe i EE Oooo oO Og Aono io Se m Tan SS 2 00 ooann m gt GO G a ono CI ae S Boa eS SoS oo oe em wm a ce ca on en ff se A ee omona on oon oo oo00 ee pert ooo oooo ooo oo moog ooo oo oo S E moos ooo g
13. 4500 DIGIT 00 0 Model 6514 0 000000000 000000 3500 6 5 0 l 0 0 0 0 LO A A A EE ET JUD L Model6514 00 00000 12 Moe 1470000000
14. L DlUUDUBDDUDUDUDUUDUDUDUDUUDBDUUDUDUUDUUuDUDBuuUuuuuuuuu 6514 903 0110 Keithley 00 OO 00000 0 Keithley Instruments Inc IKEITHLEY Oo Ono ooo oO ER ao oOo oOo On FAN 0go a a ve oon oo On aoe oo ooo Op 05 Oso Zogo Ss Se oo oo nooo on 0552 Joga oOo oO oOo noo 0p 0 Foo Ar See o Ooo oon ooo a ee oO oo gt 1 GF ex El oo ooo a 2S D oo 000 n B 1 Oo DN Og oo 5 on ooo G Soo Soo
15. AUTO 10000000 a 000 7000000 5 217 0 2 20 20nC 20V 200pA 20kQ 200nC 200V 2nA 200kQ 2u 20 2MQ 20u 200 20MQ 2u A 200MQ 20u A 2GQ 200u A 20GQ 2mA 200GQ 20mA 147770700 7 11 00 UUDUDDUDUDUUDUDUDUDUUUDUDUUDUUDUUUDUUUDUDUDUUDUDUUDUBUDUUUDUDUUuu UUUDDUDDUUUDUUDUUUUDUUUUDUUUDUUUDUDUUDUDUUUUDULD NPLC number of power line cycle 6 16 67msec 1 60 0 50Hz 20msec 1 500
16. OOOO 16514 Mood 147777000707 10 7 6 7 7 7 7 7 7 7 7 77 7 7 7 7 7 1000 RST 000000000 SENS FUNC CURR SENS CURR RANG AUTO SYST ZCH OFF READ 000 10000000 QFOOO0000000000000000000 READ 0 0 Model 6514 DH 1 4 OTE 000 0000 6514
17. a OI OS EE REV Pol ASIA sce natn nata DJE l au r Co Co at 550504 0 5 05 2410 Sie 1 m DUT D DEAR u qe COC Co 1470000000 1 Model 6514
18. eS eo 5 2 5 a 6514 7 7 7 7 7 2 Model 6514 2000000 00000 1 LOCAL POWER 1 2 217007 SHIFT V DROP AU gt VAL CONELIM UNITS ___NPLC AVG REL LIMIT DIGIT RATE CHED A TEST CAL SAVE SETUP CONFARM_ CONF TRIG STORE RCLL HALT TRIG ENTER WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY lt KEITHLEY MARENN 488 PREAMP OUT 2V ANALOG COMMON CHASSIS CHANGE IEEE ADDRESS 250V PK OUTPUT WITH FRONT PANEL MENU QD owe Gss o 2 INPUT 250V PK DIGITAL IO TRIGGER LINK RS232 INPUT PREAMP O 10 N 2VANALOG 1 7 FOLLOWS OUTPUT V GUARD INPUT SB 120 PROGRAMMABLE COM 315mAT 220 VAC GA CONTINUZD PROVECTION AGAINST FIRE 3 Moe 1477000707 Z O g OC 10 000 GND ODU 1 5
19. noo ooo ooo o 2 5 O o O g 00000000000 ANALOG PREAMP OUTO 2 0000 3 l IOOUUOOUUUUUO E J 7 7 7 7 77777777777777 7777777777 U DU A A D W u 6514 00000000000000000 Model 237 ALG 2 Model 6514 Q00 000000000000 20 0000 0 300000000 0000000000000 00000 0000000 O Model 7078 TRX x 0 00 000000000000000 300000 Z3000000000000000 e 7777777777 Mee 5147777007 4 3 Input High Input Low hassi INPUT Chassis Ground 250V PEAK
20. HUU Model6514 000008000 1 Model 6514 Instruction Manual 000000 16 180000000 0000000 lU UID 6514 UU 000000 Model 6514 InstructionManual 00000 12 000000 00 9 Moe 14770707000
21. CALC DATA 0 0 Model 6514 000 0000000000000 Keithley Instruments Inc Q 000000000 KEITHLEY A GREATER MEASURE OF CONFIDENCE Keithley Instruments Inc Corporatio Headquarters 28775 Auma Road Cleveland Ohio 4313 440 28860400 440 246 6108 1 534 8452 wae BELGAUM Sirg Piprars Lpaisw 22 353 DD 60 Foor 25200 G was Bajing TOTS BCH BG Fara BS vax ka corn Habits 00 53 086 65 60 Fae 00 57 85 85 ere FRANCE Saleh Aubin 01 53 20 20 08 4050 11 TT PE we key GURMAK Garnnaing 107 114 UP z mre keri REAT BAMAR Trand 0118 12 75 001 OB 02278 10 Was kihi IA 020 212 Fee 080 212 BI 05 we kitip oom Copyright 2003 Kehler Bar MALY Miano 02 28 2 18 Far 22 48 20 22 74 oy Tokyo 1 1 Fare 21 077 32 06 be hey KOREA Fanu 82 2 574 TUTE 2 2 174 7830 katka yon Gorinchem 4153 52 53 33 0183 63 08 21 ri Singapura Si
22. Rl OOOO O0000000000000 0 Model 6514 Instruction 0 0 000 Z00000000 14 Moe 621471011101 00000000600 0000 Model 6514 100 2500 0000000000000 0000000000000 HUUDUDDUDDUUDUDUUDUUUDUUUDUUDUUUDUUDUDUDUUDUDUUDBDUUUDUDUUuu UJUUUDUDUDUUDUDUDUDUUUDUUDUDUDUUDUUUDUDUDUUDUDUUDBDUUUDUDUUuu UUDUDDUDUDUUDUDUDUDUUUDUDUUDUDUDUUDUUDUDUDUUDUDUUDBDUUUDUDUUuu ENTER JJI UU U UUDUDDUDDUUDUDUUDUUUDUUDUDUDUUDUUDUDUDUUDBDUUDBDUUUDUDUUuu
23. o 2 jo o o o o jo o Oo W le 254 o jos o Joo joo o ogo gl oo o Joo Oo joo Oo Oo Jo o gao oo o Joo 3 joo o o Jo gono o g Oo 5 joo ooo jo ogogs ooo o g oao mm joo E oga jo ogo dona S A i N lt oo N Ne 0000 Abdel 65147777777 8 0 0000000000000 3000000000000000 6514 JOM 200000 READ
24. Volts Amps Ohms amp Coulombs A Unguarded GRD off Input High 0 19 Guard Fuse Chassis INPUT Ground COMMON Input Low 250V PEAK Volts and Ohms only B Guarded GRD on DUT 000000 ADDDGUUUUJUUUDUD 0000000000 0 4 DUT INPUT 250V PK NOTE For Volts and Ohms GRD must be off 5 Moe 14770007071 5 0000000000 GROOD 3 l lU I BI 30Vrms 1
25. KEITHLEY Model 6514 poopooooo00000 A GREATER MEASURE CONFIDENCE Keithley Instrunents Inc 1 thl ey Instrunents Inc 90 O 0 0C0O00C0000000000000000000000000000 0 Keith ey 0 00 d evel and Chi o J 90 0000
26. Brunel Road Theale Berkshire RG7 4AB 0118 929 7500 Fax 0118 929 7519 1 5 Eagles Street Langford Town Bangalore 560 025 080 212 8027 Fax 080 212 8005 Viale San Gimignano 38 20146 Milano 02 48 39 16 01 Fax 02 48 30 22 74 New Pier Takeshiba North Tower 13 11 1 Kaigan 1 chome Minato ku Tokyo 105 0022 81 3 5733 7555 Fax 81 3 5733 7556 2FL URI Building 2 14 Yangjae Dong Seocho Gu Seoul 137 888 82 2 574 7778 Fax 82 2 574 7838 Postbus 559 4200 AN Gorinchem 0183 635333 Fax 0183 630821 c o Regus Business Centre Frosundaviks All 15 4tr 169 70 Solna 08 509 04 600 Fax 08 655 26 10 13F 3 No 6 Lane 99 Pu Ding Road Hsinchu Taiwan R O C 886 3 572 9077 Fax 886 3 572 9031 Copyright 2003 Keithley Instruments Inc Printed in the U S A 1 03 Model 6514 1 HOUUUUUU 2003 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A First Printing August 2003 Document Number 6514 903 01 Rev A UOUUUUUUU 2003 80
27. 0 1000 CALC2 LIM STAT 1 CALC2 LIM2 LOW 0 1 2 01000 CALC2 LIM2 UPP 0 1 10002 010000 01 000 CALC2 LIM2 STAT ON READ CALC2 LIM FAIL ge es CALC2 LIM2 FAIL OHOUOU200000000 00000000000000 READ CALC2 LIM FAIL 9 0 0 CALC2 LIM2 FAIL Model6s14 90000000 OHOUOQUUUUUU 1 1 0000 Model 6514 mX b 000000000000 0000000 mX b 00000 Y mX b 1 UlUDUDDUUUDUUUDUUUD mX b JUDDDUDDUDDUDDUDUDUDUDUUUDUUU SHIFTQOUOUUUU
28. 000 12 SCPI CALCulate2 LIMit STATe lt b gt Limit lt b gt ON OFF CALCulate2 LIMit LOWer lt n gt Limit 00000000 lt n gt D0 000 D 9 99999 200 9 99999e20 CALCulate2 LIMit UPPer lt n gt Limit 0000000 lt n gt D 0 D 9 99999e20 9 99999e20 CALCulate2 LIMit FAIL 1 0 1 CALCulate2 LIMit2 STATe lt b gt Limit2 lt b gt ON OFF CALCulate2 LIMitk2 LOWer lt n gt Limit2 GO 000000 lt n gt 000 0 9 99999e20 9 99999e20 CALCulate2 LIMit2 UPPer lt n gt Limitt2 0 000000 lt n gt 000 0 9 99999 200 9 99999 20 CALCulate2 LIMit2 FAIL 000020000000000 Qo 0001 000U0 0 2 00000000000 0000 1 000 000002 000 01 000800 Mode 14707000 18 13 1000 RST 0000000000 CALC2 LIM LOW 1 000 CALC2 LIM UPP 1 ae
29. 0000 42 5 00000 18 0000 UU 250 000000 20 5 0 777777777 77 Metal Guard Plate Metal Safety Shield Measure Volts INPUT 250V PK LO O COMMON HI Metal Guard Plate Metal Safety Shield Measure Ohms INPUT 250V PK O COMMON NOTE GRD must be on Abdel 651470 6 JUD AVG
30. 000080 oo oO ooo 2 2 0000820 oF oo oO ooo 2 oo oO ooo 2 000080 oF oo oO ooo 2 000080 5 oo oO ooo O OOO oF f oO Se Eee 2 oo Oo ooo 2 oo oO ooo 2 oo oO A 2 oo ooo oO oOo ooo oF oo oo oa 2 a ooo 2 oo oo OGD fo oOo Oooo oF oe 0000 fo oo 200 O o000 a ooo oF oo 200 O 20000 O ooo oF gA 200 O o o oF oo moO O 0O Oo irt oF oo 200 O o ooo oo oo 200 O a o ooo oo oo EJ oo 200 O o oo oo 200 O o000 o ooo oo oo 200 O 0000 o ooo oo 200 O a o o00p m moO A o0p oo 200 O o000 o Oooo OOn oo 200 O ooo o0p oo moO OOOHOO Oo OOn oo 200 0000 a o ooo oo 200 O o000 o OOn oo 200 O 0000 ooo 200 o o000 OO 0202 O Oo ooo ri Oo oo 200 O o o000 000 ooo ooo Oooo ooo ooo oo o Oooo ooo Cee TES Es Soe A G GAGO GOGO AGS ooo ooo oon oO ooo CO
31. UID S T Jl l HUDUDUDUUDUDUUUDUuuuuuuu 0O00mx b 00000000000 SHIFTQOOUU0U MX B 100000 BS 0 1 1 EE EE Oo E o o 3 oo Joo A o O oono o oOo Ta 5 oo giS Soo g2 2 oO 8 Sees S oRe0eR005 oa Z mo Oo Ooo Oo cl gt Es aS ooo mo r ogongo sogi oo mo oda Z o 4o gg gao ZE Fa Py ogon o0 goga zZ gogogo m Oooo OOoos oo go o
32. UO MX B 0000 0 0 0 MJBJDDDUDUUDUUNTSDUDUDDUDUUD ENTER 00000 0000000 00000 0000000 100000080800 00000 UUUDDDUDDUUDDUUDUUUDUUDUUDUUDUUUDUDUUDUDUUDBDUUUDUDUUuu OOO 0000 OOUOUUUU U 1000 000000000000 0000 lU UD 19 414770700000
33. ngapore GETAT Fax wa prim 08 51 0 00 Fim 08 855 28 10 Wanay nly TAMAR 2 572 8077 GBG 3 5T 2311 ha
34. o go go g o J m o x ogoogo oao Joy dodog doggoodgoaden qos gogo Beas 4 ob oo do 5 lt gdo go gd a CI o o o o o o o o o o o o o o o o o o o o o o o o o o o o E o o 5 Ei ono oO Oo Oo o w 6 7 Mee 147770000 JUD 2 000000 2 ZCHK A 00000000000000000 JUD AUTO OOUOQUU
35. o seo S22 2 ee oo o0 oo 000 Op aes s I o0 oo moo Og Ton Se ee 2 2 a o noon ooo ee Ses SS o0 oo og o Hoo 25 22 oo 00 2 aoe 2 eb o0 oo og o aaa m o oo coo Op o m 118 oO oo ooo on Ob Aso eS 1i lt o0p00o ooo oo ooo Op Spas 2 2 Soon o ooo oo i Foon a o0pop0p0 ooo oo ooo Op oO Sei s ee Foon o0op0p0 ooo ooo HAA Oa 5 me oo 2 Oop o o000p0 oo ooo ooo Op Soe Too oo ET ooo ont 5 ao eS Soy Sa A S Oo op 01005 oo 00000 ooo o0 so aaa 04270 ooo Oooo A oO oo ooo Op On a eS s B Oog oon mm ooo ET EET 25 o0 ooo Op oof aa 5 2 E oS ooo 021 s E oo e oo aS oo Oooo Om ao oO oo 000 Op Bo oo oOo Sa Se a oFoo oFooo o
36. oO Co mm oO i Oo fs o oO x CI oO mm par ono oO E oa Z CI 0 2 o o mm oO m q oOo oO o Oo 0 Oo oOo oOo 0O o o 1 2 0000 Q0 IV 00000000 020 200 0000 0000 IV 000000 REL rl OOU0U REL 00000000000 00000000000 rel 0 0000 REL 000000 REL 000000000 00000000800 1 2 3 13 Medel 6514
37. oo ooo oO ooo oo oo 200 Op oo ee a ooo 2o00 Op a Og Slo 5 o0 on aoe 2 o ooo o A See See a ea DHS gt See Sa ooo Be ee j ooo oo ae e e SS Se ooo oo oD Boe Sel oe pb See c22 Sees DE ae e E ooo Oooo oF Bee aoe Soo r 6s so ooo o oo gga oo oo a eos oo oo oO oO SS Se gaga bee oo oo ooo 20 O ooo ooo oo Soo 2 252 a Bee ease ooo 00 O ooo oo s See oo ol ooo o oo Seas Soo go eae oe ooo oo ss s s E Soe a 5 oo O ooo oo aoe Boao eee oo ae moro OSOA 5 22 S oo oom Ses ss se oo nos See eee ee aoe oo ooo 25222 za Seo eae ceca o0
38. ooo Soe ee oo oooo ooooo Oooo See oo aooo o ooo oo 00000 Oo 4U00000000000000000000000000000000000000 0000 4Mo0000000000000000000000000000000000000000 Oo oo oO ooo oO ooo oa oo ooo Oo oa ooo o000 nm Oo oo ooo m ooo oa aio ooo oOo ia l oa oo oO ooo o ooo Pg gt 0 oo aoe o oo oO ooo o oooga oo oO ooo oF oo oO a oo oO o ooo 2 000080 oo oO ooo 2
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