取扱説明書 WHISPERマスフローメーター
Contents
1.2. 1SCCM 5 2SCCM 1SLPM 20 1SLPM 50 11 1 1 1
3. 2 DIN m TARRE EL Salm doc 2752 P36 13 4 FLOW VCR
4. GND GND 32 10 8 RS 232C RS 485 18 7 4 3 RS232C COM P22 8 2 10 9 19 7 4 4 MISC1 PRESS AVG FLOW 10 10 0 0 59 FS 0 0 3 2 2 C ex d d P 19 7 4 4 MISC1 ZERO BAND 11
5. 8 3 2 lt CR gt lt CR gt ASCII ODh ID lt ID gt lt CR gt lt ID gt A Z ID ID A lt CR gt ID A lt gt 1 1 22 8 3 1 W 9 1 lt ms gt lt CR gt 165535ms R 9 1 lt CR gt 1 50ms W9 1 5 0 lt CR gt 2
6. 6 5 J 0 2MPa 0 2MPa 570 7 gt TEAT DAAN mO EACBICHE 73382888 0 2MPa lt gt 15PSID 103kPa 6 6 1 gU cn CN DIN8 Blu 7 30VDC WI 100mA ST X4 20mA 15VDC Ar lt
7. 15PSID 103kPa 10 3 MOV VOV R13 7 3 7 10 4 P12 7 3 3 TARE V
8. 7 3 6 MENU MENU 7 3 7 MOV VOV I 13 7 4 SELECT MENU RS 232C RS 485 MODEL RLICRT SCIEHTIFIC Ph 27B8 29B 6B5B 5208 298 009 Manufacturer Data Factory Custom LDMPOSER User Miss Bioreactor Select Menu Gas Select 14 7 4 1 GAS SELECT
9. 7 3 1 PSIA PSIA PSIA ec 21 28 SCCH A HA Bir PSIG PSIA 2 800 7 3 2 SET 7 3 3 TARE V 0 TARE V 0
10. 1SCCM 5 25 151 20 1SLPM 50 4 1 Close Close Flow Open m Flow Open Open Flow Close Open Flow gt
11. DIN 8 D 9 15 gt 40mA 4 20mA RES 303 302 Viton 01 7 RTV A gt 7F7 A TFTRD 1 5SCCM 500SLPM 2 0 1Atm 101 325kPa 485 3 4 20mADC 15VDC 34 12 2 FS si 35 13 13 1 0 5SCCM 20SCCM WHISPER MW 0 0 5 sccm 26 67 0 1 sccm 2 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm 13 335 60 325 M5X0 8 10 32 UNF Both Sides 2X 8 32 UNC v 4 445 MW 0 5 sccm to 20 sccm approximate shipping weight 262 879 mm 13 2 50SCCM 5SLPM WHISPER MW 0 50 sccm 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 5 slpm
12. P35 12 2 M5 10 32 1 8 O M5 10 32 2
13. 40 15 MWB 18 TFT 5 10 15 1 USB DIN YF ON lt gt 5 USB OFF
14. CANCEL STP PRESS UP DOWN SET SET CANCEL UP gt latm 14 696 PSIA 1 188 14 58P C e TI UAR hahJ m e cap ya 5 TP CHANGED 21 11 C STP ALREADY SET RETURH RETURH SET 20 DIAG TEST EI C d CET R8 Sig 7871 Temp Sig Srl DP Side 9986 DPBrdg 566f35 HPBrdg 5B Meter Func 199 Pouer Up 32768 BHLK MAIN ROTATE DISP 1809 UP DOWN SET CANCEL
15. GRAM lt gt X 5 lt gt lt CR gt gt lt ID gt lt CR gt X 9 lt ID gt lt gt lt CR gt 3 5 GRAM lt gt lt CR gt X 5 lt gt lt CR gt gt V CR lt gt lt CR gt T CR P40 lt lt gt lt CR gt gt lt ID gt lt CR gt lt 1 9 lt ID gt lt gt lt CR gt gt 9 lt ID gt lt gt lt CR gt lt lt ID gt lt gt lt CR gt 9 lt ID gt V lt CR gt lt ID gt lt
16. 2 1 6 8 2 2 8 0 5VDC 0 10VDC 4 20mA EAE X 7 7 1 TFT TFT LCD 4 BE LF S LCD 1711 1 11 ON OFF
17. 12 rr Ai 12 vise So TARE V COIE rU 12 7 94 CCM _ 8 _ _ edd 13 7 3 5 SCCM SLPM Mass Flow Rate 13 7 9 NU A LP 13 AS 13 SELECT 14 7 4 1 GAS SELECT 15 7 4 2 COMPOSER CEGJAT yana suu s Ed edid 16 7 4 3 RS232C COM 18 7 4 4 MISC1 ZERO BAND 19 7 4 5 MISC2 DIAG 20 7 4 6 MEG DATA 21 22 AM VC crm 22 CEPI EET 22 27 8 3 1 BEE FOEBAB 22 8 3 2 22 SL 0 KK YKEKN K K EL 23 M a a ETOD C 23 8 4 1 IIIA 0 00 RR RII IIR hee 2o 842 EET 23 DTP 24
18. R9 1 CR 50ms 8 4 8 4 1 lt ID gt lt CR gt ID ID A lt CR gt ID A 8 4 2 014 70 025 00 02 0004 02 0004 Air 014 70 025 00 02 0004 02 0004 Air Volume Flow Mass Flow 5 6 Volume Flow Mass Flow
19. 1 CREATE SELECT MIXTURE COMPOSER User Mixes 17 7 4 3 RS232C COM ID 7 12 gm SOO RS232 COMM 5485 COMM UNIT ID ID ID ID BAUD BACK MAIN UNIT ID DOWN ID ID ID A Z lt
20. 10 5 2 20 7 4 5 MISC2 DIAG 2 15 7 4 1 GAS SELECT 10 6 P19 7 4 4 MISC1 FLOW 10 7
21. 0 001 9999 999 TOTAL ON 7 TIMER 4 2 2 9999 59 59 TOTAL TIMER RESET 0 0 lt gt lt ID T lt CR gt 5 A T lt CR gt ID A lt gt OFF 0
22. P21 7 4 6 MFG 11 2 33 12 12 1 0 8 Reading 0 2 Full Scale iei 7 3 1 0 4 Reading 0 2 Full Scale 0 2 25 0 5 100 FS 200 1 10ms 20 1Atm 101 325kPa 10 50 10 50 STP 2 0 100 0 0296 FS lt C Atm 0 0296 FS Atm 128 FS 0 2MPa 103kPa RS 232C RS 485 0 5VDC 0 5VDC 0 10VDC 1 5VDC 4 20mADC 2 0 5VDC 0 10VDC 1 5VDC 4 20mADC
23. gt Default 09 gt Inverted 1809 1809 7 4 6 MFG DATA MFG DATA MODEL INFO ALICAT SCIENTIFIC Ph 520 290 6666 Fax 520 790 0109 BACK MODEL INFO N 1gg5CCN D 190903 1872014 9 2014 DL ou 21 8 RS 232C RS 485 8 1 LIREO 7 2047509 8 2 2400 9600 19200 38400 57600 115200 8 3 8 3 1 RS 232C 1 1 10 60 2 RS 485
24. 5 1 A Ar 809 CO2 20 TEST1 236 AGMATEST1A236A80 00 1 A20 00 4 CR X 236 80 00 20 00 CO2 ma rm 8 BGMATEST2A237A50 00A0A30 00 1A20 00 7 CR X B 237 50 00 Air 30 00 20 00 25 8 7 2 lt ID gt GD lt gt lt CR gt lt gt 236 255 1 A 236 AGD236 A 236 lt gt 26 8 8
25. CANCEL SET 15 7 4 2 COMPOSER 5 0 0196 UP DOWN Add Mix 28 Free CANCEL 20 lt gt D COMPOSER User Mixes Add Mix SET UP DOWN NEXT LETTER CHANGE CASE DOWN COMPOSER Mix name BACK CHANGE CANCEL CASE EDIT HDD GAS COMPOSER ubH5 of Total BACK CHANGE CANCEL CASE NERT SET ETTER ADD GAS GAS 5 16 DOWN SE
26. 1 1 Certificate of Registration Man9gyner Cortfic atun MCNA Quiy podes vul of Alicat Scientific 7641 N Business Park Drive Tucson AZ 85743 has been assessed and found complying wilh the requirements of ISO 9001 2008 CN is hereby granted for registration providing the eig rules and condilions are observed at limes Certification Scopo Design wishes tme Instrumentation for the measurement and of pressure and the flow of gas and or liquid Certificato Numbor 0410009 issue Dato 17 Nov 2010 Audit Date 10 Nov 2010 Original Registration Date 10 Feb 2005 Expiration Date 16 Nov 2013 p On Behalf ot Management Certification NA voce A noe v Certamen T i om rm cmt e paete Meagre t Ce nee gom funi 0 2MPa 15PISD 103kPa
27. GAS SELECT 98 LIP DOWN PAGE d COM POSER lt Recent 20 om 4 9 COMPOSER User Mixes Bioreactor Breathing UP DOWN Chromatography 3 nes e EH gt CANCEL gt Recent 8 gt Standard Alicat 30 P28 gt Factory Custom m gt User Mixes Composer Pure Non C rrosiue gt Bioreactor 29 Refrigerant Stack gt Breathing P29 Welding Pour gt Chromatography P30 gt Fuel P30 gt Laser P30 gt 02 Concentrator P30 gt Pure Non Corrosive P31 gt Stack P31 gt Welding P31 DOWN PAGE PAGE
28. 29 014 70 025 00 02 0004 02 0004 Air A 014 70 025 00 02 0004 02 0004 Air ID Volume Flow Mass Flow 6 7 In ID Volume Flow Mass Flow MOVVOVTOV POV 8 5 0 0 8 5 1 V CR lt ID gt V lt CR gt B V CR ID B 8 6 8 6 1
29. 1 12 7 3 4 LPM Volumetric Flow Rate CCM LPM 7 3 5 SCCM SLPM Mass Flow Rate Mass Flow Rate 200C 14 696 psia SCCM SLPM d da lt gt
30. LCD CONTRASNT UP DOWN 0 30 CS 0 30 BACK RESET 10 SET 19 7 4 5 MISC2 DIAG MISC2 STP STP STP TEMP STP PRESS DIAG TEST 3 ROTATE DISP 1809 STP TEMP UP DOWN SET SET
31. 36 13 1 0 5SCCM 20SCCM 36 ew Mee MORE me 36 jo O DM u Sua yumuu wana 37 134 208 37 38 13 5 50SUPM 26 25085lLP 38 SR 39 39 IPAE Mm M 39 14 2 4588 mE 2 5 E TOT s eis race afia cat pu wat Ote af repr s 40 15 MWB 41 M MV RS 1 qhasa 41 2 41 1 1509001 ALICAT NIST
32. ALICAT ON OFF 7 30VDC 80mA 12VDC 70mA 24VDC 10 7 2 Main DONE TE 2 CCM SCCM TARE V 0 Qum MENU CEN SCCM MENU MENU RS 232C RS 485 11 7 3 MAIN ON
33. lt gt lt CR gt lt ID gt lt gt lt CR gt 911 A 1 1 lt CR gt ID A 02 812 C 0 CR TID C Air P28 19 24 8 7 8 7 1 lt ID gt GM lt gt lt gt lt 1 gt lt 1 gt lt 2 gt lt 2 gt CR X lt ID gt ID lt gt 6 lt gt 236 255 lt gt 0 01 99 99 lt gt Alicat 28 9
34. gt lt CR gt 8 lt ID gt T lt CR gt P40 3 5 lt ID gt lt gt lt CR gt m 3 5 W91 lt gt lt CR gt lt lt ID gt 091 lt gt lt CR gt s R91 CR lt 9 lt ID gt 091 lt gt lt CR gt lt CR gt 2 3 lt gt RS 232C 15m 9600bps Zt 9 Standard 10 1 1 12 13 14 15 75 25 9096 10
35. 2A 3 5 USB 15 2 ON 1 15 DIN MB 0 10VDC OFF lt gt 1 TARE 527 95 100
36. ZS ku a D 9 2 RS 232C RS 485 3 RS 232C RS 485 Serial Cable End PC Serial Port 6 3 6 3 1 RS 232C RS 485 TTC RS 232C RS 485 6 3 2 0 5VDC 0 5VDC 0 0 01VDC 5 0VDC 6 3 3 0 10VDC 0 10VDC 0 0 01VDC 10 0VDC lt gt MWB 0 10VDC 6 3 4 4 20mA 4 20mA d 0 4mA 20mA a 15VDC 6 3 5 2
37. gt DIN 8 ELS RS 232C RS 485 0 5VDC 0 10VDC GND 2 3 x4 lt gt 1 6 1I 1IO X DIN 6 6 2 6 2 1 Tare 4 8 Tare 6 2 2 RS 232C RS 485 C RS 232C RS 485 DIN 8
38. 2 175963 13147 09993508 166 EAN 40 40 02 60 N2 176993 13218 09993300 168 HeOx21 21 02 79 204395 04406 100059 99 02 196 He Metabolic Exhalant 1696 O2 78 04 N2 5 CO2 0 9696 Ar 170 051 1 3200 0 9992587 29 CHROMATOGRAPHY GASES Number Name Viscosit 14 696 PSIA 14 696 PSIA es 596 9596 Ar 1096 9096 Ar FUEL GASES MN 73 303 14696PSIA 14696PSIA 70 H2 4 CO 25 CO2 196 CH4 189 NatGas 1 9396CH4 396C2H6 196C3H8 296N2 196CO2 190 NatGas 2 959 CH4 39 C2H6 1 N2 19 CO2 95 290 2 596 C2H6 0 296 C3H8 0 190 CAH10 1 396 N2 0 795CO2 102 980 0 534 0 9974725 192 CoalGas 5096H2 3596CH4 1096CO 596C2H4 115 045 0 6589 0 996387 193 Endo 7596 H2 2596 N2 133 088 0 3797 1 000511 194 HO 66 6796 H2 33339602 168 664 0 5356 1 000396 LPG 96 1 C3H8 1 5 C2H6 0 4 C3H6 1 996 n CAH 10 74 933 2 0128 0 9784565 196 HD 10 LPG 8596 C3H8 10 6 5 nrC4H10 74 934 2 0343 0 9780499 LASER GASES LASERGASES _ 00000 0 0 00 0 0 0 0 0 Name Viscosit 14 696 PSIA 14 696 PSIA __179_ 4 5 CO2 13 5 N2 82 He an 167 7 amp CONMMNITPGHe 186204 04533 1000514 182 LG9 99 CO2 159 N2 76 He 184835 04997 1 0004 8 183 HeNe 9 99 Ne 91 He 211756 02276 1 000516 __ 184 16 94 9 4 CO2 19 25 71 3596 O2 CONCE
39. 92 8 98 2 75 25 7596 25 7596 2596 27 28 9096 7 596 2 5 PraXair Helistar 1025 PraXair Stargon CS A1025 95 5 28 BIOREACTOR GASES Short Absolute Density Compressibilty 148 Bio 20M 2096CH4 8000CO2 133457 1 7235 0994482 149 25 2596CH4 7596CO2 _ 132407 1 6603 09947594 151 Bio 35M 3596CH4 6596CO2 130 102 1 5340 0 9952803 152 Bio 40M 40 CH4 60 CO2 _ 128834 14710 09955239 153 Bio 45M 45 CH4 55 CO2 _ 127478 1 4080 09957564 154 Bio 50M 50 CH4 50 CO2 126025 1 3450 0 9959779 155 Bio 55M 55 CH4 45 CO2 124462 12821 09961886 156 60 60 CH4 40 CO2 122779 12193 0996385 158 Bio 70M 7096 3096 CO2 159 Bio 75M 759 CH4 259 CO2 116842 10309 0 9969251 160 Bio 80M 80 CH4 20 CO2 114501 0 9681 0997032 161 Bio 85M 85 CH4 159 CO2 111938 09054 09972300 162 9096CH4 1000CO2 _ 109 119 0 8427 0 9973684 163 Bio 95M 9596 596 CO2 BREATHING GASES 0 L S Z Number Viscosity 14 696 PSIA 14 696 PSIA 164 EAN 32 32 02 68 2 174925 13075 0999375 165 EAN __ 36 02 64
40. FEST ny EE 7 ou 80 9596 s 50 8096 20 5096 BGG 0 000 20 SLLM 0 596 USB ERO VD lt gt 10 50 0 0 45 41
41. gt ID ID BACK ID RESET A ID 2 A SET ID ID ID Q DOWN UP 115200 57600 38400 19200 9600 2400 19200 SET lt gt 18 7 4 4 MISC1 ZERO BAND MISC1 MISC1 PRESS AV
42. 13 335 __60 325 _ Both Sides 2X 8 32 UNC 8 89 MW 50 sccm to 5 slpm approximate shipping weight 453 59g mm 36 13 3 105 WHISPER MW 10 slpm 106 86 1 4 Both Sides 2X 8 32 UNC X 8 89 MW 10 slpm approximate shipping weight 635g mm 13 4 20SLPM WHISPER MW 0 20 slpm 1 4 NPT Both sides 4X 8 32UNC v 9 525 MW 20 slpm approximate shipping weight 1 09kg mm Sfi 13 5 405 WHISPER MW 0 40 slpm 126 162 20 32 1 2 Both Sides 4X 8 32 UNC 9 525 MW 40 slpm approximate shipping weight 1 45kg mm 13 6 50SLPM 250SLPM WHISPER MW 0 50 slpm 0 100 slpm 0 250 slpm 126 162 20 32 1 2 NPT Both Sides 4X 8 32 UNC 9 525 MW 50 slpm to 250 slpm approximate shipping weight 1 59kg mm 38 13 7 500SLPM WHISPER MW 0 500 slpm 3 4 Both Sides 8 32 UNC v 8 382 14 22 73 gt 14 1 ____132 08 ___ 63 5 36 83 REF GENE 66 04 REF MW 500 slpm approximate shipping weight 2 04kg mm Calibration Data Sheet Adder Codes lt 1 RBO gt nee 0 10vpc 1 1 4 20mA 0 5VDC 1 5VDC
43. 6 5 24 llu 7 25 24 TL 24 8 7 25 8 71 ES D tuned acer vd diste dotato Mark d a 25 8 7 2 D 26 27 28 TO P i a 32 10 1 AUN SE TE LI EU bes cose p 32 10 2 su JLAZ VBABROMBDSZMEUTM 32 10 3 MOV TOV 32 10 4 e eee 32 10 5 On 32 106 e A 32 10 7 22 FE S S OD Y u u a A AR a A AR a Ab a e b a Rb s 32 10 8 RS 232C RS 485 33 33 10 10 0 4 5 33 HIF EC EA a a a a A 33 E 33 113220470 __ 33 0 34 34 2 35 CECIDIT PSP NEUE
44. lt gt lt 2 2 gt sk mme 0 1ovpc xs C2M 1 5VDC 4 20mA 39 14 2 MENU TOTAL TOTAL TIMER gggg ggigg N BALE RESET SCCM SLPM 0 0
45. 00 FG 1 2 5 02 10 8 CO2 85 7 N2 196 Ar 165 222 1 3379 0 9990842 201 FG2 2 9 O2 14 CO2 82 196 N2 1 Ar 164 501 1 3617 0 9989417 202 FG 3 3 7 02 15 CO2 80 3 2 1 164 426 1 3703 0 9988933 7 02 12 2 80 1 166012 1 3546 0 9990 116 204 FG 5 10 02 9 5 CO2 79 5 N2 1 Ar 167401 13419 09991044 205 FG6 13 02 7 CO2 79 N2 1 Ar 168 799 1 3293 0 9991932 0 C anu Absolute Density Compressibilty Viscosit 14 696 PSIA 14 696 PSIA 0 9987964 0 9987278 0 9985493 20 0 9983605 25 CO2 7596 Ar 0 9981 609 0 9969777 7596 CO2 2596 Ar 0 995401 2 CO2 98 Ar 208 673 1 7877 0 998993 50 50 220 464 0 9800 1 00039 75 He 25 Ar 216 937 0 5792 1 000571 90 10 205 813 0 3388 1 00057 259 He 759 216 008 1 3814 0 9999341 1025 90 7 5 Ar 25 CO2 201 175 0 3433 1 000556 Stargon CS 9096 Ar 8 CO2 296 O2 203 890 1 7918 0 998798 31 10 10 1 LCD P 19 7 4 4 MISC1 LCD CONTRASNT GND P34 12 10 2 0
46. 12717 21 4 4 70 X 2 5283 ei Ji LIF ES Japan Star Techno Co Ltd T105 0013 2 2 11 3 TEL 03 6432 4006 03 6432 4010 E mail support j startechno com http www j startechno com 36 6 2015 06 26 4 1 1 EQESR 4 5 ER 5 NEN T Tn 5 L D sis 6 LUN 7 oe 7 6 1 6 7 LE 8 8 6 2 2 RS 232C RS 485 2 7 A22 8 T TE 9 6 3 1 RS 232C RS 485 9 6 3 2 0 5VDC _____ 9 6 3 3 42225 cus 9 6 3 4 AZ 7a 4 20mA 9 63 5 JCFEIZZ EJ s nodo Dd _ 9 se 10 S 10 11 Sr MAIN CZ T 12 7 3 1 PSIA
47. G FLOW DOWN 1 256 1 SELET DIGIT 1 BACK CANCEL CLEAR 0 SET ZERO BAND 0 0 DOWN 0 0 3 296 SELET DIGIT 1 BACK CANCEL CLEAR 0 SET
48. LECT DIGIT Percent of Hir DOWN SELECT DIGIT Percent of He Helium BACK CAHCEL CLEAR 5 UP DOWN SELECT DOUN SELECT DIGIT add SET Percent of Argon BACK PHNCEL SAVE EDIT ADD LAS CAS HAME PTHS COMPOSER MqGRS 3d Air 5B Argon JA Helium lla Total LHNCEL lt gt 1 GAS OPTNS 2 EDIT 3 DELETE GAS 4 DONE CRERTE CREATE SIMILRR COMPOSER USER HH5 BEEH SRVED SELECT MIATURE MAIN CREATE SIMILAR
49. NTRATOR GASES Number Name LongName Veoay _ Name Vicos 14 696 PSIA 14 ia PSIA 197 OCG 89 89 02 7 2 4 190 897 14307 09990605 198 OCG 93 93 02 3 2 4 191 795 14379 09990400 OCG 95 9596 O2 196 496 Ar 192 241 1 4414 0 99904 90 e Heium ______ 6 H2 Hydrogen 83969 0 0899 1 0006 0 9972 2 CH4 Methane 102550 0 7175 09976 L Ne A A 9 Nen J 293822 08999 10005 8 N2 Nitrogen 166 287 12504 099955 9 hPNitousOxide 136310 1 9779 09928 11 O2 Oxygen 191433 14200 09990 12 C3H8 Propane 74 692 2 0105 09785 19 566 SulfurHexafluorid e 140 890 6 6162 0 9849 18 Xe Xenn 212 157 5 8980 09932 Density T Absolute Compressibilty FAM EE 14 C2H2 Acetylene 97374 1 1728 09905 0 Air Ar 172574 12930 09994 16 iC4H1O iButane 68759 2 6887 09645 13 n C4H1O mBuanee 67690 27037 09591 3 CO CarbonMonoxide 165 151 1 2505 0993 60 D Deuterium 119 196 0 1796 1 0006 5 C2H6 Ethane 86 120 1 3550 09901 15 C2H4 Ethylene Ethene 94697 1 26011 0 9925 Helium ____1 0006 EESTI STACK GASES 0 C Gas Short L N Absolute Density Compressibilty Number Name kiku kiska Viscosity 14 696PSIA 14 696PSIA 2
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