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1. OH 7 1 2 H 500H 32. OH 1 CATERERS DOMEM DP TIX 150cc 5cc 5 4 OH M lt EVAC SEQUENCE 1 1 OH 2 Pos ei LAS
3. Sanus FU Departmental Bulletin Paper O00 TEM Evac Sequence 0 0 0 HHHHHL OU HHHHHHHHHHHH 2004 12 p 71 73 http hdl handle net 10076 10080 1 14 awe TEM Evac Sequence The maintenance of the Evac Sequence error for TEM Shoji NAKAMURA Department of Technique When TEM is divided from the viewpoint of vacuum they become electronic gun room a lens sample room camera room spare exhaust room Spare exhaust corresponding to the purpose and a main exhaust movement become necessary with each department as well But an exhaust sequence doesn t proceed by a few troubles only occurred in the exhaust So overhaul about that exhaust is introduced by this report Key words TEM vacuum exhaust overhaul 1 54 H 500H TEM 1 TEM 5 OR 9 OH
4. 3 OH 2 TEM TEM 1 TEM
5. RER 3 TEM TEM 2 D TEM BPRS LYRA EVAC SEQUENCE
6. EVAC SEQUENCE 2 TEM EVAC SEQUENCE OH 4 EVAC SEQUENCE RP OH 3 1 6 OH 3 5
7. 1 2 DP OH 75kV 1 7 1 8 1 0 KERKEE Fig 1 TEM Fig 2 Evac Sequence RP DP DP EVAC SEQUENCR Fig 4 OH of penning G Fig 14 DP 2 Fig 15 Anode Wehnelt Fig 16 OH of Movable aperture Fig 17 TEM image x100000 Fig 18 Diffraction image 72 6 TEM
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