取扱説明書 WHISPERマスフローメーター
Contents
1. 3 2 2 Tare 4 8 Tare 3545 3 2 3 RS 232C RS 485 RS 232C RS 485 DIN 8 RS 232C RS 485 gt RS 232C RS 485 GND 8 Pin MiniDIN Cable End 8 Pin MiniDIN Connector D 1 7 ATIF 9E RS 232C RS 485 gt RS 232C RS 485 Serial Cable End PC Serial Port 9 9 3 3 1 RS 232C RS 485 RS 232C RS 485 3 3 2 0 5VDC M 0 5VDC2. 4 2 4 COM LPM Volumetric Flow Rate CCM LPM 4 2 5 SCCM SLPM Mass Flow Rate Mass Flow Rate 20 C 14 696psia SCCM SLPM lt gt 4 2 6 MENU MENU 12 4 2 7
3. fewiggucdx 4 05 N EEA 7 5 P 16 4 3 3 MISCELLANEOUS FLOW AVG 7 6 GND GND 1 1 RS 232C RS 485
4. P 15 4 3 2 RS232C COM P 18 5 2 1 8 P 16 4 3 3 MISCELLANEOUS PRESS AVG FLOW AVG 1 9 0 0 5 F S 0 0 3 2 P 16 4 3 3 MISCELLANEOUS ZERO BAND 8 1 WHISPER MW 17 HC CD 0 4 Reading 0 2 Full Scale 0 2 FS 0 5 100 FS 200 1 STP 2 20 C 1Atm 101 33kPa 10 50 C 0 02 FS C Atm 128 FS k35 2926 WE OOO OFON m 7 7 Dave 455
5. ene V VES Alicat Scientific BERETE LS mme en wem Am Design and manadachure of precision instramenialion for the measurement and condrol of prezsuro and thee flow of gas and or liquid K Z lt 2 O Certificate Numbor 04100059 Issue Dates 17 Noy 2010 Audit Date 10 Nas 2010 Original Reglalration Date 10 F eb 2005 Expiration Dalia 15 Noy 2013 a A x La L rr DA Bahall of TT Management Certification MA lt gt 1 862kPa GA 8Kg cm2 2 3 4 5 6
6. 7 8 MW 0 5SCCM MW 20SCCM M5Xx0 8 1 8 NPT 9 MW 0 5SCCM MW 20SCCM x 12psi ELE 10 NIST 2 T e 8 DIN 3 3 1 DINE 100mA 7 30VDC
7. MOV VOV TOV POV 19 5 5 0 0 5 5 1 Fuld essc m V lt CR gt I s lt ID gt V lt CR gt Wl B V lt CR gt ID B 9 6 5 6 1 Ae Sa eS Se SS QUIERO UZ fa cd E oen IDS BAe CR 1 A 11 lt CR gt ID A 02 2 C 0 lt CR gt ID C Air 002 SF6 6 X m a jer mexki C 10 s ax vw m Pomo ama C 2 20 57 Belges F eS ieee py 2 RE Ko WI Wer de S Pole rr
8. CLEAR 0 SET PRESS AVG FLOW AVG UP DOWN 1 256 TF 1 SELET zu 1 CANCEL CLEAR 0 SET LCD CONTRASNT UP DOWN 0 30 0 30 CANCEL RESET 10 SET 16
9. w TOV 4 3 SELECT MENU RS 232C RS 485 NLLEL pru BLILEI SLIEHIIFIL Fh 244 298 6850 UNIT ID 528 298 2129 H LCD BACK CUONTRHST MIN Manufacturer Data iscell Communications Select Miscellaneous PSIR TARE V 1 5 68 21 58 0 000 C2H6 Ethene HZ Huorogen re Helium gt H2 Hitr oer Ha Nitrous Oxide ke Heon g aagg 8 088 LEM SLLM CANCEL Select Menu Gas Select 13 4 3 1 GAS SELECT GAS SELECT LN UP LN DN gt
10. A lt CR gt IDA 5 4 2 Seele e 014 70 025 00 02 0004 02 0004 Air 014 70 029 00 02 0004 02 0004 Air Volume Flow Mass Flow 5 6 Volume Flow Mass Flow aee Meses A 014 70 029 00 02 0004 02 0004 Air A 014 70 025 00 02 0004 02 0004 Air ID Volume Flow Mass Flow CDs 6 7 ID Volume Flow Mass Flow
11. TOTAL FFD YET ELAPSED MASS CC TIME TOTAL a t MASS TOTAL 6 0 0 Dee equas ELAPSED TIME 4 2 2 6553 5 OFF
12. MODE LN UP LN DH MODE LN UP LN DN PG UP PG DN C2H6 Ethane LN UP LN DN Hydrogen PG UP PG DN dott c LN UP LN DN Nitrous Oxide CANCEL Heon SET GER UN 002 H2 EE OO ER ERLER EUR IC2H4 0 z 75 25 90 10 92 8 98 2 75 25 75 25 75 25 A1025 90 7 5 2 5 PraXair Helistare A1025 Star29 90 8 2 PraXair Stargo
13. PSIA PSIA SB i tme f Be ae i PSIG MXE PSIA 10 000 0 00 4 2 2 C HABE CCM SCCM MENU CC C 4 2 3 TARE V 0 TARE V 0 1
14. Short viscosity Density Compressibility E Long Form 25 deg C 25 deg C 25 deg C 14 696 PSIA 14 696 PSIA 14 696 PSIA 1 Am zem im eme 2 ow venae meo osse ose eor caron posae uesg imm osmo 5 caus Emae 93540 12385 0994 6 m Hydrogen 89153 008285 1005 7 He Helum tse457 016 tooos a Pe me sess tess es 5 no Nitrous Oxide 148456 18088 09946 10 Ne em 3119 0826 1005 12 cans Propane 145 18316 09841 14 com Acewene 104448 10720 09999 16 remo opuane 74988 24405 0 5947 20 c25 75 Argen725 Co2 205615 16766 0998 90 Argon 10 CO2 zz cs sa argon7e coz 2 14 eus 09992 23 c2 98 argon r2 coz La 625 79eoo2725 Agon 16751 17634 os 75 Argon 25 Helium 230 996 25 A25 T5 amp Helum 25 Argon 90 Helium 7 5 Argon A1025 2 576 CO Praxair Helistar A1025 90 Argon 8 CO2 28 Starz 2 Oxygen 218 817 Praxair Stargon CS 95 Argon 5 Methane 223 483 1 5850 0 9993 in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 25 C Viscosity Density Compressibility Number Long Form 0 deg C 0 deg C 0 deg C 14 696 PSIA 14 696 PSIA 1
15. CED 1 10 60 2 RS 485 5 3 2 lt CR lt CR gt ASCII 0Dh CF Ree Das DO OC ee AR Se LT ee DTI er qs OS EES gt IDR ID ID lt IDIKA Z fil x A lt CR gt ID A gt 1 1 18 5 4 9 4 1 U 77 re hi Lore v o ez IIDXNERS ID TID
16. 0 0 01VDC 5 0VDC 3 3 3 0 10VDC 0 10VDC 0 0 01VDC 10 0VDC 3 3 4 4 20mA 4 20mA 0 4mA 20mA Cie VET BEJLI T 15VDC 3 3 5 2 2 1 6 8 2 2 8 0 5VDC 0 10VDC 4 20mA 10 4 4 1 Main PSIA E
17. P 30 Seg 4 T P 30 lt CR gt lt gt lt CR gt lt ID gt lt CR gt lt IDx gt lt gt lt CR gt lt gt lt CR gt lt gt lt CR gt V lt CR gt lt gt lt CR gt T lt CR gt lt gt lt CR gt 1UD2 ON lt IDx gt lt gt lt CR gt lt ID gt lt gt lt CR gt lt ID gt lt gt lt CR gt lt ID gt V lt CR gt lt ID gt lt gt lt CR gt lt ID gt T lt CR gt lt ID gt lt gt lt CR gt lt CR gt 2 3 21 6
18. ELAPSED TIME RESET 0 0 s TT lt CR gt lt ID T lt CR gt Bil A T lt CR gt ID A lt gt OFF 0 30 11 MWB MB 9V OV 8 Ov 3 307 40 LED L
19. DIN DIN 8 4 20mA 5 12V 2 RS 232C RS 485 gt 1 6 I I0 Cn tt DIN ee REPE 6 a_i H RS 2320 Ale RS 485 5 RS 232C RS 485 3 2 3 2 1 DIN 4 8 0 5VDC 0 10VDC 4 20mA lt gt GND 250 0 lt gt 4 20mA 15VDC gt
20. 0 5VDC J go uL EL reer O 5VDC 0 10VDC 1 5VDC 4 20mADC AT Yay IB DE O 5VDC 0 10VDC 1 5VDC 4 20mADC 7 S DIN 8 D 9 15 303 302 Viton RTV 2 777 TFTRD CD 5SCCM 500SLPM 2 0C 1Atm 101 33kPa 3 4 20mADC 15VDC 2o 8 2 P 26 9 MW 9 1 MM 0 5SCCM MW 20SCCM WHISPER MW 0 0 5 sccm 0 1Sccm 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm L60 325 M5X0 8 10 32 UNF Both Sides 13 335 2X 8 32 UNC F 4 445 MW 0 5 sccm to 20 sccm approximate shipping we
21. 15 68 21 58 THRE V 0 000 7 008 8 000 CCM SCCM ELAPSED MASS SCCM TIME TOTAL 8 8 0 00 SCCM a8Bga ee ag BHLK RESET MENU Select Menu MFG RS232 UAIR COMM GAS SELECT LEST BRAY PSIA CF CCM SCCM TAREV 0 MENU MENU Ta MENU RS 232C RS 485 MAIN 4 2 MAIN ON PSIH E 4 2 1 PSIA
22. TID DN UP Riz Kew BCS At SHS ye bn 38400 19200 9600 2400baud 19200baud BACK SET gt 15 4 3 3 MISCELLANEOUS MISC MISCELLANEOUS ZERO BAND 0 0 UP DOWN 0 0 3 2 SELET 1 CANCEL
23. 4 3 4 MFC DATA MFG DATA MODEL INFO HLICAT SCIENTIFIC Ph 324 290 6464 Fax 528 298 4189 MODEL M I45LPM D SERIAL NO 68883 DATE MFG 1877 2812 DATE CAL 18 9 2812 CAL BY DL SW REV 2462 MODEL INFO BACK MAIN sm MODEL SERIAL NO DATE MFG DATE CAL CAL BY MEK SW REV BACK MAIN 17 5 RS 232C RS 485 9 1 9 2 2400 9600 19200 38400 TE 5 3 5 3 1 Mac A 707 Opes cc pss RS 232C
24. GND P 25 18 CR Te Ve 1 2 0 10PSID 68 94kPa 1 3 MOV VOV POV TOV P 13 14 2 7 7 4 P 12 4 2 3 TARE V
25. 3 4 3 SELECT MENU 0 13 A 3 1 GAS SELECT 2 AE DUO saa ates Meo tih btu a eb bee aote ka ed Pee dtes deba 14 4 3 2 RS232C COM CRER E iude er eer eU eene etae tes edat eai eat ben o os 15 4 3 3 MISGEEEANEUUS coins eid ie ct x baee X at XO 60 16 4 3 4 MFC DATA p 5 IRS 2920 RS 485 JB IB ooi Coe oae in eto atto dint ost atto dint coat ewes 2 18 5 eR 18 o a a aa a mon ma mem m men mene mere mere mene 18 5 18 5 3 1 18 DECCAMEL Loos OD BUDE PUT 18 5 4 WERON R naa ee 19 5 4 1 Be OU vr Bosse d o Ie adr PR IS ME a RPM IS PIN S IS Et 19 5 4 2 Mules eos rv pete yr pre E ete ir erar vb peru bin bates i i 19 GR M en este En ONE DICEN M EE e E p DM Dem 20 BB SED LL poen E 20 5 6 MET ADA ooo ao as s o a dod odd odn 20 5 6 1 20 6 YMA AGRE KE HESS oo RR all44 44 le sava aT A zemam en een eee ner even MOV VOV POV TOV MoTMoLPonPonbonMbnMbn on O OOo 1 O C1 amp GW PN SE E i RER La rata marra ees sere ear TO rom Be en ane ee ee 0 2 9 MW 9 1 MM 0 5SCCM MW 20SCCM R
26. 4 696 PSIA r Ar se 1207 os 0 9991 0 9976 09994 02 0 9933 ol9lsi oF T P egre df Nitrogen Helium 186345 1 0005 Oxygen 86 127 0 9900 ea970 0 08988 10007 4 cou Acetylene orara 11728 09905 is cana 0 9925 16 rcmo 0 9627 7 kr Kopon 202178 37422 0 9901 15 Xe Xeon 212085 58988 09951 0 9650 13 n CaHi0 67 691 2 7048 0 9587 20 C 25 75 Argon 25 CO2 190 579 1 8309 0 9982 136 350 0 9928 Ne Nem 293825 08999 10005 O2 oxygen 190555 14290 0 9990 C3H8 74687 20101 0 9787 90 Argon 10 CO2 201 897 0 9987 2 cs sagoiswcoz 203423 17980 ossee 0 9990 24 C 75 75 CO2 25 Argon 154328 19270 09 0 9995 A25 75 Helium 25 Argon 218962 05794 10002 90 Helium 7 5 Argon 2 5 CO2 Er Pp Praxair Helistar amp A1025 90 Argon 8 CO2 2 Oxygen 203 139 1 7918 0 9988 Praxair Stargon CS 29 P 5 959 Argon 59 Methane 207 633 1 7307 0 9990 166 371 0 9995 in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP database Gas Viscosities Densities and Compressibilities at 0 C 23 1 1 1 LCD P 16 4 3 3 MISCELLANEOUS LCD CONTRASNT
27. ED O0ON 0FFE OFF AC DC A4C DC 1 4 2 3 4 5 4 Go ol
28. FALLA TE OD 77 Z LUZ WHISPERXZ7D X 2 FPEFIFF ITI TI Le FEEL LFT HEE arEFF Oe iF E eee F aca Uma HHHHHHHHHL T114 0001 6 10 12 TEL 03 3903 2181 FAX 03 3903 0123 e mail sales team sayama com http www sayama com Rev 21 9 2014 02 18 BNR OS CS CC e e anne 6 2 i 0 8 3 1 8 2 9 Te Ain PRO is a os a aE me e SP ae ee kN 9 9 22 VE ELE EE CTaEO AZ ea js a AL abore eus dod eua TH UR ORA UA LORS s 9 3 2 3 RS 232C RS 485 aa aa aaa aaa Rh e he ehe ts 9 3 10 9 9 1 RS 2920 RS 485 sad ara dd di din s sin dida 10 3 3 2 0 5VDC 222 aaa IRR ee 10 3 3 3 0 10VDC LL 10 900 ZT S SER UEHO M 2ORA 10 995 1 75 9 BL UI lh sd coca eects ur o qr Due i Abus Mei es 10 nw o PUT Ir INS 11 11 4 2 MAIN Cf MB TE ess ako Sede bate boe ore eher tiet wots Wide pdt te botas 12 4 2 1 PSIA OE LEE oobis eco de OD ER Re de Sade dis P Re SU dodo rt 12 AME CELO 1 WETTER 12 4 2 3 TARE M KE 12 APA COM RD 12 4 2 5 SCCM SLPM Mass Flow Rate eene 12 A D MENU iiio doh inu bra Debit a deir ode miedo eimi he ee Ere i ius 12 1
29. R RRRRRRRRRRRRRR RR IR 9 2 MW 908960M MIESSEPM s soo sd Dodd ab A RURSUS EE RSS 9 3 MW 10SLPM MW 20SLPM sa aa t EEG PREACRC OA RR t E DOE CR it dada DA MSAOSERM CU EEE E en Sa ne aa 9 5 MN 50SEPM MW 250SLPM ada i bn CERE ah i o o i o Pte oen 9 6 MW 500SLPM 10 1 TOT s aedes ebore Sorteos batte bote Re batte ttd 11 MWB ccc esl l Fee EI Oe ACETUM 0 LL n Hua c Gem enne eona LL RS 232C RS 485 Blas CI EP MEUM cet vod ak o e da Bk oath 0 1 aus nm Gertificate of Registration IS09001 2008 ALICAT NIST MCNA
30. ight 362 87g mm 9 2 MM 50SCCM MW 5SLPM WHISPER MW 0 50 sccm 100 sccm O 200 sccm O 500 sccm 1 slpm 0 2 slpm 0 5 slpm 1 8 NPT eS _ fae Both Sides 2X 8 32 UNC 8 89 MW 50 sccm to 5 slpm approximate shipping weight 453 59g mm Zt 9 3 MM 10SLPM MW 20SLPM WHISPER MW 0 10 slpm 0 20 slpm 1 4 NPT Both sides AX 8 32 UNC yy 9 525 MW 10 slpm to 20 slpm approximate shipping weight 1 09kg mm 9 4 MW 40SLPM WHISPER MW 0 40 slpm 20 32 1 2 NPT Both Sides AX 8 32 UNC 4 9 525 MW 40 slpm approximate shipping weight 1 45kg mm 28 9 5 MW 50SLPM MW 250SLPM WHISPER MW 0 50 slpm 100 slpm 0 250 sipm 126 162 20 32 1 2 NPT Both Sides AX 8 32 UNC y 9 525 MW 50 slpm to 250 slpm approximate shipping weight 1 59kg mm 9 6 MW 500SLPM WHISPER MW 0 500 slpm 432 08 d 3 4 NPT Both Sides 63 5 31 75 36 83 REF 63 5 BEEN e 66 04 REF MW 500 slpm approximate shipping weight 2 04kg mm 4X 8 32 UNC 4 8 382 29 10 10 1 TOT
31. n CS 95 BK 4 3 2 RS232C COM RS232 COMM RS485 COMM Unit ID ID ID ID Baud ds BACK MAIN ID Unit ID ID UP DN ID ID TID A Z gt ID BH TID BACK ID RESET A ID A SET ID ID
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