ピエゾステージ NanoScanZ 取扱説明書
Contents
1. BS BN 61010 1 NanoScan ZZ SS Fe2. 1 0V 2 80 1 2 2 1 NanoScanZ Z 2 SN ED lt lt CE 100um 200um 400um 3 100um NZ100 200um NZ200 400um NZ400 3
3. Appendix 5 2 USB Windows PC 1 Windows PC USB 2 Windows NIL Prior Controller Installation and Documentation CD Windows PC 4 Exit 5 CD USB HidComInst exe HidComInst exe 6 Windows PC 2
4. 12 3 3 USB LY NA TC VA F mas ms Ni Pe me FE 7 a f RS232 USB SE RS232 Dsub9 USB A USB RS232 0 0 RA NR CREE Ma 1 on 0 off USB USB RS232 PCI BNC 2N RE RT BNC BNC 1 10
5. 3 3 2 NZ100 N 200 1 2 OF EY 11 3 M3
6. ER n IR EE 8 E 8 CR RT CR VR NE AMO E 5 Error 22 6 NanoScanZ 1 2 8 CVVALU V 4 1V NZ100 0V NZ200 NZ4000
7. Gr 8 USB RS232 2 2 NanoScanZ NZ100 NZ200 NZ400 USB RS232C CD 2 3 IM WS ER A TF 2 4 NZ100 NZ200 NZ400 H471 NZ303 H471XR NZ303XR H472 35mm H472XR NZ301 128 x 85mm NZ301XR a i NZ304
8. 5 6 Z Stage ee se 0 eo 2
9. NZ100 n 0 100 PZ n 8 100 Ver 1 00 9600 19200 38400 9600 BAUD 2 2 ProScan 9600 POE RT ProScan 9600 BAUD lb me n 9600 19200 38400 SERIAL n R VALUEDIS n n 0 5 1 5V EE PIERZORAN
10. 7 COM LPT Cypress USB HID COM device COMo ae Windows PC USB COM NanoScanZ 18 Cypress USB HID a 5 TUSB AA 0 USB 6 N NO d e Cypress USB HID gt COM device
11. Ni 100 240VAO 60 50Hz V250T2A 0 A RS232 14 3 4 RS8232 USB RMUY 1 2 DAQ DAQ 0V 3 Dsub9 BV TN 7Z STAGE 4
12. mew eee X 0 H499XR NZ302XR 35mm H471 H471XR H471XR H471 76 x 26mm NZ100 NZ200 HH471 H471XR 35mm H472 H472XR NZ 400 NZ301 NZ301XR NZ302 NZ302XR ot NZ303 NZ303XR NZ304 NZ304XR 0 3 Ad uu ut YYYYXYXYU C 9 G G G 606666EEE 00646 eeeeeee 3
13. 7 NZioO NZ200 NZ400 tum 100 200 400 nm 05 1 125 g 500 500 500 arad 10 10 15 USB RS232 0 10V 0V 10V 90 240 VAC 60 50Hz_ _ 8 USB W3045 RS232 276 V250T2A W507 23 Appendix 1 NanoScan PC 1 2 Pro8Scan COMx 3 a 4 MII Columns 180
14. XY XY NZ100 NZ200 H499 NZ400 XY 3 1 1 6 2 WI i f 10 3 M2 4
15. n GE PIEZORAN PFI PIEZO INEORMATTON DSP_11S NOT FITTED DSP_21S NOT FITTED DRIVE CHIPS 000100 JOYSTICK NOT FITTED STAGE NONE FOCUS PIEZO FOURTH NONE FILTER 1 NONE FILTER 2 NONE SHUTTERS 000 END FOCUS PIEZO TYPE 10 MICRONS REV 100 END 1 2 STAGE n STAGE NONE END DATE amp NanoScanZ Pror Scientific Instruments Piezo NZ100 Controller Vers1on 1 0 compiled Feb 27 2006 09 30 49 NanoScanZ ProScan NanoScanZ lt Nano8ScanZ lt lt PZ lt 35 456 5 4
16. 2 1 0 Y DQ2 DQ1 DGQO NanoScanIL 2 100 4 000 0 REL 0 0 PZ 0 REL 0 ABS 0 n Be NZ100 50 PZ 0 0 50 50 WV0 PZ 0 2 0V 0 PZ R 20 n
17. 2 ABS 0 0000V OV 3 RS232 USB 4 Z aJNZ100 0 10V 0 100um b NZ200 0 10V 0 200um coNZ400 0 10V 0 400um 4 2 1 2 0V 10V 3 Nano
18. USB RS232 5 15 4 NanoScanZ 4 1 NanoScanZ NanoScanZ USB RS232 C NanoScanZ ProScan RS232 2 RS282 ProScan NanoScanZ lt gt J Z 0 0 1
19. Cypress USB HID USB c te Ci g Cypress USB HID 19 5 3 RS232 USB 9600 38400 CN ProScan NanoScanZ RS232 9600 Pro8Scan NanoScanZ ON lt NanoScanZ lt Carriage Return code lt CR gt PC TAB R XYZ 2
20. aJNZ100 0 10V 0 100um bNZ200 0 10V 0 200um ccNZ400 0 10V 0 400um 5 17 5 USB Windows XP Windows Vista Windows7 PC NanoScanZ USB Windows 7 PC RS232 5 1 USB RS232 1 Windows PC USB Windows PC USB USB Windows XP Windows Vista Windows7 Windows7 PC NanoScanZ USB 2 Windows7 PC RS8232 3 RS232 USB NanoScanZ
21. 5 24 EN IEC 61010 1 2001 Safety requirements for electrical equnpment for measurement control and laboratory use part 1 eneral requnrements EN61326 1997 TA1 A2 A3 Electrical equipment for measurement control and laboratory use EMC requnrements Class B emiss1ons CFR 47 2004 class A Code of federal regulat1ons pt 15subpart B Radio frequency devces unintentional radnators Ver 1 01 2012 3 25
22. PRT K Secien titic NanoScanZ Ph R R TT HOS 1 01 2012 3 1 kk 3 2 kk 5 2 1 kk 5 DN GC 5 2 8 kkk 6 2 4 kk 7 3 kk 10 POR LTE SL TL NR 0 cc 10 3 2 NZ100 NZ200 11 9 CE TONN GGG FN VPFPRbBbBEFEcE 13 AE EI 5 15 4 NanoScanZ kk 16 4 1 NanoScanZ kk 16 4 2 kk 17 4 3 es 17 5 kk 18 5 1 USB RS232 kk 18 5 2 USB Windows PC 18 DE NN CG 20 A 6 kk 23 7 kk 23 8 es 23 NDDGNOIXK 1 7 IV ES DE Re 24 1
23. ScanZ ES SM 4 Dsub9 1 4 3 1 USB RS232 2 0V 3 BNO 4
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