取扱説明書
Contents
1. SDS SDS2. 2
3. 2 1 _ 2 XXXXP INP SIP FCP He H2 CHsF Ns CH4 CHzFz Ne CzH4 CHF3 Ar CzHe CF4 K CsHe CsHzF Xe CsHs
4. 13 HCLP HBRP SiHsC SiHzC SiHCl SiCk
5. IH Oz NiO NHs CO5 4 A D CO 0 5 slpm 1 06 scfh 100 11
6. 20
7. I He Nsz Ne Ar Kr Xe Hz CH4 CsHs c CsHe CsHs C4Hio CHszO CO CHsF CHsFz CHFs CF4 CsHzsF4 CzHFs CzFe CsHF7 CsFsa C4Fas 4 A D H 0 5 slpm 1 06 scfn 100 11
8. O 1 1 3 A B C 0 5 3 0 slpm 316L 3 mm 1 06 6 36 scfh C 1 C Microflex Technologies
9. V 1009 F slpm T T V F A A96 A T T VA 100 F
10. Nd HC HBr CCl BCk Ck SiHsCl SiHzCk SiHCk SiCl 100 15 psig 0 10 MPaG 2 4 B D HCI 30 psig 0 21 MPaG HCI 2 1 0 slpm 2 12 scfh 100 52
11. 1 1 1 1 UP UHP MFC MFC
12. 4 A B C D E 100 100 100 I m VITNIH mV I 15 2 5 2 1 6 1 0 slpm 0 5slpm 0 18 9 1 84 fi3 0 06 fi3 2 12 scfh 1 06 scfh 1 6 1
13. SDS SDS SDS SDS 20
14. INP OXP 2 SiCk Os COs NsO SIP FCP SFeP 2 SiH4 SisHe SiHsCHs SiH CHs s 10 CLXP HCLP HBRP SFeP 2 5
15. HCLP HBRP CDAP HCLP HBRP CDA HCI HBr CDAP 0
16. 1 3 A O 3 B
17. 7 C 5 10 a
18. MV CzH4 CsHe COS SiH4 SisHe SiHsCHs SiH CHs s GeH4 SFe IV 20 2 4 C E SiH4
19. SEMI F1 ASTM E 498 ASTM E 499 O O
20. 8 40 CFR 261 C D SDS 21
21. 163 1325 6 5 1 TEL 03 6901 5700 532 0003 3 5 36 TEL 06 6397 3719 862 0956 14 22 TEL 096 382 8420 5 2015
22. B D 10 SiHzCb SiHzCb 10 2 SiHzClz 109 0 5 slpm 1 06 scfh 104 1 0 slpm 2 12 scfh SiHsCl 100 52
23. INP SIP FCP CLIXP HCLP HBRP SF6P NHS3P GEH4P OXP INP SIP FCP GEH4P SF6P NHS3P SDS 9
24. 3 1 4 B 10
25. 1 2 4 1 2
26. MicroSeal MSA 028 211 MicroSeal Microflex Technologies
27. 1 4 C 1 6 C GTMP3XXXXPCC4 1 3 Eee 0
28. b c d 10 3 A 5 10
29. 1 gt GTMP3XXXXPCC4 1 1 C 3 slpm 6 36 scfm 28 mm M4x0 7 6H 500 psig 3 45 MPaG 3 00 76 mm 4 1MPa SEMI F86 0304 1 4 2 MFC MFM 1 6 ECO 111361 2001 9 25 002
30. 11 2 4 F
31. 0 25 slpm 0 53 scfh 10 62 0 5 slpm 1 06 scfh 1009 3 IV
32. TLV 52 1 84 f9 J 2
33. 5 psig 0 03 MPaG 60 psig 0 41 MPaG MAWP 3 4 7 3 12 psig 0 83 MPaG 2 7 psia 186 milibar OSHA TWA OSHA TWA OSHA Ceiling
34. CzHFs SiCly CaHio CzFe c CsHe CsHF CHszO CsF CO C4F SiH4 SisHe SiHsCH3 SiH CH9 GEH4P SF6P NH3P GeH4 SFe NH3 CLXP HCLP OXP BCl HC CDA Cb SiHsCI SiHzCp O9 SiHsCU SiHCb SiCly CO2 SiHCb Oz NsO SiHC OXP NP SiCl HBRP CDAP HB CDA 34 103 kPaG 5 15 psig 2 NN lt
35. IV 2 3
36. OSHA Peak Concen tration TLV NIOSH IDLH SDS TWA TLV NIOSH IDLH 30 VCR 7
37. 20 4 B D 15 psig 0 10 MPaG 2 D B
38. 5 8 6 NN NO
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