AES (Auger Electron Spectroscopy) の取扱説明書 2014.11.25 改
Contents
1. IAcquisition Ager Spectrum Depth Profile OPN PWR OFF Display OFF MS OFF EMS OFF REM REM OFF Ionization Gauge Fi ON IGo To Auto OFF OPN PWR OFF key switch OFF Key switch Start OPN PWR 3 ON TMP RP IV62. M5 Detector PC CEMHV 2850 V Wide Scan Condition 0 Start Stop Step Dwell 1 00 IROI Conditions Bplit scanl spectrum Auger Wide scan IAnalysis postions conditions Hile SRM Image Acquisition SEM spectrum IAcquisit
3. Go To Auto
4. PEG lt 103Pa Pig8 lt 10 3Pa M4 lt 1073 Pa V4 IM2 lt 1033 Pa PUMP PS UNIT 200mA Bip1 100mA Rip1 10 Sip1 ip2 10mA 2mA V1 V5 V4 V2 Go To Auto
5. EXCH VENT EXCH VRENT lt 103 Pa 10 NM V2 4 1 PCD Out ISEI Detector ON SEM Contact Brightnessl OL coarse IFRine IMagnification 40 X Y
6. X Y Tilt 10 Z 1 08 Tilt X Y Tilt 1000 Tilt 75 Z Z 1 08 Channel Channel 1 Channel Beam Energy Emis Current Emission Current 20mA 1 2
7. 216Pressure Flow controller IPower ON IControl ON 9x103Pa Timer Display Himer Reset 0 Etching ON OFF Etching ERtching Etching IEtching ON OFF Etching 1onization Gauge Fil ON IMeasl on Gun Pressure Control OPEN 1onization Gauge OFF 6 SEI Detector OFF Auger Spectrum 6 1 AES Master IAES gt SBpectrum lt Wide Scan gt IAnalyzer Condition Analyzer Mode M5 IMeasure Mode Multi Analyzer Mode M1
8. AES Auger Electron Spectroscopy 2014 11 25 lt gt AUGER MASTER 2 prA 150 Filament Current 1 3zA 300 Hilament Current 200 OPN PER Operation Power ON i AUGER MASTER Probe Condition mage Observation Sample Manipulation 3 1 Probe Condition IPCD IN Electron Gun Acc V ON HT on 2A 200 Tilament Current 3A 38300 milament Current Hilament Current 200
9. ion Wide scan spectrum Preacquisition IEile Bave date conditions Hile Acquisition Auger Depth Profile 7 1 Aes IDepth Profile IAnalyzer Conditions Auger Spectrum ROI Conditions IAnalysis positions conditions Ion Gun conditions Ion Gun Mode IIntermitent On time Offtime Ion Gun Channel No 1 Ion Gun sput Rate 250 A min 20140420 Si02 Stage Rotate Conditions Reference Date 1on Gun Energy 3000eV Ion Gun Current 83x106A Argon Gas Pressure 8x10 2Pa
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