取扱説明書 エアサーモ HEA シリーズ HEA100 - 1 -
Contents
1. awwwsr as D sub 9 5 MZ9 2 3 2 L_ _ EE 42 Sa 0 Zn M a 2 52. 0 0 0 2 PID
3. PID 5 1 1sec 5 2 1 2 3 WRN I ERR11 WRN SM 6 lt 1 lt 30 0 4 MODE Normal na SMC THERMO CON 5 3
4. UpperLower Temp On Alarm Sequence Off 0 100 10 1 0 600 1200 2400 4800 1200 9600 19200b s None None Odd Ni Odd Even Even ee E Parity Bit Stop Bit 7 5 G 9 232 5 ee IN OUT EZ a 8 8 1 1 2
5. 9 9 1 1 EEPROM PTPETTPTEYTPTTT 9 2 a 1 2 EEPROM
6. 3 1 3 4 4 8 2 e
7. 9 99 9 99 C 0 15 C 0 15 C e WRN
8. 0 UL UL FHY7 SB 1 2 C PID 9 WRN
9. Rc1 4 1 N m 4 5 e OFF OFF es IEC60947 1 IEC60947 3 e IEC60447 e es D 1000 es
10. s e UL61010 1 VW 1 4 4 4 s ON ON
11. 20L min ss 0120 837 838 9 00 17 00 2014 SMC Corporation All Rights Reserved
12. 0 1 10 C ON OFF ON OFF ON ON OFF OFF 5Vz 4 4 1 4
13. HEA100 1 LL a LL 2 a ln 1 Actoov Actoov s 1 2 DC30V 2A DC30V 1A 0 90 100 150 200 2
14. 4 2 4 es e e e e es e 1000m s s 0 40 C 35 80 e
15. 4 3 A 4 e M4 1 5N m 4 4 e e s 4A e 1 5 2 e
16. 1 2 AT 2 AT AT 3 AT AT 4 AT 20min ERR19 AT e 9 99 9 99 C 0 15C 0 15 C
17. 2 1 2 3 GS sm M2 6 1E gt 24V 2 24V COM OPEN ON CLOSE OFF a i a a 0 0 50 0 C 2 3 1 mmm EECE MM Eh CLOSE D sub 15 s 0 n M2 6 2 0 40 C fh o a
18. 35 85 RH 50Hz OPEN I 0 60Hz rT 40 70 e A 3 0 2 mt RA 0 01 0 03C o 22W 23C 23C 100L min A 20 200L min ANR s
19. 1 s es SEL RET ON 2 3 5 3 1 1 SMC THERMO ON 0 0 to 50 0 C 0 0 1 C 0 Stop 1 Normal 2 AT a 3 MT Control Operation 9 99 to 9 99 C 0 01 C 5 EN PT Temp Range Allowable Lower Temp Range
20. EE da EE RN a DN Mac lt 1 2 D sub 9
21. 2014 4 SMC HEC OM S001 1 2 2 3 3 3 FP 0 1 RS 485 Bm 4 ii a ni akkkisru mm pb gt 8 J ie 1 MPe HEA gt l a a 3 i 1 2 r Smm KQ
22. 3 1 sa gt 2 PID 3 gt GD i SEL YA SEL YA RET VA RET 1 RET 1 AT 2 s
23. 5m 1 0 50 00 150 200 rm a 1 sk aa oe es Ha 6 a LE ee SS AE EE gt 2 da a OFF 3 fs e 3 lt
24. D FF IO High Temp Cutoff Low Temp Cutoffl 0 0to 10 0 C 0 0 to 10 0 C 0 1 C 1 0 to 60 0 C 9 9 to 49 0 C 9 99 9 99 C Fine Control of 0 012C Internal Sensor 2 PB PID PB 0 3 9 9 C 30 PB Range 0 1 C 3 I PID 1 999sec 40 Constant 1sec 0 0 PID D D Constantl 0 0 99 9sec 0 1sec 0 Heating Cooling Ratio 089 1 1 1
25. min ANA 2 6 2013 DP 2 3 NI N N NIMININININININ lt x Cc 2 Z2 Z a aa 8 1 NI lt 1x x lt lt Cc 2 oO N O o lt EQ S ee PID PID
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