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User's Guide Volume 2: Measurement and Analysis

1. 1 Connecting your DUT to the 4155B 4156B See Connecting DUT on a page 4 3 for procedures PA a P Lo 5 8 C9 383 J O oeoo A ooo 00 pmu ooo fo 9l aa coon 9 O oo coocoo p mm B 68683 SS E5588 6 2 Defining measurement mode and E aa measurement units that you use to make e measurement a are SY SES The following tasks are described UNIT VNAME INAME MODE FTN RESISTANCE VARZ ae et ea Swine ae e To Define Measurement Units SUL ae zi e To Define a User Function soi z mee To Use R Box VARL 3 Setting the source parameters of the en vanes eT units The following tasks are described jour Caem famine oer SWEEP MODE SINGLE SINGLE OFFSET oe i4 29 a eae o e To Set up Primary Sweep STEP 0 10 Y 100 uA SMU PULSE cae iom Ey gar r e To Set up Secondary Sweep eae melee e o RE or To Set up Synchronous Sweep nae e To Set up Constant Output Eiet Tance 5 0 e To Set up SMU Pulsed Output SWEEP POU MEASURE OUTPUT PREY NEXT SETUP SETUP SETUP SEQ PACE PASE aaa e To Set up PGU Output 4 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements
2. MEASURE SWEEP SETUP S4J4NO1 01 30PM user comment 7 Vee Ic xVARIABLE VARL VARZ VARA UNIT SMU2 MP SMUt MP UNIT NAME vee Ib NAME SWEEP MODE SINGLE SINGLE OFFSET LIN LOG LINEAR LINEAR PATIO START 0 00 uA COMPLIANCE STE 1500 uA FOWER COMP STEP 100 uA SMU PULSE NO OF STEP 6 UNIT COWPLIANCE 100 mA 5v NAME POWER COMP GFF OFF PERTOD TIMING WIDTH HOLD TIME BASE DELAY TIME SWEEP CONTINJE AT ANY Status CONSTANT UNIT NAME MOLE SOLRCE COWPL TANCE 5 00 SWEEP PGU MEASURE QUTPUT PREV NEXT SETUP SETUP SETUP SEQ PAGE PAGE UGAO 4050 On this screen you set output parameters for each unit User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups VARI parameters In this column you set up output parameters for primary sweep unit UNIT and NAME are defined on CHANNELS CHANNEL DEFINITION screen e SWEEP MODE SWEEP MODE field sets single or double sweep mode In this field select e SINGLE secondary softkey to specify the single sweep mode DOUBLE secondary softkey to specify the double sweep mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 17 Screen Organization MEASURE Screen Group e LIN LOG LIN LOG field sets linear or logarithmic sweep mode In this
3. CHANNELS CHANNEL DEFINITION 94JANOL 01 30PM v MEASUREMENT MODE SWEEP CHANNELS MEASURE STBY SERIES UNIT VNAME INAME RESISTANCE VPULSE SMUL MP Ve Te O ohm SMU2 MP Vb Ib O ohm SMUZ MP voe Ie IPULSE SMU4 MP SMU5 MP SMUS MP vsu COMMON vsuz wui oo f 0 vMU2 Peut 0 Peuz ff eou ae DELETE ROW data entry field pI USER USER NEXT FOTN VAR PAGE Data Input or Edit When you move the pointer to a field on a setup screen you can fill in the field by entering characters or selecting a softkey Softkeys related to the field appear when you move the pointer to the field The 4155B 4156B has three types of fields The following describes the methods for entering or editing input data of these field types Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 85 Screen Organization Screen Operation e For option fields When pointer is in an option field selectable input items for field are displayed on secondary softkeys You select desired softkey The item appears in the field For example when pointer is in MEASUREMENT MODE field of CHANNELS CHANNEL DEFINITION screen SWEEP and SAMPLING softkeys appear in secondary softkey area Select SWEEP to select sweep measurement or
4. STRESS CHANNEL DEFINITION O4JANO1 01 30PM SMU CHANNELS XSMJ PG SELECTOR MEASURE STRESS MEASURE STRESS UNIT NAME MODE NAME FOTN T SMU POJ SMU4 MP V4 2 SMU Bad SMU2 MP v2 3 0PEN JoPEN OPEN SMU MP V3 4 OPEN__ OPEN SMJ4 MP SMJ5 MP SMJ6 MP vsu4 vsu2 Paua VPULSE syne XTRIGGER SETUP pau2 VPULSE SYNC DISABLE GNDU POLARITY POSITIVE PGU B STRESS STRESS NEXT SETUP FORCE PAGE UGTO045 00x70 4 62 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Agilent 4155B 4156B can analyze measurement results of the GRAPH LIST screen group by using lines markers and cursors You can perform manual or automatic analysis For automatic analysis function you set up the DISPLAY ANALYSIS SETUP screen before starting measurements Then after the measurements are performed the lines and markers are positioned automatically according to the setup The information about these functions is organized into the following two sections e Manual Analysis e Automatic Analysis For details about line modes and specifying points refer to Chapter 7 Also see GRAPH LIST Screen Group in Chapter 6 5 2 Agilent 4155B 4156B User s
5. 1 2 _ SRAPH LIST GRAPHICS SHORT ANA G 93Aug09 06 18PM Y TIME CURSOR CURSOR 189 7352s 856 3245mV TO MARKER 298 7352s 129 2131 mV MARKER Ti 213 1mA 12 124 1mA LINE v SELECT 2 00 1 LINE c A e OFF GRAD MODE OFF 200m jaa TANGENT MODE OFF REGRESS MODE OFF oe CURSOR 0 000 TIME s 100 div 1008 1 MARKERS SCALING DISPLAY SWEEP TIMING CONST CURSOR L SETUP SETUP SETUP SETUP UGDO5030 80x70 5 3 1 indicates the following status TRG The 4155B 4156B is waiting for trigger input from an external instrument DRW The 4155B 4156B is drawing a measurement curve ANA The 4155B 4156B is performing auto analysis or regression calculation 2 indicates the following status C The 4155B 4156B is performing auto calibration Z The 4155B 4156B is performing an offset measurement for the zero offset cancel function 3 displays L when the screen is locked by an GPIB command 6 90 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function This chapter explains the display and analysis functions of Agilent 4155B 4156B e Data Variable e Expression e Built in Function e Read Out Function e Analysis Function 7 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable a
6. gE Q E G 22 ip 200 j S os ooo Blegsegess SSSR SEO l g 338g 9 a o y 2 Defining the stress units and constant P we Be output units The following tasks are ee ee E R described cee e To Set up Stress Source Channels on mi l aes mom atte page 4 51 eae mommies a e To Use Selector on page 4 60 ESS ei JL IL I Ike 3 Setting the stress forcing parameters and constant output value The following tasks are described SSTRESS MoE PULSE CE NIT iome Fi SACCUMLATED STRESS ICTH 9 00005 DELAY TINE nee fees e To Set up Stress Condition Timing eee on page 4 53 ee e To Set up ac Pulse Output on page sa 4 55 pa fete e __ L Ee e e To Set up dc Output on page 4 57 4 Executing the stress forcing The following task is described in To Force Stress on page 4 58 x ooo0o0000 og oo ri 0o00 ooo N i og o o Lay 7 oon ooo m o 0S o i 4 50 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force To Set up Stress Source Channels 1 Press Stress key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 Inthe MODE field of desired unit in CHANNELS area select e V secondary softkey for dc vol
7. DIF 575 0000p A V SPREAD RE SHEET SETUP SWEEP TIMING CONST SETUP SETUP SETUP UGTO2013 100x80 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 25 Analyzing Measurement Results Manual Analysis To Change Variables of LIST screen 1 Select RE SETUP primary softkey 2 Move pointer to desired column variable or data variable field by using arrow keys then select secondary softkey of desired variable 3 Select EXIT primary softkey to exit RE SETUP LIST mode To exit without changing LIST variables Select CANCEL primary softkey Example The following figure shows an example to change the LIST variables GRAPH LIST LIST SHORT 98Aug09 06 18PM MARKER ON VF IF v A DIRECT 4 1500000 MARKER Se sobtndd 7 4 6 650000p MARKER 14 s0000p SKIP DIF 575 00000 A V B SPREAD RE SWEEP TIMING CONST SHEET SETUP SETUP SETUP SETUP UGTO2014 100x80 5 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Analyzing Measurement Results Automatic Analysis Automatic Analysis You set up automatic analysis before the measurement by using the DISPLAY ANALYSIS SETUP screen Then after measurement is performed the marker and lines are automatically positioned
8. 4 Setting the display mode to show DISPLAY DISPLAY SETUP S4JANO1 01 30PM measurement results aS a The following tasks are described mae ee e To Display Graphics Results SCALE LINEAR LOS LOS wax 100000 v 100 o0oma 160 oben 4 3 s a AINE PARIMETER e To Display List Results w sere Aers Pase pase 5 Executing the measurement The following tasks are described e To Use Standby Function fo EN FO i A p e To Execute Calibration 9 87 Co gee J e To Use Offset Cancel Function Ho i BB ee e To Execute or Stop Measurement ooo Oooo a y o of vol eA Results GRAPHS GRAPHICS SOT Senn BEM a For example displayed graphically ma HLT NE EZ a Es S sa H inpropt 2 besre ES P P Eee Be ee UGTO1022 40460 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements To Define Measurement Units Press Chan front panel key to define the measurement units CHANNELS CHANNEL DEFINITION screen is displayed 1 MEASUREMENT MODE Select SWEEP secondary softkey for sweep measurement VNAME Enter a unique name for voltage variable For example enter Vce for collector emitter voltage If channel does neither V force nor V measurement you can omit VNAME
9. Ic Ib USE CHANNEL FUSER DEF Le VAR PREV NEXT R PAGE PAGE UGO1041 100x 0 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 27 Making a Measurement Sweep Measurements To Display Graphics Results 1 Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select GRAPHICS secondary softkey Bee In the X axis column enter variable name select axis scale and enter minimum and maximum values 5 Inthe Y1 axis column enter variable name select axis scale and enter minimum and maximum values 6 Ifyou use Y2 axis enter variable name select axis scale and enter minimum and maximum values in Y2 axis column When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on the CHANNEL DEFINITION USER FUNCTION and USER VARIABLE screens To display a grid on the plotting area In GRID field select ON secondary softkey To remove the grid In GRID field select OFF secondary softkey To control display of line parameters on GRAPHICS screen In LINE PARAMETER field select ON to display or OFF to not display Line parameters are the X and Y intercepts and gradient of the analysis lines To set up variab
10. KNOB SWEEP Q4JANO1 01 30PM X AXIS CURSOR 500 0000mV 5 000000mA HERLEN Y AXIS mA REGION 10 00 X AXIS DISPLAY NORMAL IF ie See Y AXIS 4 000 DISPLAY Idiv NORMAL eee 0000 0000 VE 14000 div V 1 000 Y AXIS SETUP Y VAR1 VAR2 CONST ASSIGN COPY SETUP SETUP SETUP UGTO1034 100 70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 35 Making a Measurement Knob Sweep Measurements To Execute Knob Sweep Measurement 1 Define the measurement units See To Define Measurement Units on page 4 12 For the knob sweep measurement note the following Select SWEEP for the MEASUREMENT MODE field Donot select VPULSE and IPULSE for the MODE column Do not select VARI for the FCTN column INAME or VNAME can be set to X or Y axis of knob sweep measurement User function and the user variables are not available for the knob sweep If you use PGUs set PGU outputs See To Set up PGU Output on page 4 24 Press the green key then Single front panel key The KNOB SWEEP screen is displayed and knob sweep measurement starts During measurements self test or forcing stress this operation is ignored If you want to change the Y axis parameter press Stop front panel key and Y AXIS ASSIGN primary softkey Then select a secondary softkey for the Y axis parameter you want To start knob sweep measuremen
11. MODE Maximum value LOGIO 11 LOG25 276 LOG50 551 HOLD TIME Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 e Allowable range when INITIAL INTERVAL 2 ms 0 to 655 35 s with 100 us resolution e Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution Example HOLD TIME 1 003 s and measurement interval is 3 ms decade and its range are as shown below decade Range in sec Ist decade 1 003 to 1 030 3 m I to 30 m 1 2nd decade 1 030 to 1 300 30 m I to 300 m 1 3rd decade 1 300 to 4 00 300 m 1 to 3 1 4th decade 4to 31 3 1 to 30 1 5th decade 31 to 301 30 to 300 1 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 33 Measurement Mode Sampling Measurement Mode Table 2 3 Effective Parameter Values INITIAL INTERVAL 560 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Maximum 111 LOG10 276 LOG25 551 LOGS0 HOLD TIME 30 ms to 655 35 s 100 us resolution 0 to 655 35 s 100 us resolution Stop Condition DISABLE DISABLE ENABLE Measurement Units 1 Max 8 Measurement Range d FIX FIX AUTO LIMITED Integration Time Short Short Medium Long Number of units SMUs or VMUs used for measurements big voltage source SMU is connected to R BOX
12. LINE1 GRAD LINE ON Y1 between a point WHERE DGM MAX DGM 0 01 Gradient In addition you can specify another condition if you position the pointer in the bracketed field above Gradient Select the AFTER secondary softkey AFTER is displayed and you can enter a second variable and condition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that satisfies the first condition after the second condition is satisfied LINE1 GRAD LINE ON Y1 between a point WHERE DGM MAX DGM 0 01 AFTER DGM MAX DGM Gradient In a field after Gradient you enter a gradient value or expression On GRAPH LIST GRAPHICS screen LINE secondary softkey must be ON 6 42 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group Tangent mode line In the first bracketed field after LINE1 or LINE2 you select the line mode Select the TANGENT secondary softkey to set the tangent line mode The pointer moves to the second bracketed field as shown LINE1 TANGENT LINE ON Y1 between a point where iL 1 I In the second bracketed field you specify which measurement curve you want to analyze by selecting the related axis Y1 or Y2 secondary so
13. In the second bracketed field you specify which measurement curve you want to analyze by selecting the related axis Y1 or Y2 secondary softkey In the third bracketed field you specify how to select a point e Select BY X Y COORDINATE AT is displayed Then you enter the desired X Y coordinate values or expressions in the X and Y fields e Select BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to specify a measurement point LINE1 REGRESSION LINE ON Y1 between a point AT X 0 Ye 0 and a point WHERE DGM MAX DGM 0 01 In addition you can specify another condition if you position the pointer in the last bracketed field shown above Select the AFTER secondary softkey AFTER is displayed and you can enter a second variable and condition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that satisfies the first condition after the second condition is satisfied LINE1 REGRESSION LINE ON Y1 between a point AT X 0 Y 0 and a point WHERE DGM MAX DGM 0 01 AFTER DGM MAX DGM 6 44 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group On GRAPH LIST
14. UGO1803 90x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 15 Making a Measurement Sweep Measurements To Set up Secondary Sweep Secondary sweep source is the measurement unit defined as VAR2 in the CHANNELS CHANNEL DEFINITION screen On the MEASURE SWEEP SETUP screen set up the primary sweep source VAR1 then do following 1 VAR2 START Enter the secondary sweep start value 2 VAR2 STEP Enter the secondary sweep step value 3 VAR2 NO OF STEP Enter the number of steps for the secondary sweep 4 VAR2 COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the secondary sweep source SWEEP MODE and LIN LOG are automatically set to SINGLE and LINEAR respectively You cannot change the settings The STOP value is automatically calculated from START STEP and NO OF STEP values You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen 4 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements Example The following example shows the secondary sweep conditions VAR2 parameters MEASURE SWEEP SETUP S4JANDA 01 30PM VARL VAR2 UNIT SMU2 MP SMJ MP NAME Voe Ib SWEEP MODE SINGLE SINGLE LIN LOG LINEAR LINEAR START ov 0 00 uA STOP 5 00 V 500 uA STEP o o v EPOR NO OF STEP 51 amp COMP
15. Table 1 6 MPSMU Measurement Voltage Values and Resolutions Measurement Resolutions Range aoa Integration Time High Speed alue i 1PLC or 640 us to 1 92 Sampling Longer ms 80 us to 560 us Measurement 2V o lt v lt 22V 2uV 20 uV 200 pV 2 mV 20 V 0 lt v lt 22Vv 20 uV 200 nV 2mV 20 mV 40 V 0 lt lvl lt 44v 40 uV 400 nV 4mV 40 mV 100 V o lt v lt 100V 100uV 1 mV 10 mV 100 mV a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Table 1 7 MPSMU Output Current Ranges and Resolutions Range Output Value Peet eae Range 1nA o lt I lt 1na 100 fA 100 V 10nA o lt I lt 10nA 1 pA 100 V 100 nA o lt I lt 100nA 10 pA 100 V l uA o lt I lt 1pa 100 pA 100 V 10 uA o lt I lt 10uA l nA 100 V 100 pA o lt I lt 100 pA 10 nA 100 V 1 mA o lt I lt 1mA 100 nA 100 V 10 mA o lt I lt 10 mA 1 pA 100 V 100 mA 0 lt I lt 20 mA 10 pA 100 V 20 mA lt I lt 50 mA 10 pA 40 V 50 mA lt I lt 100 mA 10 pA 20 V 1 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Un
16. KNOB SWEEP 94JANO4 01 30PM CSRI 500 0000mV 5 000000mA mA 10 00 IF ne eel 4 000 f Idiv a gee 0000 0000 VF 1000 div V 4 000 Y AXIS SETUP DISPLAY VARI VARZ CONST ASSIGN COPY SETUP SETUP SETUP SETUP UGDO4O07 To start the knob sweep measurement press the green key and then the Single front panel key The 4155B 4156B displays KNOB SWEEP screen and starts measurements To stop the knob sweep measurement press the Stop front panel key or a PAGE CONTROL group key Cursor On the KNOB SWEEP screen the long cursor is always displayed and you cannot turn it off In the CURSOR field coordinate values of the cursor are displayed in X Y order X axis setting X axis always plots the VAR1 source value Maximum value of X axis is the setting value of the VARI RANGE secondary softkey of VARI SETUP softkey group Y axis setting Y axis always plots the measurement data of the measurement channel You can select the measurement channel by using the secondary softkeys of the Y AXIS ASSIGN softkey group Maximum value of Y axis scale is the compliance value of the measurement channel 3 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function Y AXIS ASSIGN Softkey This softkey is used to change the measurement channel Before selecting this softkey the knob sweep measurement must be stopped So press the Stop front panel key to
17. UGDO3007 120x80 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 23 Measurement Mode Sampling Measurement Mode Linear Sampling Measurement Linear sampling mode keeps a constant sampling interval that is the interval of measurement trigger And if the measurement units are ready to measure the units start measurement and the result data is stored in memory This is repeated until one of the sampling completion conditions is satisfied However if both the following two conditions occur linear sampling mode changes the sampling interval to two times the previous sampling interval and continues sampling measurement number of sampling points reaches specified NO OF SAMPLES e sampling completion condition is not satisfied Example Operation This example assumes the following sampling setup e INITIAL INTERVAL value is longer than the measurement time NO OF SAMPLES value is set to 10 e TOTAL SAMP TIME is long for example 50 x INITIAL INTERVAL Do not set to AUTO which enables the number of sampling points sampling completion condition 1 Executes one point measurement and stores data in memory Repeats this 10 times every sampling interval INITIAL INTERVAL setting value because of the sampling interval enough longer than the measurement time initial interval ase 2 Ifthe sampling completion condition is not satisfied after 10 points measurement linear sampling mode changes the sa
18. 6 7 LINE2 MARKER At a point where MAX DGM Interpolate OFF SETUP DISPLAY PREV PAGE NEXT PAGE UGTO2 017 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 33 Analyzing Measurement Results Automatic Analysis To Draw Regression Line by Specifying Two Points l 2 Press Display front panel key Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select REGRESSION secondary softkey In field 2 select secondary softkey to specify desired axis In field 3 select e BY X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 If you selected BY X Y COORDINATE secondary softkey a Inthe X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coordinate c Goto step 8 If you selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select e AFTER secondary softkey if you want to set a search
19. Agilent 4155B 4156B User s Guide Vol 2 Edition 5 10767 10768 10769 10770 10771 10772 10773 10875 10905 10906 10907 10908 If You Have A Problem If Errors Occur PGU2 failed leading time calibration PGU1 failed trailing time calibration PGU2 failed trailing time calibration PGU 1 failed slope offset calibration PGU2 failed slope offset calibration PGU1 failed slope sampling calibration PGU2 failed slope sampling calibration GNDU failed offset calibration AD converter failed ROM or RAM self test Successive approximation AD converter failed calibration or self test Integrating type AD converter failed calibration or self test AD converter reached timeout AD converter did not return completion status within certain time after sending calibration or self test command Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 17 If You Have A Problem If Errors Occur Error code for CPU and peripherals The following are the error codes for CPU and peripherals Error codes are 5 digit numbers 2WWWz www test item number on SYSTEM SELF CALIBRATION DIAGNOSTICS screen e z test number 23010 Host DRAM failed self test 23021 Host ROM failed checksum test 23022 Host SRAM failed read and write test 23023 EEPROM failed read and write test 23030 Real time clock failed timer test 23040 GPIB controller failed self test This test sets some settings then checks the status 23050 Parallel
20. SCALING DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP UeTa2005 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 13 Analyzing Measurement Results Manual Analysis To Draw Tangent to Specified Point of Measurement Curve 1 Press LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting the LINE secondary softkey toggles as follows OFF ON gt OFF 4 Select TANGENT MODE secondary softkey if it is not highlighted Softkey becomes highlighted The cursors disappear and marker appears Selecting TANGENT MODE toggles between highlighted and not highlighted 5 Move marker to the desired measurement point by rotating rotary knob When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradients of selected line are also displayed in the plotting area To move marker to next VAR2 or next append curve Select MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you press MARKER SKIP To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure
21. 1 MQ OFF OFF OFF OFF Resistance is switched before and after measurement state In the standby state the stress state and the idle state 0 Q is connected Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 51 Measurement Functions R BOX Control Figure 3 8 Simplified Circuit Diagram of the 16441A R Box 1644A R Box Input guard CH1 Sense Cc oo Sense i From SMU D CH1 00 oo Output To DUT Swe Force TMO Force 100 k o SW3 DKO oo _ Sw4 Input scan circuit common gt ae Sense G os t fe Sense SW j From SMU DCH 2 Tog A Output L To DUT SW2 Force 1M9 Force 100 kQ a SW3 10kQ oo W4 Control a From o 455 4156 D H Control Logic EE 0 7 UGDO4020 3 52 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 3 5 Measurement Functions Measurement Ranging Mode Measurement Ranging Mode Before executing measurements you select a ranging mode from the following four modes You can set the ranging mode for each measurement unit e Auto Ranging e Limited Auto Ranging e Compliance Range e Fixed Range The following table lists the allowable measurement ranging modes for each measurement mode Allowable Measurement Ranging Modes Measur
22. Ifthe marker cursor or line that are referred to by the read out function are not displayed the read out function uses the position at which it was most recently displayed If the marker cursor and line have not been displayed the read out function returns invalid data e You cannot assign a data variable that includes a read out function to an axis of graphics plot 7 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function CX Returns the value of X coordinate at the active cursor position Syntax CX CY Returns the value of Y coordinate at the active cursor position Syntax CY If there are Y1 and Y2 axes this function returns the value for selected axis CY1 Returns the value of Y1 coordinate at the active cursor position Syntax CY1 CY2 Returns the value of Y2 coordinate at the active cursor position Syntax CY2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 21 Data Variable and Analysis Function Read Out Function IX Returns the value of X coordinate at the cross point of LINE and LINE2 Syntax QIX This function calculates the cross point by using the following formula V2 y Se AN Oy Oy Where x Value of X coordinate at the cross point If the X axis is logarithmic scale this function returns 10 Vn Y intercept value of LINEn If the Y axis is logarithmic scale y is the log value of the y intercept of
23. When Using VMU When using VMU the measurement terminal voltage increased by charge of buffer amplifier current in VMU may damage DUT ai ol V Gain Amplifier Buffer Amplifier Input Switch Accumlate Charge When the measurement terminal of VMU is open and when a coaxial cable is connected to VMU buffer amplifier current charges increase the VMU terminal voltage After a long time charge the increased terminal voltage is discharged by connecting DUT which may damage the DUT To solve this problem There are three ways to prevent this problem as follows 8 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem When You Make A Measurement 1 Insert a large resistor between VMU and common About 1 kQ j X VAVA This method cannot be used for voltage measurement of high resistance Because the VMU input impedance gets lower 2 Use SMUs instead of VMUs This method degrades measurement accuracy and resolution than VMU due to each unit s specification difference 3 Insert a resistor in series to device This method needs to e select an appropriate resistor value for each device resistance value e set wait time before measurement until charge current settles e insert the resistor at close point to DUT to prevent damage due to the charge in a measurement circuit See dotted line in the above figure Agilent 4155B 4156B User s
24. e Measurement range differs from compliance range lowest range that includes compliance e Ranging mode is set to auto range or limited auto range e Multi channel measurement is set 2 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Measurement Mode Sweep Measurement Mode Pulse width If the measurement settings do not meet the following conditions pulse width setting of SMU may be insufficient to make measurement If so the pulse width is automatically changed to be appropriate Number of Meas Channels 1 Integration Time Short Ranging Mode Fixed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 13 Measurement Mode Sampling Measurement Mode Sampling Measurement Mode For a sampling measurement you can monitor current or voltage changes at a DUT while forcing constant current constant voltage or pulsed constant bias The 4155B 4156B provides the following three types of sampling measurement according to the sampling interval e Linear Sampling Measurement e Thinned out Sampling Measurement e Logarithmic Sampling Measurement Available Units Available units and functions for sampling measurement are shown below Output Function Output Mode Meas Unit Palge Mode VARI VARI VAR2 CONST STANDBY v I COM v I SMU n a n a n a e e e e e n a e e VSU n a n a n a e e e _ VMU A
25. FORCE PAGE PAGE DOLOSO 100x650 On the STRESS STRESS SETUP screen you set the stress parameters User Comment In this field you can enter a desired comment The comment you enter here is also displayed on the other STRESS screens STRESS MODE STRESS MODE table specifies the stress mode When the stress mode is pulse count mode you specify the number of pulse counts and when the stress mode is duration mode you specify the stress duration in seconds For details of stress mode refer to Stress Mode in Chapter 3 In the first field select e DURATION secondary softkey to set the duration mode Then enter the pulse stress duration in the next field by using numeric keys e PULSE COUNT secondary softkey to set the pulse count mode Then enter the pulse count in the next field by using numeric keys This softkey appears only for ac stress PGU set to VPULSE and SYNC In the next field FREE RUN secondary softkey appears Select the FREE RUN softkey to force stress continuously Entering 0 zero also sets to free run mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 79 Screen Organization STRESS Screen Group ACCUMULATED STRESS The ACCUMULATED STRESS field on this screen and on STRESS STRESS FORCE screen are linked So if value is changed on this screen value is changed to same value on STRESS STRESS FORCE screen and vice versa To change
26. For subordinate sweep measurement you set up a secondary sweep source VAR2 in addition to a primary sweep source VAR1 After primary sweep is completed the output of secondary sweep source is incremented or decremented by the specified step value then the primary sweep source is swept again Subordinate Sweep Measurement Stoo value Primary N Sweep Source 0 m _ Pp E N Start value Be Stop value N Secondary Sweep Source 0 ry Start value gt Time Sweep Start Completion To set up the subordinate sweep measurement select the following on CHANNELS CHANNEL DEFINITION page e VARI function for desired primary sweep source SMU or VSU e VAR2 function for desired secondary sweep source SMU or VSU Subordinate sweep measurement has the following restriction For the secondary sweep source only single sweep mode and linear staircase mode are available Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 7 NOTE Measurement Mode Sweep Measurement Mode Parameters The parameters for primary sweep source VAR1 are same as the parameters for sweep source of basic sweep measurement For secondary sweep source VAR2 specify the following parameters on MEASURE SWEEP SETUP page Parameter start step number of steps Stop value Description Start value of secondary sweep Allow
27. Returns the value of Y2 coordinate at the cross point of LINE and LINE2 Syntax LyY2 This function calculates the cross point by using the following formula 2 1 y y 4 0572 y Y Where y2 Value of Y2 coordinate at the cross point If the Y2 axis is logarithmic scale this function returns 10 Vy Y2 intercept of LINEn If the Y2 axis is logarithmic scale y is the log value of the Y2 intercept of LINEn Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error Qp Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 23 Data Variable and Analysis Function Read Out Function L1CO Returns the correlation coefficient of the regression for LINE Syntax L1CO LINE must be in regression mode If not this function returns invalid data LIG Returns the slope of LINE1 Syntax L1G If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the slope by using the following formula If X and Y axes are both linear scaling a Y1 Yo X1 Xo e If X axis is logarithmic scaling and Y axis is linear scaling a yy Yo log x log xo e If X axis is linear scaling and Y axis is logarithmic scaling a log y log yo x Xo If X and Y axes are both logarithmic scaling a log y log yo log x log xo Where a Slope of LINE1 Xo Yo X1 y1 X and
28. Screen Organization CHANNELS Screen Group CHANNELS UNIT This column lists all the units that are installed in the 4155B 4156B VNAME VNAME field assigns a variable name for voltage that will be forced or measured You can use this name as a reference on the other screens If channel does neither V force nor V measurement you can omit VNAME In this field you can do the following Enter a name by using the keyboard or front panel keys e Select DELETE ROW softkey to delete the VNAME INAME MODE FCTN and STBY entries for the unit Unit is disabled Restrictions e VNAME must be 6 or less alphanumeric characters First character must be alphabet character Name must be different from other names Switching units To switch the VNAME INAME MODE FCTN and STBY assignment for units do as follows 1 Position pointer in top field of VNAME column CHANNEL ASSIGN secondary softkey appears 2 Select CHANNEL ASSIGN softkey Pointer moves to the top field of UNIT column 3 Use arrow keys in the MARKER CURSOR key group to move pointer to desired row 4 Select the secondary softkey of the desired unit The selected unit appears at the pointer Perform steps 3 and 4 until you assign units as desired Make sure that the same unit is not assigned to multiple rows Then select the EXIT CHANNEL ASSIGN softkey 6 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen
29. Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF ON gt OFF Select REGRESS MODE secondary softkey if it is not highlighted Softkey becomes highlighted Selecting REGRESS MODE secondary softkey toggles between highlighted and not highlighted Move cursors to specify range of regression calculation Use arrow keys of the MARKER CURSOR key group to move cursors to desired location e To select the cursor you want to move use the SELECT CURSOR secondary softkey The range used for calculating the regression line is defined by the position of the two cursors as shown in the following figure cursors mA IX 2 00 the range of regression calculation 200u idiv f T T 1 1 1 i 0 000 VD V 1 00 div 10 00 Lustre ONT 5 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis If it seems that only one cursor is displayed the cursors are at the same location When regression lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradient of selected line are also displayed in the plotting area To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary sof
30. Short Short Medium Long Number of units SMUs or VMUs used for measurements Die voltage source SMU is connected to R BOX only this SMU can be used for the measurement Maximum 8 units if the 41501 is used 6 SMUs and 2 VMUs If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units dyf compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time 2 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode Thinned out Sampling Measurement Thinned out sampling mode operates like the linear sampling mode Difference is that the sampling interval is not changed in the thinned out sampling measurement So even if both the following two conditions occur thinned out sampling mode does not change the sampling interval and continues sampling measurement number of sampling points reaches specified NO OF SAMPLES sampling completion condition is not satisfied Example Operation This example assumes the following sampling setup INITIAL INTERVAL value is longer tha
31. Specified address family is not supported for the currently used socket Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 37 If You Have A Problem If Errors Occur If a Measurement Data Status is Displayed If measurement or stress force cannot be performed correctly the measurement data status is displayed at the bottom of the GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen The status indicates hardware and calculation errors The status format depends on the displayed screen as follows GRAPH LIST GRAPHICS and KNOB SWEEP screen Status is displayed in following format STATUS ABABAB AAAAAAAAC e AB AB AB is for X Y1 and Y2 axis respectively No Y2 for KNOB SWEEP e AAAAAAAA Cis for SMUI1 to SMU6 VMU1 VMU2 and PGU1 2 respectively Where A B and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number e AD converter overflow e 2 Oscillation e 4 Other channel reached compliance limit gt 8 This channel reached compliance limit B data error If multiple errors occur numbers are added and displayed as a hexadecimal number e 1 stack register overflow e 2 calculation error e 4 only one data for delta measurement At least 2 data needed C PGU status e 1 PGU average output current exceeds 100 mA Ww OW For non measurement channels is displayed 8 38 Agilent 4155B 4156B User s Guide Vol 2 Editi
32. To Zoom the Display Range 1 Position the cursor at the center of area that you want to zoom For details about displaying and moving cursor see To Display or Move Cursor on page 5 8 2 Select SCALING primary softkey 3 Select e ZOOM IN secondary softkey to change the X and Y scaling to half the present scaling This enlarges measurement curve on the plot area ZOOM OUT secondary softkey to change the X and Y scaling to double the present scaling This reduces measurement curve on the plot area e The X and Y scaling is changed and cursor is moved to the center of the plotting area If no cursor is displayed before step 3 performing step 3 displays a long cursor at the center of the plotting area then zoom is performed To return to original scaling Select CANCEL SCALING secondary softkey Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 9 Analyzing Measurement Results Manual Analysis To Center Display at Cursor Location 1 Position cursor at the point where you want to center the plotting area For details about displaying and moving cursor see To Display or Move Cursor on page 5 8 2 Select SCALING primary softkey 3 if both Y1 and Y2 axis are set up Select desired measurement curve by using AXIS primary softkey 4 Select CENTER AT CURSOR secondary softkey The plotting area is centered around the cursor location If no cursor is displayed before step 4 performing step 4 display
33. VAR2 POINTS Sets number of sweep steps COMPLIANCE Sets VAR2 compliance value CONST SETUP Used to change CONST source setup Secondary softkeys are available for selecting CONST source Select a secondary softkey to change the CONST source output value To copy knob sweep setups Select SETUP COPY primary softkey This copies knob sweep setups to the MEASURE SWEEP SETUP and DISPLAY DISPLAY SETUP screens Then you can see the setups on the screens and use the setups for the normal sweep measurement Note that the power compliance function is not available for the knob sweep measurement So the POWER COMP column is set to OFF Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 37 Making a Measurement Knob Sweep Measurements Warning messages If the CHANNELS or MEASURE screen group have incorrect settings for knob sweep measurements when starting the knob sweep a warning message is displayed then the STOP and CONT primary softkeys are available Select STOP softkey to know the incorrect setting The setting is highlighted on the screen Select CONT softkey to perform knob sweep measurement with the following settings e If VARI function FCTN has been set The unit works as CONST channel The output value is VAR start value If VPULSE or IPULSE mode MODE has been set The unit works as V or I channel e Ifthe power compliance function POWER COMP has been set The function does not work
34. t6440 2 Outeu ue om Channel 2 R on Output one O Selected To DUT Input PG o gt __ ra SW2 SW1 SW2 Mechanical Relay SWS Semiconductor Switch uienn4aond 3 46 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Measurement Functions SMU PG Selector Control Setup and Switching Conditions Setup of the SMU PG SELECTOR field and switching conditions are explained below CH1 or CH3 for second selector Setup SWI SW2 SW3 Description SMU ON OFF OFF Connects SMU PGU OFF ON ON Connects PGU PGU OPEN OFF ON OFF Open Disconnected OPEN OFF OFF OFF Open Disconnected CH2 or CH4 for second selector Setup Swi SW2 Description SMU ON OFF Connects SMU PGU OFF ON Connects PGU OPEN OFF OFF Open Disconnected SWI and SW2 are mechanical relays and SW3 is a semiconductor switch Leakage current and stray capacitance of SW1 and SW2 are less than for SW3 However the switching speed of SW3 is faster and life is longer than SW1 and SW2 If you need to switch PGU many times use PGU OPEN not OPEN to disconnect PGU Restrictions using Selector e 41501A B Expander equipped with PGU must be connected to 4155B 4156B e Kelvin connection is not available Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 47 Measurement Functions R BOX Control R BOX Control Agilent 16441A R Box must be us
35. 10fA 10 fA 100 fA 1 pA 10nA o lt I lt 11 5nA 10fA 100 fA 1 pA 10 pA 100 nA o lt i lt 115na 100fA 1 pA 10 pA 100 pA lipa Jo lt lil lt iisua lipa lioa liop a lias Y OE 10 pA o lt I lt 11 5uA 10pA 100 pA l nA 10 nA 100 pA o lt I lt 115pa 100pA InA 10nA 100 nA 1 mA o lt I lt 1 15mA 1nA 10nA 100 nA 1 uA 10 mA 0 lt r lt 11 5 mA 10 nA 100 nA l uA 10 uA 100 mA o lt I lt 100mA 100nA l uA 10 pA 100 pA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter 1 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Source Monitor Unit SMU Figure 1 4 MPSMU Output and Measurement Ranges Current mA UGDO2004 Table 1 5 MPSMU Output Voltage Ranges and Resolutions Current Range Output Value Outta Compliance Resolution Range 2V 0 lt vl lt 2Vv 100 uV 100 mA 20 V 0 lt v lt 20V 1 mV 100 mA 40 V o lt v lt 40V 2 mV 50 mA 100 V o lt v lt 100V 5 mV 20 mA Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 9 Measurement Units Source Monitor Unit SMU
36. 6 7 8 9 DIF 575 0000p A V SPREAD RE SWEEP TIMING CONST SHEET SETUP SETUP SETUP SETUP UGTOZ013 100x80 When marker function is enabled on GRAPH LIST LIST screen a marker highlighted row is displayed Marker has following functions on this screen e displaying values of data variables The data variable values are displayed for the highlighted row e specifying the position for direct keyboard calculation If you enter an expression that has data variables related to measurement points the value of the expression for the highlighted row is displayed e indicating measurement point determined by auto analysis expression If you set up an expression for the marker on DISPLAY ANALYSIS SETUP screen the marker moves to the row determined by the expression after auto analysis is performed 7 36 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function Moving the marker Basically you can move the marker up or down by using the rotary knob on the front panel or by using the upper arrow and down arrow front panel keys If you have defined more than four variable values you can scroll right or left by using the left arrow or right arrow front panel key In addition to the basic movement the following functions allow you to quickly move the marker to the desired position For these functions the row marker becomes
37. A _ Pa Ve P LA CV A S ry Sh a V y eae Vz UGTO6004 1050 8 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem When You Make A Measurement If Noise Affects the Measured Values When you measure low current of a DUT the measured values may not be stable To solve this problem Use guarding to reduce the leakage current between your prober and the 4155B 4156B Note that long wires cause oscillation because of their large inductance For details about connections refer to To Make Connections to Reduce Leakage Current in Chapter 4 If some high power electric machines are operating around the 4155B 4156B turn off the machines then perform the measurements The machines affect the power line waveform Shut the lid of test fixture or shield box to prevent effects of light If these are vibrations due to nearby machines or due to air flow put cushioning material under prober cable and the 4155B 4156B install stabilizer on the prober and make the cables stable by taping Wait several minutes after connecting cables or moving probe needles Because these operations cause electromotive force If you use only Force terminal and triaxial cables for HRSMUs or HPSMU connect an open cap to sense terminal Keep constant temperature in the room when you use the 4155B 4156B Shift of 1 C may shift the measurement values Temperature change causes the
38. Does not include HOLD TIME This is the time from the Ist trigger to the sampling completion One of the sampling completion conditions so sampling stops after this time elapses Allowable range when INITIAL INTERVAL lt 480 us AUTO Allowable range when INITIAL INTERVAL gt 480 us INITIAL INTERVAL x NO OF SAMPLES 1 sec to 1 x 10 sec AUTO or NO LIMIT AUTO Enables the number of sampling points sampling completion condition NO LIMIT Disables the total sampling time sampling completion condition Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 25 Measurement Mode Sampling Measurement Mode HOLD TIME Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 e Allowable range when INITIAL INTERVAL 22 ms 0 to 655 35 s with 100 us resolution e Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution Table 2 1 Effective Parameter Values INITIAL INTERVAL 60 us to 480 us 560 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Max 10001 number of measurement units TOTAL SAMP TIME AUTO AUTO NO LIMIT INITIAL INTERVAL x NO OF SAMPLES 1 s to 1 x 10 s HOLD TIME 30 ms to 655 35 s 100 us resolution 0 to 655 35 s 100 us resolution Stop Condition DISABLE DISABLE ENABLE Measurement Units 1 Max 8 Measurement Range d FIX FIX AUTO LIMITED Integration Time
39. GRAPHICS screen LINE secondary softkey must be ON Marker In the next line after MARKER At a point where you enter a variable name and a condition expression to specify where you want the marker to appear as shown in the following example MARKER At a point where DG MAX DGM 0 01 In addition you can specify another condition if you position the pointer in the last bracketed field shown above Select the AFTER secondary softkey AFTER is displayed and you can enter a second variable and condition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that satisfies the first condition after the second condition is satisfied MARKER At a point where DG MAX DGM 0 01 AFTER DGM MAX DGM Disabling entries In the field after LINE1 LINE2 or MARKER you can select the DISABLE secondary softkey to clear the entries which disables the item for the automatic analysis function Interpolation mode You can also use the interpolation mode for the automatic analysis function by selecting the ON secondary softkey in the Interpolate field When interpolation mode is on you can position marker between measurement points Select OFF to turn interpolation mode to off Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 45 Scr
40. MEASURE SETUP screen MEASURE MEASURE SETUP Screen Organization MEASURE Screen Group 94JANO1 91 30PM user comment devicel anneal 1 XMEASURE MENT RANGE UNIT NAME RANGE ZERO CANCEL ON SMUL HR JIA AUTON ON SMU2 HR IB LIMITED 100pA ON FIXED SMU3 HR IC FIX ind ON SMU4 HR VA ALTO RRR OFF SMUS5 MP VB AUTO J OFF LIMITED SMUG MP VC AUTO J OFF AUTO VMUL BOLT ATS jm OFF Wa jaranan Rasa OFF INTEG TIME TIME NPL SHORT 80us 70 004 MED 2oms 1 LONG 2000ms 100 Selected Integ Time XWAIT TIME 1 0 x Default Wait Time AUTO SWEEP Pou OUTPUT PREV NEXT SETUP SETUP a SEQ PAGE PAGE UGDO5006 100x50 On the MEASURE MEASURE SETU cancel integration time and wait time User Comment P screen you set measurement range zero In this field you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 29 Screen Organization MEASURE Screen Group MEASUREMENT RANGE You can set the measurement range for each unit UNIT The UNIT field shows all the installed measurement units Only measurement units are shown so VSU PGU and GNDU are not shown NAME The NAME field
41. Manual Analysis To Scroll the LIST screen e Press an arrow key of the MARKER CURSOR key group List scrolls in direction of selected arrow List can be scrolled even while performing measurements When marker is displayed marker does not move during scrolling To scroll list fast Press Fast key of the MARKER CURSOR key group while pressing an arrow key of the MARKER CURSOR key group 5 24 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Display or Move Marker on LIST screen 1 Select MARKER primary softkey 2 Set MARKER secondary softkey to ON The marker is displayed Selecting MARKER secondary softkey toggles between ON and OFF 3 Rotate rotary knob to move the marker to desired measurement point To turn off marker Set MARKER secondary softkey to OFF To move marker to next VAR2 step Select MARKER SKIP secondary softkey Marker moves to next VAR2 step data or next append data every time you select MARKER SKIP secondary softkey To move marker to next append data Select NEXT APPEND secondary softkey Marker moves to next append data every time you select NEXT APPEND secondary softkey Example The following figure shows an example to display marker GRAPH LIST LIST SHORT 93Aug09 06 18PM VF IF v A DIRECT MARKER 1 10 00000m 4 150000p 2 0 000000 1 150000p MARKER 1 SKIP 2 3 300000p te BGS ROO Cg 14 80000p
42. One sweep source VAR1 is used e Subordinate Sweep Measurement A primary VAR1 and secondary sweep source VAR2 are used Synchronous Sweep Measurement A primary VAR1 and synchronous sweep source VARI are used ot Basic Sweep Subordinate Zo m ao Sweep TT Synchronous Sweep YGDISO S 5090 Also you can set up a combined subordinate and synchronous sweep measurement In addition to the normal dc sweep the sweep or constant source output can be pulsed to prevent thermal drift of the DUT Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 3 Measurement Mode Sweep Measurement Mode Basic Sweep Measurement Basic sweep measurement uses one sweep source VARI The following sweep types are available e LIN LOG Linear staircase e Logarithmic staircase e SWEEP MODE e Single Source channel sweeps the output from user specified start value to stop value e Double Source channel sweeps the output from user specified start value to stop value then from stop value to start value You can select any combination of LIN LOG and SWEEP MODE as shown in the following table Single Sweep Double Sweep Linear Sweep Log Sweep UGDO3001 2 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 2 1 Measurement Mode Sweep Measurement Mode Basic S
43. SMUI is set to current source I mode and secondary sweep VAR2 function SMU2 is set to voltage source V mode and primary sweep VAR1 function SMU3 is set to COMMON Example Channel Definition Sweep Measurement CHANNELS CHANNEL DEFINITION S4JANO1 O41 30PM CONST EASUREMENT MODE SWEEP CHANNELS MEASURE sTBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE VARZ SMUL MP Vbe Tb T VARZ O ahm SMU2 MP Vee Ic Vv AAR O ohm SMUS MP COMMON CONST VART S s wmut oo o a vMU2 o f oe N aaa Z DELETE ROW USER NEXT VAR PAGE USM O02 100x720 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 13 Making a Measurement Sweep Measurements To Set up Primary Sweep Primary sweep source is the measurement unit defined as VARI in the CHANNELS CHANNEL DEFINITION screen To set up the primary sweep source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 VARI SWEEP MODE Select one of the following softkeys to set the sweep mode e SINGLE single sweep mode e DOUBLE double sweep mode VARI LIN LOG Select one of the following softkeys to set the sweep step mode e LINEAR linear step mode e LOG XX logarithmic step mode XX specifies the number of step
44. The following figure shows the 16441A R Box connections using non Kelvin connections 16442A triaxial cable a 16441A Input C triaxial cable Us D04002 120 mm5 Unn control cable Kelvin Connections The following figure shows the 16441A R Box connections using Kelvin connections Only 0 ohm is available for the Kelvin connection 16442A To R Box triaxial cable nee CAS CHI Force Sense C Inout Sense 164414 Output Control Output w G input Kelvin triaxial cable usbosoz2 12onmesonn control cable Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 49 NOTE NOTE Measurement Functions R BOX Control Setups You set resistance values in the SERIES RESISTANCE column on the CHANNELS CHANNEL DEFINITION screen You can set resistance values for the following SMUs e SMUI to CH1 terminal of R Box e SMU2 to CH2 terminal of R Box if the 41501A B SMU Pulse Generator Expander is not installed or does not have an HPSMU e SMUS to CH2 terminal of R Box if the 41501A B is installed and has an HPSMU If you connect the 16441A R Box to the SMUs described above the 4155B 4156B automatically compensates for voltage drop of the resistance values So the measured data displayed on the screen and the results of user function are the compensated data For the
45. following e Offset current in the 4155B 4156B e Thermoelectromotive force in DUT which causes low current e Expansion and contraction of cables which causes noise Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 7 If You Have A Problem When You Make A Measurement If Measured Voltage has some Error when Forcing a Large Current Voltage measurement may have some error because of the effects of the cable resistance when forcing a large current To solve this problem Use Kelvin connections between SMUs and DUT To cancel the effects of cable resistance connect the sense line as close as possible to the terminal of the DUT For details of Kelvin connections see Connection to Device Under Test DUT in Chapter 4 If Large Current Causes High Temperature Thermal Drift If a large current is forced to a DUT the temperature of the DUT may increase which may cause characteristics to drift To solve this problem e Use the pulse output mode of the SMU For large currents the SMU should be set to pulse output mode This decreases the average power output to prevent temperature rise of DUT 8 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem When You Make A Measurement If Measurement Takes More Time than Specified When measuring current that is 10 uA or less SMUs may take longer time to measure than the specified integration time When measuring in a low current range the
46. go to the CHANNELS CHANNEL DEFINITION screen Example The following example shows the constant output conditions CONSTANT parameters MEASURE SWEEP SETUP Q4JANOd 01 30PM xVARIABLE VARI VARZ UNIT SMJi MP NAME If SWEEP MODE SINGLE LIN LOG LOG 10 START 1 00 uA STOP 1 00 mA STEP No oF STEP 31 COMPLIANCE 100 mV POWER COMP OFF TIMING HOLD TIME O 0s DELAY TIME 0 000 XSWEEP CONTINUE AT ANY Status CONSTANT UNIT SMU2 MP NAME voff MODE eee SOURCE Epogen COMPLIANCE HOO mA 1 00 Ba PGU MEASURE OUTPUT PREV NEXT J SETUP SETUP SEQ PAGE PAGE UGO1006 90x70 4 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements To Set up SMU Pulsed Output SMU pulse output source is the measurement unit defined as VPULSE or IPULSE in the CHANNELS CHANNEL DEFINITION screen For pulsed sweep source set the function FCTN to VARI VAR2 or VAR1 For pulsed constant source set the function to CONST To set up the SMU pulse output source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 Set the source output parameters e For VARI refer to To Set up Primary Sweep on page 4 14 e For VAR2 refer to To Set up Secondary Sweep on page 4 16 e F
47. s Guide Vol 2 Edition 5 4 33 Making a Measurement Sweep Measurements To measure negative resistance characteristics The 16441A R Box allows SMUs to measure current controlled negative resistance 1 MQ characteristics Connect the resistance of the 16441A as shown in following figure 16441A R Box SMU DUT Example The following figure shows an example setup to connect 10 kQ resistance to SMU1 and SMU2 CHANNELS CHANNEL DEFINITION 94JANOL 01 30PM O ahm MEASUREMENT MODE SWEEP CHANNELS MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE 100k UL MP Vbe Tb I VAR2 OR Si ohm U2 MP Vce Ic v VARL 10k ohm U3 MP COMMON CONST IM ohn OY a gt G gt oU USSL USER USER NEXT FCTN VAR PAGE UGO10 36100070 4 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Knob Sweep Measurements Knob Sweep Measurements This section covers the following tasks about knob sweep measurements The knob sweep function is useful in the following cases e to determine a parameter value for normal sweep e to quickly make a rough measurement of a DUT characteristics The following figure shows the KNOB SWEEP screen
48. s Vee Ie PULSE UNIT POUL PGU2 NAME PERIOD 10 00ms ao WIDTH 608 Ws DELAY TIME 9 00000 s PEAK VALLE 190m BASE VALLE 0 00 v LEADING TIME 100ns TRAILING TIME 100ns IMPEDANCE Low PULSE OOUNT o Gace xOONSTANT UNIT POUL PGUS NAME SOURCE 0 00500 SWEEP Pil MEASLRE OUTPUT PREV NEXT SETUP ETUE SETLP SEa PAGE PAGE UGDOS005 100x50 On the MEASURE PGU SETUP screen you set output parameters for each PGU For more information about PGUs see Pulse Generator Unit PGU in Chapter 1 User Comment In this field you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups PULSE You set the pulse output parameters in the PULSE area UNIT and NAME are defined on the CHANNELS CHANNEL DEFINITION screen e PERIOD PERIOD field specifies the pulse period of the PGU Note that the pulse period of PGUs is independent from that of the SMUs e WIDTH WIDTH field specifies the pulse width The pulse width must be less than the pulse period 6 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group e DELAY TIME DELAY TIME field specifies the delay time from the pulse period start time The delay time must be less than or equal to the pulse
49. simultaneously To turn off cursor Set CURSOR secondary softkey to OFF To move cursor fast Press arrow keys and Fast key of the MARKER CURSOR key group simultaneously Example The following figure shows an example to display a short cursor 5 8 GRAPHILIST GRAPHICS SHORT 93Aug0S 06 1 eee Gl 93Aug09 06 18PM MAKER QJRSOR 751 2530mv 10 02UA 10 02u4 OFF Ca CA MARKER on 1 00 MIN MAX g INTER POLATE I a ie Pe el DIRECT ae MARKER CURSOR d de decode sa K roiv MARKER p KIP La ry 100 f T T 100 f 0 000 VBE V 100 m div 4 00 AXIS PARKES CINE SCALING DISPLAY SWEEP TIMING CONST Y2 CuRSor SETUP SETUP SETUP SETUP UGTO2003 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Adjust Display Range to Measurement Curve Automatically 1 Select SCALING primary softkey 2 if both Y1 and Y2 axis are set up Select desired measurement curve by using AXIS primary softkey 3 Select AUTO SCALING secondary softkey Scale is changed automatically to fit the selected measurement curve When you set VAR2 parameter or when you perform append measurement the scale is changed so that all measurement curves can be displayed To cancel auto scaling Select CANCEL SCALING secondary softkey
50. then redisplayed it appears at its previous location MARKER MIN MAX softkey Select MARKER MIN MAX secondary softkey to move the marker to the maximum or minimum measurement point If this softkey moves the marker to the maximum point pressing the softkey again moves it to the minimum point INTERPOLATE softkey Select INTERPOLATE secondary softkey to toggle the interpolation mode If interpolation mode is on marker can move on line between adjacent measurement points If interpolation mode is off marker can be positioned on measurement points only not between measurement points 6 48 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group e DIRECT MARKER CURSOR softkey Select DIRECT MARKER CURSOR secondary softkey to display secondary softkeys for positioning the marker and cursor A pointer appears in the CURSOR and MARKER coordinate fields These fields are displayed only if cursor and marker are displayed in the plotting area You can move the pointer to the desired field by using the left arrow upper arrow right arrow and down arrow MARKER CURSOR keys To move marker and cursors to desired position enter coordinate values into corresponding fields as follows e Enter the value by using numeric keys e Change the value by rotating rotary knob Select CANCEL primary softkey to move marker and cursor back to original position and exit the direct marker and cursor function S
51. which has a 100 mA current limit MEASURE PGU SETUP 94JANO1 01 30PM PULSE UNIT PGUL PGUZ NAME PERIOD WIDTH DELAY TIME PEAK VALUE BASE VALUE LEADING TIME 100ns TRAILING TIME 100ns IMPEDANCE Low PULSE COUNT o CONSTANT UNIT PGUL PGU2 NAME SOURCE 0 00500 SWEEP SETUP OUTPUT PREV NEXT SEQ PAGE PAGE UGO1040 100x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 25 Making a Measurement Sweep Measurements To Use Standby Function 1 Press Chan key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 Inthe STBY column of the desired unit select STANDBY ON secondary softkey 4 Press Standby key in the MEASUREMENT key group The indicator above the Standby key shows whether the Standby function is enabled If this indicator is ON then for the units that you selected STANDBY ON the units have the following output value during the Standby state that is before and after measurements or stress Function of a Unit Output during Standby State VARI VARI Start value VARI Ratio x Start Offset VAR2 VAR Start value CONSTANT Output value For sampling measurements only the CONSTANT function is available From Standby state you can execute measurements or force stress by pressing Single Repeat Ap
52. 1000 mA 20 V 0 lt vl lt 20V 1 mV 1000 mA 40 V o lt v lt 40V 2 mV 500 mA 100v O lt V lt 100V 5 mV 125 mA 200V o lt V lt 200V 10 mV 50 mA 1 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Source Monitor Unit SMU Table 1 10 HPSMU Measurement Voltage Values and Resolutions Measurement Resolutions Range oe Integration Time High Speed alue i 1PLC or 640 us to 1 92 Sampling Longer ms 80 us to 560 us Measurement 2V o lt v lt 22V 2uV 20 uV 200 pV 2 mV 20 V o lt yv lt 22 V 20 uV 200 pV 2 mV 20 mV 40V o lt lvl lt 44v 40 uV 400 nV 4mV 40 mV 100 V o lt v lt 110V 100uV 1 mV 10 mV 100 mV 200 V o lt v lt 200V 200 uV 2 mV 20 mV 200 mV a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Table 1 11 HPSMU Output Current Ranges and Resolutions Range Output Value Pa tae eam Range 1nA o lt I lt 1nA 100 fA 200 V 10nA 0 lt I lt 10nA IpA 200 V 100 nA 0 lt I lt 100nA 10 pA 200 V TpA o lt I lt 1pa 100 pA 200 V Iopa 3 0 lt
53. 19 To Change Range of X or Y Axis Scale 00 c eee ee eee 5 20 To Change Variable Assigned to X Y1 or Y2 Axis 004 5 21 To Overlay an Internal Memory Measurement Curve onto Plotting Area 5 22 To Scroll the LIST screen 0 eee cette ene 5 24 To Display or Move Marker on LIST screen 0 0 00 eae 5 25 To Change Variables of LIST screen 00 e eee eee eee 5 26 Automatic Analysis 0 2 0 0 eect ent en ence nee 5 27 To Draw Line by Specifying Two Points 00 0 0 c ee eee eee 5 28 To Draw Line by Specifying Gradient and One Point 5 30 To Draw Tangent to Specified Measurement Point 5 32 To Draw Regression Line by Specifying Two Points 5 34 To Display Marker at Specified Point 0 0 c eee eee eee 5 37 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 5 Contents Screen Organization Screen Structure s Sale a a tall el ad pa il Std ol od cee Ml 6 3 CHANNELS Screen Group 20 ccc eee eee en eens 6 5 CHANNELS CHANNEL DEFINITION screen 000 005 6 6 CHANNELS USER FUNCTION DEFINITION screen 6 12 CHANNELS USER VARIABLE DEFINITION screen 6 14 MEASURE Screen Group 2 0 eect tenn ence 6 16 MEASURE SWEEP SETUP screen 0 c eee eee eee eee 6 17 MEASURE SAMPLING SETUP screen 0 00 e eee eee ee 6 22
54. 50 V Sets number of steps for VAR1 channel For knob sweep NO OF STEP setting on MEASURE SWEEP SETUP screen has no meaning This softkey displays present setting setting Press this softkey to display the number of steps in the data entry area then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range 2 to 1001 default 101 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 21 Measurement Functions Knob Sweep Function COMPLI ANCE 100 mA HOLD TIME 0 00s STEP TIME 500us 3 22 Sets compliance value for VARI channel This softkey displays present setting setting Press this softkey to display the compliance value in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range Compliance range depends on measurement unit See Chapter 1 default VAR1 compliance value on the MEASURE SWEEP SETUP screen Sets hold time This softkey displays present setting setting Press this softkey to display the hold time in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range 0 to 655 35 s with 10 ms resolution default hold time on the MEASURE SWEEP SETUP screen Sets step time which is the time width of each sweep step This softkey displays pre
55. 6 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group VAR2 parameters In this column you set up the output parameters for the secondary sweep unit UNIT and NAME are defined on the CHANNELS CHANNEL DEFINITION screen SWEEP MODE and LIN LOG fields are fixed to SINGLE and LINEAR e START STEP and NO OF STEP In the START STEP and NO OF STEP fields you specify the start value step value and number of steps The stop value is calculated from these values and is shown in the STOP field e COMPLIANCE In COMPLIANCE field you set compliance value If a VSU is used for VAR2 unit this field cannot be set compliance value is fixed to approximately 100 mA e POWER COMP In POWER COMP field you can set power compliance value for SMUs To disable power compliance function select OFF secondary softkey VARI parameters In this column you set up the output parameters for the synchronous sweep unit This VARI table is displayed only when VAR1 is set in the FCTN field on the CHANNELS CHANNEL DEFINITION screen UNIT and NAME are defined on CHANNELS CHANNEL DEFINITION screen e OFFSET and RATIO In the OFFSET and RATIO fields you specify the offset and ratio values The offset and ratio values determine the VAR1 value as follows VARI output VAR1 output x ratio offset e COMPLIANCE In COMPLIANCE field you set compliance value If a VSU is used for VARI unit this fie
56. Change Variables of LIST screen on page 5 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 3 Analyzing Measurement Results Manual Analysis To Specify a Measurement Point on Curve 1 Select MARKER CURSOR primary softkey 2 Set MARKER secondary softkey to ON Marker and marker coordinates are displayed Selecting MARKER secondary softkey toggles between ON and OFF 3 if both Y1 and Y2 axis are set up Select the desired marker axis by using AXIS primary softkey The selected marker is highlighted Selecting AXIS primary softkey toggles between Y1 and Y2 4 Rotate the rotary knob to move the marker to desired measurement point If both Y1 and Y2 axis are set up a circle marker 0 is displayed on measurement curve of Y 1 axis and an asterisk marker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and third fields are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn off markers Set MARKER secondary softkey to OFF To move marker to maximum or minimum value of measurement curve Select MARKER MIN MAX secondary softkey The marker searches for minimum or maximum value in measurement order from the present location every time you select the MARKER MIN MAX secondary softkey To move marker to next VAR2 step or append curve Select
57. Comment In this field you can enter a desired comment The comment you enter here is also displayed on the other STRESS screens CHANNELS CHANNELS table defines the mode name and function for the stress state UNIT This column lists all the source units that are installed in the 4155B 4156B e NAME of MEASURE Source name that was defined for the measurement state on CHANNELS CHANNEL DEFINITION screen For example if the unit is set to V source mode the specified VNAME is shown here e MODE of STRESS Output mode for each unit that will be used during stress force state In the MODE column allowable modes are shown in the secondary softkey area as follows and you select a softkey to set an output mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 75 NOTE Screen Organization STRESS Screen Group V dc voltage source I dc current source VPULSE ac voltage source COMMON circuit common DELETE ROW Deletes all entries in row of unit so unit is not used during stress force Output switch of unit is open Allowable modes for each unit are shown in the following table v I VPULSE COMMON DELETE ROW SMU yes yes yes yes VSU yes yes PGU yes yes yes GNDU yes yes When pointer is at top of this column CHANNEL ASSIGN softkey appears Switching units To switch the STRESS MODE NAME and FCTN assignments for two units do as follows 1 Position pointer in top field of STRESS MO
58. DEFINITION screen ac stress channels stop several microseconds before the dc stress channels If you set delay time for pulse stress finish of stress force time is after the period of the last pulse See Figure 3 1 on page 3 9 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 7 NOTE Measurement Functions Stress Force Function Pulse Waveform when Stress Stops When you set the duration mode or press the Stop front panel key be aware that stress force may stop during the pulse peak output as shown in the following figure AC Stress Force Peak Value j Base Value i 2 oaen t t Stress Start Stress Stop Sequence for returning to 0 V stress force state to the idle state When the state changes from the stress state to the idle state the outputs of the channels are returned to 0 V in opposite order that forcing occurred Delay time of PGUs When PGUs are set to VPULSE ac source you can set a delay time as follows e IfPGU is set to SYNC the PGU waits the delay time after the stress start trigger is received then starts to force ac stress IfPGU is set to NSYNC the PGU waits the delay time after stress force state starts then starts pulse output Example Figure 3 1 shows an example of output sequence when forcing stress Figure 3 1 assumes the output sequence is set on the MEASURE OUTPUT SEQUENCE screen as follows
59. Edition 5 6 15 Screen Organization MEASURE Screen Group MEASURE Screen Group MEASURE screen group has the following screens Sweep Setup or Sampling Setup For setting the parameters for sweep or sampling measurement which was defined in the CHANNELS CHANNEL DEFINITION screen PGU Setup For setting the PGU parameters This screen is available when PGU is installed and the MODE and FCTN field of PGUs are set on the CHANNELS CHANNEL DEFINITION screen Measure Setup For setting the measurement range integration time zero cancel and wait time Output Sequence For setting the output sequence and triggering To move into the MEASURE screen group press Meas front panel key The following primary softkeys appear SWEEP PGU MEASURE OUTPUT PREV NEXT SETUP SETUP SETUP SEQ PAGE PAGE or SAMPLING PGU MEASURE OUTPUT PREV NEXT SETUP SETUP SETUP SEQ PAGE PAGE e Select SWEEP SETUP softkey to move to MEASURE SWEEP SETUP screen Select SAMPLNG SETUP softkey to move to MEASURE SAMPLING SETUP screen Select PGU SETUP softkey to move to MEASURE PGU SETUP screen Select MEASURE SETUP softkey to move to MEASURE MEASURE SETUP screen Select OUTPUT SEQ softkey to move to MEASURE OUTPUT SEQUENCE screen 6 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group MEASURE SWEEP SETUP screen
60. For details about the SMU PG selector refer to SMU PG Selector Control in Chapter 3 or Agilent 16440A SMU Pulse Generator Selector User s Guide TRIGGER SETUP In the TRIGGER SETUP table you can set how to use the trigger function during the stress force state e ENABLE DISABLE In the ENABLE or DISABLE field select e ENABLE secondary softkey to enable the trigger function e DISABLE secondary softkey to disable the trigger function e POLARITY In this field select e POSITIVE secondary softkey to set positive logic for the output trigger e NEGATIVE secondary softkey to set negative logic for the output trigger 6 78 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization STRESS Screen Group STRESS STRESS SETUP screen STRESS STRESS SETUP Q4UANOL 04 30PM user comment device 1 channel length 1 STRESS MODE PULSE DURATION UNIT POUL FOUA 1 0ms NAME PERIOD 10 00ms ACOLMULATED STRESS WIDTH 5 00ms 5 00ms 0 00003 DELAY TIME 0 00000 s 0 00000 s PEAK VALUE 9 000 0 000 v HOLD TIME BASE VALUE 0 000 Y 0 000 v 0 000 5 LEADING TIME 100 ns 100 ns TRAILING TIME 100s 100 ns FILTER OFF IMPEDANCE Low Low xSTRESS CONTINUE AT ANY Status CONSTANT UNIT SMUL MP NAME vsu MODE v SOURCE 5 00 V COMPLIANCE 1 0000mA 9 000000100 CHANNEL T STRESS PREV NEXT DEF SET
61. Group INAME INAME field assigns a variable name for current that will be forced or measured You can use this name as a reference on the other screens If channel does neither I force nor I measurement you can omit INAME In this field you can do the following Enter a name by using the keyboard or front panel keys Select DELETE ROW softkey to delete the VNAME INAME MODE FCTN and STBY entries for the unit Unit is disabled Restrictions e INAME must be 6 or less alphanumeric characters First character must be alphabet character Name must be different from other names MODE You define an output mode for SMUs VSUs PGUs and GNDU and measurement mode for VMUs When the pointer is located in this column allowable modes appear in the secondary softkey area You select a softkey to set a mode The following table shows allowable modes for each unit v I VPULSE IPULSE COMMON DVOLT SMU Yes Yes Yes Yes Yes VSU Yes PGU Yes Yes GNDU Yes VMU Yes Yes a Only for sweep measurements not for sampling To delete the VNAME INAME MODE FCTN and STBY entries for a unit select the DELETE ROW secondary softkey Unit is disabled Restrictions e Only one SMU can be set to VPULSE or IPULSE That is you cannot set multiple SMUs to VPULSE or IPULSE or cannot set one SMU to VPULSE and another SMU to IPULSE e For sampling measurement you cannot set VPULSE or IPULSE fo
62. Guide Vol 2 Edition 5 Marker and cursor Display range Line Another graph functions Analysis on the LIST screen Analyzing Measurement Results Manual Analysis Manual Analysis You can position lines markers and cursors by using front panel keys rotary knob and softkeys This section covers the following manual analysis tasks To Specify a Measurement Point on Curve on page 5 4 To Specify between Measurement Points on Curve on page 5 6 To Display or Move Cursor on page 5 8 To Adjust Display Range to Measurement Curve Automatically on page 5 9 To Zoom the Display Range on page 5 9 To Center Display at Cursor Location on page 5 10 To Draw Line through Two Specified Points on page 5 10 To Draw Line through Specified Point with Specified Gradient on page 5 12 To Draw Tangent to Specified Point of Measurement Curve on page 5 14 To Draw Regression Line for Specified Region on page 5 16 To Display and Select a Line on page 5 18 To Display Grid on the Graph on page 5 18 To Change Data Variable on Graph on page 5 19 To Change Range of X or Y Axis Scale on page 5 20 To Change Variable Assigned to X Y1 or Y2 Axis on page 5 21 To Overlay an Internal Memory Measurement Curve onto Plotting Area on page 5 22 To Scroll the LIST screen on page 5 24 To Display or Move Marker on LIST screen on page 5 25 To
63. Guide Vol 2 Edition 5 3 23 Measurement Functions Knob Sweep Function VAR2 POINTS 5 Sets Number of steps for VAR2 channel This softkey displays present setting setting Press this softkey to display the VAR2 number of steps in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group e setting range to 128 e default VAR2 number of steps on MEASURE SWEEP SETUP screen COMPLI ANCE 2 00 V Sets compliance value for VAR2 channel This softkey displays present setting e setting 3 24 Press this softkey to display the VAR2 compliance value in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range Setting range depends on the measurement unit See Chapter 1 default VAR2 compliance value on MEASURE SWEEP SETUP screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function CONST SETUP Softkey This softkey displays the secondary softkeys for setting the constant voltage source parameter or the constant current source parameters Secondary softkeys for PGUs set to V mode are also displayed If CONST is not set for any channel on the CHANNELS CHANNEL DEFINITION screen this softkey is not displayed If more than six constant channels are defined press the MORE softkey to display softkeys for the other const
64. Guide Vol 2 Edition 5 8 11 If You Have A Problem When You Make A Measurement If You Get Unexpected Data when Performing Sampling Measurement If initial interval is set to a short time and if FILTER ON is set you may get unwanted data FILTER ON causes a slower rise time so short initial interval will sample during this rise time To solve this problem e Set FILTER field to OFF if you set initial interval to a short time Some data may be skipped because measurement takes a long time Measurement takes a long time if measurement is performed in a low current range if many measurement channels are set up or if analysis such as moving a marker is performed during measurements To solve this problem e Measure current using a fixed range that is more than 10 uA For measurement ranges 10 uA or less measurement takes longer than the specified integration time e Decrease measurement channels to reduce measurement time Note that the number of measurement channels automatically increases if you do both the following force voltage from channels that are connected to R Box and display the voltage values or use voltage values in user functions The channels automatically measure current which is used to compensate the voltage values e Do not perform analysis operation during measurement state 8 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem If Errors Occur If Errors Occur If the 4155B
65. I lt 10pA lina i aov 100 uA 0 lt I lt 100pA I0 nA 200 V ImA o lt I lt 1ma 100 nA 200 V 10 mA 0 lt I lt 10mA 1pA 200 V 100 mA 0 lt I lt 50mA 10 pA 200 V 50 mA lt I lt 100 mA 10 pA 100 V 1A 0 lt I lt 50mA 100 pA 200 V 50 mA lt I lt 125 mA 100 pA 100 V 125 mA lt I lt 500 mA 100 pA 40 V 500mA lt I lt 1A 100 pA 20 V Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 13 Measurement Units Source Monitor Unit SMU Table 1 12 HPSMU Measurement Current Values and Resolutions Measurement Resolutions Range Measurement Value Integration Time High Speed Sampling Tae 640 ad ae 80 us to 560 us Measurement 1 nA o lt I lt 1 15nA 10 fA 10 fA 100 fA 1 pA 10 nA o lt I lt 11 5 nA 10 fA 100 fA 1 pA 10 pA 100nA O lt I lt 115nA 100 fA 1 pA 10 pA 100 pA 1 pA o lt I lt 1 15 pA 1 pA 10 pA 100 pA 1 nA 10 pA o lt I lt 11 5 uA 10 pA 100 pA 1 nA 10 nA 100npA O lt I lt 115 pA 100 pA l nA 10 nA 100 nA 1 mA 0 lt I lt 1 15 mA l nA 10 nA 100 nA l pA 10 mA 0 lt I lt 11 5 mA 10 nA 100 nA l uA 10 pA 100mA 0 lt I lt 50mA 100 nA l uA 10 pA 100 pA 50mA lt I lt 115mA 100nA l uA 10 pA 100 pA 1A o lt lil lt 1A l uA 10 pA 100 pA 1 mA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value
66. If You Have A Problem This chapter provides problem solving information that you may encounter Text Conventions The following text conventions are used in this manual Screen Text Represents text that appears on screen of the 4155B 4156B Italic Refers to a related document or is used for emphasis 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 1 Measurement Units Ground Unit GND 0 00 sane ee tee A ed Oh eal ee aah Shs 1 3 Source Monitor Unit SSMU 0 0 ccc cette eee 1 4 Voltage Source Unit VSU 00 annaa 1 16 Voltage Monitor Unit VMU 0 0 tees 1 17 Pulse Generator Unit PGU 0 0 n nee 1 20 2 Measurement Mode Sweep Measurement Mode 0 cece eee eee eens 2 3 Basic Sweep Measurement 0 0 0 cece cece tees 2 4 Subordinate Sweep Measurement 0 0 00 c cece ee eee eee 2 7 Synchronous Sweep Measurement 00 0 eee cece eee eee 2 9 Pulse Sweep Measurement 0 0 00 eee cette en eee 2 11 Sampling Measurement Mode 00 cee cece cece eee eee 2 14 Available Units 0 0 eee cece cee eee cette eee nnee 2 14 Sampling Interval and Measurement Time 2 000000 2 15 Sampling Measurement Data 0 0 0 c ccc eee 2 18 Sampling Completion saunan anaa 2 20 Source Output Sequence and Time Origin 0 00 0 e eee 2 22 Linear Sampling Measurement 0 00 cece
67. MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP secondary softkey To move marker fast Press Fast front panel key of the MARKER CURSOR key group while rotating rotary knob 5 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Example Analyzing Measurement Results Manual Analysis The following figure shows an example to move marker to desired measurement point and to set the Y1 axis marker to active MARKER A GRAPHILIST GRAPHICS 751 2530mv SHORT 10 00UA 93Aug09 06 18PM 1 0342UA 1 00 decode decode div div 100 f 100 f 0 000 VBE V 100 m div 1 00 ARKER MAX TER POLATE OFF DIRECT ARKER CURSOR ARKER SIS AUT ANALY ie CURSOR OFF AXIS Y1 LINE SCALING DISPLAY SETUP SWEEP SETUP TIMING SETUP CONST SETUP UGTO2001 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 5 Analyzing Measurement Results Manual Analysis To Specify between Measurement Points on Curve 1 Select MARKER CURSOR primary softkey 2 Set MARKER secondary softkey to ON Marker and marker coordinates are displayed Selecting MARKER toggles between ON and O
68. MEASURE SWEEP SETUP screen has no meaning Initial value 0 Step value automatically set 0 to VARI range number of steps Number of Steps For the VAR1 channel you set the number of steps on the KNOB SWEEP screen So for the knob sweep function the number of steps for VARI has no relation to the NO OF STEP setting on the MEASURE SWEEP SETUP screen Start Value The start value is always 0 and does not depend on the polarity You cannot set the start value So the START setting on the MEASURE SWEEP SETUP screen has no meaning for the knob sweep function Stop Value Stop value is always step value x number of steps You cannot set the stop value The measurement is continuously repeated from 0 to the stop value until the Stop front panel key is pressed or the KNOB SWEEP screen is changed to another screen Measurement Range If SMU is the measurement channel Compliance range is used That is the measurement range is set to the lowest range that includes the compliance value that is set on the MEASURE SWEEP SETUP screen For details about compliance range refer to Compliance Range on page 3 56 If VMU is the measurement channel 20 V range is used for the grounded measurement mode and the 2 V range is used for the differential measurement mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 15 Measurement Functions Knob Sweep Function KNOB SWEEP screen
69. N 3 5 i Trigger Trigger Trigger Trigger Trigger if Total Sampling Time TOTAL SAMP TIME j A TOTAL SAMP TIME is one of the stop condition J Starts Sampling Stops Sampling 7 2 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode Sampling measurement is executed as explained below pe Forces constant current constant voltage or pulsed constant bias Waits hold time Triggers one point measurement Measurement unit executes measurement Measurement result data is stored in memory Triggers one point measurement Interval of trigger is same as Sampling Interval Case 1 Measurement unit executes measurement if it is ready to measure Measurement result data is stored in memory Case 2 Measurement unit waits next trigger if it is busy or in measurement Repeats steps 5 and 6 until that a sampling completion condition is satisfied In Figure 2 6 sampling measurement stops when the completion condition total sampling time is satisfied Number of measurement data stored in memory depends on the sampling completion condition Maximum number is specified by the NO OF SAMPLES field of the MEASURE SAMPLING SETUP screen However the measurement will be immediately stopped if a sampling completion condition is satisfied before reaching the maximum number For the sampling completion condition see Sampling Completion on page 2 20 Agilent 4155B 4156B User s Guide V
70. PURGE the file or directory Unable to purge the file or the directory for example permission denied F F Fi F F er error er GrrOr er error GE CELLO e error The directo No DISK in Initia izati on ry is not empty the drive failed Invalid DISK volume label DISK vo ume abe is undefined Volume label is undefined or was not found Verify the volume number is set correctly Fi H er SFrOL Sr Error er error GE CrErors er Srror Ck GLTOr er error GE CEror s er error Cr SErOr ss er error Cr CEEOL s er Error er SEror CL CGEroes er Orror OLD TM must VAR1 output DISK is not initialized Checkread error Bad HFS DISK DISK is ful Directory File name File name L is full is undefined is wrong The file name is already used Bad device type Unable to use wildcard Operations failed The target type is wrong The file is protected DISK is protected ystem error Unable to ve ify Unable to copy between LIF DOS Reason Unknown be gt 0 when INIT INT gt 2ms value is out of range Agilent 4155B 4156B User s Guide Vol 2 Edition 5 282 284 286 288 289 290 292 293 300 301 302 303 305 306 If You Have A Pr
71. Primary Synehroneus Synchronous Secondary Secondary Constant Constant re UUU e UBD02005 120x00 For the pulse sweep measurement the delay time of the primary sweep source is ignored and each step of the primary sweep source is synchronized with output of the SMU pulse source Measurements are made during the pulse output The pulse output of PGU is not synchronized with any other source Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 11 Figure 2 5 Measurement Mode Sweep Measurement Mode SMU Pulse hold time pulse period ulse width step value of Pulse sweep source Sweep Source base valie o output value of Pulse constant source Constant Source base valie l UGDA2008 120x80 Parameters Specify SMU pulse parameters MEASURE SWEEP SETUP Parameter Description pulse period SMU forces the next pulse after specified pulse period Allowable range 5 ms to 1 s Resolution 100 us pulse width Time from when SMU output starts to change from base value to time when SMU starts to return from peak value Measurements are made while the peak value is output Allowable range 0 5 ms to 100 ms Resolution 100 us base value The base output value of the SMU pulse Be aware that if any of following are true pulsed SMU channel may not output the pulse period and pulse width you specified
72. SMU Source Monitor Unit SMU The source monitor unit SMU has the following three modes e voltage source and current monitor mode V source and I monitor mode e current source and voltage monitor mode I source and V monitor mode source common mode SMU can output constant or pulsed source Only one SMU can be set to pulsed source Figure 1 2 shows a simplified SMU circuit diagram Figure 1 2 Simplified SMU Circuit Diagram V Source Mode HO Output Switch oe os SMU NFORCE ET ar V GI Source Mode COMMON uUGD02002 1 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Source Monitor Unit SMU Three types of SMUs are available e HRSMU high resolution SMU e Force and measure up to 100 V or 100 mA e Maximum output power 2 W e Minimum current measurement range 10 pA with 1 fA resolution e Only the 4156B has HRSMUs The 4156B has four HRSMUs e MPSMU medium power SMU e Force and measure up to 100 V or 100 mA e Maximum output power 2 W e The 4155B has four MPSMUs and the 41501A B can be equipped with either two MPSMUs or one HPSMU e HPSMU high power SMU e Force and measure up to 200 V or 1 A e Maximum output power 20 W e Only the 41501A B has HPSMU The 41501A B can be equipped with either two MPSMUs or one HPSMU HPSMUs and HRSMUs can be connected to test devices by Kelvin connection Eac
73. SMUs automatically take longer integration time to perform accurate and stable measurements To solve this problem e Measure current using a fixed range that is more than 10 uA The measurement will be performed in the specified integration time If you set many measurement channels measurement takes a longer time To solve this problem e Decrease measurement channels to reduce measurement time Note that the number of measurement channels automatically increases if you do both the following force voltage from channels that are connected to R Box and display the voltage values or use voltage values in user functions The channels automatically measure current which is used to compensate the voltage values Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 9 If You Have A Problem When You Make A Measurement If Measurement Damages the Device under Test When Using SMU When performing breakdown measurements by using SMU DUTs may be damaged When voltage is forced from an SMU the current is limited by the compliance setting which prevents the DUT from being damaged by a large current But when the current rapidly increases the current limiter in the SMU cannot follow the rapid current increase so a large amount of current may flow through the DUT for a moment which may damage the DUT To solve this problem e Insert a protecting resistor as close as possible to DUT You can also use a resistor of Agilent 16441A R Box
74. Same as POWER COMP OFF Example The following figure shows an example to set both X axis and Y axis display regions to positive KNOB SWEEP 94JANO1 01 30PM X AXIS CURSOR 500 0000mV 5 000000mA REGEO Y AXIS mA REGION 10 00 X AXIS DISPLAY NORMAL IF Y AXIS 4 000 DISPLAY Idiv NORMAL yaa Moe a 0000 0000 VF 1000 div V 1 000 Y AXIS SETUP VAR2 CONST ASSIGN COPY SETUP SETUP UGTO1034 100 70 4 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Knob Sweep Measurements To Stop Knob Sweep Measurement To stop the knob sweep measurement press Stop front panel key This returns the 4155B 4156B operation state to the previous state For example if the knob sweep measurement starts from the idle state the operation state returns to the idle state Starting knob sweep again To start the knob sweep measurement again press the following front panel key Single The knob sweep measurement will start from the point where it was stopped Green Single The knob sweep measurement will start from 0 V or 0 A Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 39 Making a Measurement Sampling Measurements Sampling Measurements This section covers the tasks for sampling measurements The basic procedure to test your DUT is as follows 1 Con
75. State Stress Force State Standby State Idle State In the idle state the 4155B 4156B is not doing anything no measurements forcing current or voltage forcing stress An 4155B 4156B is in the idle state after applying power In this state output switches of all the measurement units are on and all of the units output 0 V In this state you can modify any setting items on the setup screens The following are the conditions of each unit and accessories in idle state SMU 0 V output at 20 V range and 100 uA compliance at 100 uA range VSU 0 V output at 20 V range PGU 0 V dc output at 20 V range output impedance LOW GNDU 0 V output 16441A R Box 0 Q is connected 16440A selector switching condition is SMU Measurement State In the measurement state an 4155B 4156B performs sampling or sweep measurements The output switches are off for units that do not have entries in the CHANNELS table of the CHANNELS CHANNEL DEFINITION screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 31 Measurement Functions Operation States Stress Force State In the stress force state the 4155B 4156B outputs stress The output switches are off for units that do not have entries in the CHANNELS table of the STRESS CHANNEL DEFINITION screen Standby State In the standby state the 4155B 4156B does not perform measurements or stress force but it outputs dc bias and or pulses using the measurement units de
76. You can set SMU filter to on or off for sampling measurements or stress forcing If filter is on noise and overshoot are decreased but settling time takes longer sampling measurement You set the FILTER field on the MEASURE SAMPLING SETUP screen If you set initial interval to a short time and if filter is set to ON be aware that settling time takes several ms stress force You set the FILTER field on the STRESS STRESS SETUP screen If you set dc stress to short stress force time set OFF in this field if you want the stress signal to be more pulsed shaped sweep measurement When you perform sweep measurements the SMU filter conditions are automatically set as follows For a pulsed SMU Filter is off For non pulsed SMUs Filters are on Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 65 NOTE NOTE Measurement Functions Zero Offset Cancel Zero Offset Cancel The 4155B 4156B has zero offset cancel function This function allows you to minimize measurement error offset caused by resistance and leakage current of cables prober and so on You can use the zero offset cancel function for e low current measurement measurement range lt 10 nA by SMUs e differential mode V measurement by VMUs To Measure Offset Data To measure the offset data do following 1 Select the measurement range in the MEASUREMENT RANGE table on the MEASURE MEASURE SETUP screen See Table 3 10 for the ranging mode avail
77. according to automatic analysis setup This section covers the following automatic analysis tasks e To Draw Line by Specifying Two Points on page 5 28 e To Draw Line by Specifying Gradient and One Point on page 5 30 e To Draw Tangent to Specified Measurement Point on page 5 32 e To Draw Regression Line by Specifying Two Points on page 5 34 e To Display Marker at Specified Point on page 5 37 Execution Timing of the Automatic Analysis Function You set up automatic analysis on the DISPLAY ANALYSIS SETUP screen Automatic analysis function is executed e after a measurement is executed by Single or Append front panel key e when the Stop front panel key is pressed to stop the measurement e after each measurement execution before the next measurement execution when you select the AUTO ANALYSIS secondary softkey after selecting the MARKER CURSOR primary softkey on the GRAPH LIST GRAPH or GRAPHI LIST LIST screen e when you return to the GRAPH LIST GRAPH or GRAPH LIST LIST screen after changing the condition of the automatic analysis function on the DISPLAY ANALYSIS SETUP screen If you define both the automatic marker positioning and automatic line drawing functions the functions are executed in the following order 1 Automatic line drawing for LINE1 2 Automatic line drawing for LINE2 3 Automatic marker positioning Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 27 Analyzing
78. area select the secondary softkey for the desired variable name or user function name to be used for EVENT comparison 5 In THRESHOLD field of STOP CONDITION area enter the threshold value for the name selected in the previous step 6 In EVENT field of STOP CONDITION area select e Val gt Th secondary softkey to stop the sampling when the sampled value is greater than the threshold value e Val lt Th secondary softkey to stop the sampling when the sampled value is less than the threshold value e Val gt Th secondary softkey to stop the sampling when the absolute sampled value is greater than the absolute threshold value e Val lt Th secondary softkey to stop the sampling when the absolute sampled value is less than the absolute threshold value 7 In EVENT NO field enter a value which specifies the sampling to stop when EVENT occurs EVENT NO times If you select DISABLE in the ENABLE DISABLE field the sampling measurement continues until Stop key in the MEASUREMENT key group is pressed e Specified total sample time has elapsed e The 4155B 4156B receives GPIB command to stop sampling e Anemergency condition occurs on the 4155B 4156B e Interlock terminal opens due to high voltage See Chapter 2 of User s Guide General Information Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 47 Making a Measurement Sampling Measurements Example The following figure shows an example setup of sto
79. b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter When SMU is pulsed source set pulse parameters in following ranges Pulse width Pulse period 0 5 ms to 100 ms 100 us resolution 5 ms to 1 s 100 us resolution where pulse period pulse width 4 ms Be aware that if any of following are true pulsed SMU channel may not output the pulse period and pulse width you specified e Measurement range differs from compliance range lowest range that includes compliance e Ranging mode is set to auto range or limited auto range e Multi channel measurement is set Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Measurement Units Source Monitor Unit SMU Compliance Range for Pulsed SMU If you use an SMU as a pulsed source the compliance setting range is as follows current compliance For SMU used as pulsed voltage source you can set current compliance as follows compliance range al NAN AAS 20u KA NCA WAS 2n J 0 2 20 Vp p YEbez009 0 lt Vp o lt 2V I gt 2 nA 2 lt Vp p lt 20 V li gt 4 ee 22E 6 20 lt Vp p gt 204 voltage compliance If you use SMU as pulse current source you can set voltage compliance as follows When I lt 10 HA voltage compliance must
80. be 2 V or less When I gt 10 uA voltage compliance ranges are same as in tables on previous pages If SMU is pulsed constant source I is peak or base current whichever has larger absolute value If SMU is pulsed sweep source I is start or stop value whichever has larger absolute value Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 15 Measurement Units Voltage Source Unit VSU Voltage Source Unit VSU Figure 1 6 shows a simplified voltage source unit VSU circuit diagram Figure 1 6 Simplified VSU Circuit Diagram Voltage Source Output Switch wer ae a o SK ar VV COMMON UGDO2006 VSU can force up to 20 V e Only range available is 20 V range with 1 mV resolution so output range is automatically set to 20 V e Current compliance is automatically set to 100 mA 1 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Voltage Monitor Unit VMU Voltage Monitor Unit VMU Voltage monitor unit VMU has two measurement modes grounded or differential Grounded mode uses one VMU Differential mode uses two VMUs Figure 1 7 shows a simplified VMU circuit diagram Figure 1 7 Simplified VMU Circuit Diagram A E Grounded Mode Q W wo MUI Output Switch SIN Ditierenti Mode V ee V Differential Mode P NMU2 TKR o 7 lt To Output Switch NIN Grounded Mode V COMMON UGDO2 007
81. be same Output Values of non Standby Channels Following table shows the output value of non standby channels in the standby state Function of Unit Output Value Range Voltage Output 0V Output Range used in the Current Output Output value in the previous state previous state Voltage Measurement Output Range used in the Current Measurement previous state a outputs the latest value of previous state For example if previous state was measurement state and latest value of VARI was stop value the stop value is output for VARI during standby 3 28 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Standby Function Output Sequence of Standby Channels Output sequence of measurement units is defined on the MEASURE OUTPUT SEQUENCE screen Example output sequence setup is shown in the following table and Figure 3 2 shows timing diagram of this example Unit Output Sequence STBY SMU1 1 ON SMU3 2 OFF SMU4 3 OFF PGU1 4 ON PGU2 5 ON SMU2 6 ON Figure 3 2 Example of the Output Sequence of the Standby Channels Measurement Idle State Standby State State Standby State Idle State SMU1 L PGU1 L PGU2 4 m SMU2 L Pulse Start 2 Pulse Stop SMU3 J SMU4 an output or
82. busy Cannot execute US US42 command Unable to move to FLEX command control mode because the US or US42 command cannot be executed while system is busy making measurement operating file functions executing calibration or diagnostics printing emergency and so on Change display page DISP OFF 0 is not allowed Unable to enter the DISP OFF or 0 command when the 4155B 4156B screen displays System screen group or KNOB SWEEP screen Enter DISP ON 1 to execute this command Unable to enter the PAGE KSW command group PAGE SCON KSW command or DIAG TEST test_no test_no 201 to 413 command when the 4155B 4156B screen is set to the update disable state by the DISP OFF or 0 command Unable to transfer data Name buffer full Cannot maintain the buffer required for transferring data File operation was interrupted by system call The lpr driver received a signal from the system which interrupted an open read or write operation Agilent 4155B 4156B User s Guide Vol 2 Edition 5 352 353 354 355 357 358 363 364 365 366 367 If You Have A Problem If Errors Occur Network is down after receiving a reset The network is down after receiving a reset Try again after network recovers Network is down No response from server Network is down There in no response from the server Operation canceled Operation canceled by user For example an abort command was se
83. cece eee 2 24 Thinned out Sampling Measurement 0 0 0 0 cee eee eee 2 27 Logarithmic Sampling Measurement 0 0 0 e eee eee eee 2 30 3 Measurement Functions Stress Force Function 0 eee cee eee tence ens 3 3 Stress Output Channels 0 0 c cece cece eee T 3 4 Stress Moder idees eenia aha e a ea eee hs Ve eee el 3 6 Stress Force Sequence cece ccc teen een ene nance 3 7 Stress Stop Function at Abnormal Status 0 0 0 eee ee eee 3 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 1 Contents Knob Sweep Function 00 0 ccc eee tenes 3 11 Available units and functions 0 00 0000 c ec eeeeeenee 3 11 Normal Sweep and Knob Sweep Measurements 200005 3 12 Features of Knob Sweep Function 00 ce cee eee ee ee eee 3 13 KNOB SWEEP SCreeit nus ces nak eka disk gee Oe ek ones A ae 3 16 Y AXIS ASSIGN Softkey oaeiae ccc cee eee ee 3 17 SETUP COPY Softkey eies r bcd Git deed ta eine da dda eda ae 3 17 DISPLAY SETUP Softkey cosecha unrar a p cece eee nee 3 18 VARI SETUP Softkey 0 0 ccc ccc r aa aer aE 3 20 VARZ SETUP Softkey ace cece eeuig break gale nae pnates puke bye ay 3 23 CONST SETUP Softkey 0 0 0 0 ccc cece n nee 3 25 Analysis of the Knob Sweep Measurement Results 3 26 Standby Functions so cg ean tae ian da hee ta dem pe Eee 3 27 Standby Channels 1 0 2 0 0 cc ccc eect
84. change the measurement channel To restart measurement press the Single front panel key If you connect R box to the VAR1 channel and set the VAR1 to V force mode the measurement channel is automatically decided to the VARI channel In this setup this softkey is not be displayed Y AXIS ASSIGN primary softkey displays secondary softkeys used to select the measurement channel The measurement variable names of measurement channels are labeled on the softkeys User function is not available for the knob sweep function So there is no user function variable in the softkey label When you select a secondary softkey the maximum absolute value s of the Y axis are changed to compliance value of the selected measurement channel SETUP COPY Softkey This softkey is used to memorize measurement setups used in the knob sweep measurement mode This function allows you to copy and use the setups in the normal sweep measurement mode 1 Select this softkey to memorize the measurement setups 2 Quit the knob sweep measurement mode using a PAGE CONTROL group key Then the measurement setups are copied to the normal sweep setup screens The information memorized and copied is as following e Axis variables axis values and GRID settings copied to the DISPLAY DISPLAY SETUP screen Settings of VARI VAR2 CONST copied to the MEASURE SWEEP SETUP screen Knob sweep measurement setup cannot be directly stored into a file This function allow
85. changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 114 of the range then the unit performs the measurement If the measurement value is less than 1 of the present range and if present range is 100 uA or higher range and if the present range is two or more ranges above the specified range the range changes down two ranges instead of one range e 100 nA to 100 pA The unit changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 114 of the range then the unit performs the measurement 10pA The unit changes to the next higher range when the measurement value exceeds 104 of the present range Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 55 Measurement Functions Measurement Ranging Mode Compliance Range Compliance range is available for knob sweep measurement only For details about setting compliance refer to Compliance on page 3 57 V measurement The monitor unit measures at the lowest range that includes V compliance For VMUs compliance range is automatically set as follows grounded mode 20 V differential mode 2V I measurement The monitor unit measures at the lowest range that includes I compliance Fixed Range The monitor unit measures at the specified range only For current measurement if specified range is greater than the lowest range th
86. defined to be the value that is output if the PGU output terminal is open So when a load is connected and PGU impedance is set to 50 Q the actual output value will be different For example if connected load is 50 Q specified PGU output impedance is 50 Q and specified output value is 2 V the PGU outputs 1 V Table 1 14 shows the PGU setting ranges and resolutions PGU Setting Ranges and Resolutions Peak Setting Base Setting i Maximum Range Value Resolution b Value Current 20 V o lt v lt 20v o lt v lt 20v 4mv 100 mA 40 V o lt v lt 40v o lt vl lt 40v 8mv 100 mA a Maximum peak to peak voltage is 40 V b If pulse width lt 1 ms pulse duty is lt 50 and average current output is lt 100 mA the peak current output can be up to 200 mA 1 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 1 15 Measurement Units Pulse Generator Unit PGU If the impedance of the load connected to the PGU differs from the specified impedance in the IMPEDANCE field on the MEASURE PGU SETUP screen or the STRESS STRESS SETUP screen the average output current may exceed 100 mA If so a warning message is displayed When you use two PGUs the outputs are always synchronized with each other The PGUs cannot be synchronized with the other measurement units The following describe each pulse parameter For more details see MEASURE PGU SETUP screen in Chapter 6
87. does not warrant that the operation of Agilent Technologies products will be uninterrupted or error free If Agilent Technologies is unable within a reasonable time to repair or replace any product to a condition as warranted customer will be entitled to a refund of the purchase price upon prompt return of the product The Agilent Technologies products may contain remanufactured parts equivalent to new in performance or may have been subject to incidental use The warranty period begins on the date of delivery or on the date of installation if installed by Agilent Technologies If customer schedules or delays Agilent Technologies installation more than 30 days after delivery warranty begins on the 31st day from delivery Warranty does not apply to defects resulting from a improper or inadequate maintenance or calibration b software interfacing parts or supplies not supplied by Agilent Technologies c unauthorized modification or misuse d operation outside of the published environmental specifications for the product or e improper site preparation or maintenance Agilent 4155B 4156B User s Guide Vol 2 Edition 5 To the extent allowed by local law the above warranties are exclusive and no other warranty or condition whether written or oral is expressed or implied and Agilent Technologies specifically disclaims any implied warranties or conditions of merchantability satisfactory quality and fitness for a particular purpos
88. fo fe e _ GNDU e 2 EN een n PGU e e e n a means This is not available for sampling measurement means This is available for sampling measurement means This is not available for this unit For sampling measurements only the PGU output can be pulsed The pulse output timing from PGU is not synchronized with the timing of sampling measurement 2 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode Sampling Interval and Measurement Time When the sampling interval enough longer than the actual measurement time measurement unit repeats measurement every specified sampling interval However if the sampling interval is less than the measurement time measurement unit cannot repeat measurements every specified interval For example if the measurement time is one and a half the specified sampling interval the interval of measurement is two times the sampling interval See Figure 2 6 which explains the operation of the sampling measurement Measurement time depends on the measurement condition integration time measurement range and so on So if you want to execute sampling measurement with the specified sampling interval you need to know the actual measurement time upon your measurement setup and set the sampling interval value enough longer than the actual measurement time You can see typical measurement time by repeating the sampling m
89. following SMUs you can set 0 Q only e SMU that is set to standby channel e SMU that is set to COMMON output mode If the 4155B 4156B is on and an emergency occurs the resistance value changes to 1 MQ There is a possibility that the 4155B 4156B cannot perform measurement circumstances If you measure device characteristics including negative resistance over MQ there is a possibility that they cannot measure it If you connect the R Box to SMUs other than described above resistance values are not compensated for automatically You need to compensate for the resistance values manually such as by using a user function or calculation in the IBASIC program To perform automatic compensation of R Box the 4155B 4156B automatically uses 1 SMU to measure current through the R Box So if the SMU forces voltage and monitors voltage value or use the monitored value for user function calculation the 4155B 4156B need additional 1 measurement channel other than the measurement channels defined in the CHANNELS CHANNEL DEFINITION screen 3 50 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 3 4 Measurement Functions R BOX Control Circuit Diagram Figure 3 8 shows a simplified circuit diagram of an 16441A R Box Table 3 4 shows switching conditions for each setting Switching Conditions of the 16441A R Box Switches Settings Swl SWw2 SW3 Sw4 oQ ON ON OFF OFF 10 kQ OFF OFF OFF ON 100 kQ OFF OFF ON OFF
90. following softkeys appear in the primary softkey area CHANNEL STRESS STRESS PREV NEXT DEF SETUP FORCE PAGE PAGE e Select CHANNEL DEF softkey to move to the STRESS CHANNEL DEFINITION screen Select STRESS SETUP softkey to move to the STRESS STRESS SETUP screen Select STRESS FORCE softkey to move to the STRESS STRESS FORCE screen When you press the Stress front panel key in the MEASUREMENT key group the STRESS STRESS FORCE screen appears and stress forcing starts 6 74 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization STRESS Screen Group STRESS CHANNEL DEFINITION screen STRESS CHANNEL DEFINITION S4JANGL OL OPM user comment f device 1 ehannel length 1 NE CHANNELS SMJIPG SELECTOR NSYNC MEASURE STRESS MEASURE STRESS INIT NAME MODE NAME FOTN 1 SMU POU SMJ MP Y1 2 SMU POU SMJ2 MP Y2 3 OPEN OPEN SMJS 2 MP VS 4 OPEN PEN SMJ4 MP SMJ5 MP SMUG MP VSUL Ld vWaU2 POUL VPULSE SYNG TRIGGER SETUP P2 YPULSE TNE DISABLE SNDU POLARITY POSITIVE DELETE Row SYNC oe STRESS STRESS NEXT NER SETUP FORCE PAGE UGDSSO13 100x60 On the STRESS CHANNEL DEFINITION screen you define how to use the channels for stress force how to control the SMU PG selector and trigger usage in the stress force state User
91. function is not available 2 Set the ZERO CANCEL field to ON Offset cancel is not performed for the measurement paths set to OFF in the ZERO CANCEL table 3 Press Single Repeat or Append front panel key to execute measurement The offset cancel is automatically performed while measurement is performed The measurement data is automatically compensated by using the offset data And the compensated data is displayed on the GRAPH LIST screen To disable the offset cancel function select the ZERO CANCEL ON OFF softkey on the ZERO CANCEL field It toggles ON and OFF If you select OFF all paths in the ZERO CANCEL table are set to OFF If you select ON only the available paths are set to ON If measurement range setup is changed to a lower range than the range at which the offset data was measured then offset cancel is not performed for the unit For example if HRSMU measurement range is changed to auto range from 1 nA fixed range after measuring offset data in 1 nA range OFF is displayed in the unit s ZERO CANCEL field Because it is possible that auto range will use range lower than 1 nA 3 68 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement This chapter describes how to perform sweep measurements sampling measurements and stress force and consists of the following sections For Connecting DUT Swee
92. interface controller failed self test This test sets some settings then checks the status 23061 Host controller sends a command and does not receive acknowledge from SMU controller 23062 Host controller failed receiving response from SMU controller by sending a command 23071 SMU controller ROM failed checksum test 23072 SMU controller on board SRAM failed read and write test 23073 SMU controller internal SRAM failed read and write test 23074 SMU controller internal timer failed self test 23075 SMU controller timer does not operate with correct frequency 23076 SMU controller failed power on self test 23077 SMU controller test gets timeout 23080 Access to graphics system processor failed read and write test 23091 Graphic memories SRAM failed read and write test 8 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 23092 24017 24018 24021 24022 24041 24042 24051 24052 24062 24063 24064 24065 24071 24072 24073 24100 24120 24130 If You Have A Problem If Errors Occur Graphic memories VRAM failed read and write test Parallel interface failed data line test Parallel interface failed control line test Trigger output test failed or reached timeout Trigger input test failed Flexible disk drive controller test failed Flexible disk drive 5 V power line test failed Flexible disk drive failed diskette change test Flexible disk drive failed read and write test 12 V source on post regulator i
93. is up Unable to print out Not enough device space Unable to print out because the device connection failed There is not enough available space in the buffer for the communication lpr failed data transfer Data size mismatch Unable to print out because the lpr server failed data transfer The size of the data was not the expected size lpr Network interface is down Try again The network interface cannot be found because the network interface for the lpr server is down Unable to print out Reason unknown Network connection failed The reason for the failure is unknown Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 33 If You Have A Problem If Errors Occur 337 338 339 340 344 345 346 350 351 8 34 Cannot set 0 0 0 0 for 4155 4156 IP address When a valid host name for the 4155B 4156B network setup is specified the IP address of the 4155B 4156B cannot be set to 0 0 0 0 Cannot set O zero for 4155 4156 User ID When a valid host name for the 4155B 4156B network setup is specified the User Id of the 4155B 4156B cannot be set to 0 zero No response from NFS Try again There is no response from the Network File System NFS when trying to mount a network disk Verify the network is operating properly and the file export executed properly Host name must be lt 15 alphanumeric character The 4155B 4156B host name must be 15 or less alphanumeric characters System
94. like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product e Herstellerbescheinigung GEAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 e Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70dB operator position normal operation per ISO 7779 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Printing History Edition 1 August 1997 Edition 2 September 1997 Edition 3 October 1998 Edition 4 January 2000 Edition 5 May 2000 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 In This Manual This manual provides information for all parts and functions of Agilent 4155B 4156B and consists of the following chapters Measurement Units This chapter provides information about the measurement units Measurement Mode This chapter provides information about sweep and sampling measurements Measurement Functions This chapter provides information about the measurement functions Making a Measurement This chapter describes how to perform measurements Analyzing Measurement Results This chapter describes how to analyze measurement results manually and automatically Screen Organization This chapter provides information about each user interface that is displayed on the instrument screen Data Variable and Analysis Function This chapter provides information about data variables and analysis functions
95. not be zero Allowable range of stop depends on output range of sweep source For output range of each measurement channel refer to Chapter 1 e For linear sweep step is step increment of sweep Number of sweep steps is calculated from start stop and step Calculated number of steps must be in range 2 to 1001 e For logarithmic sweep step is invalid Number of sweep steps is calculated from start stop and number of steps in one decade which is specified by og parameter Calculated number of steps must be in range 2 to 1001 Compliance value of sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of sweep source For the compliance range of each measurement channel refer to Chapter 1 Optional Power compliance value of sweep source This parameter applies to SMU only Allowable range depends on power compliance range of sweep source For details refer to Chapter 3 Time required for DUT to settle after forcing start value Allowable range is 0 to 655 35s Resolution 10 ms Time required for DUT to settle after stepping the output Allowable range 0 to 65 535 s Resolution 100 us Refer to CHANNELS CHANNEL DEFINITION screen and MEASURE MEASURE SETUP screen in Chapter 6 for setting up these parameters 2 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 2 2 Measurement Mode Sweep Measurement Mode Subordinate Sweep Measurement
96. operation The file is already open Close the file and retry the operation Unable to operate the device File is open Unable to perform the requested file operation on the specified device because the device has a file open e error DISK or DISK drive may be broken ISK or DISK drive hardware may be in need of service er error DISK record is not found e error DISK record address error nable to find record because the mass storage device has a problem er error DISK record data error a a oe pug e error DISK system error The hardware or the device are causing a problem File error Bad volume label The mass storage has an incorrect volume label Verify the volume number is set correctly System error No interface found The network interface was not found because of a wrong select code setup Verify the select code is set correctly File error Device timeout Time out occurred on the device Filer error Undefined I O path Filer error Permission denied File error Too many files open Unable to open multiple files at the same time Close the file that is currently open before opening a second file Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 29 If You Have A Problem If Errors Occur 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 241 242 243 244 245 246 265 280 8 30 Unable to
97. process has already been bound to the address The current process must finish before the new process can use the address Change dir failed File is not a directory Change directory failed because you specified a file not a directory Unable to open file Deadlock occurred Unable to open the file Deadlock occurred in the resource where you tried to open the file Agilent 4155B 4156B User s Guide Vol 2 Edition 5 326 327 328 329 330 331 332 334 335 336 If You Have A Problem If Errors Occur Device not present Unsupported file type Device or driver was not found to open the file Unable to open file because the file type is not supported Interrupted system call The lpr driver received a signal from the system that interrupted the data transfer from the lpr driver lpd time out occurred Try again A time out occurred when trying to connect to the Ipd server because the Ipd server did not respond lpd print server cannot be recognized Unable to recognize the Ipd print server Verify the address setup or setup syntax is correct lpd server connection failed or was denied The Ipd server connection failed or was denied because the Ipd server was already connected or the server was blocked lpr data transfer failed Data transfer from the lpr server failed because lpr data communication was disconnected Verify the network is working properly and check to see if the server
98. range VMUs and VSUs failed differential 2 V range self test This test measures 2 V by VMUs in differential mode VSU1 is connected to VMU1 and VSU2 is connected to VMU2 VSU1 forces 0 V VSU2 forces 2 V VMUs and VSUs failed differential 2 V range self test This test measures 0 V by VMUs in differential mode VSU1 is connected to VMUI and VSU2 is connected to VMU2 VSU1 forces 0 V VMUs and VSUs failed differential 0 2 V range self test This test measures 0 V by VMUs in differential mode VSU1 is connected to VMUI1 and VSU2 is connected to VMU2 VSU1 forces 0 V VMUs and VSUs failed differential 2 V range self test This test measures 0 V by VMUs in differential mode VSU2 is connected to VMU and 2 and forces 0 V VMUs and VSUs failed differential 0 2 V range self test This test measures 0 V by VMUs in differential mode VSU2 is connected to VMU and 2 and forces 0 V SMU failed function check SMU failed CMR Common Mode Rejection amp calibration SMU failed oscillation detector test SMU failed V set and V measure calibration SMU failed I set and I measure calibration SMU failed I bias test SMU failed V switch test PGU1 failed pulse gain calibration PGU2 failed pulse gain calibration PGU1 failed pulse offset calibration PGU2 failed pulse offset calibration PGU1 failed voltage calibration of base value PGU2 failed voltage calibration of base value PGU1 failed leading time calibration
99. respectively Data variable display This area displays the numerical value of up to two variables that you set up on DISPLAY DISPLAY SETUP screen These are values at the marker position Plotting area In this area measurement curves are drawn according to measurement results You can analyze measurement results by using lines or marker in this area If you use lines the X and Y intercept points and gradient are displayed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 47 Screen Organization GRAPHI LIST Screen Group AXIS Y1 softkey Select AXIS primary softkey to toggle active axis between the Y1 and Y2 axes this softkey is displayed only if Y2 axis is used The active axis name is displayed on the AXIS primary softkey For tangent or regression lines the active line selected by LINE SELECT softkey is independent for each axis MARKER CURSOR softkey Select MARKER CURSOR primary softkey to display secondary softkeys for performing analysis with marker and cursor MARKER softkey Select MARKER secondary softkey to toggle the marker on and off Marker status is displayed on MARKER secondary softkey If on marker is displayed in the plotting area If off marker is not displayed For Y1 axis marker is a circle o For Y2 axis marker is an asterisk Active marker is highlighted for the axis that is selected by AXIS softkey The 4155B 4156B remembers the location of marker That is when marker is turned off
100. s CHANGE DURATON 9 0010 xSTATUS 5 0000 s 50 00 RESET ACCLMULATED STRESS SAIS 123 4500 s RESET ACOM STRESS CHANNEL STRESS S FRESS PREV DEF SETUP Forse PAGE UGDOSO1G 100x50 On the STRESS STRESS FORCE screen you can monitor the stress status User Comment In this field you can enter a desired comment The comment you enter here is also displayed on the other STRESS screens Select CHANGE COMMENT secondary softkey to enter or edit the comment in this field When you select this softkey you can enter or edit the comment in the data entry area Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 83 Screen Organization STRESS Screen Group STRESS DURATION STRESS DURATION field shows duration setting specified on the STRESS STRESS SETUP screen If the STRESS MODE is set to pulse count mode in the STRESS STRESS SETUP screen the duration is calculated by multiplying the pulse count by the pulse period Depending on the stress mode select one of the following e CHANGE DURATON secondary softkey to change the stress duration e CHANGE PLS CNT secondary softkey to change the pulse count The stress mode and duration or pulse count were originally set on the STRESS STRESS SETUP screen The present stress duration or pulse count is shown on the softkey When you select the softkey the present value appears in the data entry area You change t
101. set the event type as follows Val gt Th event occurs when NAME value is greater than THRESHOLD Val lt Th event occurs when NAME value is less than THRESHOLD Val gt Th event occurs when absolute NAME value is greater than absolute THRESHOLD value Val lt Th event occurs when absolute NAME value is less than absolute THRESHOLD value EVENT NO EVENT NO specifies sampling to stop if event occurs EVENT NO times EVENT NO can be an integer from 1 to 200 6 24 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group CONSTANT This is for setting the output parameters of the constant source units UNIT NAME and MODE are defined on the CHANNELS CHANNEL DEFINITION screen e SOURCE In the SOURCE field you specify the output value e COMPLIANCE In the COMPLIANCE field you specify the compliance value If a VSU is used for the constant output unit this field cannot be set compliance value is fixed to 100 mA If you define more than four constant output units first four units appear in CONSTANT fields To show other units select NEXT UNIT secondary softkey To scroll units put field pointer in most right or left column then press the right arrow or left arrow MARKER CURSOR front panel key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 25 Screen Organization MEASURE Screen Group MEASURE PGU SETUP screen MEASURE PGU SETUP S4JANO1 01 30PM user comment
102. shows all names for the measurement units which you defined on the CHANNELS CHANNEL DEFINITION screen For example when the SMU 1 is set to V mode current value is measured So the current name NAMB is shown in the NAME field RANGE The left field of RANGE specifies the ranging mode In this field select e AUTO secondary softkey to set auto ranging mode e FIXED secondary softkey to set fixed ranging mode e LIMITED AUTO secondary softkey to set limited auto ranging mode The right field of RANGE specifies the range value For auto ranging mode appears For the fixed ranging and limited auto ranging modes allowable range values are shown in the secondary softkey area You select a softkey to set the range value For details see Measurement Range Mode in Chapter 3 ZERO CANCEL ZERO CANCEL field specifies zero offset cancel mode Select ZERO CANCEL ON OFF to toggle the zero offset cancel mode between on and off If the zero offset cancel mode is set to OFF then OFF appears in all the ZERO CANCEL fields If zero offset cancel mode is set to ON then ON or OF F appear automatically in each field depending on the measurement range For details see Zero Offset Cancel in Chapter 3 6 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group INTEG TIME INTEG TIME area shows integration time and corresponding number of power line cycles NPLC for short medium and l
103. start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings d Ifyou selected AFTER select secondary softkey to enter desired data variable in field 7 e Ifyou selected AFTER enter desired expression in field 8 Specify the other point by step 5 then step 6 or 7 5 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Regression calculation is performed in the range defined by the two specified points as shown in the following figure specified two points mA the range of regression calculation I I 1 0 000 VD Vv 1 00 div 10 00 U6T02018 Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 and 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 35 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a regression line The range for the regression calculation is specified by two point
104. synchronous sweep source For the compliance range of each measurement channel refer to Chapter 1 Optional Power compliance value of synchronous sweep source This parameter applies to SMU only Allowable range of power compliance depends on the power compliance range of synchronous sweep source For details refer to Chapter 3 The relationship between the output of primary and synchronous sweep sources is determined by the following equation synchronous output primary output x ratio offset The synchronous output determined by above equation must not exceed the output range of synchronous sweep source 2 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 2 4 Measurement Mode Sweep Measurement Mode Pulse Sweep Measurement For a sweep measurement a sweep or constant source SMU can be a pulse source But only one SMU can be a pulse source Figure 2 4 shows the relationship between pulse source and other sources Pulse Source and Other Sources Pulsed on Primary Source Unit VAR Pulsed on Synchronous Source Unit VAR1 Primary Primary l i Synchronous Synchronous Secondary Secondary _ Constant Constant Pulsed on Secondary Source Unit VAR2 Pulsed on Constant Source Unit Primary
105. the output is stable If too long time will be wasted Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 31 Screen Organization MEASURE Screen Group MEASURE OUTPUT SEQUENCE screen MEASUPE OUTPUT SEQUENCE S4JANO1 01 30PM user comment awe device 1 channel length 4 OUTPUT SEQUENCE STRIGGER SETUP UNIT NAME MODE ENABLE DISABLE DISABLE SMUL HR TA I FUNCTION TRIG OUT NEG i 2 SMU2 HR IB T STEF DELAY 0 00 3 SMUS HR To I POLARITY POSTTITVE 4 SEMUA HR 5 SMUSS MP 6 SMUG MP F 2 Q VSUL vse PGUL VPLS PGU2 VPLS 1 SOUTPUT SEQUENCE MODE OF SAMPLING SEQUENTIAL POSITIVE SWEEP PGU MEASURE a PREV NEXT SETUP SETUP SETUP SEQC PASE PAGE UGDOSOO 100x50 On this screen you set the output sequence and triggering parameters for measurement state The output sequence set on this screen is also used when the state changes from idle state to stress force state For trigger setup for stress force state see Stress Output Channels in Chapter 3 User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups OUTPUT SEQUENCE In the UNIT column allowable units are shown in output sequence order Only output units are shown so VMU and GNDU are not shown In
106. the NAME and MODE fields the output names and mode that you set up on the CHANNELS CHANNEL DEFINITION screen are shown To change the output order of the units enter unit names in desired order by selecting secondary softkeys For details about default sequence see Sequential Mode in Chapter 3 6 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group OUTPUT SEQUENCE MODE OF SAMPLING For a sampling measurement you can set the output sequence to sequential mode or simultaneous mode This field is displayed only when sampling mode is selected on the CHANNELS CHANNEL DEFINITION screen If you select sequential mode OUTPUT SEQUENCE table determines the output order If you select simultaneous mode all the units force at the same time TRIGGER SETUP ENABLE DISABLE ENABLE DISABLE field defines whether the triggering function is used or not In this field select e ENABLE secondary softkey to enable the triggering function e DISABLE secondary softkey to disable the triggering function FUNCTION FUNCTION field sets the triggering mode e Select TRIG OUT secondary softkey to enable the following functions e For anormal non pulse sweep measurement the 4155B 4156B outputs an edge trigger signal when a measurement starts for each step e Fora pulsed sweep measurement the 4155B 4156B outputs an edge trigger signal synchronized with the pulse leading edge e Select TRIG I
107. the measurement units measure with specified integration time But if both of the following conditions are satisfied the units may measure with longer integration time than specified Settings of integration time 0 64 ms to 1 92 ms e Measurement range 10 pA to 10 uA range Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 63 Measurement Functions Integration Time Medium Medium integration time is 1 PLC power line cycle Setting Integration time Press Medium front panel key for example 20 ms for 50 Hz If you measure current in the 1 nA or lower ranges by using SMUs integration time of SMUs is automatically changed as follows depends on the power line cycle cannot change this value Measurement Unit Measurement Range Integration Time HRSMU 10 pA 50 PLC 100 pA 10 PLC l nA 5 PLC MPSMU I nA 3 PLC HPSMU I nA 3 PLC Long Long integration time is effective when you need high resolution and noise reduction measurement But the measurement speed is slow Setting Press Long front panel key 2 PLC to 100 PLC with 1 PLC resolution 16 PLC Integration time Initial setting When an 4155B 4156B measures current in 1 nA or lower ranges by using HRSMU integration time of HRSMU is automatically changed to longer integration time maximum 100 PLC than specified 3 64 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions SMU Filter SMU Filter
108. the present output value appears in the data entry area You can change the value Then selecting the same softkey again displays the present compliance in the data entry area You can change the compliance Use the following methods to change the value Enter number by using numeric keys e Change number by rotating rotary knob Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 61 Screen Organization GRAPHILIST Screen Group GRAPH LIST LIST screen Measurement Results ORAPH LIST LIST SHORT 3AUg09 06 18PM user comment w IF MARKER i sweep range F ionV to 4 00 Vi tomy step List Index gt v DIRECT MARKER 1 10 00000 4 150000 2 0 000000 4 150000 peta g 10 00000m 3 30000 CE AE A i 30 00000m 14 800006 6 7 g Ej paa ey ables i CIF 57S 0000p Aly AXIS MARKER J BPRE AD RE SWEEP TIMINGS CONST ee SHEET SETUP SETUP SETUP SETUP UG D050 120x50 On the GRAPH LIST LIST screen measurement results are displayed User Comment In this field you can enter a desired comment This comment is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups Sweep Range This field displays sweep start stop and step values of VAR1 primary sweep and VAR2 secondary sweep if VAR2 sweep is selected L
109. time 10 In the TRAILING TIME field of desired PGU column enter the trailing edge transition time 11 In the IMPEDANCE field of desired PGU column select eC oN Sa Se we e LOW secondary softkey for approximately zero ohm output impedance e 50 ohm secondary softkey for 50 ohm output impedance 12 In the PULSE COUNT field do one of the following Select FREE RUN secondary softkey to force the pulse continuously e Or enter the number of pulses to output for sampling measurement only For the pulse period and pulse count values the values you set for PGU1 are also used for PGU2 The following figure shows the relation between pulse waveform and setup parameters Pulse Peak 90 ees Leading Time y is Time 10 j Pulse Base ee ml o Pulse Width Pulse Period TANER Delay Time 4 24 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements To modify the UNIT and NAME fields Modify the UNIT and NAME fields on the CHANNELS CHANNEL DEFINITION screen Using PGUs as constant voltage source To use a PGU as a constant voltage source set the desired PGU as follows Vin MODE column on the CHANNEL DEFINITION screen Desired output voltage value in SOURCE field on MEASURE PGU SETUP screen Example The following example shows setup of PGU pulsed output on the MEASURE PGU SETUP screen You cannot set compliance for a PGU
110. to set up the lines and marker For details about line modes refer to Line Drawing in Chapter 7 User Comment In this field you can enter a desired comment This comment is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups 6 40 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group Normal mode line In the first bracketed field after LINE1 or LINE2 you select the line mode Select the NORMAL secondary softkey to set the normal line mode The pointer moves to the second bracketed field as shown LINE1 NORMAL LINE ON Y1 between a point AT In the second bracketed field you specify which measurement curve you want to analyze by selecting the related axis Y1 or Y2 secondary softkey In the third bracketed field you specify how to select a point e Select BY X Y COORDINATE AT is displayed Then you enter the desired X Y coordinate values or expressions in the X and Y fields e Select BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to specify a measurement point LINE1 NORMAL LINE ON Y1 between a point AT X 0 Y 0 and a point WHERE DGM MAX DGM 0 01 In addition you can specify another condition if you position the pointer in the last bracketed field shown above Select the AFTER secondary softkey AFTER is di
111. we To cancel the effects of the residual resistance test leads must be connected as close as possible to the DUT Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 5 WARNING CAUTION Making a Measurement Connecting DUT Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate e To Reduce Leakage Current e To Measure Low Resistance To Reduce Leakage Current To reduce the leakage current caused by connection cables the guard technique is effective Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below 1 At end of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle Do not touch the guard terminal with bare hands because you may be shocked by high voltage The potential of the guard terminal is equal to the output voltage Never connect the guard terminal to any other output including circuit common frame ground or the terminals of any other unit Doing so may damage the unit 4 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Connect
112. when you want to easily define a measurement setup for normal sweep To start the knob sweep measurement press the green key and then the Single front panel key The 4155B 4156B starts knob sweep measurement and repeats measurements continuously until this function is stopped You can change the measurement setups even while the measurements are being performed When knob sweep measurements are started the VAR1 start value and VARI sweep range are 0 V or 0 A You change the sweep range from 0 to the stop value by rotating the knob To stop the knob sweep measurements press Stop front panel key or a PAGE CONTROL group key To restart the measurement press the following key s If you pressed the Stop key Single key If you pressed a PAGE CONTROL key green key and Single key Available units and functions Table 3 2 shows available units and functions for knob sweep measurement Available Units and Functions for Knob Sweep Measurement Unit SMU Output Function Output Mode Meas Mode Pulse VARI STAND y I COMM v DVOLT I VARI VAR2 CONST BY ON n a e e e e e n a e e VSU n a e e e e ae VMU GNDU PGU means This is available for knob sweep measurement n a means This is not available for knob sweep measurement means This is not available for this unit Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3
113. you can change the value THRESHOLD softkey Select THRESHOLD secondary softkey to change threshold value of the stop condition The present threshold value is shown on this softkey and in the data entry area Then you can change the value You can change the threshold value while measurement is being performed EVENT TYPE softkey Select EVENT TYPE secondary softkey to change the event type Selecting this softkey changes the event type in the following order Val gt Th gt Val lt Th gt Val gt Th gt Val lt Th Val gt Th EVENT NUMBER softkey Select EVENT NUMBER secondary softkey to change the event number of stop condition The present event number is shown on this softkey and in the data entry area Then you can change the value 6 60 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group CONST SETUP setup Select CONST SETUP primary softkey to display secondary softkeys for changing the constant source parameters This softkey is displayed only when CONST is set in the FCTN field on CHANNELS CHANNEL DEFINITION screen Output source names appear on the secondary softkeys and the present output value and compliance also appears For example when a output source named Vce is defined 5 0 V output with 100 mA compliance the following softkey appears Vce 5 00 V 100 mA Select the secondary softkey that you want to change The selected softkey is highlighted and
114. 0 SELECT 0 000 OTIME s 100s div 1000 CURSEN MARKER ETNE SCAL INGI DISPLAY SAMPLNG STOP CONST CURSOR SETUP SETUP cono SETUP UGTOIQ26 40460 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 41 Making a Measurement Sampling Measurements To Define Measurement Units 1 Fe ee 7 Press Chan key in the PAGE CONTROL key group Select CHANNEL DEF primary softkey In the MEASUREMENT MODE area select SAMPLING secondary softkey In the VNAME column enter a unique name for voltage variable For example enter Vce for collector emitter voltage If channel does neither V force nor V measurement you can omit VNAME In the INAME column enter a unique name for current variable For example enter Ic for collector current If channel does neither I force nor I measurement you can omit INAME In the MODE column select V secondary softkey for voltage output mode SMU VSU and PGU and grounded voltage measurement mode of VMU I secondary softkey for current output mode SMU VPULSE secondary softkey for pulsed voltage output mode PGU COMMON secondary softkey for circuit common mode SMU and GNDU DVOLT secondary softkey for differential voltage measurement mode VMU In the FCTN column select CONST secondary softkey for all source units VNAME and INAME You can use VNAME and INAME in user function definitions or for analysi
115. 0 LOG25 or LOG50 secondary softkey to specify the logarithmic sampling mode The number specifies how many samples to take per decade Select THINNED OUT softkey to specify the thinned out sampling mode which discards less recent samples Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group e INITIAL INTERVAL In the INITIAL INTERVAL field you set the initial interval which is the interval of measurement trigger Not measurement interval Measurement unit executes measurement if it is ready to measure at the trigger If the unit is busy or in measurement the unit waits for the next trigger e NO OF SAMPLES This field sets the number of samples The number of samples must be 10001 or less total for all units that make measurements plus size of all registered user variables The number of units that make measurements is determined by the DISPLAY DISPLAY SETUP screen e TOTAL SAMP TIME for linear and thinned out sampling mode TOTAL SAMP TIME field sets the total sampling time The total sampling time must satisfy the following condition total sampling time initial interval x number of samples 1 In this field enter a value or select e NO LIMIT secondary softkey to continue the sampling until sampling completion condition is satisfied For linear sampling mode initial interval must be more than 480 us e for linear sampling mode only AUTO secondary softkey to set th
116. 0 s 0 00000 s PEAK VALUE 1oomv 100mV HOLD TIME BASE VALUE 0 000 V 0 000 V 0 000 s LEADING TIME FILTER ON TRAILING TIME ktg IMPEDANCE STRESS CONTINUE AT ANY Status CONSTANT UNIT SMU1 MP NAME VSU MODE Vv SOURCE 5 00 V COMPLIANCE 1 0000mA 0 000000100 CHANNEL STAI STRESS PREV NEXT DEF FORCE PAGE PAGE VCOA Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force To Set up dc Output 1 Press Stress key in the PAGE CONTROL key group Confirm that the following is set on the STRESS CHANNEL DEFINITION screen for the units that you want to set up for de stress Vor TI is set in the MODE field e SYNC is set in the FCTN field 2 Select STRESS SETUP primary softkey 3 Inthe SOURCE field for the desired unit in the CONSTANT area enter the desired dc stress value 4 Inthe COMPLIANCE field in the CONSTANT area enter the compliance value The non stress NSYNC constant units also appear in the CONSTANT area You can set SOURCE and COMPLIANCE values for these units the same way as you set the dc stress units To set other areas of the STRESS STRESS SETUP screen see To Set up Stress Condition Timing on page 4 53 To modify the UNIT NAME and MODE fields Modify the UNIT NAME and MODE fields on the STRESS CHANNEL DEF
117. 0A selector refer to SMU PG Selector Control on page 3 46 External Stress Source The following trigger functions allow you to force stress from more than 4 channels by using external pulse generators voltage sources or current sources e gate trigger while stress is forced The 4155B 4156B can output a gate trigger while stress channels are forcing stress For details about this gate trigger refer to Trigger Function on page 3 39 e gate trigger of PGUs The output trigger terminal of PGUs 41501A B can output a gate trigger to external pulse generators So use this function if you need more than two ac stress channels For example you can use Agilent 8110A pulse generator to force ac stress by using this trigger PGU outputs a gate trigger that is synchronized with pulse output For details of the trigger signal refer to Trigger Output on page 3 42 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 5 Measurement Functions Stress Force Function Stress Mode You set stress mode to the pulse count mode or duration mode Pulse count mode You specify the pulse count 1 to 65535 The total stress time is determined by the pulse count and pulse period The pulse count mode is used only when a PGU is used to force ac stress that is PGU is set to MODE VPULSE and FCTN SYNC on the STRESS CHANNEL DEFINITION screen Duration mode You specify the total stress time directly in seconds A
118. 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move marker between two adjacent measurement points See To Specify between Measurement Points on Curve on page 5 6 5 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a tangent to a specified measurement point HILIST SHORT 09 06 GRAPHILIST GRAPHICS 93AugO9 06 18PM CURSOR To MARKER 3 87Z2000V 289 23uA MARKER mA 2 00 Intropt 1 421 Grad F 521 61y GRAD MODE y OFF 20du idiv j REGRESS g MODE OFF fe Intrept 2 98976 9 00 i MARKER 0 000 vo tv 4 00 div 10 00 SKIP MARKER DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP ueTo2006 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 15 Analyzing Measurement Results Manual Analysis To Draw Regression Line for Specified Region 1 Select MARKER CURSOR primary softkey then set the MARKER secondary softkey to ON Select the desired axis for regression calculation by selecting AXIS primary softkey if both Y1 and Y2 axis are set up Then if necessary move marker to desired measurement curve by selecting MARKER SKIP secondary softkey Select LINE primary softkey
119. 100 ee MI b When power compliance is not set If you specify power compliance the measurement time increases slightly because of the range changing for every step When the ranges are changed during a sweep to accommodate power compliance the SMU output is momentarily set to 0 V 3 62 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Integration Time Integration Time To reduce measurement errors caused by line frequency noise or any other environmental noise source the 4155B 4156B takes a number of measurement samples and averages them to obtain a measurement data The number of measurement samples taken during each measurement depends on integration time Setting a longer integration time increases the number of measurement samples so you can get more accurate measurement data Integration time is divided into three categories short medium e long All measurement units use the same integration time setting To perform high speed measurements set integration time to short To perform more accurate measurements set integration time to long Integration time is specified in the INTEG TIME table on the MEASURE MEASURE SETUP screen Short Short integration time is effective when you need high speed measurements But the measurement data have lower resolution Setting Press Short front panel key Integration time 80 us to 1 92 ms with 80 us resolution Initial setting 640 us Basically
120. 11 Table 3 3 Measurement Functions Knob Sweep Function Normal Sweep and Knob Sweep Measurements Table 3 3 compares the normal sweep measurement performed by measurement front panel keys and knob sweep measurement by the front panel knob Comparison of Sweep Measurement and Knob Sweep Measurement Item Sweep Measurement Knob Sweep Measurement Spacing of VARI linear or log linear Sweep Mode of VARI single or double single or double Number of Steps for VARI 1 to 1001 1 to 1001 Hold Time 0 to 655 35 s 0 to 655 35 s Power Compliance available not available Measurement Ranging Mode auto limited auto or fixed compliance range Standby Function available available Measurement Channel 1 to 8 ch 1 ch only Output Sequence can set can set Trigger Function available not available Integration Time short medium or long 80 us a Measurement range is automatically set according to specified compliance value gt Settings on the MEASURE OUTPUT SEQUENCE screen also apply to knob sweep measurement Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function Features of Knob Sweep Function The following are parameters that are for knob sweep measurement only or that have a different meaning or range from normal sweep measurement LIN LOG mode Only linear mode is available Even if you set LOG on the MEASURE SWEEP SETUP screen the kn
121. 155 TO 800 20 OUTPUT Hp4155 FORM DATA ASC 30 OUTPUT Hp4155 TRAC DEF UVAR1 5 40 OUTPUT Hp4155 TRAC DATA UVARI1 1 1 1 2 1 3 1 4 1 5 50 END 20 Format of data to be transferred is ASCII format 30 Defines the name of user variable and number of data 40 Transfers the data 7 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Data Variable and Analysis Function Data Variable Syntax of Data Variable Name A data variable name must start with alphabet character and can consist of maximum six alphanumeric characters Refer to the following figure fat Maximum 6 characters alphabet uge 07001 12040 The name must be unique Name is case sensitive For example Gm is different from GM Using Built in Function Name as Data Variable Name You can give a data variable name the same name as a built in function But if you use the name in an expression the system considers the name to be a data variable name not a built in function name So in this case you cannot use the built in function in an expression Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 7 NOTE NOTE NOTE Data Variable and Analysis Function Expression Expression An expression can be used for following e Inauser function definition e Asacondition for an automatic analysis function For direct keyboard calculation Figure 7 1 shows the syntax of an expression Notice th
122. 2 eee eect eee eens 4 6 Sweep Measurements 0 0 0 eee ec eee ene nee 4 10 To Define Measurement Units 0 0 cece eee ee eee 4 12 To Set up Primary Sweep 0 ccc tte 4 14 To Set up Secondary Sweep 0 c cece cece eee nee 4 16 To Set up Synchronous Sweep 0 cece cece eee eens 4 18 To Set up Constant Output 0 cee eee 4 20 To Set up SMU Pulsed Output 00 0 4 21 To Set up PGU Output AS eee eens 4 24 To Use Standby Function 0 0 00 4 26 To Define a User Function iya o 0 0 cece eee eens 4 27 To Display Graphics Results 00 cee eect eee 4 28 To Display List Results 20 0 eee eee een 4 30 To Execute Calibration cser eio eect ee eens 4 31 To Use Offset Cancel Function 0 0 eee eeeeeeeeeee 4 31 To Execute or Stop Measurement 0 0 cece eee eee ene 4 32 To Use RBO eit esse cht Parents Cte ee ee eae 4 33 Knob Sweep Measurements 0 cee eee cece een ae 4 35 To Execute Knob Sweep Measurement 00 00 c eee eeaee 4 36 To Stop Knob Sweep Measurement 00 0 cee eee eee eee eee 4 39 Sampling Measurements 2 0 0 cece eee eee eet eens 4 40 To Define Measurement Units 0 eee cece ee eee 4 42 To Set up Sampling Parameters 0 cece eee eee eee 4 44 To Set up Constant Output 2 eee eee 4 46 To Define Stop Conditions 0 ee eee eee eens 4 47 Stress Force mie
123. 2 80x5Ch On this screen you define user functions For details about user functions refer to User Function in Chapter 7 User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups NAME NAME field defines the user function name In this field you can enter a name by using the keyboard or front panel keys Or you can select variables that are shown on the secondary softkeys To delete a user function you can select DELETE ROW softkey to delete the NAME UNIT and DEFINITION entries After defining a user function you can use this variable name for reference on other screens Restrictions e NAME must be 6 or less alphanumeric characters First character must be alphabet character e NAME must be different from other names The alphabet characters are case sensitive For example HFE is different from Hfe 6 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen Group UNIT optional UNIT defines the unit of the user function This unit is used on the graph and list result screens Restriction UNIT must be 6 or less alphanumeric characters To delete a user function you can select DELETE ROW softkey to delete the NAME UNIT and DEFINITION entries DEFINITION You enter an expression that defines the user function The expression can consist of numerical operators constants vari
124. 4 Connect between the socket module and the test fixture by using the proper test leads 5 Close the lid of the test fixture To force more than 40 V close the lid of the test fixture Otherwise the interlock function will stop the 4155B 4156B output To connect between the socket module and the test fixture you can use test leads that have the following terminals e Miniature banana miniature banana e Miniature banana pin plug e Miniature banana miniature clip Do not connect or disconnect your DUT while the 4155B 4156B is forcing voltage or current Otherwise your DUT may be damaged Do not touch the terminals of the test leads Oil perspiration and dirt prevent good electrical contact deteriorate insulation and degrade measurement accuracy 4 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Connecting DUT Connections for High Current Measurements When you force or measure a large current you may want to use a Kelvin 4 wire connection to eliminate the residual resistance effects of test leads and contacts For example you can use the following connections as Kelvin connections on the test fixture The Kelvin connection is available for the 4156B s HRSMU and 41501A B s HPSMU Examples Kelvin Connection SMU 200V 1A Max 1 2 3 Selected gt Pea Force Y Sense EN Guard ad Wale Substrate pyrene j f S Ss see
125. 4155B 4156B User s Guide Vol 2 Edition 5 2 21 Measurement Mode Sampling Measurement Mode Source Output Sequence and Time Origin Source unit output sequence and the time origin depends on the setup value of the OUTPUT SEQUENCE MODE OF SAMPLING field in the MEASURE OUTPUT SEQUENCE screen The following two modes are available for the field e SIMULTANEOUS mode All source unit starts output at same timing This timing is defined as the Time Origin See figure below CONST 1 L UWUUUUUUUU UU Pulse Bias PG CONST 2 eee hold time time origin sampling start sampling completion UGDO3014 120x80 2 22 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode e SEQUENTIAL mode Source units starts output in the order defined in the OUTPUT SEQUENCE table of the MEASURE OUTPUT SEQUENCE screen Time Origin is when the last source reaches the specified output value See figure below If there is pulse bias sources PGUs they start to force pulse base value in the order shown above and start to force pulse bias at the Time Origin F CONST 1 Pulse Bias e PG CONST 2 o H hold time time origin sampling start sampling stop
126. 4156B is not operated correctly or if diagnostics or calibration fails error codes and error messages are displayed If measurement or forcing stress are not performed correctly measurement data status is displayed at bottom of GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen This section describes the following e If Errors Occur when You Perform Self calibration or Diagnostics If Errors Occur when You Operate the 4155B 4156B e Ifa Measurement Data Status is Displayed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 13 If You Have A Problem If Errors Occur If Errors Occur when You Perform Self calibration or Diagnostics The following are the error codes that are displayed at the bottom of the SYSTEM SELF CALIBRATION DIAGNOSTICS screen if errors occur when you perform self calibration or diagnostics If errors occur write down the displayed error codes and contact the nearest Agilent Technologies Sales and Service office Up to seven error codes can be displayed at the bottom of the SYSTEM SELF CALIBRATION DIAGNOSTICS screen To display the error codes move pointer to a desired test item Error codes for measurement unit The following are the error codes for measurement units Error codes are 5 digit numbers Llxxyy xx measurement unit e 00 VSU1 2 and VMU1 2 e 01 to 06 SMU1 to SMU6 07 PGU1 2 e 08 GNDU e 09 AD converter e yy error number 1xx05 AD converter failed RO
127. AL INTERVAL The sampling interval during thinned out sampling Allowable range 720 us to 65 535 s NO OF SAMPLES Number of data to be stored by end of measurement Maximum 10001 If there are multiple measurement units this value must be 10001 number of units or less TOTAL SAMP TIME Total sampling time Does not include HOLD TIME This is the time from the Ist trigger to the sampling completion One of the sampling completion conditions so sampling stops after this time elapses Allowable range NO LIMIT or INITIAL INTERVAL x NO OF SAMPLES 1 sec to 1 x 10 sec NO LIMIT Disables the total sampling time sampling completion condition HOLD TIME Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 Allowable range when INITIAL INTERVAL 22 ms 0 to 655 35 s with 100 us resolution Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution 2 28 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 2 2 Measurement Mode Sampling Measurement Mode Effective Parameter Values INITIAL INTERVAL 720 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Max 10001 number of measurement units TOTAL SAMP TIME NO LIMIT INITIAL INTERVAL x NO OF SAMPLES 1 s to 1 x 10 s HOLD TIME 30 ms to 655 35 s 0 to 655 35 s 100 us resolution 100 us re
128. ASURE SWEEP SETUP screen EASURE SWEEP SETUP 94JANO1 01 30PM xVARIABLE VARL VAR2 UNIT SMUL MP AME If SWEEP MODE SINGLE LIN LOG Loe 10 START 1 00 UA STOP 1 00 mA STER rmn SMU PULSE OF STEP 31 UNIT SMUL MP COMPLIANCE 100 mv NAME f POWER COMP PER TOD 10 Oms TIMING WIRTH HOLD TIME 9 0 s BASE XSWEEP CONTINUE AT ANY Status CONSTANT UNIT SMUZ MP AME Voff ODE v SOURCE 5 000 V COMPLIANCE 100 mA POU MEASURE OUTPUT PREV NEXT SETUP SETUP _ SEQ PAGE PAGE UGG1039 90x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 23 Making a Measurement Sweep Measurements To Set up PGU Output 1 Define PGU to be VPULSE and CONST as described in To Define Measurement Units on page 4 12 Press Meas key in the PAGE CONTROL key group Select PGU SETUP primary softkey In the PERIOD field of PGU1 enter the pulse period value In the WIDTH field of desired PGU column enter the pulse width value In the DELAY TIME field of desired PGU column enter delay time value In the PEAK VALUE field of desired PGU column enter pulse peak value In the BASE VALUE field of desired PGU column enter pulse base value In the LEADING TIME field of desired PGU column enter the leading edge transition
129. AY and GRAPH LIST screen groups MEASUREMENT MODE MEASUREMENT MODE field sets measurement mode to sweep measurement mode or sampling measurement mode In this field select e SWEEP secondary softkey to set sweep measurement e SAMPLING secondary softkey to set sampling measurement To change settings except for system screen group to default initial settings select DEFAULT MEASURE SETUP secondary softkey 6 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen Group NOTE Application setup data in internal memories MEM secondary softkeys indicate that setup or measurement result data is in the internal memory When you turn on the 4155B 4156B without a diskette or network disk the following secondary softkeys are displayed MEMI M B Tr VCE IC measurement setup data for bipolar transistor Vce Ic characteristics MEM2 M FET VDS ID measurement setup data for FET field effect transistor Vds Id characteristics MEM3 M FET VGS ID measurement setup data for FET field effect transistor Vgs Id characteristics MEM4 M DIODE VF IF measurement setup data for diode Vf If characteristics M on the softkey means measurement setup data Select softkey to get the desired application measurement setup data This eliminates the time required to set the setup screens See Initial Settings in User s Guide General Information Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 7 NOTE
130. BNORM secondary softkey to stop forcing the stress when any abnormal status occurs e STOP AT COMPLIANCE secondary softkey to stop forcing the stress only when SMU reaches its compliance setting STOP AT ANY ABNORM and STOP AT COMPLIANCE secondary softkeys are displayed only when specified duration is more than 10 s If you set pulse count mode these secondary softkeys are displayed only when pulse period x pulse count is more than 10 s Stress stop function is not effective until stress has been forced for 10 s In the duration mode you set time in seconds for stress forcing In the pulse count mode you set an integer to specify how many pulses to output for stress forcing Abnormal status means the following e SMU reaches its compliance setting e Current of VSU exceeds 100 mA SMU or VSU oscillates e A D converter overflow occurs e Average current of PGU exceeds 100 mA Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 53 Making a Measurement Stress Force To set hold time In the HOLD TIME field set desired value For the meaning of hold time see Stress Force Sequence in Chapter 3 Setting the Accumulated Stress Time The ACCUMULATED STRESS field shows the total stress that has been forced If necessary you can change the value in this field If so the ACCUMULATED STRESS field on the STRESS STRESS FORCE screen also changes to the new value Example The following figure shows an examp
131. DE column CHANNEL ASSIGN softkey appears 2 Select CHANNEL ASSIGN Pointer moves to the top field of UNIT column 3 Use arrow keys in the MARKER CURSOR key group to move pointer to desired row 4 Select the secondary softkey of the desired unit The selected unit appears at the pointer Perform steps 3 and 4 until you assign units as desired Make sure that the same unit is not assigned to multiple rows Then select EXIT CHANNEL ASSIGN softkey 6 76 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization STRESS Screen Group e NAME of STRESS optional Defines stress name that is used as a reference on STRESS STRESS SETUP screen In this column enter a desired name by using alphanumeric keys When pointer is in field of this column DELETE ROW softkey is shown in secondary softkey area clears all the entries for a unit where the pointer is located and disables that unit Restriction e NAME must be 6 or less alphanumeric characters First character must be alphabet character e FCTN of STRESS This field defines channels to be stress force channels or non stress force channels In this field select e SYNC secondary softkey to set channel to stress force channel e NSYNC secondary softkey to set channel to non stress force channel The output timing is different for stress force channels and non stress force channels e Non stress force channels output the source values in the order specified
132. FF 3 if both Y1 and Y2 axis are set up Select the desired marker axis by using AXIS primary softkey The selected marker is highlighted Selecting AXIS primary softkey toggles between Y1 and Y2 4 Set INTERPOLATE secondary softkey to ON Selecting INTERPOLATE secondary softkey toggles between ON and OFF 5 Rotate rotary knob to move the marker to desired measurement point If both Y1 and Y2 axis are set up a circle marker 0 is displayed on measurement curve of Y1 axis and an asterisk marker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and third fields are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn off markers Set the MARKER secondary softkey to OFF To move marker to maximum or minimum value of measurement curve Select MARKER MIN MAX secondary softkey The marker searches for minimum or maximum value in measurement order from the present location every time you select the MARKER MIN MAX secondary softkey To move marker to next VAR2 step or append curve Select MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP To move marker fast Press Fast front panel key of the MARKER CURSOR key group while rotating rotary knob 5 6 Agilent 4155B 4156B User s Gu
133. Function Built in Function You can use built in functions for the following In the expression that is used to define a user function on the CHANNELS USER FUNCTION DEFINITION screen As the condition for an automatic analysis function on the DISPLAY ANALYSIS SETUP screen For direct keyboard calculations The following functions are available ABS AT AVG COND DELTA DIFF EXP INTEG LGT LOG MAVG MAX MIN SQRT Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 11 Syntax Example Syntax Example Syntax Example Data Variable and Analysis Function Built in Function ABS Returns the absolute value of the expression ABS expression To return the absolute value of ID ABS ID AT Returns the value of Zst expression at the index number specified by the 2nd expression AT Ist expression 2nd expression If 2nd expression is not integer linear interpolated value of Zst expression will be returned To return difference of Id from its first value Id AT Id 1 AVG Returns the average value of sweep data or sampling data AVG expression For subordinate sweep measurement this function returns the average value of the primary sweep for the secondary sweep step To return the absolute value of ID AVG ID 7 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Syntax Example Data Variable and Analysis Function Built in Function COND This function does t
134. Group Screen Operation e Status Indicators 6 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization Screen Structure Screen Structure The 4155B 4156B has seven screen groups that have a total 22 setup screens as shown in Figure 6 1 Figure 6 1 Screen Structure of 4155B 4156B page group display page Q HANNELS CHANNEL DEFINITION page HANNELS USER FUNCTION DEFINITION page HANNELS USER VARIABLE DEFINITION page Channels Oo Oo EASURE SWEEP SETUP page EASURE SAMPLING SETUP page EASURE PGU SETUP page EASURE MEASURE SETUP page EASURE OUTPUT SEQUENCE page Measure E SPLAY DISPLAY SETUP page SPLAY ANALYSIS SETUP page Display 4 RAPH LIST GRAPHICS page RAPH LIST LIST page Graph List STRESS CHANNEL DEFINITION page STRESS STRESS SETUP page STRESS STRESS FORCE page Stress SYSTEM FILER page SYSTEM MISCELLANEOUS page SYSTEM CONFIGURATION page SYSTEM SELF CALIBRATION DIAGNOSTICS page SYSTEM PRINT PLOT SETUP page SYSTEM COLOR SETUP page System Knob Sweep KNOB SWEEP page UGDOSO9 110wx125h Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 3 Screen Organization Screen Structure CHANNELS screen group Defines the measurement modes measurement channels and user functions MEASURE screen group Sets the measurement parameters DISPLAY screen group Sets up
135. INAME Enter a unique name for current variable For example enter Ic for collector current If channel does neither I force nor I measurement you can omit INAME MODE Select one of the following softkeys to set the output mode V Voltage output for SMU VSU and PGU and grounded mode of VMU e I Current output for SMU e VPULSE Pulsed voltage output for SMU and PGU IPULSE Pulsed current output for SMU e COMMON Circuit common for SMU and GNDU e DVOLT Differential voltage measurement for VMU FCTN Select one of the following softkeys to set the output function e CONST Constant output function for SMU VSU and PGU e VARI Primary sweep output function for SMU and VSU e VAR2 Secondary sweep output function for SMU and VSU VARI Synchronous sweep output function for SMU and VSU 4 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements VNAME and INAME You can use VNAME and INAME names in user function definitions or for analysis on the GRAPHICS LIST screens These names must be 6 or less alphanumeric characters First character must be alphabet character To disable a unit Select DELETE ROW softkey The settings for the unit are deleted Example The following settings show an example for measuring an n p n transistor s I V characteristics SMU1 is connected to base SMU2 is connected to collector and SMU3 is connected to emitter
136. ING SETUP primary softkey to display secondary softkeys for changing the hold time delay time and SMU pulse parameters This softkey is displayed only when SWEEP is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob e HOLD TIME softkey Select HOLD TIME secondary softkey to change the hold time for the sweep measurement The present hold time is shown on this softkey and in the data entry area Then you can change the value You can change the hold time while measurement is being performed e DELAY TIME softkey Select DELAY TIME secondary softkey to change the delay time for the sweep measurement The present delay time is shown on this softkey and in the data entry area Then you can change the value You can change the delay time while measurement is being performed This softkey is not displayed when an SMU is set to VPULSE or IPULSE in the MODE field on the CHANNELS CHANNEL DEFINITION screen e PULSE BASE softkey displayed only if SMU pulse source is defined Select PULSE BASE secondary softkey to change the base value of SMU pulse The present base value is shown on this softkey and in the data entry area Then you can change the value e PULSE PERIOD softkey displayed only if SMU pulse source is defined Select PULSE PERIOD secondary softkey to change the period of SMU pu
137. INITION screen Example The following figure shows an example setup to set source SMU1 to 5 00 V and compliance SMU1 to 1 00 mA STRESS STRESS SETUP 94JANO1 01 30PM STRESS MODE DURATION 1 0ms XACCUMULATED STRESS HOLD TIME 0 000 s FILTER ON STRESS CONTINUE AT ANY Status CONSTANT UNIT SMUL MP NAME vsu MODE v SOURCE 5 00 V COMPL LANCE FA 7o0EDRA 0 0010000 CHANNEL STH DEF SS PREV NEXT PAGE PAGE Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 57 Making a Measurement Stress Force To Force Stress Press Stress key in the MEASUREMENT key group The STRESS area shows the specified stress duration time Even if you set STRESS MODE to PULSE COUNT the stress duration time is calculated and shown in seconds The ACCUMULATED STRESS area shows the total stress that has already been forced To change the stress time duration mode Select CHANGE DURATON secondary softkey then enter desired value The CHANGE DURATON secondary softkey is displayed only if the DURATION mode is selected on the STRESS STRESS SETUP screen To change pulse count pulse count mode Select CHANGE PLS CNT secondary softkey then enter desired value The CHANGE PLS CNT secondary softkey is displayed only if the PULSE COUNT mode is selected on the STRESS STRESS SETUP scree
138. ION DISABLE If sampling interval is enough longer than measurement time INITIAL INTERVAL value decides the range of a decade 10 ms to 100 ms lst decade Sampling is executed at the following TIME value 10 ms 20 ms 30 ms 40 ms 50 ms 60 ms 70 ms 80 ms 90 ms 100 ms LOG10 mode allows to have 10 data in 1 decade Therefore all measurement data is stored in memory 100 ms to 1 s There are 90 sampling points in this range Number of data can remain is only 10 They can plot the data on the X axis in almost the same interval TIME values are as follows 140 ms 170 ms 210 ms 270 ms 330 ms 410 ms 520 ms 650 ms 810 ms 1 02 s If sampling interval is less than measurement time Measurement time decides the range of a decade If the measurement time is 18 ms interval of measurement is 20 ms and the following data are stored in memory 20 ms to 200 ms lst decade Sampling is executed at the following TIME value 20 ms 40 ms 60 ms 80 ms 100 ms 120 ms 140 ms 160 ms 180 ms 200 ms LOG10 mode allows to have 10 data in 1 decade Therefore all data is stored in memory 200 ms to 2 s There are 90 sampling points in this range Number of data can remain is only 10 They can plot the data on the X axis in almost the same interval Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 31 Measurement Mode Sampling Measurement Mode Rule to determine TIME TIME value is determined by the follo
139. LIANCE 400 ma 5 V POWER COMP OFF OFF TIMING HOLD TIME 0 0 s DELAY TIME 0 000 s SWEEP CONTINUE AT ANY Status CONSTANT UNIT NAME MODE SOURCE COMPLIANCE 0 0004 PGU MEASURE OUTPUT PREV NEXT SETUP sETUP_ SEQ PAGE PAGE UG 01004 90x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 17 Making a Measurement Sweep Measurements To Set up Synchronous Sweep Synchronous sweep source is the measurement unit defined as VAR in the CHANNELS CHANNEL DEFINITION screen VAR is available for the measurement units set to the output mode same as the VARI output mode The output value of VARI is calculated by the following equation VARI VARI x RATIO OFFSET On the MEASURE SWEEP SETUP screen set up the primary sweep source VAR1 then do following 1 VARI OFFSET Enter the offset value of the VAR output against the VARI output 2 VARI RATIO Enter the ratio value of the VARI output against the VARI output 3 VARI COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the synchronous sweep source You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen 4 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Me
140. LINEn Oy Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY Returns the value of Y coordinate at the cross point of LINE and LINE2 Syntax QIY If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the cross point by using the following formula Peel x a0 27I Y Where y Value of Y coordinate at the cross point If the Y axis is logarithmic scale this function returns 10 Vys Y intercept value of LINEn If the Y axis is logarithmic scale y is the log value of the y intercept of LINEn Qp Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error 7 22 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function IY1 Returns the value of Y1 coordinate at the cross point of LINE1 and LINE2 Syntax Iy1 This function calculates the cross point by using the following formula 1 Oy y y a a V y y Where yl Value of Y 1 coordinate at the cross point If the Y1 axis is logarithmic scale this function returns 10 Yn Y intercept of LINEn If the Y1 axis is logarithmic scale y is the log value of the Y1 intercept of LINEn Qn Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY2
141. LYSIS SETUP screen DISPLAY ANALYSIS SETUP 93JUL22 11 32AM user comment t w device 1 anneal 1 LINEL REGRESSION line on Y1 between a point AT x 0 ys o ahd a point WHERE VCE 10 AFTER VCE MAX VCE LINE2 GRAD line on Y1 at a point WHERE DGM MAX DGM 0 01 AFTER DGM MAx DGM Gradient 0 5 MARKER At a point where VCE O4 AFTER VCE MAX ee eee H Interpolate OFF MAX VCE DISPLAY AUTO PREV NEXT SeTUP_ ANLYS IS PAGE PAGE UGDOSO1G 100x50 On the DISPLAY ANALYSIS SETUP screen you set up the automatic analysis function When a measurement finishes the function automatically draws lines a marker or both as specified on this screen You can set up two lines and one marker for the automatic analysis function In the LINE and LINE2 fields you can set up the lines to be drawn In the MARKER field you set up the marker For the automatic analysis function and the manual analysis function four line modes can be used e Normal mode drawing a line between any two points e Grad mode drawing a line through any point with a specified gradient e Tangent mode drawing a tangent to a measurement point e Regression mode drawing a regression line for the area specified by any two points The following explains how
142. M or RAM self test Measurement unit failed AD converter test as a pretest for calibration or self test 1xx06 Successive approximation AD converter failed Measurement unit failed AD converter test as a pretest for calibration or self test 1xx07 Integrating type AD converter failed Measurement unit failed AD converter test as a pretest for calibration or self test 1xx08 AD converter test reached timeout Measurement unit failed AD converter test as a pretest for calibration or self test Ixxll Overvoltage occurred for a measurement unit 1xx12 Overcurrent occurred for a measurement unit 8 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1xx15 1xx19 1xx90 1xx91 1xx92 1xx94 1xx97 10030 10031 10032 10033 10034 10035 10036 10037 10038 10040 10041 10042 10043 10044 10045 If You Have A Problem If Errors Occur Measurement units that are not supported are detected Emergency occurred but the cause is unknown This is displayed for example when unit is known but cause is unknown AD converter test reached timeout during calibration or self test for a measurement unit FIFO first in first out for AD converter overflowed because SMU controller takes long time to read measurement data Calibration or diagnostics was aborted by an emergency or RST command The 4155B 4156B was turned on before the 41501A B Communication failed between HOST controller and SMU controller Or calibratio
143. MEASURE PGU SETUP screen 0 0 00 cee eee ees 6 26 MEASURE MEASURE SETUP screen 0000 cee eee eee 6 29 MEASURE OUTPUT SEQUENCE screen 1 2 0 0 0 0 e ee eee eee 6 32 DISPLAY Screen Group os cerre rinya nina i EEEE o N E 6 35 DISPLAY DISPLAY SETUP screen for graphic results 6 36 DISPLAY DISPLAY SETUP screen for list results 6 38 DISPLAY ANALYSIS SETUP screen 0 0c eee ee eee eee 6 40 GRAPH LIST Screen Group 0 00 cee eee ene 6 46 On the GRAPHICS result screen 00 eee eee eee 6 46 On the LIST result screen 2 ee cette eee 6 46 GRAPH LIST GRAPHICS screen 0 0 cece eee ene 6 47 GRAPHI LIST LIST screen 00 eens 6 62 STRESS Screen Group 0 0 0 ccc cee eee nent e 6 74 STRESS CHANNEL DEFINITION screen 002 0000 020s 6 75 STRESS STRESS SETUP screen 0 0 c cece eee eee ene 6 79 STRESS STRESS FORCE screen 2 00 0 eee ee ene 6 83 Screen Operation a scenes a ten i a ie pai ee Sf yee BNE aaltepet hs LS 6 85 Data Input or Edit 0 cee ete ene 6 85 Blue front panel key usage 2 0 0 ccc cece nee nes 6 87 Green front panel key usage 0 2 0 cee cece cee teens 6 88 Contents 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents Edit front panel keys 1 eee cee eet nee nee 6 89 Stats Inidicators s 3 3 47 hice Ade eh S td Ae htt RBS Ad LB tod BE 6 90 Data Vari
144. METER field you can specify whether to display X and Y intercepts and gradients of lines on the plotting area by selecting ON or OFF secondary softkey OFF The line parameters are not displayed ON The line parameters are displayed when lines are displayed on the graph DATA VARIABLES In the DATA VARIABLES fields you can enter two variable names The numerical values of these variables will be shown on the GRAPHICS screen according to the marker position In this field you can select the desired variable names in the secondary softkey area Even if the setup data variables are defined using variables that are not set in the NAME field of the GRAPHICS table the variables are automatically measured after pressing a measurement front panel key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 37 Screen Organization DISPLAY Screen Group DISPLAY DISPLAY SETUP screen for list results DISPLAY DISPLAY SETUP S4JANO1 01 20PM user comment mm Vee Ie VE DISPLAY MODE LIST Vo VB DATA VARIABLES 1f2 IE BLabe ay AUTO PREV NEXT SETUP LANLYS Is PAGE PAGE a 0D03009 100450 On the DISPLAY DISPLAY SETUP screen for list results you enter variable names for which you want results to be displayed numerically The measurement channels are determined by the vari
145. MU Connect the probing needles to the terminals of the connector plate by using test leads or coaxial cables Following instruction uses the coaxial cables 1 At end of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle 3 Repeat 1 and 2 for the sense terminal of connector plate 4 Contact the probing needles from force and sense terminals as close as possible to the DUT Example The following example connection can be used to measure low resistance The sense line is extended to the probing pad and contacts the force line through the pad so the voltage drop due to the residual resistance caused by cables and test leads is canceled we X N Contact Pad Connector Plate te N a NA Pa UATONES GAL20WK5OH N Contact TEn ee This example uses test leads To reduce the leakage current use coaxial cables 4 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Connecting DUT Kelvin Connection Kelvin connections give good measurement results when you force high current The following figure shows the equivalent circuits for Kelvin and non Kelvin connections For the non Kelvin conn
146. Measurement Results Automatic Analysis To Draw Line by Specifying Two Points l 2 Press Display front panel key Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select NORMAL secondary softkey In field 2 select secondary softkey to specify desired axis In field 3 select e BY X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 If you selected BY X Y COORDINATE secondary softkey a Inthe X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coordinate c Goto step 8 If you selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select e AFTER secondary softkey if you want to set a search start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings d Ifyou selected AFTER select secondary softkey to enter desired data variable in field 7 e Ifyou selected AFTER enter desired expression in field 8 Specify the other point by step 5 then step 6 or 7 5 28 Agilent 4155B 4156B User
147. N to enable the following function e Sweep measurement or sampling measurement starts when the 4155B 4156B receives a trigger signal from an external instrument STEP DELAY STEP DELAY field is displayed when you set staircase sweep measurement The step delay time is the time from when the trigger is output to when the next step occurs For details about setup delay time refer to Triggering an External Instrument in Chapter 3 When you set TRIG IN in the FUNCTION field this field has no meaning so is displayed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 33 Screen Organization MEASURE Screen Group e TRIG OUT DELAY TRIG OUT DELAY field is displayed when you set pulse sweep measurement The trigger output delay time specifies how much to delay the trigger after the leading edge For details about trigger output delay time refer to Triggering an External Instrument in Chapter 3 When you set TRIG IN in the FUNCTION field this field has no meaning so is displayed e POLARITY In the POLARITY field select secondary softkeys to select trigger polarity as follows POSITIVE or NEGATIVE 6 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group DISPLAY Screen Group DISPLAY screen group has the following screens Display Setup For setting the graphics list display mode the parameters for graphics list screen and measurement channels Analys
148. OP AT COMPLIANCE is automatically set when power compliance is set for SMUs or when 10k ohm 100k ohm or 1M ohm is selected in the SERIES RESISTANCE field If power compliance is set for an SMU the CONT AT ANY secondary softkey is not displayed 6 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization MEASURE Screen Group SMU PULSE These parameters set the SMU pulsed source PULSE or VPULSE The SMU pulsed source is defined on the CHANNELS CHANNEL DEFINITION screen so the UNIT and NAME fields are already set In the PERIOD WIDTH and BASE fields you specify the pulse period pulse width and pulse base value The pulse peak value is determined by the settings in the VARI VAR2 VARI or CONSTANT field Be aware that if any of following are true pulsed SMU channel may not output the pulse period and pulse width you specified e Measurement range differs from compliance range lowest range that includes compliance e Ranging mode is set to auto range or limited auto range e Multi channel measurement is set CONSTANT These parameters set the constant source units UNIT NAME and MODE are defined on the CHANNELS CHANNEL DEFINITION screen e SOURCE In the SOURCE field you specify the output value e COMPLIANCE In this field you set compliance value If VSU is used for constant output unit this field cannot be set compliance value is fixed to 100 mA If you define more than four constant ou
149. Output Sequence When you perform measurements or force stress or when you use the standby function you can specify an output sequence for the source channels The 4155B 4156B has two output sequence modes e sequential mode The source channels output in the order that you specify in the OUTPUT SEQUENCE table on the MEASURE OUTPUT SEQUENCE screen The source outputs are stopped in the opposite order You can set the output sequence to prevent damage to DUTs e simultaneous mode for sampling measurements only All the source channels output simultaneously The source outputs are stopped in the opposite order that you specify in the OUTPUT SEQUENCE table on the MEASURE OUTPUT SEQUENCE screen For a stress sequence example see Figure 3 1 For a standby sequence example see Figure 3 2 3 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Output Sequence Sequential Mode Default output sequence in the sequential mode is shown below In the default settings output channels start the output in this order and stop the output in the opposite order SMU1 SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 Oa O A et Rae Starting Outputs In the idle state output switches of all units are on and the units output 0 V When moving to the measurement stress force or standby state the units operate as shown below 1 Disabled units keep 0 V output and turn the output switch off where disabled unit m
150. P SETUP For sampling measurements AXIS MARKER SPREAD RE SAMPLING STOP CONST Y2 SHEET SETUP SETUP COND SETUP 6 46 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group GRAPH LIST GRAPHICS screen ORAPH LIST GRAPHICS SHORT S3Aug03 06 18PM user comment V TIME CURSOR CURSOR 189 73525 856 3245mV TO MARKER 208 7352s 120 2131m MARKER data variable r Ii 213 1m L_ fa 124 1mA LINE display area Ww Eer 2 00 1 LINE v Lr OFF GRAD MODE OFF 200m taiv TANGENT MODE OFF REGRESS MODE OFF SELECT one SOR 9 009 TIME s LOO div 1000 4 MARKER CIPE SCALING DISPLAY SWEEP TIMING CONST CURSOR for ies SETUP seTUP SETUP SETUP UGDOSOH 10050 On the GRAPH LIST GRAPHICS screen measurement results are displayed and you can analyze the measurement results graphically User Comment In this field you can enter a desired comment This comment is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups Cursor marker indicator In these fields the coordinate values of the cursor and marker locations are displayed If cursor or marker is not displayed these fields are blank The three fields are for X Y1 and Y2 coordinate values
151. PGU1 SMUI1 PGU2 SMU2 SMU3 V oe u D o 3 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 3 1 Measurement Functions Stress Force Function Example of the Stress Force Sequence Idle State Stress Force State idle State a saad Stress Force PGUI l AC Stress f H B SMU1 f Ser NSYNC PGU2 AC Stress E a Jt ce 9 ae elay time of PGU pulse ee 4 SMU2 NSYNC Hold Time SMU3 S t l DC Stress Stress Start Stress Stop UGDO4003 e output sequence from idle state to the stress state 1 PGUI 2 SMUI1 3 PGU2 4 SMU2 5 SMU3 e stress force sequence in the stress force state The stress force channels PGU1 PGU2 and SMU3 start stress and stop stress at the same time output sequence from stress state to the idle state 1 SMU3 2 SMU2 3 PGU2 4 SMU1 5 PGU1 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 9 Measurement Functions Stress Force Function Stress Stop Function at Abnormal Status On the STRESS STRESS SETUP screen you can select whether the stress stops or continues when an abnormal status occurs When an 4155B 4156B is stopped by the stress stop function a message is displayed in the message display area The stress stop function is not effective until the stress has been
152. PLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present Agilent 4155B 4156B User s Guide Vol 2 Edition 5 WARNING Pf r OY PB Agilent 4155B 4156B User s Guide Vol 2 Edition 5 e DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained e DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed Dangerous Voltage capable o
153. Pulse count Allowable range to 65535 If you use two PGUs both PGUs are set to the same pulse count You cannot set different values for each PGU Pulse period pulse width delay time Each parameter has six setting ranges as shown in Table 1 15 Ranges of Pulse Period Pulse Width and Delay Time Range Pulse Period Pulse Width Delay Time a Resolution 1 2 0 us to 100 0 us 1 0 us to 99 9 us 0 to 100 0 us 0 1 us 2 100 us to 1000 us 1 us to 999 us 0 to 1000 us 1 us 3 1 00 ms to 10 00 ms 0 01 ms to 9 99 ms 0 to 10 00 ms 10 us 4 10 0 ms to 100 0 ms 0 1 ms to 99 9 ms 0 to 100 0 ms 100 us 3 100 ms to 1000 ms 1 ms to 999 ms 0 to 1000 ms 1 ms 6 1 00 s to 10 00 s 0 01 s to 9 99 s 0 to 10 00 s 10 ms a The setting range of delay time is 0 lt delay time lt specified pulse period The pulse period pulse width and delay time must be set in the same range Also if you use two PGUs both PGUs are set to the same pulse period value So these three parameters must be set in the same range for both PGUs Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 21 Table 1 16 Measurement Units Pulse Generator Unit PGU Leading edge and trailing edge transition time The leading edge and trailing edge transition times have five setting ranges as shown in Table 1 16 Ranges and Resolutions of Leading and Trailing Transition Time Range a oom Resolution 1 100 ns to 1000 n
154. R FUNCTION DEFINITION screen as follows NAME UNIT DEFINITION gm S DELTA Id DELTA Vg Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 5 Data Variable and Analysis Function Data Variable User Variable A user variable is a data variable that is a numeric list which is passed via GPIB commands of PAGE CHANnels UVARiable and TRACe DATA subsystems from an external computer or the Internal IBASIC For information about the PAGE CHANnels UVARiable and TRACe DATA subsystems refer to GPIB Command Reference You can perform calculations between measurement results and the numeric list or plot the numeric list on the GRAPH LIST GRAPHICS screen You can define up to six user variables A user variable consists of the following user variable name must start with alphabet character and can consist of maximum six alphanumeric characters Name must be unique Name is case sensitive For example VTH is different from Vth data numeric list unit Optional Length to 6 characters Valid characters any characters Calculation between variables of different length If you perform calculation between user variables or between a user variable and a measurement data variable and the number of data are different the extra data in the longer variable are invalid Example Following IBASIC program defines a user variable that has 5 data elements 10 ASSIGN Hp4
155. ST GRAPHICS SHORT 93Aug09 06 18PM MARKER 751 2530mv 10 00UA 1 0342UuA CA A MARKER 1 88 1 00 MIN MAX H i6 IB k Ni P DIRECT MARKER CURSOR decode decode div div MARKER SKIP AUTO ANALY SIS 100 f 100 f CURSOR 0 009 VBE Y 100 m div 1 00 OFF AXIS x LINE SCALING DISPLAY SWEEP TIMING CONST Y2 SETUP SETUP SETUP SETUP UGTO2002 You can display the markers on the plotted measurement curves on the GRAPH LIST GRAPHICS screen by selecting MARKER CURSOR primary softkey then selecting MARKER secondary softkey The marker for Y1 axis is a circle o0 and the marker for Y2 axis is an asterisk The active marker depends on the selected axis Markers have the following functions on the GRAPH LIST GRAPHICS screen e displaying values of measurement curve The X Y1 or Y2 coordinate values at the marker location are displayed e specifying a point at which to draw a tangent line For tangent line mode the marker is used to specify the position at which to draw a tangent to the measurement curve Refer to Line Drawing on page 7 39 e displaying values of data variables 7 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function The data variable values at the marker location are displayed specifying the position for direct keyboard calculation If you enter an expression that has data variables related to measurement points the value of t
156. TION USER FUNCTION and USER VARIABLE screens To set up variable to be displayed on the LIST page In DATA VARIABLES fields select secondary softkey for desired variable Example Following figure is an example setup to display VE IC and IB on LIST screen DISPLAY DISPLAY SETUP Q4JANOL 01 30PM VE DISPLAY MODE LIST Te LIST No NAME JB 1 E 2 Ic Sd 4 5 6 gt 1C 8 XDATA VARIABLES 4 2 1B LAY AUTO PREV NEXT Pe LANLYSI PAGE PAGE UGC1038100 0 4 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements To Execute Calibration To execute all self calibration test items perform the following 1 2 3 Press System key in the PAGE CONTROL key group Select CALIB DIAG primary softkey In the SYSTEM SELF CALIBRATION DIAGNOSTICS screen select CALIB ALL secondary softkey After the calibration execution each test result is displayed in each STATUS field To set auto calibration Move the pointer to the AUTO CALIB field then select the ON secondary softkey Self calibration is performed automatically every 30 minutes Be aware that measurement cannot be performed while calibration is executed To Use Offset Cancel Function 1 2 3 Press Meas key in the PAGE CONTROL key gr
157. Then you can change the value VAR1 STEP softkey Select VARI STEP secondary softkey to change the step value of the primary sweep VARI The present step value is shown on this softkey and in the data entry area Then you can change the value COMP softkey Select COMP secondary softkey to change the compliance and power compliance values of the primary sweep VAR1 The present V or I compliance value is shown on the middle line of this softkey and the present power compliance value is shown on the last line of this softkey Selecting COMP softkey highlights this softkey and the present I or V compliance value appears in the data entry area You can change the value Then selecting COMP softkey again displays the present power compliance value in the data entry area You can change the value To disable the power compliance enter 0 zero or OFF 6 68 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group e VAR2 START softkey displayed only if VAR2 is defined Select VAR2 START secondary softkey to change the start value of the secondary sweep VAR2 The present start value is shown on this softkey and in the data entry area Then you can change the value VAR2 STEP softkey displayed only if VAR2 is defined Select VAR2 STEP secondary softkey to change the step value of the secondary sweep VAR2 The present step value is shown on this softkey and in the data entry area Then you can
158. User s Guide Volume 2 Measurement and Analysis Agilent 4155B Semiconductor Parameter Analyzer Agilent 4156B Precision Semiconductor Parameter Analyzer Eee Agilent Technologies Agilent Part No 04156 90200 Printed in Japan May 2000 Edition 5 Legal Notice The information contained in this document is subject to change without notice Copyright 1997 2000 Agilent Technologies This document contains information which is protected by copyright All rights are reserved Reproduction adaptation or translation without prior written permission is prohibited except as allowed under the copyright laws Product Warranty Agilent Technologies warrants Agilent Technologies hardware accessories and supplies against defects in materials and workmanship for the period of one year from the warranty start date specified below If Agilent Technologies receives notice of such defects during the warranty period Agilent Technologies will at its option either repair or replace products which prove to be defective Replacement products may be either new or like new Warranty service of this product will be performed at Agilent Technologies Buyer shall prepay shipping charges to Agilent Technologies and Agilent Technologies shall pay shipping charges to return the product to Buyer However Buyer shall pay all shipping charges duties and taxes for products returned to Agilent Technologies from another country Agilent Technologies
159. V 1 00 div 10 00 n 3 3 OM EXIT CANCEL UGTO2009 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 19 Analyzing Measurement Results Manual Analysis To Change Range of X or Y Axis Scale 1 2 3 4 Select DISPLAY SETUP primary softkey Select RE SETUP GRAPH secondary softkey Move pointer to maximum or minimum value field of X or Y axis scale by using the arrow keys then edit the setup value by using ENTRY keys or rotary knob Select EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing range of X or Y axis scale Select CANCEL primary softkey Example The following figure shows an example setup to change maximum value of Y1 axis GRAPH LIST GRAPHICS SHORT 93Aug09 O618PM CA 1 00 1 IB on a ae decode decode idiv a fdiv BE Ze we N 100 f t 100 f 0 000 VBE V 100 m div 1 00 1 00 EXIT CANCEL UGT02010 5 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Change Variable Assigned to X Y1 or Y2 Axis 1 Select DISPLAY SETUP primary softkey 2 Select RE SETUP GRAPH secondary softkey 3 Move pointer to variable field of X Y1 or Y2 axis by using arrow keys then select secondary soft
160. VAL is the minimum resolution of the sampling interval For details about the INITIAL INTERVAL see Linear Sampling Measurement on page 2 24 Thinned out Sampling Measurement on page 2 27 or Logarithmic Sampling Measurement on page 2 30 To set up the stop condition specify the following parameters on the MEASURE SAMPLING SETUP screen Parameter Description ENABLE DISABLE ENABLE DEL THRESHOLD EVENT NO Enables or disables the stop condition Delay time in second This is the time from starting sampling measurement to enabling this function Allowable range 0 to INITIAL INTERVAL x 32767 s Resolution INITIAL INTERVAL Name of measurement data or user function to monitor for stop condition Val of EVENT Threshold value at which to stop sampling measurement Th of EVENT Event for stop condition Val gt Th True if NAME parameter value is greater than THRESHOLD value Val lt Th True if NAME parameter value is less than THRESHOLD value Val gt Th True if absolute NAME parameter value is greater than absolute THRESHOLD value Val lt Th True if absolute NAME parameter value is less than absolute THRESHOLD value Target value of the count the event occurs true When the count of true is this value sampling is immediately stopped Allowable range 1 to 200 Agilent
161. VBE V 100 m div 1 00 AXIS LINE SCALING DISPLAY SWEEP TIMING CONST y2 SETUP ISETUP seTuP SETUP UGTO2003 7 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function Line Drawing You can draw up to two lines in plotting area on GRAPH LIST GRAPHICS screen To draw lines you can select one of following four line modes e Normal line mode can draw a line through two cursors cursors e Grad line mode can draw a line through a cursor with specified gradient cursor ag ae ee ae Y GRAD VALUE Y X uams t0 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 39 Data Variable and Analysis Function Analysis Function e Tangent line mode can draw tangent line to marker which is on measurement curve marker Measurement curve UEDOTO0S 80x60 e Regression line mode can draw regression line within area specified by two cursors cursor i HORE L cursor regression line YGDOFOID SOGO 7 40 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function Scaling Functions You can change the axis scales after plotting the measurement results on the GRAPH LIST GRAPHICS screen The following scaling functions are provided e Autoscaling Changes X
162. VMU can measure up to 20 V Table 1 13 shows the voltage measurement range of VMU Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 17 Measurement Units Voltage Monitor Unit VMU Table 1 13 VMU Voltage Ranges and Resolutions Measurement Resolutions Measurement Range Integration Time High Speed Mode Sampling 1PLC or 640 us to 1 92 Longer ms 80 us to 560 us Measurement Grounded 2V 2 uV 20 uV 200 uV 2 mV Measurement 20 V 20 nV 200 uV 2mV 20 mV Differential 0 2 V l uV 2 uV 20 uV 200 uV Measurement 3y 2 uV 20 uV 200 uV 2 mV a Measurement resolution depends on the integration time setting For Knob sweep measurement see 20 V Range for Grounded mode and 2 V Range for Differential mode of Integration Time 80 us to 560 us b This column is applied to the sampling measurement that initial interval is set to 480 us or shorter NOTE When you perform knob sweep measurement e only 20 V range is available for grounded measurement mode e only 2 V range is available for differential measurement mode Bias Current of Buffer Amplifier may Damage DUT The following figure shows a circuit diagram of a VMU To ADC Coaxial Cable xG Bias Gurrent a 7 E Protection Circuit Gain Amplifier Buffer Amplifier Input Switch Accurate Charge V When a coaxial cable is connected to VMU and when the measurement terminal of VMU is open the charge of the bias
163. Y coordinate values at the two points where LINE intercepts the perimeter of the plotting area 7 24 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function L1G1 Returns the slope of LINE for Y1 axis Syntax L1G1 This function calculates the slope by using the following formula e If X and Y axes are both linear scaling a Y1 Yo X1 Xo e If X axis is logarithmic scaling and Y1 axis is linear scaling a yy yo log x log xo e If X axis is linear scaling and Y1 axis is logarithmic scaling a log y log yo x1 Xo If X and Y1 axes are both logarithmic scaling a log y log yo log x log xo Where a Slope of LINE1 Xo Yo X Y X and Y1 coordinate values at the two points where LINE intercepts the perimeter of the plotting area Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 25 Data Variable and Analysis Function Read Out Function L1G2 Returns the slope of LINE for Y2 axis Syntax L1G2 This function calculates the slope by using the following formula If X and Y2 axes are both linear scaling a Y1 Yo X Xo e If X axis is logarithmic scaling and Y2 axis is linear scaling a Y1 yo log x log xo e IfX axis is linear scaling and Y2 axis is logarithmic scaling a log y log yo x1 xo If X and Y2 axes are both logarithmic scaling a log y lo
164. Y scaling to half the present scaling This enlarges measurement curve on the plot area If the cursor is not displayed long cursor appears at the center then zoom is performed e ZOOM OUT softkey Select ZOOM OUT secondary softkey to change the X and Y scaling to double the present scaling This reduces measurement curve on the plot area If the cursor is not displayed long cursor appears at the center then zoom is performed e CENTER AT CURSOR softkey Select CENTER AT CURSOR secondary softkey to center the display around the cursor at the same resolution If a cursor is not displayed a long cursor appears at the center e CURSOR TO MARKER softkey Select CURSOR TO MARKER secondary softkey to move the cursor to the marker position Both marker and cursor must be displayed e CANCEL SCALING softkey Select CANCEL SCALING secondary softkey to redraw the plotting area with the original settings most recent DISPLAY DISPLAY SETUP screen settings or RE SETUP GRAPH settings Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 53 Screen Organization GRAPHI LIST Screen Group DISPLAY SETUP softkey Select DISPLAY SETUP primary softkey to display secondary softkeys for setting or changing the display RE SETUP GRAPH softkey Select RE SETUP GRAPH secondary softkey to change the user comments variable name for each axis minimum and maximum values for each axis scale mode of each axis and displayed data variables After
165. a h Rh k as eee ve ee ee ec a 4 49 To Set up Stress Source Channels 00 0 cece eee eee 4 51 To Set up Stress Condition Timing 00 0 cee eee eee eee 4 53 To Set up ac Pulse Output 0 eee nee 4 55 To Set up de Output 0 neces 4 57 Contents 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents WO FOPCe Stress ose ea ast a Std Titel it Che a edt E E dat Ok 4 58 To Use Selector de erene e an ett ee ie ee hee 4 60 5 Analyzing Measurement Results Manual Analysis caaaeii eai pk ee a E EE E E E 5 3 To Specify a Measurement Point on Curve 2 0 cece eee eee ee 5 4 To Specify between Measurement Points on Curve 0000 5 6 To Display or Move Cursor iyere teraria amas i o eee ent n een eens 5 8 To Adjust Display Range to Measurement Curve Automatically 5 9 To Zoom the Display Range 0 cece eee e ee 5 9 To Center Display at Cursor Location 0 0 0 c ee eee eee eee 5 10 To Draw Line through Two Specified Points 00 2005 5 10 To Draw Line through Specified Point with Specified Gradient 5 12 To Draw Tangent to Specified Point of Measurement Curve 5 14 To Draw Regression Line for Specified Region 4 5 16 To Display and Selecta Line 0 0 2 eee cee ene 5 18 To Display Grid on the Graph 0 2 cece eee ene 5 18 To Change Data Variable on Graph 20 eee eee 5
166. a one cell pointer so these functions are for the column that contains the pointer not the entire row e Marker to Min Max Moves the pointer to the maximum or minimum measurement point value e Direct Movement Moves the pointer directly to the value that is closest to the specified value e Marker Skip Moves the pointer to data for the next measurement curve This function only has meaning for subordinate sweep measurements and append measurements Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 37 Figure 7 5 Data Variable and Analysis Function Analysis Function Cursor Cursors are used to specify the position for line drawing or scaling functions on the GRAPH LIST GRAPHICS screen Refer to Line Drawing on page 7 39 and Scaling Functions on page 7 41 You can select a short cursor which is a cross or a long cursor which is a cross with long lines You can move the cursor anywhere in the plotting area by using arrow keys of the Marker Cursor key group Cursors on the GRAPH LIST GRAPHICS screen GRAPH LIST GRAPHICS SHORT 93Aug09 66 18PM MARKER CURSOR 751 2530mV 10 02UA 10 02UA OFF CA C MARKER 1 00 1 00 MIN MAX INTER POLATE H Ip OFF pf E DIRECT MARKER CURSOR decode decode idiv div MARKER SKIP AUTO ANALY SIS 100 f 100 f 0 000
167. a you want to save These numbers correspond to NO column of LIST screen e right field upper limit e left field lower limit Select ALL secondary softkey to specify all result data e UNIT Specify whether to include units for example V or ms e ON secondary softkey to include units e OFF secondary softkey to not include units 6 66 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group For ON result data is saved as string data not numeric data So result data is saved with specified string marker For string marker see description of STRING MARK field Ineffective value is treated as string even if you set this field to OFF e DELIMITER Specify the data delimiter e SPACE secondary softkey to specify space e TAB secondary softkey to specify tab e COMMA secondary softkey to specify comma e STRING MARK Specify the string marker e NONE secondary softkey to specify no string marker e woe secondary softkey to specify double quotes string marker secondary softkey to specify single quotes string marker RE SETUP softkey Select RE SETUP primary softkey to change the user comments variable name for each column and displayed data variables After you select this softkey a pointer highlight appears on the variable name of the first column You can move the pointer to the desired parameter by using the left arrow up arrow right arrow and down a
168. able 2 Open the measurement terminals at the cable end of the device side 3 Press green key and Stop front panel key in this order The ZERO CANCEL field is automatically set to ON and offset data is measured This data is used for the offset cancel Allowable offset value is shown in Table 3 11 If offset data is too large offset measurement for this measurement path is not performed For this path an is marked in the ZERO CANCEL table Then the previous data is used for the offset cancel The initial offset data is 0 During offset measurement integration time is automatically set to specified time or medium whichever is longer After offset data measurement integration time returns to same setting as before the offset measurement was performed After you perform the offset measurement if you change the ranging mode to 10 nA limited auto or 10 nA fixed and you try to perform the offset measurement again the offset data is not measured for this unit But the previous offset data is effective So the offset cancel can be performed for this unit using the old offset data 3 66 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Zero Offset Cancel Table 3 10 Ranging Mode Available for Offset Measurement i i Measurement Measurement Mode Unit Available Ranging Mode Range Current Measurement HPSMU auto I nA MPSMU E 1 nA limited or fixed l nA HRSMU auto 10 pA 10 pA limited
169. able and Analysis Function Data Variable nocc cic cisco ign 80s bees ae AIA dee ee eee Rd 7 3 Data Variable for Output or Measurement Data 00 0005 7 3 User Function e 2 20 35 ele Oi a BA el eee cada ear ae ae 7 5 User Variablen onenen dda it bed eh ded eee eee Sone 7 6 Syntax of Data Variable Name 0 0 cece eee eee eee 7 7 Expressi sri eolia ebay aiia tee wine A E ek hela eet 7 8 Built in Function s ec 4cec 40 eh be eb ss AS red dee ee 7 11 AEBS iaei sot oruad R O O huntea tot dipole tau la ae ont ATAA a erp aan ets NA 7 12 AT sbeebs ens bbe DAR oi BR ee ae ead 7 12 AVG lest ion eB Sha Das ated eae feng nd Mead gtd E Ue ca eae 7 12 CONDE EAE EEE te ssh S EEEE ie oe Ma ete Mie le 7 13 DELTA Z omr eea r a a a a eg EN 7 14 IDIEF Saa pews 24 s og eur cab na nE ethane AEA E E EA 7 15 EXP oond rna Oe bd Pe RES ae wh eee eo IF hee Sn A 7 16 INTEG Aronen eg 2 aoe Gee ag Sara aes WR aaa ee 7 16 LOE ease ks crate hn Moe a e tnt ee iee eae cece aes 7 17 LOGS a ee ee Mee BREE MRE Bon hed eh Aes 7 17 I CANA G Ag et ene anne ere tae A en et oe AS 7 18 MAX wis eas See eee eee Veena ete adel aoe tale cee als 7 19 MIN ogatirs atedteatacd d dist ouisigx tulle taie ido inca eled ce Sawodd aed 7 19 SORT eicoviws ds ees eee sb thse cad ae eed hee EN oe 7 19 Read Out Function epee iae ee a a n eens 7 20 DOK OEE EIEE tented ace ted E We RRR Geta EAE TN 7 21 OGY ei eects He CL OG OEE ie EE GY cna ce ha 7 21 EN cada ris pats
170. able delay must be initial inte ENABLE DELAY must be lt 32767 x INIT INT rval x 32767 or less No unit is set to STANDBY ON System busy MEASURING or 4145 USER MODE MIN MAX have different sign in LOG Can do such operation only for USER VAR Illegal setup The name was already used User variable is used If a user variable is used in user deleted in user function functions the user variable cannot be AUTO Analysis is undefined TOT SAMP TIME must be lt INIT INT x 32767 Total sampling time must be initial interval x 32767 or less and 1 x 10 or less Measure channel is not assigned Unable to find approxi imate data Illegal graph scale setup The Sweep Pulse Polari ty is not same SYNC can not be set for standby CH Agilent 4155B 41 56B User s Guide Vol 2 Edition 5 165 166 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 If You Have A Problem If Errors Occur Set value is too small for range For LOG sweep measurement start and stop value must be equal or more than setup resolution For sweep measurement step value of VARI and VAR2 must be equal or more than setup resolution PGU Peak Base difference must be lt 40V Use Sweep Bias instead of SMU Pulse Knob Sweep sets VAR1 to CONST If you set VARI for knob sweep measurement the VARI channel forces a constant value equal
171. able names that you set on this screen User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups DISPLAY MODE This field specifies display mode If present mode is graphics mode select LIST softkey to change to list mode LIST table is displayed LIST NAME fields of LIST area specify variables that you want to display on LIST screen You can enter the desired variable names Entries in this area and data variable area determine which channels will actually make measurements You can enter up to eight variable names When the pointer is located in NAME field you can select desired variable names in secondary softkey area 6 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group DATA VARIABLES DATA VARIABLES fields specify the variable names that you want to display on the GRAPH LIST LIST screen The numerical values of these variables will be shown on the LIST screen according to the marker position In this field you can select the desired variable names in the secondary softkey area Even if the setup data variables are defined using variables that are not set in the NAME field of the LIST table the variables are automatically measured after pressing a measurement front panel key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 39 Screen Organization DISPLAY Screen Group DISPLAY ANA
172. able power compliance you enter 0 zero or OFF e VAR2 START softkey displayed only if VAR2 is defined Select VAR2 START secondary softkey to change the start value of the secondary sweep VAR2 The present start value is shown on this softkey and in the data entry area Then you can change the value 6 56 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group e VAR2 STEP softkey displayed only if VAR2 is defined Select VAR2 STEP secondary softkey to change the step value of the secondary sweep VAR2 The present step value is shown on this softkey and in the data entry area Then you can change the value e COMP softkey displayed only if VAR2 is defined Select COMP secondary softkey to change the compliance and power compliance values of the secondary sweep VAR2 The present V or I compliance value is shown on the middle line of this softkey and the present power compliance value is shown on the last line of this softkey Selecting COMP softkey highlights this softkey and the present I or V compliance value appears in the data entry area Then you can change the value Then selecting COMP softkey again displays the power compliance value in the data entry area You can change the value To disable the power compliance enter 0 zero or OFF Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 57 Screen Organization GRAPHI LIST Screen Group TIMING SETUP softkey Select TIM
173. able range of start depends on the output range of secondary sweep source For the output range of each measurement channel refer to Chapter 1 Step increment of secondary sweep Number of secondary sweep steps Allowable range to 128 Stop value of secondary sweep is calculated from start step and number of steps Allowable range of stop depends on the output range of secondary sweep source For the output range of each measurement channel refer to Chapter 1 compliance power compliance 2 8 Compliance value of secondary sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of secondary sweep source For the compliance range of each measurement channel refer to Chapter 1 Optional Power compliance value of secondary sweep source This parameter applies to SMU only Allowable range of power compliance depends on the power compliance range of sweep source For details refer to Chapter 3 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 2 3 Measurement Mode Sweep Measurement Mode Synchronous Sweep Measurement For synchronous sweep measurement you set up a synchronous sweep source VARI in addition to a primary sweep source VAR1 The output of the synchronous sweep source is swept synchronously with the output of the primary sweep source at a constant offset value and ratio Synchronous Sweep Measurement Output Voltage or Gyrrent Sync
174. ables built in functions and other user defined functions By selecting secondary softkeys you can enter VNAMEs or INAMEs that are set on the CHANNELS CHANNEL DEFINITION screen For syntax see Expression in Chapter 7 For example to define a user function for mutual conductance gm of an FET define gm on this screen as follows CHANNELS USER FUNCTION DEFINITION S4JANO1 01 30PM vs vos NAME UNIT DEFINITION ye GM DIRE JDA G eee ee ee VSUB IS ID MORE 12 DIFF IDI VG CHANNEL SER USER PREV NEXT DEF FOTN YAR PAGE PAGE UGDOS020 100x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 13 Screen Organization CHANNELS Screen Group CHANNELS USER VARIABLE DEFINITION screen On this screen you register user variables that were defined by GPIB To use a user variable you must register it on this screen For details about user variables refer to User Variable in Chapter 7 CHANNELS USER VARTABLE DEFINITION S4JANO1 01 30PM user comment t Vee Ic xUSER VARIABLE NAME UNIT LL SI Vth Vo ee tod DELETE ROW 100 CHANNEL USER PREW NEXT DEF FOTN PAGE PAGE UGDoso28 80x5Ch User Comment In this field you can enter a desir
175. ae Uae h adie egy eae E E 7 32 OMY Torr eiee take Phe hd ba bed detail bonded es 7 32 OMY Dessert Meceite b a Tio L AS py Utils tLe aA ce Atel ie tf 7 32 Analysis Function 0 0 cece cence cette eens 7 33 Marker on the GRAPH LIST GRAPHICS screen 02005 7 34 Marker on the GRAPH LIST LIST screen 0 0 0000005 7 36 CUTSOT eshte he ace Paginas aware a ae eas ee eet a 7 38 Eine Drawing sura eae a amon aay Na O a o adem Beas Plays tenn 7 39 Scaling Functions 0 0 ccc ee eee eee aa Eae E 7 41 Contents 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents Overlay Display Function 00 0 0 cece eee ene 7 42 Automatic Analysis Function 0 0 0 c cece cece 7 42 8 If You Have A Problem When You Make A Measurement 000 e cece eee eens 8 4 If Measured Value Oscillates when Measuring High Frequency Devices 8 5 If Measured Value Oscillates when Measuring Negative Resistance 8 6 If Noise Affects the Measured Values 000 e ee ee eee 8 7 If Measured Voltage has some Error when Forcing a Large Current 8 8 If Large Current Causes High Temperature Thermal Drift 8 8 If Measurement Takes More Time than Specified 8 9 If Measurement Damages the Device under Test 04 8 10 If You Get Unexpected Data when Performing Sampling Measurement 8 12 TE Errors OCCUR 3323 32 2
176. aling and Y axis is linear scaling a y1 yo log x log xo e If X axis is linear scaling and Y axis is logarithmic scaling a log y log yo X xo If X and Y axes are both logarithmic scaling a log y log yo log x log xo Where a Slope of LINE2 Xo Yo X Y X and Y coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area 7 28 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function L2G1 Returns the slope of LINE2 for Y1 axis Syntax L2G61 This function calculates the slope by using the following formula e If X and Y axes are both linear scaling a Y1 Yo X1 Xo e If X axis is logarithmic scaling and Y1 axis is linear scaling a yy yo log x log xo e If X axis is linear scaling and Y1 axis is logarithmic scaling a log y log yo x1 Xo If X and Y1 axes are both logarithmic scaling a log y log yo log x log xo Where a Slope of LINE2 Xo Yo X1 y1 X and Y1 coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 29 Data Variable and Analysis Function Read Out Function L2G2 Returns the slope of LINE2 for Y2 axis Syntax L2G2 This function calculates the slope by using the following formula If X and Y2 axes are both
177. and Y axis scaling to fit the measurement curve e Zooming in Changes the scaling to half the present scaling This enlarges the measurement curve on the plot area e Zooming out Changes the scaling to double the present scaling This reduces the measurement curve on the plot area e Centering at cursor Centers the display around the cursor at the same resolution Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 41 Data Variable and Analysis Function Analysis Function Overlay Display Function You can overlay a measurement curve that was previously saved into one of the four internal memories onto the curve that is presently displayed on the GRAPH LIST GRAPHICS screen This is useful for comparing measurement results Overlay Display Information You can use following information of overlaid curve instead of present information e Axis information e Cursor and marker position x yl y2 e Line x interrupt yl interrupt and gradient y2 interrupt and gradient e List of the data variables Adjusting axes You can use the axis scaling of overlaid plane instead of present scaling Automatic Analysis Function This function can automatically draw up to two lines and position a marker on the plotting area of the graph screen You set up this function on the DISPLAY ANALYSIS SETUP screen This function is performed automatically when measurement finishes e AUTO ANALYSIS secondary softkey is pressed 7 42 A
178. ant channels Secondary softkeys The first line of each secondary softkey displays the variable name of the constant source The second line displays source output value For SMUs the third line displays compliance value For other units the third line is blank e Example If an SMU is set as follows the following softkey appears Vce 5 00V 10 0mA Voltage source mode e Variable name VNAME Vce e Output voltage value 5 0 V e Compliance value 10 mA source output value Pressing the secondary softkey displays the source output value in the data entry area You can change the value by using the rotary knob numeric keys or arrow keys in the Edit key group e compliance value only for SMU Pressing the secondary softkey twice displays the compliance value in the data entry area You can change the compliance value by using the rotary knob numeric keys or arrow keys in the Edit key group e setting range Each setting range depends on the measurement unit See Chapter 1 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 25 Measurement Functions Knob Sweep Function Analysis of the Knob Sweep Measurement Results On the KNOB SWEEP screen you cannot use analysis functions and user functions But you can analyze the knob sweep measurement result by quitting knob sweep mode as shown below 1 Select the SETUP COPY primary softkey on the KNOB SWEEP screen 2 Press the Graph List front panel key The
179. asurements Example The following example shows the synchronous sweep conditions VARI parameters EASURE SWEEP SETUP 94JANO1 01 30P xVARIABLE VARI VARZ VARL UNIT SMU2 MP S5MU1 MP UNIT SMUS MP AME Vee Ib NAME Vsyne SWEEP MODE SINGLE SINGLE OFFSET 0 00 LIN LOG LINEAR LINEAR RATIO START oy 0 00 UA COMPLIANCE 100 uA STOP 5 00 500 uA POWER COMP OFF STEP 0 10 V 100 uA O OF STEP 54 6 COMPLIANCE 100 mA 5 v POWER COMP OFF OFF TIMING HOLD TIME 0 0 s DELAY TIME 0 000 s z XSWEEP CONTINUE AT ANY Status xCONSTA UNIT AME ODE SOURCE COMPL LANCE 0 04 SWEET PGU MEASURE OUTPUT PREV NEXT SETUP SETUP_ SEa PAGE PAGE UGO1005 90x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 19 Making a Measurement Sweep Measurements To Set up Constant Output Constant voltage current source is the measurement unit defined as CONST in the CHANNELS CHANNEL DEFINITION screen To set up the constant output source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 CONSTANT SOURCE Enter the desired output value of the constant source 2 CONSTANT COMPLIANCE Only for SMU Enter the compliance value for the constant source You cannot change UNIT NAME and MODE in this screen To change the values
180. at includes I compliance an error occurs 3 56 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Compliance Compliance Compliance is available for SMU HPSMU MPSMU HRSMU and VSU To prevent damage to the test device due to overcurrent overvoltage or overpower you can set current compliance voltage compliance or power compliance for SMU For VSU current compliance is automatically set to approximately 100 mA You cannot change it Voltage and Current Compliance Voltage compliance V compliance and current compliance I compliance are limiters that can be set with the same resolution and accuracy as output current or output voltage Voltage compliance is for the SMU in current output mode current compliance is for the SMU in voltage output mode When a unit reaches compliance the unit acts as a constant voltage source or a constant current source The unit keeps the output value when reaching compliance For compliance setting range and resolution refer to Table 3 6 to Table 3 9 Polarity and Output Area e Polarity of Voltage compliance The 4155B 4156B automatically sets V compliance polarity to the same polarity as the output current regardless of the specified V compliance polarity There is no compliance for the opposite polarity e Polarity of Current compliance The 4155B 4156B automatically sets I compliance for both the positive and negative polarity regardless of the I complia
181. at ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen 3 Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed 4 In field 1 select GRAD secondary softkey 5 In field 2 select secondary softkey to specify desired axis 6 In field 3 select e BY X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 7 Ifyou selected BY X Y COORDINATE secondary softkey a Inthe X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coordinate c Goto step 8 8 Ifyou selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select e AFTER secondary softkey if you want to set a search start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings d Ifyou selected AFTER select secondary softkey to enter desired data variable in field 7 e Ifyou selected AFTER enter desired expression in field 8 9 Inthe Gradient field enter gradient expression 5 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related t
182. at an expression can be used within an expression Direct Keyboard Calculation You can directly calculate the value of an expression as follows e Enter the expression by using the front panel keys press the green key then press Enter The value of the expression is displayed If the expression contains data variables that are related to measurement points the calculated value corresponds to the marker position Operation between data variables Operation between data variables is performed between data at the same measurement points Arithmetic operator precedence Precedence Operator Highest Parentheses may be used to force any order of operations Functions built in function and data variable Exponentiation Multiplication and division Lowest Addition subtraction monadic operators When an expression contains more than one operation the order of operation is determined by operator precedence Operations with the highest precedence are performed first Multiple operations with the same precedence are performed left to right The following table shows the arithmetic operator precedence 7 8 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Expression Figure 7 1 Expression Syntax expression monadic operator F dyadic expression operator numeric constant scientific constant data variable name ag oo read out fu
183. bles To move to the CHANNELS screen group press Chan front panel key The following primary softkeys appear CHANNEL USER USER PREV NEXT DEF FCTN VAR PAGE PAGE Select CHANNEL DEF softkey to move to CHANNELS CHANNEL DEFINITION screen e Select USER FCTN softkey to move to CHANNELS USER FUNCTION DEFINITION screen e Select USER VAR softkey to move to CHANNELS USER VARIABLE DEFINITION screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 5 Screen Organization CHANNELS Screen Group CHANNELS CHANNEL DEFINITION screen CHANNELS CHANNEL DEFINITION Q4JANO1 04 30PM user comment mw Vee Ic device 1 CONST XMEASUREMENT MODE SWEEP XCHANNEL S MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE VARZ SMUL MP Vb Ib I VAR2 ohm SMUZ MP Vee Ic v ARL ohm SMU3 MP COMMON CONST VARL SMU4 MP MUS MP SMUG MP VSUL o Jee vsuz2 VMUL wuz o POUL je PGU2 0 NE Sie ee ee DELETE ROW USER NEXT VAR PAGE UEDOS OO 80x60 On the CHANNELS CHANNEL DEFINITION screen you define the measurement mode and how to use each channel User Comment In this field you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPL
184. bration measurements are traceable to the National Institute of Standards and Technology NIST to the extent allowed by the Institute s calibration facility and to the calibration facilities of other International Standards Organization members Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 NOTE NOTE Safety Summary The following general safety precautions must be observed during all phases of operation service and repair of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment In addition it violates safety standards of design manufacture and intended use of the instrument Agilent Technologies Inc assumes no liability for customer s failure to comply with these requirements Agilent 4155B 4156B 41501B comply with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 1010 1 Agilent 4155B 4156B 41501B are INDOOR USE products LEDs in Agilent 4155B 4156B 41501B are Class 1 in accordance with IEC 825 1 CLASS 1 LED PRODUCT GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EX
185. buffer amplifier current in the VMU increases the measurement terminal voltage After a long time charge connecting DUT to the measurement terminal may damage the DUT by the discharging For the details of how to prevent this damage refer to If Measurement Damages the Device under Test in Chapter 8 1 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE Measurement Units Voltage Monitor Unit VMU High Impedance DUT Very high impedance DUT may cause measurement error due to the input leakage current from VMU To check the measurement error perform voltage measurement as follows 1 ew NS Connect SMU to the DUT Force very low current under pA to the DUT from SMU Measure voltage by SMU Compare the voltage measured by SMU and VMU Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 19 Figure 1 8 Table 1 14 Measurement Units Pulse Generator Unit PGU Pulse Generator Unit PGU Two pulse generator units PGUs are available which are in the 41501A B SMU and pulse generator expander Each PGU provides a pulsed output and can also function as a de source For pulsed output of PGU you can select 50 Q or Low impedance Figure 1 8 shows simplified PGU circuit diagram Simplified PGU Circuit Diagram Output Impedance 50 ohm gt PGU T VW oO lt j ay POUT Output Switch oo COMMON Outgut Impedance Low UGDO2008 118x50 The PGU output value is
186. cal di ing ag busy Executing auto busy Printing out ha to copy 4145 data fil to graph plot Recove calibration rd copy e to memory r error state Unable to print out or plot out when error message is displayed Cal diag must be performed in the idle state Calibration and Diagnostics cannot be performed unless the 4155B 4156B is in the idle state For example this error is displayed if the SCPI calibration command is sent when the 4155B 4156B is not in the idle state Agilent 4155B 4156B User s Guide Vol 2 Edition 5 61 62 63 64 65 66 67 100 101 102 103 104 105 106 107 If You Have A Problem If Errors Occur ADC time out The AD converter has caused a time out Perform 109 ADC test on the SYSTEM SELF CALIBRATION DIAGNOSTICS screen If this test fails the 4155B 4156B may need service Contact the nearest Agilent Technologies Sales and Service office ADC FIFO overflow The AD converter has caused a FIFO overflow A data transfer error occurred between the AD converter and the SMUC The 4155B 4156B may need service Contact the nearest Agilent Technologies Sales and Service office SMUC failed to send data to HOSTC The SMU controller failed to send data to the host controller Retry the measurement If this error is still displayed recycle the power by turning the instrument off and then on again TIFF format supports SCREEN DUMP o
187. change the value e COMP softkey displayed only if VAR2 is defined Select COMP secondary softkey to change the compliance and power compliance values of the secondary sweep VAR2 The present V or I compliance value is shown on the middle line of this softkey and the present power compliance value is shown on the last line of this softkey Selecting COMP softkey highlights this softkey and the present I or V compliance value appears in the data entry area You can change the value Then selecting COMP softkey again displays the power compliance value in the data entry area You can change the value To disable the power compliance enter 0 zero or OFF Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 69 Screen Organization GRAPHI LIST Screen Group TIMING SETUP softkey Select TIMING SETUP primary softkey to display secondary softkeys for changing the hold and delay time and SMU pulse parameters This softkey is displayed only when SWEEP is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob e HOLD TIME softkey Select HOLD TIME secondary softkey to change the hold time for the sweep measurement The present hold time is shown on this softkey and in the data entry area Then you can change the value You can change the hold time while measurement is being performed
188. channel in the measurement state and as a stress force source in the stress force state To set a unit to the stress channel select SYNC in the FCTN field for the unit If you select NSYNC the 4155B 4156B does not monitor the bias output time for the unit The unit is called as non stress channel or bias channel in this manual To use the stress force function at least one unit must be set to the stress channel which the FCTN field is set to SYNC You can select up to four stress source channels among SMUs VSUs and PGUs If a unit is set to STBY ON on the CHANNELS CHANNEL DEFINITION screen the unit cannot be set to the stress channel If you use two PGUs as ac pulse source both PGUs must be the stress channel or the non stress channel This means that if PGU1 is a stress channel PGU2 must be a stress channel not non stress channel 3 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Stress Force Function Switching Channels Connected to DUT The 4155B 4156B can control Agilent 16440A SMU Pulse Generator Selector to automatically switch units that are connected to a DUT pin You set up this automatic control on the STRESS CHANNEL DEFINITION screen For example the DUT pin is connected to a PGU for stress force when Stress front panel key in the MEASUREMENT key group is pressed then connected to an SMU for measurement when Single front panel key is pressed For details about how to control the 1644
189. creen To set up compliance value for constant output Set desired value in the COMPLIANCE field of the CONSTANT table For details about compliance see Compliance in Chapter 3 Example The following example shows the constant output conditions MEASURE SAMPLING SETUP 94JANOL O1 30PM SAMPLING PARAMETER STOP_CONDITION MODE LINEAR ENABLE DISABLE ENABLE INITIAL INTERVAL 2 ms ENABLE DELAY 0 04 s NO OF SAMPLES 1001 NAME R TOTAL SAMP TIME AUTO THRESHOLD EVENT Val gt IThI HOLD TIME EVENT NO i FILTER CONSTANT UNIT SMU2 HR NAME v2 MODE v SOURCE MO ay COMPLIANCE 100 00mA 1 00 NiE POU MEASURE OUTPUT PREV NEXT z SETUP SETUP SEQ PAGE PAGE UGT01047 100x70 4 46 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sampling Measurements To Define Stop Conditions The measurement stop condition defines the condition to stop the sampling measurement The stop condition is one of the sampling completion conditions For the sampling completion conditions see Sampling Measurement Mode in Chapter 2 1 Press Meas key in the PAGE CONTROL key group 2 Select SAMPLNG SETUP primary softkey 3 In the ENABLE DISABLE field of the STOP CONDITION area select ENABLE secondary softkey 4 In NAME field of STOP CONDITION
190. d 2 select secondary softkey to specify desired axis In field 3 select secondary softkey to select desired data variable name In field 4 enter desired expression In field 5 select Cos OY e AFTER secondary softkey if you want to set a search start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings 9 Ifyou selected AFTER select secondary softkey to enter desired data variable in field 6 10 If you selected AFTER enter desired expression in field 7 Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 and 9 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear 5 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Example Analyzing Measurement Results Automatic Analysis The following figure shows an example setup to automatically draw a tangent line to a specified measurement point 3 1 4 2 DISPLAY a ae SETUP 93JUL22 11 32AM f 5 AFTER ae A line on Y1 l DGM MAX DGM 0 01 at a point where DGM uf
191. d tailing edge of PGU1 trigger signal fo ne PGUI ff AAJ delay time pulse width PGU2 J 2y w UGDO4024 100x100 pulse start This function allows you to perform multiple pulse outputs using external pulse generators synchronized with the PGUs Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 45 Figure 3 7 Measurement Functions SMU PG Selector Control SMU PG Selector Control The 4155B 4156B can control the 16440A SMU Pulse Generator Selector to automatically switch units that are connected to a DUT pin You set up this automatic control using the SMU PG SELECTOR field on the STRESS CHANNEL DEFINITION screen For example you can specify to connect the PGU to the DUT during stress and connect the SMU to the DUT during measurement So when you press the Stress key in the MEASUREMENT key group the PGU is automatically connected to the DUT And when you press a measurement key the SMU is automatically connected to the DUT You can use up to two selectors For details about installation of the selectors refer to User s Guide General Information Figure 3 7 shows the simplified circuit diagram of an 16440A selector Simplified Circuit Diagram of the 16440A Selector 16440A Inout SMU oo aan Channel 1 Sw O Selected To DUT Input PG re SW3 Swe CONTROL From 41501 D Input To 2nd Control Logic o 2n
192. dary sweep step If there are invalid values in expression invalid values are ignored To return the minimum value of ID MIN ID SQRT Returns the square root of the expression SORT expression To return the square root of ID SORT ID Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 19 Data Variable and Analysis Function Read Out Function Read Out Function The read out functions are built in functions for reading various values related to the maker cursor or line You can use these functions to perform complex analysis of the measurement results You can use read out functions for the following e Inthe expression that is used to define a user function on the CHANNELS USER FUNCTION DEFINITION screen e As a condition for an automatic analysis function on the DISPLAY ANALYSIS SETUP screen e For direct keyboard calculations The following functions are available Function Read Out Function Marker MI MX MY MY1 MY2 Cursor CX CY CY1 CY2 Line IX IY IY1 IY2 LICO L1G L1G1 L1G2 L1X L1Y L1Y1 L1Y2 L2CO L2G L2G1 L2G2 L2X L2Y L2Y1 L2Y2 The following are restrictions for using read out functions e GRAPHICS must be selected in the DISPLAY MODE field on the DISPLAY DISPLAY SETUP screen when you use the read out function If not invalid data is returned MI is an exception MI can be used in GRAPHICS or LIST mode
193. deo A tesa e ara e degen a 8 13 If Errors Occur when You Perform Self calibration or Diagnostics 8 14 If Errors Occur when You Operate the 4155B 4156B 8 20 If a Measurement Data Status is Displayed 0000002 eee 8 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 9 Contents Contents 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units This chapter explains basic output and measurement functions of each measurement unit For the following units a simplified circuit diagram is shown and where applicable the output and measurement ranges are provided Ground Unit GNDUY Source Monitor Unit SMU Voltage Source Unit VSU Voltage Monitor Unit VMU Pulse Generator Unit PGU 1 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 1 1 Measurement Units Ground Unit GNDU Ground Unit GNDU The ground unit GNDU is in Agilent 41501A B SMU and pulse generator expander The GNDU is a 0 V constant source that provides a measurement ground reference and can sink up to 1 6 A Figure 1 1 shows a simplified GNDU circuit diagram Simplified GNDU Circuit Diagram gee GNDU FORCE Output Switch UGBO2001 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 3 Measurement Units Source Monitor Unit
194. der an order that channels return to OV UGDO4008 1ows100h Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 29 Measurement Functions Standby Function When Getting Setup File Usually the 4155B 4156B is in the idle state after getting setups from a file or an internal memory But if a of the following must be true the 4155B 4156B keeps the standby state e standby channel assignments do not change e MODE and FCTN setups of standby channels do not change e Following setups of standby channels do not change FCTN MODE Parameters VARI V START STOP COMPLIANCE 2 VAR2 I START COMPLIANCE VPULSE BASE START STOP COMPLIANCE IPULSE BASE COMPLIANCE VARI V START gt STOP COMPLIANCE OFFSET RATIO I START gt COMPLIANCE OFFSET RATIO VPULSE BASE START STOP gt COMPLIANCE OFFSET RATIO IPULSE BASE COMPLIANCE CONST V SOURCE COMPLIANCE I SOURCE COMPLIANCE Pulse setup VPULSE BASE PEAK COMPLIANCE IPULSE BASE COMPLIANCE a This parameter is checked for SMUs only b This parameter is checked even if VARI channel is not standby channel c PGU setups on the MEASURE PGU SETUP screen 3 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Operation States Operation States The 4155B 4156B has the following four operation states e Idle State e Measurement
195. ductor switch during measurement state 4 Inthe STRESS field of the desired channel in the SMU PG SELECTOR area select 4 60 SMU secondary softkey to connect SMU to DUT during stress force state PGU secondary softkey to connect PGU to DUT during stress force state OPEN secondary softkey to disconnect SMU PGU and DUT during stress force state PGU OPEN secondary softkey to disconnect PGU from DUT by semiconductor switch during stress force state Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force SMU Pulse Generator Selector The selector has two types of switches relay switch and semiconductor switch Normally the relay switch has three states SMU is connected to DUT PGU is connected to DUT and neither is connected to DUT The semiconductor switch which is in the PGU line is used for high speed switching SMU SMU connected to DUT DUT PGU oo te SMU PGU connected to DUT DUT PGU o 6 gt aga SMU Neither connected DUT PGU a a e o SMU PGU disconnected by DUT Semiconductor Switch PGU Oo Mechanical Relay UG 01049 80x100 Semiconductor Switch Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 61 Making a Measurement Stress Force Example Following shows an example setup that connects two SMUs to DUT during measurement state and connects two PGUs to DUT during stress force state
196. e Agilent Technologies will be liable for damage to tangible property per incident up to the greater of 300 000 or the actual amount paid for the product that is the subject of the claim and for damages for bodily injury or death to the extent that all such damages are determined by a court of competent jurisdiction to have been directly caused by a defective Agilent Technologies product To the extent allowed by local law the remedies in this warranty statement are customer s sole and exclusive remedies Expect as indicated above in no event will Agilent Technologies or its suppliers be liable for loss of date or for direct special incidental consequential including lost profit or date or other damage whether based in contract tort or otherwise For consumer transactions in Australia and New Zealand the warranty terms contained in this statement except to the extent lawfully permitted do not exclude restrict or modify and are in addition to the mandatory statutory rights applicable to the sale of this product to you Assistance Product maintenance agreements and other customer assistance agreements are available for Agilent Technologies products For any assistance contact your nearest Agilent Technologies Sales Office e Certification Agilent Technologies Inc certifies that this product met its published specifications at the time of shipment from the factory Agilent Technologies further certifies that its cali
197. e zx lt Idle State Idle State SMU4 disabled ___eescccceece VSU2 disabled weoeeeeee SMU4 2 COMMON ae a gt i SMU2 CONST SMU3 CONST i VSU1 CONST source and common channels output simultaneously 4 an order that channels return to 0V outout switch is off eos channel outputs a specified source value UGDO4011 3 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Trigger Function Trigger Function Trigger function is used to perform measurements synchronized with the measurements or source outputs by external instruments Connection The following figure shows the connection between an 4155B 4156B and an external instrument 4155 4156 External Instrument TRIGGER e INPUT OUTPUT IN OUT e Coaxial Cable a For Trigger Output Function A155 4156 External Instrument TRIGG INPUT an aye e ER OUTPUT Coaxial Cable b For Trigger Input Function Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 39 Measurement Functions Trigger Function Setup and restrictions You cannot perform trigger outputs together with trigger inputs You must select either trigger output or trigger input To use a trigger function you must enable the trigger function and select either TRIG OUT or TRIG IN in the TRIGGER SETUP table on
198. e 4155B 4156B may be broken Contact the nearest Agilent Technologies Sales and Service office Fixture open Measurement aborted Auto calibration was aborted Auto calibration failed No data in internal memory Illegal data File may be corrupt System busy Unable to save get when MEAS STR System busy Unable to change Y axis System error SMUC lost data The 4155B 4156B may be broken Contact the nearest Agilent Technologies Sales and Service office Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 21 If You Have A Problem If Errors Occur 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 8 22 Buffer Syntax Illegal Illegal overflowed Aborted error Undisplayable setup One unit assi disk Revision misma mo y OD Volume Volume ead error occurred e name is not LIF type e name is not DOS type e name is not LIF DOS typ label is not LIF type label is not DOS type Incorrect memory number Source Unable Unable and Target are same to copy Memory full to copy SRC and TGT character gned several CH ten Qs mem num is same You cannot specify same memory number in both SOURCE and TARGET name fields Illegal suffix System System System System System Unable Unable busy Emergency handl busy Measuring busy Executing
199. e DELAY TIME softkey Select DELAY TIME secondary softkey to change the delay time for the sweep measurement The present delay time is shown on this softkey and in the data entry area Then you can change the value You can change the delay time while measurement is being performed This softkey is not displayed when an SMU is set to VPULSE or IPULSE in the FCTN field on the CHANNELS CHANNEL DEFINITION screen e PULSE BASE softkey displayed only if SMU pulse source is defined Select PULSE BASE secondary softkey to change the base value of SMU pulse The present base value is shown on this softkey and in the data entry area Then you can change the value e PULSE PERIOD softkey displayed only if SMU pulse source is defined Select PULSE PERIOD secondary softkey to change the period of SMU pulse The present period is shown on this softkey and in the data entry area Then you can change the value e PULSE WIDTH softkey displayed only if SMU pulse source is defined Select PULSE WIDTH secondary softkey to change the pulse width of SMU pulse The present pulse width is shown on this softkey and in the data entry area Then you can change the value 6 70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group SAMPLNG SETUP softkey Select SAMPLNG SETUP primary softkey to display secondary softkeys for changing the sampling parameters This softkey is displayed only when SAMPLING is selected
200. e GRID softkey DATA VAR softkey Select DATA VAR secondary softkey to toggle on or off the display of data variable values The present status of the display of the data variable display is shown on the DATA VAR softkey 6 54 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group e LINE PRMTRS softkey Select LINE PRMTRS secondary softkey to toggle on or off the display of line parameters X and Y intercepts and gradients Line parameters are displayed when both of the following are true e ON is set on this softkey e line is displayed in the plotting area e OVERLAY PLANE softkey Select OVERLAY PLANE to control which internal memory measurement curve is overlaid This softkey toggles the internal memory number as follows OFF gt 1 gt 253 4 OFF e SHOW OVERLAY INFO softkey Select SHOW OVERLAY INFO secondary softkey to display the following for the overlay plane axes cursor marker line and data variables Select EXIT primary softkey to remove information e SCALE TO OVERLAY softkey Select SCALE TO OVERLAY secondary softkey to force the present scaling values to that of overlaid plane even if unit of axis is different Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 55 Screen Organization GRAPHI LIST Screen Group SWEEP SETUP softkey Select SWEEP SETUP primary softkey to display secondary softkeys for changing the sweep source parameters This softkey is disp
201. e Maximum axis value is at right end of X axis When REVERSE is selected e Minimum axis value is at right end of X axis e Maximum axis value is at left end of X axis e default NORMAL Y AXIS DISPLAY NORMAL Selects direction of the Y axis This softkey displays present setting e setting Selecting this softkey toggles NORMAL or REVERSE When NORMAL is selected e Minimum axis value is at bottom of Y axis e Maximum axis value is at top of Y axis When REVERSE is selected e Minimum axis value is at top of Y axis e Maximum axis value is at bottom of Y axis default NORMAL GRID ON Selects grit on or off This softkey displays present setting setting Pressing this softkey toggles the grid on or off in the plotting area e default ON Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 19 Measurement Functions Knob Sweep Function VARI SETUP Softkey This softkey displays secondary softkeys for setting the primary sweep source VARI parameters SWEEP MODE SINGLE Selects sweep mode This softkey displays present setting POLAR ITY POS 3 20 e setting Pressing this softkey toggles the sweep mode in the following order SINGLE DOUBLE SINGLE default setting of the SWEEP MODE field on the MEASURE SWEEP SETUP screen Selects polarity of sweep source Changing the setting resets the sweep step to 0 so the sweep measurement curv
202. e goes back to 0 on the screen For details see Sweep Step Value on page 3 15 This softkey displays present setting e setting Pressing this softkey toggles the polarity of VAR1 channel in the following order POS NEG BIPOLAR POS default If polarity of VARI stop and start value on MEASURE SWEEP SETUP screen are same default value is same as polarity of stop and start value If polarity of VARI stop and start value on MEASURE SWEEP SETUP screen are different default value is BI POLAR Agilent 4155B 4156B User s Guide Vol 2 Edition 5 VARI RANGE 2V NUM OF STEPS 101 Measurement Functions Knob Sweep Function Sets sweep range of VARI channel This setting defines the maximum sweep range and resolution of VARI channel This softkey displays present setting setting Select this softkey to display the VARI sweep range value in the data entry area then rotate the knob to change the value Setting value will be changed by 1 2 5 steps as shown below 01V gt 02V gt 05V gt gt 100V gt 200V gt 0 1V setting range The allowed sweep range 1 2 5 values depend on the output range of the measurement unit See Chapter 1 default Minimum value that includes VARI start and stop value that is set on the MEASURE SWEEP SETUP screen However the value must be 1 2 5 steps For example if start value is 0 V and stop value is 30 V on the MEASURE SWEEP SETUP screen default VARI range is
203. e set to VPULSE the STBY setting of both PGUs must be the same e For STBY ON channel SERIES RESISTANCE setting must be 0 ohm 6 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen Group SERIES RESISTANCE In the SERIES RESISTANCE fields you select the value that you want to set in Agilent 16441A R Box When the pointer is located in this field allowable resistance values are shown in the secondary softkey area You select the desired series resistance Normally SMU1 and SMU2 have SERIES RESISTANCE fields However if the SMU and Pulse Generator Expander is installed and if the expander has an HPSMU then SMU1 and SMUS have SERIES RESISTANCE fields If the 16441A R box is not installed you must set 0 Q in this field Restrictions e To use Kelvin connection for HRSMU or HPSMU you must select 0 Q For STBY channels you can set 0 Q only For COMMON channels you can set 0 Q only Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 11 Screen Organization CHANNELS Screen Group CHANNELS USER FUNCTION DEFINITION screen CHANNELS USER FUNCTION DEFINITION S4JANOL 01 30PM user comment t Vee Ic WE VB NAME UNIT DEFINITION VCE HE ATEB a A at ate IE IB Ic ICHIB CHANNEL FUSER USER PREV NEXT DEF Beare L VAR PAGE PAGE UGDO500
204. e total sampling time to initial interval x number of samples 1 e HOLD TIME HOLD TIME field sets the hold time The unit waits this time after forcing the specified constant value then sampling starts Range for initial interval lt 2 ms 30ms to 655 35s with 100 us resolution for initial interval gt 2 ms 0 to 655 35s with 100 us resolution e FILTER This field specifies SMU filter to ON or OFF If this field is set to ON overshoot is decreased but settling time takes several ms Be aware of this if you set initial interval to a short time Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 23 Screen Organization MEASURE Screen Group STOP CONDITION ENABLE DISABLE This field defines whether the stop conditions are enabled Cannot ENABLE if INITIAL INTERVAL lt 2 ms In this field select e ENABLE secondary softkey to enable the stop conditions DISABLE secondary softkey to disable the stop conditions ENABLE DELAY This field sets the enable delay time The stop condition is ignored for the enable delay time after the sampling starts The resolution of enable delay time is the initial interval time NAME NAME field sets the variable name or user function name that you want to monitor for the stop conditions Allowable variable names and user function names are shown in the secondary softkey area THRESHOLD In the THRESHOLD field you set the threshold value EVENT In the EVENT field you
205. eans the unit you select the DELETE ROW softkey in the CHANNELS table on the CHANNELS CHANNEL DEFINITION screen 2 Output channels start the output in the order specified in the OUTPUT SEQUENCE table Stopping Outputs When returning to the idle state the units operate as shown below 1 Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table 2 Disabled units keep 0 V output and turn the output switch on Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 35 Measurement Functions Output Sequence Example Output sequence in the following conditions is shown in Figure 3 4 Units available SMU1 to SMU 4 VSU1 to VSU2 e Units disabled SMU4 and VSU2 e Output sequence No change from the default setting Figure 3 4 Output Sequence Example for the Sequential Mode Idle State Measurement State idle State Ne SMU4 disabled VSU2 disabled nt ca MU1 COMMON oa SMU2 CONST PY U3 VAR1 VSU1 CONST a er x an output order N an order that channels return to 0 V a output switch is off eeessse channel is common channel outputs a specified source value UGDO4010 3 36 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Output Sequence Simultaneous Mode The simultaneous mode is available only for the sampling measurements In this mode all enabled units start the specified outputs at the same ti
206. easurements with several sampling interval settings See Sampling Measurement Data on page 2 18 Measurement time is given by the following fomula Tmeas Tinteg Toh where Tmeas Measurement time Tinteg Integration time Toh Overhead time caused by the following elements range changing time during measurement when measurement ranging mode is set to auto or limited auto e range changing time at measurement start when using measurement range less than the compliance value e time required for the compensation getting compensation data and compensating measurement data when the automatic compensation is set and executed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 15 Measurement Mode Sampling Measurement Mode Figure 2 6 Sampling Measurement Operation Summary Case 1 Sampling Interval gt Meas Time SMU Output PGU Output Meas Time gt Time 4 lt z gt lt gt lt 2 lt gt Hold Time Sampling Sampling Sampling 2 Interval Interval Interval N A A A 3 5 Trigger Trigger Trigger Trigger Trigger 1 Total Sampling Time TOTAL SAMP TIME 6 A TOTAL SAMP TIME is one of the stop condition AN Starts Sampling Stops Sampling 7 Case 2 Sampling Interval lt Meas Time SMU Output PGU Output Meas Time S gt Time 4 6 Borg Time Sampling Sampling Sampling 2 Interval Interval Interval A
207. econdary softkeys for changing the sampling parameters This softkey is displayed only when SAMPLING is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen STOP COND softkey Select STOP COND secondary softkey to enable or disable the stop condition Selecting this softkey toggles between ENABLE and DISABLE ENABLE DELAY softkey Select ENABLE DELAY secondary softkey to change the enable delay time for the stop condition The present enable delay time is shown on this softkey and in the data entry area Then you can change the value THRESHOLD softkey Select THRESHOLD secondary softkey to change threshold value of the stop condition The present threshold value is shown on this softkey and in the data entry area Then you can change the value You can change the threshold value while measurement is being performed EVENT TYPE softkey Select EVENT TYPE secondary softkey to change the event type Selecting this softkey changes the event type in the following order Val gt Th Val lt Th gt Val gt Th gt Val lt Th 7 Val gt Th EVENT NUMBER softkey Select EVENT NUMBER secondary softkey to change the event number of stop condition The present event number is shown on this softkey and in the data entry area Then you can change the value 6 72 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group CONST SETUP softkey Selec
208. ection the voltmeter measures the voltage drop of resistances rp Rpyr and rpp For the Kelvin connection the voltmeter measures the voltage drop of resistance Rpurt only The impedance of the voltmeter is very high so the voltage drop of resistances rg and rg can be ignored R pur Rour EAA EAN V VV e V V e lt fr lt i gt gt lt Tal Ty Sly D gt Rn foes fox le T V V F7 ka ua WV RY ye VW yy a non Kelvin connection b Kelvin connection The Kelvin connection is effective even when forcing voltage The voltage drop due to the residual resistance of the force line wiring is fed back to the voltage source via a comparator in the sense line The input impedance of comparator is high and current flow into the sense line is very low So output error is not significant if the sense line wiring has a residual resistance of 10 Q or less Therefore the specified voltage appears at the sense point point where sense line contacts force line Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 9 Making a Measurement Sweep Measurements Sweep Measurements This section describes the sweep measurement tasks The basic procedure to test your DUT is as follows
209. ed comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups NAME NAME field defines the user variable name You can enter a name by using the keyboard or front panel keys To delete a user variable select DELETE ROW softkey to delete the NAME UNIT and SIZE entries After defining a user variable you can use this variable name for reference on other screens Restrictions e NAME must be 6 or less alphanumeric characters First character must be alphabet character e NAME must be different from other names The alphabet characters are case sensitive For example HFE is different from Hfe 6 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen Group UNIT optional UNIT defines the unit of the user variable This unit is used on the graph and list result screens You can enter the unit by using the keyboard or front panel keys To delete a user variable select DELETE ROW softkey to delete the NAME UNIT and SIZE entries Restriction UNIT must be 6 or less alphanumeric characters SIZE SIZE field sets the number of data for the user variable The number of data must be 10001 or less total for all measurement data and user variables You can enter the size by using the keyboard or front panel keys To delete a user variable select DELETE ROW softkey to delete the NAME UNIT and SIZE entries Agilent 4155B 4156B User s Guide Vol 2
210. ed for applications which need to connect a series resistor between SMU and DUT For example the R Box is effective for the DUT protection If sudden voltage change occurs at DUT excessive current flows to the DUT and it may damage the DUT without the R Box In other case you may want to measure negative resistance characteristics This application needs series resistor because SMUs cannot measure negative resistance The 4155B 4156B automatically compensates for voltage drop of the series resistance value So the GRAPH LIST screen group show the compensated data For details of the 16441A R Box refer to Agilent 16441A R Box User s Guide Resistance Value The 16441A R Box provides two sets of the series resistors So you can connect two SMU channels to the R Box Resistance values of resistors are listed below e IMQ e 100kQ e 10kQ e 0Q You can select the resistance values on the 4155B 4156B setup screen The LEDs on the 16441A R Box indicate the present resistance value Connections Following table is the parts list of cables for connecting the 16441A R Box Agilent Model or Part Number Description 04155 61610 Control Cable 1 5 m 04155 61609 Control Cable 3 0 m 04155 61605 Triaxial Cable 0 4 m 16493K 001 Kelvin Triaxial Cable 1 5 m 16493K 002 Kelvin Triaxial Cable 3 0 m 3 48 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions R BOX Control Non Kelvin Connections
211. eed 3 48 Connecti Ons spene heehee tet ll te a Nh a ade 3 48 Setups ar ra eed ltt evict A AA i een a ed egies ee daha E R 3 50 Circuit Diagram 256 2 3c ig Sac Padget ite Bp a A Sd tebe ea es G a a arei 3 51 Measurement Ranging Mode 0 cee eee eee eee eens 3 53 Auto Ranging i046 song Sik wea a ad wh Paki enh 3 54 Limited Auto Ranging 00 0 0 eee ccc eee nets 3 55 Compliance Raig esta i eat eels Se ois ecu coda eee ee eda Sa 3 56 Fixed Range si3 feo pede colada euieb pet eaew Dia an A E E eds 3 56 Complies hor Voss iaeia tuaa bead a a poe y panos elels sated 3 57 Voltage and Current Compliance 20 0 eee eee ee ee 3 57 Power Compliance rstea aes ded dere he tena ey ee tat teas 3 61 Integrati n Time 02 28 55 faucet bebe A te ea ta leek es 3 63 SHOT 25 eevee see Aaah rend Seach ete idea E ace plete eee tee ooh 3 63 Mediu pc sas eos sath baa dha qitig baled eaa a aN E E S 3 64 Loise ie Sth Soy ses co ee ee oo ee ee E 3 64 SMU Filter ee ahh ee beheaded teen bank el 3 65 Z ro Offset Caneel os eden sostui asas itemean aa ee Reece esas ee 3 66 To Measure Offset Data 2 eee cee nee 3 66 To Perform Offset Cancel 0 00 eee eee cee teens 3 68 Making a Measurement Connecting DUT insisi ian Oe ek ea ee he Ee ee 4 3 Using Tests Fixture iiae ieog see e Sg Sie bee psi See AS teasers tea 4 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 3 Contents Using Connector Plate 2
212. een Organization GRAPHI LIST Screen Group GRAPH LIST Screen Group GRAPH LIST screen group has the following screens Graphic Results For displaying the measurement results graphically You can use lines or a marker on the graphics screen to analyze the measurement results graphically List Results For listing the measurement results To move into the GRAPH LIST screen group do one of the following e Press Graph List front panel key in the PAGE CONTROL key group if present screen is not GRAPHICS or LIST screen e Press Single Repeat or Append front panel key if present screen is not GRAPHICS or LIST screen Measurement is performed If the present screen is the GRAPHICS or LIST screen you can toggle between these screens by pressing the Graph List front panel key On the GRAPHICS result screen In the primary softkey area of the GRAPHICS screen the following softkeys are available for performing the manual analysis functions For sweep measurements AXIS MARKER LINE SCALING DISPLAY SWEEP TIMING CONST Y2 CURSOR SETUP SETUP SETUP SETUP For sampling measurements AXIS MARKER LINE SCALING DISPLAY SAMPLING STOP CONST Y2 CURSOR SETUP SETUP COND SETUP On the LIST result screen In the primary softkey area of the LIST screen the following softkeys are available for performing the manual analysis functions For sweep measurements AXIS MARKER SPREAD RE SWEEP TIMING CONST SHEET SETUP SETUP SETU
213. elect EXIT primary softkey to exit the direct marker and cursor function The marker can move on the measurement curve only so changing the X value automatically changes the Y value and vice versa If the interpolation mode is off the marker moves to the measurement point that is closest to the specified coordinate If the pointer is ina MARKER coordinate field the following softkeys appear e Select MIN MAX secondary softkey to move marker to minimum measurement value If marker is at minimum value marker moves to maximum value e Select INTERPOLATE secondary softkey to toggle the interpolation mode on or off The present mode is displayed on the INTERPOLATE softkey e Select SEARCH MORE secondary softkey to move marker to the next candidate when more than one measurement point satisfies the specified value e Select MARKER SKIP secondary softkey to move the marker to the next measurement curve that was added by VAR2 variable or append measurement If the pointer is ina CURSOR coordinate field the following softkey appears e Select MIN MAX secondary softkey to move cursor to minimum axis point If cursor is at minimum point cursor moves to maximum point Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 49 Screen Organization GRAPHI LIST Screen Group NOTE When a specified value is inappropriate marker or cursor is located as follows e marker e Ifthe specified value for marker is greater or less than the ma
214. ement Mode Ranging Mode Sweep Measurement Auto Limited Auto Fixed Sampling Measurement Auto Limited Auto Fixed Initial Interval gt 2 ms Sampling Measurement Fixed Initial Interval lt 2 ms Knob Sweep Compliance a You specify initial interval on the MEASURE SAMPLING SETUP screen If you choose sweep measurement or sampling measurement initial interval gt 2 ms and you do not set a ranging mode auto ranging is set for voltage measurement mode channel and limited auto 1nA ranging is set for current measurement mode channel automatically For sampling measurement initial interval lt 2 ms an error occurs if fixed range is not set Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 53 Measurement Functions Measurement Ranging Mode Auto Ranging The monitor unit automatically searches for and measures at the range that provides the highest resolution as follows V measurement The unit changes ranges up or down one range at a time until the measurement value is between 10 and 110 of the range then the unit performs the measurement I measurement 1 AtolpA The unit changes ranges up or down one range at a time until the measurement value is between 10 and 114 of the range then the unit performs the measurement If the measurement value is less than 1 of the present range and the present range is 100 uA or higher range the range changes down two ra
215. ent 4155B 4156B User s Guide Vol 2 Edition 5 8 31 If You Have A Problem If Errors Occur 307 308 309 310 320 321 322 323 324 325 8 32 Cannot shutdown Power Supply Turn on the 4155B 4156B again You can use filer functions after selecting OK secondary softkey except when this error occurs during power on test Unknown emergency SMUC time out Perform 305 HOSTC lt gt SMUC I F test on the SYSTEM SELF CALIBRATION DIAGNOSTICS screen If this test fails the 4155B 4156B may need service Contact the nearest Agilent Technologies Sales and Service office The SMU AND PULSE GENERATOR EXPANDER is not turned on Turn on the expander then cycle mainframe power Unsupported unit detected in Slot Turn off the power and remove the unit The displayed unit must be changed Contact the nearest Agilent Technologies Sales and Service office Not enough memory Cannot display gt 200 files The 4155B 4156B cannot display more than 199 files on the FILE CATALOG because of an internal memory limitation If you create more than 199 files move the additional files to another directory Too many links The file has too many links Remove extra links or use symbolic links File system down or network disconnected Unable to access the network directory The file system was down or the network was disconnected The network address is already used A
216. er the pulse peak value In the BASE VALUE field enter the pulse base value In LEADING TIME field enter the leading edge transition time of pulse Oy idee i eo wens In TRAILING TIME field enter the trailing edge transition time of pulse The same period you set for PGU1 is also used for PGU2 For the other parameters you can set different values for PGU1 and PGU2 To set other areas of the STRESS STRESS SETUP screen see To Set up Stress Condition Timing on page 4 53 To modify the UNIT and NAME fields Modify UNIT and NAME fields on STRESS CHANNEL DEFINITION screen To set output impedance of PGU1 or PGU2 In the IMPEDANCE field select e LOW secondary softkey to set output impedance to low approximately zero e 50 ohm secondary softkey to set output impedance to 50 Q Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 55 Making a Measurement Stress Force Delay time The following figure shows the meaning of delay time Peak PGU1 Base PGU2 Example Welles cee 2st Value UGTO1048 85x40 Delay Time stress start The following figure shows an example to set up ac stress 4 56 STRESS STRESS SETUP 94JANO4 01 30PM STRESS MODE PULSE DURATION UNIT PGUL Pou2 1 0ms NAME PERIOD 10 00ms ACCUMULATED STRESS WIDTH 5 00ms 5 0Oms 0 0000s DELAY TIME 0 0000
217. ess pulsed stress as shown in the following figure Stress is defined as the bias that the 4155B 4156B can monitor the bias output time correctly To start stress force press Stress front panel key o DC Stress Signal displaying the stress force time The STRESS STRESS FORCE screen is displayed while stress is being forced On this screen the time that stress has been forced is displayed and updated every second Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 3 Table 3 1 Measurement Functions Stress Force Function Stress Output Channels Stress output channel is defined as the unit used to force stress Available Units The 4155B 4156B can force dc voltage stress de current stress and ac voltage stress by PGUs in Agilent 41501A B but cannot force ac current stress Table 3 1 shows available units and allowable modes for stress sources Available Units and Modes for Stress Force AC Voltage Stress Units DC Voltage Stress DC Current Stress Pulsed Source SMU yes yes VSU yes PGU yes yes Also SMUs can be set to COMMON mode Setting the Stress Channels You can set up units for the stress force state on the STRESS CHANNEL DEFINITION screen independently from the measurement and standby states that you set on the CHANNELS CHANNEL DEFINITION screen For example you can use the same SMU as a measurement
218. esult data INDEX is the data variable for index number of measurement data The index number of the first data is 1 For a subordinate sweep measurement the index number continues to increment by between secondary sweep steps that is e last data of a primary sweep index e first data of next primary sweep index 1 7 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Data Variable User Function A user function consists of one or more data variables used in an expression You define the user function name expression and unit on the CHANNELS USER FUNCTION DEFINITION screen You can use a user function inside another user function And you can set up the user function on the DISPLAY DISPLAY SETUP screens to plot the user function values or display the numeric value To define a user function you define a name and an expression on the CHANNELS USER FUNCTION DEFINITION screen If desired you can define a unit such as ms e User function name must start with alphabet character and can consist of maximum six alphanumeric characters Name must be unique Name is case sensitive For example Gm is different from gm e Unit name is optional Length 1 to 6 characters Valid characters any characters For the syntax of an expression refer to Expression on page 7 8 Example To define a user function for mutual conductance gm of an FET define gm on the CHANNELS USE
219. f overlay measurement curve overwrites the information of the present curve e axis names and axis scales e cursor and marker coordinates line x yl y2 interrupt and gradient e data variables To display information of original curve again select the EXIT primary softkey To change the present scale to the same scale as overlay curve Select SCALE TO OVERLAY secondary softkey To return to the original scale you need to select SCALING primary softkey then select CANCEL SCALING secondary softkey 5 22 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Example The following figure shows an example to overlay a measurement curve that is stored in internal memory 1 onto the presently displayed measurement curve Analyzing Measurement Results Manual Analysis GRAPHILIST GRAPHICS SHOR 93Aug09 96 18PM m SETUP GRAPH mA 2 00 j 7 7 Overlay Measurement Curve gt rar y 7 VAR 4 A OFF sent Present Clirve es he PRMTRS 200u div SHOW va OVERLAY INFO 0 00 1 SCALE i To n Mi div 10 00 0 000 vw yv 1 00 diyv OVERLAY MARKER SCALING DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP_ SETWP SETUP UGTO2012 100 80 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 23 Analyzing Measurement Results
220. f causing death are present in this instrument Use extreme caution when handling testing and adjusting Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage and potential for electrical shock Do not touch terminals that have this symbol when insrument is on Protective conductor terminal For protection against electrical shock in case of a fault Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply WARNING CAUTION CAT 1 OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personal The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the
221. fied duration is more than 10 s If you set pulse count mode these secondary softkeys are displayed only when pulse period x pulse count is more than 10 s Stress stop function is not effective until stress has been forced for 10 s PULSE UNIT and NAME are defined on STRESS CHANNEL DEFINITION screen On the STRES ac stress MODE VPULS S CHANNEL DEFINITION screen you set the PGUs as follows E FCTN SYNC ac non stress MODE VP ULSE FCTN NSYNC dc stress MODE V FCT dc non stress MODE V SYNC FCTN NSYNC PULSE table is for setting the pulse output parameters of PGUs PERIOD This field specifies the pulse period of the PGU Both PGUs are set to same value WIDTH This field specifies pulse DELAY TIME width which must be less than pulse period This field specifies the delay time from the pulse start time The delay time must be less than or equal to the pulse period je pulse period peak value gt base value delay time T delay time lt i pulse st i aS ok a pulse width UGDOSOH GAL 10350 art Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 81 Screen Organization STRESS Screen Group e PEAK VALUE and BASE VALUE These fields specify pulse peak and base values e LEADING TIME and TRAILING TIME These specify transition time 10 to 90 of leading and trailing edges e IMPEDANCE This field specifie
222. field select e LINEAR secondary softkey to set linear sweep mode e LOGI10 LOG25 or LOGSO secondary softkey to set logarithmic sweep mode The number specifies the sweep points per decade e START STOP and STEP In the START STOP and STEP fields you specify the start stop and step values The step value is used for the linear sweep mode only The following applies to logarithmic sweep mode only e STEP field has no meaning so is shown in the STEP field e Start and stop values must be the same polarity e Ifyou specify O zero for the start or stop value the minimum output value for the unit is used e You specify the number of steps per decade in the LIN LOG field e NO OF STEP For the linear sweep mode the number of steps is calculated from the start stop and step values and appears in the NO OF STEP field For the logarithmic sweep mode the number of steps is calculated from the start stop and LIN LOG values and appears in the NO OF STEP field e COMPLIANCE In the COMPLIANCE field you set the compliance value If a VSU is used for the VARI unit this field cannot be set compliance value is fixed to 100 mA e POWER COMP In the POWER COMP field you can set a power compliance value for SMUs To disable the power compliance function select the OFF secondary softkey If an SMU is set to VPULSE or IPULSE mode and if the SMU is set to VARI you cannot set power compliance for the VARI SMU
223. fined as the standby channel Following settings keep the same conditions as the previous state e output switch of each unit output impedance of PGUs e switching condition of the 16440A selector e resistance selection of the 16441A R Box Changing among Operation States Figure 3 3 shows how to change among the operation states From measurement stress states to idle state If you perform measurements or force stress from the idle state then the 4155B 4156B returns to the idle state after one of the following conditions occurs e Measurement is finished e Fixture lid is opened while an SMU is outputting more than 40 V Stress is finished e Stop front panel key is pressed 3 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Operation States e From measurement stress states to standby state If you perform measurements or force stress from the standby state then the 4155B 4156B returns to the standby state after one of the following conditions occurs e Measurement is finished e Stress is finished e Stop front panel key is pressed Changing among the Operation States es m pn A Finish or Stop Fir 7 Finish measurement or stress force is completed Wo ON Finish or Stee 7 Stress r Stress Sse Se UGDO4009 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 33 Measurement Functions Output Sequence
224. forced for 10 seconds For example if STOP AT ANY ABNORMor STOP AT COMPLIANCE is selected and abnormal status occurs after forcing stress for 5 seconds the stop function does not stop stress until stress is forced for 10 seconds Setting the Stress Stop Function You can select one of the following in the STRESS Status field on the STRESS STRESS SETUP screen STRESS Status CONT AT ANY Stress continues even if an abnormal status occurs STRESS Status STOP AT ANY ABNORM Stress stops if any abnormal status occurs STRESS Status STOP AT COMPLIANCE Stress stops only if SMU reaches its compliance setting STOP AT ANY ABNORM and STOP AT COMPLIANCE are available at the following conditions e in PULSE COUNT mode when pulse period x pulse count is more than 10 s e in DURATION mode when specified duration is more than 10 s Abnormal Status Abnormal statuses are as follows e SMU reaches its compliance setting e Current of a VSU exceeds 100 mA e SMU ora VSU oscillates A D converter overflow occurs e Average current of PGU exceeds 100 mA 3 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 3 2 Measurement Functions Knob Sweep Function Knob Sweep Function The knob sweep function allows you to easily perform real time sweep measurements by rotating the rotary knob on the front panel This function is useful when you want to quickly make a rough measurement of a DUT characteristic or
225. ftkey Enter a variable name and condition expression to specify the measurement point for which you want to draw a tangent line LINE1 TANGENT LINE ON Y1 between a point where DGM MAX DGM 0 01 I L 1 In addition you can specify another condition if you position the pointer in the last bracketed field shown above Select the AFTER secondary softkey AFTER is displayed and you can enter a second variable and condition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that satisfies the first condition after the second condition is satisfied LINE1 TANGENT LINE ON Y1 between a point where DGM MAX DGM 0 01 AFTER DG MAX DGM On GRAPH LIST GRAPHICS screen LINE secondary softkey must be ON Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 43 Screen Organization DISPLAY Screen Group Regression mode line In the first bracketed field after LINE1 or LINE2 you select the line mode Select the REGRESSION secondary softkey to set the regression line mode For details about regression calculation range see Line Drawing in Chapter 7 The pointer moves to second bracketed field as shown LINE1 REGRESSION LINE ON Y1 between a point AT X Ys f and a point AT X Ys
226. g yo log x log xo Where a Slope of LINE1 Xo Yo X Y X and Y2 coordinate values at the two points where LINE intercepts the perimeter of the plotting area 7 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function L1X Returns the X intercept value Y 0 of LINE1 Syntax CLIX If LINE is horizontal this function returns invalid data LI1Y Returns the Y intercept value X 0 of LINE1 Syntax L1Y If there are Y1 and Y2 axes this function returns the value for selected axis If LINE is vertical this function returns invalid data L1Y1 Returns the Y1 intercept value X 0 of LINE Syntax L1Y1 If LINE is vertical this function returns invalid data L1Y2 Returns the Y2 intercept value X 0 of LINE Syntax L1Y2 If LINE is vertical this function returns invalid data L2CO Returns the correlation coefficient of the regression for LINE2 Syntax L2CO LINE2 must be in regression mode If not this function returns invalid data Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 27 Data Variable and Analysis Function Read Out Function L2G Returns the slope of LINE2 Syntax L2G If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the slope by using the following formula If X and Y axes are both linear scaling a Y1 Yo X1 Xo e If X axis is logarithmic sc
227. gilent 4155B 4156B User s Guide Vol 2 Edition 5 8 If You Have A Problem Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem This chapter explains how to solve a problem or how to read status and error codes if you encounter some problem This chapter is organized into the following sections e When you make a measurement e This section explains how to solve the problems that may occur when making a measurement e Iferrors occur e This section lists error codes and messages that may be displayed when operating Agilent 4155B 4156B Also this section describes how to read data status 8 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 NOTE If You Have A Problem To Get Help Information To start help function press the Help front panel key Then you can select one of the following primary softkeys OVERVIEW Briefly explains each help softkey PAGE MAP Shows a map of all screens highlights the present screen name and gives a brief description of the highlighted screen name You can use the arrow keys to highlight another screen name then can display the screen by selecting the SELECT secondary softkey FIELD INFO Describes field where the pointer is located on the screen how to setup the field and the setting restrictions This softkey is not displayed for GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen DATA STAT Shows how to read data status which is displa
228. h SMU has a compliance feature that limits output voltage or current to prevent damage to your devices When the SMU forces voltage you can specify I compliance When the SMU forces current you can specify V compliance For details about the compliance setting range and resolution see Compliance in Chapter 3 The following figures and tables show the output and measurement ranges of each SMU type Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 5 Measurement Units Source Monitor Unit SMU Figure 1 3 HRSMU Output and Measurement Ranges Current mA UGBO2003 Table 1 1 HRSMU Output Voltage Ranges and Resolutions Current Range Output Value Suunne Compliance Resolution Range 2V 0 lt vl lt 2Vv 100 uV 100 mA 20 V 0 lt v lt 20V 1 mV 100 mA 40 V o lt v lt 40V 2 mV 50 mA 100 V o lt v lt 100V 5 mV 20 mA 1 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Source Monitor Unit SMU Table 1 2 HRSMU Measurement Voltage Values and Resolutions Measurement Resolutions Range oe Integration Time High Speed alue i 1PLC or 640 us to 1 92 Sampling Longer ms 80 us to 560 us Measurement 2V o lt v lt 22V 2uV 20 uV 200 pV 2 mV 20 V o lt yv lt 22 V 20 uV 200 pV 2 mV 20 mV 40V o lt lvl lt 44v 40 uV 400 nV 4mV 40 mV 100 V 0 lt lV lt 100V 100uV 1 mV 10 mV 100 mV a This column
229. hat you set on this screen User Comment In this field you can enter a desired comment The comment you enter here is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups DISPLAY MODE In the DISPLAY MODE field you specify the display mode If present display mode is list mode then select the GRAPHICS secondary softkey to change to graphics mode GRAPHICS In the GRAPHICS area you set up the X Y1 and Y2 axes You must set up the X and Y1 axes Y2 axis is optional 6 36 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization DISPLAY Screen Group NAME NAME fields specify the variable names that you want to assign to the axes which will be plotted on the GRAPHICS screen In this field you can select the desired variable names in the secondary softkey area The entries in these fields and the data variable fields determine which channels will actually make measurements e SCALE The SCALE fields specify linear or logarithmic scale for the axis by selecting LINEAR or LOG secondary softkey e MIN and MAX MIN and MAX fields specify the minimum and maximum values for the axis The minimum and maximum values are automatically set according to the NAME and SCALE settings You can modify these values if desired GRID In the GRID field you can specify whether to display the grid on the plotting area by selecting ON or OFF secondary softkey LINE PARAMETER In the LINE PARA
230. he expression at the marker position is displayed indicating measurement point determined by auto analysis expression If you set up an expression for the marker on DISPLAY ANALYSIS SETUP screen the marker moves to the point determined by the expression after auto analysis is performed Moving the marker Basically you can move the markers on measurement points of the measurement curve by using the knob on the front panel In addition to the basic movement the following functions allow you to quickly move the marker to the desired position Interpolation Mode Enables you to move the marker on lines between adjacent measurement points Marker to Min Max Moves the marker to the maximum or minimum measurement point value Direct Movement Moves the marker directly to specified coordinates on measurement curve Marker Skip Moves the marker to the next measurement curve This function only has meaning for subordinate sweep measurements and append measurements Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 35 Figure 7 4 Data Variable and Analysis Function Analysis Function Marker on the GRAPH LIST LIST screen Marker on the GRAPH LIST LIST screen GRAPH LIST LIST SHORT 3Aug09 06 18PM VF IF V A DIRECT MARKER 4 10 00000m 4 150000p 2 0 000000 1 150000p MRR 3 10 00000m 3 300000p E E R 5 30 00000m 14 80000p
231. he following e If st expression lt 2nd expression returns 3rd expression If st expression 2nd expression returns 4th expression COND 1st expression 2nd expression 3rd expression 4th expression If value of Zst expression or a 2nd expression is invalid the value for the previous measurement index number is used for the comparison COND ID VG SORT ID VG VD VGS VTH returns e VDif ID VG lt SORT ID VG e VGS VTH if ID VG SQRT ID VG Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 13 Syntax Example Data Variable and Analysis Function Built in Function DELTA Returns the difference of the expression DELTA expression The difference is defined as follows n a ay when n 1 n an 1 an 1 2 when 1 lt n lt N n ay ay_ when n N Where on difference for measurement index number n an value of an expression for measurement index number n N number of sweep steps or number of samples For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each primary sweep If expression is a data variable for a secondary sweep source this function returns the sweep step value of the secondary sweep To return the difference of ID DELTA ID 7 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Syntax Example Data Variable and Analysis Function Built in Functi
232. he value as follows Enter number by using numeric and edit keys e Change number by rotating rotary knob STATUS In the STATUS field the time that stress has been forced is displayed in seconds And the percent completion is also displayed To reset stress status to 0 select RESET STATUS secondary softkey Then when you press the Stress front panel key in the MEASUREMENT key group the stress is forced for the specified duration If you press the Stress key after aborting the stress pressing the Stop front panel key the stress is forced starting at the present status that is stress status is not reset to 0 ACCUMULATED STRESS As the time in the STATUS field increases the time in the ACCUMULATED STRESS field on this screen and also on STRESS STRESS SETUP screen increases by the same amount To reset accumulated stress on both screens to 0 select RESET ACCUM STRESS secondary softkey To change to non zero value change accumulated stress on STRESS STRESS SETUP screen 6 84 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization Screen Operation Screen Operation This section explains how to fill in the entry fields on a screen and the function of the blue green and Edit front panel keys The setup screens have a fill in the blank format for entering parameters For example to use SMU2 as a current source you move the pointer to MODE field of SMU2 then select I secondary softkey as follows
233. her process No such device or address The 4155B 4156B cannot find the specified network device or address Verify the correct device file exists the select code major number minor number are correct and that the device is correctly connected high speed or low speed port System busy File operation is in progress File operation is in progress During a file operation the 4155B 4156B cannot perform other operations such as making measurements changing setup fields printing and so forth Network printer connection time out A time out occurred when connecting the network printer to the print server or NFS server Network File System server is down Server for the Network File System is down Contact your network system administrator Communication to desired server failed Communication to desired server failed System busy Mounting device When mounting a device the 4155B 4156B cannot be interrupted by another operation such as making a measurement System bug Undefined method System bug Invalid parameter System bug Inconsistency Unable to display Number must be lt 10001 Unable to display the measurement results because the data size of the result is too large The number of the measurement results must be less than 10001 Connection failed Set Destination address Network connection to destination failed Verify the destination address is set correctly Address family not supported
234. hronous Source Stop Value Primary Source N Stop Value T K AN Synchronous Source ESES j 2 Start Value J Primary Source 1 Start Value ime UGDO3OO4 120x90 To set up synchronous sweep measurement select the following on CHANNELS CHANNEL DEFINITION page e VARI function for desired primary sweep source SMU or VSU e VARI function for desired synchronous sweep source SMU or VSU Synchronous sweep mode has the following restrictions e For the following VAR1 is always set to the same mode as VARI e linear log staircase e single double sweep mode e VARI and VARI must be same V I output mode For example if VARI is set to V mode then VARI must be set to V or VPULSE mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 9 Measurement Mode Sweep Measurement Mode Parameters The parameters for primary sweep source VAR1 are same as the parameters for sweep source of basic sweep measurement For synchronous sweep source VAR1 specify the following parameters on MEASURE SWEEP SETUP page Parameter offset ratio compliance power compliance Description Offset between outputs of primary and synchronous sweep sources Ratio between outputs of primary and synchronous sweep sources Compliance value of synchronous sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of
235. ide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to points between measurement points by setting INTERPOLATE softkey to ON GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM MARKER 751 2530mvV 10 00UA 1 0342UA A A MARKER 1 00 1 00 MIN MAX IC IB La DIRECT MARKER CURSOR decode decode idiv div MARKER SKIP AUTO ANALY SIS 100 f 100 f CURSOR 0 000 VBE V 100 m div 1 00 OFF AXIS LINE SCALING DISPLAY SWEEP TIMING CONST Y2 SETUP SETUP SETUP SETUP UGTO2002 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 7 Analyzing Measurement Results Manual Analysis To Display or Move Cursor 1 2 3 Select MARKER CURSOR primary softkey Set CURSOR secondary softkey to SHORT or LONG Short or long cursor and cursor coordinates are displayed Selecting CURSOR secondary softkey toggles as follows OFF SHORT LONG gt OFF Move the cursor by using arrow keys of the MARKER CURSOR key group The CURSOR coordinate fields indicate the location of cursor The first second and third fields are X Y1 and Y2 coordinates respectively To move cursor diagonally Press two adjacent arrow keys of the MARKER CURSOR key group
236. ilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sampling Measurements 4 Setting the display mode to show T measurement results The following tasks are described DISPLAY DISPLAY SETUP S4JANGL t 3OPM DISPLAY MODE FENICE CIST ORAPHICS mete ae e e To Set up Graphical Display of nan reese 0 coe M t Results see previous Pes anes easuremen p xan MLINE PARAMETER section N ON DATA VARIABLES e To Set up List Display of Measurement Results see previous section GRAPHICS DISPLAY AUTO PREW NEXT SETE AN Yet PAGE PAGE RTOS 6 OAD 5 Executing the measurement The following tasks are described e To Output Same Value Before and After Measurements see previous DN Z section oO mi z e To Execute Calibration see previous 2 section oon ooo o eS o e To Cancel Zero Offset see previous ee section e To Execute or Stop Measurement see previous section Results For example displayed graphically GRAPH LIST GRAPHICS SHORT SSAUgOS 06 18PM mR MARKER ii LINE ne r LINE y ft SELECT GRAD MODE 200m SEF OFF REGRESS MOLE OFF 0 0
237. imary softkey 4 Inthe MODE field of SAMPLING PARAMETER select e LINEAR secondary softkey for equally spaced sampling intervals e LOG XX secondary softkey for logarithmically spaced sampling intervals XX is 10 25 or 50 sampling points per decade e THINNED OUT secondary softkey for reduced sampling interval of more recent samples by thinning less recent samples For details about sampling mode see Sampling Measurement Mode in Chapter 2 5 Inthe INITIAL INTERVAL field enter a value for the first sampling interval 6 Inthe NO OF SAMPLES field enter the number of points at which to sample 7 Ifyou select LINEAR or THINNED OUT in MODE field set the TOTAL SAMP TIME total sampling time which specifies the time from the start of sampling to the end This field is not available for the logarithmic sampling In the TOTAL SAMP TIME field enter a value or select e NO LIMIT secondary softkey for excluding the total sampling time from the sampling completion conditions e AUTO secondary softkey for excluding the total sampling time from the sampling completion conditions and including the number of samples to the completion conditions This softkey is available only for the linear sampling For details about sampling completion conditions see To Define Stop Conditions on page 4 47 4 44 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 The following figure shows the relation between the sampling paramete
238. in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen SAMPLNG MODE softkey Select SAMPLNG MODE secondary softkey to change the sampling mode Selecting this softkey changes the sampling mode in the following order LINEAR gt LOG10 gt LOG25 gt LOGS0 THINNED gt LINEAR INITIAL INTRVAL softkey Select INITIAL INTRVAL secondary softkey to change the initial interval time for sampling measurements The present initial interval time is shown on this softkey and in the data entry area Then you can change the value NO OF SAMPLES softkey Select NO OF SAMPLES secondary softkey to change the number of samples The present number of samples is shown on this softkey and in the data entry area Then you can change the value TOT SAM TIME softkey Select TOT SAM TIME secondary softkey to change the total sampling time for the sampling measurements The present total sampling time is shown on this softkey and in the data entry area Then you can change the value HOLD TIME softkey Select HOLD TIME secondary softkey to change the hold time for sampling measurements The present hold time is shown on this softkey and in the data entry area Then you can change the value You can change the hold time while measurement is being performed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 71 Screen Organization GRAPHI LIST Screen Group STOP COND softkey Select STOP COND primary softkey to display s
239. ing DUT Example The following example connection can be used to reduce the leakage current Extend the outer conductor as close as possible to the probing needle This also reduces the induced noise Center Conductor Outer Conductor 3 nee ae ANA Needle v4 eo y Connector Plate SS USTONN30 6L 120 50H Contact Pad Guarding Guarding reduces the leakage current between the measurement points and instrument This is important when you measure low current The following figure shows the theory of guarding The buffer amplifier x1 keeps the potential of the guard conductor at the same potential as the force conductor so current does not flow between the force and guard conductors Therefore the current measured by SMU is same as current at measurement point because no current is leaked A E Guard Fo V V O D N O S UGTOI03290Wx40H Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 7 Making a Measurement Connecting DUT To Measure Low Resistance When you measure a low resistance high current flows through the DUT This high current increases the measurement error caused by the residual resistance of cables To cancel the effect of this resistance you can use Kelvin connections 4 wire which means the force and sense lines are extended separately to the DUT The Kelvin connection is available for the 4156B s HRSMU and the 41501A B s HPS
240. ing average at measurement index number n is defined as follows when n lt r when r lt n lt N r n r _ d 2r 1 gt i t n p when N r lt n N qanl Vx r N n l 2 i n r Where i moving average of the st expression for measurement index number n xj value of the st expression for measurement index number i r value of the 2nd expression N number of sweep steps or number of samples If there are some invalid values in the st expression the invalid values are ignored for the calculation For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each primary sweep To return the moving average value of ID by using five measurement values MAVG ID 5 7 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Syntax Example Syntax Example Syntax Example Data Variable and Analysis Function Built in Function MAX Returns the maximum sweep or sampling value MAX expression For subordinate sweep measurement this function returns the maximum value of the primary sweep for the secondary sweep step If there are invalid values in expression invalid values are ignored To return the maximum value of ID MAX ID MIN Returns the minimum sweep or sampling value MIN expression For subordinate sweep measurement this function returns the minimum value of the primary sweep for the secon
241. is Setup For defining where to automatically display lines and marker after a measurement To move into the DISPLAY screen group do one of the following e Press Display front panel key in the PAGE CONTROL key group Select NEXT PAGE primary softkey in the MEASURE OUTPUT SEQUENCE screen Then the following primary softkeys appear DISPLAY ANALYSIS PREV NEXT SETUP SETUP PAGE PAGE e Select DISPLAY SETUP softkey to move to the DISPLAY DISPLAY SETUP screen Select ANLYSIS SETUP softkey to move to DISPLAY ANALYSIS SETUP screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 35 Screen Organization DISPLAY Screen Group DISPLAY DISPLAY SETUP screen for graphic results DISPLAY DISPLAY SETUP S4JANO4 01 20PM user comment me Vee Id xDISPLAY MODE SRAPAICS GRAPHICS Maxis Yiaxis Yeaxis NAME WG ID GM SCALE LINEAR LOG LINEAR MIN 5 00 i 00u 410 00 m MAX 0 00 V 1 00 A 10 00 m GRID LINE PARAMETER oN ON XDATA VARIABLES Vth gm GRAPHICS DISPLAY JANLYSIS PREV NEXT SETUP SETUP pace PASE UGBOSO08 100x50 On the DISPLAY DISPLAY SETUP screen for graphics results you set axes grid and data variable names for the GRAPHICS screen The channels that actually perform measurements are determined by the axis names and data variables t
242. is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Table 1 3 HRSMU Output Current Ranges and Resolutions Range Output Value Sit sn ae Range 10 pA o lt I lt 10pa 10 fA 100 V 100 pA o lt I lt 100pa 10 fA 100 V l nA o lt I lt 1nA 100 fA 100 V 10nA o lt I lt 10nA 1 pA 100 V 100 nA o lt I lt 100nA 10 pA 100 V 1 pA 0 lt I lt 1pA 100 pA 100 V 10 uA o lt I lt 10pa l nA 100 V 100 uA o lt I lt 100 uA 10 nA 100 V I mA o lt I lt 1mA 100 nA 100 V 10 mA 0 lt I lt 10 mA 1 uA 100 V 100 mA 0 lt I lt 20 mA 10 pA 100 V 20 mA lt I lt 50 mA 10 pA 40 V 50 mA lt I lt 100 mA 10 pA 20 V Agilent 4155B 4156B User s Guide Vol 2 Edition 5 1 7 Measurement Units Source Monitor Unit SMU Table 1 4 HRSMU Measurement Current Values and Resolutions Measurement Resolutions Range oo Integration Time ee sis or 640 usto 1 92 S0 us to 560 us Nonoai onger ms 10 pA o lt I lt 10 5pA 1fA 1fA 1fA 10 fA 100 pA o lt i lt 15pa 1fA 1fA 10 fA 100 fA 1 nA o lt i lt 115nA
243. ist Index Number This column displays index number of each measurement point Index number is assigned from 1 in increasing order For a VAR2 secondary sweep the index continues to increase for each VAR2 step that is each VAR2 measurement does not start at index 1 For example if VARI has 5 steps then the first VAR2 step is index to 5 second VAR2 step is index 6 to 10 and so on If you have appended measurements index number for each append measurement starts at 1 6 62 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group In this column head you can confirm how many append measurements you have executed and which append you are currently viewing Refer to the following example 2 4 If the above appears in the column head it means you have appended three measurements to the original measurement total four measurements and you are currently viewing the second measurement first append measurement Measurement Results These columns display measurement result data for the variables that you set up in the LIST area on the DISPLAY DISPLAY SETUP screen The GRAPH LIST LIST screen shows only four columns for the data If you have defined more than four variable values you can scroll right or left by using the left arrow or right arrow front panel key Data Variable Display This area displays the numerical value for the variables that you set up in the DATA VARIABLES area o
244. its Source Monitor Unit SMU Table 1 8 MPSMU Measurement Current Values and Resolutions Measurement Resolutions Hangs aa Integration Time High Sa yi or 640 usto 192 SO us to 560 us e onger ms 1 nA o lt i lt 115nA 10fA 10 fA 100 fA 1 pA 10nA o lt i lt 1sna 10fA 100 fA 1 pA 10 pA 100 nA o lt i lt 115na 100fA 1 pA 10 pA 100 pA l uA o lt I lt 1 15uA 1pA 10 pA 100 pA 1 nA 10 pA o lt I lt 11 5pA 10pA 100 pA lnA 10 nA 100nA J o lt I lt 1ispA 10pa lina iom lioma O 1 mA o lt I lt 1 15mA 1nA 10 nA 100 nA 1 pA 10 mA o lt I lt 11 5mA 10nA 100 nA 1 pA 10 pA 100 mA o lt I lt 100mA 100nA l uA 10 pA 100 pA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Units Source Monitor Unit SMU Figure 1 5 HPSMU Output and Measurement Ranges Current mA UGD02005 Table 1 9 HPSMU Output Voltage Ranges and Resolutions Range Output Value Shee eae Range 2V 0 lt vl lt 2Vv 100 uV
245. key group Four of these keys also have other functions in the green key shift mode The following table shows the function of each key Key Label Functions Moves the cursor left by one column in the data entry area gt Moves the cursor right by one column in the data entry area Delete Deletes one character where the cursor is located Insert Toggles the input mode in the data entry area between insert and overtyping modes Recall Recalls the newest input from the key buffer Clear Deletes all the characters in the data entry area Green lt Je Moves the cursor to the first column in the data entry area Green gt gt Moves the cursor to the last column of the present entry in the data entry area Green Recall Recalls the oldest input from the key buffer Recall Green Clear Clr End_ Deletes the characters from the present cursor position to the end of the entry The key buffer stores the 10 most recent entries from the data entry area You can recall the stored entries using Recall key as described above Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 89 Screen Organization Status Indicators Status Indicators The status indicators indicates the present status of the 4155B 4156B The display contains the following status indicators
246. key to set the desired variable 4 Select EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing variable assigned to X Y1 or Y2 axis Select CANCEL primary softkey Example The following figure shows an example setup to change the variable that is assigned to Y1 axis GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM m ma VG 2 00 A Fi VD SSS j VSB 200u fdi IS IG Oe 0 00 MOPE 0 000 VD Vv 1 00 div 10 00 1 3 I EXIT CANCEL UaTaArAH Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 21 Analyzing Measurement Results Manual Analysis To Overlay an Internal Memory Measurement Curve onto Plotting Area This section explains how to overlay a measurement curve that was stored into an internal memory onto plotting area To store a measurement curve into an internal memory refer to Chapter 3 of User s Guide General Information 1 Select DISPLAY SETUP primary softkey 2 Set OVERLAY PLANE secondary softkey to the desired memory number Selected measurement curve is overlaid onto plotting area Selecting OVERLAY PLANE secondary softkey toggles as follows OFF gt 1 gt 24 3 gt 4 gt OFF To display information of overlay measurement curve Select SHOW OVERLAY INFO secondary softkey The following information o
247. knob sweep results are displayed on the GRAPH LIST screen Then you can use analysis functions To Use User Function If you want to use user functions in GRAPH LIST screen group do following before entering to the knob sweep mode 1 Define user functions on CHANNELS USER FUNCTION DEFINITION screen 2 Enter user function names in DATA VARIABLES field of DISPLAY DISPLAY SETUP screen 3 On GRAPH LIST GRAPHICS screen select DISPLAY SETUP primary softkey then set DATA VAR softkey to ON After getting the measurement data on the knob sweep mode and quitting the knob sweep mode as described above the results of user function will be displayed on the GRAPHILIST screen 3 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Standby Function Standby Function The 4155B 4156B can force standby outputs before starting or after stopping a measurement or stress You can select dc or pulse bias for the standby output Standby Channels Standby channels are the measurement units which force the standby output SMUs VSUs and PGUs can be used for the standby channel VMUs and GNDU are not available To define a measurement unit as a standby channnel move the field pointer to the STBY field on the CHANNELS CHANNEL DEFINITION screen and select the STANDBY ON softkey You cannot use the standby channel as the stress channel The standby channels keep the standby output when the 4155B 4156B is in the st
248. l is not assigned At least one SYNC channel must be specified Assigned more than 4 SYNC channels Set INIT INT gt 2ms for multi CH MEAS When you perform multi channel measurements initial interval must be 2 ms or more Use FIXED range when INIT INT lt 2ms When you use auto ranging or limited auto ranging measurement you must set initial interval to 2 ms or more Cannot disable STBY ON ch in stress On STRESS CHANNEL DEFINITION screen you cannot disable delete entries in row channels that are set to STBY ON on the CHANNELS CHANNEL DEFINITION screen Undefined symbol in user function Syntax error in user function ji oo few arguments in user function 7 Too many arguments in user function User function area is full Recursive call in user function User function is undefined Stack overflow in user function Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 25 If You Have A Problem If Errors Occur 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 163 164 8 26 COMMON channel FCTN must be CONST COMMON channel FCTN must be NSYNC System busy Unable to change page when M eal D n System busy Unable to change page when STRS Ineffective page in this setup X axis is not assigned Yl axis is not assigned For sampling measurements when stop condition is set to ENABLE en
249. l keys value appears in the data entry area Then press Enter front panel key value is entered into the numeric data field at the pointer location Rotate the rotary knob to increase or decrease the value Rotate clockwise to increase value Rotate counterclockwise to decrease value 6 86 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization Screen Operation Blue front panel key usage The blue front panel key has three states Non shift state B b or G is not displayed in the lower right corner of the screen You can enter numeric values Uppercase shift state B is displayed in the lower right corner of the screen G is not displayed You can enter uppercase alphabet characters Lowercase shift state b is displayed in the lower right corner of the screen You can enter lowercase alphabet characters To change between these states e toggle between the non shift shift state by pressing the blue key e toggle between the upper lowercase shift state by pressing the green key then the blue key The following is a detailed description about changing between these states Present Status Next Status Key to be pressed non shift Uppercase blue key shift blue key Uppercase blue key shift non shift blue key non shift Lowercase blue key shift green key then blue key Lowercase blue key shift non shift blue key Uppercase blue key shift Lowercase blue key shift g
250. layed only when SWEEP is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob e VARI START softkey Select VARI START secondary softkey to change the start value of the primary sweep VARI The present start value is shown on this softkey and in the data entry area Then you can change the value e VARI STOP softkey Select VARI STOP secondary softkey to change the stop value of the primary sweep VARI The present stop value is shown on this softkey and in the data entry area Then you can change the value e VARI STEP softkey Select VARI STEP secondary softkey to change the step value of the primary sweep VARI The present step value is shown on this softkey and in the data entry area Then you can change the value COMP softkey Select COMP secondary softkey to change the compliance and power compliance values of the primary sweep VAR1 The present V or I compliance value is shown on the middle line of this softkey and the present power compliance value is shown on the last line of this softkey Selecting COMP softkey highlights this softkey and the present I or V compliance value appears in the data entry area Then you can change the value Then selecting COMP softkey again displays the present power compliance value in data entry area Then you can change the value To dis
251. ld cannot be set compliance value is fixed to 100 mA e POWER COMP In the POWER COMP field you can set the power compliance value To disable the power compliance function select OFF secondary softkey If an SMU is set to VPULSE or IPULSE mode and if the SMU is set to VARI you cannot set power compliance for the VAR1 SMU Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 19 Screen Organization MEASURE Screen Group TIMING HOLD TIME In the HOLD TIME field you set the hold time The output unit waits this time after forcing the start value Range 0 to 655 35 s Resolution 10 ms DELAY TIME In DELAY TIME field you set the delay time The output unit waits this time after each step then starts measurement If an SMU is set up to be a pulse source DELAY TIME field is not displayed because each step is synchronized with pulse output Range 0 to 65 535s Resolution 100 us SWEEP Status Select CONT AT ANY secondary softkey sweep will continue even if an abnormal status occurs Abnormal status means the following e SMU reaches its compliance setting e Current of VSU exceeds approximately 100 mA e SMU or VSU oscillates A D converter overflow occurs e Average current of PGU exceeds 100 mA Select STOP AT ANY ABNORM secondary softkey sweep will stop if any abnormal status occurs Select STOP AT COMPLIANCE secondary softkey sweep will stop only if SMU reaches its compliance setting ST
252. le setup of stress condition STRESS STRESS SETUP Q4JANOL O1 30PM XSTRESS MODE PULSE PURAT EON UNIT PGUL pele PULSE 1 0ms AME COUNT PERI D 40 00ms_ XACCUMULATED STRESS WIDTH 5 00ms 5 00ms 0 0000s DELAY TIME 0 00000 s 0 00000 s PEAK VALUE 100mV 100mV xHOLD TIME BASE VALUE 0 000 v o 009 V 0 000 s LEADING TIME 200 ns 200 ns TRAILING TIME 100 ns 100 ns xFILTER o IMPEDANCE LOW LOW XSTRESS CONTINUE AT ANY Status CONSTAN UNIT NAME MODE SOURCE COMPLIANCE DURATIO CHANNEL lS PREV NEXT DEF SE PAGE PAGE GOTT 100x 4 54 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force To Set up ac Pulse Output 1 Press the Stress key in the PAGE CONTROL key group Confirm that the following is set on the STRESS CHANNEL DEFINITION screen for the PGUs that you want to set up for ac stress e VPULSE is set in the MODE field e SYNC is set in the FCTN field Select STRESS SETUP primary softkey In the PERIOD field enter the pulse period In the WIDTH field enter the pulse width In the DELAY TIME field enter the delay time which is the time from the stress start to the beginning of the pulse leading edge See Delay time on page 4 56 In the PEAK VALUE field ent
253. le to be displayed on the GRAPHICS screen In DATA VARIABLES fields select secondary softkey for desired variable 4 28 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements Example The following figure shows an example to set up both Y1 and Y2 axes and to set grid to ON DISPLAY DISPLAY SETUP 94JANOL 01 30PM XDISPLAY MODE GRAPHICS GRAPHICS Xaxis Yilaxis Y2axis NAME VE IC IB SCALE LINEAR LOG LOG MIN 0 000000 V 1 000pA 1 000pA MAX 1 00000 V 100 COOMA 100 000mA GRID LINE PARAMETER Edn ON DATA VARIABLES ON B 1 i AUTO PREV NEXT ANLYSIS PAGE PAGE UGO1D37 100x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 29 Making a Measurement Sweep Measurements To Display List Results 1 mw IN Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select LIST secondary softkey In the LIST area select the secondary softkey of the variables for which you want to list the measurement results When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on CHANNEL DEFINI
254. linear scaling a Y1 Yo X Xo e If X axis is logarithmic scaling and Y2 axis is linear scaling a Y1 yo log x log xo e IfX axis is linear scaling and Y2 axis is logarithmic scaling a log y log yo x1 xo If X and Y2 axes are both logarithmic scaling a log y log yo log x log xo Where a Slope of LINE2 Xo Yo X1 y1 X and Y2 coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area 7 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Read Out Function L2X Returns the X intercept value Y 0 of LINE2 Syntax L2X If LINE2 is horizontal this function returns invalid data L2Y Returns the Y intercept value X 0 of LINE2 Syntax L2Y If there are Y1 and Y2 axes this function returns the value for selected axis If LINE2 is vertical this function returns invalid data L2Y1 Returns the Y1 intercept value X 0 of LINE2 Syntax L2Y1 If LINE2 is vertical this function returns invalid data L2Y2 Returns the Y2 intercept value X 0 of LINE2 Syntax L2Y2 If LINE2 is vertical this function returns invalid data MI Returns the index number of measurement data at the marker location Syntax MI This function can be used in both GRAPHICS and LIST display modes If the interpolation mode is enabled in GRAPHICS display and the marker is located between the measu
255. ling Measurement Mode For example if Thold 10 ms Tinterval 5 ms and TIME values are as shown below estimated measurement time is 15 ms to 20 ms and there are 3 triggers between INDEX 1 and INDEX 2 TIME for INDEX 1 10 ms 10 5 x 1 1 0 ms TIME for INDEX 2 30 ms 10 5 x 2 1 3 ms Sampling Interval Hold Time ema ila ila ia a a a gt TIME Meas time eee INDEX 1 TIME at INDEX 2 To Use Multiple Measurement Units If you define multiple measurement parameters in the NAME column of the DISPLAY DISPLAY SETUP screen sampling measurement is executed by using multiple measurement units Differences between this measurement and the measurement using only one unit are shown below e Measurement Sequence Measurement units start measurement in the order below Parameters for GRAPH X YI Y2 Parameters for LIST Order of No assigned for the parameters Value of TIME TIME stores the time the first measurement unit starts measurement TIME does not store the time another unit starts measurement e Measurement Time Measurement time is sum of the measurement time by all units To execute sampling measurement with the specified sampling interval the sampling interval must be enough longer than the measurement time Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 19 Measurement Mode Sampling Measurement Mode Sampling Completion The sampling measu
256. llowable range is 500 us to 1 year 3 1536x10 s setting resolution e When the specified time is 10 s or less 100 us e When the specified time is more than 10 s 10 ms 3 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Stress Force Function Stress Force Sequence This section explains the source output sequence when starting the stress force and when finishing the stress force e Output sequence from idle state to the stress state e Output sequence in the stress state e Output sequence from stress state to the idle state Output sequence idle state to the stress force state When the state changes from the idle state to the stress force state the channels output the following values ac stress SYNC channel specified base value dc stress SYNC channel OVor0A non stress NSYNC channel specified source value or pulse output The output sequence of the channels depends on the order specified on the MEASURE OUTPUT SEQUENCE screen For details refer to Sequential Mode on page 3 35 Stress force sequence in the stress force state e stress output Stress force channels output stress at the same time when the stress start trigger is received Stress start trigger is sent hold time after the last channel changes from idle state to stress force state e stress stop Stress force channels stop stress at the same time When you set up both ac and dc stress on the STRESS CHANNEL
257. lse The present period is shown on this softkey and in the data entry area Then you can change the value e PULSE WIDTH softkey displayed only if SMU pulse source is defined Select PULSE WIDTH secondary softkey to change the pulse width of SMU pulse The present pulse width is shown on this softkey and in the data entry area Then you can change the value 6 58 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group SAMPLNG SETUP softkey Select SAMPLNG SETUP primary softkey to display secondary softkeys for changing the sampling parameters This softkey is displayed only when SAMPLING is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob e SAMPLNG MODE softkey Select SAMPLNG MODE secondary softkey to change the sampling mode Selecting this softkey changes the sampling mode in the following order LINEAR gt LOG10 gt LOG25 gt LOGS0 gt THINNED gt LINEAR INITIAL INTRVAL softkey Select INITIAL INTRVAL secondary softkey to change the initial interval time for sampling measurements The present initial interval time is shown on this softkey and in the data entry area You can change the value e NO OF SAMPLES softkey Select NO OF SAMPLES secondary softkey to change number of samples Present number of samples i
258. me and stop the outputs in the opposite order of the OUTPUT SEQUENCE table Default output sequence defined in the OUTPUT SEQUENCE table of the MEASURE OUTPUT SEQUENCE screen is shown below In the default settings output channels stop the output in the opposite order of the following SMUI1 SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 BY Goo ee Oa Starting Outputs In the idle state output switches of a units are on and the units output 0 V When moving to the measurement state the units operate as shown below 1 Disabled units keep 0 V output and turn the output switch off where disabled unit means the unit you select the DELETE ROW softkey in the CHANNELS table on the CHANNELS CHANNEL DEFINITION screen 2 Output channels start the output at the same time Stopping Outputs When returning to the idle state the units operate as shown below 1 Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table 2 Disabled units keep 0 V output and turn the output switch on Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 37 Measurement Functions Output Sequence Example Output sequence in the following conditions is shown in Figure 3 5 e Units available SMU1 to SMU 4 VSU1 to VSU2 e Units disabled SMU4 and VSU2 e Output sequence No change from the default setting Figure 3 5 Default Output Sequence Example for the Simultaneous Mode Measurement State Sampling Measurement Mod
259. mode SELECT CURSOR secondary softkey is displayed When line mode is regression mode selecting REGRESS MODE softkey changes to normal mode e SELECT CURSOR softkey Select SELECT CURSOR secondary softkey to exchange the active and non active cursors Active cursor is highlighted This softkey is displayed only when line mode is normal or regression e GRAD VALUE softkey Select GRAD VALUE secondary softkey to change the gradient value The present gradient value is shown on this softkey and in the data entry area This softkey is displayed only when line mode is gradient You can change the value as follows e Enter number by using numeric keys e Change number by rotating rotary knob e MARKER SKIP softkey Select MARKER SKIP secondary softkey to move the marker to the next measurement curve that was added by VAR2 variable or append measurement This softkey is displayed only when line mode is tangent 6 52 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group SCALING softkey Select SCALING primary softkey to display secondary softkeys for enlarging or reducing the plotting area e AUTO SCALING softkey Select AUTO SCALING secondary softkey to change the X and Y scaling to fit the measurement curve in the plotting area If Y2 axis is used the measurement curve selected by AXIS primary softkey is auto scaled e ZOOM IN softkey Select ZOOM IN secondary softkey to change the X and
260. mpling interval to two times the INITIAL INTERVAL and continues sampling measurement 2 times initial interval eRe lt j a O OOE Discard To store new measurement data linear sampling mode discards a data every couple of nearest data as shown above Data is updated every measurement 2 24 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode 3 Ifthe sampling completion condition is not satisfied after additional 5 points measurement linear sampling mode changes the sampling interval to two times the previous interval and continues sampling measurement Measurement data is updated as described in step 2 4 times initial interval NOY S Discard 4 This discarding and doubling of the sampling interval is repeated until the sampling completion condition is satisfied By the end of the measurement 10 measurement result data is stored in memory Parameters To set up the linear sampling measurement specify the following parameters on MEASURE SAMPLING SETUP page See Table 2 1 Parameter Description MODE Sampling mode LINEAR INITIAL INTERVAL The sampling interval for first NO OF SAMPLES samples Allowable range 60 us to 65 535 s NO OF SAMPLES Number of data to be stored by end of measurement Maximum 10001 If there are multiple measurement units this value must be 10001 number of units or less TOTAL SAMP TIME Total sampling time
261. n To reset STATUS value to 0 s and 0 Select RESET STATUS secondary softkey To reset ACCUMULATED STRESS value to 0 s Select RESET ACCUM STRESS secondary softkey To change ACCUMULATED STRESS value On the STRESS STRESS SETUP screen enter the desired value in the ACCUMULATED STRESS field 4 58 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Example Making a Measurement Stress Force The following figure shows an example of STRESS STRESS FORCE screen STRESS STRESS FORCE 94JANO4 01 30PM CHANGE COMMENT XSTRESS DURATION 10 0000 s CHANGE DURA TON 0 0010 xSTATUS 5 0000 s 50 00 RESET ACCUMULATED STRESS STATUS 123 4500 s RESET ACCUM STRESS CHANNEL STRESS s PREV DEF SETUP PAGE UAND Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 59 Making a Measurement Stress Force To Use Selector 1 Press Stress key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 Inthe MEASURE field of the desired channel in the SMU PG SELECTOR area select SMU secondary softkey to connect SMU to DUT during measurement state PGU secondary softkey to connect PGU to DUT during measurement state OPEN secondary softkey to disconnect SMU PGU and DUT during measurement state PGU OPEN secondary softkey to disconnect PGU from DUT by semicon
262. n DISPLAY DISPLAY SETUP screen This is the value of the variable at the marker position AXIS Y1 softkey For GRAPH LIST GRAPHICS screen this softkey is used to toggle active axis to analyze between the Y1 and Y2 axis For GRAPH LIST LIST screen this softkey only has meaning for the data variable fields which are just above the primary softkeys If you set up a data variable that uses a line or marker read out function selecting this softkey changes displayed data variable value according to read out function This softkey is displayed only if Y2 axis is set up Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 63 Screen Organization GRAPHI LIST Screen Group MARKER softkey Select MARKER primary softkey to display secondary softkeys for operation with marker MARKER softkey Select MARKER secondary softkey to toggle marker display between ON and OFF When ON is displayed on this softkey the row at marker location is highlighted When OFF is displayed on this softkey no row is highlighted The marker on the GRAPH LIST LIST screen is linked to marker on the GRAPH LIST GRAPHICS screen So if marker is moved on the GRAPH LIST GRAPHICS screen the marker also moves on the GRAPH LIST LIST screen The 4155B 4156B remembers the location of marker So if you turn marker display OFF then the marker appears at the same location when you turn marker ON again DIRECT MARKER softkey Select DIRECT MARKER secondary sof
263. n diagnostics was performed but HOST controller couldn t receive the result from SMU controller VSUs and VMUs failed default test of calibration VSUs and VMUs failed function check VSUs failed gain or offset calibration VMUs failed gain or offset calibration VMUs failed differential mode 2 V range gain or offset calibration VSUs failed gain and offset calibration VMUs failed gain and offset calibration or VMU failed differential mode 2 V range gain and offset calibration VMUs failed differential mode 0 2 V range gain or offset measurement VMUs failed differential mode 0 2 V range gain and offset calibration VMUs and VSUs failed CMR Common Mode Rejection amp adjustment VSU1 and VMU1 failed 20 V measurement self test in 20 V range VSU2 and VMU2 failed 20 V measurement self test in 20 V range VSU1 and VMU2 failed 20 V measurement self test in 20 V range VMU2 and VMU failed 20 V measurement self test in 20 V range VSU1 and VMU1 failed 2 V measurement self test in 2 V range VSU2 and VMU2 failed 2 V measurement self test in 2 V range Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 15 If You Have A Problem If Errors Occur 10046 10047 10048 10049 10050 10051 10052 10x20 10x21 10x22 10x23 10x24 10x25 10x26 10760 10761 10762 10763 10764 10765 10766 8 16 VSU1 and VMU2 failed 2 V measurement self test in 2 V range VSU2 and VMU1 failed 2 V measurement self test in 2 V
264. n the measurement time NO OF SAMPLES value is set to 10 Executes one point measurement and stores data in memory Repeats this 10 times every sampling interval INITIAL INTERVAL setting value because of the sampling interval enough longer than the measurement time initial interval If the sampling completion condition is not satisfied after 10 points measurement thinned out sampling mode keeps the sampling interval and continues sampling measurement 2 times initial interval interval a Discard To store new measurement data thinned out sampling mode discards a data every couple of nearest data as shown above Data is updated every measurement Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 27 Measurement Mode Sampling Measurement Mode 3 Ifthe sampling completion condition is not satisfied after additional 5 points measurement thinned out sampling mode keeps the sampling interval and continues sampling measurement Data is updated as described in step 2 4 times 2 times initial interval interval interval Discard 4 This discarding is repeated until the sampling completion condition is satisfied By the end of the measurement 10 measurement result data is stored in memory Parameters To set up the thinned out sampling measurement specify the following parameters on MEASURE SAMPLING SETUP page See Table 2 2 Parameter Description MODE Sampling mode THINNED OUT INITI
265. nce polarity However if the output voltage and the current compliance are opposite polarity the Z compliance value is increased by an amount that is 2 5 to 12 of the range value in the lowest range that includes compliance Figure 3 9 shows the relation of the compliance and output Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 57 Figure 3 9 Table 3 6 Measurement Functions Compliance Relation of Compliance and Output como comonance V como V compliance Current Voltage A I gt 0 ri IV comol AF F l comp C Output Output Voltage Current comp 2 4 4 f 4 7 comol EF a compliance tb comoliance UGBO4017 Current Complinace for COMMON Unit If you set COMMON output mode for the unit current compliance for the unit is automatically set as follows and you cannot change the setting GNDU 1 6 A HRSMU 105 mA MPSMU 105 mA HPSMU 1A V Compliance Setting Range Unit Output Range De t HRSMU 10pAto10mA 0 to 100 V 100 mA 0 lt I lt 20 mA 0 to 100 V 100 mA 20 mA lt I lt 50 mA 0 to 40 V 100 mA 50 mA lt I lt 100 mA 0 to 20 V MPSMU 1 nA to 10mA 0 to 100 V 100 mA 0 lt I lt 20 mA 0 to 100 V 100 mA 20 mA lt I lt 50 mA 0 to 40 V 100 mA 50 mA lt I lt 100 mA 0 to 20 V 3 58 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Table 3 7 Table 3 8 Measurement Functions Com
266. nction keyword expression UEDETONZ woe Figure 7 2 Numeric Constant 7 CSE 0l fo ae a V V O V G VGD 07003 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 9 Data Variable and Analysis Function Expression monadic operator Monadic operator performs operation on expression immediately to its right positive negative dyadic operator Dyadic operator performs operation between two expressions addition multiplication A subtraction division exponentiation numeric constant Numeric constant can consist of digits decimal point and optional exponent notation Refer to Figure 7 2 Mantissa decimal part of greater than seven digits is truncated to seven digits f 10 15 p 10 17 n 10 u 10 u 10 m 10 k 10 M 10 G 10 scientific constant The following scientific constants are available q electric charge 1 602177x107 k Boltzmann s constant 1 380658x 10 73 e space permittivity 8 854188x107 data variable name Any data variable name built in function keyword A keyword that invokes the 4155B 4156B s built in function Refer to Built in Function on page 7 11 read out function keyword A keyword that invokes the 4155B 4156B s built in read out function Refer to Read Out Function on page 7 20 7 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Built in
267. nd Analysis Function Data Variable Data Variable Data variables are used for displaying and analyzing measurement results You use data variables to assign output or measurement data to an axis for display Each data variable has a name You refer to a data variable by its name The following are the three types of data variable e Output or measurement data e User function User variable Data Variable for Output or Measurement Data Data variables are available for the following measurement result data e Output data that you set for SMU or VSU e Measurement data of SMU or VMU e Output data that you set for PGU e Time data of sampling measurement Index of measurement result data Output data of SMU or VSU The data variable names are the output names that you set in the VNAME or INAME columns of CHANNELS CHANNEL DEFINITION screen For a voltage MODE the output name is specified in the VNAME column For a current MODE output name is specified in INAME column Measurement data of SMU or VMU The data variable names are the measurement result names that you set in the VNAME or INAME columns of CHANNELS CHANNEL DEFINITION screen For a voltage MODE the measurement result name is specified in the INAME column For a current MODE measurement result name is specified in VNAME column Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 3 Data Variable and Analysis Function Data Variable You can get the meas
268. nd Icomp value below See Figure 3 10 a Icomp power compliance step voltage If you specify V compliance and power compliance for an I sweep source the 4155B 4156B changes the V compliance at every current step The V compliance is set to the smaller value of V compliance and Vcomp value below See Figure 3 10 b Vcomp power compliance I step current Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 61 Figure 3 10 Figure 3 11 Measurement Functions Compliance Power Compliance Output Area Current A Current Compliance Specified compliance Specified power compliance Output Area Voltage a For voltage sweep Voltage Voltage Compliance A Specified V compliance Specified power compliance 7 Output Area Current b For current sweep UGDO4018 If you specify power compliance SMUs can be swept at their maximum output limits because the 4155B 4156B changes the V or I output range and I or V compliance range during a V or I sweep Figure 3 11 shows an example of the difference in SMU output when power compliance is set and when power compliance is not set Allowable I Output when the MPSMU Sweeps Voltage 0 V to 100 V Current mA A 100 50 20 gt Volt V 0 20 40 100 7 age a When power compliance is set Current mA A 100 50 20 gt Volt V O 20 40
269. necting your DUT to the 4155B 4156B See Connecting DUT on a page 4 3 for procedures Lo y lt g7 Co 388 B O o0 nan ooo So 00 oO ooo fo Of oo cocooo 7 O 09 cocon g g OO Ao gogogo S gt 85 B0000 n 2 Defining measurement mode and CHANNELS CHANNEL DEFINITION S4JANOL OL 30PM ET measurement units that you use to make _ measurement The following tasks are ee ee ad Ee described a ae tte e To Define Sampling Measurement SMU MP van Units Pete ice e To Define a User Function see DELETE ROW previous section CONST CEARREE USER USER TEXT CEE rem _ Lvak Pace e To Control R Box see previous UGOHO23 60x40 section 3 Setting the source parameters of the ine pees ae units The following tasks are described Age POET ee E oe No ar onmes ioe fae SAY ONS e To Set up Sampling Parameters EVENT Ival gt ThI Fee New EL a e To Set up Constant Output ar e To Define Measurement Stop Source Conditions i e To Set up PGU Pulsed Output see Bee e k e Phoe Proe previous section UGTO1024 60x40 4 40 Ag
270. nges instead of one range 100 nA to 100 pA The unit changes ranges up or down one range at a time until the measurement value is between 10 and 114 of the range then the unit performs the measurement 10 pA The unit changes to the next higher range when the measurement value exceeds 104 of the present range 3 54 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Measurement Ranging Mode Limited Auto Ranging Limited auto ranging is similar to the auto ranging But the limited auto ranging does not use the range s less than the range you specified For example if you select the 10 nA limited auto ranging measurement unit does not use the nA range or less So the measurement time for limited auto ranging is less than for auto ranging Monitor unit automatically searches for and measures at measurement range that provides highest resolution but is not below the specified range as follows V measurement The unit changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 110 of the range then the unit performs the measurement If the specified range is greater than the lowest range that contains V compliance the measurement is performed at the lowest range that contains V compliance I measurement If specified range is greater than the lowest range that includes I compliance an error occurs LAtolyA The unit
271. nly The TIFF format is only supported by the SCREEN DUMP function TIFF image can only be written to a FILE A TIFF image can only be written to a FILE The 4155B 4156B cannot output TIFF format images to a printer or plotter HR TIFF format supports DUMP and GRAPH PLOT A high resolution TIFF image is only supported by the DUMP and GRAPH PLOT functions HR TIFF image can only be written to a FILE A high resolution TIFF image can only be written to a FILE VAR1L is not assigned VARI assigned to multiple Channels VAR2 assigned to multiple Channels VAR1 assigned to multiple Channels VARI and VAR1 must be same MODE Cannot set multiple SMUs to pulse mode Cannot use VAR when SAMPLING Cannot use SMU pulse when SAMPLING Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 23 If You Have A Problem If Errors Occur 108 109 110 111 112 113 115 116 117 118 119 120 121 122 123 124 125 8 24 Duplicate variable names exist The setup is not finished Standby chan cannot use R BOX resistor For standby channel you cannot use R Box resistor Common chan cannot use R BOX resistor For common mode channel you cannot use R Box resistor VAR1 step number is out of range START and STOP have different sign SMU pulse Period must be gt Width 4ms VAR1 output power too large for unit VAR1 output power too large for unit VAR2 output p
272. not highlighted 5 Move the cursor to desired location by using arrow keys of the MARKER CURSOR key group 6 Select GRAD VALUE secondary softkey then enter gradient value The line goes through the cursor with specified gradient When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradients of selected line are also displayed in the plotting area To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey 5 12 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a line through specified point with specified gradient RADH H SHORT if GRAPHILIST GRAPHICS 93AuYO9 O6ABPM eae CURSOR 3 872000V 289 23uA TO MARKER mA 2 00 7 Intrppt A 1 421 Grad f 521 61u 200u Idiy TANGENT f MODE OFF REGRESS f MODE OFF J intrest 2 8976 0 00 0 000 vo ov 1 00 div 10 00 MARKER
273. nt Cannot create file dir Change permission Write permission is not set for the directory where you are trying to create a file or subdirectory Unable to go to the dir Permission denied Network File System server cannot move to the specified directory To access the directory change the permissions Select UPDATE ADD to update add printer setup To update or add your new or modified network printer setup the UPDATE or ADD secondary softkey must be selected after finishing the initial setup Duplicate file names exist The same file name cannot be used for multiple files o such file or directory The Network File System cannot find the specified file or directory Unable to read or write to directory A file read or write operation cannot be performed in the specified directory Invalid argument Check command syntax Specified argument did not work when executing the command Verify the command syntax and argument are correct Seek operation failed Seek for file operation failed or append write failed to open the specified file Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 35 If You Have A Problem If Errors Occur 368 369 370 371 372 373 375 377 378 381 383 386 8 36 NFS Software caused connection abort Network file system NFS was disconnected Verify the NFS server is operating correctly Connection reset by peer Remote disconnected Remo
274. nt Technologies Sales and Service office 14 System error Unable to communicate with SMUC The 4155B 4156B may be broken Contact the nearest Agilent Technologies Sales and Service office 15 System error Illegal command to SMUC The 4155B 4156B may be broken Contact the nearest Agilent Technologies Sales and Service office 16 Illegal operation Too many LIST data 17 Unable to display data list Not enough memory 8 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 If You Have A Problem If Errors Occur Device I O error Unable to print out The 4155B 4156B printer or plotter may be broken Contact the nearest Agilent Technologies sales and service office Filer error File name is required Filer error File Type is required System error Realtime clock has problem The 4155B 4156B may be broken Contact the nearest Agilent Technologies Sales and Service office Not 4155 4156 file File was created by old revision File may be corrupt Zero offset meas failed for lt unit name gt Offset value is too large so Zero offset measurement is aborted Too big offset for 10 pA Range of lt unit name gt Offset value is too large so offset cannot be canceled perfectly System busy Measuring System busy Forcing stress System error EEPROM write error Th
275. o the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 or 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Example The following figure shows an example setup to automatically draw a line through the specified point with the specified gradient 4 1 5 2 3 DISPLAY ANALYSIS sETYP 93JUL22 11 324i xLINE1 yl GRAD Jine on Yi at a point WHERE DOM MAX DGM 0 01 ii AFTER PGM GrAdient gt A T aoe J 6 7 8 LINE2 xMARKER At a point where l xInterpolate 0FF 0 5 DISPLAY AUI PREV NEXT SETUP PAGE PAGE UGTO2016 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 31 Analyzing Measurement Results Automatic Analysis To Draw Tangent to Specified Measurement Point 1 Press Display front panel key 2 Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen 3 Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select TANGENT secondary softkey In fiel
276. ob sweep is a linear sweep measurement VARI Range To set the VARI range refer to VARI RANGE softkey description in VARI SETUP Softkey on page 3 20 If you do not set the VARI RANGE the default is the stop value specified for the VAR1 channel on the MEASURE SWEEP SETUP screen Polarity The following sweep polarities are available for the knob sweep function of the VARI source To set the polarity select VAR SETUP and POLARITY softkeys a 0 A ae o Af 0 7 Y a positive b negative c bipolar positive Used to set the sweep output in the positive X direction negative Used to set the sweep output in the negative X direction bipolar Used to set the sweep output in both the positive and negative X directions To increase the source absolute value rotate the rotary knob in clockwise To decrease the source value toward 0 rotate the rotary knob in counterclockwise When measurement curves reach 0 the curves remain at 0 even if you continue to rotate the rotary knob counterclockwise Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 13 NOTE Measurement Functions Knob Sweep Function Step Time Step time is the time width of a sweep step as shown in the following figure For knob sweep measurements you cannot set the delay time Instead you set the step time which you can only set on the KNOB SWEEP screen orimary Sweep source VARI steo time Setu
277. oblem If Errors Occur Set INIT INT gt 640 us for THINNED OUT When you perform thinned out sampling measurements the initial interval must be more than 640 us Sampling range must be lt lldecades Cannot execute cal diag after power fail Turn on the 4155B 4156B again to perform calibration or diagnostics MEAS not finished Incomplete data deleted If you press Stop front panel key before the specified measurement finishes incomplete measurement data is deleted STBY ON ch MODE MEAS STR must be same Cannot use unit after power fail VAR1 parameters must be gt output res Start stop and step value of VAR1 channel must be unit output resolution or more Cal Diag aborted failed on some units Calibration or diagnostics was aborted by receiving RST command So some units maybe failed Over voltage is detected Over Current is detected Power failure at Main Frame Turn on the 4155B 4156B again You can use filer functions after selecting OK secondary softkey except when this error occurs during power on test Power failure at Expander Box Turn on the 4155B 4156B again You can use filer functions after selecting OK secondary softkey except when this error occurs during power on test Cannot shutdown Main Frame Emergency Reason unknown An emergency occurred on an empty slot Or an emergency occurred on an existing slot but the reason is unspecified Agil
278. ol 2 Edition 5 2 17 Measurement Mode Sampling Measurement Mode Sampling Measurement Data Measurement parameters of sampling measurement are set to the NAME column of the DISPLAY DISPLAY SETUP screen Available parameters and example parameters for the NAME field are listed in the table below Parameter A Meanings of Parameter Name TIME Measurement start time This is the time the measurement unit starts one point measurement This is different from timing of the measurement trigger sent every sampling interval INDEX Data index Integer This is the index numbered to measurement data stored in memory V1 for example SMU1 voltage output value or measured value Il for example SMU1 current output value or measured value Measurement start time can be expressed by the following fomula This formula is available for the measurement points before starting the discarding operation for the linear sampling or thinned out sampling For logarithmic sampling this is available for the measurement points in the first decade TIME Thold Tinterval x INDEX 1 N where TIME Measurement start time Thold Hold time Tinterval Sampling interval INDEX Data index N Number of triggers between two nearest measurement points This value is 0 if the sampling interval is enough longer than the measurement time 2 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Samp
279. on DIFF Returns differential coefficient of st expression by 2nd expression DIFF Zst expression 2nd expression The differential coefficient is defined as follows Vn 27 Yp amp X1 when n 1 Y n Yn 1 Yn 1 Xn 1 Xn 1 When 1 lt n lt N Y n ON 7 YN V O XN 1 whenn N Where Ya differential coefficient for measurement index number n Yn value of Ist expression for measurement index number n Xp value of 2nd expression for measurement index number n N number of sweep steps or number of samples For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each primary sweep To return the 2nd order differential coefficient of ID by VG DIFF DIFF ID VG VG Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 15 Syntax Example Syntax Example Data Variable and Analysis Function Built in Function EXP Raises e to the power of expression EXP expression To raise e to the power of the ID EXP ID INTEG Performs numerical integration of the st expression by the 2nd expression INTEG 1st expression 2nd expression This operation is defined as follows when n 1 o 0 when n gt 1 o is presented by the following equation n on 5 E Oty DE i 2 Where On integral of Zst expression for measurement index number n r value of Zst expression for measurement index number i
280. on the MEASURE OUTPUT SEQUENCE screen when state changes from idle to stress e Stress force channels output the stress source values simultaneously when the stress start trigger is received For details about output sequence refer to Stress Force Sequence in Chapter 3 Restrictions e At least one channel must be set to SYNC e Up to four channels can be set to SYNC Ifboth PGUs are set to pulsed source VPULSE you cannot set one PGU to SYNC and other PGU to NSYNC Both must be set to SYNC or both to NSYNC Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 77 Screen Organization STRESS Screen Group SMU PG SELECTOR Agilent 16440A SMU PG selector s operation is defined in the SMU PG SELECTOR table Switches in the SMU PG selector are controlled as defined in these fields MEASURE column sets the switch connections for measurement state STRESS column sets the switch connections for stress force state When the pointer is located in this table the following softkeys appear SMU Will connect DUT to SMU PGU Will connect DUT to PGU OPEN Will disconnect DUT from both SMU and PGU PGU OPEN Will disconnect DUT from both PGU and SMU But PGU is disconnected by using semiconductor switch The normal relay switch for PGU stays closed This is used to prevent the normal relay switch from being damaged Semiconductor switch has longer life than normal relay switch Note that CH2 and CH4 do not have this function
281. on 5 If You Have A Problem If Errors Occur GRAPH LIST LIST screen Status on GRAPH LIST LIST screen is displayed in following format STATUS AB AB AB AB AB AB AB AB AAAAAAAAC AB AB AB AB AB AB AB AB is for the up to 8 LIST variables that can be set up e AAAAAAAA Cis for SMUI1 to SMU6 VMU1 VMU2 and PGU1 2 respectively Where A B and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number e 1 AD converter overflow e 2 Oscillation e 4 Other channel reached compliance limit e 8 This channel reached compliance limit B data error If multiple errors occur numbers are added and displayed as a hexadecimal number e 1 stack register overflow e 2 calculation error e 4 only one data for delta measurement At least 2 data needed C PGU status e 1 PGU average output current exceeds 100 mA w n For non measurement channels is displayed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 39 If You Have A Problem If Errors Occur STRESS STRESS FORCE screen Status on STRESS STRESS FORCE screen is displayed in following format STATUS AC Where A and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number e 2 Oscillation e 4 Some channel has reached compliance limit C PGU status e 1 PGU average current exceeds 100 mA 8 40 Agilen
282. ong modes You can change integration time for short and long modes but not for medium mode The selected integration time is indicated by and is used for all measurement units You select the integration time by using the Short Medium or Long front panel keys from any screen e SHORT The TIME field for SHORT shows the integration time of the short mode You can change this integration time NPLC value is calculated from the integration time and power line frequency e MED The TIME field for MED shows the integration time of the medium mode which is calculated from the power line frequency and NPLC value NPLC value is always 1 You cannot change it e LONG The TIME field for LONG shows the integration time of the long mode which is calculated from the NPLC and power line frequency You can change the NPLC value For details see Integration Time in Chapter 3 WAIT TIME For each unit the 4155B 4156B automatically uses a wait time that depends on the range value This is the default wait time In the WAIT TIME field the value you specify is multiplied times the default wait time Allowed values are 0 0 to 10 0 with 0 1 step The wait time is the time that a unit waits after forcing a value During the wait time the unit cannot start the measurement The default wait time is recommended It is not easy to determine the best wait time If you specify a wait time that is too short the measurement may start before
283. only this SMU can be used for the measurement Maximum 8 units if the 41501 is used 6 SMUs and 2 VMUs If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units d jf compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time 2 34 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions This chapter explains functions that can be used in measurements Agilent 415 3 2 5B 4156B has the following useful measurement functions Stress Force Function Knob Sweep Function Operation States Standby Function Output Sequence Trigger Function SMU PG Selector Control R BOX Control Measurement Ranging Mode Compliance Integration Time SMU Filter Zero Offset Cancel Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Stress Force Function Stress Force Function The 4155B 4156B can force both de stress and ac str
284. or VARI refer to To Set up Synchronous Sweep on page 4 18 For CONST refer to To Set up Constant Output on page 4 20 2 SMU PULSE PERIOD Enter the pulse period value SMU PULSE WIDTH Enter the pulse width value 4 SMU PULSE BASE Enter the pulse base value You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 21 Making a Measurement Sweep Measurements Pulse Parameters The relation between the PERIOD WIDTH and BASE values are as shown in the following figures Stop Value Step Value Start Value A E Pulse Base 7 Hold Time Pulse Width MR Pulse Period a For Pulsed Sweep Source Output Value Pulse Base o Hold Time Pulse Width o Pulse Period b For Pulsed Constant Source SMU outputs the pulses as shown in figure a or figure b Figure a When the function FCTN is set to VARI VAR2 or VARI The pulse peak values are the sweep output values calculated from the sweep start stop step values and so on e Figure b When the function FCTN is set to CONST The pulse peak value is the output value of the constant output source 4 22 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements Example The following shows an example setup of SMU pulsed output on the ME
285. or fixed 10 pA 100 pA limited or fixed 100 pA 1 nA limited or fixed l nA Differential Voltage VMU auto limited auto fixed 02y Measurement a Offset data is measured in the measurement range shown above b VMU2 measures voltage in grounded mode to confirm that voltage does not exceed 20 V Table 3 11 Allowable Offset Value nee Unit Measurement A flowable Offset Value Mode Range Current HPSMU l nA less than 1 of range Measurement MPSMU l nA less than 1 of range HRSMU l nA less than 1 of range 100 pA less than 1 of range 10 pA less than 4 of range Differential Voltage VMU 0 2 V less than 1 of range Measurement a If VMU2 grounded mode measurement value is greater than or equal to 20 V error occurs Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 67 NOTE Measurement Functions Zero Offset Cancel To Perform Offset Cancel Offset cancel is automatically performed during measurement The measurement execution and the offset cancel are explained below 1 Select the measurement range in the MEASUREMENT RANGE table on the MEASURE MEASURE SETUP screen See Table 3 10 for the ranging mode available 10 nA limited auto and 10 nA fixed are also available When you set 10 nA range offset cancel function uses the 1 nA range offset data for the data measured in both nA range and 10 nA range For the 100 nA range or more offset cancel
286. ou specify for trigger is the time from when the trigger is output to when the next step occurs This is to make sure the external instrument has enough time to make the measurement Available setting range for the step delay time is Range 0 to 1 s Resolution 100 us Trigger output delay time is shown as T2 in the following figure Delay Time set in TIMING table on MEASURE SWEEP SETUP page 4155 A156 J lt _ a T2 T2 Trigger Output rece Output External Instrument Tex Tex lt lt lt NR UGD04016 12 Ommwx60mmnh T2 step delay time set in STEP DELAY field on MEASURE OUTPUT SEQUENCE page Tex measurement time for external instument If the specified T2 is shorter than the measurement time of the 4155B 4156B the 4155B 4156B waits until the measurement completes then outputs the next step 3 44 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Trigger Function Trigger output function of PGU Using the Agilent 41501A B contains PGUs the 4155B 4156B can output a gate trigger through the 41501A B Ext Pulse Generator Trig Out terminal The trigger signal is synchronized with the PGU output pulses and you cannot control trigger timing The polarity of the trigger is positive and the output level is TTL The following figure shows the trigger signal The leading edge and tailing edge of the trigger are synchronized with the leading edge an
287. oup Select MEASURE SETUP primary softkey In the ZERO CANCEL field select ZERO CANCEL ON OFF secondary softkey to toggle the zero offset cancel mode between on and off Then ON or OFF appear automatically in each unit field depending on the measurement range Press green key then Stop key to measure the zero offset data Then this measured data is used to compensate the measurement results when measurement is performed For more details about the zero offset cancel function refer to Zero Offset Cancel in Chapter 3 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 31 Making a Measurement Sweep Measurements To Execute or Stop Measurement e To execute a measurement press e Single key in the MEASUREMENT key group for single measurement e Repeat key in the MEASUREMENT key group for repeat measurement e Append key in the MEASUREMENT key group for append measurement e To stop a measurement press Stop key in the MEASUREMENT key group Single Repeat and Append Measurement There are three measurement execution modes as follows Single measurement Clears GRAPHICS or LIST screen then executes measurement one time Measurement results are displayed on GRAPHICS or LIST screen Repeat measurement Executes measurements continuously Before each measurement is executed the GRAPHICS or LIST screen is cleared Most recent measurement results are displayed on GRAPHICS or LIST screen Append measurement Exec
288. out hard copy Unable to set Another controller is on bus Unable to specify this name here PGU Pulse DELAY must be gt setup res PGU pulse delay time must be setup resolution Cal Diag failed Cannot use unit Compliance too low to force pulse Compliance too high to force pulse Two VPULSE PGUs must be same STBY Two VPULSE PGUs must be same FCTN T Improper parameter for file operation An option for the file system command has been set up incorrectly System error Filer memory overflow Filer error Integer overflow Bad volume specifier Volume label for mass storage is incorrect Initialization may have been performed on an incompatible system or the disk may be defective Filer error File type is wrong Filer error EOF found Filer error EOR found File error Illegal DISK parameter Illegal disk parameter was detected The mass storage device is set up incorrectly Agilent 4155B 4156B User s Guide Vol 2 Edition 5 208 210 211 212 213 214 215 216 217 218 219 220 221 222 If You Have A Problem If Errors Occur System error Controller not found Unable to access the file system The file system controller cannot be found The 4155B 4156B may need service Contact the nearest Agilent Technologies Sales and Service office File error Unable to execute File open Unable to perform the requested file
289. ower too large for unit TOT SMP TM AUTO is for LINEAR only AUTO can be specified for total sampling time only when LINEAR sampling mode is selected Only LINEAR when init int lt 480 us When initial interval is set to 480 us or less you cannot specify LOG or THINNED OUT sampling mode For LINEAR set AUTO if init int lt 480us When initial interval is set to 480 us or less and when LINEAR sampling mode is set AUTO must be set in TOTAL SAMP TIME field TOT SP TM must be gt INIT INT NOofSMP 1 Total sampling time must be set in the following range total sampling time initial interval x number of samples 1 STOP CONDITION NAME is not set PGU pulse Period must be gt Width PGU pulse Period must be gt Delay Agilent 4155B 4156B User s Guide Vol 2 Edition 5 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 If You Have A Problem If Errors Occur PG leading trailing must be same range PGU leading and trailing time must be set in the same range For details about the ranges see Chapter 1 in this manual PGU Leading must be lt 0 8 x WIDTH Leading time must satisfy the following equation leading time lt pulse width x 0 8 PGU Trailing must be lt 0 8 x Peri Wid Trailing time must satisfy the following equation trailing time lt pulse period pulse width x 0 8 SMU I range must be lt Compliance range SYNC channe
290. p Measurements Knob Sweep Measurements Sampling Measurements Stress Force details about entry fields on the 4155B 4156B setup screen refer to Chapter 6 To satisfy the specifications of the 4155B 4156B and the 41501A B you need minimum 40 minutes warm up before performing measurements 4 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Connecting DUT Connecting DUT This section describes how to connect device under test DUT to the 16442A test fixture and how to connect cables to the connector plate For connecting the test fixture or the connector plate to the 4155B 4156B see User s Guide General Information If you use a wafer prober see wafer prober manuals Note that you must set the 4155B 4156B to the idle state when connecting or disconnecting DUTs If not the DUTs may be damaged To set to idle state press Stop key and make sure Standby indicator is off This section has the following descriptions e Using Test Fixture e Using Connector Plate Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 3 CAUTION CAUTION Making a Measurement Connecting DUT Using Test Fixture 1 Press the Stop front panel key to set your 4155B 4156B to idle state If the standby indicator is lit press the Standby front panel key 2 Select a proper socket module for your DUT then set the module on the test fixture 3 Mount your DUT on the socket module
291. p condition MEASURE SAMPLING SETUP 94JANO1 01 30PM SAMPLING PARAMETER STOP CONDITION MODE LINEAR ENABLE DISABLE JENABLE INITIAL INTERVAL 2 ms ENABLE DELAY 0 01 s NO OF SAMPLES 1001 NAME R TOTAL SAMP TIME AUTO THRESHOLD 0 1 EVENT Val gt I ThI HOLD TIME 0 000 EVENT NO pe FILTER ON CONSTANT UNIT NAME MODE SOURCE COMPLIANCE PGU MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ PAGE PAGE UsTOTOT 10x70 4 48 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force Stress Force This section covers the tasks for stress forcing Two types of stress can be forced by the 4155B 4156B e dc stress e Dc voltage stress can be forced from SMUs VSUs or PGUs De current stress can be forced from SMUs e ac stress also called pulsed stress e Ac voltage stress can be forced from PGUs e Ac current stress cannot be forced from the 4155B 4156B Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 49 Making a Measurement Stress Force The following illustrates the basic procedures for stress forcing 1 Connecting your DUT to the 4155B 4156B See Connecting DUT on page 4 3 for procedures
292. p range is 0 5 ms to 100 ms with 100 us resolution For normal sweep measurement the step time depends on the measurement time For knob sweep measurement step time is always this specified value Measurement Channel You select the measurement channel by selecting the Y AXIS ASSIGN softkey on the KNOB SWEEP screen then selecting the desired secondary softkey You can select one measurement channel only so the Y2 axis is not available on the KNOB SWEEP screen default measurement channel e When an SMU is set to VARI Measurement channel is the VARI channel e When a VSU is set to VARI Measurement channel is the first found channel that can measure Searching order is SMUI1 gt SMU6 gt VMU1 gt VMU2 e restrictions If you use series resistance for VARI channel and VARI channel is V force mode only VARI measurement channel can be assigned to Y axis Measurement Resolution When performing knob sweep measurement measurement resolution of each measurement unit is worse than the measurement resolution of normal sweep measurements For details of measurement resolution refer to Chapter 1 3 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function Sweep Step Value For the VARI channel you do not set the step value You can consider the step value to be the amount you rotate the knob Then the sweep is performed for the specified number of steps The STEP field on the
293. pecified condition the nearest measurement point is used For the meaning of expression that you can enter in step 4 and 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 37 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically display marker at specified point DISPLAY ANALYSIS SETUP 93JUL22 11 32AM LINEL REGRESSION line on Yi between a point AT LINE 1 2 la r xMARKE At a point where v poi AFTER pe Maxever oh Winter poate OFF F 3 4 5 MAX VCE E PREV NEXT SETUP PAGE PAGE UGTO2020 5 38 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization This chapter is a reference for operating Agilent 4155B 4156B by using the front panel controls The 4155B 4156B is operated by setup screens and results screen displayed on the screen The following sections explain these setup screen structure Screen Structure e CHANNELS Screen Group e MEASURE Screen Group e DISPLAY Screen Group e GRAPH LIST Screen Group e STRESS Screen
294. pend or Stress key After measurement or stress the STANDBY ON units are returned to same output value as before measurement or stress If Standby indicator is ON then pressing the Standby key disables the Standby function and Standby output stops Pressing the Stop key has no affect on the Standby state 4 26 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 To Define a User Fun Making a Measurement Sweep Measurements ction 1 Press Chan key in the PAGE CONTROL key group 2 Select USER FCTN primary softkey 3 Inthe NAME column enter the user function name 4 Inthe UNIT column enter the units 5 In the DEFINITION column enter the user function definition The user function name must be 6 or less alphanumeric characters First character must be alphabet character Name must be unique Name is case sensitive For example HFE is different from Hfe In the user function definition you can enter an expression that consists of any of the following e VNAME and INAME name DEFINITION screen e Other user functions e Numerical operators Built in functions such as DI s that you entered on the CHANNELS CHANNEL ELTA and SORT For details about expressions numerical operators and built in functions refer to Chapter 7 Example The following figure shows an example setup to define Hfe CHANNELS USER FUNCTION DEFINITION G4JANO1 O1 30PM Hfe NAME UNIT
295. period pulse period gt peak value gt base value i delay time oS 2 as ar a A delay time p a i gt i pulse width UGDOS0G GAL 1050 pulse start e PEAK VALUE and BASE VALUE PEAK VALUE and BASE VALUE fields specify the pulse peak and pulse base values e LEADING TIME and TRAILING TIME LEADING TIME and TRAILING TIME fields specify the transition time of leading and trailing edges which is time for pulse to change from 10 to 90 of pulse amplitude e IMPEDANCE IMPEDANCE field specifies the PGU output impedance In this field select e LOW secondary softkey to set output impedance to about 0 Q e 50 ohm secondary softkey to set output impedance to 50 Q Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 27 Screen Organization MEASURE Screen Group e PULSE COUNT PULSE COUNT field specifies the number of pulses for the sampling measurement for sweep measurements only FREE RUN is available e Enter a pulse count value only for sampling measurements e Select FREE RUN or enter 0 zero to set continuous pulse output If either PGU1 PGU2 or both are set to standby ON on the CHANNELS CHANNEL DEFINITION screen this field is automatically set to free run mode CONSTANT UNIT and NAME are defined on CHANNELS CHANNEL DEFINITION screen In the SOURCE field you specify the output value 6 28 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 MEASURE
296. pliance Unit Output Range Shenae HPSMU InAtol0mA 0 to 200 V 100 mA 0 lt I lt 50 mA 0 to 200 V 100 mA 50 mA lt I lt 115 mA 0 to 100 V 1A lt I lt 50mA 0 to 200 V 1 A 50 mA lt I lt 125 mA 0 to 100 V 1 A 125 mA lt I lt 500 mA 0 to 40 V 1 A 500 mA lt I lt 1 A 0 to 20 V V Compliance Resolution Unit V Compliance Resolution HRSMU OV lt V lt 2V 100 uV MPSMU 2V lt V lt 20V 1 mV HPSMU 20V lt V lt 40V 2 mV 40V lt V lt 100V 5 mV 100 V lt V lt 200 V 10 mV I Compliance Setting Range Unit Output Range I Compliance Setting Range HRSMU 2V 100 fA to 100 mA 20 V 100 fA to 100 mA 40 V 100 fA to 50 mA 100 V 100 fA to 20 mA MPSMU 2V 1 pA to 100 mA 20 V 1 pA to 100 mA 40 V 1 pA to 50 mA 100 V 1 pA to 20 mA Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 59 Table 3 9 Measurement Functions Compliance Unit Output Range I Compliance Setting Range HPSMU 2V 1 pA to 1000 mA 20 V 1 pA to 1000 mA 40 V 1 pA to 500 mA 100 V 1 pA to 125 mA 200 V 1 pA to 50 mA I Compliance Resolution Unit I Compliance Resolution HRSMU 100 fA lt I lt 100 pA 10 fA 100 pA lt I lt 1nA 100 fA InA lt I lt 10nA 1 pA 10nA lt I lt 100nA 10 pA 100 nA lt I lt 1pA 100 pA 1pA lt I lt 10nA l nA 10 uA l
297. r SMUs You can set VPULSE for PGUs Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 9 Screen Organization CHANNELS Screen Group e Ifboth PGUs are set to VPULSE the STBY settings of both PGUs must be same FCTN This field defines an output function for SMUs VSUs PGUs and GNDU When the pointer is located in this column allowable output functions appear in the secondary softkey area You select a softkey to set an output function e SMU or VSU you can set VAR1 VARI VAR2 or CONST PGU or GNDU you can set CONST Restrictions e In FCTN column you cannot set multiple VARI VARI or VAR2 For example you cannot set VARI for 2 units e If VARI is set you must set VARI also e If VAR2 is set you must set VAR also e The output modes of VARI and VARI must be same That is the MODE setting for both must be set to a voltage mode or both must be set to a current mode For example you can set VARI to V and VARI to VPULSE e You cannot set VARI VARI or VAR2 for sampling measurement You can set CONST only STBY STBY field specifies which channels output source values in the standby state e IfSTBY is set to ON the unit forces a specified output value when in the standby state e IfSTBY is blank the unit outputs 0 V in the standby state same as when in idle state See Types of Operation State in Chapter 3 for more information on the standby state Restrictions Ifboth PGUs ar
298. reen key then blue key Lowercase blue key shift Uppercase blue key shift green key then blue key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 87 Screen Organization Screen Operation Green front panel key usage You can use the green front panel key to enter special non alphanumeric characters which are printed in green above the keys The green key action is momentary That is after you press the green key only the next keystroke is effective For example to enter press the green key 0 green key and 1 The green key mode has special functions for entering data as shown in the following table Keys Label Function Green lt Je Moves the cursor to the first character Green gt gt Moves the cursor to the last character Green Recall Recall Recalls the oldest input from the key buffer The key buffer stores the 10 most recent entries in the data entry area Green Clear Clr gt End Clears the entered data from the present cursor position to the end Green Enter Calc Calculates any expression entered in the data entry area The front panel green key can also be used to perform dump Plot Print key knob sweep Single key and zero offset cancel Stop key operations 6 88 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Edit front panel keys Screen Organization Screen Operation There are six keys in the Edit front panel
299. rement Stress Force Example The following figure shows an example setup to set two PGUs to ac stress source STRESS CHANNEL DEFINITION S4JANO1 04 30PM CHANNELS SMU PG SELECTOR REYNE MEASURE STRESS MEASURE STRESS UNIT NAME MODE NAME FCTN 1 SMU PGU SMUL MP V4 2 SMU PGU SMU2 MP v2 3 OPEN OPEN SMU3 MP V3 4 OPEN OPEN SMU4 MP SMUS MP SMU6 MP VSUL ysue PGUL VPULSE SYNC TRIGGER SETUP PGU2 VPULSE EINE DISABLE GNDU POLARITY POSITIVE DELETE ROW SYNC STRESS NEXT FORCE PAGE UGTOION 10x70 4 52 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Stress Force To Set up Stress Condition Timing 1 Press Stress key in the PAGE CONTROL key group 2 Select STRESS SETUP primary softkey 3 Inthe MODE field of the STRESS MODE area select e DURATION secondary softkey to specify how long to force stress e PULSE COUNT secondary softkey to specify how many pulses to output for force stress for ac stress only 4 Inthe DURATION or PULSE COUNT field enter the duration or pulse count You can select FREE RUN secondary softkey to output stress continuously 5 Inthe STRESS Status field select e CONT AT ANY secondary softkey to continue forcing the stress even if an abnormal status occurs STOP AT ANY A
300. rement completes when one of the following conditions is satisfied Stop condition The stop condition is satisfied See below Total sampling time The specified total sampling time has elapsed Available for linear and thinned out sampling Setting TOTAL SAMP TIME to auto or no limit disables this sampling completion condition Number of sampling points The specified number of samples has elapsed Available for logarithmic sampling For linear sampling setting TOTAL SAMP TIME to auto enables this sampling completion condition Stop front panel key The Stop front panel key is pressed GPIB Command The 4155B 4156B receives GPIB command to stop sampling Emergency Condition An emergency condition occurs on the 4155B 4156B Interlock Open Interlock terminal opens due to high voltage Stop Condition The stop condition is defined by using the STOP CONDITION table of MEASURE SAMPLING SETUP screen This function stops the measurement as shown below 1 Compares the value of the parameter set to NAME field and the value defined in THRESHOLD field Counts how many times the selected EVENT occurs When the count reaches the value defined in EVENT NO field sampling is stopped immediately 2 20 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode To use this function the INITIAL INTERVAL value must be set to 2 ms or more The INITIAL INTER
301. rement data this function returns a non integer value Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 31 Data Variable and Analysis Function Read Out Function MX Returns the value of the X coordinate at the marker location Syntax MX MY Returns the value of the Y coordinate at the marker location Syntax MY If there are Y1 and Y2 axes this function returns the value for selected axis MY1 Returns the value of the Y1 coordinate at the marker location Syntax MY1 MY2 Returns the value of the Y2 coordinate at the marker location Syntax MY2 7 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Data Variable and Analysis Function Analysis Function Analysis Function The 4155B 4156B provides the following functions for analyzing measurement results e Marker on the GRAPH LIST GRAPHICS screen e Marker on the GRAPH LIST LIST screen e Cursor e Line Drawing Scaling Functions e Overlay Display Function e Automatic Analysis Function Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 33 Figure 7 3 Data Variable and Analysis Function Analysis Function Marker on the GRAPH LIST GRAPHICS screen Markers on the GRAPH LIST GRAPHICS screen GRAPHILI
302. ress force state Standby State Before starting or after stopping a measurement or stress if only the standby channels perform dc or pulse outputs the 4155B 4156B is in the standby operation state To start the standby output press Standby front panel key Then the indicator is lit However if no units are defined as the standby channel the 4155B 4156B cannot be in the standby state To stop the standby output press Standby front panel key The indicator is off When the 4155B 4156B is in the standby state you can change setting parameters for non standby channels without changing the state But if you modify the settings for the standby channels the 4155B 4156B changes from the standby state to the idle state Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 27 Measurement Functions Standby Function Available Units and Output Values Following table shows the output value of the standby channels in the standby state The specified values are the values that are set on the MEASURE setup screens Unit FCTN MODE SMU VSU PGU VARI V START START p VAR2 I START p z VARI VPULSE BASE F IPULSE BASE p CONST y SOURCE SOURCE SOURCE I SOURCE a F VPULSE BASE 2 Specified pulses L IPULSE BASE i i a VMUs and GNDU cannot be set to the standby channel b Pulses as defined in MEASURE PGU SETUP screen If both PGUs are set to VPULSE the STBY settings of both PGUs must
303. rrow MARKER CURSOR keys When the pointer is located in the user comment field the present user comment appears in the data entry area and you can edit it using edit keys When the pointer is located in the variable name field allowable variable names are shown in the secondary softkey area Measurement units change automatically according to variable you select When the pointer is located in the data variable display area allowable variable names are shown in the secondary softkey area Measurement units change automatically according to variable you select Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 67 Screen Organization GRAPHI LIST Screen Group SWEEP SETUP softkey Select SWEEP SETUP primary softkey to display secondary softkeys for changing the sweep source parameters This softkey is displayed only when SWEEP is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob VARI START softkey Select VARI START secondary softkey to change the start value of the primary sweep VARI The present start value is shown on this softkey and in the data entry area Then you can change the value VAR1 STOP softkey Select VARI STOP secondary softkey to change the stop value of the primary sweep VARI The present stop value is shown on this softkey and in the data entry area
304. rs and sampling measurement Hold Time e Making a Measurement Sampling Measurements Initial Sampling Interval w S Output Value eT Number of Samples G01003005 You can set a hold time by entering a number units seconds in the HOLD TIME field Example The following figure shows example setup of the sampling parameters MEASURE SAMPLING SETUP SAMPLING PARAMETER 94JANO1 01 30PM STOP CONDITION MODE LINEAR ENABLE DISABLE INITIAL INTERVAL 2 ms ENABLE DELAY NO OF SAMPLES 4001 NAME TOTAL SAMP TIME AUTO THRESHOLD EVENT HOLD TIME EVENT NO FILTER CONSTANT UNIT NAME MODE SOURCE COMPLIANCE 1 MEASURE OUTPUT PREV NEXT SETUP SEQ PAGE _ PAGE UGT01043 100x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 45 Making a Measurement Sampling Measurements To Set up Constant Output 1 Define CONST units as described in To Define Measurement Units on page 4 42 2 Press Meas key in the PAGE CONTROL key group 3 Select SAMPLNG SETUP primary softkey 4 Inthe SOURCE field of the desired unit in the CONSTANT area enter the desired output value To modify the UNIT NAME and MODE field Modify the UNIT NAME and MODE fields on the CHANNELS CHANNEL DEFINITION s
305. s One point is specified by X Y coordinate mode and other point is specified by data condition mode 1 fa 3 DISPLAY ANALYSIS ET 93JUL22 411 32ay 7 4 o LINE1 REGRESSION line on Y1 between a point AT mie f4 5 Y and aant ERE VCE J 10 AFTER VCE o 4 4 XLINE2 L y j 6 7 8y MARKER At a point where l Interpolate OFF MAX VCE DISPLAY A PREV NEXT SETUP 8 PAGE PAGE UGTA2079 5 36 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis To Display Marker at Specified Point T Press Display front panel key Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed Move pointer to field 1 then select secondary softkey to set desired data variable name In field 2 enter desired expression In field 3 select e AFTER secondary softkey if you want to set a search start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings If you selected AFTER in field 4 select secondary softkey to set desired data variable If you selected AFTER in field 5 enter desired expression The marker can be displayed on the measurement curve only So if no measurement data satisfy the s
306. s 1 ns 2 0 50 us to 10 00 us 10 ns 3 5 0 us to 100 0 us 100 ns 4 50 us to 1000 us 1 us 5 0 5 ms to 10 00 ms 10 us e restrictions e leading edge transition time lt pulse width x 0 8 e trailing edge transition time lt pulse period pulse width x 0 8 e Leading and trailing edge transition times for a PGU must be in the same range Output impedance You can select 50 Q or Low impedance Trigger output PGUs output trigger signal to synchronize with external pulse generators If an 41501A B has PGUs the 41501A B has a trigger output terminal For details of trigger functions refer to Trigger Function in Chapter 3 1 22 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode This chapter explains measurement modes of Agilent 4155B 4156B The 4155B 4156B has the following two measurement modes Sweep Measurement Mode e Sampling Measurement Mode 2 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sweep Measurement Mode Sweep Measurement Mode For sweep measurements the sweep source channels perform staircase sweep output of voltage or current while the monitor channels measure voltage or current for each sweep step Only SMUs and VSUs can be sweep sources VARI VAR2 and VAR1 The 4155B 4156B provides three types of sweep measurement e Basic Sweep Measurement
307. s 3 27 Standby States 2 82 54 a a ecards oh eee eh eee 3 27 Available Units and Output Values 00 cece eee eee 3 28 Output Values of non Standby Channels 00 0000 ee eeee 3 28 Output Sequence of Standby Channels 00 000 e eee eee 3 29 When Getting Setup File 0 0 0 ce eee eee 3 30 Operation States soiteta ea oe Pe ee Be a 3 31 Tdle States isi ted Mek ited abi bled AS deh ie hele aloha ed ee 3 31 Measurement State 2 eect eens 3 31 Stress Force State ous eos omiaa a td ebew gees pak wa pokes ON 3 32 Standby State ccs esie tir wehbe wedi while ed eb eeiy a dae dan es 3 32 Changing among Operation States 0 0 eee eee eee 3 32 Output Sequence ss 420333 Se wek wie al ahem Bene ie tae 3 34 Sequential Mode ose ae eee eee ee Ee ee ae ee eee 3 35 Simultaneous Mode 0 teen eee ene 3 37 Trigger Function ce ossee toege tases Ghutelne es seed daleiet Manolo 3 39 Trigger Input 2 406260 ceca Gada bie eee ede peda a oa ee dees 3 41 Contents 2 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents Trigeer Output xi 430A eee ae ht ae oe Ae i 3 42 SMU PG Selector Control 0 0 cece ett ene 3 46 Setup and Switching Conditions 0 00 cece eee eee 3 47 Restrictions using Selector 0 00 c cece ent e ene 3 47 R BOX Control sg once es say Sse Slee Gain oe dae pit see a E Oa eae Ra 3 48 Resistance Value 3 5 0 ha te pee bedi ede ede Dee tee
308. s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 or 7 see Expression in Chapter 7 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Example The following figure shows an example setup to automatically draw a line through two specified points One point is specified by X Y coordinate mode and other point is specified by data condition mode 1 2 3 DISPLAY ANALYSIS SETS ra 93JUL22 a LINE4 NORMAL line on Y1 between a point AT x 0 l oo 5 and a point WHERE vcE 7 10 l AFTER VCE e ols INE2 xX i Zo 7 a o xMARKER At a point where l Interpolate OFF MAX VCE DISPLAY SETUP PREV NEXT PAGE PAGE ATE UGTO2015 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 29 Analyzing Measurement Results Automatic Analysis To Draw Line by Specifying Gradient and One Point 1 Press Display front panel key 2 Confirm th
309. s a long cursor at the center of the plotting area To return plotting area to original position Select CANCEL SCALING secondary softkey To Draw Line through Two Specified Points 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF ON gt OFF The line mode should be normal So GRAD MODE TANGENT MODE or REGRESS MODE softkeys should not be highlighted If one of these softkeys is highlighted turn off by pressing the softkey 4 Move cursors to desired locations by using arrow keys of the MARKER CURSOR key group To select the cursor you want to move use the SELECT CURSOR secondary softkey If it seems that only one cursor is displayed the cursors are at the same location When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen their X and Y intercepts and gradients are also displayed in the plotting area 5 10 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR
310. s not output 15 V source on post regulator is not output 3 V source on post regulator is not output LAN interface test failed A front panel key is stuck in pressed position Front key assembly may be disconnected Front panel key controller is not functioning properly External key controller failed self test Selector test reached timeout R Box test reached timeout Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 19 If You Have A Problem If Errors Occur If Errors Occur when You Operate the 4155B 4156B The following error codes and messages can occur when operating the 4155B 4156B The error codes and messages are displayed in a message window or in the message display area at the bottom of the screen Syntax error Input should be integer number Syntax error Input should be real number Syntax error Unrecognized parameter Illegal setup The parameter is out of range DATA buffer full Too many APPEND DATA buffer full Too many points Cannot define more than 6 User Vars y A aA gt U m Syntax error First char should be Alphabet p Syntax error Must be alphanumeric _ p Name must be set for user function variable Name setup cannot be omitted when setting a user function or a user variable name 12 Syntax error Unknown variable name 13 System error HOSTC received invalid data The 4155B 4156B may be broken Contact the nearest Agile
311. s on the GRAPHICS LIST screens These names must be 6 or less alphanumeric characters First character must be alphabet character To disable a unit Move the pointer to the row of the unit then select the DELETE ROW secondary softkey The settings in the row are deleted 4 42 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sampling Measurements Example The following figure shows an example setup to define sampling measurement units CHANNELS CHANNEL DEFINITION 94JANO1 01 30PM MEASUREMENT MODE SAMPLING CHANNELS MEASURE sTBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE SMU1 MP Vbe Ib v CONST O ohm SMU2 MP Vece Ic V BA O ohm SMU3 MP COMMON CONST SMU4 MP SMUS MP SMU6 MP VSUL vsu2z ee ee VMUL fpessssa ee VMU2 PGUL PGU2 GNDU DELETE Row USER USER NEXT FCTN VAR PAGE UG01046 100x70 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 43 Making a Measurement Sampling Measurements To Set up Sampling Parameters 1 Confirm that SAMPLING is set in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen If SAMPLING is not set select SAMPLING secondary softkey in the MEASUREMENT MODE field 2 Press Meas key in the PAGE CONTROL key group 3 Select SAMPLING SETUP pr
312. s per decade XX is 10 25 or 50 VARI START Enter the sweep start value VARI STOP Enter the sweep stop value If you select LOG sweep step mode the polarity of stop value must be same as the polarity of start value VARI STEP If you select LINEAR sweep step mode enter the sweep step value This field is not available for the LOG mode VARI COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the primary sweep source NO OF STEP is automatically calculated from START STOP and STEP values You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen 4 14 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements Example The following example shows the primary sweep conditions VARI parameters EASURE SWEEP SETUP S4JANO1L 01 30PM VARIABLE VARL VAR2 UNIT SMU2 MP AME Voe SWEEP MODE SINGLE LIN LOG LINEAR START ov STOP SO STEP 0 10 V lO OF STEP 51 COMPLIANCE 100 mA POWER COMP OFE TIMING HOLD TIME 0 0 s DELAY TIME O 000 s SWEEP CONTINUE AT ANY Status CONSTANT UNIT AME ODE SOURCE COMPLIANCE 5 00 PeU MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ PAGE PAGE
313. s shown on this softkey and in data entry area Then you can change the value e TOT SAM TIME softkey Select TOT SAM TIME secondary softkey to change the total sampling time for the sampling measurements The present total sampling time is shown on this softkey and in the data entry area Then you can change the value e HOLD TIME softkey Select HOLD TIME secondary softkey to change the hold time for sampling measurements The present hold time is shown on this softkey and in the data entry area Then you can change the value You can change the hold time while measurement is being performed Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 59 Screen Organization GRAPHI LIST Screen Group STOP COND softkey Select STOP COND primary softkey to display secondary softkeys for changing the sampling parameters This softkey is displayed only when SAMPLING is selected in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen To change the values on the secondary softkeys enter number by using numeric keys or change number by rotating rotary knob STOP COND softkey Select STOP COND secondary softkey to enable or disable the stop condition Selecting this softkey toggles between ENABLE and DISABLE ENABLE DELAY softkey Select ENABLE DELAY secondary softkey to change the enable delay time for the stop condition The present enable delay time is shown on this softkey and in the data entry area Then
314. s the PGU output impedance In this field select e LOW secondary softkey to set output impedance to about 0 Q e 50 ohm secondary softkey to set output impedance to 50 Q CONSTANT The UNIT NAME and MODE are defined on STRESS CHANNEL DEFINITION screen On the STRESS CHANNEL DEFINITION screen you set the SMUs and VSUs as follows e dc stress MODE I SMUs only or V FCTN SYNC e dc non stress MODE I SMUs only or V FCTN NSYNC CONSTANT table is for setting the output parameters of SMUs VSUs and PGUs V mode e SOURCE In the SOURCE field you specify the output value e COMPLIANCE In the COMPLIANCE field you specify the compliance value For a VSU this field cannot be set compliance value is fixed to 100 mA If you define more than four VSUs SMUs and PGUs to be constant stress or non stress units on the CHANNELS CHANNEL DEFINITION screen first four units appear in this table To show other units select NEXT UNIT secondary softkey To scroll units put field pointer in most right or left column then press the left arrow or right arrow MARKER CURSOR front panel keys 6 82 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization STRESS Screen Group STRESS STRESS FORCE screen STRESS STRESS FORCE S4JANO1 01 30PM user comment device 1 shannel length 1 CHANGE COMMENT STRESS DURATION 10 0000
315. s you to save the setup as a normal sweep measurement setup file But the setup data cannot be retrieved to the knob sweep mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 17 Measurement Functions Knob Sweep Function DISPLAY SETUP Softkey This softkey displays secondary softkeys for setting the display format of graphics X AXIS REGION Y AXIS REGION 3 18 Selects polarity of X axis region displayed on the screen This softkey displays present setting setting Pressing this softkey toggles polarity as follows t gt gt gt default If polarity of VARI stop and start value on MEASURE SWEEP SETUP screen are same default value is same as polarity of stop and start value If polarity of VAR1 stop and start value on MEASURE SWEEP SETUP screen are different default value is Selects polarity of Y axis region displayed on the screen This softkey displays present setting setting Pressing this softkey toggles the polarity in the following order to gt t gt default polarity of VAR1 compliance value on the MEASURE SWEEP SETUP screen Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function X AXIS DISPLAY NORMAL Selects direction of the X axis This softkey displays present setting e setting Selecting this softkey toggles NORMAL or REVERSE When NORMAL is selected e Minimum axis value is at left end of X axis
316. secondary softkey to OFF To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey Example The following figure shows an example to draw a line through two specified points GRAPHILIST GRAPHICS SHORT 23Aug09 06 1 4 TEC 93Aug09 06 18PM CURSOR CURSOR 3 572000V 289 25uUA ME 7 mA 2 00 Intrppt a 1 421 T Grad 521 61u 200u o ony TANGENT MODE A REGRESS L MODE f OFF _ al Intrept 2 28976 0 00 SELECT 0 000 vo Ov 4 00 div 10 00 eens MARKER fe DISPLAY SWEEP TIMING CONST CURSOR SETUP seTup seTue SETUP Uerenn4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 11 Analyzing Measurement Results Manual Analysis To Draw Line through Specified Point with Specified Gradient 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF ON gt OFF 4 Select GRAD MODE secondary softkey if it is not highlighted Softkey becomes highlighted One cursor disappears if there are two cursors in the plotting area before this step Selecting GRAD MODE secondary softkey toggles between highlighted and
317. select SAMPLING to select sampling measurement When pointer is located in a field that requires a variable name all available variable names are displayed on secondary softkeys so you can select desired variable name Available variable names are names you already set up as measurement variables and user function variables If more than six variable names are available MORE secondary softkey appears which you can select to display other available variable names For comment and name fields When the pointer is located in a comment or name field you input the desired characters by using the ENTRY front panel key group You press the desired characters The characters appear in the data entry area For name fields you can enter alphanumeric characters For comment fields you can also enter non alphanumeric characters You can enter uppercase or lowercase alphabet characters by using blue and green front panel keys You can enter special non alphanumeric characters by using the green front panel key If a comment or name is already entered in the field it appears in the data entry area You can edit it using Edit front panel keys After editing or entering the comment or name press the Enter front panel key to enter the name or comment into the field at the pointer location For numeric data fields When pointer is in a numeric data field input numeric data as follows Type the numeric value by pressing numeric front pane
318. sent setting setting Press this softkey to display the step time in the data entry area then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range 500 us to 100 ms with 100 us resolution default 500 us Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Knob Sweep Function VAR2 SETUP Softkey This softkey displays secondary softkeys for setting the secondary sweep source VAR2 parameters If VAR2 is not set for any channel on the CHANNELS CHANNEL DEFINITION screen this softkey is not displayed VAR2 START 20 0uA VAR2 STEP 20 0uA Sets VAR2 start value This softkey displays present setting setting Press this softkey to display the VAR2 start value in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range Depends on the measurement unit See Chapter 1 default VAR2 start value on MEASURE SWEEP SETUP screen Sets VAR2 step value This softkey displays present setting setting Press this softkey to display the VAR2 step value in the data entry area Then you can change the setting value by using the rotary knob numeric keys or arrow keys in the Edit key group setting range Depends on the measurement unit See Chapter 1 default VAR2 step value on MEASURE SWEEP SETUP screen Agilent 4155B 4156B User s
319. solution Stop Condition DISABLE DISABLE ENABLE Measurement Units 1b Max 8 Measurement Range FIX FIX AUTO LIMITED Integration Time Short Short Medium Long Number of units SMUs or VMUs used for measurements big voltage source SMU is connected to R BOX only this SMU can be used for the measurement Maximum 8 units if the 41501 is used 6 SMUs and 2 VMUs If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units dif compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 29 Measurement Mode Sampling Measurement Mode Logarithmic Sampling Measurement Logarithmic sampling mode plots the measurement data on the X axis TIME set to the logarithmic scale by doing the following operation See Figure 2 7 1 Forces constant current constant voltage or pulsed constant bias Waits hold time 2 3 Triggers one point measurement 4 Measurement unit executes measurement Measurement result data is stored in memory 5 Triggers one point measuremen
320. splayed and you can enter a second variable and condition expression This sets up a search start condition for finding specified point This setup is optional For example you can specify the following expressions to search for a measurement point that satisfies the first condition after the second condition is satisfied LINE1 NORMAL LINE ON Y1 between a point AT X 0 y 1 0 and a point WHERE DGM MAX DGM 0 01 AFTER DGM MAX DGM On GRAPH LIST GRAPHICS screen LINE secondary softkey must be ON Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 41 Screen Organization DISPLAY Screen Group Gradient mode line In the first bracketed field after LINE1 or LINE2 you select the line mode Select the GRAD secondary softkey to set the gradient line mode The pointer moves to the second bracketed field as shown LINE1 GRAD LINE ON X1 between a point Gradient In the second bracketed field you specify which measurement curve you want to analyze by selecting the related axis Y1 or Y2 secondary softkey In the third bracketed field you specify how to select a point e Select BY X Y COORDINATE AT is displayed Then you enter the desired X Y coordinate values or expressions in the X and Y fields e Select BY DATA CONDITION WHERE is displayed Then you enter a variable name and condition expression to specify a measurement point
321. sweep measurements you can specify the step delay time shown in Figure 3 6 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 41 Measurement Functions Trigger Function Trigger Output The 4155B 4156B triggers external instruments via the trigger output terminal For the trigger polarity you can select positive or negative The trigger output function is not available for sampling measurements Gate Trigger Output The 4155B 4156B can output gate triggers when forcing stress When stress forcing starts the trigger signal changes to the active level When stress forcing finishes the trigger signal changes to the non active level To use the gate trigger function set the TRIGGER SETUP fields on the STRESS CHANNEL DEFINITION screen icp jan tress Force State ps gt PeU E smu f eee de stress gate trigger output Trigger Signal Edge Trigger Output For sweep measurements the 4155B 4156B can output edge triggers which are synchronized with each sweep step To set the trigger output timing use the following field on the MEASURE OUTPUT SEQUENCE screen Name of entry field depends on the measurement mode Measurement Mode Entry Field Pulse sweep measurement TRIG OUT DELAY Sweep measurement STEP DELAY 3 42 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Trigger Function Trigger output delay
322. t I lt 100 uA 10 nA 100 uA lt I lt 1 mA 100 nA ImA lt I lt 10mA l yA 10 mA lt I lt 100mA 10 uA MPSMU I pA lt I lt 1nA 100 fA InA lt I lt 10nA l pA 10nA lt I lt 100nA 10 pA 100 nA lt I lt 1 uA 100 pA 1pA lt I lt 10unA l nA 10 uA lt I lt 100 uA 10 nA 100 uA lt I lt 1 mA 100 nA ImA lt I lt 10mA l yA 10 mA lt I lt 100mA 10 uA 3 60 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Functions Compliance Unit I Compliance Resolution HPSMU 1pA lt I lt 1nA 100 fA InA lt I lt 10nA 1 pA 10nA lt I lt 100nA 10 pA 100 nA lt I lt 1 uA 100 pA 1pA lt I lt 10nA l nA 10 uA lt I lt 100 uA 10 nA 100 uA lt I lt 1 mA 100 nA ImA lt I lt 10mA l yA 10 mA lt I lt 100mA 10 uA 100 mA lt I lt 1A 100 pA Power Compliance In addition to V compliance or I compliance you can set power compliance for the VARI VAR2 and VARI channels of sweep measurement However if the pulse output function is used for VARI or VARI channels you cannot set power compliance for the VARI or VAR1 channel that is set to pulse output The power compliance setting range for each SMU is as follows HRSMU l to2 W MPSMU 1 to2 W HPSMU 1 to 20 W If you specify I compliance and power compliance for a V sweep source the 4155B 4156B changes the I compliance at every voltage step The I compliance is set to the smaller value of J compliance a
323. t Interval of trigger is constant setting value of INITIAL INTERVAL 6 Measurement unit executes measurement if it is ready to measure Measurement result data is stored in memory Measurement unit waits next trigger if it is busy or in measurement Le Repeats steps 5 and 6 until that a sampling completion condition is satisfied Logarithmic sampling mode retains only the measurement data that can plot the data on the logarithmic X axis in almost the same interval Figure 2 7 Example Operation of Logarithmic Sampling Starts Sampling Hold Time Sampling Interval Discard A gt Fi i of first decade j Data of second decade A a a a 7 je Aa s7 gt TIME This is the example 1 10 decade va to plot LOG10 data T i Ia E H H gt TIME First decade Second decade 2 30 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode TIME Value TIME value of measurement data is determined by MODE INITIAL INTERVAL NO OF SAMPLES and HOLD TIME parameters Where MODE decides number of measurement points in decades For example LOG10 mode obtains 10 data per 1 decade An example to get measurement data in logarithmic sampling measurement is explained below This example assumes the following settings See also Figure 2 7 MODE LOG10 10 data 1 decade INITIAL INTERVAL 10 ms e NO OF SAMPLES 20 HOLD TIME 10 ms e STOP CONDIT
324. t 4155B 4156B User s Guide Vol 2 Edition 5
325. t CONST SETUP primary softkey to display secondary softkeys for changing the constant source parameters This softkey is displayed only when CONST is set in the FCTN field on CHANNELS CHANNEL DEFINITION screen Output source names appear on the secondary softkeys and the present output value and compliance also appears For example when a output source named Vce is defined 5 0 V output with 100 mA compliance the following softkey appears Vce 5 00 V 100 mA Select the secondary softkey that you want to change The selected softkey and is highlighted and the present output value appears in the data entry area You can change the value Then selecting the same softkey again displays the compliance value in the data entry area You can change the compliance Use the following methods to change the value Enter number by using numeric keys e Change number by rotating rotary knob Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 73 Screen Organization STRESS Screen Group STRESS Screen Group STRESS screen group has the following screens Stress channel definition For defining the stress channels of the 4155B 4156B setting up SMU PG selector and setting up the trigger Stress setup For setting the stress parameters Stress force For monitoring the progress of stress forcing To move into the STRESS screen group do the following Press Stress front panel key in the PAGE CONTROL key group Then the
326. t again press Single front panel key only Rotate the rotary knob to stretch or shrink the sweep range Knob sweep measurement is executed and measurement curve appears on the graph To change the measurement conditions use the following primary softkeys Softkey Description DISPLAY SETUP Used to change graph display The following secondary softkeys are available X AXIS REGION Selects the X axis display range from or Y AXIS REGION Selects the Y axis display range from or X AXIS DISPLAY Selects the X axis direction from NORMAL or REVERSE Y AXIS DISPLAY Selects the Y axis direction from NORMAL or REVERSE GRID Sets grid on or off 4 36 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Knob Sweep Measurements Softkey Description VARI SETUP Used to change VARI sweep source setup The following secondary softkeys are available SWEEP MODE Sets sweep mode to SINGLE or DOUBLE POLARITY Sets polarity of VAR1 output to POS NEG or BIPOLAR VARI RANGE Sets VARI sweep range This sets X axis scale NO OF STEPS Sets number of sweep steps COMPLIANCE Sets VARI compliance value This sets Y axis scale HOLD TIME Sets hold time STEP TIME Sets step time VAR2 SETUP Used to change VAR2 sweep source setup The following secondary softkeys are available VAR2 START Sets VAR2 sweep start value VAR2 STEP Sets VAR2 sweep steps
327. t line to analyze Selecting LINE SELECT secondary softkey toggles as follows 17 gt 25 NONE gt 1 The following are independent for each line So changing the active line also changes the following locations of marker and cursors e Xand Y intercepts and gradient To Display Grid on the Graph 1 Select DISPLAY SETUP primary softkey 2 Set GRID secondary softkey to ON Grid is displayed Selecting GRID secondary softkey toggles between ON and OFF To turn off grid Set GRID secondary softkey to OFF 5 18 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Change Data Variable on Graph 1 Select DISPLAY SETUP primary softkey 2 Select RE SETUP GRAPH secondary softkey 3 Move the pointer to desired data variable field by using the arrow keys then select secondary softkey to enter the desired variable name 4 Select EXIT primary softkey to exit the RE SSETUP GRAPH mode To exit without changing data variable Select CANCEL primary softkey Example The following figure shows an example setup to change the data variable to be displayed GRAPHILIST GRAPHICS SHORT 93AugO9 06 18PM MARKER ai lo KE hel IN 3 3S 2 ke 3 5 289 23UA ESM 590 4uS mA 14 2 00 INDEX 200u fdiv p 0 00 MORE 0 000 VD
328. tage stress forcing mode SMU VSU and PGU e I secondary softkey for dc current stress forcing mode SMU e VPULSE secondary softkey for ac voltage stress forcing mode PGU e COMMON secondary softkey for circuit common SMU and GNDU 4 Inthe NAME field of desired unit in the CHANNELS area enter the stress channel name 5 Inthe FCTN field of units that will be stress force channels select SYNC secondary softkey The stress channel name is only used for reference on the STRESS SETUP screen not on any results screen So you can omit the name if desired In the FCTN column you can set up to four units to SYNC At least one unit must be set to SYNC in the FCTN column The SYNC stress force units all start forcing stress at the same time The NSYNC non stress force units channels start forcing stress in sequence when state changes to stress force state For this timing see Stress Force Sequence in Chapter 3 If the row of a unit does not have settings the unit is not used To disable a unit In the row of the unit select the DELETE ROW secondary softkey The settings in the row are deleted To set up non stress output channels Perform the following procedure 1 Perform first 3 steps described above 2 Inthe FCTN field select NSYNC secondary softkey If you use two PGUs as pulsed sources VPULSE both must be SYNC or both NSYNC Agilent 4155B 4156B User s Guide Vol 2 Edition 5 4 51 Making a Measu
329. te connection was terminated Verify the remote setup and the executed operation are correct Verify the local and remote systems are operating properly Unable to transfer data Communication down Data cannot be transferred because the communication was shutdown NFS Connection refused Connection to NFS was refused Verify the refused device was properly exported Connection failed Socket was not sent NFS Connection failed because the socket was not sent Too many levels of symbolic links The file is linked to itself or the linked file is linked back to the file Cross device link Unable to hard link different physical file systems Hard link must be done to same file system Unable to use this protocol Unable to use this protocol on the network This protocol is not supported This protocol is not supported on the network This type of protocol is not supported This type of protocol is not supported on the network NFS too many references can t splice System busy Saving getting text files The 4155B 4156B cannot be interrupted by other operations For example text files cannot be saved or retrieved while making measurements Agilent 4155B 4156B User s Guide Vol 2 Edition 5 387 388 389 391 392 393 394 400 401 402 410 411 412 If You Have A Problem If Errors Occur Unable to access file The file is locked Unable to write to this file The file is locked by anot
330. ters of high frequency devices such as GaAs MESFETs or high frequency bipolar transistors oscillation may cause measurement problems Normal measurement cannot be performed because of oscillation To solve this problem e For FETs add resistive ferrite beads as close as possible to the gate e For bipolar transistors add resistive ferrite beads as close as possible to the base or emitter e Make connection cables as short as possible Long wires cause oscillation because of their large inductance L Test Device To unit ITN i ro To Unit X wT Ferrite Beads Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 5 If You Have A Problem When You Make A Measurement If Measured Value Oscillates when Measuring Negative Resistance If the DUT has negative resistance characteristics SMUs may oscillate Because SMUs operate as negative feedback amplifier To solve this problem e For voltage controlled negative resistance device e Connect G in parallel with your DUT to cancel negative resistance To obtain an output I V curve use the following equation i T yo all Gs y DUT VY V V gt UGT06003 110x50 For current controlled negative resistance device e Connect R in series with your DUT to cancel negative resistance To obtain an output I V curve use the following equation Vz V R I e Ifthe resistance of the DUT is less than 1 MQ you can use R Box
331. the MEASURE OUTPUT SEQUENCE screen Then the trigger inputs or outputs are performed automatically after you start a measurement by selecting a measurement front panel key Single Repeat or Append The trigger output function is not available for sampling measurements When you perform knob sweep measurements the trigger function is not available For the electrical specifications of trigger signals refer to User s Guide General Information 3 40 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Figure 3 6 Measurement Functions Trigger Function Trigger Input The 4155B 4156B can receive an edge trigger from external instruments via the trigger input terminal and initiate a sweep or sampling measurement Following figure shows examples of externally triggered sampling and sweep measurements For the trigger polarity you can select positive or negative Examples of Externally Triggered Measurements lh Hold ime ThA Td Delay lime Trigger Input External Instrument Trigger Signal a Sampling Measurement step delay time y Th Td T e Start Value 4 Trigger Inout External Instrument Trigger Signal a UGDO4013 NONO b Sweep Measurement After you press the Single Repeat or Append front panel key the 4155B 4156B waits for the trigger signal only once When the 4155B 4156B receives the trigger signal the 4155B 4156B starts measurements For staircase
332. the display of measurement results GRAPH LIST screen group Displays the measurement results STRESS screen group Sets and monitors the stress force SYSTEM screen group Controls mass storage sets system parameters for the 4155B 4156B sets the print plot parameters and so on KNOB SWEEP screen group Displays the measurement results when the knob sweep function is used You can use the front panel keys in the PAGE CONTROL key group to display the desired screen The PAGE CONTROL key group has the following keys Chan Displays the CHANNELS screen group Meas Displays the MEASURE screen group Disp Displays the DISPLAY screen group Graph List Displays the GRAPH LIST screen group Stress Displays the STRESS screen group System Displays the SYSTEM screen group For details about the System screen Group refer to System Screen Organization in User s Guide General Information To display the KNOB SWEEP screen press 1 the front panel green key 2 Single key For details about the KNOB SWEEP screen see Knob Sweep Function in Chapter 3 6 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization CHANNELS Screen Group CHANNELS Screen Group CHANNELS screen group has the following screens Channel Definition For defining the measurement mode and measurement channels of the 4155B 4156B User Function Definition For defining the user functions User Variable Definition For defining the user varia
333. the displayed accumulated stress time enter the time in this field Selecting RESET ACCUM STRESS secondary softkey resets the displayed accumulated stress time to 0 zero HOLD TIME In the HOLD TIME you can set the hold time After the stress force state starts the stress force channels wait the specified hold time then start forcing stress at the same time For details about hold time see example figure in Stress Force Sequence in Chapter 3 FILTER FILTER field specifies SMU filter to ON or OFF If this field is set to ON overshoot decreases but settling time takes several ms If you set dc stress to short stress force time set OFF in this field if you want the stress signal to be more pulse shaped STRESS Status e Select CONT AT ANY secondary softkey stress will continue even if an abnormal status occurs Abnormal status means the following e SMU reaches its compliance setting e Current of VSU exceeds 100 mA e SMU or VSU oscillates e A D converter overflow occurs e Average current of PGU exceeds 100 mA e Select STOP AT ANY ABNORM secondary softkey stress will stop if any abnormal status occurs e Select STOP AT COMPLIANCE secondary softkey stress will stop only if SMU reaches its compliance setting 6 80 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization STRESS Screen Group STOP AT ANY ABNORM and STOP AT COMPLIANCE secondary softkeys are displayed only when speci
334. time for pulsed sweep measurements When using an SMU as a pulse source the 4155B 4156B can output edge triggers at each pulse leading edge Trigger output delay time TRIG OUT DELAY specifies how much to delay the trigger after the leading edge So you set the trigger output delay time to wait until the 4155B 4156B outputs a stable pulse peak value Available setting range for the trigger output delay time is Range 0 to specified pulse width maximum 32 7 ms Resolution 100 us Trigger output delay time is shown as T1 in the following figure Pulse Width 4155 4156 sT S ra Output rro Output External Instrument Tex Tex a a UGDO401 60imhxtSmmw TI trigger output delay time set in TRIG OUT DELAY field on MEASURE OUTPUT SEQUENCE page Tex measurement time for external instrument If you want the external instruments to make a measurement while the pulse peak value is being forced the specified T1 and pulse width must satisfy the following equation pulse width gt TI Tex where Tex means the measurement time Agilent 4155B 4156B User s Guide Vol 2 Edition 5 3 43 Measurement Functions Trigger Function Step delay time for staircase sweep measurements When performing sweep measurements without a pulsed SMU the 4155B 4156B outputs an edge trigger at the time when the 4155B 4156B starts performing measurement in each sweep step as shown in the following figure The step delay time y
335. tisfies specified value If consecutive values also satisfy specified value the next search starts after the consecutive values e MARKER SKIP softkey Select MARKER SKIP secondary softkey to move the marker to the next VAR2 value or to the next appended measurement data e MARKER SKIP softkey Select MARKER SKIP secondary softkey to move the marker to the next VAR2 value or to the next appended measurement data e NEXT APPEND softkey Select NEXT APPEND secondary softkey to move the marker to the next appended measurement data Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 65 Screen Organization GRAPHI LIST Screen Group SPREADSHEET softkey Select SPREAD SHEET primary softkey to display ASCII SAVE window The following entry fields appear FUNCTION ASCII SAVE NAME UNIT OUTPUT DATA INDEX NO DELIMITER lt gt STRING MARK Also the following softkeys appear e Select EXECUTE softkey to store result data to diskette file or network disk e Select EXIT softkey to exit the ASCII SAVE window e Select FILE CATALOG secondary softkey to list the names of all files that are on diskette or network disk You can select a file name from the list ASCII SAVE function automatically adds TXT extension to specified file name e NAME Enter the name of file without extension to which you want to save the result data e OUTPUT DATA Enter numbers to specify range of dat
336. tkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey Example The following figure shows an example to draw a regression line for the specified region GRAPH LIST GRAPHICS SHORT 93Aug0S O61EPM m CURSOR CURSOR 3 572000V 289 23uA MARKER 3 572000V 289 23UA MARKER mA 2 00 Intreet 1 421 Grad y 521 61ul I GRAD MODE OFF 200u Idiv TANGENT DE OFF Intrept 2 88976 0 00 SELECT 0 000 VO CV 1 00 div 10 00 aa DISPLAY MARKERS f SETUP CURSOR SETUP SETUP SETUP SWEEP TIMING CONST es UGT02008 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 5 17 Analyzing Measurement Results Manual Analysis To Display and Select a Line 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON Selected line and two cursors are displayed Selecting the LINE secondary softkey toggles as follows OFF ON gt OFF Set LINE SELECT secondary softkey to desired line 1 or 2 Selected line is highlighted To selec
337. tkey to move the marker to the specified value directly When you select this softkey a cell marker is displayed in the row of the marker and the primary and secondary softkeys change as follows Primary softkeys EXIT CANCEL Secondary softkeys MARKER SEARCH MARKER MIN MAX MORE SKIP In this mode you can move the marker to a specified value You enter the value in the data entry area then the marker moves to the value in list that is closest to the specified value If you have executed append measurement the marker moves within the append measurement you refer to You use the cell marker to specify the target variable column You can move this marker by using the left arrow up arrow right arrow and down arrow MARKER CURSOR keys Selecting EXIT primary softkey exits the DIRECT MARKER function Selecting CANCEL primary softkey returns the marker to the same position as before selecting the DIRECT MARKER secondary softkey 6 64 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group e MARKER MIN MAX softkey Select MARKER MIN MAX secondary softkey to move the marker to where the measured value is maximum or minimum value If the marker is on the minimum value selecting this softkey moves to the maximum value Otherwise selecting this softkey moves to the minimum value e SEARCH MORE softkey Select SEARCH MORE secondary softkey to move marker to next candidate that sa
338. tla has tates ET Header agewa gel 7 21 ORY Oe N I Se ES Pen ene Me ye eee RE aC E eT te et 7 21 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Contents 7 Contents UX Fits de Rs bebe the baie hdd bel ted tk S E E 7 22 IY 8 8 ieee ed es oo eae 7 22 QIYD ehseg ewaladis Geen coe ph adaeesbhamedtdidot Mate egse wes 7 23 VY 2 eii eee tenes ea eee eA eae nda ead Eh IOS 7 23 ECO naen ances ratedt a aces hase eet Stay h dete a dw ah sets 7 24 OLIGO iey Saat on apse a e a r aE cade 2iine ated aAa a e eA 7 24 OLIGI aeaiee bral eee tbe had aaa a dade be 7 25 QUIG2 Sateen Ma coted eth a At ede th i ht Ay sh che ct Bh ied df 7 26 Q EIX cc aie hha eehe ete Rh aoe be eae ee x 7 27 OLIY ressautar cated a a a a aE cuenta ceaeaees 7 27 QLIYT hee ety hs oe hee ee a ee ae eee 7 27 OLIY sce tenets eth aa eos ei int od eae Aa eee 7 27 DVD CO een aii aes Se ne OA Sele ete se ae Maen eas A UR aceon does 7 27 OG ies fd ee hiner die pee eee i metipn ete staid iA 7 28 QULQGD Aaen sexe inetd inane Manin hs teed reeks do weed coped Be vias 7 29 OLG iS etre tha ead he ce es ve ee ae 7 30 UD E E Satna tla New pueda eae th ae E TEE 7 31 O A ER Ree ORL RE BERT OE RR E ne Ree A Dt one 7 31 OLY T ois eke ee ah Rh ee ca ae hd 7 31 DUD YD ssc d aici ite eth ah Nt ae ee is sed naa dee dh AAR sade or us Ac adai 7 31 MY iets pai ket ea eas ag eee ee ee Ha Ae eS 7 31 OMX ities gene atcee te ands a itera hale Saleia A A E PAM AN Sete 7 32 OMY so ce Mohd nE tebe e
339. to START value VARI cannot be a sweep source for Knob Sweep measurement Cannot do SAMPLING when Knob Sweep STEP must be lt STOP START Cannot set CONT AT ANY if PCOMP is ON When you set power compliance you cannot select CONT AT ANY secondary softkey CONST setup must be lt unit output range Pulse BASE must be lt unit output range PGU pulse WIDTH must be gt setup res Pulse width of PGUs must be greater than or equal to unit setup resolution TRIG OUT DELAY is too long Trigger out delay must be 32 7 ms or pulse width you specified whichever is shorter Cannot ENABLE stop if INIT INT lt 2 ms When initial interval is set to less than 2 ms you cannot set stop condition Illegal setup Target module is not installed Illegal setup Invalid command Cannot define more than 6 User functions Cannot define more than 8 data vars in lists Cannot define more than 2 display data vars Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 27 If You Have A Problem If Errors Occur 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 8 28 ASCII format does not allow block transfer Block size mismatched with data format Y2 axis is not assigned List name is not assigned The specified name is not list name Illegal file type is requested System busy Printing
340. tput units the first four units appear in the CONSTANT fields To show other units select NEXT UNIT secondary softkey To scroll the units put field pointer in most right or left column then press the right arrow or left arrow MARKER CURSOR front panel key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 21 Screen Organization MEASURE Screen Group MEASURE SAMPLING SETUP screen MEASURE SAMPLING SETLP S4JANO1 04 30PM user comment a Vee Ic SAMPLING PARAMETER STOP CONDITION MODE LINEAR ENABLE DISABLE ENABLE INITIAL INTERVAL 4 ms ENABLE ELAY 0 01 s NO OF SAMPLES 1001 NAME R TOTAL SAMP TIME AUTO THRESHOLD ot EVENT val gt Th HOLD TINE 0 000 5 EVENT NO a ee FILTER ON CONSTANT UNIT NAME MODE SOURCE COMFLIANCE 1 ZAMPENG POU MEASLRE OUTPUT PREV MEXT gETLE SETP__ SETP__ SEQ PAGE PAGE UGDO5004 100x50 On this screen you set sampling parameters for each unit For details see Sampling Measurement Mode in Chapter 2 User Comment In this field you can enter a desired comment which is also displayed in the CHANNELS MEASURE DISPLAY and GRAPH LIST screen groups SAMPLING PARAMETER e MODE MODE field sets the sampling mode In this field select 6 22 LINEAR secondary softkey to specify the linear sampling mode LOG1
341. urement results by using the measurement result names If the corresponding SMU or VMU does not perform a measurement invalid data is returned Output data of PGU The data variables for PGU output are as follows Set data Data variable name pulse peak VNAME for PGU that you defined on CHANNELS CHANNEL DEFINITION screen is the data variable name for pulse peak voltage pulse period PGT is the data variable for pulse period pulse duration PGD is the data variable for duration time of pulse stress force Duration time is the pulse count multiplied by pulse period pulse delay PGIDL is the data variable for pulse delay time of PGU1 time PG2DL is the data variable for pulse delay time of PGU2 pulse width PGI1W is the data variable for pulse width of PGU1 PG2W is the data variable for pulse width of PGU2 pulse base PGIB is the data variable for pulse base voltage or current of PGU1 PG2B is the data variable for pulse base voltage or current of PGU2 pulse leading PGILD is the data variable for leading edge transition time of PGU1 PG2LD is the data variable for leading edge transition time of PGU2 pulse trailing PGITR is the data variable for trailing edge transition time of PGU1 PG2TR is the data variable for trailing edge transition time of PGU2 Time data of sampling measurement TIME is the data variable for time data of sampling measurement Index of the measurement r
342. utes measurement one time Does not clear GRAPHICS or LIST screen That is measurement results are added to the existing results 4 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Making a Measurement Sweep Measurements To Use R Box 1 Connect the 16441A R Box to the 4155B 4156B and to the 16442A Test Fixture or connector plate on your shield box For details about connections refer to R BOX Control in Chapter 3 2 Press Chan front panel key of the PAGE CONTROL key group 3 Select CHANNEL DEF primary softkey to display the CHANNELS CHANNEL DEFINITION screen 4 Inthe SERIES RESISTANCE fields select e 0 ohm secondary softkey to connect 0 Q resistance e 10k ohm secondary softkey to connect 10 KQ resistance e 100k ohm secondary softkey to connect 100 KQ resistance e 1M ohm secondary softkey to connect 1 MQ resistance Resistance is switched just before and just after measurement state In the standby state the stress force state and the idle state 0 Q is connected The 4155B 4156B automatically compensates for the resistance values For the following SMUs you can set 0 Q only e SMU that is set to ON in the STBY field e SMU that is set to COMMON in the MODE field You can set resistance values for the following SMUs e Ifthe 41501A B SMU Pulse Generator Expander is not installed or does not have an HPSMU e SMUI e SMU2 e Ifthe 41501A B has an HPSMU e SMUI e SMU5 Agilent 4155B 4156B User
343. weep Measurement Output Voltage Th fold time or Current Td delay tme A N number of steps Stop Value F N i ThtTd Td C Single Sweep lt lt gt 3 o e a Start Value F ooo l e Time 4 Trigger Completion Th hold tine Output Voltage Td delay time or Corrent N number of steps Td Stop N NH Value Double Sweep H Td ps 2N Start F Value i gt Time Trigger Completion uco3002 To set up basic sweep measurement select VAR1 function for desired SMU or VSU on CHANNELS CHANNEL DEFINITION page Parameters Also specify the following parameters for VAR1 on MEASURE SWEEP SETUP page Parameter Description sweep mode Single or double sweep linear log Linear or logarithmic sweep For logarithmic sweep select the number steps in one decade as follows LOG10 10 steps in one decade LOG25 25 steps in one decade LOG50 50 steps in one decade Agilent 4155B 4156B User s Guide Vol 2 Edition 5 2 5 Measurement Mode Sweep Measurement Mode Start stop step compliance power compliance hold time delay time Start value of sweep For logarithmic sweep start must not be zero Allowable range of start depends on output range of sweep source For output range of each measurement channel refer to Chapter 1 Stop value of single sweep or turning back value of double sweep For logarithmic sweep stop must have same polarity as start and must
344. wing rule Data measured at TIME Tlog are stored in memory Tlog Ttarget Tlog Ttarget lt Ttarget Tprev where Tlog Data stored in TIME Actual measurement point Ttarget Target value of TIME The values can plot data on the logarithmic X axis in the same interval completely Tprev Tlog sampling interval Actual measurement point Discard a F n lt Tprev Tlog gt Stored in TIME Sampling T Interval Ttarget lt Tlog Ttarget gt k i A Slit Bs A gt B y V Y gt TME Measurement A Ttarget Tprev B Tlog Ttarget 2 32 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Measurement Mode Sampling Measurement Mode Parameters To set up the logarithmic sampling measurement specify the following parameters on MEASURE SAMPLING SETUP page See Table 2 3 Parameter Description MODE Sampling mode LOG10 LOG25 or LOG50 MODE Number of data in 1 decade LOGI0 10 LOG25 25 LOG50 50 INITIAL INTERVAL The sampling interval during logarithmic sampling Allowable range 560 us to 65 535 s If this value is 560 us to 10 ms number of measurement data may be less than the specified number of data for top 2 decades Then sampling continues to get all samples NO OF SAMPLES Number of data to be stored by end of measurement One of the sampling completion conditions so sampling stops after this point elapses Maximum 11 decades
345. xe z value of 2nd expression for measurement index number i If there are some invalid values in the expressions the invalid values are ignored for the calculation For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each primary sweep To integrate ID by VD INTEG ID VD 7 16 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Syntax Example Syntax Example Data Variable and Analysis Function Built in Function LGT Returns the logarithm base 10 of expression LGT expression If the expression is 0 Overflow is returned with status of Arithmetic error negative value logarithm of absolute value is returned with status of Arithmetic error To return the logarithm of ID LGT ID LOG Returns the logarithm base e of expression LOG expression If the expression is 0 Overflow is returned with status of Arithmetic error negative value logarithm of absolute value is returned with status of Arithmetic error To return the logarithm of ID LOG ID Agilent 4155B 4156B User s Guide Vol 2 Edition 5 7 17 Syntax Example Data Variable and Analysis Function Built in Function MAVG Returns the moving average value of st expression The 2nd expression specifies how many measurement points to use for average MAVG Ist expression 2nd expression This operation is defined as follows The mov
346. ximum or minimum measurement value the marker moves to the maximum or minimum measurement point e cursor e Ifa specified value for cursor is greater or less than maximum or minimum scale value cursor moves to the maximum or minimum axis point e MARKER SKIP softkey Select MARKER SKIP secondary softkey to move the marker to the next measurement curve that was added by VAR2 variable or append measurement CURSOR softkey Select CURSOR secondary softkey to toggle the cursor display The cursor status changes between OFF SHORT and LONG which is shown on the CURSOR softkey e AUTO ANALYSIS softkey Select AUTO ANALYSIS secondary softkey to redisplay the auto analysis that was originally displayed after the measurement was finished 6 50 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 Screen Organization GRAPHILIST Screen Group LINE softkey Select LINE primary softkey to display the secondary softkeys for performing manual analysis that uses lines CURSOR TO MARKER softkey Select CURSOR TO MARKER secondary softkey to move the cursor to the marker position LINE SELECT softkey Selecting this secondary toggles as follows 1 line 1 is selected and can be operated on 2 line 2 is selected and can be operated on NONE no lines are selected The line secondary softkeys disappear You use the following softkeys to operate on each line LINE SELECT setting is not changed by auto analysis function LINE softke
347. y Select LINE secondary softkey to toggle the line mode between OFF and ON You can set line on off for line 1 and line 2 independently OFF Line selected by LINE SELECT softkey disappears ON Line selected by LINE SELECT softkey is displayed If ON is displayed on this softkey and OFF is displayed on GRAD MODE TANGENT MODE and REGRESS MODE softkeys the line mode is normal If you display lines by auto analysis functions you need to set LINE softkey to ON in advance GRAD MODE softkey Select GRAD MODE secondary softkey to change the line mode to gradient mode If present mode is gradient mode ON is displayed on the GRAD MODE softkey For gradient line mode GRAD VALUE secondary softkey is displayed If line mode is gradient mode selecting GRAD MODE softkey changes to normal mode Agilent 4155B 4156B User s Guide Vol 2 Edition 5 6 51 Screen Organization GRAPHI LIST Screen Group e TANGENT MODE softkey Select TANGENT MODE secondary softkey to change the line mode to tangent mode If present mode is tangent mode ON is displayed on the TANGENT MODE softkey For tangent line mode MARKER SKIP secondary softkey is displayed When line mode is tangent mode selecting TANGENT MODE softkey changes to normal mode e REGRESS MODE softkey Select REGRESS MODE secondary softkey to change the line mode to regression mode If present mode is regression mode ON is displayed on the REGRESS MODE softkey For regression line
348. yed at the bottom of GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen This softkey is displayed only for these screens INPUT AID Displays variable names mathematics functions and read out functions and describes the highlighted name or function This softkey is not displayed for GRAPHICS LIST KNOB SWEEP or STRESS FORCE screen You can enter desired variable or function into the selected setup field of a screen by selecting ENTER secondary softkey then pressing Enter front panel key Agilent 4155B 4156B User s Guide Vol 2 Edition 5 8 3 If You Have A Problem When You Make A Measurement When You Make A Measurement This section covers the following basic problems that you may encounter when you making a measurement and the solutions If Measured Value Oscillates when Measuring High Frequency Devices If Measured Value Oscillates when Measuring Negative Resistance If Noise Affects the Measured Values If Measured Voltage has some Error when Forcing a Large Current If Large Current Causes High Temperature Thermal Drift If Measurement Takes More Time than Specified If Measurement Damages the Device under Test If You Get Unexpected Data when Performing Sampling Measurement 8 4 Agilent 4155B 4156B User s Guide Vol 2 Edition 5 If You Have A Problem When You Make A Measurement If Measured Value Oscillates when Measuring High Frequency Devices When measuring parame
349. you select this softkey a pointer highlight appears on a setup parameter of the graph You can move the pointer to the desired parameter by using the left arrow upper arrow right arrow and down arrow MARKER CURSOR keys When the pointer is located in the user comment field the present user comment is displayed in the data entry area which you can edit by using the front panel keys When the pointer is located in the variable name field for X Y1 or Y2 axis allowable variable names are shown in the secondary softkey area You can select secondary softkey to change the variable name for each axis Measurement units change automatically according to variable you select When the pointer is located in the maximum or minimum value field for an axis the present maximum or minimum value is displayed in the data entry area which you can change by using rotary knob arrow keys or numeric keys of the front panel When the pointer is located in the scale value field for an axis LINEAR and LOG secondary softkeys are displayed So you can select linear or logarithmic axis mode When the pointer is located in the variable name field of the data variable display area allowable variable names are shown in the secondary softkey area Measurement units change automatically according to variable you select GRID softkey Select GRID secondary softkey to toggle the grid on or off in the plotting area The present status of the grid is shown on th

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