Spinner Unit LSM-200 User Manual
Contents
1. 205 0 35 Pump purge pause time 0 15 205 2 05 Number of purges 1 999 1 Needle Valve on time 200 200 ms 133 ms Needle Valve off time 200 ms 200 155 Motor direction spinner Positive Negative Positive Needle Valve on time and Needle Valve off time are two parameters to be selected for the dispensing pump SPV 15 22 SAW 12 2005 09 19 Drive parameters How to come here In the Parameter panel touch the Drive button r4 Note These parameters can only be set with the master password accord ing to the values of the drive motor Drive Parameters 1 2 4 Substrat Proportional Speed Gain 459 val ry Integral 1 Speed Gain 235 val Integral 2 Speed Gain To set a value Touch the value field In the pop up numeric key pad enter the desired value and accept the value with the confirm button Possible settings Value minimum maximum typical Proportional Speed Gain 0 30000 460 Integral 1 Speed Gain 0 65535 235 Integral 2 Speed Gain 0 65535 460 Damping Gain 0 65535 0 Speed low pass filter 0 65535 47800 Anti resonance filter 0 65535 1 Possible actions Function Touch button Save changed values with new drive Files P name ep Save changed values of current drive Save Load values of current drive Load WWW Sawatec com 23 SAW 12 2005 09 19 How to come here Output display Set up a process recipe Clear unneeded entries Store current process recipe St2. SAWATCC Spinner Unit LSM 200 User Manual SAWATEC AG SAWATZKI TECHNOLOGY Industriestrasse 416 FL 9491 Ruggell Product description Spinner Unit LSM 200 The Spinner Unit LSM 200 is designed for application in the semiconductor industry in particular to apply photo resist on wafers Main features Chuck for substrates of 1 6 25 150 mm 1 6000 rpm Controller for 10 recipes with 24 steps each Main parts The figure below shows the main parts of the Spinner Unit LSM 200 1 oN A a N www sawatec com 4 Cabinet stainless steel electro polished Spinner bowl with chuck anodized aluminum Dosing arm with protective cover Control panel Main switch inside cabinet Emergency switch Integrated Start Stop buttons work in parallel to touch panel Gauge for chuck vacuum SAW 12 2005 09 19 Connectors and appliances Main switch and fuse Gauges panel www sawatec com Connectors are located at the bottom of the rear cabinet Use the supplied 8mm key to open and close the rear cabinet 1 Compressed air intake Connects to P1 1 at the gauges panel 2 Commpessed air intake connecting to P2 2 and dosing air 3 at the gauges panel 3 Vacuum intake for the chuck vacuum 4 Vacuum intake for dosing pump Connects to 4 at the gauges panel 5 Exhaust 6 Mains intake 230 VAC The main switch and the fuse is located to the bottom of the right part of the fron
3. actions Display while running a process recipe Additional functions during the process Emergency stop www sawatec com Panel Automatic is the standard display during normal opera tion In this mode the process recipe is started either by a han dling device or the integrated Start Stop buttons This panel can be reached from any Stand by panel with the Automatic button Recipe _ Speed Dispensetime CHUCK 3 C lange STOP Last process recipe and last selected chuck parameters of selected process recipe For buttons not explained here see General buttons and controls on page 13 Function Touch button Select a process recipe to be run Touch the field next to the label Recipe Select the chuck Touch the field next to the label Chuck Start selected process Start c Stop current process Stop EO Start manual mode Manual fh The parameters of the process recipe are continually displayed For example the Segment number loops through the recipe steps During the automatic mode the buttons Pre Dispense Arm on off and Dispense on off can be touched to perform the corre sponding action Pushing the Emergency Switch holds the vacuum until the motor has stopped Current state of the machine is kept until the alarm has been cleared Then the machine enters the initial state again 16 SAW 12 2005 09 19 How to come here Enter password Note Wrong pass
4. are is stored on a memory element placed in the housing of the touch panel To exchange the firmware follow these steps 1 Get access to the top of the touch panel housing 2 Open the Philips screw fixing cover lid Philips screv Cover lid 3 Lift the cover lid at the right about 10 mm 1 2 inch and slightly pull the lid to the right 4 Press the small button firmly to eject the firmware module 5 Insert the new firmware mod ule with the labelled side away from the touch panel display press it in firmly Eject button Firmware module 6 Insert the cover lid and fix it with the Philips screw www sawatec com 32 SAW 12 2005 09 19 Cleaning Danger A Always switch off the Spinner Unit and unplug it from mains before cleaning To clean the rings chuck and the bowl the rings and chuck must be removed You do not need any tools for this procedure Fol low these steps Spinner 1 Assure the dosing arm A is at home position 2 Remove the adapter ring B 3 Remove the splash guard ring C i 4 Lift the chuck D vertically with slight back and forth turning movements out of the snap mechanism www sawatec com 33 SAW 12 2005 09 19 5 Remove the collector ring E 6 Clean the parts with proper solvent 7 Clean the bowl F with gentle splashes of solvent Be careful not to spill solvent into the exhaust tubes G and the chuck clamp H 8 After cleaning insert the col l
5. art work with a sample process recipe www sawatec com Leave panel In the Parameters panel touch the Process recipe button fa For the Spinner Unit LSM 200 a process recipe may have 24 steps or segments Time DD is Speed Dispense Di Current segment number See Set up a process recipe on page 30 for an example process recipe For each segment of the process recipe specify time speed and whether dispensing is active or not Time Touch the field and enter a numeric value in seconds Speed Touch the field and enter a numeric value in rpm Dispenser Press button D1 to activate the dispenser during this segment The values of all segments are kept in storage and hence You may freely change between the segments Next segment Touch the up arrow 2 Previous segmentTouch the down arrow Delete obliterate unneeded segments by entering zero use the DEL button in the numeric key pad Touch the Files button This opens the Parameter files panel see Save load parameter files on page 25 After entering a name and description touch the Save button Touch the Files button and select an appropriate process recipe With the Load button you read the parameters Leaving the panel without saving the process recipe parameters keeps them only available for the current processing Leave any panel with the Exit button 24 SAW 12 2005 09 19 A process recipe consists of up to 24 segments of spe
6. be levelled with screws near the bottom rollers Levelling screws To move the spinner unit on the rollers 1 the levelling screws 2 must give clearance e of at least 5mm Standards The Spinner Unit LSM 200 uses only DIN CE certified elements or DIN CE certified materials WWW Sawatec com 6 SAW 12 2005 09 19 Using the touch panel Display area Panel title with current date and time Information are with input and output fields Buttons to select functions This area may contain a scroll bar Buttons for options User types Popup boxes www sawatec com The user interface of the controller comprises a touch panel which both displays information and allows for user input Do not press on the touch panel just touch the surface gently with your finger Although the panel reacts to a pointing finger also in some dis tance it is good practice to really touch the panel to have tactile feedback The area of the display is divided into four sections 21 09 2004 12 35 05 Standby Three levels of actions are defined by passwords User Can run processes both manually and auto matically Setup Can define processes receipts and perform all User actions Master Can set passwords machine parameters and perform all Setup actions Of course all User actions can also be performed Depending on selected functions pop up boxes are displayed which are smaller than the entire screen Th
7. e the last entered figure Reset value to 0 clear the entry Accept the input value The panel is not left 10 SAW 12 2005 09 19 Alphanumeric data entry Status Messages www sawatec com To change the text in a field such as the name of a process Touch the field on the display In the appearing pop up enter the desired text and leave the pop up with the Exit button Entered text Act v ops fele Accept the input A A een enter Remove the last lt entered character During a process the central area of the display shows status messages These do not require any user action If user intervention becomes necessary the alarm button flashes red EY The alarm message is displayed after touching the alarm button 12 Mode VO error 2 Emergency Stop active gr To get the details of the alarm select it and touch the details but ton pop up window appears Alarmtert Ar Feri Com Inc fbl Ge aur Hm aa WE Quit TEASE o 11 SAW 12 2005 09 19 Alarm history Possible actions Filter alarm display www sawatec com The alarm history contains all confirmed and not confirmed alarms It is entered from the Alarm display with the history but ton di Function Touch button Delete the complete history Attention You are not p
8. ector ring 9 When placing the chuck watch the index holes I and bolts J www sawatec com 34 SAW 12 2005 09 19 10 Insert the chuck vertically into its clamp 11 Pess the chuck firmly into the n clamp it must snap in 12 Add the splash guard ring K and the adapter ring L to complete the assembly of the spinner bowl www sawatec com 35 SAW 12 2005 09 19 Protective cover To clean the protective cover disassemble it it into its main parts and clean the plate and the glass 1 Open the screw A witha 5mm hex screw driver 2 Lift the arm B off the plate C and the glass D 3 Clean and dry the plate and the glass 4 For re assembly place the glass D in the center of the plate C and position it under the arm B 5 To re assemble watch the notches E and screw A www sawatec com 36 SAW 12 2005 09 19 6 Tighten the screw A firmly Remove the dosing pump Note Various types of dosing pumps can be integrated with the Spinner Unit LSM 200 The following procedure applies to the SPV 15 dosing pump To remove the dosing Remove the intake A and outlet B tubes from the pump Pop Unscrew the 2 Allen screws from the rear side of panel C Move the pump downwards to untangle it from its support BO Mon Clean the pump according to the procedure in the manual of the pump SVP 15 www sawatec com 37 SAW 12 2005 09 19 Cartridge dispensing system A Removi
9. ed duration dispense values Machine parameters the general settings for all recipes Example process recipe Process diagram not to scale Speed rpm 4000 2000 1200 Segment Dispensing This process recipe has seven segments Segment Segment Process Speedatend Dispense Time time of segment s s rpm 1 1 2 1 2 1200 D1 off 2 3 8 5 0 1200 D1 on 3 0 5 5 5 2800 D1 off 4 1 0 6 5 2800 D1 off 5 0 5 7 0 4000 D1 off 6 1 5 8 5 4000 D1 off 7 0 4 8 9 0 0 D1 off www sawatec com 30 SAW 12 2005 09 19 OSC INS 1 IMPON UO0 29JEMES OV O3IVMVS 212 90 0 Hoa FT pas sdwog 91989 JOJON 0 pei MoJjeA euuM SSS See yd DoT ueeJbD eyuMw e peeu esuedsiq NO uondo Bard 7 7 I qns a St Z VA VA F VA ed NT er 5 By q i EET jud eniq ANS d 6 7 Josueg LI u I UMOIq eniq L M e 2 cran eniq yoeq a SUM YINMS 2005 09 19 SAW 12 31 www sawatec com Maintenance The Spinner Unit does not need special maintenance besides cleaning of spinner dosing system and optional dispensing pump Update firmware The controller firmw
10. ese popup boxes disappear after 5 seconds if no input is pro vided or no button touched 9 SAW 12 2005 09 19 General buttons and controls Numeric data entry www sawatec com The following buttons and controls are used in various dialogues Button Function Exit any display with this button In a menu hierarchy you walk one step up back Alarm is active Touch the button to open the Alarm display Cancel Leave the current dialogue without setting x any values OK Accept the provided changed input values of v the current dialogue x Acknowledge Confirm a message with this button Help Display help about the controller menus This function is currently supported only rudimenta ry Increment upper button or decrement lower but ton the value displayed between the two buttons The increment normally is 1 but not necessarily Scroll bars to the right of lists Touch the lower button to scroll forward in the list Touch the upper button to scroll backward in the list For a quick location you may drag the slider button touch and move the button To change the value in a field such as the turning speed of the spinner Touch the field on the display In the appearing pop up enter the desired value and leave the pop up with the Exit button The maximum and minimum value which may be entered is displayed on top The middle line displays the current entry Remov
11. itch on the device with the main switch Location and appearance of this switch depends on the integration see Main switch and fuse on page 5 The control initialises 3 After about 10 sec the Stand by panel displays Suy et 09 2004 Current date Suy et 12 35 05 and time This Sind can be reached from any process recipe panel with the Exit button For buttons not explained here see General buttons and controls on page 13 Function Touch button Display alarm alarm button Alarm Enter stand by mode Stand by OG Start manual mode Manual 9 Start automatic mode Auto Set parameters system pro Settings cess recipe etc Eus 14 SAW 12 2005 09 19 Operation with the integrated Start Stop buttons Switching off Internal checks Chuck vacuum www sawatec com In Automatic Mode see Automatic mode on page 16 the touch screen buttons Start and Stop can be substituted by the inte grated Start and Stop buttons in front of the spinner unit 1 Leave all menus by pressing the Exit button repeatedly until the Stand by panel appears 2 Switch off the unit with the main switch Location and appearance of the main switch depend on the integration See Main switch and fuse on page 5 The spinner does not start if the chuck vacuum is lower than 0 4 bar This situation is signalled by an alarm message on the touch panel 15 SAW 12 2005 09 19 How to come here Output display Possible
12. ng the syringe from the mount Removing and applying cap www sawatec com The optional cartridge dispensing system comprises the follow ing parts TT S A Glass syringe 50 ml B Cap with pressure tube connector R 1 8 C Rebound suck back valve with LUER lock D and needle con nector E F Syringe holder to be inserted into the dispense arm cup When handling the cartridge take care of the concave moulding G with the glass steel combination Avoid any bending to the syringe and always hold the syringe vertical When removing the syringe from the holder gentle turning and pulling do not hold the syringe at the cap but at the glass body itself When holding the cap you might accidentally remove the cap from the glass body The bulge of the glass syringe has a flat portion A To remove the cap from the syringe turn it gentle until the open portion of the cap B matches the flat portion of the syringe bulge A Then pull the cap from the syringe 38 SAW 12 2005 09 19
13. rompted to confirm the ac tion Filter display of messages a popup window will appear Sort messages a popup window will appear Filter popup Almmfiter ET ot recima lm Active not receipted Waste bin amp Filter Wy AtoZ Je Sort popup Alarmaart Alarmentry FIFO Alarmentry LIFO To select the desired filter touch To sort according to your de the appropriate button sire touch the appropriate but ton 2 SAW 12 2005 09 19 Setting up the Spinner Unit Before operating the Spinner Unit LSM 200 it must be set up as follows Level the Spinner Unit Note Secure location The Spinner Unit must be levelled for proper operation using a level and the levelling screws near the transport rollers at the bottom The levelling screws can eliminate unevenness of about 5mm The Spinner Unit may vibrate during operation and hence must be secured to stay in its location The level screws act as stoppers also Connect piping and mains www sawatec com 1 Connect the exhaust hose to the outlet in the rear 2 Connect the vacuum to the corresponding intake 3 Connect the compressed air to the corresponding intake 4 Supply electric power 13 SAW 12 2005 09 19 Operation Switching on and off Switching on How to come here Possible actions www sawatec com 1 Assure proper function of electricity compressed air and vacuum 2 Sw
14. t cabinet A blown fuse pops out Before pressing the fuse button to activate it again the reason for the short circuit must be removed To switch on turn the main switch to the right Pressure control and gauges are located in the right part of the front cabinet mm m rP air dasing LIIS gg Se ae The control valve is to the left the gauge to the right 1 Compressed air for dosing arm rotation and lifting of the spash guard ring 2 Compressed air for ancil lary use 3 Compressed air for the dos ing pump 4 Vacuum for the dosing pump SAW 12 2005 09 19 hni Operational characteristics Property Nominal value Tolerance specifi cation Chuck size 1 6 25 150 mm Speed range 1 6000 rpm Physical properties and environment Property Nominal value Specification Width depth height 85 75 90 cm Control panel height 30cm above working surface Weight 110 kg Electrical power 230 VAC 50 60Hz Socket for 3 pin plug 15A C12 Control power 24 VDC 5A Vacuum 0 8 bar 0 1 bar Fitting for hose 4 6 mm Compressed air gt 4 bar Fitting for hose 4 6 mm Exhaust 20 50 m h Fitting for hose inner 76 mm When positioning the Spinner Unit LSM 200 sufficient space for the operator must be provided at the front side To access the rear te unit may be moved on its rollers For proper operation the Spinner Unit LSM 200 must
15. word Possible actions www sawatec com In the Stand by panel touch the Setting button 3 Number of cycles run so far with the currently active recipe enter the desired password You confirm with the ENTER button seeSet passwords on page 27 A valid password lasts for 15 minutes After this time it must be re entered to access the parameter functions To block access immediately against unauthorised use enter an invalid password If the password is wrong then all function buttons will be greyed Function Touch button Reset counter of current process Reset Set system parameters see System set System tings page 26 8 Can not be set with the User password button greyed out Set machine parameters see Machine Machine parameters on page 22 In Set process recipe parameters see Process reci Process recipe parameters on page 24 pe Sok Set Drive parameters see Drive func Drive tions spinner on page 19 21 SAW 12 2005 09 19 Machine parameters How to come here In the Parameter panel touch the Machine button dB Note To set a value Possible settings www sawatec com Note These parameters can only be set with the Setup password Touch the value field In the pop up numeric key pad enter the desired value and accept the value with the confirm button vi Value minimum maximum typical Vacuum off delay Os 10s 1 5 Pump purge pulse time 0 15
Download Pdf Manuals
Related Search