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Current Version - Extorr Residual Gas Analyzers

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1. XT300MProbe 3400 00 XTPR100RF XT100 M Probe Refurbish 500 00 XTPR200RF XT200 M Probe Refurbish 550 00 XTPR300RF XT300 M Probe Refurbish 600 00 Extorr Inc 307 Columbia Road New Kensington PA 15068 46 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Command and Control Unit for XT100 XTCCU200M m and Control Unit for 3000 00 XTCCUSOOM C and Control Unit for 3500 00 CONN E Power Supply Board for all XT models XTPSBOODEX Power Supply Board for all XT 300 00 models Exchange Price RF Board for XT 100 XTCCU100 2000 00 XTPSBO000 600 00 XTRFB100 p ha i 600 00 HF Board for XT100 Exchange XTRFB100EX Price 300 00 Extorr Inc 307 Columbia Road New Kensington PA 15068 47 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com HF Board for XT200 850 00 HF Board for XT200 Exchange Prce 300 00 RF Board for XT300 1100 00 Extorr Inc WWW extorr com RF Board for XT200 Exchange XTRFB300EX Price Electrometer Board for XT 100 Electrometer Board for XT 100 Exchange Price Electrometer Board for XT200 _ m XTSHBO001 Electrometer Board for XT200 Exchange Price Electrometer Board for XT300 Electrometer Board for XT200 Exchange Price Power Supply shield board XTSHBO002 HF Shield Board GO GO 00 GO O Go NO NO
2. button on the upper left of the screen will split the screen so that the graph as well as the A EY IE It 2s 5 PE OE ALEE T eres iet easi ee C in fina bi at oe I a i pi AN F Ez Figure 5 Toggle the Graph Icon near the Stop Icon to go from Graph only to Tabs plus Graph operational file folder tabs become visible When in the split mode the graphic button becomes The VacuumPlus window and these two sub windows may be resized to the user s preferences using the usual pull the mouse on the edge of the window technique Extorr Inc 307 Columbia Road New Kensington PA 15068 16 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 2 GUI The Graphical User Interface GUI is shown below Note the Tool Bars the pressure readouts the graphics mode switch the graph scale slider and zero slider and the operational folder tabs The user should take some time moving the mouse from icon to icon to activate pop up labels of their functions El vacuum Plus John s BE ioj xj File Edit View Window Help 81 x AA EA AAA m m Total Pressure 8 411 10 8 torr Pirani Pressure 1 000000 10 4 Q 2 Lea A A e Mass Sweep Operating at me iua f Diagnostics Outputs Mass Table 3 00e 8 Plot Printing Log Y Configuration Communications Scanning parameters Scan speed 2 y sec E Low mass E Z AMU Hi
3. Device reports it is waiting Far rough vacuum Device reports it is waiting Far high vacuum Device reports filament is on Scan restarted 1 Scan restarted 1 Scan restarted 1 Scan restarted 1 Scan restarted 1 Saved configuration C Documents and SettingssLutz Kurzweg LD eskle Saved configuration s s TIserS et efgs Heading configuration fle C Documents and SettingssLutz KurzwegsDe Requested thread to close COM port 10 11 38 XML stream being shut down 10 11 38 XML communication killed Opening COM port Communications thread terminated successtully Create ML pipe 5 pipe stest 10 11 38 XML output stream test successfully created 10 11 38 10 16 57 10 17 33 Sucesstully opened connection COM Scan restarted 1 Saved configuration C Documents and Settings Lutz Kurzweg D Figure 20 The Log To apply the advanced graphics functions mark the check box under Log gt Options Once this box is checked a whole new world of plotting outputs becomes available For instance grid lines graph labels graphics colors and options are available Figure 21 shows some of these features These options may now be applied by right clicking the mouse over the graph Left double clicking the graph will bring up the mass sweep customization dialog directly Data output options including text and graphics formats may also be accessed with a right click on the graph This may be the preferred method of tak
4. Diagnostics Qutpues Degas curent 23 ma Filament Voltage 09 vols Electronics Temperature 236 E Filament Resistance Ohm D76 amei Power supply 2384 volts Sensor Temperature 269 E 6 He Source cunent 1148442 ma Reference 2 45 to 2 55 2 459222 volts E e Source current 0853039 ma Ground ref 02 D001848 volts 3 AF Amp U to 20 0 5 900695 volts Focus FB Focus 19 52 volts E Pirant T emp 1 to 1 0 0 138916 volts Repeller 2 0 Elec En Bz 52 wolts oe ae Firani Corr 1 to 1 0 0 140357 volts Filament Power paa Pirani Press 3 to 2 5 0318079 volts Filament DAC Coarse 2991 iia FB 225 to 2 5 2404485 volts Filament DAC Fine 3224 FB 2 25 t 2 5 2404073 volts Ready Mm 4 Data is Updated after every Scan Entire Outputs Tab Visible Figure 35 Entire Outputs Tab Visible The Mass Sweep Graph may be too small to observe the mass spectrum when the entire Outputs Tab is visible as in Figure 35 To hide the Operational Folder Tabs and make the Mass Sweep Graph fill the entire VacuumPlus window click on the Graphics Split Mode button Switch back to the Split Screen mode to view the Outputs Tab by clicking on the Graphics Split Mode button again E File Edit View QD s B Total Split Mode Button Figure 36 Split Mode Graphics Button Extorr Inc 307 Columbia Road New Kensington PA 15068 53 TELEPHONE 1 724 337 3000 FAX
5. High Mass to 50 and Samples amu to 10 With these settings a complete Mass Sweep will take about 2 seconds El vacuum Plus rm TE uy Sweep Parameter Tab Settings Figure 38 Sweep Parameters Tab Settings for Troubleshooting Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 55 Extorr Inc WWW extorr com E 1 4 Examine Output Tab Parameter Values Click on the Outputs tab to bring it to the front of the folders The parameter values are refreshed at the end of every mass scan which takes about 2 seconds vacuum Plus 1010 EC X lol r1 x WR Ele Edt wew window Help alej xi Mass Table Plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnostics Outputs Degas current 23 ma Filament Voltage 1 84 valts Electronics Temperature 24 E Filament Resistance O67 Dhm Power supply 23 8i valts Sensor Temperature 60 Source current 1 126054 ma Reference 2 45 to 255 2453044 Sources current 0881173 ma Ground ref 02 0 001630 RF Amp D to 20 0 87483315 volts Focust FB Focus 19 58 Pirani Temp 1 to 1 01 41 138738 volts Repeller 2 0 Elec En br 58 Pirani Con 1 to 1 0 0 140201 volts FilamentPower 646 Pirani Press 3to 25 0 318261 volts Filament DAC Coarse 2991 FB 1225t0 25 2404382
6. 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 1 3 Set Parameters for Troubleshooting Select the Operating Parameters tab If necessary change to the Mass Sweep mode by choosing Mass Sweep from the Mode drop down menu and then clicking the Apply button Make sure that Auto Zero is set to Off and Pressure Units are set to Torr on the Operating Parameters tab Change these settings if necessary and then click the Apply button Ex vacuum Plus 1010 xi B Ele Edt view Window Help e Total Pressure 1 560 x10 7 torr Pirani Pressure 1 00 104 torr i Start Degas iu f F biss resp Zein 3 Mass Table Flot Printing Log Configuration Communications sweep parameters Operating parameters Calibration parameters Diagnostics Qutputs Made Mass sweep Focus 20 es Y Electron Energy 70 EV zx x Filament Emission 2 0 nj ma Enable MUI pen altae fo 2 M Electron Multiplier Autezera Off T Pressure units Torr Operating Parameters Tab Settings Figure 37 Operating Parameters Tab Settings for Troubleshooting Extorr Inc 307 Columbia Road New Kensington PA 15068 54 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc www extorr com Select the Sweep Parameters Tab and set Scan Speed to 288 sec Low Mass to 1
7. 188 01 mm a 1 25 31 75 mm 3 23 81 99 mm 5 50 139 65 mm 12 27 311 66 mm 2 75 69 85 mm D NEU Figure 1 XT Dimensions Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 3 2 Specifications 1 to 100 amu 1 to 200 amu 1 to 300 amu Quadrupole Faraday cup FC Electron Multiplier EM Optional Resolution Greater than 0 5 amu 10 peak height per AVS sid 2 3 Adjustable to constant peak width throughout the mass range Sensitivity A Torr 5x10 into Faraday cup Measured with N2 28 amu with 1 amu full peak width 10 height 70 eV electron energy 6 eV on energy and 2 mA electron emission current Minimum detectable partial 10 torr Measured with N2 28 amu with 1 amu full peak pressure width 10 height 70 eV electron energy 6 eV on energy and 1 mA electron emission current Below 10 torr possible with electron multiplier option Operating pressure Atmosphere to UHV Recommendations for ion gauge Is below 10 for the RGA below 10 torr for the multiplier below 10 torr Max operating temp 40 C 300 C without CCU Available in Pirani BA and RGA modes lonizer Open ion source electron impact ionization Dual Filament Thoria coated Iridium with firmware protection Built in 1 to 30 W degas ramp up Field replaceable Electron energy 11 to 150 V program
8. The VacuumPlus window will be saved to the Clipboard Start the Paint program In the Paint program window select Paste from the Edit menu The screen capture of the VacuumPlus window will be pasted into the Paint program From the File menu select the Save As command Type Outputs1 into the File Name box and select JPEG File Interchange Format jpg jpeg from the Save As Type drop down list By default Paint will save the file in the My Pictures Folder To save the file in a different location select a folder from the drop down list under the Save In box Click the Save button to save the screen capture Extorr Inc 307 Columbia Road New Kensington PA 15068 58 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com In the Paint program select New from the File menu Minimize the Paint program window and return to the VacuumPlus window If necessary maximize the VacuumPlus window so that it fills the entire screen Click on the Split Mode button in VacuumPlus to switch to the Mass Sweep Graph mode In the Graph mode the Mass Sweep will fill the entire VacuumPlus window IE vacuum Plus 1010 A NOS ER Operational Folders Hidden Figure 42 Mass Scan Only Display for Screen Capture Adjust the Scale and Zero sliders in the VacuumPlus Mass Sweep window so
9. 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com F 3 Install Electron Multiplier The Electron Multiplier will be installed on the high vacuum side of the Quadrupole Probe assembly It fits in the open space at the base of the quadrupole near the Faraday Detector See the figure below Electron uu i A A A as e n UY Ji Figure 64 Electron Multiplier Location Wearing a clean glove remove the Electron Multiplier from the sealed plastic bag and identify the Top and Bottom Mounting Tabs and the Contact Spring Sockets See the figure below Top Mounting Tab Bottom Contact i Spring a Neun Sockets Figure 65 Electron Multiplier Mounting Tabs Extorr Inc 307 Columbia Road New Kensington PA 15068 87 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Hold the multiplier at an angle with the Bottom Mounting Tab facing in toward the Faraday Cup as shown in Figure 66 Align the two Spring Contacts on the flange with the Sockets on the multiplier and carefully insert the Bottom Mounting Tab into the lower slot on the flange See Figure 66 Compress the Contact Springs but make sure they stay in the sockets on the multiplier Jo Slot Tab Lower Slot Contact Springs In Flange Figure 66 Insert Multiplier Bottom Tab Push the top of the multiplier in toward the Faraday Cup and insert the Top
10. A representative XML file as read in a browser is given below lt xml version 1 0 encoding us ascii gt lt ConfigurationData gt lt CommunicationParameters Port COM2 Baud 115200 PacketFrequency 5 0 PacketTimeout 1 0 Communications Type 1 UserFrequency 5 0 UserTimeout 1 0 NamedPort VacuumPlus gt lt ConfigurationParameters Filename C Documents and Settings Jack Desktop sn132_factory_cal cfg TimeStamp 07d3000b00030013001 1002100260203 Date Time 11 19 2003 5 33 38 PM Caption Serial 0 Model 0 gt lt ScanParameters ScanSpeed 20 LowMass 14 HighMass 19 SamplesPerAMU 8 gt lt OperatingParameters Mode Mass sweep Focus1 35 Focus2 20 ElectronEnergy 68 FilamentEmission 3 0 AutoZero Off ScanMode Sweep Filament 1 PressureUnits Torr gt lt CalibrationParameters LowCalMass 1 LowCalResolution 672 LowCalPosition 0 21 LowCallonEnergy 4 2 HighCalMass 300 HighCalResolution 1895 HighCalPosition 0 50 HighCallonEnergy 5 3 TotalAmpOffset 0 PartialAmpOffset 0 TotallntegratingCap 9 97 PartiallntegratingCap 3 05 RFSettleTime 50 SWSettle Time 10 Pirani1 ATM 2 25670 PiraniZero 0 31365 PiraniAutoRecalibrate 0 PartialSensitivity 8 00e 004 TotalSensitivity 1 00e 000 debug 0 gt lt MassTableParameters Samples 100 gt Mass1 Enabled 1 Mass 2 Description Color Black Dwell 3 5 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mas
11. DAC Coarse The Filament DAC Coarse value gives information about the regulation of the filament It will stay constant from sweep to sweep after the filament has warmed up E 3 21 Filament DAC Fine The Filament DAC Fine value gives information about the regulation of the filament It should vary no more than 5 Counts after the filament has warmed up Extorr Inc 307 Columbia Road New Kensington PA 15068 75 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 4 Vacuum Probe Mounting Considerations to Avoid Electrical Short Circuits For the RGA to work properly the exposed electrical connections on the vacuum side of the Quadrupole Probe Assembly must not come in contact with the Vacuum Chamber walls If any of the wires touch the chamber at any point along their length a short circuit will be created A short circuit will also occur if the metal plates of the Ionizer come in contact with the chamber A vacuum port with a minimum inside diameter of 1 375 inches about 35 mm and clearance inside the chamber to a depth of at least 7 inches about 178 mm is required for the Extorr Quadrupole Probe Most short circuits occur when the Probe is mounted in a long close fitting vacuum nipple or tube Although the Probe will fit through an opening with an inside diameter of just 1 375 inches about 35 mm a long vacuum nipple or port of this size must be made with the end flanges precisely perpen
12. Focus 1 Figure 61 Short Circuit between Repeller Source 1 and Focus 1 To repair the short first gently bend the Repeller Source2 Assembly away from the Source 1 plate If possible bend the Repeller Source 2 Assembly back so that 1ts outside edge 1s parallel to the Quadrupole Frame Next carefully bend the Source 1 plate to remove the short circuit between Source 1 and Focus 1 Bend the Repeller Source2 Assembly and the Source 1 plates until there are gaps between them as shown in the un damaged probe drawing above Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source plate then check for an open circuit between Source and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 83 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the Source 1 plate is bent there may be a short circuit between the Source 1 plate and Focus 1 See the drawing below Gap between Repeller amp Source 1 short Circuit between Source 1 amp Focus 1 Quadrupole Frame gt 4 IK Repeller Source 2 Assy Source 1 Bent and NC Touching Focus 1 Focus 1 Connecting Wires Parallel to Frame and
13. Mounting Tab into the upper slot in the Faraday Cup Assembly The Top Mounting Tab should snap into the upper slot Check the position of the Top Tab to make sure 1t 1s inside the upper slot See Figure 67 Check that the two Contact Springs are still in the sockets on the Multiplier Top Mounting Tab In Upper Slot Faraday Cup A fe Bottom Mounting ss Tab In Lower Slot Contact Springs Figure 67 Insert Multiplier Top Tab Refer to sections 4 2 and 4 3 of the Extorr RGA Users Manual to re install the Quadrupole Probe into your vacuum system Extorr Inc 307 Columbia Road New Kensington PA 15068 88 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com F 4 Install High Voltage Power Supply Module The High Voltage Power Supply Module mounts on the Power Supply PCB Printed Circuit Board inside the CCU Box To install the module first remove the two mounting bolts that attach the CCU to the Vacuum Flange Next remove the six black Phillips head screws that hold the CCU Box cover to the back plate These screws are located around the edge of the back plate on the side with the connector to the probe Remove the box cover to expose the electronics printed circuit board assembly The Power Supply PCB is the top board in the electronics assembly farthest from the back plate See Figure 68 for electronic assembly part locations High Voltage Power Supply High Voltag
14. NIST Extorr Inc 307 Columbia Road New Kensington PA 15068 37 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com maintains a database on the web Some common residual gases first encountered on pump down are given below The numbers are rough percentage intensities with respect to the largest peak for each source Source Water Hydrocarbon Carbon Carbon i i e Figure 25 Table of Common Mass Peaks Note that hydrocarbons tend to produce peaks virtually everywhere but they tend to group in bunches which are separated by the CH fragment a mass of 14 If you look deep enough into every unbaked system you will most likely find hydrocarbon peaks An example of a hydrocarbon group is shown in Figure 26 Extorr Inc 307 Columbia Road New Kensington PA 15068 3g TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Beyond these first pump down peaks the residual gases which are most likely to be found are those probably best known to the user of the vacuum system The user knows the processes carried out in his chamber and the chemical species involved Mass Sweep 1 10e 11 1 00e 11 9 00e 12 8 00e 12 There are other tricks to help in identification of residual gas peaks For instance the intensities of the various isotopic peaks can be used to help identify molecules For instance a molecule containin
15. New Kensington PA 15068 78 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the nipple is 7 inches about 178 mm or more in length the Ionizer Spacer Rings will be completely inside the nipple If the end flanges are not accurately aligned to the tube or if the copper gasket is not evenly compressed the spacer rings will touch the nipple wall and keep the other parts of the probe from shorting Vacuum Nipple Length T inches or greater Vacuum Chamber lonizer Spacer Rings Inside Vacuum Nipple Probe lonizer Completely Inside Vacuum Nipple Probe Mounted in Long Vacuum Nipple Figure 57 Probe Mounted with a Long Vacuum Nipple Extorr Inc 307 Columbia Road New Kensington PA 15068 79 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Avoid using a nipple that is between 5 inches about 127 mm and 7 inches about 178 mm in length A nipple of this length will put the Ionizer Spacer Rings in the connection between the nipple and the chamber in the area of the copper gasket Because the inside diameter of the copper gasket is usually larger than the I D of the nipple the spacer rings may not touch before the connecting wires or the ionizer and a short circuit may occur vacuum Nipple Length between 5 inches and 7 inches Probe eee Fit Bese Vacuum Chamber lonizer Spacer Rings in
16. O O O O1 O O O Ol Ol O O O O O O O O O O O O O O O O O O O O O O O O O Extorr Inc 307 Columbia Road New Kensington PA 15068 48 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 24 Volt 50 Watt power supply Input 100 240 VAC 50 60 Hz Power Cord for PS24VDC North America User must Install plug 5 00 end for other Countries Thumb Screws to hold CCU to 10 00 Analyzer 600 00 100 00 Vacuum Feedthrough with Pirani Gauge 500 00 Mass Filter for XT 100 1000 00 Mass Filter for XT200 1500 00 Mass Filter for X1300 300 00 Mass Filter for XTx00 Exchange 200 00 Frame for XTx00 Analyzers XTFAR Faraday Detector Assembly 200 00 E IS NEN a prices effective as of 3 8 2006 International prices are 10 higher with a 50 minimum increase per invoice Extorr Inc 307 Columbia Road New Kensington PA 15068 49 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix E Troubleshooting and Service E 1 Troubleshooting Before continuing with this section please review the Extorr RGA Quick Start Guide and the FirstTimeR gaStartUp avi video on the Extorr CD that came with your RGA system Both contain step by step instructions for installing and operating your RGA system for the first time The video also demonstrates many key concepts including how to display and resize the VacuumPl
17. RE Reb 1 Total Pressure Pirani Pressure Q Y E 4 iss weep Zea Configuration Communications Sweep parameters Operating parameters Mass Table plot printing Log Calibration parameters Diagnostics Qutputs Degas curent ma Filame Electronics Temperature E Fiementl Powersuppv vs sesati Right Side of Outputs tab soucetamen ma Reerence 2 S not visible Source2 current 4 ma Ground n AF Amp Oto 200 vote Focust F Pirari Temp 1to 1 0 vots Repeler 20 PiraniCon 1to 1 0 vols Filan PiraniPress 3to 25 vots FilamentD 4FB 225t025 vots Flamen FB 225t025 vots Ready ium Z Outputs data is blank until the first Mass Sweep is completed Figure 34 Right Side of Outputs Tab Not Visible Extorr Inc 307 Columbia Road New Kensington PA 15068 52 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com With the entire Outputs tab visible note that some parameter values change slightly at the end of every scan when the display is updated with the latest data APT Plus 1010 j 0 xl Mofile Edit View Window Help laj xl 0 W eas ug F WE Total Pressure 1 908 x107 korr Pirani Pressure 1 00 10 4 torr Q Start Degas E za 7 Scale E Mass Sweep ei jd v Configuration Communications Sweep parameters Mass Table Plot Printing Log BITES Operating parameters Calibration parameters
18. Recheck the alignment of the PCB connector pins before installing the CCU Box cover Attach the CCU Box cover to the back plate with the six black Phillips head screws Insert the CCU to Vacuum Flange mounting bolts into the holes in the CCU box Refer to sections 4 4 through 4 8 of the Extorr RGA Users Manual to re install the CCU box on the Quadrupole Probe and pump down your vacuum system Section 6 7 4 of the user manual describes the operation of the multiplier controls on the Operating Parameters Tab of the Vacuum Plus Software Extorr Inc 307 Columbia Road New Kensington PA 15068 90 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Warranty XT products of Extorr Inc are warranted to be free of defects in material and workmanship for a period of one year from the date of shipment At our option we will repair or replace products which prove to be defective during the warranty period Liability under this warranty is limited to repatr or replacement of the defective items Shipping damage is excluded from the scope of this warranty If this product is returned to Extorr for warranty service Buyer will prepay shipping charges and will pay all duties and taxes for products returned to Extorr Extorr will pay for return of products to Buyer except for products returned to a Buyer from a country other than the United States LIMITATION OF WARRANTY The foregoing warranty does not apply
19. The Focus 1 FB reading shows the feedback voltage of the Focus 1 circuit This reading should be roughly equal to the value of the Focus 1 control on the Operating Parameters tab The factory setting for the Focus 1 control is typically 20 V If Focus 1 is touching the vacuum chamber shorted to Ground this reading will be about 150 V See section 4 3 of the Extorr RGA User s Manual for the Probe Pin Out and instructions for testing for shorts E 3 18 Repeller The Repeller value is the feedback voltage of the Repeller circuit This reading is typically about 68 V which is roughly 2 volts less than the value of the Electron Energy control on the Operating Parameters tab If the Repeller is touching the vacuum chamber shorted to Ground this reading will be about 150 V See section 4 3 of the Extorr RGA User s Manual for the Probe Pin Out and instructions for testing for shorts Extorr Inc 307 Columbia Road New Kensington PA 15068 74 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 3 19 Filament Power The Filament Power display indicates how much of the available power is currently being used by the filament When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 60 The Filament Power will read about 5 when the Filament Activation Switch is set to OFF E 3 20 Filament
20. an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source plate and between Source 1 and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual If a short circuit was measured with the probe installed in the vacuum chamber but it is not found after it is removed the probe is probably touching the inside of the chamber See Section E4 above Extorr Inc 307 Columbia Road New Kensington PA 15068 81 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the probe has damage to the Repeller Source 2 Assembly there may be a short circuit between this assembly and the Source 1 plate A bent Repeller Source 2 Assembly may also short to the chamber wall in a close fitting tube See the drawing below Es Bent and Repeller Source Z Assy Touching Source 1 short Circuit between Repeller amp Source 1 vi Gap Between Source 1 amp Focus 1 Source 1 NS Connecting Wires Parallel to Frame Y and Not Shorting Focus 1 Quadrupole Frame 1 4 Probe lonizer with Damage to Repeller and short Circuit between Repeller and Source 1 Figure 60 Short Circuit between Repeller and Source 1 Gently bend the Repeller Source2 Assembly aw
21. and demand the best cleanliness you can send the analyzer to the factory for refurbishment but many customers have had good success with cleaning in the field The rods are best cleaned with an abrasive method such as 1200 grit abrasive paper polishing followed by an Alconox ultrasonic bath and several rinses with distilled water The Extorr probe was designed to allow easy cleaning and ionizer filament replacement The only tool required is an Allen wrench to loosen the set screws that hold the ionizer to the probe This tool is supplied with all new ionizers The following steps will usually restore the XT system to proper operation Extorr Inc 307 Columbia Road New Kensington PA 15068 32 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Placing the analyzer onto the CCU without the thumbscrews makes a good stand for the repair Loosen the top set screws on the 2 barrel connectors that connect the filament wires Remove and discard the old filament assembly If you are only replacing the filament skip to step 7 Loosen the bottom set screws on each barrel connector and slide them down the wires towards the feedthrough Remove the ionizer by pulling upward a gentle twisting action may be necessary Using a hook made from some 062 diameter wire pull the mass filter Extorr Inc 307 Columbia Road New Kensington PA 15068 33 TELEPHONE 1 724 337 3000 FAX 1 724 337
22. connection between Nipple and Chamber Probe lonizer Partially Inside Vacuum Chamber Avoid Mounting Probe with spacer Rings in Connection Between Flanges Figure 58 Probe Mounted with Spacer Rings inside Connection between Flanges Extorr Inc 307 Columbia Road New Kensington PA 15068 80 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 5 Finding Electrical Short Circuits Caused by Damage to the Probe Short circuits may occur if the probe is damaged during installation The ionizer elements or the connecting wires may bend if they touch the sides of the chamber the opposite wall of the chamber or another obstruction inside the vacuum system If you think you may have damaged the probe first check for short circuits as described in Section 4 3 of the User s Manual If a short is found remove the probe from your chamber and inspect the Ionizer and the connecting wires See the drawings that follow lonizer Outside Edge Parallel to Quadrupole 25 Frame Outside Edge i Repeller Source 2 Assy small Gap between Repeller amp Source 1 Gap Between w Source 1 amp Focus 1 lonizer Spacer lt lt Rings Connecting Wires Parallel to Frame Y and Not Shorting to Frame or to Each Other Quadrupole Frame gt 4 Probe lonizer without Damage or Short Circuits Figure 59 Ionizer without Damage Use
23. es Unit Model 100 The intensity of the peaks may be changed by sm fe changing the ion energy Greater sensitivity may be gained by increasing the ion energy Unfortunately the quality of the peak shapes tend to suffer when the ion energy becomes too high Again the ion energy is interpolated between and extrapolated beyond the two mass cal points Total Integrating Cap 3 57 pf Partial Integrating Cap 3 09 pf Total Sensitivity 20 AADAT Fartial Sensitivity Bes Astor Diagnostics Pirani Calibration 14TmM 2 1259 zi Recalibrate 03325315 Zero la Recalibrate Figure 15 Calibration Parameters Tab A description of this tuning procedure 1s given in Appendix C of the manual 6 8 2 Unit Information The information under Unit is the model and serial number of the user s CCU These are useful when using multiple CCUs or when model or serial number specific information is requested 6 8 3 Pirani Calibration The Pirani probe located in the base of the Extorr probe is factory calibrated After a period of use the user may perform a two point calibration The first is done by pushing the ATM Recalibrate when the unit is at atmospheric pressure The other is done by pushing the Zero Recalibrate and then when the probe is at a pressure below 10 torr Remember to press Apply after each of these recalibrations 6 8 4 Total and Partial Integrating Caps The total and partial integra
24. factors are usually normalized to the transmission at mass 28 Mass 20 would therefore have a current 28 20 times more than mass 28 if the same number of ions is produced per unit time in the ionizer So the 2 1X10 torr should be multiplied by 20 28 to get 1 5x10 torr If exact partial pressures are required it is still best to calibrate by applying pure gases to your vacuum system A few cracking patterns for some common molecules are given in Figure 29 w s a pm o Ji s o w as m m w ss 5 o pls fos ej dele j8j1a Figure 29 Cracking Patterns for Some Common Molecules EN p20 a7 fos far s B m fie jo MN NN Extorr Inc 307 Columbia Road New Kensington PA 15068 42 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix C Manual Tuning of an RGA The Extorr XT Residual Gas Analyzer RGA comes with 1ts default tune This was set at the factory for a nominal unit mass resolution at the proper mass positions throughout the mass range This default tune may always be assumed to be either fairly exact or a good starting point for a user calibration The user can over ride this tune by changing the default tuning parameters He may wish to do this to give special measurement capabilities to certain spectral regions He may for instance want to look at a particular weak spectral region with enhanced sensitivity o
25. far below where glow discharge is possible such as 10 torr or below Use the purple plastic screwdriver supplied for tuning Remove the two plastic plugs from the sides of the CCU Start the software and go to Operating Parameters then Mode and select Calibrate You will then be presented by a horizontal line on the graph Using the plastic screw driver slightly turn the tuning slug in one direction and note if the graph goes up or down If it goes up turn in the other direction to make the line go down After the line has gone down do the same thing with the tuning slug on the other side of the CCU Go back and forth between slugs until the line is at its lowest position and all other turning just makes the line go up The system is now RF tuned Replace the plugs in the box You must do this when placing a CCU on a new probe Even if CCU and probe remain as a set you may wish to repeat this anytime the probe is moved or if the unit is not getting up to the full mass range Extorr Inc 307 Columbia Road New Kensington PA 15068 12 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 4 8 Start Pump Down After software installation you may start the VacuumPlus exe program The unit immediately starts making Pirani gauge measurements and knows not to supply power to elements which may be harmed by the power application You may now start your pump down procedure If VacuumPlus exe 1s
26. of data C Monochrome Symbols r Display Font Size Graph C Table C Both C Large Medium C Small DK Cancel Apply Help Export Maximize Figure 21 Customized Graphs and the Customization Dialog Box 6 14 Diagnostics Diagnostics is a locked function which may be used by the factory for trouble shooting as required For the curious this may be unlocked by placing extorr into the password in the Calibration Parameters Diagnostics field 6 15 XML Use XML stands for eXtensible Markup Language Like the famous HTML of internet fame XML is a subset of SGML In particular XML is the text markup language for interchange of structured data XML has as its goal to enable generic SGML to be served received and processed on the Web in the way that is now possible with HTML XML has been designed for ease of implementation and for interoperability with both SGML and HTML XML is a trademark of the World Wide Web Consortium Extorr Inc 307 Columbia Road New Kensington PA 15068 28 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com VacuumPlus produces XML files on command as well as supporting streaming XML data to an XML port of the user s choosing XML data files may be saved from the Save XML and Save XML as selections from the File drop down menu Configurations may be saved edited in a text file XML format renamed and opened at a later time
27. quadrupole gas analyzer uses precision mechanics and electronics to measure ion currents due to the partial pressures of the residual gases in the vacuum chamber The Pirani starts operation at atmospheric pressure the ion gauge at a nominal 10 torr and the quadrupole starts at a nominal 10 torr pressure The ion gauge will measure total pressures to its x ray limit of 2x10 torr and the quadrupole can measure partial pressures well below 10 torr There are three XT models The XT100 operates from 1 to 100 amu The XT200 operates from 1 to 200 amu The XT300 operates from 1 to 300 amu With the inclusion of an electron multiplier detection option an M is attached to each of these model numbers i e XT100M XT200M and XT300M All of the pressure gauging is done under the control of the communications and control unit CCU which is powered by the included 24 volt 2 5 amp supply The CCU is the interface between what is happening in the vacuum probe and the VacuumPlus Software which runs on your Windows computer Extorr Inc 307 Columbia Road New Kensington PA 15068 a TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 3 Dimensions and Specifications 3 1 Dimensions The dimensions of the probe and the CCU box are given below in both metric and American Standard units The mounting flange is a metal sealed DN 40 CF 2 Inch CF 0 60 15 24 mm i 6 79 172 52 mm li 7 40
28. ref are voltage references which test the operation of the analog to digital converter and should be within the ranges given The Focus 1 reading should be about equal to the value entered into the focus box under the Operating parameters tab The Repeller reading should be about equal to the value entered into the Electron Energy box under the Operating parameters tab less 2 volts If these readings are not as described a short circuit may be present in the probe Filament Power indicates how much of the available filament power is currently used Filament DAC Coarse and Fine give information about the regulation of the filament 6 11 Plot Tab The Plot tab allows the user to change the graph output A linear intensity pressure output is the default graph but a logarithmic output is available by checking the logarithmic Y axis box The color of the graph window may also be changed here Drop down menus give a choice of background color plot color for the analog mass sweep and the scan position line 6 12 Print Tab The Printing tab allows for the selection of what will be printed when Print under File is invoked Instead of printing light on dark the print output may invert the colors to give dark on light The configuration file name and a description given in the configuration file may be added The Pirani and Ion gauge readings may also be included Plot Plot Background Color L Sky blue Plot Lin
29. running the output screen shows the Pirani reading near the top of the window just right of the ion gauge output The Pirani reading is not displayed until the unit has finished one complete sweep When the pressure falls below 3x10 torr the ion gauge will start to operate and finally when the pressure falls below 3x10 torr the quadrupole will begin to operate The factory default VacuumPlus output screen is a mass sweep between masses and maximum amu Although pressure readings are made by the system for instrument control pressure outputs on the screen will not be displayed until the end of the first sweep And will update after every sweep The user may change configurations at any time A new configuration file may be saved at any time The last saved configuration becomes the new default configuration The unit will always come up to the configuration it was last using upon shut down Upon exiting the program the user is prompted to save the current configuration in a file If the user does not want to save this configuration he must answer no twice Extorr Inc 307 Columbia Road New Kensington PA 15068 13 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 5 Operation 5 1 General theory of Operation Vacuum measurement requires that some device be it mechanical thermal or electrical interact with the gases of the vacuum system to produce a voltage or a current wh
30. set between 11 and 150 volts However not all combinations of emission current and electron energy may be set at once At lower voltages higher emission currents are not available and the software prompts the user when such a combination will not work It should be noted that the Electron Energy is just the potential difference placed between filament and source grid The true electron kinetic energy must be corrected for the contact potential difference between the thoria coated filament and the platinum coated source grid This contact potential difference may place the electron kinetic energy as low as 3 7 eV below the Electron Energy There must also be a correction for the voltage drop across the filament 6 7 4 Electron Multiplier If the XT model number ends in an M The unit was shipped with the electron multiplier option This option may be implemented by checking the multiplier Enable box under the Operating parameters tab The multiplier will then turn on if the pressure is sufficiently low The multiplier voltage may also be set here The gain of the multiplier depends on the voltage placed on the multiplier The gain is determined by measuring the height of a relatively Operating parameters small peak first when the multiplier is turned off and then when the multiplier is turned on The gain is given by dividing the peak height measured using the multiplier by the peak height as Made Mass Snes measured us
31. that all the pins on both of the connectors are mated correctly Extorr Inc 307 Columbia Road New Kensington PA 15068 89 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Connect the female socket on the High Voltage Output Wire from the Module to the male terminal pin at TE1 on the bottom PCB in the electronics assembly the RF Board The male pin at TE is a bent wire soldered to the bottom PCB and is located near one of the 1 2 inch diameter spacers It is about 3 4 inch in toward the center from the edge of the bottom PCB Gently push the High Voltage Wire socket onto the pin until it stops Use the CCU to Vacuum Flange mounting bolts to align the PCBs in the electronics assembly Insert the two bolts from the Power Supply Board side of the assembly into the holes in the edge of the copper box above the Power Supply Board It may be necessary to slightly move the individual PCBs to get the bolts completely through the spacers on all boards of the electronics assembly Attach the CCU Box back plate to the electronics assembly Push the two Phillips head 6 32 X 2 inch long screws through the holes in the back plate and the PCBs and tighten Again it may be necessary to slightly move the individual PCBs to get the screws completely through the spacers on all boards of the electronics assembly Remove the CCU to Vacuum Flange mounting bolts from the electronics and back plate assembly
32. that any Ion Peaks that are present are clearly visible Press the Print Screen key on your keyboard to save the VacuumPlus window to the Clipboard Back in the Paint program window select Paste from the Edit menu The screen capture of the VacuumPlus window will be pasted into the Paint program From the File menu select the Save As command Type Sweepl into the File Name box and select JPEG File Interchange Format pg jpeg from the Save As Type drop down list By default Paint will save the file in the My Pictures Folder To save the file in a different location select a folder from the drop down list under the Save In box Click the Save button to save the screen capture Extorr Inc 307 Columbia Road New Kensington PA 15068 59 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 2 Screen Captures showing Common Problems This section contains Screen Captures of the Outputs Tab and Mass Sweep Graph during normal operation and with common problems present E 2 1 Normal M LIE vacuum P Plus Cie EX vacuum Plus 1010 Figure 43 Outputs Tab and Mass Scan Graph Normal Operation Extorr Inc 307 Columbia Road New Kensington PA 15068 60 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 2 2 Filaments Open Burned Out TE
33. the CCU as described in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual An XT300 or XT300M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 300 produces a RF Amp reading of about 20V The reading is updated at the end of every scan If the RF Amp reading is greater than about 22 5V try tuning the CCU as described in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 73 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 3 12 Pirani Temp The Pirani Temp is proportional to the Sensor temperature near the Pirani wire During normal operation the Pirani Temp reading will be in the range of 0 1 V to 1 0 V E 3 13 Pirani Corr The Pirani Corr is proportional to the Pirani wire temperature During normal operation the Pirani Corr reading will be in the range of 0 1 V to 1 0 V E 3 14 Pirani Press The Pirani Press is proportional to Pressure During normal operation the Pirani Press reading will be in the range of 0 3 V to 2 5 V E 3 15 FB During normal operation the FB reading will be in the range of 2 25 V to 2 5 V when the Quadrupole DC Power Supply is operating correctly E 3 16 FB During normal operation the FB reading will be in the range of 2 25 V to 2 5 V when the Quadrupole DC Power Supply is operating correctly E 3 17 Focus 1 FB
34. the ion gauge reads continually protecting the system from over pressure The ion gauge pressure is reported to the host computer for total pressure display update at the end of each mass scan 5 4 Filament Activation Switch Y y The filaments which produce electrons for both the ion gauge and the quadrupole analyzer ion source are turned off and on by manually activating the switch icon or automatically under computer control If the pressure is too high for ion gauge operation when the switch is turned on the bulb is displayed as red If the ion gauge may be used but not the quadrupole the bulb will be orange Finally the bulb will become yellow when the quadrupole is operational When the switch is turned off the bulb will appear gray If the configuration file in use has the filament on the filament turn on sequence is automatically activated 5 5 Reading Mass Peak Heights Operating voltages are applied to the quadrupole mass analyzer at the proper ion gauge pressure After the filaments are turned on the partial pressure readouts are available The factory default partial pressure operation is an analog scan from mass to the unit s highest mass In the default mode only one scan is stored in an XML file at a time The streaming XML feature allows for real time data transfer to other programs supporting streaming XML Depending on the operational mode a number of different XML data files may be produced If it 1s not already ob
35. to the defects resulting from unauthorized modification or misuse or operation outside the specifications of the product THE WARRANTY SET FORTH ABOVE IS EXCLUSIVE AND NO OTHER WARRANTY WHETHER WRITTEN OR ORAL IS EXPRESSED OR IMPLIED Extorr DISCLAIMS ANY IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE EXCLUSIVE REMEDIES The remedies provided herein are Buyer s sole and exclusive remedies In no event will Extorr be liable for direct indirect special incidental or consequential damages including loss of profits whether based on contract tort or any other legal theory Extorr Inc 307 Columbia Road New Kensington PA 15068 91 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com
36. two points or extrapolated beyond these points The Low Cal Position allows for an offset so that a known low mass peak may be placed in the correct mass scale position Similarly the high Cal Position can be used to place a known mass peak at its correct position The mass scale will then be calibrated Again to actually make the changes the Apply button must be pushed Extorr Inc 307 Columbia Road New Kensington PA 15068 22 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Residual gas analyzers are usually run with unit resolution This means that throughout the system s mass range the peaks are set so that the valley between two equal height adjacent peaks 1s about 10 of the peak heights Setting a low cal resolution at the low mass position and a high cal resolution at the high mass position allows the user to adjust for this unit mE Lu resolution The user may explore the a resolution function by changing the values and observing the width and sensitivity of the resulting peaks Remember to Apply changes The user may choose to save the resulting configuration or not but he can always return to any other saved configuration by reopening it Low Cal High Cal Mass E amu ion 650 El Resolution eal 50 Es lon Energy El tion 0 27 Position ir Mass 100 E amu eO Resolution ls E mE lon Energy El tion 0 35 m Position
37. volts Filament DAC Fine 2405 FB 2251925 2403871 volts Outputs Tab Visible Figure 39 Outputs Tab Parameter Values Compare the Outputs tab parameter values and the Mass Sweep Graph from your system to the Screen Captures shown in section E 2 If the Outputs Tab parameter values from your system agree with the Normal Operation Screen Captures but the sum of the partial pressures is low compared to the total pressure your ionizer may be contaminated A contaminated ionizer may cause a difference of an order of magnitude or more between the total pressure and the sum of the partial pressures If the contamination is not severe the sensitivity may be restored by degassing the ionizer To start degas click on the Start Degas button that is located to the right of the filament switch at the top center of the graphics interface See section 6 17 of the User s Manual Let the unit complete the full ten minute automatic Degas cycle If the partial pressure sensitivity remains low after Degassing the Ionizer will probably need to be replaced Follow the instructions in section E 1 5 and create Screen Captures of the Mass Scan Graph and the Outputs Tab and then contact the factory for additional help Extorr Inc 307 Columbia Road New Kensington PA 15068 56 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the Outputs Tab parameter values from your system indica
38. 0 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com AZ d aL A Fe Degas curent E a 4 Degas Current 1 mA should be about 2 4 mA y Source 1 Current 1 7 mA should be about 1 0 mA 44 2 Source 2 Current 0 2 mA should be about 1 0 mA aw A Focus 1 FB 7 OV T should be about 20V Total Pressure 1 435x10 8 torr jm r No Mass Spectrum 1 shown on Mass Sweep Graph Figure 53 Outputs Tab and Mass Scan Graph Focus 1 Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 70 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 3 Outputs Tab Parameter Definitions The Outputs tab displays 21 different parameters from various sections of the CCU box These readings are provided to aid in the troubleshooting of your RGA system Section E 2 contains actual Screen Captures of the Outputs Tab readings and Mass Sweep Graph Captures during normal operation and with common problems are included NOTE The Reference and Ground Ref parameters must be checked before any of the other readings are considered These two parameters test the accuracy of the system Analog to Digital converter and must be correct or ALL the other readings on the Outputs tab will be wrong E 3 1 Reference The Reference reading shows the result of the CCU s internal Analog to Digi
39. 3 Figure 3 Outside View of Flange Extorr Inc 307 Columbia Road New Kensington PA 15068 10 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 4 3 Mount the Probe Now carefully attach the probe to your system making sure you do not bend or twist the probe as it is inserted into the port Use the new copper gasket shipped with the unit Take care in tightening the flange so that the gasket is evenly compressed The probe is perpendicularly mounted on its flange with great precision but an unevenly compressed gasket could cause improper alignment within a long inlet tube As acheck on probe integrity after being mounted use an Ohm meter to check for shorts and filament breakage Figure 4 shows the feed through connections on the Extorr flange 6 Rods l 7 RTD 5 Filament 15 Faraday Multiplier Out Z d dh a N 4 Repeller 3 Sourcel L T 10 Source2 2 Mult HV 4 13 14 Pirani 11 Focus WIN 1 Mult LV 12 BA Out Figure 4 Flange Pin outs Use an Ohm meter to check the probe for shorts by measuring the resistance to ground of all pins They should all have very high resistance Mega ohms to ground except for the RTD pin7 which should be on the order of 1000 ohms to ground and the daisy chained Pirani Pins 13 amp 14 which should be on the order of 5 ohms to ground The resistance between filament leads should be low perhaps half an ohm If this checks o
40. 8322 EMAIL support extorr com Extorr Inc WWW extorr com Pull the mass filter out of the frame Clean the surfaces of the rods with 1200 grit alumina abrasive paper until they are bright Using a waterproof paper with water works well Be careful not to bend the electrical contacts Then clean in Alconox detergent using an ultrasonic cleaner at 40 kHz Rinse well with distilled water in the ultrasonic bath several times then dry at 75 degrees C Next insert the mass filter into the probe being careful to line up the 2 wires with the two holes in the end of the mass filter that make the electrical contact Using a small pair of needle nose pliers or a strong pair of tweezers remove the 4 tubular spring connectors from the old ionizer and push them onto the respective Slide the 4 tubular spring pins on the new ionizer Push the connectors completely up onto new ionizer down onto the probe the ionizer wires carefully engaging the center pin and BA shield spring until the focus plate is flush with the top of the quadrupole Extorr Inc 307 Columbia Road New Kensington PA 15068 34 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Slide the four 4 tubular spring connectors down to engage the respective feedthrough wires Insert the new filament assembly and while holding down on the filament slide the barrel connectors into place and tig
41. 85 Piani Press 3t0 25 0317833 we FB 2251025 240120 vots Partial Pressure Sensitivity _ is Very Low Observed lon de Intensities are only about 10 of Total Pressure Reading Figure 51 Outputs Tab and Mass Scan Graph Repeller Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 68 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 2 10 Repeller Source 1 and Focus 1 Shorted Together ETSI Pius Hon EE ME repe k 4 Total Pressure is Negative because Filament is OFF 2 Degas Current 0 mA should be about 2 4 mA 3 Filament Voltage 0 5V should be about 1 6V k Filament Resistance 1 7Q should be about0 5Q Source 1 Current Source 2 3 Current Source 1 should be about 10 gt Source 2 Source 2 Current Source 1 6 Current Source 2 should be about 10 Source 1 k7 Focus 1 FB OV should be about 20V FB ezi 25 LM b Filament DAC Fihe 8 Repeller OV FB 2251025 E 2398905 volts should be about 68V 9 Filament Power 5 because Filament is OFF E Plus 1010 dk 1 Total Pressure is Negative because Filament is OFF No Mass Spectrum de 2 shown on Mass Sweep Graph NM Z4 Figure 52 Outputs Tab and Mass Scan Graph Repeller Source 1 and Focus 1 Shorted Extorr Inc 307 Columbia Road New Kensington PA 15068 69 TELEPHONE 1 724 337 300
42. As the user changes his system settings a red check mark appears on the folder tab These changes only take place after the Apply button at the bottom of the folders is clicked When clicked the new settings are applied and the red check is cleared We will now discuss the contents of each folder tab 6 4 Communications Tab If the user has already placed the system on his computer and previously run and saved his configuration the system will come up in this last saved configuration If this is the first time the system is run go to the communications folder and choose the com port to which the Extorr is connected For ease of selection all com ports real and virtual will be shown in a drop down list In the same way the baud rate may be selected The user may also give a data port name for use when taking streaming XML data to an application To invoke the parameters chosen and to remove the red check mark on the folder click the Apply button Communications Patt comz Speed 115200 Communications Setup Communications dast Mm m eta ine Packet Timeout 0 Packet Frequency 2 0 a ML Setup Serice Fort resti Apply Figure 8 The Communications Tab A serial server and the appropriate software will allow the system to operate on a Local Area Network LAN or a Wide Area Network WAN Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FA
43. Click on the Outputs tab to bring it to the front of the folders If power was just applied to the CCU the Outputs tab parameter data will be blank until the configuration file is downloaded and the first Mass Sweep 1s completed If your unit has been running in the Mass Sweep Mode for some time data will be displayed for each parameter on the Outputs tab Extorr Inc 307 Columbia Road New Kensington PA 15068 5 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the parameter values on the right side of the Outputs tab are hidden as shown below the Operational Folders section of the VacuumPlus window will have to be resized This is done by slowly moving the mouse cursor over the Left Edge of the Operational Folder Tabs until 1t changes shape from the normal Arrow into the double ended Resize cursor When the Resize cursor 1s shown left click and drag the left edge of the Folder Tabs until both columns of the parameter data are visible in the Outputs tab The FirstTimeRgaStartUp avi video in the Instruction Videos Folder on the Extorr CD shows how to resize the Operational Tabs This information is in the Operating Your Extorr RGA for the First Time section which is the last of the four parts in this video This section starts about 10 minutes into the 15 minute video Elvacuum Plus 1010 ddl Pie Edit View Window Help 18 x DH i SB eo
44. Current 0 mA should be about 1 0 mA FB 0 49V should be about 2 40V Focus 1 FB 152V should be about 20V Repeller 152V should be about 68V 1 0 Filament Power 5 because Filament is OFF 9 7 Filament Switch Turns OFF Automatically after de 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum shown on Mass Sweep Graph Figure 46 Outputs Tab and Mass Scan Graph Source 2 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 63 Extorr Inc WWW extorr com E 2 5 Focus 1 Shorted to Vacuum Chamber Ground Madii LEA Ini xi E 4 4 Focus 1FB 156V should be about 20V Partial Pressure Sensitivity is Very Low Observed lon 1 Intensities are only about 10 of the Total Pressure Reading Figure 47 Outputs Tab and Mass Scan Graph Focus 1 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 64 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 2 6 Repeller Shorted to Vacuum Chamber Ground Bivas uum 1 Plus Ho AFA Amp p ti 20 00 Al Pirani Corr 1 to 1 0 8225025 2 FB 2251025 sini xi laxi Filament Switch Turns OFF Automatically after de 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem 2
45. Degas Current 0 4 mA should be about 2 4 mA 3 Filament Voltage 0 10V should be about 1 6V de 4 Filament Resistance 0 330 because Filament is OFF DU ee 5 Source 1 Current 0 mA Focust FB Focus should be about 1 0 mA pee te ee Eng 6 Source 2 Current 0 mA Filament Power should be about 1 0 mA 7 Repeller 152V should be about 68V m 8 Filament Power 5 because Filament is OFF Filament Switch Turns OFF Automatically after de 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum 2 shown on Mass Sweep Graph Figure 48 Outputs Tab and Mass Scan Graph Repeller Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 65 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com o E 2 7 Filaments Shorted to Vacuum Chamber Ground TERR Plus 1010 E PEL E E ioj xi 4 Degas Current 0 mA al should be about 2 4 mA a Repeller 119V should be about 68V Ex vacuum Plus 1010 g gt Partial Pressure Sensitivity k 1 is somewhat lower than in Normal Operation Figure 49 Outputs Tab and Mass Scan Graph Filaments Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 66 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc E 2 8 Filaments Shorted to Source 1 LEX vacuum Plus 1010 E D
46. E Extorr Inc 307 Columbia Road New Kensington PA 15068 30 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 16 Use with Multiple XT Systems The VacuumPlus software allows for the multiplexing of all XT systems run by the host computer Each unit must be run from an independent com port but as many units as com ports available may be run by a single host computer All that 1s required is to open a second third etc file using the File drop down menu For each case designate the port and cfg file for the unit on that port The VacuumPlus window can then display embedded windows for each system being run The various display modes may be selected from those found in Window on the menu bar A ale x File Edit View Window Help GOs Se 6 coy ASE NEUES d g FA l Total Pressure 9 157X10 torr Pirani Pressure 1 317704x103 Q V Total Pressure 6 497 x10 8 torr Pirani Pressure 1 000000x10 Q ul a Mass Sweep Mass Table Sweep parameter mm mm Operating parame Noo Mass Operating me lol x MESES Calibration parame Calibration parame Diagnostics Diagnostics Outputs Outputs Mass Table E Mass Table Printing Printing Total Pressure 1 364x10 7 torr Pirani Pressure 1 000000x10 4 Q T a Mass Table ero Mass Sweep ero Sweep parameter Sweep parameter Operating parame Calibration parame T Diagnostics Diagnostics i Outputs Mass 16 Mass Ta
47. EAdOU Li onDIpa rene DID nien nnt d 14 35 9 Ton Gauge R adouL otitis cias 15 5 4 Filament Activation WII ic EX a uU IS E SUR ARR a POP aaa 15 5 9 Readme Mass Peak Heleghls 5 tee er PESE eee ae Enn ea PEU En CER FEX EE PE eV ARAU caen Vide 15 6 Y Pe DI I ANDER DI ew Ea 16 MM LATINOS E 16 02 UL 17 Mm Operational Seti 17 6 4 Communications Tab ici ces tesdicsvesecascusanscuswnassacesteadicavivest 18 0 3 CONMSULACION LD AS 19 6 6 Sca nin Parameters Val ssscescccctccs sesscaczcesesseccevsesteccisccvesevecsesdcesececcansestaccseecuesesesexsatencencestes 19 Extorr Inc 307 Columbia Road New Kensington PA 15068 2 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 67 Operating Parameters TaD coirce aae E aA 20 A E E e E rar tere heen Tern 20 0 72 TOC UNS A e MCI AM M LA a M ba M eL 20 67 3 lection Enero yand Emission CUT i s A E 21 0 14 Electron MPa A o 21 A A ed E a M Ia I ED MM MM M A LE ME 2 6 70 Pressure Umit uie ii iaa 22 6 5 Calibration Parameters Pa caninas 22 00 L Low Calan H SN Gc MP 22 626 2 UMEONA O TOO o PO E OO A 23 o o Brant C ls seo eto iius oet OC E O o Puteo dI T Saco e MUS DIS tes 23 004 Totaband Partial te stato C ApS tana a ana 23 0 55 Total and Partial SeS IY oerein ean tedio toast eire A ina 23 00 DIA NOSE RT TS re 24 0 9 Mass Table Li AA 24 GST Mass Table Set
48. Em hes Source 2 Current 0 mA Fi 5273 CP of J ocus1 ar ad iene 6 should be about 1 0 mA Pirani Com 1 to 1 0 40140280 v olts Filament Power 1 52 x 0 7 MUERE pu Focus 1 FB 152V should be about 20V 9 Repeller 152V should be about 68V Filament Power 5 1 0 because Filamentis OFF Pirani Press 310 25 vols Filament DAC Coarse 2981 8 225t025 2407660 vots FlamentDACFine 2087 8 def rocoeos 0494140 vots Filament Switch Turns OFF Automatically after de 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum k 2 shown on Mass Sweep Graph Figure 45 Outputs Tab and Mass Scan Graph Source 1 Shorted to Ground Extorr Inc 307 Columbia Road New Kensington PA 15068 62 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc E 2 4 Source 2 Shorted to Vacuum Chamber Ground EEdvacuum P Plus BEA o x 3 Ground ref 02 4011288 volts Facus FB Focus Re gal Elec Eni y Er i ps de eeso 0494140 vots 3 4 6 x8 9 2 WWW extorr com Filament Switch Turns OFF Automatically after 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem Degas Current 0 mA should be about 2 4 mA Filament Voltage 0 10V should be about 1 6V 2 Filament Resistance 0 33 Q because Filament is OFF Source 1 Current 0 mA should be about 1 0 mA Source 2
49. Extorr Inc www extorr com Instruction Manual Extorr XT Series RGA Models XT100 M XT200 M XT300 M Rev 090629 Copyright 2009 by Extorr Inc Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Table of Contents 1 Safety TMI OPM Atl OM in aor AA ev E eee aee dv e a aa Ua Veo R Ten PER EN Ee a EROR 6 Di OVOEVIOW ene natae tne une d TI ect 7 A e n 7 3 Dimensions and Specifications ccsccssecccscsssesconssescccossseesssscsessooscovcssessceussesessessesesess 8 RWPBOIIII CITIES dtugdauccargnonseatacenscssmeteus 8 E WAV Ve 9 A Cini me 10 4 1 Unpack the XT SH pment oi 10 4 2 Factors to Consider before Mounting the Probe ecce eee e eee eee eere eee eee 10 4 5 Monnt Ehe PEODR 6 eo Iri Evite das 11 4 4 Connect the Command and Control Unit CCU eee eee eee e eee eee eee ee e eee ee soee 12 4 5 Attach the RS232 Cable and Power the Unit cce ee eee e eee ecce eese ee eene eene nune 12 4 6 Install the VacuumPh is SOLWaALE ss in a EN E ER IN Pn aue vb eaa agn iii 12 SO GAMBIA a iN 12 4 5 SEALE Pump DON TI ei E PW ees a ELA RE 13 Se OO AUN ON ebrio EE E Mee 14 SA General theory OF Opera ea 14 5 2 Piran R
50. MAIL support extorr com Extorr Inc WWW extorr com Gas k Sens k Sens k Sens k Relative mbar torr Pa Sensitivity 19 0 29 9 0 19 1 00 CO 27 0 35 9 0 27 1 42 ca ia CH 27 0 35 9 0 27 1 42 54 0 71 8 0 54 2 84 SF 48 0 63 8 0 48 2 53 Figure 28 Ion Gauge Relative Gas Sensitivities Here we divide the nitrogen reading by the relative sensitivities above to get the pressure of that pure gas A gas mixture will give some intermediate result B 3 Determination of Partial Pressures Of all the vacuum measurements the partial pressure measurements are the most difficult because they depend on so many different things As in the ion gauge the residual gas molecules are electron impact ionized Unlike the ion gauge which just measures total ion current the quadrupole separates all the ions produced into their mass to charge ratios and measures the current from each of the ions produced These ions may be molecular fragments or from a mixture of molecules So not only is the ionization cross section important so is the cracking pattern of each molecule We can then add to this the mass to charge discrimination inherent to Extorr Inc 307 Columbia Road New Kensington PA 15068 A TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com any mass spectrometer system When used the response of an electron multiplier to differing ions must also be taken into account The
51. Not Shorting Probe lonizer with Short Circuit between Source 1 and Focus 1 Figure 62 Short Circuit between Source 1 and Focus 1 If a short 1s found gently bend the Source 1 plate away from the Focus 1 plate Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between Source 1 and Focus 1 Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com 84 Extorr Inc WWW extorr com If any of the Connecting Wires between the lonizer and Vacuum Feed Through are bent they may touch the Quadrupole Frame or the Vacuum Chamber wall and create a short circuit Sometimes a bent wire will cause the Barrel Connectors on the Filament Wires or the Tubular Spring Connectors on the other wires to touch the Frame or the Chamber and create a short circuit See the drawing below small Gap between Repeller amp Source 1 Gap Between Source 1 amp Focus 1 Quadrupole Frame gt 4 short Circuit caused by Connecting Wire touching Quadrupole Frame Probe lonizer with short Circuit between Connecting Wires and Quadrupole Frame Figure 63 Probe Connecting Wire Short Circuits Examine the wires along their entire length and if necessar
52. When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 50 of the Filament Emission setting The sum of this current and the Source 1 Current should be roughly equal to the Filament Emission control setting on the Operating Parameters tab The factory default setting for the Filament Emission control is 2 0 mA If Source 2 is shorted to the Vacuum Chamber Ground and the Filament Activation Switch is set to ON the Source 2 Current will be 0 mA and the Filament Light Bulb Icon will show a Red Dot with an X across it after several complete Mass Sweeps E 3 11 RF Amp The RF Amp displays a voltage reading in the Quadrupole RF section of the electronics that is roughly proportional to the High Mass control setting on the Sweep Parameters tab An XT100 or XT100M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 100 produces a RF Amp reading of about 7 5V The reading is updated at the end of every scan If the RF Amp reading is greater than about 9V try tuning the CCU as described in Section 4 7 Resonating the RF Coil of the Extorr RGA User Manual An XT200 or XT200M system in the Mass Sweep Mode with Low Mass set to 1 and High Mass set to 200 produces a RF Amp reading of about 13 5V The reading is updated at the end of every scan If the RF Amp reading is greater than about 13V try tuning
53. X 1 724 337 8322 EMAIL support extorr com 18 Extorr Inc 6 5 Configuration Tab Configuration Model 300 S N 131 File Mame cu serset cfg Description m Caption Johns Internal date fi 171172003 9 17 29 AM Open Save Figure 9 The Configuration Tab www extorr com Configuration is the folder which allows the user to reestablish the factory settings or to store his own operational settings The contents of all the cfg folders are stored in an XML file format Save will call up a dialog box which will allow the user to name this configuration file as desired The last saved settings will remain in effect by becoming the default settings for the next startup If at some later date the settings are changed again this previous setting may be called up using the configuration file name under which it was saved Note that this folder also gives the option to describe and caption this configuration This description and caption may then become a label for printouts and data files Also note that a Model Number serial Number and date of creation also follows this file The cfg file may be read using any text reader or an internet browser Changes in the configuration file could be made directly into the text file but the user must do this with caution 6 6 Scanning Parameters Tab m The most fundamental quadrupole RGA output is the analog mass scan The graph generated is di
54. as analysis you must expect that a number of different gases will produce peaks at the same time The residual gas spectra will be a combination of pure spectra In fact the user may see the mass spectrum of a pure compound only when he backfills the chamber with that gas Pirani Pressure 2 363760 10 4 5 2 Pirani Readout After installation the VacuumPlus Software 1s started by double clicking on the Extorr icon on the user s Windows desktop The Pirani gauge is factory calibrated In the future when the probe is up to atmosphere an atmospheric calibration point may be reestablished by pushing the Pirani 1 Atm Recalibrate button Extorr Inc 307 Columbia Road New Kensington PA 15068 14 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com found under the Calibration Parameter tab and then pushing the Apply button The Zero Recalibrate button may be pushed when the system is below 10 torr to reestablish the low calibration point Again remember to push the Apply button The Pirani readouts are the first measurements made immediately upon starting to pump down but this value is displayed only after the first sweep Your factory configuration file includes the factory Pirani calibration parameters Total Pressure 5 185 10 9 torr 5 3 Ion Gauge Readout The ion gauge readouts start when the pressure is below the Pirani measurement limits about 10 torr Once on
55. ation Parameters Tab The Extorr system comes with a factory tuning which can always be reestablished by loading the factory configuration file None of the tuning parameters should be changed greatly from the factory settings The system worked best with the factory set parameters but these may require slight changes over time There are however times when a special tune may be helpful An example of this may be WWW extorr com Operating parameters Mode Mass sweep Focus 20 E y El FO Electron Energy pex EV Filament Emission 2 U ma Electron Multiplier Enable Multiplier Voltage 100 Autozer Off id Pressure units Ton lon current Figure 14 Pressure Units Drop Down Menu when a very weak signal requires less than unit resolution or a fractional mass must be resolved from a peak next to it The calibration parameters allow for the changing of system resolution and sensitivity This is also the place where the Pirani gauge may be calibrated and the ion gauge can convert ion current to pressure 6 8 1 Low Cal and High Cal Because of the linearity and stability of the Extorr system the resolution and sensitivity requires calibration at only two points within the mass range These are the Low Cal and High Cal points along the mass axis We designate their location by placing values in the Low Cal Mass and the High Cal Mass All mass positions are linearly placed between these
56. ay from the Source 1 plate to remove the short circuit If possible bend the Repeller Source 2 Assembly back so that its outside edge is parallel to the Quadrupole Frame See the drawing for the un damaged probe above Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between the Repeller Source2 Assembly and Source 1 plate Also check for shorts between the Filaments and the Repeller Source2 Assembly or the Filaments and the Source 1 plate See Section 4 3 and Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 82 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com If the Repeller Source 2 Assembly is bent far enough it may bend the Source 1 plate until it touches Focus 1 This creates a short circuit between the Repeller Source 2 Assembly the Source 1 plate and the Focus 1 plate A bent Repeller Source 2 Assembly may also short to the chamber wall in a close fitting tube See the drawing below Repeller Source 2 Assy Es Bent and Short Circuit between Touching Source 1 Repeller Source 1 Ni a Source 1 Bent and A gt A Touching Focus 1 short Circuit between EAS RE source 1 amp Focus 1 I Connecting Wires Parallel to Frame Quadrupole Frame gt 4 Y and Not Shorting Focus 1 Probe lonizer with Damage to Repeller and Short Circuits between Repeller Source 1 and
57. ble Mass Table n bs Printing Log Calibration parame Zonfigure communicat m Serial Part Sp m Communications Communicati V Ready NM Figure 22 Multiple Units Operated from a Single Computer Start De 6 17 The Degas Mode amm Degas increases the electron energy to nearly 400 volts the electron emission to nearly 50 ma and the ion energy to 200 volts The purpose of degas is to clean the unit If the unit loses sensitivity due to contamination a degas of a few minutes duration often will restore the sensitivity To start degas click on the Start Degas button shown above and located to the right of the filament switch at the top center of the graphics interface After a descriptive message is displayed and agreed to a Time out bar I digi Will be displayed The user may choose to stop the degas process at any time by gt clicking on the button again If not clicked the bar will continue across the button until it is automatically turned off after ten minutes Extorr Inc 307 Columbia Road New Kensington PA 15068 31 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 7 Maintenance 7 1 Servicing the RGA probe 7 1 1 Ionizer Dual Filament Replacement A filament will eventually fail after years of operation even in a clean UHV system due to the thoria coating on it eventually decomposing and evaporating The Extorr RGA us
58. corners are C smoothed Armed with these ideas of how mass sweeps Work we can look at how the parameter settings can change individual peak heights shapes and widths Always remember you can go back to the factory settings by reloading the factory configuration file which came with your RGA Figure 31 Stability Diagrams and Mass Spectra Electron energy which may be controlled under the Operating Parameters tab is the energy in electron volts that the electrons have as they move through the ionization volume The probability that the electron produces an ion from a molecule moving within this volume depends on the electron s energy and the nature of the molecule Ionization depends on the electron energy ionization threshold below which no ionization is produced After this threshold ionization probabilities increase to a maximum and then decrease as electron energies are advanced beyond this maximum This electron impact ionization cross section curve is unique to each molecule but for production of singly charged ions the maximum is near 70 eV This is the normal setting for RGA electron energy If for some reason it is desirable to reduce the intensity of doubly charged ions a reduction of electron energy will usually help Extorr Inc 307 Columbia Road New Kensington PA 15068 44 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Filament emission which may be controll
59. d in a plastic bag containing dry nitrogen Leave the multiplier in its shipping bag until you are ready to install it F 2 Preparation Prepare to remove the Quadrupole Probe from your vacuum system by turning OFF the Ionizer Filaments Allow the ionizer to cool for at least 30 minutes before venting your vacuum system Unplug the DC Power Supply Connector and then the RS 232 Cable from the CCU Box Loosen the CCU mounting bolts and then remove the CCU from the Vacuum Flange being careful not to bend the flange pins After the Ionizer has cooled vent your vacuum system and remove the quadrupole probe from the vacuum chamber ATTENTION Always handle the vacuum side of the probe and the electron multiplier with clean gloves or you will see the results of your contamination on the next scan A fingerprint will outgas and cause peaks at virtually every amu until it is evaporated or turned into low vapor pressure compounds in your vacuum system Of course other sources of contamination such as diffusion or mechanical pump oil could cause similar problems Even after the volatiles are gone the residue may cause the probe to operate improperly by leaving behind either insulating compounds or secondary electron emitting surfaces This can cause charge from electrons to build up and disturb the electric fields in the ionizer or the mass filter leading to low sensitivity Extorr Inc 307 Columbia Road New Kensington PA 15068 26 TELEPHONE 1 724 337
60. d readily available 4 6 Install the VacuumPlus Software Take the VacuumPlus software CD from its case and place it into the computer s CD drive If multiple systems are being used it is important to match individual units with CD ROMs The CCU serial number is written on the CD label Each electronics unit has its own factory configuration file on its own CD Read the readme txt file on the software disk for latest instructions concerning installation Follow these readme instructions carefully Run the VacuumPlusInstall exe to install VacuumPlus Follow any further instructions given by the installation program Make note of any messages from the installation program Most of these messages are benign and may be ignored but they may give a clue if the software does not run on your computer 4 7 Resonating RF Coil Each Extorr probe and each Extorr electronics unit CCU is unique When a CCU is moved from one probe to another the CCU RF coil may be tuned for that particular probe When an Extorr system is delivered it is tuned for maximum performance in the factory test chambers as a matched set When placed in a new vacuum system environment the RF coil may be slightly off resonance This is usually not a problem especially for the 100 amu models but to return to maximum performance the coil may be tuned for the new environment This may be done when the system is at atmosphere the filament must be turned off manually or at a pressure
61. dicular to the tube center line An error of only a degree or so will cause the Ionizer end of the Probe to be as much as 1 8 inch about 3 mm off of the center line and may cause a short circuit An unevenly compressed copper gasket could also cause improper alignment within a close fitting tube For these reasons always use the largest inside diameter tube possible To help prevent short circuits the Extorr Quadrupole Probe has two built in spacer rings near the Ionizer The Ionizer Spacer Rings are larger in diameter than the rest of the Probe Assembly and are electrically connected to ground These rings will usually come in contact with the vacuum chamber walls before the other parts of the ionizer or the connecting wires to the electrical feed through pins See the figure below The Spacer Rings will touch the Chamber Eus Before the lonizer or Connecting Wires NH m lonizer Repeller 2 ad Assembly Sourced aS I m dae ES ET pe Focus 1 hs lonizer Spacer Rings af Sa I Quadrupole Frame Connecting Wires to Vacuum Feed Through Figure 54 Ionizer Spacer Ring Location Extorr Inc 307 Columbia Road New Kensington PA 15068 76 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 4 1 Preferred Probe Mounting Arrangement The preferred Probe mounting arrangement is a 2 3 4 inch CF DN 40 CF Flange on a Port that is up to 2 1 2 inches abo
62. e Color O Red Scan Position Color E Red Figure 18 The Plot Tab Printing M Inverted colors v Configuration File Name vw Description v Total Pressure v Pirani Pressure Figure 19 The Printing Tab Extorr Inc 307 Columbia Road New Kensington PA 15068 26 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 13 Log Tab p A log of CCU to computer communications is shown in this tab Here you can follow the communications between the VacuumPlus software and the Microprocessors in the CCU This information may come in handy for trouble shooting It will clearly tell you when there is no communication in the case of an incorrect port setting power failure or cable being unplugged The user may also use a number of features which are displayed when the Options button is pressed The options pop up box allows for a scan restart as well as setting a number of parameters A more extensive graphics look and functionality which supports zoom functions and fancy looking skins is also available here Clear Save 0000180 0000180 0000180 00001820 00001820 00001820 00001820 00001820 0000180 0000180 0000180 00001820 00000324 00000324 00001820 00001820 000013908 00001308 0000180 0000180 00001820 07 08 41 07 08 42 07 08 43 07 10 13 07 11 17 07 13 24 07 42 54 07 43 09 8 37 32 09 17 29 10 11 38 10 11 38 10 11 38 10 11 38 10 11 38 dl
63. e Module Output Wire Pawr mbi el ALE 4 gt TTT TTT mt bs a Board Terminal CCU Box bid Back Plate Figure 68 High Voltage Power Supply Location Remove the two silver Phillips head screws holding the electronics assembly to the back plate and set the back plate aside Carefully unplug the Power Supply Board from the assembly by lifting the edge of the board near the DC Power Connector the edge opposite the copper box until all the pins from the board below are out of the connector sockets on the Power Supply Board Next slide the Power Supply Board out from under the edge of the copper box The High Voltage Power Supply Module mounts in the area between the two 1 2 inch diameter silver spacers on the Power Supply Board Insert the 4 40 Stud on the High Voltage Module through the hole in the Power Supply Board and line up the 4 Male Pins on the Module with the Female Sockets on the Board Press the High Voltage Module onto the Power Supply Board Install and tighten the 4 40 Nut to secure the Module to the PCB Check the 4 40 nut again to insure it 1s securely tightened Reconnect the Power Supply PCB to the Electronics assembly Angle the board and slide the 1 2 inch diameter spacers under the edge of the copper box while carefully aligning the connector pins from the board below with the sockets on the Power Supply PCB Once the connector pins have been aligned press the Power Supply PCB onto the electronics assembly Check
64. e changes made will take effect The red check will disappear The user may wish to save these settings in a new configuration file The factory setting has the system scanning rapidly from mass one to the maximum mass for the unit 100 200 or 300 amu If the user is looking at the residual gases during pump down he may wish to concentrate on only the first 50 amu Do this by setting the low mass to 1 and the high mass to 50 Since there is always a speed and signal to noise tradeoff the user may wish to reduce the noise by decreasing the Scan speed value Operating parameters 6 7 Operating Parameters Tab s Under this tab the mode of operation may be changed as well as the Focus Voltage Electron Energy the Filament Emission Mode Mass sweep and the units in which the Pressure 1s expressed ce Bee V The optional electron multiplier is also controlled under this tab Electron Energy n ps Ew zl Filament Emission 2 ma Electron Multiplier 6 7 1 Mode Enable Currently the VacuumPlus Software supports three modes Autoazerm Off T These are Mass Sweep Trend and Calibration All may be EXE a H selected from the drop down menu in the Mode box as shown below o ET p Hie OS Figure 11 Operating Parameters Mode Mass sweep y scan as was discussed in the sssweep above section 6 6 Trend is the graphical output of those mass intensities partial pressures placed into and activat
65. ed in the mass table Figure 12 Mode When Mass Table or Trend is selected a graph is generated which shows Drop Down Menu the peak heights due to the ions selected in the table as a function of time Each trace is uses the color selected in the Mass Table The scale and zero functions are the same as for the analog graph This mode is further described in the section on Mass Table 6 9 Calibration is used for RF tune as was described in the RF tune section 4 7 6 7 2 Focus Focus controls the potential which draws the ions out of the ion source grid It is factory set to give a standard response to a calibration compound at the factory This may be set to suit the user s tastes especially as the probe ages but is recommended not to deviate too far from the factory setting Extorr Inc 307 Columbia Road New Kensington PA 15068 20 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 7 3 Electron Energy and Emission current The electron energy is the potential placed between the filament and the ion source grid It is factory set to 70 eV which is the industry standard for residual gas library spectra Emission current is the electron current leaving the filament and directed through the source grid It is set at the factory for high sensitivity when operating with a 70 eV electron energy The emission current may be set between 0 1 ma and 4 ma The electron energy may be user
66. ed under the Operating Parameters tab controls the amount of electrons available for ionization Peak height can be adjusted using this parameter When operating at pressures above 10 torr filament and ionizer lifetime will be increased if the filament emission is decreased by a factor of 10 Note that partial pressure readings will read low unless the Partial Sensitivity factor is changed under the Calibration parameters tab The mass scale set points are under the Calibration Parameters tab These set points are usually set to mass and the highest nominal mass for the XT unit That is for an XT100 the set points are and 100 for an XT200 the points are 1 and 200 and so on They may however be set anywhere in the mass range of the RGA These set points control by extrapolation and interpolation the values of Ion Energy Mass Position and Resolution at each individual point along the mass axis Ion energy is controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Ion Energy and Low Cal Ion Energy set points It is the parameter which controls the speed of the ion through the quadrupole As the speed is increased so is the probability of the ion making it from the ionization volume to the ion detector Ion energy is therefore a way of controlling peak height The lower the ion energy the lower are the number of ions detected The higher the energy the greater are the number of io
67. em C Y d sat Piani Con 1 to 1 0 f 4FB 225t025 2374601 vols k T 25025 E 184025 vo ts TI www extorr com k 1 Total Pressure is Negative because Filament is OFF Sa k 2 Degas Current 17 mA Uu qd should be about 2 4 mA Filament Voltage 2V should be about 1 6V de 4 Filament Resistance 7 should be about 0 5Q k 5 Source 1 Current gt 6 mA should be about 1 0 mA 6 Source 2 Current 6 m should be about 1 0 mA FB 1 8V should MM kT be about 2 40V TERES EON mend VES Focus 1 FB 62V Filament DAC Coarse 301 us ens 1 B should be about 20V i Repeller 65V 9 should be 68V Filament Power 5 1 0 because Filament is OFF 1 Total Pressure is Negative because Filament is OFF No Mass Spectrum de 2 shown on Mass Sweep Graph am Z4 Figure 50 Outputs Tab and Mass Scan Graph Filaments Shorted to Source 1 Extorr Inc 307 Columbia Road New Kensington PA 15068 67 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com o E 2 9 Repeller Shorted to Source 1 EE OB Be ER Degas Current 0 9 mA 1 should be about 2 4 mA Source 1 Current Source 2 de 2 Current Source 1 should be about 10 gt Source 2 _ Source 2 Current Source 1 Ye 3 Current Source 2 should be about 10 lt Source 1 a A Repeller 7 0 1V should be about 68V ma Reference 245 to 25
68. ensington PA 15068 71 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 3 5 Power Supply The Power Supply parameter displays the input voltage to the CCU box from the AC to DC Power Supply This reading should be about 24 VDC E 3 6 Filament Voltage The Filament Voltage reading measures the potential applied across the Ionizer Filaments The CCU electronics vary this voltage to produce the desired emission current When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 1 5 V to 2 V for the standard Extorr thoria coated dual filament operating at a Filament Emission current of 2 0 mA The Filament Voltage will read about 0 5 V when the Filament Activation Switch is set to OFF If the Filaments have burned out and the Filament Activation Switch 1s set to ON the Filament Voltage reading will be greater than 5 V and the Filament Light Bulb Icon will show a Red Dot with an X across it E 3 7 Filament Resistance The Filament Resistance display is the calculated resistance of the Ionizer Filaments measured in Ohms The standard Extorr thoria coated dual filament in normal operation will give a Filament Resistance reading of about 0 5 Ohms If one of the filaments burns out this reading will increase to about 1 Ohm A reading of 3 Ohms or more indicates that both filaments have burned out and
69. es two thoria coated iridium filaments that operate in parallel When one of them burns out the other will continue to operate the instrument normally giving a warning so that the user will be able to replace the filament assembly when it is convenient Unlike what may occur with other residual gas analyzers the Extorr s filaments will not fail due to exposure to high pressures because they are protected by both ion and Pirani gauge outputs A complete filament failure can be verified by looking at the DIAGNOSTICS readings on the OUTPUTS page If there is an open filament the filament voltage will read gt 5 volts and using the resistance reading and V IR there will be lt 1 amp filament current The filament light icon will not stay yellow on the main window If only one of the filaments is burned out the instrument will operate normally but there will be lt 1 5 amp of filament current The ionizer normally will last for years without attention in a UHV environment There is nothing to wear out but the metal surfaces can become contaminated The results of contamination could cause low sensitivity for partial pressure readings It generally take a very severe contamination to cause the total pressure readings to be low because the B A type gauge uses higher voltages and works with more energetic ions that are less susceptible to stray fields If you have a total pressure reading of 10 torr for example the sum of your partial pressure readin
70. files and then e mailed to the Tech Support Group at Extorr supportOextorr com should you need help troubleshooting your RGA system A Screen Capture of the Outputs tab and another of the Mass Sweep graph should be created first by following the steps below Additional captures will be requested if needed Follow steps E 1 2 and E 1 3 above to set up your system Maximize the VacuumPlus window so that 1t fills the entire screen EE Plus 1010 Start Degas Mass Table Plot Printing Log Configuration Communications Sweep parameters Operating parameters Calibration parameters Diagnostics Outputs 23 ma Filament Voltage 31 84 volts Electronics Temperature 24 3 E Filament Resistance 067 Ohne Power supply 23 64 volts Sensor Temperature CES Degas current Soucel curent 1326054 ma Reference 245to 255 2459044 Sources curent 0 881173 ma Ground ref 012 0 001630 RF Amp 0 to 20 0 8 749315 volts Focus FB Focust 13 58 Piani Temp 1to 1 0 0138735 volte Fiepeller 20 Elec Er 67 58 PiraniCorr 116 1 0 0140201 volts FilamentPower 646 Piani Press 3to 25 0 18261 volts Filament DAC Coarse 2991 FB 225t025 2404382 vals Filament DAC Fine 2405 FB 225t025 2403971 volts Outputs Tab Visible Figure 41 Outputs Tab Visible for Screen Capture In the Split Screen mode with all the Outputs tab parameters visible press the Print Screen key on your keyboard
71. g a single Cl atom is going to have an molecular peak due to CI and an M 2 peak due dE to CI The intensity of the M 2 peak is about 33 of that of the M peak A molecule containing a single Br atom will have M and M 2 peaks of about equal intensity 7 00e 12 6 00e 12 oY O F5 00e 12 2 00e 12 1 00e 12 D Armed with a few cracking patterns of common residual gasses a Or periodic table and a knowledge of how your chamber is used the user T should have little trouble identifying the gases in his system If he is Figure 26 Low Level stumped it is amazing what a simple search such as what is mass Hydrocarbons spectral peak xxx or peak at m z XXX on the world wide web will yield Extorr Inc 307 Columbia Road New Kensington PA 15068 39 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix B Gauge Sensitivity to Differing Gases B 1 Pirani Gauge Thermal conductivity of a gas 1S directly related Extorr XTx00 1 ma emission to both the mass of the pee gas molecules and the 2 39 1 00E 01 pressure The Pirani readout is calibrated for air Pressures in other gases may vary considerably from the results due to air 1 00E 02 1 00E 03 1 00E 04 1 00E 05 The characteristic voltage vs pressure response curve for the Pirani is shown to the right The voltage read at atmospheric p
72. gh mass 51 amp AMU Samples AMU 10 Figure 6 The Graphical User Interface GUI 6 3 Operational Settings Although the system comes up in a default mode the user has complete control over the configuration of his system The factory default configuration file found on the CD is designated as snXXXX factory cal cfg The XXXX is the four or three digit serial number of the CCU This is a factory configuration which is unique to the unit with which it was shipped and it should only be used with that unit It is a good idea to give this file another name with the same cfg extension and save it on the computer hard drive Even if the factory file is corrupted it may be recopied to your system from the VacuumPlus installation disk As seen above the GUI uses a file tab organization to allow the user to create edit and store configurations The configuration files have an extension cfg and are in the XML file format These may then be called up as desired Extorr Inc 307 Columbia Road New Kensington PA 15068 17 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc The operational file folders tabs give the user control of his system settings These tabs are shown below Scanning parameters Configuration Diagnostics Outputs Mass Table Operating parameters WWW extorr com Calibration parameters Communications Printing Log Figure 7 Folder Tabs for operation
73. gs should be roughly the same A number of factors such as the relative sensitivities of different compounds and the cracking of molecules into ion fragments makes it unlikely that they will add up exactly but as the ionizer contamination increases you may see a an order of magnitude or more difference between the total pressure and the sum of partial pressures Cleaning the ionizer is difficult if not impossible in most cases so replacement is the remedy It is also likely that some contamination will make it to the rods of the quadrupole So when replacing the ionizer due to low sensitivity it is a good idea to clean the quadrupole rods as well Always handle the probe with clean gloves or you will see the results of your contamination on the next scan A fingerprint will outgas and cause peaks at virtually every amu until it is evaporated or turned into low vapor pressure compounds in your vacuum system Of course other sources of contamination such as diffusion or mechanical pump oil could cause similar problems Even after the volatiles are gone the residue may cause the probe to operate improperly by leaving behind either insulating compounds or secondary electron emitting surfaces This can cause charge from electrons to build up and disturb the electric fields in the ionizer or the mass filter leading to low sensitivity At the factory all parts are mechanically cleaned then vacuum baked and then plasma cleaned If you are doing UHV work
74. h the drop down menu from each cell in the dwell column The actual time taken for a measurement at one mass is five times Mass Table Samples 500 Add Remove Clear V Audio Output Selected Channel High Low Warning Warning Figure 16 The Mass Table this dwell time Five measurements are taken across the peak and the largest measurement is the one reported All of these settings may be saved in a cfg file as described in section 6 5 Again the Apply button must be pushed before these settings will take effect The table may be edited and saved in a configuration file at any time Actual operation requires the operational mode to be set to Trend This mode selection is explained in section 6 7 1 6 9 1 Mass Table Setup for Leak Detection M Audio Output Selected Channel When in the Trend mode audio leak detection may be setup by choosing a leak detect gas from those mass peaks placed in the mass table This is done in the mass table by checking Audio box of the selected mass in the table Helium at mass 4 is usually the gas chosen However any other leak detection gases may be used An audio output will be heard if the user s computer supports sound If no audio is heard first check to see that the system is in the trend mode and the audio box is checked Use the sensitivity and offset gliders located to the sides of the graph along with the dwell time to get a smooth baseline tone When the trace is near the b
75. his order P2 24 2 8 If your unit does not have all of these items call Extorr Inc at 724 337 3000 If anything appears to have been damaged in shipment contact the shipper as well The probe is mounted in a transparent plastic shipping tube To remove Figure 2 Items Included in XT Package Unscrew the two container side screws and touching only the non vacuum side of the flange carefully slip the probe from the plastic tube 4 2 Factors to Consider before Mounting the Probe Find a DN 40 CF 2 34 inch flange on your vacuum system Carefully measure for the 7 inch 178 mm clearance required for probe insertion The port inside dimensions must be greater than 1 375 inches The port flange must also be a true 90 degrees from the center line of the port tubing If you require a smaller insertion length or need to convert to a different type of vacuum flange place the appropriate extension conversion nipple on the probe at this time Typically the CCU hangs in a vertical position with the communications and power connections below the flange position the orientation as seen in figure 2 Although orientation of the CCU is not a strict requirement for the quadrupole and ion gauge the Pirani gauge works best in this orientation You may wish to apply this hanging orientation by rotating the flange so that the shielded pin which is closest to the outside edge of the flange is at the bottom This 1s shown in figure
76. hten both set screws on each barrel connector Be careful that the wires do not short to each other or the frame You can bend the wires from the feedthrough easily if necessary but do not bend the wires from the ionizer or you may crack the ceramics Finally break off the top of the filament assembly and discard Figure 23 Servicing the Probe More detailed Photographs are available on the Extorr web site at www extorr com Extorr Inc 307 Columbia Road New Kensington PA 15068 35 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 8 Return Procedure If for any reason you need to return your XT system to Extorr Inc for service first call 1 724 337 3000 to obtain a Returned Material Authorization RMA number Then pack the instrument securely using the original packaging if it is available Be sure that the RMA number is clearly marked on the outside of the shipping box Extorr Inc 307 Columbia Road New Kensington PA 15068 36 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix A First Mass Spectrum As the vacuum system is first pumped down the Pirani gauge output will decrease hopefully rapidly to pressures in the 10 torr range In the factory configuration file the filaments are in the activated position and the light bulb icon will glow red when only the Pirani is activated As the pressure drops be
77. ich may be related to pressure For the Extorr XT systems the highest pressure measuring device 1s the Pirani gauge A thin gold coated wire with a precisely regulated current passing through it is located on the flange end of the probe A precise measurement of the wire s temperature yields a reproducible function of gas pressure This gauge is calibrated for nitrogen but is roughly the same for air Other gases such as pure argon may cause misleading readouts These may be corrected using a Pirani conversion chart At about 10 torr the hot cathode ion gauge starts into operation at a reduced emission level Dual thoria coated iridium filaments produce electrons which are directed into a well defined volume Within this volume ions are produced and collected by a high voltage wire The magnitude of this current is directly proportional to the pressure of the gas in the volume Again this device is factory calibrated for nitrogen but the user may change the sensitivity factor for other vacuum gases as 1s given in Appendix B for ion gauge readings Finally after the ion gauge measures a pressure below 10 torr the quadrupole analyzer may be turned on Now ions are extracted from a second volume These ions are directed along the axis of a set of four parallel rods precisely separated and aligned to produce a nearly perfect hyperbolic field With just the right combination of radio frequency RF potential and direct current DC potential an
78. ing data out of the vacuum plus software for some users Extorr Inc 307 Columbia Road New Kensington PA 15068 27 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com With a change in mode many of the graphics changes revert to a default but it is still well worth exploring the options found by right clicking over the graph Viewing Style Mass Sweep Mass Sweep Border Style j Ne e e Font Size TE w Show Legend yim T aS eS SS ee ee ee ee Numeric Precision 4 00e 9 M LA A Plotting Method b 3 50e 9 1l a N Data Shadows Tm A Grid Options k x Graph and or Table Ad T E Point Label Orientation a fi al MIS 1 IR 1 Y SP ER SE DS va A A RS ie 40e 9 HH HH j 100 EEE Undo Zoom 1 0909 LI IH It FIF 1 ee eee E A Maximize A Ji fh jit A ACT Greenea felis l m L eme mg m e e n m nm emm I tme Export Dialog 100e 11 1111 1H LY A y Hit hei 12 13 14 45 16 EA 1 8 19 20 21 22 12 2 14 E 46 wie 1n 9 2 21 22 Help Jolx General Plot Subsets Points Axis Font Color Main Title Mass Sweep JA Show lnnotations Sub Title SSS Border Style Numeric Precision C No Border Line co Ca LS 9 C Shadow 3D Inset Viewing Style Grid Lines Color Both CY CX C None Monochrome Grid in front
79. ing the Faraday cup A gain of 1000 is 1 2 E usually all that is required for most RGA i pre applications As a general rule to increase the lifetime of the multiplier use the lowest multiplier a rl ps EV voltage which gives the gain desired ecd Filament Emission Ty ma 6 7 5 AutoZero Electron Multiplier Enable When invoked AutoZero makes a baseline measurement during a time when the quadrupole does not allow ions to pass through its length This measurement is then subtracted from true ion measurements thereby eliminating baseline offsets Since extremely low current measurements can suffer from baseline drift due to thermal or other environmental factors this function is used to reduce the effect as much as Figure 13 AutoZero Drop Down Menu possible The drop down menu for AutoZero is shown in figure 13 The user may choose to turn AutoZero off invoke it before each sample measurement or invoke it only once per scan Per scan AutoZero is important only when attempting to measure very small peaks The price paid in the case of using per sample is a doubling of acquisition time Extorr Inc 307 Columbia Road New Kensington PA 15068 21 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc 6 7 6 Pressure Units The system may display pressures and partial pressures using a number of different units The units chosen may be selected from this drop down menu 6 8 Calibr
80. ion with just the right mass to charge ratio will be directed through the rods to a Faraday cup ion collector All other mass to charge ratios will be rejected long before the ion is collected By carefully scanning the RF and DC potentials a mass spectrum consisting of a number of ion current peaks may be generated If the electron multiplier option was chosen then the ion current may be converted to an amplified electron current The amplified current will allow mass spectra to be generated at a far greater speed The multiplier may also increase the ultimate detection sensitivity by a factor of over 1000 All molecules have their own unique mass spectrum Those familiar with residual gas analyzers will immediately recognize the mass spectral signatures of those gases frequently encountered These people will immediately tell you that the cascading intensity of peaks from 18 to 17 to 16 is due to the presence of water A four to one ratio of peak heights at 28 and 32 indicates that you have an air leak or the residual air has not yet been pumped down They would expect peak 44 in even a well sealed stainless chamber A surprise peak or set of peaks may take longer to identify but commonly available data bases and the information available on the World Wide Web make the solutions to many of these puzzles available to non specialists Often all that 1s required is to type mass XXX peak into an internet search engine Of course in residual g
81. jussis HOO Filament Switch Turns OFF Automatically after amp 1 several Mass Sweeps Light Bulb Icon shows a Filament Problem J Degas Current 0 mA should be about 2 4 mA 3 Filament Voltage gt 5V should be about 1 6V k 4 Filament Resistance gt 3 should be about 0 59 5 Source 1 Current 0 mA should be about 1 0 mA 6 Source 2 Current 0 mA viPiesi3tm 25 s 2 t DE 3009 should be about 1 0 mA FB O 2 End vk Pamet DAC 2047 7 Filament Power 5 FB 225t025 2 405518 vay because Filament is OPEN NY Total Pressure 1227107 torr 1 Pirani Pressure 1 00x10 4torr Filament Switch Turns OFF Automatically after de several Mass Sweeps Light Bulb Icon shows a Filament Problem No Mass Spectrum 2 shown on Mass Sweep Graph Figure 44 Outputs Tab and Mass Scan Graph Filaments Open Extorr Inc 307 Columbia Road New Kensington PA 15068 61 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 2 3 Source 1 Shorted to Vacuum Chamber Ground EBA vacuum e Plus MRE Be lolo Filament Switch Turns OFF Automatically after lx 4 several Mass Sweeps Light Bulb Icon shows a Filament Problem 2 Degas Current 0 mA should be about 2 4 mA 3 Filament Voltage 0 10V should be about 1 6V 4 Filament Resistance 0 33 Q because Filament is OFF de 5 Source 1 Current 0 mA should be about 1 0 mA ice pie
82. le Value 2 61942e 011 gt lt Sample Value 1 25229e 012 gt lt Sample Value 2 86834e 012 gt lt Sample Value 2 62114e 012 gt lt Sample Value 1 64358e 010 gt lt Sample Value 1 00085e 009 gt lt Sample Value 1 17773e 009 gt lt Sample Value 8 14476e 010 gt lt Sample Value 1 09915e 010 gt lt Sample Value 7 56115e 012 gt lt Sample Value 1 92803e 012 gt lt Sample Value 3 37541e 012 gt lt Sample Value 5 62092e 010 gt lt Sample Value 2 50811e 009 gt lt Sample Value 2 8665e 009 gt lt Sample Value 1 99793e 009 gt lt Sample Value 1 79753e 010 gt lt Sample Value 1 34216e 012 gt lt Sample Value 1 11096e 011 gt lt Sample Value 2 38959e 011 gt lt Sample Value 1 86811e 009 gt lt Sample Value 7 15505e 009 gt lt Sample Value 8 63439e 009 gt lt Sample Value 6 02352e 009 gt lt Sample Value 4 11353e 010 gt lt Sample Value 8 15777e 013 gt lt Sample Value 2 86842e 012 gt lt Sample Value 1 2607e 013 gt lt Sample Value 5 3608e 011 gt lt Sample Value 2 04398e 010 gt lt Sample Value 2 53127e 010 gt lt Sample Value 1 79202e 010 gt lt Sample Value 2 55128e 011 gt lt Sample Value 5 37074e 012 gt lt Data gt The Icon indicates that a data pipe for streaming XML is not open When the pipe is open and data is flowing from the program this icon changes to a dynamic icon
83. low 3 x 10 torr the ion gauge starts to operate with a reduced electron emission In this situation the bulb icon shines orange In this pressure region the ion gauge yields the more accurate pressure measurement As the pressure falls below 3x10 torr the electron emission for the ion gauge and the quadrupole analyzer ion source are increased to the value set in the configuration file see the filament emission box under the operating parameters tab At this point the bulb icon becomes yellow and the quadrupole starts operation The factory setting for the quadrupole is a sweep from mass 1 to the highest rated mass of the system This usually makes for a rather cramped spectrum making the assignment of peaks to masses difficult The spectrum may be stretched out either by changing the mass range or by using the sliders at the bottom of the graph If you are pumping down from atmosphere the dominant peaks will be the water peaks at masses 18 17 and 16 The mass spectrum usually consists of a molecular ion parent peak or M peak Then there will also be one or more fragments of the molecule A mass spectrum which includes H20 is shown in Figure ETB rear aimara reso ras C 24 The largest peak is the molecular ion H20 e Mss Soon D with a mass of 18 The next most abundant ion is C ci the fragment OH at mass 17 The next most e een pets abundant fragment is O at mass 16 Note that the fragments are formed by the removal of an ato
84. m or NEL group of atoms from the molecular ion The O molecular weight of the molecular ion and the Samples amu 10 p zd particular fragment of the molecule both are used in the identification of the molecule A closer examination of a pure water spectrum would also show peaks at mass 1 mass 19 and mass 20 but these peaks are on the order of 1000 Figure 24 Water Vapor in Mass Spectrum times less than the peak at mass 18 The peaks at masses 19 and 20 arise because some of the H20 molecules contain 0 17 and 0 18 isotopes Ordinary oxygen contains 99 756 of the mass 16 isotope 0 039 of the mass 17 isotope and 0 205 of the mass 18 isotope The peak at mass 18 is called the molecular or M peak of water vapor while those at peaks 19 and 20 are called the M 1 and M 2 peak respectively The other two peaks which are expected to be in these first mass spectra are the peaks due to the other main constituents of air nitrogen oxygen and argon The molecular peaks of these gases are at 28 32 and 40 The ratios of these peaks are 4 to 1 to 1 20 If these same ratios persist for a length of time you most likely have an air leak As the pumping continues these peaks will become smaller until there is virtually no mass 32 peak The nature of the pumps used and the material of vacuum system construction will determine the mass spectrum at the lowest pressures There are many sources of mass spectra in libraries on the World Wide Web
85. mable lon energy 3 to 10 V programmable Focus voltage 0 to 150 V programmable Electron emission current 0 1 to 4 mA programmable General Materials of Probe 304SS Kovar Tungsten Alumina Iridium Copper Nickel Construction construction Probe dimension 6 79 from flange face to top of ionizer CCU Extension 5 5 from flange face Minimum tube I D 1 375 Probe mounting flange 2 75 CF CCU dimensions 3 3 x 4 8 x 7 5 Easily separated from the probe for bake out Warm up time Mass stability 0 1 amu after 30 minutes Computer interface RS 232C 115 200 Baud Software Windows 2000 or XT based application Requires Pentium or better Power requirement 24 VDC 2 5 Amps Standard 120 240 VAC adapter supplied Weight Probe and CCU total 5 lbs See Appendix D for options and spare parts Latest prices and spare parts are on the Extorr web site at www extorr com Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 4 Installation 4 1 Unpack the XT Shipment Carefully unpack your XT Unit The shipment includes these components quadrupole probe and copper gasket command and control unit mounting bolts EB neon dmi RS232 cable not shown DE A 3313 power supply and power cord t VacuumPlus Software on CD plastic screw driver and Allen wrench 8 any spare parts or accessories included with t
86. ment can be used to produce a mass spectrometer V Clearly if we have combinations of RF and DC voltages in the region A neither of the ions will make it through the rods In the D region both ions make it through the rods In the B region only the high mass ion makes it through the rods and in C only the low mass ion makes it through the rods RF Figure 30 Stability Diagrams Extorr Inc 307 Columbia Road New Kensington PA 15068 43 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com A second example of this concept is of the stability diagrams of the first 5 masses Note the 5 similar stability diagrams for the first 5 ion masses If we sweep the RF and DC voltages along line A we get the mass spectrum shown as a Note that the peaks are flat topped and thin I have chosen an ion abundance at each mass such that mass 1 is larger mass 2 3 and 5 are about half this size and mass 4 is the largest peak When we sweep along B we get the spectrum shown as b The peaks are now uniformly wider So we can control the peak widths with our sweep line If we want to change peak widths we could sweep as in C and get the mass spectrum c Note that the mass 1 peak is no longer as tall as mass 2 This is the situation when a peak is said to be over resolved DC You may note that theses peaks do not b look like real world peaks They are indeed idealized In the real world the
87. n y 726 ptMaxPosition x 4 ptMaxPosition y 23 rcNormalPosition left 0 rcNormalPosition top 0 rcNormalPosition right 667 rcNormalPosition bottom 438 gt Setup flags 0 showCmd 1 ptMinPosition x 1 ptMinPosition y 1 ptMaxPosition x 1 ptMaxPosition yz 1 rcNormalPosition left 958 rcNormalPosition top 50 rcNormalPosition right 1349 rcNormalPosition bottom 723 gt lt WindowParameters gt lt PlotParameters BkColor Lt Green LineColor Red ScanColor Md Blue MouseWheel 0 gt lt ConfigurationData gt Extorr Inc 307 Columbia Road New Kensington PA 15068 29 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com A representative data file for a sweep from 13 5 amu to 19 5 amu is given below lt xml version 1 0 encoding us ascii gt lt Data LowMass 14 HighMass 19 SamplesPerAMU 8 Units Torr Sample 0 gt Sample Value 4 80521e 012 gt lt Sample Value 4 90272e 012 gt lt Sample Value 3 49013e 011 gt lt Sample Value 2 13785e 010 gt lt Sample Value 2 38185e 010 gt lt Sample Value 1 70573e 010 gt lt Sample Value 1 16129e 011 gt lt Sample Value 1 44788e 012 gt lt Sample Value 1 04575e 012 gt lt Sample Value 3 8262e 013 gt lt Sample Value 1 86295e 011 gt lt Sample Value 2 13322e 010 gt lt Sample Value 2 52524e 010 gt lt Sample Value 1 75088e 010 gt lt Samp
88. nnncnnncnnecnnenos 69 E 2b Focus 1 SOON 70 E 3 Outputs Tab Parameter Definitions iia rip eee Ye eade eua Peg ave oe ve dee uua e dene o vade a voe aee Ue vedS 71 SM Oo seit te rea ees 71 AM O a O Pe e CO eee a nae 71 ESO Deris CUTE a a io ub eo uu om RUE cep acetone 71 B3 Electonics temperatura 71 B3 5 BOWEL UDI a aaa 12 B 36 Eilanent VO as 12 B30 Elament Resistance lia bas T2 ESO SENSOF Ter pe Fat UTC ieoocn iioc ed eio desc lll ds daa 12 ESO SOU Uli lali 73 OOS SOURCE 2 UM E 73 EOS RT PP esate illo 73 ee ye rane ESAE RO 74 E TS n MAIS OM todas OREIRO AE O E RO 74 Ee DLA PA FOSS dt eoo eid oa Aue 74 ESTADO 74 2A Kod i Kec M 74 Sie XI KC OC US E E E E E Nc cH n 74 Imo FL ero pe l T a II tine tees inane cntiel 74 EOI Fanen Poesie ood seems draps boo 75 E220 Filament DAC Coo arse oran 75 b 2I BHlament DAC Bae as 75 E 4 Vacuum Probe Mounting Considerations to Avoid Electrical Short Circuits 76 E 4 1 Preferred Probe Mounting Arrangement e del E 4 2 Mounting the Probe Using a Vacuum Nipple oooccccncnnnonnnonnnnnnnnnnnnnnnnnnnnonnnnnnnnnnnnnnnnnnnonnnnnnnnnnnnnnnnnninnnoss 78 E 5 Finding Electrical Short Circuits Caused by Damage to the Probe 81 Extorr Inc 307 Columbia Road New Kensington PA 15068 A TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix F Electr
89. ns detected Unfortunately as the ions increase their speed they are less likely to be properly selected by the RF field of the quadrupole and peak splitting occurs In the Extorr RGA an Electron Energy between 3 to 6 volts usually gives the best sensitivity without peak shape distortion Also note that higher masses have less speed than do lower masses at the same energy The focus voltage which may be controlled under the Operating Parameters tab controls how the ions are extracted from the ionization region Any particular tune setting may be optimized by a change in this voltage As ionizers age by contamination sensitivity may be increased by an increase in magnitude of this negative voltage Mass calibration is controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Mass and Low Cal Mass set points These are the parameters which control the exact position of the mass peak on the mass scale As resolution is increased peak width decreased the mass peak will change width more on the low mass side than the high mass side The peak maximum will therefore have been shifted The High Cal Mass and Low Cal Mass set points may be adjusted to place the peak top back at the proper mass position Mass peak resolution is also controlled under the Calibration Parameters tab It is controlled by extrapolation and interpolation from the High Cal Resolution and Low Cal Resolution set poin
90. on Multiplier Installation eee e eee eee ee eee enne 86 FL Unpack the Shipment io er PU RIVER EI EH PRI M eU 86 F2 AAA 86 5 5 Install Electron Multiplier o o E PER VeRO ER EO EE NAR EEE RSEN RU EE Ner ete eseaaietouescemeneenes 87 F 4 Install High Voltage Power Supply Module ooommsss eee ee e eee e eee eee 89 A M 91 Extorr Inc 307 Columbia Road New Kensington PA 15068 5 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 1 Safety Information Limitation on use of Compression Mounts WARNING Do not use a compression mount quick comnect for attaching the Analyzer probe to the vacuum system in applications that may develop positive pressures Positive pressures may cause the probe to be blown out of a compression fitting and damage equipment and injure personnel Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 2 Overview 2 1 General Description The Extorr XT Series instruments are quadrupole residual gas analyzers which also include an enhanced Pirani gauge as well as a hot cathode ion gauge The Pirani gauge makes vacuum measurements based on thermal conductivity of the gas environment The ion gauge uses electron impact ionization of residual gases to measure ion currents related to pressure The
91. ottom of the trend graph the sound has a low frequency As the signal increases the sound frequency increases A leak will be indicated by a rapid increase in frequency as the leak detect gas is applied Extorr Inc 307 Columbia Road New Kensington PA 15068 24 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com to the location of the leak Since the sound is tied to the intensity level on the screen it is best to be in the linear plot mode If a multiplier unit is being used and the pressure is below 10 torr a leak is best detected with the multiplier option turned on 6 10 Outputs Tab The outputs tab gives information on system operation They are updated at the end of every scan The user will find this information very useful especially if trouble shooting is required The factory support personnel will ask for the values on this page when trouble shooting The top parameters reported here are Degas current Electronics Temperature within the electronics box CCU the voltage placed on the electronics by the power supply the voltage placed across the filaments the resistance of the filaments and the temperature at the base of the probe The degas current is also the total emission current from the filaments when the system is not in the degas mode The total current through the filaments is given by the voltage across the filaments divided by the resistance n Gutput
92. r Tabs Aa vacuum bus 1t 31 F ris Edt we Binds Fep ERES Om EE T E Y Pirani past e Tart Degas Mass Sweep Ja all BE 7 Mig 9 de 7 Ex EETSTITID Plus 10 ER Fie Edit view IX Ec TEC 20007 7 e 7 AI 3000 7 me Total N Click Graphics Button to show Operational Tabs 2 00e 7 Figure 32 Mass Scan Only Graphics Display Extorr Inc 307 Columbia Road New Kensington PA 15068 50 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com After clicking on the Graphics button the Operational Folder Tabs are displayed Operational Folder Tabs are displayed Evyacuura Plus 10 107 F cie zl ten Boi din Heb LS ES Pharr Fesaure Masa fwr ats Oprah Acs CAA n7 pcamebrrs Laznzstks Cutputs Mees cbe t Penn Jnd ro pzu tizn Ewa iteli zZunezp pala pers Edy acuum Plus 10 E File Edi View QD a Fiere I toram e cbe nnd elias re Ene E let mlin HE x ies i ezk 1 FTA AUK r hs zaplizh unu b ze enn 7 2130 Fl Total Area da Graphics Button changes to Split Mode Button Figure 33 Split Mode Graphics Display If necessary switch to the Mass Sweep Mode To change modes first select the Operating Parameters tab and then choose Mass Sweep from the Mode drop down menu then click on the Apply button
93. r look at a portion of the spectrum with higher resolution to look at half mass peaks or peaks which suffer mass defects The tuning parameters which may be controlled and their functions are 1 Electron energy which controls sensitivity Filament emission controls the amount of electrons available for ionization Ion energy which controls sensitivity and peak shape Focus which can affect sensitivity and peak shape High Cal Mass and Low Cal Mass which control the set points on the mass scale from which extrapolation and interpolation for Ion Energy Mass Position and Resolution values are taken 6 High Cal Position and Low Cal Position which control where peaks are placed on the mass scale and where the High Resolution and Low Resolution settings are applied 7 High Resolution and Low Resolutions which control spectrum wide resolution peak shape and sensitivity PEE a Quadrupole rods act as a mass filter For a given mass to charge ratio a large number of combinations of RF and DC voltage will allow that ion through the length of the rods In fact all combinations of RF and DC below a unique nearly triangular graph will allow that ion through This is called the quadrupole stability diagram Note that this graph is reflected in the Extorr logo A second ion say with half the mass to charge ratio as the first will have a completely similar stability diagram as shown in Figure 30 We can now see how this arrange
94. rectly proportional to the ion current generated at each mass to charge ratio This graph will have mass on the horizontal axis and pressure or ion current on the vertical axis Under Scanning Parameters the High Mass Low Mass Samples per amu and scan speed may be set Numbers may be typed into the appropriate boxes or the up down arrows may be used to change the values The low mass must be less than the high mass and the low mass may not be set below l and the high mass not above the mass range of the system being used An allowed value will display a green background A value which is not allowed Scanning parameters Scan speed fi 0 hd MSEC Low mass 1 pz AML High mass 43 AMU Samples AML 10 Figure 10 Scanning Parameters Tab results in a red background The Low Mass will start a scan roughly half an amu below the set mass and the High Mass will stop scanning roughly half an amu above that set mass The scan speed is the number of samples measured per second The user must choose from the values from the drop down menu The number of samples amu is the number of evenly spaced samples taken within a Extorr Inc 307 Columbia Road New Kensington PA 15068 19 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com one amu mass range For example a scan speed of 10 sec and a samples amu setting of 10 would produce a scan rate of 1 amu sec Click Apply and th
95. ressure and that read when eu pressures are below 10 torr will establish the m n voltage pressure 1 00E 06 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 01 1 00E 02 1 00E 03 3 00E 02 2 80E 06 BA output current pirani output voltage 1 00E 06 1 00E 07 1 00E 08 pressure relationship between these two points Figure 27 Pirani amp Ion Gauge Operation B 2 Ion Gauge Corrections The ion gauge is also calibrated for nitrogen In the ion gauge pressure realm the ion current depends on the probability that an electron ionizes a molecule to make an ion This probability actually a cross section for ionization is strongly dependent on the molecular structure The pressure is defined by the ratio of ion current 1 to electron current e times a sensitivity number k That is P 1 k e k must have units of inverse pressure This k can vary widely depending on the molecular make up of the gas The table below gives this k value for most common vacuum gases The table gives this result in inverse torr inverse mbar and inverse pascals A relative sensitivity is also given with respect to nitrogen This is the number used to convert a nitrogen gauge reading to a reading for the gas in question This is done by dividing by the relative sensitivity number k Extorr Inc 307 Columbia Road New Kensington PA 15068 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 E
96. s Degaz current ma Filament Voltage volks zd 1 80 Electronics Temperature 453 C Filament Resistance 1 10 Ohm Power supply 2412 volts Sensor Temperature 3g Source current 1 000001 ma Reference 2 15 ta 2 55 2 40631 Sources curent 1 000001 ma Ground ref 02 0 011432 HF Amp 0 to 20 0 2490829 volts Focus FB Focus 29 69 Firani Temp 1 to 1 01 0 145784 volts Repeller 2 0 Elec En 67 69 Firani Corr 1 to 1 0 0 146368 volte Filament Power Fl Firani Press 3 ta 2 5 0 324901 volts Filament DAC Coarse 3022 FB 2 25 to 2 5 2 401436 vols Filament DAC Fine 1539 FB 2 25 to 2 5 401776 volts Figure 17 The Outputs Tab Below these readings are further operational readings labeled with the acceptable ranges for these readings Source 1 current 1s electron current to the source grid Source 2 current 1s electron current to the B A section of the ionizer RF Amp is from the RF section of the electronics and is roughly proportional to the high mass value in sweep The Pirani Corr and Pirani Temp are proportional to the Pirani wire temperature and when added should be roughly equal to Pirani Extorr Inc 307 Columbia Road New Kensington PA 15068 25 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Press FB and FB are proportional to the DC voltages on the rods Reference and Ground
97. s2 Enabled 1 Mass 18 Description Color Navy Dwell 50 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass3 Enabled 1 Mass 28 Description Color Dk Gray Dwell 50 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass4 Enabled 1 Mass 32 Description Color Red Dwell 100 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass5 Enabled 1 Mass 149 Description Color Fuschia Dwell 200 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass6 Enabled 1 Mass 69 Description Color Green Dwell 100 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass7 Enabled 1 Mass 38 Description Color Silver Dwell 3 5 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass8 Enabled 1 Mass 40 Description Color Pink Dwell 42 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt Mass9 Enabled 1 Mass 44 Description Color White Dwell 21 ms HighWarning 0 HighAlarm 0 LowWarning 0 LowAlarm 0 gt lt MassTableParameters gt lt PrintingParameters InvertColors 0 ShowConfigurationFile 1 ShowDescription 1 ShowTotalPressure 1 ShowPiraniPressure 1 gt lt GraphParameters gt lt Y Axis FullScale 9 81748e 008 Span 1 05925 gt lt GraphParameters gt lt WindowParameters gt lt Frame flags 2 showCmd 3 ptMinPosition x 0 ptMinPositio
98. system may be calibrated to take most of these factors into account For most purposes an extremely accurate partial pressure measurement is not required If we know the cracking pattern of the molecule at a given ion energy and we have a single peak which is free of interferences then a measure of the partial pressure of the molecule may be derived by comparing 1ts peak height divided by the fraction of the total current produced by the molecule The ion gauge sensitivity factor although measured at a different electron energy may be used to get a rough idea of the partial pressure As an example let s say that we have a peak at mass 20 due to Ar We look at the cracking pattern of Argon and find that 17 of ionized argon becomes Ar So we measure the current i Ar divide by 0 17 The partial pressure is then given by i Ar i k Ar where i is the electron current to the ionizer Putting numbers into this example suppose the 20 amu signal was 10 amps the ionizer electron current was 10 amps so P Ar 10 amps 10 amps 0 17 27 9 torr 2 1 x 10 torr Again it should be emphasized that we have made a number of gross assumptions here which add to the uncertainty in this value Another factor is the relative quadrupole transmission for differing masses If the simplest tuning provisions are made a quadrupole has a transmission which falls off in direct proportion to the inverse of the mass In an RGA such transmission
99. tal Converter measuring a precision reference voltage If this reading and the Ground Ref reading are correct the A to D Converter is working properly The Reference value must be in the range of 2 45 V to 2 55 V E 3 2 Ground Ref The Ground Ref reading displays the result of the CCU s internal Analog to Digital Converter measuring the system Ground If this reading and the Reference reading are correct the A to D Converter is working properly The Ground Ref value must be in the range of 0 02 V to 0 02 V If the Reference and Ground Ref values are correct the other parameters should be as described below E 3 3 Degas Current The Degas Current displays the total electron current emitted from the filament measured in milliamps When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading will be about 0 5 mA greater than the Filament Emission control setting on the Operating Parameters tab The Degas Current will read about 0 mA when the Filament Activation Switch is set to OFF E 3 4 Electronics Temperature The Electronics Temperature displays the temperature inside the Extorr CCU electronics box in Degrees Celsius When power is first applied to the CCU the Electronics Temperature will be about equal to the ambient room temperature and will increase to about 40 C after operating for about an hour Extorr Inc 307 Columbia Road New K
100. te that a short circuit 1s present use an Ohm meter to check the probe Un plug the DC Power supply carefully remove the CCU Box and measure the resistance of each flange pin to ground the Vacuum Chamber All pins should have very high resistance to ground gt 20MQ with CCU disconnected except for the RTD pin7 which should be on the order of 1000 ohms to ground and the daisy chained Pirani Pins 13 amp 14 which should be on the order of 5 ohms to ground The resistance between filament leads should be low perhaps half an ohm See the Flange Pin Out Drawing below Also check for shorts between the flange pins If the Ohm meter shows a short circuit the probe will have to be removed from the vacuum chamber See sections E 4 and E 5 for help finding the short circuit 6 Rods l 7 RTD 5 Filament m p 8 Rods 15 Faraday MultiplierOut N e 9 Filament 4 Repeller p E A HA 3 Source Y E PA A A 1 10 Source2 2 Mult HV x y 13 14 Pirani 11 Focus 1 Mult LV 12 BA Out Figure 40 Flange Pin Out Extorr Inc 307 Columbia Road New Kensington PA 15068 57 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 1 5 Creating Screen Captures Screen Captures of the VacuumPlus window may be made using only the Print Screen key on your keyboard and the Paint program that is included with the Windows operating system These pictures may be saved as
101. ting capacitor values for the ultra sensitive electrometer are set at the factory for optimum performance and should not be changed without consulting with the factory 6 8 5 Total and Partial Sensitivity The total and partial pressure sensitivities are factory set and should only be reset if trusted secondary pressure standards are presented to the probe In general the sum of the partial pressure peaks should roughly equal the total pressure When adjusting these calibration numbers remember that total pressure is only displayed at the end of a scan It is therefore important to setup for a scan which completes about once per second Extorr Inc 307 Columbia Road New Kensington PA 15068 23 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 8 6 Diagnostics The Diagnostics box allows the user to place a password to unlock the information contained in the Diagnostics Tab See 6 14 6 9 Mass Table Tab zm The system may also be setup in a single or multiple ion monitoring mode for use in leak detection or process monitoring This is done by placing ion information into the Mass Table folder tab Just fill in the mass to charge ratio of the ion to be monitored in the mass column A description may be used such as Hydrogen for mass 2 A graph color for each mass may be selected from a drop down menu invoked by double clicking the left mouse button on the cell Dwell times may be set wit
102. torr com Extorr Inc WWW extorr com Appendix E Troubleshooting and Service sccsscscsccssssssssssssssssccccssssssessssees DU I T LEOUDICSBOOUDBDP 6 Sores aves voe seve Eee E SR ERE Eee en ee E EUER CE EI UENIRE ni eU E EEER E EE EU EEIRE AE RES 50 E 1 1 Switch to a Known Good Configuration File ooooccnoncnnncccnccnnncnnncnonnnncnnncnnncnnnncnnocnnncnnccnnonencnnnenenenos 50 E 1 2 Confteure VacuumpPlIus tor ro UE UA as 50 BA Set Parameters TOr LEOUDIESDOOLURBO esos beepers como a PR d 54 BELA pxamine Output Tab Parametros 56 E45 Creatine Screen C 3piUTOS dotes 58 E23 A euis oris den dos ones ced duoc O cM pu m d emi 60 b 2 2 Filaments Open Burned Out uoo seal s erm ei ED abr M um RETRUR dua Ete ei EUREN eus M ius 61 E 2 3 Source 1 Shorted to Vacuum Chamber Ground rores eee rn eese nnn rens 62 E 2 4 Source 2 Shorted to Vacuum Chamber Ground ricino comicas trees aereo rea rae ideas 63 E25 Focus Shorted to Vacuum Chamber Ground sre eur eter aaa 64 E 2 6 Repeller Shorted to Vacuum Chamber Ground ooocccccnnnnnnnnnnnnnnnnnnnnonnnnnnnnnnnnnnnnnonnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnoss 65 E 2 7 Filaments Shorted to Vacuum Chamber Ground sese nnne nennen enne ener nnns 66 B28 Filament SBotted to SOUICe aaa 67 E 2 9 Repeler shorted to SOUECE da 68 E 2 10 Repeller Source 1 and Focus 1 Shorted Together ooococonccnnncncnncnnncnnccnnccnncnnncnnncnnnonanoc
103. ts These are the parameters which control the width of the mass peak As resolution is increased the peak widths are decreased Decreasing the resolution allows more ions through the quadrupole and increasing the resolution allows less Therefore peak heights may also be controlled by the resolution settings Quadrupole tuning is somewhat an acquired art The more the user plays with different tunes the more adept he will become at achieving customized purposes We again emphasize that for 99 of RGA operations the factory tune is more than adequate Remember you can go back to this tune by reopening the factory configuration file under the Configuration tab Extorr Inc 307 Columbia Road New Kensington PA 15068 45 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix D Options and Spare Parts Filament lon Gauge and lonizer Assembly XTFIGI 1 200 00 OBSOLETE use XTIONIZER XTDUALFIL lonizer assembly for use with dual XTIONIZER filaments XTDUALFIL 200 00 Dual thoria coated iridium XTDUALFIL filament must use with 90 00 2 3 4 Inch CF Nipple 5 0 Inches between Flange Faces N500 100 00 Used to install analyzer in a vacuum system where there is insufficient internal clearance XTPR100 eo Probe 1600 00 men ee ll Probe 2600 00 XTPR200 XT200Prbe 2100 00 XTPR200M XT200MProbe 2900 00 XTPR300 XTS00Prbe 2600 00 XTPR300M
104. up tor Leak DE Dol cs oes oui oto eau aida 24 6 10 CUED UTS Lana 25 O TT Plot Labio e Reds 26 6 12 Prmit Labs obi CEP ll en ehe E li Ln vel Foi hx e Rene 26 6 15 Los abans 27 LA DICTU TI esa REINO 28 LS AIM PR ULT TD TA 28 6 16 Use with Multiple X TS VSCOM iia Han eo Eee eva ea Eno ee Uva e eda eor e eee go E eR ETMN dS 31 6 17 The Degas Mode Te M 31 Li WISIN IICA ETO E D TL Seryicino the RGA EOE esscesdeczesssvssstscscacceausescsssestaczesssvssseacssacccaususcsusastaccesscusseusassaccesusescssbes 32 TA Jonizer Dual Filament Replace Menta ii 32 8 Return Procedure o000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000 36 Appendix A First Mass A 37 Appendix B Gauge Sensitivity to Differing Gases e eeeeeeee eee eee LO D T PUB ATG AUC ea ERU EE E EAE DEREN ADI NUES dO ENN 40 BZ LON Gause Corrections aire iai ena puede a erp dedi RP IS IRAN 40 B 3 Determination of Partial Pressures cccccccccsscssccccccccccccccccccccccccccccccccccccccccccccccccccccces 41 Appendix C Manual Tuning of an RGA e eee eee e eee eee ee eee ees ee eee eee FI Appendix D Options and Spare Parts c eeeee eee e ee eee eee e e eee eee eeeee Extorr Inc 307 Columbia Road New Kensington PA 15068 2 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support ex
105. us Operational Folder Tabs and how to copy the Factory Configuration File from the CD to your computer E 1 1 Switch to a Known Good Configuration File Load your last known good Configuration file or the Original Factory Configuration File that came on the Extorr CD with your RGA System The Configuration File is stored in volatile memory in the CCU and must be downloaded every time that power to the CCU is first applied See the FirstTimeRgaStartUp avi Instruction Video also on the Extorr CD for information on copying the Original Factory Configuration File from the CD to your computer NOTE If you load the Original Factory Configuration File you may have to change the Serial Port setting on the Communications Tab Wait for the Configuration File Download to finish and the RGA to start scanning If necessary switch to the Mass Sweep Mode To change modes first select the Operating Parameters tab and then choose Mass Sweep from the Mode drop down menu then click on the Apply button E 1 2 Configure VacuumPlus for Troubleshooting Prepare for troubleshooting by setting the Extorr VacuumPlus Software to display the Mass Sweep Graph and the Outputs Tab When the VacuumPlus Software is started only the Mass Scan or Mass Table Graphs are displayed the Operational Folder Tabs are hidden Click the Graphics button to switch to the split screen display that shows both the Mass Graph and the Operational Folde
106. ut your probe installation is most likely OK If not recheck the port inside diameter and port flange trueness to 90 degrees The probe requires a port and or nipple with an inside diameter of at least 1 375 inches If the filaments are open this will require a new filament assembly Extorr Inc 307 Columbia Road New Kensington PA 15068 1 1 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 4 4 Connect the Command and Control Unit CCU Now attach the CCU to the back of the probe being careful to match up the flange pins to the socket on the CCU The CCU should slip fairly easily onto the flange unless flange pins have been bent Improper alignment may cause pins to bend further so do not use excessive force Hand tighten the CCU mounting bolts and the CCU will be firmly attached to the probe These hand tightened mounting bolts give electrical mechanical and thermal stability to the unit 4 5 Attach the RS232 Cable and Power the Unit Attach the RS232 cable to the CCU and to any unused COM port of your windows operated computer A single computer can run multiple CCUs We require the operating system to be Windows 2000 or XP The power supply may now be attached to the CCU and plugged into a wall socket Some computers no longer support the nine pin COM port standard In these cases the USB port may be used in conjunction with a USB to Serial adaptor These adapters are now inexpensive an
107. ut 64 mm long and opens into a larger chamber When mounted in this way the Probe Ionizer and the electrical connections are far enough away from the Vacuum Chamber that short circuits are very unlikely See the figure below Tubel D 1375 Min Vacuum Chamber Probe A ric 0 to 2 112 lt Clearance of at least 6 875 Preferred Probe Mounting Figure 55 Preferred Probe Mounting Arrangement Extorr Inc 307 Columbia Road New Kensington PA 15068 77 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 4 2 Mounting the Probe Using a Vacuum Nipple If the Probe must be mounted in a long close fitting vacuum nipple choose the length so that the lonizer Spacer Rings are not in the connection between the nipple and the vacuum chamber A nipple that is 5 inches about 127 mm or less in length will put the Ionizer Spacer Rings inside the Vacuum Chamber If there 1s a slight misalignment the spacer rings will touch the vacuum chamber wall and keep the connecting wires and the Ionizer far enough away to prevent a short circuit Vacuum Nipple Length 5 inches or less l k Probe sya NE Vacuum Cham ber lonizer Spacer Rings Inside Vacuum Chamber Port Probe lonizer Completely Inside Vacuum Chamber Probe Mounted in Short Vacuum Nipple Figure 56 Probe Mounted with a Short Vacuum Nipple Extorr Inc 307 Columbia Road
108. vious to the reader this device can produce tremendous amounts of data Care should be taken not to store too much or too little Only the user can answer what is too much Single or multiple ion measurements may also be stored in an XML file and or be streamed into another program The user sets the time interval between measurements recorded in the Mass Table discussed in section 6 9 An alternate method of taking ASCII data out of the program is given in section 6 13 Extorr Inc 307 Columbia Road New Kensington PA 15068 15 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com 6 VacuumPlus Software The VacuumPlus Software uses the latest Microsoft Foundation Class techniques to support the most current Windows and Internet functionality This includes XML data structures and streaming XML This allows the Extorr system to offer the greatest possible compatibility with modern software programs and the World Wide Web The basic VacuumPlus window consists of pressure readouts a graph and a file of operational folders which allows the user to setup the Extorr make measurements and to customize both look and operation of the system 6 1 Starting up By default the software comes up displaying the Pirani and ion gauge measurements the filament status and a graph of either an analog mass spectrum or a trend line of single ion measurements A push of the graphics
109. will need to be replaced E 3 8 Sensor Temperature The Sensor Temperature displays the temperature at the electrical feed through pins of the Quadrupole Probe When power is first applied the Sensor Temperature will be about equal to the ambient room temperature and will increase to about 40 C after operating for about an hour Extorr Inc 307 Columbia Road New Kensington PA 15068 72 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com E 3 9 Source 1 Current The Source 1 Current is a measurement of the electron current in milliamps that arrives at the Ion Source Grid When NOT in the Degas mode and with the Filament Activation Switch set to ON this reading should be about 50 of the Filament Emission setting The sum of this current and the Source 2 Current should be roughly equal to the Filament Emission control setting on the Operating Parameters tab The factory default setting for the Filament Emission control is 2 0 mA If Source 1 is shorted to the Vacuum Chamber Ground and the Filament Activation Switch is set to ON the Source 1 Current will be 0 mA and the Filament Light Bulb Icon will show a Red Dot with an X across it after several complete Mass Sweeps E 3 10 Source 2 Current The Source 2 Current displays the electron current in milliamps that arrives at the B A Gauge section of the Ionizer
110. y carefully bend the wires away from the Quadrupole Frame to remove the short circuit Do not bend the wires too far or they might short to the vacuum chamber wall Also check for adjacent wires shorted to each other If necessary bend the wires away from each other to remove the short circuit Use an Ohm meter to check for an open circuit gt 20MQ with CCU disconnected between Quadrupole Frame and all six wires Also check for shorts between adjacent wires See Section 4 3 Appendix E of the User s Manual Extorr Inc 307 Columbia Road New Kensington PA 15068 85 TELEPHONE 1 724 337 3000 FAX 1 724 337 8322 EMAIL support extorr com Extorr Inc WWW extorr com Appendix F Electron Multiplier Installation The Extorr Multiplier Upgrade Kit consists of an Electron Multiplier and a High Voltage Power Supply module The Electron Multiplier mounts on the high vacuum side of Quadrupole Probe Flange and the High Voltage Power Supply is installed inside the Command and Control Unit F 1 Unpack the Shipment Carefully unpack your Multiplier Upgrade Kit The shipment includes these components 9 Electron Multiplier in Sealed Plastic Bag 10 High Voltage Power Supply Module 11 4 40 Nut for Power Supply Module 12 Glove 13 Copper Gasket If your shipment does not have all of these items call Extorr Inc at 724 337 3000 If anything appears to have been damaged in shipment contact the shipper as well The Electron Multiplier is seale

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