Miniature Linear Stages (M-)MFN
Contents
1. EA Newport Corporation shall not be liable for damages when using the product OO DA sige mee eS e Modification of the product Ge Se ve age ee Gy e Using modified connector or modified or not supplied cables Coy See 7 k P Ya Gy e Connecting this product to non CE equipment Ce aN SA Ox OO a Ni a Ne a Ne ro Na Ni No Ni ro No i No Ne oo i i No i i Ne No Ne Ne x EDHO0166En1030 01 03 iv Newport M MFN Miniature Linear Stages Warnings WARNING The translation of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and reques2. EOR Limit Mechanical Zero m Stage Travel Range Motion Direction End of Run and Mechanical Zero are TTL type 5 V 5 2 mA max Use of the Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Use appropriate TTL type receivers GY Newport EDH0166En1030 01 03 6 M MFN Miniature Linear Stages 5 6 Feedback Signal Position Encoder 1 Phase A Encoder Phase A Encoder Phase B Encoder Phase B e Direction o Y of Sro Direction Direction lt lt lt Motion Direction The incremental sensor operates following the photoelectric measurement principle with a disk including slides When the sensor shaft turns the sen sor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector gt pains SSS SS Newport User Stage Encoder Phase A Pin 19 gt eS Encoder Phase A Pin 23 l K Encoder Phase B Pn 20 7 Output Signals gt Encoder Phase B_ Pin 24 L Y Y gt n Pin 15 1 Pin 25 D Encoders Pin 22 ji i amp Sensors F 1 ov Power Supply AD Newport 7 EDH0166En1030 01 03 M MEN Miniature Linear Stages 5 7 Pinouts
3. Miniature Linear Stages USER S MANUAL GH Newport www newport com M MFN Miniature Linear Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part This warranty is in lieu of all other warranti
4. The 25 pin Sub D connection for the M MFN stages is given in the follow ing table 25 EDH0166En1030 01 03 DOOOOGCOOGCOeES 0000000000000 UE16PP UEI6CC M MFNPP M MFNCC 1 Phase la 1 N C 2 N C 2 N C 3 Phase 1b 3 N C 4 N C 4 N C 5 Phase 2a 5 Motor 6 N C 6 Motor 7 Phase 1b 7 Motor 8 N C 8 Motor 9 N C 9 N C 10 N C 10 N C 11 N C 11 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero 14 Shield Ground 14 Shield Ground 15 Connected to 5 V 15 Connected to 5 V 16 0 V logic 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 21 Encoder Power 5 V 21 Encoder Power 5 V 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 25 Connected to 0 V 25 Connected to 0 V AD Newport M MEN Miniature Linear Stages 6 0 Connection to Newport Controllers 6 1 AD Newport Warnings on controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operat ing the instrument and pay attention to all written warnings and cautions WARNING Disconnect the po
5. millimeters CAUTION The working surface flatness directly influences stage accuracy and per formance 8 2 Interfaces Disassembling Disassemble the top plate fixed on the carriage of the stage with 4 CHc M3 screws O 1 4 x 79 36 x 20 mm AD Newport 13 EDH0166En1030 01 03 M MFN Miniature Linear Stages Disassemble the base plate fixed with 4 CHc M3 screws on 1 4 x 79 36 x 20 mm 8 3 Mounting on Working Surface Stage on the right side fasten the stage on the working surface by 4 CHc M3 screws O 1 4 x 79 36 x 20 mm 8 4 Disassembling Make steps of Mounting on Working Surface chapter in the opposite order AD EDH0166En1030 01 03 14 Newport M MEN Miniature Linear Stages 8 5 Interface Plates Mounting Make steps of Interfaces Disassembling chapter in the opposite order 8 6 Assembly Pattern Stacking M MFN Series stages either together or with other Newport stage is easily accomplished Below are example schematics of the assembly pat terns used These interfaces are accessed by unscrewing and removing the upper and or lower plates of the stages see dimension drawing lt 50 gt 6 holes M3 thd depth 4 Yella 2 ole gt 18 typ lt Bane 4 Dimensions in millimeters 9 0 Dimensions T holes M3 CLR 20
6. 03 M MFN Miniature Linear Stages 6 2 Connection On each stage is represented a label which indicates its name its serial number and the motor it is equipped with ex UEI6PP ENCODER 5V MOTOR UE16PP MFN25PP SIN Stepper Motor U 30VDC I 0 25A WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors labeled Motor any time prior to power up with the supplied cable assemblies WARNING With MM series controllers damage to stage may occur if the stage is not the same type as shown on driver label located near the stage interface connector Check that the option number specified on this label correspond to the number indicated in the driver module options table for your stage WARNING Vacuum compatible stages have to be configured if running with an ESP series controller 6 3 Cables All our M MFN stages are delivered equipped with a 1 5 meter cable with a 25 pin Sub D connector so they can be directly connected to our con trollers drivers of MM or ESP series Dimensions in inches millimeters Locking E E Knobs 41 DS 25 Pin Sub D 2 13 10 3 Connector 54 lt 2 32 59 gt Disconnected 4 1 104 for a static cable 6 54 166 for a cable in motion with the stage WARNING This cable is shielded
7. a workstation and cannot be easily dismantled please contact our After Sales Service for further instruc tions Repairing CAUTION Never attempt to disassemble an element of the stage that has not been specified in this manual Disassembling a non specified element can cause a malfunction of the stage If you observe a malfunction in your stage please immediately contact us to make arrangements for a repair CAUTION All disassembly attempts or repair of stage without authorization will void your warranty Calibration CAUTION It is recommended to return your stage to Newport once a year for a recalibration to its original specifications AD 16 Newport Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems AD Newport 17 EDH0166En1030 01 03 M MEN Miniature Newport Linear Stages CE Declaration of Conformity We declare that the accompanying product identified with the C mark meets all relevant requirements of Directive e 73 23 CEE for Low Voltage Compatibility e 89 336 EEC for Electromagnetic Compatib
8. correctly For a correct operation make sure to lock the connector ground continuity provided by cables AD EDH0166En1030 01 03 10 Newport M MFN Miniature Linear Stages For applications where the standard 1 5 meter cable included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard 25 pin sub D connectors They are available in 3 m MMCABLE 3 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the stages Dimensions in inches millimeters EB m ESS 25 Pin Sub D 38 25 Pin Sub D 2 1 Male Sic lt Female 54 OLP p 2 4 62 gt This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 volts com ing from the controller through the long cable AD Newport 11 EDH0166En1030 01 03 Miniature Linear Stages 7 0 Connection to Non Newport Controllers WARNING Newport takes no re
9. der 22 aE wa F E 0V Encoder 0V Encoder Connector i Connector Connector Cap ee Cap Cap EDH0166En1030 01 03 Open collector type with a 5 6 V protective Zener diode End of Run or Mechanical Zero Newport jH Max l 16 mA Stage Max V 5 6 V K 56V eee If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 Encoder are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 AD 12 Newport M MFN Miniature Linear Stages 8 0 Mounting 8 1 Stage Mountings WARNING Before to use a M MEN stage it is imperative to fix it e directly on a rectified working surface from holes located on the mounting plate e on another stage directly or with a mounting interface but in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage e directly e removing the plate on the top of the stage MEN A holes 8 32 thd 1 0 25 4 4 holes M4 thd O 98 25 ao MFN N eg 2 Spacing M MFN 2 holes M4 thd 1 97 50 spacing x Top Plate on the Carriage 4 holes 29 7 4 2 98 x 1 0 75 8 x 25 4 Dimensions in inches
10. ecsacundelbesaceyesndanteccessertie ndndeaeaneetets 4 40 Drive csccguuwdigcnsiennnn cine 5 4 1 Stepper Drive Version essesessessssessesessesessesessesossessesessesessesessesessessesessesese 5 4 2 DE2Motor Drive Versi n nesceieni eni Nnnea a eee 5 Di MGR iia cesestisdisttsivcnsiniccisisieaticaaniiasddasibetenieniinitinnsiodednnitasttaddivvecbadds 5 5 1 UEIGPP Motor Characteristics aununmenmasonnanana 5 5 2 Command Signals for the Stepper MOtOYD cccscecseeseseeseeseessesseenees 5 5 3 UE31CC Motor Characteristics ccccccscsssssssssssssessessscssessssssecsessneenes 6 5 4 Command Signals for the DC MOtor cccccceseessesceeseeseesseeseeseesseseesees 6 59 Sensor Posio Meenen aR 6 5 6 Feedback Signal Position ssesessesessessssessesessesessesessessssessssessesessesessesesee 7 T E an lo AE AEE N E A 8 6 0 Connection to Newport Controllers 0 000 0 000 9 6 1 Warnings On controllers aecsesrsin aeiia 9 6 2 CONNECHON erensia enar ai E REEE EEEE ER ETa 10 63 gt Cables isaiicisissaseseidlelndibcts E A e En ana asta EEE a EROE 10 7 0 Connection to Non Newport Controllers 12 AD Newport iii EDH0166En1030 01 03 M MEN Miniature Linear Stages 8 0 Mounting ijicscicscaicrcinnianiaamaaimaiuanun 13 8 1 Stage Mountings 000 cece cecseessecseeesseeeseeeeeceseeeeecseaenececeseceeeeseeeeeeeenseensees 13 8 2 Interfaces Disassembling ss sscis desiciecdidasid
11. erature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before mov ing the stage Failure to do so may damage the cable and cause an elec trical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specifica tion control every year AD EDH0166En1030 01 03 vi Newport M MFN Miniature Linear Stages Miniature Linear Stages M MFN 1 0 Introduction This manual provides operating instructions for the stage that you have purchased in the M MEN Series e M MFNPP e M MFNPPV6 e M MFNCC REMARK Vacuum compatible stages to 10 Torr In this case max speed and load capacity have to be divided by two M MFN miniature linear stage RECOMMENDATION We recommend you read carefully the chapter Connection to electron ics before using the M MEFN stage QD n Newport 1 EDH0166En1030 01 03 M MFN Miniature Linear Stages 20 Description Designed for space limited applications and compact multi axis assemblies MFN Series linear stages supply very high resolution single axis translation in a
12. es expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings AD EDH0166En1030 01 03 ii Newport M MFN Miniature Linear Stages Table of Contents Warranty cronain R E E sabe ce eaaneeneedeenaivaseene aussie ii TADIS Or CONTEM Seana iiataee n eae eE A e A e EE EE eea iii Warnings sisccissiv cei cates e E EK EE REREN E RR vV Cations oss Soave saetan ss deveesseusstased a a aa ea dad cos aean ee naaa EA aenea vi 1 0 IMtPODUCHON isis scidicdivasescniinatnidiiaieiniandadinnmwane 1 2 0 Description isisisijsciidnccniisasindaiaicnnniisasonnns 2 ZA Design Detail nrerin n a 2 3 0 Characteristics 2 0 0 0 ccccceesesseseeseesesseeseseeseeseenesneseenees 3 Sel Definitions ene E E E E E 3 3 2 Mechanical Specificatii Si 33 cssisgcaiiiaaiiiass erieiaacsaeeierensaca 4 3 3 Load Specification Definitions 0 0 0 cece ccsscesseceeeeeseeeneeeaeeceeeeeseeeeenaes 4 3 4 Load Characteristics and Stiffness eneessssseesseesesssssressessresesseesressreees 4 B D Stage WEIGHS vscsescondecdesvecesscdendetcesssar
13. ility Compliance was demonstrated to the following specifications EMISSION Radiated and Conducted Emission in accordance with relative prescription to the EMC NF EN61326 1 Standards for measurement lab and control equipment IMMUNITY Radiated and Conducted Immunity in accordance with relative prescription to the EMC NF EN61326 1 Standards for measurement lab and control equipment SAFETY CEI 1010 1 safety standards for measurement lab and control equipment a cay Jean Marc DELAHAYE Quality Director Zone Industrielle 45340 Beaune la Rolande France
14. low cost motorized package Typical applications for this stage are fiber optic alignment laser diode research and inspection systems Components mount to the top surface of the stage via tapped mounting holes Modular stage design facilitates easy assembly of MFN Series stages into multi axis configurations A miniature DC or stepper motor housed within the carriage of the stage actuates motion via a backlash compensated lead screw and nut system Precision ground double row ball bearings ensure accurate linear travel To meet high positioning requirements a motor mounted rotary encoder delivers better than 0 1 pm resolution End of run limit switches prevent bearing damage from accidental over travel For optimal performance we recommend the use of our ESP or MM series motion controllers The M MFN Series stages are supplied with a 3 meter cable for connec tion to our motion controllers 2 1 Design Details Base Material Stainless Steel Bearings Double row linear ball bearings EDH0166En1030 01 03 Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch 0 5 mm Reduction Gear 141 1 Feedback M MFNPP Motor mounted rotary encoder 48 pts rev M MFNCC Motor mounted rotary encoder 64 pts rev Limit Switches Mechanical Origin Uses motor side limit for homing typically lt 20 pm repeatability Motor M MFNCC DC servo motor UE16CC M MFNPP 2 phase stepper mot
15. nsitivity Minimum motion that a stage can achieve Our stages and our kinematic chain are conceived in such a way that sensitivity is better than the resolu tion of the encoder Resolution The smallest motion an encoder fixed to the stage can measure Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made sys tematically with our test equipment in an air conditioned room 20 C Each stage is tested with a laser interferometer A linear cycle with 21 measures on the travel and 4 cycles in each direction gives a total of 164 points 3 EDH0166En1030 01 03 M MEN Miniature Linear Stages 3 2 3 3 3 4 3 5 EDH0166En1030 01 03 Mechanical Specifications Travel Range mm 8 25 Resolution um 0 055 DC Brush Servo 0 074 Stepper motor Minimum Incremental Motion pm 0 2 Unidirectional Repeatability um 1 Reversal Value Hysteresis ym 3 On Axis Accuracy um 10 Maximum Speed mm sec 0 3 Roll prad 60 Pitch prad 100 Yaw prad 100 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction
16. of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 20 D Cantilever distance Load Characteristics and Stiffness Cz N 50 Cx N 10 1 Cx N 10 kax urad N m 60 kay prad N m 100 Q Off center load Q lt Cz 1 D 20 D Cantilever distance in mm Cz Normal center load capacity on bearings Cx Direct load capacity on X axis Cx Inverse load capacity on X axis kax Angular stiffness Roll kay Angular stiffness Pitch Stage Weights Weights indicated into the below table are average values for stages with their cable installed M MFN08 lb kg 0 7 0 3 M MFN25 lb kg 0 9 0 4 The weight variation between drive units is not very significant AD 4 Newport M MFN Miniature Linear Stages 4 0 Drive 4 1 Stepper Drive Version Stepper motor driven stages are offered in one half step drive version M MFNPP Half Step Drive Is used for stepper motors when 1 pulse emitted by electronic corre sponds to theoretical physical motion of 1 2 of a full step of the motor Stepper Motor Performance Specifications Resolution Speed Mot um mm sec M MFNPP 0 074 0 3 UE16PP 4 2 DC Motor Drive Version One DC motor driven configuration is available M MFNCC DC Motor Performance Specifications Resolution Speed Mot um mm sec one M MFNCC 0 055 0 3 UE16CC EW Motor 5 1 UE16PP Mo
17. or UE16PP 1 Full step 2 Encoder pulses Cable Length 1 5m Vacuum Compatibility Vacuum compatible versions are available up to 10 Torr M MFNO8PPV6 and M MFN25PPV6 AD Newport M MEN Miniature Linear Stages 3 0 Characteristics 3 1 AD Newport Definitions Specifications of our products are established in reference to ISO 230 stan dard part II Determination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effect All Newport motion electronics can compensate for linear accuracy errors by step encoder correction The relation between absolute accuracy and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Slope x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target posi tion when approached from opposite directions Minimum Incremental Motion Se
18. sponsibility for improper functioning or damage of a stage when it is used with any non Newport controllers WARNING Newport guarantees the compliance of the M MFN translation stages only if they are used with Newport cables and controllers Nevertheless the figure below indicates the recommended wiring when a M MEN stage is used with non Newport controllers Sub D25 male Connection Connection Connector M MFNPP M MFNCC 9 a 1 N C N C 10 1 NC N C 11 Lor 1 N C N C 12 i t N C N C 1 h OO Phase 1a N C 2 i 1 N C N C 3 fit sn mo a gt Phase 1b N C 4 i i i 1 N C N C A intl i x 5 Phase 2a Motor 6 N C Motor 7 T 1 E 1 Phase 2b Motor 8c rad roa 1 N C Motor Y 1 if Y 4 i i 1 Ground Ground it my 1 6 ae e OV logic OV logic 3 Mechanical Zero Mechanical Zero 9 E Encoder Phase A Encoder Phase A 23 l l j 1 Encoder Phase A Encoder Phase A 20 r Encoder Phase B Encoder Phase B 24 m m Encoder Phase B Encoder Phase B 5 I ci r m 1 Connected to 5 V Connected to 5 V 25 c L L _ 1 Connected to 0 V Connected to 0 V E i f End of Run End of Run 8 L m gt End of Run End of Run 21 L m 1 5 V Encoder 5 V Enco
19. ssaiesiesati nasa i 13 8 3 Mounting on Working Surface cccecscccsscesseeeseeeceeesecseeceseeeeeeenseensnes 14 S A DisasSem Ding os oer cesteeaisedeavaiesecisdseiesoctevsldcerdea es austel EE 8 5 Interface Plates Mounting 8 6 Assembly Patterson irns einean aA dapeceidsadutevecebeniaess 9 0 RMA NG sve prececstcntccsn nenscestnnsartans tp cemeatantnvercecwinnlnnns 15 10 0 Maintenance isos heen de diaimncudsamatiaiimerasion 16 10 1 Malint Main Gis se ciceessiies Yecadalen tees ieescasetaeastevstechceseteveusvenstentedvads Prsvasteiede ted 16 10 2 Repairing visicasicndenvisstiieadacivg adie NEEE 16 10 3 Calibration eee eane Ea ENEE EAEE EEEN EE EREA 16 DOE VIGO FOTIT ogenen e A E A A AE 17 E dh C E a of KG Ie S PARES es OO OG We declare that the accompanying product identified with the C mark meets oe N all relevant requirements of Directives Q a eye Si KI e 73 23 EEC for Low Voltage Compatibility eo s f Eak lt 2 BY e 89 336 EEC for Electromagnetic Compatibility Q pa OS D ox Generic standard 7S S f 9 6S Emission NF EN61326 1 for measurement lab and control equipment a a Om 6S Immunity NF EN61326 1 for measurement lab and control equipment S gt w 6S Safety EIC 1010 1 safety standards for measurement lab and control oO A co oe equipment oe se se F 2 g ie
20. t repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit AD Newport v EDH0166En1030 01 03 M MFN Miniature Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in a vacuum environment less than 102 Torr CAUTION Do not place this stage in a location affected by dust oil fumes or steam This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temp
21. tor Characteristics Motor Angle by Step Current Resistance Inductance Newport A Q mH Utilization 0 25 Half Step UE16PP 15 12 5 5 5 0 182 1 phase at once D 1 phase at once 0 25 A 2 phases at once 0 18 A by phase 5 2 Command Signals for the Stepper Motor Phase 1a Fe 1 1 f 1 Q e Phase 2a samin pasan mm Direction q o vu e w n s gt o 1 1 1 a 1 1 L i 1 1 1 i Gi Jo Phase 2b naer lea a Direction Direction Displacement Direction AD Newport 5 EDH0166En1030 01 03 M MFN Miniature Linear Stages 5 3 UE31CC Motor Characteristics Mechanical Nominal Armature Motor Power Voltage Resistance WwW V Q UE31CC 0 31 12 115 5 4 Command Signals for the DC Motor Motor v oo Motor v Motor v po Displacement Direction Direction lt Displacement Motor v D o Direction lt ame o Sro Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 5 Sensor Position Home Position Origin lt at Center of Travel Range EOR Limit E i
22. wer plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e Ifyou suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture gt 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle con tact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts 9 EDH0166En1030 01
23. x 36 spacing A O 2 HOLES THD A 5 mm DEEP C SPACING mE 2 177 3 a P 45 1 26 p 350 2 E E 89 Yj 2 oy 4 HOLES THD A 5 mm DEEP i O Ow ON 1B Ix 4 HOLES 0 291 7 4 E 1 97 50 ON M 1 00 x 2 98 25 4 x 75 8 eu Le 2 48 63 gt A 1 26 A 3 32 y j y r G D gt a 2 17 55 gt Thread Dimension in mm Model Metric A B C D E MFNO8 8 32 10 20 295 0 43 M MFN08 M4 25 0 50 0 75 0 11 0 MFN25 8 32 10 20 362 0 77 M MFN25 M4 25 0 50 0 92 0 19 5 AD Newport 15 EDH0166En1030 01 03 M MEN Miniature Linear Stages 10 0 Maintenance 10 1 10 2 10 3 EDH0166En1030 01 03 RECOMMENDATION It is recommended to contact our After Sales Service which will be able to define the appropriate maintenance for your application Maintenance The M MFN stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and manipulated with precaution PRECAUTIONS The M MEN stage must operate and be stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your stage to our After Sales Service after every 2000 hours of use for lubrication If your M MEN stage is mounted on
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