tousimis® Automegasamdri®
Contents
1. Recommended o BLEED Meter Valve Connector 5 gal capacity TABLE TOP 42in 107cm Length 2006 t tousimis Page 3 CHAPTER 2 Installing Automegasamdri 9 15B Series B NOTE Always order LCO tanks with Siphon Dip tubes BOC gas suppliers refer to 99 896 purity grade as 2 8 grade Air Products gas suppliers refer to 99 8 purity grade as CP grade NOTE It is best to route Exhaust Tubing to facility Exhaust Conduit and attach via 1 4in male hose barb to conduit Exhaust Conduit 1 4in Male gt Hose Barb Page 4 PREPARATION OF INSTALLATION SITE Insist on clean surfaces Minimum table top space requirement of approximately 42 107cm width x 30 76cm depth should be allotted for the Automegasamdri 915B Series B and SOTER Condenser An additional 24 61cm x 36 92cm of floor space for the LCO tanks and ceramic heater if necessary needs to be designated at install site See p 3 Use bone dry LCO with a Siphon Dip Tube tank only Never use pressurized LCO with Helium or any other high pressure head substitute gas tanks Use only LCO with minimum 99 8 purity Secure LCO tank according to your facilitys safety protocol Tank pressure typically reads 800psi 45 at room temperature The amount of LCO in tank is best monitored with a LCO tank scale See p 3 Typical nominal LCO tank weights for Net 50lb 23kg LCO tanks e Full tank 140 170lbs 63 5 77kg2. for repairs to our Service Department we will send a written authorization for shipment Parts and labor are free of charge shipping charges are to be paid by customer insure instrument at current list price DO NOT ship instrument via U S Mail Use UPS FedEx or other qualified shippers only Our mailing address tousimis research corporation 2211 Lewis Avenue Rockville Maryland 20851 USA Our shipping address tousimis research corporation Attention Instrument Service Department 2211 Lewis Avenue Rockville Maryland 20851 USA Telephone 301 881 2450 Fax 301 881 5374 Email techsupport tousimis com REPACKAGING FOR SHIPMENT After authorization for repairs is received see warranty this general rule may be followed in repackaging a tousimis instrument for shipment a Attach identification tag to instrument Tag should indicate owner name the model and 4 digit serial number of the instrument and the type of the service or repair desired b Secure chamber lid over a properly seated O ring and tighten 8 knurl nuts evenly Do not send the high pressure hose or electrical power cord c Place instrument in original container if available If original container and packaging material is not available new packaging may be purchased from tousimis If original container is not used d Wrap the instrument in bubble plastic e Protect panel faces and instrument sides with foam or appropriate non abrasive cushioning ma
3. consumption will vary depending upon the PURGE Time setting You should be able to use either Pos 2 10min or Pos 3 15min on the PURGE Timer for most sample processing The typical consumption rate to PURGE 150ml of alcohol at PURGE Timer Position 2 10 min would be the following COOL LCO Consumption 3 5lbs 1 6kg process run CHAMBER LCO Consumption 4 Olbs 1 8kg process run Page 25 Chapter 5 A The SOTER Condenser quietly captures and separates the exiting waste Alcohol and CO from the process chamber The SOTER Condenser vents CO gas via the VENT OUTLET This is ideally routed into your facility exhaust conduit The waste alcohol is routed out of the SOTER Condenser s drain valve into either a waste alcohol collection container or a solvent drain SOTER Condenser Page 26 res CO Gas Vent Outlet Drain Valve Waste Alcohol Drain CO Gas Vent Outlet _ ENERGIZE POWER SMi PRIOR TD LEE TM POWER OFF AFTER LAST RUM GF DAY Power Switch Power Cord Exhaust Connect to 915B 2006 amp tousimis Maintenance and Support RE E E E E E E E E E SSS 8770 511 915B OPTIONAL ACCESSORIES Catalog Description 8760 02 Knurl Nut for Automegasamdri 915B 8760 40 5 AMP Fuse 8770 10 Lamp 120 60Hz volt 8770 32 High Pressure Hose 5 ft 8770 33 High Pressure Hose 10 ft 8770 HPS High Pressure Hose Custom Length Up To 10m 33ft 8784 LCO Filter Housing for 8
4. the final check out However should you wish to change the rate of flow feel free to readjust the valves to suit your particular parameters Keep in mind that the incoming LCO into the chamber controlled by the FILL adjust should always be greater than the outlet of LCO controlled by the PURGE VENT adjust during the PURGE mode The BLEED rate needs to average no more than 100 150 psi minute in chamber pressure reduction A Flow Meter has been provided for occasional BLEED rate adjustment Do I need to open close the Metering Valves NO There is no need to Close or Open the Metering Valves These functions are carried out by the Internal Solenoid Valves The Metering Valves are only for adjusting the Flow Rate of LCO or gaseous CO Should the LCO tanks be secured YES It is recommended that The LCO Tanks be placed onto LCO Tank Scales trc 8770 54 and secured as per your facility safety regulations Monitor the net LCO used When you approach 50 LCO consumption it is recommended that you replace the LCO tank with a new one Always keep several spare tanks of LCO in reserve Do I need an In line regulator between the tank and the 915B NO A regulator is not needed between the LCO tank and the 915B The 915B is designed to simply operate from LCO direct tank pressure Is the chamber heated during BLEED YES During the BLEED cycle as well as the VENT cycle the 915B will maintain the chamber temperatur
5. with a new tank turn Chamber Power back ON and initiate new run as per normal Why can I only use 50 of the net amount of LCO and not 100 of the net LCO within a new LCO tank LCO is lost during the process for 2 reasons 1 As the liquid level drops in the LCO tank the gaseous head space created as the liquid level drops is taken up via gaseous CO molecules 2 Siphon aka dip tubes does not reach the absolute bottom of the LCO tank What should I do if the initial COOL time is suddenly much slower than normal The majority of the time the reason is lack of Liquid CO The SAMDRI is designed to COOL the process chamber via Liquid CO and not gaseous CO Reasons that typically explain gaseous CO delivery 1 The Liquid CO level has dropped below LCO tank siphon aka dip tube and only gaseous CO is being delivered Note The best way to monitor LCO is via weight and not pressure It is best to monitor tank weight via a LCO tank scale trc 8770 54 2 Gas supplier has delivered Gaseous rather than Liquid CO by mistake This can happen as the 2 tank types may look identical and the delivery loading Gas Company staff accidentally delivered the wrong tank type to your site The simple solution is to replace the existing LCO supply tank with a new LCO tank and initiate COOL mode If the same problem persists please contact customer service at tel 301 881 2450 or via email at techsupport tousimis com
6. 784A Filter Element 8784A Replacement LCO Filter Element for 8784 Filter Housing 8784B O Ring for 8784 Filter Housing Seal 8784 05 Gasket for LCO Tank Connect 8783 LCO Filter Adapter Kit Teflon O Ring for Automegasamdri 915B 8770 53 Power Cable three prong 120V 60Hz 8770 54 LCO Tank Scale w Remote LCD Display 4001b capacity 8770 55 LCO Tank Heater 8770 56 Step Down Transformer 220V 110V 8770 57 Step Up Transformer 100V 120V 8770 70 Chamber Lid for tousimis Automegasamdri 915B Series B 8770 83A Internal 0 5um 316SS Particulate Line Filter 8770 83B ipie di Filter Element for LCO T Filter or External 8768A HF Compatible Wafer Holder for 6 Diameter Wafers 8768F HF Compatible Wafer Holder for 5 Diameter Wafers 8768B HF Compatible Wafer Holder for 4 Diameter Wafers 8768C HF Compatible Wafer Holder for 3 Diameter Wafers 8768D HF Compatible Wafer Holder for 2 Diameter Wafers 8768G HF Compatible Wafer Holder for 1 Diameter Wafers 8768E HF Compatible Chip Holder for 5 x 10mm Square Die Contact tousimis at tel 301 881 2450 or trc tousimis com for current pricing and availability 2006 tousimis Page 27 Chapter 5 WARRANTY The Automegasamdri 915B Series B is warranted to the original purchaser for two years from date of purchase against any defect in materials or workmanship Should you have any questions please feel free to contact us If it is determined that the unit should be returned
7. Hose to trc 8784A ONLY Samdri Operating pressure not to exceed 1000 psi Page 20 2006 C tousimis Maintenance and Support LCO Filter Element Installation 8784A After all of the pressure is safely bled from high pressure line unscrew Oil Water Filter Housing by hand P dt Et _ 4 ZA o Place new LCO Filter Element 42487844 into lower Oil Water Filter Housing Let gravity hold element in place Carefully lower Oil Water Filter Housing over replacement element 74487844 2006 tousimis E L H L EM 1 ou oca e oo E H TAR Position LCO Filter Element 8784A into center of lower Oil Water Filter Housing firmly O Ring seats properly Open main tank valve and check for leaks Page 21 Chapter 5 LCO T Filter Element Installation 87 70 83B m Top view of correctly installed T Filter Install a new T filter element 8770 83B into center of T filter housing NOTE Do not over tighten T Filter Cap a 2 APP Pam E E 2d eS MU Fen a all au d f E t E 7 SIG Hand tighten T filter cap Use wrench to tighten the T filter cap firmly Open LCO tank valve and check for leaks Page 22 2006 C tousimis Maintenance and Support 2006 tousimis FAQ Are the Metering Valves pre set from the factory YES All Metering Valves See p 16 are factory set during
8. How frequently should the LCO filter Element trc 8784A be replaced The Filter Element 8784A should be replaced with every 500lbs 230kg of LCO consumption Page 24 2006 tousimis 2006 tousimis Maintenance and Support What can I do to check that the BLEED rate is properly set should it appear unusually slow The flow rate should read 85 90 SCFH at the onset of the BLEED cycle This setting should yield at average of approximately 100 150 psi min reduction in pressure This pressure reduction flow rate is the desired decompression rate between 1300 480 psi to avoid condensation You may periodically measure the BLEED rate if desired via the Flow Meter supplied by attaching the Flow Meter to the CO exhaust outlet via a short approximately 2 piece of Tygon tubing 100 SCFH Flow Meter with 2ft tygon tubing The Flow Meter is provided to periodically check BLEED onset flow rate This rate should be 85 90 SCFH at onset of BLEED mode immediately after tousimis equilibrium period This does not have to be measured with each process run The 915B has had the BLEED rate adjusted during final check out prior to shipment Periodic BLEED rate adjustment necessary only if either faster or slower than normal BLEED rate suspected by operator Consult tousimis at tel 4301 881 2450 or via email at techsupport tousimis com with any questions How much LCO will be consumed during a typically process run The LCO
9. LY COOL BLEED CO Exhaust Outlet 3 LCO Supply Connects 1 2 open end wrench NOTE To attach LCO high pressure hose end fittings to the 915B LCO connects you will need the 9 16 and a 1 2 open end wrenches supplied First slide 1 2 wrench over 1 2 fitting as shown in the photo The 1 2 wrench will be used to _ j hold the connect assembly F LCO Supply Connects steady as you gently LY tighten the high pressure hose end fitting snugly onto each of the LCO Supply Connects using the 9 16 wrench DO NOT OVER TIGHTEN Insert the Filter Element 8784A into the tousimis Combination Filter 48784 before you open the LCO tank valve The 0 5um filter has been pre installed See schematic furnished p 17 18 2006 C tousimis Page 5 Chapter 2 Connecting SOTER Condenser to Automegasamdri 915B Attach the insulated Exhaust Connect Tubing to the EXHAUST CONNECT of the 915B Connect the other end to the SOTER Condenser EXHAUST CONNECT Use 7 16 open end wrench provided to make these connections Steps 1 6 DO NOT OVER TIGHTEN Page 6 2006 tousimis Installing Automegasamdri 915B Series B Connecting COOL BLEED Exhaust Hose to 915B Attach the 10ft White exhaust tubing provided to the COOL BLEED Exhaust outlet on the Automegasamdri 915B Series B NOTE jasamdri 915B egasamdri 915B It is best to route CO gas Exhaust Tubing to fa
10. Meter Valve er 2006 tousimis Page 33 APPENDIX B 7 Carefully remove the chamber lid from Automegasamdri 915B It is normal to see little bubbles in the intermediate fluid i e I D A methanol This is due to carbonization y m Ji P B i 5 II Fp d EB Lift O Ring and Backing Ring from the chamber gland using a razor blade edge Be careful to prevent any scratching of metal chamber surface with razor blade catousimi NOTE Separate Backing Ring from O Ring Completely remove Backing Ring and O DO NOT DISCARD The Backing Ring is reusable Only O Ring from the Automegasamdri 915B Ring needs to be replaced chamber BACKING RING Page 34 2006 C tousimis Leak Correction Protocol Replacing Chamber O Ring Thoroughly dry all chamber surfaces and gland prior to installing a new chamber o ring Gland Face Surface Install a new O Ring into the Automegasamdri 915B chamber gland on top of Backing Ring 9 Close chamber lid to the Automegasamdri 915B and secure it as per normal 2006 tousimis Page 35 APPENDIX B 10 Turn Power Switch OFF This will take the Automegasamdri 915B back out of the Manual Mode POWER Fus ON OFF 5A 120V GROUNDED DUTLET ONLY is 11 Wait 15 seconds prior to turning Power Switch back ON This will power the Automegasamdri 915B back up into the normal Auto Mode of operation POWER FUSE
11. O Ring from the Automegasamdri 915B Ring needs to be replaced chamber Re Install Backing Ring into Install a new O Ring into the Automegasamdri 915B chamber gland Automegasamdri 915B chamber gland on top of Backing Ring 2006 C tousimis Page 31 APPENDIX B Leak Correction Protocol 1 If a leak is detected during initial FILL mode it will typically be noticed between the 400 600 psi range COOL FILL PURGE HEAT BLEED VENT 2 Turn OFF the Power Switch located on right hand side of Automegasamdri 915B This will isolate the chamber from any liquids coming in or out by immediately closing all solenoid POWER FUSE ON OFF 5A 3 Wait 15 seconds and then simultaneously push BLEED switch while turning Power Switch ON as shown below This is how the Automegasamdri 915B can be placed into a Manual Mode of operation Page 32 2006 Stousimis Leak Correction Protocol 4 Hold finger on BLEED switch for 15 seconds iSURE P51 TEMPERATUAL LAMP COUL FILL PURGE HEAT 4 L 5 Release the BLEED switch and press again BLEED switch LED will go ON E ii 4 mom BLEED LIII M ans 6 Now the Automegasamdri 915B is in the Manual Mode Open the BLEED meter valve to accelerate the decrease in chamber pressure to 0 psi See illustration p 15 This decreases the wait prior to opening the chamber lid FILL PRESSURE PSI BLEED
12. ON OFF 5A 120V GROUNDED OUTLET ONLY 12 The VENT switch LED will illuminate COOL FILL PURGE HEAT BLEED VENT Page 36 2006 tousimis Leak Correction Protocol 13 Press the VENT switch once as soon as the VENT LED is illuminates when the power is turned ON This will initiate the VENT LED to blink ON and OFE This is the Standby Mode prior to initiating a run i Fo 1 J COOL FILL PURGE HEAT BLEED 14 Prior to initiating another process run remember to reset the BLEED metering valve to its original Pre Set position Reference Checkout Data Sheet BLEED Meter valve setting 15 Press the COOL Switch to initiate another process run Operate as per nominal from this point forward ISSURE PSI 2006 C tousimis Page 37 APPENDIX C C 1 Turn the power switch OFF and unplug 120V power cord from the Automegasamdri 915B Purge Line Filter Maintenance NOTE FOWER FUSE The Purge Line Filter j may fill with downstream MEMS device debris from the process chamber It is recommended to replace filter element with a new one every 3 6 months depending on usage 120V GROUNDED OUTLET ONLY 2 Locate the External Purge Line Filter on the right side of the Automegasamdri 915B pURGE LINE FILTER m n aye ly TO TT PR EE Y n 3 Using an adjustable wrench carefully un tighten the Purge Line Filter Cap Upon loosing Cap unscrew with your hand t
13. TABLE OF CONTENTS Chapter 1 Automegasamdri 915B Series B Overview Automegasamdri 915B Series B CPD Dryer Automegasamdri 915B Series B Setup Overview Chapter 2 Installing Automegasamdri 915B Series B Preparation of Installation Site Installation of the Automegasamdri 915B Series B Chapter 3 Operating Automegasamdri 915B Series B Operating Automegasamdri 915B Series B Chapter 4 Illustrations Purge Timer Overview Metering Valve w Vernier Handle Setting Example HF Compatible Insert View Chapter 5 Maintenance and Support Regular Maintenance Schedule Chamber Care LCO Filter Assembly LCO T filter Element Installation FAQ Spare Parts List Warranty Repackaging for Shipment Appendix A Backing Ring and Chamber O Ring Installation B Leak Correction Protocol C Purge Line Filter Maintenance Illustration Index User s Notes Check Out Data Sheet Warranty 11 16 16 17 18 19 20 22 29 27 28 28 29 32 38 41 42 CHAPTER 1 1 Automegasamdri 9 15B Series B Overview CLEAN ROOM UNIT auromegasamen 915 B a Q TILL 9 Automegasamdri 915B Series B System includes Automegasamdri 915B Series B Dryer SOTER Condenser HF Compatible Wafer Chip Holders Chamber Inserts and the LCO Filter automegasamdri 9 1 5B Q ET EC IGS tousimis Catalog 8785C Automegasamdri 915B Page 2 2006 Stousimis Automegasamdri 915B Series B Ov
14. Tare of tank 90 120lbs 41 54 5kg e Most of the time you may use 50 of the net LCO weight within the tank e t is good practice to have spare LCO tanks stored in reserve in case a tank runs out of LCO during mid process A properly grounded 120V 50 60Hz outlet should be located within 4ft of install site Two 1 4 male hose barbs should be installed into the exhaust conduit within 10ft of installation site to connect CO gas exhaust lines One exhaust line is from the COOL BLEED Exhaust while the other is from the SOTER Condenser Vent Exhaust INSTALLATION OF THE AUTOMEGASAMDRI 915B Series B Attach the HIGH PRESSURE HOSE with the pre installed 28784 LCO Filter Assembly onto the CHAMBER SUPPLY LCO Inlet Connect No Teflon tape is required Next attach the HIGH PRESSURE HOSE without the LCO Filter Assembly onto the COOL SUPPLY LCO connect No teflon tape is required Gently tighten the High Pressure Female Connector using the two open end wrenches supplied one on the hose and the other on the Inlet Stop at the feel of first resistance re tighten if necessary should it leak See Connecting High Pressure Hose to Automegasamdri 915B Series B on p 5 2006 tousimis Installing Automegasamdri 915B Series B Automegasamdri 915B Series B Inlet Outlet Connect e Exhaust Connect Chamber LCO Supply Cool LCO Supply to SOTER Condenser COOL BLEED CHAMBER COZ EXHAUST LCO2 SUPP
15. aintained below 10 C COOL FILL PURGE HEAT BLEED VENT FILL MODE 11 After the 8 minute FILL mode expires the 915B will automatically advance into the PURGE mode This will be indicated by the illumination of the PURGE LED COOL FILL PURGE HEAT BLEED VENT PURGE MODE 12 At this point of the cycle the 915B will remain in the PURGE mode for the duration of the Purge time pre set by the operator via the PURGE TIMER See p 16 The waste alcohol exiting the 915B Chamber Exhaust connect hose will be routed directly into the SOTER Condenser The exiting solid CO collected into the SOTER Condenser will sublime into CO gas and exit via SOTER Condenser VENT outlet into facility exhaust conduit Page 13 Chapter 3 13 Upon Completion of the PURGE mode the 915B automatically advances into the POST PURGE FILL mode in which the process chamber fills with LCO for an additional 4 minutes This mode is visualized by both the FILL and PURGE LED s illumination COOL FILL PURGE HEAT BLEED VENT POST PURGE FILL MODE 14 Upon completion of the POST PURGE FILL mode the PURGE and FILL LEDs will turn off and the HEAT LED will illuminate The HEAT mode is the stage in which the samples are carried through the Critical Point Both the pressure and temperature will steadily rise Consult Check Out Data Sheet in the appendix of this 915B User Manual BEEHBE COOL FILL PURGE HEAT BLEED VENT 1 e eye te
16. cility Exhaust Conduit and attach via 1 4 male hose barb to conduit Exhaust Conduit 1 4 Male Hose Barb H White COOL BLEED 1 4 ID Tubing should be free of kinks which could block passage of rapidly exiting noisy gas or solid flakes of CO Exhaust Tubing Exhaust Connect Outlet to SOTER Condenser COOL BLEED CO Exhaust Outlet CHAMBER LCO Supply Connect O COOL LCO Supply Connect 2006 Stousimis Page 7 Chapter 2 SOTER Condenser Exhaust Connect Overview e 120V Power Cord Power ON OFF Switch for SOTER Condenser and 2A Fuse Exhaust Connect to Automegasamdri 915B Vent Outlet Attach 10 White Exhaust Tubing and route to Exhaust Conduit Waste Alcohol Drain Valve Exhaust Connect to SOTER Condenser Automegasamdri 915B Attach 3ft length of clear Condenser drain tubing and lead to waste alcohol collection container or solvent drain OQ NOTE Do not make any hard 90 Bends in Exhaust Connect Automegasamdri 915B e Either a gradual S curve or a gradual L bend is desirable Do not over tighten fittings on either end of Exhaust Connect Check for leaks during initial process run after completing all connections Tighten as necessary DO NOT OVER TIGHTEN U S Patent 16 493 964 covers SOTER CONDENSER Page 8 2006 tousimis Installing Automegasamdri 915B Series B Connecti
17. dingly the 9 position will give you the maximum purge time capable of 45 minutes The Purge Time setting is best determined by the individual process engineer General Purge Time guidelines for various chamber alcohol levels are the following e V chamber 10 minute purge time e 15 chamber 15 minute purge time e 34 chamber 20 minute purge time NOTE Actual purge time can vary greatly depending on your sample type in combination with the FILL and PURGE metering value adjust positions Page 12 2006 C tousimis Operating Automegasamdri 915B Series B 2006 tousimis 9 After initial warm up press the COOL button The COOL LED light will go on and the VENT light will turn off The chamber will begin to COOL As the chamber temperature slowly begins to drop you may hear LCO circulating through the unit The 915B will automatically continue cooling until the chamber temperature reaches 0 C 5 C At this point the cooling will automatically stop COOL FILL PURGE HEAT BLEED VENT COOL MODE 10 Press the FILL button and the 915B will begin to fill the process chamber with LCO From this point forward the Automegasamdri 915B Series B will automatically advance through all process modes sequentially until completion During the FILL mode the LCO will enter and fill the chamber for 8 minutes You may hear the COOL cycle ON OFF during the FILL mode as the chamber temperature is automatically m
18. e automatically above 319C How do I replace the 787844 filter elements To replace 487844 filter element loosen and remove lower part B by turning counter clockwise Remove old element and replace with new See illustration p 17 18 How do I secure the chamber lid Hand tighten the chamber lid with the 8 Knurled Nuts supplied using the Spanning Wrench Use even and steady pressure on all Knurl Nuts alternatively Never use a non compatible tool or excessive force What should I do if a leak occurs during the FILL mode from the chamber lid Please reference appendix section Automegasamdri 915B Series B Leak Correction Protocol Page 23 Chapter 5 Should I use High Pressure Head tanks such as Helium or other high pressure gases NO Never use high pressure tanks Typical proper pressure range for LCO tanks are between 750 900 psi Higher pressures may damage Automegasamdri 915B Series B and or cause failures Can I use lower purity alcohol or acid in chamber NO only use ultrapure alcohol ethanol methanol I P A etc in chamber NEVER ANY ACID Contact tousimis prior to using any other intermediate liquids What should I do if all the LED s begin to blink during a process run This indicates a CRITICAL POINT PASSAGE FAILURE due to either non sufficient temperature or pressure Typically this results from LCO running out mid process Turn Chamber Power OFF Replace empty LCO cylinder
19. erview Automegasamdri 915B Series B Setup Overview o Remote LCD readout of LCO relocationg SOTER Condenser or Tank Weight emptying Carboy e LCO Cylinder ON OFF Valve Waste Alcohol Clear Drain Tube O routed to Carboy 1 4 ID 3ft External tousimis Combination Carboy VENT to Exhaust Conduit 1 Filter 8784 Hood or Outdoor P d b o T Filter w 0 5um Element D 120V 60Hz Properly Grounded High Pressure Hoses Outlet from Wall or Transformer 147 5 Ib 147 5 Ib Q 10ft long other lengths available upon request Surge Protection Power Strip for ooog ooog 915B and SOTER Condenser O COOL BLEED Exhaust Tube 1 4 ID to Exhaust Conduit Hood or Tare Weight Varies Consult your Outdoor 10ft LCO supplier or usually stamped on tank Q Condenser CO Vent Outlet Tube 1 4 ID to Exhaust Conduit Hood e Tank Heater Controlled by or Outdoor 10ft Thermostat next to base of LCO tank If necessary O Condenser Drain Valve Always maintain OPEN position during 15 Syphon Dip Tube process run except when i T5 Lco Tank Scale trc 8770 54 NOTE At room temp 20 C 24 C tank pressure Avg 800 psi 5 LCO Tank Approximately 50 Usable o Purge Timer Adjust O Purge Line Filter 0 5m COOL Meter Valve Exhaust Connect to SOTER Condenser rire Meter valve Power ON OFF Switch and Carboy PURGE VENT Meter 5A Fuse for Waste Alcohol Valve Collection 120V 60Hz AC Power
20. et Set Up 7 Metering Valve w Vernier Handle Setting Example 16 Overview 2 Plugging Power 10 Power Panel 10 Purge Timer Overview 16 Setting Purge Timer 12 Setup Overview 3 Star Pattern 12 Automegasamdri 915B Series B Operational Mode BLEED Mode 14 COOL Mode 13 FILL Mode 13 HEAT Mode 14 PURGE Mode 13 POST PURGE FILL Mode 14 VENT Mode 11 15 Backing Ring Overview 29 Chamber Care 20 Chamber Inserts 19 Chamber O Ring Overview 29 Replacing 34 Chamber Seal Installation 29 Removal 31 Connecting Automegasamdri 915B Series B and SOTER Condenser 6 Flow Meter 25 LCO Filter Assembly 17 18 LCO2 T Filter Element Installation 22 Pressure Gauge 0 psi 15 Purge Line Filter Element 40 Installation 39 40 Removing 38 39 SOTER Condenser Exhaust Connect Overview 8 Connecting Exhaust Tubing 9 Connecting Drain Tubing 9 2006 tousimis Page 41 User s Notes Ham G Page 42 2006 C tousimis
21. ltra pure alcohol into the chamber 5 At this point fill the process chamber with enough high purity alcohol I P A Methanol or Ethanol to cover your wafer s or die NEVER EXPOSE CHAMBER TO ANY ACIDS 6 Carefully and quickly transfer your wafer s from your wafer container into the 915B process chamber For best results minimize any exposure time to air 7 Carefully align and place the chamber lid on top of the chamber Page 11 Chapter 3 Star Pattern Tightening Sequence Use your hand to evenly tighten the 8 knurl nuts around the circumference of the chamber lid Then use the spanning wrench provided uniformly tighten each knurl nut in a Star Pattern Tighten the knurl nuts in the numbered sequence as shown in the photo in previous page Repeat this rotation Star Pattern sequence until the knurl nuts are unable to tighten further NOTE A Star Pattern is the sequence necessary to properly secure chamber lid prior to initiating a bM Begin gradual tightening of knurl nuts with spanning wrench at starting position 1H 8 Once the chamber lid is secured it is time to set the PURGE timer located to the right of the push button switches See p 16 Positions on the purge timer are calibrated at 5 minute intervals Setting Purge Timer Setting the purge timer indicator arrow to the 1 position will give you a 5 minute purge time The 2 position will give you a 10 minute purge time Correspon
22. mdri 915B Series B 18 At approximately 380 480 psi the 915B will automatically advance from BLEED mode to the VENT mode The BLEED LED will turn off while the VENT LED will illuminate COOL FILL PURGE HEAT BLEED VENT VENT MODE 19 It is not necessary to readjust the PURGE VENT metering valve flow rate The chamber should then come to atmospheric pressure in approximately 5 minutes in this VENT mode 20 At this point the chamber lid may be removed by alternatively and evenly loosening all of the knurl nuts using the spanning wrench in a Reverse Star Pattern Pressure Gauge should be in the 0 psi range Never attempt to force opening Pressure Gauge 0 psi A Minimal residual pressure still remaining B Chamber pressure drop to 0 psi Chamber is safe to open 2006 tousimis 21 The wafer s or chip s can then be removed from the chamber for further processing Seal the chamber with the lid to help keep it clean and moisture free 22 Turn the 915B power off using the ON OFF SWITCH located on the right hand side of the tool See p 10 You will notice that it will take a few seconds for the VENT LED to turn off 23 Turn the power strip power switch into the OFF position when finished processing your samples This will shut down the power to both the SOTER Condenser and the 915B Page 15 CHAPTER 4 Illustrations Purge Timer Overview 1 5 min 72 10 min 3 15 min e
23. ng SOTER Condenser Exhaust Tubing Connect the white 10ft length of Condenser Exhaust Tubing to the Condenser Vent Outlet Step 1 and cover the Vent Outlet with the provided Vent Outlet Insulate Step 2 Secure VENT Insulate with 2 x 8in wire ties and cut excess Step 3 4 VENT Insulate SOTER Condenser 8in Wire Tie SOTER Condenser SOTER Condenser Connecting SOTER Condenser Drain Tubing The 3 length of clear Tygon Condenser Drain Tubing should be placed onto the condenser s drain hose barb The clear hose will allow you to visually see the alcohol draining into your waste alcohol collection container or solvent drain NOTE Drain Hose Barb Condenser The drain tubing may be Drain Tubing routed to either a waste alcohol collection container or solvent drain as per your facility guidelines Drain valve may be left open during process run if drain tubing routed to proper collection system 2006 tousimis Page 9 Chapter 2 Automegasamdri 915B Series B Power Panel 120AC 50 60HZ test your ground ON OFF Locate the Power ON 1 OFF 0 socket switch on the right hand side panel of the 915B SWITCH near 5A fuse make certain it is in the OFF 0 position down O 5 AMP SLO BLOW FUSE AC WHITE NEUTRAL 120V GROUNDED OUTLET ONLY o GROUND GREEN AC BLACK HOT Plugging Power of Automegasamdri 915B Series B NOTE In winter mo
24. nths it may be beneficial to use a small heater ceramic type only s near the base of the LCO tank to ensure proper flow of liquid CO See illustration on p 3 LCO tank temperature should mM N ce The Surge Protector switch is used to protect both the SOTER Condenser and the rank temperature due to Automegasamdri 915B from any voltage surges external tank storage during winter months will result in lower tank Plug both the 915B and SOTER Condenser into Surge Protector power strip pressure Plug the Surge Protector power strip into a 120V properly grounded outlet Page 10 2006 C tousimis CHAPTER 3 Operating Automegasamdri 915B Series B 2006 tousimis 1 Turn power switch ON ON OFF power switch is located on right side panel See p 10 Green LED on VENT button will illuminate This indicates the power is ON and the unit is in standing by in the VENT mode COOL FILL PURGE HEAT BLEED VENT VENT MODE 2 Let 915B stand for 3 5 minutes This initial wait period will allow all internally heated plumbing components to warm up 3 Open process chamber by carefully lifting Chamber Lid and placing aside onto soft surface Lint free wipes provide a convenient surface to place chamber lid 4 Now press the VENT button once The VENT LED will begin to blink This indicates that the VENT solenoid is closed and in the STAND BY mode You may now introduce u
25. o remove Purge Line Filter Cap Page 38 2006 Stousimis Purge Line Filter Maintenance 4 There is a metallic gasket enabling the seal see picture below Please be careful not to drop the Gasket to the floor Metallic Gasket 5 Carefully remove old Purge Line Filter and discard Slight side to side motion may be necessary to unseat Filter Element 6 Install a new Purge Line Filter Element Cat 8770 83B paying attention to relocate the existing Metallic Gasket to insure a leak free seal Metallic Gasket 2006 C tousimis Page 39 APPENDIX C Purge Line Filter Element Purge Line Filter Metallic Gasket Purge Line 0 5um Filter Element Cat 8770 83B 7 Place Filter Cap back onto filter housing and begin to re assemble by hand Tighten Purge Line Filter Cap with an adjustable wrench DO NOT OVER TIGHTEN PURGE LINE FILTER NOTE Snug Filter Cap without excessive force as mounting bracket damage could result It is recommended that the Purge Line 0 5um Filter Element be replaced every 3 6 months with regular use Change more frequently with heavy use Please contact tousimis Technical Support with any questions Tel 301 881 2450 9am 5pm EST M F Fax 301 881 5394 Page 40 2006 amp tousimis ILLUSTRATION INDEX Automegasamdri 915B Series B COOL BLEED Exhaust Hose Connect 7 Dryer 2 High Pressure Hose Connect 5 Inlet Outlet Connect 5 Inlet Outl
26. simis before using any non recommended intermediate fluids or process any non traditional CPD application material s NOTE BE SURE TO KEEP CHAMBER O RING GROVE AND FACE CLEAN AND DRY AT ALL TIMES 2006 tousimis Page 19 Chapter 5 LCO Filter Assembly THE tousimis LCO FILTER ASSEMBLY 8784 Q Q Figure Shown Below Installation Instructions 1 Uncouple CGA 320 S S nut from LCO tank Close Tighten main tank valve Crack S S nut and bleed line pressure d Make certain there is no pressure within the high pressure hose 2 Install filter element as shown in the diagram 787844 e Push element steadily into upper housing orifice until slight resistance is felt Screw housing Part B onto upper housing Part A Be sure that teflon O Ring is in place Rotate to Tight 3 The 0 5 pm T Filter Element 8770 83B is pre installed eem into I Filter Change LCO Filter Element 287844 with every 500 lbs of LCO consumption change T Filter Element 8770 83B every l year to insure proper filtration LCO Filter Element 8784A Oil Water Filter Housing LCO Tank w Syphon Tube e Main LCO Tank Valve T Filter with T Filter Element 0 5 um Gasket Teflon or Nylon 8770 83B CGA 320 S S Nipple O CGA 320 S S Coupler Nut Oil Water Filter Housing w Q Teflon tape LCO Filter Element CAUTION USE tousimis LCO FILTER ELEMENT 8784A High Pressure
27. tc to 45 min at the 9 position Each position refers to a 5 minute increment Metering Valve w Vernier Handle Setting Example NOTE The numerical markings are arbitrary numerals for the sole purpose of meter valve adjustment position reference 0 00 Setting 0 50 Setting 1 00 Setting Page 16 2006 Stousimis Illustrations Chamber Inserts NOTE The chamber inserts provide wafer size process flexibility They also hold the wafer s or chip s in place during the process run ec tousim e tousimis 4 CHAMBE 2 CHAMBER 2006 tousimis Page 17 CHAPTER 5 Maintenance and Support Regular Maintenance Schedule Recommended Manual trc Catalog Maintenance Activi Frequency Reference Number Keep Chamber Clean and Dry Always p 19 N A 0 Repco CO tank After 50 net Contact local tank consumption supplier Replace LCO Oil Water Filter on LCO Filter Assembly 5001b LCO Use 8784A Replace T Filter Element on LCO Filter Assembly 8770 83B Chamber O Ring 3 Months 8770 51 T 915B External Purge Line 0 5pm Filter 6 Months 8770 83B Depends on usage Page 18 2006 Stousimis Maintenance and Support Chamber Care NOTE Use Ultrapure Alcohols only i e I PA Methanol Ethanol Use minimum 99 5 purity Alcohols for best results NOTE Do not expose chamber to HF or any other Acids Do not use Acetone ACETONE Please consult tou
28. terial Use sufficient shock absorbing packing material around all sides of the instrument minimum of two double walled boxes are required for shipment BOX WITHIN A BOX AT 350LBS TEST STRENGTH f Use heavy duty shipping tape or metal bands to seal container g Mark shipping container with Delicate Instrument Fragile etc and insure it Page 28 2006 Stousimis APPENDIX A Backing Ring and Chamber O Ring Installation Backing Ring and Chamber O Ring Overview Backing Ring for Chamber O Ring for Automegasamdri 915B Series B Automegasamdri 915B Series B Chamber Seal Installation fae ti tousim Automegasamdri 915B Chamber with Install Backing Ring into the no seals Automegasamdri 915B chamber gland 2006 tousimis Page 29 APPENDIX A Chamber Seal Installation Automegasamdri 915B Chamber with Next carefully install a new Chamber Backing Ring O Ring on top of the Backing Ring Automegasamdri 915B Chamber with O Ring installed on top of Backing Ring Page 30 2006 tousimis Backing Ring and Chamber O Ring Installation Chamber Seal Removal Lift O Ring and Backing Ring from the chamber gland using a razor blade edge Be careful to prevent any scratching of metal chamber surface with razor blade euma re en tousimi NOTE DO NOT DISCARD Separate Backing Ring from O Ring Completely remove Backing Ring and O BACKING RING The Backing Ring is reusable Only
29. tousimis equilibrium is the point during the HEAT MODE critical point passage in which both the pressure 15 When the chamber pressure reaches and goes beyond 1072 psi it will stabilize in the and temperature are range of 1350 psi 5 As the temperature achieves 31 C the unit has achieved the maintained above the critical point and this is where the tousimis equilibrium cycle starts The HEAT LED will critical point within the begin to blink for the next four minutes indicating your 915B is in tousimis equilibrium chamber for a period of 4 minutes prior to advancing J a Li Li E COOL FILL PURGE HEAT BLEED VENT BLEED MODE 16 At the end of the tousimis equilibrium period the 915B will automatically advance into the BLEED mode The HEAT LED will stop blinking and the BLEED LED will illuminate 17 At this point you can measure the BLEED rate if desired via the 100 SCFH Flow SCFH Square Cubic Meter supplied by attaching the Flow Meter to the outlet of the COOL BLEED CO Feet per Hour Exhaust The BLEED rate has been factory pre set to decompress the chamber at a rate of approximately 100 150psi min The flow rate should read 85 90 SCFH at the onset of the BLEED cycle This setting should yield an average of approximately 100 150psi min reduction in pressure This pressure reduction flow rate is the desired decompression rate between 1300psi to 480psi Page 14 2006 tousimis Operating Automegasa
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