Tempe™ Manual Gen.2
Contents
1. Before shipping Tempe was calibrated and tested by Colnatec to meet the highest quality standards It is important that you take a few minutes to inspect the product to ensure that your equipment was not damaged or otherwise tampered with during transit Chapter 1 Tempe at a Glance 4 Tempe Subcomponents The sensor head features many sub components The usage of these components will be detailed in later sections 1 Sensor Head 3 Crystal Signal Cables 5 Cooling Tubes Houses quartz crystal Relays crystal Circulates forced air oscillation information through sensor head 2 Heater Control Cable Controls heater 4 Flange Acts as nearly air tight barrier sealing sensor head in chamber Tempe Base Subcomponents The sensor head features many base sub components The usage of these components will be detailed in later sections 1 SMA Coaxial Connection For crystal frequency y e measurement 4 4 2 LEMO Connection lt Mh 4 For heater control 3 Cooling Tubes Channels cool air into sensor head WARNING Extremely hot air exiting ehaust line when Mirage is active Chapter 1 Tempe at a Glance 5 Eon System Components 2 Eon and Accessories Tempe Eon ships with a variety of accessories Eon Designed for high temperature thin film coating process control With Eon Tempe can achieve and maintain any temperature within a range of 40 5009C and can even initiate a high2. temp self cleaning bake cycle that extends crystal life and reduces interruptions from crystal failure in a continuous process environment INSPECT PRODUCT CONDITION ON ARRIVAL Examine Eon for O any signs of physical damage that may have occured during shipping Make sure that the tamper evident labels are intact Before shipping Eon was calibrated and tested by Colnatec to meet the highest quality standards It is important that you take a few minutes to inspect the product to ensure that your equipment was not damaged or otherwise tampered with during transit WARRANTY LABEL If the warranty label has been tampered with O VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is important that you contact Colnatec immediately after receiving the product Chapter 2 Eon System Components 6 Mirage Y air cooling system As part of the Eon temperature compensation system this cooling accessory channels compressed cold air into the Tempe sensor in order to maintain consistent temperatures inside crystal compartment Mirage power adapter Combines Mirage power supply and relay cables Chapter 2 Eon System Components Power supply and cable Input 100 200 VAC 50 60Hz 2 A Output 24V 3 75 A 90W Max RS 232 extension cable Male to female serial cable USB to RS 232 adapter Connects RS 232 cable and PC Chapter 2 Eon Sy
3. Heater 5 12 14 19 21 26 29 30 36 Heater Control Cable 5 19 21 Initial Setup 33 Inputs amp Outputs 2 12 13 14 Index 37 L LEMO 5 19 20 30 M Mirage 7 Mock Crystal 15 P PC 8 12 24 Power Connecting 25 Power supply 8 R Refrigerant Free Air Cooling 11 Relay Cable 23 retainer ring 15 17 RS 232 cable 8 24 S SMA Coaxial Connection 5 Subcomponents 5 Support 26 32 33 34 System Configuration 31 T Tempe 6 9 13 31 Tooling Factor 35 Troubleshooting 26 27 28 U USB Adapter 24 W Warranty Label 32 Index 38 Copyright 2014 Colnatec All information contained within this technical manual and accompanying pages are copyright of Colnatec All rights reserved It is a breach of copyright if this technical manual is copied distributed or reproduced in whole or part using any means whatsoever without the prior written approval of Colnatec Colnatec gives no condition or warranty expressed or implied about the fitness of this technical manual or accompanying hardware product Colnatec reserves the right to make changes to this technical manual or accompanying hardware or design without notice to any person or company Colnatec shall not be liable for any indirect special consequential or incidental damages resulting from the use of this technical manual or the accompanying hardware or design whether caused through Colnatec s negligence or otherwise Copyright
4. Info September 2014 2nd generation 39
5. TEMPE self heating QCM user guide 2nd generation CACOLNA 01 O 12 12 14 14 15 15 18 19 21 21 22 24 26 26 27 29 29 30 Contents Chapter 1 Tempe Sensor at a Glance Tempe Subcomponents Tempe Base Subcomponents Chapter 2 Eon System Components Eon and Accessories Mirage Air Cooling System Chapter 3 Eon Inputs amp Outputs Eon Connectors Eon Inputs Eon Outputs Chapter 4 Hardware Connections Preparing Tempe for Chamber Chamber Installation Connecting to Tempe Chapter 5 Electronics Connections Connecting Tempe and Eon Connecting Hardware and Electronics Connecting Eon to PC Chapter 6 Troubleshooting Troubleshooting Advanced Troubleshooting Chapter 7 Specifications Hardware Electronics Contents 31 31 32 33 33 33 35 36 of Contents Contents Appendix A Tempe Eon System Tempe Eon System Configuration Appendix B Safety Handling amp Support About Tempe Inspection amp Initial Setup Warranty Appendix C Tooling Factor Appendix D Tempe Dimensions Index Tempe at a Glance This guide discusses assembly and proper care and handling of Tempe 2nd generation sensor with temperature control INSPECT PRODUCT CONDITION ON ARRIVAL Examine Tempe for O any signs of physical damage that may have occured during shipping Make sure that the tamper evident labels are intact
6. e accompanying Eon software CD into disc drive Follow prompts to install software onto PC 2 RS 232 to Eon Plug RS 232 connector into female serial port on rear panel Tighten integrated screws 3 RS 232 cable to USB Adapter Plug the other end of the RS 232 pm cable into the USB to RS 232 c i o adapter Tighten integrated screws z IE 4 Plug USB to RS 232 Adapter into PC Plug USB end of the USB to RS 232 adapter into PC Chapter 5 Electronics Connections 24 5 Connect Power to Eon Plug Eon power adapter into AC outlet Then plug DC connector into the Eon M 6 Start Eon Software Start Eon M software and follow i Loading the First Start setup procedure mg described in the Eon User we Manual available on the Eon aa software CD CA COLNATEC D WARNING If drivers are already installed simply update the drivers when installing software Use only the provided USB cable Ensure that the software has been fully installed before connecting the USB drivers Fully reboot the computer after the software installation to prevent drivers issues Chapter 5 Electronics Connections 25 Troubleshooting Symptom Cause Solution Broken Crystals Crystal not seated properly Make sure that the crystal is seated properly in the cap and retainer to avoid mechanical stress on the crystal when temperature rise Weak Crystal Reading Contact
7. e the threaded side of the retainer ring onto the corresponding threads of the sensorcap Tighten the retainter ring by turning the ring CLOCKWISE 6 Place cap onto corresponding threads of crystal compartment Turn CLOCKWISE until secure Chapter 4 Hardware amp Connections Chamber Installation 1 Remove copper gasket from packaging and thread onto sensor head 2 Fit gasket into circular groove on Conflat 3 Hold copper gasket in place while inserting sensor head into chamber feedthrough 4 Press sensor head and feedthrough flanges together Align bolt holes Apply bolts and plate nuts Tightening bolts compresses copper gasket between a sharp edge and a tapered groove thus creating a strong seal Chapter4 Hardware amp Connections 18 6 Access to Base Connections Once the bolt ring has been tightened into place user will have open access to all of the base connections on the Tempe See Page 5 for a complete list of all base connections and their purpose WARNING Hand tighten flange bolts before using wrench AN alternating among bolts and using a sequential torque pattern Over tightening flange bolts may cause microfractures to develop in copper gasket Seal may become weakened resulting in chamber leakage Connecting to Tempe 1 BNC Coaxial Cable to Position Tempe 3 Spin cable in place using cable 6 shaft until resistance is felt 6 c N Twisting cable sha
8. ft past point of C 2 resistance may damage cable Roll fingertip over connector to tighten 2 Heater Control Cable to Tempe The 4 pin LEMO connector provides heater control and RTD measurement To install push until la ES it clicks in place Br N Chapter 4 Hardware amp Connections 19 3 Mirage Cooling Line to Tempe The cooling line is connected to the Mirage via an insulated cooling tube Slide push to connect fitting 2 onto the 3 16 cooling pipe projecting from the Tempe M flange Featuring an interior detent cooling tube will snap securely in place WARNING Misaligned coupling of LEMO connectors can result in severe damage to Tempe N WARNING Length between the Tempe crystal compartment and the Eon should NOT exceed 30 inches 76 cm to avoid erratic noise levels in oscillation reading Chapter 4 Hardware amp Connections 20 Electronics Connections Connecting Tempe to Eon 1 BNC Coaxial Cable to Eon Slide coaxial connector onto BNC Sensor Input 2 4 4 ER il 2 Heater Control Cable DB 15 Connector to Eon Plug DB 15 connector into the Eon 15 pin male heater port dd In order to avoid erratic noise levels in oscillation reading length between the Phoenix crystal compartment and the Eon LT M SHOULD NOT exceed 30 inches 76 2 cm Chapter 5 Electronics Connections 21 ip WARNING The cable between Eon and the crystal sh
9. he advisable maximum acceptable length for this is one 1 foot or 30 cm TC Connection Receives temperature data Heater and RTD Input Output Connects to Tempe to control heating element Eon Outputs The Eon utilizes two 2 outputs Make sure the correct hardware is used with these outputs DB9 Connector Connects the 0 5 VDC output for the deposition source the 24 VDC Mirage and the relay control DB15 Connector Connects Eon to Tempe heater and RTD used to control the Tempe temperature Chapter 3 Eon Inputs amp Outputs 14 Hardware Connections Preparing Tempe for Chamber Removing Mock Crystal 1 Turn cap COUNTER CLOCKWISE to loosen and remove 2 Flip cap over to access crystal retainer ring Turn retainer ring COUNTER CLOCKWISE until loose 3 Remove retainer ring to access mock crystal Chapter 4 Hardware amp Connections 15 4 Remove mock crystal from sensor head cap rI 8 Er gt SZ Adding New Crystal 1 Rotate crystal carousel until the round opening appears above an LATS available crystal ff CDN 2 Place rear of sensor head against the opening SON W 0 ba er CN by 3 Flip crystal carousel and allow i TE crystal to drop into sensor cap Sen ETD housing hn Chapter 4 Hardware amp Connections 16 4 Use a plastic prod to adjust crystal position until crystal rests snugly in the crystal seat 5 Plac
10. mocouple BNG Sensor inputs Inputs Measures temperature Connects to sensor head via external using thermocouples oscillator 0 5 VDC amp Relay Output Connects the 0 5 VDC output for the deposition source the 24 VDC Mirage and the relay control Eon Back Power Input RS 232 Connects to Connects Eon to PC 24 VDC Always use the provided power input USB to RS232 cable LED Indicator Displays status Chapter3 Eon Inputs amp Outputs 12 N WARNING Make sure the correct hardware is used with Eon inputs and outputs See proper setup procedures in this manual and in the Tempe Eon quick reference guide WARNING _ Only the provided power supply should be used with Eon Not doing so will damage product and void warranty Make sure power supply has a 24 VDC Chapter3 Eon Inputs amp Outputs 13 Eon Inputs The Eon utilizes five 5 inputs Make sure the correct hardware is used with these inputs Power Only the provided power supply should be used with Eon Not doing so will cause hardware damage to Eon that will not be covered by warranty Ensure that the power supply has a 24 VDC ComPort Connect an RS232 cable to this port Always use the provided USB to RS232 cable BNC Sensor Inputs Eon has a built in oscillator Colnatec also offers an external oscillator for purchase The cable between Eon and the crystal should remain as short as possible to avoid noise T
11. n greater damage to the unit If you cannot resolve an issue please contact support colnatec com or call 480 634 1449 Chapter6 Troubleshooting 26 Advanced Troubleshooting Determining if Tempe RTD is faulty Measure the resistance between pin A and B e Expected Values 25C e RTD resistance between pin A and B 60 800 Determining if Tempe heater is faulty e Measure the resistance between pin C and D e Expected Values 25C e RID resistance between pin C and D 4 60 Orientation Mark Chapter6 Troubleshooting 27 WARNING Do not attempt to repair electrical problems Tampering with the Tempe electrical systems may result in electrical fire increased interference in crystal measurement and damaged ceramic insulators Chapter6 Troubleshooting 29 Specifications Chapter 7 Specifications Hardware KF40 KF50 CF275 180 Concentric designed to specification 3 16 Diameter Sensor Body 304 SS alumina insulators nickel alloy contact springs 304 SS screws Heater Aluminum nitride heater with tungsten traces Type K Thermocouple 304 SS Sheath 125 Crystal Cable Stainless steel covered high temp wire nickel plated copper wire conductor Internal Heater Power Cable High temp wire nickel plated copper wire conductor Length 4 to 32 depending on customer requirements Cross Section Able to be passed through a 2 75 ConFlat
12. nsure that your eguipment was not damaged or otherwise tampered with during transit About Tempe Heating a thin film sensor head can serve a variety of important purposes Some applications reguire elevated chamber temperatures Because it is able to match and maintain temperatures inside the chamber within a range of 50 500 C the Tempe can provide accurate readings from the very beginning of the process Other thin film sensors in this situation will always yield false readings as the initial temperature of the sensor head will always be in disequilibrium with the temperature of the chamber The unique ability of the Tempe to achieve extreme temperatures has the added benefit of extending crystal life indefinitely Utilizing a bake process that heats the sensor head in situ residual deposition material is burned away from the crystal In most instances depending on the type of material being deposited the crystal can be restored to a fully operational state This procedure both rejuvenates the crystal and reduces interruptions in a continuous process environment Inspection and Initial Setup Examine Tempe for any signs of physical damage Also make sure that the tamper evident labels are intact In order to ensure safe correct operation of your Eon please follow the step by step instructions presented in the Eon Quick Start guide included with your product Warranty Tempe is warranted to the original
13. ould remain as short as possible to avoid noise The advisable maximum acceptable length for the cable is one 1 foot 30 cm WARNING DO NOT allow operating temperature to exceed 500 C N Equipment damage will likely result Connecting Hardware and Electronics 1 Cold Air Output from Mirage to Tempe M Slide the 3 16 tube onto the push ante to connect fitting on rear of the NWL EWN Mirage Cooling System The 0 gt Mirage provides a maximum gt 4 A output of 28 C 50 F below the Lay 2 compressed air source 2 Compressed Air Input to Mirage esse Connect the Mirage to a filtered and oil free compressed air source NEE Air fittings may vary by country but require a 1 4 NPT female connection Chapter 5 Electronics Connections 22 3 Eon Supplies Power to Mirage through Power Module The 3 pin solenoid module provides NT power to Mirage Tighten integrated h J screw after mating to Mirage Pet The DB 9 connector on other end attaches to male I O port on Eon M 4 Connect Mirage Cable to Eon Connect 9 pin female side of Mirage cable to Eon I O port 5 Relay Cable from Eon to Mirage Part of the DB 9 connector cable bundle that plugs into the Eon I O port and relay provides a 2 wire interface for switching Chapter 5 Electronics Connections 23 Connecting Eon to PC 1 Install Eon Software onto PC Insert th
14. port 40 500 C 1x10 5 Torr AIS304 SS CNT TMP 2000 Rev 3 1 B 29 Chapter 7 Specifications Electronics 0 500 C 24 VDC 5 Amp 4 pin LEMO Standard 14 mm SMA Coaxial 30 Tempe Eon System Tempe Eon System Configuration Rendering illustrates basic connections of Tempe Eon system Eon software installed on Eon Controller TC cable j 6 Rel Mirage elay Source 2 Air Cooling 77 System J R emote oscillator Tempe Self Cleaning Sensor P J substrate source shutter Appendix A Tempe Eon System Appendix 31 Safety Handling amp Support Appendix WARNING All electrical components are to be considered extremely dangerous if tampered with in any way Colnatec is not liable for any injury resulting from product misuse modification or disassembly WARRANTY LABEL If the warranty label has been tampered with VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is mportant that you contact Colnatec immediately after receiving the product Appendix B Safety Handling amp Support 32 EXAMINE YOUR NEW TEMPE FOR ANY SIGNS OF PHYSICAL DAMAGE Before shipping your Tempe was calibrated and tested by Colnatec to meet the highest quality standards It is important that you take a few minutes to inspect the product to e
15. purchaser to be free of any manufacturing related defects for one year from the date of purchase Colnatec reserves the right to repair or replace the unit after inspection Appendix B Safety Handling 8 Support 33 Contact Colnatec Support 511 W Guadalupe Road Suite 23 Gilbert AZ 85233 480 634 1449 support colnatec com www colnatec com Appendix B Safety Handling amp Support 34 Tooling Factor Appendix Tooling de 100 ds 2 ba RR ds COS C Source Appendix 6 Tooling Factor 35 Tempe Dimensions Appendix 12 319mm 0 4 31 623 1 25in 31 623mm 1 25in Flange to Crystal Distance FCD 6 24 Tube Diameter 1 3 16 2 077mm 0 08in 4 99 Imm Parallel 11 240mm 0 44in Orientation 1 Perpendicular 2 Parallel Appendix D Tooling Factor 36 Index B BNC Coaxial Cable 19 21 C Chamber Installation 18 Compressed Air 10 22 ConFlat 29 Connections 15 16 17 18 19 20 21 22 23 24 25 Connector 14 21 Contact Colnatec 34 Cooling Line 5 20 Copper gasket 18 19 Crystal 5 6 7 10 14 15 16 17 20 22 26 28 33 D DB 15 Connector 21 Dimensions 29 E Eon 6 7 8 9 10 11 12 13 14 20 21 22 23 24 25 26 31 33 36 Eon Software 24 25 36 F Flange 19 20 G Getting Started 14 15 16 17 18 19 H Hardware 15 16 17 18 19 20 22 24 29
16. returning the crystal surface to the desired temperature This type of regulated hot to cold ratio control mechanism is capable of sustaining a tolerance of 1 C Because it is triggered by a simple relay input the Mirage can be used as a cooling device in other applications Chapter 2 Eon System Components 10 Mirage Features Refrigerant Free Air Cooling Not only maintenance free and environmentally safe but when using regulated air the Mirage M is easily capable of holding the sensor to a tolerance of 1 C Maintains Temperature up to 500 C The Mirage produces a temperature output capability of 28 C 50 F BELOW the supply air temperature allowing the Tempe sensor head to maintain any temperature within 50 500 C Quiet Operation While the cold air output is connected to the Tempe sensor head through a cooling line the Mirage reduces noise by muffling and dispersing the hot air output Versatility of Application Working from a simple relay input the Mirage can be used as a cooling device in alternative applications WARNING Operating temperature SHOULD NOT be allowed to N exceed 500 C Equipment damage will likely result Chapter 2 Eon System Components 11 Eon Inputs amp Outputs This guide describes Eon controller with temperature control 3rd generation Eon Connectors Eon Front Heater and RTD Input Output Controls Tempe sensor head Type K Ther
17. spring may have become bent If the crystal contact spring has become bent it may no longer apply even pressure against the crystal Assuring the conical spring is concentric with the body may resolve this issue Insufficient Heat Conduction The heater s ceramic insulators may have become dislodged Often the heater s ceramic insulators become dislodged if the heater has been vigorously tugged on This will be apparent if the heater no longer compresses or sticks when pushed down resulting in an insufficient contact to conduct heat to the retainer Gently wiggling the heater back and forth can sometimes resolve this issue Servicing may be required Cap Will Not Screw In The heater leads may be bent Bent heater leads may be preventing the cap from centering Do not force the cap if it will not screw in Re centering the heater in the head may resolve this issue Software Issues Various possible causes See Eon Controller manual for software troubleshooting guide Innaccurate Temperature Readings RTD pins may be faulty Heater Unresponsive Heater pins may be faulty See Advanced Troubleshooting in Section 6 1 Page 20 for possible solutions to these issue Because it is a scientific instrument the Tempe sensor head should be treated with care In the event of any difficulties please contact Colnatec s Customer Support Excessive tinkering or fiddling may result i
18. stem Components External oscillator Replaces the Eon internal oscillator Tempe Eon quick reference guide Instructs user in quickly assembling and integrating Eon into existing system FA EE Lu FEDE SESS EE aoe RSS sm Se mms e 2 e Software CD Contains Eon software suite manuals quick reference guides and other helpful resources Chapter 2 Eon System Components Mirage Air Cooling System The self heating Tempe sensor employs a unique cooling system called the Mirage Air Cooling System that connects through the DB 9 port The Mirage forces cold air through the Tempe crystal compartment to counterbalance heat Relay Input from Eon Used for controlling the Mirage Exhaust Port Quietly expels and disperses used air BNC Sensor Inputs 1 4 push to connect fitting 2 ft 609 mm insulated tubing provided Compressed Air Input requires facility air supply 1 4 NPT female connection CAUTION Only use filtered 25 micron max and oil free air 100 PSIG max 6 9 bar How it works In order to achieve and maintain a specific target temperature on the crystal the Tempe first heats the crystal to the temperature set in the deposition control menu of the Eon GUI If the Tempe exceeds the desired temperature the Mirage is triggered blasting the crystal compartment with cold air and
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