Home

FEI Quanta 200 3D

1. 0 002 cc ee eee oo OD 2 Tetrode Alignment 0 SS ESE ce eee eee 6 6 Se OUI AG MIMG ens sis suid EER SEE te Marek eee os ees HE 6 8 4 Condenser Alignment 0 0 00 ee 6 10 5 Final Lens Alignment 0 0 20 0c cece eee eee 6 12 6 Stigmator Alignment SESSE ESE ee ee 6 13 Final Check EE iti Govern VEER DIT EERS 2 lO 7 Stage Rotation Centre EE ESE OR DR wae 6 15 Oe PLEAEERIEMNG SS reret DS gale Loe eke bs balas ceed 6 17 9 Filament Exchange SE SE ccc eee eee 6 18 Control Elements Descripti0N oo oo ooooomo o 6 19 LED Lea rar PE AE ER we hee oh danke ye HO IO Step 2 di dd dd dd a OO 100 ION Source Control O heeled BED MAS HOE ER 6 20 Control Elements Description o oo eee eee ee es 6 20 Step 1 lon Source Control o o o oo ooo ee ee o 6 20 Step 2 lon Column Vacuum REED TE OE VERE 6 101 ION dk es ee dores 6 22 Step 1 6 22 Step 2 e A A O 102 ION Stigmator E Balan ALE ys pha E E E E E be berate ed 6 24 Step 1 6 24 Step 2 A anan neta e A EE EE E ve int astutos OA 50 x 50 mm Stage 5 Axis Motor Stage movement Quanta 30 200 Standard Sample holders ETE EET Eucentric Height Finding Eucentric Height Aligning Beams at the Eucentric c Heighi E Using Z height adjustment C viii 1 1 1 2 o 1 3 7 4 TA 1 6 2762 1 2762 1 Map tab SEN Map Area Elements
2. The Quanta 200 3D User s Operation Manual 4022 290 27621 1st Edition 05 01 2003 Copyright 2003 FEI Company All rights reserved 8 FEL COMPANY Trademark Acknowledgments FrameMaker is a trademark of Adobe Systems Incorporated Microsoft is a registered trademark of Microsoft Corporation Windows2000 is a trademark of Microsoft Corporation Production Acknowledgments This manual was produced using FrameMaker document publishing software Technical Author Martin Dufek 2762 1 TABLE OF CONTENTS List of Figures List of Tables Preface Manual Structure ce eee eee eae 1 i How to Use this Manual 1 11 Machine classification o o SS SS SS 1 1 Site Requirements ES SS a SE ee ee ee eee 12 Earthquake ie Pete ES ER EP HA De ee Trained Authorized Service Personnel EE Seapine ae ie N N User Maintenance 0 0 occ ccc cc cece cee 13 General Tule S sia do tra SOR ae OES Re eee ee NES Messages MEIN EER IE OT IN EEN Symbols mE ctas 159 Lock Out Tag Out LOTO Control of Hazardous Energies paz TE General Overview of LOTO er eed blas EO Secure and Lockout Tagout Procedure i TERE EE ber Removing Lockout Tagout and Restoring Operation pata E Electronics Voltages tte ia aes 1 9 ee ee ae ee Ee Safety interlocks EE AES ROA oe OE a ES EMO EMergency Off TE TER ba as eal ENE
3. o ee eee 3 9 Emergency Off EMO 0 0 ce ee o 310 Power OF ooo cece cece cece ccc cb bebe bene ee 3 10 2762 1 2762 1 xT microscope Server Software Server State Ul State modules o ooooooooo o o kie 4 Software Control Overview Other Software and Hardware OT ata dete ates aie eee es ee eek Software Interface Elements COMS ao a a o MS VD ED pata ons eo EE EE N N GERT N OE EO St RI oe ee Pull down Menus SES eee ee ee ee Se USING the Mouse 0 ia nba ara EY BEEK wee Che el Pavel Pa a Using the Keyboard 0 an anaana a a ee ees Radios Cheek Buttons oi ii ges Hoh bbe oh Geese Dialogues Command Buttons EE eN E eat Con al AGiUStGlS estada eee aint he ELE DERE a Se ee de ee Ramp adiusterSs aa lid a Bessie wih da Soe warned ees wie eo Continuous adjusters eis HY wae twee A A Preset Continuous adjusters 0 aa SS aa SE ee ee Two Dimensional X Y Controls 0 SE SS ES SE ee ee eee 45 Tabbed Dialogues Microscope module xT microscope Control Software The Man VINO OW sx nina Pek OR em Sack eo DES Be Wee The Title Dar aerea ads N ER RR HER oa aa a eave a ae ao DE 48 49 The Menu Bar The Toolbar Magnification kV Beam Current List bOX L L L aLaaa Pixel Resolution Per Beam 0 0 ee ees die DalaBaf tirador ht a CSS si EA DEE Ma 4 10 o 4 11 o 4 13 4 13 Preferences Ctrl O oe
4. Tools Window Help Auto Contrast Brightness Auto Focus Application Status Lab Motes FEI Movie Creator Preferences Col o 2762 1 sat Operations Saving Multiple Images Recording a Movie FEI MOVIE CREATOR This is a separate program that creates a movie from a sequence of TIF images Click on the item FEI Movie Creator in the Tools menu to activate the tabbed dialogues The following items are common for all tabs e Databar Preview displays the databar created in the Databar tab dialogue e Status displays the progress of movie creation process e Create Movie button opens the File tab dialogue and starts the movie creation process from the TIF files to a single AVI file e Stop button stops the creation process e Close button closes the FEI Movie Creator program File Tab The File tab contains the set up features for creating a movie froma captured sequence of TIF images made while using the Movie feature It requires a valid file name to read the TIF files If the TIF file names created automatically contain non alphanumeric characters in the File Name box this utility may not be able to compile the AVI FIGURE 5 17 FEl MOVIE CREATOR 2 TAB FILE ss Movie Creator File Databar Preview oe Mame Prefix mh2 Quad 1 010 eal Time Period 1000 me TIF Time From 1 To 22 Save IN Cove y o File Mame mhz Quad 1 010 awi Mm 1 O Oo Status Create Movie
5. 0 stage tilt Not to Scale The following figure shows the onscreen views with the stage still at 0 tilt but with both stage and ion beam scan rotation at 180 FIGURE 5 27 VIEWING AT 0 TILT ROTATED 180 Onscreen views Viewing with Beam Cross section face lon column Electron column Tilted View into Cross section Stage 0 stage tilt 180 stage rotation F scan rotation 180 Cross section face Not to Scale Operations The Measurement and Annotation Functions The Measurement and Annotation Functions found on the Processing page give the user many capabilities to measure distances angles diameters and areas to locate and label items that are of significant interest on the sample area Measurement Delete Clicking on the appropriate symbol button atthe top of either module MEE opens a property list where items such as Color Font line width Ed Ltd measurement type and text position etc can be defined Default properties The graphic chosen can then be drawn on screen with that symbol cursor Once the graphic is drawn the arrow symbol button can be clicked on to change the graphic properties size shape etc If there are more graphics on screen the arrow button can also be used to focus on one in particular by clicking onthe graphic when using the ARRow symbol TOOLS At the top of the either module is a selection of tools icons buttons propety list e Arro
6. 2 ES EE SE EE ee ee ee dr Gas Deposition EE AE era iar ern God poe mater atte OR aoe Gas Enhanced Etch EERDER RE ada adidas 250 X Ray Analysis Capability ee ee ee 2S System Vacuum ih ce ee aus Bees 2 E tae ee Positioning of the stage EER ee dla a System Layout of Quanta 3D EEEE et IE UIE E 2 5 Software Interface Elements 0 0 aa aa ee ee ee ee 2G Hardware Interface Elements 2 0 se ce eee ee ee ee ees 2 0 The System Control Panel 0 00 cee ee ee ee ee dl Slade Cont adas as as tee ees dal Gee OO ale e ewes IE Infrared CCD Camera 1 ce ee ee OT Manual User Interface MUI 1 0 0 0 0 0 aaa 28 Equivalent software controls o cee ee ee ee ee 250 Quanta 3D ODIONS oe RE EES da BORA OE EE EE a ERLA nta 2O hemes 3 Vacuum are Overview A dee ats 3 1 Hardware System atone Ee ae ea AO Vacuum Sta USES se ances Ed SE ark rate 3 2 PUMP OUNON 2 2 25 002 aos Gowen eee aes da eae on a RE ROES VenkDUROR sabria id ns Jet kes HARARE GOED Vacuum Modes ie Ee Ee RE EE e a le a 3 4 High Vacuum EI EE A E PEER S Low Vacuum and ESEM Modes RE EE ER EA Pressure EL he ae oe OA USING GaS eass OE eh o TE ET ae oe ETD AD Purge MAREE Sac EE o Oh OO Vent Water Bottle EE wake de bake Le taste meee OYE EL EN O50 Quanta 3D System States RS EE REKE neice Wine 2 EIE Ee 3 7 StartUp procedure generally 0 0 ccc ee oo 9 0 ShutDown procedure generally
7. XTUI Log On E Username Password xTm Stage information Ho Stage Busy performing Stage home Sto Pump Default cancer amy 512x442 Dwell time Resolution Line time Frame time Refresh rate Integrate Action ent 20401760 Joggal 1 04s 1024004 1 0ms 905 ms 110Hz x None 912442 9124402 10244664 Software Control Software Interface Elements DIALOGUES appear when the system needs more information from you before it can carry out a command Some Dialogue boxes do not let you access other functions until you exit the box Other dialogue boxes let you perform other tasks while they remain onscreen and active For example the Preferences dialogue boxes can remain open while you do other tasks You can input information using radio check buttons command buttons and Text boxes direct keyboard input is used to produce text such as labels passwords and specified values of certain parameters Progress boxes indicate progress of a procedure over time by means of a progress bar COMMAND BUTTONS carry out or cancel functions They press in when clicked and some change colour to show activity When reversing the function the button springs out Command buttons have labels that describe the actions performed by clicking on them The mostly commonly used ones and their usual functions are e OK button closes the dialogue box and updates all informat
8. vary depending on the country During an emergency the engineer Dispose of chemicals such as oils greases or computer batteries The MSDS refered to in this document are only examples The following local regulations and procedures MATERIAL SAFETY DATA SHEETS MSDS Caution user must refer to the local MSDS FIGURE 1 Safety and Handling Chemicals MATERIAL SAFETY DATA SHEET According EC 91 155 1 Identification of the substance preparation MSDS Product code 12nc Supplier Tradename General description Use Publicationdate 02721 1322 502 72801 DOW CORNING 62 RUE GENERAL DE GAULLE 1310 TERHULPEN Belgium Tel 32 2 655 2523 Fax 32 2 655 2002 MOLYKOTE BR 2 PLUS 01 GREASE Miscellaneous 1995 04 18 Emergency phonenumber 31 0 497 598315 2 Composition information on ingredients Component MINERAL OIL MOLYBDENUMDISULFIDE LITHIUM SOAP CORROSION PREVENTIVES 3 Hazard identification 4 First aid measures CAS number EC number Percentage EC label 1317 33 5 215 263 9 Skin Ingestion Inhalation Eyes Remarks first aid Remove residue substance as soon as possible from the skin f i rinse with much water Let drink 1 or 2 glasses of water In case of general disorders call for a doctor Not applicable Rinse for a long time with much water In case of eye sight disturbances consult a doctor none 5 Fire fighting measures Fire extinguisher Haza
9. Alignments Source Control Instructions E Beam source control page Press the Start button Mo step Source Control is used for the fine tuning of source tilt conditionally on HV resaturation ofthe filament after a few hours of operation and for special setting of the emission 1 Select the electron beam in the imaging quad 1 Press the Start button To readjust the filament saturation for current HV or the whole range 2 Press the Xover button to get the crossover image 3 Tune the Filament Voltage 4 Click on the Store button if you would like to store the new Filament Voltage for the entire High Voltage range If the Store button is not used the Filament Voltage returns to the previous value after leaving this alignment page 5 Press the Xover button to return to normal imaging mode To optimize the source tilt 2 Select the HV which should be optimized 3 Tune the Source Tilt to achieve maximum image brightness 4 Press the Store button to save the Source Tilt setting for current HV 5 Optionally repeat this procedure for others HV To change the emission current 2 Select the HV which will be used 3 Uncheck the Autobias on checkbox the Bias slider is enabled 4 Set the required emission current with the Bias slide 5 Readjust the filament saturation as described above Note It is not recommended to operate the electron gun with Autobias off permanently This feature can be
10. e90 UNS swojdwAs UONEUMOJUI E9IBOJODIXO LL suou Bunesy ye s1onpoid uomsoduio2ap snopiezey sjejou yes aulex e unigu UHM SUONSES1 SNOPIEZEH OU JO EM YUM SUONDESU uou piore 0 SUONIPUOY ynnoes pue yIIqeIs OL Buyuuid sy jo eJep au 18 Ag SOLLdO NOY 10373 134 10 jellea pue uonewyojui e6pemouy ay jo 158eq eu 0 196409 sl Jesus eye Alejes eueje n SIY ui pepinoid uogewuojur OyL UOISJSA SNOINSIH SY 0 pieBe1 UM SUONEISJe O JUIO4 ajqeoijdde jou ajqeoldde jou Os OLc SU SAIso dx3 abues juiod ysejy afueiuiod Bunja UOHEWAOJU A9U10O OL ou yuowabieyd 9118150119913 gjqesoes jou 2 1n e19duia uomsodwo2aa 9 qesoes jou aunyesodwia uomubBIiomyY S0 0 003 ejepdn isel 34ed ejqeodde jou USOISIA ejgeoljdde jou Hd suol ejuaguos ypy ul Buryesoyns 66 algesoen jou yey ui Ananios Z UoNJes ui SJUSUOUIOS le WOI SIDUAJUIS Y 1uBAala1 MEIAMSAO uou Jayem ui AuIAnIos gjqeeoes jou ainssaid inode c OlL AXE se9ue1eje1 Auedwo9 Jauu 9s 02 11e 000 6 0 Kysuap anoden anejos snisjo sealbap Zy si ainteiaduiai edo au ejgeodde jou me ui egissod suorso dxa sna UONJe1oid uonejeuui 1uapuadapul asn asuodsai Aouafiauie Je pue SBOUR SWINDIIO eua xe u SOSIN uo syieway N lt e N N Safety and Handling Recycling Reuse Information Recycling Reuse Information All parts of the Quanta microscope can be recycled or reused subject to local regulations W
11. File Import Export Menu Import Open and Export Save As Dialogs u un io e ie EE RE 6 EE ER Application Status On Line Documentation TABBED Stage COORD INATES DISPLAY Tabbed GAS INJECTOR DETAILS 2 2 8 3 2 3 5 df Eos 10 45 4 7 4 8 4 9 4 10 4 11 4 11 4 12 4 12 4 13 4 19 4 21 4 28 4 30 FEI Account Administrators control EE EE ON EL EE os Cxi Chapter5 Operations RELATION BETWEEN VIEWED IMAGE AND STAGE 9 7 Monitor Image and Scanned Sample er OR dae Be een Preferences Dialogue for Detectors Signal Mixing A i ONO ETD DETECTION CHOICES E ETD Configuration Dialogue A E A aa IG Gaseous SE Detector GSED 0 0 ss se se ses o 6 Standard GSED Configuration 0 Se ss ee se ee ee D 17 The GSED Installed inthe SEM 0 0 0 se es see ee DIS Large Field Detector LFD 0 Es se es se ss ee ee si Dr18 Large Field of View with LFD 0 0 ss es se ss se ss a aa D18 X ray Imaging in HiVac Mode 0 SE ss se es ee 9 20 X ray Imaging withthe GSED ese Se LO SAA e EE N ARE EE X ray PLA ETE tie ce li BOSE oo Printer Setup Dialogue A OO Movie Preferences TO RO NR O FEI Movie Creator 2 TAB A SON Browse Dialogue N Gad mie ata oud Bites EST DE OOS FEI Movie Creator 2 TAB Databar ooo u cece cece cece cece ees 533 FEI Movie Creator 2 TAB
12. Location Map dial ogue Coordinates tab e Coordinates X Y Zz R T EE A A O O ACUOM BUUONS 2 et OK OE MA TE eS N LOCK Ss es porn EO AE A EO OE IG Stage Movements SE SS eee eee Track Get Stage Frame Shift Stage Related Functions RE EL OK xT Align Feature Compucentric Rotation F12 e mas AE RS E EE eee AAN 7 16 7 16 User Units Define User U nits Using 1 2 or amp Point Alignments ee ee ee ns A ace 7 19 7 19 7 19 7 20 Beam Shift Beam Shift Reset Zero Beam Shift Scan Rotation Shift T F1 2 Using Scan Rotation ccc cc cece ce ooa aara 7 11 7 12 7 12 7 13 g Software Stage Functions 16 16 CT es el 19 1 9 1 9 7 10 7 10 7 15 7 18 7 20 Chapter 8 Maintenance 8 1 Cleaning Procedures Overview 8 1 1 List of Applied Cleaners 1 nuana 0 SS ce ee nes 8 1 2 Cleaning Column Parts 0 0 00 eee ee ee ee ee pee eae ER EE Cleaning Tips 8 2 Accessing the Column ENE EE OE ee aes 8 2 1 Opening the column a asonu EE cc SE EE SE se ee se ei 8 2 2 Closing the column 260 5 sat 8d Sue Gotha DE N oh ENE 8 3 The Wehnelt and Filament 8 3 1 Components 8 3 2 Removing the Wehnalt Assemb gt gt ee ee 86 8 3 3 Removing the filament 8 3 4 Cleaning the Wehnelt Cap and Filament securing ring 8 3 5 Ins
13. Step 1 lon Source Control The On Off button starts stops the lon source The behaviour is similar to clicking the Wake Up Sleep button without influencing to the Electron source and GlSes beam emission shows actual lon Beam current In the Maintain state it should be 2 HA The Offline Disabled Idle Acquire Maintain Shutdown buttons indicate internal lon source condition They are accessible only to Service persons The Heat button starts the heating procedure which executes automatically at source start according to need Manual start is advisible when unstable emission and or unprompted lon source switch off take place Step 2 lon Column Vacuum IGP pressure shows lon source space pressure Correct functionality requires value lt 50 uPa The IGP On button is accessible in case the IGP doesnt pump clicking on it starts pumping which takes at most 10 minutes If the IGP doesn t start within this time period it is necessary to click on the Pump Column button After successful IGP start an ion source start must follow The Pump Column button is accessible in case the IGP doesn t pump and the system is in HiVac mode It starts the procedure of automatic column pump down Note This procedure should be used only when IGP On procedure fails FEI recommends consulting your authorised service person regarding this procedure Alignments 100 ION Source Control 100 ION Source Control continu
14. The Location list shows the Current Position as default When expanded it shows the list of positions with a scrollbar The one selected becomes the current active position When a position is selected it is highlighted in the list and also on the map as a point with a red circle Import Export It is possible to load export STG file with the list of positions see Chapter 4 Map dialogue The Map dialogue can be accessed by clicking with the right mouse Add current stage position button in the map area The different stage sizes will be represented by differently sized shaded circles at default 1x Update to current stage position Remove selected position Add current stage position Clicking with the left mouse button anywhere on this circle area will create a blue cross Then clicking with the right mouse button will provide a dropdown menu which allows the user to add the blue cross position to the Location list By clicking on Add current stage position this function is carried out In this way the list can be compiled for particular applications The blue cross turns black and 2762 1 Lid Magnification Center view Auto center on target Zero radar view Stages Software Stage Functions receives a black circle around it The same result can be achieved by means of the Add button Update to current stage position Clicking on this stores the edited position under the currently selected nam
15. Datahar Units Presets Scanning Beam Detector Available Beam Current Detector Mode Detector Type Magnification ocan Rotation Stage Y Temperature Tilt selected ve Have Up Move Down Bottom Dwell Time High Voltage Horiz Field width Pressure Working Distance MW Label Label Add Bitmap M Micronbar Databar Preview e 10 22 2003 p Dj IT 12 28 04 PM 1 us 20 00 kV Label The Label and Micronbar could be chosen by checking the appropriate box and their area expands or contracts together to accommodate other items added to the DataBar Clicking the Label button a choice dialogue appears to edit and copy the label to any of the other quads Clicking the Add Bitmap button opens a dialog to load a bitmap into the databar Description for the other items is simply appreciable from it s designation Note The limit for entries is displayed in the dialogue as it is updated It is possible to select more items than could be displayed Databar preview should be used to check available space 556 27621 Operations Setting Preferences UNITS TAB displays the capability to change the units for pressure temperature and measure Selection can be made by clicking on the list arrow and consecutively clicking on the desired unit The choices affects the stage dialog input boxes the databar display the status module dialogs etc The chosen units remains with t
16. Electron Beam Current e 061 n Spot size FEE 45 le Detectors Contrast EE EER Brightness status specimen Current 2 4b p lon Beam Current 0 40 p Chamber Pressure HIAE 5 Pa Y ie ED Operations Optimising an Image Optimising an Image PRINCIPLES OF SEM IMAGING All scanning beam microscopes produce images with the same fundamental technique The primary beam is scanned across the specimen surface in a regular pattern called a raster Normally this raster consists of a series of lines in the horizontal X axis shifted slightly from one another in the vertical Y axis The lines are made up of many dwell points and the time of each dwell point can be shortened or prolonged dwell time The number of points per line can be increased or decreased as well as the number of effective lines The result is a picture point pixel array Low or high resolution images can be obtained by manipulating these factors The larger the pixel array the higher the resolution on the end image Simultaneously a spot of controllable brightness is scanned over the display area of a monitor in the same pattern The signal emitted by the sample surface as it is illuminated with the primary beam is collected by the detector amplified and used to adjust the intensity of the corresponding pixel of the video monitor Because of this direct correspondence the image displayed on the monitor is directly related to the sample
17. F3 ESE ES SE ss ee eee eee OF EE TERTE OT ARE EE OR IE Ee Focusing ida EE EE IE ra ac vO Focusing with the MUI eee eee eee DE MED Re ea Ed Using Reduced area F7 TOERE EE een ao Auto Focus Function 0 0 ccc cece cece cceccecseeeccee 5 11 Correcting AstigMatiSM o o oooocoooooooooroo ee eee OTT Beam Spotsize Adjusting Spotsize for Imaging Mixing Live images from More Detectors Detector Types and Usage 0 00 cee eee Changing Detectors or Custom mode 0000 ce ee eee Beam indicators On hold changes when Patteming Preferences Standard Imaging Detectors a Everhart Thornley Detector ET D Gaseous Secondary Electron Detector GSED ERA de Large Field Detector LFD PLA Cones discharges between the Gaseous detectors and the sample oar ED ee X ray Analysis for different Vacuum Modes High Vacuum ESEM with the GSED oa ESEM with LFD and X ray PLA X ray PLA Selecting Beam Conditions EE A High Voltage and Beam Current 0 2 0 ce ee o Changing High Voltage nanana SE SS SE Se ee ee Changing Beam Current ES EE SE SE ES ee ee eee Beam Apertures Capturing and Handling a Single Image ao A ies iaa Snapshot and Photo Buttons Pause button ee Filtering functions Saving Opening single images Sills sr fede ay tags OER Open Image Printing Ctrl P Saving Multiple
18. Presets Scanning Beam Detector Available selected Toep Move Up Moye Down Dwell Time High Voltage Horiz Field Mid Pressure Magnification ocan Rotation Bottorn M Label Label i Micronhar Add Bitmap Diatabar Preview ay 10 22 2003 i umn is 122804 PM 1 us 20 00 kv Label Software Control xT microscope Server Software xT microscope Server Software The xT microscope Server Software starts and stops the basic microscope functions and makes it possible to open and close the xT microscope Control software Double click on the icon found on the Windows desktop The main xT microscope Server window appears Once it is established clicking with the right mouse button on the title bar opens a dialog that offers the option to minimize the server to the top bar of the UI FIGURE 4 2 XT MICROSCOPE SERVER WINDOW d xT microscope Server x g xT microscope Server Serer state Server state gb CCB14 devices STARTING xX STOPPED OOIT LI Stat UI State ale STOPPED x STOPPED xX Microscope Microscope Stop a start Stop shutdown ota 5 Start UI Stop Ul tart Ul ton UI Advanced gt gt gt server State Ul State modules displays the RUNNING or STOPPED state of the xT microscope d xT microscope UN Server services Server State and of the xT microscope Control Server state software UI State During a transition between
19. Start with the High Voltage about 1 kV approximately three times higher electron beam current than the ion beam current and the maximum negative Defocus When using high Spotsize gt 6 optimize the current with Source Shift If the neutralization is not sufficient increase the High Voltage Press the Neutralize button unpause the ion beam quad Select the area for milling and pause the ion beam quads Setthe milling patterns Oo N O O1 Start the milling Check periodically using Snapshot if the ion beam image does not drift The Spotsize Preset Continuous Control allows a change of the Spotsize in continuous values from 1 to 10 using a adjuster and from 1 to 8 from a drop down list The selected spotsize is displayed in the text area of the adjuster and in the data bar if selected This figure is another expression of the Beam Current found on the toolbar and is bound with it When the Spotsize changes the value in the list box changes too THE DETECTORS MODULE The linear mini sliders keep their actual position and are placed below the non linear main adjusters which return back to the centre after a movement The end arrows give a finer control The Contrast Brightness Control controls the contrast brightness of the active detector 2762 1 Software Control Navigation Page Navigation Page The Navigation Page is an FEI Microscope User level page containing Coordinates the essential navigat
20. Stop Name Prefix Enter here the prefix label for the sequence of TIF images Click on the dotted button to the right of the dialogue box to browse directories and files for the TIF sequence prefix It does not matter which frame in a sequence is chosen Operations Saving Multiple Images Recording a Movie FIGURE 5 18 BROWSE DIALOGUE Open Look in Movie Ff ja ET Quad 1 El mh2 Quad 1 010 010 00006 tif OOOO tif 00056 tit mht Quad 1 009 00057 tit Bl mht Quad 1 009 Bl mht Quad 1 009 Zjmh Quad 1 010 ll mh2 Quad 1 010 00056 tif 00001 tit OOOO tif Ed mh Quad 1 010 DO006 tif 00009 tit OOO10 LT 0004 1 LU 00012 tif 00013 LU la mn Quad 1 010 El mh2 Quad 11010 E mn Quad 1 010 00003 tit 00004 tit 00008 tit Quad 1 010 Quad 1 010 Quad 1 010 i i i Quad 11 i i i File name mhz Quad 1 010 00001 tit Cancel Files of type TIFF files from Movie tit Time Period Either select a custom time for the playback of the movie by clicking on the millisecond radio button or on the TIF time radio button to select real time acquisition playback To find the best custom timing one may need to create the movie a few times 200 ms is good for most movies to speed up the action From Frame numberin g Enter the numbers of the starting frame and the ending frame These will repres
21. System Column Beam Magnification Electron Beam Curren Detectors Status Navigation Stage Map Coordinates Beam Smart Scan Detectors Status Patterning Pattern Progress Gas Injection Overview Details End Point Monitor Graphs Options Scaling Status Processing Measurement Annotations Enhance Image Status Alignments Alignments Instructions Individual steps Status Temperature Vacuum Mode Temperature Stage Control Control Page Temperature Profile Beam Detectors Status PAGES COMMON FEATURES AND MODULES Column Type Some of the module controls are dependent on column type In this Electron Beam case the column type in active operation is indicated by the icon representing either the Electron or lon column for the active quad image window at the right side of the module Note when Optical beam is selected the pages function is not available af or L Le Optical Beam lon Beam Tool Tips Allowing the cursor to dwell shortly over some icons or the Status area texts gives other information or more precise values as a tool tip window Progress Bar can be found where the operating function progresses overtime such as in patterning The time lapse is indicated by a progressing green bar 422 27621 status specimen Current lon Beam Current Chamber Pressure 4 n 296 pA 040 pA 4 19E 5 Pa 0 Software Control Pages and Modules The S
22. The image will appear to become sharper in one direction whereas in perpendicular direction a distortion increases bluring or stretching of the image Defocus in the other direction to observe a different astigmatic distortion a Focus to the midpoint between the two distortions Press shift and hold the right mouse button down while in the active quad This results in a 4 arrowed cross appearing on the screen with the cursor position at its center Still holding the right mouse button down move the cursor around the screen to achieve maximum astigmatism correction when the image is sharpest When you are satisfied with the image release the right mouse button Operations Optimising an Image If astigmatism is severe and the cross is close to the edge of the screen when nearing correction release the right mouse button and reposition the cross in the center of the screen Then repeat the procedure above to perform further astigmatism correction You can use reduced area advantageously in a similar way as was described for focusing If siigmation cannot be corrected there may be some other reason usually the insert apperture is dirty see Chapter 8 Maintenance for cleaning instructions the magnification may be too high for the beam spotsize see below or the sample is charging apply conductive layer or use ESEM mode TABLE 5 9 CORRECTING ASTIGMATISM USING THE MUI Step Action Using the MUI Focus knobs
23. analysis Peltier stage substage for sample cooling Heating stage substage for sample heating 3D reconstruction software generates and visualizes 3D data from images obtained using Auto Slice and View Contact your FEI sales representative for more up to date information on system options Note soon to be released at the time of publication 2762 1 29 System Overview System Layout of Quanta 3D 3 VACUUM SYSTEM OVERVIEW This chapter describes the Quanta 3D vacuum system e Vacuum status and relevant actions Pump Vent e Vacuum modes HiVac LowVac ESEM e Quanta 3D System States Start up procedure generally Shut down procedure generally Emergency off EMO Power off Hardware System There are three main vacuum sections e Electron column e lon column e Specimen chamber Under operation the electron and ion columns are always pumped to high vacuum The specimen chamber is at the pressure required for the given status Pump Vent or mode HiVac LowVac ESEM All valve and pump operations are fully automatic Note The ion beam can only be operated in HiVac When LowVac or ESEM mode is chosen the ion column CIV is closed 27621 El Vacuum System Vacuum Statuses Vacuum Statuses The vacuum status controls are in the Vacuum Mode module located at the top of the Beam Control and Temperature Control Rume pages The Pump button controls pumping for the chamber vacuum Mode
24. ance Seva as type Stage Positions sta Cancel l Print Ctrl P opens the printer dialogue so that the choice of printer and conditions can be established to print an image or any other printable product from the microscope Pressing OK in the printer dialogue will activate the printer to print the job Log Off logs off the present user and provides a Log On dialogue for the next user of the microscope The following conditions apply e When a user logs off the system goes to a safe state the HV is switched off automatically e When closing the xT microscope Control software the current user is automatically logged off first 412 27621 Software Control xT microscope Control Software Exit Alt X exits the xT microscope Control software and leaves the user in the operating system environment xT microscope Server is still running and controls the microscope in operation The Detectors Menu Alt D Detectors Scan Beam Patterning St opens the Detector menu functions ETD Secondary Electrons Detector list id may contain various detectors for E Beam and l Beam High Vac Low Ee Vac and ESEM operation Depending on whether the relevant GEED ide l SSPSED detectors is installed and available all others will be greyed out Only frame the selected detector for the active quad shows a tick next to its label IR A detector can be customised by clicking on the small black arrow on
25. blown and must be replaced This condition is indicated by an unticked OK checkbox next to the Filament current value Emission shows the electron beam emission current uA When the Autobias On is checked the emission should be approximately 100 MA Filament Lifetime is a timer for recording filament hours Source Tilt 2D control indicates the actual setting of the electronic Gun Tilt with respect to its extreme settings It changes the effective angle of illumination of the beam coming from the gun area of the electron column Use it to manually centre the illumination maximize beam brightness Clicking with the mouse on the source tilt area causes a four ended cross cursor to be shown on the full screen or quad Move the cursor left right and up down to control the source tilt X and Y If finer tilt is required use the logarithmic capabilities of the 2D control explained earlier in this chapter The actual position of Source tilt is always shown by the position of the crosshair in the X Y control Xover button allows imaging of the tip and is useful during the alignment procedure It is available only when the system is in operation Note If the Source tilt is severely misaligned the image of the crossover can be also very helpful The crossover is visible in slow scan mode and to help the centre of the screen is marked witha cross The crossover should be in close vicinity to the cross It can be set to the correct po
26. bring the image just slightly out of focus in one direction to see any astigmatic distortion Defocus in the other direction to observe a different astigmatic distortion Bring the focus to the midpoint between the two distortions Adjust image sharpness with the stigmator X and Y knobs until the best image is achieved The computer beeps when the stigmation limits are reached 5 Repeat steps 1 4 as necessary BEAM SPOTSIZE The actual focused area of the single beam on the sample at any i point is referred to as spotsize Spotsize has assigned numbers that 061 nA Spot size range from 1 to 10 with values corresponding to beam current For each ascending high voltage from 200V to 30kV the range of beam currents increases in value accordingly There are 15 available beam currents for the Electron Beam and 12 for the lon Beam These preset values can be found in the Toolbar dropdown list Electron Beam Current TABLE 5 10 SPOTSIZES AND RECOMMENDATION OF THEIR USE Spotsize Best Use Very high resolution mag gt 50 000x 345 Standard imaging SE BSE LFD GSED BSE CL Xray analysis EBSP Charge neutralization Adjusting Spotsize for Imaging Spotsize is considered to be close to ideal when the edges of the beam just touch when adjacent lines are scanned If the spotsize is too large overlaps occur and the image appears out of focus If the diameter is too small electronic noise appears in the image De
27. or for when thereis need to navigate along a feature that extends off the screen at the magnification required for an observation Align Feature applies the mapping process across the entire length bringing the long feature either to the chosen horizontal or vertical axis to make navigation easier This can be performed at any point within the stage field limits and takes into account the offset for a stage rotation Point 1 is first located and then point 2 When this occurs point 2 is not fixed but subtends point 1 with an elastic cord until the left mouse button is released Point 2 is located at this position Longer distances result in greater accuracy FIGURE 7 10 XT ALIGN FEATURE 11723x 9 62 mm 20 00 KV 4 0 Note Align Feature is designed to work best at the eucentric height of 5 mm The Z to FWD should be corrected to the eucentric height as described in the section Eucentric Height on page 7 4 Caution Because the stage makes movements by software control care should be taken that there are no obstacles significantly higher on the sample plane set at the eucentric height as these may interfere with equipment under the lens 27621 78 Stages Stage Related Functions TABLE 7 5 SETTING XT ALIGN FEATURE Step Action SS Selecta long feature on the sample Click on xT Align Feature from the Stage menu Follow the directions in the dialogue box that appears and choose either Horizontal or Vertical
28. xTm Stage information l Stage Busy performing Stage home Sto Software Control xT microscope Control Software The Stage Menu Alt N opens the Stage menu functions Fora detailed description of the stage functions see Chapter 7 Stages xT Align Feature opens a procedure that helps one to navigate along a feature that extends off the screen at the current magnification Compucentric Rotation F12 places a green circle in the active quad By rotating the circle a different viewing orientation of the sample area can be achieved by physical stage rotation and adjustment of X and Y axes Stage rotation keeps the observed feature in the center of the field of view If this does not occur the 7 Stage Rotation Centre alignment should be performed to locate the stage center and calibrate stage see Chapter 6 Alignments Define User Units activates a series of dialogues that guide the user to determine User Unit values for X and Y movements of the stage These are used in relative movements associated with the stage mapping of regular features in particular in IC applications Offset Alignment allows you to move to new points relative to the existing alignment but ata new location for example stepping between identical points on different dies quickly User Units organises the stage software to recognise the defined user units rather than the default metric measurements The X and Y
29. 1 Times Milling in Spot Mode Charging samples Creating Cross Sections Making the First Cross Section Making the Second Cut t Optional Making the Final Cut Viewing Cross Section Tools Measurem ent M od ile Annotation Module Editing Measurements Annotations Setting Preferences The Measure ment and Annotation Funcions The Preferences Tab Dialogues nanana aaaea ee eee A a aisn RE e a be A ne EE ARN Ae se System Behaviour 0 0 0 aa naaa ee ee te ee Charge Neutralization Tab 1 nanana ce ee EE AA N arene Que ae Ges one DE S E Ses S Database RE EG RS GN EE DE EE em ae dde DIE TEE EERS AR ER tail ae cass DOME OR IE DAE DRA Presets AID oi bis Be di eb DE ed ED RE e eEafining Tab iss wc ee RR oe BARE he GOS am ated ete aos SCAMMPIES Ely whee etek EE ache aS ie ed Se Dead Get oe ae need a Sats Mees sa OE Beam Tab eas Beam Blank Options Mode 1 Switching Point 2 occ cece ccc aaeoa ao aaa AUTO ON REELE a aaa doe ecient VEEL Ed idas Detector Tab anaana ee ee es Movie TED Lar A AE AR AS ros g C vil Overview o Recommendation Elector Column Recommendation ec Quanta 3D Systems Alignments Tips for X and Y Corrective Movement o ooooooooo oo ES 6 Al ern 6 1 62 6 1 6 3 Common buttons behavlOUF o oooooococoncoo ooo oo 6 3 N SOUlCS COMMON isi acest rias rd 6 4 Description of Control Elements
30. AO Line voltage RE N EO OR aes EMO Miscellaneous Cords cables eje bis lO AC CADIOS ssp a EER ete bo NO A e Testleads SE a ad N a Bare OE EEN Ground Earth et RE EE TEEN Tedd Checking the protective ground connection TT EE TE WS Cover Panels E OU E AOE FUSOS 23 teh ET a EE ARE ER se ats ovens 112 Replacements TE A ness a a a aaa a a mente een E Static sensitive components EE E th es a EA E ee AAA A A 1 13 X Ray safety ET ER ii a ed cuts MAS Radiation measurement EE O A Sas ace cect eect er ln ee ee eth ue Aik aria tae ae 1 14 Cleaning Code of PractiCe o ooooooonoooomo es 1 14 Gasses EE wo Sl on oe ees be a eee ed Nitrogen N2 En EE GE DEE Bod eo la LO Liquid Nitrogen LN2 daria dee aha sd eas SAO Other dasse S uu KERK RR BARE ane au BREER Eben osu 1210 Auxiliary Gas Inlet be EE r aa he de IS Material Safety Data Sheets MSDS a PURE ten aa TO Recycling Reuse Information oo ooooooooo 1 22 Miscellaneous Precautions 0 0 0 0 ee ee 1 22 PICCIIC Fan Sis Skt dr Sh RR sare eas eeu eee Ieee PUMP EXMAUS este cure oredr AE EE EE COMOSION tetas Seles et ees ld hee a Be ED Labels sons Ghee ek BA ed ataco te ard dD ae lee 1 23 Chapter 2 System Overview The Quanta 3D System Capabilities 2 1 How Quanta 3D WorkS o o ooooocooooooooo o 2 2 Image Viewing and Capture aaa ee ee es 2 Control ofthe Beams
31. Detectors module allows adjustment of contrast and brightness for the currently used detector e Status module common for all pages contains important information about the system This is an optional page which is delivered with either a heating stage s or a Peltier cooling stage THE TEMPERATURE STAGE CONTROL TEMPERATURE PROFILE MODULE switches between the heating stage or the Peltier cooling stage via the two buttons at the top of the module The modules appearances are only slightly different no ramp for the Cooling stage If only one of these items is present on the Quanta 3D system then the other is greyed out Note the cooling module is shown here The Heating Cooling Stages Full functionality of the Temperature Stage Control for the heating cooling stages can be found in Chapter 9 Options 27621 433 Software Control Alignments Page Alignments Page Algornernts Fi Source Control c Tetrode Alignment 4 Gun Alignment 4 Condenser Alignment F Final Lens Alignment 6 atigrnator Alignment 7 Stage Rotation Centre o PLA Centering 9 Filament Exchange 100 lOM Source Control 101 10H Aperture Alignment 112 104 Stiqrnator Ralance cl f Blo ele OIEA The Alignments Page an FEI Supervisor User level page divided into the following modules e Alignments module displays the list of alignment procedures available to the supervisor e Instructions module displays
32. Do not bake in an oven 7 Inspect cleanliness using a light microscope Note It is not necessary to clean the remainder of the Wehnelt assembly unless severe contamination of the gun chamber has occurred due to another problem 8 3 5 INSTALLING FILAMENT WEHNELT CAP Caution When mounting a filament great care should be taken in handling it particularly when adjusting the filament to Wehnelt cap distance If the filament tip is allowed to touch the Wehnelt cap it can very easily be damaged 1 Locate the filament unit 4a in the body of the middle part 3a of the Wehnelt cylinder ensuring that the slot on the filament base 4b engages with the pin 3b Es 27621 Maintenance 8 3 The Wehnelt and Filament 2 Screw down the filament securing ring 7a with a spring washer to secure the filament The ring should be finger tight only Too tight a fit might cause the base to crack when heated up during use 3 Fit the Wehnelt cap 1a onto the upper part 2a of the Wehnelt cylinder using the bayonet catch This can only be done in the correct orientation Note Since it might be necessary to clean the Wehnelt aperture it can be useful to have one spare Wehnelt cap in store This enables the user to mount a clean Wehnelt cap without losing operating time 8 3 6 SETTING THE FILAMENT POSITION FIGURE 8 2 ADJUSTING THE FILAMENT POSITION M5893 1 Using a binocular microscope equipped with an illuminated suppor
33. ER kb Balin eee oS Se eee SS de ee bad OE Default Purging Settings tor dierent PLA SIZOS Laia he te ER ere ahs ae hs BTA on ew RE OS Chapter6 Alignments Alignment Procedures Overview 0 0 0 cee ee ee ee ee O62 Chapter Stages Movement Types for Quanta 3D 200 naana ss ee o 1 FINDING EUCENTRIC HEIGHT MANUALLY 74 ALIGNING BOTH BEAMS 0 02 cc ce ee ee ee ee TA Map Area Element Functions 0 0 0 cee eee ee eee ff Setting xT Align Feature naaa aaa ES ee ee 4 Define User Units Procedure 0 na aa ss se se ee ee ee ee 1216 Alignment Type Differences 0 0 cc ce ee ee ee ee 18 Chapter8 Maintenance Household Cleaners 0 aa a ee 82 C xvi 27621 PREFACE Manual Structure The manual for your Quanta 3D Scanning Electron Microscope is divided into the following chapters 1 SAFETY AND HANDLING provides important information required during operation and maintenance for product safety and personal safety SYSTEM OVERVIEW gives the basics about your systems capabilities VACUUM SYSTEM gives the basics about the vacuum system and procedures for several system on off modes including Log On Off Standby Mode Sleep Mode Complete Shutdown and Emergency Shutdown SOFTWARE CONTROL describes the interface that controls system operation giving the function of each tool menu item and control page OPERATIONS giv
34. Height Magnification Set to lowest from 100x to 200x Set to lowest from 100x to 200x Standard HiVac ETD SED SSD BSE optional HiVac ETD SED Detector LowVac LFD SSD BSE ESEM GSED GBSD optional HiVac live HiVac live LowVac and ESEM live LowVac and ESEM live Contrast With contrast at minimum value adjust See E beam Setting column and brightness to just show a change in intensity to Brightness the screen Increase the contrast to produce a reasonable image on screen Increases in brightness and decreases in contrast produce softer images The reverse produces sharper images Pump f High vacuum Low vacuum C ESEM Fressure xTm Pole Piece Configuration Ho Accessory Low ki Cone S00 Ur C Low ki Cone 1000 um C Ray Cone C GAD Cone C Hot Stage Cone 1000 um Operations Obtaining an Image SELECTING VACUUM MODES When a specimen and appropriate detector s are inserted correctly close the specimen chamber door and follow the instructions A High Vacuum This is the conventional operating mode associated with all scanning electron microscopes The high vacuum condition is achieved throughout the column and specimen chamber B Low Vacuum and ESEM Modes The SEM modes LowVac or ESEM are used to image non conductive and non coated specimens Which one of these is used depends on whether the sample just needs charge control non c
35. Images Recording a Movie ETE EE ER Movie TAB Preferences Dialogue SE ES EE ES ee se Tier Module is EER gente eS GE REDES EE Shes ve ED ee Information field acne ER Re si Gas ada ENS MOQUIS idea ARE RAS ER ON A AE ER RR A Movie Procedure os ss SE Es ss ce eee e Stat Pause and SOP is ike hen 04 245 de mt eae ie be see Re Recording a Movie iS EE SS SE ES Se ee se ee Quad Indica Dis EER a A oe AE AE FEI Movie Create so ske he aa mede beh ee SE N KEWER File TED cout BERE WEISS SALE EE es OD IERE EER oe Dalabar TED se ER HERE ee ea a dn he ee PREVIEW dbl EDE be EED AE EE ASE ed cores Set Playing a Movie 1 0 EE EE SE ee ee se Se ees se o sis SEER RIDE MED a eM ee as VARS SEED EE Magnification and PattemsS SE SE Se ee se C vi 2762 1 2762 1 Milling Procedure Pate mid Tools sus toch ase EE SE ROARS ASAE De ee DR IE Pattern Area Creating a nana aan aa ee ee ee eee Patem Area ECN viril ey oe ees Milling Order of PatternS o oo ooococoo ees The patterning Property editor 0 0 ce aa oo The Gas Injection Modules GIS o o o oooommo oo OVGIVIEW Tab escorias lo Dee aes de pi ere DCIS Tab bara bos ds op ae a aida Choosing a Gas Type ce eens Setting Up the GIS ss ene beads aa a da Setting Up the EPM Beam Coincidence Correcting Beam coincidence Test Pattern Fine Tuning Patterns Suggested Beam CumentiMiling
36. Melting point range According EC 91 155 Flash point range Explosive limits Dust explosions possible in air Relative density Vapour pressure Solubility in water not traceable not applicable not applicable not applicable 1 90000 water 1 20 C negligible none N e N N 1 Identification of the substance preparation MSDS 11284 Solubility in fat not traceable Product code 12nc 1322 518 87401 pH not applicable Supplier SOLVAY SOLEXIS Viscosity not traceable Viale Lombardia 20 Autoignition temperature not applicable 1 20021 Bollate MI Milan Decomposition temperature gt 260 C Italy Electrostatic chargement no Tel 39 2 38351 ee 10 Stability and reactivity Tradename FOMBLIN RT 15 General description FLUOROPOLYETHER GREASE Conditions to avoid none Use Miscellaneous Reactions with water no Publicationdate 1996 07 15 Hazardous reactions with strong alkaline solutions Emergency phonenumber 31 0 497 598315 Hazardous decomposition products at heating carbonyl fluoride perfluoroisobutylene 2 Composition information on ingredients 11 Toxicological information not traceable not traceable not traceable not traceable not traceable not traceable none Component CAS number EC number Percentage EC label Symptoms TEFLON 9002 84 0 30 0 Skin local With intensive skin contact risk of skin affection PERFLUOROPOLYETHER 69991 67 9 70 0 general Not applicable Ingestion l
37. Pump Note Although this procedures are explained in this chapter they should be performed by a qualified field service engineer The exception are those Supervisor Users who have had specific FEI instrument maintenance training Caution Parts that operate in vacuum should be handled carefull y using clean powder free gloves Parts not in use should be stored in suitable containers or packed in aluminium foil the EDX window if present is very fragile and must be protected from air burst or vacuum turbulence lt is prudent to remove the detector before major cleaning activities Note Gas back fill N should be maintained while the specimen chamber is atambient pressure However to avoid gas waste it is recommended that the chamber should be left open no longer than necessary This chapter is organized differently from the rest of the manual to make it easier to find particular procedural items The sections and subsections are numbered as follows Main section 8 1 8 2 etc Subsection 8 1 1 8 1 2 8 2 1 8 2 2 etc 27621 El Maintenance 8 1 Cleaning Procedures Overview 8 1 Cleaning Procedures Overview Frequency of cleaning is in most cases determined by necessity due to poor image quality or gross astigmatism level Recommended cleaning procedures are given below for parts which operate in vacuum and which are subject to possible contamination These procedures are common to all Quanta instrument
38. Retaining screw access hole 2 pcs Turn Anode Assembly CW The spring ball makes contact with the HV 1 With a gloved hand place the ANODE ASSEMBLY into the gun chamber so the SPRING LOADED BALL CONTACT IS near the HT FEEDTHROUGH and align the slotted holes with the retaining screws on the bottom of the chamber 2 Push in and twist the anode assembly clockwise to lock it into place The SPRING LOADED BALL CONTACT Should rotate into position against the HT FEEDTHROUGH Use the anode tool to tighten the retaining screws With a Wehnelt installed close the column 3 Pump down the system using the Pump button on the Start up or Work page If the vacuum does not reach the Vac OK message within 10 minutes the gun o ring may need to be reseated or replaced Column alignment will be required after this procedure 27621 si Maintenance 8 5 The Column Liner and Apertures 8 5 The Column Liner and Apertures 8 5 1 COMPONENTS The following Column Liner removal and cleaning is a Service Engineer level procedure unless the Supervisor User has received specific maintenance training The Column liner tube contains four apertures e A 500 um platinum aperture mounted in a holder at the top e Band cC two 1 0 mm spray apertures in the middle e D open type spray aperture at the base The aperture tool is used to install the apertures at the correct positions inside the tube The column liner tool is used to remove and in
39. Short cuts Chapter5 Operations Inserting a Specimen Selecting Vacuum Mode Imaging procedure CORRECTING C amp B Correcting C amp B using videoscope gt ooo Correcting Focus Correcting Astigmatism using the mouse Correcting Astigmatism using THE MUI Standard Imaging DETECTORs ae SPECIFIC OPTIMAL I BEAM CURRENTS Image Capturing Procedure occ cece eee cece cece ee IMAGE PRINTING PROCEDURE 0 00 ce cee eee Set Up and Recording a Movie 0 aaee ee SETANG UP THE SIS8 2 fad es todos as SETTING UP THE EPM MILLING A PATTERN BEAM CURRENTS MILLING piro BY APPLICATION MILLING A SPOT o oo cece rn non ro cece eee A 1 3 1 5 1 6 1 8 A 11 1 23 2 8 3 7 3 8 3 9 48 o 4 22 4 23 4 38 4 39 4 40 5 3 Quanta 3D Setup Conditions EER HO RE a Zar 5 6 5 9 5 10 5 10 5 11 aos S 2 Spotsizes and recommendation of Their u USC sas Dale das ME TEE OS O2 9 14 9 23 5 25 5 26 5 30 5 39 5 40 5 42 5 43 5 43 C xv MAKING THE FIRST CROSS SECTION 5 45 MAKING THE SECOND CUT OPTIONAL 5 46 MAKING THE FINAL CUT 0 0 0 02 eee ee ee ee ee 46 USING MEASUREMENT FUNCTIONS 5 49 USING ANNOTATION FUNCTIONS 5 50 Tabbed Preferences sa Ka
40. System Overview System Layout of Quanta 3D THE SYSTEM CONTROL PANEL Console System Power is activated by pressing the green power button on the front panel of the microscope console This will power the sub systems and allow interface and communication with the microscope controller All other functions to change the status of the microscope Standby and Shutdown OFF conditions are activated via software control FIGURE 2 5 SYSTEM CONTROL PANEL POWER BUTTON STAGE CONTROLS The stage is software hardware controlled and can be oriented with reference to five axes X Y Z Rotation and Tilt FIGURE 2 6 HARDWARE STAGE CONTROLS For detailed description of stage control procedures see Chapter 7 stages INFRARED CCD CAMERA An optical image obtained with this IR camera assists in overall sample orientation It also aids in positioning gas injectors on packaged IC parts or other non uniform samples 27621 Ed System Overview System Layout of Quanta 3D MANUAL USER INTERFACE MUI The optional Manual User Interface provides knobs to perform functions that can also be performed with the software FIGURE 2 7 MUI The MUI offers additional flexibility for controlling magnification beam shift focus stigmation contrast and brightness Equivalent software controls TABLE 2 1 MUI SOFTWARE EQUIVALENTS Software Equivalent Contrast and brightness adjusters on pages or auto contrast and brightness
41. Work page Now the Z can be changed from the external Z control around the eucentric position and further but not less than 2 mm from the lens for safety reasons Be Io 27621 75 Stages Software Stage Functions Software Stage Functions a Coordinates NO TO cm iN Location The Navigation Page has a number of modules including Stage Beam Smart Scan Detectors and Status The uppermost Stage module controls the movements of the stage that locate the position of the specimen by reference to coordinate points It consists of 2 planes Map and Coordinates These are accessed by the tabs at the top of the module MAP TAB The maximum stage cover is displayed as a large rectangular area with an inscribed circle displaying a center axis cross All positions to be located and stored will be shown on this large circle and listed in the Location list box for selecting Map Area Elements The Map area represents the chart of representative locatable positions They are by default only numbered although the user may choose to assign names to them The Location box lists all specified locations The positions and other elements are shown in the Figure 7 6 Radarview The small circle in the top right corner of the stage area conveys the rotational position of the stage at any time To rotate the stage hold the left mouse button down on the black triangle on the perimeter of the circle and moving it round t
42. after OK is clicked the PLA size is known Clicking on Cancel will revert the system back to its initial operating mode HiVac or Vent Pressure and Working Distance e ESEM Itis assumed that the GSED or GBSD areinstalled and the sample is visible in the image display area For standard imaging choose the highest specimen point and bring itto the 15 mm Working Distance the yellow line in the Optical Beam Quad Focus the image and then click on the Z to FWD icon button on the toolbar Adjust chamber pressure to achieve the brightest possible image Lower the pressure 0 5 Torr 67 Pa from this point This should place the pressure in the appropriate range on the curve in the following figure FIGURE 3 2 BRIGHTNESS VS PRESSURE dr on 43 Z ml oa Pressure Morr Adjust contrast and brightness to personal taste to obtain a clear image An image which is optimized should allow small changes approximately 0 5 mm in working distance without the need to alter chamber pressure 27621 EI Vacuum System Vacuum Modes ESEM and LowVac Higher resolution imaging is achieved by moving the sample closer to the pole piece the final lens performs better when the sample is at about 6 8 mm working distance 1 3 mm from the GSED GBSD or 2 4 mm from the Pole Piece LFD or BSE LFD At this closer distance the chamber pressure will need to SED es be higher dci Some experimentation may be necessary as the relat
43. analysis scanning image gathering manipulation and output magnification and vacuum etc The hierarchy of user account levels consists of the following e FEI Account Administrator e FEI Supervisor Users e FEI Microscope users e FEI Non active Users All user account levels created via FEl User Management software ensure for the particular users admission to both the operating system Windows 2000 and the xT microscope Control software See Chapters 3 and 4 for more information on Logging on and Logging off the start up of the system and all the features of the user interface elements HARDWARE INTERFACE ELEMENTS The Quanta 3D system is computer controlled and as such has a microscope controller 1 which must be turned on to operate the microscope by means of the software The power button on the microscope controller must be used to turn iton The support computer 2 connects your workspace to the network and can hold some other software utilities The switch box 3 switches insertions of the keyboard and the mouse to either of the two computers The control software facilities and data are displayed graphically on the LCD monitor and are Superimposed around and on the image the other LCD monitor is used for optional or related programs To control software utilities you can use a keyboard mouse or the optional Manual User Interface see below FIGURE 2 4 HARDWARE INTERFACE ELEMENTS 4 j
44. and cannot be read in the field space the tool tip can be used to give full information Note Movie files should always be stored on the support PC to avoid filling the microscope controller hard drive Numeric Seed Enter any number 1 to 999 which is converted to the three digit form with zeros on the left if necessary Video file size This value specifies the maximum size of an AVI video file in MB Enter a size value lower than 2000 MB After reaching this size the video is saved and a new recording is started If this field is not filled the Movie dialogue can not be closed A dialogue warning appears if the hard drive lacks sufficient free space File type This is a list box with types of supported digital movie formats Normally compressed formats are used Record databar This checkbox allows the databar to be included in the video when checked The databar in the video is updated every second MOVIE PROCEDURE Start Pause and Stop The red dot is the start command button that starts the recording of three videos one for each of the three image quads at the same moment The Optical Image Quad cannot be recorded lf a quad is paused when starting the video only the first image with a time stamp is stored When the quad is paused during the video recording the storing of the video frames is interrupted but the video streams keep synchronization for the next unpausing After reaching the maximum file size th
45. and switches to the lowest High Voltage e TheGlSes close and retract but stay heated The parameters of the column are not affected Venting the chamber opens the specimen chamber valve for a period of time and then closes it If the valve is closed again before the chamber is at ambient pressure another click on the Vent button repeats the procedure High Vacuum Low Vacuum ESEM Modes Radio buttons bring the system to either e HiVac operation when observing conventional samples e LowVac for observing non conductive or partially conductive samples 424 27621 Software Control Beam Control Page e ESEM Mode for observing natural status of samples at pressures above 130 Pa 1 Torr According to the detector used the system sets the default condition The purging medium can be selected from the drop down list boxes to suit the sample observation The Pressure adjuster can be used to adjust the pressure to suit the operation of either LowVac or ESEM modes This is chosen either by the adjuster which is continuous or from the list where a preset value can be selected THE SYSTEM MODULE Initiates the following sequences Wake Up button e starts the lon source e switches on the Electron Beam e heats the GlSes that had been heated when the Sleep button was pressed the last time Sleep button e stops the lon source e switches off the Electron Beam e cools the GlSes THE COLUMN MODULE contains the same co
46. and tapping lightly or by observing the position of the c clip with a magnifying glass Fi 27621 Maintenance 8 5 The Column Liner and Apertures Note Always check the mounted aperture under a binocular microscope or with a magnifying glass to make sure that no hairs or other contaminants are on the aperture or between the aperture and the c clip Be careful not to lose a small parts especially the c clip The following additional instructions on inserting the apertures should also be noted The platinum apertures must be installed so that the polished side faces up or towards the electron beam source Installing the c clip into the insert is done using both the aperture tool and the injector plunger tool Use tweezers to insert the c clip into the injector tool then use the injector tool to install the c clip into the aperture insert To put on the o ring push it onto and over the top of the insert making sure not to roll or deform it in any way 8 5 5 APERTURE POSITIONING IN THE LINER 1 Insert spray aperture D into the top of the liner tube and push it all the way to the bottom with the aperture tool The open end ofthe aperture faces down Insert aperture C 1 mm spray aperture into the top of the liner tube The top ofthe column liner is flared outward and the 1mm hole of the aperture should face up The aperture tool has a knurled end and three grooves cut into it Hold the aperture tool by the knurled end t
47. and the Vent button controls venting for a sample or detector High vacuum exchange Low vacuum Water In the Status module at the bottom of any page the actual vacuum C ESEM Tu Water y status is displayed with the coloured icon This icon represents three vacuum sections schematically each of which may have three ENT possible colours with the following meaning soo Pa I Green PUMPED Status to the desired vacuum mode HiVac LowVac or ESEM Specimen Current 2 84 DA e Yellow TRANSITION lon Beam Current O46 pA between two vacuum statuses pumping venting or purging Chamber Pressure 414E 5 Pa Grey VENTED FIGURE 3 1 THE QUANTA 3D VACUUM SYSTEM Electron Column Auxiliary Gas Valve lon Column Bypass Valve BaraTron Gauge Capacitance Gauge Column Isolation Valve Chamber Evacuation Valve Chamber Isolation Valve Environmental Backing Valve lon Getter Pump Pressure Limiting Aperture Pre Vacuum Pump Servo Isolation Valve Servo Flow Valve Turbo Molecular Pump Turbo Venting Valve Venting Valve Water Bottle Valve Vacuum System Vacuum Statuses xTm Vacuum message A Please confirm specimen chamber vent Venting will take approximately 1 minute Are you sure you wantto continue No Yes PUMP BUTTON When the Pump button is pressed and the status is Vented or when changing vacuum mode the target pressure that the system will pump to will dep
48. application 2 The Menu Bar contains all operation menus and submenus 3 4 The Data Bars contains all data information entered by The Toolbar contains all iconised button functions preference for storage printout of the image The Preferences dialogue presetting of operating conditions call out window Pages and Modules contains all pages made up of more modules Quad Image Windows 4 image windows mode providing independent image functionality modes The Main Image Wind ow single window image mode not displayed THE MAIN WINDOW displays status and control features for the xT microscope Control xTUI or UI including the image window application bar menu bar toolbar data bar and pages FIGURE 4 3 THE MAIN WINDOW Pie Detectors Scan Beam Patterning Hep ELIE 10709003 chanel 27804 PM 1 ys Hy 20 00 ky TAG del dei med se 4 111 UI Guanta Hi Software Control xT microscope Control Software THE TITLE BAR displays the application currently running FIGURE 4 4 THE TITLE BAR This bar will change displayed information depending on the associated program currently running e g EDX Image analysis THE MENU BAR displays pull down menus across the top of the screen below the Title Bar FIGURE 4 5 THE MENU BAR File Detectors Scan Beam Patterning Stage Tools Window Help
49. bring the rotation centre under the cross in the screen centre This eliminates image shift when focusing 6 Stigmator X and Y correction of each X and Y stigmator Minimises the movement seen Alignment in both X and Y procedures to eliminate image shift during normal stigmator correction 7 Stage Rotation Corrects the center of rotation at any point on the specimen by computer correction of the X Y offset from the stage mechanical center 8 PLA Centering Corrects the center of the projected PLA aperture to the center of the display screen atlow magnification 9 Filament Exchange Filament exchange procedure 100 ION Used for ion source starting and heating Source Control IGP starting after any shutdown state 101 ION Exhaustively adjusts lon column for all voltages and beam currents This Aperture Alignment eliminates image shift and defocus when changing HV and or beam current 102 ION Minimises the movement seen in both X and Y procedures to eliminate image Stigmator Balance shift during normal stigmator correction Alignments Quanta 3D Systems Alignments TIPS FOR X AND Y CORRECTIVE MOVEMENT source tilt Alignments 4 6 8 and 101 all require some corrective movements but this is simplified by X and Y being represented as a 2D Graphical adjuster When the 2D control is clicked on and the left hand mouse button is held in a cross hair shows on the screen with a small four ended arrow cursor located in
50. by shifting contamination back onto the aperture Polishing scratches the soft material and makes the aperture unusable for high resolution All apertures must be cleaned and must not have scratches at the center hole The top aperture should not have any scratches or defects 8 5 4 INSTALLING APERTURE A IN HOLDER FIGURE 8 8 REMOVING INSTALLING APERTURE A TWEEZERS A y e ere PLUNGER INJECTOR INJECTOR NOTE Insert Platinum apertures with sharp edge facing upwards i e towards the electron source APERTURE HOLDER 1 Place the aperture holder with its open slotted end on a flat surface and grasp it firmly with one hand 2 Using tweezers carefully insert the aperture sharp edge uppermost into the seating on the upper end of the holder 3 Again using the tweezers insert the c clip into the tube of the injector provided 4 Depress the plunger slightly until the plane of the c clip within the tube is approximately at a right angle to the axis of the tube Release the plunger 5 Place the injector vertically into the aperture holder so that the tube rests on top of the aperture 6 Depress the plunger to push out the c clip The pressure must be continued while retracting the body of the injector so that the c clip remains in place in the holder seating 7 Remove the injector and check that the aperture is properly clamped by the c clip This can be done either by inverting the holder over a Petri dish
51. can leave outgassing material Be aware that threaded surfaces should not be polished as these do not have contact to the beam and are a source of outgassing if polish is tapped Wash threads with alcohol or isopropanol if absolutely necessary After cleaning inspect all parts for residue and stains using a light microscope Down time can be reduced by purchasing spare Wehnelt and detector assemblies and having them cleaned and stored in a safe place where they can be ready to be installed into the Quanta 2762 1 co Maintenance 8 2 Accessing the Column 8 2 Accessing the Column For Tungsten W systems the column opens at the emission chamber to allow access to the Wehnelt assembly anode assembly and liner tube with apertures 8 2 1 OPENING THE COLUMN 1 Switch off the filament current and the high voltage by clicking off the HV button the colour will change from yellow to grey The emission will be reduced to zero 2 Select the Vent button in the Vacuum module This switches off the pump system and admits air or nitrogen into the chamber and column after confirmation 3 When the column and specimen chamber have reached ambient pressure lift the upper part of the column using the lever until the mechanical stop is reached While holding itin this position rotate a quarter turn counter clockwise After releasing the lever the upper part will stay in detent position The Wehnelt assembly is now outside the emission cha
52. coordinates now operate in User Units and are shown in the Location module by the UU symbol Beam Shift Reset begins the procedure to zero the beam shift and move the feature to the center of the field of view with the stage Zero Beam Shift restores X and Y beam shifts to zero values when beam shift has reached maximum limits computer beeps Home Stage Shift F3 homes the stage When the stage is homing the Stage Active dialogue box flashes onscreen When the stage is homed correctly the end position will be the last reference position stored All motorized coordinates will be set to default factory settings These settings see navigation page stage module in general will be as follows X 0 0 Y 00 R 0 T 0 Z presetlong working distance relative to stage type 27621 air Software Control xT microscope Control Software Link Zto FWD Shift F9 A E A sets the Z coordinate value to actual Free Working Distance FWD value This allows accurate movement between the known height of the sample and the end of the lens Note the icon button can be in one of the three following conditions e Coloured icon with a red question mark the HV is on but the Z to FWD may not be correct The function is disabled This occurs after the system is vented until the vacuumis restored e Coloured icon with red line circling between the lens and baseline Z to FWD needs recorrection The function is enabled but the Z co
53. e The momentary adjustments of all the system parameters high voltage magnification stage positions are lost if they were not saved Caution A trained FEI Service Engineer or Authorized Supervisor must restart the system after an emergency power off see 100 ION Source Control in the Chapter 6 Alignments SOFTWARE CONTROL OVERVIEW This chapter gives an overview of the xT microscope Control referred to ass Ul or sometimes xTUI in dialogue boxes xT microscope Server and FEI User management software and describes the functionality of each part of the user interface It takes you from the first main window and menu bar through each item on the pull down menus Graphics illustrating most of the choices help you locate specific features The software interface controls most system functions including imaging image and movie gathering manipulation output detection and analysis stage and vacuum control OTHER SOFTWARE AND HARDWARE Call Customer Service for advice before installing software or hardware that is not required for system operation Other software such as screen savers or hardware network cards may corrupt the xT microscope Server Control software under some circumstances and may invalidate warranty For more detailed information about Windows 2000 refer to the Microsoft Windows User s Guide shipped with your system Software Control Software Interface Elements Software I
54. features eucentric tilting and must therefore have a Z position ata set height from the stage rotation head surface to bring the sample surface into eucentric focus 72 27621 Stages 50 x 50 mm Stage 5 Axis Motor The eucentric holder is screwed into the center of the rotation head of the stage When the stub is fitted with the specimen tilting the stage should bring the specimen to the same height as the tilt axis The specimen should be no greater than 1 to 2 mm thick or it will be impossible to bring it into eucentric focus EUCENTRIC HEIGHT Establishing the eucentric height is an important part of setting upa sample for observation or modification The eucentric height should be adjusted after loading any new samples as the loading procedure clears all height information When a feature of interest is at eucentric height you will be able to use the different Quanta 3D workstation components such as the GIS and EDX ina safe and optimal way The eucentric point is the point at which the stage tilt axis and the ion and electron beam axes intersect At this point no matter which direction the stage is tilted or rotated the feature of interest remains focused and almost no image displacement occurs Finding the eucentric height on the workstation is a process of positioning the sample so it is at the eucentric point The following figure is an overview of this process FIGURE 7 4 UNDERSTANDING EUCENTRIC HEIGHT The beam axis and
55. for 5 minutes using alcohol p a or isopropanol The liner is long so it may be necessary to reverse it in the beaker and give it a further five minutes cleaning time 7 Rinse with alcohol p a or isopropanol Caution Do not place parts together in the beakers Wash separately as damage can occur to the metal surfaces 8 First blow dry with a compressed air canister then dry thoroughly under an infra red lamp 15 min to 1 hr at a temperature of between 80 C and 100 C Do not bake in an oven 8 5 7 INSTALLING THE LINER TUBE 1 Ensure that the apertures are correctly mounted in the liner and that the column liner upper o ring is on the liner 2 With a gloved hand carefully push the liner down into the column until it seats on the bottom o ring The column liner tool can be used to re insert the liner tube also 3 Refer to section 8 4 6 Installing the Anode Assembly to complete the column installation procedure 4 With a Wehnelt installed close the column 5 Pump down the system using the Pump button on the Start up or Work page If the vacuum does not reach the Vac OK message within 10 minutes the gun o ring may need to be reseated or replaced Column alignment will need to be performed after this procedure Maintenance 8 6 The Standard Insert 8 6 The Standard Insert The following tools and procedures are used to install and remove the standard insert from the lens pole and to assemble Pres
56. for movement include Shift Get and Track and the Work Page functionality You can access the Navigation Page by clicking on the appropriate icon above the pages The stage can be tilted over a 90 range 15 75 The tilt axis always intersects the electron optical axis of the column at the same height 15 mm FWD for eucentric tilt When the specimen is positioned at this height the specimen can be tilted in the eucentric plane Caution When moving the stage or tilting the specimen the magnification may need to be reduced so the feature of interest on the screen will not be lost The maximum sample size 100x50x25 mm is allowed only for tilt angles in the range 10 to 52 Exceeding this range may result in damage to the sample or pole piece FIGURE 7 2 50 X 50 MM STAGE MOVEMENT Legend z 25 mm int 25 mm ext x 50 mm y 50 mm t 15 75 r 360 continuous Stage door QUANTA 3D 200 STANDARD SAMPLE HOLDERS The sample holders provided with the Quanta 3D 200 consist of a single stub holder and a multiple holder The single holder has a spring clip fiting and a secure fitting screw The multiple holder is a 7 stub holding disc with a spring clip fitting only Both holders have the same threaded shaft which screws into the stage center and can be securely attached to the stage by means of the conical locking piece FIGURE 7 3 STANDARD SAMPLE HOLD ERS The Quanta 3D 200 stage
57. gained by hand only hazards such as 12 27621 Safety and Handling Safety e shock hazard e radiation hazard EMC hazard e mechanical hazard can occur which can result in personal injury or equipment damage if recommendations and instructions are not followed Any interruption of the protective conductor inside or outside the instrument or disconnection of the protective earth terminal is likely to make the instrument dangerous Intentional interruption is prohibited Whenever a safety feature of the equipment has been impaired e g by failing to perform the intended operation oritis in a fault condition the instrument MUST be made inoperative and secured against any unintentional operation In all cases display a warning notice prominently The matter should then be referred to the appropriate servicing authority USER MAINTENANCE There may be additional limitations to safety and handling not mentioned in this manual Never attempt maintenance or service of any kind on the electron column other than that described for the user in this User Manual Allow only trained personnel to perform user maintenance procedures Always observe appropriate safety practices in dealing with electronic circuitry Read and understand the safety precautions in this chapter and throughout the manual Observe industry approved safety methods and procedures If you have any doubt regarding approved safety procedures contact safety pe
58. icon button on toolbar Stigmator Shift right mouse button Magnification keys on numeric keypad Shift mouse wheel for fine control Ctrl mouse wheel for coarse control Shift Ctrl left mouse button Focus Right mouse button System Overview System Layout of Quanta 3D QUANTA 3D OPTIONS A range of hardware and software are available as options for Quanta 3D workstations This range will be extended when new items become available Some of the options are Gas injectors for material deposition W Pt C for enhanced etching Detectors SSBSED two segment solid state back scattered electron detector Allows imaging in Zcontrast and topographical mode STEM 1 solid state transmitted electron detector GBSD combined gaseous back scattered and secondary electron detector for ESEM mode 2nd CCD Camera additional infrared camera for in situ inspection of sample GIS and detector positions FIB Software Options Auto Slice amp View software package for automatic sample slicing and recording of the crossections Prepares data for 3D reconstruction software AutoFIB general tool for creating editing and running scripts AutoTEM special script running on Auto FIB for automatic TEM sample preparation Specimen Holder Kit accessories for multiple sample mounting EDX Software Options software interface for third party EDX producers Image Analysis software for image archiving processing and
59. in Step 5 Image briefly on the area to set the magnification and position Click sNAPSHOT to grab a l Beam frame Open the Patterning page and do the following Select REGULAR CROSS SECTION from the pattern tools menu on the Patterning page Bring the cursor to the image area and draw a rectangular box about 2 um from the area of interest While still on the Patterning page Within the property editor set the APPLICATION to si and enter the value for the DEPTH as needed Press ENTER to update Click SNAPSHOT to grab a Beam frame Click on the START PATTERNING icon in the toolbar Use sNAPSHOT to update your image as desired by grabbing a frame from the lon Beam or E Beam Note that grabbing multiple frames will affect the depth slightly as the total pattern time clock continues to run while you are grabbing frames Operations Milling Proce dure Making the Second Cut Optional Use CLEANING CROSS SECTION from the pattern tools menu at a reduced current for this step TABLE 5 22 MAKING THE SECOND CUT OPTIONAL Step Action of the beam current used for the first cut If you haven t already done so align both beams with the Beam Coincidence procedure Click SNAPSHOT to grab an l Beam frame Click CLEANING CROSS SECTION Bring the cursor to the image area and draw a rectangular box Adjust its size so that its leading faceis approximately 0 2 um from the target area and the trailing edge extends just b
60. indicate that an Print Ctrl P additional submenu of choices will display If a selection is a parameter value the new value is updated immediately and a check mark appears in the pull down menu Log Off Factory Exit Beam Patterning Stage Tools Using the Mouse Electron Beam Click on the menu item in the Menu bar then drag the cursor down to AS the desired selection and release the left mouse button Optical Beam Couple Magnifications Using the Keyboa rd BEER Ee creo Press ALT plus the underlined letter for example ALT F for the File menu and then select from the choices with the left mouse button or with the up down left right for submenus arrow keys Some often used commands can be quickly activated by hot keys a combination of simultaneously pressed keys at any time This possibility is given by a particular button combination on the right side of the pull down menu adjacent to the appropriate command RADIO CHECK BUTTONS Within a group of related round Radio buttons only one selection Mode f High vacuum can be made active at any time by clicking in the individual box C Lowvacuum A single one or a group of square Check buttons can be switched on checked Off empty by clicking in the individual boxes RE empty by g e AY TIF ri 27621 sT VERCLILIETE message A Airase conte speen Charb war Wiring wall bakt appecomalok 1 reno Arno SL you ward io conto 7
61. key procedural information for the alignment step in operation e Steps module ranges from 0 and indicates the actual step position during an alignment procedure e Status module common for all pages contains important information about the system The alignment procedures are used to align the column and determine fine tuning for the electromagnetic system The software stores column parameters such as Gun Tilt X Y Gun Shift X Y and other data that ensures minimum image shift when focusing and stigmating images Note Alignments should be performed by authorized FEI Service personnel or authorized supervisors with an appropriate level of understanding Improper alignments can make the system difficult to use Please read Chapter 6 Alignments fully before proceeding with these adjustments THE ALIGNMENTS MODULE Any possible alignment can be choosen from the List box e 1 Source Control e 2 Tetrode Alignment e 3 Gun Alignment e 4 Condenser Alignment e 5 Final Lens Alignment e 6 Stigmator Alignment e 7 Stage Rotation Centre e 8 PLA Centering e 9 Filament Exchange e 100 ION Source Control e 101 ION Aperture Alignment e 102 ION Stigmator Balance Software Control FEI User management Software FEI User management Software EJ SE Fla UserManagement The FEI User manage ment software allows to FEI Account Admistrators FEI Supervisors and FEI Microscope Users to or
62. magnification When Beam Shift comes to the limit in any direction on a Get command the Beam Shift will zero and the Stage will be updated for the movement necessary to bring the object to the center The maximum range for successive Get operations equals the range of the stage movement At high magnifications the range is not limited by the maximum beam shift as the stage updates FIGURE 7 9 GET FUNCTION 30 Jan 01 Det File Filter HFA H Mag 15 14 43 xxx xxx xxx 1 02 mm 0 00 Y 101x Test label STAGE FRAME SHIFT The stage can be moved approximately 80 of the field of view in any direction by clicking on the appropriate Arrow key on the keyboard The movement engine automatically calculates due to magnification whether to use Beam Shift or Stage movement When Beam Shift comes to the limit in any direction the Beam Shift will zero and the Stage will be updated forthe movement necessary to move the frame The maximum range for successive Frame Shift operations equals the range of the stage movement Stages Stage Related Functions Stage Related Functions Stage Tools Window Help xT Align Feature Compucentric Rotation Fle Define User Units Oriset Alignment User nits Beam Shift Reset Zero Beam Shift Home Stage Shift F3 Link 2 to EYE Sais Reference Position Tit OP Cirl E Wie See Ctrl I Preferences Cto XT ALIGN FEATURE xT Align Feature is designed specifically forlong features
63. minimise oils dust or other contaminants left inside the chamber NEEDED ITEMS e Class 100 clean room gloves e Specimen stubs and conductive adhesive material e Tools tweezers 1 5 mm hex wrench screwdriver e Prepared or natural specimen NATURAL SPECIMEN If no coating is desired the LowVac Mode can be used to stabilise the specimen for observation This mode is useful if there is a Suspicion that a coating might alter the specimen If the specimen contains any volatile components such as water or oil and therefore will not withstand coating then the ESEM mode can be utilised with the correct environment gas and pressure to allow observation of the specimen in its natural state COATED SPECIMEN If the specimen is nonconductive plastic fibre polymer or other substance with an electrical resistance greater than 10 ohms the specimen may be coated with a 1 5 nm layer of metal Platinum Palladium Pt Pd Titanium Tietc This conductive layer reduces beam instability due to sample charging and improves image quality For succesful imaging rough surfaced specimens must be evenly coated from every direction Biological cloth and powder specimens may require carbon or other conductive painting on portions of the specimen that are hard to coat Coating reduces beam penetration and makes the image sharper It may mask elements of interest for X ray analysis thus the use of carbon for geological and biological specimens
64. operators has its own list of property editors below the main dropdown top box so that changes can be made Operations Setting Preferences BEAM TAB Beam Blanking may be necessary for either beam during a session The following conditions can be set by ticking the check boxes FIGURE 5 35 BEAM PREFERENCES xTm Preferences x ESEM Charge Neutralization General Movie Databar Units Presets Scanning Beam Detector Beam Blank options 3 M Blank when all quads are paused Blank after Snapshot Blank during long stage moves Mode switching point E alytical ka Auto off Maximum idle time 7 coca mes Beam Blank Options e Blank when all Quads are paused not available for Quanta 3D e Blank after Snapshot not available for Quanta 3D e Blank during long stage moves blanks the beam during long movements across a sample to prevent any effect from either beam on the surface ofthe sample Mode 1 Switching Point Not available for Quanta 3D Auto Off Not available for Quanta 3D 27621 set Operations Setting Preferences DETECTOR TAB displays specific active for the Quad in use detector menu Those detectors that have a Custom mode will have a Preferences dialog for adjustment For settings see particular detector instructions FIGURE 5 36 DETECTOR PREFERENCES xTm Preferences ESEM Charge Neutralization General Movie Databar Units Presets ocanning Beam Dete
65. or cleaning cross section step 2 option 1 2 um Regular cross section step 1 Mot to Scale Use caution in positioning boxes if you are sectioning a very specific point Use fine milling to expose the exact area of interest For example a 2 um offset should be more than enough at 2 nA of current Calculate the outline as the height of the box relative to the depth to be milled If you intend to view at 52 and see details 3 um from the surface then the original box should be at least 3 um tall Operations Milling Procedure Making the First Cross Section Mill a regular cross section with five superimposed box patterns sharing three common edges TABLE 5 21 MAKING THE FIRST CROSS SECTION Step Action eee Action 1 Select a first Quad by clicking in it and the E Beam icon a first Quad by clicking in it and the E Beam icon from the toolbar and begin scanning Find the eucentric position Move the stage to where you want to mill the cross section Tilt the stage to 52 Save this position in the Location list in the STAGE module Move the stage to a new position for optimization of the l Beam image Align both beams by correcting the coincidence found in the section Beam Coincidence From the toolbar select the second quad and click l B eam icon Set the Beam current to 150 5000 pA depending on the size of the cross section Optimize the Beam image Restore the stage position you stored
66. powder 2 Rinse with de ionized or distlled water 3 Rinse in alcohol or isopropanol and dry with clean compressed air Under normal use the insert should be inspected only when being inserted It should only be removed for cleaning when indicated by poor astigmation Maintenance 8 7 Gaseous Detectors 8 Gaseous Detectors 8 7 1 CLEANING THE GSED OR LFD This section will describe how to remove and disassemble the GSED assembly for cleaning FIGURE 8 12 REMOVING THE GSED ASSEMBLY 1 Vent the chamber before beginning 2 Pull the end of the GSED detector head down to remove it from the standard insert The insert will remain inside of the pole piece 3 Pull the GSED pin contact board out of the signal connector mounted to the chamber ceiling The PLA is part of the GSED detector and can be cleaned by inserting a toothpick or something similar into the hole The signal ring is permanently attached to the underside of the detector and can be cleaned in a similar manner 8 7 2 CLEANING THE GBSD 1 Perform steps 1 and 2 above to remove the GBSD PC board from the chamber 2 The GBSD is easily cleaned with a toothbrush Soft Scrub CIF cleaner and water as with the GSED To access the PLA and converter plate remove the two screws holding the collector grid to the PC board as shown in Figure 8 11 Scrub the SE grid gently as this can be easily damaged FIGURE 8 13 DISASSEMBLING THE GBSD 27621 Ee M
67. right hand grasp the detector by the rigid connector end Hold it with the detector head facing back towards you and the yellow Torlon ring facing up Insert the detector gold fingers facing forward into the connector located under the ion column This is made easier by inserting the right side of the detector into the visible portion of the connector then rotating the detector into position A keyed position in the connector will prevent the user from inserting the detector up side down Next place the yellow Torlon ring of the detector head under the lens insert and press the detector head up onto the insert This requires litte force and can be done with one finger The yellow Torlon seal should be fully in contact with the lens FIGURE 5 8 THE GSED INSTALLED IN THE SEM ry 1 Signal E Connector S Flexible 4 PC board Mounting iga collar Operations Detector Types and Usage Removing the GSED Caution DO NOT pull the detector from the connector first intending to then pull down to remove the detector head from the insert This will damage the detector Toprevent damaging the detector it is important to remove it as described here To remove the GSED first remove the detector head from the lens insert Do this by catching a fingernail or thumbnail of the gloved hand on the FRONT of the yellow Torlon ring and pull down A shoulder is machined into the Torlon ring which is specifically designed f
68. screen to the center of the screen Release the mouse button Note PLA Centering should be returned to zero after the PLA is removed by selecting this alignment again and right clicking the 2D adjuster and selecting zero This will remove the correction which will no longer be needed since the PLA is not present Alignments 9 Filament Exchange 9 Filament Exchange Alignments When the Wehnelt or Wehnelt filament is replaced a new saturation value has to be determined for the filament 4 Filament Exchange v 1 Insert the Wehnelt and pump to high vacuum Select the ETD detector in the imaging quad 1 2 Ifa new filament is used press the Reset filament lifetime button OS a aie 3 Software automatically selects HV 20 kV Set the Brightness A Moed adjuster to a gray value and the Contrast adjuster so that some lifetime button to reset the noise is visible filament lifetime counter Tha net sterol ee 4 Switch on the electron beam by pressing the Beam On button in parameters the Beam Control page eie aie avon 5 Slowly increase the filament heating with the Filament voltage continue or the Cancel button dust ti sed to quit adjuster until an emission appears 6 Carefully saturate the filament Use the Xover mode to check the right saturation 7 Maximize brightness with Source tilt control Instructions Note In this procedure the Source tilt 2D control sets the source tilt for all Peset filament lif
69. see above Source tilt J Absolute source tilt T Absolute really Relative Software Control Software Interface Elements TWO DIMENSIONAL X Y CONTROLS are represented by an X Y box The position of the crosshair is related to the actual settings and to the full range of the parameters being represented by the perimeter of the box Click and hold down the left mouse button in the grid to display a crosshairin the image area The cursor changes to a 4 axis cross and can be moved in four directions that correspond to the X Y screen values To fix the values release the mouse button and the position of the crosshair is updated The sensitivity of the X Y control can depend on the magnification chosen At higher magnification you may click on the center square with the right mouse button to open a dialogue showing a choice of Zero Absolute ticked unticked Zero brings the 2D control to the center Absolute ticked gives a linear movement and Absolute unticked gives a Logarithmic response for high sensitivity at higher magnification TABBED DIALOGUES form either across the operating page or in a quad lower right These can be alternately opened by clicking on the label tab along the top of the dialogue area Preferences and other conditions can be changed and stored in these dialogues FIGURE 4 1 PREFERENCES TABS xTm Preferences x ESEM Datahar Units Charge Neutralization General Movie
70. status Closed Open Details Tab displays the characteristics of the active Gas Injector The characteristics can be changed by entering the details to configure the injector Selected GIS In Patterning editor an application file which uses some of the installed GlSes may be choosen for a given pattern CHOOSING A GAS TYPE Gas types are used to deposit on or etch away surface material A gas type will be allocated to each Gas Injector and up to 3 gas injectors can be mounted on the system in total If an OmniProbe is mounted then up to 2 GIS s can be mounted The Gas Type files are found in the PROPERTIES list under GAS TYPE on the Pattem page Clicking on the right of the entry will promote a dropdown arrow Click on the arrow and a list of allocated gas types for the GIS system will be displayed up to the number of GIS s installed Click on the one required and it will reside inthe GAs TYPE slot in the PROPERTIES list This has now allocated the GIS to be used with its gas type Choosing an application file in patterning property list automatically sets the appropriate gas type When choosing from the list on the GIS module only the GIS gas type chosen in the Pattern PROPERTY EDITOR iS ready for active use SETTING UP THE GIS The GIS to be used should be setup before patterning is started It must be held heated and inserted but not open until it is necessary to use When not in use the GIS should be closed cold and ret
71. the beam shift control to correct any offset in the coincidence of the two visualized features The accuracy should be within 5 um Test Pattern A test pattern can be made with a simple pattern using the lon beam and after observing it with the Electron beam to see that ithas correct coincidence of beams 2762 1 5 Operations Milling Proce dure Milling Procedure Bring sample to the eucentric position and make 52 tilt Now you can start to milla pattern on the sample material The procedure is as follows TABLE 5 18 MILLINGA PATTERN Step Action MEEL iN Patterning Page and draw a pattern in the active Quad GENETTE ve water Focus and stigmate the beam on the area adjacent to the pattern Save position where you want to mill so that you can easil y return there after you have optimised the image If necessary use the MUI sHiFTx and y knobs or resize the pattern to correct positioning 7 Snapshot a single frame to confirm the pattern position Switch on the EPM j Click Start patterning on the Patterning menu or click on ma the Start patterning button on the toolbar to begin milling If at any time during milling or deposition you wish to stop in progress click on the Pause Patterning icon on the toolbar When you pause and restart patterning the software continues the patterning process where it left off m If patterning is stoped and or restarted after patterns are modified added or deleted patt
72. the purge back after a wet experiment see Setting Preferences ESEM tab at the end of this chapter PLA CONES e Standard Insertis installed at all times except when the optional Heating stage is in use Environmental detectors such as the GBSD and GSED and the PLA cones press onto the insert to form a gas seal Chamber gas that flows through the detector apertures are pumped out through the holes in the sides of the insert EC1 area A gas restricting aperture is found at the top of the insert This aperture also acts as a final or objective aperture The pressure above this aperture is considered tobe high vacuum Any foreign material that accumulates on this aperture will greatly affect the image If stigmation is not possible to correct it is usually a sign that this aperture needs to be cleaned or replaced e LowkVPLAis installed onto the standard insert in case the LFD is used for low vacuum and low kV imaging i e below 5 kV to reduce beam loss in the gas This PLA is used when imaging at shorter working distances lt 9 mm It contains a 500 um aperture which restricts the lower magnification limit and allows a maximum chamber pressure of 20 Torr 2600 Pa e HotStage Coneis used with the heating stage in combination with the hook wire or LFD It has a 1000 um PLA and can be used without the hot stage when beam protection is desired with a larger field of view Thisis not a standard item and can be ordered The X ray
73. the feature Beam of interest should intersect at eucentric height Eucentric height Tilt Stage 15 1 Notice how the sample is not at eucentric height when it 2 When the sample is not at eucentric height tilting the is below the eucentric point You could focus on the feature stage moves the feature of interest out of the beam but as seen in 2 the feature would move during tilt Feature moves into eucentric height and into focus Feature is at eucentric height _ Z adjustment 3 Adjusting the Z axis when the stage is tilted moves the 4 Now regardless of the stage stilt angle the feature of feature of interest back into the field of view It normally interest always stays at the focal point of the beam also brings the feature into focus provided that the beams are focused on the eucentric point Stages 50 x 50 mm Stage 5 Axis Motor Finding Eucentric Height For many samples other than wafers or for greatest accuracy use the following manual procedure to obtain eucentric height Eucentric height requires an E Beam working distance of exactly 15 mm TABLE 7 2 FINDING EUCENTRIC HEIGHT MANUALLY Step Action 1 On the Stage menu select ZERO BEAM SHIFT lf the small red cross is not already displayed in the center of the screen press Shift F5to display it 3 Obtain an image with the E Beam and focus Run the Link Z to WD procedure and go to 15 mm FWD 4 Set stage tilt to 0 Ctr
74. the start of one pass and the next read only e Shape Area The surface area of the pattern Note that the area is not simply the bounding rectangle for example a Grouped shape may have a much smaller Area the sum of the Area s ofthe grouped shapes than its bounding rectangle e Number of Passes That the beam makes over the pattern Changing this will change the Depth e Defocus WD of the beam WD change e Blur dblur Like Defocus but specifying the additional diameter of the blurred spot e Interaction diameter dinteraction for an infinitely small beam e Total Diameter dtotal The combination of the beam diameter and interaction diameter read only e Total Beam Time the total time that the beam is unblanked for this shape 538 27621 Postion Position Y sas Injection Cherian meme In Gas Type ONP dep OIM c Heat Flow Cold Cold Gas Injection Overview Details Selected GIS Pr y Retracted Of El Heater sas Injection Overview Details In Gas Type OMF dep OMS Chi Heat Flow Cold Cold Operations Patterning THE GAS INJECTION MODULES GIS provides the capability to select the type of gas deposition or etch material Overview Tab e n check box In checked Out Unchecked e Gas Type check box the gas assignment to the port the pattern has the colour of the gas used e Heatstatus Cold Hot e Flow
75. these states RUNNING gf STARTING or STOPPING is displayed Manada AAR Microscope module LI Stabe Runs d Here you can find six buttons controling individual features op Viewserer Microscope e Start Stop buttons starts stops xT microscope Server services en stop Smas e Start UI Stop Ul buttons opens closes xT microscope Control Stap LI Aachen SS softw are UI e Shutdown button shuts down xT microscope Server software in Admrennusiraation Install dician c Program filas Venere th ree steps Activa configuration JFeiMicroscope Fi 1 same as Stop Ul button Autorun ar A FeMicroscop 2 same as Stop button coe Senit T mal winde 273 A i goe EE Se 3 switches power off reverse procedure to pushing power button Tess EE found on the front control panel of the microscope Hal amp eik CoCrealrd Hallera erk ic Advanced button All O simtea da Heese rose displays detailed settings and operational conditions used for gt der sige accurately specifying the software operation hardware function state HalhManurnF IBUpiice ad es FT harian Output when calling the service Halvacuum F T H lGun i Hehe a ri 27621 Software Control x7 microscope Control Software xT microscope Control Software 1 2 3 gt Hd x4T micros ope Contra The following elements make up the xT microscope Control see Figure 4 3 for numbering 1 The Title Bar labels the
76. valid Purge button is enabled in Low Vacuum or ESEM mode Pressing on this button starts purging When purging the button is yellow and pressing on stops the purge 552 27621 Operations Setting Preferences TABLE 5 27 DEFAULT PURGING SETTINGS FOR DIFFERENT PLA SIZES PLA size Minimum Purge MaximumPurge Number um Pressure Pressure of cycles Torr Pa EIA Pa NONE O 05 67 67 1000 1 134 50 1 134 10 1340 300 10 1340 The maximum allowed pressure depends on the PLA and the gas type Ifthe Maximum pressure defined for Custom is higher than allowed with the current PLA size the pressure should be reduced automatically to the maximum allowed No warning is given to the user when this happens instead the Preferences Presets see below dialogue where the Custom values are entered warns the user of this possibility in the Tool Tips for the maximum value edit control System Behaviour When you seta new purge condition and press OK Apply button e Ifthe chamber is not being purged no action is undertaken e Ifa purge procedure is active it will immediately change to the new parameters both pressure and number of purge cycles e Active purge cycle can be aborted by selecting No Purge radio button e If anew auxiliary gas type is selected during purge procedure is active the new gas type will be used the next time the microscope is pumped to either Low Vac or ESEM When pressing Purge button
77. which relates to the orientation needed on the sample sT Aky Feature Penise Poebon Align Feature Pld a E Poon ented C Weniceal Pio otk m fhe cine und lo speti the test point F1 Carel Click with the left mouse button on the first point somewhere along the feature The coordinates are updated in the dialog Now drag the line out from the first point to the second point using the mouse The second coordinates update continuously until released by clicking again Click on Finish to end the selection and for the program to orientate the feature to the selected horizontal or vertical Click on Cancel to cancel the function xT Align Feature 3 i x Fealure Fogom hon Feature Pl Me 18 588 mm Y 24 725 men Honzontel Mercal Piia 19 04 ren is Ad bee mn Mowe points by dragging hem The stage will move to that location and apply the alignment across the length of the feature Stage Tools Window xT Align Feature Compucentric Rotation Define User Units ofset Alignment User Units Beam Shift Reset Zero Beam Shift Home Stage Link 2 to AWE Reference Position Tilt OP Tit 52 Preferences Help P12 Shift F3 Shift FS Ctl E Ctrl I Ctl o Stages Stage Related Functions COMPUCENTRIC ROTATION F12 Clicking on Compucentric Rotation in the Stage menu places a green circle in the active quad At a point on the perimeter of the green circle is
78. while focus is on the pattern This will bring it to number one position For the last position click on the right double arrow in the same manner and the pattern will be made the last in order The remaining patterns mill in the order in which they were created You can also reorder the entire set by clicking on the patterns in the order you want them to mill FIGURE 5 21 REORDERING PATTERNS 1 Rectangle 1 Rectangle 2 Rectangle 2 Line 3 Circle 3 Circle 4 Linel 4 Rectangle Numbers are displayed close to the pattern in front of its name to indicate the current order 27621 537 Operations Patteming THE PATTERNING PROPERTY EDITOR allows changing the properties of the selected shape or shapes It displays the properties in a fixed sequence such that the most often needed properties are at the top EET E Application Clicking on the value slot next to the application produces a dropdown arrow Click on the arrow and a list of applications will be displayed Click on the one required and it resides in the Value slot This sets the subsequent properties There are pre defined non editable and user defined Saved applications Some of these Application files use GlSes This is now the active application file for the GIS The appropriate application file should be used with the gas type it was written for Rotation e Width Length Depth dimensions of the pattern when finished Enabled e Positio
79. xT microscope Server software and to switch Off the both PCs and the monitors 6 Complete Disconnect all power supplies inputs and outputs Shutdown Switch off the nitrogen inlet if used Note 2 Waiting for a new user leaves the status of the xT microscope Control software non operational and only the xT microscope Server software is active Therefore changing the user does not require Loggin off Logging on at Windows 2000 level but just restarting the Ul level 2 The power plug should not be disconnected The system can be left in this state if electrical power is supplied to the instrument because the IGP is running and pumping the on column It is strongly suggested to always leave the chamber in HiVac mode when not being used When the sample chamber is left in the LowVac ESEM mode when the microscope is not being used water vapour is likely to accumulate in it and the water reservoir or gas cylinder empties prematurely d Complete shutdown should be performed only if absolutely necessary and for the shortest possible time so as to recover the column vacuum without the necessity of a system pump Normally you would only perform a complete shutdown for transportation of the system or for service actions like repair to essential systems such as electrical and air supplies The shutdown procedure brings the system to the non powered state where the vacuum in the lon column area is no longer supported by
80. 0 e By dragging the slider changes the magnification exponentially The further from the centre the greater the magnification change e By dragging the mini slider changes the magnification linearly and coarsely e Clicking the star key gives around magnification number 426 27621 Software Control Beam Control Page THE ELECTRON BEAM CURRENT MODULE The Neutralize Button switches the Charge neutralization mode on or off This is a special electron beam mode used for ion beam milling of non conductive samples The ions can positively charge the sample causing an image drift and spoiling the beam probe quality In charge neutralization mode the electron beam produced by the electron beam column is used to compensate for the positive charging The electron beam is unblanked during the milling It does not scan and is usually strongly defocused How to use the charge neutralization 1 Switch on the electron beam Set the eucentric working distance and find the area of interest Tilt 52 Pause all electron beam quads 2 Select a small ion beam current lt 100 pA and image an area close to the place you want to mill with ions Pause the ion beam quads 3 Select the ion beam current for milling 4 In the Preferences Charge Neutralization tab optimize the charge neutralization parameters so that there are no charging effects visible in the ion beam image The image must be stable in position focus and brightness
81. 0 22 Point to alterations with regard to the previous version The information provided in this Material Safety Data Sheet is correct to the best of the knowledge information and belief of Philips Electronics Nederland B V at the date of its printing MATERIAL SAFETY DATA SHEET According EC 91 155 1 Identification of the substance preparation MSDS 00344 Product code 12nc 1313 503 23601 Chemical name NITROGEN REFRIGERATED LIQUID EC number 231 783 9 Formula Na Use Miscellaneous Publicationdate 2002 09 02 Emergency phonenumber 31 0 497 598315 2 Composition information on ingredients Component CAS number EC number Percentage EC label NITROGEN REFRIGERATED LIQUID 7727 37 9 231 783 9 100 0 R 99 3 Hazard identification R phrases e Suffocating in high concentrations 4 First aid measures Skin Incase of freezing DO NOT remove contaminated clothes In case of burnings always call for a doctor Ingestion Not applicable Inhalation Bring victim into the fresh air as soon as possible and let rest In case of severe exposure call for a doctor In case of breathing problems loose squeezing clothes and if victim is conscious bring victim in high sitting position In case of stagnation of breathing give IMMEDIATELY oxygen and transport to hospital as soon as possible Eyes Not applicable Remarks first aid none 5 Fire fighting measures Fire extinguisher Hazardous decompo
82. 0 60 RA Electron Beam Current ie 08l nA Spot size AE 45 HIGH VOLTAGE AND BEAM CURRENT The choice of High Voltages and Beam Currents displayed in the editable dropdown listboxes on the toolbar depends on the type of beam that is active either Electron or lon The High Voltage and Beam Current are related any selected HV provides an individual set of beam current values Changing HV will change the beam current values Changing High Voltage Click on the dropdown arrow to the right of the text box or directly in the text box and the list of voltages will be available Click on the required voltage and it appears in the text box The dropdown list automatically closes If this is done while the beam is on the change is immediate An intermediate value can be entered into the text box for HV and this provides a calculated range of beam current values Default HV values in the list box can be set from the Preferences Beam tab Changing Beam Current Click on the dropdown arrow to the right of the text box or directly in the text box and the list of currents will be available Click on the required current and it will appear in the text box The dropdown list automatically closes If this is done while the beam is on the change is immediate For the Electron beam the correct beam current for a particular magnification can be determined when you achieve good focus and astigmatism correction easily Choosing the c
83. 1 2 the right ofthe Detector menu This will open a secondary menu with fall the default operating modes atthe top of the menu and a custom mode at the bottom Clicking on the Custom label activates the mode Preferences Cirta and this will be displayed after the detector label in the main menu FIGURE 4 13 DETECTOR SUB MENU EXAMPLES Detectors Scan Beam Patterning Stage Tools Window Help Detectors Scan Beam Patterning Stage Tools Window Hel Y ETD Secondary Electrons a Secondary Electrons ETD Secondary Electrons LFC Backscatter Electrons Secondary Electrons GEE Custo rm ASEO GEE BESE SSESED SoBSED FMO FME External External IF IR pli plis Preferences Preferences Conditions of bias grid voltage or switching of segments of the Custom mode detectors can be initiated in the Preferences Scan Beam Patterning Stage Tool Detector tab These will change in real time but do not interfere with v Pause F the default settings for any detector Snapshot Photo F2 The Scan Menu Alt S Videoscope FS _ Opensthe Scan menu functions Reduced Area F7 A Pause F6 a Full Frame pauses the image The behaviour of the pause function after clicking ve the icon can be set in the Preferences General tab External e Stop at end of frame EE Bla Ctrl B clicking once stops the scan at the end of the frame clicking twice same as Stop immediately Sl Seel Stop immediately ees EN clicking
84. 296 pA 040 pA 9 19E 5 Pa o lon Beam Current Chamber Pressure A Y The Beam Control Page is an FEl User level page containing the essential components divided into the following modules e Vacuum Mode module is used to pump the system into either HiVac LowVac or ESEM mode and to ventthe system e System module brings the system to Sleep Standby Full Operation states see Chapter 3 e Column module controls High Voltage switching on or off e Beam module contains Stigmator and Beam Shift controls e Magnification module contains Magnification controls e Electron Beam Current module allows Charge Neutralization start and Spotsize value setting e Detectors module allows adjustment of contrast and brightness for the currently used detector e Status module common for all pages contains important information about the system THE VACUUM MODE MODULE is used during specimen exchange or to change the instrument status in and around the final lens pole The Pump Button starts the pumpdown procedure for the column and the specimen chamber When the chamber is evacuated the system allows high voltage to be switched on when the pressures in the chamber and the column are ready for operation The Vent Button initiates the following sequences e Electron Column Switches High Voltage off e lon Column Blanks the beam is and closes the Column Isolation Valve CIV Initiates the largest aperture
85. 5 Method place Include Locking point to disconnect to verify no residual Blocking point or Linkage dissipate any energy exists removal point as applicable stored energy Main console and Mains power cord and plug Disconnect cord Volt Meter Test electrical cabinet and apply tag EMO transformer Mains power cord and plug or Disconnect cord Volt Meter Test Power conditioner remove module from system and apply tag Power Distribution Mains power cord and plug or Disconnect cord Volt Meter Test Box remove module from system and apply tag Vacuum System Mains power cord and plug or Disconnect cord Volt Meter Test remove module from system and apply tag High Voltage Mains power cord and plug or Disconnect cord Volt Meter Test System remove module from system and apply tag Deflection System Mains power cord and plug or Disconnect cord Volt Meter Test remove module from system and apply tag 2 Chemical Gas line on vacuum Valve at the pressure gauge Close valve Reading on the stand on the wall pressure gauge on wall Gas line on vacuum Valve at the pressure gauge Close valve Reading on the stand on the wall pressure gauge on wall Vacuum chamber Mains power cord and plug Disconnect cord Vent chamber open and apply tag chamber door Stage Mains power cord and plug or Disconnect cord Verify the system remove module from system and apply tag power is removed Motorized valve Mains power cord and plug Disconnect cord Verif
86. 91X0 1093 KAT BPIXOIP uoques Japmod HulysinBulyxe weo Aeids ayem J9ysinBulxa 9 114 3 jqe L jou AWOIXOL s nse w BunyBy 9114 S SUON swoiduAs Sueway ured ssaupa BuiMoud si aoueisagns ay e90 se y uou pie 15114 SMEWay Buluonyuaw yuom uolquosge ou AIAedoid e19uab 10 00p e ynsuos sasuequn sip 1UBIS aAa jo ases UI ayem YONW YIM au Huo e 10 asuly sola BuiyBNo2 Buryoud SUONEAUBSUOD afle u Bulziwoye UM s BOUPISONS ay e90 uolyeyeyu JOJOOP e 10 eo lessagau y pue sal Ja ayqissod se UOOS se IIe YS9JJ ay Olu WA ay Buug uoneeyul SUONMPUOS Buom ewou sapun BUIUONUSUI YOM UONOHOSGE ON e19uab eudsoy au o ul aigissod se uoos suo puos BUDHOM ewou iapun suwojduw s ON se wgon Buug BuMWOA aeonpul LON OO HUUP 198 LON OG 4e eM yum y now asuu SNO OSUOD SI WHOA y uonseBul esoyeip Bulpoud si aoueisans y jeoo uonseBul 19 em YONW UM BSUU r4 UNS y WO SlaIsSod se UOOS se ague sqns anpisal anouay us ajqeoidde jon yesouab UO JOSJJE UYS JO SII JOBJUO9 UINS SAISUSJUI UUM eoo UMS s9 nSe9u ple 1S114 y swo1iduAs UONBULOJUI B2IBOJOOIXOL LL uoHeoyNuap pAezeH MSDS of the above mentioned Chemicals continued suou PBunesy ie s Onpoid uomsoduio2ap nopiezeH p 8EL 922 1 L8 297ZALWAY LOWGAH 099 029 CH 13d STO ONILVOIHENT id SARRA BUGNA ee ee 9EL 912 6 GB ETYZ OSIA HDIH H0OAH 0S9 0Z29 8 L3d STO DNILVOIHANT ou
87. A SPECIMEN It is assumed that the microscope is in the Full operation state see Chapter 3 Inserting a specimen requires the specimen chamber to be at atmospheric pressure If the high voltage is on when starting to vent the specimen chamber the vent condition is interlocked to switch off various voltage supplies before actual venting occurs TABLE 5 1 INSERTING A SPECIMEN Step Action Click off the Beam On button on the Beam Control page Go to the Navigation page unlock all stage conditions if necessary In the Vacuum module found on the Start up or Work page click on the Vent button The confirmation dialogue appears After a High Voltage switch off cycle the vacuum system will switch off the pumps and open close the appropriate valves to vent the system After a specified venting time the venting valve will close When vented open the specimen chamber and using lint free gloves or tweezers place a specimen into the specimen holder Secure the specimen stub with an appropriate hex wrench unless a spring clip holder has been used Install any additional detector if itis not already done follow the procedure described below in this chapter Set the stage to its lowest position Check and if necessary adjust the X Y Z Rotation or Tilt before closing the chamber door If the sample height is higher then it was for a previous sample turn down the mechanical Z to suit the Adjuster Tool Close the door se
88. ASIEM YUM SuonoLeay loqe 95 bejuadiag Jsequnu 9 3 qwUnNuU SYI jyusuodwoy 1e u SASSOIXY PloAB 0 SUOIMPUO9 yanoea pue Angels OL S1ualpaifBul UO UOI EWOJUI UOI ISOGWOZ Z GLES6S Z6r 0 LET AequinuauoYUd AouaB1au3g gjqesoes jou 1u6uef1ey2 9118150 119913 22 01 8661 ayepuonesiyjgqnd gjqesoes jou einmeiedwa uomsoduio2eg sno ueLJj sI sn Os SSE 21nye19duia uonublioiny TO ONILVOINENT u011d119S9p jeiaua9 giqesoes jou NSOISIA 61 30VHOVHLIN SUIBUapelL ejqeoydde jou Hd EGVEES E6Sl vrt XE4 giqesoes jou yey ui niqn os vv88c35 6c vyt 191 uou 191em ul Ayyiqnjos wop6buly paun Os 02 BAM 00 0 nss d inode MIZ OLHY XASSNS LSAM Os 03 L 4872M 000980 Ayisuap 9AIE DY AJIMVEO elqeoidde jou 1e ui ejgissod suorsojdxa isna TVAOH HONVIN ajqeodde jou swij aaisojdx3 SAY VMA 1a1ddns 05002 ofueiuiod useld 10338 SZS egetl uZ BpOd JONPOld gjqeesoes jou afueiuiod Hujan v80zl Sasin equ ELOL Ds 08 ebuesjuiod Hulog 9 qes9 e jou aGuel ayes 10de A uoneiedaid a2ueisans ay JO uone2nuapl L ssejinopo NOPO MOIJSA SSAJANOJOD INOIO9D pinby 9 8 S jeoisAud GSL 1L6 94 Buiplo9oy saipedoid je2iwuay2 pue je2isAud 6 144HS VIVO ALSAVS TVId3LVIN N e NR N Chemicals Safety and Handling MSDS of the above mentioned Chemicals continued Overview relevant R sentences from all components in section 2 not applicable Date last update 1998 1
89. Alignments Stage Rotation Centre v Stage Rotation Centre v Stage Rotation Centre Previous Previous Fini Instructions Instructions Instructions Bring a recognisable feature under the centre cross on screen Press the Next button Wait until the stage movement is finished Bring the recognisable feature back under the centre cross on screen Press the Next button Wait until the stage movement is finished Click on Finish to store the new settings or Cancel to return to the original settings step 3 of 3 Position amp 0 005122 m Position 0 002492 mi Position Y 0 005477 m Position Y 0 003329 m Cancel Cancel Cancel 8 PLA Centering Alignments Instructions This Alignment centers the PLA Press the Start button m No step Alignments l8 PLA Centering Instructions Centre the PLA Click on Finish to store the new settings or Cancel to return to the original settings step 1 of 1 PLA Centering Contrast Brightness Alignments 8 PLA Centenng PLA Centering corrects the position of the projected PLA aperture seen on screen at the lowest magnification when a PLA device is installed The device holding a PLA can either be a detector ora cone By using this alignment the area of image can be centered on screen 1 Click on the PLA Centering 2D control control with the left mouse button then hold down and move the area of image on
90. C GAD Cone C Hot Stage Cone 1000 urn 2 10 mm WE Pressure the PLA and Cones The maximum allowed pressure in LowVac or ESEM mode is determined by the size of the PLA Pressure Limiting Apperture and the gas type If the PLA is incorporated in the detector due to the contact connector the system will determine the installed detector type thereby knowing the size of the PLA and setting the Pressure adjuster range accordingly In all other cases the Pole Piece Configuration dialogue appears for the user to select the appropriate configuration This pressure will be the same for the LowVac and ESEM modes From that point on this information will automatically be used until the system is vented again The PLA can only be changed when the system is in Vented status For that reason the vacuum system sets the PLA to unknown whenever the system is vented When pumping to HiVac mode the PLA size is not critical and need not be known However when pumping to LowVac or ESEM mode or when switching to either of these from pumped or pumping HiVac mode the PLA must be known Along with the gas type this information sets pressure limits and rates for vacuum level changes The Pole Piece Configuration dialogue prompts the user to inform the system about the PLA in use Clicking on the OK button selects the default No Accessory Clicking on any other option cone will inform the system that the respective cone is installed and
91. Detector ETD ne ETD Settings for SEM Make Custom Mode equal to Secondary Electrons y 0 E E g coca son Gaseous Secondary Electron Detector GSED The GSED is integrated into a flexible PC board and plugs into the signal connector under the ion column The standard GSED contains a500 um aperture allowing 20 Torr 2600 Pa maximum chamber pressure It is a standard detector with all ESEM systems A detector with a larger 1000 um aperture is also available as an option must be ordered as a special request the upper pressure limit of which is about 5 Torr 670 Pa FIGURE 5 6 GASEOUS SE DETECTOR GSED This is used for general wet imaging and for high pressure imaging with auxilliary gasses As itis optimized for higher pressures ithas a small Opening to restrict gas flow which also reduces the field of view The lower magnification range is about 240x at 7 mm working distance The 516 27621 Operations Detector Types and Usage overall image consists of a very pure secondary electron signal with very little back scattered electron signal com ponent due to the detector design and chamber geometry This pure secondary signal makes this detector best suited for resolution imaging The field of view is less than the LFD at the lowest magnification FIGURE 5 7 STANDARD GSED CONFIGURATION Conical Objective Secondary Electron Gas flow Detector Sample Installing the GSED With your gloved
92. For more information on specific preparation techniques see Scanning Electron Microscopy and X Ray Microanalysis 2nd ed by Joseph Goldstein et al Plenum Press New York 1992 MOUNTING THE SPECIMEN TO THE HOLDER Wafers and PGA devices have individual sample mounting procedures If you are using a wafer piece or other sample attach the specimen to the specimen holder using any suitable SEM vacuum quality adhesive preferably carbon paint The specimen must be Es 27621 xTm Vacuum message A Please confirm specimen chamber vent Venting will take approximately 1 minute Are you sure you wantto continue Yes No Tungsten W Operations Specimen Preparation and Handling electrically grounded to the sample holder to minimize specimen charging If you are using a vice mechanism or double sided tape make sure the specimen is conductively attached to the holder Note The sample holder is not directly grounded to the chamber ground because it is connected to the BNC feed on the chamber door This is to allow measurement of sample current Maximum Sample Dimensions The Quanta 3D can accommodate samples with maximum dimensions 150 x 100 x 25 mm to achieve full stage movements Caution Store samples and sample holders in a dry nitrogen storage cabinet Dust on samples can get drawn into the electron column degrading imaging and requiring an FEI Customer Service call to correct the problem INSERTING EXCHANGING
93. High resolution elemental microanalysis of defect cross sections Imaging of sample surfaces with the electron beam during navigation without erosion or gallium implantation from the ion beam TEM sample preparation within situ conductive coating 27621 El System Overview How Quanta 3D Works How Quanta 3D Works Four main components combine to produce images from the sample e Electron and or ion gun The gun can be a source of electrons or ions particles The beam is emitted within a small spatial volume with a small angular spread and selectable energy e Optical system The beam enters the optical system consisting of several electron or ion lenses and exits to hit the specimen surface Particles striking the specimen react with atoms of the sample surface in different manners The electron beam produces three basic types of signal X rays electrons and photons The ion beam produces ions and electrons e Scan unit The scan generator signal fed to the deflection systems moves the beam in a raster pattern over the specimen area The electrical voltage changes as it rasters which provides serial information of the specimen surface This signal modulated by the one from the detection system produces the onscreen image e Detection unit The detector system picks up the particles converts them into an amplified electrical signal which is then sentto the control PC and displayed on the monitor FIGURE 2 1 SEM SCHEMATIC OVE
94. Ht A a E H L2 correction EO H Beam Shift Corr Stigmator Corr I Contrast 454 Alignments 102 ION Stigmator Balance 102 ION Stigmator Balance Instructions This Alignment removes image shift fram the Stigmatoar by balancing the stigmatar quadrupoles Press the Start button Mo step ION Stigmator Balance allows for Octupole fine tuning and balancing when stigmating for present accelerating voltage and current It should be executed when the stigmator significantly shifts an image Only an FEI Supervisor User or a higher level user can access this page STEP 1 1 Choose the conditions for which it is necessary to balance the stigmator 2 Choose fast scanning conditions STEP 2 The stigmator wobbler switches on automatically 1 By using the Stigmator QuadBalance AE CG 2D control box balance the first stigmator quadrupole enough to eliminate an image shift 2 Change the wobbler amplitude and magnification by using the Wobble adjuster STEP 3 The stigmator wobbler switches on automatically 1 By using of the Stigmator QuadBalance BF DH 2D control box balance the second stigmator quadrupole enough to eliminate an image shift 2 Change the wobbler amplitude and magnification by using the Wobble adjuster Alignments 102 ION Stigmator Balance 102 ION Stigmator Balance continued Alignments Alignments Alignments 102 1ON Stigmato
95. LFIDE as molybdene Germany 20 C 1013 mbar LITHIUM SOAP CORROSION PREVENTIVES Belgium 20 N e N N Is uou SCSIN uo syeway Ica UOIEUMOJUI 134 0 OL uou giqeodde jou ful 9qe 93 uo syeway lede1 04 Chem D UONEUMOJuI A1o1elnBay SL lt 9 seoueisqns SNoISBUEg uolejnBes wodsues 0 joalqns jon D UoMeuMoJul Hodsueil pL jo E Janddns 0 AaAijep UuIn a osje JAPISUOD uole siBa euomeu pue jevo YLIM aouepsJooNe ul pue paaAoidde ue uo padunp Jo uonejfeisui Jado d e ul paleauloul aq 0 aney sBuibeyoed Aidwua paueajoun Jo Euatewu Japuleuay oO SUOI EJBPISUOD jesodsig L Y dy auou yo1x0 099 UO syew y 9 qe398 Jou yo1x0 093 SIJESVEN jou M od 607 9 qea9e1 jou 9 qe99e 1 jou 9 qe99e1 jou 9 qe99e1 jou 10 98 e91uu9yo9o lg ole puewap uabAxo jeoiways jesibojoig puewap usb xo jesiwaeyy s pueuiep usB xo jeoibojoig UOIEULOJUI 29160 091X0 093 ZL 6lgesoe jou AWOIXOL 8UON swodw s Sewe ssoupel BulMoud si aoueisagns au 290 se y agiqeoydde jon jesoueb ajqeoydde jon 90 uonefeuul SUOMPUOS BUPHOM jewou apun BUIUONUSUI YOM UONCHOSGE oN jesouab suonpuos Bum om jewou JapUN suojdu s oN 290 uonsebu ajqeoydde jon jesoueb swo dw s OU Saonpoid 290 UNS swojdwAs UONEUMOJUu I E9IBOJODIXO LL 9 qe38 jou segue sqns BuIZIPIKO ou auou funesy 1e s1onpoid uomsoduio2ap nopiezeH UHM S
96. LTERING FUNCTIONS The ascending 6 bricks frames button denotes improving an image with a successive Average of 2 or more frames This process continues until stopped by a change of scanning condition or by freezing the result The stairway 6 bricks frames button shows an increasing number of frames that Integrate to an end value This process will continue until the predefined number of frames is reached and then stops and pauses automatically During and after image accumulation you cannot change the focus or perform other image influencing actions The number of frames can be selected as a preset in the toolbar drop down list box associated with the Integrate function Operations Capturing and Handling a Single Image SAVING OPENING SINGLE IMAGES STILLS After Snapshot or any activity that pauses the full scan frame the File Detectors scan Beam following saving functions in the File menu could be chosen Open Save Sia pale se Era can be clicked on to store the image to the predetermined location III e Save As Record Movie opens a dialogue for saving images this provides an opportunity to Import change the file name its label or location and the possibility to save Export Databarand overlyed graphics STG EPM files etc This function is es EE also available for the Snapshot and Photo functions under the Preferences Scanning tab Archive Option Log Off Factory Exit TABLE 5 13 IMAGE CAPTURI
97. Milling Procedure VIEWING CROSS SECTION After cutting the cross section lower the ion beam current to 10 or 30 pA and tilt 52 to view the cross section with the ion beam The following figure shows examples of some typical milling views of a cross section FIGURE 5 24 CROSS SECTION VIEWS Perspective view of the cross Top view of the Cross section Cross section view This view was section milled on the edge of a done to show the geometry of the sample cross section The following figure shows the relationship of the columns and stage to the face of the cross section during milling and how this is viewed onscreen depending on whether you image with the electron or ion beam FIGURE 5 25 CROSS SECTION VIEWING DURING MILLING Onscreen views Viewing with Beam Cross section face Not visible Viewing with E Beam Cross section face 2 52 stage tilt Completely E visible A Cross section face Not to Scale Electron column lon column wf te e o The following figure shows the onscreen view with the stage at 0 tilt with both the electron and ion beam imaging views 27621 547 Operations Milling Proce dure FIGURE 5 26 CROSS SECTION VIEWING AT O TILT Onscreen views Viewing with Beam Electron column Cross section face lon column Tilted View into shallow end of cross section Viewing with E Beam Cross section face Stage Not Shallow end visible Cross section face gt
98. NG PROCEDURE Step Action Select the area of interest and set the Magnification the Scan condition the Pixel resolution that are required in the captured image Make the best image using any suitable method you are familiar with scan makes one screen quad pass or several passes when the number of integrated frames is larger and pauses ad image can now be saved by Save Ctrl S Save function in the File menu The scan can be released by clicking on the Pause F6 button on the toolbar Open ll Use the Snapshot Photo F2 Pause F6 function The Opening a single image file to restore to a quad or the full screen can be achieved by clicking on Open in the File menu The dialogue displays by default the position to open files associated to the imaging function e the image file location used by Snapshot and Photo 27621 525 Operations Capturing and Handling a Single Image IMAGE PRINTING CTRL P Clicking on Print opens the printer setup dialogue so that the choice of printer and settings can be established to print an image or any other printable product from the microscope Pressing OK in the printer setup dialogue will activate the printer to print the job FIGURE 5 15 PRINTER SETUP DIALOGUE Print Setup Properties Status Ready Type HP Laserlet 4000 Series PCL E Where nlapappl Comment Orientation z hi Portrait Source Auto Select C Landscap
99. Operations Setting Preferences Scan Preset The Snapshot and Photo icons are dedicated to capture images at Snapshot preset y given scan conditions which are adjustable for appropriate Scan preset selected from the dropdown menu There are also many of the user presets to set Some of the lines are Non Editable under some Dwell time 1 04s nditions Resolution 104004 Someone Line time 1 0ms e Dwell Time one point beam duration time Frame time 305 2rr15 e Resolution No of points on Width x Height screen resolution Refresh rate 1 10hz e Line Time line scan duration time Non Editable LE Ls e Frame Time screen scan duration time Non Editable Action Mone e Refresg Rate screen refresh frequency Non Editable e Integrate No of integrated frames 1 2 4 8 16 32 64 128 256 e Actions activated at the end of Snapshot Photo functions Save prompts the dialog and displays the next increment with the last set up or used folder location Save As prompts the dialog for the user to choose the file name and location None no save function just a screen image Scan Operators e The Fast icon Fast Scan in the Scan Preset dropdown list e The Slow icon Slow Scan in the Scan Preset dropdown list e The Flash Camera Snapshot in the Scan Preset dropdown list e The normal Camera Photo in the Scan Preset dropdown list e UserPreset Can be chosen by the user from the dropdown list Each of these scan
100. PLA coneis used for EDX analysis see below at larger working distances gt 9 mm DISCHARGES BETWEEN THE GASEOUS DETECTORS AND THE SAMPLE The contrast control adjusts the voltage on the underside of the GSED contrast of 100 is approximately 550V with the LFD it is 750V Excessive voltage may cause a breakdown between the detector 550V and the sample at ground chamber pole piece etc This could damage the sample but will not damage the GSED This condition is indicated by white flashes or streaks across the image window and on some systems a large discharge may make the system unstable or cause the chamber to vent and switch off the HV There are several factors that could cause detector voltage breakdown e Contrast voltage set too high e Sample is too close to the detector e Gas pressure is too low e Air inthe chamber water vapour purge cycle not complete e Sample is not grounded to the stage or the stage is not fully grounded BNC plug not connected 27621 Operations X ray Analysis for different Vacuum Modes X ray Analysis for different Vacuum Modes HIGH VACUUM HiVac operation gives the most accurate X ray results but the sample must be electrically conducting FIGURE 5 11 X RAY IMAGING IN HIVAC MODE Electron 15 mm WIL ESEM WITH THE GSED The ESEM mode of operation allows observation of electrically insulating samples but care must be taken when using this mode to collec
101. Preview anaana eee ee ee ee 0 3 REORDERING PATTERNS idee pistes dd a de De Of BEAM COINCIDENCE voca tee hewn oes dee in SAT A TYPICAL CROSS SECTION 0 00 ce ee se ee ee AG CROSS SECTION VIEWS TEE EEE E a A CROSS SECTION VIEWING DURING MILLING EE VETTE eres 6 oc CROSS SECTION VIEWING AT O TILT 948 VIEWING AT 0 TILT ROTATED 180 0 see ss se ie 9 48 ESEM Preferences RE EE EE TN EE OD OZ Charge neutralization Preferences O General Preferences 0 cece ee ee ee eee ee OO Databar Preferences 0 00 cece ee ee DO Units Preferences nananana SS SE SS ee ee O Presets Preferences 0 ccc ee ee ee ee ee O scanning Preferences 0 00 cee ee ee ee OD Beam Preferences naaa cc cc te eee 0 Detector Preferences 0 cee ee ee O 2 C xii 27621 2762 1 Chapter Stages Quanta 3D 200 Stage Controls ane sili aa 50 X50 mm Stage Movement Standard Sample Holders Get Function xT Align Feature Compucentric Rotation aaa aa aa ES SE SE SS SE Ee ee eee SCAR OLANOM ELE a s RE LLE HERO EE SEDEER MR Be se Oa es Chapter 8 Maintenance PARTS OF THE WEHNELT CYLINDER ii se dee se de ee de ADJUSTING THE FILAMENT POSITION occ THE ANODE ASSEMBLY Lo ANODE TOOL a8 INSTALLING THE ANODE ASSEMBLY LINER TUBE APERTURES TOOLS ias REMOVING THE COLUMN LINER TUBE 0 00 REMOVING INS
102. RVIEW FILAMENT PINS ELECTRON ION GUN EMITTER DEMAGNIFICATION CONDENSER UNIT LENS ES SCAN UNIT ET YSTEN SCAN GENERATOR FINALLENS DETECTION UNIT SPECIMEN System Overview How Quanta 3D Works IMAGE VIEWING AND CAPTURE Magnification is the ratio of the size of the viewing monitor screen to the size of the area scanned on the specimen Increased magnification is achieved by reducing the size of the area scanned on the specimen Digital scanning provides a completely digital image and image capture is performed by scanning one frame atime at a High resolution of pixel format CONTROL OF THE BEAMS FIB SEM workstations position the point of interest ideally for simultaneous ion beam cross sectioning and electron beam viewing Separate scan generators for the two beams permit coupled or independent scan patterns and magnifications Imaging while milling aids in defining milled features Immediate electron beam images of cross sections are possible without stage motion or sample transfer Immediate high resolution SEM imaging after FIB milling also prevents exposure of milled cross sections to atmospheric contaminants GAS DEPOSITION Multiple gas injectors can be installed for material deposition in conjunction with either electron or ion beam pattern definition Electron beam induced deposition offers the advantage of not sputtering the deposited material or implanting gallium simultaneously Gas Enh
103. Status Preferences CO xTm Autofunction Information Busy performing Note Auto Contrast Brightness ACB function is not available for gaseous detectors a p Auto focus F 11 ms activates the automatic focus routine The system attempts to correct the focus independent of the working distance or focus set Cancel Tm Autofunction informal xj When activated the dialogue appears to show the progress The function can be interrupted by clicking on the Stop Now button which Busy performing leaves the image at the stage of progress at stopping Clicking on Auto Focus Cancel before the function ends will return the image back to its ANAND nn original status sine Fed cov snc 4 18 27621 Software Control xT microscope Control Software Application status displays a dialogue above Quad 4 showing any appropriate continuously updating system reports e Pop up on Message Severity None Error Warning All this radio button specifies which kind of messages is going to to be shown automatically on screen e Clear button clears old messages from the window e Hide button hides Application Status window FIGURE 4 14 APPLICATION STATUS xTm Application Status FIB source supply is in acquiring state FIG source supply in idle state source depleted check supply replace source call service FIB source supply failed to startup can not reach acquire state source depleted check supply r
104. TALLING APERTURE A 00 000 APERTURE MOUNTING STANDARD INSERT COMPONENTS e aa desa Removing and disassembling the Insert REMOVING THE GSED ASSEMBLY 0 0000 e eee eee DISASSEMBLING THE GBSD 0 0 naaa ee 7 1 7 2 UNDERSTANDING EUCENTRIC HEIGHT eee Eucentric Adjuster for 50 X 50 Stages 2 ee ee Map Area Elements 0 aaa ee eee eee Map Magnification ZOOM SE SS SS ee ee e Aa sus EER ao BO ee EER EER a ae RE ME ee EE BI 1 3 1 5 7 6 1 8 7 11 f 12 f 13 1 15 1 20 8 5 8 7 8 9 8 9 8 11 8 12 8 13 8 14 8 15 8 17 8 18 8 19 8 19 C xiii C xiv 27621 2762 1 LIST OF TABLES Chapter1 Safety and Hd Emergency telephone numbers icons used in the document lion Forms of hazardous energies L L ouaaa ao Lren Specific procedures hazardous energies control point an EE EE OE eee AC Cable Coding l tt Labels used on the microscope body Chapter 2 System Overview MUI Software Edguivalents n aa aana SS SS SE ee eee Chapter 3 Vacuum System Description of Quanta 3D States nauau aa SEE Ee se se ee Startup Procedures Generally SS ESE cee ee ee See Shut down Procedures Generally 2 0 00 ce ee ee software Control Menus Pages List STATUS ICON FU NCTIONS Mouse Button Functions Windows System Keys Function and Specific Key
105. The Data Bars contains al dat information entered by preference for storage priniout of the image 6 Pages and Modules contams al pages made up of on modules 7 Quad Image Windows 4 image windows mode providi independent image lunctonal ty modes Man Image Window single vendow image mode not des PR Signatures THE MAIN WINDOW displays status and control features for the xT microscope La TU ar UI including ie image window application bar mer tool bar data bar and pages FIGURE 4 2 THE MAIN WINDOW 1 4 laa i j baraman Ee aa AS A Pwi AE mp z E api Ce oes AE n ES t la a a a 31 0f64 NM 2088 x 297 mm About XtUI xT microscope Control displays the software version software build number and date of release lag e E a T e Wi ha QUANTA 3D DUALBEAM 27621 ay Software Control Pages and Modules Pages and Modules Pages The software controls on the right side of the screen are organized into Pages Pages are further divided into smaller Modules that hold its Ba E specific functions The frequently used controls appear as modules on Pages more than one page The required page can be selected either from the Pages menu or by pressing the corresponding icon button on the Beam Control right side of the toolbar Navigation Patterning TABLE 4 2 PAGES LIST Processing Temperature Contral Pages Modules Tabs Alignments Beam Control Vacuum Mode
106. The File Menu Alt F The Detectors Menu Alt D The Scan Menu Alt S The Beam Menu Alt B Laaa aaao aLaaa aaa The Patterning Menu Alt P 2 0 0 0 ee ee ee The Stage Menu AIt N 0 ee es The Tools Menu Alt O letter 2 0 ee ee The Window Menu At W 0 ec ee The Help Menu Alt tH 2 0 nes Pages and Modules Pages Common Features and Modules COMIDO apro e da a TOOL MOS Oe caro as o a da A AAA irene cached ut ha th nb Aah alow wae were Gea dct The Status Module 0 SE ce ee ees 4 1 4 1 4 2 4 2 4 2 4 2 4 2 4 2 43 43 4 3 4 4 4 4 4 4 4 4 4 5 4 6 46 4 7 4 8 4 9 4 9 4 9 4 16 4 16 4 17 4 18 4 20 4 21 C iii Beam Control Page 0 cc ee The Vacuum Mode module 0 SS SS SS ee ee ee The Pump Button The Vent Button High Vacuum Low Vacuum ESEM Modes Radio buttons ONA The System Module The Column EO N OE AR N The Beam On Button oo a sewn DEE Bee PL SR tas eae The High Voltage Control SS ES SS SS SS ee ee ee The Source Indicator ESE 0c eee ee The Beam Module be semi ie he Aad EE EE ds Sue Ree e he N GE The Beam Shift Control The Magnification Module The Couple Magnifications Check box uuu o o on The Magnification Control The Election Beam Current Modules ea pocos SR EE des ce nds The Neutralize Button The Spots
107. The following menus are available TABLE 4 1 MENUS Menu Item Use o Sen Sea contone for dearan ardon teams electron ion optical and controls Binge ENS Image auto functions and useful items The image windows display functions About xT microscope Control software and on line documentation Select pull down menus from the menu bar by pressing e the left mouse button on the Menu title e ALT underscored keyboard letters e ALT and then use keyboard arrows Note related toolbar icons are displayed to the right of the function title Software Control xT microscope Control Software THE TOOLBAR displayed below the Menu bar lets you select system functions by their icons The toolbar can be different in content or arrangement depending on the system or user preferences see Preferences General tab in Chapter 5 Operations The style of the drop down list boxes with or without arrows can be selected in the same way If any icon represents the menu function look in the following pages for a description FIGURE 4 6 THE TOOLBAR A Bld is HO pee iH Rest the cursor on the icon for two seconds without clicking on it to see its highlighted caption tool tip which displays the use of the tool Whenever you select a function the corresponding icon is highlighted Icons that activate an automated procedure are not highlighted Magnification kV Beam Current List
108. UONSES1 SNOPAEZEH 19J2M UM SUONJESU plone 0 SUOIIPUOY uanoea pue Apyiqeis OL sak 9 qe99e jou 9 qe99e jou 9 qe99e jou ajqeodde jou g qeeord jou auou Os 02 d LO 9 OZ 1481 00068 0 a qeodde jou ajqeodde jou Os OOL lt 9 qe99e jou equ ELOL Os OGLE juawabseyd 91 2 S01 99 9 2 1nye19du3 uomsodwo2aa 21n3e19duia uonublioiny NSOISIA Hd yey ui Aulanios 19 em ui Ayyiqnjos ainssaid inode Ayisuap aaijejay 1e ui elgissod suoisoidxe isna S IWI aaisoidxa3 apueituiod useld afueiuiod Hula afueiuiod Huljiog MSDS of the above mentioned Chemicals continued g qeeoed jou 96ue 1 9 81 JOd8A Allo Inopo feb INOIOD ajsed 9 8 S B91S Ud semMedoid je2iuau92 pue e91s ud 6 Bunuud sy jo aJep ay Je N g PUe 1apan Soiuonoer3 sdilud 40 Jaljaq pue uoneuuoui e6pamouy 2y jo 1saa ay 0 1991109 sl 18aus LEA Ajayes JEuate SIU ui papiAoid uo jeuojur ayy Gunsneyxa jualoins usym suou uolyeyeuul UOISJAA SNOIAaId BU 0 pieBal1 YIM SUOHBIA e O JUIOg sa 6606 Ajayes safe ET 0 i ee eee seao 6 waqqns nq UNS U401199104d euos1ad pasinpy 8L v0 S661L ajepdn 1sel a1eq 9 qes9e jou equ ELOL 9502 PIOYS3Y1 ANOPO ejaeondde jou N uou Z UONJES ui SJUSUOAUIOI e Wo1 SIDUIJUIS Y JULAD DA MalAMSAO SWI S1nsodxa syeway O UIS S Bul1i99 9 uou s99u9 19191 Auedwood 1auul a MSDS of the above mentioned Chemicals continued MATERIAL SAFETY DATA SHEET
109. a of the Wehnelt cylinder in which the Filament base da is located e The lower part 5a of the Wehnelt cylinder with an engraved scale 5b and arrow 5c e The filament securing ring 7a FIGURE 8 1 PARTS OF THE WEHNELT CYLINDER a ES 8 EM 5964 A Caution All the parts described operate in vacuum and should therefore be handled carefully using clean gloves and stored when not being used in suitable containers or packed in aluminium foil 8 3 2 REMOVING THE WEHNELT ASSEMBLY The Wehnelt assembly is held in position inside the holder by a spring ring To remove it grasp the Wehnelt assembly atthe circular groove using the thumb and fingers of one hand Apply a force sufficient to overcome the spring pressure in a downward direction thus detaching the Wehnelt assembly Lower the upper column back down to keep the emission chamber free of airborne dust WARNING If the microscope was used forimaging recently the Wehnelt could be very hot To handle use caution and wear gloves made of appropriate heat resistant material or wait for the Wehnelt to cool 2762 1 3 Maintenance 8 3 The Wehnelt and Filament 8 3 3 REMOVING THE FILAMENT 1 Place the Wehnelt assembly in the plastic carrier such that the lower part 5a of the Wehnelt cylinder can no longer be rotated with respect to the tool This makes mutual rotation of the two pieces easier when wearing gloves 2 Rotate the upper part 2a of the Weh
110. a green triangle which denotes by its position the sample s angle of orientation relative to its original position when placed on the stage Initially this is in the 12 o clock position While holding the left mouse button down on the green triangle drag it around the circle to choose a new sample orientation relative to the detection position On release of the left mouse button the computer software updates the position orientation and offset from the mechanical stage center to deliver the same object center but rotated to the angle selected This creates a different direction of illumination for the sample while keeping the object of interest in the center of the display area With the sample at the eucentric height this can be performed at any position on the sample irrespective of the mechanical stage center Clicking on or near the numbered angles around the perimeter of the circle will cause the stage to drive to that angle and the green triangle will update on screen Zeroing is accomplished by clicking on the zero on the top of the green circle FIGURE 7 11 COMPUCENTRIC ROTATION Compucentric Rotation Actual Rotation 0 Target Rotation 0 Potation Change 0 The readout positions displayed at the bottom of the quad provide information about the Actual Rotation original position in degrees the Target Rotation the selected position in degrees and the Rotation Change the difference in degrees of rotation Once selected t
111. abar and with without Overlayed graphics by checking unchecking appropriate check box 27621 a Software Control xT microscope Control Software Record Movie e IM allows the user to make of digital video files AVI for dynamic experiments performed within the Quanta FEG microscope When clicking on the red dot icon it changes to red square one see Chapter 5 for a detailed description Import Export opens a sub menu for file types etc This in turn leads to an import export dialog for selection Certain image files not produced by the FEI xT system can be imported and files produced by the FEI xT system can be exported via this function STG files Stage Positions and EPM files End Point Monitor Graphs are available to Import Export FIGURE 4 11 FILE IMPORT EXPORT MENU File Detectors scan Beam Patterning stage Tools Wy File Detectors scan Beam Patterning stage Tools Open wy Open Save Ctri 5 sed es a Save Ctrl S Save AS Save As Record Movie Record Movie Stage Positions Import Export E Patterns Export Stage Positions L End Paoint Monitor Graphs ZDZ S Paien ES Sune Navigation Image ile ee End Paint Monitor Graphs Log Off Factory Log Off Factory Annotations Exit Exit Measurements FIGURE 4 12 IMPORT OPEN AND EXPORT SAVE AS DIALOGS ls Lank in Ti My Documents Save in E My Documents r El cf ES File name f Filo aerie Sove Fees od be Erd Homt Mondor Graphs eer
112. acent area Focusing at 2x to 3x the necessary magnification for the final result makes the lower magnification sharper For example for high resolution output set the magnification level at 2000x and focus at 4000x to 8000x Note Particularly in case of ion imaging you must be aware of the fact that higher magnification increases the risk of damage to the sample Focusing with the MUI Use coarse and fine focus knobs to focus the image The image immediately responds to the MUI without a cursor on screen Using Reduced area F7 Y The smaller area appears in the middle of the screen Thiscanbe _ used as a Focus aid as the scan refreshes faster in the smaller area See Chapter 4 Auto Focus Function m This function can be activated by pressing the Auto focus icon button on the toolbar or the item in the Tools menu The system attempts to correct the focus independent of the actual focus setting see Chapter 4 CORRECTING ASTIGMATISM You need to correct astigmatism of the image when you change apertures samples or working distance conditions Astigmatism in the image is usually only visible at higher magnifications 3000x or more If astigmatism is present a directional distortion change of 90 between the two out of focus conditions is observed TABLE 5 8 CORRECTING ASTIGMATISM USING THE MOUSE Step Step Action N Action Focus the image as well as possible using the mouse Bring the image just slightly out of focus
113. aid the centering of features and can be used to align a sample against a stored image in another quad Alignment rectangle Shift F 6 places a staggered rectangle in the center of either the single screen or each quad depending on the display mode selected This function is used in the Adjustment procedures to aid illumination control CCD 15 mm Marker Clicking on the CCD 15 mm Marker places a short horizontal lines with arrow onto the optical beam quad This is to indicate the 15 mm FWD position in relation to the Z distance of the sample The position of this marker can be changed by double clicking with the left mouse button on the desired position Single Quad Image Mode F5 toggles the image display area between two posibilities e Single Image Mode uses one quad for the entire screen useful for observing details e Quad Image Mode is useful for comparing images of the same sample area with different beams detectors or scan properties 1 2 3 4 selects the Active Quad 1 4 by ticking the respective number Quad 1 is top left and Quad 4 is bottom right with the others running horizontally All quads can contain live images with either Electron lon or Optical beam The Status of the Quad is also defined by the Beam type displayed by the beam icon and whether it is paused or not displayed by the pause icon Only one image window has focus at any time recognizable by a light blue databar instead of a grey o
114. aintenance 8 8 Stage maintenance 8 8 Stage maintenance 8 8 1 SPECIMEN HOLDERS Recommended cleaning procedures are given below for parts which operate in vacuum and which are subject to possible contamination Frequency of cleaning is in most cases determined by necessity image quality or astigmatism level Cleaning 1 Clean these parts using cotton wool and a mild abrasive domestic cleaner see list of preferred cleaners at the end of this chapter 2 Rinse in tap water 3 Clean in an ultrasonic cleaner for 5 minutes using distilled water 4 Clean in an ultrasonic cleaner for 5 minutes using alcohol p a or isopropanol Caution Do not place parts together in the beakers Wash separately as damage can occur to the metal surfaces 5 Rinse in alcohol p a 6 First blow dry with a compressed air canister then dry thoroughly under an infra red lamp 15 min to 1 hr at a temperature of between 80 C and 100 C Do not bake in an oven 8 8 2 STAGE MECHANICS Checking the condition of the stage should be a weekly exercise as many differing samples may be exchanged in this time period Some samples may be powders or composite materials that inadvertently drop particles on or in the stage If a silicon wafer breaks in the chamber it can shatter into hundreds of pieces In this case the stage should be thoroughly cleaned before attempting movement again Cleaning Stage parts Abrasives and solvents must not be used on
115. aling 4 units Time Method Auto zoom A AXIS hin Max lag pp E s axis lag E f pA Software Control Patterning Page THE END POINT MONITOR MODULE EPM can be activated to start when patterning starts stop when patterning is paused and restart when patterning is continued The Graphs Tab illustrates in real time the cutting depth progress monitored by specimen current This means the milling progress can be observed as acolored graphical display showing the accuracy for depth over the whole milled area The Options Tab allows the selection of any number of the milling processes being monitored to be graphically displayed The Scaling Tab e X Units Time Depth corresponds to how the progress is observed e Method Auto zoom Fixed zoom Auto pan Software Control Processing Page Processing Page Measurement S A Delete Tilt Correction Hone Default properties Annotation Re DA L Mart Enhance Image Digital Contrast 1 0 n E E A Digital Brightness Gamma Default Status specimen Current 2 00 p 0 439 DA 9196 5 Pa lon Beam Current Chamber Pressure e Y The Processing Page is an FEl Microscope User level page divided into the following modules e Measurement module give the user capabilities to measure linear distances angles diameters and areas etc e Annotation module gives the user capabi
116. anced Etch FEI s Gas Injection System GIS also provides Enhanced Etch capability for high aspect ratio drilling with minimal redeposition as well as metal deposition preferential etching of cross section surfaces prior to SEM imaging and rapid milling of TEM sections Up to two GIS beam chemistries can be installed on the workstation depending on system configuration This self contained apparatus allows the precursor material to be contained entirely within the vacuum system for simple flexible and safe operation X RAY ANALYSIS CAPABILITY Energy Dispersive X ray EDX provides elemental analysis capability for identification of surface and subsurface features Convergence of the SEM FIB and EDX at short working distance allows precision slice and view cross sectioning and chemical analysis at high resolution Various vendor options are compatible with the workstation 27621 2 System Overview How Quanta 3D Works SYSTEM VACUUM The entire electron or ion path from gun to specimen must be under vacuum so the particles wont collide with air molecules and be absorbed Various levels of vacuum are necessary soa Turbo Molecular Pump TMP and lon Getter Pump IGP backed by a rotary pre vacuum pump obtains the necessary specimen chamber vacuum The exceptions to this rule are the LowVac and ESEM modes associated with the Quanta Series where water vapor or gas is introduced to the specimen chamber The Quanta 3D ha
117. and detailed descriptionis found in the Preferences ESEM tab Note This procedure can take several minutes depending on the Preferences setting Wait until Vacuum status indicates Vacuum because detectors do not start operation until vacuum is reached See Setting Preferences ESEM tab atthe end of Chapter 5 Operations for more details Vent Water Bottle On occasion the water reservoir needs to be filled To do this see Refilling the Water Bottle in the Chapter 8 Maintenance Fi 27621 Vacuum System Quanta 3D System States Quanta 3D System States There are several system states listed in the following table and in the tree The transitions among them depend on their initial and final conditions and are accessible from a particular user account TABLE 3 1 DESCRIPTION OF QUANTA 3D STATES Switched off Steps to Return When to Use components to Full Operation Complete During transportation System Vacuum Service Start Shutdo wn or service actions including IGP Supervisor Log On Emitter s Electronics Supervisor Emitter On and Computer s User High Voltage On Emergency During power failure same as 1 same as 1 Shutdo wn from emergency shutdown Supervisor IGP Start Shutdown When not using the system System vacuum Supervisor Log On for more than 10 days except IGP Supervisor Emitter On Emitter s Electronics User High Voltage On and Computer s 4 Full Operation Working EE LN not u
118. ates a four ended arrow cursor with which one can correct the astigmatism Left Right Up Down moves modify the X Y stigmator Note that the stigmator range is coupled with the magnification Stiamator Beam Shift Pressing the right mouse button above the Stigmator 2D control displays a menu that enables reseting the stigmator Zero and toggling between the linear Absolute checked and logarith mic control response You can also use the Shift right mouse button for stigmation The Beam Shift Control indicates and controls the beam shift setting via a 2D control in relation to the final lens axis It is useful for fine image shift without stage movement The control behaviour is the same as described for the Stigmator ee Absolute THE MAGNIFICATION MODULE The Couple Magnifications Check box binds the magnification of both beams together Changing the magnification under one beam causes it to change in the same orientation under the other one If greyed the magnification cannot be coupled for various reasons including different limit values for the two beams The Magnification Control offers the variable control The linear mini slider keeps its actual position and is placed below the non linear main sliders which return back to the centre after a movement e Clicking the end arrow increases magnification by about 5 e Clicking between the end arrow and the adjuster increases magnification by about 2
119. ation field This read only area is found below the AVI and TIF combo boxes and contains additional information for the user about the number of stills frames per time unit Seconds minutes for AVI and also for TIF if checked File module All parameters in this section are only valid for the next video recording Digital video can be stored in avi files from any quad The video name contains generic filename quad name and a numeric seed For example myvideo Quad1 001 avi The filename and the numeric seed are set by the user in the movie setup The numeric seed is automatically incremented after the recording has stopped When TIF is selected the name of the TIF files contains generic filename quad name numeric seed and number of the image in the series 528 27621 Operations Saving Multiple Images Recording a Movie For example myvideo Quad2 003 001 23 tif The series number always has 5 digits filled by zeros on the left the first TIF file has number 00001 File name Enter a generic file name valid for the next video recording A suitable file name must be entered here if this field is not filled the Movie dialogue can not be closed Note Do not use punctuation dashes or non alpha numeric characters otherwise the movie maker will not be able to build an AVI Save in Enter a suitable path to the directory If this field is not filled the Movie dialogue can not be closed If the path is long
120. attern selector cursor Once selected the cursor is ready to draw a pattern onscreen This is only possible in the quad or the single screen whichever is active Draw a suitable pattern size with the draw cursor Use the pattern control cursor to resize and move the pattern by dragging it with the mouse Rectangle Cleaning Cross Section Regular Cross Section Circle Line Bitmap Operations Patterning PATTERN AREA EDITING Once a pattern has been drawn it can be modified e Focus On Pattern is denoted by the addition of resizing handles to the pattern outline use Pattern control cursor Moving Pattern Place the cursor inside the boundary of the pattern and hold the left mouse button while dragging it use move cursor e Resizing Patterns Hold the left mouse button and drag the resizing handle until the desired size is reached use horizontal vertical or diagonal resizing cursor This can also be achieved by entering values in the Property list Select the Pattern control cursor button after defining a pattern to exit pattern editing mode MILLING ORDER OF PATTERNS Patterns are normally milled in the order they are created on the screen The order can be changed by focusing on the pattern you wish to change to a particular position in the order and click on the single arrow in either direction to come to the order number required To place a pattern at number one position click on the left double arrow
121. ause the image is a two dimensional representation of a three dimensional object certain projection distortions occur The more highly tilted the specimen is the more foreshortened its image will be For example a square grid image will appear rectangular when you tilt the specimen Applying tilt correction will correct the aspect ratio and restore the square appearance Specimen Pre tilt Control You must enter the specimen tilt angle on the adjuster for the calculations to be accurate 2762 1 ee Software Control Patterning Page Patterning Page The Patterning Page is an FEI Microscope User level page containing the essential components to perform Patterning divided into the following modules e Pattern Progress module enables pattern shapes selection displaying drawing and entering e Gas Injection module provides the capability to select the type of gas deposition or etching e End Point Monitor module gives visual feedback about the accuracy and progress of a milling Postion x 16 9jum oa Position Y 3 DT e Status module common for all Pages Satara 00 contains important information about the system Enabled ves All functionality of above modules except Status one is described in Total Time 0 03 46 the Chapter 5 Operations GasType Mone Progress THE PATTERN PROGRESS MODULE Remaining Time 0 07 52 E A shape can be selected and handled by using the icons on the top of the pi o mod
122. box The value ranges are different for both ion and electron beams JD 20 0 ky 0 60 NA Clicking directly on the value box allows the list to open for selection of the Magnification kV Beam Current Clicking on the required value sets it in the top window of the drop down box and at the same time changes the column condition to that value The default lists of values are chosen in from the Preferences Presets tab Pixel Resolution Per Beam contains the Pixel Resolutions possible for viewing or recording an 512x442 image normal output is 1024 x 884 Clicking directly on the value box dropsthe list so that all possible resolutions can be seen Selecting results in the immediate change of the scan resolution in the quad or full screen Since the current dwell time remains unchanged the actual scanning frequency changes when a new pixel resolution is selected THE DATA BAR The Data Bar displays Instrument Image and labelling information This can be a combination of kV Detector Spot X and Y coordinates for instance They can be placed in any order and will expand or contract to fitas long there is enough room The micron bar is above the user s label area Setttings in the Data Bar can be changed in the Preferences Data Bar tab see Chapter 5 Options FIGURE 4 7 THEDATA BAR EXAMPLES Wii D Y T z 3 mi EE EE Active Electron 15 0 mm 15 00 k 220 Guanta 30 Inactive lon Inactive Op
123. ce the part to be cleaned on the polish and rub with a circular motion until all contamination has been removed For inner surfaces use a cotton swab or wooden dowel as an applicator A toothpick can be used for small holes Lint free nylon not cotton or latex surgical gloves should be worn while handling parts to avoid contaminating just cleaned surfaces Tweezers should be used to hold small parts After the part has been polished remove the Soft Scrub CIF cleaner by washing in hot water Inspect the part under a stereo microscope at 20x magnification to ensure that there is no remaining contamination or polish residue Wash the part in de ionized or distilled water in a beaker with an ultrasonic cleaner for several minutes Transfer the part to a clean beaker with alcohol or isopropanol and clean ultrasonically again for several minutes Note Do not use an ultrasonic bath to clean the GSED or LFD detector When the components are dry a compressed air duster can speed drying reassemble and return to the column If a part is stained heat it with hot water and immediately rinse with alcohol and dry using compressed air Cleaning Tips Parts contacted by the electron beam require periodic polishing ltisa recommended practice to clean the Wehnelt Cap every time a filament is replaced This will ensure maximum performance of the instrument for many years Do not use metal polishes such as POL or WENOL to clean parts as these
124. ch the greatest accuracy is achieved The following procedure sets up the 1 3 Point alignment for any given sample where repeated structures are checked TABLE 7 6 DEFINE USER UNITS PROCEDURE Step Action Selecta feature on the sample surface and bring it into the field of view at an appropriate magnification so that it relates to other structures Click on Define User Units in the Stage menu A dialogue appears as follows xTm Define User Units Start Make Selection Define New User Units O Redefine User Units O Redefine User Units with Shift Reset User Units so that they are equal to Stage Units O Show how User Units are now defined Details Cancel Select from the Start dialogue the Define New User Units process by clicking on the radio button Click on the Next button Stages Stage Related Functions TABLE 7 6 DEFINE USER UNITS PROCEDURE The Alignment Point One 0 0 dialogue appears xTm Define User Units Alignment Point One User Units Definition Move to user point 00 to define then click on feature Details User point in specimen coordinates amp 0005 mrm 0 209 Details Cancel Previous e Next Finish Follow the instruction in the dialogue to move to a point and click on it with the left mouse button The coordinates of that point 0 0 will appear next to the User X and User Y readout positions in the Details section of the dialogue to choose the next step either c
125. ched to the upper part of the column Ensure that the slots on the assembly engage with the pins inside the holder A small force resulting in a click is required to overcome the spring pressure Close the top of the column Pump down the system using the Pump button on the Start up or Work page If the vacuum does not reach the Vac OK message within 10 minutes the gun o ring may need to be reseated or replaced Column alignment may be required after this procedure 27621 Maintenance 8 4 The Anode Assembly 8 4 The Anode Assembly 8 4 1 COMPONENTS Figure 8 3 shows the basic components of the anode assembly To access the anode assembly begin by referring to section 8 2 Opening and closing the column in this chapter FIGURE 8 3 THE ANODE ASSEMBLY Extractor Electrode xtractor Electrode Screw 2 pcs Anode Body Retaining Screw Access Hole 2 Ceramic Insulator 3 pcs Slotted Holes for retaining Screws Caution The parts described operate in vacuum and should therefore be handled carefully using clean gloves and stored when not being used in suitable containers or packed in aluminium foil Under no circumstances should the Anode Assembly be dismantled as it requires factory alignment and sealing 8 4 2 REMOVING THE EXTRACTOR ELECTRODE It is not necessary to remove the entire anode assembly if only the Extractor Electrode needs to be cleaned It can be removed separately fr
126. ciding which spotsize is correct for a particular magnification can be determined when you achieve good focus and astigmatism correction easily at the chosen magnification 512 27621 Detectors scan Beam Patterning ETD secondary Electrons LFC SEE GESE SSBSEL External IR IR 2 pli Preferences Coto 27621 513 St T F F F F Operations Optimising an Image Use the focus control with the right mouse button to correct the sharpness of the image Focusing at 2x 3x the magnification needed for the final result makes the lower magnification sharper For example set capture magnification to 2000x and focus with magnification at 4000x 8000x When you change spotsize readjustment of Contrast and or Brightness in the Detector module may be necessary to refresh the image onscreen An alternate approach is topress the Auto Contrast and Brightness button found on the toolbar MIXING LIVE IMAGES FROM MORE DETECTORS If you choose different detectors if they are installed of the same beam for Quads 1 and 2 you can choose the Mix option for Quad 3 Similarly it is possible to use MIX option for Quad 4 when mixing signals from Quads 1 2 and 3 Clicking on Preferences displays a dialogue that allows the user to choose a percentage of one detector to mix with another FIGURE 5 3 PREFERENCES DIALOGUE FOR DETECTORS SIGNAL MIXING xTm Preferences ESEM Charge Neutralization General Movie Databar Uni
127. ck Detectors Contrast H I I I I A Brightness FIGURE 4 16 TABBED STAGE COORDINATES DISPLAY n A E otage Map Coordinates Actual v EX 576 mm 1 8221 mim A Y 1 15 6532 mm A 7 status specimen Current 3 7 p lon Beam Current 0 49 p Chamber Pressure 419E 5 Pa Y le 2 119 2 o i Software Control Navigation Page THE SMART SCAN MODULE contains correction features for the tilted image When the appropriate check box is ticked the function becomes active Dynamic Focus and Tilt Correction can only be used with scan rotation at zero Note this module is useful only for Electron Beam The Tilt Mode List box gives a choice of selecting Manual Automatic operation of the Dynamic Focus and Tilt Correction The Dynamic Focus Check box The scan slowly proceeds from top to bottom and the focus point is automatically changed according to the positive tilt of the specimen The focus should be sharpest in the middle of the image Dynamic Focus is usually used atlow magnifications lt can be used for a strongly tilted specimen either by the specimen surface itself or by stage tilt when the depth of focus is not sufficient It results in an image with overall sharpness The Tilt Correction Check box compensates for foreshortening in one direction on a flat specimen at a known tilt angle 80 range and when the tilt axis is parallel to the scan line Bec
128. configurations 8 1 1 LIST OF APPLIED CLEANERS e De ionized or distilled water e Ethanol CH5 OH e Ethanol p a Pro Analysis 99 8 pure C2H 50H e lsopropanol e Neutral pH cleaning fluid Soap solution e CIF or SOFT SCRUB fine abrasive household cleaner or 0 05 um alumina powder TABLE 8 1 HOUSEHOLD CLEANERS Netherlands Switzerland PPP WARNING The cleaning solvents ethanol and isopropanol are highly flammable Do not use open flames and do not smoke while cleaning Ventilate the room properly 8 1 2 CLEANING COLUMN PARTS All column parts are polished before the instrument is delivered For this reason only occasional light polishing is required to remove contamination that may build up on components in the column and specimen chamber as part of normal operation Any partthat is exposed to the electron beam should be highly polished and free of contamination and or scratches that can charge and thus degrade the image Parts that can be removed by the general Supervisor User and polished include the following 82 27621 Maintenance 8 1 Cleaning Procedures Overview e Wehnelt Cap e Extracting Electrode e GSED LFD components Caution Gold plated parts should not be polished with abrasives 8 1 3 MATERIALS AND TECHNIQUE To polish components place a lint free cloth on a flat surface a glass block is ideal and apply a small amount of Soft Scrub or CIF and distilled water to the cloth Pla
129. ction Equivalent to OK in a dialogue box 1 Equivalent to the cancel button 2 Stops stage movement at any time 3 Cancels the click and drag function Step key to highlight items in a dialogue box 1 Use to select between items in a group when in an edit box 2 When any quad is active and in focus the stage can be moved approximately 80 of the field of view in any direction by clicking on the appropriate Arrow key on the keyboard or 50 with the Shift button pressed simultaneusl y When pressed at the same time as an underlined character in the menu bar items reveals the pull down menu in the active application For example pressing ALT M at the same time brings up the Magnification pull down menu Use these keys to switch over the resident applications This starts from the last used one continue to press the TAB key while holding down the ALT key and applications are shown one by one Releasing the ALT key at any time brings application just listed active again Ctr Shift Use these keys to switch over the next previous Tab quad and make it in focus Alt F4 Exit application software which is active shut down Windows operating system Deletes an item in an edit box a selection or a sign Ctn C Copy to clipboard Ctr V Paste from clipboard Ctr X Cut to clipboard Software Control Entering Commands in Summary TABLE 4 6 FUNCTION AND SPECIFIC KEY SHORT CUTS Key Key Functio
130. ctor ETD ae ETD Settings for SEM Make Custom Mode equal to Secondary Electrons y 0 i ea coca tem MOVIE TAB provides two groups one to choose set up conditions for timing labelled Timer and the other to set up save conditions for the resultant movie labelled File See chapter Recording Movie on page 5 46 for detailed description 6 ALIGNMENTS OVERVIEW This section describes the set up for source and column for both beams lon and Electron e g the emitter start the proper final lens alignment the proper saturation of the filament and the electronic alignment of the columns using the software in the Alignments Pages Recommendation Electron Column Total alignment of the system should be made whenever necessary or on a fixed interval schedule in the following order 9 Filament Exchange e 2 Tetrode Alignment column e 3 Gun Alignment column e 4 Condenser Alignment column e 5 Final Lens Alignment column e 6 Stigmator Alignment column e 7 Stage Rotation centre Stage alignment only e 8 PLA Centering column The above column alignments should only be attempted when the column has been misaligned by being opened for cleaning or repair The correction of only one procedure may influence others therefore care should be taken to monitor the influence of actions taken Typical events need correction by the following sequence of alignments e Final lens apertur
131. des space for some explanatory figures and for your own notes as well e Some software functions use shortcuts which are given beside the heading in the brackets for instance Save Ctrl S e Pages are numbered by this way Chapter No Page No within the Chapter Instead of Chapter No you can find these abbreviations P preface C content I index e Tables and figures excluding explanatory ones are numbered within each chapter in this way FIGURE Chapter No Figure No within the Chapter TABLE Chapter No Table No within the Chapter e References to specific knobs buttons labelled functions on the system and software are highlighted in bold to aid association of items A sentence such as Click on the Measurement button to start this function refers to the software button itself SAFETY AND HANDLING Machine classification These instruments are safe with respect to e 1EC61010 1 Safety requirements for electrical equipment general requirements e 1EC61326 1 Electrical equipment for measurement control and laboratory use EMC requirements e EN50081 EMC Generic emission standard e EN50082 EMC Generic immunity standard e 96 29 EURATOM lonizing radiation e CE e Low voltage directive e EN61010 1 EMC directive Euratom directive Note EMC Electro Magnetic Compatibility These instruments are classified as e Plug connected e Safety class 1 EN61010 1 e Installation Ove
132. detector and offers a relevant mode in the Vacuum Mode module When Low Vacuum ESEM mode is entered from ESEM Low Vacuum mode by selecting an appropriate mode radio button nothing will happen unless there is a different gas type being used for the two modes In this case the appropriate gas type will be selected When Low Vacuum ESEM made is entered from High Vacuum mode by selecting an appropriate mode radio button the system prompts the user with the Pole Piece Configuration as a graphical dialogue This happens only for the first time after a particular vent procedure Pressure The Pressure adjuster is used to set and display the target chamber pressure Torr Pascal or Millibar are available and can be selected in Preferences Units see the end of Chapter 5 When the system is in LowVac or ESEM mode and the pressure value is changed in the Pressure adjuster the pressure will automatically start changing to the new value When the system is in any other status besides Vacuum LowVac or ESEM and the Pressure adjuster is changed the new value will be used as the target pressure when the system pumps to a Low Vacuum or ESEM mode The actual specimen chamber pressure is displayed in the Chamber Pressure field of the Status module at the bottom of all pages Fi 27621 Vacuum System Vacuum Modes xTm Pole Piece Configuration f Ho Accessory C Low ki Cone 500 perd C Low ki Cone 1000 urm C Raw Cone
133. ditions are present Forms of hazardous energies are shown in table TABLE 1 3 TABLE 1 4 FORMS OF HAZARDOUS ENERGIES Description 1 Electrical low voltage 50 600V high voltage gt 600V explosion pressure extreme heat fire corrosive reactive oxidizer toxic DIEN O 5 Mechanical capable of crushing pinching cutting snagging striking 2 Chemical 6 Thermal surface temperature hot liquids steam High Temperature 7 Thermal Cryogenic contact with super cold surface or with a cryogenic liquid 10 Stored flywheels springs differences in elevation elevated parts that could drop capacitors batteries Safety and Handling Safety Secure and Lockout Tagout Procedure 1 9 Complete any operation in progress and bring the equipment to a safe shutdown condition Switch the equipment off using the OFF switch Turn off power at disconnect points listed in TABLE 1 4 column 3 LOTO or tag each energy control point listedin TABLE 1 4 column 3 Apply locks and tags per the facility lockout procedure Block any mechanical parts remove any mechanical links Lock blocking in place TABLE 1 4 column 3 Note Two physical blocks are required to break and secure any gas liquid line Notify all affected personnel of LOTO Verify personnel clear of hazards Ensure that all authorized employees working on the equipment have placed their locks and tags on the appropriate energy iso
134. e Remove selected position Clicking on this in the dialogue list will remove the selected position from the map and remove the highlighted label in the location list The same result can be achieved by means of the Remove button Magnification Zoom Clicking on the right mouse button while over the Map area provides the fixed dropdown menu for Magnification Zoom Clicking on the item labelled Magnification provides a second dropdown menu which allows the magnification factor of the Map area to be selected FIGURE 7 7 MAP MAGNIFICATION ZOOM Add current stage position Update to current stage position Remove selected position Magnification Center view v Auto center on target Zero radarview The resulting multiple value is seen in the bottom right hand corner of the Map area Scroll bars are present to move over the whole Map area while zoomed in Center view This function brings the selected location to the center of view Auto center on target When using the Magnification function the present active location can remain in the center of view if Auto center on target s clicked on This is represented by a tick mark Zero radarview Clicking on Zero radar view will bring the radar view circle to zero position 12 o clock and rotate the stage mechanically to the home position for rotation movement only Stages Software Stage Functions COORDINATES TAB A dialogue overlays the Stage area displaying a nu
135. e Network Cancel The Print word in the menu will only be highlighted when the active quad is Paused TABLE 5 14 IMAGE PRINTING PROCEDURE Step Action to Selecta Quad Optimize the image conditions in that quad Photo the image or open an existing image from memory into the quad e Click on Print Ctrl P in the File menu a print dial og appears s Complete the print setup and click on OK ao The image set in the selected quad now goes to the printer Note Only printers on the Quanta Support Network are available Itis not possible to print to the network printers from the microscope controller as itis not on the LAN directly Some printers may not work with high resolution images because they do not have sufficient memory Operations Saving Multiple Images Recording a Movie saving Multiple Images Recording a Movie ee The movie Record button can be used to save an AVI file or a group of TIFF files during active scanning of Electron or lon Beam This feature provides the making of digital video files AV1 for dynamic experiments performed with the Quanta 3D microscope Up to 4 imaging quads can be recorded simultaneously with synchronized start It is possible to switch between quad and full screen while the video is recording The movie has the following embedded features e Resolution at 512 x 422 or 1024 x 884 e Databar image optionally included in the video e Average or Int
136. e change 5 6 e Filament exchange 9 e Tetrode cut off 2 3 e Column liner clean or other column disturbance 9 2 3 4 5 6 e Whenever necessary 6 7 1 Recommendation lon Column The lon column does not require any regular alignment The procedure 100 ION Source Control should be executed when e Emergency Power Off to start the IGP or to pump the ion column e lon source does not start spontaneously switches off to manually start the heat procedure The procedures 101 ION Aperture Alignment and 102 ION Stigmator Balance can be used for fine tuning the ion column It is recommended to check the 101 for HV 30 kV at probe currents gt 50 pA to ensure the proper performance of the Auto TEM script 27621 El Alignments Quanta 3D Systems Alignments Quanta 3D Systems Alignments Alignirrenits Go to the Alignments pages Open the list box by clicking on the 1 down arrow then choose the Alignment needed Always follow the instructions given in the Instructions module Click on the Start button and proceed with following pages Source Control c Totrode Alignment 3 Gun Alignment Before you align the Electron column be sure that the final lens 4 Condenser Alignment aperture is clean and properly seated All alignment procedures 5 Final Lens Alignment should be operated in a fast scan mode B atigrnator Alignment Stage Rotation Centre Note y PLA Centering Some a
137. e image quality by increasing the signal to noise ratio You can also improve image quality by using the Average or Integrate functions See Chapter 4 CONTRAST AND BRIGHTNESS Detectors The contrast and brightness settings can be set manually either by Contrast using the MUI or by adjusting the contrast and brightness controls in E H the Detectors module found on several pages See Chapter 4 I Brightness TABLE 5 5 CORRECTING C amp B Step Action aa Select a medium speed scan in an active Quad Reduce the contrast to zero and adjust the brightness toa level so that the last gray level can be seen by eye before the screen goes black E Increase the contrast so that the signal level shows an image 4 If necessary adjust the brightness level to improve the image Using Videoscope F3 The contrast and brightness settings in Videoscope mode can be adjusted to optimise the image to give the best range of greyscale for viewing or output as a stored image The Quad or full screen displays an overlay of two separated horizontal lines indicating white top line and Black bottom line A monitor waveform is displayed between or overlapping the two lines Magnitude and central position ofthe waveform represents contrast and brightness respectively Overlapping in any way means that the signal level is clipping in either black or white and should be avoided in normal imaging Controlling the waveform exactly betwe
138. e procedure corrects alignment through the 30 20 10 5 2 1 kV For each HV Spot 5 6 7 8 are selected automatically for correction This results in 24 Steps 3 The Save button appears on every fourth page with spot 8 for every HV with the exception of Step 24 which saves the values and finishes the procedure with the Finish button This eliminates unnecessary repetition of all conditions if only one alignment section is not correct Alignments 3 Gun Alignment Gun Alignment Pages continued Alignments Alignments Alignments 3 Gun Alignment 3 Gun Alignment 3 Gun Alignment Instructions Instructions Instructions Centre the displayed image area under the cross Click on Finish to save the new settings or Cancel ta stop the alignment procedure Any conditions that have been saved with new values will not be restored Centre the displayed image area under the cross at each step Try and prevent the cut off around the edge from encroaching on the image area Adjust the Contrast and Brightness controls when necessary save each sequence ending with spot o by clicking on the Save button Press the Next button to do foratord or tho Arowinuc huttan Optimize the image with Focus Contrast and Brightness Press the Next button step 1 of 25 step 5 of 25 step 25 of 25 Gun Shit 30k Spot amp Gun Shit 1 Spot 5 Contrast Contrast Contrast l A Brightness ea Cance
139. e the aperture holder with its open slotted end on a flat surface and grasp it firmly with one hand Insert one blade of a pair of needle pointed tweezers under the c clip making use of the slots in the holder and then carefully pull out the c clip Remove the aperture either by lifting out with the tweezers or by inverting the holder over filter paper a Petri dish or other suitable surface 8 5 3 PLATINUM APERTURES CLEANING Method 1 Heat the aperture held in special tweezers with platinum points in a clean gas flame until red hot for 4 20 seconds Take care that the aperture does not melt or become stuck to the tweezers Method 2 Connecta V shaped molybdenum foil boat about 2 cm long across the low voltage high current contacts of a Vacuum Evaporator unit Use a vacuum of 1x107 Torr 1 3x10 Pa and heat until white hot to flash decontaminate Do not allow the Vacuum Evaporator to contact the atmosphere until the foil boat is cool When the aperture has 2762 1 ea Maintenance 8 5 The Column Liner and Apertures cooled down place it on the foil vacate and reheat the foil to red heat on the aperture for 4 20 seconds Take care that the aperture does not melt or become stuck to the foil Again do not allow the Vacuum Evaporator to contact the atmosphere until the foil boat and aperture is Cool Caution Do not attempt to clean apertures just by washing in solvent as this can have an adverse affect just
140. e to the Electron lon Optical Optical Beam beam in the displayed sequence with respect to source column scanning and detectors Only one is active at any time but can be souls vel iese operated independently for each quad image area Preferences Ciro When the Optical Beam is active most of the remaining icons of the toolbar are inactive Couple Magnifications Magnifications for the Electron and lon columns can be coupled together so that when switching between columns there is no difference in magnification This is particularly useful when milling with the lon Beam and viewing with the Electron Beam The Patterning Menu Alt P Patterning Stage To is for executing Patterning functions 5 Start Patterning Start patterning Reset Patterning begins patterning with the pattern selected on the Patterning Page When the icon button is active it changes to the Pause Patterning Reset Patterning sh resets patterning to the beginning of the pattern procedure once again Note when patterning is started and a necessary condition is not available a descriptive warning message appears in the Application Status dialog box Stage Tools Window Help xT Align Feature Compucentric Rotation Fle Define User Units Diset Alignment User nits Beam Shift Reset Zero Beam Shift Home Stage Shift F3 Link 2 te PAYO Shit FS Reference Position TIE OP col E Whe see Ctrl I Preferences Cto
141. e video is paused saved and a new video is started with the same name and incremented numeric seed When the red dot representing Start is pressed it turns to ared ry square representing Stop Pressing the red square then stops the recording of the video of all quads and closes the files 27621 52 Operations Saving Multiple Images Recording a Movie Recording a Movie The following procedure describes how to setup and record a movie TABLE 5 15 SET UP AND RECORDING A MOVIE Step Action Select Preferences atthe base of the Scan menu Click on the Movie tab In the Timer section check the Movie check box AVI or TIF not both and select from the Delay time combo box the desired time Select the TIF function by checking the TIF check box if required and select from the TIF combo box the desired time In the Filesection fill in the File name and give the Save in directory path Fill in the Numeric seed value and the Video file size Select the File type and choose whether to record the databar with the Record databar check box Choose Apply to change temporarily to the new values or OK for permanent application of the values entered or Cancel to return to the original values at opening of Preferences Pause those Quads which you don t want to be active during recording Set up the imaging in the live quad and press the red dot on the button bar or Record Moviein the File menu The first Oper frame
142. ed 100 ION Source Control F 100 ION Source Contral 7 lon column source control lon column vacuum GE Or Up Lau Alignments 101 ION Aperture Alignment 101 ION Aperture Alignment Alignments ION Aperture Alignment exhaustively adjusts the lon Column for all i voltages and currents Only an FEI Supervisor User or a higher level user can access this page It is recommended to run 102 ION Stigmator Balance procedure at 30 kV and 100 pA prior to this one Instructions Complex aperture alignment Press the Start button STEP 1 The 5 kV 10 kV 20 kV 30 kV buttons select the voltage at which the adjustment is to be performed it is usually used for 30 kV but sometimes for 5 kV also This adjustment is important for the successful performance of some of the automatic scripts for instance AutoTEM 1 Bring a recognisable image feature under the screen Centre Cross 2 Optimize the image with the Contrast and Brightness adjusters if necessary Mo step 3 Focus the image and correct astigmatism thoroughly at 30 kV 100 DA STEP 2 This should be executed for any current which needs adjustment Select fast scanning mode Note when executing this alignment step itis not permitted to sharpen and stigmate with the use of a mouse or an MUI 1 Choose Aperture index 2 Clicking on the L2 Wobbler button switches on the lens system wobbler 3 By using the Amplitude adjuster cho
143. ed on entry to the Preferences dialogue Once the Preferences dialogue is opened any of the tabs can be chosen Only one tab can be opened at any time At the bottom of any Tab there are three buttons e OK button to bring the new settings into operation e Cancel button to return to the original setting Either of these will close the Preferences dialogue e Apply button to suspend the closing of the Preferences dialogue but save the settings if one needs to move to other Tabbed dialogues to change further settings The Items chosen and changed from any of the Preferences Tab dialogue will remain with the operating system for a specific user until changed TABLE 5 26 TABBED PREFERENCES Tab Settings psem Pene voce No Puge Automate I Custom Purge Salgo IN ETE Databar Selection of items for Selection ofitems for entry on the Databar on the Databar O B of units for the system to operate under for Pressure Temperature Measurement Select and change entries to High Voltage Spotsize Magnification Pressure Selection of presets for the scan speed defaults for Snapshot Photo Fast Slow scan Selection of beam operating conditions Selections for Custom Detector modes 27621 551 Operations Setting Preferences ESEM TAB displays the capability to change conditions in the Purge Mode the default condition is Automatic The Purge Settings will reflect the internal pressure and cycle settings dependin
144. eg ie e sample ray PLA Cap Minimal bearn skirt with sample close to the final PLA EDX analysis should be performed atthe lowest possible gas pressure so it should be done with the LFD Normal ly X ray analysis is performed with a relatively high beam current so that there is enough signal for a good LFD image even at very low gas pressure The Hot Stage cone can also be used with the LFD for X ray analysis and has a field of view twice as large as the X ray PLA X ray PLA The X ray PLA has a longer working distance profile extending down to 8 5 mm Samples are imaged at 15 mm working distance which is the eucentric point of the stage and the collection point of the EDX detector It is used in conjunction with the LFD The longer profile of this cone minimizes the low kV beam dispersion and skirting of the primary beam in the gaseous environment of the chamber allowing more electrons to interact with the specimen when focused and increasing the signal to noise ratio The aperture is 500 um and has the same pressure limits as the standard GSED When the Pole Piece Configuration dialogue appears the X ray Cone option should be selected To fitthe X ray PLA cone remove any existing detector or PLA cone from the lens insert then press the X ray PLA cone into place FIGURE 5 14 X RAY PLA Press fit onto housing 2762 1 Operations Selecting Beam Conditions Selecting Beam Conditions SI 20 0 k
145. egration changeable during recording e Scan speed changeable during recording e Reduced area pauses all quads for focus or C amp B change e Time remaining indicator e Single frame TIF images recordable during video sequence e File format compressed AVI avi e Start Stop and Pause onscreen indicators e Preferences setup dialogue MOVIE TAB PREFERENCES DIALOGUE The Preferences dialogue Ctrl O can be found at the end of some of the menus The Movie tab provides two modules one to choose set up conditions for timing labelled Timer and the other to set up save conditions for the resultant movie labelled File FIGURE 5 16 MOVIE PREFERENCES xTm Preferences x Databar Units Presets scanning Beam Detector ESEM Charge Neutralization General Movie 4 Movie Delay 02 y 5 5 still sis 1 TIF 25 movie stills File name mE Sake IN CADocuments and Settings y Browse Numeric seed 1 Video file size E50 MB File type avi video compress ALE avi M Record databar coca aey Operations Saving Multiple Images Recording a Movie Timer module The parameters in this section can be changed when the digital video is inactive but are disabled during recording The digital video is med asynchronously with the scanning The recording is controlled by two timers 1 AVI Digital Video timer after AVI delay time the acquisition buffer of each unpaused quad is stored as a new fra
146. eh SEE arte MS cle Ye Bs ER RS A o rial EDO Drag and Drop actions MEE EE EE ee ee a aaa ESO FEI Account Administrators A deds oe Indie te dotted dt O The File NICU arta Goold Kaw Oa KABEL SERE RS Be ee RADO Tie ACCO0UN EME 2 ed ES oe acct o aa EE le yaaa ie OO The Userdata menu 1 ee ee ee ee ee ASL The Help Menu l a hin aana toe EER EI e inde O Entering Commands in 1 Summary O 4 38 Using the Mouse ss SE Ee ce ee eee ee O Using the Keyboard 1 ccc ce ee ee ees 40 Overview ne 9 1 Specimen Preparation and Handling aa 5 2 NeededilteimS ds sais daa eos SOAS el Och ee a ada ORS Natural specimen os ad ER NR OR rias 2 Coated Specimen OE er ES E EES a Mounting the Specimen to the Holder oauan 5 2 Maximum Sample Dimensions naaa aa aaa cc ee ee ee ee ee D Inserting Exchanging a Specimen 00 cece cece cece e 9 3 Obtaining an Image o o oooccoocnooono eee 5 4 Operation Pre Check o ooooococoonoco ee ee ee OA Selecting Vacuum Modes 6 aaa aa aa a ee OO A High Vacuum Sach RE EN REDDER OS B Low Vacuum and ESEM Modes ee 5 5 Obtaining an Image on Screen A A OE Optimising an Image o oocoooooono oo 5 7 IE A A eee 5 7 Magnification _ O Desai dean ee dew aus CORO Changing Magnification TR AT EE Be oR ee OO Scan Speed and Filtering EER TE OR ER KERE E E Contrast and Brighiness occ cece ccc ce cece cee ee eee 5 9 Using Videoscope
147. en the two lines for the entire scanned image indicates full greyscale capability in that image For harder contrast conditions for instance in BSE images when more black and white is sometimes needed the amplitude of the waveform can be made to overshoot the two lines to 27621 se Operations Optimising an Image give this effect The shortening of the amplitude between the two line decreases the contrast accordingly TABLE 5 6 CORRECTINGC amp B USING VIDEOSC OPE Step Step Action OOOO Action 1 Selecta slow scan in an active quad Selecta slow scan in an active quad 2 Click on the Videoscope button on the toolbar Reduce the contrast to zero and adjust the brightness level to the lower dashed line black Increase the contrast so that the signal level just clips the upper dashed line white If necessary adjust the brightness level once more so that the average signal level roughly in the middle 6 The high and low peaks should just clip the dashed lines Enhanced Image on the Processing page can be used to adjust the LUT including Gamma control This can be useful for low signal conditions or odd imaging requirements Results affect the videoscope display Tools Window Help Auto Contrast Brightness Function Auto Contrast Brightness Auto Contrast Brightness ACB can be activated by pressing the Auto Focus ACB icon button on the toolbar or the item in the Tools menu The EE system sets the c
148. end on the target vacuum mode The Pump button is pressed in and not accessible For HiVac the system will achieve the best vacuum lowest pressure possible For LowVac and ESEM it will go to the pressure specified in the Pressure textbox atthe bottom of the Mode area For the LowVac and ESEM modes the purge function can be defined in Preferences ESEM Purge When finished the Vacuum Status in the Status module should indicate Pumped green icon If the Pump button is selected when only venting the venting procedure stops and the system immediately starts to pump to the target vacuum pressure VENT BUTTON When the Vent button is selected and the system is in any Vacuum status the confirmation dialogue appears After confirmation the system gently switches off the detectors high voltage supplies and pumps and uses the appropriate valves to vent the system The Vent button is pressed in and not accessible After a specified venting time the venting valve will close and the Vacuum Status in the Status module should indicate Vented The button will pop out again If the Vent button is selected when only pumping the dialogue appears After confirmation the pumping procedure stops and the venting procedure starts When the Vent button is selected when Vented status has already been reached the dialogue appears After confirmation the venting valves re open After the specified venting time the valves will close Note If yo
149. ent the sequence beginning to end This will be autofilled with the beginning and ending frames available Save in Path Enter the path where the AVI file should be saved Click on the dotted button to the right of the dialogue box to browse the directories for the path needed on the support PC File Name Enter the file name for the AVI file to be saved If this is not filled in the default prefix first image will be used and the edit box will be filled automatically Databar Tab The DataBar Tab contains two lists one labelled Available and the other Selected Items in the Available list can be added individually or as a whole to the Selected list The Selected list when completed contains all items that will be displayed in the DataBar at the base of the movie display The order of the items in the Selected list can be arranged according to priority or preference This will in turn change the order of the displayed items in the DataBar Items can be removed from the Selected list singularly or as a whole back to the Available list This facility does not affect the quad and full screen databar andis only dedicated to the FEI Movie Creator 2 Operations Saving Multiple Images Recording a Movie FIGURE 5 19 FEI MOVIE CREATOR 2 TAB DATABAR File Datahar Preview Available selected Label Move Up Add All ove Dawn lt lt Remove Databar Previews Create love Stap Available Selected Availab
150. eout Dont display 1 second 2 seconds 5 seconds 30 seconds specifies how long the information about just started movie lasts on screen e Toolbar combobox style Reduced Standard specifies a type of the comboboxes in the toolbar e Toolbar spinner style Left Right Up Down specifies type of the Dwell time spinner in the toolbar e Beam blank icon and menu available Yes No switches accessibility of the beam blank option e Zoom With Mouse Yes No enables the drag and zoom option for magnification and or stage moves e Allow Color Mixing Yes No 27621 555 Operations Setting Preferences F clit label xj Quanta 200 FR Quadi r Quad T Qued 3 Lo cnc DATABAR TAB specifies content of the databar at the base ofthe imaging screen or screens There are two lists one labelled Available and the other Selected Items in the Available list can be added removed individually gt lt or as a whole gt gt lt lt to from the Selected list The Selected list when completed contains all items that will be displayed in the DataBar The order of the items in the Selected list can be Moved Up Moved Down Top or Bottom due to priority or preference This will in turn change the order of the displayed items in the DataBar The chosen Items remains with the operating system until changed FIGURE 5 31 DATABAR PREFERENCES xTm Preferences ES ESEM Charge Neutralization General Movie
151. epend on the initial positioning of the command cursor which can be at any position on the image Moving away from the Dot with the Arrow increases the stage speed moving toward the Dot decreases stage speed The direction of movement is always toward the central Dot along a straight line You can move the cursor around on the field of view direction and speed change accordingly When you are done release the mouse wheel The action will stop and the Dot and Arrow will disappear from the image FIGURE 7 8 TRACK FUNCTION 3 18 06 PM 4205x Test label In the Optical Beam Quad the same function activates the Z movement With the wheel pressed moving the mouse up will move the Z up and moving the mouse down will move the Z down This activity can be seen live in the Optical Beam Quad window The representation of direction is indicated by a centered yellow arrow 2762 1 hen Stages Stage Movements GET When you select an image object with the cursor and double click the left mouse button Get brings that detail to the center of the screen The movement engine automatically calculates due to magnification whether to use Beam Shift or Stage movement Beam Shift brings the object to the screen center by moving the beam image field to an offset position high magnification Stage movement will center the object by mechanical movement of the stage and therefore will be limited to a useable range of magnification lower
152. eplace source call service FIB source supply is in acquiring state FIB source supply in idle state source depleted check supply replace source call service FIE source supply failed to startup can not reach acquire state source depleted check supply replace source call service FIG source supply is in acquiring state FIG source supply failed to startup can not reach acquire state source depleted check supply replace source call service lon beam is switched off patterning cant start FIG source supply is in acquiring state FIG source supply in idle state Pop up on Message Severity E Mone Error Warming All ET Lab Notes opens the Windows NotePad application above Quad 4 forthe user to make immediate notes and remarks After entry of a note the file can be stored as a text file TXT Any previous note can also be opened in Lab Notes FEI Movie Creator provides atabbed dialogue above Quad 4 for setting up a collection of sequenced TIF images and sequencing them into an AVI movie Software Control xT microscope Control Software Window Help vw Center Cross Shitt F5 Alignment rectangle Shift F6 CCD 15mm Marker single Quad Image Mode F5 oe The Window Menu Alt W opens the Window menu functions Center Cross Shift F5 places across in the center of either the single screen or each quad depending on the display mode selected This function is used in the Adjustment procedures to
153. erning starts from the first pattern and all patterning completed clocks are reset to zero FINE TUNING PATTERNS Use the MUI suiFT x and y knobs to fine tune the image Beam shifts are used in many applications such as fine milling of cross sections to give a clean vertical face to the section Use Shift also to adjust for drift or charge effects Grab a frame to monitor the change in mill position or carefully observe it from the live real time monitor image SUGGESTED BEAM CURRENT MILLING TIMES The appropriate beam current value depends on the sample to be milled and your experience with the sample material Lower beam currents are less destructive but take longer to mill The following are guidelines only Specific parameters depend on your sample material and objectives 542 27621 Operations Milling Procedure TABLE 5 19 BEAM CURRENTS MILLING TIMES BY APPLICATION Milling Application Suggested Beam Current Milling Time Typical cross sections Try Typical cross sections Try fora total time of 5 15 minutes using 2 5 nA of current Larger a total time of 5 15 minutes using 2 5 nA of current Larger lt 20 um wide currents cause more damage around the recess and less vertical walls Large cross sections Raise milling time to 15 20 minutes or more beware of drifts using 5 very wide or deep ones 20 nA current Cleaning cross section Usea value no less than one quarter to one half of the main current 500 300 100 50
154. es procedures for how to use the system ALIGNMENT explains how to align the column and stage to achieve optimal performance STAGES gives a full description of functionality for each stage and the software control MAINTENANCE gives step by step cleaning and maintenance procedures SYSTEM OPTIONS explains relevant options that are integrated into or accessory to the Quanta 3D system 27621 e Preface How to Use this Manual How to Use this Manual This manual is available in two forms either in the printed form or as an electronic PDF file You can read the manual from beginning to end highly recommended but rarely done Be sure to read Chapter 1 Safety and Handling at least before operation Most importantly you should locate the topics necessary to operate the microscope in the proper way to safely achieve the best results In the electronic PDF file you can take advantage of the searching and navigation possibilities offered by this file format In the printout the following conventions are observed to be of help e You can search for the information in the main table of contents at the beginning of the User s manual where tables and figures excluding explanatory ones are also listed e Included in some chapters are easy to follow tables outlining task oriented procedures e Major headings have been hung in the left column to help you scan for the basics within a chapter That column provi
155. etime accelerating voltages The fine correction depending on the accelerating voltage can be performed in the alignment procedure Filament life time 63 44 24 1 Source Control Cancel Alignments 3 Filament Exchange Instructions Switch on the high voltage slowly increase the filamet voltage Use the crossover mode ta saturate the filament Use the Source tilt control to maximize the brightness Click on Store to store the new settings step 2 of 2 Filament voltage 1 390 Eo o Na W Autobias on W Limit voltage Bias 150 m py Filament current 2504 7 OK Emission 103 4 ui Filament life time 55 27 h Source tilt Aver Store 24 20 Contrast Carcel Alignments 9 Filament Exchange CONTROL ELEMENTS DESCRIPTION Step 1 e Reset Filament Lifetime button resets the logged filament hours as displayed in the Filament Lifetime text box Step 2 See 1 Source Control Alignment at the beginning of this chapter Alignments 100 ION Source Control 100 ION Source Control Alignments 100 Ion Source Control lon column vacuum and source control Press the Start button Instructions Mo step ION Source Control starts lon source and IGP On Off It also shows the actual state of the lon source and starts the Heat procedure Only an FEl Supervisor User or a higher level user can access this page CONTROL ELEMENTS DESCRIPTION
156. eyoed fd equi 101 9s OZ SPUELOUEN 0 ajqeordde 9uLp10909 UI 1pue paroldde ue uo padwnp Jo uonelfeisui sado ud e ul paleauloui ad 0 aney sHulHeyoed Adw p ueapun Jo eueteui Japureuay OD Ioso4ee 110 S2 OSIA HDIH HOAH 0SO 0ZO HL13d ST1IO ONLLVOIMENT ew 6w g ML SUONBI9PISUOI jesodsiq EL SH e1nsodx3 u01393 01d jeuos1ad s Jouo2 a1nsodx3 g uou yo1x0 099 uo sysewayY G3LVSYLOYGAH suonnesed jeloeds ou suonipuos abes01S 099 029 H14d STIO DNILVOIHANT euuydeg Her 0001 lt 09 93 giqealdde jou seoueisunouio yewou Japun Bunsneyxe jeso AALVAHLOHAAH 089 030 HLAd STO DNILVOIHANT US H96 1 611 0001 lt o a6e10 s pue BulpueH Z HOIH HOAH 0SO 029 H134d STIO DNILVOIHSNT eluydeq H r bw 0001 lt 09 93 OSIA HOIH HAAH 0SO 0ZO H13d STIO o H96 1 6u 0001 lt 0S 97 yo1x0 093 031V381080AH 059 039 CH 13d SINO DNILVOINENT 9S 6 E lt giqeodde jou ainpesoid Aouebiewy CARACAS pice E 6 BISEM SNODIEZEU 104 od p e 1 ues ay 0 anowa pue seq onseId OU iNPIUI OSIA HOIH HOAH 0S0 020 H14d STIO aan 10198 enna ay enoys 919 ay none BHUIOIEID pues p quosiamog B 8 juaquosqe aieudoidde ui pinbr y quosqy a1npa901d afellids giqeeoes jou onea puewap uaBAxo je2luays 291601018 z gjqesoes jou puewap usbAxo jesiwmayy EES o abbas od eed gjqesoes jou s pueuiep usB xo e91Bo 01g p xouow UOGJE2 ay Ul SIONPOAA uomsodwo2ap snopiezeH U0 JBu10jU e9160 0
157. eyond the rough cut Remember to fill in the depth of your cross section in the property editor on the Patterning page Snapshot another Beam frame to check alignment of the pattern to the feature e From the toolbar set the Beam current to approximately 1 4 Click on the START PATTERNING icon in the toolbar 7 Select a new Quad by clicking in it and the E Beam icon from the toolbar and begin scanning Click SNAPSHOT to grab a frame to view the E Beam image Making the Final Cut Use CLEANING CROSS SECTION from the pattern tools menu for this final cut TABLE 5 23 MAKING THE FINAL CUT Step Action If the cut is too rough change the lon beam current to 100 1000 pA Adjust focus as needed 2 Inthe patterning Quad click snaPs HOT to grab al Beam frame 3 Click CLEANING CROSS SECTION Bring the cursor to the image area and draw a rectangular box Adjust its size so that its leading face crosses the target area and the trailing edge extends just beyond the rough cut Remember to fill in the depth of your cross section in the property editor on the Patterning page Click on the START PATTERNING Icon in the toolbar 4 Click SNAPSHOT to grab a Beam frame Selecta new Quad by clicking in it and the E Beam icon from the toolbar and begin scanning Click SNAPSHOT to grab a frame to view the E Beam image SSD BSE detector if available is suitable for this electron imaging during ion patterning Operations
158. f the same or a lower level group e Paste Ctrl V click to paste user data into your own account or Remove into the accounts of a lower group level It is not possible to copy user data inside the FEI Supervisors User group e Remove click to delete user data from a selected account of equal or lower group level Hep THE HELP MENU Legend contains the following items About Legend clicking provides an explanation of icons used in the tree Members of this group cannot log on Group Can be accessed Group cannot be accessed Member of group which cannot log on Standard user Logged mn wear e k rcannol he Arcassar Cuan background user hat no userdala Red cross user accounts disabled or locked Am To E TE Y e About displays the User Management software version and xl copyright FEI User Management wersion 1 0 Copynght FEI Comparry 0 2002 Running on Lecal machine 27621 od Software Control Entering Commands in Summary Entering Commands in Summary USING THE MOUSE TABLE 4 4 MOUSE BUTTON FUNCTIONS Key Button Key Button Function unction Left Control Areas makes selection in control areas single arrow cursor On Screen click and drag a selected area to zoom in in magnification to fillthe image area with the selection quad or full screen Lens Alignment Mode click and Drag provides the final lens fine alignment four ended arrow cursor Double Cl
159. for readout information e Middle adjuster for large or small adjustments Its behaviour depends on where you release it the further from center the middle adjuster is pulled the larger the change Unlike a scroll bar the middle adjuster always snaps back to the center of the adjuster Logarithmic response allows coarse control with larger movements e Grey bar for larger adjustments single step increments e End arrow for finer adjustments single step increments e Small adjuster for Linear adjustment continuous response Preset Continuous adjusters are used for values that have both a continuous range and a list of presets to achieve total control over one function Items on the slider drop down change according to the function chosen The button on the left side of the adjuster toggles between modes e Drop down list clicking on the buttons on the right of the drop down menu steps through the values Up Down in the list given in the Preferences for that particular parameter but only shows one value at any time in the text area Clicking on the down arrow next to the toggle button causes the drop down list to appear If the list extends further than is visible a scroll adjuster appears on the right side of the list Clicking on a value in the list highlights that value and enters it as current value in the text area displayed at the top e Adjuster mechanism The adjuster has fine control ofthe values
160. g on the mode selected in the Purge Mode dialogue FIGURE 5 28 ESEM PREFERENCES xTm Preferences x Databar Units Presets Scanning Beam Detector ESEM Charge Neutralization General Movie Purge Mode No Purge amp Automatic C Custom Furge Settings Automatic Custom Minimum Pressure 65 0 Fa 65 0 Fa Maximum Pressure 130 0 Fa 30 0 Fa Number of cycles 5 cancel Ay There may be certain applications e g working with the optional Peltier stage where the operator needs to change the purge parameters seen above Click on No Purge when purging of the sample chamber is not desired during Low Vac or ESEM operation With no purge cycle initiated the chamber will go to the set pressure directly and the gas mixture in the chamber will slowly change to the new gas type The Purge Settings will be greyed out Click on Automatic will use pre defined values for Number of cycles and Pressure limits based on the PLA size The Purge Settings will display the system default values The following defaults TABLE 5 27 apply specifically to the Automatic mode Click on Custom to be able to change the pressure limits Minimum Pressure Maximum Pressure and the Number of cycles within the Edit boxes The default values for Custom mode are the same as the Automatic mode and are shown in the Edit boxes when first opened Enter new values in using the keyboard and thereafter press the Apply or OK button to make them
161. ganise users and accounts that can possibly be applied to the Quanta 3D It allows the creation and removal of user accounts the setting of user passwords and group membership as well as the copying and removal of user data You can start the software by clicking the desktop icon Start Programs FE ICom pany UserTools FEIUsermanagement exe This brings up the Log On dialogue box containing Username and Password text fields for entering the User Management software CONTROL POSSIBILITIES Context menu You can reach some context options by clicking the right mouse button The use of these options is the same as described below Drag and Drop actions Instead of using menu options you can sometimes simply drag and drop items from one icon to another set user group FEI ACCOUNT ADMINISTRATORS As the highest account level FEI Account Administrators have rights that allow them to create and delete users and change their properties over the following user groups in order of significance e FEI Account Administrator e FEI Supervisor Users e FEI Microscope Users e FEI Non active Users Each of these accounts has its own opportunity to operate the xT microscope Server and Control software The first FEI Account Administrator is created during the system installation FIGURE 4 18 FEl ACCOUNT ADMINISTRATORS CONTROL OVERVIEW Factory FEI User Management File Account Liserdata Help GE FEI Non active Users 2 B FEI Micr
162. ge E After obtaining a good image quality the image could be paused and saved lt is possible to save an image using the File menu or using the included xT DOCU database software image saving function see separate manual which is the preferred solution All data should be stored on the support PC rather than the microscope controller to prevent filling the hard drive For a detailed description of the following functions see Chapter 4 SNAPSHOT AND PHOTO BUTTONS The Snapshot icon button is represented as a camera with a short time dial on the toolbar When an image is required at any time milled position during milling process for instance one can click on Snapshot and a single scan using the predetermined scan settings see Preferences Scanning tab is activated The image is paused atthe end of the scan The Photo F2 function in the scan menu allows a preset high quality high resolution image to be taken This feature like Snapshot can also be preset in Preferences Scanning tab where itis represented as a camera with a long time dial Slower scan rates will be most generally be used with this image capture method PAUSE BUTTON Clicking on Pause with the left mouse button stops scanning at the end of the current scan so that an image can be saved Clicking again before the end of the frame scan stops scanning immediately To unpause scanning click the Pause button again see Chapter 4 for details FI
163. ge When grid bias is negative secondary electrons are repelled from the ETD detector and only back scattered electrons are detected Use a range of 25 to 150 V to obtain back scattered electrons The range for grid bias voltage is from 150 V to 250 V The normal operating setting for imaging is 250 V These settings are ordinarily preset atthe factory but you may need to adjust them for optimum imaging on individual specimens ETD Custom settings A preferences Tab will automatically display when you choose custom mode for ETD The Detector Preferences dialog box contains adjuster s to vary the custom mode of the detector When grid bias is negative secondary electrons are repelled from the ETD detector and only back scattered electrons are detected The biasing capability is from 150V for only backscattered electrons to 250V for secondary collection 27621 515 Operations Detector Types and Usage Selecting preferences for the ETD Custom mode will set those conditions in the ETD menu as the Custom mode Clicking OK will finalise the preference and Cancel will return the settings to the previous values All changes made are visualised in real time except while patterning and the detector responds immediately therefore conditions can be tested before clicking the OK button FIGURE 5 5 ETD CONFIGURATION DIALOGUE xTm Preferences ESE Charge Meutralization General Movie Datahar Units Presets Scanning Beam
164. gs FEI User Management Delete user x N Are you sure to delete user supervisor AN Are vou sure to delete user hugo userdata wil be removed e Set password click to make a password for the user The user must first be highlighted in the tree An FEI Account Administrator can change the password for any user from a lower level account The password has to be confirmed twice FE User Management Set password Ed Lier nene hugo FEI Miercecope Users Piw passed Confirm password e Set user group click to set the group for the user The user must first be highlighted in the tree When confirmed the user is moved to selected group When moving a user from the FEl Microscope Users group to the FEI Non active Users group his user data will be removed A warning is displayed in this case Lisername sopersor FEI Supandenr Leers Setgrup dIE Software Control FEI User management Software FET User Management Account proper x Properties Alt Enter click to see and change the properties for that user The user must first be highlighted in the tree Weernome hugo FEl Microscope Users Fill narr Desorption r F Liger caini charge pitira Paced never expire l Acounl is disahled fab DE Cancal THE USERDATA MENU gt contains the following items Liserdata Help Copy Cobo Paste Cty e Copy Ctrl C click to copy user data from a user o
165. hazardous voltage in an unknown circuit before measuring Operators and service personnel must be trained on potential safety hazards and safe techniques and must observe all warnings and cautions encountered on the system and in the manuals No person should perform any operations without prior training ELECTRICAL PROCEDURE Only authorized personnel are allowed to dismount panels from the microscope and its accessories and make voltage measurements Remember the voltage can be higher than expected and voltages can be hazardous Therefore the following guidelines must be followed when making any voltage measurements e Never make these measurements when alone in a room e Never touch any parts that may be under high voltage e Connectthe earth ground zero voltage probe first and disconnect itlast e Use anundamaged voltmeter specified for atleast 1 kV e Useundamaged probes specified for at least 1 kV e Never measure voltages above 500 V directly in the electrical system a derivative of this voltage is always available e Where possible regulate the voltage down before connecting or disconnecting the probe e Return the instrument to an electrically safe condition and make sure that all probes are detached after finishing the measurements Mount all panels after finishing the job SAFETY INTERLOCKS Components include safety interlocks to minimize high voltage hazards Overriding interlocks is dangerous and should never be d
166. he control disappears automatically after 10 seconds of no use The timeris reset each time an adjustment or movement is made Stages Stage Related Functions stage Map Coordinates Relative y fo 0000 UL 0 0000 LIL USER UNITS To activate User Units as the basis of the stage coordination system click on User Units in the Stage menu A tick mark will appear next to the label The stage coordinate system will revert to the last defined user unit configuration for 1 2 or 3 Point Alignment From this point on the stage can operate in Actual Target or Relative mode with User Units to perform specific movements Define User Units This associates stage points with user defined points to set up a mapping between stage and user coordinate system After that the computer uses these specimen coordinates rather than stage coordinates for positioning For example a die of an integrated circuit has its own coordinate system If you choose a 0 0 position you can drive the stage relative to that position using your own coordinate system These are expressed in User Unit UU coordinates which may be microns multiples or fractions of microns etc Coordination of the stage can be anchored to either 1 2 or 3 points depending on the sample management or application Choose points that are not in a straight line for example at the corners of a die or at the edges of an area or wafer You can align up to three points by whi
167. he microscope console vacuum gun column and stage The support computer contains various other items that are generally accepted as essentials or are dedicated to a particular application such as forensics or failure analysis The user interface devices are peripherals to the microscope controller either software or hardware The Completion Packages differ in content depending on the demand of the application or the wishes of the customer As a result itis not possible to specify all possible combinations here FIGURE 2 3 QUANTA 3D STANDARD LAYOUT SCHEME Microscope Console Electrical Console EConsole E ow A S lt Keyboard Mouse E Customer s e 3 LAN Microscope E M s e Hetwork Support Hetwork E Local Hetwork Po Microscope Support Controller Computer mt Printer Hub 1 Part of EConsole Hub 2 Part of EConsole For more information on the types of completion packages and overall content refer to Chapter 9 Options 27621 25 System Overview System Layout of Quanta 3D SOFTWARE INTERFACE ELEMENTS The software control consists of a shellemploying application programs within a Windows 2000 operating environment xT microscope Server starts and stops the basic microscope functions and makes it possible to open and close the xT microscope Control software UI user interface or sometimes xTUI in the dialogue boxes which controls system functions including detection and
168. he mode changes to Target e Clicking a stored position name when it is already selected allows the user to edit the name Pressing the Enter key or clicking a different item confirms the new name When the user presses the Escape key the old name is restored cancelling the renaming e Double clicking a stored positionis the same as clicking it and then Relative y pressing the Goto button It immediately moves the stage to the desired position fo o000 mm fooo00 mm foo000 mm m m Coordinates 27621 Stages Software Stage Functions 240 Action Buttons Goto Clicking this button causes the stage to move to the currently displayed position in Target mode or to move relative to the current position in Relative mode e Pressing the Enter key in any of the position edit boxes acts as a short cut for the Goto button e Double clicking a position acts as a short cut for selecting that position and pressing Goto Add Clicking this button creates a new entry in the Location List using the currently displayed position e Clicking the Add button in Relative mode activates the Actual mode and stores the actual position e The new entry is called Position X where X is 1 2 3 etc If an item with he new X already exists because the user loaded a map list from an STG file the value is incremented until a unique name is obtained The user can rename the new entry see Location List Update Clicking
169. he operating system until changed FIGURE 5 32 UNITS PREFERENCES xTm Preferences Ed ESEM Charge Neutralization General Movie Databar Units Presets Scanning Beam Detector Units of Measure millimeter mm Pressure Temperature Kelvin K cancel amy Selection posibilities are e Units of Measure Meter Millimetre Inch Foot Pressure Pascal Torr Bar e Temperature Kelvin Celsius Fahrenheit Operations Setting Preferences PRESETS TAB displays the capability to change values in the High Voltage Spotsize Magnification and Pressure ranges either the Electron or lon column Either single or numerous values can be inserted in the lists Changing values can be accomplished by selecting a value in the list to edit and entering new values in the edit box just below the respective title The entered values remain with the operating system until changed FIGURE 5 33 PRESETS PREFERENCES xTm Preferences x ESEM Charge Neutralization General Movie Databar Units Presets Scanning Beam Detector High voltade Magnification Pressure ae The High Voltage list can be changed to span any values from 200V to 30kV As the values are displayed in Volts the entry value in the edit box can be specific in value The Magnification list can be changed to hold regular used values or general values Magnification values that are in the list but do not apply because of the Wo
170. hine dependent the details can be found in the relevant manual TRAINED AUTHORIZED SERVICE PERSONNEL Before starting any service task on an FEI Company product such as an electron microscope ion beam equipment any related accessories or third party equipment the service engineer concerned must first have read and understood the relevant sections of the FEI Service Safety Manual Note Only service personnel certified by FEI are authorized to service the equipment A hardcopy of the FEI Service Safety Manual order code number 4022 190 50058 is shipped with every FEI Company electron microscope or ion beam instrument and itis also present in electronic form on the FEI Customer Service CD ROM It contains explicit instructions on safe working methods descriptions of the various warning symbols and labels used on FEI equipment and Material Safety Data Sheets for all toxic gases and materials which may be present Read the following pages carefully before e installation e service e maintenance DANGER These servicing instructions are for use by qualified personnel only AN Do notperform any servicing other than that specified in the operating instructions unless you are fully qualified to do so FEI electron optical equipment is perfectly safe when correctly installed and operated However when inexpert modifications are made for instance the opening of covers or removal of parts except those to which access can be
171. ial Safety Data Sheets MSDS Volatile and corrosive substances can diffuse through contact lenses despite reasonably well ventilated conditions Moreover contact lenses are difficult to remove when an irritant chemical enters the eye making irrigation ineffective Care must be taken to address the issue of contact lens worn by those coming into contact with such solvent fumes The following substances are used on the equipment e Oils Ultragrade 19 lubricating oil e Greases Molykote BR2 plus Fomblin RT 15 Fluoropolyether grease e Solvents De ionized or distilled water Ethanol C gt H5OH Ethanol Pro Analysis 99 8 pure C H50H KOH Potassium Hydroxide NaOH Sodium Hydroxide EXTRAN MA02 neutral cleaning fluid CIF household fine abrasive cleaner Note the above mentioned solvents are the only ones recommended by FEI Philips The products marked by are supplied by E MERCK Darmstadt W Germany Cleaning Code of Practice e Do not open the column unless it is really necessary but check the performance regularly e Always work in a clean and ventilated room e Use a clean working table with good illumination e Wear lint free clothes e Always wear clean gloves when handling vacuum parts e Collect all cleaning items and have them on site before opening the column e Always use clean solvents e Use chemicals carefully and in sparing quantities Avoid spillage sk
172. ick Electron lon Beam Quad move the selected point to the middle of the quad Optical Beam Quad 10 mm marker placement Left Shift On Screen click and drag a selected area to zoom out in magnification the screen quad or full screen to fit the selected area Shift Left Activates Beam Shift hand cursor To_focus with the mouse press and move the mouse to the left or right double ended arrow cursor Release the button to set the focus Shift Right To sigmate the image press and move the mouse to the left or right X stigmator or up or down Y stigmator to correct four ended arrow cursor Release the buttons to finish Shift Wheel Fine Control moving the wheel Up Down increases decreases the magnification Ctrl Wheel Coarse Control moving the wheel Up Down increases decreases the magnification Wheel Press Electron lon Beam Quad with the wheel pressed like a button the TRACK mode for joystick like movement over the sample surfaceis activated Optical Beam Quad activates the stage Z movement With the wheel pressed moving the mouse up or down moves the Z up or down This activity can be seen live in the Optical Beam Quad window Note the given sequence of key and button pressing is important for some functions Wheel Up amp Down PL Wheel Press 27621 Software Control Entering Commands in Summary USING THE KEYBOARD TABLE 4 5 WINDOWS SYSTEM KEYS Key Key Fun
173. icroscope Control server Log On points A password is advisable for logging on to protect individual settings and results 2 Usual ly the Quanta 3D remains on with the vacuum system in operation but typically both electron and ion emitters and High Voltage for both columns remain off The system starts with the setting in use when the xT microscope Control software was closed This Fi 27621 Vacuum System Quanta 3D System States File Detectors Scan Beam Open Save Colts Save AE Record Movie Import i Export Print Ctrl F Log Off Factory Exit 27621 EI allows duick resumption of daily operation without having to start the system from any Shutdown state SHUTDOWN PROCEDURE GENERALLY TABLE 3 3 SHUT DOWN PROCEDURES GENERALLY System State Action 1 Full Click the Sleep button to switch off both beams Operation and stop the ion source Select Tilt 0 Ctrl E in the stage menu Click the Vent button to vent the chamber remove your sample if needed and remove the Peltier Cooling stage if installed Click the Pump button to pump to High Vacuum 4 Sleep Select 2 Log Off in the File menu to log Off the State present user and provide the Log On dialogue for entering another user Switch off the monitors 5 Standby Click the Stop button to stop the xT microscope Server software Switch Off the both PCs and the monitors 5 Shutdown Click the Shutdown button to shutdown the
174. ics for color etc EDITING MEASUREMENTS ANNOTATIONS Oncea Measurement or Annotation symbol has been drawn it can be modified Bea y Selected graphic is denoted by the addition of resizing handles to the graphic outline use arrow cursor Moving graphic place the cursor inside the boundary of the graphic and hold the left mouse button while dragging it use move cursor e Resizing graphic hold the left mouse button and drag the resizing handle until the desired size is reached use horizontal Sa ME vertical or diagonal resizing cursor This can also be achieved by entering values in the Property list dd od Select the Arrow selecting tool button after defining a graphic to exit graphic editing mode 550 27621 Operations Setting Preferences Setting Preferences The preferences dialogue can be activated by selecting Preferen ces Ctrl O at the end of most of of the menus Note Preferences for Electron and lon beams have the same features Following descriptions and figures are made only for Electron beam Detector preferences menu handles individual choices of Detectors with direct dialog THE PREFERENCES TAB DIALOGUES The background setting for day to day or individual personal operation can be made by entering or changing characteristic in any of the tabbed dialogues found in the Preferences It depends on the opened menu where Preferences is chosen that dictates the tab open
175. ide information on the Actual Rotation original position in degrees the Target Rotation the selected position in degrees and the Rotation Change the difference in degrees of rotation FIGURE 7 12 SCAN ROTATION Scan Potation Actual Potation 0 Target Potation 90 Potation Change 90 Clicking on or near the numbered angles around the perimeter of the circle will cause the beam to drive to that angle and the green triangle will update on screen on both circles The smaller circle in the top right of Quad 4 remains on screen when Scan Rotation is switched off ifthe angle is greater than 0 to inform the user of the orientation 27621 8 MAINTENANCE This section describes the procedures necessary for the maintenance of the microscope that can be carried out by the Supervisor User For the Quanta 3D User maintenance is at a minimum due to Gun and Column design and the long uptime expected from this class of instrumentation Therefore the more complicated maintenance is normally contained in a service contract to be performed by a qualified Quanta 3D service engineer At the User level items such as the following can be maintained e 8 1 Cleaning Procedure Overview e 8 2 Accessing the Column e 8 3 The Wehnelt and Filament 8 4 The Anode Assembly e 8 5 The Column Liner and Apertures e 8 6 The Standard Insert e 8 7 Gaseous Detectors e 8 8 Stage Maintenance e 8 9 Refilling the Water Bottle e 8 10 Scroll
176. ignment A final check on the quality of the new alignments can be performed by choosing 2000x screen magnification and changing spotsize from Next to 1 and kVs from 30 kV to 1 kV If there is very little difference in the position of the objects on the screen during focusing and changing stigmator alignment the alignment is good Instructions Optimize the image with e DI ee The Gun and Column User Alignments are now completed Brightness Press the Next button Contrast Cancel 2762 1 ea Alignments 6 Stigmator Alignment Stigmator Pages continued Alignments Alignments Alignments 5 Stigmator Alignment 6 Stigmator Alignment 5 Stigmator Alignment Previous Previous Next Previous Instructions Instructions Instructions Centre the feature back under the cross Click on Finish to store the new settings or Cancel to return to the original settings Centre the feature back under the cross Press the Next button Bring a recognisable feature Under the centre cross Press the Next button step 3 of 4 step 4 of 4 atigmator 4 alignment atigmator Y alignment Contrast o Contrast Contrast Eo ON 8 e I III i iIi He EE Brightness EE Brightness Eo ss 8 Brightness TN N Cancel Cancel Cancel Alignments 7 Stage Rotation Centre Stage Rotation Centre Alignments The rotation of the stage has a mechanical center a
177. in contact eye contact and vapour inhalation e Do not mix materials of different compositions in the cleaning baths e Before mounting inspect parts under a light microscope e Be sure that special tools are clean before use and packed after use in aluminium foil e Strip the assemblies as far as possible e Packitems in aluminium foil after cleaning e Vacuum parts that can not be remounted immediately can best be kept under an infrared lamp and wrapped in aluminium foil 1214 27621 Safety and Handling Chemicals GASSES Nitrogen N gt For all microscopes nitrogen is used to vent the chamber and vacuum system Although Nitrogen is not poisonous it is a potential asphyxiant Liquid Nitrogen LN Optionally the EDAX detecting unit is mounted on the microscope The EDAX unit has a 10 liter dewar vessel containing liquid nitrogen Only authorized personnel should carry out replenishment and the MSDS for liquid nitrogen should be read and understood WARNING Suffocation is possible if nitrogen or liquid nitrogen is released in an enclosed room without adequate ventilation Liquid nitrogen has the potential to cause frostbite if direct contact with skin occurs On standing liquid nitrogen absorbs oxygen from the air and forms liquid oxygen in solution Treat any liquid nitrogen that is not fresh as though it had all the hazards of liquid oxygen Use a safety approved step ladder to reach the opening
178. in the Electron Beam Current module on the Beam Control page by clicking Neutralisation button This opens preference window on Charge Neutralisation Tab see Setting Preferences later in this chapter Decisive criterion for appling of HV spotsize and defocus is that the image stops to move while imaging Applying Charge Neutralisation changes image appearance so the C amp B could be set to optimise image Switching off Charge Neutralisation brings the C amp B to original values Preferences Cto 27621 EI Operations Milling Proce dure CREATING CROSS SECTIONS Cross sections are cut ina stair step fashion to allow the exposed layers to be seen with electron beam when the stage is tilted to 52 Mill a typical cross section in two or three stages 1 The first stage is regular cross section with five superimposed box patterns sharing three common edges 2 Optionally use either filled box or cleaning cross section ata reduced current If the cross section is large a second cleaning may be required at a lower current 3 Finally use cleaning cross section The following figure shows the relationship of these pattern areas and their relative size A typical cross section is 10 20 um wide by 7 15 um tall with the dimensions and depth appropriate to the size of the target area of interest FIGURE 5 23 A TYPICAL CROSS SECTION Contact Edge Cleaning cross Closestto Area of Interest section Step 3 Filled box
179. inistrative functions File Detectors Scan Beam Open Open Save Ctrl s opens a dialogue for opening images previously stored to the SAVE AS a harddrive Only file saved in TIF format is available to open Record Movie Import FIGURE 4 9 OPEN DIALOGUE Export zjx Print Ctrl F Look in Amy Documents y cf Er Movie Channel 1 003 00012 tf E Movie Cl Log OT Factory Ea Movie Channel 1 003 00013 tf a Movie Cl E Movie Channel 1 003 00014 tif Movie Cl Exit Movie Channel 1 001 00001 tif E Movie Channel 1 003 00015 tif a Movie Cl Movie Channel 1 001 00002 tif EA Movie Channel 1 003 00016 tif Movie Cl Movie Channel 1 002 00001 tif E Movie Channel 1 003 00017 tif Movie Cl Movie Channel 1 002 00002 tif EA Movie Channel 1 003 00018 tif Movie Cl Es Movie Channel 1 002 00003 tif a Movie Channel 1 003 00019 tf Ea Movie Cl Files oftype ftit Image files tif Cancel File name The dialogue displays by default the location to open files associated with the imaging function i e the image file location used by Snapshot and Photo Save Ctrl S saves the image TIF file format only with a given last used name in that quad and an incremental label ata predetermined location all can be set atthe user s first time log on Any time you save an image it is saved as a new file e g Label_001 tif Label 002 tif etc Save As meme CER
180. ion shown in the dialogue box e Cancel button quits the dialogue box without updating the information e Apply button introduces the change immediately and remains in a dialog box for further setting e Reset or Default button restores previous or default conditions and leaves a dialog box LIST BOXES contain available choices such as screen resolution magnification settings etc Click on it to roll down the selection list of all available values Property Editors represents group of values which can be saved as one preset The entry space is white and the prohibited zones are shaded The user should click in he Value side ofthe relevantName of the property editor and then either type in the new value or select it from the drop down list 27621 3 Software Control Software Interface Elements Grid 300 Y Detectors Contrast EE Brightness Spot size EE 50 Spot size EE 0 5 00 a a size 5 4 CONTROL ADJUSTERS Ramp adjusters allow you to change parameters such as voltage in an incremental way by clicking and dragging the end adjuster to the right Dragging the slider to the left reverses the function to its least value Continuous adjusters allow you to change parameters such as contrast brightness and scan rotation in a continuous way by clicking and dragging the middle adjuster or clicking in the grey bar They always have labels in the upper left and right corners
181. ion components divided into the following modules e Stage module integrates various functions related to the specimen stage All functionality is described in Chapter 7 Stages e Beam module contains Stigmator and Beam Shift controls e Smart Scan module contains correction features for the tilted image e Detectors module allows adjustment of contrast and brightness for the currently used EE detector e Status module common for all pages contains important information about the system mn THE STAGE MODULE Beamn A Star Beam hit allows control of the stage for positioning location store recall and mapping of coordinates A The Map Tab displays the location of positions on the stage in a visual map form omat Sean sy and in a list for selection When clicked on the stage is driven to he EE EE E position selected These positions can be stored ina file and contribute to a map of locations that can be reintroduced at a later Dynamic Focus date for reinvestigation of the same sample Tit Correction Specimen pre tilt 156 The Coordinates Tab displays numerical information about a particular position when selected from the location list Position values can be entered to drive the stage to a set position Coordinates can be Actual Target or Relative Any or all movements can be locked The stage lock for any of the axes is graphically displayed in the Status area as an open or closed lo
182. ionship es between working distance and chamber pressure is largely sample dependent Note Always use the CCD image when adjusting the height of a sample It is advisible to do this by the center mouse button control in the Optical Beam Quad Using Gas ESEM and Low Vacuum modes allow the user to image samples ina gaseous atmosphere which can be selected in the Mode drop down box e water vapour from a built in water reservoir e auxiliary gas which is supplied by the user and connected to a gas inlet provided for this purpose Auxiliary gas requires a regulator on the gas cylinder to provide a pressure of about 100 kPa Purge This is a procedure in which the specimen chamber is flooded several times with the selected gas to replace the current chamber gas with a new gas determined by the target operating mode This is applied when the system is e just turned to Low Vacuum ESEM mode from vented status e the system is in Low Vacuum ESEM mode and the the gas type is changed e the system isin Low Vacuum ESEM mode and the Purge button is pressed Generally speaking this process involves pumping down the chamber to a low value to remove the old gas then flooding the chamber with the new gas to the desired pressure until the old gas is removed and the chamber is mostly filled with the new gas This function includes options for setting up initiating and terminating the chamber purging operations The setup
183. ith the exception of the pre vacuum oil Ultragrade 19 contained in the prevacuum pump there are no materials contained in the microscope uncommon to standard electronic equipment Please contact the FEI company for any further information regarding reuse Miscellaneous Precautions ELECTRIC FANS Some instruments in the system may be air cooled Do not block the air flow to or from the fans Do not operate fans with the protective covers orfilters removed Keep fingers loose clothing etc away from fans Periodic filter maintenance may be required to prevent overheating PUMP EXHAUST Failure to provide proper exhaust filtering may discharge oil mist into the environment Such oil mist may be an environmental hazard as well as a health hazard in an enclosed room CORROSION Components are painted plated or otherwise treated to resist corrosion However the components must be handled and stored properly to prevent corrosion Observe precautions carefully Labels Safety and Handling Labels The number and position of labels on the microscope can vary according to the country configuration and accessories of the microscope e A yellow caution message appears where special handling is required to prevent product damage e An orange warning message appears where special handling is required to prevent personal injury or death e A red danger message identifies an immediate personal risk of Injury or death and gives app
184. ize Preset Continuous Control The Detectors Module ar The Contrast Brightness Control Navigation Page SEE SE ee Ee ee The Stade Module dc KERR cod BEDR eos Be ER EE EE Tie MED BAD san edt ad da EE EE DOE es ES a aros The Coordinates Tab a na aana EE ES EE EE EE se EE Ese ees The Smart Scan Module The Tilt Mode List box i The Dynamic Focus Check box The Tilt Correction Check box Specimen Pre tilt Control o a Laaa aaa Patterning Page cmo GATERE ee Se RD The Pattern Progress Module 0 0 00 cee eee o ee a ks O Overview Tab The Details Tab The End Point Monitor Module EPM The Graphs Tab The Options Tab oe ce cece LL cee nono THE SCAMNG Tabs ms oe RE EE ias Processing Pages creido ronda REEDE AG The Measurement Module SE ES 00 ce cee o The Annotations Module o cc ee The Enhance Image Module 0 0 0 ce eee ee eee The Histogram Button nassaan ES EE EE ee ee ees The Default Button 2 EE SE EE EE ES EE ees C iv 2762 1 2762 1 Temperature Control Page SESSE SE SESSE Se oo 4 33 The Temperature Stage Control Temperature Profile Module 4 33 The Heating Cooling Stages 0 0 ce ee es 4 33 Alignments Page cercado bt DOER ee Shae pes oe 4 34 The Alignments Module 0 0 02 eee ee ee ee AA FEI User management Software 00 eee 4 35 A 4 35 COMET ANS MUT oo Ss i t
185. l E At 1000x magnification find a distinct feature and center it under the red cross by moving the stage Watching the feature change the stage tiltto 15 Using the Z control bring the feature back under the cross T Change the stage tilt to 52 Ctrl 1 and bring the same feature back under the cross using the Z control Change the tilt to 0 Ctrl E The feature should not shift significantly If the shiftis gt 5 um repeat steps 6 to 9 stays in the center of the screen i Tilt from O to 52 Ctrl I again to verify that the feature Aligning Beams at the Eucentric Height This procedure assumes that the stage is at eucentric height and that both beams are on TABLE 7 3 ALIGNING BOTH BEAMS Step Action aa Click on the Electron Beam icon in the toolbar 2 Tilt the stage to 52 3 While imaging with the E Beam and at 1000 X magnification find a distinct feature and move it under the red cross by moving the stage Click on the lon Beam icon in the toolbar Using image shift bring the same feature back under the red cross If you cannot align the two images recheck the eucentric height with the manual procedure Note After aligning the two beams avoid using beam shift with the ion and electron beams 74 27621 Stages 50 x 50 mm Stage 5 Axis Motor Using Z height adjustment With the standard specimen holder it is possible to change the specimen height inside the chamber
186. l Cancel Cancel Alignments 4 Condenser Alignment 4 Condenser Alignment Alignments Instructions This Alignment minimizes the image shift under different High Tensions and Condenser settings Press the Start button Ho step Condenser Alignment eliminates image shift between different accelerating voltages and different spotsizes by aligning the same image centre of an object at fixed Voltages and spots Values between the fixed conditions are interpolated from the stored table 1 Bring a recognisable image feature under the screen Centre Cross This can be done by using the 2D control labelled Beam Shift or by using a stage movement Adjust the Focus and the Contrast and Brightness adjusters if necessary Make the correction using the 2D control at Step 1 by bringing the recognisable image feature back under screen Centre Cross The procedure corrects alignment through the 30 20 10 5 2 1 kV For each HV Spot 6 5 3 1 7 8 are selected automatically for correction This results in 36 Steps The Save button appears on every sixth page with spot 8 for every HV with the exception of Step 36 which saves the values and finishes the procedure with the Finish button This eliminates unnecessary repetition of all conditions if only one alignment section is not correct Alignments 4 Condenser Alignment Condenser Alignment Pages continued Alignments Alignments Alignments 4 Conden
187. lation device Dissipate disconnect any stored energy TABLE 1 4 column 5 Attempt to re start machinery or re energize equipment through normal means Return switch back to OFF position Verify no hazardous energy Use circuit tester meter if electricity is involved TABLE 1 4 column 5 Perform required work Removing Lockout Tagout and Restoring Operation 1 oF Y N Upon completion of the activities requiring the lockout tagout secure all covers restore all interlocks and warn all affected employees that energy to the system will be restored Verify that the danger zone is dear of equipment tools and test equipment Unlock and remove any blocking devices remove linkages Remove all locks and tags from energy control points Reposition any safety devices Warn workers to stay clear of area Verify that the area is clear of personnel Only the authorized employee may remove their lockout device and only when the hazardous condition is no longer a threat Reconnect the cord into the power receptacle or switch on the breaker Re start re energize the equipment Notify all affected and other persons that the lockout has been cleared The tool can now be restarted per recommended start up procedures 2762 1 a Safety and Handling Safety TABLE 1 4 SPECIFIC PROCEDURES HAZARDOUS ENERGIES CONTROL POINT LISTING 1 Energy Type 2 Danger Zone 3 Isolation Point 4 Point
188. le list for all the items that can be entered in the databar and Selected list for all items that will be present in the databar Add Add All Adds one all item s from the Available list to the Selected list Note Since there is a finite amount of databar space any items that exceed the allowable space will be cut off Remove Remove All Removes one all item s from the Selected list to the Available list Move Up Move Down Move an item up to the left or down to the right in the Selected list in the actual databar display 27621 EI Operations Saving Multiple Images Recording a Movie Preview tab Once the movie is created opening the Preview tab will automatically display the first image of the movie sequence Clicking on the Play button causes the movie to play and the progress indicator below the movie will move from left to right at a speed depending on the play timing of the movie FIGURE 5 20 FEI MOVIE CREATOR 2 TAB PREVIEW a Movie Creator Start Pause Stop buttons Click on these buttons to Start Pause or Stop the movie By holding the adjuster one can run forward or backward through the movie PLAYING A MOVIE The AVI file movie can be played in Windows Media Player installed on the support PC or exported to another Windows PC with more advanced movie editing programs Programs used to play the movie need to recognise the avi file type Operations Patterning Patterni
189. le the raster on the monitor remains constant in size the magnification of the image increases Atlow magnification you see a large field of view At medium magnification you see a portion of the original scanned area At high magnification you are zoomed in on only a small portion of the Original total scanned area The Quanta 3D supports two viewing sizes Quad mode and Full screen Magnification is always adjusted in the databar forthe current display thus an image at 500x in Quad mode is 1000x in full screen as its size has doubled Changing Magnification The Toolbar List Box is used to select from a list of predefined 500 values If the current value is in the list it is indicated with a coloured background Click on the text box and the list of magnifications rolls down Click on the required magnification which appears in the text box The list box then automatically closes During live imaging this procedure results in immediate magnification change ne e The Magnification module enables the user to set the EE IE Magnification by means of the continuous adjuster and then eiii 500 couple it by ticking the Couple Magnifications check box with the other Beam magnification The icon indicates the beam in active O sm H operation at the right side of the module This feature can also be accessed via the Beam menu as Couple Magnification e Keyboard control The plus key increases the magnification 2x The minus ke
190. lect the vacuum mode see Chapter 3 and pump the system down by clicking on the pump button on the Beam Control page Operations Obtaining an Image Obtaining an Image OPERATION PRE CHECK To ensure correct operation in any Vacuum mode check the following list before continuing After obtaining a preliminary image you can then experiment with your settings TABLE 5 2 QUANTA 3D SETUP CONDITIONS Adjustment E Beam Settting lon Beam Setting kV Select kV relative to specimen type 30 kV for imaging milling depositing Accelerating low kV for surface imaging beam sensitive 5 kV for cleaning Voltage samples and slightly charging samples 5 10 kV for large field of view high kV for conductors high resolution compositional info BSE X ray For example biological sample HV 1 10 kV metal sample HV 10 20 kV Vacuum mode HiVac conductive samples Only HiVac mode can be used LowVac nonconductive mixed or dirty samples ESEM wet samples use HO gas medium Spotsize HiVac and LowVac 3 or 4 100 pA at 30 kV for imaging ESEM 4 or 5 HiVac fast dwell time 0 1 us Fast scan LowVac and ESEM slow dwell time 0 5 us Free Working Set the highest specimen point Set into eucentric position and tilt Distance to approximately 15 mm 52 see Eucetric Height in Chapter FWD yellow mark in Optical Beam Quad and press 7 Operations Ctrl F set FWD to 15 mm function Eucentric 15 mm 30 mm
191. lick on Previous to return to the previous dialogue click on Finish to end the alignment at Point One click on Next to continue to two points click on Cancel to exit the procedure After clicking on the Next button the Alignment Point Two 1 0 dialogue appears xTm Define User Units Alignment Point Two User Units Definition Move to user point 1 0 to define then click on feature Details User point in specimen coordinates A 0187 mrm Y 0 165 Cancel Previous E Next Finish Repeat the procedure selecting and clicking ona new location point The User readout positions will show the coordinates for the new Point Two location Choose the next step from the bottom line of buttons as in Step 3 To continue click on the Next button After clicking on the Next button the Alignment Point Three 0 1 dialogue appears xTm Define User Units Alignment Point Three User Units Definition Move to user point 0 1 to define then click on feature Details User point in specimen coordinates 0 099 mm ELEK Details Cancel E Previous Next Finish Repeat the process as in Step 4 Stages Stage Related Functions TABLE 7 6 DEFINE USER UNITS PROCEDURE After clicking on the Next button a confirmation dialogue appears as follows xTm Define User Units Finish Current User Units defined on three points Warning The angle between the 4 and Y axis of the User Units is 48 degrees Details Ca
192. lignment pages contain control adjusters for contrast and 9 Filament Exchange brightness The contrast and brightness adjusters of the electron 100 1ON Source Control beam are connected to the imaging quad 1 while contrast and 101 ION Aperture Alignment brightness of the ion beam are connected to the imaging quad 2 To Tile TON Stgrnator Ralance ensure the correct functionality of the sliders always use imaging quad 1 for the electron column alignments procedures 1 9 and imaging quad 2 for the ion column alignment procedures 100 102 TABLE 6 1 ALIGNMENT PROCEDURES OVERVIEW Procedure Function 1 Source Control Filament setting and electron gun centering 2 Tetrode Alignment This alignmentis for centering gun shift and tilt relative to the tetrode to give maximum illumination especially at low voltages 3 Gun Alignment Correction of gun shift for the whole range of the accelerating voltages and high spotsizes This optimizes the brightness and field of view at high beam currents 4 Condenser Dual correction of the accelerating voltage levels and spotsize range This is Alignment achieved by moving a pre determined object back under the centre cross at different kVs and spotsizes This eliminates excessive image movement when changing accelerating voltage or spotsize under normal use 5 Final Lens Objective lens coil modulation wobbler to show the optical centre of rotation Alignment X and Y are used to
193. lities to locate and label items that are of significant interest on the sample area e Enhance Image module offers instruments for image improvements e Status module common for all pages contains important information about the system THE MEASUREMENT MODULE Numerical values are updated while drawing and are displayed alongside or within the finished measured item Selection of individual properties can be made in the Default Properties editor some of which operate dropdown choices such as color for instance THE ANNOTATIONS MODULE allows the user to draw on the full screen or the active quad for purposes of highlighting features by displaying linear distances circles areas ortext Selection of individual properties can be made in the property editor some of which operate dropdown choices such as color for instance THE ENHANCE IMAGE MODULE These digital functions are applicable separately to any image quad while live imaging and in contrast to similar detector functions The image enhancement proceeds by converting the incoming signal to grey levels manipulation of LookUp Table LUT It can also be used to adjust the CCD image illumination in the Optical Beam Quad e Digital Contrast Control enables contrast to be set in range from 10 to 10 negative values lead to an inverse imaging e Digital Brightness Control enables brightness to be set in range from 2 0 to 2 0 e Gamma Control corrects image brigh
194. mber and is grounded by the grounding contact Note If venting with nitrogen it is recommended to have a continuous flow of nitrogen while the column is at ambient pressure This can be done by clicking on Vent again when the nitrogen supply has stopped automatically Once components have been removed for maintenance the column should be closed again until the components are ready for installing 8 2 2 CLOSING THE COLUMN 1 Before closing the column check that the o ring seal between the two parts is free of dust hairs or other irregularities that might cause deterioration of the vacuum 2 Using the lever rotate the upper part of the column clockwise to position it above the lower part Carefully lower the upper part in such a way that it fits on top of the O ring seal located in the lower part of the column 3 Select the Pump button in the Vacuum module The colour of the button will turn from grey to yellow The automatic vacuum sequence returns the system to the appropriate Vacuum condition Maintenance 8 3 The Wehnelt and Filament 8 3 The Wehnelt and Filament 8 3 1 COMPONENTS The Wehnelt assembly consists of the following parts e The Wehnelt cap 1a with a central hole called the Wehnelt aperture 1b This cap is fitted onto the upper part of the Wehnelt cylinder 2a using a bayonet catch mechanism e The upper part 2a of the Wehnelt cylinder in which the screws 2b are located e The middle part 3
195. me in the video stream The frame optionally includes an image of the databar and a time stamp This produces an AVI that shows the scan progressing 2 TIF timer after TIF delay time the system waits until the running scan in unpaused quads is finished and saves a complete image in TIF format including the databar data if chosen The first image is saved immediately when its scanning is completed TIF files are better to save in many cases as they can be built into a faster AVI and the databar display can be customized when building an AVI file Movie TIF Check bo x These check boxes determine whether the AVI movie and or TIF files should be stored The dropdown combo box lists the choice of delay times periods between the two following frames pictures in seconds Click on a delay time value and it will be highlighted below the check box It is advisible to use either AVI or TIF but not both to produce video that is not jerky If both AVI and TIF are recorded the AVI may be jerky due to delays when writing TIF files to a disk TIF delay must always be longer than or equal to the Movie delay If the delay time is shorter than what the system can achieve for the current setting the recording runs as fast as possible At all times one of these checkboxes remains checked If the TIF checkbox is unchecked the delay box for TIF is disabled Similarly if the AVI checkbox is unchecked the delay box for Movie is disabled Inform
196. merical layout for X Y Z R and T coordinates Location List box for selecting positions and Action Buttons There are three possible modes actuar y e Actual Mode default displays actual position in the edit boxes All buttons are active exceptGoto e Target Mode activates when clicking on any stored position or z Geel MA when any coordinate value is edited All buttons are active Clicking on the Goto button drives the stage to the set location e Relative Mode is used to make repetitive or equal movements in relation to a key point or points All buttons are active otage Map Coordinates Coordinates X Y Z R T Five editable text boxes are available for X Y Z R and T These are separately editable or can be filled with the values corresponding to a stored position when any of these in the Location list is selected Map Coordinates Units of measure Target x The units of measure to the right of the position edit boxes follow the Units setting in the Preferences dialogue unless User Units is active Stage menu in which case UU will be displayed for X and Y fa 4621 146441 mm Location List In Actual mode the default mode coordinates show the values corresponding to the current position and the list of positions with a scrollbar when needed The behaviour is as follows e Clicking a non selected item it selects it which causes the corresponding values to be displayed in the edit boxes T
197. mits are reached Stages Stage Related Functions Sean Beam Patterning Stage Tool Y Pause FE snapshot Photo F2 Wideoscope FS Reduced Area EF Full Frame Pal Line External Beam Blank Ctrl B Slow Scan Fast Scan Slower Scan Faster Scan Live Average 16 frames Integrate 1 frame Scan Rotation Shift F 12 Preferences Col a SCAN ROTATION SHIFT F12 This button is used activate the on screen tool to rotate the scan and align the image Because it is solely a scan coil function it has no effect on the stage movements Rather it is used to orient the image relative to mechanical rotation and detector direction Using Scan Rotation Clicking on Scan Rotation in the Scan menu places a large green circle in the active quad with a small circle in the top right corner At a point on the perimeter of the large green circle is a green triangle which denotes by its position the sample s angle of orientation relative to its original position when placed on the stage Initially this is at 12 o clock position While holding the left mouse button down on the green triangle drag it around the circle to choose a new scan orientation The small circle follows suit The computer software continuously updates the orientation of the scan This creates a different orientation on the viewing screen but retains the scanning direction on the specimen The readout positions displayed at the bottom of the quad prov
198. n O On Line Documentation only switches ON A NN Fe EN GEN reas eno ENE E Pr oros Fa EN ONNIE IT NN a meese lees mswees EN EI IE EIE TT NN 5 OPERATIONS OVERVIEW This chapter describes how to use the Microscope system from a task oriented point of view The following subjects are covered e Specimen Preparation and Handling e Obtaining an Image e Optimising an Image e Detector types and usages e X ray analysis for different Vacuum Modes e Selecting Beam conditions e Obtaining an onscreen image e Capturing and Handling single images e Saving Multiple Images Recording Movies e Patterning e Milling Procedure e Measurementand Annotation Functions e Setting Preferences Caution These procedures assume you are familiar with the xT microscope server and xT microscope Control software described in Chapter 4 Software Control which are necessary to start and operate the Quanta 3D microscope 27621 El Operations Specimen Preparation and Handling specimen Preparation and Handling The specimen material for HiVac mode must be able to withstand a high vacuum environment without outgassing and the bombardment of electrons It must be clean and conductive Oil and dust may contaminate the chamber environment which could hinder or even prevent evacuation to the level needed for HiVac operation Note Always wear lint and powder free clean room gloves when reaching into the specimen chamber to
199. n GSED ESEM Secondary electron electron A Backscattered GBSD ESEM A electron Back scattered electron Solid State Backscattered Electron State Backscattered Electron SSBSD Back scattered electron scattered electron OS scattered electron Catodoluminescence CHANGING DETECTORS OR CUSTOM MODE All detectors when active show real time operation except while patterning is in operation Therefore when changing detectors or changing conditions such as in the Preferences dialog for the Custom modes the active detector s will show the changes in real time Beam indicators Electron Beam A similar dialog appears for each custom detector Depending on the et beam in use at the time the dialog opens an indicator icon is lon Beam 7 presented in the dialog On hold changes when Patterning During the patterning process the Detector Menu is still in use but setting changes will not become active until Patterning has stopped or has been interrupted The Custom mode and Preferences are siill available A typical circumstances under which changes may need to be made to a detector while patterning is when Snapshot or Grab Frame will be used during a patterning session These facilities can be set up in advance When patterning has stopped the last scan detector and scan conditions will be active 514 27621 Operations Detector Types and Usage Preferences Clicking on Preferences from the Detector Menu
200. n X Y of the pattern relative to the origin the quad center Total Time 21 49 20 e Rotation of the patterns The positive direction is counter Gas Type None gt clockwise default value is 0 e Enabled Ifa shape is disabled then it is not included in patterning e Total Time Time required to pattern this shape e Gas Type The gas that must be used to pattern this shape or None if no gas is to be used Note that this determines the colour of the pattern on the screen e Beam The beam current and beam diameter updates to the new beam e total volume Sputter Rate RV total The speed at which material is removed or deposited e Dwell Time tdwell The time the beam spends on a single pixel per pass Changing this influences the Total Depth and Total time assuming a constant Number of passes e Volume per dose Vd The volume of material that is removed per Coulomb e Saturation sputter rate RL sat The maximum linear sputter rate for a given gas For Gas None this is 0 e Saturation current density Jsat The current at which 63 of the saturation sputter rate is reached e Maximum dose per area Dpa max Describes the adsorbed gas layer allowing a certain dose to be deposited at a higher rate than the saturation current density allowing a temporary higher rate e Refresh Time The minimum loop time that must at least elapse before the next pass so thatthe adsorbed gas can be refreshed e Loop Time The time between
201. nA Drilling vias or A drilling time from 1 4 minutes is adequate The main limitations of short cutting tracks drilling times are difficulty in doing End Point Detection and the possibility of doing charge damage MILLING IN SPOT MODE Scan Beam Patterning Stage Tool Select Spot from the Scan menu to place a single spot directly in the Y Parise FS center of the screen The cursor becomes an open green cross in the Snapshot center of the screen If the cursor is not moved the milling process will Photo ES take place in the center of the screen Click anywhere on the image to VERSE move the green cross to another position for spot milling Red iced frag F7 TABLE 5 20 MILLING A SPOT vw Full Frame Step Action Pal ee Line NN Move your feature to the center of the screen EA Select sPoT from the Scan menu A open green cross is SS Cul B displayed in the center of the screen Move the cursor over Slow Scan the spot required for milling Ed Click on the START PATTERNING button in the toolbar Slower Scan Faster Scan To grab a frame click ON SNAPSHOT Live Average 16 frames Integrate 1 frame 5 Click PAUSE Once to resume spoT mode scanning To exit seot mode chose FULL FRAME Scan Rotation Shift F 12 CHARGING SAMPLES In case of charging samples Charge neutralisation utilizing electron beam must be used to preserve pattern shift during milling Charge neutralisation is activated
202. nal Lens Centering 2D control control Alignments Alignments 5 Fina Lens Alignment 5 Fina Lens Alignment Instructions Adjust the centre of rotation on screen until it is under the cross in the centre of the screen Click on Finish to store the new settings or Cancel to return to the original settings Instructions Optimize the image with Focus Contrast and Brightness Press the Next button step 2 of 2 Final Lens Centering Contrast Contrast E Brightness Alignments 6 Stigmator Alignment 6 Stigmator Alignment Stigmator Alignment aligns the X and Y accuracy of the Stigmator to reduce image shift when in use 1 The default magnification is 3000x this is valid only for single 7 screen mode therefore use a suitable specimen to show regular This Alignment removes image truci tthi ficat Bri sables feat shift from the Stigmator by structure at this magnification Bring a recognisable image feature correcting the centering ofthe under the screen Centre Cross beam through the final lens 2 Adjust Focus and the Contrast and Brightness adjusters if aperture Press the Start necessary button Instructions 3 The procedure applies an astigmatism which causes image shift Using the 2D control labelled Stigmator X Y alignment remove the image shift Magnification is increased to approximately 12000x for these 2 steps Na steg FINAL CHECK Alignments 5 Stigmator Al
203. nance training The procedures start with the complete Anode Assembly removal 1 To remove the entire anode assembly i e to access the column liner loosen but do not remove the two ANODE ASSEMBLY RETAINING SCREWS using the ANODE TOOL shown in Figure 8 4 a 2 5 mm hex wrench can also be used The screws are at the base of the assembly and are accessible through the two RETAINING SCREW ACCESS HOLES In the top of the assembly 2 Grasp the anode assembly with a gloved hand gently push then twist counter clockwise until it stops and pull up Anode Body The anode body does not require regular cleaning If cleaning the anode body becomes necessary clean only those areas near the beam path that require cleaning Use a minimal amount of cleaner and a minimal amount of liquid and try not to wet the three porous ceramic insulators while rinsing If the ceramic insulators are cleaned bake the anode assembly in a clean oven for five hours or overnight at 60 C 140 F Maintenance 8 4 The Anode Assembly 8 4 6 INSTALLING THE ANODE ASSEMBLY Ensure that the liner tube along with its apertures and upper o ring have been correctly installed Figure 8 5 shows the inside of the column looking down in from the top Refer to this picture for the following instructions FIGURE 8 5 INSTALLING THE ANODE ASSEMBLY Gun Chamber Interior from the Top E EF HV feedthrough y A Spring loaded ball contact d y Anode Assembly Y j y
204. ncel Previous By clicking on the Details button at any stage either 1 2 or 3 Points will cause a display of the resulting coordinates xTm Define User Units Details specimen A Y User a Y Set 0 00 mm 0 20 mm 0 00 LIL 0 00 LIL Go to Set 01 mm 01 mm Proc LIL 0 00 LIL Go to Set 0 05 mm 0 03 mm 0 00 LIL Proc LIL Go to Current position on specimen A 0 000 mm 0 000 mm Apply Cancel Previous Finish There are a number of choices in the Define User Unit Start dialogue Stage Tools Window Hel qe i They are listed here to explain their functionality xT Align Feature Compucentric Rotation F12 e Define New User Units as explained in this chapter e Redefine User Units for changing or updating User Units MA e Redefine User Units with Shift for changing or updating with Onset Alignment Beam Shift User Units A z Show how User Units are now defined displays the current Beam Shift Reset details Zero Beam shift While establishing points in the procedure any incorrect point made Home Stage Shift F3 can be overwritten just by clicking on a new point in the active quad Lik 2 to EWE SiS Reference Position Tilt 0 Ctrl E Using 1 2 or 3 Point Alignments Tit 52 Ctrl I SCT following table shows the different uses of the different alignment Preferences CEIO types TABLE 7 7 ALIGNMENT TYPE DIFFERENCES Use 1 Point Alignment 2 Point Alignment 3 Point Alignment Aligning to ne
205. nd Gun tilt controls Click on Next ta do forward or Cancel to return to the original settings Instructions step 1 of3 Gun Tilt 1 ky Spot Gun Shit Tk Spot SoOver Contrast Cancel Previous Instructions Repeat the procedure to center the illumination for 500 Spot r Click on Next to go forward Previous to do back or Cancel to return to the original settings step 2 of3 Gun Tilt 500W Spot 7 SoOver Contrast Cancel Previous Repeat the procedure to center the illumination for 200 Spot b Click on Finish to end the procedure Previous to da back or Cancel to return to the original settings Instructions step 3 of 3 Gun Tilt 200 Spot E Gun shift 200 Spot 6 Cancel Alignments 3 Gun Alignment 3 Gun Alignment Alignments Instructions This alignment centers the electron beam for several spotsizes and High Tensions Press the Start button Mo step Gun Alignment corrects the Gun Shift X and Y for beam diameter center to screen center The illumination circles are centered ona cross displayed at the center of the screen This procedure electronically aligns the illumination to the mechanical column alignment After finishing this procedure the illumination should be centered 1 Adjust Focus and the Contrast and Brightness adjusters if necessary 2 Make correction using the 2D control Gun Shift Th
206. nd movement by TT rotation can be made by changing the value in the text box for R on rT wae the Work page This will move the stage about its mechanical center In some circumstances this is not desired because rotation about the center of the field of view would be more useful The following correction is the alignment procedure for the Compucentric Rotation This alignrent sets the stage function found in the Stage menu The offset of X and Y are calculated iii Sen eos Mon in this procedure so that the Compucentric Rotation will be correct when computed at any later time Instructions 1 The magnification should be from 500xto 2000x and the sample should have a recognizable feature close to the center of the stub mounted in the center of the stage do not use IG stub holder or any other axis holder at this magnification Bring it under the screen Centre Cross by using the mechanical stage movement A readout of the X and Y coordinates is displayed on the pages No step Make sure tilt is zero adjusted manually if required 2 The stage automatically rotates the view 180 Wait until the stage movement is finished Bring the recognisable feature back under the screen centre cross by using mechanical stage movement A new readout of the X and Y coordinates is displayed on the pages 3 Wait until the stage movement is finished Alignments 7 Stage Rotation Centre Stage Rotation Center Pages continued Alignments Alignments
207. ndition to the next Slower left arrow Faster right arrow scan value held in the Preferences Scanning tab which is displayed in the middle of the Preset Continuous control When either of the two presets are active or selected the respective icon is highlighted Clicking any of these items invokes a change to the scan speed Live an leaves the image unfiltered for collecting raw direct images one frame follows another Average ES continuously averages a specified number two or more of frames resulting in a better signal to noise ratio This process will continue until stopped by changing the scanning condition or by freezing the result This is used mostly for fast scanning to reduce image noise During averaging the image is updated continuously and actions such as focusing moving the stage etc can still be performed The number of frames can be selected as a preset in the toolbar drop down list box associated with the Average function Integrate aa allows accumulative noise reduction by true integration over a specified number two or more of frames to an end value This process will continue until the predefined number of frames is reached and then stops and freezes automatically During and after image accumulation you cannot change the focus or perform other image influencing actions The number of frames can be selected as a preset in the toolbar drop down list box associated with the Integra
208. ne although the others can have live images Quad 3 can display a mixed image from quad 1 and 2 images and quad 4 can display a mixed image from quad 1 2 and 3 images Note the detector incompatibility BSD is incompatible with CCD is the only restriction on the use of some combinations of Beam and Detector per Quad Software Control xT microscope Control Software The Help Menu Alt H m opens the Help menu functions Online documentation Fl Online Documentation F1 The Help dialog area is defaulted to the bottom right quad at startup and can be expanded to all quads for more detailed help including diagrams and images lt can also be dragged to any position on the available screen The help box function remembers the position and size that the user last defined until returning to its default value on startup About XU The Help window can be controlled from the listed buttons on the top right These are useful if it is important to view the application at the same time FIGURE 4 15 ON LINE DOCUMENTATION ales mas ly ely x a xT microscope Control Software The folowing elements make up fie xT microscope Control see Figure 4 3 for numbering 1 The Title Bar label the application 2 The Menu Bar contams all operation menus and submes Cr 2 Preferences dialogue preselimg of operating condita call out wandow 4 The Tool Bar contains al icoresed button functions 5
209. nelt cylinder 3 scale divisions counter clockwise in the direction opposed to the arrow 5c In this way the filament is retracted from the Wehnelt cap 1a 3 Using the special screwdriver 6 loosen the three screws 2b by turning them counter clockwise over half a turn This unlocks the bayonet catch so that the Wehnelt cap 1a can be removed 4 Unscrew the filament securing ring 7a using the special tool 8 and remove it from the upper part of the Wehnelt cylinder The filament 4a is now free and can be removed and replaced 8 3 4 CLEANING THE WEHNELT CAP AND FILAMENT SECURING RING After a period of operation an evaporated film from the emitter can be observed on the inside of the cap and around the Wehnelt aperture After 2 or 3 filaments the Filament securing ring also becomes discoloured this can also be cleaned 1 Remove the film using cotton wool on the end of a wooden stick dipped Soft Scrub CIF and distilled water 2 Rinse with tap water 3 Clean in an ultrasonic cleaner for 5 minutes using distilled water in the beaker 4 Transfer to a new beaker 5 Clean in an ultrasonic cleaner for 5 minutes using alcohol p a or isopropanol Caution Do not place parts together in the beakers Wash separately as damage can occur to the metal surfaces 6 First blow dry with a compressed air canister then dry thoroughly under an infra red lamp 15 min to 1 hr at a temperature of between 80 C and 100 C
210. ner of the shape 2762 1 EI Operations The Measurement and Annotation Functions TABLE 5 24 USING MEASUREMENT FUNCTIONS Step Action 3 With the use of selecting tool click on the graphic to size and position it correctly over the milled area Although there is a value already in the center or alongside the graphic this is only one of a number of statistics available These can be found in the Property list for that graphic When there are more than one graphic the Arrow cursor can be used to gain information from each in turn ANNOTATION MODULE Annotations can be used to graphically label items of interest Text can also be used to add further information about it TABLE 5 25 USING ANNOTATION FUNCTIONS Step Action de Click on the Annotation symbol required Bring the cursor to the quad or screen area and draw the graphic This can be done by dragging the cursor from the top left corner to the right lower corner of the shape If you chose the Text symbol then just click once where you require text and a text box opens Type the text into the text item in the Property list Click on the text with the left mouse button or press enter and the text will appear on the screen in the area of the box 3 With the use of selecting tool click on the graphic to size and position it correctly over the sample area Condition in the Property list can be changed to effect changes onscreen for text especially but also graph
211. ng Pattern Patterning is the process of milling depositing or etching a pattern into the sample surface with the beam During patterning the selected beam unblanks automatically and uses digital beam placement to vector scan over a pattern While patterning can be done with either beam the electron beam is generally used for imaging and sometimes for deposition with patterns The lon beam is used to cut cross sections and tracks drill vias and deposit new material In general patterns need to be cut as quickly as possible while maintaining sufficient edge resolution and preventing potentially damaging charge buildup During deposition the beam is unblanked and a Gas Injection Valve is Postion X 16 9 iti SEAN zl opened to begin deposition Position Y 3 4211 Rotation 0 0 Multiple Gas Injection Systems GIS may be installed on your Enabled Yes system You select between milling Pt deposition Enhanced Etch Total Time 0 09 46 etc by selecting a material file for a given pattern in Patterning GasType None hd property editor You must define a pattern before a material file can be Progress selected A given material file will automatically select the appropriate EER DE Ose GIS check box calculate the proper dose and set the dwell and Overall Progress pm Overlap appropriate to the beam chemistry Current Progress ua Before the patterning with the GIS starts the GIS needle must be inserted manually and the gas reser
212. ng the arrow activates the dropdown list When a selection is made the blank area displays an appropriate Icon Rectangle Cleaning Cross Section Regular Cross Section Circle Line Bitmap import e Trash Can Delete Clicking displays a black staggered line surrounding the icon and deletes the present selected pattern e Hide Clicking displays a black staggered line surrounding the icon HIDE and hides the currently selected pattern e Patterning sequence Clicking displays a black staggered line surrounding the icon Serial Patterning All patterns defined on the screen are milled aula consecutively milling is completed on one pattern before moving to the next Serial patterning is always used with cleaning cross sections Parallel Patterning All patterns defined on the screen are milled concurrently For example if three lines are defined as milling patterns one pass of the beam will be made on one then the next the third back to the first and so on until all three lines are milled to the depth selected for the first line With parallel patterning the mill time is recalculated to include all the patterns that are displayed in the image window Parallel patterning is typically used for regular cross section milling and to avoid redeposition of material on adjacent areas Onscreen information is updated as the milling progresses PATTERN AREA CREATING Select one of the patterns from the Patteming page with the p
213. nterface Elements ICONS are smallsymbols indicating a specific software application Double click on the icon to activate the program Pages There are also functional icons in the toolbar for selecting some Ee g Software functions quickly Clicking on any of these will cause them to En han aa press in and when deactivated by clicking again they spring out There are also some informational icons in the status field for A instance that indicate some particular system status TOO Tips Electron column Spot size 5 4 volta witches high voltage in electron column on off are activated when the cursor is left over an item on the user interface formore than two seconds A short explanation of the item will appear until the cursor is moved away from the item PULL DOWN MENUS The microscope uses menu oriented software you perform functions Detectors Scan Beam as by choosing items from the Menu bar The Menu bar selections Open contain pull down menus that display grouped listings of available Ave Ctl s commands or settings Some menu items are shown in grey and Save AS cannot be selected You might also get a beeping sound if you try to select unavailable functions Record Movie Import Pull down menu selections followed by ellipsis indicate thata Export dialogue box will display the same behaviour occurs when the bebe selection is a command Selections with a right arrow
214. ntrols for the Electron beam and the lon beam The Beam On Button initiates the following sequences for the respective columns e Electron column switches High Voltage on or off and heates the filament e loncolumn opens closes the CIV blanks unblanks the beam selects the last smallest aperture selects the last lowest High Voltage When activated deactivated the button changes from gray to yellow yellow to grey The High Voltage Control changes the applied accelerating voltage The actual value of the high voltage displays in text area of the adjuster and in the data bar if selected A preset value can be chosen by selecting one of the voltages from the drop down list The adjuster also has a slider mechanism for finer adjustment e The Electron column ranges from 200V to 30kV e The lon column ranges from 5kV to 30kV The Source Indicator shows the progress of the beam source startup procedure 2762 1 ae Software Control Beam Control Page THE BEAM MODULE displays controls that are used by both Electron and lon beams The Stigmator Control corrects image astigmatism via a 2D control The crosshair indicates the actual setting of the stigmator Pressing and holding the left mouse button anywhere inside the 2D control causes the cursor to move to the screen position corresponding to the actual astigmatism value minimum in the middle of the screen and maximum at the edges Moving the mouse activ
215. o H E Microscope Administrator 3 FEI Account Administrators Eh FEI Service Users al W support Customer Support user for adjusting microscope 3 a FEI Factory Users 8 factory Factory user for adjusting microscope User Factory FEI Factory Users Buffer supervisor FEI Supervisor Users j z Software Control FEI User management Software THE FILE MENU File contains the following items Log Or e Login click to log in active when user is logged out Log Out e Logout click to log off active when user is logged on aerel EE e Refresh F5 click to refresh the user tree e Exit click to exit the FEI User management program Exit ET THE ACCOUNT MENU Creat ses si contains the following items which are accessible only for FEI Acount ad ministrators with the exception of set password function Set password Set user group Properties Alt Enter e Create Ins click to add a new user or supervisor PET seer Farioli Aki new Leser x Hama Poster Canto Batteasrd Group Full name Deneripion r F User cannot change password Peeewced never Bio PP Asesor ig drnbled a cme e Remove Del click to remove an existing user The user must be highlighted first If an FEI Microscope User has user data the account administator is warned that user data will be removed also If any additional user is to be removed that additional user s data is removed without warnin
216. o the central depot for hazardous waste Emergency procedure not applicable Remainder material or uncleaned empty packagings have to be incinerated in a proper installation or dumped on an approved landfill in accordance with local and national legislation Consider also return delivery to supplier 14 Transport information 7 Handling and storage Not subject to Transport regulation Dangerous Substances Local exhausting Storage conditions Under normal circumstances not applicable gt Keep packing closed 15 Regulatory information St duct at place ore product at a cool place EC Label Remarks on EC labeling not applicable none 8 Exposure controls personal protection Chemicals Safety and Handling Exposure limits 16 Other information not determined TEFLON i not determined PERFLUOROPOLYETHER Remarks on MSDS none C Ceiling S Skin Inner company references BXV 11 6 Remarks exposure limits none Overview relevant R sentences from all components in section 2 Odour threshold 20 C 1013 mbar not applicable not traceable Advised personal protection Date last update 1996 07 15 skin butyl rubber gloves eyes safety goggles ffici h Point to alterations with regard to the previous version inhalation none when sufficient exhausting The information provided in this Material Safety Data Sheet is correct to the best of the knowledge information and belief of Philip
217. o the desired position The stage will rotate accordingly on release of the mouse button The orientation is seen by the update of the small triangle and the perpendicular lines in the radar view circle FIGURE 7 6 MAP AREA ELEMENTS 27621 Stages Software Stage Functions TABLE 7 4 MAP AREA ELEMENT FUNCTIONS Function Map Coordinates y White x with red background in black circle A stored location in the Location list Without rotation White cross on a green background Indicates that a stored position is highlighted in the location list White x with red background in black circle A stored location in the Location list with rotation noted by position of the black key Black cross Mechanical stage center No Location Position 1 eo Position 2 Blue cross with red circled cross Position 3 The blue cross is a new unstored location and the red Position 4 circled cross is the current targeted position Black triangle The moveable rotation angle positioner Grey perpendicular lines Denote rotation position as 5 Grey crosses Stored positions as on the map 1x to 100x Magnification factor of the map X adjuster to move the mapped area in a X stage direction at different decreased magnification factors Y adjuster to move the mapped area in a Y stage direction at different decreased magnification factors Light grey dashed line Physical limit of the stage movement along X and Y axes Location
218. ocal Produces no symptoms tee ae general Not applicable Ea EU LTE Ce Inhalation local The decompositon products are irritating sore throat coughing dyspnoea general See remarks symptoms a Eyes local The substance is prickling redness 4 First aid measures Remarks symptoms The decomposition products are adsorbed polymer vapour fever Skin Remove residue substance as soon as possible from the skin f i rinse with much water Toxicity EDS KORE BAT PEARL UOR ROE EIEN Ingestion Let drink 1 or 2 glasses of water In case of general disorders call for a doctor Inhalation Not applicable 12 Ecotoxicological information Eyes Rinse for a long time with much water In case of eye sight disturbances consult a doctor none Biological oxygen demand 5 Chemical oxygen demand Biological chemical oxygen demand ratio Biochemical factor Log Po w Ecotoxicity Remarks on ecotoxicity Remarks first aid 5 Fire fighting measures Fire extinguisher Hazardous decomposition products in fire water spray extinguishing powder foam carbon dioxide carbon monoxide hydrogen fluoride 6 Accidental_ release measures 13 Disposal considerations Spillage procedure Dependent on quantity spilt paste one has the choice between remove with cleaning rag or paper or cover paste with Powersorb sand diatomite vermiculite and suchlike Shovel the material into plastic bag or other suitable packaging and remove t
219. of all quads is recorded with a time stamp Next the Save Ctl s recording starts and the duration is dependant on the set up Save As in the Preferences When the video is started and the scan resolution is higher than 1024 the following dialogue appears Record Movie Print Ctrl F Tm Incorrect video resolution a E X Log Off User Please select a resolution that iz compatible with video recording Exit Resolution Ale x 422 512 e dt 1024 uw ond ance Choose either of the resolution values and click on OK The Movie starts to record at the selected resolution The Movie will stop when the red square button is pressed on the button bar The stop command stops recording of the video in all active quads and closes the files Quad Indicators A red dot indicates that recording is active in this quad Itis displayed in the top right hand corner below the timer display A red dot with the Pause symbol indicates that the record is running Recording Movie And Save TIFFS but the data from this quad is not stored It is displayed in the top right is sis hand corner below the timer display Bue An estimation of the time remaining until the end of the video is A i displayed in the upper right corner The time is displayed in the format Recording Movie And Save TIFFs hh mm ss The time is calculated from the average disk space consumption and the free space on the disk 530 27621
220. of the same type voltage rating and current rating REPLACEMENTS Standard electrical and mechanical replacement parts can be obtained through your local FEI organization or representative Components in the primary circuit may only be replaced by components selected by FEI However many of the standard electronic components can be obtained from other local suppliers Before purchasing or ordering replacement parts check the parts list for value tolerance rating and description Note Physical size and shape of a component may affect instrument performance particularly at high frequencies Always use direct replacement components unless it is known that a substitute will not degrade instrument performance WARNING Handle silicon heatsink compound with care Avoid contact with the eyes Wash hands thoroughly after use STATIC SENSITIVE COMPONENTS This instrument contains electrical components that are susceptible to damage from electrostatic discharge ESD Servicing ESD sensitive assemblies or components should be performed only ata static free work station by qualified service personnel Radiation Safety and Handling Radiation WARNING Only authorized personnel are allowed to perform radiation checks The radiation checks that are to be carried out are machine dependent See the appropriate manual for instructions and limits Local regulations may require that an X ray check is performed by an authori
221. om the complete Anode Assembly To do this remove the two Extractor Electrode screws using the anode tool a 2 5 mm hex wrench can also be used for this then remove the Extractor Electrode The anode body will remain in the column FIGURE 8 4 ANODE TOOL 8 4 3 CLEANING THE EXTRACTOR ELECTRODE To clean the extractor electrode use the same instructions given for the Wehnelt Cap found in section 8 3 4 A 500 um aperture is located in the extractor electrode and is fixed witha c clip This aperture should be closely inspected and cleaned or replaced as needed See the text with Figure 8 8 Removing installing Apertures for instructions on mounting apertures with a c clip 27621 3 Maintenance 8 4 The Anode Assembly 8 4 4 REPLACING THE EXTRACTOR ELECTRODE With dust free gloves replace the EXTRACTOR ELECTRODE onto the ANODE BODY locating the 2 screw holes Replace the two ExTRACTOR ELECTRODE SCREWS using the ANODE TOOL a 2 5mm hex wrench can also be used for this With the Wehnelt in place close the column Pump down the system using the Pump button on the Start up or Work page If the vacuum does not reach the Vac OK message within 10 minutes the gun o ring may need to be reseated or replaced Column alignment is required after this procedure 8 4 5 REMOVING THE ANODE ASSEMBLY The following Anode removal and cleaning is a Service Engineer level procedure unless the Supervisor User has received specific mainte
222. once stops the scan immediately without continuing to Slower Scan the end of the frame Faster scan When Pause is active the icon button is pressed in a green box Y Live surrounding two vertical green bars appears in the appropriate Average 16 frames imaging Quad Clicking the icon releases the pause function the icon Integrate 1 frame button pops out and retums the scanning to the previous state Scan Rotation Shift F 12 This function is used automatically with Snapshot Preferences Cl Full Frame Spot Ling External Beam Blank COi B Slow Scan Fast Scan Slower Scan Faster Scan Live Average 16 frames Integrate 1 frame Scan Rotation Shift F 12 Preferences Cto Software Control xT microscope Control Software S hot napsho gt activates a single preset scan which pauses atthe end of the scan The result can be stored with the File Save function to the harddrive Conditions for this function are predefined in the Preferences Scanning tab Photo F2 activates a single preset high quality high resolution slow scan which pauses atthe end ofthe scan The resulting image can be stored on the harddrive with the File Save function Conditions for this function are predefined in the Preferences Scanning tab Videoscope F3 Videoscope toggles the display of the videoscope on or off showing the video intensity along the currently scanned horizontal line for correc
223. onductive or it is to be imaged with the Peltier stage ESEM is normally reserved for Peltier cold stage work Certain detectors are optimized for these modes the LFD corresponds to LowVac and the GSED GBSD optional corresponds to ESEM In either of these modes the gun and column sections are under high vacuum whereas in the specimen chamber the pressure ranges from 0 1 to 20 Torr 10 to 2600 Pa Either mode can use the imaging gas selected in the Mode drop down box e water vapour from a built in water reservoir located in the back part of the microscope console e auxiliary gas which is supplied by the user and is connected to a gas inlet provided for this purpose on the back of the console The microscope also provides automatic sequencing for purging the specimen chamber according to the settings of Purge mode in the Preferences ESEM tab see the end of this chapter This sequence purges any remaining room air out of the chamber during pump or during gas change it replaces the current chamber gas with a new gas determined by the target operating mode TABLE 5 3 SELECTING VACUUM MODE Step Action In Vacuum Mode module select the High Vacuum Low Vacuum ESEM radio button Select the appropriate gas from the dropdown list In the Vacuum module click on the Pump button The target pressure that the system will pump to is specified in the Pressure text box at the bottom of the Mode module Under normal o
224. one by untrained personnel The Quanta has two human safety interlocks the Gun Lifts for either column Other interlocks are not intended to protect humans but to prevent damage to the instrument during servicing The gun lift interlock switches off the beam voltage and thus enables safe handling of the Wehnelt during a filament change Note After completing procedures for which an interlock was disconnected always reset or reconnect and test the interlock before proceeding Do not turn the system on until you have made sure all connections are correct and secure Cover interlocks reset automatically when the covers are replaced 2762 1 EI Safety and Handling Electronics Voltages EMO EMERGENCY OFF The EMO is part of the SEMI S2 kit The EMO circuit contains two EMO buttons These buttons de energize the microscope immediately FIGURE 1 1 LOCATION OF THE EMO BUTTONS The working of the EMO circuitry has to be checked during the yearly maintenance of the microscope LINE VOLTAGE Line voltage 120 to 240 V AC may be present in various locations within the system even when the system or instrument is turned off Completely disconnect the unit from line voltage by disconnecting the AC plug from the AC power source before performing service or maintenance Note Service or troubleshooting in these areas shouldbe performed only by an qualified service personnel Follow the LOTO procedure to lock out tag o
225. ons SYMBOLS Safety and Handling Safety The following symbols are used throughout the manuals TABLE 1 2 ICONS USED IN THE DOCUMENTATION CAUTION IN MOVING PARTS Description High Voltage Care should be taken that danger voltages are being referred to Live part Read the operating instructions Protective earth grounding terminal Radiation danger ESD sensitive Care should betaken to protect these devices from electro static discharge Keep these parts of the microscope clean and free of dust Also to protect hands from cleaning agents handle these parts only with gloves Pinch hazard A Corrosive Safety and Handling Safety Type of Energy Lock Out Tag Out LOTO CONTROL OF HAZARDOUS ENERGIES Purpose This procedure is to establish the Lockout Tagout requirements for FEl manufactured equipment and systems Scope This procedure is intended for use to control hazardous energy sources during manufacturing and field service operations General Overview of LOTO When to lockout Lockout Tagoutthe equipment you are working on when the service or maintenance operation will cause exposure to any form of hazardous energy Examples of when to lockout include but are not limited to e Service and maintenance of any electrical circuits or components except those operations where the exposure is less than 24V e Service and maintenance where exposure to hazardous energies or con
226. ontrast and brightness levels to suit the sample so Application Status that the majority of grey levels are displayed See Chapter 4 Lab Motes FEI Movie Creator FOCUSING Preferences Ctl o The easiest way to focus is to find a feature of interest with distinct edges on aspecimen Use a combination of contrast brightness magnification and focus adjustments to maximize the image quality TABLE 5 7 CORRECTING FOCUS Step Action Press CTRL simultaneously with the right mouse button while moving the mouse from side to side in the active quad to focus the image then release The focus cursor which is a double ended arrow appears Move the focus cursor from side to side until the image is sharp When engaged the focus cursor is active over the whole screen but will not interfere with other controls Move the specimen to a desired area with the X and Y stage controls or double click with the right mouse button on the desired area and refocus until the image is sharp If this is the first time focusing the new specimen then click on the Z to FWD icon button on the toolbar to set the Z value on the Navigation Page equal to the actual free working distance 510 27621 Operations Optimising an Image To avoid scanning too long with the ion beam and milling away the sample before you take the final image move away from the feature of interest with the X and Y stage controls and focus until the image is sharp on a adj
227. ooooconcoomomno mom 8 19 8 8 Stage maintenance SE SE ee ee 8 20 ar EO EE ah Geli meat Ges Grae eto TOS ZU Cleaning ne 8 20 8 8 2 Stage mechanics 8 20 Cleaning Stage parts ab ars OL 8 9 Refilling the Water Bottle EET EE EE EERS EE B 21 6 10 5Erol PUMP DE RD ARE SE een Pee SR NE mew ES Aes a B 21 2762 1 2762 1 LIST OF FIGURES Location of the EMO buttons A Chapter1 Safety and ea MSDS of the above mentioned Chemicals a a es lS Chapter 2 System Overview SEM Schematic Overview Quanta 3D Dual Beam SYSTEM Quanta 3D Standard Layout Scheme EE eae Pace ee Ger EE Hardware Interface elements 0 0 0 cece ee ee eee System Control Panel Power Button SS SE Ee se ee ee Hardware Stage Controls MUI Chapter3 Vacuum System The Quanta 3D Vacuum system n SS SS SS SS ee ee Brightness vs Pressure serveeri tiaia tea naue ee ee ees Quanta 3D States Tree 1 ee ee ne Main SWIC O diras ie DE DIER IE SoA DE ee DA Chapter4 Software Control Preferences Tabs ii xT microscope Server window The Main Window sa sed EER SEE abs Be EE EE EED E alee So Sa Se Tie TilEBat sentdan OR IE oes hd Roe tre Ata RE ARE ER EO hie Ere The Menu Bar s m kr aid BES ESRA A HEB EED ee 49 The Toolbar The Data Bar Examples Preferences Dialogue 0 cc ee ee ee eee Open DIalO que 502 ere oe Bee ma wade MR ere a aed SAVE AS e DIALOG i e bee bes on bo ba
228. op and push the aperture into the liner tube until the groove nearest the knurl top is exactly level with the top of the liner Repeat step 2 for aperture B 1mm spray aperture but use the next groove down on the tool to place the aperture Aperture B and C are identical and can be interchanged Repeat step 2 for aperture A The platinum aperture should face up and the third groove down should be used to place this aperture FIGURE 8 9 APERTURE MOUNTING _ APERTURE MOUNTING ROD SPRING CLIP APERTURE LINER TUBE Maintenance 8 5 The Column Liner and Apertures Note Take care not to drop or jar the tube during or after this procedure as this may move the apertures from their correct positions The apertures are held in place by spring clips If an aperture feels loose going into the liner orslips from its position then the spring clip can be opened up slightly to increase tension against the liner tube inside wall 8 5 6 CLEANING THE LINER TUBE 1 Clean the inside of the tube with a pipe cleaner or a wooden stick with cotton wool wrapped around it using Soft Scrub CIF cleaner 2 Rinse in tap water 3 Clean in an ultrasonic cleaner for 5 minutes using distilled water in the beaker The liner is long so it may be necessary to reverse it in the beaker and give it a further five minutes cleaning time 4 Rinse with de ionized or distlled water 5 Transfer to a new beaker 6 Clean in an ultrasonic cleaner
229. opens a dialogue for saving images which provides an opportunity to gt Change the file name its label or location TIF JPG and BMP file formats are available to save gomp Image files brp Seve mige Ls Pires ack lgea mane files pa FIGURE 4 10 SAVE AS DIALOG Ax Save in Temp y e c Ely Movie Channel 1 002 Movie Channel 1 002 Es Movie Channel 1 002 Ea Movie Channel 1 002 Es Movie Channel 1 002 Es Movie Channel 1 002 Es Movie Channel 1 002 Es Movie Channel 1 002 File name 00001 tif save as type MIER Save image with Databar Vv Save image with overlayed graphics Movie Channel 1 002 00002 tif E Movie Channel 1 002 00003 tif E Movie Channel 1 002 00004 tif Ea Movie Channel 1 002 00005 tif E Movie Channel 1 002 00006 tif a Movie Channel 1 002 00007 tif E Movie Channel 1 002 00008 tif E Movie Channel 1 002 00009 tif ll Movie Cl 00010 tf B Movie Cl 00011 tf B Movie Cl 00012 tf B Movie Cl 00013 tif B Movie Cl 00014 tif B Movie Cl 00015 tf B Movie Cl 00016 tif E Movie Cl fil Cancel The dialogue displays by default the location to save files associated with the imaging function e the mage file location used by Snapshot and Photo With this command files will not be saved automatically to their existing labels if labels exist You can also choose whether to Save the image with without Dat
230. opens the Detector Tab which shows the specific detector mode that is active in the Detector menu for the quad in use Detectors that have a custom mode will have a Preferences dialog for adjustment STANDARD IMAGING DETECTORS You can choose from two default modes and one custom mode for ETD detector in the Detectors menu A tick mark next to the entry indicates itis active Placing the mouse cursor over the small black arrow on the right of the menu activates a menu extension with the choice of detection mode Everhart Thornley Detector ETD is a Secondary Electron SE or BSE detector Itis a scintillator type detector monitoring secondary or back stcattered electrons generated by the primary beam interaction with the sample to produce an image It is mounted in the chamber above and to one side of the sample When the ETD is activated contrast and brightness adjusters control the ETD parameters The ETD high voltages scintillator grid are switched off during venting of the specimen chamber or during vacuum mode change This detector is permanently fitted to the cham ber FIGURE 5 4 ETD DETECTION CHOICES Detectors Scan Beam Patterning Stage Tools Window Help ETD Secondary Electrons d Secondary Electrons LFE Backscatter Electrons GEEL Custom GES SSESELD FME External IF Els Preferences Preferences for the ETD The Detector Configuration dialogue box contains an adjuster to control grid bias volta
231. opes can be found in the document entitled Service Safety Manual Quanta 27621 Safety and Handling Labels SYSTEM OVERVIEW The Quanta 3D System Capabilities The Quanta 3D DualBeam is a combination of two systems SEM is an electron microscope that produces enlarged images of a variety of specimens achieving magnification over 100 000x providing high resolution imaging in a digital format FIB is an ion beam system that is capable of fast and precise milling of the specimen material revealing the structure under the surface layer making cross sections deposition layers etc The ion system produces high resolution images as well The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three dimensions Users can switch between the two beams for quick and accurate navigation and milling Convergence of the SEM and FIB ata short working distance allows precision slice and view cross sectioning and analysis at high resolution The workstation provides optimum throughput resolution and automation FIB SEM workstations provide an expanded range of capabilities not possible with separate FIB and SEM tools High resolution electron beam images of FIB cross sections without eroding the feature of interest Real time cross section images and videos with the electron beam during FIB milling Focused electron beam charge neutralization during FIB milling
232. or this purpose Next pull the other end of the detector out from the connector Large Field Detector LFD is used in the LowVac mode The LFD is standard on all ESEMs and is used for imaging most samples This detector is used with the standard insert at the low pressure range of 0 1 Torr 14 Pa to about 1 0 Torr 134 Pa With this detector in place the field of view is unrestricted and the magnification range will be identical to that of HiVac mode assuming no other pole piece accessory is mounted FIGURE 5 9 LARGE FIELD DETECTOR LFD The signal from the LFD contains more back scattered electron information than the GSED signal The detector is ideal for general imaging it is also the only secondary gaseous detector that can be used simultaneously with a solid state BSE Detector FIGURE 5 10 LARGE FIELD OF VIEW WITH LFD LFO Plug in detector 27621 Operations Detector Types and Usage Installing the LFD The LFD plugs into the signal connector behind the conical lens In some cases the user will be prompted for the PLA size Select No Accessory in the Pole Piece Configuration dialogue or appropriate Cone if installed The vacuum system will automatically be limited to the pressure range according to this selection Note After inserting the LFD Purge mode changes to Automatic despite any previous selection This ensures that the proper chamber environment is achieved and requires the user to remember to set
233. ordinate for the current sample has not been coupled to the FWD yet e Coloured icon with a double ended arrow between the lens and baseline Z to FWD is correct The function is enabled and has been already used for the current sample It is still possible to reset the sample s Z coordinate by pressing this button Reference Position zeroes the stage coordinate values for X Y R and Tilt to establish a reference position for all further coordinates to referto The coordinate values in the Stage Coordinates module on the Work Page will indicate the new reference position Tilt 0 52 Ctrl E 1 sets stage tilt to 0 52 perpendicularly to Electron lon Beam The Tools Menu Alt O letter opens the Tools menu functions Tools Window Help O Auto Contrast Brightness a Auto Focus activates the automatic contrast and brightness routine This function HO is available only for particular detectors mostly working in High vacuum mode The system attempts a correcting of the contrast and Lab Notes brightness levels to suit the sample so thatthe majority of grey levels FEI Movie Creator are displayed When activated the dialogue appears showing the progress The function can be interrupted by clicking on the Stop Now button which leaves the image at the current stage of progress Clicking on Cancel before the function ends will return the image back to its original status Auto Contrast Brightness Application
234. orrect lon beam current is determined by the application For each lon beam current a particular beam limiting aperture is used When increasing the lon beam current a larger aperture is applied The electron Beam Current can also be chosen using the Electron Beam Current module in the Beam Control page Operations Selecting Beam Conditions BEAM APERTURES In general use a smaller aperture for high resolution and a larger one for large scale or faster milling TABLE 5 12 SPECIFIC OPTIMAL I BEAM CURRENTS Beam Current Best Use 1 pA Very high resolution imaging High aspect ratio holes High resolution imaging Pt via filling 10 pA Quick imaging Fast Pt via filling 30 pA Navigation imaging 50 pA Milling submicron holes Final clean milling on cross sections 100 pA Milling micron sized holes Intermediate final clean milling on cross sections Short Pt strap deposition 300 pA Milling micron sized holes 500 pA Medium Pt strap deposition Intermediate milling on cross sections 1000 pA Initial rough milling for small cross sections Long Pt strap deposition 3000 pA Initial rough milling for medium cross sections Longer Pt strap deposition 5000 pA Initial rough milling for medium large cross sections Pt probe pad deposition 40 um x 40 um 11500 pA Initial rough milling for large cross sections Pt bond pad deposition 50 um x 50 um Operations Capturing and Handling a Single Image Capturing and Handling a Single Ima
235. ose a suitable wobbler amplitude 4 By using the 2D control box adjust the aperture position so the center of the image doesnt move Switch off the L2 Wobbler By using the L1 Correction correct the beam current By using the L2 Correction focus the image By using the Stigmator Corr correct astigmatism O ON OU By using the Beam Shift Corr correct any image shift bring the feature back to the middle of the screen 10 Repeat steps from 2 9 until no other correction is needed 11 Repeat the procedure for another Aperture index 622 27621 Alignments 107 ION Aperture Alignment Alignments io ION Aperture Alignment select the ion beam in quad 2 set the eucentric working distance and stage tilt 52 den Optimize the image with Focus Contrast and Brightness Instructions Bring a recognisable feature under the centre cross with the stage select a high voltage Press the Next button Contrast 101 ION Aperture Alignment continued Alignments io ION Aperture Alignment Instructions For each aperture index Centre the aperture with Aperture Position Tune the beam current with L1 Focus the image with L2 Do not focus with mouse Bring the feature back with Beam Shift Correction Remove the astigmatism with atigmator Correction y Proce tha Save huttan tn cetara step 2 of 2 Ss L2 Wobbler GE NE E 231 L1 correction
236. peration the system will know the PLA size for the detector installed This will allow the system to set automatic pressure range limits for the aperture installed thus avoiding vacuum errors when setting chamber pressure In some cases the user will be prompted for the PLA size Select No Accessory for the LFD or the appropriate cone if installed Wait for the vacuum status Pumped represented in the Status module at the base of the page by green icon Operations Obtaining an Image OBTAINING AN IMAGE ON SCREEN The following assumes that the lon source emission is ready TABLE 5 4 IMAGING PROCEDURE Step Action Low vacuum On the Beam Control page for the active beam click on esey the Beam On button found in the Column module to ramp up the High Voltage Select the detector see next chapter and unpause the chosen quad Choose the highest specimen point and bring it to the 15 mm Working Distance yellow line in Optical Beam Quad Focus the image and run Link Z to FWD procedure Beam On see Chapter 4 Column Run the Auto Contrast Brightness FQ in the Tools menu or control the contrast and brightness from the Bear detector module found on most pages Stigmator Adjust to a suitable magnification optimize the image contrast and brightness focus astigmatism fuller explanation later in this chapter Magnification sy Couple Magnifications Magnification SU0
237. purging starts from that point on with the parameters selected active onscreen e No purge nothing happens e Automatic starts purging with automatic settings e Custom starts purging with custom valid values do not forget to press Apply after setting new values otherwise purging starts with old values e Purging is running stops purging immediately Note Purging can take several minutes according to Preferences setting Wait until Vacuum status indicates Vacuum because detectors does not start operation until that Purge mode changes from No Purge to Automatic after inserting LFD so the user does not need to remember This eliminates arching due to improper insufficient purge See Chapter 3 Vacuum for more details 2762 1 553 Operations Setting Preferences CHARGE NEUTRALIZATION TAB sets conditions for the Charge neutralization mode which can be switched on in the Electron Beam Current module on the Beam Control page by pressing the Neutralize button see Chapter 4 FIGURE 5 29 CHARGE NEUTRALIZATION PREFERENCES xTm Preferences xi Databar Units Presets Scanning Beam Detector ESEM Charge Neutralization General Howie ae E TT 1 00 ki S size 5 0 Source Shitt Defocus 0 0000 m There are following Control Adjusters e High Voltage sets the electron beam voltage used for charge neutralization Start with 1 2 kV e Spotsize sets the electron beam spotsize current used fo
238. r Balance 102 1ON Stigmator Balance 102 ION Stigmator Balance Instructions Instructions Instructions select the ion beam in quad 2 set the eucentric working distance and stage tilt 52 den Optimize the image with Focus Contrast and Brightness Remove the image movement by EF LH quadrupole balance Click on Finish to store the new settings or Cancel to return to the original settings Remove the image movement by AE Cls quadrupole balance Press the Mext button to conntinue or Cancel to quit Press the Next button step 1 of 3 stigmator QuadBalance AE LI3 stigmator QuadBalance BF DH Cancel Cancel Cancel Alignments 102 ION Stigmator Balance STAGES l 50 x 50 mm Stage 5 Axis Motor The Quanta 3D 200 is delivered with a 50 x 50 mm motorised 5 axis stage The software control for the stage is an integrated part of the overall control software FIGURE 7 1 QUANTA 3D 200 STAGE CONTROLS 5 AXIS MOTOR Tilt Stage ground and Interface connector Y axis X axis Z height Rotation Stage movement The motorised movements of the stage can be operated under software control for more advanced location mapping A live image can be repositioned either with stage movement manual or software or beam shift TABLE 7 1 MOVEMENT TYPES FOR QUANTA 3D 200 Stage Movement Beam Shift Shift Mouse X and Y Stages 50 x 50 mm Stage 5 Axis Motor Software controls
239. r charge neutralization to specific values from 1 to 10 The larger the spotsize number the larger the beam diameter higher the beam current e Defocus defines the iluminated area used for charge neutralization During Charge Neutralization the electron beam does not scan At defocus diameter the spot is focused Start with maximum negative value e Source Shift shifts the electron source alignment Use it to maximize beam current ata very high spots gt 8 Operations Setting Preferences GENERAL TAB allows setting of various behaviour of the user interface Clicking on any value field causes combo button appearing to list available values and to choose one FIGURE 5 30 GENERAL PREFERENCES xTm Preferences x Databar Units Presets scanning Beam Detector ESEM Charge Neutralization General Movie ls CCD Marker enabled Pause icon behavior stop at end of fram Movie user message timeout E seconds Toolbar combobox style Reduced Toolbar spinner style Lett Right Beam blank icon and menu available oom vith Mouse Yes Allow Color Mixing Yes cancel apo Description and possible Values are e Is CCD Marker enabled Yes No enables visualization of he marker to the eucentric distance in optical image e Pause icon behavior Stop at end of frame Stop immediately The scanning will stop immediately after pressing the Pause icon or after finishing the frame e Movie user message tim
240. racted Leaving it closed heated but retracted is also an option if it is to be used over several patterns so that reheating is not necessary TABLE 5 16 SETTING UP THE GIS Step Action Open the Overview tab in the Gas Injector module Double click on the word Cold below the column heat for the GIS you need to use or by clicking the right mouse button overthe GIS module will open a dialog list where the word Heateris highlighted Click on heater The word cop is replaced by a progress bar which in tum is replaced by the word warm when the GIS is fully heated 2762 1 EI Operations Patteming Car TABLE Step SETT 5 16 SETTING UP THE GIS Action Tick the n box atthe start of the GIS chosen A dialog appears asking for confirmation of insertion of the GIS Confirm the insertion if you know there is nothing obstructing its travel Double click on the word cLoseb below the column FLow for the GIS you need to use The GIS will open Clicking the right mouse button over the GIS module will open a dialog list where the word FLow is highlighted Click on FLow and the GIS will open If application file in patterning property list is choosen the opening closing of GIS valves is done automatically The GIS is now in operation and is either depositing or etching depending on the Gas TYPE chosen from the Pattern PROPERTY EDITOR ING UP THE EPM To set up the EPM for monitoring use before patterning use
241. rdous decomposition products in fire carbon dioxide water spray foam extinguishing powder carbon monoxide sulphur compounds 6 Accidental_release measures Spillage procedure Emergency procedure Dependent on quantity spilt paste one has the choice between remove with cleaning rag or paper or cover paste with Powersorb sand diatomite vermiculite and suchlike Shovel the material into plastic bag or other suitable packaging and remove to the central depot for hazardous waste not applicable 7 Handling and storage Local exhausting Storage conditions Under normal circumstances not applicable Store product at a cool and dry place Keep packing closed 8 Exposure controls personal Exposure limits TLV 5 mg m3 applicable to TLV 5 mg m3 STEL 10 mg m3 applicable to TLV 10 mg m3 applicable to TLV 10 mg m3 applicable to TLV 10 mg m3 applicable to TLV 3 mg m3 applicable to TLV 3 mg m3 applicable to not determined not determined protection MINERAL OlL as oil aerosol Netherlands 20 C 1013 mbar MINERAL OlL as oil aerosol MINERAL OlL as oil aerosol Belgium 20 C 1013 mbar MOLYBDENUMDISULFIDE as molybdene Netherlands 20 C 1013 mbar MOLYBDENUMDISULFIDE as molybdene 20 C 1013 mbar MOLYBDENUMDISULFIDE as molybedene inhalable dust United States 25 C 1013 mbar MOLYBDENUMDISULFIDE as respirable dust United States 25 C 1013 mbar MOLYBDENUMDISU
242. requirements called out by the manufacturer of the test instrument Do not touch the test leads or the instrument while power is applied to a circuit under test GROUND EARTH The focusing column and FEI electrical components must be grounded to operate safely Do not defeat grounding or use an ungrounded power source In the event of loss of a protective ground connection all accessible conductive parts including knobs and controls that may appear to be insulated can render an electric shock DANGER Do not exceed 30 volts rms between the input connector and ground During testing do not touch any object that could provide a current path to the common side of the circuit being tested orto earth ground Checking the protective ground connection The correct connection and condition should be checked on a yearly basis by visual inspection and by measuring the resistance between the protective lead connection at the plug and the frame This resistance must not exceed 0 1 Ohms During measurement the mains cable should be moved resistance variations indicate a defect COVER PANELS Do not operate or plug in any electrical unit without the protective covers or panels installed Only qualified persons aware of the electrical hazards should perform maintenance or service operations 2762 1 a Safety and Handling Electronics Voltages FUSES Only trained service personnel should replace fuses Replace fuses only with fuses
243. rking distance condition will be greyed outin the Magnification menu on the Menu Bar Magnification range is from 10x to 300 000x The Pressure list can be changed to hold specific values regularly used in the Low Vac and ESEM modes Operations Setting Preferences SCANNING TAB displays the capability to change scan times table and make presets to the Slow Fast Snapshot scan buttons on the toolbar and for the Photo function also FIGURE 5 34 SCANNING PREFERENCES xTm Preferences i x ESEM Charge Neutralization General Movie Databar Units Presets Scanning Beam Detector He 50 0ns 100 0ns CP 300 0ns 1 04s 3 04s Dwell time 10 0ps Resolution 12442 Line time 5 1 ms Frame time 2 35 Refresh rate 441 60mH2 Detault conce om On the left of the dialogue box there is a Dwell time preset list with a fixed number of entries 11 There are two cons which correspond to the Slow and Fast preset buttons on the toolbar and two ones which corresponds to the Snapshot and Photo functions indicating the relevant dwell time value To change these values move any icon up ordown just by clicking and draging it The Default button restores the default list and icon positions By selecting an entry it can be changed in the Dwell Time line of the Property Editor onthe right side of the list This works also for the Fast and Slow icons which are for selecting scan speeds only 27621 559
244. ropriate precautions TABLE 1 6 Cold surface To avoid serious burns or frostbite follow documented safety procedure before refilling with LN2 Hat turase Do nal turn Can cause chin burrs upon cordaci Discornerct and hocico power ond allow surface lo cool belore servicing Gas Inlet Overpressure Maximum 0 1 bar Hazardous voltage inside Voltage or current hazard sufficient to cause shock burn or death Disconnect and lockout power before servicing MAGNETIC FIELD Can be harmful to pacemaker wearers Pacemaker wearers stay back 15 om 6 im Moving Parts Present Can resul m Series ery lo hind or Sng Kpag Rande many em na ie ed ld Ee LABELS USED ON THE MICROSCOPE BODY Description Extremely low temperatures may be present on parts of the microscope Precautions must be taken where this sticker is visible Extremely high temperatures may be present on parts of the microscope Take necessary precautions High pressure may be present Take necessary precautions Lethal voltages may be present on parts of the microscope Take necessary precautions Magnetic Field may be present which can be harmful to pacemaker wearers Pacemaker wearers should stay back at least 15 cm 6 Moving parts may be present Take precautions when working in those areas to ensure that hair and loose clothing are restrained More information about safety when working and maintaining the microsc
245. rsonnel at your company or representatives of your state territory or province or federal government General rules e DO not service alone e Do not perform internal service or adjustments unless you are a trained service person and unless another person capable of rendering first aid or resuscitation is in the immediate vicinity e Be aware of the location of the nearest phone e Be aware of the emergency services number At the time of publishing the following emergency service numbers were available TABLE 1 1 EMERGENCY TELEPHONE NUMBERS Region America United Kingdom Europe Not all countries e Always ensure a safe environment when performing service or maintenance e Make sure your hands are dry and that you are standing on a dry insulated surface capable of withstanding the accessed voltages 2762 1 E Safety and Handling Safety gt gt MESSAGES The following messages are used throughout the manuals Note Text of the note A note emphasizes information requiring special attention Caution Text of the caution A caution message appears where special handling is required to prevent product damage WARNING Text of the warning A warning message appears where special handling is required to prevent personal injury or death DANGER Text of the danger A danger message identifies an immediate personal risk of injury or death and gives appropriate precauti
246. running pumps and IGP All valves are closed and the electron column and specimen chamber areas are vented This procedure should only be carried out by a Supervisor Vacuum System Quanta 3D System States EMERGENCY OFF EMO An emergency off is similar to that which would happen after a MAINS power off while the instrument is completely operational In case of emergency it can be handled by the system Strike one of the large yellow and red EMERGENCY buttons if available to switch off the electrical power completely If there is no one present proceed to press the breaker switch in the hole at the back of the Electronics Cabinet This breaker switch is inside the top back cabinet cover opening If this is not easily accessible turn off the mains wall switch if present and disconnect the mains plug from the mains socket Note The EMO switches are latching Once pushed in they must be rotated in the direction of the arrows to reset FIGURE 3 4 MAIN SWITCH OFF Power Off Take sufficient measures to avoid power failures as much as possible If a power failure occurs during normal operation of the system it comes down to a safe state and the following happens e The HV is switched off abruptly The cooling process is similar to that of anormal shutdown procedure e The lon column isolating valve closes so the high vacuum in the column chamber is not completely lost e The specimen chamber vents gently automatically
247. rvoltage category 2 EN61010 1 e Pollution class 2 EN61010 1 e with a second hardwired earth connection to the building ground All electron beam instruments generate some ionizing radiation X rays The level of this is less than 1 uSv h at a distance of 10 cm from the surface For Quanta instruments similar rules might apply Maximum voltage of the beam does not exceed 30 kV in normal use Licensing registration might be required according to local regulations For most of Europe no licensing registration is necessary see 96 29 Euratom directive para 3 2 e 27621 EI Safety and Handling Safety Safety SITE REQUIREMENTS Verify thatthe safety and environmental requirements ofthe workstation site which are the responsibility ofthe customer are satisfied In particular the pump exhaust requirements the electrical supply and grounding earthing requirements floor loading and any local codes regarding earthquake safety are important safety issues If applicable install a drip pan to collect potential oil spills and drips from the vacuum pumps EARTHQUAKE Brackets included with the system during shipping can be used to secure the vacuum stand extension cabinet and operation and display console to the floor for greater safety during an earthquake These brackets in no way guarantee that during an earthquake you will not sustain damage or that local safety codes are met As the design of these brackets are mac
248. s 3 operating vacuum modes to deal with different sample types e High Vacuum HiVac is the conventional operating mode associated with all scanning electron microscopes e Low Vacuum LowVac ESEM The ion system works only in the HiVac mode In the last two application modes the column is under high vacuum and the specimen chamber is at a high pressure range of 0 1 to 20 Torr 10 to 2600 Pa of water vapour from a built in water reservoir or auxiliary gas which is supplied by the user and connected to a gas inlet provided for this purpose Observation of outgassing or highly charging materials can be made using one of these modes without the need to metal coat the sample which is common to the HiVac mode Specimen exchanges take place through a chamber door which when opened exposes the specimen stage Exchange time takes a few minutes Vacuum software interlocks ensure that the system is fully protected against operating failures POSITIONING OF THE STAGE A choice of computer controlled high accuracy five axis stages offers precision specimen manipulation and automation of all axes for overall spatial orientation on highly repetitive or extremely irregular samples FIGURE 2 2 QUANTA 3D DUAL BEAM SYSTEM System Overview System Layout of Quanta 3D System Layout of Quanta 3D The standard layout of the Quanta 200 3D system is based around a dedicated microscope controller along with an electrical console to power t
249. s Electronics Nederland B V at the date of its printing 9 Physical and chemical properties Physical state paste Colour white Odour odourless Vapor rate range Boiling point range not traceable The product decomposes before it boils vV Gunsneyxa jualoyjns uaym auou uonejeyu uou se3uaaja Auedwioo 12uul E sajBBo6 s sa a vsn sano 6 joyooye AuIAAjod UNS JO0JUSAU JOY O1JUOD SADUEISANS 21x0 y UI paje 1sibas aie gZ UOIDES ul pauonuau se syjuauodwos au Sas uo syew y S uU01 39 01d jeuosiad PasIApY E jqe ve Jou UONEBUMO JUI 134 0 OL 5 equ ELOL Os0Z PIOYS9AY1 ANOPO a uou uou Buij qej 93 uo syew y O SHUI aansodxa syew y ajqeodde jou 9487 93 E UNS S Bulia9 9 O equ ELOL 9s 02 unibag 0 ajqeorjdde uoyeuwojul AoteinBay st OSO19 10 S 31LWAHLOYGAH 050 029 CH L3d SO ONILVOINENT eu bu OL ALS T Ioso4ae 10 se q3LYJHLOYQAH 059 029 H13d STIO eal PE E E Er ATL sesue sqns snolabueg uonyejnbas uodsue 0 1alaNs JON B 0sOJ98 10 se q3LYJHYLOYQAH 059 029 H13d SINO DNILVOIHSNT euyBu g ATL uo ewoyu Hodsueil yh an equ ELOL Da 07 UNI B 9g 0 egeondde gt OSOJ98 jo SEJOSIA HDIH HOAH 0S9 0 GO H14d S1IO DNILVOIHENT eu bu OL TALS jenddns o JOAJ9P wants ospe JOPISUOO UONE SIBO BUONBU PUE 290 yum D JOSo48 10 SE OSIA HOIH HOAH 0S9 029 CH LIA STO DNLLVOIHENT ew Bw g ML dd d doud Buib
250. ser Alignment 4 Condenser Alignment 4 Condenser Alignment Instructions Instructions Instructions Centre the feature back under the cross Click on Finish to store the new settings or Cancel to stop the alignment procedure Any conditions that have been saved with new values will not be restored Centre the feature back under the cross Adjust the Contrast and Brightness controls when necessary save each sequence ending with spot o by clicking on the Save button Press the Mext button to do forward or the Previous button for corrections Optimize the image with Focus Contrast and Brightness Press the Next button step 1 of 38 step 6 of 36 step 35 of 35 Condenser alignment 30k Spot amp Condenser alignment 1k Spot o Contrast Contrast Contrast Cancel Cancel 27621 en Alignments 5 Final Lens Alignment 9 Final Lens Alignment Final Lens Alignment aligns the beam through the objective aperture 1 2 Alignments Instructions This Alignment centers the beam through the final lens aperture to remove image shift and minimize astigmatism Press the Start button Mo step Adjust Focus and the Contrast and Brightness adjusters if necessary The image starts modulating alternately rotating clockwise and counter clockwise The rotation centre of the image indicates the required position Locate the rotation centre under the screen Centre Cross by using the Fi
251. sing the system High Voltage Wake Up overnight LMIS GIS Heaters 6 Standby When not using the system High Voltage LMIS PC On User Log On for more than 2 days PC monitor Wake Up FIGURE 3 3 QUANTA 3D STATES TREE 1 Complete Shutdown Service Start Supervisor IGP start 2 d B mergency Shutdown y y A Supervisor Log On Off Wake Up xT microscope Server Shutdown User xT microscope Server Shutdown 4 Ca gt O EE sie gt Full operation ser ME Stand Ca gt Log On Off PC On Off Wake Up xT microscope Server Start Stop Vacuum System Quanta 3D System States de wl microscope Server Serrar siale STARTING x BERRE LI State STOPPED x Micriscop Shop Patia Suharti 22 gt XTUI Log On i x COCEI1d dentes AMA Mlobiir liruar r Username Password system Wake up Column sy Beam On Source yg BEI UserManagement TABLE 3 2 STARTUP PROCEDURE GENERALLY STARTUP PROCEDURES GENERALLY System State Action 0 Complete Before starting the system check for the presence Emergency of electrical power compressed air and nitrogen Shutdown for venting and cooling With the exception of nitrogen interlocks prevent the vacuum system from operating if any of these are not present For the following steps we assume the powered microscope with IGP pump running 1 Standby Push the power b
252. sition by manipulation of the Source tilt If in this condition the crossover mode is switched off a normal scanned image will appear on the screen Store button is used to store the Filament voltage Contrast Brightness adjuster allows the user to control the image quality 27621 ss Alignments 2 Tetrode Alignment 2 letrode Alignment Alignments Instructions This Alignment is for centering the Gun shift and Tilt relative to the Tetrode to give maximum illumination especially at low voltages Press the Start button Ho step Tetrode Alignment aligns the Gun Tilt and Shift to optimise the source Illumination through the Tetrode especially at low voltages 1 Click on the Xover button 2 Adjust the Contrast and Brightness adjusters if necessary 3 At 1kV Spot 7 centre the illumination under the Centre Cross and remove the cutoff using the Gun Tilt and Gun Shift 2D controls 4 Repeat the procedure to centre the illumination for 500V Spot 7 5 Repeat the procedure to centre the illumination for 200V Spot 6 Tetrode Alignment Pages continued Alignments Alignments Alignments 2 Tetrode Alignment Alignments 2 Tetrode Alignment 2 Tetrode Alignment 2 Tetrode Alignment select center cross with Shift FS Click on the Aover button Adjust the Contrast and Brightness controls when necessary At 1 kY Spot center the illumination under the cross using the Gun shitt a
253. sition products in fire determined by surrounding nitrous oxides 6 Accidental_release measures Spillage procedure Emergency procedure Stop gas stream warn fire brigade not applicable 7 Handling and storage Local exhausting Storage conditions Depends on processing circumstances but at least good room ventilation Keep container in a well ventilated place Keep packing closed and dry Storage temperature lt 50 C 8 Exposure controls personal protection Exposure limits not determined NITROGEN REFRIGERATED LIQUID not determined NITROGEN REFRIGERATED LIQUID C Ceiling S Skin Remarks exposure limits none Odour threshold 20 C 1013 mbar not traceable Advised personal protection skin cold isolating gloves eyes face mask inhalation none when sufficient exhausting see info section 16 SDS No Filtermask 9 Physical and chemical properties Physical state liquid gas refrigerated Colour colourless Odour odourless Vapor rate range not traceable Boiling point range 196 C 1013 mbar N e N N icals Chem Safety and Handling MSDS of the above mentioned Chemicals continued uou Bul9qe 93 uo syeway OINDI1 031 V439l8338 NADOHLIN s juauoduo9 snopiezeH seb ayjealq jou og Le a9e d paje nuan am e ui JOUIeJUOD daay 6 seseiyd s suo je jueguos UBly ul Bulyeoojjns 66 seseiyd y auou OQUI S PIezeH uoleuojul lOJe nba
254. stall the column liner Instructions are given in the following sections FIGURE 8 6 LINER TUBE APERTURES TOOLS COLOMA LINER TUBE COLUMM LINER TOOL Aperture 4 500 um Pt aperture placed in top wih c clip 3 grooves mark the locations of the 3 apertures in the liner The 4th aperture does to the bottom of the liner Aperture H 1 0 mm Aperture C 1 0 mm Aperture D Spray aperture APERTURE TOOL 8 5 2 REMOVING THE LINER TUBE 1 Vent the system and remove the anode assembly See Section 8 5 2 2 Insert the COLUMN LINER TOOL into the end of the liner tube and tighten the PLUNGER KNOB 3 Raise the tube carefully until itis clear of the column The upper COLUMN LINER O RING Should come out with the tube If it doesnt remove the o ring from the gun chamber 4 Loosen the plunger knob to remove the column liner tool from the tube 812 27621 Maintenance 8 5 The Column Liner and Apertures FIGURE 8 7 REMOVING THE COLUMN LINER TUBE lt Column Liner Tool Column Liner o ring Removing Apertures from the Liner Mounting positions are critical and the following instructions should be carefull y followed The apertures are removed and installed using the APERTURE TOOL Extract the apertures by inserting the APERTURE TOOL into the lower tapered end of the liner tube and pushing it forward as far as it will go The apertures should slide out easily Removing Aperture A from Holder Plac
255. sure Limiting Apertures and the Insert body 8 6 1 REMOVING AND DISASSEMBLING The following instructions describe how to remove and disassemble the standard insert assembly FIGURE 8 10 STANDARD INSERT COMPONENTS Housing O ring 1 Insert the universal detector tool pins into the matching slots in the insert assembly as shown in Figure 8 11 Once the pins are engaged twist counter clockwise to unscrew the insert from the pole piece 2 Use the Apertures Positioning Tool to remove the C clip and final apertures from the insert To do this insert the pin of the tool into the wide end of the insert and push the parts out of the narrow end of the insert Be sure the parts have a safe clean place to drop onto Maintenance 8 6 The Standard Insert ant aun IL FIGURE 8 11 REMOVING AND DISASSEMBLING THE INSERT Aperture removal tool Housing Final Aperture c clip we 3 Inspect the o ring at the bottom of the insert If the o ring looks deformed or damaged replace it This is a critical seal between EC1 and EC2 which is in high vacuum The surface of the o ring must be flush against the insert 4 Inspect the threads on the insert for dirt scratches on the threads etc Clean the insert threads and if damaged replace the insert 8 6 2 HOUSING CLEANING Once the entire assembly has been removed and taken apart 1 Clean the standard insert housing with a toothbrush and Soft Scrub CIF or alumina
256. surface The spot must be scanned across the screen very rapidly so that the human eye sees it as a continuous image and nota moving spot Because most beam scanning takes place at rates too slow to provide the illusion the slowly gathered image is loaded into computer memory This stored image is displayed at a fast scan rate but updated only at the beam scan rate The raster consists of many typically one million individual locations pixels that the beam visits As the beam is scanned the signal emitted by the sample at each beam position is measured and stored in the appropriate digital memory location At any time after the beam scan the computer can access the data and process it to change its properties or use it to generate a display FIGURE 5 1 RELATION BETWEEN VIEWED IMAGE AND STAGE Stage door X front of the system Y MONITOR STAGE When you move the stage in the Y up direction on the monitor it is physically moving toward you This drawing is also an indication of reference for the wafer map 2762 1 Operations Optimising an Image MAGNIFICATION Magnification is calculated with reference to the relationship of displayed image dimension L divided by the sample scanned dimension l see Figure 5 2 FIGURE 5 2 MONITOR IMAGE AND SCANNED SAMPLE MONITOR L Viewed Length L Magnification Scanned Length SAMPLE If the size of the raster on the sample is made smaller whi
257. t X ray results FIGURE 5 12 X RAY IMAGING WITH THE GSED OR E de A E i i i ae ee E di de mal rane de e de de a sde wt ee E E E E re wan rat TE Beam skirt due to gas dispersion Some of the electrons are deflected due to interaction with the chamber gas The deflected electrons form a skirt around the main beam The skirt electrons will hit the sample at points that are remote from the area of interest and generate X rays from these points The number of skirt electrons increases with chamber pressure and the distance that the beam travels through the gas The effect of these skirt electrons can be minimized by reducing gas pressure or by shortening the distance between the sample and the final PLA The X ray detector is designed for the sample to be at15 mm FWD This working distance is too long for optimum imaging with a high 520 27621 Operations X ray Analysis for different Vacuum Modes pressure detector such as the GSED For this reason the ESEM is supplied with a special X ray PLA which is used in conjunction with the LFD to give the best results ESEM WITH LFD AND X RAY PLA The following figure shows the lens configuration for X ray analysis using the X ray PLA cone This cone has a 500um aperture and fits over the standard insert lt is used along with the LFD FIGURE 5 13 CONFIGURATION FOR THE X RAY PLA CONE Electron beam EDX Detector l
258. t platform centre the filament tip in the Wehnelt aperture 1b by carefully shifting the Wehnelt cap 1a over the upper part 2a of the Wehnelt cylinder 2 Carefully turn the three screws 2b finger tight to secure the Wehnelt cap with respect to the Wehnelt cylinder 3 Turn the upper part of the Wehnelt cylinder clockwise in the direction of the arrow over 1 division with respect to the lower part to move the filament tip towards the Wehnelt cap Check that the filament tip does not touch any part of the Wehnelt cap If necessary repeat steps 1 and 2 with care 4 Continue this procedure until the tip of the filament is level with the front face of the Wehnelt cap This can be observed clearly by tiling the Wehnelt assembly and viewing the Wehnelt aperture obliquely 5 Turn the upper part of the Wehnelt cylinder counter clockwise in the direction opposed to the arrow 5c until the tip of the filament is set to a position between 0 2 and 0 3 mm below the front face of the Wehnelt cap This can be measured using the scale 5b on the lower part of the Wehnelt cylinder Each division represents 0 05 mm 6 Recentre the filament tip if necessary see steps 1 and 2 above 2762 1 87 Maintenance 8 3 The Wehnelt and Filament 8 3 7 INSTALLING THE WEHNELT ASSEMBLY Liftand swing away the gun head assembly using the handle provided so that the Wehnelt can be repositioned Replace the Wehnelt assembly inside the holder atta
259. t scanning mode This is the normal scanning mode typical for general navigation Spot brings you to Spot mode The image pauses and the scaning is switched off The spot position is represented by a green cross You can drag the spot around the screen with the left mouse button Line brings you to Line mode The green horizontal line displays on the screen The beam scans along this line using the line time defined for the selected scan speed You can drag the line up down with the left mouse button el Pale Live Y Average i 2 frames Integrate 1 frame Select Filter mode Number of Frames Software Control xT microscope Control Software External switches to activate external control of the scanning system such as beam control from an EDX X ray system 0 Beam Blank Ctrl B Mid deflects the beam off axis high in the column and protects the sample from unnecessary exposure to the beam This is useful at the end of scanning when ready to save the image so that the sample is not continuously scanned before the next image When the beam is blanked the toolbar icon button is pressed Clicking again on the button will release the blanker and return the beam to scan the sample Slow Fast Scan DI wis AO 4 tons DI O brings the scan ning condition to the preset Slow left icon Fast right icon scan value held in the Preferences Scanning tab Slower Faster Scan brings the scanning co
260. talling filament Wehnelt cap A he ea ee 8 7 8 3 6 Setting the filament position 8 3 7 Installing the Wehnelt Assembly dos Ei Ata EO 8 2 8 2 8 3 8 3 8 4 8 4 8 5 8 5 8 6 8 6 8 8 C ix 8 4 The Anode Assembly 8 4 1 components 8 4 2 Removing the Extractor Electrode o L u 8 4 3 Cleaning the Extractor Electrode o o oo o ooo o TE EER EE ORE 8 9 8 4 4 Replacing the Extractor Electrode 8 10 ee OE OE es 8 10 Anode Body 8 10 8 4 6 Installing the Anode Assembly 8 11 8 5 The Column Liner and Apertures aa a EE don 8 12 8 5 1 components 8 12 8 5 2 Removing the Liner Tube 8 12 Removing Apertures from the Liner A EERS Ge a ae CO Removing Aperture A from Holder o 8 13 Pee ie ee RE tere 8 13 Method 1 EED EE we ee 8 13 Method 2 8 13 8 5 4 Installing Aperture A in Holder EET AA EO EES One 8 5 5 Aperture positioning in the Liner A AAR A Oe IS 8 5 6 Cleaning the Liner Tube 0 0 0 0 ce eee ee o 8 16 8 5 7 Installing the Liner Tube 0 0 ee ee ee ee ee 8 16 8 6 The Standard Insert 1 SESSE SE ee ee 8 17 8 6 1 Removing and Disassembling 0 0000 e ee ee ee ee 0 17 8 6 2 Housing Cleaning ss SS se ee ee 8 18 8 Gaseous Detectors 2 2 0 ee ee 8 19 8 7 1 Cleaning the GSED or LFD 0 sesse ss ss ss 8 19 8 7 2 Cleaning the GBSD o o oo
261. tatus Module can be found at the base of all pages displaying important current system parameters and animated icons These parameters may change due to the application being monitored at any time e Specimen Current shows the total current absorbed by a specimen assembled from Electron source current lon source current and current produced by detectors e lon Beam Currentshows the primary lon Beam current This value is correct only when imaging is paused otherwise the value cannot be considered e Chamber Pressure shows pressure in the specimen chamber depending on mode selected kind of specimen etc TABLE 4 3 STATUS ICON FUNCTIONS Function Dual column and Chamber vacuum Vented Dual column and Chamber vacuum Pumping Dual column and Chamber vacuum Vacuum Stage axes Lock any one Unlock all Dynamic Focus On Scan rotation not zero External scanning mode On Software Control Beam Control Page Beam Control Page Pump Made High vacuum Low vacuum Water y Water y Chamber pressure y 60 00 Pa MEE system Wake up Column 2A Source a Beam On EE High voltage ES 20 00 ky cE Beam A T Beam Magnification Couple Magnifications Magnification 500 EO E E Electron Beam Current ee 061 n Spot size EE 45 Detectors Contrast Eo os 8 TE Brightness status specimen Current
262. te function Note The Icon button passes from one function to the next when clicked When the down arrow is clicked on the selection a dialog opens so that the functions can be loaded directly with frame values The number of frames can be selected as a preset in the toolbar drop down list box associated with the Average Integrate function Clicking on one of these values causes the display to update to that condition Frame values for Average and Integrate are independent of 2762 1 Software Control xT microscope Control Software each other and of scan speeds so values can be preset for particular scan beam and quad conditions A filter should be set for each quad and for each beam so live and filtered images of a beam can be seen at the same time If a new beam is chosen filter reverts to the preferred setting for that beam The Integrate function is not available for the Optical Beam The Average function is not recommended for the Optical Beam Quad when processing stage movements Scan Rotation Shift F12 activates the onscreen tool to rotate the scan and align the image It has no effect on the stage movements and is solely a scan coil function used to orient the image relative to mechanical rotation and detector direction The Beam Menu Alt B opens the Beam menu functions Beam Patterning Stage Tools pA op Beren Rear Electron lon Optical Beam ls Y lon Beam makes the quad or single screen activ
263. the following procedure TABLE Step 5 17 SETTING UP THE EPM Action Select the ACTIVE Live option from the dropdown list in the Options tab Selectthe required conditions in the property editor in the Options tab such as LINE TYPE and LINE COLOR Open the Scaling tab and select either TIME or DEPTH from the x UNITS dropdown list as the progress criteria Auto zoom scales the entire progress to the viewing window Fixed zoom can be setup by entering threshold max min values for time seconds in the x axis and max min values for current nA in the y axis Auto pan will keep the present milling position progressing in the viewing window while the past progress moves off screen Selectthe Graph tab to view the progress Click on the EPM button in the toolbar The EPM will continue with a baseline in the Graph display until patterning has started 6 Start patterning Operations Patterning BEAM COINCIDENCE The Electron and lon columns are mounted as illustrated in the following figure which shows the stage tilted to 52 Coincidence of the beams occur at the eucentric tilt axis FIGURE 5 22 BEAM COINCIDENCE lon column Pi N 3 A Electron column Not to Scale Correcting Beam coincidence 1 Set the eucentric height position see Chapter 7 2 Select E beam in first quad and kbeam in second quad 3 Focusthe same obvious feature on the sample with both beams 4 Use
264. the bottle vacuum has recovered The removal of all the gas from the liquid must be accomplished before good imaging is possible This is done correctly when no bubbles are produced in the water when increasing the pressure in the chamber 8 10 Scroll Pump Two pre vacuum pumps are used in the vacuum system The first one is used to pump the microscope and back up the TMP The second One is used to control the pressure in the specimen chamber and also helps the first pump at the start of pumping after venting the specimen chamber The pre vacuum pumps are dry type pumps that do not require any user maintenance Carefully read the pump operating manual delivered with the microscope It is very important that the pipes to and from the pump are not restricted in any way If the pump exhaust pipe is fitted to an internal company exhaust system it is important that the gas flow is unrestricted by the system capability otherwise back pressure can occur which will overheat the dry pump and deteriorate the pumping speed 2762 1 Eat Maintenance 8 10 Scroll Pump
265. the center Moving the mouse causes the cross hairs to move and therefore affects the image as required Due to the fact that the image rotation correction is switched off automatically in some alignment procedures the X and Y movements may not always appear to be in the same directions Note Do not use the Beam Shift at any time during the adjustment procedures other than where specified as this is set to zero value at each alignment section and extra movement can offset the zero condition All movement of the specimen can be made using the stage either mechanical or motor driven where appropriate COMMON BUTTONS BEHAVIOUR The following buttons and behaviours are common for all alignment pages When available they have the following effects e the Next button moves the user to the following page after all the necessary settings have been selected e thePrevious button moves the user to the previous page should a previous setting need to be changed e theFinish button completes the procedure and saves the new settings e theSave Store button saves the actual settings at that point e the Cancel button at any time is different for particular alignments 1 It returns to the start without having changed the original settings 2 It stops the alignment procedure but does not restore any conditions that have been changed by clicking the Save Store button 27621 ss Alignments 1 Source Control 1 Source Control
266. the moving stage parts Cleaning with a vacuum is the ideal method If not available cleaning should be done by using dry nitrogen gas bursts around the stage mechanics to blow out any foreign materials Make sure the final lens and detectors are protected from the turbulence Do not use sharp metal objects to scrape away debris A fine pair of plastic tweezers can be used to pick up difficult particles Spillages on the stage should be wiped up using a lint free cloth followed by vacuuming or blowing with No Maintenance 8 9 Refilling the Water Bottle 8 9 Refilling the Water Bottle The water bottle in the instrument will typically need to be filled about once a month if the instrument is used on a regular basis ata high pressure The water reservoir is located in the rear of the column console beneath the frame To fill the bottle do the following 1 Ventthe system 2 Turn off any gas connected to the gas inlet 3 Disconnect the quick coupler and pull out the water bottle 4 Remove the rubber plug and refill with distilled water not de ionized until 1 3 full 5 Mount the rubber plug and install the water bottle in the reverse order of that described above 6 Pump the system Switch to Low Vac or ESEM mode to force automatic purging to flush any air out of the bottle and connecting tubes Note The first time the system is pumped in LowVac or ESEM mode after filling the bottle Auto purging may be erratic until
267. this button stores the edited position under the currently selected name overwriting the old position without asking for confirmation Remove Clicking this button deletes the currently selected item in the Location List The Remove button is enabled when a position is selected in the Location List Locks These are software locks to prevent inadvertent movement of any or all axes during particular applications By default all axes are unlocked The edit boxes for axes that are locked are grayed out and cannot be entered or updated Axes that are locked do not move when the coro button is activated When any or all of the axes are locked the lock icon in Status displays a closed lock Stages Stage Movements Stage Movements TRACK The Track function allows continuous directional movement of the stage with variable speed The speed range is coupled to the magnification and selectable within certain limits Select the Track function by pressing onthe Mouse Wheel while in an active Electron lon Beam Quad or on full screen A Yellow enhanced Dot and Arrow appear onscreen The Dot appears where the mouse command cursor was when the wheel was pressed and the Arrow denotes the direction to move The speed depends on the distance Wheel Up amp Down Tf the Arrow is separated from the Dot The direction can be changed by Wheel Press moving the mouse in a circular motion to obtain the correct path The movement axis center will d
268. tical Active Patterning 2 Voy curr HEW En gt gt luanta 30 Inactive Patterning 64 Yo curr HEY 100 n Quanta 30 Software Control xT microscope Control Software PREFERENCES CTRL O letter can be found at the end of the pull down menus Detectors Scan Beam Stage and Tools When Preferences are opened from these menus the window opens in the appropriate tab The complete preferences dialogue consists of tabbed sections for ESEM Charge Neutralization General Movie DataBar Units Presets Scanning Beam and Detector Clicking on the required tab opens a section that allows changing and presetting conditions for the function chosen FIGURE 4 8 PREFERENCES DIALOGUE xTm Preferences x ESEM Charge Meutralization General Movie Diatabar Units Fresets Scanning Beam Detector Available selected Beam Current Detector Mode Dwell Time Detector Type High voltage Magnification Horiz Field vridth scan Rotation Fressure Stage ay Temperature Tilt Working Distance Tap Move DR Move Down Bottom 4 Label Label M Micronbar Add Bitmap Diatabar Preview 102220035 Hy mn m 12 25 04 PM 20 00 kv Label coa Further information about how to make use of these preferences can be found under Setting Preferences see the end of Chapter 5 Operations Software Control xT microscope Control Software The File Menu Alt F opens File menu adm
269. ting contrast and brightness Reduced area F7 O This mode is useful when focusing and stigmating as the scan speed is faster in the smaller area When Reduced area is chosen the small green area frame appears at the last known place on the screen its area and position are adjustable by mouse It is also possible to adjust scan parameters independently on the full frame setting e Moving Click and hold the left mouse button in the selected area The arrow changes to a four ended arrow This will take time depending on the actual scan speed Drag the selected area to the desired position and release the mouse button e Changing the size Click and hold the left mouse button at the edge of the selected area The cursor changes to a two ended arrow either horizontal or vertical A corner can also be used to size two sides at one time Now drag the selected area out or in to the desired size and release the mouse button e Making a new one Place the cursor outside of the selected area and make sure Get and Shift are not activated The cursor should be the normal arrow symbol Move the cursorto where you want the left upper corner of the selected area to be Click the left mouse button and drag the cursor until the rectangle on screen includes the area you want to select Release the left mouse button When the Reduced area frame is being manipulated it turns yellow until released then it reverts to green Full Frame is the defaul
270. tness non linearly in range from 10 to 10 The Histogram Button switches the graphical expression of active image shade densities on or off The X coordinate changes from black to white while the Y coordinate changes from zero to the full density of the appropriate shade The Default Button brings the above described function settings for the active quad back to the default values no modification 432 27621 Software Control Temperature Control Page Temperature Control Page Vacuum UNG Made High vacuum Water y Water y Chamber pressure y 60 00 Pa i C Low vacuum ESENES Temperature Stage Control Heating Temperature Actual Target k kalin K oo fo fo oT Temperature Profile Temp Ramp Soak time 1 Pooling Ramp cla Beam 2S are Beam Shitt Stigmator Detectors Contrast Brightness l status specimen Current 285 pA 044 pA 9 19E 5 Pa lon Beam Current Chamber Pressure a h The Temperature Control Page is an FEI Microscope User level page containing the essential components divided into the following modules e Vacuum Mode module is used to pump the system into either HiVac LowVac or ESEM mode and to vent the system e Temperature Stage Control Temperature Profile module controls operation of optional heating or Peltier cooling stages e Beammodule contains Stigmator and Beam Shift controls e
271. to bring the sample to a eucentric position and to have the flexibility then to change the Z from outside the chamber to another position if required The internal Z distance is 25 mm of movement and the external Z distance is also 25 mm This allows the flexibility to load large or differently sized specimens onto the stage by reducing the internal Z while stll being able to manipulate the difference in height from outside FIGURE 7 5 EUCENTRIC ADJUSTER FOR 50 X 50 STAGES Tungsten We To set the specimen height to the eucentric position and at the same time prevent any possibility that the specimen should touch the lens pole if the Z is increased follow this sequence of steps 1 Load aspecimen onto the specimen holder 2 With the stage still open adjust the external Z 5 to the highest position 3 Set the Eucentric Height Adjuster on the stage base 4 Bring the highest specimen or the highest point on the specimen to the 2 mm position on the Height Adjuster by turning the internal screw of the specimen holder Lock the position with the locking cone 5 Reduce the Z so that the specimen now coincides with the Eucentric position on the Height Adjuster by use of the external Z control 6 Close the chamber and pump down 7 When the beam is switched on focus the sample and click on the Z lt gt FWD button icon on the toolbar The FWD will be recognised by the system as the value of Z in the Coordinates tab of the
272. ts Presets Scanning Beam Detector Blix Duput Ds f B hit gras C 16 bit gray e Outputradio button sets the depth of resulting image shades to 8 or 16 bit e Source 1 3 The positioning of the adjusters varies the amount of input from particular detector in the range from 0 to 100 Note Because only the raw image is used to mix any setting made in the Enhance Image module are not applied before mixing It is possible to use these enhancement for the mixed image in Quad 3 or 4 Operations Detector Types and Usage Detector Types and Usage Detectors TE The Detectors pull down menu shows the detectors installed on your ETD Secondary Electr system Select the detector to be used forimaging When you select a la EE detector the last set C amp B values for the chosen detector and mode d aan are set Availability of detectors full colour detector name in the pace menu depends on vacuum state and chosen beam The system en always reverts to the last detector used for that beam External Note IR If any detector which is not compatible with a vacuum mode and or 1 2 beam is selected the imaging quad cannot be unpaused Mix Preferences Col o TABLE 5 11 STANDARD IMAGING DETECTORS Detector Type Name Vacuum Mode Detection Mode Everhard Thornley detector ETD High Vacuum Secondary electron any Back scattered electron Large Field Secondary electron Gaseous Gaseous Secondary Electron Electro
273. u vent the system in order to change a detector wait until the icon with a greyed specimen chamber appears in the Status module Otherwise there is a risk of a detector assessment malfunction and as aresult the PLA see below will not be known by the system Vacuum System Vacuum Modes Vacuum Modes Three radio buttons are used to select the target operating mode that the instrument will be placed in when a Pump sequence is initiated The vacuum system recognizes High Vacuum Low Vacuum and ESEM modes All of these modes are operative at the user level to High vacuum allow the user to be precise about the detector configuration installed C Low vacuum Water y in the chamber C ESEM Water y HIGH VACUUM Chamber pressure e 60 00 Fa l This is the conventional operating mode associated with all scanning electron microscopes The high vacuum condition is common throughout the column and specimen chamber The ETD or any optional HiVac detectors can be used but no gaseous detectors will operate LOW VACUUM AND ESEM MODES In either of these modes the column sections are under higher vacuum than the specimen chamber where pressure ranges from 0 08 to 20 Torr 10 to 2670 Pa Which of these is used depends on the detector installed The Low Vacuum mode is meant to be used with the Large Field Detector LFD The ESEM mode is meant to be used with the GSED or GBSD The system automatically detects the gaseous
274. ule The pattern is allocated a number relative to that shape and is displaye d in the pattern list When the pattern selector displays a blue shape that shape can be drawn in the selected quad with the small cross cursor Gas Injection Overview Details In Gas Type Heat Flow OP dep Cold Closec OWE c Cold Closec e The Progress indicator displays the Overall Current Progress over time of the active patterning e The Select All Button selects all patterns in the list THE GAS INJECTION MODULE End Point Monitor Graphs Options Scaling Overview Tab e In check box In checked Out Unchecked e Gas Type check box the gas assignment to the port e Heat status Cold Hot e Flow status Closed Open The Details Tab displays the characteristics of the active Gas Injector which can be changed by entering the details to configure the injector Status Specimen Current 302 pA FIGURE 4 17 TABBED GAS INJECTOR DETAILS lon Beam Current 0 40 p Chamber Pressure 414E 5 Pa A h Gas Injection Overview Details Selected GIS Pt v Retracted DT End Paint Monitor Graphs Options Scaling 0 5 End Point monitor Graphs Options Scaling Active Lived ActveLrved MI 000800080 Mame Line Color Line Type DiashDot Visible es Thor Tira RR Add To History Ed End Point Monitor Graphs Options sc
275. used to temporally change the emission current either to enhance the brightness of the gun higher emission current or to reduce filament heating for longer filament lifetime at long term acquisitions such as EDX mapping Alignments hi Source Control Finish Instructions source control page step 1 of 1 Filament voltage 1 90 CA Ep W Autobias on W Limit voltage Bias 150 mn y M OK Filament current 2 49 A Emission 103 6 ui Filament life time 55 26 h Source tilt ie ADE Contrast Brightness Alignments 1 Source Control DESCRIPTION OF CONTROL ELEMENTS Filament Voltage control regulates the voltage feed to the filament to create saturation Caution Care should be taken not to oversaturate the tungsten filament If the image loses brightness as the voltage is increased then the Source Tilt 2D control may need correction until maximum brightness and stable filament current have been achieved Limit Voltage check box limits the currently set Filament voltage value when checked Bias control regulates the emission current In the Autobias On mode checked the adjuster shows the relevant Auto setting and it IS greyed Autobias On check box allows the user to set the Bias value shown atthe right side of the adjuster when not checked Filament Current shows current A used for the filament heating If this is zero at non zero filament voltage the filament may be
276. ut the instrument before servicing MISCELLANEOUS CORDS CABLES Check cables periodically for possible wear cracks or breaks If any defects are found replace with FEI approved cables Never connect or disconnect any cables or connections while power is applied to the system or components Doing so is potentially hazardous to service personnel and could cause damage to the system or its components AC cables Plug the unit AC cables only into an approved power source Only use power cables that are in good condition If replaced use AC cables rated to at least the rating ofthe replaced AC cable The system main power should only be plugged into the approved power receptacle as identified by system documentation Each power cable is labelled with a destination and origin and is colour coded 1 10 27621 Safety and Handling Electronics Voltages TABLE 1 5 AC CABLE CODING North American Colour Intemational Colo ur Meaning Solid Green Green with Yellow Stripe COLUMN POWER SUPPLIES Wait 30 seconds to ensure all high voltage points are at ground potential before servicing equipment The on electron power supplies take up to 30 seconds for high voltage to decay to 0 volts after being turned off TEST LEADS Only trained service persons should perform service on the system Inspect test leads for wear cracks and breaks before use Replace any test leads showing such defects with test leads meeting the
277. utton found on the front control panel of the microscope Switch on the PC The operating system a Window 2000 loads and displays the appropriate icons on the monitor desktop Click on the xT microscope Server icon to start the software Wait until its dialogue is fully functional All LEDs needs to be green Click on the Start button Click on the Start Ul button to start the xT microscope Control software The main window appears behind the XTUI Log On dialogue Enter your Username and Password If the IGP is not running go to alignment page 100 ION Source control see Chapter 6 Alignments and start the IGP Click the Beam On button of the electron beam when operating electron beam only or Wake Up button to start ion beam also The system automatically switches on the appropriate beams this is indicated by an increase in the Source progress bar in the column module when the ion beam is selected starts the LMIS and heats the GlSes Operation Select a quad a detector abeam and beam parameters Switch on the beam and unpause the quad Note 2 Once you have your FEI Microscope user or Supervisor account set up via FEI User management software by FEI Account Administrator see Chapter 4 User Interface you can use your name and password to access both Windows 2000 system and the xT microscope Server and Control software Take note of the case sensitive passwords necessary at Win 2000 and xT m
278. voir heated The opening closing of GIS valves is done automatically during patterning The GIS check boxes can be selected manually but note that overlap and dwell should be set carefully with particular gasses in mind to avoid disappointing results Serial milling or deposition will always begin with the first pattern defined in the current image window and continue through patterns 2 3 etc You can select a pattern with the arrow tool change the appropriate GIS valve status from closed to open and thereby change the pattern from one to be milled to one to be deposited In Serial mode a series of patterns could even be a combination of some to be milled and some to be deposited but in general this is not recommended Remaining Time 0 07 52 The Progress module displays the remaining pattern time ina Overall Progress WEE progress window Current Progress BE MAGNIFICATION AND PATTERNS If the magnification is too high milling certain patterns can use too much memory If it is too low the pattern corners become round and the edges become jagged A good rule of thumb isto pick a magnification where your pattern fills 35 50 of the screen 27621 538 Operations Patteming PATTERNING TOOLS Atthe top of the Patterning Page is a selection of tools icons for creating moving sizing and deleting patterns e Pattern Control Cursor yellow backround when active grey K when inactive e Pattern selector Clicki
279. w point Aligning the stage axes with Rescaling to nonstandard directly offset from the the specimen X Y orientation units on dies or RAM existing location to correct for any skew arrays correcting for any skew Change in Scale None Scales the axes together X can be scaled differentl y from Y Change in None Rotates both axes with a X and Y orientations can be Orientation fixed 90 angle between axes different 7 18 27621 Wheel Up amp Down fl Wheel Press Stages Stage Related Functions BEAM SHIFT When you select a position on screen with the cursor and press Shift the left mouse button Beam Shift controls the cursor Hand that allows the image area to be moved in any direction Releasing the mouse button will leave the image area repositioned The stage does not move during beam shift When the limit of beam shift has been reached either Beam Shift Reset or Zero Beam Shift will need to be clicked on In this case any stage movement will automatically zero the beam shift and correct it with mechanical movement so that Beam Shift cannot in reality run to the limit of movement Beam Shift Reset Use this function to begin the Beam Shift Reset procedure to zero beam shift and move the feature to the center of the field of view with the stage Zero Beam Shift When beam shift has reached maximum limits choose Zero Beam Shift to restore X and Y beam shifts to zero values The computer beeps when maximum li
280. when refilling the liquid nitrogen if necessary OTHER GASSES Auxiliary Gas Inlet The Quanta microscope is configured with an auxiliary gas inlet If the customer decides to use this inlet FEI then advises the use of inert non hazardous non flammable non corrosive and non reactive gasses which are not decomposed by the electron beam or the X rays generated thereby If gasses other than inert ones are used FEI COMPANY expressly denies any responsibility and will not be held liable for any damage or risks resulting from the improper use of the gas inlet FEI then advises that the customer perform a complete H amp S health amp safety risk evaluation with special emphasis on toxicity emission to the environment etc keeping in mind the reactivity with pump oils and several types of metals polymers and greases used within the vacuum chamber the use of high voltages the generation of X rays and charged particles electrons which can lead to decomposition of gases the impact of heating stage utilization on particular substances and local permits Caution Maximum overpressures for the auxiliary gas inlet and the nitrogen inlet are each 0 1 atm above atmospheric pressure 2762 1 ie MENTIONED CHEMICALS List of MSDS for the chemicals trade names 2 MSDS OF THE ABOVE MOLYKOTE BR 2 Plus 01 FOMBLIN RT 15 NITROGEN 10 LIQUID 01 engineer user must be aware that the information in an MSDS can ULTRAGRADE 19
281. wicon selecting tool N cee mr e Lineicon line creating tool e Circleicon circle creating tool Fi A Mark e Rectangle icon rectangle creating tool e Angleicon angle creating tool e Texticon text creating tool e Mark icon mark creating tool e Delete button deletes only item s selected Delete All button deletes all on screen items created via appropriate module Properties List whether to gain statistical information or to change a property of a measurement or annotation you can enter the property list for the graphic or text you have selected Some properties have a dropdown list so a choice can be made which updates on screen for the selected graphic Numerical values can be entered in text editors with the use of text cursor in the edit area MEASUREMENT MODULE Measurement can be used to gain statistical information about a milled area by overlaying the shape with a measurement graphic to outline sizes within the area By changing the magnification these graphic elements resizes accordingly TABLE 5 24 USING MEASUREMENT FUNCTIONS Step Action Click on the Measurement graphic symbol suitable for the milled item you need to gain measurements from i e rectangle for a standard rectangular patterned milled area Bring the cursor to the quad or screen area and draw the graphic over the milled area to represent the milled shape This can be done by dragging the cursor from the top left corner to the right lower cor
282. y decrease the magnification 2x The star key rounds off the magnification value e g 10 063x becomes 10 000x e Mouse wheel control Coarse fine control can be operated by holding the Ctrl Shift keyboard key and moving the mouse wheel up down to increase decrease the magnification Fi 27621 Magnification Operations Optimising an Image e Selected Area Zooming In Out is a quick way of Zooming in or out on an area of interest The function is activated by left mouse clicking on the image and dragging to make a dotted box over the area of interest The cursor changes to a magnifying glass with sign in the bottom right corner of the selected area Once the left mouse button is released the selected area increases in magnification to fill the quad or full screen The longest side of the selected area drawn has priority for the end magnification Using Shift the left mouse button reverses the zoom effect by reducing the quad or full screen area down to fit the selected area drawn the longest side having priority for the end magnification In this case the cursor changes to a magnifying glass with a sign in the bottom right corner in the dragged area The escape button cancels the operation at any time SCAN SPEED AND FILTERING To produce the highest quality image at low beam currents use slow scan rates large dwell time If an image is noisy with No Filtering selected decreasing the scan speed improves th
283. y SL au0u dnoiBBuploed ges SSEID GINDM 041VHASIH4AH NADOHIIN 2264 Jequinu NN OVOI VLVI ou jue Nod suey uou dnou6bbulyoeg co o ssel9 GINDM 041VHASIH4AH NADOHIIN Z264 J49qUINU NN OWI 1161803 pes A9uafiewa Modsueil uou dnoibburyoedg co o ssel9 GINDM 041VHASIH4AH NADOHIIN 2264 Jequinu NN dIyW HOV UONEUMOJUuI JIOASUBA pl Janddns 0 laniep uine1 osje JAPISUOD uole siBa euomeu pue e20 ULIM a9Uep Jo99e ul pue paaAoidde ue uo padunp Jo uonejfeisui sado d e ul pateiauloul aq 0 aney sbuibeyoed Adw paueaj9un Jo penau JOPUIELUDY SUOI eJapISUOD esodsig eL auou 191X0 099 UO SYIBUISy 6lgesoen jou yo91x0 093 SIJESOEN jou M Od 607 9 qe89e jou 9 qea9e jou 9 qe99e jou 9 qe89e jou 101983 29111949018 oe puewap uaBAxo jeoiways jesibojoig puew p uabAxo esiusyo s pueuiep uabAxo je2iboloig UOI EULOJU e9160 091X0 093 ZL ajgesses jou yoIxo Je juawese dsip Aq 199119 BuneixAydse ue aney Aew seb siy Buneiaal seb Buloejdsip uaBAxXO swojdwAs syew y UOISIA 100d ured ssaupe Bulzaa41 Jo aseo ul e90 se y seusnoIsuo9un easneu SSBUIZZID SSEUISMOJP eyoepesy esnes Aew suoneuaouoo able UONeleuul Jaye paquosqe aq Aew eouejsqns ay e19usb swojdwAs OU S9INPOIA e90 uonefeuul aiqeoijdde jon jesoueb aiqeoijdde jon eoo uonsebu aiqeoijdde jon jesoueb suing ured ssaupe Bulzaa41 Jo aseo ul
284. y the system and apply tag power is removed Wehnelt cylinder Mains power cord and plug Disconnect cord Verify the system and apply tag power is removed Peltier stage Mains power cord and plug or Disconnect cord Verify the system remove module from system and apply tag power is removed Hot stage Mains power cord and plug or Disconnect cord Verify the system remove module from system and apply tag power is removed 7 lonizing Electron Column Mains power cord and plug Disconnect cord Verify the system Radiation and apply tag power is removed Inside Chamber Mains power cord and plug Disconnect cord Verify the system and apply tag power is removed 8 Non Infra red light on Mains power cord and plug or Disconnect cord Verify the system lonizing CCD camera remove module from system and apply tag power is removed 4 Vacuum 5 Mechanical 6 Thermal Radiation 9 Stored Charged capacitors Mains power cord and plug or Disconnect cord Volt Meter Test Energy remove module from system and apply tag ri 27621 Safety and Handling Electronics Voltages Electronics Voltages According to the American National Standards Institute ANSI guidelines a shock hazard exists when voltage levels are present which are 30 V rms or 42 4 V peak Use extreme caution whenever a shock hazard is present DANGER FEI components may have potentially lethal voltages up to 30 kV As a good safety precaution always expect a
285. zed body after installation and or maintenance or service actions Check the local regulations Otherwise a check by FEI service personnel is advised using e g the Victoreen 190 radiation detector X RAY SAFETY WARNING After dismantling or assembling the column it is mandatory to check for X Ray leakage The X Ray leak may never exceed 1 uSv h at 10 cm distance Measurements must be made by qualified personnel As a measuring Instrument use the Victoreen 190 X ray meter with detector RP1 and the Basics of Radiation Protection manual order number 4822 870 10412 obtainable via the Helpdesk WARNING Under no circumstances should the HV be switched on when using vacuum test flanges RADIATION MEASUREMENT e The Victoreen 190 RP1 has been chosen as the X ray survey meter e Any problems should be communicated to the Radiation Safety Officer e f aproblem is caused by a standard FEl Philips part use the principle of ALARA As Low As Reasonable Achievable to reach a solution e It is important not to expose the user including yourself to unnecessary radiation e All service engineers must use the X ray radiation survey equipment provided to them The equipment must have been calibrated according to the equipment calibration procedure Safety and Handling Chemicals Chemicals WARNING Always check the safety warnings before using any chemicals Be aware of hazards and how to avoid them see the relevant Mater

FEI Quanta 200 3D

Contents

Download Pdf Manuals

Related Search

Related Contents