Ion Pumps Control Unit
Contents
1. Figure 4 Controller Outline lon Pumps Control Unit User Manual 87 900 128 01 D 29 58 2 Technical Information Pump Controller Description Remote 1 0 Connector Pinout REMOTE GUN CURRENT STATUS N O REMOTE TARGET CURRENT STATUS N O RESERVED REMOTE GUN ON OFF STATUS N O REMOTE TARGET ON OFF STATUS N O REMOTE FAULT STATUS N O REMOTE FAULT STATUS N C REMOTE GUN ON OFF COMMAND REMOTE TARGET ON OFF COMMAND RESERVED REMOTE GUN ANALOG RECORD OUTPUT 0 5V REMOTE TARGET ANALOG RECORD OUTPUT 0 5V RESERVED REMOTE GUN CURRENT STATUS COM REMOTE TARGET CURRENT STATUS COM RESERVED REMOTE GUN ON OFF STATUS COM REMOTE TARGET ON OFF STATUS COM RESERVED REMOTE FAULT STATUS COM REMOTE GUN ON OFF COMMAND REF GND REMOTE TARGET ON OFF COMMAND REF GND RESERVED RECORD OUTPUT GROUND REFERENCE GND RECORD OUTPUT VOLTAGE REFERENCE 5 Figure 5 Remote 1 0 Pinout Rear Panel D Shell Female 25P In case there is the need to use the Remote Interlock function or to switch On and Off the HV on the 2 pumps by Remote remove the two jumpers and follow the indications given in the above input commands connection pin out drawing 30 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Tab 2 Remote 1 0 connector signals 25 Pin No IN OUT Name Description 1 14 OUT Remote GUN current status N O Closed when lout set point 2mA Open when lout set point2. RTS Request To Send This line informs the Modem IPCU is ready to exchange data RI Ring Indicator Goes active when Modem detects a ringing signal from the PSTN BS Not used on the Controller RTS CTS are jumpered together on the Controller connector and DTR is jumpered to DSR DCD on IPCU connector The DTE sees the IPCU like a Standard MODEM lon Pump Control Unit Operator Host Serial Communication The Controller Report and Operator Host Command are ASCII strings CR OD hexadecimal 13 decimal terminated Default Communication Parameters are 9600 bits sec no parity 8 bits data 1 stop bit Usually the human interface of the controller is a terminal emulator Windows HyperTerminal communication program for example running on Personal Computer lon Pumps Control Unit User Manual 87 900 128 01 D 37 58 2 Technical Information 38 58 Functions Software program on PC or PLC can use the same ASCII protocol described below for human interface for doing automatic control and monitoring of the controller Every 100 min to 1000 max msec if the controller is in Report mode default all the 2 Report strings made of 30 characters each corresponding to the 2 HV channels are sent by the IPCU The string is made of different length depending on the report tipe selected for each HV channel independently by the channel status A transmission from the external PC turns the IPCU to the Command Mode
3. jijiji HV Channel Current in nA or uA VVVV HV Channel Voltage in V lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 fff Hexadecimal representation of HV Channel Faults eeee Hexadecimal representation of HV Channel Events ppppp HV Channel Power in mW yyyy 16 Bits hexadecimal Current ZZZ 10 Bits hexadecimal Voltage Www 12 Bits hexadecimal Control Output Example RT 2 Enter HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 HV1 OFF OuA OV F 0000 E 0000 OmW i 0003 v 000 c D80 HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 User Operator Report Type 4 and User Technician Report Type 5 Report Format c www in hhhh dac dd lt CR gt Report Fields HVc HV Channel c 1 or 2 SSSSS HV Channel Status OFF_ ON__ FAULT Vill HV Channel Current in nA or uA VVVV HV Channel Voltage in V fff hexadecimal representation of HV Channel Faults eeee hexadecimal representation of HV Channel Events lon Pumps Control Unit User Manual 87 900 128 01 D 49 58 2 Technical Information Functions ppppp HV Channel Power in mW yyyy 16 Bits hexadecimal Current ZZZ 10 Bits hexadecimal Voltage WWW 12 Bits hexadecimal Control Output hhhh 16 Bits hexadecimal Digital Debounced Inputs dd 8 Bits hexadecimal DAC Output Example RT 4 Enter HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 HV1 OFF
4. Y 14 for channel 1 15 for channel 2 xxxxxx Current Set Point value in nA from 0 to 100000000 Tab 13 Set Point Current Threshold reading Y 14 for channel 1 lon Pumps Control Unit User Manual 87 900 128 01 D 41 58 2 Technical Information Functions Tab 14 Report Setting RAEE Se IE ENIM X type 0 5 see detailed description on About Report chapter Y time rate 0 255 based on 100 msec tick default is 3 For time rate 0 to stop continuous reporting mode and start report on request see Request Report Command Z mode O 4 where 0 only Remarks no channel reports 1 reports only channel 1 2 reports only channel 2 4 reports all channels 42 58 lon Pumps Control Unit User Manual 87 900 128 01 D lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Tab 17 Enable Disable Receiving Input ECO Access Level 1 Required ne BS EME a a WR Write 29 parameter number A _ 0 for No input ECO 1 for input EGO default value Tab 18 Enable Disable Remark Line Reporting Access Level 1 Required ne ULL M A LUNO NE Y 30 parameter number 0 for No remark lines except the first three 1 for Remark Line default value Tab 19 Enable Disable Value in Floating Point Report Mode Access Level 1 Required WhIspace Y space X Enter 0 for Standard Report Mode default value 1 for Floating Point Report Mode 43 58
5. To go back to the Report Mode complete the command string with CR OxOD or ESC Ox1B Every single received character is Echoed back in order to allow a control by the operator Controller Report Mode Tab 5 HVn status fault start protect current voltage gn aa ee NU IU NN e 22 NR EE A EE E status OFF FAULT ON Seharactes co qe 1 character SPACE COMM cU CO mm uw wicca Gene ee M 205 Rcs E ue ore SPACE nn Seer Trer eT ae TTT UN TENEO nm cass NN ssn mm a MN P E EMEN voltage o D 599V Gcharctes CR E JEUNE 0x0D i 1 character CR lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Controller Commands Mode Tab 6 HV Channel On Off Setting Tab 7 HV Channel Start Protect Mode Setting lon Pumps Control Unit User Manual 87 900 128 01 D 39 58 2 Technical Information Functions Tab 9 Bit positional Fault table when HV ON Err Description Front Panel LED 0001 Cable Interlock
6. for the HV Channel Current Voltage and Power both in normal or scientific notation and the continuous average measured values in the hexadecimal format User Operator Report Type 0 and User Technician Report Type 1 Report Fields HVc HV Channel c 1 or 2 SSSSS HV Channel Status OFF__ ON__ FAULT Vill HV Channel Current in xA X nA or uA nano Ampere or micro Ampere VVVV HV Channel Voltage in V Volts ffff Hexadecimal representation of HV Channel Faults eeee Hexadecimal representation of HV Channel Events lon Pumps Control Unit User Manual 87 900 128 01 D 47 58 2 Technical Information 48 58 Functions Example KT O Enter HV2 OFF OuA OV F 20000 E 0000 HV1 OFF OuA OV F 20000 E 0000 HV2 OFF OuA OV F 20000 E 0000 User Operator Report Type 2 and User Technician Report Type 3 Report Format c www lt CR gt Report Fields HVc HV Channel c 1 or 2 LOCAL_MODE to inform that a character is received but it is not possible to execute commands coming from the serial line When a command received is formally correct but can no be executed because the status of the unit does not allow this for instance a command A011 is sent but the cable interlock is not OK the unit sends COMMAND_UNEXECUTABLE to inform that the request is not coherent with the status of the unit SSSSS HV Channel Status OFF_ ON__ FAULT
7. o 7 o L gt 0 00 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 00E 01 lout A Figure 6 lon Pumps Control Unit User Manual 87 900 128 01 D 33 58 2 Technical Information lon Pump Controller Description If the pump connected to the output is a 35l s SEM the relation between Vrec out and pressure is Pressure Vrec out 1 000E 03 1 000E 04 1 000E 05 1 000E 06 1 000E 07 1 000E 08 0 0 2 5 Vrec out V Figure 7 NOTE The current reading using the analog recorder output or serial line is fixed to the max current 30 mA for GUN 50 mA for TARGET untill the HV voltage cross the 1 5 KV 34 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Output Curves Figure 8 At Pin 25 a reference voltage corresponding to the 2 recorder outputs full scale value b V 5 96 is given This reference allows getting a more precise reading from the 2 recorder outputs It allows the scaling of the actual reading to the real value of the full scale Serial Operation The Controller works on RS232 DCE Mode like a Modem with DB9 FEMALE connector The Host Terminal Personal Computer works always on RS232 DTE Mode like a PC with DB9 MALE connector The Cable Interconnections are 1 to 1 signals DB9 Male Female Standard CABLE lon Pumps Control Unit User Manual 87 900 128 01 D 35 58 2 Technical Information Pump Controller Description Controller RS232 Stand
8. 2 Technical Information 44 58 Functions About Report The continuous report sent by the IPCU protocol communication is structured as follow At each main power on start up six remarking lines are sent The first line sent is the firmware release for instance REL 20051117 ICPU The second line is the notification that the EEPROM s parameter are wrote into RAM EVT LOAD_EEPROM_PARAMETERS_INTO_RAM The third line is the notification that the calibration of the Analog to Digital Convert used for the measurement of output high voltage and current are done EVT ADC_CALIBRATION The fourth line is reporting that the internal I O BUS are initialized EVT IO BUS INIT The fifth line is the notification that a main power on cold system startup reset is happened EVT COLD RESET SYSTEM STARTUP The sixth and last line reports the number n of Power On Cold Reset happened up to that moment POR n These six lines are sent also if the EEPROM s parameter n 30 are set to 0 Disable Remark Lines After these six lines the normal report sequence starts accordingly to the report type chosen notifying the user about the values of voltage current and power faults and events status for each channel lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 When an ion pump discharge happens the unit performs a warm system start reset automatically bringing to 0
9. 2mA 2 15 OUT Remote TARGET current status Closed when lout N O lt lset point 2mA Open when lout gt Iset point 2mA 4 17 OUT Remote GUN status N O Open HV off Closed HV on 5 18 OUT Remote TARGET status N O Open HV off Closed HV on 6 20 OUT Remote FAULT status N O Open FAIL ee Closed UR 7 20 OUT Remote FAULT status N C Open OK Closed FAIL 8 21 IN Remote GUN ON OFF command Open OFF Closed ON 9 22 IN Remote TARGET ON OFF Open OFF command Closed ON 11 24 OUT Remote GUN current analog 0 to 5 volt see GND record o 0 below o 12 24 OUT Remote TARGET current analog 0 to 5 volt see GND record below lon Pumps Control Unit User Manual 87 900 128 01 D 31 58 2 Technical Information Pump Controller Description Input Commands Connection Input signals Optically Insulated Insulated 24 Vdc 10 50 supply for input signal Internally generated Output Signals Connection Relay outputs Max voltage 24 V Max current 200 mA Min current 10 pA Bouncing Time NO21msec NC 3msec 32 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 lon Pump Controller Description Analog Recorder Outputs The analog recorder outputs are two indipendent outputs for each channel The voltage is related to the log10 of the current absorbed by the pump The exact formula is Vrec out 1 35 logl1O Iout 6 77 Vrec out Volt lout A Vrec out vs lout c 2
10. Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200
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12. 4 seconds the Local Remote switch was moved with HV ON flashes every 4 seconds over temperature inside unit 8 flashes every 4 seconds overcurrent in Protect 8 mA for 40W channel and 16 mA for 80W channel 9 flashes every 4 seconds HV Under voltage In Local Remote I O mode the Reset of the Fault condition is accomplished by switching to Off 0 the front panel switch of the corresponding channel In Serial mode the Reset of the Fault condition is accomplished by sending the FOn command by the computer lon Pumps Control Unit User Manual 87 900 128 01 D 21 58 1 Installation procedure 22 58 Messages If one of the following conditions happens while the HV of the channel is On the output of the channel is immediately set to Off the LED on the front panel indicates the corresponding Fault condition and the Fault information is sent to the Serial output Auto retries function If an under voltage fail occur for instance on GUN while both channels were on the unit do Distinguish between a real low voltage and thermal switch TS intervention Keep the Target ON GUN switched off no fail condition activated fault relay remains open current output recorder goes to 5 V Start time out cont 80 min If the TS is restorted before the time out the gun goes on agin and time out count resetted If the TS is not restorted after the time out the IPCU goes into fail and both GUN and TARGET are o
13. Control Unit User Manual 87 900 128 01 D lon Pumps Control Unit User Manual E e o e e 0 ee 2 0 Technical Information e e e e M lon Pump Controller Description 27 Controller Specifications 27 Remote 1 0 Connector Pinout30 Input Commands Connection 32 Output Signals Connection 32 Analog Recorder Outputs 33 Serial Operation 35 Controller RS232 Standard Serial Pin outs DB9 Female Connector 36 Original Instructions UE Agilent Technologies 25 58 2 Technical Information 26 58 PIN Functions 3 7 lon Pump Control Unit Operator Host Serial Communication 3 7 Controller Report Mode 38 Controller Commands Mode 39 About Report 44 Enable Disable Remark Lines 45 Continuous and NON Continuous Report Mode 45 Enable Disable Input ECO characters 46 About Commands 46 Report TYPE 0 6 47 User Operator Report Type 0 and User Technician Report Type 1 47 User Operator Report Type 2 and User Technician Report Type 3 48 User Operator Report Type 4 and User Technician Report Type 5 49 Old IPCU Releases Compatibility Report Type 6 50 Floating Point Notation 51 Cleaning 52 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 lon Pump Controller Description The Ion Pump controller is composed of a number of printed circuit boards board Power Supply it converts the Line Voltage to the 24 Vdc that is used to generate the HV 1 board Auxi
14. care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core praduct e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a R must be received within 15 business days Ship to the loca
15. data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met lon Pumps Control Unit User Manual 87 900 128 01 D lon Pumps Control Unit lon Pumps Control Unit wm mmt Wii lon Pumps Control Unit User Manual 87 900 128 01 D 3 58 lon Pumps Control Unit 4 58 lon Pumps Control Unit User Manual 87 900 128 01 D Contents Contents 1 Installation procedure 7 General Information 8 Controller description 9 Storage 9 Preparation for installation 10 Installation 12 Use 13 Usage 17 Operating modes 18 Error Messages 21 Disposal 23 2 Technical Information 25 lon Pump Controller Description 27 PIN Functions 37 lon Pumps Control Unit User Manual 87 900 128 01 D 5 58 Contents 6 58 lon Pumps Control Unit User Manual 87 900 128 01 D lon Pumps Control Unit User Manual e0 ee Installation procedure General Information 8 Controller description 9 Storage 9 Preparation for installation 10 Installation 12 Use 13 lon Pumps C U Front Panel Controls and Indicators13 lon Pumps C U Rear Panel 16 Usage 17 Operating modes 18 Power Line su
16. on the use of the controller For details refer to the Technical Information paragraph When the controller is plugged to the Power Line and the Line Switch on the rear panel is ON 1 it is able to operate with its full set of features 2independent HV channels 5000 Vdc maximum output Voltage 40 W maximum output Power for channel 1 80 W maximum output Power for channel 2 80 mA maximum output current short circuit condition for gun 50 mA maximum output current short circuit condition for target LOCAL REMOTE I O SERIAL operating mode SIART PROTECT operation lon Pumps Control Unit User Manual 87 900 128 01 D 17 58 1 Installation procedure modes Operating modes 18 58 Power Line supply LOCAL REMOTE 1 0 Operation The 2 HV switches on the front panel and the 2 HV On Off inputs on the DB25 Remote connector on the rear panel are functionally in series HV On Off gun by front panel Connect together pin 8 and pin 21 of the remote I O connector and move the gun switch on the front panel HV On Off target by front panel Connect together pin 9 and pin 22 of the Remote I O connector and move the gun switch on the front panel The correspondent HV cable Interlocks must be closed When the HV is ON the corresponding HV LED on the front panel will be ON WARNING Auto start function ON In case of power loss with GUN and or TARGET ON at next power on the unit will swi
17. see paragraph Technical Information for details 6 SERIAL LOCAL REM It allows to select the operating mode I 0 SWITCH SERIAL all the commands are given through the serial line LOCAL REM 1 0 all the commands are given through the unit front panel or through the 25 pin REMOTE connector on the rear panel lon Pumps Control Unit User Manual 87 900 128 01 D 15 58 1 Installation procedure lon Pumps C U Rear Panel The controller rear panel controls and connections are shown in the following figure For detailed information about the connections see the appendix Technical Information Hv OUTPUT LINE FUSE INPUT F1 T4AH250V GUN AN TARGET QE a wN y a f 1 i i j i CABLE INTERLOCK GUN TARGET fu o 1 A D 7 F2 T4AH250V AN AN UL N Y REMOTE 1 0 Figure 3 lon Pumps C U Rear Panel 16 58 lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 REF SIGNAL DESCRIPTION 1 GUN Connector HV Connector for Cable to GUN Pump 2 TARGET Connector HY Connector for Cable to TARGET Pump LINE INPUT Module containing the Line Input cable plug and the Line Switch 4 FUSE Protection Fuse holder 2 fuses 5 SERIAL Connector DB3 connector for the Serial cable 6 REMOTE Connector DB25 connector for the REMOTE 1 0 connections 7 GUN Cable Interlock 8 TARGET Cable Interlock This paragraph gives a general information
18. EALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Techn
19. OuA OV F 0000 E 0000 OmW i 0003 v 000 c D80 d 7407 r 00 HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 HV1 OFF OuA OV F 0000 E 0000 OmW i 0003 v 000 c D80 d 7407 r 00 HV2 OFF OuA OV F 0000 E 0000 OmW i 0001 v 000 c D80 d 7407 r 00 Old IPCU Releases Compatibility Report Type 6 Report Fields HVc HV Channel c 1 or 2 50 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Floating Point Notation The floating point notation follows the ANSI IEEE Standard 754 1985 for Binary Floating Point Arithmetic Example AL 1 11111111 Enter to grant access level 1 1 wr 31 1 Enter set parameter n 31 to 1 RT 0 select report type 0 HV2 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HVI OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HV2 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HVI OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HV2 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HVI OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HV2 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HV1 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 HV2 OFF 0 0E 9A 0 0E 0V F 0000 E 0000 lon Pumps Control Unit User Manual 87 900 128 01 D 51 58 2 Technical Information 52 58 Functions Cleaning For safety reasons before cleaning the controller 1 Turn the controller off 2 disconnect the controller power plug from the electrical outlet J disconnect all cables 4 If the exterior of the controller becomes dirty use a dry soft cloth The internal cleaning must b
20. V the HV to stop the discharge then it sends again the first five remarking lines with the fifth changed to EVT WARM_RESET_SYSTEM_RESTART to inform that a warm reset system restart is happened and the HV output that was in the ON state before the discharge is automatically restarted After these five lines the normal report sequence starts accordingly to the report type chosen Enable Disable Remark Lines These five lines are sent also if the EEPROM s parameter n 30 are set to 0 Disable Remark Lines If the EEPROM s parameter n 30 is set to 1 all the remark lines the lines that begin with the symbol are sent For EEPROM s parameter n 30 0 all the remark lines are NOT sent except the first six lines at the main power on reset cold reset and the first five lines after an ion pump discharge reset warm reset sent anyway Continuous and NON Continuous Report Mode IPCU is able to send report only on request To do this it is necessary to set the report mode with the time rate 0 After the enter the continuous report mode stops immediately According to the report type and mode the unit sends one instantaneous report each time a Request Report RR command is received lon Pumps Control Unit User Manual 87 900 128 01 D 45 58 2 Technical Information Functions To return in the continuous report mode it is necessary to send a new Report Setting RT comma
21. ard Serial Pin outs DB9 Female Connector DED CARRIER DETECT XD RECEIVE DATA DSR DATA SET RE RIS REQUEST TO SE CTS CLEAR TO SEN ED TXD_TRANSMIT DATA R_ DATA TERMINAL READY SG_SIGNAL G D Figure 9 RS232 D Shell Female 9P Tab 3 D Type 9 Pin FEMALE Connector D Type 9 Pin No Abbreviation Full Name Pin 3 TXD Transmit Data p ML LI 0 p e S Pin 6 DSR Data Set Ready Pin 5 SG Signal Ground Pin 1 DCD farrier Detect Pin 4 DTR Data Terminal Ready Pin 9 RI Ring Indicator AEREE PEPEE NA EAA Diu I S I uu LL A PEPEE 36 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 PIN Functions Tab 4 Abbreviation Full Name Function TXD Transmit Data DTE Serial Data Output TXD IPCU Serial Data Input RXD Receive Data DTE Serial Data Input RXD IPCU Serial Data Output CTS Clear to Send This line indicates that the Modem Controller is ready to exchange ne data DCD Data Carrier When the Modem IPCU detects a Carrier from the other end of Detect the line this line becomes active a DSR Data Set Ready This tells the DTE that the Modem IPCU is ready to establish a link DTR Data Terminal This is the opposite of DSR This tells the Modem Controller that Ready the DTE is ready to link
22. d the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e l frequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States
23. e done only by Agilent operator SSSSS HV Channel Status OFF__ ON__ FAULT ff 8 bits HEX representation of HV Channel Faults p 0 Start 1 Protect Vill HV Channel Current in xA XA nA or uA nano Ampere or micro Ampere VVVV HV Channel Voltage in V Volts Example RT 6 HV2 OFF 000 OuA OV HV1 OFF 000 OuA OV HV2 OFF 000 OuA OV HV1 OFF 000 OuA OV HV2 OFF 000 OuA OV lon Pumps Control Unit User Manual 87 900 128 01 D d Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same for
24. es office When unpacking the controller be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 10 58 lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 Preparation for installation Figure 1 Packing lon Pumps Control Unit User Manual 87 900 128 01 D 11 58 1 Installation procedure Installation 12 58 WARNING High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the power cable The Controller must be positioned so that free air can flow through the holes of the top and the side cover Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk The controller must be installed in a way that allows an easy interruption of the line voltage disconnection of the line plug or interruption on the rack general line switch During operation the following environmental conditions must be respected temperature from 5 C to 40 C relative humidity 0 95 non condensing To connect the controller to the pump use the specific cables supplied See the appendix Technical Information for detailed informati
25. ff On Remote connector on Rear Panel Fault output N C contact idle state The contact is Open in Fault condition relay Off The contact is Close in normal condition relay On HV 1 2 output N O contact idle state The contact is Open with HV in Off state relay Off The contact is Closed with HV in On state relay On HV 1 2 output current set point N O contact idle state The contact is Open with output current value is below the current set point relay Off The contact is Closed with output current value above the current set point relay On lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale lon Pumps Control Unit User Manual 87 900 128 01 D 23 58 1 Installation procedure Disposal 24 58 lon Pumps
26. ing data lon Pumps Control Unit User Manual 87 900 128 01 D 19 58 1 Installation procedure modes In the serial operation depending on the user environment the O S used must have real time capability See the Technical Information paragraph for details START PROTECT Operation The controller can operate in two modes Start and Protect In Start the 2 output channels can provide all the output power regardless of the pump condition up to the short circuit condition This operating mode must be used to start the pump at high pressure In Protect the controller limits the output current and switches off the HV when the current exceeds the threshold value 8 mA for 40 W channel and 16 mA for 80 W channel for more than 2 seconds The default mode is Start mode 20 58 lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 Error Messages On Front Panel During the controller operation if an error condition is detected the HV LEDs on the front panel will give the indication GUN TARGET LEDS ON Normal Operation HV ON Led GUN TARGET flashing error condition 1 flash every 4 seconds Interlock HV cable 2 flashes every 4 seconds remote Interlock 3 flashes every 4 seconds HV Over voltage This Fault doesn t switch off the HV 4 flashes every 4 seconds error inside ADC 5 flashes every 4 seconds overcurrent on HV short circuit 6 flashes every
27. ion Agilent s controller is an ion pumps controller It can drive up to 2 Ion Pumps simultaneously and independently The controller is designed to give the HV to the Ion Pumps when it is connected to the Mains supply Max Output Voltage 5000 Vdc See the paragraph Technical Informations for details Agilent s Ion Pump controller can be driven in Local Remote I O operating mode or in the Serial mode via the RS232 port The selection of the operating mode is done by means of the SERIAL LOCAL Remote I O switch on the controller front panel In the LOCAL REMOTE I O mode all the commands are given by the front panel or by the connections to the DB25 REMOTE connector on the rear panel The pump operating conditions data are anyway available on the serial connection In the SERIAL mode all the commands are given through the serial connection and all the pump operating conditions data are available on the serial connection Storage When transporting and storing the controller the following environmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing lon Pumps Control Unit User Manual 87 900 128 01 D 9 58 1 Installation procedure for installation Preparation for installation The controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sal
28. liary Power Supply it generates the and 12 Vdc for the analog circuitry the 5 Vdc for the digital circuitry 2 boards HV generation they generate the HV for the 2 output channels board CPU it contains all the digital circuitry and the microprocessor linternal fan OFF if for each channel the output current is 2 mA Controller Specifications Tab 1 Line Voltage 100 240 Vac 10 Frequency 50 60 Hz 5 Max Power 200 VA Operating conditions Internal use only Max Altitude 3000 m Max Line Voltage variation t 10 96 Installation category 1 Pollution degree 2 D lon Pumps Control Unit User Manual 87 900 128 01 D 27 58 28 58 Technical Information Pump Controller Description Output for the pumps Output Voltage each channel Output Current each channel Maximum Output Power GUN Maximum Output Power TARGET Current Recorder Output signal Compliance to Norms Safety Two T4AH250V Default value 5000 V 1 5 96 settable from 3000 to 5000 Vdc at steps of 50 V by Serial Line command 30 mA 10 for 40 W output 50 mA 10 96 for 80 W output 40 W 80 W 0 to 5 Vdc logarithmic proportional to 1 0e 8 to 1 0e 1 A 1 recorder output for each pump Minimum recorder input impedance 1MOhm Precision lt than 1 Current Measurement Resolution 10nA under 100uA 14A over 100uA 10 C to 40 C ee NENNEN 20 C to 70 C Radio Interfere
29. lon Pumps Control Unit Model 529 5001R001 User Manual 87 900 128 01 D 05 2011 NE Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 128 01 D Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms
30. m on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 o 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular
31. means that the unit is connected to the Power Line and the Line Switch on the rear panel is in ON I position 2 GUN ON OFF When in ON I position it switches On the HV to the GUN PUMP if the SWITCH controller is set for LOCAL REMOTE 1 0 operation and the external and HV Cable interlocks are closed 3 GUN LED It is On bold when the HV GUN PUMP is on and the voltage is over 1250 V 250 V hysteresys volt It is slow flashing 1 flash at second when the voltage on HV GUN PUMP is lower than 1250 V 250 V hysteresys volt It is fast flashing in case of Fault see paragraph Technical Information for details 4 TARGET ON OFF When in ON I position it switches On the HV to the TARGET PUMP if SWITCH the controller is set for LOCAL REMOTE I O operation and the external and HV Cable interlocks are closed se D TARGET LED It is On bold when the HV TARGET PUMP is on and the voltage is over 1250 V 250 V hysteresys It is slow flashing 1 flash at second when the voltage on HV TARGET PUMP is lower than 1250 V 250 V hysteresys It is fast flashing in case of Fault
32. nce EN55011 Class A Group 1 EN61000 3 2 Flickers EN61000 3 3 ESD EN61000 4 2 4 kV Contact 8kV AIR Burst Signal Harmonics EN61000 4 4 Vac EN61000 4 3 EN61000 4 5 EN61000 4 6 EN61000 4 11 Radiated RF Immunity Surge Conducted noise imm Line supply interruptions Compliance EN61010 1 1 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 lon Pump Controller Description NOTE All connecting cables for remote 1 0 and serial connections must be of the shielded type H BATTERY LIN FUS jl 5 Wr nE a T e N i ji o SS Y NI 2 7 dz s WRITS e je N F2 D av N
33. nd with time rate 0 After the enter the continuous report mode starts immediately Enable Disable Input ECO Characters By default the unit transmits the ECO of all characters received from the host If required It is possible to disable this feature See the command Enable Disable Receiving Input ECO to do this The ECO of input characters may be used to understand that the physical communication between the unit and host is good so disabling the ECO this feature is lost About Commands When the unit receives a command it transmits the plus symbol to confirm the command is executable If the command is not correct the unit transmits the minus symbol When the parameter of a command is out of range the unit sends PARAMETER ERROR The unit receives continuously input characters from host but they are hold only if the panel switch Local Remote Serial is on Serial If this switch is on Local Remote and a character is received the unit sends 46 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Report TYPE 0 6 The User Operator Reports Type 0 2 4 and 6 display the continuous average value for the HV Channel Current Voltage and Power both in normal or scientific notation and the instantaneous measured or control values in the hexadecimal format Technical Reports Type 1 3 and 5 report the instantaneous measured values
34. ologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High valtage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum ver temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please rea
35. on about the above mentioned and the other connections lon Pumps Control Unit User Manual 87 900 128 01 D Use Installation procedure 1 This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the appendix Technical Information Make all vacuum manifold and electrical connections and refer to the connected pump instruction manual prior to operating the controller WARNING To avoid injury to personnel and damage to the equipment if the pump is laying on a table make sure it is steady Never operate the pump if the pump inlet is not connected to the system or blanked off lon Pumps C U Front Panel Controls and Indicators The figure and the table of the following page illustrate the Controller front panel controls and indicators with relevant description and function Some controls and indicators change their function and meaning according to the position of HV ON OFF switch The table describes all function and meaning lon Pumps Control Unit User Manual 87 900 128 01 D 13 58 1 Installation procedure SERIAL LOCAL REM IIO Figure 2 lon Pumps C U Front Panel Controls and Indicators 14 58 lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 REF SIGNAL DESCRIPTION 1 MAINS ON LED When On it
36. pply 18 LOCAL REMOTE 1 0 Operation 18 SERIAL Operation 19 START PROTECT Operation 20 Error Messages 21 On Front Panel 21 Disposal 23 Original Instructions if Agilent Technologies 7 58 1 Installation procedure Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text 8 58 lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 Controller descript
37. tch on the HV previously on automatically Auto power on function With front panel switches in ON position and remote 1 0 jumpers the unit Will switch on both channels as soon as the mains is on lon Pumps Control Unit User Manual 87 900 128 01 D Installation procedure 1 If the connection between the IPCU and the pump is done by means of an HV Cable with Safety Interlock the cable must be connected to the pump F T and the small banana connector on the cable controller side must be inserted in the corresponding HV Cable Interlock plug on the unit rear panel in order to be able to switch on the HV If the connection is done with a single pole HV Cable without the Safety Interlock ensure that the jumper provided on the unit rear panel is inserted in the HV Cable Interlock plug SERIAL Operation The SERIAL is set in order to operate by connecting the controller to an external PC that uses the HYPER TERMINAL or equivalent program for example a proprietary user program running under Windows Operating System or other To operate in serial mode connect the serial port to the controller Serial connector on the rear panel run the Windows HYPER TERMINAL program on the PC with the following default settings COMI 9600 baud No parity data bits 1 stop bit This way of operation will allow to verify the functionality of the unit in the SERIAL operating mode give the commands and get all the operat
38. the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important
39. tion specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 rro Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable C1 Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair lupgrade Consignment Demo Calibration Evaluation Return for Credit 4 H
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41. when HV On 1 blink of 200 msevery4s 0002 Remote Interlock when HV On 2 blink of 200 ms every4s 0004 HV Over Voltage when HVOn 3blink of 200 ms every4s i 0008 Bad Current Offset starting HV On 4 blink of 200 ms every4s i 0010 HV Over Power when HVOn 5Sblinkof200msevery4s 0020 Panel Switch Moved when HV On 6 blink of 200 ms every4s I 0040 HV Over Temperature when HV On 7 blink of 200 ms every4s i 0080 HV Over Current Protect Enable 8 blink of 200 ms every4s 0100 HV Under Voltage when HV On 9blinkof200 msevery4s Tab 10 Bit positional Event table when HV ON or OFF Err Description Front Panel LED 0001 Cable Interlock when HV Off No blink 0002 Remote Interlock when HV Off Noblink 0004 HV Over Voltage when HVOn Noblink i 0008 Bad Current Offset when HV O Noblik 010 HV Over Power when HV On No blink 0020 Spare Nn SUNL deuce epee Sn 10080 HV Over Current Protect Disable Noblink l 0100 Current Below Threshold when HV On No blink _ I 0200 HV Under Voltage when HV On Noblinh Tab 11 Max Output Voltage setting HOnxxxx Enter where HO HV Channel Serial Command for Voltage Target n HV Channel number 1 or 2 xxxx Voltage Target min 3000V max 5000V in 50 V 40 58 lon Pumps Control Unit User Manual 87 900 128 01 D Technical Information 2 Tab 12 Set Point Current Threshold Setting Minimum Access Level Required 0
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