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User Manual MS200E - Physik Instrumente

1. Open the outer box Remove the foam cover Open the inner box Remove the foam cover 22 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 10 11 Since one strut of the transport lock runs below the base plate of the Hexapod the Hexapod cannot be set up level without the use of aiding tools Place two supports approx 12 mm in height at a distance of approx 20 mm from each other on the surface on which you want to place the Hexapod in order to keep the Hexapod from tilting over Hold the Hexapod by the transport lock and take it out of the foam insert Place the Hexapod including transport lock onto the prepared supports so that the lower strut of the transport lock is situated between the supports Compare the contents against the items covered by the contract and against the packing list If parts are incorrectly supplied or missing contact PI immediately Inspect the Hexapod for signs of damage If you notice signs of damage contact PI immediately Remove the transport lock If the Hexapod needs to be lifted for this purpose hold it by the base plate only a Use the Allen wrench to loosen the four M6x20 screws 1 with which both vertical struts are fastened b Remove both vertical struts and the loosened screws c Use the Allen wrench to loosen the M6x20 screw 2 that holds both struts together on the moving platform d Remove the loosened screw and the
2. Hexapod m Miz 180 4 pin m m m m m MDR 180 MDR 180 MDR 180 MOR 180 68 pin 68 pin 68 pin 68 pin Figure 12 Connection diagram of cable set with line driver boxes 1 Line driver box for data transmission cable controller side Line driver box for data transmission cable Hexapod side Short data transmission cable MDR68 to MDR68 1 1 3 m Long data transmission cable MDR68 to MDR68 1 1 Power supply cable for line driver box with M12 coupling M12 connector Do I KR Q ND Power supply cable for Hexapod with M12 coupling M12 connector gt For the length of the cables 4 5 and 6 and the item IDs of the components see Optional Accessories p 14 36 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PL WS 6 Start Up 6 Start Up In this Chapter General Notes On Start Up rrrrrrrnrrrnnnnnnnrrrnnrrnnnnnnnrrrnnnnrnnnnnnnnsrnnnnnnnnnnnnnssnnnnnnnnnssnnee 37 Starting Up the Hexapod System rrrnnrrrrrrrnnnnnvvrrrnnnnerrnrrnnnnnrnnnnnnnnsennrnnnsnsnnnnnnnnseennnnnn 38 6 1 General Notes on Start Up Risk of crushing by moving parts A There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts NOTICE Incorrect configuration of the Hexapod controller The configuration da
3. v The cable set is not connected to the Hexapod controller Tools and accessories Cable set C 887 A03 that belongs to the Hexapod system p 10 Connecting the C 887 A03 standard cable set to the Hexapod 1 Connect the data transmission cable to the MDR68 socket in the base plate of the Hexapod sab Press the latches together on both sides of the connector Insert the connector into the socket on the Hexapod Check that the connector correctly fits d Release the latches O o 2 Connect the 90 angled M12 coupling of the power supply cable to the 4 pin M12 panel plug in the base plate of the Hexapod Observe the mechanical coding of the coupling and panel plug Do not use force 32 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 7 2 Connecting the C 887 V02 Standard Cable Set for Vacuum Versions 84 aan Y 8 a x S O Sy st 2 71 28 A A D B Figure 10 Dimensions of the vacuum feedthrough for data transmission 4668 dimensions in mm B 4 holes 45x 6 for M3 countersunk screw H 824 Hexapod Microrobot MS200E Version 1 2 0 33 5 Installation P I Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories m Cable set C 887 V02 that belongs to the Hexapod system p 10 Suitable tools for installing the vacuum feedthrough Installing vacuum feedthroughs 1 Install
4. Figure 2 XYZ coordinate system and rotations to the rotation coordinates U V and W The coordinate system is depicted above the platform for better clarity Translation Translations are described in the spatially fixed XYZ coordinate system The translational axes meet at the origin of the XYZ coordinate system 0 0 0 For more information see the glossary p 59 Rotation Rotations take place around the rotational axes U V and W The rotational axes meet at the pivot point For more information on the pivot point see the glossary p 59 In contrast to the spatially fixed translational axes the rotational axes and thus the pivot point as well move along with the platform see also the example below for consecutive rotations A given rotation in space is calculated from the individual rotations in the sequence U gt V gt W Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description INFORMATION The dimensional drawing p 53 contains the following Alignment of the XYZ coordinate system Position of the pivot point after the reference move when the standard settings of the Hexapod controller are used Example Consecutive rotations INFORMATION For a clearer view the figures have been adapted as follows Round platform replaced by T shaped platform XYZ coordinate system shown shifted Pivot point in the top left corner of the platform 1 The U axis is comma
5. The screw heads must be located on the top side of the base plate g Place the strut length 130 mm of the transport lock 5 in the correct orientation see figure above onto the moving platform so that the three holes in the strut 5 face upwards h Align the strut 5 so that the two outer holes are situated exactly over the corresponding M6 holes in the moving platform of the Hexapod i Slide one plastic washer 4 each concentrically to the holes between the moving platform and the strut 5 j Fasten the strut 5 to the moving platform using two M6x20 screws k Place the strut length 291 mm 7 parallel to the strut 1 onto the strut 5 length 130 mm so that the middle hole in the strut 7 faces upwards and is exactly over the middle hole in the strut 5 see figure above I Attach the upper strut 7 loosely to the lower strut 5 using the M6x20 screw 8 m Attach one strut 9 each with a length of 225 mm in vertical alignment to the ends of the strut 1 using an M6x20 screw 10 n Connect the upper ends of the vertical struts 9 using the strut 7 length 291 mm and two M6x20 screws 10 0 Tighten the screw 8 until you feel resistance Pack the Hexapod in a plastic film to protect it against dirt Open the outer box Remove the foam cover Open the inner box Remove the foam cover Hold the Hexapod by the transport lock or the base plate and place it in the foam insert of the inner box If i
6. cannot be fully fastened If the height of the Hexapod after deactivation of the Hexapod system exceeds 193 mm gt Model with direct drive struts not blocked Try to carefully move the Hexapod by hand so that the transport lock can be attached gt Model with DC gear motor or struts blocked Do not attach the transport lock Accessories Original packaging p 13 Transport lock p 21 Aiding materials for attachment of the transport lock Two suitable supports approx 12 mm in height The area of each support should be equivalent to approximately half of the area of the base plate of the Hexapod 40 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance Packing the Hexapod 1 Command a motion of the Hexapod to the transport position X Y Z U V W 0 2 Uninstall the Hexapod system a Remove the load from the moving platform of the Hexapod b Power down the Hexapod controller c Remove the data transmission cable and the power supply cable from the Hexapod controller and the Hexapod d Loosen the six M6x30 screws with which the Hexapod is mounted on the Surface e Remove the six M6x30 screws Figure 13 Fasten the transport lock to the moving platform and the base plate Strut of the transport lock length 291 mm Plastic flat washer Hole in base plate Plastic flat washer Strut of the transport lock length 130 mm M6x20 screw Strut
7. controller indicates for which Hexapod the controller is intended gt Only operate the Hexapod with a Hexapod controller whose geometrical data is adapted to the Hexapod Collisions can damage the Hexapod the load to be moved and the surroundings gt Make sure that no collisions between the Hexapod the load to be moved and the surroundings are possible in the working space of the Hexapod Do not place any objects in areas where they can get caught by moving parts Immediately stop the motion if a malfunction occurs in the Hexapod controller see user manual of the Hexapod controller Damage can occur to the Hexapod if the transport lock of the Hexapod has not been removed and a motion is commanded gt Remove the transport lock before you start up the Hexapod system 2 2 6 Safety Measures during Maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications p 49 can change as a result gt Do not loosen any screws Hexapod struts with direct drive can be carefully moved by hand in the case of an error Blocked struts can be damaged by the use of force gt If one or more struts of the Hexapod are blocked do not move the Hexapod by hand gt If you move the Hexapod by hand do not use high forces 8 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and Application
8. suppressor a Align the cable so that it is not squeezed when the snap on ferrite suppressor is closed b Carefully press the two halves of the snap on ferrite suppressor around the cable until the lock engages H 824 Hexapod Microrobot MS200E Version 1 2 0 27 5 Installation P I 5 4 Grounding the Hexapod The Hexapod is not grounded via the power supply cable If a functional grounding is required for potential equalization 1 Connect the base plate to the grounding system For connection use the supplied accessories p 13 and the M4 hole with an 8 mm depth p 53 marked with the ground connection symbol If no M4 hole with a depth of 8 mm is provided in the base plate use one of the mounting holes p 53 for attachment 2 Connect the moving platform to the grounding system Use one of the mounting holes in the moving platform p 53 for connection or If the moving platform and the load are conductively connected with each other connect the load to the grounding system 5 5 Mounting the Hexapod on a Surface NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only hold the Hexapod by the base plate NOTICE Warping of the base plate Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 200 um 28 Vers
9. the Hexapod controller which is part of the Hexapod system The position commands to the Hexapod controller are entered in Cartesian coordinates H 824 Hexapod Microrobot MS200E Version 1 2 0 9 3 Product Description P I 3 2 Model Overview Hexapod and Hexapod controller are only available together as a system Possible system components Standard versions of the H 824 Hexapod H 824 G1 Compact Hexapod Microrobot DC Motor Gearhead 1 mm s 10 kg Load H 824 GV Compact Hexapod Microrobot DC Motor Gearhead 0 5 mm s 5 kg Load Vacuum Compatible to 10 hPa H 824 D1 Compact Hexapod Microrobot Direct Drive 25 mm s 5 kg Load H 824 DV Compact Hexapod Microrobot Direct Drive 12 5 mm s 2 5 kg Load Vacuum Compatible to 10 hPa Standard versions of the C 887 Hexapod controller C 887 11 6 D Hexapod Controller Control of 2 Additional Servo Motor Axes Included TCP IP and RS 232 Interface 19 Chassis C 887 21 6 D Hexapod Controller TCP IP and RS 232 Interface Bench Top Standard cable sets C 887 A03 Cable Set for Hexapod 3 m consisting of Data transmission cable MDR68 to MDR68 1 1 KO40B0034 Power supply cable M12m 180 to M12f 90 KO60B01 11 10 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description C 887 V02 Cable Set for Hexapod 2 m Vacuum Side Cable Feedthrough 3 m Air Side Cable consisting of Data transmission cable
10. 2 512 Reference point switch Magnetic vacuum compatible Limit switches Optical vacuum compatible Materials used Machine made parts 94 of the machine made parts i e base plate struts moving platform AIMgSi 3 2315 chemically nickel plated 6 of the machine made parts e g coupling elements Various vacuum compatible materials Drivetrain elements Drive screw Stainless steel Drive belt Polyurethane and Kevlar Electrical components Cable insulation Teflon PTFE FEP Shrink tubing Kynar PTFE Solder Sn95 5Ag3 8Cu0 7 Connectors AMP HD20 Lemo PCB s adapter board limit switch board PWM board sealed with vacuum compatible Torr seal Molykote HP 300 Kliiber Barrierta L55 2 Sealing compound and Torr seal Varian TRA CAST 3145 Araldite 2014 1 Huntsmann 5 Minute Epoxy adhesive Devcon H 824 Hexapod Microrobot MS200E Version 1 2 0 51 10 Technical Data P I Bakeout temperature 80 C 176 F 10 2 Ambient Conditions and Classifications Degree of pollution 2 Transport temperature 25 to 85 Storage temperature 0 C to 70 C Humidity Maximum relative humidity of 80 at temperatures of up to 31 C linearly decreasing until relative humidity of 50 at 40 C Degree of protection IP20 according to IEC 60529 Area of application For indoor use only Maximum altitude 2000 m 52 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technic
11. 3 m 4668 M824B0010 2 m MOR MDR HD O HD D HD D 68 pin 68 pin SUB 78 SUB 781 SUB 78 SUB 78 Figure 11 Connection diagram for C 887 V02 standard cable set for vacuum versions m K060B0112 Power supply cable on the air side M12m to M12f 3m K040B0092 Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m C887B0002 Vacuum feedthrough for power supply LEMO 2 pin to M12m 4668 Vacuum feedthrough for data transmission HD Sub D 78m f K060B0132 Power supply cable on the vacuum side LEMO 2 pin to LEMO 2 pin 2m M824B0010 Data transmission cable on the vacuum side MDR68m to HD Sub D 78m 2m 1 Vacuum chamber 5 7 3 Connecting the cable set with line driver boxes to the Hexapod Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories Long cable set with two line driver boxes available as optional accessories p 14 Connecting the cable set with line driver boxes to the Hexapod gt Connect the Hexapod and cable set with each other as shown in the connection diagram below Observe the assignment that is given by the labeling on the sockets connectors and cables When handling the connectors proceed as described in Connecting the C 887 A03 Standard Cable Set p 32 gt Do not connect the cable set to the Hexapod controller yet H 824 Hexapod Microrobot MS200E Version 1 2 0 35 5 Installation P I m M12 180 Miz 90 Controller 5
12. 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Description C 887 Hexapod controller MS204E User Manual C 887 Hexapod controller MS204Equ User Manual Short Version Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 47 The current versions of the manuals are found on our website To download a manual proceed as follows 1 2 De 4 Open the website http www pi portal ws Click Downloads Click the corresponding category e g H Hexapods Click the corresponding product code e g H 824 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Open the Manuals directory c Open the Release News e g C 887 Releasenews V x x x pdf on the CD of the product d Find the user name and password in the User login for software download
13. G WWW PI WS 4 Unpacking 4 Unpacking The Hexapod is delivered in a special packaging with adapted foam inserts and with a transport lock installed NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate INFORMATION When handling the vacuum version of the Hexapod attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt f necessary wipe the Hexapod clean after unpacking H 824 Hexapod Microrobot MS200E Version 1 2 0 21 4 Unpacking Figure 6 Transport lock of the Hexapod A Hexapod with installed transport lock Transport lock with fixing screws M6x20 screws M6x20 screw M6x20 screws with plastic washers KR MH O M6x20 screws with plastic washers Tools and accessories Allen wrench 5 0 from the supplied screw set p 13 Aiding materials for removal of the transport lock Two suitable supports approx 12 mm in height The area of each support should be equivalent to approximately half of the area of the base plate of the Hexapod Unpacking the Hexapod le 2 3
14. MS200E H 824 Hexapod Microrobot User Manual Version 1 2 0 Date 04 06 2013 PI This document describes the following products H 824 G1 Compact Hexapod Microrobot DC Motor Gearhead 1 mm s 10 kg Load H 824 GV Compact Hexapod Microrobot DC Motor Gearhead 0 5 mm s 5 kg Load Vacuum Compatible to 10 hPa H 824 D1 Compact Hexapod Microrobot Direct Drive 25 mm s 5 kg Load H 824 DV Compact Hexapod Microrobot Direct Drive 12 5 mm s 2 5 kg Load Vacuum Compatible to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI WS _ Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PIG PIC PICMA PILineQG PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2013 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the Source Original instructions First printing 04 06 2013 Document number MS200E BRo version 1 2 0 Subject to change without notice This manual is superseded by any new release The latest r
15. Version 1 2 0 47 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter GIO CHING LO INS RE EN E 49 Ambient Conditions and Classifications ccccccecceeceeceecceeceeceeceeceecueceecuseeseueeaseatens 52 DIMENSIONS REE EEE EEE RE EEEa 53 ELSE EE mir wanaieceivarsatele 55 10 1 Specifications 10 1 1 Data Table H 824 G1x H 824 D1x Unit Tolerance for higher resolution for higher velocity and load Active axes X Y Z Ox By Oz X Y Z Ox By 02 Motion and positioning Travel range X Y 22 5 225 mm Travel range Z 12 5 12 5 mm Travel range x Oy TS 7 5 d Travel range 07 12 5 12 5 Single actuator design resolution 0 007 0 5 um Min incremental motion X Y Z 0 3 1 um typ Min incremental motion Ox y 07 3 5 12 urad typ Backlash X Y 3 3 um typ Backlash Z 1 1 um typ Backlash Ox Oy 20 20 urad typ Backlash 07 25 25 urad typ Repeatability X Y 0 5 0 5 um typ Repeatability Z 0 1 0 1 um typ Repeatability 8x Oy 2 2 urad typ Repeatability 07 125 125 urad typ Max velocity X Y Z 1 25 mm s H 824 Hexapod Microrobot MS200E Version 1 2 0 49 10 Technical Data Max velocity Ox Oy z Typ velocity X Y Z Typ velocity 8x Oy z Mechanical properties Stiffness X Y Stiffness Z Load base plate horizontal any orientation Holding force de energized base plate horizontal any orientation Motor type Miscellaneous Operat
16. al Data 10 3 Dimensions All figures show the Hexapod in the reference position Dimensions in mm Note that the decimal places are separated by a comma in the drawings N A O11 N M8 E Fi o o o 1 1Ul0d JOAd VE v8 681 Kvar mn mn pb PIPED Oa 26 6 Figure 15 H 824 Hexapod side view dimensions in mm The 0 0 0 coordinates refer to the origin of the XYZ coordinate system When the default settings of the Hexapod controller are used and the Hexapod is in the reference position the pivot point is located at the origin of the XYZ coordinate system H 824 Hexapod Microrobot MS200E Version 1 2 0 53 10 Technical Data pP I 250 i 43 46 129 L 3 i iA 2281 Figure 16 H 824 Hexapod top view dimensions in mm 54 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment 10 4 1 Power Supply Connection Not for vacuum versions Power supply via 4 pin A coded M12 panel plug 3 0 P Only for vacuum versions power supply via 2 pin LEMO panel plug male type ECJ 1B 302 CLD 10 4 2 Data Transmission Connection Data transmission between the Hexapod and the Hexapod controller MDR68 socket H 824 Hexapod Microrobot MS200E Version 1 2 0 55 10 Technical Data Pin assignment p
17. allation The Hexapod can be mounted in any orientation NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 26 The limit values determined with the simulation program are only valid when the Hexapod controller has the servo mode switched on for the axes of the moving platform of the connected Hexapod gt Before installing the load determine the working space of the Hexapod with a simulation program p 26 The limits of the working space vary depending on the current position of the Hexapod translation and rotation coordinates and the current coordinates of the pivot point gt Avoid high forces and torques on the moving platform during installation gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and resulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the working space of the Hexapod H 824 Hexapod Microrobot MS200E Version 1 2 0 25 PI 5 Installation INFORMATION The optionally available PIVeriMove software for collision checking can be us
18. ance The specifications can change as a result p 49 gt Only loosen screws according to the instructions in this manual Depending on the operational conditions and the period of use of the Hexapod the following maintenance measures are required 7 1 Carrying out a Maintenance Run Frequent motions over a limited travel range can cause the lubricant to be unevenly distributed on the drive screw gt Carry out a maintenance run over the entire travel range at regular intervals See user manual of the Hexapod controller The more often motions are carried out over a limited travel range the shorter the time between the maintenance runs has to be H 824 Hexapod Microrobot MS200E Version 1 2 0 39 7 Maintenance pP I 7 2 Packing the Hexapod for Transport NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate NOTICE Damage from applying high forces Hexapod struts with direct drive can be carefully moved by hand in the case of an error Blocked struts can be damaged by the use of force gt If one or more struts of the Hexapod are blocked do not move the Hexapod by hand gt If you move the Hexapod by hand do not use high forces INFORMATION If the Hexapod system is defective the Hexapod can be in a position in which the transport lock
19. echnology and recognized safety standards Improper use can result in personal injury and or damage to the H 824 gt Only use the H 824 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the H 824 H 824 Hexapod Microrobot MS200E Version 1 2 0 5 2 Safety P I 2 2 1 Organizational Measures User manual gt Always keep this user manual available by the H 824 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the H 824 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the H 824 after having read and understood this user manual Personnel qualification The H 824 may only be started up operated maintained and cleaned by authorized and qualified staff 2 2 2 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the Hexapod attention must be paid to appr
20. ed to mathematically check possible collisions between the Hexapod the load and the environment The use of the software is recommended when the Hexapod is located in a limited installation space and or operated with a spatially limiting load For details regarding the activation and configuration of the PIVeriMove software for collision checking see Technical Note C887T0002 included in the scope of delivery of the software 5 2 Determining the Permissible Load and Working Space Tools and accessories PC with Windows operating system on which the simulation program Hexapod Simulation Software is installed For more information see the manual of the Hexapod controller Determining the working space and permissible load of the Hexapod gt Follow the instructions in the manual of the Hexapod controller to determine the working space and the limit value for the load of the Hexapod with the simulation program The limit values in the following table are for orientation They only apply when the center of mass is at the origin of the XYZ coordinate system 0 0 0 Servo mode switched on Servo mode switched off for for Hexapod Hexapod max load capacity max holding force Mounting position of Mounted Mounted as Mounted Mounted as the base plate horizontally desired horizontally desired ner foe fm fin fon If you need help in determining the limit value for the load or determining the working space gt Con
21. efore you start up the Hexapod system 6 2 Starting Up the Hexapod System Prerequisite v You have read and understood the General Notes on Start Up p 37 v You have correctly installed the Hexapod i e you have mounted the Hexapod on a surface and affixed the load to the Hexapod according to the instructions in Installation p 25 v You have read and understood the user manual of the Hexapod controller Accessories Hexapod controller belonging to the Hexapod system PC with suitable software see user manual of the Hexapod controller Starting up the Hexapod system 1 Connect the Hexapod to the Hexapod controller see user manual of the Hexapod controller 2 Start up the Hexapod controller see user manual of the Hexapod controller 3 Operate a few motion cycles for testing purposes See user manual of the Hexapod controller 38 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter Carrying out a Maintenance RUN ccccccseecccccesseecceeceeeeceeeceeeeceeseeeaeeeeeeaeeeeeeeesaaees 39 Packing the Hexapod for TranSport cccccsssccccceeceeceesceecseeeceeeeeecesseeeeeeseaeeeetsnaeees 40 Cleaning the Hexapod cccccccccecccesesseeceeeeeecaeeeeeeeceeeseseeeeseeeeeesessueaseeeeeeeeessaaaeeeeess 44 NOTICE Damage due to improper maintenance The Hexapod can become misaligned as a result of improper mainten
22. elease is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual rrrrrrnnnnnronnrnnnnnvvnnnnnnnnvnnnnnnnnee 1 1 2 Symbols and Typographic CONVENTIONS cccccseeeccceeeeeesceeeeeaeeeceeessaaeeeeeeeaeaeeeees 1 1 3 Other Applicable DOCUMENTS ccccccccececeseesseeeeeeeeeeeeeeeeeeeeeeeseaeeeeeeeeeeesssaaaeess 2 1 4 Downloading Manuals rrrrnrnnnnonrnnnnovrnnnnrenrnnnnennnnnnennnnnnnennnnerennnnnnennnnnnsennnnsnennnnsne 3 2 Safety 5 2 1 HETT USE semissem E oaeeus 5 2 2 General Safety Instructions rrrnnnrrrnnnnnnnvrrrrrrrnnnnnrrrrnnnrrnnnnnnssrennnrnnnnsnnsssennnnnnnne 5 2 2 1 Organizational MEASUES wiuciiisrsuncteevsnencuraaeuctsauiendiimcatuiiesavacaumeesadmens 6 2 2 2 Measures for Handling Vacuum Compatible Products 00 6 2 2 3 Safety Measures during Transport rrnrnnvnnnnnnnnnnrrvvvnnnrnnnnnrrrreennnnnnnn 6 2 2 4 Safety Measures during Installation rrenrrnrnnnnrrrrvrrrrrnnnnnrrrrrrnnnnnnnnn 7 2 2 5 Safety Measures during Start Up rrrrrrrnrrrnnnnnrnrrrnnrrrnnnnnnnrrnnnnnnnnnn 8 2 2 6 Safety Measures during Maintenance ccccceeeesseeeeeeeeeeeeeneeeeees 8 3 Product Description 9 3 1 Features and Applications rrrrnnnnrrrnnnnrnrrnnnrvnrnnnnrnnnnnnrnnnnnnnennnnnnrnnnnnnrnnnnnnsennnnnee 9 3 2 POC VOY och oss wet eich EE anes eates dome E maca as esc
23. eseaeeeeesesaaess Maintenance 7 1 Carrying out a Maintenance Run rrnnnnrnennnnnnnnrvvnnnnnnnrennnnnnnnsnnnnnnnnnsrnnnnnnnnsennnnnn 7 2 Packing the Hexapod for TranSpoOrt ccccccseccceeecseeeeeeeeaeeeeeeseaeeseeeessaeeseeeeeeas 7 3 Cleaning the Hexapod rrrnnnrnnnnnnrvnvnnnnvnnnnnnrnnnnnnsvnnnnnnrnnnnnnsnnnnnnssnnnnnnrnnnnnnsnnnnnnee Troubleshooting Customer Service Technical Data WOM Pa 9 EEA EE 10 1 1 DATE 10 1 2 Maximum ve 1 SEE 10 1 3 Specifications for Vacuum Compatible Versions rrrrrrnnrrnrrrrnnnnnr 10 2 Ambient Conditions and Classifications ccccccccccssseeceeeeeeeeeeeeeeeeeeeeeeeaaeeeeees 10 3 DIMENSIONS is ceisaicasde deinnecnsnensaicncat encndaansdcedatincaandaaendaacasieneansaneeasddesndermdancntiandatennencaametows 104 PNASSOnNMeN EE OEA EO REE 10 4 1 Power Supply Connection rrrrrnnnnnnvvvrnnnnnvenvnnnnnnronnvnnnnnsennnnnnnnrennnnnn 10 4 2 Data Transmission CONNECTION rrrrnnrrrrnnnnnrrrnnnnronrnnnnennnnnnennnnnnnene Old Equipment Disposal Glossary Appendix 13 1 Explanations of the Performance Test Sheet rrrrrrrrennrnnnnnnrrrvvrnnrrnnnnerrrreennnn 13 2 EC Declaration of Conformity rrrnrnrrnnnnnnnnnrvnrrrnnnnnnnnrrnnnrrnnnnnnnnrrnnnnrnnnnennsseennn PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual rrrrnnnnnnnnnnnnnnnrvrvnnrrnnnnnrrrrvnnnrnnnnnn
24. f o U m eB Be ee SS i i mn Shi as r p ENCB 6 30 I I 31 55 I I 32 6 I I 33 ET I I I 34 se i I I I I I l 56 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany H 824 Hexapod Microrobot MS200E Version 1 2 0 57 PIEZO NANO POSITIONING WWW PI WS 12 Glossary 12 Glossary Work space The entirety of all combinations of translations and rotations that the Hexapod can approach from the current position is referred to as the work space The work space can be limited by the following external factors Installation space Dimensions and position of the load Pivot point The pivo
25. he mounting holes p 53 together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and the load on the mounting fixtures holes intended for this purpose 30 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 2 2 Figure 9 Mounting holes in the moving platform 1 8 x M6 through holes 2 4x M4 through holes with a thread depth of 8 mm 3 6x M8 through holes Prerequisites v You have read and understood the General Notes on Installation p 25 v You have determined the permissible load and the working space of the Hexapod p 26 v You have designed the load and the environment of the Hexapod so that the permissible load of the Hexapod is observed and no collisions can occur H 824 Hexapod Microrobot MS200E Version 1 2 0 31 5 Installation I Tools and accessories Suitably long screws Options 4 M4 screws 8 M6 screws 6 M8 countersunk head screws Suitable tools for fastening the screws Affixing the Load 1 Choose the mounting position so that the selected mounting holes in the moving platform see upper figure and the dimensional drawing p 53 can be used for affixing the load 2 Affix the load to the moving platform using the screws 5 7 Connecting the Cable Set to the Hexapod 5 7 1 Connecting the C 887 A03 Standard Cable Set Prerequisites
26. he user manual of the Hexapod controller For the scope of delivery of the cable set that belongs to the Hexapod system see the listing of the standard cable sets in Model Overview p 10 Transport lock consisting of 2 struts length 291 mm 2 struts length 225 mm 1 strut length 130 mm 9 M6x20 screws 4 plastic flat washers 000012251 Internal cushion bottom 000012252 Internal cushion cover 000012899 Inner box with handle 560 mm x 560 mm x 400 mm 000012323 Outer box with soft foam cushions 2026 Pallet Documentation consisting of H824T0001 Technical note in printed form on unpacking the Hexapod MS200E User manual for the Hexapod this document Screw sets 000034605 Mounting accessories 6 M6x30 hex head cap screws ISO 4762 1 Allen wrench 5 0 DIN 911 000036450 Accessories for connection to the grounding system 1 M4x8 flat head screw with cross recess ISO 7045 2 washers form A 4 3 DIN 7090 2 safety washers Schnorr 4 mm N0110 H 824 Hexapod Microrobot MS200E Version 1 2 0 13 3 Product Description P I 3 5 Accessories C 887 A20 Hexapod cable set 20 m consisting of Line driver box for data transmission cable controller side CO30B001 1 Line driver box for data transmission cable Hexapod side C030B0012 Short data transmission cable MDR68 to MDR68 1 1 2 K040B0034 pieces Long data transmission cable MDR68 to MDR68 1 1 K040B0186 Power supply cable for line driver box K060B0126 with M12 cou
27. hvocee sane doe eadesesaseeoaeacs 10 3 3 0 GEN 12 3 4 ENN ne 13 3 5 ee ONS EE aricomiaaunrnnesinwnciniaeneiatiyieriacuensesed 14 3 6 LE eg 01100 EEE E a N 15 3 6 1 MEN 15 3 6 2 Reference Point Switch and Limit Switches rrrrrrnnnnrrorrrnnnnrrvnnnnnn 15 3 6 3 OPI ON REE ENE 15 3 6 4 MONG 16 4 Unpacking 21 5 Installation 25 5 1 General Notes on Installation cccccccccssssecceeceeeseeeeeeeeeeeeeeesseeeseeeeeseaeeeeeesaeees 25 5 2 Determining the Permissible Load and Working Space cccccsseeeeeeeeeeeeeeees 26 5 3 Attaching the snap on ferrite Suppressor ccccccecsseeeeeceeeeeeeseeeeeeseeeeeeseeeeeas 27 5 4 Grounding the Hexapod ccriiasinsssatinactevautasiecsasuriadesvanpenedcerdadensenanciaawadiciwatetzantieenns 28 5 5 Mounting the Hexapod on a Surface rrrnrrnnnnnrvvrrnnnnrvonnrnnnnnrennrnnnnnrennnnnnnnenn 28 5 6 Affixing the Load to the Hexapod rrrrevrrnnnrrvvrrrnnnrnernnrnnnnnrennnnnnnnennnnnnsnnsnnnnnnsnne 30 10 11 12 13 5 7 Connecting the Cable Set to the Hexapod rrrrrrnnnnnrvrvrnnnnnrvvrrnnnnnrenrrnnnnnrennnnnn 5 7 1 Connecting the C 887 A03 Standard Cable Set cece 5 7 2 Connecting the C 887 V02 Standard Cable Set for Vacuum Es 01 SEE nanona nannan nanna 5 7 3 Connecting the cable set with line driver boxes to the PU Start Up 6 1 GENE Notes on Star UP een 6 2 Starting Up the Hexapod System cccccsseecccecceseseeeeeeeeeeeeeeeeeeeeese
28. ign 3 6 2 Reference Point Switch and Limit Switches The reference point switch of a strut functions independently of the angular positions of the strut ends and the lengths of the other struts When a limit switch is activated the power source of the motor is switched off to protect the Hexapod against damage from malfunctions 3 6 3 Control The Hexapod is intended for operation with the Hexapod controller which belongs to the Hexapod system The Hexapod controller makes it possible to command motion of individual axes combinations of axes or all six axes at the same time in a single motion command The Hexapod controller calculates the settings for the individual struts from the target positions given for the translational and rotational axes The velocities and accelerations of the struts are calculated in such a way that all struts start and stop at the same time H 824 Hexapod Microrobot MS200E Version 1 2 0 15 3 Product Description P I After the Hexapod controller has been switched on or restarted the Hexapod has to complete a reference move in which each strut moves to its reference point switch After the reference move the moving platform is in the reference position and can be commanded to move to absolute target positions For more information see the user manual of the Hexapod controller 3 6 4 Motion 16 The platform moves along the translational axes X Y and Z and around the rotational axes U V and W
29. ing temperature range Material Mass Cable length PI 11 270 mrad s 0 5 10 mm s 55 55 mrad s 1 7 1 7 N um 7 7 N um 10 5 5 25 kg max 100 50 15 5 N max DC motor gearhead DC motor 10 to 50 10 to 50 C Aluminum Aluminum 8 8 kg 5 3 3 m 10 mm Vacuum versions to 10 hPa are available under the following ordering number H 824 xVx Specifications for vacuum versions can differ Technical data specified at 20 3 C Ask about custom designs The travel ranges of the individual coordinates X Y Z Ox y 07 are interdependent The data for each axis in this table shows its maximum travel where all other axes are at their zero positions If the other linear or rotational coordinates are not zero the available travel may be less 10 1 2 Maximum Ratings The Hexapod is designed for the following operating data Maximum operating voltage 50 Version 1 2 0 Maximum operating frequency unloaded Maximum current consumption MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Specifications for Vacuum Compatible Versions ev pe um fr ene Load base plate horizontal any orientation max Holding force base plate horizontal any 50 25 15 5 N orientation Motor Manufacturer Faulhaber Motor type DC 2224R036SR Gearhead H 824 GV only 22 5 Reduction ratio 69 1 Encoder Manufacturer Faulhaber Encoder type magnetic encoder IE
30. ion 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 8 Mounting holes in the base plate Prerequisite v You have read and understood the General Notes on Installation p 25 Tools and accessories Allen wrench 5 0 and six of the supplied screws p 13 Mounting the Hexapod 1 Provide six M6 threaded holes for mounting with M6x30 screws in the support The arrangement of the six mounting holes is shown in the upper figure or in the dimensional drawing p 53 2 Mount the Hexapod on the six mounting holes in the base plate using the included screws H 824 Hexapod Microrobot MS200E Version 1 2 0 29 5 Installation P I 5 6 Affixing the Load to the Hexapod NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Make sure that the installed load observes the limit value resulting from the load test p 26 gt Avoid high forces and torques on the moving platform during installation gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the working space of the Hexapod NOTICE Screws that are too long The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform or the depth of t
31. long strut above the moving platform e Use the Allen wrench to loosen the two M6x20 screws 3 that fasten the short strut to the moving platform f Remove the two loosened screws the strut and the corresponding plastic washers g Use the Allen wrench to loosen the two M6x20 screws 4 that are used to fasten the strut that extends under the base plate h Remove the two loosened screws the strut and the corresponding plastic washers Keep all packaging materials and all parts of the transport lock in case the product needs to be transported again later on H 824 Hexapod Microrobot MS200E Version 1 2 0 23 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation orrrrrrnnnnrrrrrrrrrrrnnnnnrrrrrrnrrnnnnnnnnrrennnrnnnnnnnssrnnnnnnnnnsnnnee 25 Determining the Permissible Load and Working Space ccccccccceseeeeeeeeeeeeeeneeeees 26 Attaching the snap on ferrite SUPPIESSOT rrrnnnnvvvnnnnvvvnnnrrevrnnrrernnnnrrnnnnnnsennnnerennnnsseennnn 27 Grounding the Hexapod Lavndresrdndek addjpaedseahddene 28 Mounting the Hexapod on a Surface ccccccccccccseeseeeceeeeeeceeeeeeeceeeesesseeeeeeeeeeeeessaaaeeses 28 Affixing the Load to the Hexapod cccccccccsseeeceeecaeeeeeeeeeeeeseeeeeseaeseeeesseaeeeeesesaaeeeees 30 Connecting the Cable Set to the Hexapod cccccccccsseseeeeeeeeeeeaeeeeeeeeeeeessuaaeeeeeeeees 32 5 1 General Notes on Inst
32. nded to move to position 10 The rotation around the U axis tilts the rotational axes V and W Figure 3 Rotation around the U axis fi Platform in reference position Platform position U 10 U parallel to spatially fixed X axis H 824 Hexapod Microrobot MS200E Version 1 2 0 17 3 Product Description P I 2 The V axis is commanded to move to position 10 The rotation takes place around rotational axis V which was tilted during the previous rotation The rotation around the V axis tilts the rotational axes U and W pi Figure 4 Rotation around the V axis Ii Platform in reference position Platform position U 10 V 10 U and V parallel to the platform level 18 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 The W axis is commanded to move to position 10 The rotation takes place around the rotational axis W which was tilted during the previous rotations The W axis is always vertical to the platform level The rotation around the W axis tilts the rotational axes U and V W A Figure 5 Rotation around the W axis fil Platform in reference position Platform position U 10 V 10 W 10 U and V parallel to the platform level W vertical to the platform level For more data on the travel ranges see the Specifications section p 49 H 824 Hexapod Microrobot MS200E Version 1 2 0 19 PIEZO NANO POSITIONIN
33. nnne 1 Symbols and Typographic Conventions ccccccccccccececsseeseecceeeeeeeaeeeeeeeeeeesssaaeeeeeeees 1 Other Applicable DOCUMENTS cccccccceceeeesseeeceeeeeeeaeeeseeeeeeesseeeaeseceeeeeeseeaaeeeeeeeeeseaas 2 LOW MIC AGING Manuals EN oera sE oa e Eana Ea 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the H 824 lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation H 824 Hexapod Microrobot MS200E Version 1 2 0 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label p 5 RS 232 A Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page
34. of the transport lock length 291 mm M6x20 screw Strut of the transport lock length 225 mm M6x20 screw Socket for data transmission cable O MN DA NAN O H 824 Hexapod Microrobot MS200E Version 1 2 0 41 7 Maintenance PI Figure 14 Orientation of the struts on the moving platform 5 Strut of the transport lock length 130 mm 6 M6x20 screw 7 Strut of the transport lock length 291 mm 8 M6x20 screw 11 Socket for data transmission cable 3 Attach the transport lock a On the surface on which you want to place the Hexapod not shown in figure place two supports approx 12 mm in height at a distance of approx 20 mm from each other Place the strut length 291 mm of the transport lock 1 between the two supports so that the three holes in the long side of the strut 1 face upwards Position the Hexapod onto the two supports so that the strut 1 is situated under the center of the base plate and extends parallel to the socket for the data transmission cable Align the strut 1 so that the two outer holes in its long side are situated exactly under the corresponding holes 3 in the base plate of the Hexapod Slide one plastic washer 2 each concentric to the holes between the base plate and the strut 1 42 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 9 P N mo EE f Fasten the strut 1 to the base plate 3 using two M6x20 screws
35. on the vacuum side MDR68m to HD Sub D 78m 2m M824B0010 Power supply cable on the vacuum side LEMO 2 pin to LEMO 2 pin 2 m KO60B0132 Vacuum feedthrough for data transmission HD Sub D 78m f 4668 Vacuum feedthrough for power supply LEMO 2 pin to M12m C887B0002 Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m KO40B0092 Power supply cable on the air side M12m to M12f 3 m KO60B01 12 Available Hexapod systems The following Hexapod systems are available as combinations of Hexapod Hexapod controller and cable set Hexapod Hexapod Controller Cable Set JG H 824 GV H 824 D1 H 824 DV C 887 11 C 887 21 C 887 A03 C 887 V02 mmen x P pe m meve x JJ gt fo px Jx Hep x PJ xp gt PJ x gt mezo Jf x gt f px xx gt H zapv JJ xx J x gt gt xx memnve i x f fax pf x H 824 Hexapod Microrobot MS200E Version 1 2 0 11 3 Product Description 3 3 Product View PI Figure 1 Product view Clear Aperture Moving platform Strut Panel plug for power supply cable Base plate D aA KR DO DH Socket for data transmission cable 12 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 4 Scope of Delivery The following table contains the scope of delivery of the Hexapod The scope of delivery of the Hexapod controller is listed in t
36. opriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt f necessary wipe the Hexapod clean after unpacking 2 2 3 Safety Measures during Transport An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate 6 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 4 Safety Measures during Installation Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 26 gt Before installing the load determine the work space of the Hexapod with a simulation program p 26 gt Make sure that the installed load observes the limit value determined with the simulation program gt Avoid high forces and torques on the moving platform during installation of the Hexapod and the load gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and res
37. pling M12 connector Power supply cable for Hexapod K060B0127 with M12 coupling M12 connector C 887 A30 Hexapod cable set 30 m consisting of Length nemo Line driver box for data transmission cable controller side Co30B0011 Line driver box for data transmission cable Hexapod side 0030B0012 Short data transmission cable MDR68 to MDR68 1 1 2 pieces Long data transmission cable MDR68 to MDR68 1 1 Power supply cable for line driver box 27 m K060B0160 with M12 coupling M12 connector Power supply cable for Hexapod 30 m K060B0161 with M12 coupling M12 connector To order contact our customer service department p 47 14 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 6 Technical Features 3 6 1 Struts The Hexapod has six adjustable length struts Each strut carries out linear motions Each set of settings of the six struts defines a position of the moving platform in six degrees of freedom three translational axes and three rotational axes Each strut is equipped with the following components One actuator Reference and limit switches Joints for connecting to the base plate and moving platform The actuator contains the following components H 824 G1 H 824 GV DC motor with gearhead and rotary encoder drive screw folded design H 824 D1 H 824 DV Direct drive consisting of DC motor with rotary encoder and drive screw folded des
38. s rrrnannrrnannrrnnnrrnnnnrnnnnnrnnannennannennnnrnnnnnennnnnennansennansennnnsnnnnee 9 Model Overview rrrrnrnnnnnnnnnnnnnnvnnnnnnnnnnnnennnnnnnnnnennnnnnnnnnennnnennennnnnnnennnnnennnnennennnnnenennunnn 10 Product KRER NERE RENEE REE SEE EEE EE EE 12 SE NNN soccer sec becicesacesnusses becessaeeeca sae l va enoecesaeaset besecsoeusnacteseaesoacceneccese eooneeaen 13 MESEN ee 14 Technical TF gt NS 15 3 1 Features and Applications Four models of the H 824 Hexapod are available Models for higher velocities The H 824 D1 directly driven model reaches velocities of up to 25 mm s The H 824 DV vacuum compatible model reaches velocities of up to 12 5 mm s Models with a higher load capacity The H 824 G1 model equipped with DC gearhead motors reaches a load capacity of 10 kg vertically and 5 kg in any orientation The H 824 GV vacuum compatible model reaches a load capacity of 5 kg vertically and 2 5 kg in any orientation The parallel kinematics structure and the free choice of the pivot point offer the following advantages Positioning operations in six independent axes three translational axes three rotational axes with short settling times Pivot point is maintained for rotations and moves along with linear motions High accuracy and step resolution in all axes No addition of the errors of individual axes No friction and torques from moving cables The Hexapod is controlled with
39. section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login lf Documents 0 Files is still being displayed no manuals are available Contact our customer service department p 47 Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium H 824 Hexapod Microrobot MS200E Version 1 2 0 3 PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter NETTET USG ee cinct setae uce ct gasiaebeseeteee lt b aeenocseasectece oetitsoawenteaead uenieaccuenasinck sep indeweneees 5 General Safety Instructions cccccceeeeeeccccececeeeseeeeeeeeeeeeaeeeeeeceeeessseeaeeeeeeeesssaaaeeeseeeees 5 2 1 Intended Use The Hexapod microrobot in short Hexapod is a laboratory device in accordance with DIN EN 61010 1 It is intended to be used in interior spaces and in an environment that is free of dirt oil and lubricants Based on its design and realization the Hexapod is intended for positioning adjusting and shifting of loads in six axes at various velocities The Hexapod is part of a Hexapod system The intended use of the Hexapod is only possible in connection with the Hexapod controller which is part of the Hexapod system and coordinates all motions of the Hexapod 2 2 General Safety Instructions The H 824 is built according to state of the art t
40. t H 824 Hexapod Microrobot MS200E Version 1 2 0 61 PIEZO NANO POSITIONING WWW PI WS 13 Appendix 13 Appendix In this Chapter Explanations of the Performance Test Sheet cccccccsssccesseeeeeeeeeeeeesseeeeeeeeeeeeesaees 63 EC Declaration of Conformity ta icncscttecsaeccdensssincdsnesseancrnncudbagettoedeeaernedesaseiacabasadhetettosenes 64 13 1 Explanations of the Performance Test Sheet The Hexapod is tested for the positioning accuracy of the translational axes before delivery The performance test sheet is included in the scope of delivery The following figure shows the test setup used 1 F 3 Figure 19 Test setup for measuring the X or Y axis 1 Laser interferometer 2 Mirror 3 Bench The following test cycles are performed Movement over the entire travel range with at least 20 measuring points in at least five cycles Movement over partial sections e g 1 mm in increments of e g 10 um H 824 Hexapod Microrobot MS200E Version 1 2 0 63 13 Appendix P I 13 2 EC Declaration of Conformity PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstrabe 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Compact Hexapod Microrobot Model Numbers H 824 Product Options all complies with all relevant provisions of
41. t point describes the center of rotation intersection of the rotational axes U V and W When the standard settings for the pivot point coordinates are used the pivot point is located at the origin of the XYZ coordinate system after a reference move see the dimensional drawing p 53 for more information The pivot point is shifted along with the platform during translations Rotations do not change the position of the pivot point The pivot point coordinates remain unchanged in both cases The pivot point coordinates can be changed in the Hexapod controller XYZ coordinate system The position and orientation of the Cartesian XYZ coordinate system cannot be changed which is why the system is referred to as spatially fixed The axes X Y and Z are referred to as translational axes The intersection of the axes of the spatially fixed Cartesian XYZ coordinate system 0 0 0 is referred to as the origin The Z axis is always perpendicular to the base plate of the Hexapod H 824 Hexapod Microrobot MS200E Version 1 2 0 59 12 Glossary P I The following example figures of the H 810 Hexapod show that the XYZ coordinate system does not move along with motions of the platform Figure 17 H 810 Hexapod in the reference position 1 Cable outlet 60 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 12 Glossary Figure 18 H 810 Hexapod the platform of which has been moved in X 1 Cable outle
42. t was not possible to attach the transport lock stabilize the Hexapod by adding additional packaging materials e g foam inserts Insert the foam cover into the inner box so that the struts of the transport lock 5 and 7 are situated in the corresponding recesses of the foam cover Close the inner box Insert the foam cover in the outer box Close the outer box Secure the box on the pallet H 824 Hexapod Microrobot MS200E Version 1 2 0 43 7 Maintenance P I 7 3 Cleaning the Hexapod Prerequisites v You have disconnected the Hexapod from the controller Cleaning the Hexapod gt Do not use any organic solvents Only when the Hexapod is not used in vacuum gt When necessary clean the surfaces of the Hexapod with a cloth slightly dampened with a mild cleanser or disinfectant Only when the Hexapod is used in vacuum gt Only touch the Hexapod with powder free gloves gt If necessary wipe the Hexapod clean 44 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Unexpected Cable broken Hexapod behaviour Connector or soldered joints loosened The Hexapod does Warped base plate not achieve the specified accuracy Increased wear due to small motions over a long period of time The Hexapod does Worn drive screw not move Foreign body has entered the drive screw Faulty motor Blocked or broken joint Dir
43. ta used by the Hexapod controller e g geometrical data and servo control parameters must be adapted to the Hexapod If incorrect configuration data is used the Hexapod can be damaged by uncontrolled motions or collisions The configuration data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt When you have established the communication via TCP IP or RS 232 or use the user interface of the C 887 send the CST command The response shows the Hexapod to which the controller is adapted gt Only operate the Hexapod with a Hexapod controller whose configuration data is adapted to the Hexapod H 824 Hexapod Microrobot MS200E Version 1 2 0 37 6 Start Up pP I NOTICE Damage from collisions Collisions can damage the Hexapod the load to be moved and the environment gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod gt Do not place any objects in areas where they can get caught by moving parts gt Ifthe Hexapod controller malfunctions stop the motion immediately NOTICE Damage from transport lock that has not been removed Damage can occur to the Hexapod if the transport lock p 21 of the Hexapod has not been removed and a motion is commanded gt Remove the transport lock b
44. tact our customer service department p 47 26 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Attaching the snap on ferrite suppressor Figure 7 Power supply cable of the Hexapod with snap on ferrite suppressor 1 Power supply cable of the Hexapod 2 Snap on ferrite suppressor 000015165 3 Connector M 12 for connection to the controller INFORMATION The snap on ferrite suppressor 000015165 is included in the scope of delivery of the Hexapod system The snap on ferrite suppressor is for permanent attachment to the power supply cable of the Hexapod The snap on ferrite suppressor ensures the electromagnetic compatibility of the Hexapod system gt When attaching the snap on ferrite suppressor make sure that it is correctly positioned on the cable The snap on ferrite suppressor can only be removed with special tools not included in the scope of delivery gt Attach the snap on ferrite suppressor to the power supply cable of the Hexapod before you connect the Hexapod to the Hexapod controller for the first time Tools and accessories Snap on ferrite suppressor 000015165 in the scope of delivery p 13 Permanently attaching the snap on ferrite suppressor 1 Place the power supply cable of the Hexapod close behind the M12 connector that is intended for connection to the controller into the opened Snap on ferrite suppressor see figure 2 Close the snap on ferrite
45. the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC The applied standards certifying the conformity are listed below safety of Machinery EN 12100 1 2011 03 EN 12100 2 2011 03 Electromagnetic Emission EN 61000 6 3 2007 09 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 10 The person authorized to compile the technical file is Dr Christian Rudolf Address see manufacturer s address February 03 2012 Karlsruhe Germany p EE fee Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG Auf der Roemerstrafte 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING Phone 49 721 4846 0 Fax 49 721 4845 1019 E mail info pi ws www piws EEA 64 Version 1 2 0 MS200E H 824 Hexapod Microrobot
46. the vacuum feedthrough for data transmission 4668 a See the above figure for the dimensions of the vacuum feedthrough b Provide the vacuum chamber with a suitable opening c Install the vacuum feedthrough so that the HD Sub D socket 78f is in the vacuum chamber 2 Install the vacuum feedthrough for the power supply C887B0002 a Provide the vacuum chamber with an opening of 12 mm in diameter The flange must not be more than 28 mm thick b Install the vacuum feedthrough so that the 2 pin LEMO connection is in the vacuum chamber Connecting the C 887 V02 standard cable set to the Hexapod gt Connect the Hexapod cable set and vacuum feedthroughs with each other as shown in the connection diagram below Observe the assignment that is specified by the labeling on the sockets conneciors and cables When handling MDR68 connectors proceed as described in Connecting the C 887 A03 Standard Cable Set p 32 Observe the mechanical coding of connectors and sockets Do not use force gt Do not connect the cable set to the Hexapod controller yet 34 Version 1 2 0 MS200E H 824 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Controller K060B0112 3 m C887B0002 K060B0132 2 m Hexapod f m f m f m M12 M12 M12 M12 LEMO LEMO LEMO LEMO PIE 4 pin 4pin 4 pin 4 pin 2 pin 2 pin 2 pin 2 pin f Y7 FL f pen PM PT TANIRAU mm dt K040B0092
47. ty encoder Check the data transmission and power supply cables Replace the cables by cables of the same type and test the function of the Hexapod Contact our customer service department p 47 Mount the Hexapod on an even surface p 28 The recommended evenness of the surface is 200 um Carry out a maintenance run over the entire travel range p 39 Carry out a strut test See user manual of the Hexapod controller The strut test should be carried out in the reference position unless the malfunction occurs with maximum or minimum displacement of the platform in Z Contact our customer service department p 47 If the problem with your Hexapod is not listed in the table or cannot be solved as described contact our customer service department p 47 H 824 Hexapod Microrobot MS200E Version 1 2 0 45 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for downloading p 3 on our website H 824 Hexapod Microrobot MS200E
48. ulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 200 um The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform p 53 or the depth of the mounting holes together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and a load on the mounting fixtures holes intended for this purpose H 824 Hexapod Microrobot MS200E Version 1 2 0 7 2 Safety P I 2 2 5 Safety Measures during Start Up There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts The geometrical data used by the Hexapod controller must be adapted to the Hexapod If incorrect geometrical data is used the Hexapod can be damaged by uncontrolled motions or collisions The geometrical data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the

User Manual MS200E - Physik Instrumente

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