COSHH essentials for the microelectronics industry MC6
Contents
1. to reuse this information visit www hse gov uk copyright htm for details First published 05 08 Employee checklist Follow employer s procedures for handling chemicals and disposal of waste LJ Cooperate with occupational hygiene studies and health surveillance schemes Are the engineering controls and extraction systems working properly Is the equipment in good condition and working properly Make sure you know what to do if there is a leak or spill L_ Make sure you have the right PPE for the job you are doing that it s in good condition and that you use and store it properly Do not use gloves that are punctured split cracked or otherwise damaged LJ it you find a problem tell your supervisor Don t just carry on working Don t smoke in the work area _ Wash your hands before and after eating drinking smoking and using the lavatory Check your skin regularly for dryness or soreness tell your supervisor if these appear Published by the Health and Safety Executive 08 112. brief guide to the Regulations What you need to know about the Control of Substances Hazardous to Health Regulations 2002 COSHH Leaflet INDG136 rev3 HSE Books 2005 www hse gov uk pubns indg136 padf m Working safely with solvents A guide to safe working practices Leaflet INDG273 HSE Books 1998 single copy free www hse gov uk pubns indg273 pdf Hydrofluoric acid poisoning Recommendations on first aid procedures Leaflet INDG307 HSE Books 1999 single copy free or priced packs of 25 ISBN 978 O 7176 1751 7 www hse gov uk pubns indg307 pdf m Latex and you Leaflet INDG320 HSE Books 2000 www hse gov uk pubns indg320 pdf Microelectronics MC6 Containment Engineering Control Selecting protective gloves for work with chemicals Guidance for employers and health and safety specialists Leaflet INDG3830 HSE Books 2000 www hse gov uk pubns indg330 paf EH40 2005 Workplace exposure limits Containing the list of workplace exposure limits for use with the Control of Substances Hazardous to Health Regulations 2002 as amended Environmental Hygiene Guidance Note EH40 HSE Books 2005 ISBN 978 O 7176 2977 O Dangerous substances and explosive atmospheres Dangerous Substances and Explosive Atmospheres Regulations 2002 Approved Code of Practice and guidance L138 HSE Books 2003 ISBN 978 O 7176 2203 0 Arsenic and you Arsenic is poisonous are you at risk MSA8 HSE Books 1996 www hse gov uk pubns msa8s paf Other useful COSHH essentials sheets availab
3. cy For environmental guidelines see MCO Health and Safety Executive lon implantation Control approach 3 Containment and Control approach 2 Engineering control Access and premises VY Restrict access to authorised staff Y Exclude unprotected staff Keep the workplace well organised and keep exit routes clear VY Label the work area pipework and equipment clearly Equipment General operation In general ion implanters used within the microelectronics industry can be represented by the following diagram Because of the high vacuum required all routine processes are contained often with double containment and alarms to warn of any escape from the inner containment y Follow the manufacturer s specification for extraction criteria Extraction PROCESS CHAMBER END STATION detection FACTORY INTERFACE BEAMLINE SOURCE inc analyser magnet AS BOX Secondary containment Y Get safety data sheets from your suppliers and identify the more dangerous chemicals Y Can you use less hazardous products or eliminate the process Y Gas boxes containing hazardous process gases should be extracted and monitored by gas detection systems Y Purge cryogenic pumps and exhaust lines with inert gas Y Provide a manometer or pressure gauge to check the extraction is working Link this to a visual or audible warning alarm Y Check that the equipment is correctly locked off where stipulated in t
4. f Ef cor Control of Substances 4 MCO COSHH essentials for the microelectronics industry p lt gt This information will help ak is employers comply with the A and Hazardous to Health N Regulations 2002 COSHH as amended to control exposure and protect workers health It is also useful for trade union and safety representatives lon Implantation adds chemical dopants to silicon wafers by exposing them to an ion beam This process takes place within a vacuum system and is contained Exposure to toxic substances may occur when changing gas supply cylinders replenishing solid ion source materials removing and servicing contaminated parts eg ion source and during routine maintenance tasks such as removing process residues from affected parts Chemicals and by products can be flammable pyrophoric toxic very toxic corrosive or carcinogenic arsenic This sheet describes good practice using containment with extraction and covers the points you need to follow to reduce exposure to an adequate level It is important to follow all the points on the sheet or use equally effective measures This sheet covers daily and weekly routine tasks of operation and maintenance It does not cover major maintenance tasks or decommissioning of used equipment Check the supplier s material safety data sheet can you use safer chemicals Plan and practise what you will do in an emergen
5. h a face velocity of at least 0 5 ms Y Where this is not possible use local dust fume or vapour extraction that effectively removes the contaminant UY Wear RPE and skin protection unless your risk assessment shows this is not necessary Y You need to know the design performance to know if extraction is working properly The supplier s literature must give this information VY Look for signs of damage every time you use the equipment repair damage immediately Y Regularly check E toxic gas systems and exhaust lines for leaks E toxic gas detection systems and E correct operation of chemical control safety interlocks eg extraction flow sensors enclosure door switches dilution flow switches toxic gas detectors v Keep records of examinations tests and subsequent repairs for at least five years Y A competent ventilation engineer should examine the system and test its performance at least once every 14 months see HSE publication HSG54 Keep records of all examinations and tests for at least five years Some systems may continuously monitor the performance of the extract system Microelectronics MC6 Containment Engineering Control Removal of phosphorus deposits Y Whenever possible remove components for cleaning into an extracted booth which is suitable for toxic materials and approved for this purpose Use effective local extraction to remove toxic gases in situ Y Dampen with de ionised DI water the
6. he user manual VY Keep extraction ducts short and simple Avoid long sections of flexible ductwork ZY Ductwork must be compatible with the chemicals being used Y Discharge cleaned extracted air to a safe place outside away from windows doors and air inlets Microelectronics MC6 Containment Engineering Control Gas bottle changes y Wear positive pressure supplied air respiratory protective equipment RPE when changing gas supply cylinders containing toxic and corrosive gases See sheet R5 see Further information VY For some gases impermeable gloves and chemical protective overalls must be worn Y Use less hazardous products where practical eg sub atmospheric delivery or low pressure products Solid source material changes UY Use an extracted cabinet or booth with an inward air flow of at least 0 5 ms Maintenance examination and testing of controls VY Maintenance procedures are based on enclosed cabinets control approach 3 or extraction control approach 2 Y Use a written system of work for maintenance and define what personal protective equipment PPE you need Y Clean and maintain systems according to manufacturers procedures and schedules to prevent excessive build up of phosphorus residue and other hazardous by products Y Use water based cleaning methods wherever possible Y Controls should also be suitable for flammable and pyrophoric substances Y Provide an extracted cabinet or booth wit
7. le on www hse gov uk pubns guidance index htm G409 Exposure measurement Air sampling G3800 Containment The COSHH essentials risk assessment on www coshh essentials org uk HSE Operational Circular Fit Testing of Respiratory Protective Equipment Facepieces OC 282 28 www hse gov uk foi internalops index htm Code of Practice Safety Features of Chemical Workstations Issue 1 Semiconductor Safety Association Europe on behalf of the Microelectronics Semiconductor Manufacturing Joint Working Group 1994 ISBN 978 1 872780 02 3 Web version available at www plade com editorial code html Useful links For information about health and safety or to report inconsistencies or inaccuracies in this guidance visit www hse gov uk You can view HSE guidance online and order priced publications from the website HSE priced publications are also available from bookshops Contact the British Occupational Hygiene Society BOHS on 01332 298101 or at www bohs org for lists of qualified hygienists who can help you Look in the Yellow Pages under Health and safety consultants and Health authorities and services for occupational health Also see www nhsplus nhs uk This document is available at www hse gov uk pubns guidance and www hse gov uk coshh essentials This document contains notes on good practice which are not compulsory but which you may find helpful in considering what you need to do Crown copyright If you wish
8. n gently wear down using abrasive cleaning pads with light circular movements Y Class H vacuum cleaners must be emptied and thoroughly cleaned after every use Y Residues must be treated as toxic waste and disposed of in accordance with local regulations Caution Never use isopropyl alcohol or hydrogen peroxide Never use scrapers Removal of arsenic deposits and other hazardous by products UY Whenever possible remove components to an extracted booth which is suitable for toxic materials and approved for this purpose UY Wear defined RPE when cleaning vacuum chamber components in situ Unprotected persons should not be present in the immediate area UY Use wet scrubbing methods such as abrasive cleaning pads with DI water when cleaning vacuum chamber components in situ vY Use supplemental extraction eg elephant trunk exhaust mobile fume hood approved for the collection of arsenic with a trunk of more than 200 mm in diameter and a flow rate sufficient to provide a capture velocity of more than 0 5ms in the work area You will need to determine the best flow rate for your site as operating conditions and extraction systems vary vY Dispose of hazardous waste according to approved local procedures Personal protective equipment PPE and respiratory protective equipment RPE v Check safety data sheets and equipment maintenance procedures for recommended PPE and ask your supplier for advice Y RPE should only be needed for non
9. routine emergency or maintenance purposes eg gas bottle changes in situ cleaning and should be type assessed following a risk assessment RPE must fit and users must be properly trained See sheet R5 or R6 see Further information Training and supervision Y Show workers this sheet and check that they understand it vY Tell employees about the hazards of source materials and by products y Tell workers that arsenic can cause cancer Y Tell workers that hydrofluoric acid is corrosive can be absorbed through the skin and that prompt treatment is needed for exposure despite delayed onset of symptoms Y Workers need specific training for most tasks relating to use service or maintenance of ion implanters VY Ask your equipment supplier for advice on training providers Y Check that the procedures for service and maintenance and the rules on personal hygiene are being followed Microelectronics MC6 Containment Engineering Control Y Supervise contractors y Check that PPE and RPE is being maintained used and stored correctly VY Ensure the health skin respiratory surveillance programme is being carried out for everyone that needs it y Check that the first aid arrangements work y If HF Antidote Gel eg calcium gluconate gel is provided then make sure first aiders are trained in its correct use and limitations UY Check the proper procedures to control contamination spread are followed Y Include managers and s
10. upervisors in health and safety training Additional Guidance v If skin problems appear consult an occupational health professional Y You may need air monitoring done to make sure the controls are adequate See COSHH essentials sheet G409 see Further information VY Always consider elimination removal or substitution VY Review your risk assessment on a regular basis and when any changes take place Y Consider additional specialist support for health surveillance y Ensure that the assessor is competent See Regulation 6 of the COSHH Regulations See INDG136 rev3 see Further information Y For general information on training PPE cleaning housekeeping maintenance and environmental guidelines please see sheet MCO Further information m An introduction to local exhaust ventilation HSG37 Second edition HSE Books 1993 ISBN 978 0 7176 1001 3 Respiratory protective equipment at work A practical guide HSG53 Third edition HSE Books 2005 ISBN 978 0 7176 2904 6 m Maintenance examination and testing of local exhaust ventilation HSG54 Second edition HSE Books 1998 ISBN 978 O 7176 1485 1 Monitoring strategies for toxic substances HSG173 Second edition HSE Books 2006 ISBN 978 0 7176 6188 6 General ventilation in the workplace Guidance for employers HSG202 HSE Books 2000 ISBN 978 0 7176 1793 7 m Assessment and management of risk at work from skin exposure HSG205 HSE Books 2001 ISBN 0 7176 1826 9 COSHH a
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