PDC-32G Plasma Cleaner
Contents
1. Ze ig HARRICK AME PLASMA OPTIONAL AND REPLACEMENT PARTS OPTIONAL PARTS Premium Vacuum Pump 110V aaa aaa aaannne aa even ee ee ever eee eee eren Premium Vacuum Pump 220V sss Premium Vacuum Pump Oil ssssssseseeeee Economy Vacuum Pump 110V sss Economy Vacuum Pump 220V esseesssennsnnnnnnnnnnnnnnnnnnnennnnnnnnnn Economy Vacuum Pump Oil sssseeeeennes Fomblin Based Vacuum Pump 110V for Oxygen Service Fomblin Based Vacuum Pump 220V for Oxygen Service Fomblin Fluid for Fomblin Based Vacuum Pump Dry Scroll Vacuum Pump 110V for Oxygen Service Dry Scroll Vacuum Pump 220V for Oxygen Service PlasmaFlo bt VE PlasmaFlo 220V EE Quartz Plasma Chamber sse Quartz Sample Tray 2 75 x 6 5 REPLACEMENT PARTS Pyrex Vacuum Chamber sss Front Cover Assembly essere Front Cover O ring Viton sssssssssseeeeenereennnnns Fluorescent Bulb sui asni siste eec ala REPLACEMENT FUSES 110V PDC 32G Plasma Cleaner 3 amp fast acting Vacuum Pump 7 amp fast acting PlasmaFlo 0 5 amp fast acting 17 of 18 APPENDIX C EE PDC VP 2 E PDC VP OIL ei PDC VPE dhe PDC VPE 2 an dhente PDC VPE OIL aeaiia PDC OPF Keds eee ue PDC 32Q DUE PDC 191 105 e PDC 191 111 UR ORV 341 TT PDC2. another outlet 220V model A CAUTION The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps into the plasma cleaner pump outlet OPERATION EVACUATING THE CHAMBER Plasma Cleaner Air Figure 3 Diagram for Room Air Processing Put the sample in the Plasma Cleaner chamber Hold the Plasma Cleaner door against the vacuum chamber Turn on the vacuum pump switch on the front of the Plasma Cleaner 110V model Figure 1 or on the vacuum pump 220V model It will take a few minutes to evacuate the air in the Plasma Cleaner chamber The vacuum will hold the Plasma Cleaner door in place 4 of 18 PROCESSING WITH ROOM AIR BLEEDING IN AIR e To bleed room air into the chamber slightly open the needle valve and allow the air to enter the Plasma Cleaner chamber e Close the needle valve GENERATING PLASMA e Turn on the Plasma Cleaner switch on the front of the Plasma Cleaner Figure 1 e Select the appropriate RF level e Look down at an angle through the holes in the top of the Plasma Cleaner and wait until a purplish glow is observed This indicates that plasma has been generated NOTE The HF power level used should be set at the lowest level needed to initiate a glow discharge PROCESSING e Subject the sample to plasma for a few minutes e Upon completion of cleaning set the RF level to OFF e Turn off
3. e Hold the door and vent the chamber for a few minutes e When atmospheric pressure is reached remove the door e Close the needle valve e Take out the sample A CAUTION If the Plasma Cleaner chamber is not vented immediately oil may back stream from the vacuum pump and contaminate the system We recommend the use of vacuum pump with an anti suck back feature such as that optionally provided by Harrick Plasma Do not open the door when the chamber is under vacuum since this will damage the glass chamber 8 of 18 ee HARRICK Ka PLASMA USING THE OPTIONAL PLASMAFLO GETTING READY Before starting take a few moments to familiarize yourself with the PlasmaFlo by looking at the drawings of the front and back views Figures 5 6 f 1 2 PRESSURE N Process Gas Flowmeter 2 K A Vacuum Gauge Thermocouple es Outlet PlasmaFlo Process Gas Output oum mZzsorn uim iil Process Gas EU Input 2 AP ON Switch OUTPUT 2 O 6 6 ee PlasmaFlo Figure 5 The PlasmaFlo Front View PlasmaFlo Fuses 2 PlasmaFlo Outlet Figure 6 The PlasmaFlo Back View 9 of 18 USING THE OPTIONAL PLASMAFLO SETUP To setup the Plasma Cleaner for cleaning with gases using the optional PlasmaFlo Figures 5 6 refer to the diagram below Figu
4. the Plasma Cleaner VENTING THE CHAMBER e Turn off the vacuum pump e Hold the door and slowly open the needle valve to allow air to enter the chamber e Ventthe chamber until atmospheric pressure is reached and remove the door e Close the needle valve e Take out the sample A CAUTION If the reaction chamber is not vented immediately oil may back stream from the vacuum pump and contaminate the system We recommend the use of vacuum pump with an anti suck back feature such as that optionally provided by Harrick Plasma Do not open the door when the chamber is under vacuum since this will damage the glass chamber 5 of 18 ETE HARRICK DUI PLASMA PROCESSING WITH GAS SETUP To setup the Plasma Cleaner for processing with process gas refer to the diagram below Figure 4 and follow these steps e Connect the fitting at the rear of the Plasma Cleaner Figure 2 to a vacuum pump with 12 ID vacuum tubing and hose clamps over the tubing at each end e Connect the needle valve on the Plasma Cleaner door Figure 1 to the gas source through a pressure regulator e Plug the Plasma Cleaner in a grounded outlet e Plug the vacuum pump into the vacuum pump outlet on the back of the Plasma Cleaner Figure 2 or into a second outlet A CAUTION The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps into the plasma cleaner pu
5. FLB 220V PDC 32G 2 3 amp fast acting None 0 5 amp fast acting Cal HARRICK A MMB PLASMA SPECIFICATIONS PLASMA CLEANER Chamber Dimensions System Dimensions System Weight Chamber Material Input Power RF Frequency Inlet Outlet POWER APPLIED TO RF COIL Low Setting Medium Setting High Setting UTILITIES REQUIRED Vacuum Pump eee OPTIONAL VACUUM PUMPS Models PDC VP and PDC VP 2 Pumping speed 50 60 Hz Ultimate total pressure Motor Dower sescsnrnn aa Mie Dimensions Models PDC VPE 1 and PDC VPE 2 Pumping speed 50 60 Hz Ultimate total pressure Motor power ssssssseeseesseeseeseesresrresrreenee Weight icu htec ences Dimensions APPENDIX D 3 diameter by 7 deep 8 Hx 10 Wx8 D 12 Ibs Pyrex 100 W 8 12 MHz 1 8 NPT needle valve 1 2 O D glass or quartz tubing 6 8 W 10 5 VV 18 W E minimum pumping speed of 1 4 m h and an ultimate total pressure of 200 mtorr or less E nT eee eee 3 2 3 6 meh nn 23 mtorr VEMM CHR 250 300 W VOTUM 33 Ibs Mo 9 Hx15 Wx5 D Eeer 10 2 m h m 20 mtorr n 325W ee 27 lbs EET 9 3 4 Hx 15 W x 5 5 8 D 18 of 18 UE HARRICK Bock PLASMA Manual Part No PDC32G M 03
6. HAMBER Open the gas flow Set the process gas regulator to 10 psi Open the needle valve With the Plasma Cleaner door off purge the gas line a few minutes to flush out any contaminants Close the needle valve Put the sample in the Plasma Cleaner chamber Hold the Plasma Cleaner door against the vacuum chamber Turn on the PlasmaFlo switch on the front of the PlasmaFlo Turn on the vacuum pump switch on the front of the Plasma Cleaner Figure 1 It will take a few minutes to evacuate the air from the reaction chamber of the Plasma Cleaner The vacuum will hold the Plasma Cleaner door in place Monitor the pressure on the vacuum gauge on the PlasmaFlo 11 of 18 USING THE OPTIONAL PLASMAFLO BLEEDING IN PROCESS GAS S e GENERATING PLASMA e To bleed process gas s into the chamber slowly open the needle valve Adjust the amount of gas s using the flowmeter control knobs on the PlasmaFlo Turn on the Plasma Cleaner switch on the front of the Plasma Cleaner Figure 1 Select the appropriate RF level Wait until a purplish glow is observed This indicates that plasma has been generated NOTE The HF power level used should be set at the lowest level just enough to initiate a glow discharge Gas pressures in the vicinity of 600 mtorr and low to medium HF level are a reasonable starting point but develop a set of conditions which work best for the type of samples you most often use PLASMA PROCESSING e Subject t
7. and the amount of time the surface is exposed to the plasma 2 of 18 ABOUT THE PLASMA CLEANER GETTING STARTED Before starting take a few moments to familiarize yourself with the Plasma Cleaner by looking at the drawings of the front and back of the unit Figures 1 2 N Needle Valve ER CLEANER STERILIZER PDC 32G Plasma Cleaner RF Switch Door LOW MED BEE 6 5 H H RF LEVEL ON POWER PUMP ON RF Plasma Cleaner _ 1 S Vacuum Pump Switch OFF OFF Switch U UJ Figure 1 Plasma Cleaner Front View 110V Model E SN Fitting for vacuum o pu Vacuum Pump Fuse Plasma Cleaner Fuses 10 Vacuum Pump UH Q O jm coe Cleaner Outlet m utlet sm Figure 2 Plasma Cleaner Back View 110V Model 3 of 18 vw Ze Sch HARRICK A Mi PLASMA SETUP PROCESSING WITH ROOM AIR To setup the Plasma Cleaner for processing with room air Figure 3 Connect the fitting at the rear of the Plasma Cleaner Figure 2 to the vacuum pump with Ve ID vacuum tubing Tighten hose clamps over the tubing at each end Plug the Plasma Cleaner in a grounded outlet Plug the vacuum pump into the vacuum pump outlet on the back of the Plasma Cleaner 110V model Figure 2 or into
8. e and repeat the test with the fluorescent bulb If this test still fails contact Harrick Plasma If you are using a vacuum pump not supplied by Harrick Plasma make sure that your vacuum pump is capable of reaching a pressure of 200 mtorr or less Then check that the vacuum hose is properly attached the Plasma Cleaner door is properly seated the o rings are in place and that the window is intact All o rings should be clean and free of defects 13 of 18 ES HARRICK eV PLASMA APPENDIX A EXCHANGING To replace the standard needle valve with the needle valve with the NEEDLE VALVES attached thermocouple gauge e Using a 9 16 end wrench or an adjustable wrench unscrew the regular needle valve Figure 8 Figure 8 Removing the Standard Needle Valve 14 of 18 APPENDIX A e Replace it with the needle valve with the attached thermocouple Figure 9 e Tighten the needle valve with a 7 16 end wrench or an adjustable wrench Figure 9 Installing the Needle Valve with the Thermocouple Gauge 15 of 18 Tg HARRICK MM PLASMA APPENDIX B REPLACING THE CHAMBER To Pos the Plasma Cleaner chamber Disconnect the tubing to the chamber e Loosen the thumbscrew on the fitting for the vacuum pump on the back of the Plasma Cleaner Figure 2 e Pull out the glass chamber e Slide in the new chamber e Tighten the thumbscrew on the back of the Plasma Cleaner e Reconnect the tubing to the chamber 16 of 18 vw
9. etss KO PLASMA www harrickplasma com PLASMA CLEANER USER S MANUAL FOR THE BASIC PLASMA CLEANER AND OPTIONAL PLASMAFLO HARRICK PLASMA Harrick Plasma e 120 Brindley St e Ithaca NY 14850 USA 800 640 6380 e Intl 607 272 5070 e Fax 607 272 5076 edi HARRICK Ku PLASMA TABLE OF CONTENTS General Information Safety Information m 1 leere etrerees 1 Technical Support uut ia kd a eaaa aAa 1 El Le 1 About the Plasma Cleaner Principl of Operation Em 2 Getting Startede ER 3 Processing with Room Air ro 4 EECHER eege geseet gereest EEN 4 Processing with Gas S 6 Serum 7 Using the Optional PlasmaFlow erunelzt ede 9 Sio 10 ODETA MON p M 11 Troubleshooting eee 13 Appendix A Exchanging Needle Valves nn 14 Appendix B Replacing the Ghamb r ausrechnen nen h 16 Appendix C Optional and Replacement Parts aaa 17 Appendix D SPECIHICALIONS o 18 PDC32G M 03 UM HARRICK ee PLASMA SAFETY INFORMATION UNPACKING TECHNICAL SUPPORT FEEDBACK The GENERAL INFORMATION Plasma Cleaner is designed for safe and efficient operation when used properly and in accordance with this manual Failure to ob
10. he Plasma Cleaner door in place To bleed process gas into the chamber slowly open the needle valve and allow the gas to flow for a few minutes Close the needle valve Turn on the Plasma Cleaner switch on the front of the Plasma Cleaner Figure 1 Select the appropriate RF level Wait until a purplish glow is observed This indicates that plasma has been generated The RF power level used should be set at the lowest level just enough to initiate a glow discharge Gas pressures in the vicinity of 600 mtorr and low to medium HF level are a reasonable starting point but develop a set of conditions which work best for the type of samples you most often use 7 of 18 PROCESSING WITH GAS PLASMA PROCESSING e Carefully open the needle valve just enough to bleed process gas into the reaction chamber without extinguishing the plasma NOTE Ifthe plasma disappears when bleeding in process gas the needle valve should be closed to allow plasma to form and then opened very slightly making sure not to loose the purplish glow e Subject the sample to plasma processing for the desired duration e Upon completion of processing turn the RF level to OFF e Turn off the Plasma Cleaner NOTE By selection of the process gas or mixture of gases its plasma energy RF power and the processing duration the nature and extent of the surface interactions can be tailored to your application VENTING THE CHAMBER e Turn off the vacuum
11. he sample to plasma processing for a few minutes Upon completion of processing set the RF level to OFF Turn off the Plasma Cleaner NOTE By selecting the process gas or gas mixture and plasma energy RF power the nature and extent of the surface interactions can be tailored for your application VENTING THE CHAMBER e Turn off the vacuum Hold the door and vent the chamber for a few minutes When atmospheric pressure is reached remove the door Close the needle valve Remove the sample A CAUTION If the Plasma Cleaner chamber is not vented immediately oil may back stream from the vacuum pump and contaminate the system We recommend the use of vacuum pump with an anti suck back feature such as that optionally provided by Harrick Plasma Do not open the door when the chamber is under vacuum since this will damage the glass chamber 12 of 18 se zg HARRICK A ME PLASMA TROUBLESHOOTING MALFUNCTION POSSIBLE CAUSES CORRECTIVE ACTIONS plasma fails to form in the chamber the electronics fails to deliver power to RF coil the vacuum system fails to sufficiently evacuate the chamber Place the miniature fluorescent bulb supplied with the Plasma Cleaner into the chamber Leave the door open and turn the RF level to HIGH If the bulb glows the electronic system is functioning properly If it does not check the fuses at the back of the unit Replace any that are defectiv
12. lasma 120 Brindley St Ithaca NY 14850 USA 800 640 6380 Intl 607 272 5070 Fax 607 272 5076 info harrickplasma com 1 of 18 Cal HARRICK A MMB PLASMA PRINCIPLE OF OPERATION ABOUT THE PLASMA CLEANER When a gas under sufficiently low pressure is subjected to a high frequency oscillating electromagnetic field the accelerated ions in the gas collide with the gas molecules ionizing them and form plasma The ionized gas particles in the plasma interact with solid surfaces placed in the same environment by e Removing organic contamination from surfaces The high energy plasma particles combine with the contaminant to form carbon dioxide COz or methane CHA e Modifying or enhancing the physical and chemical characteristics of surfaces A chemical reaction occurs between the plasma gas molecules and the surface undergoing treatment The operation of the Plasma Cleaner is simple The sample is placed in the reaction chamber Low flow rates typically 5 10 SCFH of process gas at low pressure typically 200 600 mtorr are subjected to RF radio frequency electromagnetic radiation at 8 12 MHz creating plasma at near ambient temperatures within the chamber The type of interaction between the plasma and the surface depends on parameters such as the intensity and frequency of the RF power used to excite the plasma the type of gas es that are ionized the pressure and flow rate of the gas es the type of sample
13. mp outlet Plasma Cleaner Vacuum Pump Process Gas Figure 4 Diagram for Processing with Gas NOTE Tobe able to monitor and control the pressure and rate of flow of the process gas we recommend connecting the optional PlasmaFlo Figure 6 A CAUTION For processing with pure oxygen make sure that you use an oxygen compatible vacuum pump The optional Harrick Plasma oil based vacuum pumps are NOT oxygen compatible The hydrocarbon pump oil mist can react with the ozone formed producing a potentially explosive combination We do offer oxygen service pumps for use with oxygen process gas please inquire with Harrick Plasma 6 of 18 OPERATION PURGING THE GAS LINE S EVACUATING THE CHAMBER BLEEDING IN PROCESS GAS GENERATING PLASMA NOTE PROCESSING WITH GAS Purging of the gas line with the process gas is recommended if there is a possibility that the gas line contains unwanted substances Open the gas flow Set the process gas regulator to 10 psi Open the needle valve With the Plasma Cleaner door off purge the gas line for a few minutes to flush out contaminants Close the needle valve Put the sample in the Plasma Cleaner chamber Hold the Plasma Cleaner door against the vacuum chamber Turn on the vacuum pump switch on the front of the Plasma Cleaner Figure 1 It will take a few minutes to evacuate the air from the reaction chamber of the Plasma Cleaner The vacuum will hold t
14. re 7 and follow these steps e Connect the fitting at the rear of the Plasma Cleaner Figure 2 to the vacuum pump with 2 ID vacuum tubing and hose clamps over the tubing at each end e Connect the needle valve on the Plasma Cleaner door to the output on the front of the PlasmaFlo e Plug the thermocouple gauge attached to the Plasma Cleaner door into the thermocouple outlet on the front of the PlasmaFlo NOTE f the PlasmaFlo was purchased separately from the Plasma Cleaner the regular needle valve needs to be replaced with the needle valve with the attached thermocouple gauge See Appendix A Plasma Cleaner Vacuum PlasmaFlo zur Vacuum Gauge Connection gt Process gt Gas Figure 7 Diagram for Processing Using the PlasmaFlo 10 of 18 USING THE OPTIONAL PLASMAFLO Connect the gas source s to the input s on the front of the PlasmaFlo Plug the Plasma Cleaner and the PlasmaFlo into grounded outlets Plug the vacuum pump into the vacuum pump outlet on the back of the Plasma Cleaner A CAUTION The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps into the plasma cleaner pump outlet OPERATION PURGING THE GAS LINE S Purging of the gas line with the process gas is recommended if there is a possibility that the gas line contains unwanted substances EVACUATING THE C
15. serve the following precautions could result in serious personal injury A gt bP gt p P A The plasma cleaner is an electrical instrument to avoid electric shock please observe all standard precautions such as not operating the device near water and operating the device at appropriate line voltage and frequency Do not remove cover plates or housing except by a certified electronics technician Do not open the plasma cleaner door when the chamber is under vacuum Do not use the plasma cleaner near flammable materials Do not plug vacuum pumps whose input electrical current requirement exceeds 7 Amps into the Plasma Cleaner With respect to vacuum pumps please refer to the pump user s manual for specific precautions If oxygen is used as the process gas in concentrations at or above its flammability threshold an oxygen service pump must be used If toxic gases or gases that ionize to toxic products or intermediates are used as the process gas an efficient exhaust filter must be used Before installing the Plasma Cleaner make sure all the parts on the included check off list are present If any parts are missing or damaged contact Harrick Plasma immediately For additional information please contact us at USA 800 640 6380 Intl 607 272 5070 between 9 a m and 5 p m EST or e mail your questions to info harrickplasma com Your comments and suggestions are welcome Please send them to Harrick P
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