User Manual PZ77E - Physik Instrumente
Contents
1. 5 bis 40 C Euroboard one 7 T slot wide 3 H high 0 3 kg 15 V Page 24 E 509 Position Servo Control Module User Manual PZ 77E 6 1 Two Plate Cap Sensor on board Sensor Processing The E 509 CxA versions have the sensor processing on the main board The adjustment elements affecting sensor processing which are described in this section are for use only if the controller actuator configuration is changed or elements are replaced Do not hesitate to consult with PI before proceeding with calibration procedures See also the E 509 Calibration Routines section on page 15 Note that the zero adjust trim potentiometers TRx02 are accessible through the front panel ZERO see Fig 3 on page 9 Adjustment of other elements involves removing the module from the chassis zi C Q Master p ISl Slave Servo ON CH1 TR101 4 SWO MN Servo ON m GAIN CH2 E uL Servo ON CH3 Servo OFF T sum SENSOR GAIN MONITOR Fig 9 E 509 C3A Layout showing location of sensor processing adjustment elements Note Numbering of jumpers and potentiometers is channel specific x can be 1 2 or 3 depending on the channel number 6 1 1 Adjustment Potentiometers TRx01 Sensor gain TRx02 Zero accessible through front panel TRx03 Linearization ILS Release 2 8 4 WWW pi ws Page 25 E 509 Position Servo Control Module User Manual PZ 77E 6 1 2 Jumpers and On B2. Prescribed Use Based on their design and realization E 509 modules are intended to be used installed in compatible housings like the PI E 500 E 501 series chassis They must not be used for applications not in conformance with this manual Observe the safety precautions given in this User Manual E 509 systems conform to Measurement Category CAT I and may not be used for Measurement Categories ll III or IV Other use of the device i e operation other than instructed in this Manual may affect the safeguards provided Standard E 509 systems are designed to operate under normal ambient conditions at least as listed here More stringent conditions given in the Specifications Table p 23 are of course also met Indoor use Altitude up to 2000 m Temperature range 5 C to 40 C Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Line voltage fluctuations not greater than 10 of the line voltage Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category Il IEC 60364 4 443 Degree of pollution 2 Model Survey E 509 S1 PZT Servo Control Module one channel for strain gauge sensors E 509 S3 PZT Servo Control Module three channels for strain gauge sensors E 509 L1 PZT Servo Control Module one channel for LVDT sensors E 509 L
3. 3 2 1 E 509 S1 and E 509 L1 These single channel versions have one servo control and sensor submodule each The submodules location is identical with the layout shown in Fig 5 but only for one channel each 3 2 2 E 509 S3 and E 509 L3 These 3 channel versions are depicted at left in Fig 5 and have three servo control and three sensor submodules each 3 2 3 E 509 CxA and E 509 E3 The E 509 CxA and E 509 E3 versions also have one servo control submodule per channel The sensor processing electronics is implemented on the main board rather than on a submodule Fig 5 right See Fig 9 on page 25 for the full layout of a three channel E 509 C3A or Fig 11 on p 28 for the E 509 E3 3 2 4 E 509 E03 The E 509 E03 does sensor processing only and has no servo controller and no submodules Its layout is otherwise the same as the E 509 E3 Fig 11 Except on the E 509 E03 which has no servo controller and no submodules Release 2 8 4 WWW pi ws Page 13 3 3 3 3 1 3 3 2 E 509 Position Servo Control Module User Manual PZ 77E Sensor Processing and Servo Control Functions The E 509 modules normally come pre installed in an appropriate PI chassis except for OEM versions The system is calibrated at the factory with the associated PZT actuators If however you should need to recalibrate your system see Section 4 and the E 802 Servo Control Submodule User Manual Sensor Processing Electronics SGS versio
4. KOTNO V t 38 Release 2 8 4 WWW pi ws Page 5 E 509 Position Servo Control Module User Manual PZ 77E 1 Introduction E 509 is a displacement sensor and position servo control module for PZT actuators The module is used in the E 500 series electronics and allows controlling the position displacement of piezoelectric devices with nanometer resolution It can also be installed in E 470 E 471 E 480 and E 481 high voltage amplifier systems giving them servo control capability The E 509 controller generates the input signal for the power amplifier module which actually drives the PZT The E 509 uses the difference between target position and the actual position in a servo loop algorithm compensating drift and hysteresis of the PZT actuators The effective stiffness of the actuator is significantly increased due to the rapid displacement control effected by adjusting the PZT operating voltage so as to maintain the displacement even when external forces change Position information is provided by high resolution sensors integrated in the mechanical stage or PZT actuator Strain gauge sensors SGS LVDT sensors and capacitive sensors are supported by the E 509 The E 509 does not encompass an amplifier to supply the PZT operating voltage High voltage E 507 E 508 E 470 E 471 E 480 E 481 or low voltage amplifiers E 503 E 505 can be used the choice depends on the PZT type The E 509 and amplifier are installed in the same chassis
5. To remove the module proceed as follows a Loosen the two Phillips screws on the front panel b Using the grip at the bottom of the front panel pull the module out of the chassis Release 2 8 4 WWW pi ws Page 17 E 509 Position Servo Control Module User Manual PZ 77E 4 Scan the voltage at CONTROL INPUT from O V to 10 V and read the PZT displacement using an external gauge 5 Adjust the Integrated Linearization System ILS by turning the ILS potentiometer see Fig 9 p 25 and observe the linearity of the PZT displacement 4 1 4 Static Gain Adjustment It should only be necessary to readjust the static gain if system components have been exchanged or altered Before doing so reading the detailed description of the sensor processing system is recommended for SGS and LVDT the E 801 Sensor Submodule User Manual for capacitive sensors the manual or technical note covering the sensors The objective of static gain adjustment is to ensure that the PZT actuator expands to its nominal expansion when a control signal input of 10 V is applied amplifier module DC offset set to O The zero point must be appropriately set before the static gain adjustment can be done This is an iterative process The static gain adjustment procedure is as follows 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems mak
6. 32 pin connector 32 pin connector 32 pin connector DIN 41612 0 10 v 100 k ohm E 509 L 1 E 509 L3 Sensor electronics and position servo controller 1 3 P proportional integral analog notch filter LVDT 1 3 DIN 41612 OV 10V E 509 S1 E 509 S3 Sensor electronics and position servo controller 1 3 P proportional integral analog notch filter Strain gauge 1 3 n a DIN 41612 OV 10V Values measured with reference capacitor and 1m cable length 5 In nominal measurement range i ppm parts per million relative to full measurement range Bandwidth static 300 Hz dynamic 3 kHz Values are measured with capacitive sensor D 100 00 Linearity over nominal range with D 510 020 in 1 0 range extension is 0 296 User Manual PZ 77E E 509 E3 Sensor electronics and position servo controller 3 P proportional integral analog notch filter PlSeca single plate capacitive 3 1 default 2 2 5 amp 5 0 3 to 10 kHz jumper settable 0 14 ppm VHz see note possible lt 1 mV C 0 00195 0 002596 0 1920 32 pin connector DIN 41612 OV 10V 1 Can be shifted and or inverted to 10 to 0 V or 5 to 5 V for special applications Release 2 8 4 WWW pi ws E 509 E03 Sensor electronics only no servo none PlSeca single plate capacitive 3 1 default 2 2 5 amp 5 0 3 to 10 kHz jumper se
7. adjustment otatic PZT displacement calibration requires an external expansion gauge with appropriate resolution e g 0 01 um for a P 841 30 actuator and a precision voltmeter The accuracy of calibration depends on the resolution of the external measurement system We recommend using a system with an accuracy of at least 100 nm and a resolution of 10 nm For calibration in analog offline operation an adjustable voltage source from 0 to 10 0000 V is needed Since the E 509 module has to be brought out of the chassis to permit access to the appropriate adjustment elements a 32 pin extension board P 895 00 not included is also required Zero Point Adjustment Proper zero point adjustment ensures that the full output voltage swing of the amplifier can be used without reaching the output voltage limits of the amplifier and causing overflow conditions both in open loop and closed loop operation The zero point is adjusted with the ZERO potentiometer accessible through a labeled hole in the E 509 front panel This potentiometer shifts the output of the sensor processing circuitry and hence the values on the Sensor out Monitor out and servo loop sensor input lines see Fig 4 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems make sure the PZTs are always connected to the same controller modules 2 If
8. range extension factor as specified in the technical data for the sensor electronics multiplied by the nominal measurement range gives the value for the extended measurement range The E E 509 Ex provides different extended measurement ranges e g with a D 510 050 the nominal range is 50 um the extended measurement ranges are 100 125 and 250 um Calibrated measurement range a measurement range obtained with the particular sensor sensor cable and extension factor with which the system was calibrated at the factory Calibrated measurement ranges offer maximum accuracy and linearity Release 2 8 4 WWW pi ws Page 38 E 509 Position Servo Control Module User Manual PZ 77E Measurement range extension factor set by jumpers JPx10 JPx11 and JPx01 on the E 509 Ex module see p 29 if multiplied by the nominal measurement range gives the extended measurement range Gap distance between sensor probe surface and target surface In the calibrated range the minimum probe to target gap equals 50 and the maximum gap 150 of the measurement range value Target area target surface denotes the surface against which the measurement is performed The target surface consists of a conductive material that is connected to electrical ground Mid range distance the distance from the center of the measurement range to the target surface see Section 8 2 on p 37 oeo Release 2 8 4 WWW pi ws Page 39
9. settings and location of the adjustment elements Sensor output voltage 0 to 10 V range Measurement range Standard extension range factor of 1 used for calibration resulting range depends on nominal range of the sensor probe Environmental Room temperature 22 C conditions Parallelism probe Tilt 700 urad surface to target surface Measurement range distance Yy Target YY LITTTT TSS M Fig 7 Definitions due to the system design the numerical values of mid range working distance and measurement range are the same NOTE The zero point for the output voltage given by the electronics may differ up to 10 for different specimen of the E 509 Ex Thus the mid range distance may vary from the electronic zero point by up to 10 See calibration sheet for details Release 2 8 4 WWW pi ws Page 20 E 509 Position Servo Control Module User Manual PZ 77E 4 3 2 Sensor Monitor Signal For each sensor channel the sensor monitor signal available on the E 509 Ex front panel indicates the gap size between target surface and sensor probe known as the probe to target gap The sensor monitor signal can be used to adjust target and probe see Section 4 3 3 below for how to proceed Sensor monitor sassasaa sasesuaana TP sassossasuaa saasaysasadisokensayaa measurement range min oP eee ee eee TPR Ree eee eee eee eee ee ee Target 7 222722 EL 7 Fig 8 Relation of sensor monitor signal and measurement rang
10. the maximum output current of the amplifier and by the mechanical properties of the PZT mechanics like moving mass damping and resonant frequencies Dynamic calibration optimizes step response and suppresses resonance overshoot and oscillation These servo loop notch filter and slew rate limitation setting procedures are all described in detail in the E 802 Servo Control Submodule User Manual 4 3 Adjustment for Systems with E 509 Ex PlSeca Models 4 3 1 Calibrated System Calibration routine ensures linearity of the output signal over the measurement range within the specified linearity for the calibrated range setting The linearity error of a measurement is the maximum deviation of the output from a straight line between minimum and maximum output If ordered together a PlSeca single electrode capacitive measurement system consists of the sensor probe D 510 series the signal conditioner electronics E 509 Ex and connecting cables This system is calibrated together at Pl and shipped with a corresponding calibration sheet During calibration the measurement range and bandwidth are preset to the appropriate values In the calibrated range the minimum probe to target gap equals 50 and the maximum gap 150 of the measurement range value Release 2 8 4 WWW pi ws Page 19 E 509 Position Servo Control Module User Manual PZ 77E If not ordered otherwise the following settings are used for calibration see p 27 for different
11. the three channels The leads of this open ended cable are color coded white channel 1 brown channel 2 green channel 3 shield GND D 893 32 Sensor Monitor cable comes with each capacitive sensor version E 509 CxA E 509 Ex Note The purpose of this cable is simply to split up the SENSOR MONITOR output signal 6 pin LEMO to three separate BNC connectors The cable is also specially designed for low noise operation The BNC connectors are each labeled with the channel number 3214 Banana Plug For single plate PISeca capacitive sensor reference plane ground MM connection Shown at right disassembled before installation of lead Fig 1 Banana plug Single Plate Capacitive Sensor Probes Different size sensors are available for the E 509 E03 and E 509 E3 single plate capacitive sensor versions The sensors must thus be ordered separately D 510 020 PlSeca Single Electrode Capacitive Sensor Probe 8 mm diameter 20 um nominal range 40 um 50 um and 100 um extended ranges D 891 01E connecting cable included D 510 050 PlSeca Single Electrode Capacitive Sensor Probe 12 mm diameter 50 um nominal range 100 um 125 um 250 um extended ranges D 891 01E connecting cable included D 510 100 PlSeca Single Electrode Capacitive Sensor Probe 20 mm diameter 100 um nominal range 200 um 250 um 500 um extended ranges D 891 01E connecting cable included oee the sensor documentation for information
12. with a particular E 509 control module the devices then belong together Replacement of either one or the other requires new calibration runs to obtain the specified system accuracy 4 1 Static Calibration Proper static calibration makes it possible to accurately drive the PZT system to absolute positions with an external analog control signal running over a 10 V range and without reaching the output voltage limits of the amplifier and causing overflow conditions Static calibration consists of zero point adjustment and static gain adjustment and for capacitive sensor versions ILS adjustment The adjustments are to some degree interdependent and should be repeated until stable settings are obtained NOTE Zero point adjustment is the only calibration operation regularly required in most application environments The following subsections describe the static calibration procedure for one channel Note that calibration must be performed separately on each channel 4 1 1 Equipment Needed Zero point adjustment For calibration in analog offline operation an adjustable voltage source from 0 to 10 0000 V is needed If a display or computer control module e g E 516 or E 517 is present in the system zero point adjustment can be performed without additional equipment Otherwise a precision voltmeter is required Release 2 8 4 WWW pi ws Page 15 E 509 Position Servo Control Module User Manual PZ 77E Static gain sensor range
13. 0 5a At the maximum separation of the sensor plates at 150 of the nominal range d71 54d the monitor signal reaches 5 V Sensor Monitor Zero Adjustment Capacitive Sensor s Capacitive Sensor T i Sm Processing m signal TTL ca ae Fig 16 Two plate capacitive sensor version sensor processing and sync signals The PROBE plate has a brown cable or is labeled with P The TARGET plate has a yellow cable or is labeled with T Connect the PROBE plate with the PROBE connector and the TARGET plate with the TARGET connector NOTE A capacitive sensor consists of a matched pair of one PROBE and one TARGET plate The pair used to tune the E 509 module to best performance should also be used in the application For highest precision you should not mix up different probes and targets If you switch the PROBE and TARGET the sensor system will work but results will not be as accurate as specified For more details on capacitive sensors see the Capacitive Sensor User Manual Release 2 8 4 WWW pi ws Page 35 E 509 Position Servo Control Module User Manual PZ 77E 7 3 4 Connection of Single Plate PISeca Capacitive Sensors The E 509 E3 and E 509 E03 have the triaxial sockets required to connect with PlSeca single plate capacitive sensors The sensor cable carries the sensor signal surrounded by an active shield all inside a grounded shield The conductive reference plane is electrically connected
14. 1 2 PICSCHDEG WSC pec cc ES 7 1 3 Model SUN VOY c ERU NREUS 7 1 4 FIOMU ANGI TOI I IT 9 2 QUICK Stat me 9 3 E 509 DESIGN enm 11 3 1 Signal Path Diagram ccccsccsscessecceseeeseeeeeeeseeeeseeeeseeeseeeseeeses 12 3 2 1018 9 8 816 RR EE 13 3 3 Sensor Processing and Servo Control Functions 14 4 E 509 Calibration Routines 15 4 1 otatic GallbFatlorisssc cess cvs cada roads ratu d Da cf dvo sa ev eeu a cde a ae vss 15 4 2 Dynamic Calibration rt 19 4 3 Adjustment for Systems with E 509 Ex PISeca Models 19 5 DISPOSAL e 22 6 E 509 Technical Data 23 6 1 Two Plate Cap Sensor on board Sensor Processing 25 6 2 Single Plate Cap Sensor on board Sensor Processing 27 T Pini ASSIGBITIents ionis iav vu Cu DRE PER REN SV AU ER DOREM E NE 30 T 1 32 Pin Main Connector DIN 41612 nnnm 30 71 2 SENSOR MONITOR Output eeeereeennnnnnennn 31 7 3 Sensor COMNECUONS saina 33 8 Appendix Single Plate PlSeca Capacitive Sensors36 8 1 Measuring FP MNCIDIC mescina eee bees ceccec sone cieuhenecieebenienss 36 8 2 WICASUFEMENT Range erates ater UR odds oon ue tactile 37 8 3 BaridwidLtissssasceuceie viu sa Cet c pedi sa eo ra eus a at Ud O ta ct eed a Evo cede tug 37 8 4 Wig c O ROEG 37 8 5 Target iN EE I Lm MIT 38 8 6
15. 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes e To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Release 2 8 4 www pi ws Page 22 E 509 Position Servo Control Module 6 E 509 Technical Data Function Number of axes Sensor Servo characteristics Sensor type Sensor channels Measurement range extension Sensor bandwidth Noise factor Ext synchronization Temperature drift Static resolution Dynamic resolution Linearity nominal range Interface and operation Rear connector Sensor output Sensor output impedance DC E 509 C1A E 509 C2A E 509 C3A Sensor electronics and position servo controller W273 P proportional integral analog notch filter 2 plate capacitive ERARE 0 56 0 68 0 75 1 0 default 1525529253 0 3 to 3 kHz jumper settable up to 10 kHz on request 0 115 ppm NHz see note possible 30 ppm C see note Linearity error 0 1
16. 3 PZT Servo Control Module three channels for LVDT sensors E 509 C1A PZT Servo Control Module one channel for 2 plate capacitive sensors E 509 C2A PZT Servo Control Module two channels for 2 plate capacitive sensors E 509 C3A PZT Servo Control Module three channels for 2 plate capacitive sensors E 509 E3 PZT Servo Control Module three channels for single plate PlSeca Capacitive sensors E 509 E03 Signal conditioner sensor excitation and readout module three channels for single plate PlSeca capacitive sensors no servo control Most SGS and LVDT versions cannot be distinguished by the front panel Release 2 8 4 WWW pi ws Page 7 1 3 1 1 3 2 1 3 3 E 509 Position Servo Control Module User Manual PZ 77E Submodules pre installed on the E 509 E 801 1x Sensor processing submodule for SGS sensors present on E 509 Sx E 509 S3S E 801 2x Sensor processing submodule for LVDT sensors present on E 509 Lx E 802 5x Position Servo Control submodule present on all except E 509 E03 The submodules are described in separate manuals E 801 submodules in PZ117E E 802 55s in PZ150E and all former E 802 5x versions in PZ113E The appropriate manuals are included with your E 509 module s Standard Accessories E 808 90 Sensor Monitor cable comes with three channel SGS and LVDT sensor versions E 509 S3 E 509 L3 Note The purpose of this cable is simply to split up the SENSOR MONITOR output signal LEMO for
17. N 15V INAV OUT ch2 control 14a OUT Display ch OUT Display ch3 OUT Control ch3 LVDT signals meaningless on SGS versions Note Pins labeled with nc may be used internally and must not be connected externally 7 1 2 LVDT and SGS 1 Channel Versions E 509 S1 E 509 L 1 6a INV IN IB 8a N 15V 8c INAS internal use Bus A internal use Bus B Note Pins labeled with nc may be used internally and must not be connected externally Release 2 8 4 WWW pi ws Page 30 7 2 7 2 1 E 509 Position Servo Control Module User Manual PZ 77E Capacitive Sensor Versions E 509 C1A E 509 C2A E 509 C3A E 509 E3 E 509 E03 anna es at Function on E Ex Gon pee output CH1 v ot e tv a E TR MEN 10a me f gt poe Ie fo 12a internal use 12c Control signal T n C output CH2 Ma JDispayCH2 noe Me jDspayCHi LG meme f e fone oe Dee f ns n c 18a intemaluse no no 18 __ internaluse Control signal Control signal to n C input CH1 output CH3 JP210 pir 1 Control signal to Control signal n C input CH3 JP210 input CH2 ES 2 24c SYNC i u e Servo ON OFF ON OFF ch2 ch1 overflow CH1 Servo n C a ch3 ee loverfiow CH2 n c E m NOED E E CMM CON Same as on E 509 C3A E 509 E03 has no servo controller and hence all servo related pins are not connected n c No Connection may be used on the backplane a
18. OR PROCESSING ZERO N ri E 509 SERVO CONTROLLER 2 412 SENSOR OUT D I0V Fig 4 Signal path only one channel shown in a system with an E 509 Servo Controller a PZT power amplifier and an E 516 Computer Interface and Display Module Note that Control In and DC offset on the amplifier module do not control the amplifier directly but only determine Control Out for the other modules Some amplifiers can invert these signals and the E 509 output can be inverted or shifted but if Servo is ON the E 509 Target In must be in the 0 to 10 V range if Servo is ON Note also that the E 802 servo mode is determined by a combination of the toggle switch position and the state commanded by the E 516 Note that E 517 Interface and Display modules act in the same way as E 516s Release 2 8 4 WWW pi ws Page 12 E 509 Position Servo Control Module User Manual PZ 77E 3 2 Submodules Some functions of the E 509 are implemented on plug in submodules as discussed in the following sections It should not be necessary to remove or replace the submodules but if you ever do so be sure to face the component sides as illustrated Fig 5 Channel 2 identical layout Channel 2 identical layout Channel 3 identical layout Channel 3 identical layout SGS and LVDT Versions Capacitive Sensor Servo Versions Fig 5 Submodule locations on E 509 modules Note also sensor gain potentiometer locations
19. Piezo Nano Positioning PI PZ 77E User Manual E 509 Position Servo Control Module Release 2 8 4 Date 2009 02 20 This document describes the following product s B E 509 Lx Position Servo Control Module for LVDT sensor B E 509 Sx Position Servo Control Module for SGS B E 509 CxA Position Servo Control Module for Capacitive sensors B E 509 E3 Position Servo Control Module for Single Plate PlSeca Capacitive Sensors B E 509 E03 Signal Conditioner for Single Plate PlSeca Capacitive Sensors Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Piero Nama Pasitioning PI Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Ramersirasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Position Servo Control Module Signal Conditioner Module Modal Numbers E 509 Lx E 509 5x E 509 Cx A 509 E x Product Options all complies with the following European directives 2DOBG 985 EC Low voltage directive LVD Z004 106 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EM 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Volta
20. Then the nominal displacement of 100 um will be reached with PZT out in the 80 V to 100 V range i e there is a cushion of 10 V available to keep the amplifier from clipping the output when the controller is within the nominal servo control range 4 1 3 Second Order Polynomial Linearization cap sensor versions only The capacitive sensor electronics on the E 509 CxA and E 509 Ex versions includes a trim pot ILS for minimizing second order polynomial non linearity To adjust the ILS proceed as follows 1 Before powering up the system make sure the PZT actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems make sure the PZTs are always connected to the same controller modules 2 Mount an external gauge to measure the PZT displacement Only if the external measurement system offers higher precision than the capacitive sensor can the maximum performance be achieved With PZT power amplifier powered down the external gauge should read 0 if it does not note the offset and subtract it from subsequent readings CAUTION ES Ted qeT 345 00 e Hazard Modular Boards Subject to Damage Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when installing or removing boards or working on an open controller 3 Remove the E 509 from the chassis and reconnect through the extension bracket not included
21. ain active even when servo mode is OFF This can cause a 5 shift of the open loop output voltage to occur when the notch filter frequency is changed For more details and calibration procedures see Section 4 and the E 802 Servo Control Submodule User Manual Release 2 8 4 WWW pi ws Page 14 E 509 Position Servo Control Module User Manual PZ 77E 4 E 509 Calibration Routines For most applications only the zero point has to be realigned from time to time to compensate for temperature changes Further adjustments are not required and not recommended as long as system components are not exchanged or modified NOTE All basic calibration adjustments are done in PI lab before shipment The PZT system is delivered ready for operation Except for occasional zero point adjustment it should not be necessary to calibrate the system Therefore calibration should only be done if the controller actuator configuration is changed or elements are replaced The full calibration and adjustment procedure for the E 509 Position Servo Control Module includes static calibration zero point and sensor gain adjustment and dynamic calibration servo loop slew rate and step response In addition on the capacitive sensor versions the ILS integrated linearization system can be adjusted to minimize 2nd order polynomial non linearities Calibration must be performed separately on each channel NOTE The PZT actuator is calibrated in conjunction
22. and communicate automatically over the backplane see signal path diagram p 12 The main parts of the E 509 are the sensor signal processing circuit and a servo controller with adjustable P I filter and optional notch filter to allow operation close to the mechanical resonant frequency The E 509 hardware design comprises the basic PCB module and one or two small PCB submodules for each channel Implemented on submodules are the servo control algorithms and in the case of SGS and LVDT sensor versions the sensor processing 1 1 Safety Precautions eq VU BLO ES Ted qeT 34 04 e Hazard Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when installing or removing boards or working on an open controller CAUTION High Voltage The piezo amplifiers used with this product are high voltage devices capable of generating high output currents They may cause serious or even lethal injury if used improperly Take special care if connecting products from other manufactures CAUTION Avoid Resonance Damage Most of the PZT actuators used with the system described in this manual can be permanently damaged by uncontrolled resonance The system must never be operated too close to the resonant frequency If you hear or see resonant behavior switch off the unit Release 2 8 4 WWW pi ws Page 6 1 2 1 3 E 509 Position Servo Control Module User Manual PZ 77E
23. ave JP2 MASTER SLAVE Default setting SLAVE TST Tt TCS Fig 10 Capacitive sensor versions Master Slave jumper setting upper right of board see Fig 16 for signal routing Note In SLAVE position the internal clock is disabled i e an external clock such as that in an E 516 or E 517 Display Module is required If an external clock is not available the jumpers must be set to MASTER Attention If an external clock is used while the jumpers are set at MASTER there may be interference If that occurs check for the correct jumper settings 6 2 Single Plate Cap Sensor on board Sensor Processing The E 509 E3 and E 509 E03 versions for use with PlSeca single plate Capacitive sensors also have the sensor processing on the main board The adjustment elements affecting sensor processing which are described in this section are for use only if the controller actuator configuration is changed or elements are replaced Do not hesitate to consult with PI before proceeding with calibration procedures See also the E 509 Calibration Routines section on page 15 Note that the zero adjust trim potentiometers TRx02 are accessible through the front panel ZERO see Fig 3 on page 9 Adjustment of other elements involves removing the module from the chassis OF V UM BLO ES Ted qeT 34 0 e Hazard Modular Boards Subject to Damage Electronic components are sensitive to electrostatic electricity Take appropriate electrostati
24. ble can be used Release 2 8 4 WWW pi ws Page 32 E 509 Position Servo Control Module User Manual PZ 77E 7 3 Sensor Connections 7 3 1 Connection of Strain Gauge Sensors For more details or when replacing actuators see the E 801 Sensor Submodule User Manual MEILEN DII ICD IND D STRAIN GAUGE CONFIGURATION FOR P H2l Z0 P O41 40 P B4l amp n0 P H4l 50 P 844 40 P BH43 60 F H43 50 P H45 40 F H4 5 60 P 043 40 whiloa Z xstrmin gauge an PT stack 2 x strmin gouge an PET stack Z x r amp sisier in PZT hausing Z x resisiar eon caniraller beard 2 xstrmin gauge an PLT stack c x resister in PZT hausing Fig 14 Strain gauge sensor wiring for various actuators Release 2 8 4 WWW pi ws Page 33 E 509 Position Servo Control Module User Manual PZ 77E 7 3 2 Connection of LVDT Sensors Sensors working on the principle of LVDTs usually have a coil with a primary winding two secondary windings and a moving core If an AC current is applied to the primary winding it produces a magnetic field which is concentrated by the soft iron or ferrite core The magnetic field then passes through the two secondary windings and induces a voltage in each If the core is moved from the central position one secondary winding receives more magnetic flux than the other and the induced voltages are different proportional to the movement LVDT transducers normally operate at 3 to 5 Vrms at frequencies between 1 and 20 kHz and have a typi
25. c protection measures when installing or removing boards or working on an open controller Release 2 8 4 www pi ws Page 27 E 509 Position Servo Control Module User Manual PZ 77E Internal clock Sensor signal bandwidth Sensor synchronization JP111 112 5 E 9 oo Fo JP219 5 JP211 12 5 JP107 i 4 m o L1 s NE 3 0203 O JP310 2 5 jat 12 5 Jez E amp e 9o 9 9 E 9 9 59 59 C9 O59 9 NH Tr303 H ILS 1 4 T S Paoa IN exa Cl Polarity of sensor Sensor output range 2 2 5 5 output ag few on 5 V to 5V ll Negative D rmm 7mm a rmm muc a 40 V to 0 V mms rmm a Fig 11 E 509 E3 and E 509 E03 layout x in jumper designations stands for channel number 1 2 or 3 Measurement range extention factor JPx10 JPx11 Jumper Position Jpx01 6 2 1 Adjustment Potentiometers Note Numbering of some jumpers and potentiometers is channel specific x can be 1 2 or 3 depending on the channel number TRx01 sensor gain TRx02 Zero accessible through front panel TRx03 Linearization ILS Release 2 8 4 WWW pi ws Page 28 6 2 2 E 509 Position Servo Control Module User Manual PZ 77E Jumpers and on board Switch JP101 JP110 and JP111 Measurement Range Extension Factor Together these jumpers determine the factor applied to the measurement range Supported are settings for 1 default 2 2 5 and 5 time
26. cal current consumption between 10 and 50 mA The output signal from an LVDT can be expressed as a sensitivity in mV output voltage per volt of supply voltage and per millimeter displacement Typical LVDT output sensitivity is in the range of about 100 to 250 mV V mm depending on the type LVDTs have to be used in conjunction with E 509 Lx versions which are equipped with the E 801 2x AC sensor submodules Shield LEMOSA Connector FFA OS 304 Dwg QAFP 003 hgl_ Fig 15 LVDT Pin Configuration Release 2 8 4 WWW pi ws Page 34 E 509 Position Servo Control Module User Manual PZ 77E 7 3 3 Connection of 2 Plate Capacitive Sensors The sensor probe and target plates form a air capacitor Its capacitance value depending on the separation of the both plates is compared with an internal reference capacitor of C 10 pF Changes of the distance d between the two plates cause a change in capacitance and the resulting signal is related to the deviation from the nominal distance ob At the nominal distance the capacitance of the sensor equals the capacitance of the internal reference capacitor The resulting output voltage Vout is O V with standard setting which can be monitored at the SENSOR MONITOR output at the front panel Us 10 V d ao 1 If the distance of the sensor plates becomes smaller the monitor signal falls negative and will reach 5 V at the closest sensor position which is 50 of the nominal range d
27. e The linearity specified in the datasheet is only valid for the measurement range setting with which the system was calibrated default extension factor 1 The system is calibrated in such a way that the minimum monitor voltage is output when the minimum gap is reached and the maximum monitor voltage when the upper gap limit is reached The default range of the sensor output and hence of the monitor signal is O to 10 V See p 27 for different measurement and sensor output range values If the sensor monitor signal is outside of the valid sensor output range the measurement is outside the calibrated range and the specified linearity is no longer assured NOTE Differing from the standard sensor probes D 510 020 covering a nominal measurement range of 20 um are calibrated for 15 to 30 um Nevertheless the sensor monitor signal covers the full range 10 to 20 um 4 3 3 Howto Adjust Target and Probe Do not interchange signal conditioners connecting cables and or sensor probes after they have been calibrated together The probe ID serial number is noted on labels affixed to the connecting cable and to the signal conditioner Proceed as follows to adjust target and probe for a PISeca sensor channel Preparation optionally requires removing the E 509 Ex module from the chassis see p 27 for details 1 Check the setting for the sensor output range and hence the range of the sensor monitor signal See p 27 for details De
28. e sure the PZTs are always connected to the same controller modules 2 Mount an external gauge to measure the PZT displacement with PZT power amplifier powered down the external gauge should read 0 if it does not note the offset and subtract it from subsequent readings On V UM BLO ES Ted der 346 00 e Hazard Modular Boards Subject to Damage Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when installing or removing boards or working on an open controller 3 Remove the E 509 from the chassis and reconnect through the extension bracket not included To remove the module proceed as follows a Loosen the two Phillips screws on the front panel b Using the grip at the bottom of the front panel pull the module out of the chassis 4 Decide whether you want to calibrate in computer controlled mode online or in analog mode offline Online and offline operation must not be mixed during calibration If you choose offline operation set any computer interface module e g E 516 or E 517 to offline The following steps describe offline operation if you choose online operation use computer commands in place of the control voltage and DC offset to command voltages and position you do not need an external voltage source for computer controlled calibration 5 Set the corresponding switch on the E 509 front panel to Servo OFF 6 Make sure the DC Offse
29. e the control unit in which the E 509 is installed is powered down 2 Connect the PZT actuator sensor cables to the E 509 servo controller With single plate capacitive sensor systems see Section 2 1 2 below On multi channel units make sure that each PZT is connected to the channel with which it was calibrated see label affixed to back of chassis On 2 plate capacitive sensor systems make sure that the Probe and Target sensor cables are not interchanged Release 2 8 4 WWW pi ws Page 9 E 509 Position Servo Control Module User Manual PZ 77E 3 Connect the PZT voltage supply cables to the power amplifier module in the same chassis near the E 509 Again in multi axis systems make sure the proper PZTs are connected to the proper channels CAUTION High Voltage The piezo amplifiers used with this product are high voltage devices capable of generating high output currents They may cause serious or even lethal injury if used improperly Take special care if connecting products from other manufactures CAUTION Avoid Resonance Damage Most of the PZT actuators used with the system described in this manual can be permanently damaged by uncontrolled resonance The system must never be operated too close to the resonant frequency If you hear or see resonant behavior switch off the unit 4 f you have a computer control and or display module in the system e g E 516 or E 517 consult its User Manual for
30. fault range is 0 to 10 V 2 Check the setting for the measurement range extension factor Default factor is 1 3 Check the polarity setting for the sensor output See p 27 for details Default polarity is positive Release 2 8 4 WWW pi ws Page 21 E 509 Position Servo Control Module User Manual PZ 77E Adjustment procedure valid with default settings for sensor output range measurement range and polarity 1 Mount sensor probe as described in the Technical Note D510T0001 Note that the minimum allowable probe to target gap is 10 um A minimum gap of 15 um is recommended 2 Turn the corresponding Zero potentiometer fully counterclockwise Adjust sensor probe and target so that the gap is equal to the nominal measurement range e g with D 510 050 50 um The sensor monitor signal then must be approx 0 V 4 Adjust the Zero potentiometer so that the sensor monitor signal is approx 5 V 5 Reduce the gap between sensor probe and target so that it is half the nominal measurement range e g with D 510 050 25 um The sensor monitor signal should then be 0 V 6 Enlarge the gap between sensor probe and target so that it is 1 5 times the nominal measurement range e g with D 510 050 75 um The sensor monitor signal should now be 10 V NOTE When the sensor output voltage range selection is changed the voltage value may be up to 2 different from the expected value 5 Disposal In accordance with EU directive
31. g g l M Fig 19 Definitions measurement range and mid range distance have identical values Due to Pl s proprietary signal conditioner electronics design the mid range distance is always identical to the selected measurement range The probe to target gap may vary from 50 to 150 of the measurement range The sensor capacitance is the same as that of the reference capacitance in the electronics see Fig 17 on p 36 For the nominal range Ce is 5 pF Different reference capacitances can be used to extend the nominal standard measurement range The measurement range is the range for which the sensor can be calibrated for linear operation see p 38 The measurement range depends on the sensor area the larger the area the larger the possible range With the same sensor size the measurement range can be changed using the measurement extension range factor default factor 1 see p 27 for details The sensor resolution at different measurement extension range factors will be different Bandwidth Electronic noise and sensor signal bandwidth are interdependent Limiting the bandwidth reduces noise and thereby improves resolution The mid range distance also influences the resolution the smaller the mid range distance of the system the lower the absolute value of the electronic noise A low bandwidth setting removes unwanted high frequency noise and ensures the best possible resolution For high dynamics applications howe
32. ge Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measures are installation of the component in a suitable shielded enclosure and usage of sultable connectors February 11 2009 i Karlsruhe Germany a Dr Karl Spanner President Pimymik inistrumenrte Pi Gmb amp Co KS Aud der PBipmersir 1 782 28 Karlsruhe Germany Mowing the MancWorld wWALLNSE Phone 40 72148 40 0 Fax 40 72148 47 209 E mail infeDoi ws Physik Instrumente Pl GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PlLine amp PIFOCG PiezoWalk amp NEXACT NEXLINE NanoCube NanoAutomation Copyright 1999 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente Pl GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2009 02 20 Document Number PZ 77E Eco Bro Release 2 8 4 E 509 User PZ77E284 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi
33. information on commanding the system and setting servo control parameters In particular make sure the front panel Servo Control switch is properly set for the type of operation you require 5 Power up the system If you see or hear resonant behavior power down immediately and check the servo control parameters See the Dynamic Calibration Section on p 19 for more information 2 1 2 Systems with E 509 Ex PlSeca Models NOTE Motion of the connecting cable should be avoided because of capacitive influences If possible the application should be designed with sensor probe always at rest and the target the moving part of the system 1 Mount the sensor probe in your intended application as described in the Technical Note D510T0001 Note that the minimum allowable probe to target gap is 10 um A minimum gap of 15 um is recommended CAUTION Take care not to shift the sensor probe when connecting the cable 2 Connect the sensor probe to the Sensor In socket of the E 509 Ex electronics unit using the D 891 01E cable comes with the sensor Make sure that each sensor probe is connected to the channel with which it was calibrated see label affixed to back of chassis 3 Connect the target surface to the Sensor Gnd socket on the front of the E 509 Ex mating banana plug included Make sure that each target surface is connected to the channel with which the corresponding sensor probe was calibrated see label affixed to back of cha
34. nd must not be connected JP210 shorted on E 509 C2A default connects CH3 input to CH3 output i e CH3 bypassed SENSOR MONITOR Output Capacitive sensor versions LEMO Connector FGG 0B 306 CLAD56 6 pin pin 1 ch1 i pin 2 ch1 Fig 12 Six pin pin 3 ch2 LEMO pin 4 ch2 EPA pin 5 ch3 monitor socket OO pin 6 ch3 shield GND Each capacitive sensor version E 509 CxA E 509 Ex comes with the D 893 32 Sensor Monitor cable 2m The purpose of this cable is simply to split up the SENSOR MONITOR output signal 6 pin LEMO EGG 0B 306 CLL onto three separate BNC connectors The BNC connectors are each labeled with the channel number Release 2 8 4 WWW pi ws Page 31 7 2 2 7 2 3 E 509 Position Servo Control Module User Manual PZ 77E Three channel SGS and LVDT sensor versions E 509 S3 E 509 L3 The SENSOR MONITOR socket LEMO on the front panel also carries the signals from all three channels Each E 509 83 E 509 L3 E 509 S3S comes with the E 808 90 Sensor Monitor cable The purpose of this cable is simply to split up the SENSOR MONITOR output signal LEMO for the three channels The leads of this open ended cable are color coded white channel 1 brown channel 2 green channel 3 shield GND 3 g L 1 2 Fig 13 Three pin LEMO sensor monitor socket Single channel SGS and LVDT sensor versions E 509 S1 E 509 L1 With single channel SGS and LVDT versions a standard BNC ca
35. ns have E 801 1x submodules which provide DC sensor excitation and readout LVDT versions have E 801 2x submodules which provide AC sensor excitation They can also be connected to SGS sensors if necessary On multi channel E 509s the LVDT excitation frequencies are synchronized by the appropriate use of master and slave E 801 2x versions or jumper settings Should you ever need to make any adjustments on the sensor submodules refer to the E 801 User Manual for more details Capacitive sensor versions have the sensor electronics on the E 509 See Section 6 1 or 6 2 of this manual for details E 802 Position Servo Control Submodules The E 802 submodule processes the control signal for the amplifier driving the piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 The servo loop logic compares the TARGET IN and the sensor signal current position to generate the SERVO CONTROL OUT amplifier control signal using an analog proportional integral P I algorithm For details see the signal path diagram Fig 4 on 12 The E 802 can operate in either servo OFF mode or servo ON mode The mode is determined by a combination of the active low SERVO ON OFF signal and the front panel SERVO TOGGLE SWITCH for servo OFF mode both must be in the OFF condition see Signal Path diagram p 12 With the E 802 55 and higher versions of the E 802 the notch filter and slew rate limiter rem
36. oard Switch JPx01 JPx06 Code Selection for measurement range see table below Default setting 1 0 factor of extention of measurement range fecal 0 68 0 75 1 0 1 25 Jumper Position E Dwg code wmf JPx07 Output Polarity Setting positive negative Default setting positive Position of the Jumper JP107 JP207 JP307 Polarity of Output Positive Negative JPx08 and JPx09 Output Offset setting Default setting 0 V 10 V Typical Application Using with PI s position Using as a position Oo M PP control electronics detector Special application Position of Jumpers JP108 and JP109 JP208 and JP209 JP308 and JP309 Voltage range of output OV 10V For stable measurements the front panel zero potentiometer should be set to either CW or CCW end position Select the desired offset by setting the jumpers Switch SWx01 Bandwidth Setting Default setting 1500Hz position C Band Width 300 Hz 1500 Hz 3000 Hz Switching of SW101 SW201 SW301 Note All numbers for jumpers and switches refer to channel 1 channel 2 or channel 3 Release 2 8 4 WWW pi ws Page 26 E 509 Position Servo Control Module User Manual PZ 77E Jumper Settings for Master and Slave On systems with multiple E 509s or another timing source the excitation frequencies are synchronized by the appropriate use of jumpers for master and slave JP1 and JP2 both set to same side JP1 MASTER SLAVE left Master right Sl
37. on mounting and performance For versions and details of the submodules refer to the E 801 Sensor Submodule User Manual PZ 117E and the E 802 User Manual PZ150E or PZ 113E The E 509 CxA and E 509 Ex have sensor processing electronics on the main module Release 2 8 4 WWW pi ws Page 8 E 509 Position Servo Control Module 1 4 Front Panels PZT SERVO PZT SERVO CONTROLLER CONTROLLER NN OFL Ni 2 SENSOR OFF OFF SENSOR MONITOR SENSOR MONITOR Fig 2 LVDT and SGS versions share the same front panels User Manual PZ 77E PIlSeca Signal Conditioner PZT SERVO CONTROLLER PET Serva v Servo CI Sensor and In On eo or On e Zera Servo Ch2 Sensor Gnd In On o O0 w Q or Off Sensor Gnd In On ec w Q orL ON MONITOR Ee Sod Monitor i Tepes 1 3 a IY E 509 E03 Fig 3 Typical front panels of the different capacitive sensor versions The predecessors of E 509 CxA models were E 509 Cx they differ in SENSOR MONITORH socket 2 Quick Start NOTE To achieve optimum measurement stability it is recommended to wait at least 30 minutes after powering up the system 2 1 1 General Procedure This quick start assumes that your E 509 was ordered with an appropriate chassis and was calibrated at the factory with the PZT actuators with which it will be operated To put the system into operation proceed as follows 1 Make sur
38. play module e g E 516 or E 517 is installed connect a voltmeter to the PZT socket PZT output voltage on the amplifier in parallel with the PZT Release 2 8 4 WWW pi ws Page 16 E 509 Position Servo Control Module User Manual PZ 77E 11 Again using the ZERO potentiometer adjust the PZT output voltage as follows For HV amplifiers set voltage to approx 50 V For LV amplifiers set voltage to approx 5 V The zero point setting is now close enough to allow checking of the PZT output range 12 Check the PZT output range by applying a voltage which goes from O0 V to 10 V to the CONTROL INPUT and watching the voltage at PZT socket in parallel with the PZT a If the output voltage ranges from 10 V to 100V then zero point adjustment is finished b Ifthe output voltage exceeds the range from 10 V to 100 V the zero point should be shifted so that the PZT output voltage range is in the center of the amplifier output range For this purpose return the control input to O V and repeat step 11 using a slightly different value e g 10 V for an LVPZT Example Assume the LVPZT used requires 90 V to achieve the nominal displacement of 100 um Furthermore take into account that the maximum voltage at the LVPZT should not exceed 100 V in order to maintain a long lifetime The E 503 E 505 LVPZT amplifiers have an output range from 20 V to 120 V In this case the zero position PZT voltage can be set within the range from 10 V to 10 V
39. probe and a conductive grounded target surface The target or structure under test should provide a noise free low impedance return path To verify that a proper return path is present connect a ground lead directly from the target to the corresponding Sensor Gnd ground connector on the E 509 Ex module The surface structure of the target has a strong influence on linearity of the system The target area size must be considerably larger than the sensor area by at least 50 Motion of the connecting cable should be avoided Thus the sensor probe should always be the part at rest and the target the moving part Target and sensor surfaces must be clean and free from contaminants It is recommended that the surface has a quality of N4 and better to guarantee optimum performance Measurement against a grounded semi conductor is also possible Terminology Measurement range the range over which measurements can be performed The actual measurement range depends on the sensor probe size the extension factor set with the jumpers JPx10 JPx11 and JPx01 see p 29 and whether or not the unit was ordered with the standard 1 or with the alternative 2x 2 5x or 5x measurement extension factors active Nominal measurement range as defined in the technical data of the sensor probe e g D 510 050 has a nominal measurement range of 50 um Difference between minimum and maximum probe to target gap Extended measurement ranges the measurement
40. s the standard range of the sensor head used Corresponding settings are shown in Fig 11 Switch SWx01 Sensor bandwidth setting Standard values are 300 Hz 3 kHz default or 10 kHz corresponding positions show in Fig 11 JP1 amp JP2 Master and Slave Internal External Clock Both jumpers must be set to the same side one enables disables the internal clock the other routes the clock signal Default setting is SLAVE i e to the right shorting 2 3 as shown in Fig 11 Note In SLAVE position an external clock such as that in an E 516 or E 517 Display Module is required If an external clock is not available the jumpers must be set to MASTER If an external clock is used while the jumpers are set at MASTER there may be interference If that occurs check for the correct jumper settings JP107 Polarity If JP107 is set to negative the output signal is inverted if SERVO CONTROL OUT Fig 4 is to be used by standard PI electronics this will not be necessary JP108 JP109 Output Offset Supported sensor output ranges are O to 10V default should be used with standard applications 5 to 5 V and 10 to 0 V Settings shown in Fig 11 Release 2 8 4 WWW pi ws Page 29 E 509 Position Servo Control Module User Manual PZ 77E T Pin Assignments 7 1 32 Pin Main Connector DIN 41612 T 1 1 LVDT and SGS 3 Channel E 509 S3 E 509 L3 Pin No Function Pin No Function 6a N5V NH5V 8a lN
41. ssis Release 2 8 4 WWW pi ws Page 10 E 509 Position Servo Control Module User Manual PZ 77E 4 Connect the included E 808 90 sensor monitor cable to the Sensor Monitor 1 3 socket The sensor monitor signal shows the current position of the sensor probe in relation to the target and the selected measurement range See Section 4 3 3 for details on how to adjust target surface and probe 3 E 509 Design The E 509 module is designed to plug into a compatible PI chassis e g E 500 E 501 or E 470 but not E 50x 621 There it operates in conjunction with other modules such as power amplifiers and display or remote control units See the E 500 E 501 User Manual PZ 62E and the manuals of other devices in your system for details Most questions about E 509 operation can be answered by reference to the signal path diagram in the next section Release 2 8 4 WWW pi ws Page 11 E 509 Position Servo Control Module User Manual PZ 77E 3 1 Signal Path Diagram FRONT PANEL REAR CONNECTOR SERVO ON OFF IEFF 4BB RS 252 OPERATING SYSTEM PC CONNECTION TARGET QUT 2 1 2V TARGET IN 2 12V SENSOR PZT MONITOR E 516 COMPUTER INTERFACE DC OFFSET CONTROL QUT CONTROL IN PZT AMPLIFIER IN HV OUT CONTROL IN SERVO ON SERVO a ON OFF TOGGLE SWITCH I a3 OFF E 802 SERVO SLEW RATE CONTROL OUT E LIMITER i NOTCH FILTER SENSOR MONITOR OUT a Ln SENS
42. t potentiometer on amplifier module is set to zero full counterclockwise Power up the system Make sure that any computer control module is consistent with the servo OFF state Release 2 8 4 WWW pi ws Page 18 E 509 Position Servo Control Module User Manual PZ 77E 8 Scan the voltage at CONTROL INPUT from 0 V to 10 V and read the PZT displacement using the external gauge With 10 V the external gauge should show the PZT at about nominal expansion Adjust with the sensor gain trim potentiometer Fig 6 Sensor gain is now close enough to allow switching servo ON 9 Switch servo ON 10 Adjust the sensor monitor signal to exactly 10 000 V using the gain adjustment potentiometer on the E 802 servo submodule different versions of this submodule exist see the E 802 User Manual for gain adjustment on your unit 11 Adjust the PZT position to the nominal expansion value using the sensor gain adjustment Fig 6 from step 8 Now because servo ON the sensor monitor value will not change 12 Repeat the last two steps until you get stable readings If the Gain settings have been changed the zero point adjustment starting with section 4 1 2 should be repeated and then the static gain rechecked Sensor gain adjustment Channel 2 identical layout SGS and LVDT Versions Capacitive Sensor Versions Fig 6 Sensor gain adjustment location 4 2 Dynamic Calibration Dynamic performance of the PZT system is determined by
43. to the unit on a separate cable via a banana jack See Section 4 3 on p 19 the Appendix below and the documentation provided with the PlISeca sensor heads for mounting and performance details 8 Appendix Single Plate PISeca Capacitive Sensors 8 1 Measuring Principle The measuring principle of a capacitive dimensional measurement system is based on the function of an ideal parallel plate capacitor The sensor probe surface and the conductive target surface form the two plate electrodes The measurement itself is a measurement of the capacitance between sensor probe and target surface which is directly proportional to the change in the gap Probe Target L Fig 17 Circuitry principle for single electrode capacitive measurement For the nominal range Cref is 5 pF The PlSeca sensor probes feature a special guard electrode that guarantees the homogeneity of the electric field by protecting it from outside influences Fig 18 Capacitive sensor working principle The capacitance C is proportional to the active area A o is constant is the dielectric constant of the material between the plates generally air Release 2 8 4 WWW pi ws Page 36 8 2 8 3 8 4 E 509 Position Servo Control Module User Manual PZ 77E Measurement Range The measurement range depends on the size of the active sensor area as well as on the electronics used Measurement range distance YY Target YY PM M g
44. ttable 0 14 ppm VHz see note possible lt 1 mV C lt 0 001 lt 0 0025 lt 0 1 32 pin connector DIN 41612 OV 10V Page 23 E 509 Position Servo Control Module Sensor connector Sensor monitor Sensor monitor output impedance DC Sensor monitor socket Linearization Target ground connector Miscellaneous Operating temperature range Dimensions Mass Operating voltage E 509 C1A E 509 C2A E 509 C3A LEMO EPL 00 250 NTD 0V 10V 10 k ohm LEMO 6 pol FGG 0B 306 CL AD56 ILS LEMO EPL 00 250 NTD 5 bis 50 C Euroboard one 7 T slot wide 3 H high 0 2 0 25 0 35 kg md 5 bis 50 C Euroboard one 7 E 509 L1 E 509 81 E 509 L3 E 509 S3 E 509 E3 LEMO LEMO LEMO ERA 0S 304 CLL ERA 0S 304 CLL ECP 00 650 NLL see note see note 543 Triax 0V 10V 0V 10V 0V 10V BNC BNC LEMO 6 pol ERA 05 303 CLL ERA 05 303 CLL FGG 0B 306 CL AD56 ILS ILS banana socket 5 bis 50 C 5 bis 40 C Euroboard one 7 Euroboard one 7 T slot wide 3H T slotwide 3H T slot wide 3 H high high 0 2 0 35 kg 0 2 0 35 kg 0 3 kg 15 V 15 V 15 V 11 This signal also on DIN 41612 32 pin rear connector e Requires E 530 E 531 power supply as in compatible PI chassis e g E 500 E 501 Release 2 8 4 WWW pi ws User Manual PZ 77E E 509 E03 LEMO ECP 00 650 NLL 543 Triax OV 10V LEMO 6 pol FGG 0B 306 CL AD56 ILS banana socket
45. ver the bandwidth can be set up to 10 kHz Linearity The linearity of a measurement denotes the constancy of the proportion between the change in probe target distance and the change in output signal Usually linearity is given as linearity error in percent of the full measurement range A linearity error of 0 1 with range of 100 um means a maximum error of 0 1 um Linearity error has no influence whatsoever upon resolution and repeatability of a measurement Release 2 8 4 WWW pi ws Page 37 8 5 8 6 E 509 Position Servo Control Module User Manual PZ 77E Linearity is influenced to a high degree by the homogeneity of the electric field and thus by any non parallelism of the probe and target in the application PI capacitive position sensor electronics incorporate a proprietary design providing superior linearity low sensitivity to cable capacitance low background noise and low drift The Integrated Linearization System ILS compensates for non parallelism influences Linearity of the electronics output is optimized during the calibration procedure performed at PI ILS adjustment The smaller the sensor heads the more adverse influences on linearity are caused by poor parallelism between sensor probe and the target plane See Technical Note D510T0001 for details Replacing one or more parts of a calibrated system may worsen the linearity Target Plane The PlSeca system measures changes in capacitance between the sensor
46. ws About This Document Users of This Manual This manual is designed to help the reader to install and operate the E 509 Position Servo Control Module It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 509 Position Servo Control Module as well as the procedures which are required to put the associated motion system into operation This document is available as PDF file Updated releases are available from www pi ws or email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The other system components and any software tools which might be delivered with E 509 Position Servo Control Module are described in their own manuals All documents are available as PDF files from www pi ws or by email from your Physik Instrumente Sales Engineer or info pi ws E 509 Position Servo Control Module User Manual PZ 77E Contents 1 leiigolo Ufeii o eso oU 6 1 1 Safety Precautii hs aoi eed ice Tv Ia aT Doro b aio ndn Dieu iss um uen 6
47. you use your own LVDT or capacitive sensors adjust the sensor mechanical zero position LVDT core or capacitor plate position For details see the sensor or sensor submodule documentation 3 Decide whether you want to calibrate in computer controlled mode online or in analog mode offline Online and offline operation must not be mixed during calibration If you choose offline operation make sure any computer interface module e g E 516 or E 517 is set to offline The following steps describe offline operation if you choose online operation use computer commands in place of the control voltage and DC offset to command voltages and position you do not need an external voltage source for computer controlled calibration Make sure the control input on the amplifier module is O V 5 Set the switch on E 509 front panel to Servo OFF required in computer mode also 6 Power up the system Make sure that any computer control module is consistent with servo OFF Turn the DC OFFSET potentiometer on the amplifier module full clockwise and than back full counterclockwise 0 V to exercise the PZT 8 Adjust the ZERO potentiometer so that the sensor monitor signal is O V For offline calibration read it either with a voltmeter on the SENSOR MONITOR socket or on a display module in the system The zero adjustment is now close enough to allow switching on servo control 9 Switch the channel to closed loop SERVO ON 10 If no dis
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