Home

B-RAX 3200 User Manual

1. 210x8 Dual cut out panel InstruTech p n 001007 All dimensions in inches The single cut out and dual cut out rack mountable panels shown above are available from InstruTech Panel color matches the front panel of B RAX units Screws for mounting to rack enclosure are included InstruTech Inc Page 16 Instruction Manual B RAX 3200 3 1 3 Mechanical Installation lonization Gauge iere For more detailed information about the IGM4O0O Hornet hot cathode ionization gauge and CCM500 cold cathode ionization gauge please refer to the User Manual for each of these products Ier tf 2 wEIESREME op on A IGM400 Hot Cathode lonization Gauge CCM500 Cold Cathode lonization Gauge Mount the ionization gauge as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the ionization gauge too close to a gas source inlet may also cause measurement and control instability The ionization gauge can be mounted in any orientation however if possible mount the gauge with port down to help minimize the effect of any particles or condensation collecting in the gauge Do not mount the ionization gauge where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechan
2. 72 8 Serial Comirmiu nications oo eerte eei a EA a Aeddi 73 8 1 Device Specific Serial Communication Info 73 8 2 InstruTech RS232 RS485 Command Protocol Summarg 74 8 3 InstruTech RS232 and RS485 Command Protocol Summary sess esee eene nennen nennen 75 8 4 RS232 GP 307 and 358 Protocol rien cernere aaaeaii Y V ve e Y v i ve naut 78 8 5 RS485 GP 307 and 358 Protocol ss nisirnearn nne aa aa a aa Ta iaaea ia 80 H SEVEL EEN EU IE Er 82 9 1 al Dtatlen sieur ege Eve ge Eee Er E EE Ee EE cvanteansddsavanabuneeny ER 9 2 Troubleshooting IGM400 Operation 82 9 3 Troubleshooting IGM4OO Error Messages ssssssssssssssssrssssinsssrtrsssrersssrerssrresssenessrennssrensserenssrenssrensnreensnnt 83 9 4 Clearing Error Messages IGMAO0 esra nar eripi ra ara ara aera E A ERE EEK ERRENA EEEE E EERS EEROR AREE 83 9 5 Troubleshooting CCM500 Operation esses nennen nennen nennen nennen par dan EEA Ea EEKE EENEN Naa iE 84 9 6 Troubleshooting CCM500 Error Messages 85 9 7 Clearing Error Messages CCM500 tt rt ina te iar a e abicere a Er RR NR E ra RE ara EE 85 9 8 Research SCreena eer dmt rere Va Re Re RR YR OE Y EXER FE VXOREM FH E PERRO Ee ERI V EET 86 9 8 1 Research Screen Diagnostic Display IGM400 ccccccscccssecesseccsseccesseeessecesseeseseeceeeeesseeesseesssseessaees 86 9 8 2 Research Screen Diagnostic Display CCM500 sssnssssssnsssnsssnssnsnsesnsesnresnresnrnsnresnrnsnrns
3. or 5 00 x 10 Torr at 100 uA emission current for IGMAOO 3 The pressure exceeds 1 00 x 10 Torr for CCM500 The following chart shows the graphical results of table and formulas above for pressure measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 000 8 000 6 000 Output Signal Volts dc 4 000 2 000 0 000 1 0E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Pressure Torr InstruTech Inc Page 54 Instruction Manual B RAX 3200 6 5 Analog Output for IG 1 8 8 7V Nitrogen Air only When the analog output is setup as described in section 5 5 6 for IG 1 8 8 7V the analog output voltage represents the pressured measured by the IG for nitrogen air only Refer to section 7 3 1 if you are using a gas other than nitrogen air Analog output IG Log linear 0 to 9 259 Vdc 0 8 V per decade Log Linear Analog Output N air only Pressure Torr Voltage Vp A The log linear output signal and pressure are related by the following formulas 2 00E 11 1 741 T 4 20E 11 2 0 P Torr 102595172257 Ve 10 3 0 8 logio P P mbar 10 025 volts 12 75 V 10 2 0 8 logio P 7 50E 10 3 0 P pascals 101 75v 197 y 8 6
4. AOUT LIN 1 Factory default 1 00E 00 AOUT LIN 2 Factory default 1 00E 00 AOUT LIN 3 Factory default 1 00E 00 SERIAL COMM COMM TYPE Factory default RS485 BAUDRATE Factory default 19200 BAUD FRAMING Factory default 8 BITS NONE 1 ADDRESS Factory default 01 DISPLAY SCREEN SETUP Factory default NORMAL SCREEN SAVER Factory default ON BRIGHTNESS Factory default 0 InstruTech Inc Page 33 Instruction Manual B RAX 3200 5 5 Programming This section provides detailed information on programming and configuration of various menus and submenus of the device J lt This key on the B RAX front panel is referred to as the ENTER key throughout this manual From the main menu press the MENU key if the main menu is not shown scroll Up or Down to SETUP UNIT then press the ENTER key to access the SETUP UNIT menu for configuring the B RAX general parameters such as the units of measure selecting CG2 verses ALTERNATE GAUGE etc In certain instances during setup of the programmed functions and settings you may need to press the ENTER key until you reach the end of a program setup sequence before pressing the MENU key to return to the main menu or previous setup screen 5 5 1 SETUP UNIT UNITS Factory default TORR This allows the user to display the pressure measurements in Torr mbar or pascals The user must progra
5. B RAX 3200 RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table Please see the qualifying notes listed at bottom of table COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES READ IGn or READ IG only READ CGn only READ PCs long form setpoint status READ PCs binary form setpoint status READ individual PC Read the current individual PC setpoint status Turn specified IG filament ON Turn specified IG filament OFF InstruTech Inc Read the current IG pressure in units of Torr Read the current CG pressure in units of Torr Read the current PC Read the current PC xxDS_IGn lt CR gt e g 01DS IG1 CR where n 1 fill 2 fil2 or DS IG CR lt LF gt e g DS IG1 CR LF xxDS_CGn lt CR gt e g 401DS CG1 lt CR gt where n 1 or 2 CG1 or CG2 xxPCS lt CR gt e g 01PCS lt CR gt xxPCS_B lt CR gt e g 01PCS B lt CR gt HxxPCS x CR e g 01PCS_1 lt CR gt lt LF gt HxxIGn ON CR e g 01IG1 ON lt CR gt where n 1 fill 2 fil2 xxlGn_OFF lt CR gt e g 01IG1 OFF lt CR gt n 1 fill 2 HI y yyEzpp lt CR gt e g 1 53E 06 CR where y yy mantissa z sign of the exponent and pp the exponent When Hornet device is not connected 9 90E 09 When IG is off 9 90E 09 y yyEzpp CR where y yy mantissa z sign of the exponent a
6. The correction factor must be applied to the analog output over the entire pressure range measured by the ion gauge InstruTech Inc Page 67 Instruction Manual B RAX 3200 7 3 2 IG CG1 0 5 7V analog output correction factors for selected gases When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than N Air the analog output is interpreted differently over two different pressure ranges as discussed below A Pressure range for IGM400 CCM500 from 1 00 x 10 Torr to overpressure shut down value listed in section 4 4 use se the correction factors listed in section 7 3 2 1 below to determine pressure from the voltage for selected gases ion gauge range B Pressure range of overpressure shut down value listed in section 4 4 to 1 000 Torr Use the correction factors listed in section 7 3 2 2 below to determine pressure from the voltage for selected gases convection gauge range 7 3 2 1 IG CG1 0 5 7V analog output correction factors lon gauge range A When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than N Air use the following steps to convert the analog output to pressure for IGM400 CCM500 when operating in the pressure range of 1 00 x 10 Torr to overpressure shut down values listed in section 4 4 B Refer to section 6 1 and related equation to convert the voltage in your receiving instrument to pressure This pressure value is
7. 0 8 log P 1 30E 08 4 0 2 40E 07 5 0 Where P is the pressure and V is the output signal in volts 4 20E 06 6 0 Notes The output voltage will switch to above 11 Vdc under 7 50E 05 7 0 the following conditions 1 30E 03 8 0 5 00E 02 9 259 1 The IG sensor is turned off or any IG fault condition 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current Filament is OFF gt 11 or 5 00 x 10 Torr at 100 uA emission current for IGM400 3 The pressure exceeds 1 00 x 10 Torr for CCM500 The following chart shows the graphical results of table and formulas above for pressure measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 000 8 000 6 000 Output Signal Volts dc 4 000 LHH 2 000 rm 0 000 4 1 0E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Pressure Torr InstruTech Inc Page 55 Instruction Manual B RAX 3200 6 6 Analog Output for IG LINEAR Nitrogen Air only When the analog output is setup as described in section 5 5 6 for IG LINEAR the analog output voltage represents the pressure measured by the IG for nitrogen air only The Linear analog output type provides a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressu
8. 6 349 5 947 6 445 5 957 5 705 5 789 5 809 6 963 1 00E 2 6 500 5 973 6 660 5 983 5 719 5 835 5 846 2 00E 2 6 651 5 995 6 735 6 045 5 761 5 889 5 904 3 00E 2 6 739 6 027 6 790 6 114 5 778 5 919 5 938 4 00E 2 6 801 6 065 6 843 6 175 5 798 5 941 5 963 5 00E 2 6 849 6 103 6 891 6 229 5 812 5 959 5 982 6 00E 2 6 889 6 137 6 932 6 281 5 824 5 974 5 999 7 00E 2 6 923 6 169 6 967 6 332 5 834 5 987 6 015 7 60E 2 6 940 6 187 6 987 6 366 5 838 5 995 6 023 8 00E 2 6 952 6 200 6 999 6 387 5 842 5 999 6 028 9 00E 2 6 977 6 227 6 450 5 849 6 011 6 040 1 00E 3 7 000 6 256 6 523 5 853 6 023 6 052 Values listed under each gas type are in volts V Example The gas in use is O Voltage output is 5 144 volts True pressure of O is 2 00E 01 Torr InstruTech Inc Page 69 Instruction Manual 7 3 3 Convection gauge analog output for selected gases B RAX 3200 If you intend to use any of the analog outputs to represent measurements from CG1 or CG2 for gases other than N Air you must also apply corrections to the analog output Use the following tables to determine pressure from voltage for gases other than nitrogen or air 7 3 3 1 CG1 1 8Vor CG2 1 8V analog output correction factors convection gauge When using the Log Linear convection gauge analog output mode Log Linear 1 8 V 1 V decade for gases other than N use the following look up t
9. Analog output Log linear O to 7 Vdc 1 0 V decade A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar p 10572 V logio P 4 where P is the pressure in Torr or mbar and V is the output signal in volts The output voltage is O V when pressure is at 1 00E 04 Torr The output voltage is 7 V when pressure is at 1 00E 03 Torr B The log linear output signal and pressure are related by the following formula when units of measurement is in pascals P 1052 V log o P 2 where P is the pressure in pascals and V is the output signal in volts Note An analog output above 11 volts indicates a faulty convection gauge or unplugged gauge cable The following chart shows the graphical results of table and formulas above for measurements in Torr 8 000 7 000 6 000 5 000 4 000 3 000 Output Signal Volts dc 2 000 1 000 0 000 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 Pressure Torr InstruTech Inc Log Linear Analog N air only Pressure Torr Voltage 1 00E 04 2 00E 04 5 00E 04 1 00E 03 2 00E 03 5 00E 03 1 00E 02 2 00E 02 5 00E 02 1 00E 01 2 00E 01 5 00E 01 1 00E 00 2 00E 00 5 00E 00 1 00E 01 2 00E 01 5 00E 01 1 00E 02 2 00E 02 3 00E 02 4 00E 02 5 00E 02 6 00E 02 7 00E 02 7 60E 02 8 00E 02 9 00E 02 0 699 1 000 1 300 1 700 2 000 2 300 2 700 3 000
10. InstruTech Inc Page 85 Instruction Manual B RAX 3200 9 8 Research Screen The OLED setup screen of the B RAX can be configured to display important critical operating parameters of the IGM400 and CCM500 These parameters can be displayed in the Research display mode as described below 9 8 1 Research Screen Diagnostic Display IGM4OO In addition to the normal pressure measurement screen the B RAX provides a diagnostic display screen that allows you to monitor the measurements of the critical electrical parameters used for measurement of very low pressures i e high vacuum made by the ionization gauge Over time the hot cathode filament of the ionization gauge may degrade The IGM4OO coated iridium filaments are made using yttrium oxide to lower the work function of the heated wire material and enable substantial emission of electrons from the hot cathode These electrons are accelerated in an electric field toward the grid structure of the ionization gauge device The electron emission is commonly referred to as the Emission Current As the emission current electrons orbit within the electric field formed by the bias voltages applied to the grid collector and filament electrodes the molecules that the gas is comprised of will be ionized by these energetic electrons The positive ions that are created within the grid structure are captured in another electric potential field created by the grid structure at 180 Vdc with res
11. 3 973 3 987 3 978 3 602 4 021 4 017 4 190 3 872 4 204 2 00E 0 4 301 4 057 4 346 4 288 4 233 3 845 4 210 4 220 4 616 4 201 4 522 5 00E 0 4 699 4 389 6 130 4 697 4 524 4 107 4 389 4 418 6 391 4 719 4 877 1 00E 1 5 000 4 602 5 013 4 696 4 250 4 471 4 530 5 332 5 446 2 00E 1 5 301 4 763 5 348 4 819 4 360 4 521 4 571 6 766 6 550 5 00E 1 5 699 4 895 5 890 4 915 4 410 4 579 4 617 6 925 1 00E 2 6 000 4 946 6 320 4 966 4 438 4 670 4 691 2 00E 2 6 301 4 991 6 470 5 090 4 521 4 777 4 808 3 00E 2 6 477 5 053 6 580 5 228 4 555 4 838 4 876 4 00E 2 6 602 5 130 6 686 5 350 4 595 4 883 4 925 5 00E 2 6 699 5 207 6 781 5 458 4 624 4 918 4 964 6 00E 2 6 778 5 274 6 863 5 561 4 647 4 947 4 998 7 00E 2 6 845 5 338 6 934 5 664 4 667 4 974 5 029 7 60E 2 6 881 5 375 6 974 5 732 4 677 4 989 5 045 8 00E 2 6 903 5 400 6 999 5 774 4 685 4 998 5 057 9 00E 2 6 954 5 455 5 900 4 698 5 021 5 079 1 00E 3 7 000 5 512 6 045 4 706 5 045 5 104 Values listed under each gas type are in volts Vdc Example The gas in use is O Voltage output is 3 288 volts True pressure of O is 2 00E 01 Torr InstruTech Inc Page 71 Instruction Manual B RAX 3200 7 3 3 3 CG1 NON LIN or CG2 NON LIN analog output correction factors convection gauge When using the Non Linear convection gauge analog output mode for gases other than N use the foll
12. 4 978 4 602 5 021 5 017 5 190 4 872 5 204 2 00E O 5 301 5 057 5 346 5 288 5 233 4 845 5 210 5 220 5 616 5 201 5 522 5 00E 0 5 699 5 389 6 130 5 697 5 524 5 107 5 389 5 418 7 391 5 719 5 877 1 00E 1 6 000 5 602 6 013 5 696 5 250 5 471 5 530 6 332 6 446 2 00E 1 6 301 5 763 6 348 5 819 5 360 5 521 5 571 7 766 7 550 5 00E 1 6 699 5 895 6 890 5 915 5 410 5 579 5 617 7 925 1 00E 2 7 000 5 946 7 320 5 966 5 438 5 670 5 691 2 00E 2 7 301 5 991 7 470 6 090 5 521 5 777 5 808 3 00E 2 7 477 6 053 7 580 6 228 5 555 5 838 5 876 4 00E 2 7 602 6 130 7 686 6 350 5 595 5 883 5 925 5 00E 2 7 699 6 207 7 781 6 458 5 624 5 918 5 964 6 00E 2 7 778 6 274 7 863 6 561 5 647 5 947 5 998 7 00E 2 7 845 6 338 7 934 6 664 5 667 5 974 6 029 7 60E 2 7 881 6 375 7 974 6 732 5 677 5 989 6 045 8 00E 2 7 903 6 400 7 999 6 774 5 685 5 998 6 057 9 00E 2 7 954 6 455 6 900 5 698 6 021 6 079 1 00E 3 8 000 6 512 7 045 5 706 6 045 6 104 InstruTech Inc Values listed under each gas type are in volts V Example The gas in use is O Voltage output is 4 288 volts True pressure of O is 2 00E 01 Torr Page 70 Instruction Manual B RAX 3200 7 3 3 2 CG1 O0 7V or CG2 0 7V analog output correction factors convection gauge When using the Log Linear convection gauge analog output mode Log Linear 0 7 V 1 V de
13. Note An analog output of above 11 volts indicates a faulty convection gauge or unplugged gauge cable The following chart shows the graphical results of table and formulas above for pressure measurements in Torr Log Linear Analog Voltage to Pressure 9 000 8 000 7 000 6 000 5 000 4 000 Output Signal Volts dc 3 000 2 000 1 000 0 000 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr InstruTech Inc Log Linear Analog Output N air only Pressure Torr 1 00E 04 2 00E 04 5 00E 04 1 00E 03 2 00E 03 5 00E 03 1 00E 02 2 00E 02 5 00E 02 1 00E 01 2 00E 01 5 00E 01 1 00E 00 2 00E 00 5 00E 00 1 00E 01 2 00E 01 5 00E 01 1 00E 02 2 00E 02 3 00E 02 4 00E 02 5 00E 02 6 00E 02 7 00E 02 7 60E 02 8 00E 02 9 00E 02 1 00E 03 Voltage 1 000 1 301 1 699 2 000 2 301 2 699 3 000 3 301 3 699 4 000 4 301 4 699 5 000 5 301 5 699 6 000 6 301 6 699 7 000 7 301 7 477 7 602 7 699 7 778 7 845 7 881 7 903 7 954 8 000 Page 57 Instruction Manual 6 8 Analog Output for CG1 or CG2 0 7 V Nitrogen Air only B RAX 3200 When the analog output is setup as described in section 5 5 6 for CG1 0 7V or CG2 0 7V the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen air only Refer to section 7 3 3 2 if you are using a gas other than nitrogen air
14. Power Supply 10 24V An Auxiliary Power Supply is required for your Alternate Gauge e g a CDG Ensure power is applied to your Alternate Gauge before turning on the power to B RAX InstruTech Inc Page 22 Instruction Manual B RAX 3200 3 2 9 Digital I O Connection The IG can be controlled manually using the front panel soft keys via remote input signals using the digital I O connector or RS232 RS485 commands The B RAX can also be configured so that the IG sensor on off is controlled by using the pressure measurements from CG1 CG2 or the alternate gauge If the user prefers digital I O as the means of controlling the IG various control input and status output signals are available from the 9 pin D sub male DIGITAL I O connector The DIGITAL I O Connector also provides pin pin compatible signals with the GP 358 vacuum gauge controller as well as compatible signals with the GP 307 The DIGITAL I O Connector provides three different types of signals as listed below Signal Type A Control Input Signals The IG sensor on off degas on off and emission current selection can be set by applying momentary continuity to ground This requires a momentary ground of less than 0 4 Vdc at 10 pA for 25 msec minimum be applied After this the input must be allowed to float higher than 3 5 Vdc for 105 msec minimum before another low can be applied Input signal Apply momentary continuity to ground to turn IG sensor on or off
15. Signal Return InstruTech Inc Page 21 Instruction Manual B RAX 3200 3 2 8 Analog Input Connection Capacitance Diaphragm Gauges etc One analog input is provided by the B RAX for using as an alternate gauge to CG2 This input can be accepted from one capacitance diaphragm gauge or other InstruTech vacuum module series CVM201 CVM211 IGM401 or CCM501 One each 3 contact mating pluggable terminal strip connector is provided for connection to the analog input contactor The B RAX back panel analog input connector is marked A1 Each connector has a contact labeled analog input signal and analog input ground and D power detect A1 Contact Description Analog Output Connectors contacts Analog Input Signal Analog Input Ground Signal Return D Detect power detect D When using a capacitance manometer diaphragm gauge or InstruTech modules such as the CVM201 CVM211 IGM401 CCM501 as an ALTERNATE GAUGE the gauge must be connected to the B RAX as shown below The alternate gauge must be provided power from an auxiliary power supply capable of providing the power required by the alternate gauge connected to the B RAX The D contact is used in this configuration to protect the IG from being turned on at high pressure in case power to the alternate gauge is lost Alternate Gauge BRAX3200 Al Aout Aout D Power ALT Gauge
16. rei dide eene lae euam e e eden D dc e b eed Te do eu Ee ee Me Een 30 5 3 User Interface Basics 5 5 eri intret t ere ee e RR Ha eR pe err an eve bte dee eed etes eate ees beoe EO Ren 31 5 4 Factory Set Default Parameters e tie ee ec ad Pda e dac d e b a ed Ta ds ea a Ee d edv ded uen 32 5 5 Pr ograMMIN E TEE TOLEDO E E aa ERE DE iae aE a E EEN SE FE SEERE En 34 5 5 1 SETUP UNM EE 34 5 5 2 ION GAUGE when used with IGMAO0 36 5 5 3 ION GAUGE when used with CCMSOO 39 5 5 4 CONVEC GAUGE ER 41 5 5 5 RELAYS ogee 42 5 5 6 EN ate er Al et LEE 43 5 5 7 SERIAL COMM E 48 5 5 8 DEIN 49 Analog Output Charts amp Equations Nitrogen Air Only cccccccccsccssscssscsscesseesseesseesseesseesseessecsseesseesseessecsseenseenes 51 6 1 Analog Output wide range measurement for IG CG1 0 5 7V Nitrogen Air on 51 6 2 Analog Output for IG LOG N 10 Nitrogen Air on 52 6 3 Analog Output for IG LOG N 11 Nitrogen Air on 53 6 4 Analog Output for IG LOG N 12 Nitrogen Air on 54 6 5 Analog Output for IG 1 8 8 7V Nitrogen Air on 55 6 6 Analog Output for IG LINEAR Nitrogen Air only sess eene nnne nnne nnne nnne FE nnns RE nnns nn sens 56 6 7 Analog Output for CG1 or CG2 1 8 V Nitrogen Air only 57 6 8 Analog Output for CG1 or CG2 0 7 V Nitrogen Air only 5
17. using N you may see readings change by about 30 to 40 torr after the chamber is opened and air gradually displaces the N in the gauge This is due to the partial pressure of oxygen O contained in atmospheric air Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 4 100 o 2 True Total Pressure Torr capacitance manometer o S 0 001 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge 8 CVG N2 4 Convectron N2 CVG Ar Convectron Ar Convectron He e CVG He InstruTech Inc Page 63 Instruction Manual B RAX 3200 The Y axis of the above chart is actual pressure as measured by a capacitance manometer a diaphragm gauge that measures true total pressure independent of gas composition The X axis is the pressure reading indicated by the convection gauge under test This chart shows readings for an InstruTech convection gauge CVG and Granville Phillips Convectron gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable CAUTION Do not assume this data applies to other convection gauges which may or may not be the same See Table 1 below and note the following examples Example A If the gas is nitrogen N when the true total pressure is 500 Torr the gauge will read 500 Torr Exampl
18. 3 Mechanical Installation lonization Gauge 17 3 1 4 Mechanical Installation Convection Gauge esses enne nennen nennen nnne nennen nnns sena 18 3 2 Segel Me HEN de 19 3 2 1 Elle 19 3 2 2 Ja UE 19 3 2 3 Connecting the IGM400 or CCM500 connector labeled IG 20 3 2 4 Connecting the CVG101 connectors labeled CG1 and CG 20 3 2 5 Power C NMeECtiON eebe EN 3 2 6 Relay Conlectiols EE 21 3 2 7 Analog Output COHDeCtlOn 2 oiii ree ree e re esr Perieg exi cela cns class crga e 21 3 2 8 Analog Input Connection Capacitance Diaphragm Gauges etc 22 3 2 9 Digital I O Connectlonz s iom ie eene bee iere eim iir oe BEN 23 3 2 10 RS232 RS485 Serial Communications Connection ceeeeseeeeeeeeeeeen eee nerne tentent essent 24 InstruTech Inc Page 3 4 um Oo Instruction Manual B RAX 3200 eT eurcEnidacm 26 4 1 IG Emission Current IGM4OO only 26 4 2 IG Degas IGM4OO on 26 4 3 IG Filament Material Selection IGM400 Venting the Chamber 27 4 4 IG Overpressure shut down IGM400 and CCM500 sssssssssssssssssnssssseesssreesssressssresssressssessssressseesssreesssrens 28 4 5 Convection Gauge CG Initial Setup iier oin iioii rh emen re a a ar e Pia ee lees 28 Setup and programming 30 5 1 Applying POWer deed aa add adt dei a e ee d ede det b Pe oc CE edet ageres 30 5 2 Front Panel Display
19. AN WARNING Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss A CAUTION Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product A SHOCK HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present InstruTech Inc Page 1 Instruction Manual B RAX 3200 Copyright 2014 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Granville Phillips Convectron and Mini Convectron are registered trademarks of MKS Instruments Andover MA Conflat is a registered trademark of Varian Inc Agilent Technologies Lexington MA Teflon is a registered trademark of E du Pont de Nemours and Company Wilmington DE InstruTech Inc Page 2 Instruction Manual B RA
20. Continue pressing the ENTER key until the SET ATM CG1 reappears on the display The new atmosphere point is now set For example if your known local uncorrected barometric pressure is 760 Torr enter 760 in the SET ATM screen The main pressure measurement screen will now display 760 Torr while the gauge is at atmosphere SET VAC CG2 Factory default PRESS ENTER TO SET VAC Same as SET VAC CG1 above except for CG2 SET ATM CG2 Factory default 7 60E 02 TORR Same as SET ATM CG1 above except for CG2 InstruTech Inc Page 41 Instruction Manual B RAX 3200 5 5 5 RELAYS Press the ENTER key to access the RELAYS menu for configuring the setpoint relays ASSIGN REL 1 Factory default JON GAUGE This assigns Relay 1 to the ion gauge CG1 CG2 or ALT GAUGE alternate gauge ASSIGN REL 2 Factory default CG1 ASSIGN RELAY 2 6 same choices as ASSIGN RELAY 1 above ASSIGN REL 3 Factory default CG2 ASSIGN REL 4 Factory default ION GAUGE ASSIGN REL 5 Factory default CG1 ASSIGN REL 6 Factory default CG2 REL 1 LO TRIP Factory default 1 00E 06 This setpoint corresponds to the turn on point for Relay 1 Relay 1 will turn on when the pressure drops below this setting If you are unable to increase the value of REL 1 LO TRIP B RAX responding with the message NO CHANGE you must first access the REL 1 HI TRIP menu below and increase that value to a number higher than the value of the REL 1 LO TRIP yo
21. Pa the pascals unit of measure is written as Pa on the front panel millibars unit is written as mbar Display Setup Screen The B RAX provides an independent setup and programming OLED Setup Screen This screen is used for set up programming and operation of the ion and convection vacuum gauges Other useful information such as relay status indicators emission current and selected IG filament are also displayed in the Setup Screen OLED Setup Pressure Measurement Exponent Engineering IG sensor turn on off Screen lonization Gauge Sign Units LED amp Clear Error Messages Degas On Programming Keys Pressure Measurement Pressure Measurement Convection Gauge 2 Convection Gauge 1 or Alternate Gauge InstruTech Inc Page 30 Instruction Manual B RAX 3200 5 3 User Interface Basics The setup and programming of the B RAX controller is done via the four programming keys located below the OLED setup screen on the left hand side of the B RAX front panel During programming of the B RAX the OLED display will identify what function each key represents To begin programming press the MENU key Press the UP and DOWN key to select the desired menu and change the parameters Press the ENTER key this is the C key with the arrow pointing to the left as viewed from the front of the B RAX to access the parameters and save the new settings Press the MENU Key to return to the previous menu or press repeatedly to return to the main screen To
22. TURN IG OFF READ DEGAS on off STATUS TURN ON Degas TURN OFF Degas SET EMISSION Current InstruTech Inc Find out if lon Gauge is turned to ON and gauge is reading pressure Turn the lon Gauge ON Turn the lon Gauge OFF Find out if Degas is ON or OFF Turn ON the lon Gauge Degas Turn OFF the lon Gauge Degas Choose 4mA or 100uA emission current HxxIGS CR e g 01IGS lt CR gt HxxIG 1 CR e g 01IG_1 lt CR gt HxxIG y CR where Y 1 Turn ON y 0 Turn OFF xxlG_O lt CR gt e g 01IG_O lt CR gt HxxIG y CR where Y 1 Turn ON y 0 Turn OFF xxDGS lt CR gt e g 01DGS lt CR gt xxDG_1 lt CR gt e g 01DG 1 lt CR gt xxDG_y lt CR gt where Y 1 Turn ON y 0 Turn OFF HxxDG O CR e g 01DG O CR HxxDG y CR where Y 1 Turn ON y 0 Turn OFF HxxSE y CR e g O1SE 1 CR where y 1 4mA y 0 100yuA xx 0 IG OFF CR xx 1 IG ON CR When Hornet device is not connected 01 INVALID CR xx PROGM OK CR When IG error exists 01 INVALID CR When IG controlled by CG 01 INVALID CR When Hornet is not connected 01 INVALID CR To clear IG errors send an IG OFF command y 0 1G OFF this clears IG errors and allows user to reactivate IG control xx PROGM OK CR Even though the IG will already be OFF when an IG Error occurs sending the IG OFF command will clear errors When Horne
23. The AOUT CAL can be performed at any pressure between 400 Torr to 999 Torr atmosphere recommended Note As you adjust the analog output the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for ALT LINEAR Connect the CDG to the B RAX and connect the B RAX analog output 1 to a high resolution voltmeter your system PLC etc While in the AOUT CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed for the alternate gauge CG2 ALT display channel Example The B RAX ANALOG OUTPUT 1 is programmed for ALT LINEAR and a 1000 TORR CDG is connected to the B RAX The B RAX CG2 ALT display channel is registering a pressure reading of 7 60E02 Torr For a 1000 TORR CDG with a 0 10 VDC output the expected analog output at 760 Torr is 7 60 volts Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7 60 V as recorded by your voltmeter Alternatively if the alternate gauge analog output is used to display the pressure on your PLC or system display console simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the alternate gauge atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the CG2 ALT
24. This selection covers 3 decades of pressure change For example if ANALOG OUT 1 is programmed for CG1 LINEAR and the maximum pressure for AOUT LIN 1 selected is 1 00 Torr then the instruments provides a 10 volt analog output signal when pressure as measured by CG1 is at 1 00 Torr Furthermore the minimum pressure is automatically set to 1 00E 03 torr with a corresponding minimum voltage output of 0 01 volts Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure measured by the IG to the analog output voltage The following table is representative of a typical setup where the CG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure mantissa and the analog output signal Linear Analog Output Voltage volts Measured Displayed Pressure torr 0 01 1 00E 03 0 10 1 00E 02 1 00 1 00E 01 10 00 1 00E 00 If your application requires the analog output voltage to cover a pressure range exceeding three decades then consider using a log linear analog output type for CG1 or CG2 Note An analog output of above 11 volts indicates a faulty convection gauge or unplugged gauge cable InstruTech Inc Page 61 Instruction Manual B RAX 3200 7 Using the Gauge with different gases The following tables and explanation contain important information regarding the use of ionization and convection
25. Torr and mbar p 10 75 3 vzlog P 11 Where P is the pressure in Torr or mbar and V is the output signal in volts B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals p 105 9 V logio P 9 Where P is the pressure in pascals and V is the output signal in volts Notes The output voltage will switch to above 11 Vdc under the following conditions 1 The IG sensor is turned off or any IG fault condition 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current or 5 00 x 10 Torr at 100 uA emission current for IGMAOO 3 The pressure exceeds 1 00 x 10 Torr for CCM500 Log Linear Analog Output N air only Pressure Torr Voltage Vp 1 00E 11 0 0 1 00E 10 1 0 1 00E 09 2 0 1 00E 08 3 0 1 00E 07 4 0 1 00E 06 5 0 1 00E 05 6 0 1 00E 04 7 0 1 00E 03 8 0 1 00E 02 9 0 5 00E 02 9 698 See Notes gt 11 The following chart shows the graphical results of table and formulas above for pressure measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 000 8 000 6 000 4 000 Output Signal Volts dc 2 000 0 000 10E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E
26. based on nitrogen C Apply the sensitivity correction factor for the particular gas you are using to the pressure value obtained in step A Use correction factors and example listed below lon Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 N2 1 00 Kr 1 94 Air 1 00 SFe 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example The gas in use is argon Output voltage is 3 volts Pressure unit is torr lts 5 5 P nitrogen 10 os 21009 59 059 P 1 00 x 10 5 Torr based on nitrogen 1x1075 Bi P argon i293 7 75 x 10 Torr true pressure of argon gas The same correction factor must be applied over the entire pressure range as measured by the ion gauge InstruTech Inc Page 68 Instruction Manual 7 3 2 2 IG CG1 0 5 7V analog output correction factors Convection gauge range B RAX 3200 When using the IG CG1 analog output mode Log Linear 0 5 7 V 0 5 V decade for gases other than N Air use the following look up table and information to convert the analog output to pressure when operating in the pressure range of overpressure shutdown value listed in section 4 4 to 1 000 Torr The look up table has been derived from equation listed in section 6 1 Analog output G CG1 when in the pr
27. gauges when used to measure pressure of gases other than nitrogen air For both types of gauge transducers corrections must be applied to both the display and analog outputs This is particularly critical when using convection gauges at higher pressures than measured by the ion gauge when using gases other than N air 7 1 lon gauge display correction factors for selected gases There are two methods that can be used for monitoring the IG display when using gases other than nitrogen air 1 If you are using a gas other than N air you must manually apply a gas sensitivity correction factor to the IG displayed measurement Post a label on your ion gauge display showing the correction factor to be used for the pressure of the gas type you are measuring The table below provides typical correction factors for ion gauges when used with gas types other than N air To correct the display measurements divide the displayed measured pressure by the correction factor for the gas type you are measuring lon Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity Correction Gas Sensitivity Correction Factor Factor He 0 18 H20 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 N2 1 00 Kr 1 94 Air 1 00 SFe 2 50 O2 1 01 Xe 2 87 CO 1 05 Hg 3 64 For example if the gas in use is argon Ar and the ion gauge measured pressure is displayed as 4 00 x 10 Torr the actual true pressure of argon is then determined by the
28. gt lt LF gt When device is not connected 9 90E 09 When CG is over ranged 9 90E 09 X X X X X X lt CR gt lt LF gt e g 1 1 0 0 0 0 lt CR gt lt LF gt Relays 1 and 2 are energized order is Relay N 1 2 3 4 5 6 from left to right X CR LF e g C CR LF The Latin alphabet character C corresponds to binary 01000011 or 43hex which represents relay 1 and relay 2 are energized ON Note that the positions of the relay order in the returned code character are reversed from the long form as described for the READ PCs in long form command above In binary form the order is Relay N 6 5 4 3 2 and 1 as read from left to right s lt CR gt lt LF gt where s state of relay 1 ON 0 OFF e g 1 lt CR gt lt LF gt PC Relay 1 is energized or 0 when not Page 78 Instruction Manual B RAX 3200 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES IG ON IG OFF IG DEGAS ON IG DEGAS OFF IG Degas Status NOTES Turn specified IG filament ON Note that the functions of IG ON OFF and Filament Selection are combined in the single IG ON OFF command When turning the IG to ON the specific filament chosen is selected when sending the IG ON OFF commands Turn specified IG filament OFF Turn IG Degas ON Turn IG Degas OFF Detect Degas on off status 1 CR isa carriage return OxOD N IGn_ON lt CR gt lt LF gt e g IG1 ON lt CR gt lt LF gt
29. hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within five years after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMP
30. module is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below Factory set CCM500 overpressure shut down values Overpressure Shut Down Torr Overpressure Shut Down mbar Overpressure Shut Down Pa 1 00 x 10 1 33 x 10 1 33 4 5 Convection Gauge CG Initial Setup Two of the most important steps for the initial setup of the convection gauges are to set zero SET VAC and set atmosphere SET ATM as described in the CONVEC GAUGE section 5 5 4 This will ensure proper operation of the gauge and accurate pressure measurements The gauge is calibrated at the factory using nitrogen Furthermore the gauge is also installed in a certain orientation when calibrated at the factory Without setting zero and atmosphere after the gauge is installed in your system the gauge may not display the expected and correct pressures This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge most commonly the case and the gauge orientation is different than the orientation used at the factory As such it is very important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed in your actual system Please note the following Setting Zero SET VAC Setting zero optim
31. ms 52 us 9600 61 ms 1 0 ms 4800 93 ms 2 0 ms 2400 156 ms 4 1 ms 1200 280 ms 8 3 ms 600 530 ms 16 ms 300 1030 ms 33 ms InstruTech Inc Page 73 Instruction Manual B RAX 3200 8 2 InstruTech RS232 RS485 Command Protocol Summary The following notes are intended to be understood by the user when using InstruTech s RS232 and RS485 command protocol with the B RAX 3200 1 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit The baud rate can be set to different values using the front panel soft keys All Responses are 13 characters long xx is the address of the device 00 thru FF For RS232 xx is replaced with two space characters CR is a carriage return a non printable character Do not enter CR from your keyboard A carriage return non printable character may be entered as the Unicode CO controls specified value OD hexadecimal 13 decimal From your keyboard a key entry sequence of CNTL M may be used to obtain the required character for a carriage return when using certain terminal emulator programs represents a space character Press the space bar on your keyboard Do not enter a underscore character All commands sent to the module start with a character and all normal responses from the module start with a character Error responses start with a A valid address must be used Factory default 01 when using the RS485 protocol Th
32. the GP Series 307 and 358 VGC is as defined in the following table Please see qualifying notes at bottom of table COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES READ IGn or READ IG READ CGn READ PCs in long form READ PCs in binary form READ individual PC InstruTech Inc Read the current IG pressure in units of Torr only 1 fil1 2 fil2 If you have selected filament 1 to operate with the IG ON see IG ON below then enter IG1 in the READ IGn command use IG2 if filament 2 is turned ON Read the current CG pressure in units of Torr only Read the current Process Control setpoint relay status Read the current Process Control setpoint relay status continued on next page continued from previous page Read the current individual Process Control setpoint relay status DS IGn CR lt LF gt e g DS IG1 CR LF Or DS IG CR LF e g DS IG1 CR LF DS CGn CR lt LF gt e g DS CG CR LF where n 1 for device CG1 and n 2 for CG2 PCS CR LF e g PCS CR LF PCS B CR lt LF gt e g PCS B CR LF PCS n CR LF e g PCS 1 CR LF y yyEzpp lt CR gt lt LF gt e g 1 53E 06 CR LF where y yy mantissa z sign of the exponent and pp the exponent When Hornet device is not connected 9 90E 09 When IG is off 9 90E 09 y yyEzpp lt CR gt lt LF gt e g 1 53E 02 lt CR
33. the use of ionization and convection gauges on gases other than N Air For both types of gauges corrections must be applied to the analog outputs 7 3 1 lon gauge analog output correction factors for selected gases When using any of the analog outputs assigned to ion gauge only use the following steps to convert the analog output to pressure lon gauge analog output correction factors for selected gases A Refer to section 6 and use the related equation to convert the voltage in your receiving instrument to pressure This pressure value is based on nitrogen gas B Apply the Sensitivity Correction Factor for the particular gas you are using to the pressure value obtained in step A Use correction factors and example listed below lon Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity Correction Gas Sensitivity Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H2 0 46 CO 1 42 N2 1 00 Kr 1 94 Air 1 00 SFe 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example ANALOG OUT 1 selected is G LOG N 10 The gas in use is argon Voltage output is 4 volts Pressure unit is torr P nitrogen 10 s 10 pego P 1 00 x 10 Torr based on nitrogen Applying the Sensitivity Correction Factor of 1 29 for argon listed in the table above 0 x10 6 1 P argon TT 7 7 75 x 1077 Torr true pressure of argon gas
34. when operating at higher pressure ranges 5 00 x 10 Torr to 5 00 x 10 Torr the 100 pA emission setting is preferred 2 At lower operating pressures 1 00 x 10 Torr to 5 00 x 10 Torr the 4 mA emission setting should be used 3 When using a diffusion pump or other pumps that use fluids there is a possibility of the pump oil vapors entering the IG transducer These vapors may form an insulator on the internal components of the transducer which can lead to instability or failure in controlling the emission In this case 4 mA emission current may provide improved operating lifetime and measurement performance 4 The emission current can also be set to automatically switch between 100 LA and 4 mA This results in optimal and stable pressure readings over the entire measurement range from low to high vacuum For example if an application requires that pressure measurements be performed by the ion gauge from pressures lower than 5 00 x 10 Torr up to 5 00 x 10 Torr then the user may want to consider selecting the auto switching feature of the emission current 4 2 IG Degas IGM400 only Degas is used to rid a hot cathode ion gauge sensor of adsorbed gas Degas is achieved by applying Electron Bombardment EB to the grid The intervals at which degas should be applied vary for each application The low pressure measurement performance of the transducer will normally improve after each degassing cycle e Degas can only be applied while the fi
35. where n 1 fil1 2 fil2 IGn_OFF lt CR gt lt LF gt e g IG1 OFF lt CR gt lt LF gt where n 1 fil1 2 fil2 DG ON lt CR gt lt LF gt e g DG ON lt CR gt lt LF gt DG OFF CR lt LF gt e g DG OFF CR LF DGS lt CR gt lt LF gt e g DGS lt CR gt lt LF gt lt LF gt is a line feed OxOA this is the terminator character OK lt CR gt lt LF gt e g OK lt CR gt lt LF gt When IG is already ON INVALID When Hornet device is not connected INVALID OK lt CR gt lt LF gt e g OK lt CR gt lt LF gt When IG is already OFF INVALID When Hornet device is not connected INVALID OK lt CR gt lt LF gt e g OK lt CR gt lt LF gt When Degas is already ON INVALID When Hornet device is not connected INVALID When IG is OFF INVALID OK lt CR gt lt LF gt e g OK lt CR gt lt LF gt When Degas is already OFF INVALID When Hornet device is not connected INVALID 1 lt CR gt lt LF gt e g 1 lt CR gt lt LF gt when IG is ON or O CR LF when off When Hornet device is not connected INVALID 3 The used in certain defined commands represent a space character Space characters may be omitted from commands 4 GP 307 and 358 protocol response strings are variable length 5 Hardware handshake controls do not exist on B RAX 3200 e g RTS CTS DTR InstruTech Inc Page 79 Instruction Manual 8 5 RS485 GP 307 and 358 Protocol
36. 0 Torr with CCM500 cold cathode IG 1x 10 to 1 000 Torr with CVG101 convection gauge CG display pressure indication set up amp programming screen LED 3 independent pressure display channels 3 digit plus 2 digit exponent per channel OLED displays state of all setpoint relays IG emission current error messages for fault conditions units of measure Torr mbar Pa user selectable functionality IG CG alternate gauge powers amp operates one InstruTech IGM400 or CCM500 ionization vacuum gauge module powers amp operates up to 2 InstruTech CVG101 convection or Granville Phillips GP Convectron displays pressure from an alternate gauge such as a Capacitance Diaphragm Gauge CDG or other InstruTech modules using the analog input external power source for these alternate auxiliary devices will be required sensor control IGM400 CCM500 IG sensor on off IGM4OO degas on off and emission current can all be controlled via front panel soft keys remote input signals digital I O or serial communications IG sensor can also be automatically turned on off using measurements from one of the user selectable convection or alternate gauges IG remote input signals digital 1 0 IG sensor on off IGM4OO degas on off and emission current can also be set by applying momentary continuity to ground Also the 9 pin D sub remote input DIGITAL I O connector provides pin pin compatible signals with the GP 358 controller
37. 02 1 0E 01 1 0E 00 Pressure Torr InstruTech Inc Page 53 Instruction Manual 6 4 Analog Output for IG LOG N 12 Nitrogen Air only B RAX 3200 When the analog output is setup as described in section 5 5 6 for IG LOG N 12 the analog output voltage represents the pressured measured by the IG for nitrogen air only Refer to section 7 3 1 if you are using a gas other than nitrogen air Analog output IG Log linear 0 to 11 Vdc 1 V per decade Log Linear Analog Output N air only Pressure Torr Voltage Vp A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and 1 00E 12 0 0 mbar T C 1 00E 11 1 0 P 10 V logio P 12 i Sal i 1 00E 10 2 0 Where P is the pressure in Torr or mbar and V is the output signal in volts 1 00E 09 3 0 1 00E 08 4 0 B The log linear output signal and pressure are related by the 1 00E 07 5 0 following formulas when units of measurement is in pascals volts 10 1 00E 06 6 0 P 10 V logio P 10 Where P is the pressure in pascals and V is the output signal in 1 00 05 19 volts 1 00E 04 8 0 1 00E 03 9 0 Notes The output voltage will switch to above 11 Vdc under P SCH s 1 00E 02 10 0 the following conditions 5 00E 02 10 698 1 The IG sensor is turned off or any IG fault condition S ee Notes gt 11 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current
38. 2 2 00E 0 2 8418 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 5 00E 0 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 1 00E 1 4 2056 3 48 5 774 4 225 3 67 2 734 3 204 3 33 6 361 4 605 4 699 2 00E 1 4 5766 3 801 7 314 4 62 3 903 2 966 3 308 3 414 5 406 5 172 5 00E 1 4 8464 4 037 4 916 4 071 3 075 3 43 3 509 6 159 5 583 1 00E 2 4 9449 4 122 5 026 4 154 3 134 3 618 3 66 6 483 5 72 2 00E 2 5 019 4 192 5 106 4 336 3 269 3 827 3 883 6 661 5 86 3 00E 2 5 1111 4 283 5 2 4 502 3 384 3 938 4 005 6 726 4 00E 2 5 2236 4 386 5 315 4 621 3 466 4 016 4 088 6 767 6 103 5 00E 2 5 3294 4 477 5 422 4 708 3 526 4 076 4 151 6 803 6 00E 2 5 4194 4 55 5 515 4 775 3 573 4 124 4 203 6 843 6 342 7 00E 2 5 4949 4 611 5 592 4 83 3 613 4 166 4 247 6 89 7 60E 2 5 534 4 643 5 633 4 86 3 632 4 19 4 271 6 92 8 00E 2 5 5581 4 663 5 658 4 877 3 645 4 203 4 286 6 942 6 519 9 00E 2 5 6141 4 706 5 713 4 919 3 674 4 237 4 321 7 1 00E 3 5 6593 4 745 5 762 4 955 3 69 4 27 4 354 7 056 6 642 Values listed under each gas type are in volts Vdc InstruTech Inc Page 72 Instruction Manual B RAX 3200 8 Serial Communications 8 1 Device Specific Serial Communication Info The B RAX 3200 provides RS232 and RS485 serial communications capability The followi
39. 3 300 3 700 4 000 4 300 4 700 5 000 5 300 5 700 6 000 6 300 6 480 6 600 6 700 6 780 6 850 6 880 6 900 6 950 1 00E 03 7 000 Page 58 Instruction Manual B RAX 3200 6 9 Analog Output for CG1 or CG2 NON LIN Nitrogen Air only When the analog output is setup as described in section 5 5 6 for CG1 NON LIN or CG2 NON LIN the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen air only Refer to section 7 3 3 3 if you are using a gas other than nitrogen air The first convection enhanced pirani transducer introduced was the Convectron The controller for the Convectron provided an analog output signal referred to as the S curve which represented the actual voltage applied across the transducer circuit proportional to the pressure inside the pressure transducer enclosure The Granville Phillips Convectron controllers were designed to output this transducer voltage and in later years the non linear voltage applied to the transducer was scaled to provide various signal spans of the original S curve The non linear analog output of the B RAX 3200 duplicates the original S curve of 0 375 volts at pressure less than 1 00 x 10 torr to 5 659 volts at 1000 torr nitrogen or air 6 Non Linear Analog Output Output Volts 5 4 E 3 je 2 afu 1 E Pressure Torr 10 10 107 10 10 10 10 In general one may use linear interpolation techniques to calcula
40. 4 mA and cannot be changed by the user IG TRIP PRES Factory default 1 00E 03 This setting allows the user to select a pressure value at which CG1 or CG2 or alternate gauge can turn the IG filament on This is applicable only when the gauge is operating at 100 WA emission current setting or in the automatic emission current switching mode EMISSION SELECT AUTO IE and the IG CONTROL mode below is set to CG1 CG2 or ALT GAUGE InstruTech Inc Page 37 Instruction Manual B RAX 3200 The G TRIP PRES value can never be set higher than 5 00E 02 TORR when operating in the 100 uA emission current setting The user does not have the choice to select a turn on point for the IG when the 4 mA emission current has been selected The IG turn on and off is always set to 1 00E 03 Torr when the emission current is set for 4 mA IG CONTROL Factory default MANUAL MODE This function allows the user to choose the source of control for the IG The IG can be controlled from the Front Panel MANUAL MODE CG1 CG2 or the ALT GAUGE alternate gauge Select MANUAL MODE if you wish to use the front panel programming keys to turn the ion gauge transducer filament to the on or off state Select CG1 CG2 or ALT GAUGE if the pressure measurement from CG1 or CG2 or the Alternate Gauge is to be used to automatically turn the ion gauge transducer filament on and off CAUTION Never use another gauge to automatically turn off the ion gauge when the ion
41. 63E 0 8 42E 0 OP OP OP 5 00E 2 5 00E 2 1 61E 1 OP 6 04E 2 2 87E 1 4 21E 0 8 28E 0 9 21E 0 OP OP OP 6 00E 2 6 00E 2 1 88E 1 OP 7 30E 2 3 64E 1 4 44E 0 8 86E 0 9 95E 0 OP OP OP 7 00E 2 7 00E 2 2 18E 1 OP 8 59E 2 4 61E 1 4 65E 0 9 42E 0 1 07E 1 OP OP OP 7 60E 2 7 60E 2 2 37E 1 OP 9 41E 2 5 39E 1 4 75E 0 9 76E4 0 1 11E 1 OP OP OP 8 00E 2 8 00E 2 2 51E 1 OP 9 97E 2 5 94E 1 4 84E 0 9 95E 0 1 14E 1 OP OP OP 9 00E 2 9 00E 2 2 85E 1 OP OP 7 95E 1 4 99E 0 1 05E 1 1 20E 1 OP OP OP 1 00E 3 1 00E43 3 25E 1 OP OP 1 11E 2 5 08E 0 1 11E 1 1 27E 1 OP OP OP Values listed under each gas type are in Torr units Over Pressure OP 1 10E 03 Torr When using gases other than nitrogen air you must use the above look up table to determine the true pressures of selected gases as measured by convection gauges For example if the gas you are using in your vacuum system chamber is predominately argon Ar a displayed pressure of 1 14E 00 Torr means the actual true pressure of argon is 2 00E 00 Torr based on the conversion information provided in the above table Example If the gas is argon Ar when the true pressure is 100 Torr the gauge will read only about 9 torr InstruTech Inc Page 66 Instruction Manual B RAX 3200 7 3 Effect of different gases on analog output The following tables and explanation contains important information regarding
42. 8 6 9 Analog Output for CG1 or CG2 NON LIN Nitrogen Air only eene rennen 59 6 10 Analog Output for CG1 or CG2 LINEAR Nitrogen Air on 61 InstruTech Inc Page 4 Instruction Manual B RAX 3200 7 Using the Gauge with different gases sessssssssessssessseeeseeeee eene enne enne en thsetnnnsttrte ennen earn renen ennen nn enn 62 7 1 lon gauge display correction factors for selected gases sssssssssssssseeeeeeeeeeene nennen nennen nennen 62 7 2 Effects of different gases on convection gauge display cccccsssccsssssecessseeeesssseecsesseecesesseeeesseeeeesssaesenees 63 7 3 Effect of different gases on analog output nennen nennen nennen sen nnnn sinn r nne n nnne 67 7 3 1 lon gauge analog output correction factors for selected eases 67 7 3 2 IG CG1 0 5 7V analog output correction factors for selected gases ssssssssssssssssssssssresssreesserees 68 7 3 2 1 IG CG1 0 5 7V analog output correction factors lon gauge range eene 68 7 3 2 2 IG CG1 0 5 7V analog output correction factors Convection gauge range sese 69 7 3 3 Convection gauge analog output for selected gases ENEE 70 7 3 3 1 CG1 1 8Vor CG2 1 8V analog output correction factors convection gauge sess 70 7 3 3 2 CG1 0 7V or CG2 0 7V analog output correction factors convection gauge s ssessssererrseee 71 7 3 3 3 CG1 NON LIN or CG2 NON LIN analog output correction factors convection gauge
43. 8 Degas error status Low degas on or error C 9 IG on off status relay Normally open B Relay closed IG on InstruTech Inc Page 23 Instruction Manual B RAX 3200 3 2 10 RS232 RS485 Serial Communications Connection Either RS232 or RS485 serial communications may be used to send receive commands to from the B RAX There are two DE9 D subminiature shell size E 9 pole connectors that allow independent cable connections to the RS232 and RS485 serial communication ports Four serial communication protocols are supported 1 RS485 with address start and stop characters and command response syntax derived from the InstruTech IGM401 Hornet protocol 2 RS232 with start and stop characters but no addressing is used The syntax is the same as the RS485 protocol 3 RS232 protocol compatible with the Granville Phillips Series 307 and 358 Controllers 4 RS485protocol compatible with the Granville Phillips Series 307 and 358 Controllers The RS232 serial port is configured to allow for example a 9 pin extension cable male to female wired pin to pin to be connected from the B RAX to your serial port DO NOT connect both of the RS232 and RS485 cables to the B RAX at the same time The B RAX cannot provide both RS232 and RS485 serial communications at the same time Only one or the other as programmed by the user RS232 An extension cable wired pin to pin may be used to connect the RS232 serial port on the B RAX direct
44. Apply momentary continuity to ground to turn degas on or off Apply momentary continuity to ground to switch Emission Currents 100 uA or 4 mA Signal Type B Status Output Signal The IG on off status relay is also available as both normally open and normally closed to indicate IG is on or off This is an output signal to other external instruments to confirm IG filament is on or off The IG on off status relay is a single pole double throw SPDT relay rated at 1 A 30 Vdc resistive or 1 A 30 Vac non inductive Signal Type C Status output Signal A degas status or an error condition output signal is also available from the DIGITAL I O Connector If programmed for DEGAS STATUS this can be used as an output signal to other external instruments to confirm that degas is on or off If programmed for an error condition this can be used as an output signal to other external instruments to confirm whether any error conditions exist Signal Open collector transistor ground emitter rated at 40 V max VCE 50 mA IC max Transistor on Degas on or error condition exists Transistor off Degas off or no error condition exists DIGITAL I O Connector 9 pin DE 9P D subminiature DIGITAL I 0 Connections DE 9P D subminiature Connector Pin Number Description Signal Type 1 IG Sensor on off A 2 Ground 3 Emission Current A 4 IG on off Status relay common B 5 IG on off status relay Normally Closed Relay open IG on 6 Degas on off A 7 Ground
45. E 2 5 49bE 2 2 35E 2 7 25E 2 6 90E 2 6 00E 2 3 48E 2 7 72E 2 1 00E 1 1 00E 1 6 43E 2 8 20E 2 9 72E 2 1 07E 1 4 68E 2 1 43E 1 1 36E 1 1 21E 1 7 00E 2 1 59E 1 2 00E 1 2 00E 1 1 26E 1 1 65E 1 1 94E 1 2 10E 1 9 11E 2 2 75E 1 2 62bE 1 2 50E 1 1 41E 1 3 15E 1 5 00E 1 5 00E 1 3 12E 1 4 35E 1 4 86E 1 4 89E 1 2 17E 1 6 11E 1 5 94E 1 6 87E 1 3 59E 1 7 81E 1 1 00E 0 1 00E 0 6 00E 1 9 40E 1 9 70E 1 9 50E 1 4 00E 1 1 05E 0 1 04E 0 1 55E 0 7 45E 1 1 60E 0 2 00E O 2 00E 0 1 14E 0 2 22E 0 1 94E 0 1 71E 0 7 00E 1 1 62E 0 1 66E 0 4 13E 0 1 59E 0 3 33E 0 5 00E O 5 00E 0 2 45E 0 1 35E 1 4 98E 0 3 34E 0 1 28E 0 2 45E40 2 62E 0 2 46E 2 5 24E 0 7 53E 0 1 00E 1 1 00E 1 4 00E 0 OP 1 03E 1 4 97E 0 1 78E 0 2 96E 0 3 39E 0 OP 2 15E 1 2 79E 1 2 00E 1 2 00E 1 5 80E 0 OP 2 23E 1 6 59E 0 2 29E 0 3 32E 0 3 72E 0 OP 5 84E 2 3 55E 2 5 00E 1 5 00E 1 7 85E 0 OP 7 76E 1 8 22E 0 2 57E 0 3 79E 0 4 14E 0 OP OP 8 42E 2 1 00E 2 1 00E 2 8 83E 0 OP 2 09E 2 9 25E 0 2 74E 0 4 68E 0 4 91E 0 OP OP OP 2 00E 2 2 00E 2 9 79E 0 OP 2 95E 2 1 23E 1 3 32E 0 5 99E 0 6 42E 0 OP OP OP 3 00E 2 3 00E 2 1 13E 1 OP 3 80E 2 1 69E 1 3 59E 0 6 89E 0 7 52E 0 OP OP OP 4 00E 2 4 00E 2 1 35E 1 OP 4 85E 2 2 24E 1 3 94E 0 7
46. I InstruTech Inc Vacuum Gauge Controller B RAX 3200 User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 002192 103 Instruction Manual B RAX 3200 Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety messages to make you aware of safety considerations
47. ITS NONE 1 This sets the character framing by providing the user various selections to control the number of characters parity and number of stop bits Character framing can be set to one of the following 8 BITS NONE 1 This selection sets the character framing to 8 data bits no parity 1 stop bit 7 BITS ODD 2 7 BITS EVEN 2 7 BITS ODD 1 7 BITS EVEN 1 8 BITS ODD 1 8 BITS EVEN 1 ADDRESS Factory default 01 This sets the two byte RS485 device address For example an ADDRESS of 05 will make the address 0x05 in hexadecimal An address of 15 will set the ADDRESS to 0x15 in hexadecimal InstruTech Inc Page 48 Instruction Manual B RAX 3200 5 5 8 DISPLAY The DISPLAY menu allows the user to configure the OLED setup screen The user can configure the set up screen to normal or research mode for IG enable or disable screen saver and adjust the display intensity Press the ENTER key to access the DISPLAY menu for configuring the setup screen SCREEN SETUP Factory default NORMAL This menu configures the display mode for the setup screen The setup screen can be configured to display the IG parameters in NORMAL or RESEARCH mode Use the UP and DOWN keys to select the desired setup screen mode from the following menu choices NORMAL Normal display mode for IG RESEARCH Research display mode for IG Select NORMAL if you would like to configure the setup screen to display the IG parameters in the norm
48. LIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 90 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 002192 103
49. MANUAL MODE This function allows the user to choose the source of control for the IG The IG can be controlled from the Front Panel MANUAL MODE CG1 CG2 or the ALT GAUGE Select MANUAL MODE if you wish to use the front panel programming keys to turn the ion gauge transducer filament to the on or off state Select CG1 CG2 or ALT GAUGE if the pressure measurement from CG1 or CG2 or the Alternate Gauge is to be used to automatically turn the ion gauge sensor on and off When CG1 CG2 or ALT GAUGE is selected in the G CONTROL menu the user cannot turn off or turn on the IG filament manually using the IG ON OFF soft key of the front panel RS232 RS485 or DIGITAL I O signals CAL FACTORS Factory default 10 There are six sensor calibration factor constants referred to as CAL FACTORS C that are established during factory calibration These values are also physically marked on the sensor mounting plate below the electronics enclosure The six calibration factors are designated CO C1 C2 C3 C4 and C5 and are used to characterize the sensor response over the pressure measurement range of the device This results in enhanced and optimum performance over the entire measurement range User should ensure that values physically marked on the instrument match the CAL FACTORS C programmed in the B RAX Press the ENTER key and the value for CO appears on the screen Use UP or DOWN keys to decrease or increase the value of CO Press Enter again to sav
50. NING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum connection ports on which the ion gauge and the convection gauges are mounted are electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The vacuum gauge transducers and enclosure of any control module must be connected directly to a good quality equipment earthing conductor Use a ground lug on the vacuum connection flange of the pressure measurement devices if necessary A WARNING In order to protect personnel from electric shock and b
51. P is the pressure in pascals and V is the output signal in 1 00E 03 70 volts 1 00E 02 8 0 Notes The output voltage will switch to above 11 Vdc under 5 00E 02 8 698 the following conditions See Notes gt 11 1 The IG sensor is turned off or any IG fault condition 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current or 5 00 x 10 Torr at 100 uA emission current for IGMAOO 3 The pressure exceeds 1 00 x 10 Torr for CCM500 The following chart shows the graphical results of table and formulas above for measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure Output Signal Volts dc 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Pressure Torr InstruTech Inc Page 52 Instruction Manual 6 3 Analog Output for IG LOG N 11 Nitrogen Air only B RAX 3200 When the analog output is setup as described in section 5 5 6 for IG LOG N 11 the analog output voltage represents the pressured measured by the IG for nitrogen air only Refer to section 7 3 1 if you are using a gas other than nitrogen air Analog output IG Log linear O to 10 Vdc 1 V per decade A The log linear output signal and pressure are related by the following formulas when units of measurement is in
52. Pressure Unit of measurement is in Torr and mbar P 10 5 1 where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 3 for details regarding this type of output signal This selection is also compatible with a certain analog output scaling from the Granville Phillips 307 350 and 358 controllers Select IG LOG N 12 as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 0 to 11 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 10 S where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 4 for details regarding this type of output signal This selection is also compatible with a certain analog output scaling from the Granville Phillips 307 and 350 controllers Select 1G 1 8 8 7V as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 1 8 to 8 7 volts with a scaling factor of 0 8 V decade of measured pressure T
53. Switch emission current setting from initial setting and re start the IG make several attempts to establish emission current at both 100 pA and 4 mA Switch to second filament or replace ion gauge sensor All parameters in the RESEARCH screen are zero after IG turn ON is attempted Failed electronics Replace the IGM400 electronics IGM400 filament voltage is greater than 1 7 V and filament current is greater than 2 5 A with emission current 100 UA Filament nearing end of useful operating life Switch to second filament or replace ion gauge sensor IGM400 filament voltage is greater than 2 3 V and filament current is greater than 2 7 A with emission current 4 mA Filament nearing end of useful operating life IGM400 may be operated at either 100 uA or 4 mA emission current setting If trouble with maintaining 4 mA emission current le persists switch to 100 uA emission current InstruTech Inc Page 88 Instruction Manual B RAX 3200 9 8 2 Research Screen Diagnostic Display CCM500 When you have a CCM500 connected to the B RAX the Research display screen will show electrometer current discharge current and the cold cathode IG anode voltage similar to the following Discharge current value ampere A RESEARCH Display Mode CCM500 Anode high voltage Vdc 1 25E 07 4 00E 03 The indication of IC in the top line of this display is a real time me
54. The process gas is different from the gas nitrogen used to calibrate the CCM500 Sensor has been dropped causing mechanical damage The gauge sensor is contaminated Leak in the vacuum system Incorrect Sensitivity or CAL FACTORS B RAX 3200 Check cable connections and verify that power is being supplied Ensure the sensor is located in appropriate location Apply gas sensitivity correction factor if applicable Replace the Cold Cathode gauge sensor Clean or replace sensor Re check for leak in the system check that all metal seals are used when operating below 1 00 x 10 Torr UHV Ensure correct values programmed Displayed pressure is significantly lower than expected pressure Gauge cannot be activated unable to turn anode voltage on Gauge will not start at low pressure Research Screen shows anode Voltage is present but total current stays at zero InstruTech Inc The gauge sensor is contaminated Incorrect Sensitivity and CAL FACTORS Pressure exceeds value programmed for OVER PRESSURE in the SETUP IG menu Chamber pressure higher than 1 00 x 10 Torr Pressure is too low to initiate discharge Clean or replace sensor Ensure correct values programmed Decrease pressure below required value Decrease chamber pressure below value programmed for OVER PRESSURE in the ION GAUGE menu Repeat step to activate sensor Increase HV TIMEOUT to allow more time for sensor activation Increa
55. US this can be used as an output signal to other external instruments to confirm that degas is on or off If selected for ERROR STATUS this can be used as an output signal to other external instruments to confirm whether there is an error condition DEFAULTS Factory default PRESS ENTER TO SET OR MENU TO EXIT The system can be returned to the original factory settings by using the ENTER key to set factory defaults You must re enter the actual sensor sensitivity value marked on the IGM4OO sensor or the six CAL FACTORS marked on the CCM500 sensor Ensure CCM500 sensitivity value is set to 10 If you reset all values to original factory default settings you would need to repeat the initial setup procedure for the convection gauges as described in section 4 5 and reprogram other parameters as required Note The IG sensor must be turned off first before setting factory defaults will be accepted by the B RAX 5 5 2 ION GAUGE when used with IGM400 NOTICE Before you activate the ion gauge filament make sure you understand all instructions and information provided in this manual and the User Manual for the IGM400 Furthermore you should ensure you have fully configured the B RAX control unit to your operational requirements before turning the filaments on Prior to turning on the ion gauge filament you should ensure the pressure is below the OVERPRESS 100 setting if the emission current selection is set to 100 pA or below the 1 00 x 10 Torr if e
56. When IG is off 701 1 10E 03 When Hornet is not connected 201 9 90E 09 READ CGn Read the current pressure xxRDCGn lt CR gt Pay y yyEzpp CR PRESSURE for CGn in the same units e g 401RDCG1 lt CR gt e g 01 7 60E 02 CR of measure on display where n 1 or 2 CG1 or CG2 When CG is over ranged 01_1 10E 03 READ AI Pressure Read the current pressure xxRDAI lt CR gt Pay y yyEzpp CR for Al in the same units of e g ZO1RDAI CR e g 01 7 60E 02 CR measure on display When Al is over ranged or not powered 01 1 10E403 READ all Process Read the current state of xxRL lt CR gt xx_003F_RL_ lt CR gt Control PC or all process control e g 01RL lt CR gt In the example response Relay states setpoint relays above the F represents the first 4 relays relays 5 and 6 are the second digit the 3 of the response This example shows that all relays are ON i e energized The 3F would represent the binary string of 0011 1111 where 0011 is the 3 and 1111 is the F in 3F A response of 0003 means that only RL1 and RL2 are ON i e energized READ one PC state Read the current state of xxRLn lt CR gt xx D RL OFF CR one process control where n 1 2 3 4 5 or 6 xx 1 RL ON CR setpoint e g 01RL1 lt CR gt InstruTech Inc Page 75 Instruction Manual B RAX 3200 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES READ IG on off STATUS TURN IG ON
57. X 3200 Table of Contents 1 Introduction General INFOrmation scsc ccssscccesscscccsscescevesssecerescoeccvsssicacaesccesuaedssscssuaccerssasccenssesdonaoaed duacdesdvasseadsxsasseacias 6 1 1 DESCHIDUIOM RET RUP RC EE 6 1 2 Serena 8 1 3 DIMENSIONS Ais ETT SLT I I I IEEE 9 1 4 Part NUMBERS as csisnccavabvssncvesungvavetvedeetasnydvsvieevieivaseyieasibvags E E savastvievadeevareyariedenegs 10 2 Important Safety Information ccccccccsssscccesssseccessssecesssseecesssseeessssseseseueeccsesueeceseasecesesuseseseaueesseesseesseuseseseaeeens 11 2 1 Safety Precautions Genetali ip cuts Hee Ens cate Herc En cae e a e MR een EE 11 2 2 Safety Precautions Service and operation ccccccesssscccsssseecessssecessssseccssssseceseseeeesesseeesessseeeseseeeessueeessenaes 12 2 3 Electrical Conditions 13 2 3 1 Proper Equipment Grounding esses eene nnnnnn nennen rennen sesenta seen ener enean enn 13 2 3 2 Electrical Interface and Control 13 2 4 Overpressure and use with hazardous gases ssssssnsssssrsssrersssrersssrenssrenssrrenssensnsrensssrensssrenssrensnsnensnenennt 13 2 5 Gases otherthan Nitrogen Pe RA ent 14 37 AnastallatiOlio saei eerie RImU REIR EMIL MIDI IIS 15 3 1 Mechanical Installation Controller 15 3 1 1 Panel Mount eC 15 3 1 2 Rack MOU Mt e E 16 3 1
58. able and information to convert the analog output to pressure The look up table has been derived from the equation provided in section 6 7 Analog Output for Log Linear CG1 1 8V or CG2 1 8V True Pressure Torr N2 Ar He O co KR Freon12 Freon22 D Ne CH 1 00E 4 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 2 00E 4 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 5 00E 4 1 699 1 699 1 699 1 699 1 699 1 477 1 699 1 699 1 699 1 699 1 699 1 00E 3 2 000 1 845 1 903 2 000 2 041 1 602 2 176 2 176 2 114 1 845 2 230 2 00E 3 2 301 2 146 2 204 2 301 2 362 2 000 2 491 2 491 2 380 2 176 2 519 5 00E 3 2 699 2 519 2 602 2 699 2 643 2 362 2 881 2 845 2 778 2 544 2 886 1 00E 2 3 000 2 820 2 908 2 987 3 041 2 681 3 167 3 130 3 083 2 851 3 185 2 00E 2 3 301 3 117 3 207 3 297 3 346 2 978 3 476 3 435 3 386 3 149 3 483 5 00E 2 3 699 3 511 3 607 3 692 3 740 3 371 3 860 3 839 3 778 3 542 3 888 1 00E 1 4 000 3 808 3 914 3 988 4 029 3 670 4 155 4 134 4 083 3 845 4 201 2 00E 1 4 301 4 100 4 217 4 288 4 322 3 960 4 439 4 418 4 398 4 149 4 498 5 00E 1 4 699 4 494 4 638 4 687 4 689 4 336 4 786 4 774 4 837 4 555 4 893 1 00E O 5 000 4 778 4 973 4 987
59. about 2 Torr the Non Linear Analog Output voltage range of 0 375 to 2 842 volts use this table Coefficients for y x a bx cx dx ex fx 0 02585 0 03767 0 04563 0 1151 0 04158 0 008738 n1oadqndn o on For 2 torr to about 100 torr the Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table atcx ex Coefficients for y x Trbx dx2 fx 0 1031 0 3986 0 02322 0 07438 0 07229 0 006866 n0 Oo CO o For 100 torr to 1000 torr the Non Linear Analog Output voltage range of 4 94 to 5 659 volts use this table a cx Coefficients for y x ES 100 624 0 37679 20 5623 0 0348656 Qo C o Where y x pressure in Torr x measured analog output in volts Example Measured analog output voltage is 0 3840 V From first table shown above use equation y x a bx cx dx ex f X 0 3840 volts A 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 y x Pressure 1 00E 03 Torr InstruTech Inc Page 60 Instruction Manual B RAX 3200 6 10 Analog Output for CG1 or CG2 LINEAR Nitrogen Air only When the analog output is setup as described in section 5 5 6 for CG1 LINEAR or CG2 LINEAR the analog output voltage represents the pressure measured by the CG1 or CG2 for nitrogen air only The Linear analog output type provides a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the CG1 or CG2 only
60. ails regarding this type of output signal This selection is compatible with the G CG1 0 5 7V selection in the older B RAX series 3100 Select IG LOG N 10 as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 0 to 9 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 105 7 1 where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 2 for details regarding this type of output signal This selection is compatible with the IG 0 9V selection in the older B RAX series 3100 as well as certain analog output scaling from the Granville Phillips 307 and 350 controllers InstruTech Inc Page 43 Instruction Manual B RAX 3200 Select IG LOG N 11 as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 0 to 10 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when
61. ake this adjustment unless the displayed pressure on the B RAX and the resulting pressure recorded from the analog output do not match closely To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG LOG IG LINEAR or ALT IG LOGN10 Connect the IG to the B RAX and connect the B RAX analog output 1 to a high resolution voltmeter your system PLC etc Evacuate your vacuum system to a low enough pressure for the IG to operate Establish a system pressure so that the displayed IG reading is preferably at the high end of any decade for example 9 00E 05 as opposed to 1 00E 05 In the AOUT CAL 1 screen use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on the IG pressure measurement display or the CG2 ALT display channel if using an IGM401 or CCM501 ion gauge module as an alternate gauge to CG2 Example ANALOG OUTPUT 1 is programmed for IG LOG N 10 The B RAX IG display is registering a pressure reading of 9 00E 05 Torr Based on the equation and table given in section 6 2 the expected analog output at 9 00E 05 Torr is 5 9542 V While in the AOUT CAL 1 screen use the UP or DOWN keys to set the analog output to 5 9542 V as recorded by your voltmeter Alternatively if the IG analog output is used to display the IG pressure on your PLC or system display console simply adjust the AOUT CAL 1 so that the IG pressure displayed by your PLC pressure established at the high end of any decade pre
62. al mode shown below Selected IG filament in use NORMAL Display Mode IGM400 amp CCM500 IG Emission current E and selected FILAMENT disappears from the display when CCM500 cold cathode module is connected Relay status indicators for relays 1 thru 6 Color filled circle Relay energized No color filled circle Relay not energized Select RESEARCH if you would like to configure the setup screen to display the IG parameters in the research mode shown below This is particularly helpful when troubleshooting IG issues lon current RESEARCH Display Mode IGM400 value A Emission current value ampere A 4 00E 11 4 00E 03 1 50E 00 1 90E 00 Filament voltage Vdc Filament current A InstruTech Inc Page 49 Instruction Manual B RAX 3200 Discharge current value ampere A Anode high voltage Vdc 4 00 kV shown in this example 1 25E 07 RESEARCH Display Mode CCM500 4 00E 03 SCREEN SAVER Factory default ON The B RAX set up screen uses an OLED type display which over an extended period of time can start to show divergence between pixels that are on at all times verses pixels that are not This could result in pixels exhibiting a burned in effect To minimize the burned in effect a screen saver function can be activated by programming the SCREEN SAVER menu selection to ON With the screen saver function turne
63. as well as compatible signals with the GP 307 setpoint relays relay contact rating six single pole double throw SPDT user assignable to any of the gauges 5 Aat 30 Vdc 5 Aat 250 Vac resistive load A caution The relay contact rating above applies to units shipped after Nov 1 2015 Serial numbers 15J711C and higher have this new contact rating Older units shipped before Nov 1 2015 with serial numbers 15J710C and lower had a contact rating of 1 A at 30 Vdc resistive or 1 A at 30 Vac non inductive Applying a load to older units which draws more than 1 A could cause damage to relays analog output IG analog output combination IG CG analog output CG analog output three analog outputs user assignable to any of the gauges log linear O to 10 Vdc 1 V decade various scaling selections also provide output compatibility with Granville Phillips controller models 307 350 and 358 controllers or log Linear 1 7 V to 9 3 Vdc nominal 1 8 to 8 7 Vdc 0 8 V decade or linear O to 10 Vdc useable over 3 decades also compatible with GP 307 controller log linear 0 5 to 7 Vdc 0 5 V decade log linear 1 to 8 Vdc 1 V decade or 0 to 7 Vdc 1 V decade also compatible with GP 307 350 358 or Linear 0 to 10 Vdc useable over 3 decades or non linear analog S curve 0 375 to 5 659 Vdc CDG InstruTech Modules analog input one 0 10 Vdc analog input signal from a CDG when used as an alternate gauge to CG2 or analog i
64. asurement of the cold cathode discharge current This current is proportional to the density of gas inside the transducer sensor The B RAX front panel indication of pressure is based on this discharge current level As the gas density increases the discharge current also increases The pressure reading for the cold cathode ionization gauge is determined by the output of an electrometer circuit in the CCM500 a nominal curve fit algorithm and a look up table that resides in the B RAX controller operating system The indication of HV in the bottom line of this display is a real time measurement of the cold cathode anode voltage This voltage will change with increasing pressure If the pressure reading that you see in the B RAX LED IG display line is lower than expected these two indications in the RESEARCH Screen may be viewed to perhaps discern the relative conditions of the measurement being made If the cold cathode IG has become contaminated excess electrical current leakage may occur causing the anode voltage to be lower than it should be for the pressure measurement to be realistic The best practice is to document the discharge current and anode voltage at initial installation of the device then thereafter at periodic intervals over time at a known operating pressure for your system In general your system base pressure may be relatively stable assuming no leaks have developed and that the vacuum pump is operating at normal pumping capac
65. ble or plug is damaged or the product is not operating normally according to this instruction manual Contact qualified InstruTech service personnel for any service or troubleshooting condition that may not be covered by this instruction manual It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation If measured pressure exceeds the thresholds that are defined under the following conditions the IGM4OO ion gauge filament or CCM500 sensor will turn off 1 For IGM400 e The pressure exceeds 5 00 x 10 Torr at 100 HA emission current e The pressure exceeds 1 00 x 10 Torr at 4 mA emission current 2 For CCM500 e The pressure exceeds 1 00 x 10 Torr During the Degas cycle for IGMAOO if the measured pressure exceeds 3 00 x 10 Torr Degas will turn off but the filament will remain turned on Ensure vacuum level is less than 5 00 x 10 Torr before attempting to initiate Degas of the IGM400 ionization gauge module Do not attempt to turn the IG on if the pressure is near the threshold limits defined here InstruTech Inc Page 12 Instruction Manual B RAX 3200 2 3 Electrical Conditions A WAR
66. bly provided in different lengths from InstruTech for connecting the B RAX to the IGM400 hot cathode or CCM500 cold cathode ionization gauge module The programming parameters for the IGM400 and CCM500 module are transmitted between the module and the B RAX immediately during initial Power ON condition If an IGM400 or CCM500 module is swapped or a cable from one module is moved and reconnected to a different module the B RAX considers the first module connected at power ON to be the device it is communicating with Changing cables from one device to another when power is applied to the module is not only bad electronics handling procedure it is not advised and if done by the user of this equipment may lead to erroneous measurement results a hazardous situation equipment damage and possible operator injury A CAUTION It is always good industry practice to turn off power to the instrument before connecting or disconnecting cables The DE 9 D subminiature end of the InstruTech cable assembly P N BXC400 1 XXXF for connecting the IGM4OO or the CCM500 ion gauge module to the B RAX should be connected to either the IGM400 or CCM500 module The mini DIN connector end of this cable connects to the connector labeled IG on the back panel of the B RAX 3 2 4 Connecting the CVG101 connectors labeled CG1 and CG2 P N CB421 1 XXXF is a custom cable assembly provided in different lengths from InstruTech for connecting the B RAX to InstruTech CVG101 Worker B
67. cade for gases other than N use the following look up table and information to convert the analog output to pressure The look up table has been derived from the equation provided in section 6 8 True Pressure Torr N Ar He O co KR Freon12 Freon22 D Ne CH 1 00E 4 0 000 0 000 0 000 0 000 0 000 0 000 0 000 0 000 0 000 0 000 0 000 2 00E 4 0 301 0 301 0 301 0 301 0 301 0 301 0 301 0 301 0 301 0 301 0 301 5 00E 4 0 699 0 699 0 699 0 699 0 699 0 477 0 699 0 699 0 699 0 699 0 699 1 00E 3 1 000 0 845 0 903 1 000 1 041 0 602 1 176 1 176 1 114 0 845 1 230 2 00E 3 1 301 1 146 1 204 1 301 1 362 1 000 1 491 1 491 1 380 1 176 1 519 5 00E 3 1 699 1 519 1 602 1 699 1 643 1 362 1 881 1 845 1 778 1 544 1 886 1 00E 2 2 000 1 820 1 908 1 987 2 041 1 681 2 167 2 130 2 083 1 851 2 185 2 00E 2 2 301 2 117 2 207 2 297 2 346 1 978 2 476 2 435 2 386 2 149 2 483 5 00E 2 2 699 2 511 2 607 2 692 2 740 2 371 2 860 2 839 2 778 2 542 2 888 1 00E 1 3 000 2 808 2 914 2 988 3 029 2 670 3 155 3 134 3 083 2 845 3 201 2 00E 1 3 301 3 100 3 217 3 288 3 322 2 960 3 439 3 418 3 398 3 149 3 498 5 00E 1 3 699 3 494 3 638 3 687 3 689 3 336 3 786 3 774 3 837 3 555 3 893 1 00E 0 4 000 3 778
68. causes of trouble that at times may make it difficult to use a single measurement parameter as an indicator of what the problem is In general if you have monitored and recorded the values displayed in the Research Screen over time you may be able to detect a pattern or trend that if correlated to a particular failure mode may prove to be a valuable indication of probable cause The values of filament voltage and current presented below are approximate values that one may see in the Research Screen The representative average values used in this table may vary depending on the condition of the filament and the vacuum chamber environment For example you may see a reading of 2 0 V at 100 uA emission current with a corresponding filament drive current of 2 1 A This doesn t mean that because the voltage is higher than the value listed 1 5 V above that there is a problem with the IG The readings taken should InstruTech Inc Page 87 Instruction Manual B RAX 3200 be viewed with the notion that there may be an indication of reaching end of useful filament lifetime if the power required to sustain emission current continues to increase over time Indication Possible Cause Possible Solution Filament voltage values are present for several seconds immediately after turning IG ON but then the values are zero Filament is contaminated or filament has reached end of useful operating life for required emission current setting
69. continue setting additional parameters scroll with the UP IM and DOWN keys until you reach the desired parameter then press ENTER IG Emission Current IE 4 MAC MENU key menurey FILAMENT 1 lt selected IG T TOT T5 IO filament in use Relay status indicators for relays 1 thru 6 Color filled circle Relay energized No color filled circle 2 Relay not energized ENTER key Scroll UP or DOWN with and Vu keys Note The value of certain menu parameters must be programmed within an allowable range or limit If the user tries to program a value that is outside of the allowable range of a specific menu the setup screen will momentarily display the message NO CHANGE In this case the user needs to access the specific menu again and enter a correct value that is within the allowable range Note Certain key entry sequences related to IG degas emission current or switching of filaments may require a time delay for the B RAX to complete the desired task This delay is caused by the communications time needed between the B RAX and the IGM400 CCM500 ion gauge module For example if you press the IG DEGAS key immediately after you have changed the IG emission current or switched filaments you may see the message DISABLED In this case wait at least 20 seconds before initiating degas In another example if you try to switch filaments immediately af
70. d on the setup screen changes display appearance every 12 hours The display will appear in the normal mode with a dark background color for the first 12 hours and will then switch to a back lit background color for the next 12 hours If you like to have the 12 hour period for the normal display mode to start at a specific time of the day simply access the SCREEN SAVER menu and change setting to OFF and then ON again This initiates the screen saver function immediately Note To increase longevity of the OLED display InstruTech recommends that the screen saver function remains ON as shipped from the factory BRIGHTNESS Factory default 0 The BRIGHTNESS menu allows the user to select the brightness of the setup screen display The brightness setting of O provides the lowest brightness contrast and 10 the highest Note To increase longevity of the OLED display InstruTech recommends that the brightness function remains at 0 as shipped from the factory InstruTech Inc Page 50 Instruction Manual B RAX 3200 6 Analog Output Charts amp Equations Nitrogen Air Only This section provides various charts amp equations for analog outputs available from the B RAX 6 1 Analog Output wide range measurement for IG CG1 0 5 7V Nitrogen Air only When the analog output is setup as described in section 5 5 6 for IG CG1 0 5 7V the analog output voltage represents a combination of the IG and CG1 for wide range measurements Re
71. display channel of the B RAX For other CDG ranges always use CDG s full scale pressure value to perform calibration For example if you are using a 100 TORR CDG evacuate your system pressure to 100 Torr and use the same calibration procedure described above Note As you adjust the analog output the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment AOUT CAL 2 Factory default Factory Set Same info as AOUT CAL 1 above except for AOUT CAL 2 AOUT CAL 3 Factory default Factory Set Same info as AOUT CA L1 above except for AOUT CAL 3 AOUT LIN 1 Factory default 1 00E00 TORR This programming parameter is only used if you have assigned G LINEAR CG1 LINEAR or CG2 LINEAR to ANALOG OUTPUT 1 above This analog output type provides a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the IG CG1 or CG2 The AOUT LIN 1 value programmed here represents the maximum pressure as measured by the IG CG1 or CG2 corresponding to a voltage output of 10 volts This selection covers at most a 3 decade range of pressure For example if AOUT LIN 1 is programmed for 1 00E 03 Torr then the instrument provides a 10 volt analog output signal when pressure is at 1 00E 03 Torr Thereafter minimum pressure is automatically set to 1 00E 06 torr with a corresponding minimum voltage output
72. e B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will over pressurize your chamber which may present a hazard Example C If the gas is helium He the gauge will read 1 10E 03 overpressure indication Torr when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product You probably will not cause damage to your vacuum system but opening the chamber to atmosphere with the internal chamber pressure at only 10 torr true pressure may present other hazards for both personnel in the proximity and product that may be inside the chamber vessel CAUTION What these examples illustrate is that using gases other than nitrogen N2 without using accurate gas conversion data and other proper precautions could result in injury to personnel and or damage to equipment Suggested precautions when using gases other than N3 e Install a pressure relief valve or burst disk on your chamber to provide protection from the dangers associated with over pressurizing the chamber e Post a warning label on your gauge readout such as Do Not Exceed Torr Indicated Pressure fill in the bla
73. e B RAX 3200 will not respond to a command with an invalid address while using RS485 The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation However floating point notation is acceptable as long as a leading digit is entered as 0 or 1 etc There must be a digit to the left of the decimal point For example when constructing the syntax for the command to set the CGn zero value e g xxTZn_x xxE pp lt CR gt when using scientific notation use either xxTZn_0 00 lt CR gt or xxTZn_O lt CR gt A simple 0 is valid for the pressure entry InstruTech Inc Page 74 Instruction Manual B RAX 3200 8 3 InstruTech RS232 and RS485 Command Protocol Summary The RS232 mode is the same as RS485 except ADDRESS is ignored in RS232 mode and can be eliminated from the command string or replaced with space characters Responses will not return ADDRESS the ADDRESS is replaced with space characters All pressure measurement responses are in absolute pressure units as selected by the user COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES READ ION GAUGE Read the current xxRDIG lt CR gt xx_y yyEzpp lt CR gt PRESSURE displayed pressure of the ion gauge in the same e g O1RDIG lt CR gt where units of measure on display where xx the two digit y yy mantissa address of the device node z sign of the exponent and pp the exponent e g 01 1 53E 06 CR
74. e calibrated for nitrogen If you use a different species of gas or mixture of gases you will be required to either make manual corrections to the pressure readout or compensate the reading The sensitivity adjustment function of the IGM4OO you are using to measure the pressure of a gas other than nitrogen air may be set to compensate the reading Compensating the pressure reading using the sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment range AN CAUTION The user assumes all risks if the IGM400 SENSITIVITY is programmed to a value not matching the actual transducer sensor sensitivity marked on the sensor mounting plate below the electronic enclosure Failure to ensure that the B RAX is programmed for the actual sensitivity of the transducer it is used with may result in pressure readings that are not true pressure Equipment damage due to incorrect pressure readings and improper system control functions as a result of incorrect pressure measurement readings may result OVER PRES 100 Factory default 5 00E 02 This function allows the user to set the pressure at which the gauge will turn off when the emission current is running at 100 uA The overpressure shut down values are adjustable when emission current selected is 100 A However the overpressure shut down value is factory set to 1 00E 03 Torr when emission current selected is
75. e cannot be turned on Pressure exceeds 5 00 x 10 Torr at 0 10 Decrease pressure below required value mA 100 LA emission current Switch to the other filament replace ion gauge sensor tube due to possible filament failure or contamination Filament is open Switch to the other filament replace sensor or electronics Switch to the other filament or replace sensor Emission Control not functioning Research Screen shows filament voltage is present but filament current stays at 0 00 Research Screen shows filament voltage Filament is contaminated or burned out and filament current are present but gauge is shutting off Unable to initiate degas System pressure above 5 00 x 10 Torr Decrease pressure below the required value Voltage to filament too high Filament contaminated or near end of its Switch to the other filament or replace life sensor Setpoint does not actuate Incorrect setup Check setpoint setup InstruTech Inc Page 82 Instruction Manual 9 3 Troubleshooting IGM400 Error Messages B RAX 3200 OVERPRESSURE The calculated pressure is greater than maximum setting for emission current System pressure too high ION CUR FAIL The ion current IC is below the minimum parameter Sensor contamination possible coating on collector inhibiting ion collection Electrometer failure EMIS FAIL The desired emission current IE could not be established Gauge contamination possible coating on filamen
76. e setting for CO and move to C1 Repeat same steps for C1 thru C5 The CAL FACTORS menu will reappear once you have entered the value for C5 and have pressed the ENTER key InstruTech Inc Page 40 Instruction Manual B RAX 3200 5 5 4 CONVEC GAUGE Leien t is important to set vacuum and atmosphere when initially setting up the convection gauges See Convection Gauge Initial Setup section 4 5 This programming menu allows the user to set the atmospheric pressure reading also known as the span adjustment and vacuum reading zero point for convection gauges CG1 and CG2 InstruTech advises that you first determine if the span ATM adjustment of your measurement device is set properly before setting the zero VAC adjustment It is good practice to perform the sequence of checking and adjusting ATM span then VAC zero and then finally re checking the ATM setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range Press the ENTER key to access the CONVEC GAUGE menu for configuring the convection gauges SET VAC CG1 Factory default 0 00E 00 Press the ENTER key to access the SET VAC CG1 screen 1 To properly set the vacuum reading zero point with CG1 installed on your vacuum system the gauge should be evacuated to a pressure below 1 00E 04 Torr 0 1 mTorr Factory default 0 00E 0 Torr 2 When the known vacuum system pressure is below 0 1 mT
77. e tungsten filaments If you try to turn on an ion gauge with tungsten filaments while it is sitting on your desk exposed to room air you will immediately damage or destroy the filament beyond repair Do not use another gauge to automatically turn off the ion gauge when the ion gauge IG filament in use is constructed of tungsten yttria coated filament is ok The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage Always turn off the IG filament manually before pressure is allowed to rise above 1 00 x 10 Torr Note Both types of filaments will suffer eventual damage if operated at high pressures The type and amount of damage at high pressure is dependent upon the length of operating time the pressure and the gas present InstruTech Inc Page 27 Instruction Manual B RAX 3200 4 4 IG Overpressure shut down IGM400 and CCM500 The IGM400 hot cathode ion gauge module is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below Factory set IGM400 overpressure shut down values Emission Current Overpressure Shut Overpressure Shut Overpressure Shut Down Torr Down mbar Down Pa 4 mA 1 00 x 10 1 33 x 10 1 33 x 107 100 pA 0 1 mA 5 00 x 10 6 66 x 10 6 66 The CCM500 cold cathode ion gauge
78. ed commands represent a space character Space characters may be omitted from commands 3 GP 307 and 358 protocol response strings are variable length InstruTech Inc Page 81 Instruction Manual B RAX 3200 9 Service 9 1 Calibration Every InstruTech module is calibrated prior to shipment using nitrogen Care should be exercised when using gases other than nitrogen N air see previous sections regarding the use of gases other than N air 9 2 Troubleshooting IGM400 Operation Display on B RAX controller indicates OFF No power Check cable connections and verify that power is being supplied Check cable connections and verify that power is being supplied The connector may not be wired correctly Ensure the sensor is located in appropriate location on vacuum chamber Readings appear very different from expected pressure Sensor not in the proper location on vacuum system Apply gas sensitivity correction factor if applicable The process gas is different from the gas Nitrogen used to calibrate the IGM400 Sensor has been dropped causing mechanical damage The gauge sensor tube is contaminated Leak in the vacuum system Replace the ion gauge sensor tube Degas the sensor or replace the sensor Re check for leak in the system Re check that all metal seals are used when operating below 1 00 x 107 TORR Pressure exceeds 1 00 x 10 Torr at 4 mA Decrease pressure below required value emission lon gaug
79. ee or MKS Instruments Granville Phillips 275 Convectron vacuum gauge sensor For your reference the wiring chart for the CVG101 cable provided by InstruTech is shown below Connect the DE 9 D subminiature connector to B RAX and CVG101 connectors to CG1 or CG2 In addition to InstruTech provided standard cable assembly lengths InstruTech will provide custom length cable assemblies upon request B RAX pin number connects to CVG101 gauge pin number 9 Pin D Sub gt InstruTech molded custom connector 1 NC 2 cable shield 3 3 4 3 5 2 6 5 7 1 8 1 9 NC InstruTech Inc Page 20 Instruction Manual B RAX 3200 3 2 5 Power Connection The B RAX 3200 requires an input power of 20 28 Vdc 36 W to operate One each 2 contact pluggable terminal strip mating connector is provided for connection to the power contactors Optional Power Supplies are also available from InstruTech See the part number section 1 4 of this User Manual Power contacts Contact Description Analog Output Connectors Power input 20 28 Vdc at 36 W Power Ground DC POWER Wi 20 28V 36W 3 2 6 Relay Connection A total of six setpoint relays are provided by the B RAX 3200 Two each 9 contact pluggable terminal strip mating connectors are provided for easy connection to the relay contactors The B RAX back panel relay connecto
80. essure range of overpressure shutdown value to 1 000 Torr True Pressure Torr N2 Ar He O CO KR Freon12 Freon22 D Ne CH 1 00E 3 4 000 3 923 3 952 4 000 4 021 3 801 4 088 4 088 4 057 3 923 4 115 2 00E 3 4 151 4 073 4 102 4 151 4 181 4 000 4 246 4 246 4 190 4 088 4 259 5 00E 3 4 349 4 259 4 301 4 349 4 322 4 181 4 440 4 423 4 389 4 272 4 443 1 00E 2 4 500 4 410 4 454 4 493 4 521 4 341 4 584 4 565 4 541 4 426 4 592 2 00E 2 4 651 4 559 4 603 4 648 4 673 4 489 4 738 4 717 4 693 4 575 4 741 5 00E 2 4 849 4 755 4 804 4 846 4 870 4 686 4 930 4 919 4 889 4 771 4 944 1 00E 1 5 000 4 904 4 957 4 994 5 015 4 835 5 078 5 067 5 041 4 923 5 101 2 00E 1 5 151 5 050 5 109 5 144 5 161 4 980 5 220 5 209 5 199 5 075 5 249 5 00E 1 5 349 5 247 5 319 5 343 5 345 5 168 5 393 5 387 5 418 5 278 5 446 1 00E 0 5 500 5 389 5 487 5 493 5 489 5 301 5 511 5 509 5 595 5 436 5 602 2 00E 0 5 651 5 528 5 673 5 644 5 616 5 423 5 605 5 610 5 808 5 601 5 761 5 00E 0 5 849 5 695 6 065 5 849 5 762 5 554 5 695 5 709 6 695 5 860 5 938 1 00E 1 6 000 5 801 6 006 5 848 5 625 5 736 5 765 6 166 6 223 2 00E 1 6 151 5 882 6 174 5 909 5 680 5 761 5 785 6 883 6 775 5 00E 1
81. fer to section 7 3 2 if you are using a gas other than nitrogen air Analog output Wide Range Log linear 0 5 to 7 Vdc 0 5 V per decade Log Linear Analog Output N air only A The log linear output signal and pressure are related by the Pressure Torr Voltage Voc following formulas when units of measurement is in Torr and mbar 1 00E 10 0 5 p 10995 55 09 vs 0 5 X logio P 5 5 ODE S AE Where P is the pressure in Torr or mbar and V is the output 1 00E 08 1 5 signal in volts 1 00E 07 2 0 1 00E 06 2 5 B The log linear output signal and pressure are related by the i mE 1 00E 05 3 0 following formulas when units of measurement is in pascals P 10 95 45 05 V to 5 X log p 4 5 1 00E 04 3 5 1 00E 03 4 0 Notes The output voltage will switch to above 11 Vdc under the 1 00E 02 45 following conditions 1 00E 01 5 0 1 The IG sensor is turned off any IG fault condition and the CG1 is damaged or disconnected 1 00E 00 5 5 2 The pressure exceeds 1 00 x 10 Torr at 4 mA emission current or 5 00 x 10 Torr at 100 HA emission current for 1 00E 01 6 0 IGM400 and CG1 is damaged or disconnected 1 00E 02 6 5 3 The pressure exceeds 1 00 x 10 Torr for CCM500 and CG1 is damaged or disconnected 1 00E 03 7 0 4 Any IG or CG faults condition while operating in the IG or See Notes gt 11 CG range respectively The following chart shows the graphical results of tab
82. ferred matches the IG pressure displayed by the B RAX Note As you adjust the analog output the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG CG1 CG1 CG2 CG1 CG2 NON LIN CG1 CG2 LINEAR ALT CG 1 8V Connect CG1 or CG2 to the B RAX and connect the B RAX analog output 1 to a high resolution voltmeter your system PLC etc While in the AOUT CAL 1 screen and with CG1 or CG2 exposed to atmosphere use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on CG1 or CG2 pressure measurement display Example The B RAX ANALOG OUTPUT 1 is programmed for CG1 1 8V The B RAX CG1 display is registering a pressure reading of 7 60E 02 Torr Based on the equation and table given in section 6 7 the expected InstruTech Inc Page 46 Instruction Manual B RAX 3200 analog output at 7 60E 02 Torr is 7 881 V Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7 881 V as recorded by your voltmeter Alternatively if the CG1 analog output is used to display the CG1 pressure on your PLC or system display console simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the CG1 atmospheric pressure displayed by your PLC matches the CG1 atmospheric pressure displayed by the B RAX
83. following equation 4 00 x 1077 Torr 3 10 x 10 Torr Ar 1 29 2 Alternatively you may correct the display for a direct reading of pressure for the type of gas you are using by adjusting the sensitivity factor for the IG If you adjust the sensitivity factor for your ion gauge to compensate the readout of pressure for a gas type other than nitrogen air the displayed pressure readout for that device must be annotated to indicate that the displayed pressure is for the gas type the readout is compensated for In the above example if the N sensitivity of the ion gauge being used is 10 torr 10 per torr the sensitivity factor programmed during setup of the B RAX and IGM400 or CCM500 could be set for 12 9 13 so that the pressure readout would directly indicate the true pressure of argon Again the display line for that particular device pressure readout would require annotation a user applied label so as to not conflict with the gas type selection notation of nitrogen N InstruTech Inc Page 62 Instruction Manual B RAX 3200 7 2 Effects of different gases on convection gauge display Convection gauge operation is based on the physical effect of thermal conductivity of the gas inside the gauge transducer The convection gauge senses heat loss in a sensor wire This heat loss depends on the thermal conductivity of the gas surrounding the sensor wire Since different gases and mixtures have different thermal conductivi
84. g 401TZCG1_O lt CR gt e g amp 01TZCG2 1 23E 02 CR where n 1 or 2 for CG1 or CG2 y yy mantissa z sign of the exponent and pp the exponent xxTSCGn_y yyEzpp lt CR gt e g 01TSCG1_ 7 60E 02 lt CR gt where n 1 or 2 for CG1 or CG2 y yy mantissa z sign of the exponent and pp the exponent xx PROGM OK CR xx 0 1MA EM CR xx 4 0MA EM CR When Hornet device is not connected 01 INVALID CR xx 00 ST OK IG status is OK xx 01 OVPRS overpressure system pressure is too high xx 02 EMISS le control fail xx 04 FLVLO low filament voltage condition xx 08 FLOPN selected filament is open circuit xx 10 DEGAS IG is in DEGAS mode of operation xx 20 ICLOW IG collector current is below normal range xx 40 FLIHI filament drive current is too high xx mmmmm vv e g 01 01306 11 CR xx PROGM OK CR When P 100 mTorr 01 INVALID CR When device is not connected 01 INVALID CR When requested gauge number 1 or 52 01 SYNTX ER CR xx PROGM OK CR When P 400 Torr 01 INVALID CR When requested P 400Torr 01 INVALID CR When requested P 1000mT 01 INVALID CR When device is not connected 01 INVALID CR When requested gauge number 1 or 52 01 SYNTX ER CR Page 77 Instruction Manual 8 4 RS232 GP 307 and 358 Protocol B RAX 3200 RS232 protocol compatible with
85. g emission turning the IG filament to ON when using an alternate gauge like a capacitance diaphragm gauge as a source of control for turning the ion gauge on and off Failure to follow the recommended procedures for ensuring that you do not inadvertently allow the ion gauge transducer filament to turn on may result in equipment damage To minimize the risk associated with this using an alternate gauge to control the ion gauge transducer filament follow these recommended steps below precisely InstruTech Inc Page 38 Instruction Manual B RAX 3200 1 Before selecting ALTERNATE GAUGE in the SETUP UNIT menu the user should turn off power to the B RAX 2 Connect the alternate gauge to the B RAX 3 Apply power to the alternate gauge 4 Next apply power to the B RAX 5 Select ALTERNATE GAUGE in the SETUP UNIT menu It is always good industry practice to avoid hot swapping of Cables 5 5 3 ION GAUGE when used with CCM500 If you are familiar with operating the B RAX with the IGM400 connected as described in Section 5 5 2 above you will find the operation and setup when connecting the B RAX to the CCM500 is very similar with a few exceptions Press the ENTER Key to access the ION GAUGE menu for configuring the CCM500 ionization gauge module HV TIMEOUT Factory default 10 minutes Enter this menu choice to program the maximum wait period after the cold cathode sensor on command is invoked and the CCM500 s
86. gauge filament in use is constructed of tungsten material a coated filament such as the yttria coated iridium version is okay The response time of other gauges may not allow for timely turn off of the tungsten filament leading to possible filament damage Always turn the IG filament OFF manually before pressure is allowed to rise above 1 00E 03 Torr When CG1 CG2 or ALT GAUGE is selected in the IG CONTROL menu and the ion gauge emission current is set to 100 pA the ion gauge filament will turn on when the pressure measured by CG1 CG2 or Alternate Gauge drops below the value programmed in the G TRIP PRES above The ion gauge filament will turn off when the pressure measured by CG1 CG2 or Alternate Gauge rises above the value programmed for the G TRIP PRES If the ion gauge emission current is set to 4 mA the ion gauge filament will turn on when the pressure measured by CG1 CG2 or Alternate Gauge drops below 1 00E 03 Torr The ion gauge filament will turn off when the pressure measured by CG1 CG2 or Alternate Gauge rises above 1 00E 03 Torr Note When CG1 CG2 or ALT GAUGE is selected in the IG CONTROL menu the user cannot turn on or turn off the IG filament manually using the IG ON OFF soft keys of the front panel RS232 RS485 or DIGITAL I O signals In this case the IG filament turn on or turn off is automatically controlled by CG1 CG2 or the Alternate Gauge A CAUTION You must be aware of possible risks of inadvertently startin
87. he case this analog output type provides a 0 10 Vdc analog output signal that has a direct linear relationship to the displayed pressure measured by the alternate gauge This selection covers 3 decades of pressure change Essentially this allows retransmission of the same analog input signal being received by the B RAX For example if ALT GAUGE selected is 1000 TORR CDG the maximum pressure should also be programmed as 1 00E03 Torr value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below then the instrument provides a 10 volt analog output signal when pressure is at 1 00E03 Torr and the minimum pressure is automatically set to 1 00 Torr with a corresponding minimum voltage output of 0 01 volts InstruTech Inc Page 44 Instruction Manual B RAX 3200 Select ALT CG 1 8V only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with an InstruTech CVM201 or CVM211 convection vacuum gauge module as an alternate gauge to CG2 Essentially this allows retransmission of the same analog input signal being received from the CVM201 or CVM211 This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 1 to 8 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 10579 where P is the press
88. he log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr P 10 vols 7 12379 where P is the pressure in Torr and V is the output signal in volts Refer to section 6 5 for details regarding this type of output signal This selection is also compatible with the InstruTech CCM501 cold cathode vacuum gauge module Select 1G LINEAR as the analog output type to provide a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only This selection covers 3 decades of pressure change For example if the maximum pressure selected is 1 00E 03 Torr value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below then the instrument provides a 10 volt analog output signal when pressure is at 1 00E 03 Torr and the minimum pressure is automatically set to 1 00E 06 Torr with a corresponding minimum voltage output of 0 01 volts If your application requires the IG analog output voltage to cover a pressure range exceeding three decades then consider using the log linear analog outputs Refer to section 6 6 for details regarding this type of output signal This selection is also compatible with a certain analog output scaling from the Granville Phillips 307 controller Select ALT LINEAR only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with a CDG device as an alternate gauge to CG2 If such is t
89. ical stress to components in the ionization gauge Shield the ionization gauge near ion or electron sources such as an electron beam or in a sputtering system For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber When using KF flanges metal clamps must be used to ensure proper grounding Do not attempt to modify your flange in order to use non metallic type flange clamps Fittings Flanges follow the fitting flange manufacturer s recommendations for installation and use Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1 00 x 10 Torr 1 33 x 107 mbar 1 33 x 10 Pa InstruTech Inc Page 17 Instruction Manual B RAX 3200 3 1 4 Mechanical Installation Convection Gauge iere For more detailed information about the CVG101 Worker Bee convection gauge please refer to the User Manual for this product Mount the CVG101 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the CVG101 too close to a gas source inlet may also cause measurement and control instability Do not mount the CVG101 near a source of heating or cooling such as heaters or air conditioning vents Mount the CVG101 with its main axis horizontal see diagram below Pressure reading er
90. installation B RAX Vacuum Gauge Controller Installation 3 1 1 Panel Mount To install the B RAX in a rack or instrument control panel follow the steps outlined below 1 Make a cutout in your rack panel or instrument control panel as shown in the drawing below Be sure to allow clearance behind the panel for the instrument as well as connectors and cables at the back of the instrument Optional EIA standard 19 inch 2U height rack mount panels are available from InstruTech Inc The optional rack mount panels are provided with panel cutouts and mounting holes to allow efficient mounting of your B RAX unit Panel Cutout 2 99 2 007 76 mm 51 mm Rm n mitti i ss imn ji n d nri inim tnnt t ut 0 210 5 33 mm 6 5 165 mm 1 DIA X 4 InstruTech Inc Page 15 Instruction Manual B RAX 3200 2 Drill four guide holes on each side of the panel cut out two on each side with dimensions as shown in the panel cut out drawing above 3 Slide the B RAX into the panel hole cut out Guide the four studs on the back of the B RAX front panel face plate thru the four holes next to the panel cut out 4 Use four 10 32 Hex Nut provided with instrument to tighten the B RAX to the panel 3 1 2 Rack Mount Optional EIA standard 19 inch wide 2U height rack mount panels available from InstruTech 210x4 Single cut out panel InstruTech p n 000849 All dimensions in inches
91. instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech This device meets FCC part 15 requirements for an unintentional radiator class A 2 1 Safety Precautions General Hazardous voltages are present with this product during normal operation The product should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided AN WARNING There are no operator serviceable parts or adjustments inside the product enclosure refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made AN WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts a
92. ity The base or ultimate pressure of your vacuum system may be a good pressure level to periodically check and record the readings displayed in the RESEARCH Screen 9 9 Maintenance In general maintenance is not required for your InstruTech ion gauge module convection gauge and control unit Periodic performance checks may be done by comparing the gauge to a known reference standard When using the transducer in gases containing contaminants or materials that react with the filaments of the hot cathode ion gauge periodic degas and switching to the alternate filament from time to time is recommended for longest useable transducer lifetime When the hot cathode filament of the ionization gauge transducer is at or near end of life transducer sensor replacement is recommended InstruTech Inc Page 89 Instruction Manual B RAX 3200 10 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support 2instrutechinc com For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to
93. izes performance of the gauge when operating at a low pressure range of 1 00 x 10 Torr to 1 00 x 10 Torr If your minimum operating pressure is higher than 1 00 x 10 Torr it is not normally necessary to set zero and thus setting atmosphere should be adequate If you are able to evacuate your system to below 1 00 x 10 Torr it is always a good practice to check and set zero if necessary See SET VAC CG1 or SET VAC CG2 in CONVEC GAUGE section 5 5 4 InstruTech Inc Page 28 Instruction Manual B RAX 3200 Setting Atmosphere SET ATM Setting atmosphere is the most important step for a newly installed gauge If you prefer to use air to set atmosphere vent your vacuum system chamber to expose the gauge to the local atmospheric pressure air and set atmosphere to match your known local uncorrected barometric pressure air This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber At sea level this pressure is usually near 760 Torr At elevations above sea level the pressure decreases Check your local aviation authority or airport web sites or your current local weather conditions online to help find your local uncorrected barometric pressure if you do not have this information See SET ATM CG1 or SET ATM CG2 CONVEC GAUGE section 5 5 4 Note Setting zero and atmosphere is normally required only once during the initial setu
94. lament is turned on and operating e Ensure that the vacuum pressure is at or less than 5 00 x 10 Torr before attempting to initiate degas e Filament drive power during degas is about 3 watts higher than during normal pressure measurement e Degas will automatically turn off after 2 minutes when using factory default settings Degas can be programmed for duration of 2 to 10 minutes e The IGM400 will continue to measure approximate pressure while degas is in progress e Degas will automatically turn off if the pressure exceeds 3 00 x 10 Torr during the degas cycle e Degas can be interrupted by turning the IGM400 filament off InstruTech Inc Page 26 Instruction Manual B RAX 3200 4 3 IGFilament Material Selection IGM400 Venting the Chamber The choice of which filament to use in the IGMAOO is primarily dependent upon the process and process gases the ion gauge will be used with For general vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as N argon etc Optional dual tungsten filaments are available for use with gases that are not compatible with yttria coated iridium filaments 1 Yttria coated iridium filament In most general vacuum applications the yttria coated iridium filament is the best choice Yttria coated iridium filaments typically operate at a lower temperature than tungsten filaments and thus have a lower outgassing rate at UHV and lower chemical reactivity wi
95. le and formulas above for pressure measurements in Torr Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 8 0 Output Signal Volts dc 0 0 1 0E 10 1 0E O9 1 0E O8 1 0E O7 1 0E O6 1 0E O5 1 0E O4 1 0E O3 1 0E O2 1 0E O1 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr InstruTech Inc Page 51 Instruction Manual B RAX 3200 6 2 Analog Output for IG LOG N 10 Nitrogen Air only When the analog output is setup as described in section 5 5 6 for IG LOG N 10 the analog output voltage represents the pressured measured by the IG for nitrogen air only Refer to section 7 3 1 if you are using a gas other than nitrogen air Analog output IG Log linear 0 to 9 Vdc 1 V per decade Log Linear Analog Output N air only Pressure Torr Voltage Vol A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and 1 00E 10 0 0 eier 1 00E 09 1 0 p 10 57 vzlog qP 10 SEH Where P is the pressure in Torr or mbar and V is the output 1 00E 08 2 0 signal in volts 1 00E 07 30 1 00E 06 4 0 B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals 1 00E 05 5 0 p 10 579 V logio P 8 1 00E 04 6 0 Where
96. ly to your PC serial port a converter may be necessary DE 9 Connectors for connections to user supplied cables for serial communication port DE9P RS485 DE9S RS232 RS232 Connector 9 contact DE 9S D subminiature RS232 Connections DE 9S D subminiature Connector Socket Number Description 1 No connection Transmitted Data OUT Received Data IN No connection Signal Ground No connection No connection on DU P UN No connection 9 No connection Connect either RS232 or RS485 cable to B RAX 3200 DO NOT CONNECT BOTH AT THE SAME TIME InstruTech Inc Page 24 Instruction Manual B RAX 3200 RS485 Connector 9 pin DE 9P D subminiature RS485 Connections DE 9P D subminiature Connector Pin Number 1 oon nu P WN Connect either RS232 or RS485 cable to B RAX 3200 DO NOT CONNEC InstruTech Inc Description DATA A DATA B No connection No connection No connection Signal Ground No connection No connection No connection THE SAME TIME Page 25 Instruction Manual B RAX 3200 4 Operation IG and CG 4 1 IG Emission Current IGM400 only 4 mA and 100 UA 0 1 mA are available settings of emission current for the hot cathode ion gauge used in the IGM400 The concept of using a carefully controlled emission current for creating ions within the vacuum region of the transducer does not apply to the CCM500 cold cathode ion gauge technology 1 In clean applications and
97. m all other programming values according to their requirements INFO Factory default FIRMWARE VERSION Provides the model number of B RAX the firmware version numbers for both the B RAX controller and the IG connected to it SET CG2 ALT Factory default CG2 This allows the user to assign the type of gauge to the CG2 ALT display The user can either assign a second convection gauge CG2 same type as CG1 using InstruTech s CVG101 convection gauge sensor or analog input using a 0 10 Vdc analog input signal from an alternate gauge The ANALOG INPUT selection allows processing of one analog input voltage signal from other gauges such as a capacitance diaphragm gauge CDG or InstruTech vacuum gauge modules CVM201 CVM211 IGM401 or CCM501 ALT GAUGE Factory default 10 TORR CDG Ignore this menu if you have selected CG2 in the SET CG2 ALT menu above If you have selected ANALOG INPUT in the SET CG2 ALT menu above the ALT GAUGE menu selection is used to assign the type of alternate gauge e Select 100 mTORR CDG for a 100 mTorr Capacitance Manometer Diaphragm Gauge CDG with 0 10 Vdc analog output e Select 1 TORR CDG for a 1 Torr CDG with 0 10 Vdc analog output e Select 10 TORR CDG for a 10 Torr CDG with 0 10 Vdc analog output InstruTech Inc Page 34 Instruction Manual B RAX 3200 e Select 100 TORR CDG for a 100 Torr CDG with 0 10 Vdc analog output e Select 1000 TORR CDG for a 1000 Torr CDG with 0 10 Vdc anal
98. mission current selected is 4 mA A CAUTION Due to the risk of filament failure caused by inadvertent exposure to oxidizing gases or gas mixtures never use another gauge to automatically turn off the ion gauge when the ion gauge filament in use is constructed of tungsten yttria coated iridium filament is okay The response time of other gauges may not allow for timely turn off of the filament leading to filament damage especially for tungsten filaments Always turn the tungsten IG filament OFF manually before pressure is allowed to rise above 1 00E 03 Torr EMISS SELECT Factory default IE 100UA Use the Up and Down key to select emission current to 4 mA 100 pA or AUTO IE Then press ENTER to save setting See section 4 1 for more details about the emission current selection AUTO IE TRIP Factory default DISABLED The default setting is DISABLED if EMISS SELECT menu above is set to 4 mA or 100 uA If the EMISS SELECT menu is set to AUTO IE then the AUTO IE TRIP value allows the user to select the pressure at which automatic switching of the emission current takes place The user has the choice of programming the AUTO IE TRIP value anywhere between 1 00E 06 to 1 00E 04 Torr For example if the AUTO IE TRIP value is set to 1 00E 05 Torr then the ion gauge will operate at the emission current of 100 WA over a pressure range of 5 00E 02 to 1 00E 05 Torr The emission current will then automatically switch to 4 mA for the lower pressure
99. nal For example if the analog input signal from CDG is at 7 600 volts representing 760 Torr for a 1000 TORR CDG then adjust the ALT GAUGE CAL so that the B RAX also displays 760 Torr For other CDG ranges always use CDG s full scale pressure value to perform calibration For example if you are using a 100 TORR CDG evacuate your system pressure to 100 Torr and use the same calibration procedure described above Example To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI LOG CG ITI LOG IG or ITI NON LINE When using other InstruTech vacuum gauge modules such as CVM201 CVM211 IGM401 or CCM501 as alternate gauges to CG2 the analog output signals from these devices can be used to display pressure in the CG2 ALT display channel Connect the analog output from these devices to the and terminals of the B RAX Analog Input Connector labeled Al In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the B RAX to match the pressure reading on the display of these devices Note As you adjust the analog output the number being displayed in the ALT GAUGE CAL screen represents the millivolts offset from zero volts that is being used internally for the analog input gain adjustment InstruTech Inc Page 35 Instruction Manual B RAX 3200 O STATUS Factory default ZDEGAS STATUS A degas status or an error condition output signal is available from the DIGITAL I O connector If selected for DEGAS STAT
100. nality of the two into a single control unit The new B RAX 3200 has the same height and width but only about half the depth of the older series and it fits in the same rack panel cut out Additionally it incorporates numerous hardware and software features not previously available with the B RAX 3000 3100 The following provides a comparison reference Features New B RAX 3200 Older series B RAX 3000 3100 Number of gauge display channels Set up amp programming screen Number of analog outputs Number of setpoint relays Serial communications Remote input output Digital 1 0 Quick IG on off and degas on functions Physical dimensions same rack panel cut out for both Input power 3 LED Easy to read OLED 3 RS232 RS485 yes IG on off amp degas keys on front panel 7 2in w X 2 97 in h X 4 2 in d 20 28 Vdc optional 24 Vdc power supply available from InstruTech 3 LED LCD none no programming menu access 7 2 in w X 2 97 in hX 8 2 in d 100 240 Vac Whether you choose the IGM400 or the CCM500 you will enjoy the benefits of InstruTech s novel design approach for this multiple transducer vacuum pressure measurement system Departing from the traditional vacuum gauge controller approach of the past the B RAX 3200 provides a compact low power cost effective solution for controlling the operation of one ionization gauge IG module and two convection enhanced pirani transducers often refe
101. nd pp the exponent e g 1 53bE 02 CR When device is not connected 9 90E 09 When CG is over ranged 9 90E 09 X X X X X X lt CR gt e g 1 1 0 0 0 0 lt CR gt Relays 1 and 2 are energized Relays 3 6 are not energized x lt CR gt e g C lt CR gt where C is the Unicode character C expressed as 01000011 in binary notation or 43 hexadecimal x lt CR gt e g 1 lt CR gt where 1 indicates PC 1 is energized O when not OK lt CR gt e g OK lt CR gt When IG already ON INVALID When Hornet device is not connected INVALID OK lt CR gt e g OK lt CR gt When IG already OFF INVALID When Hornet device is not connected INVALID Page 80 Instruction Manual B RAX 3200 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES IG DEGAS ON Turn IG Degas ON xxDG_ON lt CR gt lt LF gt OK lt CR gt e g 01DG_ON lt CR e g OK lt CR gt When Degas already ON INVALID When Hornet device is not connected INVALID When IG is OFF INVALID IG DEGAS OFF Turn IG Degas OFF HxxDG OFF CR OK lt CR gt e g 01DG_OFF lt CR gt e g OK lt CR gt When Degas already OFF INVALID When Hornet device is not connected INVALID IG Degas Status Detect Degas on off xxDGS lt CR gt 1 lt CR gt status e g 01DGS lt CR gt e g 1 CR or 0 when off When Hornet device is not connected INVALID 1 lt CR gt is a carriage return OxOD 2 The usedin certain defin
102. nensnensensrensnen 89 9 9 Maintenance A CEDE DID DOLO Let 89 10 Factory Service arnid Support nc op teet Donner ie iidem e dba 90 TE Warranty EP EE 90 InstruTech Inc Page 5 Instruction Manual B RAX 3200 1 Introduction General Information 1 1 Description The B RAX 3200 is a vacuum pressure measurement system which is comprised of the following e The B RAX 3200 Vacuum Gauge Controller e Either the IGM400 hot cathode or the CCM500 cold cathode ionization gauge module e One or two InstruTech Worker Bee CVG101 convection enhanced pirani transducers e Cables to interconnect the B RAX 3200 and point of use devices Typical components of the complete vacuum measurement system are shown in the figure below The B RAX 3200 provides power and operating control for either the IGM400 or the CCM500 ion gauge module Additionally it provides power and operating control for two convection gauges IGM400 or CCM500 lonization Gauge Module CVG101 Convection Gauges B RAX 3200 Vacuum Gauge Controller CG1 amp CG2 Typical Components of the complete Vacuum Pressure Measurement System 1 The B RAX 3200 will also operate the Granville Phillips Convectron convection enhanced pirani vacuum gauge transducer InstruTech Inc Page 6 Instruction Manual B RAX 3200 B RAX 3200 is InstruTech s new generation of the B RAX vacuum gauge controllers It is similar to its predecessors B RAX 3000 3100 but it combines the functio
103. ng information and the command protocol summaries listed in the following sub sections of this chapter can be used to establish serial communications with the device Four distinct protocols COM type are defined InstruTech RS232 and RS485 protocol as well as the RS232 and RS485 protocols compatible with GP Series 307 and 358 controllers The user has access from the front panel main menu to change settings for COM Type Baud Rate Data Bits Parity Stop Bits and device Address when using RS485 Baud Rate is selectable at 300 600 1200 2400 4800 9600 19200 or 38400 baud Data bits may be set to either 7 or 8 Parity selection may be set to None Even or Odd Either 1 or 2 Stop Bits may be selected The device address when using RS485 can be within the range 00 to FF hexadecimal Default 01 There is a finite period of time between the time a command is sent from a terminal PC COM Port for example and the point in time in which the B RAX 3200 starts to send a response to that command This delay is dependent upon the command sent and the baud rate RECEIVE TO TRANSMIT TIME COMMAND RESPONSE REPETITION RATE The maximum command repetition rate will depend on the length of the command sent and the response received as well as the baud rate The maximum repetition rate for the baud rate you are using can be found in the following table Selected Baud Rate Repetition Rate Receive to Transmit Time 38400 38 ms 26 us 19200 46
104. nk for the gas type you are using so that an operator using the vacuum chamber system and connected gauge will not exceed a safe operating pressure AN CAUTION Do not assume this data applies to other convection gauges which may or may not be the same AN CAUTION Risk of over pressurizing a gas containment vessel and attached apparatus exists when using pressure measurement devices that are calibrated for a specific gas type Use a pressure relief device to safely limit the internal pressure of a containment vessel to less than the maximum allowable working pressure rating for the vacuum pressure system and all devices attached to the system InstruTech Inc Page 64 Instruction Manual B RAX 3200 LN WARNING Using a thermal conductivity gauge with gases other than that for which it is calibrated could result in death or serious injury Be sure to use gas correction data in this manual when measuring pressures of gases other than N air Exercise caution when admitting positive pressures above local ambient atmospheric pressure of gas into any enclosed volume Install pressure relief devices on your vacuum pressure vessel or chamber to limit the maximum allowable working pressure inside the devices and vessel internal volume to less than the lowest rated device in some cases the maximum allowable working pressure may be dictated by the type of connections or fittings used to attach devices to your chamber An O ring compression fit
105. nput from one of the following InstruTech modules CVM201 CVM211 IGM401 CCM501 serial communications RS485 RS232 ASCII protocol command protocol compatibility with GP 358 and GP 307 controller is also provided status output IG sensor on off status message is displayed on the front panel by serial communications and by SPDT relay DIGITAL I O Connector rated at 1 A at 30 Vdc resistive or 1 A at 30 Vac non inductive IG degas on off status or IG error conditions are displayed on the front panel by serial communications and by an open collector transistor output ground emitter rated at 40 V max VCE 50 mA IC max IGM400 filament switching user selectable between filament 1 or 2 using the front panel soft keys IGM400 emission current 100 A 4 mA or automatic switching auto ranging between 100 uA and 4 mA IGM400 degas 3 W electron bombardment InstruTech Inc Page 8 Instruction Manual B RAX 3200 IGMAOO overpressure protection turns off ion gauge at a factory default setting of 5 x 10 Torr CCM500 overpressure protection turns off ion gauge at a factory default setting of 1 x 10 Torr temperature operating O to 40 C storage 40 to 70 C humidity 0 to 9596 relative humidity non condensing altitude operating 8 200 ft 2 500 m max storage 41 000 ft 12 500 m max weight 1 7 Ib 0 7 kg housing aluminum extrusion black powder paint finish in
106. nsitivity Correction Factor to obtain the true pressure of the specific gas in your vacuum chamber Notes The output voltage will switch to above 11 Vdc under the following conditions 1 The IG sensor is turned off or any IG fault condition 2 The pressure exceeds 1 00E 06 Torr at 4 mA emission current or 5 00 x 10 Torr at 100 HA emission current for IGM400 3 The pressure exceeds 1 00E 02 Torr for CCM500 InstruTech Inc Page 56 Instruction Manual 6 7 Analog Output for CG1 or CG2 1 8 V Nitrogen Air only B RAX 3200 When the analog output is setup as described in section 5 5 6 for CG1 1 8V or CG2 1 8 V the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen air only Refer to section 7 3 3 1 if you are using a gas other than nitrogen air Analog output Convection Gauge Log linear 1 to 8 Vdc 1 V per decade A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar P 1005 5 V logio P 5 Where P is the pressure in Torr or mbar and V is the output signal in volts The output voltage is 1 V when pressure is at 1 00E 04 Torr The output voltage is 8 V when pressure is at 1 00E 03 Torr B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals p 10 3 V logio P 3 Where P is the pressure in pascals and V is the output signal in volts
107. o either make manual corrections to the pressure readout or compensate the reading The sensitivity adjustment function of the CCM500 you are using to measure the pressure of a gas other than nitrogen air may be set to compensate the reading Compensating the pressure reading using the sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment range User assumes all risks if sensitivity is set to a value different than the factory default setting of 10 InstruTech Inc Page 39 Instruction Manual B RAX 3200 OVER PRESSURE Factory default 1 00E 02 This function allows the user to set the pressure at which the gauge will turn off when the vacuum vessel pressure rises above this setting The overpressure shut down values are adjustable set this value to a pressure level that is acceptable for your application Operating any ion gauge at too high a pressure in the presence of certain gases and gas mixtures may result in significant sputtering action of the internal electrodes of the transducer sensor leading to changes in performance of the device IG TRIP PRES Factory default 1 00E 03 This setting allows the user to select a pressure value at which the CG1 CG2 or ALT GAUGE can turn the cold cathode sensor on The G TRIP PRESSURE value for the CCM500 can never be set higher than 1 00E 02 Torr IG CONTROL Factory default
108. odily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system set up before using any signals to automate your process Perform a hazardous operation analysis of your system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage 2 4 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The vacuum gauge transducers used with this product are not intended for use at pressures above 20 psia 1000 torr DO NOT exceed 35 psig lt 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to pr
109. of 0 01 volts If your application requires the IG CG1 or CG2 analog output voltage to cover a pressure range exceeding three decades then consider using the log linear analog outputs Refer to section 6 6 and section 6 10 for details regarding this type of output signal InstruTech Inc Page 47 Instruction Manual B RAX 3200 AOUT LIN 2 Factory default 1 00E 00 TORR Same info as AOUT LIN 1 above except for AOUT LIN 2 AOUT LIN 3 Factory default 1 00E 00 TORR Same info as AOUT LIN 1 above except for AOUT LIN 3 5 5 7 SERIAL COMM The B RAX provides both RS232 and RS485 serial communications Press the ENTER key to access the SERIAL COMM menu for configuring the serial communications COMM TYPE Factory default RS485 The B RAX 3200 supports four different protocols listed below See section 8 for details RS485 RS485 with start and stop characters and address derived from InstruTech IGM401 RS232 RS232 with start and stop characters like RS485 above but no address GP485 RS485 compatible with Granville Phillips 307 and 358 controllers GP232 RS232 compatible with Granville Phillips 307 and 358 controllers BAUDRATE Factory default 219 200 This sets the baud rate for the RS485 and the RS232 serial communications The baud rate can be set to various values listed below 38400 BAUD 19200 BAUD 9600 BAUD 4800 BAUD 2400 BAUD 1200 BAUD 600 BAUD 300 BAUD FRAMING Factory default 8 B
110. og output e Select ITI LOG CG if you are using InstruTech s convection gauge modules such as the CVM211 Stinger or CVM201 Super Bee with a Log linear analog output e Select T LOG IG if you are using InstruTech s ionization gauge module such as the IGM401 or CCM501 Hornet with a Log linear analog output e Select ITI NON LINEA if you are using InstruTech s convection gauge modules such as the CVM211 Stinger or CVM201 Super Bee with a non linear analog output ALT GAUGE CAL Factory default Factory Set Number Ignore this menu if you have selected CG2 in the SET CG2 ALT menu above If you have selected ANALOG INPUT in the SET CG2 ALT menu above the ALT GAUGE CAL menu selection is used to optimize the analog input calibration It is recommended that the user not make this adjustment unless the displayed alternate gauge pressure CG2 ALT display channel do not closely match the expected pressure from the analog input calculations Example To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a 1000 TORR CDG Connect both the CDG and a high resolution voltmeter to the and terminals of the B RAX Analog Input Connector labeled Al With CDG exposed to atmosphere measure the analog input from the CDG at the B RAX Analog Input Connector and calculate the corresponding pressure In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the B RAX to match the calculated pressure from the CDG analog sig
111. orr and If you want to set zero at 0 00E 0 then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again The zero point displayed pressure reading with gauge exposed to vacuum is now set If you want to set the zero pressure reading to a number higher than 0 00E 0 then press the UP or DOWN keys at each of the high lighted numeral locations until the desired number is reached then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again The new zero point is now set Due to the nature of circuit operation and transducer electrical control that cover a wide range of measurement by a convection gauge it is advised that one first check and adjust if necessary the span and zero to ensure that all measurements made between these two adjusted settings are as accurate as possible SET ATM CG1 Factory default 7 60E 02 TORR Press the ENTER key to access the SET ATM CG1 screen Backfill the vacuum vessel chamber with nitrogen gas to a known pressure between 400 Torr and 1000 Torr Alternatively if your local uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure When desired system pressure is stable adjust the pressure on the screen to the known value using the UP or DOWN keys Press the ENTER key to move to the next digit and use the UP or DOWN keys to decrease or increase the value of that digit
112. orth American 115 Vac plug included PS301 UA Power Input 100 240 Vac 50 60 Hz No AC power cord included PS301 UX Power Output 24 Vdc 2 5 A 60 W Note The conventional IEC60320 AC receptacle allows use with Connector 2 pin pluggable terminal block any user supplied AC mains power cord set available worldwide Optional Rack Mount Adapter Aluminum black powder paint finish Rack Mount adapter panel for installation of one B RAX as a left mount or right mount in a 2U 19 inch wide rack 000849 Rack Mount adapter panel for installation of two B RAX side by side in a 2U 19 inch wide rack 001007 IGM400 or CCM500 ionization gauge See IGM400 or CCM500 Hornet ionization gauge data sheet CVG101 convection gauge See CVG101 Worker Bee convection gauge data sheet InstruTech Inc Page 10 Instruction Manual B RAX 3200 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this
113. otect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure InstruTech Inc Page 13 Instruction Manual B RAX 3200 A CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gases other than Nitrogen air A WARNING Do not attempt to use with gases other than nitrogen N2 or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless you have applied correction factors to both the di
114. owing look up table and information to convert the analog output to pressure The look up table has been derived from the equation provided in section 6 9 True Pressure Torr N Ar He O0 CO KR Freon12 Freon22 D Ne CH 0 0 3751 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 1 00E 4 0 3759 0 3757 0 3755 0 376 0 376 0 3755 0 376 0 376 0 376 0 3757 0 3766 2 00E 4 0 3768 0 376 0 3765 0 377 0 377 0 3768 0 378 0 378 0 377 0 3763 0 378 5 00E 4 0 3795 0 378 0 379 0 38 0 381 0 3772 0 382 0 381 0 381 0 3782 0 3825 1 00E 3 0 384 0 381 0 382 0 384 0 385 0 379 0 388 0 388 0 386 0 381 0 3896 2 00E 3 0 3927 0 387 0 389 0 392 0 395 0 384 0 401 0 4 0 396 0 388 0 403 5 00E 3 0 4174 0 403 0 409 0 417 0 412 0 395 0 437 0 432 0 425 0 405 0 438 1 00E 2 0 4555 0 429 0 441 0 453 0 462 0 415 0 488 0 48 0 47 0 433 0 492 2 00E 2 0 5226 0 477 0 497 0 521 0 536 0 451 0 581 0 566 0 549 0 484 0 584 5 00E 2 0 6819 0 595 0 637 0 679 0 705 0 544 0 778 0 764 0 727 0 608 0 796 1 00E 1 0 878 0 745 0 814 0 868 0 9 0 668 1 009 0 99 0 944 0 768 1 053 2 00E 1 1 1552 0 962 1 068 1 141 1 179 0 847 1 315 1 291 1 265 1 002 1 392 5 00E 1 1 6833 1 386 1 589 1 664 1 668 1 194 1 826 1 805 1 914 1 469 2 014 1 00E 0 2 2168 1 818 2 164 2 195 2 172 1 536 2 257 2 247 2 603 1 976 2 63
115. p and maybe checked by the user periodically After power has been applied to the gauge during the initial setup allow five minutes for the gauge to stabilize warm up before setting zero and atmosphere The information presented in sections 4 1 through 4 5 above is intended as an introduction to the programming capabilities of the B RAX 3200 for use in controlling the selectable parameters and functions of the IGM400 and CCM500 devices Refer to the User Manuals for the IGM400 CCM500 ion gauge module s and CVG101 convection gauge sensors for complete operation and setup instructions of these connected devices InstruTech Inc Page 29 Instruction Manual B RAX 3200 5 Setup and programming 5 1 Applying Power Before you turn on power to the B RAX for the first time ensure the cables from the B RAX to the IGM4OO or CCM500 and CVG101 convection gauges are connected and secured Turn on power by pressing the Power key 5 2 Front Panel Display Display Pressure Measurement The B RAX provides three independent front panel LED displays 1 IG display represents pressure measurements from the IGM4OO or CCM500 ion gauge module 2 CG1 display represents pressure measurements from the first convection gauge 3 CG2 ALT display represents pressure measurements from the second convection or an alternate gauge Display Units of Measure A yellow LED is illuminated next to the selected engineering unit indicating measurements in Torr mbar or
116. patible with the CG1 1 8 V selection in the older B RAX series 3100 Select CG2 1 8V for CG2 Same as CG1 1 8V above except for CG2 Select CG1 0 7V as the analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1 This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 0 to 7 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P LO where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 8 for details regarding this type of output signal This selection is compatible with the CG1 O 7 V selection in the older B RAX series 3100 as well as certain analog output scaling from the Granville Phillips 307 350 and 358 controllers Select CG2 0 7V for CG2 Same as CG1 0 7V above except for CG2 Select CG1 NON LIN as the analog output type to set the analog output non linear voltage proportional to the pressure measured by convection gauge CG1 This produces a non linear analog output signal of 0 375 to 5 659 Vdc for 0 to 1000 Torr of N roughly in the shape of an S curve Refer to section 6 9 for details regarding this type of output signal Note This non linear analog output is also equivalen
117. pect to ground potential and the collector wire at zero volts i e ground potential In simple terms the ions collected by the collector electrode a small diameter wire within the grid electrode structure are measured with an electrometer circuit connected to the collector The amount of ion current measured is directly proportional to the density of the gas within the ion gauge transducer This ion current is commonly referred to as the Collector Current From the collector current measured which is directly proportional to the gas density inside the ion gauge transducer enclosure the pressure inside the ion gauge transducer can be calculated The Research display screen is a very useful diagnostic tool to troubleshoot issues with the sensor or the electronics This mode displays the emission current ion current filament voltage and filament current In the following emission current is 4 00E 3 amperes lon current is 4 00E 11 amperes filament voltage is 1 5 Vdc and filament current is 1 9 amperes lon current value A RESEARCH Display Mode Emission current value ampere A 4 00E 11 4 00E 03 1 50E 00 1 90E 00 Filament voltage Vdc Filament current A Example Research Display Mode of Critical GM400 Hot Cathode lon Gauge Measurement Parameters InstruTech Inc Page 86 Instruction Manual B RAX 3200 The Pressure lon Current Collector Current and Emission Current are indications
118. put also compatible with GP 307 ALT LINEAR Linear analog output for alternate gauge only ALTCG1 8V X Log linear analog output if alternate gauge connected is an InstruTech CVM201 or CVM211 ALT IG LOGN10 Log linear analog output if alternate gauge connected is an InstruTech IGM401 or CCM501 CG1 1 8V Log linear analog output for CG1 output also compatible with B RAX 3100 CG2 1 8V Log linear analog output for CG2 output also compatible with B RAX 3100 CG1 0 7V Log linear analog output for CG1 output also compatible with B RAX 3100 GP 307 350 358 CG2 0 7V Log linear analog output for CG2 output also compatible with B RAX 3100 GP 307 350 358 CG1 NON LIN Non linear analog output for CG1 CG2 NON LIN Non linear analog output for CG2 CG1 LINEAR Linear analog output for CG1 CG2 LINEAR Linear analog output for CG2 Select 7G CG1 0 5 7V as the analog output type to set the analog output voltage proportional to the pressure measured by the combination of IG plus CG1 This selection combines the analog output from the IG and CG1 as one signal to provide a log linear analog output voltage of 0 5 volts to 7 volts with a scaling factor of 0 5 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 10 S gt 9 5 where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 1 for det
119. put power 20 28 Vdc 36 W protected against power reversal and transient over voltages connectors IG amp CG gauge cable assemblies provided by InstruTech digital O 9 pin D sub male serial communications RS232 9 pin D sub female RS485 9 pin D sub male analog I O setpoint relays power pluggable terminal block mating connectors included CE compliance EMC Directive 2004 108 EC EN 61326 1 EN 55011 Low Voltage Directive 2006 95 EC EN 61010 1 environmental RoHS compliant 1 3 Dimensions Front View 183 mm 7 2 in 78 mm 3 08 in Side View 107 mm 4 2 in 11 mm 0 42 in X 3 75 mm 2 97 in Threaded Male PEM Stud 10 32 X 0 40 in X 4 InstruTech Inc Page 9 Instruction Manual B RAX 3200 1 4 Part Numbers B RAX 3200 Vacuum Gauge Controller B RAX 3200 RS232 RS485 serial communications one analog input from an alternate gauge 3 channel pressure display vacuum gauge controller Includes 6 setpoint relays 3 analog outputs Digital I O Gauge Cable Length IGM400 and CCM500 ionization gauge cable M CVG101 convection gauge cable to mate with the B RAX 3200 Compliance CE RoHS UL US Canada CCC China 10 ft 3 m BXC400 1 10F CB421 1 10F 25 ft 8 m BXC400 1 25F CB421 1 25F 50 ft 15 m BXC400 1 50F CB421 1 50F gt 50 ft Consult factory consult factory Optional 24 Vdc Power Supply for B RAX power cord with N
120. range of 1 00E 05 to 1 00E 09 Torr The user has the choice of programming the AUTO IE TRIP value anywhere between 1 00E 06 to 1 00E 04 Torr InstruTech Inc Page 36 Instruction Manual B RAX 3200 SELECT FIL Factory default FILAMENT 1 Allows the user to select which filament to operate either Filament 1 or Filament 2 It is highly recommended to periodically alternate operating filaments 1 and 2 if the filaments are the coated iridium type An inactive coated filament not operated for an extended period of time can cause failure of that filament to establish and maintain emission current This will become more problematic in applications where the filament coating may become poisoned by process gas byproducts or materials that have outgassed from the process materials DEGAS TIME Factory default 2 MINUTES The length of time in minutes degassing will run after it is initiated The degas cycle can be selected from 2 to 10 minutes in duration SENSITIVITY Factory default 10 All InstruTech ion gauge transducers sensors are marked with their unique specific sensitivity value The user must program the actual transducer sensor sensitivity in this menu The actual sensitivity value of the IGM400 sensor is marked on the sensor mounting plate below the electronic enclosure The sensitivity value is designated with the letter S and it is a number that normally ranges between 8 and 15 lon gauge pressure readings ar
121. re measured by the ion gauge only This selection covers 3 decades of pressure change For example if ANALOG OUT 1 is programmed for IG LINEAR and the maximum pressure for AOUT LIN 1 selected is 1 00E 03 Torr then the instrument provides a 10 volt analog output signal when pressure as measured by IG is at 1 00E 03 Torr Furthermore the minimum pressure is automatically set to 1 00E 06 torr with a corresponding minimum voltage output of 0 01 volts Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure measured by the IG to the analog output voltage The following table is representative of a typical setup where the IG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure mantissa and the analog output signal Linear Analog Output Voltage volts Measured Displayed Pressure torr 0 01 1 00E 06 0 10 1 00E 05 1 00 1 00E 04 10 00 1 00E 03 If your application requires the analog output voltage to cover a pressure range exceeding three decades then consider using a log linear analog output type for the IG NOTE The information discussed above regarding the Linear IG analog output applies only to N air If you are using a gas other than N air refer to section 7 3 1 Apply the Sensitivity Correction Factor by dividing the pressure derived from using the Linear IG output discussed above by the specific Gas Se
122. re required ensure that the parts are specified by InstruTech Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged InstruTech Inc Page 11 Instruction Manual B RAX 3200 Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised 2 2 Safety Precautions Service and operation Ensure the enclosure of the B RAX is connected directly to a good quality earth ground Ensure that the vacuum port on which the vacuum gauge sensors are mounted is electrically grounded Use a power source of 20 28 Vdc 36 W or use InstruTech series PS301 UA or PS301 UX optional power supplies Turn off power to the unit before attempting to service the controller Turn off power to the unit if a ca
123. red Press ENTER to access the TEST RELAYS menu Select a specific relay by pressing the ENTER key so that the relay number is highlighted Press the UP or DOWN key to energize the specific relay Relays will return to the previous state after exiting the TEST RELAYS menu InstruTech Inc Page 42 Instruction Manual B RAX 3200 5 5 6 Analog Output The B RAX provides three analog outputs proportional to the pressure measured by the ionization gauge the selected convection gauge CG1 or CG2 or a continuous combined output signal from the IG and CG1 IG CG1 for full range measurement Press the ENTER key to access the ANALOG OUTPUT menu for configuring the analog outputs ANALOG OUT 1 Factory default IG CG1 This menu provides various scaling and gauge type selections for Analog Output 41 Use the UP and DOWN keys to select the desired analog output configuration from the following available choices IG CG1 0 5 7V Log linear analog output combining G amp CG1 as one signal compatible with B RAX 3100 IGLOG N 10 Log linear analog output for IG only output also compatible with B RAX 3100 GP 307 350 IGLOG N 11 Log linear analog output for IG only output also compatible with GP 307 350 358 IGLOG N 12 Log linear analog output for IG only output also compatible with GP 307 350 IG 1 8 8 7V Log Linear analog output for IG only output compatible with InstruTech CCM501 IG LINEAR Linear analog output for IG only out
124. rors may occur above 1 Torr if the unit is not mounted horizontally Below 1 Torr mounting position has little to no effect For Accurate Measurements Above 1 Torr Mount the Gauge Axis Horizontally as Shown Below t o E 3 8 gt Vacuum chamber Correct Orientation Incorrect Orientation Mount the CVG101 with port down if possible to help minimize the effect of any particles or condensation from collecting in the gauge Do not mount the CVG101 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the CVG101 Flanges Fittings follow the manufacturer s recommendations and note the following NPT fittings When connecting the device using a NPT fitting apply a thread sealant compound or wrap the threaded portion of the tubing with one and a half to two wraps of pipe thread seal tape such as PTFE Teflon tape and hand tighten the gauge into the gauge port Do not use a wrench or other tool which may damage the gauge InstruTech Inc Page 18 Instruction Manual B RAX 3200 3 2 Electrical Installation 3 2 1 Grounding A Be sure the vacuum gauges and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings when not used with metal clamps may not produce a good electrical connection bet
125. rred to as a Convection Gauge or CG The traditional controller designs incorporate the IG power supplies and ion current measurement circuitry inside a separate controller unit requiring connection to the IG transducer via complex cabling systems The B RAX 3200 system utilizing the design concept of integrating the power control and ion current measurement circuitry inside the IGM400 and CCM500 devices connected at the point of vacuum measurement minimizes overall complexity cost and space requirements The B RAX 3200 a controller unit capable of controlling multiple gauge transducers is either rack or instrument panel mountable Optional industry standard 19 inch 2U high rack mount panels are available to mount the B RAX into rack enclosures For important information about the CVG101 Worker Bee convection gauge CCM500 cold cathode ionization gauge and IGM400 Hornet hot cathode ionization gauge products please refer to the User Manual for each of these products Read the User Manuals in their entirety for any device you intend to connect to the B RAX 3200 prior to connecting and using the external devices and cables that the B RAX 3200 is intended to be used with InstruTech Inc Page 7 Instruction Manual 1 2 Specifications measurement range vacuum gauge dependent B RAX 3200 1x10 to 1 000 Torr 1 3 x 10 to 1 333 mbar 1 3 x 107 Pa to 133 kPa 1x10 to 5 x 10 Torr with IGM400 hot cathode IG 1x10 to 1x 1
126. rs are marked RLY1 thru RLY6 Each relay has a contact labeled Normally Open Normally Closed and I common RLY1 thru RLY6 contacts Contact Description Relay Connectors Relay 1 to Relay 6 NORMALY OPEN z Relay 1 to 6 NORMALLY CLOSED Relay 1 to Relay 6 COMMON RLY1 RLY2 RLY3 E NE T A Caution The relay contact rating of 5 A at 30 Vdc 5 A at 250 Vac resistive load applies to units shipped after Nov 1 2015 Serial numbers 15J711C and higher have this new contact rating Older units shipped before Nov 1 2015 with serial numbers 15J710C and lower had a contact rating of 1A at 30 Vdc resistive or 1 A at 30 Vac non inductive Applying a load to older units which draws more than 1 A could cause damage to relays 3 2 7 Analog Output Connection A total of three analog outputs are provided by the B RAX 3200 These output voltage signals are proportional to the displayed pressure for any of the user assigned vacuum gauges Three each 2 contact pluggable terminal strip mating connectors are provided for connection to the analog output contactors The B RAX back panel analog output connectors are marked AO1 AO2 and AO3 Each connector has a contact labeled analog output signal and analog output ground AO1 AO2 AO3 Contact Description Analog Output Connectors contacts Analog Output 1 to 3 Signal FEE Analog Output Ground 1 to 3
127. se pressure Defective electronics Repair or replace electronics Page 84 Instruction Manual 9 6 Troubleshooting CCM500 Error Messages Possible Cause Possible Solution Indication OVERPRESSURE HV FAILURE CURRENT FAIL Pressure exceeds value programmed for OVER PRESSURE in the SETUP IG menu Chamber pressure higher than 1 00 x 10 Torr Chamber pressure higher than 1 00 x 10 Torr Defective Electronics Sensor contamination Defective Electronics B RAX 3200 Decrease chamber pressure below required value Decrease chamber pressure below value programmed for OVER PRESSURE in the SETUP IG menu Decrease pressure below 1 00 x 10 Torr Repair or replace electronics Clean or replace sensor Repair or replace electronics DISCHARGE FAIL Electrical discharge has not been established to activate sensor Defective Electronics Repeat step to activate sensor Increase HV TIMEOUT to allow more time for sensor activation Repair or replace electronics CONNECT IGM CCM500O ion gauge not connected Plug in the CCM500 Faulty cable Replace cable Faulty CCM500 electronics Replace the CCM500 electronics COMM IO FAIL Internal PCB not communicating Contact InstruTech 9 7 Clearing Error Messages CCM500 Once the cause of the IG error has been determined and resolved the IG error must be cleared before the IG anode can be turned on again To clear errors simply press the IG ON OFF key
128. splayed pressure and the analog output to determine the true measured pressure This is particularly critical when using convection gauges to measure pressure of gases other than N Air A WARNING Do not use the IGM400 in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use the IGM4OO to measure the pressure of explosive or combustible gases or gas mixtures The sensor filaments operate at incandescent temperatures and could become an ignition source This could cause an explosion which could result in serious injury or death A WARNING Do not use the CVG101 in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use the CVG101 to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge normally operates at 125 C but if malfunction should occur the wire temperature could exceed the ignition temperature of certain combustible gases and gas mixture This could cause an explosion which could result in serious injury or death InstruTech Inc Page 14 Instruction Manual B RAX 3200 3 Installation 3 1 Mechanical Installation Controller The B RAX is intended for indoor use only The B RAX is offered as a space saving half rack design It may also be used as a bench top device or easily installed in an instrument panel Optional EIA standard rack mount panels are available for either full rack or dual side by side rack mount
129. t 1 00E 03 IG CONTROL Factory default MANUAL MODE CAL FACTORS Factory default 10 CONVEC GAUGE SET VAC CG1 Factory default 0 00E 00 SET ATM CG1 Factory default 7 60E 02 TORR SET VAC CG2 Factory default 0 00E 00 SET ATM CG2 Factory default 7 60E 02 TORR RELAYS ASSIGN REL 1 Factory default ON GAUGE ASSIGN REL 2 Factory default CG1 ASSIGN REL3 Factory default CG2 ASSIGN REL 4 Factory default JON GAUGE ASSIGN REL 5 Factory default CG1 ASSIGN REL 6 Factory default CG2 REL 1 LO TRIP Factory default 1 00E 06 InstruTech Inc Page 32 Instruction Manual B RAX 3200 REL1HI TRIP Factory default 2 00E 06 REL 2 LO TRIP Factory default 1 00E 01 REL2HI TRIP Factory default 2 00E 01 REL3 LO TRIP Factory default 1 00E 01 REL3HI TRIP Factory default 2 00E 01 RELALO TRIP Factory default 1 00E 06 RELAHI TRIP Factory default 2 00E 06 REL5 LO TRIP Factory default 1 00E 01 RELS HI TRIP Factory default 2 00E 01 REL6 LO TRIP Factory default 1 00E 01 REL6 HI TRIP Factory default 2 00E 01 TEST RELAYS ANALOG OUTPUT ANALOG OUT 1 Factory default G CG1 0 5 7V ANALOG OUT 2 Factory default CG1 1 8V ANALOG OUT 3 Factory default CG2 1 8V AOUT CAL 1 Factory default Factory Set Number AOUT CAL 2 Factory default Factory Set Number AOUT CAL 3 Factory default Factory Set Number
130. t device is not connected 01 INVALID CR xx 0 DG OFF CR xx 1 DG ON CR When Hornet device is not connected 01 INVALID CR When connected to CCM500 01 INVALID CR xx PROGM OK CR When IG off 01 INVALID CR When device does not exist 01 INVALID CR When P 5E 05 Torr 01 INVALID CR When connected to CCM500 01 INVALID CR xx PROGM OK CR When Hornet device is not connected 01 INVALID CR When connected to CCM500 01 INVALID CR xx PROGM OK CR When Hornet device is not connected 01 INVALID CR When in Auto I mode 01 INVALID CR Page 76 Instruction Manual B RAX 3200 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE EXAMPLES SET FILAMENT Choose Filament 1 or 2 Read EMISSION Read emission current Current setting READ IG STATUS Finds out the cause of the specified device inactive reading READ SW VERSION Read the part number and revision number version of the firmware SET CGn ZERO Set the zero or vacuum calibration point for CGn SET CGn SPAN Set the span or atmosphere calibration point for CGn InstruTech Inc xxSFy lt CR gt e g 401SF1 lt CR gt where y 1 for F1 y 2 for F2 xxSES lt CR gt e g HOISES CR xxRSIG lt CR gt e g O1RSIG lt CR gt When Hornet or device is not connected response is 01 INVALID CR xxVER lt CR gt e g HOIVER lt CR gt HxxTZCGn CR e
131. t or grid surfaces End of filament life System pressure too high Change to 100 UWA emission current which will operate at higher pressures Reduce pressure Determine source of contamination Replace the lon gauge sensor tube Contact InstruTech Switch to 4mA emission current and attempt repeated filament starts to clean filament Switch to second filament degas Replace the lon gauge sensor tube Reduce pressure LV Failure The Filament voltage could not be Contact InstruTech established Electronics Failure F1 or F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the lon gauge sensor tube F1 or F2 OPEN Faulty electronics Replace electronics CONNECT IGM IGM400 not connected Faulty cable Faulty IGM4OO electronics Plug in IGM400 Replace cable Replace IGM400 electronics COMM IO FAIL Internal PCB not communicating Contact InstruTech 9 4 Clearing Error Messages IGIM400 Once the cause of the IG error has been determined and resolved the IG error must be cleared before the IG filament can be turned on again To clear errors simply press the IG ON OFF key InstruTech Inc Page 83 Instruction Manual 9 5 Troubleshooting CCM500 Operation Possible Cause Possible Solution Indication Display on B RAX controller indicates OFF Displayed pressure appears very different from expected pressure No power Sensor not in the proper location to measure system pressure
132. t to the Granville Phillips Mini Convectron non linear S curve analog output Select CG2 NON LIN for CG2 Same as CG1 NON LIN above except for CG2 InstruTech Inc Page 45 Instruction Manual B RAX 3200 Select CG1 LINEAR as the analog output type to provide a 0 10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by CG1 only This selection covers 3 decades of pressure change For example if the maximum pressure selected is 1 00 Torr value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below then the instrument provides a 10 volt analog output signal when pressure is at 1 00 Torr and the minimum pressure is automatically set to 1 mTorr 1 00E 03 Torr with a corresponding minimum voltage output of 0 01 volts If your application requires CG1 or the analog output voltage to cover a pressure range exceeding three decades then consider using the log linear analog output type Refer to section 6 10 for details regarding this type of output signal Select CG2 LINEAR for CG2 Same as CG1 LINEAR above except for CG2 ANALOG OUT 2 Factory default CG1 1 8V Same selection choices as ANALOG OUT 1 above ANALOG OUT 3 Factory default CG2 1 8V Same selection choices as ANALOG OUT 1 above AOUT CAL 1 Factory default Factory Set This has been pre set in the factory and is used to optimize the analog output calibration It is recommended that the user not m
133. tarts to read pressure This time period can be set from 1 to 60 minutes Default setting is 10 minutes Press the DOWN key to move down to the next menu selection The cold cathode gauge will exhibit some level of activation time delay when the sensor is being activated at pressures below 1 00E 05 Torr This is the time needed for the electrical discharge to establish itself at low pressures Arough estimate for this time delay can be determined by the following equation T seconds 1 pressure Torr Example If the pressure at which the gauge is being activated is 1 00E 07 Torr 1 00E 07 X 1 000 000 0 1 Torr then T 1 0 1 10 indicating that it may roughly take at least 10 seconds or more for the sensor to turn on The HV TIMEOUT is the time allowed for the gauge to activate during which time the unit will attempt repeatedly to turn on the anode voltage If the gauge has not been activated after this time has elapsed the unit will stop attempting to turn on the anode voltage and the user will be prompted with DISCHARGE FAIL or CURRENT FAIL error messages If this is the case the user must clear the error and repeat the process of turning on the anode voltage again SENSITIVITY Factory default 10 Factory pre set sensitivity for the CCM500 is always 10 and may be adjusted by the user if necessary lon gauge pressure readings are calibrated for nitrogen If you use a different species of gas or mixture of gases you will be required t
134. te the pressure using the non linear analog output voltage measured at a specific pressure You may also calculate the N air pressure represented by the non linear analog output voltage for the original S curve using a multi segment n order polynomial function calculation listed on the following page Non Linear Output Voltage vs Pressure in Torr units for N Air only Pressure Voltage Pressure Voltage Pressure Voltage Torr Vdc Torr Vdc Torr Vdc 0 0000 0 3751 2 00E 01 1 1552 4 00E 02 5 2236 1 00E 04 0 3759 5 00E 01 1 6833 5 00E 02 5 3294 2 00E 04 0 3768 1 00E 00 2 2168 6 00E 02 5 4194 5 00E 04 0 3795 2 00E 00 2 8418 7 00E 02 5 4949 1 00E 03 0 3840 5 00E 00 3 6753 7 60E 02 5 5340 2 00E 03 0 3927 1 00E 01 4 2056 8 00E 02 5 5581 5 00E 03 0 4174 2 00E 01 4 5766 9 00E 02 5 6141 1 00E 02 0 4555 5 00E 01 4 8464 1 00E 03 5 6593 2 00E 02 0 5226 1 00E 02 4 9449 5 00E 02 0 6819 2 00E 02 5 0190 1 00E 01 0 8780 3 00E 02 5 1111 Note An analog output of above 11 volts indicates a faulty convection gauge or unplugged gauge cable InstruTech Inc Page 59 Instruction Manual B RAX 3200 The equations and coefficients for the n order polynomial equation defined for various pressure measurement ranges for the Non linear analog output S curve for CG1 or CG2 for N air described above are given in the following table For 0 mTorr to
135. ter degas has been performed the B RAX may be non responsive In this case wait at least 40 seconds before switching filaments All other key entry sequences that do not involve IG degas emission current or filament switching do not require a wait time InstruTech Inc Page 31 Instruction Manual B RAX 3200 5 4 Factory Set Default Parameters The following is a summary of all factory set default values in the B RAX setup screen menu SETUP UNIT UNITS Factory default TORR INFO Factory default FIRMWARE VERSION SET CG2 ALT Factory default CG2 ALT GAUGE Factory default 10 TORR CDG ALT GAUGE CAL Factory default Factory Set Number 1 O STATUS Factory default DEGAS STATUS DEFAULTS Factory default PRESS ENTER TO SET OR MENU TO EXIT not useable if IG sensor is on ION GAUGE using the IGM4OO hot cathode ion gauge module EMISS SELECT Factory default IE 100UA AUTO IE TRIP Factory default DISABLED SELECT FIL Factory default FILAMENT 1 DEGAS TIME Factory default 2 MINUTES SENSITIVITY Factory default 10 00 OVER PRES 100 Factory default 5 00E 02 IG TRIP PRESSURE Factory default 1 00E 03 IG CONTROL Factory default MANUAL MODE ION GAUGE using the CCM500 cold cathode ion gauge module HV TIMEOUT Factory default 10 minutes SENSITIVITY Factory default 10 00 OVER PRESSURE Factory default 1 00E 02 IG TRIP PRES Factory defaul
136. th active gases Yttria coated iridium filaments typically have a longer operating life than tungsten filaments in clean applications The yttria coated filament can survive occasional accidental start attempts at atmosphere in air but the overall life of the filament may be shortened during each occurrence Good vacuum practice is to use a separate pressure gauge such as InstruTech s Worker Bee convection gauge to know when to turn on the ion gauge filament 2 Tungsten filament Typically a bare tungsten filament is a better choice in those applications where an yttria coated filament is quickly damaged due to the gas type in use For example processes such as ion implantation may only use tungsten filaments Be aware that corrosive applications are hard on any filament and filament life will be shortened while operating in such environments Tungsten filaments are easily damaged by exposure to air oxygen during accidental system vents or if considerable quantities of water vapor are outgassed during pump down and bake out It is very important to make sure the tungsten filament is turned off before bringing the chamber up to atmosphere especially if air is being used to vent the chamber The use of pure N gas is highly recommended to vent or purge your vacuum chamber Testing has shown that tungsten filaments can withstand limited high pressure excursions when only N is present Venting with air or other gases containing oxygen can damage th
137. that the ionization gauge transducer is operating and pressure vacuum is being measured In the above example most of the critical measured quantities required for the calculation of measured pressure are displayed The relationship of these parameters leads to the calculation of pressure given by P Ice Ice S where Icis the lon Current leis the Emission Current and S is the Sensitivity of the specific ion gauge sensor The pressure indication may be checked by using the displayed values and calculating the pressure as indicated by the top LED display line on the B RAX Other important information such as Filament Voltage and Filament Current are also given in the Research display screen These values vary widely dependent upon filament design type material used for constructing the filament filament condition and operating emission current The product of the filament voltage and current is the power dissipation VeA required to maintain the set emission current The interpretation of these displayed values is a qualitative measure The values will change over time dependent upon the pressure filament coating condition and possibly even surface properties of the grid electrode It is a good practice to make note of these values at initial installation and from time to time during the operating lifetime of the ion gauge sensor A new IGM4OO may operate at 100 HA emission current with only 3 to 4 watts of power required e g 1 5 V 2 0 A B
138. ties the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal heat loss type gauges are normally calibrated using nitrogen When a gas other than N is used correction must be made for the difference in thermal conductivity between N and the gas in use The charts and tables below indicate how different gases affect the display from an InstruTech convection gauge For nitrogen gas N the calibration of the convection gauge shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr At pressures below about 1 torr the calibration curves for the different gases are similar The difference in readings between indicated and true pressure at these low pressures is usually a constant a function of the difference between thermal conductivities of the gases At pressures above about 1 torr indicated pressure readings may diverge significantly from true pressure At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor Calibration and performance at pressures higher than about 1 torr depends on gauge tube geometry and mounting orientation as well as gas properties Generally air and N are considered the same as far as thermal conductivity goes but even these two gases will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere
139. ting type device may be forcibly released ejected from the fitting if internal pressure exceeds the local barometric ambient pressure InstruTech Inc Page 65 Instruction Manual B RAX 3200 The table below shows the convection gauge displayed readings at various pressures for several commonly used gas types Table 1 Displayed pressure readings for convection gauge type devices versus true pressure for selected gases True Pressure Torr N2 Ar He Oz CO Kr Freoni2 Freon22 D Ne CHA 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 1 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 2 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 3 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 5 00E 4 1 00E 3 1 00E 3 7 00E 4 8 00E 4 1 00E 3 1 10E 3 4 00E 4 1 50E 3 1 50E 3 1 30E 3 7 00E 4 1 70E 3 2 00E 3 2 00E 3 1 40E 3 1 60E 3 2 00E 3 2 30E 3 1 00E 3 3 10E 3 3 10E 3 2 40E 3 1 50E 3 3 30E 3 5 00E 3 5 00E 3 3 30E 3 4 00E 3 5 00E 3 4 40E 3 2 30E 3 7 60E 3 7 00E 3 6 00E 3 3 50E 3 7 70E 3 1 00E 2 1 00E 2 6 60E 3 8 10E 3 9 70E 3 1 10E 2 4 80E3 1 47E 2 1 35E 2 1 21E 2 7 10E 3 1 53E 2 2 00E 2 2 00E 2 1 31E 2 1 61E 2 1 98E 2 2 22E 2 9 50E 3 2 99E 2 2 72E 2 2 43E 2 1 41E 2 3 04E 2 5 00E 2 5 00E 2 3 24E 2 4 05E 2 4 92
140. u are trying to set Ensure the REL 1 LO TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to REL 1 HI TRIP Factory default 2 00E 06 This setpoint corresponds to the turn off point for Relay 1 Relay 1 will turn off when the pressure rises above this setting If you are unable to decrease the value of REL 1 HI TRIP B RAX responding with the message NO CHANGE you must first access the REL 1 LO TRIP menu above and decrease that value to a number lower than the value of the REL 1 HI TRIP you are trying to set Ensure the REL 1 HI TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to REL 2 LO TRIP Factory default 1 00E 01 RELAY 2 6 LO TRIP same info as RELAY 1 LO TRIP above REL 2 HI TRIP Factory default 2 00E 01 RELAY 2 6 HI TRIP same info as RELAY 1 HI TRIP above REL 3 LO TRIP Factory default 1 00E 01 REL3HI TRIP Factory default 2 00E 01 REL 4 LO TRIP Factory default 1 00E 06 REL 4 HI TRIP Factory default 2 00E 06 REL 5 LO TRIP Factory default 1 00E 01 REL 5 HI TRIP Factory default 2 00E 01 REL 6 LO TRIP Factory default 1 00E 01 REL 6 HI TRIP Factory default 2 00E 01 TEST RELAYS Factory default OFF This allows the user to manually toggle the relays on and off to test for correct external circuit wiring and ensure polarity is as desi
141. ure in Torr or mbar and V is the output signal in volts Select ALT IG LOGN10 only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with an InstruTech IGM401 or CCM501 ionization vacuum gauge module as an alternate gauge to CG2 Essentially this allows retransmission of the same analog input signal being received from the IGM401 or CCM501 This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 0 to 9 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 105 Hl where P is the pressure in Torr or mbar and V is the output signal in volts Select CG1 1 8V asthe analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1 This selection provides an output voltage that is linear with respect to the common logarithm of pressure i e log linear analog output of 1 to 8 volts with a scaling factor of 1 V decade of measured pressure The log linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar P 10 5 where P is the pressure in Torr or mbar and V is the output signal in volts Refer to section 6 7 for details regarding this type of output signal This selection is com
142. ween the gauge and the chamber it is connected to Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary The B RAX control unit should be connected to earth ground via a good quality equipment earthing conductor It is encouraged that you connect a separate 12 AWG earthing conductor between a known facility earth ground connection and the location marked with the earth ground symbol via the green colored screw provided on the back panel of the B RAX 3 2 2 Installation A good recommended practice is to remove power from any cable prior to connecting or disconnecting it The electrical connections for the B RAX are located on the back panel of the device as shown below 3 Analog Outputs Convection Gauges 1 amp 2 1 Alternate Gauge Analog Input Digital I O ut input output DIGITAL I O CG 1 CG 2 e IER cem ame IG DC POWER RLY1 RLY2 RLY3 T 4 T l RLY4 RLY5 RLY6 amp X n eni Inc c AE C Made in USA B RAX 32 DEEN 6 Setpoint Relays IGM400 or CCM500 RS232 RS485 Power lonization Gauge Serial Comm 4 l Aux Equipment Earthing Ground InstruTech Inc Page 19 Instruction Manual B RAX 3200 3 2 3 Connecting the IGM400 or CCM500 connector labeled IG Good recommended practice is to remove power from any cable prior to connecting or disconnecting it The custom cable connector assembly P N BXC400 1 XXXF is a custom cable assem
143. y increasing the emission current to 4 mA the power requirement may increase to 4 or 5 watts e g 2 0 V 2 to 2 5 A Again the values mentioned here are representative the actual values you may see for the IGM4OO you are using will be different and will vary over time and from device to device In general keeping a record of the filament heating power given by the Filament Voltage and Filament Current readings will aid you in monitoring the condition of your gauge filaments over time and perhaps give you an indication of when to schedule replacement of either the device or the filament assembly In cases where the ion gauge sensor does not turn ON or does not stay in the ON condition after you have made sure that the pressure is below the maximum permissible pressure for the emission current setting you have chosen you will be able to monitor the values displayed in the RESEARCH screen and determine if the turn ON stay ON trouble is related to filament condition There are maximum operating levels for filament voltage and current if either of these is exceeded the IGM400 control circuitry will sense the condition and force an OFF condition The following table Research lon Gauge Diagnostic Display is intended to assist you in using the information provided in this display when using the IGM4OO as a means to ascertain if the ion gauge transducer is performing as expected under your vacuum chamber operating conditions There are various

B-RAX 3200 User Manual

Contents

Download Pdf Manuals

Related Search

Related Contents