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Brooks®CMX Series - Brooks Instrument

1. NMOS SMOS 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 Czech Z kladni instrukce Pred instalaci si prect te nasledujici instrukce Spole nost Brooks Instrument konstruuje
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7. 77 4 mm 3 05 A DIMENSION B DIMENSION FITTING TYPE FITTING CMX45 CMX100 OVERALL LENGTH CODE 05 OD Tube 0 26 30mm 1 04 154 30mm 6 08 KF 10 Flange 1 39 00mm 1 54 167 00mm 6 58 KF 16 Flange 2 39 00mm 1 54 167 00mm 6 58 KF 25 Flange 3 30 1mm 1 197 158 10mm 6 23 8 VCR Female 4 52 24mm 2 06 180 24mm 7 10 Mini CF 5 27 56mm 1 097 155 56mm 6 13 See Figure 14 Dimensions With Connectors For other fittings and flanges call Brooks Techni cal Support Figure 11 CMX45 CMX100 Dimensions of Body and Tube with DeviceNet Interface p 13 _DESCRIPTION 2 0 117 mm 4 61 A Dimension m 12 7 mm 0 50 77 4 mm 3 05 A DIMENSION B DIMENSION FITTING TYPE FITTING CMX160 OVERALL LENGTH CODE 05 OD Tube 0 26 30mm 1 04 159 30mm 6 28 KF 10 Flange 1 39 00mm 1 547 172 00mm 6 78 KF 16 Flange 2 39 00mm 1 54 172 00mm 6 78 KF 25 Flange 3 30 1mm 1 19 163 10mm 6 33 8 VCR Female 4 52 24mm 2 06 185 40mm 7 30 Mini CF 5 27 56mm 1 09 160 56mm 6 43 See Figure 14 Dimensions With Connectors For other fittings and flanges call Brooks Technical Support Figure 12 CMX 160 C Dimensions of Body and Tube with DeviceNet Interface p 14 _DESCRIPTION 117 mm 4 62 A Dimension 12 7 mm 0 50 A
8. Trigon PED EGOTTAIOH G UTT pe EOWTEPIK TTIEOT VU rou 0 5 bar g kal HeyaAUTepou 25 TNG 1 vroag OTIC IAT EEIG TNG eupwrraik c via Tov ut rrieon PED To Kep aio rou EYxEIPI IOU TrepiAauB vei OXETIK ue rv PED Oi TTOU TTEPIVP OVTAI EYXEIPI IO OUUHOPEWvOVTAI pe TNV UpwTraik Odnyia 97 23 EK PO LETPA Brooks Instrument av kouv otnv op da pevoTwv 1 peyaAUTEpoI arr 25 mm 1 ivroa ouuuopYwvovral pe TIG I II kai III TIS PED 25 mm 1 vroag MIKPOTEPOI G LPUVA HE TOUG KAV VEG TNG TEXVNG SEP Eupwrraik O nyia via Tnv NAEKTPOHAYVNTIK O EGOTTAIOH G Brooks Instrument Trou p pei CE EXEI UTTOOTE ETTITUXWG TIG SOKIUEG TOU TTpoBA TTOUV OI IAT EEIG TNG O nyiag via Tnv OUHBATOTNTA 2004 108 EC 89 336 EOK via tnv EMC I IA TEPN Trpoooxh OTNV rou KAAW IOU O HATOG yia rov EGOTT IOHO Trou PEPEI CE KAAW IWV
9. ouvrhpnon epyaoiag XEI TEBE EKT G TIIEOEWG ZE TTEPITTTWON avrikar oraong AVTAAMAKTIKUWV TO TTPOOWITTIK EIVAI EI IKEUNEVO Kai XPNOIHOTTOIEI AVTAAAAKTIKA Trou TTPOBAETTEI Brooks Instrument Mn eykekpip va Kai ETTEUB OEIG ETINPEGOOUV TIG ETTID GEI TOU TTPOIOVTOG KAI TTPOKAAEOOUV Kiv uvo yia TNV Aerroupyia AVTIKATAOT OEIG HE avraAAakriK EV EXETAI rrpokaA oouv aVETTAPK Aerroupy a BeBaiwEeire avoiyyata Tou K EIOT KAI TTPOOTATEUTIKG E Val OEON TOUS TTPOKEIU VOU va kiv uvog N EKTPOTTAN IAG KAI TTPOOWTTIKUV TPAUMATIOHWV EKT G EKTEAOUVTAI OUVT PNONG OTT EIOIKEUH VO TTPOCWTTIK 4 NPOEIAONOIHZH via OUGKEV C HE PEUOTOU TAV yia OTTOIOV NTTOTE A yo TTP KEITAI va KAEIOOUV oi EIGAYWY G OTIG OUOKEUEG Ol OUOKEUEG VA ATTOOTPAYYIOTOUV EVTEAWG un ouuu6ppwon prropei va TrpokaA os TOU UYPO TOU TTEPIEXOUV HE ATTOTEAEOUA OUOKEUN KAI va TTPOCWTTIKO Eupwrraik O nyia via egorrAioH
10. _CONTENTS CONTENTS _1 0 SAFETY NOTICES _1 1 SAFETY SYMBOLS _1 2 GROUNDING _1 3 EXPLOSIVE ATMOSPHERE _1 4 PART SUBSTITUTIONS AND MODIFICATIONS _1 5 GENERAL SAFETY GUIDELINES _1 5 1Unsafe acts _1 5 2Recommended practices _2 0 DESCRIPTION _2 1 BASIC DESIGN _2 2 HISTORICAL DESIGN _2 3 BROOKS CMX DESIGN _2 4 DESIGN OVERVIEW _2 5 RELAYS _2 6 ZERO OUTPUT BIAS CONTROL _2 7 CMX OPERATING TEMPERATURES _2 8 PRESSURE RANGE SELECTION CRITERIA _2 9 PRODUCT SPECIFICATIONS _2 10 ORDERING SPECIFICATIONS _3 0 INSTALLATION _3 1 CMX MOUNTING CONSIDERATIONS _3 2 PLUMBING SIZE _3 3 USE OF AN ISOLATION VALVE _3 4 MATERIAL EXPOSURE _3 5 MECHANICAL CONNECTION _3 6 ELECTRICAL CONNECTIONS _3 7 DEVICENET CONNECTION _3 8 ELECTRICAL SIGNAL DESCRIPTION _4 0 OPERATION _4 1 OPERATING PRECAUTIONS _4 2 POWER THE CMX _4 3 LED INITIALIZATION SEQUENCE _4 4 DEVICE WARM UP _4 5 HEATER TEMPERATURE _4 6 ZEROING THE CMX _5 0 MAINTENANCE and TROUBLESHOOTING _5 1 CALIBRATION _5 2 TROUBLESHOOTING _5 3 CLEANING _5 1 REMOVAL OF CMX NO O1 HRW N N aaa 19 _CONTENTS _6 0 MODELS WITH DEVICENET 30 _6 1 DeviceNet Power Up Sequence 30 _6 2 DEVICENET AND NETWORKING ISSUES AND SOLUTIONS 30 _6 2 1Power up LED Sequence Fails 31 _6 2 2Sequence Passes Module LED Turns Red _6 2 3Sequence Passes Module LED is Green Net LED is Red 31 _6 2 4Sequence Passes Module LED is Green Net LED is Off 31
11. 270mA 15 VDC 5 620mA 15 VDC 5 620mA 15 VDC 5 Steady State Analog Typical 175mA 15 VDC 5 350mA 15 VDC 5 550mA 0115 VDC 45 Initial Warm up DeviceNet Typical 400mA 24 VDC 900mA 24 VDC 950mA 24 VDC Steady State DeviceNet Typical 300mA 24 VDC 600mA 24 VDC 600mA 24 VDC Output 0 10 VDC 5k load minimum Relay Contact Rating available on 15 Pin Male D Sub Interface 30 VDC 0 3A 125 VDC Electrical Connector Type Analog 9 pin D sub male or 15 pin D sub male RS 485 2 5 mm mini j ck for RS 485 Communications Port DeviceNet 5 pin eurofast DeviceNet w 9 pin D sub Female Analog Certification Fully CE Compliant to EMC Directive 89 336 EEC Includes hysteresis linearity and repeatability within the calibrated range at 21 C 2 Ambient Operating Temperature with 50 linear feet of airflow 15 45 C 3 15 Pin Male D Sub Model requires an additional 60mA to power the internal relays if energized A Process relays are UL recognized components rated for 100 000 cycles at 1A 30V DC Resistive All specifications subject to change without notice p 10 _DESCRIPTION 2 0 2 10 ORDERING SPECIFICATIONS Operating Temperature 1 CMX45 45 C 2 CMX100 100 C 3 CMX160 160 C Range Conversion 100 m Torr 250 m To
12. ventuelle dilatation thermique du fluide peut casser I appareil et provoquer des blessures Directive europ enne quipements sous pression PED Tous les quipements sous pression dont la pression interne est sup rieure a 0 5 bar pression relative et dont la taille d passe 25 mm ou un pouce entrent dans le cadre de la directive PED La section Specifications de ce manuel contient les instructions relatives la directive PED Les appareils de mesure de ce manuel sont conformes la directive EN 97 23 EC Tous les d bitm tres Brooks Instrument fonctionnent avec des fluides de groupe 1 Les appareils de mesure d une taille sup rieure 25 mm ou un pouce entrent dans la cat gorie PED I Il ou III Les appareils de mesure d une taille inf rieure ou egale 25 mm ou un pouce rel vent des bonnes pratiques d ing nierie SEP Compatibilite electromagnetique europ enne CEM L quipement Brooks Instrument lectrique lectronique portant le marquage CE r pond a la r glementation en mati re de compatibilit lectromagn tique directive CEM 2004 108 EC 89 336 CEE Il faut cependant pr ter une grande attention au choix du c ble d interconnexion utiliser avec l quipement marqu CE Qualit du cable d interconnexion des presse toupes et connecteurs Brooks Instrument fournit un ou des cables de qualit sup rieure qui repondent aux specifications exig es pour la certi
13. zasunut m Vybran kartu okam ite treba umiestni do ochrann ho obalu ur en ho pre dopravu skladovanie alebo pre sp tn prepravu do v robn ho z vodu Pozn mky Existencia prvkov ktor s citliv na elektrostatick v boje ESD v pr stroji je ast m javom U v iny modern ch elektronick ch prostriedkov s pou it prvky s technol giou oxidu kovov NMOS SMOS at Sk senosti dokazuj e aj nepatrn elektrostatick v boje po kodzuj zni ia tieto prostriedky Po koden s iastky aj ke zdanlivo pracuj bez chyby odkazuj na vznikaj ce poruchy 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira izdeluje in terstira svoje izdelke da oni ustrezajo Stevilnim doma im in mednarodnim standardom Te naprave se morajo ustrezno instalirati koristiti in vzdrzevati da vsekakor delajo ustrezno normalnom podro ju funkcioniranja Naslednjih navodil se mora drzati in potrebno je vgraditi v program varstva pri delu pri instaliranju kori enju in vzdr avanju izdelkov proizvajalca Brooks Instrument Za jemstvo ustreznega u inka naj izklju amp no strokovno osobje opravlja instaliranje kori enje osve enje programiranje vzdr evanje izdelka Potrebno je prebrati vsa navodila pred instaliranjem kori enjem in ser
14. DIMENSION B DIMENSION FITTING TYPE FITTING CMX160 OVERALL LENGTH CODE 05 OD Tube 0 26 30mm 1 04 147 00mm 5 797 KF 10 Flange 1 39 00mm 1 547 159 70mm 6 297 KF 16 Flange 2 39 00mm 1 547 159 70mm 6 297 KF 25 Flange 3 30 10mm 1 197 150 80mm 5 947 8 VCR Female 4 52 24mm 2 067 172 94mm 6 817 Mini CF 5 27 56mm 1 097 148 26mm 5 847 See Figure 14 Dimensions With Connectors For other fittings and flanges call Brooks Technical Support Figure 13 CMX160 Dimensions of Body and Tube with Analog Interface p 15 _DESCRIPTION T 2 12 CMX DIMENSIONS WITH CONNECTORS Not to Scale Additional Flanges and Fittings available Contact Brooks Technical support for information Figure 14 Dimensions With Connectors 2810 mm 3 19 inch 77 4 mm 3 05 inch INSTRUMENT Figure 16 Analog 15 Pin Top Dimension p 16 _DESCRIPTION 2 0 77 4 mm 3 05 inch 77 4 mm 3 05 inch INSTRUMENT Figure 18 Zero Bias Indy 15 Pin Table 4 CMX Top LED Indicators Switches and Connectors ITEM DESCRIPTION DIAG 2 5mm Diagnostic Port supports diagnostic functions via an RS 485 based communications protocol ZERO When pressed the gauge will automatically adjust the pressure signal to zero volts MSD ADDRESS Most Significant address Digit MAC ID ANALOG MODELS For RS 485 Diagnostics Port Valid addresses are 0 31 DEVICENET MODELS Valid address
15. Downstream Pressure Controller Pump s Figure 3 Typical System p 5 _DESCRIPTION 2 0 2 5 RELAYS Two electromechanical relays are provided in CMX configured with the 15 Pin D Sub connector option see Ordering Code on page 11 The relays are UL recognized components rated for 100 000 cycles at 1A 30V DG Resistive Associated LED indicators located on top of the device illuminate when the coil of the associated relay is energized Each relay has a normally open NO and a normally closed NC contact with a common connection Single Pole Double Throw The contacts are accessed through the 15 Pin connector refer to Figure 21 CMX RS 485 Port 2 5mm Jack on Page 20 The relays are digitally programmed with use of the CMX User Software individually for the following properties Refer to the CMX Software Manual for procedures to set the relays Direction of Relay Actuation Above Setpoint ascending pressure Relay is energized above the setpoint Below Setpoint descending pressure Relay is energized below the setpoint Setpoint Pressure Pressure value in percent of full scale 0 100 at which the relay actuates Hysteresis The amount by which the pressure must return past the setpoint value before the relay will be de actuated adjustable from 0 20 of full scale The following graphs provide an example of the relay behavior RELAY On Setpoint M Hysteresis Time Figure 4 Direc
16. Please place a copy of the completed Contamination Disclosure Form on the exterior of the shipping container and include the original along side the product being returned Omission of pertinent information may result in a delay in processing your order Omission of the Contamination Disclosure Form may result in either a delay or rejection of you service request If Brooks can be of assistance in any way please contact Brooks Technical Support p 34 _SERVICE AND RETUR Contamination Disclosure Form Note this fo be visible This contamination Disclosure Form serves as a means of identifying equipment being retumed to Celery tacl ty Completion of zws form supports the regulatory requirements developed to minimize harmful chemical exposure during transport and final cisposton Instruction Please ali ALA af the correct k consu with involves dresy al ne process insifcen O mornar cou pose an unecessary ic anyone required io handle the equipment Please complete and fax CDF back to obtain an RMA number equipment reamed to ue a ie CDE Com diy med out wil be quarantined for ter nijn Product ID Te be completed after the COF ts submitted and approved ves No Were chemicals introduced into the system Y no sign me form O 2 Was the system cleaned and purged of all chemical residues See purging Instructions LJ LEC should be ciearec thoroughly with DI water Ensure valve Is jn th
17. Zufluss und Ausfluss des Durchflussmessers auf Undichtigkeiten berpr fen Wenn das System dicht ist auf Betriebsdruck hochfahren Sicherstellen dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird Wenn Ersatzteile ben tigt werden stellen Sie sicher dass qualifizierte Personen Ersatzteile verwenden die von Brooks Instrument vorgegeben sind Nicht genehmigte Teile und Verfahren k nnen die Leistungsf higkeit des Produkts beeintr chtigen und den sicheren Betrieb Ihres Prozesses gef hrden hnlich aussehende Austauschteile k nnen zu Br nden elektrischen Gefahren oder nicht sachgerechtem Betrieb f hren Stellen Sie sicher dass alle T ren der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind um Stromschl ge und Personenschaden zu vermeiden es sei denn die Wartungsaufgaben werden von gualifizierten Personen durchgef hrt WARNUNG Werden die Ein und Auslassventile neben Durchflussmessger ten aus irgendwelchen Gr nden geschlossen so m ssen die Ger te komplett entleert werden Durchflussmessgeraete muessen vor dem Schliessen von Ein und Auslassventilen komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichtlinie PED Alle Druckger te mit einem internen Druck von mehr als 0 5 bar g und einer Gr Be von mehr als tin 1 in 25 4 mm
18. _6 2 5Sequence Passes Module LED is Green Net LED is Flashing Green 31 _7 0 CMX MODELS WITH EXTENDED RANGE CAPABILITY 32 _7 1 CMX WITH EXTENDED RANGE 32 _7 1 EXTENDED RANGE ACCURACY SPECIFICATION 32 _7 2 CMX EXTENDED RANGE CONNECTOR PIN OUT 32 _8 0 SERVICE and RETURN 34 _8 1 SERVICE INSTRUCTIONS 34 _8 2 RETURN INSTRUCTIONS 34 WARRANTY LOCAL SALES SERVICE CONTACT INFORMATION BACK COVER p 1 _INTRODUCTION 1 0 SAFETY NOTICES This manual provides information for the installation and operation of the Brooks CMX Series Heated Digital Capacitance Manometers CMs It is imperative that this manual be reviewed prior to installation and operation of the device Failure to comply with the warnings cautions and hazard notes will void the product s warranty Use of these instruments in a manner other than those specified by Brooks may result in injury or death and will void the product s warranty Brooks assumes no liability for any damage resulting from the improper use of its products 1 1 SAFETY SYMBOLS The following safety symbols are used throughout the system documentation Ax CAUTION A ao could cause equipment damage failure or procedure malfunction if not ollowed Not following the procedure or adhering to advice could result in severe equipment damage and or environmental damage Severe injury or injury resulting in death could result if stated or local procedures are not followed 1 2 GROUNDING SHOCK
19. utilis s et entretenus pour pouvoir fonctionner dans le cadre de leurs sp cifications normales Les instructions qui suivent doivent tre respect es et int gr es votre programme de s curit lors de installation l utilisation et l entretien des produits Brooks Instrument Afin d assurer un fonctionnement correct faites appel du personnel qualifi pour l installation l utilisation la mise jour la programmation et l entretien du produit Lisez toutes les instructions avant l installation l utilisation et l entretien du produit Si le pr sent manuel d utilisation n est pas le bon consultez la derni re page de la couverture pour conna tre le point de vente le plus proche Conservez ce manuel d utilisation pour pouvoir vous y reporter par la suite AVERTISSEMENT n utilisez pas cet instrument au del des specifications num r es dans le manuel d utilisation Le non respect de cet avertissement peut entra ner de graves blessures et ou endommager l quipement Si vous comprenez pas des instructions prenez contact avec un representant de Brooks Instrument pour obtenir des explications Tenez compte de tous les avertissements pr cautions et instructions marqu es sur le produit et fournies avec celui ci Installez votre quipement de la fa on indiqu e dans les instructions d installation du manuel d utilisation et conform ment a la l gislation en vigueur au niveau local et national Branchez
20. 5V DC Remains at 5V DC as long as the temperature stays at the control temperature No Connection No internal connection di ZERO Input that will activate zeroing This pin is driven high to 3 3V DC Relay x 3 7 Normally OPEN Relay normally open contact Normal state is de energized Relay x Connects to normally open or normally Common Relay contact closed contact depending on relay state Relay x Normally Relay normally closed contact Normal state is de energized CLOSED 1 See page 20 Figure 21 Pin 3 Connector Option 2 for remote zero parameters p 24 _OPERATION 4 0 Ax CAUTION A Never over pressurize the CMX The CMX is designed to with stand a positive over pressure of 17 PSIA or 125 of rated full scale whichever is greater within the pressure port Pres sures greater than this may damage the pressure sensitive diaphragm and cause a failure of the CMX AS CAUTION A Never exceed the ambient tem perature operating limits These limits are listed in the Specifications Table 3 begin ning on page 10 Devices which are designed for a specific operation range may be dam aged by excessive temperature and may not function correctly NOTE Avoid venting a heated or low range CMX to atmo sphere While this action will not damage the CMX it will cause temperature and signal instabili ties which in turn may require an additional warm up or recov
21. Advarsel Ved brug af udstyr som anvendes til veeske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket pa samme tid i forbindelse med aftapning Safremt dette ikke overholdes er der risiko for at vsesken grund af varmeudvikling ekspanderer og dette kan forarsage skade pa udstyr og personer Det Europ iske direktiv for trykudstyr PED Pa alt udstyr hvis indgangstryk er starre end 0 5bar g og starre end 25 mm eller en tomme geelder det europeeiske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet manualen angives maleinstrumenter der er tilpasset direktivet 97 23 EK EU Alle Brooks gennemstromningsm lere tilh rer vaeskegruppen nr 1 Alle malinstrumenter som er starre end 25 mm eller en tomme beskrives i direktivet PED s kategorier II eller III Alle malinstrumenter som er pa 25 mm eller en tomme eller mindre beskrives i Sound Engineering Practice SEP Det europ iske direktiv for elektromagnetisk kompatibilitet EMC Alle Brooks instrumenter elektrisk elektronisk som har CE markering er godkendt og testet ifalge direktiv nr 89 336 EGK EMC om elektromagnetiske kompatibilitets forskrifter OBS Man skal veere opmaerksom p hvilken type kabler der bruges til maerket udstyr Om kvalitet af signalkabler kabeltilslutninger og koblinger Brooks tilbyder kabler af hojest kvalitet som er tilpasset CEE kvalificeringens forskrifter Hvis
22. Mail BrooksEu Brooksinstrument com E Mail BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www BrooksInstrument com BROOKS Copyright 2011 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
23. OTUTTIOBAITTTWV Kai KAAW IWV H Brooks Instrument Trpoop per UWNA G orro a TTANPO V TIG CE Ze TTEPITTTWON SIKOU KAMW IOU XPNOIMOTTOIE TE HE Bwp Kion 100 oe onpeia T TTOU D KUKAIK va XOUV HETG AIKT Na TTPOTIUNON PETAAAIKOI OTUTTIOBA TITES KAAW IWV via TN OTEPEWON TNG Owp kions Na n Owp kion TOU KAAW IOU OTO HETAAAIKO KEAU OS OTUTTIOGAITTTN KAI OWPAKIOTEI Kal 600 360 po pec H Owp kion va oe yeiwon Ta EIVAI EK KATAOKEU G un HETAAAIKA Ta KAAWOIA TTPETTEI XOUV 100 Owp kion OUUN PPWON CE va TEPHATI EL oe veiwon Tia akidwv UUBOUAEUBEITE TO OUVNUU VO EYXEIPI IO O NYIWV EKKEVWON ESD A ouokeun OUTI Trepi xel NAEKTPOVIKG E APTIJHATA OTTOIA HITOPOUV UTTOOTOUV EUKOAA BAGBEG ATT TOV OTATIKO nAEKTPIOLO Mp rrei va AKOAOUBO VTAI oi OPBEG XEIPIOHOU TNV apaipeon TOTTOB TNON GAAO XEIPIOHO TWV EOWTEPIK
24. as v lvulas para evitar bruscas de caudal 2 fugas nas ligag es de entrada e saida do medidor de caudal Se nao houver fugas carregue o sistema a press o de trabalho Antes efectuar qualquer operag o de manuteng o verifique sempre que equipamentos n o esta sob press o Em caso de ser preciso substituir pe as estas devem ser as recomendadas pela Brooks Instrument e trabalho feito por t cnicos qualificados Pe as e actua es n o conformes poder o influenciar o desempenho do equipamento ou p r em risco a sua seguran a A substitui o de pe as por outras n o originais meramente semelhantes poder resultar em fogo choques el ctricos ou funcionamento inadequado Mantenha fechadas todas portas do equipamento e verifique que as coberturas de protecg o est o nos seus lugares para evitar choques electricos e danos pessoais salvo se for um t cnico qualificado e estiver a executar trabalhos de manuten o A ATEN O Tratando se de equipamentos em que podem fluir l quidos se por qualquer raz o tiver que fechar as v lvulas de entrada e sa da cont guas ao equipamento o mesmo dever ser pr vio e completamente esvaziado Da omiss o deste procedimento poder o resultar devido dilata o t rmica do l quido a destrui o do equipamento e eventuais danos pessoais Directiva Europeia para equipamentos sob press o PED Os equipamentos sob press o
25. copert coordonatele distribuitorului local i pentru l muriri suplimentare adresati v acestuia P strati acest manual pentru referin e ulterioare A ATEN IE Nu utiliza i instala ia n afara intervalului de func ionare indicat n instruc iunile de operare Nerespectarea acestui lucru se poate solda cu r niri grave de persoane sau defectarea instala iei n m sura in care indica iile c r ii ma inii nu sunt suficient de l muritoare lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei P strati toate avertismentele avizele i instruc iunile livrate odat cu instala ia sau inscrip ionate pe aceasta Efectuati instalarea echipamentului n conformitate cu indica iile de instalare corespunz toare respectiv respectarea prevederilor nationale Echipamentul se conecteaz exclusiv la surse de energie electric i de presiune corespunz toare Succesiune 1 Presurizati lent instalatia Deschideti incetul cu incetul supapa de functionare pentru evitarea fluctuatiilor de flux 2 Controlati daca nu sunt prelingeri la intrarea sau ie irea debitmetrului de brangare Dac nu sunt scurgeri presurizati instala ia la presiunea de lucru e naintea exploat rii ntre inerii verificati neap rat dac conducta uzinal nu este sub presiune n m sura in care este nevoie de piese de schimb este neap rat necesar ca manevrarea pieselor de schimb s fie f cut de personal cu calificar
26. elektromagn tisk s savietojam bas direkt va EMS Brooks Instrument elektrisk s elektronisk s iek rtas ar CE z mi ir iztur ju as p rbaudi un atz tas par atbilsto m Eiropas elektromagn tisk s savietojam bas direkt vas EMS pras b m Tom r izv loties sign lkabeli kas tiks lietots kop ar CE mar juma iek rtu ir j iev ro pa a uzman ba Sign lkabe a kabe a blivsl gu un savienot ju kvalit te Brooks Instrument pieg d augstas kvalit tes kabe us kas atbilst CE sertifik cijas tehniskajiem parametriem Ja j s lietojat pats savu sign lkabeli tam ir j b t piln b 100 ekraniz tam D un apa tipa savienot jiem ir j b t apr kotiem ar met la ekraniz jumu Ja nepiecie ams ir j izmanto met la bl vsl gi ar kabe a ekraniz juma skavojumu Kabe a ekraniz jumam ir j b t savienotam ar met la apvalku un ab s pus s aizsarg tam 360 gr du diapazon Ekraniz jumam ir j beidzas pie iezem juma Card Edge savienot ji standarta izpild jum ir nemet la Kabe iem ir j b t p rkl tiem ar 100 ekraniz jumu lai tie atbilstu CE sertifik cijas pras b m Ekraniz jumam ir j beidzas pie iezem juma Attiec b uz tapu konfigur ciju skat pievienoto instrukciju rokasgr matu ESD elektrostatisk izl de IEV ROT PIESARDZ BU Sis instruments satur elektriskos komponentus kas ir jut gi pret statisko elektr bu Iz emot un uzst dot iek j
27. ge nstalleerd verwijderd of aangepast 3 Printplaten moeten in een geleidende verpakking worden vervoerd De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking worden gehaald Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd opgeslagen of teruggestuurd naar de fabriek Opmerkingen Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie NMOS SMOS enz Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen Beschadigde componenten zelfs als ze goed lijken te functioneren raken eerder defect Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Estonian Olulised juhised Enne kasutamist lugege hoolikalt labi Brooks Instrument konstrueerib valmistab ja katsetab oma tooteid selliselt et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite n uetele Ainult n uetekohane paigaldamine kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames Brooks Instrument i toodete paigaldamisel kasutamisel ja hooldamisel tuleb t ita allj rgnevaid juhiseid ja integ
28. interior superior a 0 5 bar g e com calibre superior e 25 mm 1 polegada caem sob a vig ncia da directiva europeia de equipamentos sob press o PED O cap tulo Dados t cnicos do manual contem instru es relativas Directiva PED Os caudal metros objecto deste manual satisfazem a directiva 97 23 CE da UE Os caudal metros Brooks pertencem ao grupo de fluidos 1 Os caudalimetros com calibre superior a 25 mm 1 polegada pertencem s categorias PED II ou III Os caudal metros de 25 mm 1 polegada ou menores observam as Boas regras de engenharia SEP Directiva Europeia referente Compatibilidade electromagn tica EMC Os equipamentos el ctricos electr nicos da Brooks Instrument que t m a marca o CE passaram os testes comprovantes dos requisitos de compatibilidade electromagnetica Directiva EMC n mero 2004 108 EC 89 336 CEE Ao utiliz los compete lhe todavia a escolha dos cabos de sinal adequados para os equipamentos com marcag o CE Qualidade dos cabos de sinal bucins e conectores A Brooks Instrument oferece cabos de alta qualidade que cumprem todos os requisitos da marcag o CE Em caso de utilizar os seus pr prios cabos de sinal tem que garantir uma blindagem a 100 Os conectores do tipo ou circular t m que ser blindados por uma bainha met lica Em caso de necessitar de utilizar bucins estes tem que permitir a crimpagem da malha blindagem do cabo A blindagem do cabo deve ser lig
29. is directly proportional to the pressure or vacuum in the process chamber The CM reading is not affected by changes or differences in gas composition and therefore overcomes disadvantages of specific gas calibration due to thermodynamic and electrical property Typically in other vacuum gauges such as cold cathode ionization Pirani and thermocouple each instrument must be calibrated for each specific process gas Capacitance manometers measure absolute pressure force per unit area They can measure to extremely precise levels and usually have guoted accuracies of 0 25 error of reading versus typically 10 of reading with other indirect vacuum measurement technologies p 3 _DESCRIPTION 2 0 2 2 HISTORICAL DESIGN Unfortunately the simple sensor design described previously has a number of drawbacks The single large diaphragm is more sensitive to shock and vibration A single electrode cannot distinguish between a true pressure change and capacitance change due to thermal expansion or contraction of the sensor housing The diaphragm is exposed directly to the process environment where thermal radiation from RF power and condensable by products from the process contaminate it This may even physically damage the diaphragm changing its characteristics of deflection Internal frictional and stress forces as an example due to thermal expansion and vibrations can distort the pressure readings 2
30. kovov st n n V p pad jejich pou it mus kovov kabelov pr chodky b t propojeny se st n n m kabelu St n n by m lo b t p ipojen ke kovov mu t lesu p stroje nebo krytu na obou konc ch kabelu a po cel m jeho obvodu St n n by m lo b t uzemn no P pojky vedouc ke kart m podle norem jsou nekovov Pro spln n po adavk p edpis CE mus b t pou it kabely kompletn st n ny St n n by m lo b t uzemn no Konfigurace kontakt je uvedena v p ilo en m n vodu k obsluze Elektrostatick v boj ESD UPOZORN N Tento p stroj obsahuje komponenty citliv na po kozen statickou elekt inou P i monta i demonta i i jin manipulaci s vnit n mi elektronick mi obvody je pot eba dodr ovat p slu n postupy Postup o et ov n 1 Odpojte p stroj od nap jen 2 Osoba prov d j c dr bu m b t p i instalaci vyj m n i pr ci na desce plo n ch spoj nebo jin vnit n elektronice uzemn na zemn c m n ramkem nebo jin m vyhovuj c m zp sobem 3 Desky plo n ch spoj je nutn p epravovat v elektricky vodiv m obalu Plo n spoje vyj mejte z vodiv ho obalu a bezprost edn p ed instalac do p stroje Plo n spoje vyjmut z p stroje a ur en pro dal vyu it op t neprodlen um st te do ochrann ho obalu Pozn mky Existence prvk citliv na elektrostatick v boje ESD v p str
31. ln uwag nale y po wi ci przy doborze przewod w sygna owych kt re maj by stosowane z urz dzeniami ze znakiem CE Jako przewodu sygna owego d awic oraz z czy przewodu Firma Brooks Instrument dostarcza wysokiej jako ci przewody kt re spe niaj wymagania zawarte w specyfikacji dla certyfikatu CE Je eli stosuje si w asne przewody sygna owe to powinny one by w ca o ci w pe ni ekranowane Z cza typu D lub okr g e powinny zawiera metalowy ekran Je li to mo liwe nale y stosowa metalowe d awice przewodu zapewniaj ce mocowanie jego ekranu Ekran przewodu powinien by po czony z metalow os on lub d awic zapewniaj c ca kowite dook lne ekranowanie na obu ko cach przewodu Ekran przewodu powinien by uziemiony Z cza kraw dziowe s standardowo niemetaliczne Stosowane przewody musz by w pe ni ekranowane zgodnie z certyfikatem CE Ekran przewodu powinien by uziemiony Konfiguracja styk w jest podana w niniejszej instrukcji obs ugi Wy adowania elektrostatyczne ESD UWAGA Urz dzenie zawiera cz ci elektroniczne podatne na uszkodzenia spowodowane adunkami elektrostatycznymi Przy obchodzeniu si z wewn trznymi podzespo ami i cz ciami elektronicznymi nale y przestrzega nast puj cych zasad post powania Nale y od czy zasilanie od urz dzenia 2 Osoba wykonuj ca czynno ci musi zosta uziemiona za pomoc opaski na przegubie d oni lub
32. metalizados Los cables utilizados deben ser filtrados con una blindaje de 100 para responder a la calificaci n CE El blindaje debe terminarse en tierra Configuraci n de contacto V ase Instrucciones de operaci n adjuntas Descarga Electroestatica ESD 4 PRECAUCION El aparato incluye piezas electr nicas que son susceptibles a los da os provocados por la electricidad est tica Observar los adecuados procesos para remover instalar o manipular las tareas y medios de circuitos el ctricos internos Proceso de operacion Desconectar la fuente el ctrica de la unidad 2 La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar sacar o ajustar el circuito impreso el ctrico u otro medio interno 3 El circuito impreso debe ser transportado en embalaje conductivo Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalaci n Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulaci n almacenamiento o devoluci6n a la fabrica Notas Esto equipo no es el Unico contenido de piezas susceptibles a la descarga electroest tica ESD En la mayor a de los medios electr nicos modernos se encuentran piezas fabricadas por tecnologia de xido met lico NMOS SMOS etc Las experiencias confirman que incluso una minima electricidad estatica puede dafar o destruir dichos me
33. posvetiti na izbiro signalnega kabla ki se uporabljajo za naprave z ozna bo CE Kakaovost signalnih kablov povezav kablov priklju kov Brooks Insturment nuja kabele visoke kakovosti ki ustrezajo zahtevam kvalificiranja CE V kolikor se uporbalja lastni signalni kabel treba je izbrati ki za 100 senco v polni meri filtriran Priklju ki D olika kroga morajo biti zasen eni kovonskom sencom e bo potrebno uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba priklju iti na kovinsko ohi je ali pla t in na obe polovici je treba sen iti v 360 Sen enje mora zavr iti v ozemljitvi Priklju ki ki sodijo karitcam normalno nisu kovinskik Kori eni kabli moraju biti filtrirani s 100 senco da odgovarjajo CE kvalifikaciji Sencanje mora imat konec v ozemljitvi Konfiguracija stika Vidi prilo eno navodilo za uporabo Elektrostati no izpra njenje ESD A OPOZORILO Naprava vsebuje take sestavne dele ki so naklonjeni k po kodbi od stati ne elektrike Treba se je dr ati ustreznih postopkov pri odstranjevanju vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov Posotpek rokovanja 1 napravo je treba izklopiti iz elektri nega toka 2 Osebo je treba ozemljiti zapestnim pa ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala jemala ali nastavila kartico za tokovni krog ali drugo notranjo opremo 3 Tiskane kartice tokovnega kroga je treba
34. provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas 1 888 554 FLOW Europe 31 0 318 549 290 C Asia 81 0 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice X VAC CDL eng supersedes A330168 REV 001 08 07 TRADEMARKS BROOKS albi Ai Brooks Instrument LLC iure HP Alloys ODVA Open DeviceNet Vendors Association Inc MODs AEK Aava aamen langes Cajon Co VOR ass mamma n Cajon Co Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 0 318 549 300 T 81 0 3 5633 7100 T 215 362 3700 F 31 0 318 549 309 F 81 0 3 5633 7101 F 215 362 3745 E
35. s des plates un ier ces vai k cit di darbojoties ar t m ir j iev ro noteikta darba k rt ba Darba k rt ba 1 Iek rta j atsl dz no baro anas 2 Pirms jebk das druk tas sh mas kartes vai citas iek j s ier ces uzst d anas iz em anas vai regul anas person lam kas veiks os darbus ir j b t iezem tam piem izmantojot aproces vai citus dro us piem rotus l dzek us 3 Druk t s sh mas kartes ir j transport vado iepakojum Pl ksnes no aizsargkorpusa dr kst iz emt tikai tie i pirms uzst d anas Transport jot uzglab jot vai atgrie ot r pn c no iz emt s pl ksnes ir nekav joties j ievieto aizsargiepakojum Koment ri Instruments nav unik ls taj aspekt ka tas satur pret ESD elektrostatisko izl di jut gus komponentus Vairums m sdienu elektroiek rtu satur komponentus kuru ra o an izmantota met la oks du tehnolo ijas NMOS SMOS u c Pieredze r da ka pat neliels daudzums statisk s elektr bas var nodar t boj jumus d m ier c m vai piln b saboj t t s Boj tie komponenti pat tad ja tie ietami darbojas pareizi ir pak auti tr kai atteicei Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Lithuanian Pagrindines instrukcijos Perskaitykite pries tesdami Brooks Instrument projektuoja gamina ir isbando savo gaminius kad jie at
36. sek elker l se rdek ben kiv ve ha szakk pzett szakember v gez rajta karbantart si munk kat 4 FIGYELEM Folyad kot aramoltat berendez sek eset ben ha b rmilyen okb l el kell z rni a berendez s melletti ki s bel p szelepeket a berendez st teljesen le kell r teni Ennek elmulaszt sa a folyad k h t gul s t okozhatja ami k ros thatja a berendez st s szem lyi s r l shez vezethet Nyom start berendez sekre vonatkoz eur pai ir nyelv PED Minden 0 5 bar n l g magasabb bels nyom s s 25 mm n l vagy 1 h velykn l nagyobb nyom start berendez s a nyom start berendez sekre vonatkoz eur pai ir nyelv PED hat lya al tartozik A g pk nyv M szaki adatok fejezete tartalmaz a PED ir nyelvre vonatkoz utas t sokat A g pk nyvben megadott m r eszk z k megfelelnek a 97 23 EK EU ir nyelvnek Minden Brooks tfoly sm r az 1 es folyad kcsoportba tartozik A 25 mm n l vagy 1 h velykn l nagyobb m r eszk z k megfelelnek a PED I II vagy III kateg ri nak A 25 mm es illetve 1 h velykes vagy kisebb m r eszk z k az elfogadott m rn ki gyakorlatot SEP k vetik Elektrom gneses kompatibilit sra vonatkoz eur pai ir nyelv EMC A Brooks Instrument CE jel l st ki rdemelt elektromos elektronikus berendez sei sikeresen teljes tett k az elektrom gneses kompatibilit si k vetelm nyeket 2004 108 EC 89 336 EGK sz EMC ir nyelv vizsg l teszt
37. staattisesta s hk st Sis isten piirilevyjen purkamisessa asennuksessa ja k sittelyss tulee noudattaa kaikkia m r yksi ja ohjeita Asennusohjeet 1 J rjestelm n s hk t katkaistaan 2 Laitteen kanssa ty skentelev henkil on suojattava s hk iskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sis osan asennusta poistamista tai korjaamista 3 Piirilevyt kuljetetaan konduktiivisessa pakkauksessa Piirilevyt puretaan paketista juuri ennen asennusta Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista varastoimista tai palautusta varten Huomautukset Tuotteen herkkyys elektrostaattiselle purkaukselle ESD ei ole ep tavallista Suurin osa elektroniikkatuotteista sis lt komponentteja jotka hy dynt v t metallioksiditekniikkaa NMOS SMOS jne Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite n ytt isi toimivan normaalisti Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series French Instructions essentielles A lire avant de commencer Brooks Instrument congoit fabrigue et teste ses produits pour r pondre a de nombreuses normes nationales et internationales Ces produits doivent tre correctement install s
38. tous les produits aux sources d lectricit et de pression agr es Utilisation 1 Faites lentement entrer le debit dans le syst me Ouvrez progressivement les vannes de proc d pour viter des pics de d bits 2 V rifiez qu il n y a pas de fuite au niveau des branchements d entr e et de sortie du debitmetre S il n y a pas de fuite amenez le syst me sa pression d utilisation Avant proc der l entretien assurez vous que la conduite de proc d n est plus sous pression Lorsqu il faut remplacer une piece assurez vous que les pi ces de rechange sont celles indiqu es par Brooks Instrument et que des personnes qualifi es effectuent le remplacement Les pi ces et proc dures non autoris es peuvent porter atteinte au fonctionnement du produit et mettre en p ril la s curit de votre proc d Les remplacements par des pi ces d apparence similaire peuvent entra ner des incendies des risques lectriques ou un mauvais fonctionnement V rifiez que toutes les trappes de l quipement sont ferm es et que les couvercles de protection sont en place pour viter les chocs lectriques et les blessures sauf lorsque l entretien est r alis par des personnes qualifi es AVERTISSEMENT dans le cas d appareils coulement liquide si les vannes d entr e et de sortie adjacentes aux appareils doivent tre ferm es pour une raison quelconque les appareils doivent tre compl tement vidang s Si cela n est pas fait une
39. unterliegen der Druckger terichtlinie Das Kapitel zu den technischen Daten in dieser Anleitung enth lt wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckger terichtlinie Messger te die in diesem Handbuch beschrieben sind erf llen die europ ische Richtlinie 97 23 EG Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1 Messger te die gr Ber als 25 mm oder 1 inch sind erf llen die Kategorien Il oder der Druckger terichtlinie PED Messgerate mit einer Gr Be von 25 mm oder 1 inch oder kleiner sind Sound Engineering Practice SEP Europ ische Verordnung zur elektromagnetischen Vertr gli Ger te von Brooks Instrument elektrischer und elektronischer Art mit CE Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Vertr glichkeit EMV Richtlinie 2004 108 EC 89 336 EWG erfolgreich bestanden Dennoch muss bei der Wahl des Signalkabels f r das Ger t mit CE Zeichen auf folgende Dinge geachtet werden Qualit t von Signalkabel Kabeldurchf hrung und Anschl sse Brooks Instrument liefert qualitativ hochwertige Kabel die den Anforderungen f r eine CE Zertifizierung entsprechen Sollten Sie eigene Kabel einsetzen so sollte das Kabel berall mit einer 100 Abschirmung versehen sein D oder Rundstecker sollten eine Metallabschirmung aufweisen Wenn m glich m ssen Kabeldurchf hrungen aus Metall mit Kabelschirmgeflechts Klemmen verwendet werd
40. v i 1 tolli kohaldatakse h id inseneritavasid Euroopa elektromagnetilise hilduvuse direktiiv EM Brooks Instrument i elektrilised elektroonilised seadmed millele on omistatud CE t his on edukalt l binud asjakohased katsed ja vastavad elektromagnetilise hilduvuse n uetele EMU direktiiv 2004 108 EC 89 336 EMU Kuid signaalkaabli valimisel on vaja p rata suurt t helepanu CE t hisega seadmetele Signaalkaabli l biviigutihendite ja konnektorite kvaliteet Brooks Instrument turustab k rgekvaliteedilisi kaableid mis vastavad CE sertifikaadi n uetele Olemasoleva kaabli kasutamisel j lgige et kaabel oleks t ielikult mbritsetud varjestusega D v i Ring t pi konnektorid peavad olema varustatud metallvarjestusega Kus kohaldatav tuleb kasutada metallist l biviike mis tagavad kaabli varjestuse henduse Kaabli varjestus hendatakse metallkesta v i l biviigutihendiga ja on m lemast otsast kaitstud 360 ulatuses Varjestus peab olema maandatud Mikroskeemide serva hendused on ldjuhul mittemetallist Vastavuse tagamiseks CE sertifikaadi n uetele peavad kasutatud kaablid olema 100 varjestatud Varjestus peab olema maandatud Klemmide konfigureerimine vt komplekti kuuluvat kasutusjuhendit Elektrostaatiline laeng T HELEPANU seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente Seadmesse paigaldatud tr kkplaatide eemaldamisel ja paigaldamisel samuti
41. vyr bi a testuje tento produkt tak aby splnil mnoho narodnich a mezin rodnich standard Pfistroje musi byt dn nainstalov ny pou v ny a udr ov ny tak aby byl zaji t n jejich nep etr it provoz v r mci norm ln ch technick ch specifikac Mus te dodr ovat n sleduj c pokyny a integrovat jejich obsah do sv ho bezpe nostn ho programu p i instalov n pou v n a udr ov n produkt spole nosti Brooks Pro zaji t ni spr vne funkce zafizeni mohou jeho instalaci obsluhu programov ni dr bu a aktualizace firmwaru provad t vyhradn kvalifikovan osoby P ed instalac provozem a dr bou produktu si prostudujte v echny pokyny Pokud tato p ru ka nen tou spr vnou p ru kou pro dan za zen informujte se na zadn stran ob lky o kontaktu na m stn prodejn kancel Uchovejte si tuto p ru ku pro pozd j pot ebu UPOZORN N Neprovozujte za zen v rozsahu mimo dan rozsah v provozn p ru ce Poru en tohoto upozorn n m e mit za n sledek v n jmy na zdrav a v st k po kozen za zen Pokud n kterym pokyn m nerozumite kontaktujte sveho prodejniho zastupce spole nosti Brooks vy dejte si objasn ni Dodrzujte vSechny vystrahy upozorn ni a pokyny uveden a vyzna en na produktu nebo s nim dodan Namontujte za zen specifikovan m zp sobem podle spr vn mont n p ru ky a podle platn ch m stn c
42. vysoko kvalitn k ble ktor sp aj po iadavky kvalitat vneho zaradenia CE Ak pou ijete vlastn sign lne k ble maj ma 100 n tienenie s pln m filtrovan m Pr pojky kruhov alebo tvaru D maj ma kovov tienenie V pr pade potreby treba pou i kovov k blov spojky k upevneniu k blov ho filtra K blov filter treba pripoji ku kovov mu telesu alebo k puzdru na oboch stran ch zabezpe i tienenie v kruhu 360 Tienenie m by ukon en uzemnen m Pr pojky ved ce ku kart m pod a noriem s nekovov Pou it k ble pre vyhovenie predpisom CE musia ma 100 n filtrovanie tienen m Tienenie m by ukon en uzemnen m Konfigur cia kontaktov Vi prilo en n vod na obsluhu Elektrostatick v boj ESD UPOZORNENIE Pr stroj obsahuje s iastky ktor m u by po koden od elektrostatick ch n bojov Pri mont i odstra ovan alebo inej dr by vn torn ch obvodov ch kariet je potrebn dodr iava pr slu n postupy Postup o etrovania 1 Zariadenie odpoji od nap jania 2 Osoba vykon vaj ca dr bu m by uzemnen uzem uj cim n ramkom alebo in m na t to pr cu vyhovuj cim sp sobom pred vykon van m in tal cie demont e a nastavenia obvodov ch kariet alebo in ho vn torn ho prostriedku 3 Karty obvodov sa musia prepravova v elektricky vodivom balen Karty sa m u vybera z ochrann ho obalu v lu ne len tesne pred mont ou
43. z ak hoko vek d vodu je nutn uzavrie vstupn a v stupn ventily zariadenie je potrebn plne vypr zdni Zanedbanie vyp ania m za n sledok po kodenie zariadenia s mo nos ou zranenia obsluhy z d vodu tepelnej roz a nosti n plne Eur pska smernica vz ahuj ca sa na tlakov zariadenia PED V etky zariadenia s vy m vn torn m pretlakom ako 0 5 bar 4 a v ieho rozmeru ako 25 mm alebo 1 anglick palec podliehaj pod Eur psku smernicu vz ahuj cu sa na tlakov n doby PED Kapitola Technick daje n vodu na obsluhu obsahuje pr kazy vz ahuj ce sa na smernicu PED Meracie prostriedky uveden v n vode na obsluhu vyhovuj smernici 97 23 ES E V etky prietokomery Brooks patria do 1 skupiny kvapal n Meracie pr stroje presahuj ce rozmery 25 mm alebo 1 sp aj I II alebo III kateg riu PED Meracie pr stroje men ie alebo rovn ako 25 mm alebo 1 zodpovedaj zau vanej meracej praxi SEP Eur pska smernica vz ahuj ca sa na elektromagnetick kompatibilitu EMC Elektrick elektronick zariadenia Brooks Instrument ktor si zasl ili zna ku CE spe ne splnili sk obn testy po iadaviek elektromagnetickej kompatibility smernica EMC 2004 108 EC 89 336 EHS Pritom treba venova zvl tnu starostlivos na v ber sign lnych k blov zariadenia s ozna en m CE Kvalita sign lnych k blov k blov ch spojov a pr pojov Brooks Instrument pon ka
44. 3 BROOKS CMX DESIGN Brooks has created several patented solutions to remedy the above mentioned drawbacks of the simple design described previously refer to Figure 2 1 Use of a diaphragm that is smaller in diameter than in conventional CMs A smaller diaphragm has less mass which makes it less sensitive to shock and vibration Plasma Shield Electrode Guards Ruby Rollers Inlet Gas Tube Molecules Diaphragm Guard Volume Figure 2 Brooks CMX 2 Brooks uses a dual electrode system which incorporates a reference electrode into the design Pressure is determined by a change in the measurement electrode relative to a change in the reference electrode If the spacing between the diaphragm and electrode changes due to thermal expansion of the sensor s chassis both capacitances will change equally thus false capacitance changes brought about by thermal effects can be distinguished from true pressure readings 3 Brooks places a Plasma Shield in front of the diaphragm to protect the diaphragm from the process environment It is an Inconel plate that covers the entire front face of the diaphragm that traps condensable materials before p 4 _DESCRIPTION 2 0 they can deposit onto the diaphragm This shield also protects the diaphragm from thermal radiation 4 Brooks uses a Guard Volume which is an annular vacuum surrounding the sensor This acts as a thermal insulator shielding the sensor from ambient temp
45. A szem lyt f ldelni kell csukl p nttal vagy egy b biztons gos s a c lra alkalmas eszk zzel miel tt ramk ri k rty t vagy egy b bels eszk zt telep tene venne ki vagy ll tana be 3 nyomtatott ramk ri k rty kat vezet k pes csomagol sban kell sz ll tani A k rty k kiz r lag k zvetlen l a behelyez s el tt vehet k ki a v d burkolatb l A kiszerelt k rty t halad ktalanul el kell helyezni a mozgat sra rakt roz sra vagy a gy ri visszasz ll t sra szolg l v d csomagol sba Megjegyz sek Nem egyedi jelens g hogy a k sz l kben elektrosztatikus kis l sre ESD rz keny alkatr szek tal lhat k A legt bb korszer elektronikus eszk zben f moxid technol gi s alkatr szek NMOS SMOS stb tal lhat k A tapasztalatok azt igazolj k hogy m g kis m rt k sztatikus elektromoss g is k ros thatja vagy t nkreteheti ezeket az eszk z ket A k rosodott alkatr szek m g ha l tsz lag megfelel en m k dnek is kezd d hib ra utalnak Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Italian Istruzioni fondamentali Leggerle subito La Brooks Instrument progetta fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali Tali apparecchiature devono essere installate messe in esercizio e tenute in manutenzione in mani
46. ED RANGE The CMX can be configured with Extended Range ER Calibration The ranges that are currently supported for extended range calibration are 10T 50T and 5001 Legacy CMX devices are calibrated from 10 to 100 of full scale pressure over one pressure decade The Extended Range CMX is calibrated from 1 to 100 of full scale over two pressure decades 7 2 EXTENDED RANGE ACCURACY SPECIFICATION The accuracy specification for Extended Range is shown in Table 13 Table 13 CMX Extended Range Accuracy Specifications Accuracy Specification CMXER digital Inlet Pressure mode 1 to 10 0 15 0 006 FS 10 to 100 0 15 0 006 FS Dual decade or extended range calibration enables the CMX to meet strict accuracy specifications in the second pressure decade 1 to 10 in addition to the first decade 10 to 100 Legacy gauges are only calibrated in the first decade 7 3 CMX EXTENDED RANGE CONNECTOR PIN OUT The pin out for the extended Range CMX is shown in Table 14 Note that the pin out for the extended range device is very similar to the IN2 and IN3XP MFCs with a DB9 connector The wiring allows the user to use the CMX with the same DB9 connector wiring that is used for IN2 and IN3XP MFCs Ax CAUTION A The CMXER connector wiring is NOT the same as the legacy CMX DB9 wiring Table 14 Extended Range Pin out CMX Extended Range DB9 Connector Wiring CMX Standard Connector Wiring IN2 an
47. ENET AND NETWORKING ISSUES AND SOLUTIONS There are a number of initialization failure scenarios that can occur with DeviceNet These issues include wrong default assembles or produced and consumed paths incorrect address or baud rate settings network wiring network termination and network power supply problems Several of the more common initialization problems are p 30 _DEVICENET MODELS 6 2 1 Power up LED Sequence Fails If the Module or Network LEDs fail to sequence from OFF to Red to Green as previously described there is either a network power supply problem or the device has most likely experienced an unrecoverable fault The corrective action is to verify that the power supply is providing 11 to 24 volts to the DeviceNet network on the correct cable conductors If the power supply voltage is properly applied and the LEDs do not sequence correctly the device should be returned to the Brooks service center 6 2 2 Sequence Passes Module LED Turns Red If the normal LED flash sequence completes and the Module LED then turns Red there is a problem with the gauge Return the device to the Brooks service center 6 2 3 Sequence Passes Module LED is Green Net LED is Red This situation will occur if there is another device on the network with the same MAC ID or address The Network LED will turn Red if the device initializes after another device has already initialized itself with the same MAC ID The first device that c
48. HAZARD All devices must be properly grounded All devices must be properly grounded to reduce the risk of an electrical shock 1 3 EXPLOSIVE ATMOSPHERE Do not use equipment in an explosive atmosphere The CMX family of products are NOT intended for use in explosive atmospheres 1 4 PART SUBSTITUTIONS AND MODIFICATIONS Do not substitute parts or modify equipment Modifying an instrument in any way not only voids the warranty but could cause a safety hazard and should be avoided Repair work should be done at the factory or by a factory authorized service center 1 5 GENERAL SAFETY GUIDELINES A CAUTION A Always follow established industrial safety practices when operating any production equipment AN CAUTION A Safety is designed into every product When followed these minimum guidelines provide an acceptable level of safety for operating and maintaining your system p 1 _INTRODUCTION They are not however a substitute for determining your own internal safety procedures CAUTION A Use of controls adjustments or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards Always follow established industrial safety practices when operating production equipment 1 5 1 Unsafe acts NEVER defeat a safety interlock unless you are certified to perform the procedure and have been specifically directed to defeat the int
49. Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Heated Digital Capacitance Manometers Brooks CMX Series Heated Digital Capacitance Manometer BROOKS www BrooksInstrument com INSTRUMENT Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 Essential Instructions Read before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards These products must be properly installed operated and maintained to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing operating and maintaining Brooks Instrument products To ensure proper performance use qualified personnel to install operate update program and maintain the product e Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference A WARNING Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual Failure to heed this warning can result in serious personal injury and or damage to the equipment If you do not understand any of the instruction
50. Me with Celerity Verify that the MSDS Iz on 4 Please detal any special handling requirements of which you are aware of below Figure 26 Contamination Disclosure Form Example p 35 Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Bulgarian Brooks Instrument Brooks Instrument
51. UJV TTAAKETUV KAI SIlaTAEEWV xeipiopo 1 O OTE TN OUOKEU EKTOG TGOEWG TN yeiwon rou TTPOOWITTIKOU HE GAAO AOPAAEG KAI KATGAANAO EGO TOTTOBET OETE APAIPEOETE K PTEG TUTTWHEVWV GAAN EOWTEPIKA IATAEN 3 Ol K PTEG TUTTWHEVWV KUKAWH TWY HETAPEPOVTAI CE AYUIYIHO UNIK Ol K PTEG dev VA TIPOOTATEUTIK TTEPIBANHA HOVO AUEOWG GTTO rnv TOTTOBETNON Oi K PTEG Trou TTPETTEI TOTTOBETNAOUV AH OWG OE TTPOOTATEUTIKI cuokeuao a yia aTro8 KEUON EPVOOT GIO map n egapTnHdTwv ora paiv jeva ESD NAEKTPOOTATIKNG EKKEVWONG dev TNG OUOKEUNG AUT G Ol TTEPIOO TEPEG OUYXPOVEG OUOKEU G TTEPI XOUV rexvoAoy ag HETAAAIKWV NMOS SMOS H rreipa EXEI TTOO TNTA OTATIKOU yia TTPOKG OEI BAGBEG KATAOTPEWEI TIG OUOKEUEG Trou BAGBn Kal poraZouv va AEITOUPYOUV KIVOUVE OUV OTT 9 0 Essential Instruction
52. US LED will blink GREEN repeating until ZERO adjustment is completed or aborted If ZEROING is completed successfully the STATUS LED returns to its normal color GREEN and the output signal should be 0 volts 2 mV If ZERO adjustment is aborted the STATUS LED will blink RED three times and return to its normal color GREEN The ZERO adjustment will be returned to the value it had before the ZERO Set push button was depressed p 27 _MAINTENANCE 5 0 5 0 MAINTENANCE AND TROUBLESHOOTING 5 1 CALIBRATION The Brooks CMX has been manufactured tested and is compliant to all requirements of the applicable published specifications All devices used for the manufacture and test of these instruments have traceability to National Institute of Standards NIST according to ISO 10012 1 Digital CMs should be calibrated every 6 12 months depending on the application and actual usage The following factors may affect calibration and may require calibration at more frequent intervals Sensor diaphragm has become contaminated with process material Improper handling dropping misuse etc If the CMX is suspected to have calibration errors return the unit to Brooks for repair calibration 5 2 TROUBLESHOOTING Table 10 Troubleshooting Guide Possible Cause Action Check electrical connection Check cable continuity Verify power supply outputs Check for dents to the enclosure Symptom No output signal No pow
53. WITCH BIAS ADJUST RS 485 PORT RS 485 CONVERTER CMX GUI INTERFACE KIT ADJUST CONTROL Mv Figure 7 CMX Bias Adjustment Control Block Diagram 2 7 CMX OPERATING TEMPERATURES A CMX is heated to a constant temperature to prevent ambient temperature fluctuations from affecting the sensor output signal and prevent the formation of condensable deposits in the measurement chamber and on the diaphragm of the sensor Table 2 is a general guideline for selecting the most suitable CMX for an application For further information contact Brooks for specific recommendations This manual provides information to install and operate the following CMX models Table 1 CMX Model Description Model Description CMX45 Digital CM heated to 45 C CMX100 Digital CM heated to 100 C CMX160 Digital CM heated to 160 C p 8 _DESCRIPTION 2 0 Table 2 CMX Model Application MODEL APPLICATION PROCESS CMX45 CMX100 CMX160 Metal NR R OK Oxide R OK OK Etch Silicon R OK OK Polysilicon Dielectric OK R NR Photoresist R OK OK Metal NR OK R Oxide OK R OK CVD Silicon Poly OK R OK silicon Dielectric NR OK R PVD R OK NR R RECOMMEND OK ACCEPTABLE NR NOT RECOM MENDED 2 8 PRESSURE RANGE SELECTION CRITERIA When selecting a capacitance manometer the measurement range of the instrument should be considered especially if the CMX is part of a closed loo
54. Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert WAARSCHUWING bij vloeistofstroomapparaten waarvan de inlaat en uitlaatkleppen om welke reden dan ook gesloten zijn moet de vloeistof volledig worden afgetapt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn e In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG Alle stromingsmeters van Brooks Instrument vallen in groep 1 Meters met een diameter van meer dan 25 mm voldoen aan de categorie n Il of III van de PED richtlijn Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap Elektromagnetische compatibiliteit EMC De elektronische apparatuur van Brooks Instrument met de CE markering is succesvol getest in overeenstemming met de EMC voorschriften volgens richtlijn 89 336 EEG De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE mar
55. a de la red Si se requiere realizar un recambio de piezas solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro El recambio realizado con piezas s6lo similares pueden traer como consecuencias incendios choques el ctricos o funcionamiento bajo Todas las puertas de instalaci n deben estar cerradas las cubiertas protecci n tienen hallarse en el debido sitio con el fin de evitar los dafios personales y los choques el ctricos salvo cuando un especialista efect a el mantenimiento A ADVERTENCIA En caso de instalaciones que circulen liquido si por cualquier raz n se hubiera de cerrar las v lvulas de entrada y salida situadas al lado del equipo dichas instalaciones deber n ser completamente vaciadas La omisi n de esto ltimo puede provocar la dilataci n termica del liquido lo que puede dafiar al equipo conducir a dafios personales Directriz Europea de los Equipos de Presi n PED Todos los equipos de presi n con una presi n interna que supere 0 5 bar g con mayor a 25 mm 1 pulgada entran el ambito de la Directriz Europea de los Equipos de Presi n PED El capitulo Datos T cnicos del manual incluye las instrucciones respecto a las directivas de PED Los instrumentos de medici n indicados en el Manual responden a la
56. a relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e pi grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED Il capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97 23 CE Ogni flussimetro Brooks appartiene al di fluidi 1 Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria Il III della PED _ Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP Sound Engineering Practice Direttiva europea relativa alla compatibilit elettromagnetica EMC Le apparecchiature elettriche elettroniche Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilit elettromagnetica Direttiva EMC 2004 108 EC 89 336 CEE In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE Qualit dei cavi di segnale dei pressacavi e dei connettori La Brooks Instrument offre cavi d alta qualit conformi ai requisiti della certificazione CE Qualora vengano utilizzati cavi di segnale propri devono essere scelti con schermatura al 100 e interamente filtrati I con
57. acturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can
58. ada ao corpo metalico ou bocal e ambas as suas metades devem estar blindadas em 360 A blindagem deve terminar numa ligag o a terra Os conectores ligados a cart es ser o em geral n o met licos Os cabos utilizados devem ter fita de blindagem a 100 para satisfazer a marcag o CE A blindagem dever terminar numa ligag o terra Atribui o de pinos Veja as instru es de opera o anexas Descarga Electrost tica ESD CUIDADO O equipamento cont m pe as que s o suscept veis a danos causados pela electricidade est tica Durante a remo o coloca o ou outras manipula es dos cart es de circuitos electr nicos dever o observar se os procedimentos adequados Procedimento de manuseio 1 Desligar o equipamento da rede 2 utilizador antes de qualquer interven o remo o de circuitos ou ajustes em cart es de circuitos ou em outros dispositivos internos tem que ligar se terra por meio duma bracelete de pulso ou outro dispositivo adequado 3 Os circuitos impressos dever o ser transportados em embalagem condutiva Os cart es s dever o ser retirados da embalagem protectora imediatamente antes da sua inser o O cart o retirado dever ser recolocado imediatamente na embalagem protectora que servir para o seu transporte armazenagem ou retorno a f brica Observa es O equipamento n o nico enquanto portador de pe as sens veis descargas electrost ticas ESD Na maioria dos disposit
59. agnetinio suderinamumo EMC reikalavimai enklu pazym ta Brooks Instrument elektrin elektronine jranga buvo s kmingai i bandyta pagal elektromagnetinio suderinamumo reikalavimus EMC direktyva 2004 108 EC 89 336 EEB Bet reikia ypatingo d mesio renkantis signalizavimo kabelj kuris bus naudojamas su CE Zenklu pazymeta jranga Signalizavimo kabelio kabeliy riebok liu ir jung iu kokybe Brooks Instrument tiekia kokybi kus kabelius kurie atitinka CE sertifikavimo specifikacijas naudojate savo signalizavimo kabeli jis turi visi kai ir visas ekranuotas 100 ekranu Naudojamos arba apskrito tipo jungtys turi b ti ekranuotos metaliniu ekranu Jei taikoma reikia naudoti metalinius kabeliu riebok lius u tikrinan ius kabelio ekrano suspaudima Kabelio ekrana reikia jungti prie metalinio apvalkalo ar riebokSlio ir ekranuoti abiejuose galuose 360 laipsniu Ekranas turi baigtis jZeminimu Standartines kraStin s jungtys yra ne metalin s Naudojami kabeliai turi b ti ekranuoti 100 ekranu kad atitikty CE sertifikavima Ekranas turi baigtis j eminimu Keturiy kontakty konfig racija Zr prideta instrukcija ESD elektrostatinis i lydis A PERSPEJIMAS iame prietaise elektroniniy komponenty kuriuos gali sugadinti statin elektra ISimant jdedant vidines spausdintines plokstes ar jrenginius arba atliekant su jomis kitus darbus reikia laikytis tinkamu darbo proced r
60. alvorlige personskader eller brist pa udstyret Hvis vejledningerne ikke er forst elig kontakt venligst Deres Brooks repreesentant for at afklare problemet som er opst et Overhold alle regler som er markeret eller leveret sammen med udstyret Installer udstyret efter den angivne installationsvejledning og geeldende lovgivning for anvendelsesomrade Udstyret ma kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen Ibrugtagning 1 Abn langsomt for trykket i systemet Abn langsomt for alle procesventiler for at forhindre ustabil gas flow 2 Tjek systemet for l kage ved tilsluttet m leinstrumenter samlinger og andet tilsluttet udstyr Derefter ag trykket i systemet indtil arbejdstrykket er opn et For reparation tjek altid at procesledningen ikke star under tryk Hvis der er brug for at udskifte defekte dele ma kun kvalificeret personale udfare arbejdet og af sikkerhedsmeessige arsager ma der kun anvendes originale Brooks reservedele Det er ikke tilladt at anvende reservedele eller udfare arbejde der nogen made kan eendre produktet fra dens oprindelige specifikationer Manglende overholdelse af de foreskrevne procedurer kan resultere i breend og fare for elektrisk stad eller kortslutning Af sikkerhedsmeessige rsager sarg for at alle sikkerhedsforanstaltninger er overholdt Eksempelvis at alle afskaermninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift A
61. appear to function properly exhibit early failure Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG E January 2011 Brooks CMX Series Dear Customer We appreciate this opportunity to service your measurement and control reguirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liguid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest guality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy reguirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you reguire any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 THIS PAGE WAS INTENTIONALLY LEFT BLANK
62. ause personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Specifications Section of this manual contains instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with PED category Il or Ill Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP European Electromagnetic Compatibility EMC The Brooks Instrument electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility 2004 108 EC EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks Instrument supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at bot
63. azione elettrica Procedimento 1 mettere lentamente sotto pressione il sistema Aprire lentamente le valvole di servizio per evitare oscillazione del flusso 2 Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso Se non ci sono perdite caricare il sistema alla pressione d esercizio Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione Se avete bisogno di pezzi di ricambio il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument Attivit e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza La sostituzione con pezzi di ricambio non originali pu causare incendi pericolo di scosse elettriche o funzionamento improprio Tutti sportelli dell impianto devono essere chiusi le di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali tranne quando il personale specializzato esegue lavori di manutenzione ATTENZIONE In caso di apparecchiature in cui scorre un liquido se per qualsiasi motivo bisogna chiudere le valvole d entrata e d uscita accanto all apparecchiatura allora si deve svuotare completamente apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europe
64. cu toate c n aparen sunt func ionale duc n timp la defec iuni incipiente Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Slovak Z kladne prikazy Precitat pred in tal ciou Brooks Instrument svoje vyrobky projektuje vyraba a testuje takym sp sobom aby tieto vyhoveli domacim aj medzinarodnym normam Tieto zariadenia je potrebn predpisanym sp sobom instalovat prevadzkovat a udr iavat na zabezpe enie ich spolahlivej a normalnej prev dzky celom pracovnom rozsahu Ni ie uveden pr kazy je potrebn dodr iava a za leni do programu bezpe nostn ch predpisov v priebehu in tal cie prev dzky a dr by v robkov Brooks Instruments V z ujme zabezpe enia vyhovuj ceho v konu in tal ciu prev dzku programovanie aktualiz ciu a dr bu zariaden m vykon va v lu ne odborne kvalifikovan person l Pred in tal ciou prev dzkou a servisu zariaden je potrebn pre ta v etky pr kazy Ak t to pr ru ka nie je spr vna tak na zadnej strane treba n js miestneho distrib tora kontaktova ho pre al ie inform cie Pre neskor ie inform cie uschovajte pr ru ku UPOZORNENIE Neprev dzkova zariadenie v rozsahu mimo rozsahu uvedenom v prev dzkovej pr ru ke Poru enie tohto ozn menia m e mat za n sledok a k ujmu na zdrav a vedie k po kodeniu zariadenia e Ak
65. d IN3XP Connector Wiring D A Not Connected N A Pressure Output Valve Voltage 0 5VDC Pressure Output 0 10VDC Not Used Flow Output 0 5VDC 15VDC Temperature status TTL 15VDC Power Supply Common 15VDC Power Supply Common 15VDC 15VDC 15VDC Not Connected N A Case Ground Setpoint 0 5VDC Signal Common Remote Zero Signal Common RS 485 Positive Signal Ground RS 485 Positive RS 485 Negative Power Supply Common RS 485 Negative p 32 _EXTENDED RANGE 7 0 The series communication port signals are included in the DB9 connector which enables the user to communicate to the device over the same cable as is used for power and analog pressure output Contact Brooks regarding questions concerning the digital communications protocol p 33 _SERVICE AND RETUR 8 0 In order to protect our technical support staff we MUST know all of the chemicals to which the Brooks CMX you are returning has been exposed This information will help us determine if special handling is required to process your repair As a result you MUST complete and submit a Contamination Disclosure Form when you return your Brooks CMX for service NOTE a copy of this form is provided in this manual Place a copy of the completed Contamination Disclosure Form on the outside of the shipping container and place the original inside the ship
66. da ainult kvalifitseeritud personal kasutades selleks Brooks Instrumenti poolt heakskiidetud varuosi Mitteoriginaalvaruosade kasutamine ja ebap dev toimingute tegemine v ivad kahjustada toote t omadusi ja p hjustada riski tootmistegevuse ohutuse tagamisel Originaalvaruosadele sarnaste osade kasutamine v ib p hjustada tule v i elektril giohtu v i seadme v rtalitlust Elektril gi ja vigastuseohu v ltimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal va seadme hooldamisel kvalifitseeritud isikute poolt 4 HOIATUS voolava vedelikuga seadmete kasutamisel kui seadmega k lgnevad sisend ja v ljundklapid on vaja mingil p hjusel sulgeda tuleb seadmed vedelikust t iesti t hjaks lasta Vastasel korral v ib vedelik soojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada t siseid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele surveseadmetele mille sisesurve on le 0 5 baari g ja l bim t le 25 mm v i 1 tolli K esoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid K esolevas kasutusjuhendis kirjeldatud m turid vastavad EN direktiivi 97 23 EU n uetele Brooks Instrument i voolukulum turid kuuluvad vedelike 1 gruppi M turid l bim duga le 25 mm v i 1 tolli vastavad surveseadmete direktiivi kategooriale Il v i III M turitele l bim duga alla 25 mm
67. dios Las piezas averiadas aunque funcionen aparentemente bien indican una falla inicial 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 Swedish V sentliga anvisningar L s detta innan du forts tter Brooks Instrument konstruerar tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder Dessa produkter m ste installeras p r tt s tt handhas och underh llas f r att de skall fungera kontinuerligt enligt deras normala specifikation De f ljande anvisningarna b r f ljas och integreras till Ert s kerhetsprogram varje g ng n r Brooks Instruments produkter installeras handhas och underh lls F r att garantera angiven funktion kvalificerad personal till att installera handha uppgradera programmera och serva produkten Las alla instruktioner innan produkten installeras startas upp och underhalls Om du finner att denna instruktionshandbok inte r den ratta instruktionsboken titta p i slutet av parmen f r information om hur man kan kontakta lokala representanter Spara denna instruktions manual f r senare behov 4 VARNING K r inte detta instrument utanf r dess specifikationer som r angiven i Instruktionsboken Undvikande att ta denna varning kan leda till allvarliga personliga skador och eller skada utrustningen Om du inte f rstar nagon av dessa inst
68. dnich r de energii elektrycznej oraz ci nienia e Pierwsze czynno ci obstugowe 1 Nale y powoli w czy przep yw w instalacji Nast pnie powoli otworzy zawory robocze tak aby unikn waha przep ywu 2 Nale y teraz sprawdzi czy nie wyst puj nieszczelno ci przy pod czeniach wej ciowym i wyj ciowym miernika przep ywu Je eli nie ma adnych nieszczelno ci mo na zwi kszy ci nienie w instalacji do warto ci ci nienia roboczego e Przed przyst pieniem do czynno ci serwisowych nale y upewni sie e ci nienie robocze jest od czone Je eli konieczna jest wymiana cz ci zamiennych nale y zawsze stosowa cz ci zamienne specyfikowane przez firm Brooks Instrument a czynno ci ich wymiany powinien w ka dym przypadku dokonywa przeszkolony personel Stosowanie nieautoryzowanych cz ci i procedur serwisowych mo e niekorzystnie wp yn na dzia anie produktu oraz zagrozi bezpiecze stwu instalacji Korzystanie z podobnie wygl daj cych zamiennik w mo e doprowadzi do po aru pora enia pr dem lub nieprawid owego dzia ania urz dzenia e gt Nale y upewni sie e wszystkie otwory urz dzenia s zamkni te a os ony umocowane na swoich miejscach aby zapobiec obra eniom cia a lub pora eniu pr dem personelu Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj cego prace serwisowe lub konserwacyjne A OSTRZE ENIE W przypadku miernik w przep ywu cieczy je eli znajduj ce s
69. e 25 mm sau 1 tol corespund categoriei PED Il sau III Mijloacele de m surare mai mici de 25 mm sau 1 tol se conformeaz practicii inginere ti acceptate SEP Directiva european privitoare la compatibilitatea electromagnetic EMC Instala iile electrice electronice ce poart marca Brooks Instrument CE ndeplinesc cu succes cerin ele testelor de verificare ale compatibilitatji electromagnetice Cf directivelor europene EMC cu nr 2004 108 EC 89 336 EGK n acela i timp trebuie acordat o aten ie deosebit la alegerea cablurilor de semnalizare utilizate pentru instala iile ce poart marcajul CE Calitatea cablurilor de semnalizare a leg turilor prin cablu i a conectoarelor Brooks Instrument ofer cabluri de calitate ridicat care corespund cerin elor calitative ale CE n m sura n care folosi i cabluri proprii trebuie alese acelea care sunt 100 ecranate i prev zute cu filtre Conectoarele D sau cele circulare trebuie sa dispun de ecrane metalice In caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu Filtrul de cablu trebuie conectat la carcasa metalic sau man on i n ambele cazuri trebuie asigurat ecranarea la 360 Ecranarea trebuie terminat cu o legare la p m nt Conform standardului conectoarele apar in nd pl cilor electronice nu sunt metalice Cablurile folosite trebuie s fie 100 ecranate i prev zute cu filtre pentru a corespunde cla
70. e immediatamente nell imballaggio protettivo per la movimentazione l immagazzinamento o resa alla fabbrica Note E un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica ESD Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo ossido NMOS SMOS ecc Le esperienze dimostrano che l elettrostaticit anche in piccola misura pu danneggiare o rovinare gli strumenti componenti danneggiati anche se all apparenza funzionano correttamente potrebbero manifestare il difetto rapidamente 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 Latvian Svariga instrukcija Pirms turpinat izlasiet Brooks Instrument projekt razo un parbauda savus razojumus atbilstosi daudziem nacionalajiem un starptautiskajiem standartiem Lai nodroSinatu So izstradajumu turpm ku darbibu atbilsto i noteiktajiem parametriem tie ir pareizi jauzstada jalieto un jaapkopj Uzstadot lietojot Brooks Instrument izstr d jumus un veicot to apkopi ir j iev ro Sie nor d jumi un j iek auj tie j su dro bas programma Lai nodro in tu pienacigu izstradajuma sniegumu izstradajuma uzst disanu lieto anu atjaunin anu programm anu un apkopi uzticiet veikt tikai kvalific tam personalam Pirms izstradajuma uzst di anas lieto anas un apkal
71. e open position and water tows through tne LFC Repeat purging inree times Test the water and LFC Limes paper except HF which is testec with a fluoride test strip HF Is a weak acid and may not show on paper Limus paper should show a pH of 5 0 to 5 5 depending on acid or baze prior use must be cycle purged to ensure removal of si gas contaminason Ensure valve Is In the open position during purging residual contamination gas resctec wit moisture In air is detected test It with Stmus paper The DH must be between 50 and 3 5 and Hnot then purge and clean assembly unti a Ilmus paper test is win lim kz If an acid fucride gas was In contact wiin the MEC MFM then It most also be tested with a fluoride test strip unti negative for MegaSys paris must be fully cecontaminated by purging with DI water unt residual water drained from the part tests between 5 0 and 8 5 with pH paper If fluoride was used then It must also test negative for fiucrice using a fluorice test strip Exception For LFCs only If the LFC Is retumed without decontamination for QA assessment the customer as shipper must ensure X is packaged manifested shipped according to DOT U S Department of Transportation CPR AS past 173 and eae sachar Note Mat cen OMAS con be steeped by round transportation 3 List all chemicals Introduced into tne system Material Safety Data Sheets MSOS must be provided rot already ce
72. e profesional agreat de Brooks Instrument Utilizarea altor piese de schimb dec t cele originale si licentiate poate avea efecte asupra performan elor instala iei i asupra siguran ei sale n exploatare Utilizarea de piese asem n toare de substituire poate avea ca rezultat pericol de incendiu i electrocutare n toate cazurile toate u ile instala iei trebuie s fie nchise cu tile de protec ie s fie puse la locurile lor pentru evitarea electrocut rii gi r nirii de persoane except nd situa iile c nd un specialist efectueaz lucr ri de ntre inere A ATEN IE n cazul instala iilor cu flux de fluide dac din orice motiv este necesar nchiderea valvelor de intrare i ie ire limitrofe instala iei instala ia trebuie complet golit Neglijarea acestui lucru poate avea ca efect dilatarea termic a fluidului care poate defecta instala ia i poate produce r niri de persoane Directiva european pentru instala iile sub presiune PED Toate instala iile i sistemele presurizate ce se afl sub presiuni interne ce dep esc 0 5 mbar 9 i au mai mult de 25 mm sau 1 tol cad sub inciden a normei europene corespunz toare PED La capitolul Date tehnice din cartea ma inii se g sesc indica iile corespunz toare directivei PED Mijloacele de m surare men ionate n cartea ma inii corespund directivei 97 23 EK EU Toate debitmetrele Brooks corespund clasei 1 de fluide Mijloacele de m surare mai mari d
73. ection established and the Ready Temperature status indicator should be Amber unit is warming up to the proper operating temperature _INSTALLATION 3 0 e Green unit is at the proper operating temperature Red unit is over the proper operating temperature or at a fault condition 1 After assuring power has been removed to the system connect the appropriate 9 pin Figure 23 and 5 pin connector Figure 24 If no connector cable is available use one the following pin out table for construction of one Connect the 9 pin cable to the CMX Hand tighten the lock screws to secure the connector Connect the DeviceNet cable to the CMX c Hand tighten the connector PIN PIN ASSIGNMENT Output signal No connection Temperature status Not Used Not Used Chassis ground Remote ZERO trigger Signal common Not Used a T O O 9 Pin D Sub rale Connector Option 3 Figure 23 DeviceNet Model 9 Pin D Sub Connector Pin Out Consult local documentation for DeviceNet communications details 3 7 1 DeviceNet SET UP Example Issue the following commands in the order shown to set up the DeviceNet communication connections 1 Verify the baud rate and MAC ID address is set properly 2 Allocate the explicit connection 3 Set expected packet rate epr for explicit connection to 0 no time out NOTE this step is optional Allocate t
74. ei ole vuotoa aseta oikea k ytt paine Tarkista ett laitteeseen menev paine on katkaistu ennen laitteen korjaamista v ltt ksesi killisen painep st n aiheuttaman loukkaantumisriskin Mahdollisten varaosien tulee olla Brooks Instrumentin hyv ksymi Vain valtuutettu huoltohenkil saa asentaa varaosat Ei hyv ksyttyjen varaosien k ytt voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin Samoin ei hyv ksyttyjen varaosien k ytt voi aiheuttaa tulipalon s hk iskun tai virhetoiminnan riskin e Varmista ett kaikki kaikki laitteen ovet luukut ovat suljettuina ja tarkista ett suojakannet ovat paikoillaan est ksesi mahdollisen s hk isku ja loukkaantumisvaaran A VAROITUS Jos j rjestelm ss virtaa neste ja laitteen sis n ja ulosmenoventtiilit pit sulkea laite on ensin tyhjennett v kokonaan Tyhjent misen laiminly nti aiheuttaa nesteen l mp laajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED PED direktiivi koskevat m r ykset l ytyv t k ytt oppaan Tekniset tiedot luvusta K ytt oppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhm n 1 Laitteet jotka ovat su
75. eket Ugyanakkor k l n s figyelmet kell ford tani a CE jel l s berendez sekhez felhaszn lt jelk belek kiv laszt s ra A jelk belek k bel sszek t k csatlakoz k min s ge A Brooks Insturment magas min s g k beleket k n l melyek megfelelnek a CE min s t s k vetelm nyeinek Amennyiben saj t jelk belt alkalmaznak olyat kell v lasztani amely 100 os rny kol ssal teljes m rt kben sz rt A D vagy k r alak csatlakoz knak f m rny kol val rny koltnak kell lennie Sz ks g eset n f m k bel sszek t ket kell alkalmazni a k belsz r r gz t s re A k belsz r t a f m h zhoz vagy h velyhez kell csatlakoztatni s mindk t fel n 360 ban le kell rny kolni Az rny kol snak f ldel sben kell v gz dnie A k rty khoz tartoz csatlakoz k szabv nyosan nem f mesek Az alkalmazott k beleknek 10096 s rny kol ssal sz rteknek kell lenni k hogy megfeleljenek a CE min s t snek Az rny kol snak f ldel sben kell v gz dnie Erintkez konfigur ci L sd a mell kelt kezel si utas t st Elektrosztatikus kis l s ESD A VIGY ZAT A k sz l k olyan alkatr szeket tartalmaz melyek hajlamosak a sztatikus elektromoss g okozta k rosod sra Be kell tartani a megfelel elj r sokat a bels ramk ri k rty k s eszk z k elt vol t sa behelyez se vagy egy b kezel se sor n Kezel si elj r s 1 A berendez st ramtalanitani kell 2
76. em egyertelmiek l pjen kapcsolatba Brooks Instrument k pvisel j vel hogy tiszt zz k a problem t Tartsa be berendez sen felt ntetett vagy azzal egy tt sz llitott sszes figyelmeztet st felhiv st s utasit s e megfelel telep t si utas t sban megadott utas t sok valamint a hat lyos helyi s nemzeti el r sok szerint telep tse a berendez st A term keket kiz r lag a megfelel elektromos s nyom sell t forr sra k sse Menete 1 Lassan helyezze nyom s al rendszert Lassank nt nyissa az szelepeket az raml singadoz s elker l se rdek ben 2 Ellen rizze nincs e sziv rg s az aramlasm r be s kimeneti bek t sein l Ha nincs szivargas t ltse fel a rendszert az zemi nyom sra e Szervizeles el tt mindenk ppen ellen rizze hogy az zemi vezet k nincs e nyom s alatt Amennyiben cserealkatr szekre van sz ks g mindenk ppen szakk pzett szem lynek kell kezelnie a Brooks Instrument ltal meghat rozott cserealkatr szeket A nem enged lyezett alkatr szek s tev kenys gek befoly solhatj k a term k teljes tm ny t illetve vesz lyeztethetik a biztons gos zemeltet st A puszt n hasonl alkatr szekkel t rt n helyettes t s t zet ram t svesz lyt vagy el gtelen m k d st eredm nyezhet e berendez s sszes ajtaja mindenk ppen legyen z rva ved burkolatok pedig legyenek a hely k n az ram t s s a szem lyi s r l
77. em vy m ne 0 5 baru g a velikosti v t ne 25 mm nebo 1 palec se vztahuje platnost sm rnice o tlakov m za zen PED Kapitola Technick daje v t to p ru ce obsahuje d le it bezpe nostn a provozn pokyny souvisej c se sm rnic PED M ic p stroje popsan v t to p ru ce jsou v souladu se sm rnic EN 97 23 ES V echny pr tokom ry spole nosti Brooks Instrument spadaji do ramce Kapaliny skupina I M ic p stroje v t ne 25 mm nebo 1 palec jsou v souladu se sm rnic PED kategorii Il nebo III M ic p stroje s velikost 25 mm nebo 1 palec a men spadaj do r mce Spr vn ch technick ch postup SEP Evropsk sm rnice pro elektromagnetickou kompatibilitu EMC Elektrick elektronick za zen Brooks Instrument nesouc zna ku CE bylo sp n testov no dle p edpis pro elektromagnetickou kompatibilitu sm rnice EMC 89 336 EHS V b ru sign ln ch kabel pro pou it se za zen m ozna en m CE je nutn v novat zvl tn pozornost Kvalita sign ln ch kabel kabelov ch pr chodek a konektor Brooks Instrument dod v vysoce jakostn kabely spl uj c po adavky kvalitativn ho za azen CE Pokud chcete pou t vlastn sign ln kabely zvolte typy s kvalitn m st n n m v ech il a v cel d lce trasy V p pad pou it konektor kruhov ch nebo tvaru D mus m t tyto
78. en Der Kabelschirm sollte an die Metallh lle oder durchf hrung angeschlossen werden und an beiden Enden rundherum 360 abgeschirmt werden Die Abschirmung sollte geerdet werden Randstecker auf Platinen sind standardm Big nicht aus Metall Die verwendeten Kabel m ssen mit einer 100 Abschirmung versehen werden um die CE Vorgaben zu erf llen Die Abschirmung sollte geerdet werden Klemmenbelegung Siehe beigef gtes Handbuch ESD Elektrostatische Entladung ACHTUNG Dieses Ger t enth lt elektronische Komponenten die durch elektrostatische Entladungen besch digt werden k nnen Ordnungsgem Be Verfahrensanweisungen m ssen w hrend des Ausbaus der Installation oder anderer Handhabung der eingebauten Platinen oder Ger te eingehalten werden Verfahrensanweisung 1 Trennen Sie das Ger t von der Stromversorgung 2 Das Personal ist vor dem Einbau Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden 3 Platinen sind in speziellen Beh ltern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern Platinen d rfen erst kurz vor dem Einbau aus der Schutzh lle entfernt werden Ausgebaute Platinen m ssen umgehend in Schutzbeh lter zum Transport zur Lagerung oder R cksendung an das Werk gelegt werden Anmerkung Dieses Ger t ist wie viele andere elektronische Ger te auch mit Komponenten best ckt die anf l
79. er Fluctuating Zero Temperature fluctuations Check for varying temperature sources Power supply fluctuations Check power supply regulation Fluctuating output signal Electrical noise Check power supply regulation Verify cable grounding and shields Pressure control system Check pressure control system Excessive vibration Reduce vibration N Zero offset Verify electrical zero at zero pressure Sa vena too low Power input wrong Verify power voltage levels Grounds Check signal and power grounds T Chamber outgassing Re pump system to base pressure Positive output drift me Leak in chamber Eliminate chamber leak Negative drift Chamber pumping down Re zero sensor after pump down Leaky sensor Return device for repair Cannot zero CMX Not at base pressure Verify chamber is at base pressure Temperature not in range Wait for Green READY LED to illuminate Improper ground Check signal and power grounds Device malfunction Return device for repair Orientation Check or replace calibration position see note below NOTE For 1 Torr and sub 1 Torr full scale ranges CMX the specific mounting orientation for the device is specified for optimal performance Model number containing V in it stands for vertical mounting Without letter V in model number implies a horizontal mounting 5 3 CLEANING Cleaning
80. era adeguata affinch operino in conformita alle loro normali specifiche di funzionamento Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l installazione il funzionamento e la manutenzione dei prodotti Brooks Instrument Per garantire un adeguato rendimento l installazione il funzionamento aggiornamento la programmazione e manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato Leggere tutte le istruzioni prima dell installazione utilizzo e manutenzione del prodotto Se questo manuale non quello relativo al Vostro prodotto cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni Conservare il presente manuale per future consultazioni ATTENZIONE Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d Uso L inosservanza pu causare gravi lesioni alle persone e o danni all apparecchiatura Qualora le istruzioni del manuale siano chiare contattare un rappresentante della Brooks Instrument chiarire il problema Rispettare tutti gli avvisi le istruzioni e gli avvertimenti riportati sull apparecchiatura o forniti insieme ad essa Installare apparecchiatura in base alle istruzioni riportate nel Manuale Uso e alle prescrizioni locali e nazionali in vigore Collegare i prodotti esclusivamente ad un adeguata sorgente di pressione ed aliment
81. erature variations and also as a trash collector for condensable and deposited process residual matter 5 Electrodes can behave as antennae for RF radiation and strong magnetic fields Brooks places Electrode Guards on the electrodes as protection against these interferences 6 Ruby Rollers have been added to reduce the frictional forces thermal expansion stress and vibration effects on the measurement electrode which can cause shifts and distortions in the indicated pressure readings 7 Brooks creates a consistent stable thermal environment for the sensor by use of heaters This increases stability especially in lower ranges reduces condensation on sensing diaphragm through heating the sensor to a slightly greater temperature than the process When using a heated manometer Brooks recommends use of an isolation valve to prevent loss of heat when the chamber and thus the manometer is vented to atmosphere 2 4 DESIGN OVERVIEW Brooks CMXs are typically used in conjunction with pressure controllers such as the Brooks s ACX and Intellisys Series or digital displays to display the measured pressure The use of heated CMX may require a power supply booster to provide the additional power necessary to operate the heater Figure 3 shows a typical configuration using the Brooks CMX Downstream Control Process CM PROCESS CHAMBER Mass Flow Throttle Controllers 7 Valve Setpoint Vacuum from System
82. erlock operate or service this system without a thorough knowledge of the dangers involved and the precautions to be followed for safe and efficient operation NEVER disregard instructions to lockout tagout the system NEVER permit unauthorized or untrained personnel to use the system NEVER STAND IN WATER OR ON A WET SURFACE WHILE OPERATING ANY ELECTRICALLY POWERED EQUIPMENT NEVER place your hands near moving parts or energized parts or subsystems Components can move rapidly NEVER remove a warning label from the equipment NEVER operate damaged equipment NEVER permit unauthorized or untrained personnel access to the system 1 5 2 Recommended practices USE THE BUDDY SYSTEM ALWAYS perform maintenance procedures in teams of two or more people one to monitor the controls and indicators and one to watch the system operation ALWAYS observe all warning labels ALWAYS avoid all unsafe acts A CAUTION A Use of controls adjustments or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards AN CAUTION A The safety procedures described in this manual are minimum guidelines It is believed that these guidelines will provide an acceptable level of safety These guidelines however should not be considered a substitute for determining your own internal safety procedures in consultation with a competent saf
83. ero 1 2 Brooks Instrument
84. ert werden wenn Sie Brooks Produkte installieren bedienen und warten Um die entsprechende Leistung zu gew hrleisten setzen Sie qualifiziertes Personal fir die Installation den Betrieb die Aktualisierung Programmierung und Wartung des Produkts ein Lesen Sie alle Anweisungen bevor Sie das Produkt installieren in Betrieb nehmen und warten Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt schauen Sie bitte auf der R ckseite nach den Kontaktdaten Ihres Vertriebsb ros vor Ort Bewahren Sie dieses Handbuch auf falls Sie sp ter etwas nachschauen m chten WARNUNG Dieses Ger t nicht auBerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben Wird diese Warnung nicht beachtet kann dies zu schweren Personensch den bzw Sch den des Ger tes f hren Falls Sie Anweisungen nicht verstehen wenden Sie sich zur Kl rung an Ihren Brooks Instrument Vertreter Befolgen Sie alle Warnhinweise und Anweisungen die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden Installieren Sie Ihr Ger t wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gem B der g ltigen regionalen und nationalen Gesetze SchlieBen Sie alle Produkte an eine geeignete Strom und Druckluftversorgung an Bedienung 1 Langsam den Zufluss zum System starten Die Ventile langsam ffnen um einen sprunghaften Anstieg der Durchflussmenge zu verhindern 2 Bereich der Anschl sse
85. ery period Although not required to protect the CMX from damage it is strongly recommended that heated CMXs with less than a 10 Torr full scale range be used with a properly sized isolation valve 4 0 OPERATION 4 1 OPERATING PRECAUTIONS It is important to operate the CMX within the designed mechanical specifications in order to reduce the possibility of erroneous readings The operating precautions must be followed 4 2 POWERING THE CMX Refer to Specifications beginning on page 10 The power may be supplied from a variety of Brooks controllers or directly from a secondary power supply that is regulated to within 5 of 15 VDC and can supply the current required for the CMX 1 Turn the gauge on by applying power to the device 2 The heaters will start warming the device refer to DEVICE WARM UP on page 26 The device s temperature is automatically maintained internally see Figure 25 Temperature vs LED State on Page 26 3 The Temperature LED READY FAULT WARM UP will be solid Amber then change to flashing Amber during the warm up period and turn to Green upon the device s reaching operating temperature 4 Once the gauge is up to temperature and the system at recommended base vacuum ZERO the CMX if the gauge is being placed into operation for the first time or after a shut down of the system The temperature indicator status can also be monitored remotely through pin 1 of the DB15 connector or through p
86. es are 0 63 and P Programmable LSD ADDRESS Least Significant address Digit MAC ID ANALOG MODELS For RS 485 Diagnostics Port Valid addresses are 0 31 DEVICENET MODELS Valid addresses are 0 63 9 PIN D SUB MALE Power analog pressure signal 15 PIN D SUB MALE Power analog pressure signal and relay contacts WARN UP ULE Temperature of heater indicator LED Warm up Amber At Temperature Green Fault Red RELAY 1 Relay 1 status When relay is energized LED is lit Green Only on analog relay models RELAY 2 Relay 2 status When relay is energized LED is lit Green Only on analog relay models MOD STATUS Module Status LED per DeviceNet definition Only on DeviceNet models NET STATUS Network Status LED per DeviceNet definition Only on DeviceNet models RATE Sets to DeviceNet data rate 1 125kbps 2 250 kbps 5 500kbps P Program mode Only on DeviceNet models S CONNEC Micro style connector for DeviceNet power and communications p 17 _DESCRIPTION 3 0 As CAUTION 4 DO NOT mount the CMX with the inlet tube port facing upward see Figure 19 The sensing diaphragm may be damaged by process contam ination which will adversely affect the operation and will void the warranty A WARNING A The CMX may not be used in any application where it may be exposed to conditions or materials that could cause damage to the device or inju
87. ety professional p 2 _DESCRIPTION 2 0 NOTICE From this point forward the CMX Series Heated Digital Capacitance Manometers will be referred to in general terms as the CMX or CM 2 0 DESCRIPTION 2 1 BASIC DESIGN The CMX also referred to as a capacitance manometer CM is a pressure measuring instrument that senses a change in process pressure It does this by measuring the change in capacitance caused by a change in deflection of a tensioned diaphragm The basic design of the CMX sensor is shown in Figure 1 A thin metal diaphragm is welded into a sealed sensor assembly where it is maintained at a fixed distance from an electrode The area behind the diaphragm including the electrode is known as the reference side of the sensor It may be kept at an ultrahigh vacuum for an absolute gauge or it may be connected to another source of pressure or vacuum to function as a differential gauge The front side of the diaphragm is exposed to the process The difference pressure between the process and the reference side Electrode Inlet Tube Gas Molecules Vacuum Measurement Reference i Cavity LL a a Figure 1 Basic Capacitance Manometer Sensor causes the diaphragm to deflect slightly This deflection causes a change in capacitance between the electrode and the diaphragm The result is a capacitive imbalance which is measured by a circuit and then converted to an output signal This output
88. f the DB15 connector or through pin 3 of the DB9 connector This pin is normally driven high to 3 3 volts when the temperature LED is Green 4 6 ZEROING THE CMX When the gauge is placed into operation for the first time or after a shut down of the system ZERO should be set using the following steps Adjust ZERO at the ambient temperature at which the gauge is normally operated The CMX cannot be zeroed if the pressure is too high or if the gauge has not reached a stabilized operating temperature Green LED 1 Pump the system down to a pressure that is at least 5 decades below the full scale range of the device See the ZERO Pressure Chart below For 100mT device check that the installation orientation is the same as the calibration orientation Table 9 ZERO Pressure Chart Full Scale Highest Pressure for Proper Zero Range Adjustment 0 1 Torr 1X 10 Torr 1 Torr 1X 10 Torr 2 Torr 2 X 105 Torr 5 Torr 5 X 10 Torr 10 Torr 1X10 Torr 20 Torr 2 X 10 Torr 100 Torr 1 X 103 Torr 1000 Torr 1 X 102 Torr 2 Allow the device to warm up and settle see Recommended Ready To Use Times on page 26 3 Press the ZERO pushbutton or momentarily connect the remote zero trigger signal in the D Sub connector to signal ground The CMX will attempt to correct the ZERO adjustment in a series of steps over a period of a few seconds While ZERO adjustment is being performed automatically the STAT
89. fication CE Si vous utilisez votre propre cable d interconnexion ce cable doit tre prot g par un blindage integral Les connecteurs rectangulaires ou circulaires utilis s doivent avoir un blindage m tallique S il a lieu des presse toupes m talliques doivent faire office de serre cran de cable L cran du cable doit tre raccord a enveloppe m tallique ou au presse toupe et blind aux deux extr mit s sur 360 degres Le blindage doit s achever sur une prise de terre Les connecteurs de carte standards sont non m talliques Les cables utilis s doivent tre prot g s par un blindage int gral pour se conformer la certification CE Le blindage doit s achever sur une prise de terre En ce qui concerne la configuration des broches veuillez vous reporter au manuel d utilisation joint ESD d charge lectrostatique ATTENTION cet instrument contient des composants lectroniques sensibles l lectricit statique Des proc dures de manipulation ad quates doivent tre respect es pendant le retrait l installation ou la manipulation des cartes de circuits imprim s ou des dispositifs internes Proc dure de manipulation 1 L alimentation lectrique de l appareil doit tre coup e 2 Le personnel doit tre mis la terre au moyen d une bande de poignet ou d un autre moyen s r et ad quat avant installation le retrait ou le r glage de toutes les cartes de circuits imprim s ou autres dispo
90. h a n rodn ch p edpis P ipojte v echny produkty ke spr vn m zdroj m elektrick energie a stla en ch m di Postup 1 Pomalu do syst mu p iv d jte m dium Pro zabr n n vzniku r z v syst mu otvirejte procesn ventily postupn 2 Prekontrolujte t snost vstupn ho a v stupn ho p ipojen pr tokom ru Pokud nezjist te dn net snosti postupn zvedejte tlak na provozn hodnotu P ed prov d n m servisn ch prac zkontrolujte zda syst m neni pod tlakem V p pad pot eby v m ny d l zajist te aby byly pou ity n hradn sou sti specifikovan spole nost Brooks Instrument a v m nu prov d la kvalifikovan osoba Pou it neschv len ch d l a postup m e negativn ovlivnit efektivitu a bezpe nost procesu Pou it n hrad za origin ln d ly m e zp sobit po r raz elektrick m proudem nebo nespr vnou funkci Pokud neni zrovna provad na dr ba kvalifikovanou osobou ujist te se e zafizeni je opatfeno v emi predepsanymi kryty UPOZORN N Pokud je u za zen s pr tokem kapalin nutno z jak hokoli d vodu uzav t vstupn a v stupn ventily je nutn za zen kompletn vypr zdnit Pokud tak neu in te m e z d vodu teplotn rozta nosti zbytk m dia v za zen doj t k jeho po kozen nebo k ohro en zdrav osob Evropsk sm rnice pro tlakov za zen PED Na ve ker tlakov za zen s vnit n m tlak
91. h ends over 360 Degrees The shield should be terminated to an earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to an earth ground For pin configuration Please refer to the enclosed Instruction Manual ESD Electrostatic Discharge A CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Commenis This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they
92. he polled I O connection Set expected packet rate for polled connection to 1000mSec 4 5 6 Send poll command to device no data is sent with the poll command 7 Process the poll data 8 Repeat steps 6 and 7 The default configuration for the CMX device is to return the pressure data as a real floating point number The real data conforms to the IEEE 754 standard for 32 bit floating point number representation Therefor there will be five bytes of data returned with each poll response The first byte is the status byte typically 0x80 Bytes two through five are the four bytes of real pressure data with the least significant bytes first and ending with the most significant byte p 22 3 0 _INSTALLATION 3 7 2 DeviceNet Cables Table 5 DeviceNet Cables CABLE LENGTH BAUD DROP LENGTH Maxi DROP LENGTH RATE mum Meters Cumulative Meters Lihick 5 Lenin 500 125k 6 156 Linick 2 Sthin 250 250k 6 78 Lihick 5 Lihin 100 500k 6 39 4 3 5 Male 1 DI 2 Female Pin Sockets 1 Drain Bare 2 V Red 3 V Black 4 CANH White 5 CANI Blue Network Connector Female Contacts 5 V Red 4 CANH White 3 Drain Bare 2 CANI Blue 1 V Black 12345 pp ses u Network Connector Male Contacts DeviceNet Connector Figure 24 DeviceNet 5 Pin Connector p 23 3 0 _INSTALLATION 3 8 ELECTRICAL SIGNAL DESCRIPTION Table 6 Electrical Sig
93. i na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi do termicznego zwi kszenia obj to ci cieczy co z kolei mo e spowodowa uszkodzenie urz dzenia i obra enia personelu Europejska dyrektywa dotycz ca urz dze ci nieniowych PED Wszystkie urz dzenia ci nieniowe pracuj ce przy ci nieniu wewn trznym wzgl dnym wi kszym ni 0 5 bara i wielko ci powy ej 25 mm lub 1 cala podlegaj dyrektywie europejskiej dotycz cej urz dze ci nieniowych PED Rozdzia Specyfikacja techniczna niniejszej instrukcji zawiera zalecenia dotycz ce dyrektywy PED Mierniki opisane w tej instrukcji s zgodne z dyrektyw EN 97 23 EC Wszystkie mierniki przep ywu firmy Brooks Instrument nale do 1 szej grupy cieczy Urz dzenia pomiarowe o wielko ci powy ej 25 mm lub 1 cala nale do kategorii I II lub III dyrektywy PED Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom Uznanej Praktyki In ynierskiej SEP Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej EMC Urz dzenia elektryczne elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE przesz y pozytywnie testy pod k tem spe niania przez nich wymog w kompatybilno ci elektromagnetycznej Dyrektywa EMC 2004 108 EC 89 336 EEC Jednak e szczeg
94. iance in the signal output will be negligible Table 7 Recommended Ready To Use Times Device Temp Device Pressure From Cold Condition Range Range in hours 45 C 100m Torr 5 1 Torr 1000 Torr 3 100 C 100m Torr 5 1 Torr 1000 Torr 3 160 C 100m Torr 5 1 Torr 1000 Torr 3 Ready to Use Warm up completed flashing Amber LED now Green signal output change negligible and repeatable temperatures status signal level at 3 3 VDC 4 5 HEATER TEMPERATURE WARM UP READY FAULT LED FUNCTIONALITY The sensor temperature is precisely controlled via the digital signal processor An intuitive tri color LED is provided to indicate the three temperature states Warm up Ready to Use and Fault The following graph and table relate the LED status to the actual sensor temperature CMX Temperture LED Functionality Example READY TO USE Temp amp Setpoint E eme amp seno Dni gt E ZD at Kine amp Offset at temp stabilizing OK to use l sa k lt gt Amber Flashing Amber Amber Green Red RTD Heater Temperature Figure 25 Temperature vs LED State Table 8 LED Function Table LED Indicator AMBER Warming Up FLASHING AMBER At temperature but not ready for use GREEN Sensor at temperature and ready to use RED Over Temperature Fault p 26 _OPERATION 4 0 The temperature indicator status can also be monitored remotely through pin 1 o
95. ik dit instrument niet als niet is voldaan aan de specificaties in de handleiding Het niet naleven van deze waarschuwing kan ernstig letsel en of schade aan de apparatuur tot gevolg hebben e Als u en of meer instructies niet begrijpt vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument Neem alle waarschuwingen voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd e Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften Sluit alle producten aan op de juiste elektrische voedings en drukbronnen Bediening 1 Laat het systeem langzaam volstromen Open de procesafsluiters langzaam om drukstoten te voorkomen 2 Controleer op lekkages rondom de inlaat en uitlaataansluitingen van de stromingsmeter Als er geen lekkages zijn kan het systeem op de bedrijfsdruk worden gebracht e Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren Als vervangingsonderdelen nodig zijn zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen Niet goedgekeurde vervangingsonderdelen kunnen brand elektrische schokken of een onjuiste werking tot gevolg hebben
96. in 3 of the DB9 connector This pin is normally driven high to 3 3 volts when the temperature LED is Green 5 When the temperature has stabilized and the device has been ZEROed the device is ready for use 4 3 LED INITIALIZATION SEQUENCE The LED indicators will go through each state during the power up reset initialization sequence Although this is primarily a DeviceNet requirement it will also be done on the analog and other non DeviceNet models The sequence starts with all LED indicators OFF Each included LED indicator will flash through all states Relay Control Status LEDs that indicate the status of the relays will not go through an initialization flash sequence The states for each indicator are listed below Each state will last approximately 250 milliseconds 1 4 second and then proceed to the next state Once each state has been sequenced on a particular LED the next LED will go through its sequence LED INDICATOR STATE Green Red Green Status MOD status on Devicenet models Network Status DeviceNet only Green Red OFF Temperature Status all Models Amber Red Amber OFF Relay Control Status relay model OFF p 25 _OPERATION 4 0 4 4 DEVICE WARM UP When an CMX is installed and powered up on a system or tool the signal output will be variable for a period of time Once the temperature profile of the device reaches a steady state condition and thermal saturation has occurred the var
97. is NOT recommended by anyone other than authorized Brooks service personnel as this may cause damage to the device and may void the warranty p 28 _MAINTENANCE 5 0 CD Contaminated parts can pose a health hazard Before beginning work determine whether any parts are contaminated Adhere to all regulations and take all necessary precautions when handling and shipping contaminated parts Ax CAUTION A Handle vacuum products with care Dirt and damage severely impair the function of the vac uum component 5 4 REMOVAL OF CMX 1 2 3 4 5 6 Vent the vacuum system to atmospheric pressure Remove power to the CMX Loosen the lock screws and unplug the control cable Remove the communication cable if used Carefully remove the gauge from the vacuum system Dispose of the gauge using local procedures or return to Brooks as described in SERVICE and RETURN on page 34 p 29 _DEVICENET MODELS 6 0 MODELS WITH DEVICENET 6 1 DEVICENET POWER UP SEQUENCE Applying power to a DeviceNet CMX initiates a power up sequence that initializes the embedded Vacuum Measurement system along with performing a Module and Network test The real time status of these tests is indicated on the Module and Network LEDs on the top of the device After power is applied the CMX flashes the Module and Network LEDs according to the following sequence If this sequence does not occur a problem exists with module power o
98. itikty jvairius nacionalinius ir tarptautinius standartus Sie gaminiai turi b ti tinkamai montuojami eksploatuojami ir prizi rimi kad ir toliau veiktu pagal jiems b dingus techninius parametrus Toliau pateikty nurodymu reikia laikytis ir jtraukti juos j vietin s prekybos atstovyb s kontaktin informacij I saugokite i instrukcij pasi i r jimui ateityje SP JIMAS nenaudokite io prietaiso vir ydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis Nesilaikydami io sp jimo galite sunkiai susi eisti ir arba sugadinti rang e Jei nesuprantate koki nors nurodym kreipkit s Brooks Instrument atstov kad paai kint e Paisykite vis sp jimo persp jim ir nurodym pa ym t ant gaminio arba pateikt su juo e rang montuokite taip kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose Visus gaminius junkite prie tinkam elektros ir sl gio altini Eksploatacija 1 letai jjunkite srauta sistema L tai atidarykite proceso vo tuvus kad i vengtumete srauto antpl d iu 2 Patikrinkite ar nuot kiu aplink srauto matuoklio jleidimo ir i leidimo jungtis Jei nuotekiy nera sukurkite sistemoje darbinj slegj e Prie atlikdami prie i ros darbus b tinai pa alinkite sl g proceso linijoje Jei reikia pakeisti dalis u tikrinkite kad kvalifikuoti darbuotojai naudot Brooks I
99. ivos electr nicos Brooks encontram se pe as de tecnologia de xidos met licos NMOS SMOS etc A experi ncia mostra que at pequenas quantidades de electricidade est tica s o capazes de danificar ou destruir esses dispositivos Os componentes danificados embora funcionem aparentemente bem inicialmente acabam por falhar permaturamente 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 Romanian Indicatii de referint Cititi le nt i pe acestea Brooks Instrument i proiecteaz produce i testeaz produsele ntr un mod ce respect un mare num r de standarde autohtone i interna ionale Aceste instala ii trebuie amplasate exploatate i ntre inute corespunz tor pentru ca n toate situa iile domeniul lor de lucru s corespund oper rii normale In ceea ce prive te instalarea operarea i ntre inerea produselor Brooks Instrument indica iile de mai jos trebuie respectate i trebuie introduse in programul de protec ia muncii Pentru garantarea prestatiei corecte instalarea operarea actualizarea programarea i ntre inerea produsului poate fi realizat doar de c tre personal calificat N Instruc iunile de instalare ale produsului trebuie citite integral nainte punerea n serviciu i exploatarea sa In m sura n care edi ia acestui manual este cea adecvat identifica i pe ultima
100. izporo iti v konduktivni embala i Karte so odstranjive izklju no neposredno pred vlogom iz za itne embala e ven Izjemljeno kartico nemudoma staviti v za itno embala o za gibanje skladi enje ali po iljanje nazaj Opombe Nije poseben pojav da se v napravi nahajajo ob utljivi sestavni deli na elektrostati no pra njenje ESD V ve em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo NMOS SMOS itd Izkustva potrjujejo da majhna stati na elektrika more po kodovati ali uni iti ta sredstva O kodovani rezervni deli e na videz dobro delajo naka ejo za etno napako Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Spanish Instrucciones b sicas jLealos primero El Brooks Instrument proyecta fabrica y prueba sus productos de manera que stos respondan a numerosas normas nacionales e internacionales Dichas instalaciones deben ser emplazadas operadas y mantenidas adecuadamente para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando operando y mantenimiento los productos Brooks Instrument Para asegurar el adecuado rendimiento para instalar actualizar mantener tiene que realizarse exclusivamente
101. jno funkcioniranje Vsa vrata naprave svekakor morajo biti zaprta za itni ovitki morajo biti na svojem mestu zaradi izogibanja oku in osebnim po kodbam razen e na njej strokovnjak opravlja dela vzdr evanja 4 OPOMBA V primeru naprave za tok teko ine e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi naprava se mora celotno izprazniti Zamuda tega lahko provzro i toplotno pro irjenje teko ine kar po koduje napravo in lahko povrzo i osebno po kodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve od 0 5 bara g in ve jim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED Poglavje priro nika Tehni ni podatki vsebuje navodila ki se nana ajo na smernice PED Merilni instrumenti navajani v priro niku ustrezajo smernicam EU tevilke 97 23 EK Vsaki merilec pretoka Brooks sodi v skupino teko in tevilke 1 Merilni instrumenti ve ji od 25 mm ali 1 palca ustrezajo kategriji PED II ali III Merilni instrumenti manj i od 25 mm oziroma 1 palca ali manj i sledijo sprejeti in enjeski praksi SEP Evropska smernica za Elektromagnetno kompatibilnost EMC Naprave Brooks Instrument ki so zaslu ile CE ozna bo elektri ni elektronski so uspe no izpolnile testove zahteve o elektromangnetni kompatibilnosti t 2004 108 EC 89 336 EGK smernice EMC Obenem mora se posebno pozornost
102. kering verdient speciale aandacht Kwaliteit van de signaalkabel kabelafdichtingen en stekkers Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE markering Als u zelf voor signaalkabel zorgt moet u altijd een volledig afgeschermde kabel gebruiken Stekkers van het type D of ronde stekkers moeten zijn voorzien van een metalen afscherming Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd De afscherming moet aan de aardpotentiaal worden aangesloten Card Edge Connectors zijn standaard niet van metaal De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE markering De afscherming moet aan de aardpotentiaal worden aangesloten Voor de pinconfiguratie Raadpleeg de bijgevoegde handleiding Elektrostatische ontlading VOORZICHTIG Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit Neem de juiste procedures in acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten Procedure 1 Schakel de voeding van de eenheid uit 2 Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden
103. kke unik i den hensigt at det indeholder for elektrostatisk afladning ESD sensitive reservedel de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel NMOS SMOS m m Erfaringerne viser at selv den mindste statiske elektricitet kan skade eller adelzegge disse instrumenter Selv en fungerende elektrisk del kan have levetiden markant reduceret pa grund af statisk elektricitet 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 Dutch Essenti le instructies Lees ze voordat u verder gaat Brooks Instrument ontwerpt produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen Deze producten moeten correct worden ge nstalleerd bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken De volgende instructies moeten worden toegevoegd aan en ge ntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert bedient en onderhoudt Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren bedienen updaten programmeren en onderhouden Lees alle instructies voordat u het product gaat installeren bedienen en onderhouden Als dit niet de juiste handleiding is kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger Bewaar deze handleiding voor later WAARSCHUWING gebru
104. l ej tas bort fran deras skydsskapa innan man skall installera dem De borttagna korten b r omedelbart l ggas i speciell f rpackning f r transport lagring eller terl mnande till fabriken Anm rkningar Dessa instrument r ej unika vad g ller dess ESD Elektrostatiska urladdningar k nsliga komponenter De flesta samtida konstruktioner inneh ller komponenter som utnyttjar metalloxid teknologi NMOS SMOS 0 s v Erfarenhet har visat att ven sm m ngder av statisk elektricitet kan skada eller f rst ra dess komponenter Skadade komponenter ven om de annars verkar fungera ordentligt har ofta en kortare livsl ngd Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manuf
105. l relay 5 Power supply common 6 15 VDC 7 15 VDC 8 Relay 1 Normally OPEN 9 Relay 1 Contact common 10 Relay 1 Normally CLOSED 11 Relay 2 Normally OPEN 12 Signal common 13 Relay 2 common 14 Relay 2 Normally CLOSED 15 Chassis ground Connector Option 4 CMX160 only PIN 4 PIN ASSIGNMENT 1 Temperature status 2 Output signal 3 Remote ZERO trigger 4 No connection 5 External power supply common 6 15 VDC 7 15 VDC 8 Relay 1 Normally OPEN 9 Relay 1 Contact common 10 Relay 1 Normally CLOSED 11 Relay 2 Normally OPEN 12 Signal common 13 Relay 2 Contact common 14 Relay 2 Normally CLOSED 15 Chassis ground Connector Option 2 Figure 22 15 Pin D Connector Pinouts 3 7 DEVICENET CONNECTION Set the DeviceNet baud rate selection switch Located on top of the device to the desired baud rate Set the address selection switches Node Address to the desired address noting the most significant digit and least significant digit position After these switches have been set connect the DeviceNet power communication cable to the device When power is applied the unit will go through an initialization procedure The LED indicators will flash in sequence After this initial sequence the Module Status LED should be green the Network Status LED should be flashing green if network on line with no conn
106. laims the MAC ID will initialize correctly but subsequent devices will not be able to initialize with the same MAC ID The solution is to select a unique MAC ID for each device Note that the embedded control system reads the MAC ID address and baud rate switches only once during initialization after power is applied In some cases the Network LED may display Red due to a baud rate error verify that the baud rate of the device matches that of the network If it is necessary to change the address or baud rate remove power change the switch settings then reply power to device 6 2 4 Sequence Passes Module LED is Green Net LED is Off This problem will occur if the baud rate of the device is not the same as the baud rate of the other devices on the network Set the device baud rate to the correct value and power cycle the device as described above 6 2 5 Sequence Passes Module LED is Green Net LED is Flashing Green This situation indicates that the device is working properly and that there are no MAC ID or Baud Rate conflicts The flashing Green Net LED indicates that the device sees a valid network and it is waiting for the tool controller or scanner to establish logical connection s Logical connections enable the process tool controller to set or get variable or assemblies of data such as setpoint and indicated flow p 31 _EXTENDED RANGE 7 0 7 0 CMX MODELS WITH EXTENDED RANGE CAPABILITY 7 1 CMX WITH EXTEND
107. lee asentaa k ytt ja huoltaa k ytt ohjeiden mukaan jotta niiden toimivuus taataan Brooks Instrumentin laitteiden asennuksessa k yt ss ja huollossa on noudatettava soveltuvia m r yksi ja ohjeita lis ksi mainitut ohjeet on huomioitava ty suojelun ohjeistuksessa Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkil saa asentaa k ynnist p ivitt ohjelmoida ja huoltaa laitteita Lue kaikki k ytt ohjeet koskien tuotteen asennusta k ytt ja huoltoa Jos k ytt ohje on puutteellinen lis tietoja saa paikalliselta j lleenmyyj lt Yhteystiedot l ytyv t oppaan kansilehdest S ilyt ohjeet VAROITUS K ytt ohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja arvoja ei saa ylitt Rajoitusten laiminly nti voi aiheuttaa tuotteen rikkoutumisen ja tai vakavan henkil vahingon vaaran Jos ohjeissa on ep selvyytt ota yhteytt Brooks Instrumentin edustajaan ongelman selvitt miseksi Noudata kaikkia laitteessa olevia tai siihen liittyvi ohjeita m r yksia ja varoituksia Laittteen asennuksessa on noudatettava erityisi asennusohjeita sek voimassa olevia paikallisia ja kansainv lisi m r yksi Laitteet saa yhdist vain soveltuvaan s hk ja paineverkkoon Asennusohjeita 1 P st virtaus hitaasti j rjestelm n Avaa venttiilit hitaasti jotta virtaus pysyy tasaisena 2 Tarkista ettei virtausmittarin sis n ja ulosmenon vieress ole vuotoa Jos j rjestelm ss
108. lig f r elektrostatische Entladung sind Die meisten modernen elektronischen Ger te enthalten Komponenten die die Metalloxidtechnologie NMOS SMOS etc verwenden Die Erfahrung hat gezeigt dass schon geringe Mengen elektrostatischer Energie ausreichen um diese Ger te zu besch digen oder zu zerst ren Besch digte Teile fallen fr h aus obwohl sie funktionsf hig zu sein scheinen Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Greek Baocik g AiapdoTe OUVEXIOETE H Brooks Instrument oxedi gei Tapayel Kal OKIH EI TTPOI VTA TNG OE HE TTA BOG KAI IEOVWV TTpOT TTWV EyKATAOTAON Kal Tous ATTOTE EI ATTAPA TNTN TTPOUTTOBEON TNG Aerroupy ag TWV opiwv Ol TTAPAK TW O NVIEG TNPO VTAI KAI EVOWHATWBO V OTO AOP EIAG epyao ag Tny xp on Kal OUVT PNON TNG Brooks Instrument Tia owoT ATTOTEAEONA AEITOUPY A EVNUEPWON KAI OUVT PNON TTP TTEI va YIVETOI ATT EIOIKEUH VO TPOGUTTIK LIAB OTE Aec TIG TTPIV EYKATAOTIJOETE MEITOUPYAJOETE KAI OUVTNPNOETE TO Se
109. man veelger at bruge egne kabler skal man veelge et kabel som har den nodvendige afskeermning for at sikre 100 mod udefra kommende stoj Tilslutningerne D eller rundformede tilslutninger skal veere afskzermet med skal af metal Stikket skal vaere afskaermet p alle sider Al afskeermning skal jordes Card Edge tilslutninger er ifolge standarden ikke metalliske De anvendte kabler og stik skal veere 100 afskaermet for at opfylde CE kravene De skal ligeledes jordes For stik konfigurationen se vedlagte brugsvejledning Elektrostatisk afladning ESD A OBS Udstyret indeholder tilbeh r som kan skades ved elektrostatisk elektricitet Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter bade under drift og vedligeholdelse Behandlingsproceduren 1 Sluk for al str mtilf rsel til udstyret 2 Personer som skal i kontakt med udstyret skal v re jordet eller b re anden form for elektrisk beskyttende udstyr Manglende overholdelse af dette kan medfare skader pa alle elektriske komponenter 3 Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader Emballagen ma ikke abnes for komponenten skal installeres i udstyret Ved afslutning af vedligeholdelse reparation af udstyret skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal pa lager eller transporteres Bemeerkninger Dette udstyr er i
110. nals Descriptions Signal Description 15 VDC Positive power supply input for the CMX 15 VDC Negative power supply input for the CMX Notes Wire size should be selected to minimize the voltage drop between the power source and the CMX Chassis ground This pin connects to the system chassis ground when the CMX is mounted The shield in the cable should be connected to this pin to eliminate the possibility of radio frequency interference RFI affecting the output signal from the device Signal common Pressure output reference return signal This should be used as the reference signal to avoid any ground return potentials developed in the External Power Supply Common described below Signal output A differential voltage developed between the Signal Out pin and the Signal Common pin This signal voltage has a maximum differential output of 10 VDC at the rated full scale pressure of the CMX The output signal voltage is linearly proportional to pressure Cable used for this signal should be shielded and the shield should be connected to the chassis ground External Power Power supply ground return line Wire size should be selected to minimize the voltage drop between the power source Supply Ground and the CMX Reports the status of the internal heater by remaining low 0V DC until the CMX reaches DZE the control temperature at which time the signal All CMXs are heated goes to
111. nettori D o rotondi devono essere schermati con schermatura metallica In caso di necessit bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo La schermatura del cavo deve far contatto col guscio metallico o col pressacavo il cavo deve essere schermato su entrambi i lati a 360 La schermatura deve essere effettuata con messa a terra connettori Card Edge normalmente non sono di metallo cavi utilizzati devono essere filtrati con schermatura al 100 per essere conformi alla marcatura CE La schermatura deve essere effettuata con messa a terra Configurazione pin Vedi Manuale d uso allegato Scarica elettrostatica ESD A ATTENZIONE Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricit statica Bisogna rispettare le adeguate procedure durante la rimozione l installazione o altra manovra delle schede del circuito elettrico interno Procedura di manovra Togliere alimentazione elettrica al apparecchiatura 2 La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare togliere o impostare la scheda del circuito elettrico o altri dispositivi interni 3 Le schede del circuito stampato devono essere spedite in contenitori conduttivi Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell installazione Le schede confezionate devono essere collocat
112. ningar alt koppla bort trycket kan g ra sa att vatskans v rmeutvidgning kan spracka skada utrustningen och orsaka personliga skador European Pressure Equipment Directive PED Radets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbarande anordningar Alla utrustning f r tryck med ett tryck ver 0 5 Bar g bar och st rre demensioner an 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbarande anordningar PED Den har Instruktionsbokens Sektion Specifikation innehaller anvisningar g llande PED Direktivet Matare som beskrivs i denna Instruktionsbok r i verensst mmelse med EN Direktivet 97 23 EC Brooks Instruments alla fl desm tare faller under fl desgrupp nr M tare som r st rre 25 mm eller 1 inch verensst mmer med PED kategorier I Il eller III M tare pa 25mm eller 1 inch eller mindre faller under Sound Engineering Practice SEP God Teknisk Praxis European Electromagnetic Compatibility EMC Elektromagnetisk kompatibilitet Brooks Instrument elektriska elektroniska CE m rkta anordningar har redan genomgatt ett framgangsrikt prov enligt regleringar under Electromagnetic Compatibility EMC directive 2004 108 EC 89 336 EEC Man m stre dock gna s rskild uppm rksamhet till valet av signalkabeln som skall anv nds f r CE markta anordningar Signalkablars packboxars och kontakdons kvalitet Brooks Instrument levere
113. nstrument nurodytas pakaitines dalis Netinkamos dalys ir proced ros gali pakenkti gaminio veikimui ir kelti pavoj saugiai j s proceso eksploatacijai Tik pana iai atrodantys pakaitalai gali s lygoti gaisr elektros pavojus ar netinkam veikim U tikrinkite kad visos jrangos dureles buty uzdarytos apsauginiai dang iai u deti kad i vengtumete elektros sm gio ir suzeidimu i skyrus kai kvalifikuoti darbuotojai atlieka prie i ros darbus A ISPEJIMAS naudojant skysto srauto jrenginius jei del kokios nors prie asties prireikia u daryti alia jrenginio esan ius jleidimo ir i leidimo voztuvus is jrenginio reikia i leisti visa skystj To nepadarius galimas iluminis skys io pletimasis galintis sugadinti jrenginj ir su eisti mones Europos slegines jrangos direktyva PED Visa slegine jranga kurios vidinis slegis didesnis nei 0 5 bar 4 o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama slegines jrangos direktyvos PED ios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susije su PED direktyva e Sioje instrukcijoje apra yti matuokliai atitinka Europos S jungos direktyv 97 23 EB e Visi Brooks Instrument srauto matuokliai priklauso 1 skys i grupei Didesni nei 25 mm arba 1 colis matuokliai atitinka PED Il arba III kategorija 25 mm arba 1 colio ar ma esni matuokliai atitinka tinkam in inerijos praktika SEP Europoje taikomi elektrom
114. oj ch je ast m jevem Prvky s technologi oxidu kov NMOS SMOS jsou pou v ny u v t iny modern ch elektronick ch za zen Zku enosti dokazuj e i jen mal elektrostatick v boje mohou po kodit nebo zni it tyto za zen U po kozen ch sou stek jakkoli zd nliv pracuj c ch bezchybn doch z brzy k poru e Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Dansk Grundl ggende vejledninger Lees disse far anvendelse Brooks Instruments designer fremstiller og sine produkter saledes at de tilpasser sig bade de indenrigs og internationale standarder Disse udstyr bor installeres bruges og repareres omhyggeligt s at de kan virke tilsvarende deres normale anvendelsesperiode De folgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation e For at garantere den passende kapacitet er udstyrets installation anvendelse opdatering programmering kun tilladt for kvalificeret personale Alle vejledninger skal leeses far produktets installation anvendelse og reparation e Hvis denne manual ikke er den passende udgave kontakt venligst jeres leverand r for yderligere information e Det anbefales at gemme denne manual for senere brug OBS Udstyret m ikke anvendes til andet end det er angivet i brugsanvisningen Hvis denne regel brydes kan der forekomme
115. or with 2 Process Relays and a Temperature in Control Relay 15 Pin D Sub Connector with 1 Process Relay 1 Temperature in Control Relay and an Overheat Indicator Relay 15 Pin w Fine Coarse Compatible Zero Switches Pin 13 amp Pin 14 configured as Outputs Indy Standard Firmware 1 additional to tube stub 15 Pin w Fine Coarse Compatible Zero Switches Pin 13 amp Pin 14 configured as Inputs for Unique Remote Zero Functionality Indy Standard Firmware 1 2 and 3 are available on CMX45 and CMX100 1 3 4 and 5 are available on CMX160 1 2 3 4 5 6 c M X Figure 9 Ordering Specifications p 11 2 0 _DESCRIPTION 2 11 PHYSICAL DIMENSIONS 115 4 mm 4 54 12 7 mm 0 50 77 4 mm 3 05 A DIMENSION B DIMENSION FITTING TYPE FITTING CMX45 CMX100 OVERALL LENGTH CODE 05 OD Tube 0 26 3mm 1 04 141 70mm 5 58 KF 10 Flange 1 39 0mm 1 547 154 40mm 6 08 KF 16 Flange 2 39 0mm 1 547 154 40mm 6 08 KF 25 Flange 3 30 1mm 1 197 145 50mm 5 73 8 VCR Female 4 52 24mm 2 06 167 64mm 6 60 Mini CF 5 27 56mm 1 09 142 96mm 5 63 See Figure 14 Dimensions With Connectors For other fittings and flanges call Brooks Technical Support Figure 10 CMX45 and CMX100 Dimensions of Body and Tube with Analog Interface _DESCRIPTION 2 0 112 mm 4 41 12 7 mm 0 50
116. p pressure control system In general CMX measures over 4 decades from their full scale range and can be used in closed loop pressure control systems overa maximum of 3 decades Measurement Range 4 decades Control Range 3 decades E Control Range mmmmEm Measurement Range Full Scale Device Range Torr 1 10 100 1000 Process Pressure Torr Figure 8 Measurement and Control Ranges of CMX p 9 2 0 _DESCRIPTION 2 9 PRODUCT SPECIFICATIONS Table 3 Digital CM Specifications GAUGE OPERATING TEMPERATURE 45 C 100 C 160 C Range 0 1 1 2 10 100 1000 Torr 1 2 10 100 1000 Accuracy 1000 Torr 0 25 of reading 0 25 of reading 100 Torr 0 15 of reading 0 25 of reading 20 Torr 0 15 of reading 0 25 of reading 10 Torr 0 15 of reading 0 25 of reading 2 Torr 0 15 of reading 0 35 of reading 1 Torr 0 15 of reading 0 35 of reading lt 1 Torr 0 25 of reading N A Measurement Range 4 Decades Temperature Effects on Zero 0 002 of FS C TCZO Temperature Effects on Span 0 02 of FS C TCFSO Ambient Operating 15 C to 35 C 15 C to 45 C 15 C to 35 C Temperature Exposed Materials Inconel and or AISI 316L Stainless Steel Volume 17cc Approximate Shipping Weight 1 40 Ibs 726 grams Overpressure Limit 17 PSIA or 125 of Full Scale whichever is greater Power Input Initial Warm up Analog Typical
117. ping container on TOP of the Brooks CMX you are returning 8 0 SERVICE AND RETURN 8 1 SERVICE INSTRUCTIONS Contact the nearest Brooks Technical Support office prior to returning any CMX In response to your call a qualified Technical Support Engineer will assist in diagnosing the CMX When contacting the Technical Support Group please have available the serial number on the CMX case the gas es to which the CMX has been exposed and a description of the process system on which the CMX is installed If the Technical Support Engineer determines that the Brooks CMX requires servicing you will be instructed to return the CMX to a specified Brooks Service Center in addition you will be given a Global Customer Care GCC number The GCC number will allow you to track the progress of your return until a resolution is achieved If you do not send all of the requested information our response to your service request may be delayed If you do not send the Contamination Disclosure Form your service request may be delayed or rejected 8 2 RETURN INSTRUCTIONS If it is necessary to return the Brooks CMX please provide A disclosure of all chemicals exposed to the equipment enables us to protect our personnel and environment and to determine if special handling is required to process your repair Therefore a Contamination Disclosure Form must be completed Figure 26 Contamination Disclosure Form Example on Page 35
118. po anas izlasiet visus noradijumus Ja ST instrukciju rokasgramata nav pareiza izstradajumam atbilsto a rokasgramata ludzu skat aizmugurejo vaku kur ir sniegta vieteja tirdzniecibas biroja kontaktinformacija N A BRIDINAJUMS Nelietot instrumentu rpus Instrukciju un lieto anas rokasgr mat noraditajiem parametriem Si bridin juma neiev roSanas rezult t var rasties traumas un vai aprikojuma bojajumi Ja jus nesaprotat kadu no instrukcijam sazinieties Brooks Instrument p rst vi un l dziet izskaidrot to lev rojiet visus bridinajumus piesardzibas m rus un instrukcijas kas noraditi uz izstradajuma vai piegadati ar to Uzstadiet aprikojumu t tas nor dits attiecigaja instrukciju rokasgramata ieklautaja uzstadi anas instrukcija un atbilsto i piemerojamajam vietejam un nacionalajam normam Pievienojiet visus izstradajumus pareiziem elektriskajiem un spiediena avotiem Lieto ana 1 L n m uzs ciet pl smu sist m Lai izvair tos no straujiem pl smas k pumiem l n m atveriet procesa varstus 2 P rbaudiet vai nav nopl des ap pl smas m r t ja iepl des un izpl des savienojumiem Ja nopl des nav uzst diet sist m darba spiedienu P rliecinieties par to lai pirms instrumenta tehniskas apkopes b tu likvid ts procesa linijas spiediens Ja ir nepiecie ams veikt kadu dalu nomainu nodro iniet lai tiktu izmantotas Brooks Instrument nor dit s dalas un dalu nomainu veiktu k
119. por una persona calificada e Antes de la instalaci n operaci6n y servicio del producto leer todas las respectivas instrucciones Si el presente manual no es la adecuada publicaci n busque al distribuidor local que figura en la contraportada y p ngase en contacto con l para obtener informaciones Guarde el presente manual para tener informaciones tambi n en el futuro A ATENCI N No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento El incumplimiento de estas ltimas puede conducir a graves dafios personales o a la averia del equipo Si las instrucciones del manual no son evidentes p ngase en contacto con el representante de Brooks Instrument para el problema e Observar todas las alertas advertencias e instrucciones indicadas en el equipo o suministradas con el mismo e Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalaci n y con las pautas de las normas vigentes locales e internacionales Conectar el producto exclusivamente a la adecuada fuente electrica y presi n Proceso 1 Colocar lentamente flujo en el sistema Abrir lentamente las v lvulas de proceso para oscilaci n del flujo 2 Verificar si hay fuga alrededor de las conexiones de entrada salida del fluj metro Si no hay Ilenar el sistema con la presi n de operaci n e Antes de efectuar el servicio verificar si hay presi n o no en la tuberi
120. pr kazy v n vode nie s jednozna n kontaktujte z stupcu Brooks Instrument na objasnenie probl mov Dodr ujte vSetky upozornenia prikazy usmernenia uveden na zariadeni alebo s nim dodan e Zariadenia in talujte pod a n vodu uveden ho v pr kaze na in tal ciu v s lade s miestnymi a n rodn mi predpismi Zariadenie pripojte v lu ne len na vyhovuj ci elektrick a tlakov zdroj e Postup 1 Pomaly natlakujte syst m Prev dzkov ventil otvorte pomaly na zamedzenie kol sania prietoku 2 Prekontrolujte tesnos vstupn ho a v stupn ho zapojenia prietokomeru Ke nie je presakovanie spoje s tesn naplni syst m na prev dzkov tlak Pred vykon van m servisn ch prac kontrolova system nie je pod tlakom V pripade e je potrebna v mena s iastky v menu dielov ur en ch Brooks Instrument mus vykonat kvalifikovan osoba Pou itie nepovolen ch dielov a vykon vanie nepovolen ch aktiv t ohrozuju bezpe nos prev dzvky a negativny vplyv na v kon zariadenia Nahradenie s iastok len podobn mi komponentmi m e mat za n sledok po iar raz elektrick m prudom alebo nedostato n funkciu zariadenia V etky ochrann kryty dvierka zariadenia maj byt zatvoren zabezpe enie ochrany proti razu elektrickym pr dom proti poraneniam obsluhy Vynimku tvori vykon vanie dr by kvalifikovan m odbornikom UPOZORNENIE Pri zariadeniach s prietokom kvapal n ke
121. r with the device itself Module LED Power up Sequence Off Green 250 mSec Red 250 mSec Network LED Power up Sequence Off Green 250 mSec Red 250 mSec After the LED flash sequence has completed the Module and Network LEDs will display the real time status of the Module and Network respectively The following tables describe the status LED behavior Table 11 DeviceNet MODULE LED LED STATE PROBLEM SOLUTION Off Power off No power applied to the device Flashing Green Device self test Device is in self test The DeviceNet specifications defines blink rates and Red patterns for the Modules Status LED during self test Green Unit is operating normally No corrective action required Red Unrecoverable fault a has detected an unrecoverable Table 12 DeviceNet NETWORK LED LED STATE PROBLEM SOLUTION Off Power off No power applied to the device Flashing Green Red Device is in self test Device self test Device is operating normal It is on line but no connection has On line not connected been established Flashing Green Device is operating normal It is on line and one or more Green On line connected connections are established Flashing Red Connection time out One or more connections have timed out Red Unrecoverable fault Device cannot communicate on the network Duplicate Macld or Bus off condition 6 2 DEVIC
122. rar h gkvalitativa kablar som verensst mmer med specifikation f r CE intygade produkter Om man anvander sin egen signalkabel d b r man anv nda en kabel som r fullstandigt sk rmad med en 100 avsk rmning D eller Cirkelformiga kontakdon skall vara skarmade med metalliska avskarmningar Om det r anvandbart b r metallpackboxar som ger en bra fastspanning f r kabelsk rmar anv ndas Kabelavs rmningen m ste kopplas till den metalliska sk rmande anordningen eller packboxen och sk rmas vid b da ndar runt omkring Avsk rmningens avsp nning m ste jordas Card Edge Kontaktdon r icke metalliska F r att verensst mma med krav pa CE intyg skall de kablarna som anv nds vara sk rmade med 100 sk rmning Sk rmningen m ste jordas Vad g ller stiftkonfigurationen Se den bifogade Instruktionshandboken ESD Elektrostatiska urladdningar OBS Denna utrustning inneh ller elektroniska komponenter som r l ttp verkade av skada orsakad av statisk elektricitet L mplig hanteringsprocedur m ste f ljas n r man tar bort installerar eller p n got annat s tt hanterar inre kretskort eller andra anordningar 1 Str m till enheten m ste kopplas fran 2 Personalen m ste jordas med hj lp av ett armband eller n got annat s kert medel innan n got kretskort eller andra inre anordningar installerras tas bort eller justeras 3 Kretskort m ste transporteras i en speciell f rpackning f r elektronik Kort skal
123. reerida need asjakohasesse ohutusprogrammi N uetekohase talitluse tagamiseks tohib toodet paigaldada kasutada t iustada programmeerida ja hooldada ainult kvalifitseeritud personal Enne toote paigaldamist kasutamist ja hooldamist lugege k ik kasutusjuhised hoolikalt l bi Kui k esolev kasutusjuhend ei vasta teie tootele p rduge kohaliku edasim ja poole kelle kontaktandmed leiate kasutusjuhendi tagakaanelt Hoidke see kasutusjuhend edaspidiseks alles 4 HOIATUS rge kasutage seda instrumenti v ljaspool kasutusjuhendis spetsifitseeritud piirv rtusi Selle hoiatuse eiramine v ib p hjustada t siseid kehavigastusi ja v i kahjustada seadet Kui te saa m ne juhise m ttest aru p rduge selgituste saamiseks kohaliku Brooks Instrumenti edasim ja poole J rgige k iki hoiatusi t helepanule manitsusi ja juhiseid mis on tootele peale kantud v i tootega kaasa antud Seadme paigaldamisel j rgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju Uhendage tooted n uetekohaste toite ja surveallikatega Talitlus 1 Avage aeglaselt vool s steemi Vooluimpulsside v ltimiseks avage t ventiilid aeglaselt 2 Kontrollige et voolukulum turi sisend v i v ljund henduste mber ei ole lekkeid Kui lekkeid ei ole laske s steemil saavutada t surve seadme hooldamist veenduge et siisteem surve alt vabastatud Varuosasid tohib vaheta
124. rr 500 m Torr 1 Torr 2 Torr 5 Torr 10 Torr 20 Torr 50 Torr 100 Torr 500 Torr 1000 Torr 1 33 mbar 2 mbar 5 mbar 10 mbar 100 mbar 500 mbar 1000 mbar 13 33 Pa 33 32 Pa 66 65 Pa 100 m Torr 100 m Torr 250 m Torr 500 m Torr 133 3 Pa 1 Torr 266 6 Pa 2 Torr 666 6 Pa 5 Torr 1 333 kPa 2 666 kPa 13 33 kPa 66 66 kPa 133 3 kPa 10 Torr 20 Torr 100 Torr 500 Torr 1000 Torr Contact Brooks Technical Support for other options Copy Model Number Here Reserved for Brooks Use Calibration Orientation Horizontal Standard Calibration Orientation V Vertical for 1 Torr and all mTorr Ranges itting Type 0 5 od tube stub no fitting KF 10 flange KF 16 flange KF 25 flange 8 VCR 1 2 female Mini CF 8 VCO 1 2 female non standard length Short 8 VCR 1 2 female 8 VCR 1 2 female right angle 2 750 CF 1 additional to tube stub Short 8 VCR 1 2 male Reseved Long 8 VCR 1 2 measues 2 5 8 1 16 from base plate to toroid of aland KF16 right angle 4 VCR 1 4 female Reserved KF16 flange with pre filter assy A33355 4001 Wrapped tube with KF16 flange 8 UJR 1 2 female Right angle 8 UJR 1 2 female 30mm 2mm Short KF16 flange A dimension 18mm 7 08 Code Connector Interface Note 9 Pin D Male Connector 15 Pin Male Connector with Process relays DeviceNet w Analog 9 Pin D Female Connector 15 Pin D Sub Connect
125. ruktioner kontakta din representant f r Brooks Instrument f r klarl ggande F lj alla varningar och instruktioner som f ljer med leveransen av denna produkt Installera din utrustning p sattet som anges i den g llande handbokens installationsanvisningar och enligt tillampliga lokala och nationella f reskrifter Koppla varje produkt till f reskriven str m och tryckk llan Igangsattning 1 Koppla langsamt pa fl de i systemet Oppna processventiler sakta f r att undvika f r h ga fl den 2 Kontrollera l ckor vid matarens anslutningar f r in och utlopp Om inget l ckage f rekommer k r systemet upp till drifttrycket Kontrollera att processledningens tryck ar bortkopplat f re service fall det beh ves kompletteras med nya delar se till att komponenter f reskrivna av Brooks Instrument anvands Samt att kvalificerad personal utf r arbetet Ej rekommenderade komponenter och atgarder kan paverka produktens prestanda och s tta din driftsakerhet p spel Felaktiga ersattningar kan orsaka eld elektriska skador samt felaktig funktion Se till att anordningens kapor och skyddslock ligger pa sin plats med syfte att f rebygga elektriska kontakt och personliga skador det enda undantag galler nar underhallsarbete utf rs av kvalificerad personal VARNING I fall av fl desmatare regulatorer f r v tskor Ifall ventiler fore och efter skall st ngas av m ste alla ledningar t mmas p all v tska Att ej t mma led
126. ry to the operator ITEM DESCRIPTION 9 PIN D SUB FEMALE Analog output signal available on DeviceNet models p 18 _INSTALLATION 3 0 As CAUTION A Minimize vibration around the CMX to eliminate output electri cal noise and provide a longer instrument life Mount the CMX away from direct sunlight heat ing cooling system ducts gas vents and other sources of temperature variation AN CAUTION A For an CMX with full scale 01 Torr or less the mounting ori entation for the device is speci fied for optimal performance Horizontal mounting should be used unless there is a V ver tical mounting in the model number A CAUTION A The tubing between the CMX and the system chamber must be of egual or greater internal nn than the CMX inlet tube AN CAUTION A The tubing between the CMX and the system chamber must be as short as possible with the maximum length no longer than 152 mm 6 3 0 INSTALLATION 3 1 CMX MOUNTING CONSIDERATIONS Figure 19 Mounting Orientation 3 2 PLUMBING SIZE When connecting any CMX to the system chamber minimize restrictions between the CMX and chamber to maximize the conductance This is important to maintain the response characteristics of the CMX in a dynamic control system The following should be considered Tubing Size Diameter Tubing Length 3 3 USE OF AN ISOLATION VALVE The use of an isolation valve will reduce
127. s contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior to service When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury except when maintenance is being performed by qualified persons A WARNING For liquid flow devices if the inlet and outlet valves adjacent to the devices are to be closed for any reason the devices must be completely drained Failure to do so may result in thermal expansion of the liquid that can rupture the device and may c
128. s EN directivas 97 23 EC Todos los fluj metros Brooks pertenecen a la categoria 1 del grupo de fluidos Los instrumentos de medici n m s grandes que 25 mm o 1 pulgada estan en conformidad con las categorias Il o Ill de PED Los instrumentos de medici n m s pequefios que 25 mm o 1 pulgada siguen la Pr ctica Aceptada de Ingenieria SEP Directriz Europea respecto a la Compatibilidad Electromagn tica EMC Las instalaciones de Brooks Instrument el ctricas electr nicas merecedores de la categor a CE cumplieron con xito las pruebas que verifican las exigencias de la compatibilidad electromagnetica directiva de EMC No 89 336 EEC Al mismo tiempo se ha de prestar una especial atenci n en selecci n de los cables de sefial utilizados con los eguipos marcados con CE Calidad de los cables de sefial piezas de union de cable conectores El Brooks Instrument ofrece cables de alta calidad que responden a los requerimientos de calificaci n CE Si se utiliza cable propio de la firma se ha de elegir uno que sea completamente filtrado con blindaje de 100 Las piezas de union de forma D o circular deben ser blindadas mediante blindaje met lica Si es necesario aplicar piezas de uni n de metal para sujetar filtro de cable Conectar el filtro de cable a caja o manguito de metal blind ndolo en ambas caras en 360 El blindaje debe terminar en tierra Los conectores que pertenecen a las tarjetas normalmente no son
129. s Installation and Operation Manual X VAC CMX eng Part Number 541B154AAG Brooks CMX Series January 2011 Hungarian Alapvet utas t sok El sz r olvassa el ezeket A Brooks Instrument olyan m don tervezi gy rtja s teszteli term keit hogy azok megfeleljenek sz mos belf ldi s nemzetk zi szabv nynak Ezeket a berendez seket megfelel en kell telep teni zemeltetni s karbantartani ahhoz hogy mindenk ppen a norm l m k d si tartom nyuknak megfelel en zemelhessenek Az al bbi utas t sokat be kell tartani s be kell p teni a munkav delmi programba a Brooks Instrument term keinek telep t se zemeltet se s karbantart sa sor n A megfelel teljes tm ny garant l sa rdek ben kiz r lag szakk pzett szem lyzet v gezze a term k telep t s t zemeltet s t friss t s t programoz s t s karbantart s t Valamennyi utas t st el kell olvasni a term k telep t se zemeltet se s szervizel se el tt Amennyiben ez a k zik nyv nem a megfelel kiadv ny a h ts bor t n keresse meg a helyi forgalmaz t s tov bbi t j koztat s rt l pjen kapcsolatba vele rizze meg ezt a k zik nyvet k s bbi t j koztat sk nt FIGYELEM m k dtesse a berendez st az zemeltet si utasit sban megadott zemi tartom nyokon tul Ennek megs rt se s lyos szem lyi s r l shez vagy a berendez s meghib sod s hoz vezethet Amennyiben g pk nyv utas t sai n
130. sific rii CE Ecranarea trebuie terminat cu o legare la p m nt Configura ie de contact Vezi instruc iunile de operare ata ate Desc rcare electrostatic ESD ATEN IE Instala ia include piese care sunt predispuse la defectare sub influen a electricit ii statice Trebuie respectate metodele corespunz toare de extragere instalare sau alte manipul ri ale circuitelor electronice Procedur de manipulare 1 Instala ia trebuie scoas de sub tensiune 2 naintea de inserarea scoaterea sau reglarea vreunei cartele electronice sau a altui dispozitiv intern persoana trebuie s se lege la p m nt cu banda pentru articula ia m inii sau alte dispozitive de siguran disponibile pentru acest scop 3 Cartelele cu cablaje electronice imprimate trebuie transportate n ambalaje anti electrostatice conductoare Cartelele se pot scoate din ambalaj doar nemijlocit naintea amplas rii lor Cartela demontat trebuie pus ne nt rziat n ambalajul de protec ie n vederea transport rii a depozit rii sau return rii la produc tor Observa ii n echipamente se g sesc adesea componente sensibile la desc rcare electrostatic ESD Majoritatea echipamentelor moderne includ componente electronice realizate n tehnologie metal oxid semiconductor NMOS SMOS etc Experien a a dovedit c acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab intensitate Componentele defectate
131. sitifs internes 3 Les cartes de circuits imprimes doivent tre transport es dans un r cipient conducteur Les cartes ne doivent enlev es de cette enveloppe protectrice qu au dernier moment juste avant l installation Les cartes retir es doivent tre immediatement plac es dans un recipient de protection pour le transport le stockage ou le retour usine Observations Brooks Instrument n est pas le seul a proposer des produits comportant des composants sensibles aux d charges lectrostatiques La plupart des produits lectroniques modernes contiennent des composants qui utilisent des technologies a oxydes m talliques NMOS SMOS etc L exp rience d montre que d infimes quantit s d lectricit statique suffisent endommager ou d truire ces appareils Les composants endommag s meme s ils semblent fonctionner correctement tombent rapidement en panne 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 German Wichtige Anweisungen Bitte zuerst lesen Brooks Instrument entwickelt produziert und testet seine Produkte derart dass sie viele nationale und internationale Standards erf llen Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt Die folgenden Anweisungen m ssen eingehalten werden und in Ihr Sicherheitsprogramm integri
132. the following pin out should only be done with table to construct one power off 1 Connect the cable to the gauge 2 Hand tighten the lock screws to secure the connectors CMX PIN PIN ASSIGNMENT 1 Output signal No connection Temperature status 15 VDC 15 VDC Chassis ground Remote ZERO trigger Signal common External power supply common o o Noa m 9 Pin Sub Female Connector Option 1 Figure 20 CMX45 and CMX100 9 Pin D Connector Pinouts CABLE Pinout Description Tip RS_A CMX Ring 1 RS B Sleeve Ground PLUG DIAG Figure 21 CMX RS 485 Port 2 5mm Jack p 20 _INSTALLATION 3 0 PIN 4 PIN ASSIGNMENT 1 Temperature in control relay NO 2 Pressure signal 3 Temperature in control relay common 4 Temperature in control relay NC 5 Power supply common 6 15VDC 7 15 VDC 8 Relay 1 Normally OPEN 9 Relay 1 Contact common 10 Relay 1 Normally CLOSED 11 Overheat Relay Normally OPEN 12 Signal common 13 Overheat Relay common 14 Overheat Relay Normally CLOSED 15 Chassis ground Connector Option 5 CMX160 only 15 Pin D Sub Female PIN 4 PIN ASSIGNMENT 1 Temperature in control relay NO 2 Pressure signal 3 Temperature in control relay common 4 Temperature in contro
133. the need to wait for the device to re stabilize after each vent to atmosphere Although not required to protect the it is strongly recommended that you use an isolation valve for CMX with one Torr and below full scale range 3 4 MATERIAL EXPOSURE The process gas needs to be compatible with Inconel and or 316L stainless steel If the process generates by products that could deposit inside the CMX a heated device should be used to reduce this deposition p 19 _INSTALLATION 3 0 3 5 MECHANICAL CONNECTION 1 Vent the vacuum system 2 Atthe location of installation remove the CMX from the shipping container Take care to not drop the device or contaminate it with dust or other foreign matter 3 Install the CMX in the vacuum system Take care not to twist or apply mechanical loading on the CMX housing or tube 3 6 ELECTRICAL CONNECTIONS All analog CMX CMs produced by Brooks with exception to the DeviceNet zen models are designed to be powered by a plus and minus 15 VDC 5 power ground signal common and supply Temperature controlled devices require more power than unheated power common will severely devices Refer to Specification Tables beginning on page 10 compromise quo of the PASSIS Signal 3 6 1 Analog Connection or 15 pin After assuring power has been removed connect the appropriate 9 pin or 15 pin connector to the device connector If no connector cable is available use one of
134. tion of Relay Actuation Above Setpoint Pressure Hysteresis F S Setpoint Time Figure 5 Direction of Relay Actuation Below Setpoint p 6 2 0 _DESCRIPTION Programming is accomplished through a separate control and monitoring device plugged into the RS 485 2 5 mm serial Diagnostics port DIAG connection located on the top of the CMX See Figure 6 The 2 5 mm serial port connection communicates through a proprietary Brooks communication protocol at 9600 baud The following information can be read from the CMX for each relay Setpoint value Hysteresis value Direction of operation Relay status actuated de actuated Figure 6 Typical CMX User Software Connection The programmable configuration is stored internally in non volatile memory and restored to working memory upon application of power or reset of the CMX 2 6 ZERO OUTPUT BIAS CONTROL NOTE The following method for setting the Output Bias is based on using the CMX User Software Graphical User Interface GUI If the Software is not available call a Brooks Technical Service representative for assistance In some applications the process tool is not able to achieve a base pressure low enough to correctly zero the gauge Typically CMXs should be zeroed at a base pressure five decades below the gauge full scale range As an example a 10T CMX should be zeroed at a chamber pressure of 1x10 Torr If the chamber cannot be pumped do
135. tr kkplaadi v i seadmega muude toimingute teostamisel j rgige n uetekohase k sitsemise juhiseid K sitsemisjuhised 1 Lahutage seade toiteallikast 2 Enne tr kkplaadi v i m ne muu siseelemendi paigaldamist eemaldamist v i konfigureerimist peab personal olema maandatud l bi randmepaela v i m ne muu sobiva vahendi 8 Tr kkplaate transporditakse voolujuhtivas konteineris V tke tr kkplaat kaitsvast konteinerist v lja vahetult enne selle paigaldamist Seadmest eemaldatud tr kkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks hoiustamiseks v i tehasesse tagasisaatmiseks Kommentaarid See seade ei ole ainus mis sisaldab staatilise elektri suhtes tundlikke elemente Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente mille valmistamiseks on kasutatud metalloksiidtehnoloogiat NMOS SMOS jne Kogemused n itavad et isegi v ike kogus staatilist elektrit v ib neid seadmeid kahjustada v i isegi h vitada Kuigi v ib n ida et kahjustatud komponendid t tavad n uetekohaselt hakkavad talitlush ired ilmnema juba varakult 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 Finnish Perusohjeet Lue ensin ohjeet huolellisesti Brooks Instrument suunnittelee valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainv listen standardien vaatimuksia Tuotteet tu
136. urempia kuin 25 mm tai 1 tuuma ovat PED I II Ill kategorien mukaisia Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyv n konepajak yt nn n SEP mukaisia Eurooppalainen direktiivi s hk magneettisesta yhteensopivuudesta EMC Brooks Instrumentin CE merkin saaneet s hk s hk iset laitteet t ytt v t EMC direktiivin vaatimukset ja testit s hk magneettisesta yhteensopivuudesta 2004 108 EC no 89 336 EGK EMC direktiivi Erityist huomioita on kiinnitett v CE merkittyjen laitteiden k yt ss olevien kaapelien valintaan Kaapelien kiinnikkeiden ja liittimien laatu Brooks Insturmentin kaapelit ovat korkealaatuisia ja t ytt v t CE merkint direktiivin vaatimukset Muun valmistajan kaapelia k ytett ess on k ytett v 100 suojattua kaapelia Liittimien tulee olla h iri suojattua tyyppi Tarvittaessa k ytet n metallisia kiinnikkeit kaapelin suojuksen kiinnitt miseen Kaapelin suojakuoren pit olla yhdistettyn metallisuojukseen tai laippaan ja sen pit olla molemmista p ist suojattuna 360 Suojaus p ttyy maadoitukseen Standardin mukaan korttien liittimet eiv t ole metallisia K ytettyjen kaapelien suojaus on oltava 100 jotta se t ytt isi CE merkinn n direktiivin vaatimukset Suojaus p ttyy maadoitukseen Napojen j rjestys Katso liitteen oleva k ytt opas Elektrostaattinen purkaus ESD VAROITUS Tuote sis lt elektroniikkakomponentteja jotka voivat vahingoittua
137. utiliza o Durante a instala o explora o e manuten o dos equipamentos da Brooks Instrument as instru es seguintes devem ser observadas e integradas no programa de protec o e seguran a no trabalho e Para assegurar desempenho adequado a instala o explora o actualiza o e manuten o do equipamento deve ser realizada exclusivamente por pessoal qualificado Antes de instalar explorar e executar opera es de manuten o do equipamento devem ser lidas todas as instru es No caso do presente manual n o ser apropriado procure na capa traseira o distribuidor mais pr ximo e contacte o para obter informa es adicionais Guarde este manual para refer ncia futura ATEN O n o fa a funcionar o equipamento fora da gama de trabalho indicada nas instru es de explora o Da viola o desta advert ncia podem resultar graves les es pessoais ou avarias no equipamento Se as instru es deste manual n o forem claras contacte o representante Brooks Instrument para esclarecer as suas d vidas Observe todas as advert ncias apelos e instrug es indicadas no equipamento e ou fornecidas junto com mesmo Instale equipamento observando todas as instrugdes indicadas no manual e as prescrig es vigentes nos regulamentos locais e nacionais Ligue o equipamento exclusivamente s fontes de energia el ctrica e pneum tica adequadas Procedimento 1 Pressurize lentamente sistema Abra lentamente
138. v OWOT EYXEIP IO OUUBOUAEUBEITE TO TTIOW EEWPUAAO TA OTOIXE C ETTIKOIVWVIAG TOU TOTTIKO AVTITTPOOWTTOU PUAGETE EYXEIPI IO AUTO UEAAOVTIK avapop NPOEIAOMOIHEH Mn TN OUOKEUN AUT UTT P ACN opiwv Eyxsip dio OSnyiwv Kai H un OUHHOPYWON HE TNV TTPOEI OTTOINON auTH Hrropei va oe GOBAPO TTPOOWITIK TpauHaTioH EEOTTAIO H Ze TTEPITTTWON un K TTOIAG OTTO IEUKPIVIOEIG ATT TOTTIKO AVTITTP OWTTO Brooks Instrument AEG TIG TTPOEI OTTOIFJOEIG TTPOPU EIG Kal O NVIEG cuvode ouv ro Trpoi v OUOKEUN TTWG TIPOBAETTETAI OTIS EYKAT OTAONG TOU OWOTOU EYXEIPI IOU OONYIWV KAI OTIC KE HEVEG TOTTIKEG KAI OVIK G IAT EEIG ZUV EOTE rrpoi vra OTIG EKGOTOTE OWOTEG PEUHATOG KAI TTIEONG Aa ikacia 1 va EEKIV OEI apy oro AvoigTe apy TIG BAABI EG Aerroupy ag VIA ATTOMUYETE TIG ATTOTOUEC AU OLEIWOEIG 2 EA yGre via IAPPOEG TIG OUVO OEIS EIG OU KAI EE OU TOU Av dev UTT PXOUV diappo g YENIOTE ro O OTNUC HEXPI N TTIEON PT OEI TNV Trigon arr
139. valific ts personals Neatlautu dalu un proced ru izmanto ana var ietekm s ra ojuma sniegumu un samazinat procesa dro ibu Lidzigu bet ne identisku dalu nomainas lietoSana var izraisit ugunsgr ka elektrisko trauc jumu riskus un nepareizu izstradajuma darbibu Nodro iniet lai b tu aizv rtas visas durvis un b tu pareizi uzst d ti visi aizsargp rsegumi t d j di nov r ot elektro oka un traumu risku Iz mums ir gad jumi kad kvalific ts person ls veic ra ojuma apkopi 4 BR DIN JUMS Ja idr s pl smas ier u tuvum eso os iepl des un izpl des v rstus k da iemesla d ir j aizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas spiedieniek rtu direkt va PED Uz vis m spiedieniek rt m kuru iek jais spriegums p rsniedz 0 5 bar g un ir liel kas par 25 mm jeb 1 collu attiecas Eiropas spiedieniek rtu direkt va PED s rokasgr matas tehnisko parametru noda ir sniegtas a PED Direkt vu saist t s instrukcijas aj rokasgr mat aprakst tie m r t ji atbilst EN Direkt vas 97 23 EK pras b m Visi Brooks Instrument pl smas m r t ji ietilpst 1 idrumu grup Uz 25 mm jeb 1 collu maziem un maz kiem m r t jiem attiecas labas in enierijas prakse SEP 25 mm jeb 1 collu mazi vai maz ki m r t ji atbilst PED kategorijai I II vai Ill Eiropas
140. visiranjem izdelka kolikor ta priro nik ustrezna publikacija na zadnji strani poi ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt Prihranite ta priro nik za poznej e informacije OPOMBA Ne koristite napravo izven podro ja iz navodila za uporabo Prekr ek tega lahko privede do osebnih po kodb ali okvare naprave V kolikor navodila priro nika niso enosmiselna stopite v kontakt z zastopnikom dru tva Brooks Instrument da raz istite problem Drzite se vseh opozoril povabil navodil so navedena ali skupaj 2 njim Napravo instalirajte shodno navodilom relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje Izdelek spojite izklju no ustrezni izvir elektrike in obskrbo tlaka Proces 1 Po asi polozite sistem pod tlak Po asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka 2 Preverjajte ima li curljanja pri povezu vstopa in izstopa merilca toka Ce ni curljanja naplonite sistem na pogonski tlak Pred servisom vsekakor preverjajte ali je pogonski vod pod tlakom Ce je potreben rezervni del svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u inek izdelka oziroma ugrozavajo varnostni pogon Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico po ar nevarnost elekti nega Soka ali nedovol
141. w inny bezpieczny spos b zanim przyst pi do instalacji wyj cia lub regulacji obwod w drukowanych lub innych wewn trznych podzespo w elektronicznych urz dzenia 3 Obwody drukowane nale y transportowa w przewodz cym pojemniku P ytki drukowane nale y wyjmowa z opakowania ochronnego bezpo rednio przed ich monta em Wymontowane p ytki nale y niezw ocznie umie ci w opakowaniu ochronnym s u cym do transportowania sk adowania lub odsy ania do producenta Uwagi Fakt e urz dzenie zawiera cz ci nieodporne na wy adowania elektrostatyczne ESD jest rzecz normaln Wi kszo nowoczesnych urz dze elektronicznych zawiera komponenty wykonane w technologii tlenk w metali NMOS SMOS itp ak pokazuje praktyka nawet niewielkie wy adowanie elektrostatyczne mo e uszkodzi lub zniszczy takie urz dzenie Uszkodzone Cz ci nawet je eli na poz r dzia aj poprawnie szybko doprowadzaj do nieprawid owej pracy urz dzenia k Installation and Operation Manual 9 0 Essential Instructions X VAC CMX eng Part Number 541B154AAG January 2011 Brooks CMX Series Portuguese Instruc es Basicas Antes de proceder leia as A Brooks Instrument projecta fabrica e testa os seus produtos de forma a que os mesmos satisfa am numerosas normas nacionais e internacionais Os equipamentos devem ser instalados explorados e mantidos de maneira adequada e devem funcionar de acordo com a sua gama de
142. wn to the appropriate base pressure use the Bias Adjust Control to set the desired output pressure signal The Zero Output Bias Control allows you to add or subtract a bias voltage to the pressure output signal as shown in Figure 7 The units for the Output Bias adjustment are in mV and have a maximum adjustment capability of 250 mV Procedure for Using the CMX Output Bias Adjustment 1 Pump the chamber down to the minimum achievable pressure 2 Determine the actual chamber pressure using an appropriate method 3 DO NOT press the Zero Button on the gauge Doing so will cause the CMX to attempt to zero the gauge If the chamber pressure is too high the automatic p 7 _DESCRIPTION 2 0 zero adjust operation will fail anyway If the chamber pressure is within the adjustment range the CMX will zero to that pressure which is not the actual pressure in the chamber That is the CMX will output a zero signal at non zero chamber pressure 4 Connect CMX GUI to CMX and verify communication Refer to the CMX User Software manual page 37 Set Bias Adjust Control value in units of mV to achieve the desired analog output voltage Using the actual chamber pressure from Step 2 above adjust the Zero Bias Adjust Control until the analog output voltage matches the known chamber pressure or desired offset signal ZEROED SENSOR SIGNAL TA U ANALOG OUTPUT ADJUSTED 1 1 1 USER ZERO S
143. wowane aby zapewni ich prawidtowe dziatanie zgodnie ze specyfikacja techniczna Podczas instalowania obstugiwania i konserwowania produkt w firmy Brooks Instrument nalezy przestrzega nastepujacych zalecen Aby wtasciwe dziatanie sprzetu instalacja obstuga aktualizacje programowanie i konserwacja powinny wykonywane przez przeszkolony personel Przed instalacja obstuga i czynnosciami serwisowymi nalezy zapoznac sie ze wszystkimi zaleceniami producenta uzyskac instrukcje obstugi odpowiednia dla danego sprzetu nalezy skontaktowa sie z lokalnym przedstawicielem handlowym producenta Instrukcje obstugi nalezy zachowa do p niejszego uzycia A OSTRZEZENIE Nie wolno przekracza podanych w instrukcji zakres w dziatania urzadzenia Nieprzestrzeganie tego zalecenia moze doprowadzi do powa nego zagro enia ycia lub zdrowia personelu i lub uszkodzenia sprz tu e Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument aby wyja ni problem e Nale y post powa bior c pod uwag wszystkie ostrze enia uwagi i zalecenia umieszczone na produkcie lub do czone do niego Instalacj urz dzenia nale y przeprowadzi zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi zuj cymi lokalnymi i narodowymi oznaczeniami Wszystkie urz dzenia mo na pod cza wy cznie do odpowie
144. y Darbo proced ra 1 Atjunkite renginio maitinim 2 Darbuotojai turi pasir pinti jzeminimu naudodami rie o juostel ar kitas saugias tinkamas priemones prie jd dami i imdami ar reguliuodami bet koki spausdintin s plok t s kortel ar kit vidin komponent 3 Spausdintin s plok t s korteles reikia transportuoti laid iame konteineryje Neleid iama i imti plok t s i apsauginio d klo nebent prie pat d jim I imtas plok tes reikia nedelsiant d ti apsaugin konteiner transportavimui ar saugojimui arba gr inti gamykl Pastabos is instrumentas n ra unikalus d l jame esan i ESD elektrostatiniam i lyd iui jautri komponent Daugelyje iuolaikini elektronini gamini yra komponent kuriuose naudojama metalo oksid technologija NMOS SMOS ir pan Patirtis rodo kad net ir ma as statin s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti Sugadinti komponentai net jei atrodo kad jie veikia tinkamai anksti nustoja veikti 9 0 Essential Instructions Installation and Operation Manual X VAC CMX eng i Part Number 541B154AAG Brooks CMX Series January 2011 Polish Zalecenia wstepne Prosimy przeczytac przed rozpoczeciem uzytkowania Brooks Instrument projektuje wytwarza i testuje swoje produkty tak aby spetniaty wymagania licznych norm krajowych i miedzynarodowych Te produkty musza by poprawnie instalowane obstugiwane oraz konser

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