PR 4000 F - Ideal Vacuum Products, LLC
Contents
1. P 53 Ba drate BD deene EEN se eir tectam tee ER EUER EE 53 Address AD RE el dd e eee 53 Interface Mode IM E 53 te RE EE 54 Reset Status REL e teta ein nes iq e bat e tese acer Rice based Rings 54 Detaulb Nee EE DEE EE EE EE 54 Appendix A Specifications cian ek ba 55 Appendix B Error MesSsagg6S conico iie teet toga heahinadeanel 57 Appendix C Default CGonfouraion esses mene AAEE 59 MKS Worldwide Calibration amp Service Cenmterg een 61 vi PR4000F List of Figures and Tables List of Figures and Tables Figures Figure t RENE ET 11 Figure 2 Front Pariel itii toaster Leur E ER COHEN Se hea shetinbiadadogbetanensemndted Led ERE 13 Figure 3 Rear Panel of the PROOF AAA 14 Figure 4 Structure of the menu 19 Tables Table 1 Definition of Symbols Found on the Un 2 Table 2 Standard Interconnecting Cables mssssssssssssrrrsrrrrrsrrrrresrrrersrrrerrr sr srsr sr emen 9 Table 3 RUS Informatica 12 vii List of Figures and Tables PR4000F This page left blank viii PR4000F Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual procedure practice condition or the like which if not correctly Warning V The WARNING sign denotes a hazard It calls attention to a performed or adhered to could result in injury to personnel operating procedure practice or the like which if not2. 24 V 1A optional two line display configurable allows simultanous readout of both channels or one channel actual value plus setpoint physical values displayed with engineering units non volatile memory for easy restart after power loss or switching off power For more details and specifications refer to Appendix A Specifications Chapter 1 General Information PR4000F 1 2 How This Manual Is Organized This manual provides instructions on how to install set up and operate the PR4000F unit Before installing your PR4000F unit in a system and or operating it carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual In addition observe and obey all WARNING and CAUTION notes provided throughout the manual Chapter 1 General Information this chapter introduces the product and ist manual Chapter 2 Installation explains environmental requirements and practical considerations for the installation Chapter 3 Overview reviews the PR4000F controller It describes the components on both the front and rear panels and describes the electrical connections Chapter 4 Operation explains the parameter editing Setup describes how to operate the unit and contains examples for system configurations Chapter 5 Interfaces describes the RS232 and RS485 interfaces Appendix A Specifications lists the technical data of the unit Appendix B Error Mess
3. Refer to appendix B for a list of error codes and their interpretation Example 1 OK no error detected Example 2 E002 Error Can not perform autozeroing Control Display AZ1 VLV1 R1 AZ2 VLV2 R2 AZ1 AZ2 Zero adjustment AutoZero of channel 1 or channel 2 respectively To initiate the autozero cycle first indicate the respective channel with the left right arrow key and then press the ENTERkey It is recommended to check that the readout will be set to zero 0 1 Digit Repeat the autozero cycle if necessary For correct zeroing please read the respective instructions for the transducers meters or controllers in use e g thermal stabilization proper evacuating of absolute pressure transducers etc The PR4000F stores the detected offset of the transducer meter or controller in use and corrects automatically the reading by this value In case of MFC s or pressure controller the setpoint which is sent out will also be corrected automatically 34 PR4000F Chapter 4 Operation During the autozero cycle the display shows ACTIVE followed by a short report DONE if the procedure was completed successfully If the zero offset signal of the meter exceeds 250 mV the PR4000F will not perform the autozero process and display FAIL If this is the case you should carefully check if all requirements for a correct zeroing are fullfilled and if necessary do a coarse zero adjustment at the meter or transducer The zero
4. SPDT 1A 30V Interface Standard Option Power output Standard 15 V 0 8 A Option 15 V 1 5 A Option 24 V 1A Input power 115 230 VAC 50 60 Hz Operation temperature 15 40 C Weight 1 5 kg 55 Appendix A Specifications PR4000F This page left blank 56 PR4000F Appendix B Error Messages Appendix B Error Messages E 002 ADC Overflow or Underflow E 003 Range Error Setpoint 0 or out of Range W 001 Offset 250 mV 57 Appendix B Error Messages PR4000F This page left blank 58 PR4000F Appendix C Default Configuration Appendix C Default Configuration RTDOFFS1 RTDOFFS2 OmV OmV RESOL16 Appendix C Default Configuration PR4000F This page left blank 60 PR4000F MKS Worldwide Calibration amp Service Centers MKS Worldwide Calibration Service Centers UNITED STATES MKS Instruments Inc Corporate Service Center 651 Lowell Street Methuen MA 01844 978 682 4567 Fax 978 682 8543 MKS Instruments Inc HPS Division Vacuum Components Valves amp Gauging 5330 Sterling Drive Boulder CO 80301 303 449 9861 800 345 1967 Fax 303 442 6880 CANADA MKS Instruments Canada Ltd 30 Concourse Gate Nepean Ontario Canada K2E 7V7 613 723 3386 800 267 3551 CAN only Fax 613 723 9160 FRANCE MKS Instruments France s a 43 Rue du Commandant Rolland B P 41 F 93352 Le Bourget Cedex France 33 1 48 35 39 39 Telex 23
5. Table 2 Standard Interconnecting Cables Note ud Flow controllers with 9 pin connector do not have the Valve Close input i remotely closing of the control valve Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment Should you choose to manufacture your own cables follow the guidelines listed below 1 The cable must have a braided shield covering all wires Neither aluminum foil nor spiral shielding will be as effective using either may nullify regulatory compliance 2 The connectors must have a metal case which has direct contact to the cable s shield on the whole circumference of the cable The inductance of a flying lead or wire from the shield to the connector will seriously degrade the shield s effectiveness The shield should be grounded to the connector before its internal wires exit 3 With very few exceptions the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice Chapter 2 Installation PR4000F 4 For shielded cables with flying leads at one end it is important at such end to ground the shield before the wires exit Make this ground with absolute minimum length After picking up the braid s ground keep wires and braid flat against the case With very few exceptions grounded metal covers are not required over terminal strips I
6. flow rate of 40 sccm shall be generated Therefore you must set the scaler SCL 40 sccm The external setpoint signal however could be derived from the flow signal of an other PR4000 sein This allows for example to configurate several channels to a gas mixing system The value of the external voltage can be displayed Use the EX mode in the display configuration ref to section Setup 37 Chapter 4 Operation PR4000F c SLAVE If one chamnel is configurated as a slave then the other channel of the unit becomes automatically the master of this slave The slave s setpoint is derived from the actual signal of the master This enables configurations of gas mixing systems with fixed ratio e g for supplying gas burners deposition purposes etc An example is given in the SETUP section Combinations of these modes are possible 4 7 Operation with flow meters For the use with mass flow meters it is recommended to simplify the setup settings by using the default configuration for flow DEFAULT F All flow readouts will be set to sccm all analog inputs and outputs set to 5 V Most if not all parameters to be edited are set to standard values but should be checked anyway See the table in appendix C for all default settings Change the setup settings where needed Always check the correct setting of parameter GAIN to consider the right gas correction factor Because flow meters do not require setpoint signals one could use only dis
7. scale 5 110 of FS set scale retrieve scale Linearization LN LS LNc point x y setup of linearization table x y point 0 10 X y 5 100 of FS Limit Mode LM LMc Imode setup limit mode Imode O SLEEP 1 LIMIT 2 BAND Dead Band DB DBc deadband setup of dead band HY is an alias deadband deadband 0 0 9 9 of FS set dead band retrieve dead band 51 Chapter 5 Interface PR4000F Upper Limit UL ULc upperlimit setup of upper limit upperlimit upper limit 5 110 of FS set upper limit retrieve upper limit Lower Limit LL setup of lower limit lowerlimit lower limit 5 110 of FS Formula Relay FR FRr neg src op neg src op neg src setup of relay source neg src op neg src op neg src r Number of formula 1 2 neg Sign for negation is src R1 R2 L1 L2 U1 U2 E1 E2 V1 V2 D1 D2 T1 T2 T3 T4 1 0 op Operator is OR is AND x is XOR set formula retrieve actual formula Formula Temporary FT FTt neg src op neg src op neg src setup of temporary formula neg src op neg src op neg src t Number of formula 1 4 The rest is the same except that the four sources T1 T2 T3 T4 are not available set formula retrieve actual formula 52 PR4000F Chapter 5 Interface Parity PY PY parity setup of parity parity parity OZNONE 1 EVEN 2 ODD set parity retrieve p
8. Criteria B must be fullfilled but not both NOT 1 Criteria must not be fullfilled Negation Here are two examples for the use of logic formulas for the relay status Liv U2 L1 OR NOT U2 R1 L1 E1 R1 AND L1 AND E1 40 PR4000F Chapter 4 Operation The PR4000F applies these formulas to the relays RLY1 and RLY2 Use the cursor which allows the following settings dependent from his position RLY R1 Position under gt Selection of numbers of criteria Position before or after criteria gt Choice of operation Position under a criteria gt Choice of criteria or of a constant value Examples RLY1 211v 7 U2 Relay 1 is activated when the signal is below lower limit of channel 1 or high limit of channel 2 is not exceeded RLY2 2R1 L1 E1 Relay2is active when R1 and El are activated and signal is below lower limit of channel 1 41 Chapter 4 Operation PR4000F This page left blank 42 PR4000F Chapter 5 Interface Chapter 5 Interface 5 1 General The PR4000F offers two serial interfaces a RS232 and a RS485 The RS232 is a connection between two devices Host and PR4000 The RS485 connects the host to up to 30 PR4000 what makes an address code for each command necessary The synchronization between host and PR4000 is maintained by a strict command reply cycle You may only send the next command if there was a reply received completely The parser brings an error on wrong commands but not on ambiguous
9. OVOervi8w uu o oce rode eer oder ba Co ERR SLR EE CE EE SE 3 1 Front Panel ii ti EE E Saved dad 3 2 O evi cea de dv i hin Ee maed VE Ee E B33 ee el te EE Table of Contents Table of Contents PR4000F Chapter 4 Operation nee a dd re E DL 19 4 1 Structure of the Menu nen A Y E NEEN 19 42 gt e te EE 20 SWITCHING ONsEdit mode aterrado torn rica ated bea co EP OE DOR EE 20 Switching Off Edit ue 20 Decimal Poet a reed RB ahnen 20 O cus RI dg DER e tels SEE EE 21 Entering SUP iia 21 dee Bi a O 29 Interface E 31 EXIT SOU Pics UE 32 4 4 COMO rte ev ege e ve Rn ev e RR ue V e FAN 33 Display for measurement values and setpoints e 33 Status Displays 3 tree rede hee Pera d ek si Peta e Fe Met re a Eo atr ees 34 Control DISplay D 34 4 5 Operation with pressure transducers ooccccoonnccccnonoccnnnnnnccnonnnnccnnnnnnccnnnnnncrcnnnnncccnnnnncinnns 35 Operation with Baratron Type 120 isnsnssssssssressssrresssssrosssrronssrrnn sr mme ener nenn 36 4 6 Operation with mass flow controllers ME 37 Control Modes with Mass Flow CGontrollers mm 37 4 7 Operation with flow meters AAA 38 4 8 Operation with pressure controllers mnssmsssssssssrrsrssrrrrsrrrrrsrrerrsrrrersrrrrrsr menn mener 38 4 9 Limit switches and relavs AAA 39 SLEEP auction 39 ll A A A A Bella MR 39 BAND iis ces HAE 39 MEM a rc 39 MBAND ume d MOI MEE 39 Elle EE A0 PR4000F Table of Contents Chapter 5 Interface ce nes IB in doe e Helge 43 5
10. and S for the correction point 42 would be LINT P2 S6 mbar 0 1996 lt gt 0 2004 The sequence of the correction points must be strong monotone Linearization is done by linear interpolation between two consecutive data points 28 PR4000F Chapter 4 Operation Trip Limits The PR4000F provides three trip limit modes L MIT BAND and SLEEP The supervision modes LIMIT and BAND further provide a memory mode by selecting MLIMIT and MBAND respectively Limit Mode extra window for channel 1 and channel 2 LIM MODE1 LIMIT DEAD BAND1 1 5 In the limit mode you can set two switchpoints and the hysteresis In the window shown the hysteresis DEAD BAND is set to 1 596 030 00 mbar 015 00 mbar The switchpoints shown are set to UL Upper Limit 30 00 mbar LL Lower Limit 2 15 00 mbar It is also possible to set a switchpoint to a negative value Set the cursor in front of the parameter and press the down key 29 Chapter 4 Operation PR4000F The switching mode of the relay RLY1 and RLY2 is configured in this menu In the example shown relay RLY1 is activated and simultaneously shown is it s status when the lower limit 1 here 15 00 mbar was passed or indicated by the logic symbol V the upper limit U1 here 30 00 mbar was passed To both limits the selected value for the hysteres must be added In the example shown relay RLY2 is set to an idle state Refer to the section Relay Settings at
11. connector ACCESS This connector provides access to different utility signals on the channel connectors without the need of making a split cable The access is a direct one that means there is no electronic circuitry between and it may be used for troubleshooting or override the control valve of a mass flow controller or in line pressure controller 9 pin Sub D Socket Um remm m orem i man fe ETE DEMI Te CCE Op en 16 PR4000F Chapter 3 Overview RELAY 15 pin Sub D Socket IC m e Relay 1 Common Relay 2 Normally closed Relay 2 Normally open gt C5 N o 17 Chapter 3 Overview PR4000F RS232 9 pin Sub D Pin RXD No connection TXD No connection GND No connection EN No connection RS485 15 pin Sub D Shield Send Data T B Send Data T A No connection No connection Reveive Data R B Reveive Data R A No connection No connection 1 No connection No connection 14 U2 15 V 24 V optional GND 2 U1 5 V optional GND 2 18 PR4000F Chapter 4 Operation Chapter 4 Operation After switching on the power the following information is displayed for 2 3 seconds PR4000 2CHANNELS V 01 29 19991011 here Version 01 29 Oct 11 1999 Then the unit switches automatically to display 1 which may be used for routine operation This section describes how to configurate the different displays and how
12. correctly performed or adhered to could result in damage to or destruction of all or part of the product Caution u The CAUTION sign denotes a hazard It calls attention to an Note 1 The NOTE sign denotes important information It calls attention to a tg procedure practice condition or the like which is essential to highlight Safety information Symbols Found on the Unit The following table describes symbols that may be found on the unit On Supply IEC 417 No 5007 d Frame or chassis IEC 417 No 5020 TN Both direct and alternating current IEC 417 No 5033 a A Caution refer to accompanying documents ISO 3864 No B 3 1 Definition of Symbols Found on the Unit Off Supply IEC 417 No 5008 y Equipotentiality IEC 417 No 5021 0 an Three phase alternating current Earth ground IEC 417 No 5017 Direct current IEC 417 No 5031 Class Il equipment IEC 417 No 5172 a A AN Caution hot surface IEC 417 No 5041 Caution risk of electric shock ISO 3864 No B 3 6 Table 1 Definition of Symbols Found on the Unit IEC 617 2 No 020206 PR4000F Protective earth ground IEC 417 No 5019 oN Alternating current IEC 417 No 5032 PR4000F Safety Information Safety Procedures and Precautions The following general safety precautions must be observed during all phases of operation of this instrument Failure to comply with these precautions or with specific warnin
13. to set the parameters for operation and control 4 1 Structure of the Menu The menu is divided in two levels 1 Displays for standard operation These displays show measurement values setpoints trip limit information etc 2 Setup Here the system configuration and the displays are set and parameters can be edited Operation Level IN I I I i gt 1 23 2777722 Param 3 F 1Param p 1 Param 1 Setup Level Figure 4 Structure of the menu 19 Chapter 4 Operation PR4000F It is recommended to deactivate the entry into the setup see figure 4 after all parameters have been edited This allows quick switching through the 1 to 4 operational displays in a circular mode without stepping through all setup dialogs By pressing the escape key ESC one time it is easily possible to switch the unit back to the display 1 from any position in any level 4 2 Editor The PR4000 is operated and configured by dialogs two line LCD or digital I O RS232 RS485 The dialogs are organized in a simple table hierarchy All the dialogs can be accessed and displayed easily you can change from one dialog to another using the up down arrow keys or return to the main dialog at any time by pressing the ESC key The dialog table is divided in two parts an operation and a setup part Switching on Edit mode Edit mode can be switched on or off in the dialogs You can enter numeric values in Edit mode alte
14. value retrieve setpoint and enable status Actual Value AV AVc setpoint get actual value te setpoint actvalue 5 110 of FS retrieve actual value retrieve actual value and set setpoint 46 PR4000F Chapter 5 Interface Setpoint SP SPc setpoint set setpoint setpoint 5 110 of FS set setpoint retrieve setpoint External Input EX extinput 5 110 of FS retrieve external input Status ST request of hex status word hexsts bits O comerr 1 underrange AINO 2 overrange AINO 3 underrange AIN1 4 overrange AIN1 5 relayO 6 relay1 7 parameter changed by user retrieve status Valves VL VLc enable set channel specific valve status enable enable OFF ON set valve of channel 1 retrieve vavle status of channel 1 47 Chapter 5 Interface PR4000F Relays RL RLc enable set manual setting of relay enable enable OFF ON set relay 1 retrieve relay 1 status Displays DP DPd line tag chn enable setup configurable displays tag chn OFF line 1 2 tag 0 SP 1 VA 2 CH 3 FL 4 PR 5 EX chn 1 2 enable OFF ON sets display 1 line 1 to FL of channel 1 retrieve setting of display 1 switch display 2 off Display 4 DP4 DP4 enable setup configurable display 4 enable enable OFF ON switch display 4 on Range RG RGc range unit Einstellen des Bereiches und der MaBeinheit range unit range Bereic
15. 1 Generali A hed vd acia D VE eaa Log ev deu dus 43 EE ul Eu ET 43 ECHTEN MET A4 Sa Error repy A too sueco Leia rei Et bru Po Max dss arn oe oda EE Deos adde Ead 44 Sa E lune EE 45 Sample COMMANG iS 45 Display TE RE 45 Request Key KY ae o a ea det ean bead ea 45 Dialog DG ua ina 45 tere E EE EE EE EE 46 Remote Mode RT nn ee eis benennen 46 Access Channel AG miro torito acid 46 RN 46 SOMON OP m TE 47 External Input EX oue eue E eu 47 Status S T cce e n ut Ss e eem 47 MEUTIRABMPM EUM 47 Relays AD eet ebe EEN EE EEN 48 Displays DP cs EG dia 48 Display 4 DP4 ccc 48 Range AU ias 48 riche M 49 Offset OP A EEN 49 RTD Offset RO A EEN 49 Porra 49 Input Ste DAT xe o E e RUE Sh ERE ERE evan RR D ERE d ERN ARA FAR XI MEX SERERE gen 49 Output Range QT eee e Eee e RR E IARE IRR I D RR ERE Eee 50 External Input Range El cpi e ei RR io 50 External Output Range EQ ie en nn 50 Signal Mode SM liinda 50 Scale Socio A A A O a fs 51 Linearization ENG ES Enc het eg Toe re o eren Puce e o esu ret d 51 bimit Mode EM oxide reatu ie etd ated tutt eda eroe atta 51 Dead Band DB anne ne 51 Table of Contents PR4000F Upper Limit Ulloa dd SLANT BRA SERA ee een 52 Lower Limit LL 24 2 en 52 Formula Relay FR OC 52 Formula Temporary FT ieoe tete iae tete tereti cod ode eH OH RENE HE COLE Ha RES o reb R Cede 52 aElVALASNTITH rE
16. 3817 F Fax 33 1 48 35 32 52 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 M nchen 49 89 420008 0 Fax 49 89 42 41 06 e mail mks germanyOmksinst com ITALY G Gambetti Kenologia Srl Via A Volta No 2 20082 Binasco MI Italy e 39 2 90093082 Fax 39 2 905 2778 JAPAN MKS Japan Inc Harmonize Building 5 17 13 Narita Higashi Suginami Ku Tokyo 166 Japan e 81 3 3398 8219 Fax 81 3 3398 8984 KOREA MKS Korea Co Ltd 2 Floor Shin Young Bldg 257 4 Yangjae Dong Seocho Ku g 82 2 529 0713 4 Fax 82 2 529 0715 UNITED KINGDOM MKS Instruments U K Ltd 1 Anchorage Court Caspian Road Altrincham Cheshire WA14 5HH England 44 161 929 5500 Fax 44 161 929 5511
17. PR 4000 F 2 Channel Power Supply and Readout for Flow and Pressure Instruction Manual idealvac com deal MKS Instruments vacuum products Release 05 2000 Deutschland GmbH gt e 505 872 0037 idealvac com Copyright O 2000 by MKS Instruments Deutschland GmbH All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Printed in the Federal Republic of Germany PR4000F Table of Contents Safety Information Symbols Used in This Instruction Manual sene Symbols Found on the Unib sedas e R a Safety Procedures and Precautions ooocccooccconccccnccnconcncnncccnnnnnoncnccnncnnns Chapter 1 General Information seeeeesseeeeieeereiissrrieeetriresrriiserrrreerrnne 1 1 General Description 1 2 How This Manual ls Oroantzed eerren 1 1 Customer Support Chapter 2 OS Telle H eating RSS VIRKA eT Ee UE 2 2 Unpacking Checklist AAA 2 9 Cables cavis Annan insb Bienen Interconnection Cabels from Mk Generic Shielded Cable Description sssssssssrrssssresssrrrssnrrrrnnsrrrnnrnraa 2 4 Installation MOUNtNO assossessrrssrrsrererrrsreerrnnrrenrrrnrr rn rr rn m Dimensions en did Upe Powerand FUSES nn E be DE em d ere 2 5 Switching on the unt Chapter 3
18. ages contains a list of error messages shown in the display Appendix C Default Configurations lists the default settings for both pressure and flow 1 1 Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of your Type PR4000F instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS your service center can inform you about the need for an ERA Number Equipment Return Authorization Number or a form for declaration of decontamination or other regulations before shipping The ERA Number expedites handling and ensures proper servicing of your instrument Please refer to the last page of this manual for a list of MKS Calibration and Service Centers Warning All returns to MKS Instruments must be free of harmful corrosive radioactive or toxic materials PR4000F Chapter 2 Installation Chapter 2 Installation 2 1 Unpacking MKS has carefully packed the Type PR4000F unit so that it will reach you in perfect operating order Upon receiving the unit however you should check for defect
19. and setpoint Example use display 1 for flow readout and display 2 to enter and display the setpoints The setpoints can be entered in either the setup menu or in the respectively configurated display To activate the setpoint output press the ON key The activation is indicated by the LED SETPOINT Press the key OFF to switch off the setpoint output If no LED SETPOINT is activated then none of both channels was pre selected that means the valve switch is off Refer to the section Control Display VLV1 VLV2 Note ud The setpoint voltage will be applied only to channels which have been d pre selected with the valve switch VLV1 or VLV2 Beside the thermal mass flow controllers also pressure based MFC s by MKS Instruments type 1150 1151 and 1152 can be combined to the PR4000F Control Modes with Mass Flow Controllers a INDEP Use this mode if the MFC shall be operated independently from the other channel and setpoints are entered manually through the front panel keys b EXTRN In this mode the MFC shall be operated independently too but the setpoint comes from an external signal source The range of the external setpoint voltage must be defined in the setup section for El1 or El2 respectively The setting of the scaler SCL determines the ratio of the external setpoint to be applied to the respective channel Example for an MFC control range 0 100 sccm external setpoint voltage range 0 5 VDC At 5 VDC external setpoint voltage a
20. arity Baudrate BD BD baudrate setup of baudrate baudrate baudrate 0 110 1 1200 2 2400 3 4800 4 9600 5 19k2 6 38k4 7 57k6 8 76k8 9 110k set baudrate retrieve baudrate Address AD AD address setup of address address address 0 15 set address retrieve address Interface Mode IM IM ifacemode setup of interfacemode s command is not u ifacemode thi sed at the moment set interface mode retriev interface mode 53 Chapter 5 Interface PR4000F Resolution RS RS enable setup of 16 bit resolution enable enable OFF ON set resolution to 16 bit retrieve resolution Reset Status RE R Default DF DF dmode reset to default values Pres Flow set pressure default 54 PR4000F Appendix A Specifications Appendix A Specifications Number of channels 2 inputs for flow or pressure signals 2 inputs for external setpoints 2 outputs for setpoints 2 outputs for signal monitoring Accuracy 0 01 1 Digit Temperature coefficient 0 1 mV K Display format and resolution Two line LCD 16 places per line configurable 4 digits 0000 9999 12 bit resolution 5 digits 00000 99999 16 bit resolution Conversion rate EXTERN not EXTERN 5 Hza 16bit 20 Hz 20 Hz at 12 bit Signal input range all 11 V to be scaled in steps of 1 V Signal output range all 11 V to be scaled in steps of 1 V Relays 2 Relays can be combined with any channel
21. ceholders for command values reply values of command ES reply terminator carriage return 13 5 4 Error reply syntax error codes error escape flag E010 syntax error E020 FAIL of a command execution e g OF command ES terminator carriage return 13 44 PR4000F Chapter 5 Interface 5 5 Commands Sample Command sample description 1 sample description 2 Display Text DT displays text in the display 4 Hex text 32 byte string which will be written to display 4 Request Key KY key number ON 00008 ENTER 00010 LEFT 00012 DOWN 00014 1 Number 0 n return key code return key code and number of keys which were not polled since last command Dialog DG DGL dialog set display to a specific dialog dialog dialog dialog index set display do dialog 2 return actually displayed dialog 45 Chapter 5 Interface PR4000F ID String ID retrieve ID string PR42vvrrsssss format w version returns ID string returns ID string Remote Mode RT RT enable set to remote operation enable enable OFF ON switch PRA000 to remote mode ask for remote mode switch PR4000 to local mode Access Channel AC ACc setpoint vlv access channel actvalue vlv setpoint actvalue 5 110 of FS vlv OFF ON Set setpoint of channel 1 and retrieve actual value set setpoint of channel 2 enable channel valve and retrieve actual
22. ch is displayed correctly by the PR4000F OFFS is the zero offset value of the respective input signal Typically the zero offset is corrected by the auto zero cycle refer to section Contro and the resulting value is shown here It also possible to enter the respective value here which may be necessary in exceptional cases Range Turndown Offset RTDOFFS1 005 mV RTDOFFS2 000 mV The PR4000F allows the user to switch a Baratron 120 series in the range turndown mode automatically This is described in detail in the section Control The auto zero mode determines the zero offset value of both ranges to achieve highest accuracy It is of course also possible to enter the offset values for both ranges manually as described in the menu before 24 PR4000F Chapter 4 Operation Input Signal Range and Output Signal Range extra windows for channel 1 and channel 2 INT 10V OUT 5V EI 5V EO1 5V Each signal input and output can be set for a range between 1 V and 10 V in steps of 1 V This allows the use of MFC s with 10 V full scale flow and or 10 V setpoint signal or pressure transducers with for example 5 Volt full scale Select with the left right arrow keys the respective parameter and make the setting using the up down arrow keys IN1 OUT1 EI EO1 Signal full scale of the transducer or controller connected to channel 1 Pin 2 connector CHANNEL 1 Setpoint signal full scale for the MFC or pressure controller c
23. commands In this case it processes the closest idea of the information received Terminate command only with CR never with lt CR gt lt LF gt 5 2 Command syntax The command syntax is defined as follows were tokens in brackets are optional and token divided by a separator are alternatives There are no blanks between command elements needed Yellow characters are constant gray characters represent placeholders for command values aal emdc emd pt p2 p3 TI address with two digit address flag This element is only used with the RS485 interface E g K912 identifies device with address 12 request prefix causes the device to return the actual value of the parameter identified by cmdc or cmd E g DG asks for the actual dialog default prefix causes the device to set the value of the parameter identified by cmdc or cmd to default E g OF1 sets for the offset to zero cmd cmdc command or cahnnel specific command identifies device parameter or function cmde is with channel specification 1 or 2 E g 0F1 0 012 sets for the offset to 0 012 pi p2 p3 parameter for the function or command E g 0F1 0 012 0 012 is parameter pi DEN command terminator carriage return 43 Chapter 5 Interface PR4000F 5 3 Reply syntax The reply syntax is defined as follows were token in brackets are optional There are no blanks between command elements needed Yellow characters are constant gray characters represent pla
24. dition All electrical fittings must be properly connected and grounded USE THE PROPER POWER CORD Use only a power cord that is in good condition and which meets the input power requirements specified in the manual Use only a detachable cord set with conductors that have a cross sectional area equal to or greater than 0 75 mm The power cable should be approved by a qualified agency such as VDE Semko or SEV Safety information PR4000F This page left blank PR4000F Chapter 1 General Information Chapter 1 General Information 1 1 General Description The control unit PR4000F is designed for the use with mass flow controllers MFC mass flow meters MFM pressure transducers and in line pressure controllers e g type 640 from MKS Instruments Compatibility is just restricted in case of disagreement of electrical specifications The PR4000 is available as single or dual channel power supply readout and control unit This instruction manual however describes only the dual channel version PR4000F Two or more units PR4000 can be combined thus performing multichannel control units Further features Display format four or five digits selectable 2 trip limits and 2 relays can be combined and configured in a wide variety of functions and combinations linearization possible for both channels Interface either RS232 standard or RS485 optional 3 different power supplies 15 V 0 8 A standard 15 V 1 5 A optional
25. e approbriate interconnection cables Note ud An overall metal braided shielded cable properly grounded at both JJ ends is required to meet CE specifications We recommend to use the cables offered by MKS Instruments Cables which are in compliance with the CE guidelines are marked with an E or S example CB259E or CB259S Interconnection Cables from MKS The following table lists the standard cables provided by MKS Instruments They are all in compliance with the CE guidelines If the cable needed for your particular instruments is not listed there then please contact your MKS center The cable length is 3 meters standard length 5m or 10m optional For cable length greater than 10m please contact your MKS center continued on next page PR4000F Chapter 2 Installation Cables for combination with the PR4000F For pressure transducers or in line pressure controllers MKS Cable Type type or series 120 CBE 120 96 3M 121 CBE 112 14 3M 622 623 624 625 223 122A CBE 112 2 3M 621 626 627 628 640 641 127 128 722A with 15 pin type D CBE 259 5 3M connector 722 9 pin type D connector CBE 700 1 3M 722 terminal block CBE 700 99 3M For mass flow meters MFM or mass flow controllers MFC with 15 pin type D connector 179 1179 2179 1479 1259 2259 258 358 1359 558 1559 M100 1640 CBE 259 5 3M with 9 pin type D connectorr 1179 2179 1479 M200 M330 CBE147 12 3M
26. ed to check all parameters for correct settings before starting operation Detailed information for operation of the different kind of transducers controllers etc are given later in this chapter For understanding these instructions it is necessary to have studied the setup informations before After switching on the power or pressing the escape key ESC you will see the first display configured for operation typically display 1 By consecutively pressing the down arrow key you will come to the operation setup level junction Entering Setup RESET 19991011 Enter the setup submenu by pressing the right arrow key A cursor appears under the word SETUP Confirm by pressing the enter key ENTER Or simply press two times the enter key For deactivating the setup level refer to Exit Setup later in this chapter If you mark the word RESET with the cursor and confirm with RESET then all parameters are set to their default values Remember that you leave with they ESC key without changing anything in the particular window Note ud By using the default settings you can ease the setup procedure Refer to Exit Setup last window of the setup level of how select either pressure or flow setup Once entered the setup submenu use the down up arrow keys to step successively to the different windows 21 Chapter 4 Operation PR4000F Configuration of display 1 and display 2 DISPLAY1 CH1 CH2 DISPLAY2 FL2 SP2 In this firs
27. f one is required it will be stated in the Declaration of Conformity or in the instruction manual In selecting the appropriate type and wire size for cables consider The voltage ratings The cumulative FR heating of all the conductors keep them safely cool The IR drop of the conductors so that adequate power or signal voltage gets to the device DOm gt o The capacitance and inductance of cables which are handling fast signals such as data lines or stepper motor drive cables and E That some cables may need internal shielding from specific wires to others please see the instruction manual for details regarding this matter 2 4 Installation Mounting The PR4000F is designed for use in dry and warm environment with sufficient ventilation The device must be installed in such a way that air can circulate free Do not cover the openings at the instrument s housing If there are heat loss generating devices located next to the unit make sure that no excessive heat is transferred to the PR4000F Note ud Position the unit with proper clearance to allow air cooling so that the unit can operate within the specified temperature as listed in appendix A Do not cover the openings at the instrument s housing 10 PR4000F Chapter 2 Installation Dimensions 86 Figure 1 Dimensions above Front and Rear Panel below Side View 11 Chapter 2 Installation PR4000F Line Power and Fuses The two wire line power c
28. gs elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment MKS Instruments Inc assumes no liability for the customer s failure to comply with these requirements DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service personnel only GROUNDING THE PRODUCT This product is grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation DANGER ARISING FROM LOSS OF GROUND Upon loss of the protective ground connection all accessible conductive parts including knobs and controls that may appear to be insulating can render an electrical shock GROUND AND USE PROPER ELECTRICAL FITTINGS Dangerous voltages are contained within this instrument All electrical fittings and cables must be of the type specified and in good con
29. h 5 stellige Zahl mbar Torr kPa unit ubar PSI SLM SCFM set range of channel 1 to 50 SCCM retrieve range and unit 48 PR4000F Chapter 5 Interface gain 0 001 2 000 set gain of channel 1 setup offset offset 250 250 set offset of channel 1 retrieve offset RTD Offset RO ROc offset setup RTD offset offset 250 250 set offset of channel 1 retrieve offset Autozero AZ offset 250 250 perform autozero function of channel 1 Input Range IN INc phyrange setup of physical input range phyrange phyrange 1 10 set input range of channel 1 to 10V retrieve input range 49 Chapter 5 Interface PR4000F Output Range OT OTc phyrange setup of physical output range phyrange phyrange 1 10 set output range of channel 1 to 10V retrieve output range External Input Range El Elc phyrange setup of physical input range phyrange phyrange 1 10 set external input range to 10V retrieve external input range External Output Range EO OTc phyrange setup of physical output range phyrange phyrange 1 10 set external output range to 10V retrieve external output range Signal Mode SM setup of signal mode SS smode 0 METER 1 OFF 2 INDEP 3 EXTRN 4 SLAVE 5 RTD set signal mode to independent retrieve signal mode 50 PR4000F Chapter 5 Interface Scale SC SCc scale setup of scale
30. herefore is set to 500 80 6 25 1 Example as before but for external setpoint mode EXTRN Channel 1 MFC 500 sccm full scale Mode EXTRN this makes channel 1 to be the slave of the external setpoint source Scaler SCL set to 350 00 sccm This means that the external setpoint applied to channel 1 will be scaled down by a factor of 350 500 0 7 Depending on configuration and operational mode it is possible to have the setpoint input s displayed This however is possible only in the INDEP mode For optimum control performance it is advised not to set the scaler to values below 20 off the MFC It is possible but you should instead use MFC s with lower ranges Note ud The setting of the scaler does not affect the independence mode NDEP 27 Chapter 4 Operation PR4000F Linearization extra window for channel 1 and channel 2 LINT PO SO mbar 00 000 lt gt 00 000 The PR4000F offers the possibility to correct known the non linearity of each transducer connected to the instrument This menu provides 11 correction points PO P10 for each channel With the values SO S 10 you can determine how many calibration points shall be used Example for a pressure transducer 1 mbar full scale The 6 point calibration data sheet lists the known deviation Cal Point Pressure mbar Baratron Reading NEU UON opo 000 oo 000 0 1051 0 1048 ar d 0 1996 0 2004 I acc s 1 0121 Then the settings for P
31. itch at 10 96 of full scale automatically the range down Simultaneously also the display format switches so the last digit represents 1E 5 of full scale The hysteresis at the switch point is 0 5 of full scale For the example given above this means hysteresis disregarded Pressure Readout RT When the autozero cycle is triggered the zero offset of both ranges will be separately determined and corrected The zero offset value in any range should not exceed 50 mV If this is the case then carefully check if all requirements for a correct zeroing are fullfilled and if necessary do a coarse zero adjustment directly at the type 120 pressure transducer Check after zeroing that the readout displays 0 1Digit Repeat the autozero procedure if necessary 36 PR4000F Chapter 4 Operation 4 6 Operation with mass flow controllers MFC For the use with mass flow controllers MFC only it is recommended to simplify the setup settings by using the default configuration for flow DEFAULT F All flow readouts are set to sccm all analog inputs and outputs are set to 5 V Most if not all parameters to be edited are set to standard values but should be checked anyway See the table in appendix C for all default settings Change the setup settings where needed Always check the correct setting of parameter GA N to consider the right gas correction factor As readouts one will preferably use display 1 and display 2 for displaying both flow
32. lay POWER ESC Escape ON OFF SETPOINT REMOTE CONTRAST Reset Switch set point LED for remote Display operation PR 4000 O O SETPOINT o REMOTE o CONTRAST ESC ON ER d Screw for ENTER SH OFF contrast Ex G Reset switch Enter key On off switch for set point Arrow keys for dialog selection Figure 2 Front Panel Two lines Each line 16 characters Simultaneous readout for both channels possible Setup stored after switching off Switches back to display 1 mode Switches the setpoint output Note Channel valve switch channel preselection must be activated for setpoint output LED lit when setpoint output active LED lit when unit is operated through serial interface Allows adjustment of display contrast Same reset function as if using power switch Error Status will be reset and unit returns to display 1 13 Chapter 3 Overview PR4000F 3 2 Rear Panel The rear panel provides all connectors the fuse holder and the line voltage selector switch Voltage selector and fuse Channel 2 compartment Channel 1 Power supply Figure 3 Rear Panel of the PR4000F Connections ACC Connector ACCESS Allows access to the inputs and outputs for signals of measurement setpoint and controls EXTERN This connection is used to input external analog setpoint signals and to output measurement signals of both channels RELAY Access to the contacts of both relays CHANNEL 1 Connecti
33. low devices EXITLeaves the setup submenu To enter again the setup section you must select SETUP again Note ud Resolution and conversion rate are dependent of the display format H Refer to Appendix A Specifications 32 PR4000F Chapter 4 Operation 4 4 Control For routine operation e g flow readout and setpoint settings after the setup has been finished there will be 1 to three windows depending on the configuration choosen plus two displays for control parameters and status information Display for measurement values and setpoints Example for setting of display 1 05 160 mbar 17 690 sccm Example for display 2 17 690 SCCM 20 000 SCCM The windows above show the format which would come up when following the examples described in the section Setup To ease operation the setpoints SP1 or SP2 can be set here It is not necessary to enter the setup Messages OVERFLW The measurement signal exceeds 11 V As an example this would be the case when an absolute pressure transducer with a low full scale range e g 1 mbar is connected to this channel and it s port is open to atmosphere UNDRFLW The measurement signal exceeds 11 V 33 Chapter 4 Operation PR4000F Status Displays RLY1 RTD1 OK RLY2 RTD2 RLY1 RLY2 A diamond sign indicates if the respective relay is activated RTD1 RTD2 A diamond sign indicates if the range turndown function is activated OK EXXX Error message appears here
34. ny corrections which may be necessary because of zero offset compensation The adjustable range and the engineering units are determined by the choosen range as shown next Range RNG1 10 000 mbar RNG2 50 000 SCCM Place the cursor by using the left right arrow keys under the parameter to be edited Edit range and engineering unit by using the up down arrow key Also the position of the decimal point can be edited The following engineering units are available mbar bar mTorr Torr kTorr Pa kPa mH20 cmH20 PSI N m sccm slm scm Sch scfm mA V C ubar All ranges may be set in a format between 99999 und 00000 23 Chapter 4 Operation PR4000F Gain and Offset extra windows for channel 1 and channel 2 01 0000 00043 mV GAIN is a factor which adapts the range and the measurement signal for correct readout A typical application is to use the gain factor as the gas correction factor with thermal mass flow meters or mass flow controllers Available range setting 0 001 2 000 Example for a MFC at channel 1 calibrated for 200 sccm full scale of nitrogen The process gas used is carbon dioxide CO The gas correction table in the user manual of the mass flow controller indicates a gas correction factor of 0 70 Range setting RNG1 200 00 sccm Gas correction factor setting GAIN 00 7000 This finally results in a range of 0 140 sccm CO whi
35. offset value is displayed in the setup menu in the window OFFS When zeroing the type 120 the zero offset values in both ranges are determined and compensated provided that the range turndown function is activated For more information refer to section Operation with Baratron Type 120 later in this chapter VLV1 VLV2 Applies only to MFC s and pressure controllers VLV1 VLV2 are so called valve switches that means that a setpoint voltage will only be applied to a pre selected channel Mark the respective channel with the left right arrow keys until the cursor appears at the right side of VLVX Then use either the up or the down key to generate a diamond sign and confirm with the ENTER key Any channel marked with a diamond can be switched on with the ON key This allows to switch on or off channels individually or all channels simultaneously H1 R2 In this menu you can switch on or off the indicated relay e g for test purposes Diamond sign activated relay is activated switched on Diamond sign not activated relay is de activated switched off Note ud The setpoint voltage will be applied only to channels which have been pre selected with the valve switch VLV1 or VLV2 4 5 Operation with pressure transducers If just pressure transducers Baratron series are used it is recommended to simplify the setup settings by using the default configuration for pressure DEFAULT P All pressure readouts are set to mbar all analog inputs and
36. on for pressure transducer mass flow controller etc to channel 1 CHANNEL 2 Connection for pressure transducer mass flow controller etc to channel 2 RS232 Serial Interface RS232 RS485 Serial Interface RS485 Power Supply Connection for line power cord 14 PR4000F Chapter 3 Overview 3 3 Connectors Channel 1 Channel 2 This connector serves to connect the flow or pressure controller or meter device to the unit There are 2 connectors one for each channel 15pin Sub D Socket reserved EN reserved 3 Flow controllers Valve Close 11 Signal ground Baratron Type 120 Range Turndown Dep oom I mmm Pe see An internal jumper must activate signal RTD range turn down is electrically equal to VLV valve close and meaning depends on flow or pressure usage An internal jumper must activate signal this is the same signal which activates the relays A jumper connects both grounds 15 Chapter 3 Overview PR4000F EXTERN This connector is preferable used to monitor the flow or pressure signal of the device connected to the respective channel and or to feed an external setpoint voltage into the instrument 9 pin Sub D Socket gt e JA nee T External input typ ext setpoint 1 6 SignatinputcH 1 External input typ ext setpoint 2 DECIA IEC CN ICI DIC moe IO TC Identical to Pin 2 at connector CHANNEL1 CHANNEL2 Identical to pin 11 amp 12 of the corresponding channel
37. onnected to channel 1 Pin 8 connector CHANNEL 1 External setpoint input for channel 1 Pin 1 connector EXTERN Monitor signal output of channel 1 Pin 3 connector EXTERN Respectively for channel 2 IN2 OUT2 El2 EO2 Signal full scale of the transducer or controller connected to channel 2 Pin 2 connector CHANNEL 2 Setpoint signal full scale for the MFC or pressure controller connected to channel 2 Pin 8 connector CHANNEL 2 External setpoint input for channel 2 Pin 2 connector EXTERN Monitor signal output of channel 2 Pin 4 connector EXTERN Confirm all settings with the ENTER key bevor you leave the window 25 Chapter 4 Operation Signalmode PR4000F extra window for channel 1 and channel 2 SIGMODE1 INDEP SCL1 10 000 mbar SIGMODE For controllers the parameter SIGMODE determines the source of the setpoint which shall be applied the the respective channel For meters this parameter determines to which value the setpoint output is set INDEP OFF METER RTD SLAVE EXTHN external setpoint Independent Setpoint is set either by the front panel settings or by remote host computer Manual setpoint adjust can be done either in the setup submenu or in a window in the operational level if the window is configured for displaying setpoint Setpoint output voltage is set to a fixed voltage of about 0 5 V This ensures that the integrator of a controller connected to thi
38. onnection is protected by two fuses Before connecting the unit to the AC power source you must check that the voltage selector switch is set to the correct mains voltage Refer to the following table in case that the line fuses must be changed or replaced respectively Voltage selector fuse holder and line cord plug are located at the rear panel see figure 3 Voltage Selector Switch Fuse Type 230 VAC 15 V 0 8 A T315mA 230 VAC 15 V 1 5 A T500mA 230 VAC 24 V 1A T315mA 115 VAC 15 V 0 8 A T630MA 115 VAC 15 V 1 5 A TIA 115 VAC 24 V 1A T630mA Table 3 Fuse Information The version of your PR4000F is derived from the informations on the serial label Caution Check to make sure the voltage setting is correct for your local electrical source Check to make sure the fuse type is appropriate for your voltage setting Protective Grounding Connect the power cord PR4000F only into a grounded outlet 2 5 Switching on the unit After all connections to the peripheral instruments e g pressure transducer mass flow controller etc are properly done the unit can be switched on Refer to the instructions for the peripheral units for proper installation connection set up and warm up The elements on the front and rear panel and their functions are explained in the following chapter PR4000F Chapter 3 Overview Chapter 3 Overview 3 1 Front Panel LED for O MKS POWER i n Oorr Power switch Escape key Disp
39. outputs are set to 10 V See the table in appendix C for all default settings Make sure anyway that the data of your pressure transducer confirm with the defaults otherwise change the setup settings where needed With setup settings completed and zeroing done in most cases no more is necessary to be done You can immediately start measuring pressure using display 1 configurated for PR1 and PR2 35 Chapter 4 Operation PR4000F Operation with Baratron Type 120 Range Turndown This type pressure transducer has a recommended measurement range of five decades that means the lowest pressure displayed should be 1E 5 of full scale The readout of the PR4000F however will display only four decades thus the lowest pressure displayed would be 1E 4 of full scale The type 120 provides a digital input Range Turndown which allows when pulled to low signal to increase the output voltage by a factor of ten The PR4000F can support this function thus enabling the measurement in the range below 10 of the transducer s full scale range with full display resolution Example for a type 120 1 mbar full scale 1 mbar Range Turndown not active 0 10 V 1 mV equals 1 10 mbar 0 1 mbar Range Turndown active 10 V 1 mV equals 1310 mbar As explained before the PR4000F will display the complete pressure measurement range of the type 120 with no restriction of the specified resolution provided the RTD mode has been selected To do this the unit will sw
40. pability The memory can be reset with RESET 39 Chapter 4 Operation PR4000F 4 10 Relay Settings Configuration of relay control is done in the aforementioned menu Limit Mode in the setup section By the use of logical formulas almost each combination of different criteria for activating or de activating the relays can be realized This allows flexible adoption of both relays to many demands The PR4000F supports the following criteria numbers indicate the respective channel R1 R2 Menu parameter for manual relay control RLY is switched on L1 L2 Signal is below the lower limit value U1 U2 gt Signal is above the higher limit value El E2 gt External digital Input relay connector is active V1 V2 gt Valve switch sequential setpoint switch of the channel is on D1 D2 gt RTD line in the range turn down mode is active T1 T4 gt Results of 4 temporary formulas to increase the flexiblity of combinations 0 bzw 1 gt constant values for manual input of criterias These criteria are combined by logical formulas e g AND OR etc oprations An AND operation for example means that criteria A and B must be fullfilled to switch the relay The PR4000F supports the following operations the symbols in parenthesis show the characters as they appear on the display AND v Criteria A and B must be fullfilled OR Criteria A or Criteria B or both must be fullfilled ESCLUSIVE OR 4 either Criteria A or
41. play 1 for both flow readouts FL1 and FL2 4 8 Operation with pressure controllers This operation mode mainly affects in line pressure controllers from von MKS Instruments e g the types 640 641 or 649 In general the above given instructions for mass flow controllers apply also here In some cases the pressure controllers are configured for different voltage input output signals therefore check carefully the conformity of both the controller and the PR4000F Note ne The setpoint voltage will be applied only to channels which have been Y pre selected with the valve switch VLV7 or VLV2 38 PR4000F Chapter 4 Operation 4 9 Limit switches and relays The two relays on the hardware may be assigned flexible to the channels and different signal sources The logic of the limit switches is configurable and also is the hysterisis i e dead band A switch delay is not available The PR4000F provides 5 modes of trip limit operation SLEEP In this mode the trip limits are not active LIMIT In LIMIT mode the signal L is triggered if the actual input is below LL and the signal U is triggered if the actual input is above UL BAND In BAND mode the signal L is triggered if actual input is below set point minus LL And the signal U is triggered if actual input is above set point plus UL MLIMIT Same as Limit mode but including memory capability The memory can be reset with RESET MBAND Same as Band mode but including memory ca
42. r variables etc There are two ways of switching on Edit mode 1 With the ENTER key 2 With the left right arrow keys or gt 3 When you switch on Edit mode the cursor appears as a flashing underscore below the first or last alphanumeric character You can move the cursor within a line using the left right arrow keys or change the preset values with the up down arrow keys If 9 is displayed and you press the up down arrow keys again to scroll the number the display automatically creates two digits 10 the same applies analogously in the opposite direction If when you exit Edit mode by pressing the ENTER key the value you have set is outside the valid range the highest or lowest permitted value is stored instead Switching off Edit mode You can switch off Edit mode again by pressing the ENTER key The entered values are not stored until you press the ENTER key You can also exit Edit mode with the ESC key In this case however the values are not stored Decimal point You can mark the decimal point in this dialog with the left right arrow keys and shift it with the up down keys The up arrow shifts the cursor to the left while the down arrow shifts it to the right The new decimal point setting takes effect in all the dialogs in which measured values or values directly referred to them are displayed It does not affect device parameters such as Gain 20 PR4000F Chapter 4 Operation 4 3 Setup It is recommend
43. s channel does not wind up thus opening the control valve unintendendly The digital output connector CHANNEL1 or CHANNEL2 pin 4 is held to LOW This activates the input Valve Close of MFC s forcing the control valve to be closed Setpoint output voltage is set to zero volts Valve override line via pin 4 of the respective channel connector is set to HIGH Range Turndown RTD allows operation of a Baratron type 120 The digital output pin 4 of connector CHANNEL1 or CHANNEL2 is set to LOW when the signal of the type 120 is falls below 1 V This enables the PR4000F to display also the lower pressure decades in full reolution Refer to section CONTROL detailed instructions The setpoint of a slave channel is derived from the other channel s signal This allows the control of gas mixing systems with a fixed flow ratio The channel s setpoint is derived by an external analog voltage Source connected to connector EXTERN 26 PR4000F Chapter 4 Operation SCL only SLAVE or EXTRN The value of SCL Scaler determines the ratio of the setpoint which will be applied to the slave Example for two mass flow controllers Channel 1 MFC 500 sccm full scale Mode Independent This is the master channel Channel 2 MFC 200 sccm full scale Mode Slave Scaler SCL set to 080 00 sccm When the master s flow readout ranges from 0 500 sccm the setpoint applied to the slave ranges proportionally from 0 80 sccm The gas mixing ratio t
44. s cracks broken connectors etc to be certain that damage has not occurred during shipment Note ud Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately Please refer to the last page of this manual for a list of MKS calibration and service centers user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments Caution Only qualified individuals should perform the installation and any 2 2 Unpacking Checklist Standard Equipment e Type PR4000F readout unit e Power cable e Mating connector kit if no connection cable was ordered e Instruction manual this book Optional e Connection cable s e g for transducers controllers etc e Mounting kit Chapter 2 Installation PR4000F 2 3 Cables The unit complies with the European standards e EN50011 1991 Interference Emmissions Group 1 Class B e EN50082 2 1995 Immunity from Noise ESD according to IEC801 2 1991 EMF according to ENV50140 1993 resp 50204 1995 Burst according to IEC801 4 1988 Line Noise according to ENV50141 1993 e EN61010 1 1993 Device Safety and thus it is labelled with the CE mark To fullfill the above listed guidelines it is mandatory to use th
45. t window of the setup submenu display 1 and display 42 of the operational level are being configurated Use the arrow keys to select and set the settings CH1 2 select one or both channel s to be displayed VA1 2 display the signal output of channel 1 and or channel 2 SP1 2 display setpoint of channel 1 and or channel 2 EX1 2 external setpoint for channel 1 channel 2 PR1 2 display as pressure PR Pressure FL1 2 display as flow FL Flow You can activate and deactivate display 2 Place the cursor between the word DISPLAY2 and the following character then make your choice with the up down arrow keys Configuration of display 3 and display 4 DISPLAY3 DISPLAYA Activation and configuration of display 3 is done the same way as described for display 1 and display 2 In display 4 you can write any information using the serial interface refer to chapter 5 The display itself however can be activated or deactivated only via front panel operation After completing setup you may have therefore up to three operational displays whose contents can be individually configurated 22 PR4000F Chapter 4 Operation Setpoint SP1 05 000 mbar SP2 20 000 SCCM Here you can enter the setpoint for massflowcontrollers MFC as well as for in line pressure controllers e g MKS type 640 The example shows an MFC on channel 2 and a pressure controller being operated by channel 1 The PR4000F takes automatically into account a
46. the end of this chapter to get detailed description and instructions of the numerous settings and logical criteria Temporary Criteria Transient events can also be combined with the relay operation For more instructions refer to the section Relay Settings at the end of this chapter 30 PR4000F Chapter 4 Operation Interface RS232 Selectable baud rates 110 1200 2400 4800 9600 19200 38400 57600 76800 115000 Baud BAUDRATE 9600 Bd PARITY ODD Parities Odd Even None For more instructions refer to chapter 5 INTERFACE Interface RS485 ADRESS IFACEMODE In this menu the adress and interface mode are selected Only for units with RS485 interface For more instructions refer to chapter 5 INTERFACE 31 Chapter 4 Operation PR4000F Exit Setup RESET DEFAULT F RESOL16 EXIT RESET All error messages will be reset DEFAULT F Setup menu will completely set to standard settings for MFC s and MFM DEFAULT P Setup menu will completely set to standard settings for Baraton pressure transducers In appendix B you will find a complete table showing the default settings for both flow and pressure RESOL16 activated indicated by a diamond shaped sign 4 5 digit display format recommended for pressure measurement with Baratron pressure transducers De activated no diamond sign 3 5 digit display format preferable for flow measuremnt and control with thermal f
Download Pdf Manuals
Related Search