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ADP/ADS Series Two dry pumps

1. Dimensions Facilities on top Inlet NW 100 C a Exhaust 4 Minimum space NW 40 4 for connection le La ae Cd B 7 AE 2 QO E D Ba w a gt i l _ _ a 1 at h Flush gas a connection 55g e fla circuit L G l Ej IN fre 4 4 a d Q N Cover pumping 100 lo O o gt P L g 9 PE DN 50 for ADP 122 Dimensions in inch mm 1 54 39 1 54 39 1 62 41 1 12 28 10 6 269 4 4 112 8 7 220 6 6 168 6 5 166 1 12 28 5 3 134 4 4 112 3 4 85 6 6 168 1 22 31 ADS 1202 4 7 120 21 532 12 8 324 5 5 140 0 0 7 176 5 7 144 3 2 80 5 5 7 144 1 25 5 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O1 Novernber 98 Isolation valve at pump inlet Ant vibration pads Hand held remote control Pump P N ADP 122 PorL 101838 ADS 602 P 101840 ADS 1202 P 102136 Control box alone 106143 Cable 15m 107079 A 60 Accessories This valve avoids a reverse flow of gas to the chamber and increases tightness when the pump is switched off It also isolates the running pump from the process M anual valve P N Auto valve 24 VAC P N DN 50 ISO KF 30108K DN 50 ISO KF 106948 DN 100 ISO F 30110K ODN 100 ISO F 107145 Anti vibration pads significantly reduces the vibration rate transmitted to the floor A second hand held remote control can be connected on the pump a longer cable can also
2. 0 004 B 70 Checking the rotational direction and first pump OOED orenera ae Ped Ba eae ee a B 80 Connection to the pumping circuit B 90 14 Remote control plug connection B 100 J3 Remote control plug connection ADP 122 L B 101 Emergency stop plug connection B 110 RS 232 or RS 485 link wiring B 120 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Novernber 98 B 00 Safety instructions e The machines must be connected to an electrical installation in compliance with the decree 88 1056 dated 14 Novembre 1988 e Our products are designed to comply with current EEC regulations Any modification of the product made by the user Is liable to lead non compliance with the regulations or even to put into doubt the EMC ElectroM agnetic Compatibility performance and the safety of the product ALCATEL declines any responsability for such operations e Before any maintenance operation is perfomed by a maintenance technician who has not received safety training EMC electrical safety chemical pollution etc isolate the product from the various energy sources electricity compressed alr etc e The EMC perfomance of the product is obtained on the condition that the installation complies with the EMC rules In particular in disturbed environments it is essential to use shielded cables and connections for interfaces Stabilize the
3. D 00 Safety instruction related to maintenance This chapter describes the main preventive maintenance Operations and provides a guide for first diagnosis in the event of an incident Standard precautions before any maintenance operation Before performing a maintenance operation switch off the pump by setting the main switch to 0 and disconnect the mains cable CAUTION before any operation check the pumping conditions of the installation toxicity corrosion possible radioactivity of the pumped gases Product tightness is guaranteed upon leaving the factory for nomal operating conditions It is the responsibility of the user to ensure that the level of tightness is maintained when pumping dangerous gases Recommandations Purge the installation with dry nitrogen except model ADP 122 L The flush is performed automatically when the pump is stopped normal stop or due to a fault if a maintained level of purge gas has been programmed Otherwise proceed as follows If the pump is remote controlled remove the connections on J14 and J1 connectors at the rear of the pump and connect the cover plug connectors Supplied with the machine instead Program PURGE FLOW PROLONGED and set the PURGE COMMAND on DISABLED Press followed by on the front panel the gas flush iS performed after the pump is stopped Wear gloves protective glasses and if necessary a breathing mask Ventilate the premises well Do
4. An insulating film protects the keys Do not use hard objects such as pens screwdrivers etc which could damage the keys The continuous pushing of and keys allows for quick scrolling Use by successive pulses for the other keys Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 2 3 Pump start up Accessing the programable parameters C 20 Start up of the M4 monitoring system Put the main switch on position 1 The mains on light indicator comes on Mains on Main switch The monitoring displays the state of the pump The star appears on the left side of the display and indicates that the control has X 1H LOC ROOTS been taken by hand held PUMPING STO PPED remote control Control taken 01 23 99 15 39 to check the direction of rotation The M4 monitoring system has been configured in the factory according to the options and accessories defined during the order This configuration allows the pump to run see C 30 If parameters have to be customized by the user it is necessary to gain access to the program The programing made at the factory is protected by an access code which disables the entry of new parameters Press the key SET EN TER PASSW ORD Valid the code with ENTER CODE 0 Access code and parameters can be customized see C 50 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Nover
5. closed when switched off This input stays DISABLED if ADS 1202 system is selected a ieivsctrtecios rane teemenepepecaeae 1 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 2 Edition O1 Noverrber 98 Edition O1 Noverrber 98 C 50 M4 monitoring system function table DEFINITION MENU conta EN TER PURGE CMD Standby purge option validation during equipment standby phase additional N2 injection manifold specified at order is necessary Allows ADP 122L pump monitoring by displaying operating status Auxiliary temperature sensor presence validation Choice Definition Initial configuration EN A BLED Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 7 _ M4 monitoring system function table mn j Ww IT J a Q E oe Settings limits WARNING threshold 0 to 60 mn OR Disabled 0 to 60 mn OR Disabled N2 FLOW SENSOR PURGE WARNING only with MFS 10 to 60 sim Standard litre minute INPUT VALUE MFC only with MFC 15 to 60 sim Standard litre minute INPUT VALUE 70 to 110 C ALARM threshold WARNING threshold ALARM threshold WARNING threshold ALARM threshold WARNING threshold ALARM threshold Warning threshold to 9950 mV WARNING threshold 0 to 60 mn OR Disabled ALARM threshold 0 to 60 mn OR Disabled WARNING threshold 0 to 60 mn OR Disabled ALARM threshold 0 to 60 mn OR Di
6. A 30 M4 monitoring for P pump model To improve the design flexibility of the products Alcatel has developped a new generation of electrical equipement for the ADP ADS Electrical cabinet Hand held remote control It is located at the rear of the It ensures Man Machine machine It is linked with main interface power supply ADP Roots It can be used either from motors and electronic cabinet the front or the rear of the pump and allows the access at all operation parameters Hand held remote control Electrical cabinet Electronic cabinet Electronic cabinet It ensures the pump automatic operation and controls all sensors and valves It is linked to the display panel and emergency stop button It allows to exchange data with the hand held remote control and ensures the interface with the supervision network M4 monitoring can be interfaced with the main production equipments Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 A 30 M4 monitoring for P pump model M4 monitoring Monitoring system controlled by microprocessor characteristics e Display on the hand held remote control of parameters and messages e Memorization of the 10 latest alerts and alarms a e RS 232 RS 485 Network links Alternative connection ew SEES Hand held SS remote Panne BU control Mains 4_ Electrical Roots motor y Emergency cabinet ADP motor Tr SINNA SSRN NY Ses
7. D 60 Pump does not start Display is showing a message or an alarm CAUSE TRO UBLESHO OTING Set the switch S1 1 to OFF see C 10 Switch off for 10 s then Switch on again Hand held remote control is on soft loading configuration NO Other problem Call Alcatel customer service Set the switch S2 to 0 Switch off for 10 s then Switch on again see D 10 Electronic is in slave mode without hand held remote control NO Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 D 60 Pump does not start Display is showing a message or an alarm INCIDENT CAUSE TRO UBLESHO OTING Display is showing XXH LOC N2 PUMPING STOPPED MM JJ AA HH MM by pressing on any key XXH LOC N2 COMMAND NOT ALLOWED MM JJ AA HH MM is XXH LOC N2 PUMPING STOPPED MM JJ AA HH MM Other problem Call Alcatel customer service Message on display Pump in storage mode Set the main switch to 0 STOCK to switch off the pump Switch iton again Message on display In Remote mode Check the wiring of J14 REM No cover plug or bad connection connector see B 100 NO M4 problem Call Alcatel customer service 2 3 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 D 60 Pump does not start Display is showing a message or an alar
8. Voltage RTL RT2 R CBI LV 200 to 230 V 50 60 Hz H V 380 to 480 V 50 60 Hz 8 1A 07A OA 2 4 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 D 10 First level of maintenance Electrical interfaces lay out at the rear of the pump P mode pump L model pump Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 4 D 10 Sensors connectors lay out at the rear of the monitoring system Therm Therm Stby Water Water Motor Massflow ROOTS AUX ADP ROOTS valve valve flow temp sensor temp temp NC NC E rA HL 1 Le rq P eee ewe Ad oa NC Pompe Purge valve Inlet valve i hi LOT ADP Temp Check Press Ana input Roots Pump U3 Ul U2 NC not connected Logic inputs 4 4 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Novernber 98 Maintenance frequency Clean processes see C 60 Equipment required Specific tool Anti suckback valve maintenance kit Description Part overhaul M inor kit ADP 122 P Consult ADP 122 L M ajor kit ADP 122 P 10 h jor ki Anti suckback valve LP bearing repl Testing and cleaning time not included m N N m Oo Q lt a N N m Q Q lt M ajor kit P ADP 122 L Gau Fluid Alcatel 113 0 5 7000 0 Maintenance times can change according
9. Exhaust NW 40 L E T B a p Y A R A N T Flush gas Water circuit connection 0 Cover pumping 100 P DN 50 for ADP 122 Dimensions in inch mm ADP 122 ADS 602 ADS 1202 7 7 195 2 3 E F G H J 1 54 39 1 54 39 1 62 41 15 4 390 15 4 390 15 4 390 22 8 580 34 4 875 38 7 984 37 6 955 22 560 33 840 3 62 92 3 62 92 4 7 120 5 8 148 5 8 148 4 7 120 8 8 223 26 5 674 8 8 223 21 2 539 21 532 28 6 727 23 3 592 23 585 0 0 0 0 1 12 28 O 1 12 28 0 8 20 0 0 P 10 6 269 5 3 134 I 179 3 7 94 4 3 108 4 1 103 S 3 23 82 3 23 82 2 6 72 T 16 5 419 27 7 704 31 3 795 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 A 50 Technical characteristics
10. OPCION 44 544 hanger as Bebe eee ee C 30 Use of the pump ADP 122L C 31 The M4 monitoring system parameters C 40 M4 monitoring system function table C 50 W ater flowrate and gas purge according to main semiconductor processes C 60 Saving and remote loading of pump configuration with M4 0000 3 C 70 M4 monitoring setting for transport C 80 Safety instruction related to maintenance D 00 First level of maintenance 4 D 10 Maintenance frequency 0005 D 20 Diagnosis and troubleshooting D 30 to D 140 Pump draining E10 Exhaust maintenance 0 00 e ae E20 Freeing up the ADP 1 E 30 Resseting maintenance parameters E 40 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O2 Februar Chapter A User s Manual ADP ADS Series Two Introduction Dry pump operational principle ADP ADS Series Two dry pump range M4 monitoring for P pump model Monitoring for ADP 122 L model ODGONS 2 eaueeey ee pena demande eee se Technical characteristics 000 0 AcceSSOrieS 0 a a a ee ng Alcatel Vacuum Technology France User s Manual ADP ADS Series Two A 10 A 20 A 30 A 31 A 40 A 50 A 60 1 1 Edition O2 February 99 Multi stage Roots principle A 10 Dry pump operational
11. OTING See water flowrate alert D 90 Call Alcatel customer service See water flowrate alert D 90 Check the sensor connection on the ADP Temp connector see D 10 Call Alcatel customer service 1 1 Edition O2 February 99 D 110 The pump is running and then is showing an alert or alarm message Maintenance problem INCIDENT CAUSE TROUBLESHOOTING Alert The maintenance threshold e Check maintenance ADP MAINTENANCE of a parameter is reached thresholds ADP LP BEARING e Perform the maintenance INSPECT EXHAUST and reset the corresponding ROOTS MAINTENANCE timer LL MAINTENANCE Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Noverrber 98 INCIDENT Alert INLET VALVE There is no isolating valve at inlet There is an isolating valve at inlet Alert AUX TEMPERATURE AUX TEMPERATURE input not used AUX TEMPERATURE input is used D 120 The pump is running and then is showing an alert or alarm message Options and accessory problems CAUSE Incorrect monitoring configuration The valve does not close at pump stop or does not open at startup NO Other problem Incorrect monitoring configuration Incorrect kind of probe NO T lt lower or T gt higher alert threshold NO Incorrect connection displayed temp 170 C NO Alcatel Vacuum Technology France User s Manual ADP ADS Series Two
12. Remove the front cover The water flow will be adjusted according to the pump model see C 60 with the needle tap located on the flowmeter panel 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O2 February 99 Nitrogen characteristics P version only Connection B 60 Inert gas purge connection N2 plug For optimum performances the nitrogen supply should have the following characteristics WE Maximum moisture rate 5 ppm water M Dust lt lu m MOil lt 0 1 ppm W Pressure between 3 and 7 bar absolute WE Flowrate per pump 100 min Before pressurizing the circuit check that the pressure regulator is closed by turning the pressure regulator knob anti clockwise see B 60 2 2 Facilities on the top L BNPT 1 8NPT re Facilities at the rear ALCATEL supply Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 B 60 Inert gas purge connection N2 plug N2 flowrate adjustment Manometer Pressure regulator Flowmeter panel The N2 flowrate will be adjusted with the pressure regulator according to the process see C 60 A mass flowmeter located behind the front panel allows flow reading on the hand held remote control display 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O2 February 99 Customer
13. TRO UBLESHO OTING Check that INLET VALVE OPTION is not valid Check compressed air supply gt Check valve condition Call Alcatel customer service Check that AUX TEM PERATURE option is not valid Check that the sensor is a PT 100 type probe Check that the measured temperature corresponds to the display Check the thresholds Check that the sensor is wired between pins 17 and 18 of Aux TemP connector Remake the connection see D 10 1 2 INCIDENT Alert continued AUX TEMPERATURE Alert VARIATOR Variator option is not used Roots does not run at nominal speed Roots does not run Alert or Alarm LOAD LOCK U1 and U3 logic inputs are not used to monitor a LL pump U1 and U3 logic inputs are used to monitor a LL pump 2 2 D 120 The pump is running and then is showing an alert or alarm message Options and accessory problems CAUSE Sensor problem NO Other problem Incorrect monitoring configuration Mechanical problem Defective wiring or variator Incorrect monitoring configuration LL pump problem NO Wiring propblem NO Other problem TRO UBLESHO OTING Change sensor Call Alcatel customer service Check that SYSTEM SELECT menu is properly configurated Check that the pump is not seized or clogged see E 30 Check exhaust pipe condition see E 20 Call Alcatel customer service Check that LL PUMP OPTION
14. are resting solidly on the floor See section B 30 for installing anti vibration pads Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 2 2 Remove pump covers Electrical cabinet cover Fixing clips B 20 Positioning the pump in the pumping installation Front cover in al Remove the front cover fixing screw 1 and rotate the cover around its axes 2 Remove the front cover by pulling it outwards 3 Note make sure the circuit is electrically isolated Remove the two side cover fixing screws accessible by opening the electrical cabinet cover 4 Pull 5 top part of the cover to remove the side cover out then lift Repeat the operation for the other side cover Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O1 Novernber 98 Pads installation Characteristics B 30 Installing ant vibration pads Accessories Anti vibration pads The pump can be equipped with anti vibration pads which are mounted beneath the pump near the locking feet Raise the pump using the 4 screws jacks Attach the 4 anti vibration pads using the holes provided Lower the screw jacks so that the machine rests on the pads Vibrations transmitted to the ground by each support Quadratic mean acceleration lt 10 mm s2 in the range 0 4 100 Hz lt 200 mm s in the range
15. be used P N Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 2 2 Exhaust heater device The exhaust heater is installed on the exhaust pipe which reduces deposits when pumping condensable gases This accessory can be factory integrated on the pump as standard at time of order Pump Power supply ADP 122 P 200 240 V 380 460 V ADS 602 P 200 240 V 380 460 V ADS 1202 P 200 240 V 380 460 V This device ensures direct interface between M4 monitoring and the main production equipment Contact Alcatel Interface boards OEM Remote control Fitting accessories fitting rings valves bellows Alcatel Vacuum Technology France User s Manual ADP ADS Series Two A 60 Accessories Part N umber Facilities on top 107136 107137 107138 107139 107070 107071 Facilities at the rear 106568 106569 106568 106569 107068 107069 Several fitting accessories are available in Alcatel catalog Edition O1 N ovenber 98 Edition O2 February 99 Chapter B User s Manual ADP ADS Series Two Start up Salley IMSTUCHONS i a aa ea eee ee aa oo B 00 Unpacking Storage uaaa aaa B10 Positioning the pump in the pumping installation B 20 Installing anti vibration pads accessories B 30 Filling the machine oil housings B 40 Connection to the cooling circuit B 50 Inert gas purge connection N2 plug B 60 Pump power supply
16. from MANAGEMENT menu The former configuration is automatically reset All pump parameters are loaded remotely except the options which have to be locally configurated according to the pump e buzzer unit of temperature e unit of pressure e RS link e time and date Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverrber 98 C 80 M4 monitoring setting for transport DEFIN ITIO N Setting of storage Gain access to MANAGEMENT SENE mode for transports menu by successive press on MAINTENANCE and prolonged storage gt gt gt gt MANAGEMENT lt lt lt lt Enter the sub menu STORAGE by pressing STOCK 150H ENTER then select EN ABLED Pumping stopped using the key 01 12 98 13H56 Valid with EN TER The pump start up is now not possible second counter is blocked Note At switching on STO RAGE mode is automatically deleted Date and Time reset is only necessary see C 20 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O2 February 99 Maintenance Chapter D User s Manual ADP ADS Series Two Safety instruction related to maintenance D 00 First level of maintenance 005 D 10 Maintenance frequency 0 000 eae D 20 Diagnosis and troubleshooting D 30 to D 140 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Noverrber 98
17. is not valid See D 101 Check the connections on U1 and U3 connectors see D 10 Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 INCIDENT Alert or Alarm LI1 LOG SENSOR or LI2 LOG SENSOR or LI3 LOG SENSOR Logic input is not used Logic input is used Alert or Alarm ANALOG INPUT Analogic input is not used Analogic input is used CAUSE Incorrect monitoring configuration Incorrect monitoring configuration NO Other problem Incorrect monitoring configuration Incorrect monitoring configuration NO Other problem Alcatel Vacuum Technology France User s Manual ADP ADS Series Two D 130 The pump is running and then is showing an alert or alarm message Analogic and logic input problems TRO UBLESHO OTING Check that Li1 LOG INPUT LI2 or U3 Is not valid Check the alert or alarm delays Check the sensors Call Alcatel customer service Check that ANALOG INPUT menu is not valid Check the alert or alarm thresholds gt Check that the voltage is In accordance with M4 display Call Alcatel customer service 1 1 Edition O1 Noverrber 98 D 140 The pump is running No message INCIDENT CAUSE TRO UBLESHO OTING Bad vacuum Polluted or clogged pump M aintenance ADP or no vacuum NO Internal oil leak Mechanica
18. principle The ADP pump consists of 5 Roots type stages The two rotors rotate without touching each other The three stages on the low pressure side are called LP stages and the two stages on the high pressure side are called HP stages Exhaust tube Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 2 3 Tightness with environment Tightness at low pressure side Tightness at high pressure side A 10 Dry pump Operational principle The pump bearings on the low pressure side are fitted with ceramic ball bearings lubricated with fluorinated grease which resists high temperatures and the possible corrosion due to the application An overpressure zone is created around the bearing by injecting a neutral gas Purge LP1 This pressurization prevents pumped gases from migrating towards the bearings Neutral gas purging for the bearings is imperative for corrosive processes Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O2 February 99 A 10 Dry pump operational principle EE 2 Tightness at motor side The vacuum tightness is shaft passage ensured by the motor design ae i with builtin jacket 3 hermetically sealed mi This system provides total e e sa fety regarding leaks 1 Builtin jacket outside the pump and 2 M
19. stop output ns Actuators fa valves Supervision Network Electronic Remote control connector a cabinet ee gt Sensors OEM interface es oe a am E an Alternative connection Main functions Motor protection e N2 purge monitoring e Pump temperature monitoring and control e Thermostatic control of the pump Temperature and water flow e Exhaust pressure monitoring e Maintenance time control 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 Principle Description A 31 Monitoring for ADP 122 L pump To improve the evolutivity of the products Alcatel has developped a new generation of electrical equipement for ADP 122 L Electrical cabinet Control panel It is located at the rear of the It ensures Man Machine machine It is linked with main interface power supply ADP motor and electronic cabinet Control panel Electrical cabinet Electronic cabinet ODF Electronic cabinet It ensures the pump automatic operation and controls all sensors and valve It is linked to the display panel and emergency stop button It allows to exchange data with the control panel The monitoring can be interfaced with the main production equipment Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 A 31 Monitoring for ADP 122 L pump Monitoring characteristics Co
20. the rear Feedthrough connection at the rear 9 19 99199919990 Z Z ST SS DQOQVlOQPGRTAOQAOSTOQOQG H gr Pg Fg ninm rOy al LJ no is m 9 9 9 909 909 999 4 eoQ0Q00QdddsG Connect the mains cable to the I1 main disconnect switch using a cable with following specifications AW G 12 2 5 mm2 per ADP 122 or AW G 10 4 mm2 per ADS 602 ADS 1202 cable customer supply Connect the ground to the separate terminal bar Check that the cable is correctly protected against ground defects and that earth wire is longer than the three conducting wires Check the direction of rotation of the pump at the first start up see B 90 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O1 Novernber 98 Connect the cover plugs B 80 Checking the direction of rotation and inital pump start up Study the preliminary precautions see B 00 Before using the monitoring check that the mechanical and electrical connections defined in the chapter B have been made Before each pump starts up check that oil levels of ADP and Roots housings are visible in the middle of the sight glass do this check with the pump stopped e In order to prevent moisture from entering the pump before installation it has been pressurized before hand with nitrogen and sealed with blank off flanges e Remove the guards
21. to 34000 h Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverrber 98 C 50 M4 monitoring system function table SET MANAGEMENT oe Settings limits Initial configuration password 0065535 o Frame serial Nr iS M4 serial Nr iS _M4 oP Version iS M4 Flash Version iS ADP serial Nr SS ROOTS serial Nr SS Display OTP version is i ee VERSION i Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 7 7 Edition O1 Novernber 98 Water flowrate and gas purge according to main semiconductor processes Processes Load lock and transfer chamber pumping Sputtering lon implant Dielectric etch Stripping Resist and polyamid etch Metal etch Al W Ta Ti TIN Polysilicon etch lon implant source Tungsten CVD W CVD Titanium and Titanium nitride CVD Ti TIN CVD Silicon epitaxy SiO2 CVD using silane as silicon source Polysilicon CVD MOCVD Non doped SiO2 CVD using TEOS Dopped SiO2 CVD using TEOS PSG BSG BPSG SACVD oxid using TEOS Nitride and oxi nitride of silicon PECVD Silicon nitride LPCVD Alcatel Vacuum Technology France User s Manual ADP ADS Series Two ADP 122 P or ADS 602 P ADS 602 P or ADS 1202 P N ot regul N ot regul N ot regul 90L 80 C N ot regul N ot regul N ot regul 80 C 80 C 80 C 80 In any case water flowrate is 60 I h ex
22. to processes and equipments used Alcatel Vacuum Technology France User s Manual ADP ADS Series Two D 20 cme E 1 oil filling see B 40 1 3 D 20 Maintenance frequency Medium processes see C 60 7 Equipment required To Specifi Description a ee IC Comments Part overhaul Anti suckback valve maintenance kit Anti suckback valve Minor ki Consult ADP 122 P Alcatel A q N LP bearing repl A Q M ajor kit lt ni Ae ea 107055 Consult 1 oil filling Alcatel see B 40 Fluid Alcatel 113 0 5 1 064657 a M ajor kit 2 Consult 2 oil fillings AI ig 8 h Alcatel see B 40 2 Fluid Alcatel 113 0 5 N Consult 5 oil fillings j 5 one Alcatel see B 40 9 Fluid Alcatel 113 0 5 A ADP 122 P Maintenance Testing and cleaning time not included A B ADS 602 P Maintenance A C ADS 1202 P Maintenance Maintenance times can change according to processes and equipments used 2 3 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverber 98 D 20 Maintenance frequency Harsh processes see C 60 Comments Time Equipment required ope i Specifi Description 8 8 required ee Ji i Part overhaul Anti suckback valve maintenance kit Anti suckback valve M inor kit Conul ADP 122 P Alcatel A lt N LP bearing repl A Q M ajor kit lt iope ADP 122P 107055 Consult 1 oil filling Alcate
23. 40 Options The use of only one hand held remote control is possible to successively control several Series Two pumps In this case the pump can be delivered without the hand held remote control The hand held remote control can be ordered as an accessory see A 60 Should two hand held remote controls need to be connected to the same pump The Roots motor can be controlled by a converter increasing the pump s efficiency and allowing the elimination of the mechanical by pass In order to reduce the overall nitrogen consumption this option reduces the nitrogen injection in the ADP stages when processing is stopped Inlet v i up AP APP Exhaust 1 I WY Y L Pressure sensor A 1 Stop Pressure Flow valve Standby regulator controller WA valve N 2 inlet B p amp K 2 3 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 N ovenber 98 Edition O1 Novernber 98 Power failure protection Exhaustable enclosure Required for SEM compatibility A 40 Options This option protects the M4 monitoring system against power failures for a delay less or equal to 3 seconds Compatible with SEMI S2 93 standard In this case the main cable must be directly connected to electrical cabinet terminal connection using a feedthrough see B 80 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 5 3 Edition O1 Noverrber 98 Ch
24. 40 10000 Hz In order to limit the transmission of vibration to the foreline and the exhaust lines itis recommended to use flexible connection accessories at the inlet and exhaust side expanding type Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Noverrber 98 Oil quantities B 40 Filling the machine oil housings Caution The pumps are delivered without an oil charge the oil is found in separate containers Similarly it is recommended to drain the pump before returning the equipment For machines which use lubricants it is recommended to request for the safety data sheets from the manufacturer The pump is tested using synthetic fluid Alcatel 113 We recommend synthetic fluid Alcatel 113 Mineral and synthetic oils cannot be used together Contact Alcatel or your service agent before making any changes O IL FILLUNG REAR FRONT ToTAL NBER OF RooTs ROOTS CAPACITY CANS HOUSING HOUSING 0 4 L HOUSINGS ADP ADP 122 035TL 0S Sa x1 ADS 602 Oo Sa POW AS T le ey iL leon x3 ADS I202 O Ss VP IAS ep gee nA x 6 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 1 Roots rear housing fill plug 3 Roots rear housing drain 2 3 Filling procedure Filling of the Roots rear housing Filling of the Roots front housing B 40 Filling the machine oil housings 4 ADP fill plug Roots front housing fill plug 2 Roots rear housi
25. ALCATEL VACUUM TECHNOLOGY ADP ADS Series Two DRY PUMPS FOR THE SEMICON DUCTOR IN DUSTRY User s Manual y ee oy ee Edition O2 February 99 Dear Customer you have just purchased an Alcatel dry pump We thank you and are proud to include you in our customers This product has benefited from Alcatel s many years of experience in semi conductor processes and dry pumping For optimum performance and to obtain full satisfaction from this equipment we recommend that you study this manual before any intervention on your pump in particular the chapter on installation and start up MANUAL REFERENCE 106 298 GB Epimion 02 February 1999 ADP ADS Series Two dry pumps APPLICATIONS All semi conductors processes Stripping Etching PECVD LPCVD SACVD MOCVD Epitaxy e Scientific research ADVANTAGES Reduced volume and foot print Low operating cost High performancies pumping speed and ultimate pressure Excellent behavior in harsh environments Easy integration 1 2 lobe technology Advanced monitoring functions Stand by position to reduce N2 consumption power failure protection SEMI S2 93 standard compatible on option SPECIAL FEATURES M ulti stage Roots technology Water cooled multi voltage motors Exhaust and utilities connections possible on top or at the rear of the pump Alcatel N etwork compatible Alcatel Vacuum Technology F
26. C oy Using the box wrench move the driving shaft in both directions of rotation until free rotation is obtained Clean the O ring and grease it lightly with vacuum grease Reinstall the O ring and the pro tective cover Restart the pump Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O2 February 99 Accessing the parameter programing Acces to choosen parameter menu E 40 Ressettiing maintenance parameters W hen the maintenance of an element has been done itis necessary to reset its meter to stop the warning and reset the functionnal delay of this element Press the key SET Press the key and until the code is obtained Factory setting 0 Valid with the key ENTER Press the key repeatedly to acces to MAINTENANCE menu valid with ENTER Press the key repeatedly to acces to the choosen menu valid with ENTER The fresh screen appears Use the keys and to reset the duration to 0 Valid with the key ENTER Return to the main menu and exit the setting mode using the key SET Alcatel Vacuum Technology France User s Manual ADP ADS Series Two EN TER PASSW ORD CODE 0 DEFIN ITIO N SETTING MENU gt gt MAINTENANCE lt lt MANAGEMENT ADP MAINTENANCE ADP LP BEARIN G gt gt INSPECT EXHAUST lt lt ROOTS MAINTENANCE COUNTER SET gt gt DURATION 0H lt lt MAXI 65500 H MINI 04H 1 1 France Alcatel Vacu
27. RGENCY STOP located at the rear of the pump if emergency stop must be remote controlled see B 110 The pump is monitored by the equipment in which it is installed either alone or in a group of pumps It is remote controlled by the commands transmitted on the serial link see B 120 Commands and messages reception syntaxes are given In a separate chapter Consult Alcatel The remote mode dry contacts have the priority on the serial link mode Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Novenbre 98 Different control modes Local mode Remote controlled Operating mode C 11 Operating modes ADP 122 L According to the monitoring configuration and wiring the pump can be locally controlled by the control box remote controlled using dry contacts via 3 connector In local mode the cover plugs delivered with the machine must be plugged on J 1 and J 3 connectors In this case of operation the pump is running as a stand alone part of the equipment on which it has been installed The pump is controlled by a control box which includes the ON OFF switch and the time counter Counting the pump operating time The pump is monitored by the equipment in which it is installed The pump is remote controlled by the opening or closing of different dry contacts wired on J 3 connector The control of emergency stop is not possible from J 3 connect
28. aracteristics Nominal flow rate 50 60 Hz Ultimate Pressure maximale 50 60 Hz Nominal power Supply voltage 3 Phases Consumption at ultimate pressure 50 60 Hz m3 h cfm I mn mbar Technical characteristics ADP 122 L ADS 602 P ADP 122 P w 0 conv with conv 95 112 539 0 65 8 1583 1867 480 560 282 329 8000 9333 560 580 329 341 8000 9667 9 103 6 10 8 104 5 104 6 104 3 7x104 8 rn a 5 102 6 7x103 4 5x10 9 107 6 107 A 50 ADS 1202 P 1050 1150 617 676 17500 19167 8104 5 104 6 104 3 7x104 8 104 5 10 200 480 Maximum continuous inlet pressure Maximum exhaust overpressure N 2 purge flow rate Cooling water 60 Rotation speed pump 3000 to 3600 Pump running ambient temperaure Gear boxes Fluid capacity 5 to 40 0 35 Inlet flange Exhaust flange ISO KF DN 50 ISO KF DN 40 DN 40 DN 40 Dimensions x w xh mm inches 830 x 390 x 580 32 7 X 15 4 x 22 8 830 x 390 x 875 32 7 x 15 4 x 34 4 995 x 390 x 985 39 2 x 15 4 x 38 8 P models only Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 A 50 Technical characteristics Dimensions Facilities at rear l M _ Minimum space Inlet NW 100 for connection B G
29. ariation alert if T gt alert threshold and alarm if T gt alarm threshold The sensor is fitted with a fixed low temperature threshold Set temperature 10 C signaling a pump is too cold Monitors the power consumed by the machine by generating an alert followed by an alarm as soon as the power Is greater than each of Its thresholds the pump is immediately stopped when alarm threshold is exceeded Signals exhaust overpressure when the pressure reaches 1450 mbar exhaust pipe clogging and stops the pump at 1990 mbar Allows the monitoring of voltage or an input contact with two E Analogic sensor adjustable thresholds U1 U2 and U3 Logic sensors Auxiliary temperature sensor option Allow the monitoring of a logic sensor and to program an alert time Allows the monitoring of the auxiliary temperatures Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 3 g 2 3 3 5 li Q T Fo fen S pe Q 3 5 Mass flow meter ADP temperature sensor Motor power sensor E analogic sensor U1 logic sensor LI2 logic sensor U3 logic sensor Auxiliary temperature Ww o P oO 2 U OJ o O Q m w NO 2 C 40 The M4 monitoring system parameters a a ff invalid 3 S m o o oo o oo At the pump startup the monitoring operation will depend on the programing done at the factory However the monitorin
30. ary precautions see B 00 When units containing control circuits are equipped with dry contact outputs it is the responsibility of the customer to use these outputs in compliance with safety standards The remote contro function allows e Remote control of pumping functions START STO P PURGE Roots and Inlet valve e Remote monitoring of parameters through auxialiary dry contacts 50V 1A These contacts can be used to control automatic functions Location of J 3 The remote contro connection is done via the J 3 connector remote control located on the rear panel of pump connector Female Sub D 50 pins connector In local mode the pump can run only if the cover plug delivered with the pump is fitted on J 3 connector Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 2 2 Cover plug wiring Control contacts inputs J3 J3 Available outputs B 101 J 3 remote control plug connection ADP 122 L Cover plug type Sub D 50 pins connector Factory wired soldered side view ON OFF 12V External contact of customer equipement Inputs can be used by pins 46 OV and pins 45 24V W iring customer supplied 24 VDC FY Available dry contacts 50V 1A Contact Function These contacts open in the presence of a fault 14 15 Pump operation ADP 8 9 1 34 2 3 Alert presence Pump running valve ope
31. ber 98 Reset the clock at the initial start up C 20 Start up of the M4 monitoring system To ensure correct maintenance schedules monitoring of the faults and customized parameters it is necessary to initialize tme and date of the machine Enter in the menu by SET Go on using to access to the SETTING menu and valid by EN TER Go on using to access to the DATE TIME menu and valid by ENTER Select the parameters to be modified and set them using and key Valid by ENTER Return to the main menu and exit the setting mode using the key SET Alcatel Vacuum Technology France User s Manual ADP ADS Series Two DEFIN ITIO N gt gt gt SETTING lt lt lt MAINTENANCE MANAGEMENT SERIEA L UN K gt gt gt DATE TIME lt lt lt TEM PERATURE UN IT PRESSURE UN IT DAY MONTH YEAR HOUR 3 3 Edition O1 Noverrber 98 Operation setting Neutral gas purge control C 30 Use of the M4 monitoring system for pumping operation N Study the safety instructions see B 00 Check the direction of rotation at the initial start up see B 80 The performances and the operationnal safety of this product are guaranteed provided that it is used in normal operating conditions According to the operating mode choosen check the position of the switches S1 on electrical interface and at rear of hand held remote control see C 10 To ensure the gas purge comes on as soon as the pum
32. blocking the intake and exhaust holes these components prevent foreign bodies from entering the pump during transport and storage It is dangerous to leave them on a pump in operation In local mode the pump will run only if the cover plugs delivered with the pump are respectively connected on J1 and J14 connectors remote control connector Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 2 3 Switch on the pump Mains on Main switch Controlling the pump using the hand held remote control B 80 Checking the direction of rotation and initial pump start up Set the main switch to position 1 The mains on indicator light comes on The hand held remote control allows to control the pump and to configurate the parameters ALCATEL AVT MONITORING XXXXXX PRESSSEN TER At the first hand held remote control connection the monitoring identifies the pump FOR COMMUNICATION Hint HOME ROOTS Initialize the system by PUM PING STO PPED pressing on ENTER UO UN 15 39 Because it is the first 1H LOC RO O TS connection it is necessary PUM PING STO PPED to take the pump control via IBY Ed 0 Shes apse the CONTROL key a star appears on the left side of the display Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 Check the direction of rotation at inital pump start up B 80 Chec
33. bly 5 Part cleaning E 20 Exhaust maintenance Partly unscrew the 4 screws 1 maintaining the flange Remove the flange 2 by turning it anti clockwise Remove the anti suckback valve 3 and the spring 4 Clean the metal parts in a bath of hot water using a cloth if necessary Dry in the air or with compressed air The parts to be replaced are included in the ant suckback maintenance kit P N 106624 Replace the anti suckback valve o ring 5 and flange o ring 6 by new ones Reassemble the anti suckback valve 3 on the spring 4 than on the flange Fit the flange 2 on the pump lt exhaust and secure the 4 screws In case of straight up exhaust Replace the o ring of the centering ring Clamp the bent exhaust pipe and the straightup with quick connect clamps Reassemble the pump covers Reset the INSPECT EXHAUST counter see E 40 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O1 Novernber 98 E 30 Freeing up the ADP Study the safety precautions before intervention see D 00 lf after a prolonged stop the ADP does not restart using the function START because of sub products deposed inside the pump it is pos sible to free it up manually Remove the protective cover 1 and remove the O ting by remo ving the three M4 x 10 CHc D screws to get access to the Driving shaft e 2 D y A
34. c inside cabinet see D 10 Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Novernber 98 INCIDENT Alert POWER SUPPLY Alarm EMERGENCY STOP Alarm ADP BREAKER Alarm ROOTS BREAKER D 80 The pump is running and then is showing an alert or alarm message Electrical problems CAUSE TRO UBLESHOO TING Main power is not correct Check the main power NO Other problem Call Alcatel customer service Pump emergency stop is engaged Rotate to unlock the emergency stop on the front panel display NO Other problem Call Alcatel customer service RT1 breaker e Check RT1 setting switched off see D 10 e Check that ADP is not NO seized up see E 30 e Check exhaust pipe see E 20 Other problem Call Alcatel customer service RT2 breaker switched off e Check RT2 setting see D 10 e Switch RT2 again NO Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 INCIDENT Alarm ADP CONT Alarm ROOTS CONT Alert and Alarm CONSUMPTION Power 0 or Power gt threshold 2 2 D 80 The pump is running and then is showing an alert or alarm message Electrical problems CAUSE KM1 contactor not closed NO Other problem KM2 contactor not closed NO Other problem Incorrect rotation direction Incorrect threshol
35. ce 1 2 D 90 The pump is running and then is showing an alert or alarm message Facilites problems INCIDENT CAUSE TROUBLESHOOTING Alert and Alarm No purge flow e Check nitrogen supply N2 FLOW e Check the main valve connection on Purge valve connector see D 10 Insufficent purge flow NO Incorrect threshold setting NO Sensor problem Other problem Call Alcatel customer service e Check the setting of nitrogen flow see C 60 e Check that there is no leak e Check the Alert threshold e Check the sensor connection on MassFlow 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Sensor connector see D 10 Edition O2 February 99 Edition O2 February 99 The pump is running D 100 and then Is showing an alert or alarm message Temperature or pressure problems INCIDENT CAUSE Alert Motor temperature MOTOR TEMP is gt 50 C NO Sensor problem NO Other problem Alarm Motor temperature MOTOR TEMP is gt 65 C NON Sensor problem NO Other problem Alert ADP TEMP Pump temperature is gt of 10 C to the temperature control setting value Temperature control valve supply problem NO Cooling problem NO Other problem Pump temperature is lt of Defective control valve 10 C to the temperature control setting value Alcatel Vacuum Technology France User s Manual ADP ADS Series Two TRO UBLESHO OTING Se
36. cept for model ADS 1202 P which is 80 h C 60 1 1 Edition O1 Noverrber 98 Configuration saving C 70 Saving and remote loading of pump configuration with M4 At pump installation or replacement it may be interesting to copy the configuration set of all the parameters and operation setting programmed by the user from a pump to another For safety reasons carry these operations out when pump is switched on but pumping stopped The pump configuration is memorized in the internal electronics of M4 monitoring Enter in the menu by SET DEFIN ITIO N Go on using to access SETTIN G the MANAGEMENT menu MAINTENANCE and valid by ENTER gt gt gt MANAGEMENT lt lt lt Go on using to access STO RAGE the CONFIG SAVE menu gt gt gt gt CONFIG SAVE lt lt lt lt and valid by ENTER CONFIG LOAD O PERATIN G TIME The pump configuration is then duplicate into the hand held remote control memory Return to main menu and exit the setting mode by SET Disconnect the hand held remote control Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 Remote loading C 70 Saving and remote loading of pump configuration with M4 Connect the hand held remote control onto the pump to configure Take the control of the pump from the hand held remote control x at cover left of the display Load the configuration previously saved into the pump by selecting the CONFIG LOAD menu
37. d setting NO Other problem TRO UBLESHO OTING Check CB2 see D 10 Check that there is a strap between pins 2 and 3 of emergency stop terminal see B 110 Call Alcatel customer service Check CB2 see D 10 Check that there is a strap between pins 2 and 3 of emergency stop terminal see B 110 Check external emergency switch J1 Call Alcatel customer service Check the direction of rotation of the pump see B 80 Check the settings of monitoring thresholds Check mechanical state of ADP see E 30 Check exhaust pipe see E 20 Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O2 February 99 INCIDENT Alert WATER The pump is running D 90 and then Is showing an alert or alarm message Facilites problems CAUSE No water flow NO Insufficent water flow NO Sensor not wired NO Other problem Alcatel Vacuum Technology France User s Manual ADP ADS Series Two TRO UBLESHO OTING e Check the water supply e Check the main valve connection on Water valve connector see D 10 e Check that the main valve the flowmeter and the pipes are not clogged e Check the setting value of the flowmeter see A 50 e Check that there are no leaks e Check the flowmeter connection on the Water flow connector see D 10 Call Alcatel customer servi
38. e B 90 However if the pump has to be remote controlled proceed to specific wiring instructions B 100 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O1 Noverrber 98 At the pump exhaust Preliminary precautions Anti noise device Exhaust connection B 90 Connection to the pumping circuit Remove the guards blocking the intake and exhaust holes these components prevents foreign bodies from entering the pump during transport and storage It is dangerous to leave them on a pump in operation The vacuum pump is also a compressor incorrect use may be dangerous Study the user manual before starting the pump M ake sure the direction of rotation has been checked see B 80 Any maintenance accessories connected to vacuum circuit should be done at this time inlet and exhaust isolation valves purges It is recommended the pump exhaust be connected to an flue gas evacuation pipe For safety reasons any accessories connected to the inlet and exhaust must be made of materials compatible with pumped gases and the leak test after the reassembly is completed For free exhaust test neutral gas pumping air an anti noise device supplied with the pump can be fitted on to the exhaust tube in order to reduce the exhaust noise level Anti noise device When pumping on aggressive gases the exhaust of the pump must be connected to an exhaust stack or an evacuation duct I
39. e necessary steps with the carrier and inform Alcatel if necessary In all cases Alcatel recommends that the packaging be saved in the event that the equipment must be transported or put into prolonged storage Packaging dimensions Dim mm A B C 1000 900 520 1000 1118 520 ADS 1202 1400 800 1300 Tolerance 50 mm Unpacking Remove the top of the outer crate Remove the fixing screws of the side panels and remove the crate Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 2 2 Remove the pump from the crate Prepare the pump B 10 Unpacking Storage For all equipment handling use the devices provided for this purpose lifting rings handle etc It is highly recommended to use a hoist Fit the pump with the hoisting rings Lift the pump using the rings and remove the foam blocks Hoisting ring Pump Weight in kg Ibs 250 4551 400 881 550 1212 Screw in the leveling pads of the frame and lower the pump on the wheels Remove any additional packages from the crate and set aside These packages will contain cables accessories and so forth To prevent humidity from entering the pump during transport the unit has been pressurized with dry nitrogen before shipment The inlet and exhaust are sealed with blank off flanges which should not be removed until the pump is ready to be used If the pump is going to be p
40. e water flowrate alert D 90 Check the sensor connection on Mot temp connector see D 10 Call Alcatel customer service See water flowrate alert D 90 Check the sensor connection on Mot temp connector see D 10 Call Alcatel customer service Check the temperature control valve connection on Therm ADP connector see D 10 See water flowrate alert D 90 Call Alcatel customer service Call Alcatel customer service 1 3 INCIDENT Alarm ADP TEMP Pump temperature reaches temperature control setting value 10 C but the display is 0 or 170 C Pump temperature is higher than alarm threshold Pump temperature is lower than alarm threshold 2 3 D 100 The pump is running and then is showing an alert or alarm message Temperature or pressure problems CAUSE TRO UBLESHO OTING Defective temperature sensor Check the sensor connection on ADP Temp connector see D 10 NO Other problem Call Alcatel customer service Temperature control valve not connected Check the temperature control valve connection on Therm ADP connector NO see D 10 Cooling problem NO Other problem Call Alcatel customer service See water flowrate alert D 90 Defective temperature sensor Check the sensor connection on ADP Temp connector see D 10 NO Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manua
41. electrical installation protection Electrical connection using a connector B 70 Pump power supply N Study the preliminary precautions see B 00 All the electrical connections required for the various components operation have been done in the factory However the user must make the electrical connection of the main power supply Main circuit breaker rating Minimum values Minimum cut off rating of main pump switch 10 kA For any change of power supply voltage in relation to the initial configuration contact Alcatel Customer Service Facilities on the top Female plug 6 contacts Earth Facilities ds cs at the rear f Earth X 6 f Phase 3 3 cal J Phase 2 2 6 Phase 1 1 gt 7 S la The pump is supplied with a female plug delivered separatly Connect the mains cable to the power supply connector using wires with the following specifications AW G 12 2 5 mm per ADP 122 AW G 10 4 mm per ADS 602 ADS 1202 Check that the cable is correctly protected against ground defects and that earth wire is longer than the three conducting wires Then connect the connector on the pump frame and lock it Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 B70 Pump power supply Electrical hard wired Open the electrical cabinet Pass the cable through one of the connection required for feedthrough provided for this purpose SEMI compatbility Facilities at
42. eries Two Edition O1 Novernber 98 Edition O2 February 99 Chapter C User s Manual ADP ADS Series Two O peration Operating modes P model pumps C10 Operating modes L model pumps C 11 Start up of the M4 monitoring system C 20 Use of the M4 monitoring system for pumping operaton naaa aa aa C 30 Use of the pump ADP 122L C 31 The M4 monitoring system parameters C 40 M4 monitoring system function table C 50 W ater flowrate and gas purge according to main semiconductor processes 00 eae C 60 Saving and remote loading of pump configuration with M4 oaa ee C 70 M4 monitoring setting for transport C 80 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Noverrber 98 Different control modes Local mode Switch configuration according to the hand held remote control layout C 10 Operating modes P model pumps According to the monitoring configuration and wiring the pump can be locally controlled by the hand held remote control remote controlled by serial link remote controlled using dry contacts via 14 connector In local mode the cover plugs delivered with the machine must be plugged on J1 and J 14 connectors In this case of operation the pump is running as a stand alone part of the equipment on which it has been installed The pump is controlled by a hand held remote c
43. ettings can be modified through the M4 corresponding menu The initial configuration of the serial link is as follows W Type RS 232 E Transmission SPEED 9600 bauds W Data Length 8 bits W Parity NONE W Stop bit 1 Reception data RS 232 RD TD Transmission data RS 232 GND Ground V RS 485 9 pin male DB connector V RS 485 9 pin female DB connector Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 Examples of possible connection Link RS232 with a single monitoring system M4 Multiple serial link RS 232 J6 M4 Serial link RS 485 2 2 B 120 RS 232 or RS 485 link wiring The commands and messages reception syntax is dealt with in a separate chapter Contact Alcatel Several M4 monitoring systems may be connected on a single link The multiple link is obtained by creating a loop and validating Echo function 6700009 670 0009 600009 6o00 onr 1 O O 5 1 0 O 5 1 O O 5 1 O O 5 Link using standard cables which will be interrupt at monitoring disconnection 69 CBO o OOOO 9 pin male DB 9 pin female DB 9 pin male DB 9 pin female DB Conn J6 Conn J 7 Conn J6 Conn J7 Link using specific cables without interruption at monitoring disconnection In both cases for the units located at end of link S1 must be to ON position Alcatel Vacuum Technology France User s Manual ADP ADS S
44. g system can be customized at any time according to the running process by programing the parameters of the various menus listed in C 50 with the pump stopped See sheet D 10 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverrber 98 Pump configuration C 50 M4 monitoring system function table Gain access to parameter programing using the hand held remote control EA 2 2 The programing made at the factory is protected by an access code which disables the entry of new parameters Press the key SET EN TER PASSW ORD Valid the code with ENTER CODE 0 Access code can be customized see folio 7 Parameters can be transferred from one pump to another This can be done in case of a pump replacement or for new pump installations see C 70 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 7 C 50 M4 monitoring system function table DEFINITION MENU ENTER Choice Definition Initial configuration FREN CH All i aaka menus are in the selected EN GUSH EN G USH Da aaka SYSTEM SELECT ADP122 ADS602 ADS602V ADS1202 EN ABLED DISABLED ENABLED Allows retrieving logic data on U1 DISABLED input using a customer supplied sensor closed when switched off This input stays DISABLED if parameter LL PUMP OPTION is enabled Allows retrieving logic data on U2 input using a customer supplied sensor
45. ght glass 5 Do not exceed the indicated quantities Replace the fill plug securely Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 5 3 Edition O2 February 99 Water characteritics Cooling circuit connections B 50 Connection to the cooling circuit In order to limit corrosion and fouling of the motor cooling coils it is necessary to use cooling water with the following characteristics M Treated fresh water or non aggressive industrial water M oH between 7 5 and 11 W Hardness lt 7 milli equivalent dm WE Resistivity gt 1500 Q cm M Particles maximum size 0 03 mm WE Solid pollution lt 100 mg dm WE Temperature from 10 to 25 C W Pressure range between 3 and 7 bars absolutes W Pressure A inlet outlet 2 bars minimum WE Flowrate per pump 100 h If the above mentioned characteristics are not respected install a filter to the cooling connection N PT BSPP nipple Facilities atthe rear W Install the two connectors delivered separatly on the self closing quick couplings ALCATEL supply Attach the connectors to the supply and return lines W ater inlet labeled IN 1 4 NPT thread W ater outlet labeled OUT 1 4 NPT thread Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 B 50 Connection to the cooling circuit Water flowrate adjustment W ater flowrate N eedle tap Flowmeter panel
46. ies Two 3 4 Use with two hand held remote controls C 30 Use of the M4 monitoring system for pumping operation To take the control with a hand held remote control press only on the CONTROL key of the choosen hand held remote control then a star appears on the left corner of the display The control of the pump is now not possible from the other hand held remote controls as long as the first one has not given the control back To give the control again press on the CONTROL key of the hand held remote control until the star has disappeared Reading of data and parameters can be done on both hand held remote controls even if they do not control the pump If the message NOT ALLOWED appears after an action of any key check the presence of the star on the display showing that the control has been taken Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverrber 98 C 31 Use of the pump ADP 122 L N Study the safety instructions see B 00 Check the direction of rotation of the pump at inital start up see B 80 The performances and the operationnal safety of this product are guaranteed provided that it is used in normal operating conditions Pumping start up 99 999 9 Time counter ON OFF Put the ON OFF switch on position 1 to start the pump The monitoring system performs the following operations ADP pump start up e openi
47. ilter frequency converter monitoring system etc e The machines are designed so as to prevent any thermal risk to the user s Safety However specific operating conditions may generate high pump temperatures justifying particular attention on the part of the user external surfaces gt 70 C Hot surfaces which can cause serious burns when touched are signalled with a specific label A Hot surface Hot surface near the label pump body exhaust tube e Alcatel has no control over the types of gases passing through this pump These are entirely under the control of the process user and or the hardware systems integrator Frequently process gases are toxic flammable corrosive explosive an otherwise reactive Since these gases can cause serious injury or death it is very important to plumb the exhaust of the pump to the facility s hazardous gas exhaust system which incorporates appropriate filters scrubbers etc to insure that the exhaust meets all local air and water pollution contro regulations Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O2 February 99 B10 Unpacking Storage Handling Precautions Risk of tilting Even when compliance with EEC safety rules is guaranted normal range 10 it is recommended to take precautions as regards the risk of tilting during product handling installation and operation If the equipment has been damaged tak
48. ion During operation the user is warned of an operating incident by e one or more faults are displayed on the screen alternating with monitoring parameters W hen these faults are activated the monitoring system triggers the alert phase followed by the alarm phase The period for these phases are programable indicator light and buzzer sounded if option selected indicator light on display panel the fault contacts on the remote connector J14 at the rear of the monitoring unit are closed pumping is stopped A list of incidents is given in the chapter D Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 C 30 Use of the M4 monitoring system for pumping operation Pumping shut down Press on STOP key The monitoring system performs the following operations inlet valve closing if the pump is fitted with such accessory and if option selected pump stopping water valve closing injection of purge gas is continued during the shutdown phase if programmed W hen the stoppage is caused by a loss of power automatic restarting is possible if AUTO RESTART is set on VAUD When the pump has been configurated for automatic restart after a power failure it is the responsibility of the user to take all the measures required to prevent risks resulting from this type of operation Alcatel Vacuum Technology France User s Manual ADP ADS Ser
49. king the direction of rotation and inital pump start up When inspecting the direction of rotation of the Roots at the initial start up provide protection against the risk of compression related to the rotating parts in the inlet Caution A non powered Roots can be driven by another pump in rotation risk of compression Remove the blank off flange on the inlet and exhaust port Fit a pressure gauge at the pump inlet Set the main switch to position 1 Press on the ROOTS key until the word ROOTS disappears from the display Startup the pump by pressing START on ON for an ADP 122 L and stop it after few seconds if the pressure indicated is less than 5 10 mbar the direction of rotation is correct if the pressure increases invert two phases at the main power input female connector or from main switch terminal if connection on feedthrough see B 70 Before any service on the electrical cabinet make sure the electrical source has been disconnected to the pump customer mains circuit switch Note Rotation can also be checked at the exhaust by making Sure gas is being forced out at the exhaust nipple In order to prevent foreign bodies from entering the pump while waiting to be installed replace blank off flanges on inlet and exhaust ports again As soon as the installation and startup procedure is complete and the direction of rotation is checked sheets B 10 to B 80 the pump is now ready for use se
50. l see B 40 Fluid Alcatel 113 0 5 1 064657 x M ajor kit a Consult 2 oil fillings lis 8 h Alcatel see B 40 2 Fluid Alcatel 113 0 5 N Consult 5 oil fillings 5 zee Alcatel see B 40 9 Fluid Alcatel 113 0 5 A ADP 122 P Maintenance Testing and cleaning time not included A B ADS 602 P Maintenance A C ADS 1202 P Maintenance Maintenance times can change according to processes and equipments used Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O1 Novenbre 98 Diagnosis and trouble shooting Pump does not start Mains presence light indicator does not switch on Hand held remote control display is not lighting Up oaaae Display is showing a mesage or an alarm Pump only starts up Roots does not start oonan aaaea The pump is running and then is showing an alert or alarm message Electrical problems Facilities problems 0 00 eee ee Temperature or pressure problems Temperature problems ADP 122 D Maintenance problem 0005 Options and accessory problems Analogic and logic input problems The pump is running No message 00 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two D 30 D 40 D 50 D 60 D 70 D 80 D 90 D 100 D101 D110 D 120 D 130 D 140 1 1 Edition O1 Noverrber 98 D 40 Pump does not
51. l ADP ADS Series Two Edition O2 February 99 Edition O2 February 99 D 100 The pump is running and then is showing an alert or alarm message Temperature or pressure problems INCIDENT CAUSE TROUBLESHOOTING Alert Exhaust pressure Check the N2 flowrate gt 1450 mbar setting value see C 60 e Check that exhaust pipe NO is not clogged see E 20 Sensor problem P 500 mbar NO Other problem Call Alcatel customer service Alarm Exhaust pressure e Check the N2 flowrate gt 1990 mbar setting value see C 60 e Check that exhaust pipe NO is not clogged see E 20 Sensor problem P 500 mbar NO Other problem Call Alcatel customer service Check the sensor connection on CHECK PRESS connector Check the sensor connection on CHECK PRESS connector Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 5 3 Edition O1 Noverrber 98 INCIDENT The alert light indicator Yellow is lit up on front display panel O ee a T The alarm light indicator Red is lit up on front display panel D 101 The pump is running and then is showing an alert or alarm message Temperature problem on ADP 122 L CAUSE Motor temperature NO Other problem Motor temperature i gt 65 C NO L Sensor problem o H NO Other problem Alcatel Vacuum Technology France User s Manual ADP ADS Series Two TRO UBLESHO
52. l noise Damaged ball bearing No Rotors seizing NO Unsynchronized gears No N2 purge Incorrect configuration Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Call Alcatel customer service M aintenance ADP Call Alcatel customer service Maintenance ADP Call Alcatel customer service M aintenance ADP Call Alcatel customer service M aintenance ADP Call Alcatel customer service Reset M4 configuration PURGE CMD enabled or set the purge manually PURGE key on hand held remote control 1 1 Edition O2 February 99 Chapter E User s Manual ADP ADS Series Two Maintenance sheet Pump draining cee ee E10 Exhaust maintenance 0 000 ve E 20 Freeing up the ADP soua ee E 30 Ressetting maintenance parameters E 40 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Noverrber 98 Housing oil replacement E 10 Pump draining Study the safety precautions before intervention see D 00 Certain gases become corrosive and toxic when trapped in oil Aways wear protective gloves when handling used and dirty pump oil drain into a closable container and do not breathe the fumes of the oil Always use fully self contained breathing apparatus Always dispose of used or dirty oil or sub products properly and in compliance with all local state and federal environnemental laws and regulations Unfasten
53. m INCIDENT CAUSE TRO UBLESHO OTING Alert then Alarm Main power is not correct Check the main power POWER SUPPLY NO Other problem Call Alcatel customer service Alarm Pump emergency stop Rotate to unlock the EMERGENCY STOP is engaged emergency stop on the front panel display NO Other problem Call Alcatel customer service Alarm RT1 breaker Check RT1 setting ADP BREAKER switched off see D 10 Check that ADP is not NO seized up see E 30 Switch RT1 on Other problem Call Alcatel customer service Alarm RT2 breaker Check that ADS option is ROOTS BREAKER switched off selected Check RI2 setting NO see D 10 Switch RT2 again Other problem Call Alcatel customer service Alert then Alarm Exaust pressure Check exhaust pipe EXHAUST PRESSURE gt 1990 mbar NO Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O1 Novernber 98 Pump only starts up Roots does not start INCIDENT CAUSE D 70 TRO UBLESHO OTING Only ADP starts Incorrect M4 configuration Configure for ADS No Roots message NO on the display Roots command valid NO Press Roots key Roots does not run but Roots LED off Roots message on the display e Reset the configuration if separate Roots command is not necessary e Configure Roots command INVAUD Check the presence or connection of RP plug located on electroni
54. n this case do not use the anti noise device M ake sure that the exhaust pressure does not exceed 1200 mbar DN 40 ISO KF Several fitting accessories are available in the Alcatel catalog Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 B 90 Connection to the pumping circuit At inlet pump Make sure that any vacuum accessories connected to the inlet of the pump can withstand a negative pressure of 1 bar with reference to the atmospheric pressure Inlet isolation valve This accessory avoids a sudden reverse flow of gas to the cham accessory ber when the pump is stopped Facilities n the top Closing plate Facilities at the rear Fi o lt p Connect the valve directly on the pump inlet flange using connecting accessories Connect the electrical cable to the electronic cabinet inside the frame see D 10 If the valve must be remote controlled see B 100 Remove the closing plate connect the cable to the electronic cabinet and the plate equipped with a feedthrough delivered with the cable Exhaustable enclosure required for SEMI compatbility 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Novernber 98 Location of J 14 remote control connector B 100 J 14 remote control plug connection Study the preliminary precautions see B 00 When units containing control circuits a
55. ned no alert 4 5 Alarm presence Unit stoppage Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Novernber 98 B 110 Emergency stop plug connection J1 connector location This connector allows the control or remoting of the emergency stop function from the front panel of the unit This connector is located at the rear of the pump gt LP T P lt Cover plug Cover plug wiring In local mode the pump can run only if the cover plug delivered with the pump is fitted on J1 connector AMP connector W iring viewed under soldered side Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 B 110 Emergency stop plug connection Control contact The input is considerated activated when the pins are linked input Contact Function 2 3 Contact opened emergency stop command Is activated Available output Itis a dry contact Emergency stop state Contact Function This contact opens when emergency stop is activated 1 4 Contact opened emergency stop command Is activated 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 Connector wiring RS 232 485 6 Connector wiring RS 485 7 B 120 RS 232 or RS 485 link wiring At the first power on the user will find the initial configuration set at factory The s
56. ng sight glass 5 ADP sight glass Roots front housing sight glass 6 ADP draining Roots front housing drain Make sure the pump is off and then remove the pump covers Use the funnel equipped with a flexible tube delivered with the pump Remove the fill plug 1 Position the funnel equipped with flexible tube in the oil filler neck Fill the pump with oil according to the recommended quantities Do not exceed the indicated quantities The oil level should be in the middle of the sight glass 2 For this to be accurate waita few minutes for the oil to settle over all the internal surfaces Replace the fill plug securely Remove the grid located on the top cover to access to the fill plug easier Remove the fill plug 7 Position the funnel in the oil fill neck Fill the pump with oil accor ding to the recommended quantities Do not exceed the indicated quantities The oil level should be in the middle of the sight glass 8 For this to be accurate waita few minutes for the oil to settle over all internal surfaces Replace the fill plug securely Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 B 40 Filling the machine oil housings Filling of ADP Remove the fill plug 4 Position the flexible tube in the oil fill neck Fill the pump with oil according to the recommended quantities The oil level should be in the middle of the si
57. ng the water valve e data capture and sensor processing e the time counter increases N Avoid moving a pump in operation Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 Operation monitoring 2 2 Pump shut down C 31 Use of the pump ADP 122 L During operation the user is warned of an operating incident by e indicators light on display panel e the fault contacts on the remote connector J3 at the rear of the monitoring unit are closed e pumping is stopped Put the ON OFF switch on position 0 The monitoring system performs the following operations e pump stopping e water valve closing W hen the stoppage is caused by a loss of power restart is automatic after power returns When the pump has been configurated for automatic restart after a power failure it is the responsibility of the user to take all the measures required to prevent risks resulting from this type of operation Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Novernber 98 Purpose of the sensors Mass flow meter Temperature sensor Motor power sensor Pressure sensor C 40 The M4 monitoring system parameters Allows the display of the nitrogen flowrate Signals insufficient gas purge during a warning time and stops the pumping at the end of alarm time Allows the regulation of the ADP temperature Signals a pump temperature v
58. not dispose of residue if necessary have it destroyed by a qualified organization Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 D 00 Safety instruction related to maintenance e Certain gases can become corrosives and toxic when trapped in oil Always wear protective gloves when handling used and dirty pump oil drain it into a closable container and do not breathe the fumes of the oil Always use fully self contained breathing apparatus e When the exhaust is maintained avoid any contact with the reaction by products deposit powder strongly corrosive wear gloves even a breathing mask Cleaning procedure can produce volent reactions and dangerous gas releases We recommend to ventilate the premises well and disassemble the equipment under a ventilated hood e Always dispose of used dirty oil or sub products properly and in compliance with all local state and federal environmental laws and regulations After a complete maintenance operation on the pump or on the installation it is recommended to perform a helium leak test Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novernber 98 Edition O1 Noverber 98 Maintenance time monitoring Maintenance operations D 10 First level of maintenance Study the safety instructions related to maintenance See D 00 W hen a problem occurs the user is informed by the relevant fault indicato
59. ntacts inputs continued Available outputs Contact S2 S3 S4 S5 S6 S7 Contact 14 15 16 17 8 9 6 7 39 40 37 38 35 36 1 34 2 3 4 5 12 13 10 11 B 100 J 14 remote control plug connection Function Contact open remote control valid keyboard inhibited Contact closed keyboard valid remote control inhibited ADP Start Stop Roots Start Stop if Roots CMD selection is validated in DEFINITION menu N 2 purge Start Stop if Purge CMD selection is validated in DEFINITION menu Switching command Stand Purge if the N 2 standby selection is validated in DEFINITION menu O pening Closing of inlet valve if S7 is activated Authorization to close or not the inlet valve if INLET VALVE OPTION is validated in DEFINITION menu Available dry contacts 50V 1A Function These contacts open in the presence of a fault Pump operation ADP or ADS State of inlet valve Pump running correct purge and valve opened Maintenance alert Exhaust pressure alert Purge alert M otor temperature alert Pump fail oump running valve opened no alert Alert presence Alarm presence Unit stoppage These contacts close in the presence of a defect Alert presence without maintenance Alarm presence Unit stoppage Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O1 Novernber 98 B 101 J 3 remote control plug connection ADP 122 L Study the prelimin
60. ntrol panel Mains _ Electrical Roots motor Emergency cabinet ADP motor stop output Electronic Remote control cabinet Sensors connector e Motor protection e Pump temperature monitoring and control e Maintenance time control 2 2 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Novernber 98 Facilities A 40 Options In order to adapt the equipment to the specific conditions of the pumping installation Alcatel offers a choice of options factory configurated when the pump is ordered Important note Depending on the country some options are integrated as standard Please consult with your local Alcatel representative The different facilities connections water N2 power supply and the exhaust can be fitted on the top or at the rear of the pump Top of the pump Exhaust Facilites water gas Mains power supply Facilities water gas _ gt Cis B Exhaust _ __ gt r The main cable can be connected directy on the terminal of electrotechnic cabinet SEMI S2 93 compatibility using a plug Rear of the pump The exhaust can be fitted with an optional exhaust heater device to be specified in configuration order see A 60 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 Hand held remote control Roots converter ADS 602 P model Stand by Purge A
61. ontrol connected in front or at the rear of the frame or by both simultaneously connected One in front the other at the rear of the frame A second hand held remote control can also be connected in series with the first one For safety reasons the pump can be controlled only by one hand held remote control at the same time Two schitches have to be configurated the first at the back of hand held remote control and the second S1 located on electrical interface see A 20 Use of only one hand held remote control Connected on both sides Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 Remote controlled Operating modes Remote control via J 14 Dry contacts Pump alone Remote control via RS 232 485 serial link Pump alone or in a group of pumps C 10 Operating modes P model pumps The pump is monitored by the equipment in which it is installed such as an automated pumping system or of an industrial equipment The pump is remote controlled by the opening or closing of different dry contacts wired on J 14 connector see B 100 The hand held remote contro keyboard is inhibited as long as the contact S1 of the J 14 connector see B 100 is kept open In Remote mode RM is displayed on the display Datas and operating parameters can be read locally on the hand held remote control The control of emergency stop is not possible from J 14 connector use the J1 connector EME
62. or use the J 1 connector EMERGENCY STOP located at the rear of the pump if emergency stop must be remote controlled see B 110 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 Operation monitoring from M4 monitoring system a Electrical E cabinet a C 11 Operating modes ADP 122 L The ADP 122 L pump can be connected to the M4 monitoring system of an other pump which is monitoring on the logic inputs information related to the Load Lock pump operation Following functions are monitored the state Running ON OFF the state defect Temperature alert Operating time for maintenance For that the ADP 122 L pump must be connected to another pump equipped with an M4 monitoring system and the following parameters have to be configurated LL PUMP OPTION LL MAINT Operating time of ADP 122 L LL MAINT ALERT Maintenance threshold ANY AAW Electronic Electronic cabinet cabinet Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Novenbre 98 Edition O1 Noverrber 98 C 20 Start up of the M4 monitoring system N Study the preliminary precautions see B 00 The hand held remote itis used to control the pump and configure the parameters control Parameter selection and configuration keys Indicators Manual control bey I The functions of the parameter selection and configuration keys
63. otor housing requires no maintenance 3 Electrical rotor The pump is fitted with a antisuckback valve in the exhaust tube preventing the exhaust being sucked back The pump in a pumping installation Process chamber N 7 IN LET PRESSURE ATMOSPHERIC PRESSURE i Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 3 Edition O2 February 99 A new range of Alcatel s dry pumps for every application A 20 ADP ADS Series Two dry pump range Alcatel has developped a new range of dry pumps operating at high temperature adapted to the differents processes used in the semi conductor industry The range includes e ADP 122 which is available in two versions ADP 122 P integrated in a covered frame including the pump the monitoring the hand held remote control facilities the flowmeter panel the OEM interface the serial link ADP 122 L simplified model designed for clean processes load lock and transfer chamber pumping e Two pumping groups composed of an ADP 122 P combined with a Roots to make a fully integrated system ADS 602 P and ADS 1202 P ADS 1202 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 4 A 20 ADP ADS Series Two dry pump range Interfaces for example ADP 122 P utilities on top W ater circuit inlet outlet N2purge Main switch ey lt SNL NNN w Mains on Electrical interface
64. p starts set the CMD PURGE menu on INVAUD To start up or stop the gas purge during pumping set the CMD Purge menu on VALID The purge will start or stop by pressing the PURGE key To start the Roots and ADP simultaneously set the CMD ROOTS menu on INVALID To start up or stop the Roots while the ADP is running set the CMD ROOTS menu on VAUD The pumps will start or stop by pressing the ROOTS key Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 4 Pumping start up Operation monitoring 2 4 C 30 Use of the M4 monitoring system for pumping operation Startup the pumping by pressing START The monitoring system performs the following operations opening the inlet valve if preselection has been validated ADP pump startup opening the water valve data capture and sensor processing opening the purge gas valve if preselected Roots pump startup if preselected At the same time the operating parameters are shown 52H LOC N2 RO O TS ADP POW ER 1410 W Gain access to other operating PRESSURE 940 MBAR parameters using the SET key ADP TEMP 58 C see C 50 Only installed and configurated options parameters are displayed The pumps are equipped with an exhaust pressure monitoring sensor When this is not used particularly L version it is the responsibility of the user to prevent the risks related to excess overpressure N Avoid moving a pump in operat
65. power supply line with meshing from the power supply source to a distance of 3m from the product inlet e When the main switch is set to 0 part of the equipment remains energized Live circuits are exposed and accidental contact is possible Energized electrical Work Hot Work in compliance with SEM S2 93 Type 4 Before any maintenance operation disconnect the main electrical cable A Risk of electrical shock Switch off the pump and disconnect the main cable Do not operate inside if your are not trained and authorized Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 2 2 2 B 00 Safety instructions e The EMO device is a pump EMO nota system EMO it only de energize the pump when activated To allow the pump to restart turn the EMO button clockwise and pull it out To control the system EMO it iS necessary to wire the corresponding contacts on the J1 connector see B 100 You can stop the pump from the system EMO by wiring the corresponding terminals on J1 connector see B 100 e Units containing control circuits are designed to guarantee normal Safety conditions taking into account their usual operating environment Take care not to insert objects in the ventilation louvers when handling units e When switching off an item of equipment containing capacitors loaded with over 60VDC or 25 VAC take precautions at the access to the connector pins single phase motors fitting with mains f
66. r light which is located on the front panel orange lit in case of alert red litin case of alarm followed by a pump stop the audible buzzer warning if preselected the fault contacts on the J14 remote connector at the rear of the monitoring system which close the stopping of the pumping although the STO P command has not been given the display of fault message on the display of the hand held remote control a message via the RS 232 or RS 485 link on a micro computer Depending on the maintenance parameter programmed when the operating time before maintenance has expired the screen display alternates between operating parameters and the corresponding alert message The red indicator light is lit on front panel Press the SET button during the pumping The operating times for components are in turn displayed This information can be read at any time using the MAINTENANCE menu Perform maintenance on the relevant parts See Section E Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 4 D 10 First level of maintenance Location of electrical The diagnosis and troubleshooting guide from D 30 may lead components check the electrical components of the monitoring cabinet i described below electrical cabinet eSt Se se amek g Breakers rating ADP 122 ADS 602 Voltage LV 200 to 230 V 50 60 Hz
67. rance User s Manual ADP ADS Series Two 1 1 Edition O2 February 99 Introduction Start up Contents User s Manual ADP ADS Series Two Dry pump operational principle ADP ADS Series Two dry pump range M4 monitoring for P pump model Monitoring for ADP 122 Lmodel OGONG a o45 4 2 eae et ee oe eee GO Technical characteristics 0000 AccessorieS 00 ee ee eg Safety instructions 0 cee ee Unpacking Storage ee Positioning the pump in the pumping installation Installing anti vibration pads accessories Filling the machine oil housings Connection to the cooling circuit Inert gas purge connection N2 plug Pump power supply 2 00002 eee Checking the rotational direction and first pump AR UD gener dd eae dene eee dee ee Connection to the pumping circuit J14 Remote control plug connection 3 Remote control plug connection ADP 122 L Emergency stop plug connection RS 232 or RS 485 link Wiring Alcatel Vacuum Technology France User s Manual ADP ADS Series Two B 20 E 2 2 Operation Maintenance Maintenance sheet Contents User s Manual ADP ADS Series Two Operating modes P model pumps C10 Operating modes L model pumps C 11 Start up of the M4 monitoring system C 20 Use of the M4 monitoring system for pumping
68. re equipped with dry contact outputs it is the responsibility of the customer to use these outputs in compliance with safety standards The remote contro function allows e Remote control of pumping functions START STO P PURGE Roots and Inlet valve e Remote monitoring of parameters through auxialiary dry contacts 50V 1A These contacts can be used to control automatic functions The remote control connection is done via the J 14 connector located on the rear panel of pump Female Sub D 50 pins connector In local mode the pump can run only if the cover plug delivered with the pump is fitted on J 14 connector Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 3 2 3 Cover plug wiring Control contacts inputs J 14 J 14 B 100 J 14 remote control plug connection Cover plug type Sub D 50 pins connector Factory wired soldered side view These inputs are considerated to be activated when a DC voltage between 5 and 30V Is applied W iring customer supplied 5 to 30 VDC Inputs can be used by pins 47 48 OV and pins 49 50 12V in order to be controlled by external contacts of the customer equipment OV 12V W iring customer supplied Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 Control co
69. s Rear view Display panel al Emergency stop button Hand held remote control Front view 2 4 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O2 February 99 A 20 ADP ADS Series Two dry pump range Internal equipment The P model pumps of the Series Two range include a cooling of the pumps circuit and an inert gas purge circuit The ADP 122 L model especially designed for clean applications like load and transfer chamber pumping does not include an inert gas purge circuit Cooling circuit principle schema Inlet Temperature sensor pe eee W ater flow meter An VA NN W ater inlet gt W ater outlet Exhaust lt 1 Anti suckback valve Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 3 4 4 4 A 20 ADP ADS Series Two dry pump range P model Inlet N2 purge circuit Anti suckback valve N 2 inlet DX K Exhaust lt 1 I Fett ttt tet er ee 2efJe cee he Ani amp CY NY X Yuckback Y I l valves l ae Calibrated Y Pressure jets i sensor 7 S 5 cere l I Manometer I Pressure O Mass Stop valve l regulator flow meter Z I I I Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O1 Noverrber 98 Principle Description
70. sabled WARNING threshold ALARM threshold 0 to 60 mn OR Disabled ADP TEMPERATURE Input value 10 C to 130 C 0 to 140 C AUX TEMP SENSOR 20 C to 170 C 500 to 4000 W ADP POWER SENSOR Warning threshold to 5000 W 0 V to Alarm threshold ANALOG INPUT iii i L1 LOG SENSOR LI2 LOG SENSOR EEREREERE Emre e eE 0 to 60 mn OR Disabled U3 LOG SENSOR Accessible menu only if option is validated in DEFINITION menu C 50 Initial configuration DISABLED 4000 4000 8000 DISABLED DISABLED DISABLED DISABLED DISABLED DISABLED 1 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O1 Noverrber 98 Edition O1 Noverrber 98 C 50 M4 monitoring system function table SETTING contd ENTER PURGE FLOW PRO LONGED Selection on Settings limits Initial configuration WARNING threshold O to 120 mn ee i ee ee i ee i ee eee EE ee ee i ee ee ee CELSIUS FARHEN HEIT mbar PSI Torr hPa Contrast display setting SERIAL LINK i Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 5 7 SET MAIN TENANCE E p ADP MAINTENANCE ADP LP BEARING 1 C 50 M4 monitoring system function table Settings limits Initial configuration 0 to 65500 h 0 to 65500 h 0 to 65500 h 0 to 65500 h 0 to 65500 h 1000 to 34000 h 1000 to 34000 h 1000
71. start Mains presence light indicator does not switch on INCIDENT CAUSE Green light No mains Mains presence is not lighting up NO Main switch on position 0 NO External emergency stop engaged NO Unit emergency stop engaged NO CB1 breaker switched off NO CB2 breaker switched off NO Other problem Alcatel Vacuum Technology France User s Manual ADP ADS Series Two TRO UBLESHO O TING Check power supply Switch iton T Check the presence of cover plug J1 or check its locking Rotate to unlock the emergency stop on the front panel display Check the amperage setting see D 10 Switch iton Switch iton see D 10 Call Alcatel customer service 1 1 Edition O1 Noverrber 98 D 50 Pump does not start Hand held remote control display is not lighting up INCIDENT CAUSE TRO UBLESHO OTING Hand held remote control CB3 breaker switched off Switch it on display is not lighting up 8 but the mains presence NO reen light indicator is on _ __ s Twisted cable Check the connection ___ incorrectly connected__ NO _ Other problem Call Alcatel customer service Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O1 Novernber 98 INCIDENT Hand held remote control display is showing MONITOR M4 D 9111 VX XX Hand held remote control display is showing WAIT
72. the fill plug 1 in order to eliminate any excess pressure in the housing Remove the drain plug 2 and allow the used oil to flow into a container capacity 0 5 litre Caution the Roots is equipped with 2 housings Repeat the operation for each housing Replace the drain plug 2 and then remove the fill plug 1 Introduce the quantity of new oil required see B 40 Replace the fill plug 1 Alcatel Vacuum Technology France User s Manual ADP ADS Series Two 1 1 Edition O2 February 99 E 20 Exhaust maintenance Study the safety precautions before intervention see D 00 When the exhaust is maintained anti suckback valve and pipes avoid any contact with the reaction by products deposit powder strongly corrosive wear gloves even a breathing mask Maintenance frequency The maintenance frequency of the anti suckback valve of the pump ADP depends on the process used Refer to the maintenance frequency tables see D 20 exhaust in horizontal position Remove the rear cover unscrewing the 4 screws Anti suck back valve is located under the pump Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Remove the front cover and the right side cover Disassemble the two quick connect clamps and centering ring maintaining the 3 exhaust pipes straight up and bent Remove the exhaust pipes 1 2 2 2 Ant suckback valve disassem
73. um Technology France 98 avenue de Brogny BP 2069 74009 ANNECY Cedex Tel 33 4 50 65 77 77 Fax 33 4 50 65 77 89 Germany Alcatel HO CHVAKUUM TECHN IK GmbH Am Kreuzeck 10 D 97877 WERTHEIM Tel 49 9342 9610 0 Fax 49 9342 9610 30 Italy Alcatel Vacuum Systems S p A Via Trento 30 20059 VIM ERCATE M1 Tel 39 039 686 3855 Fax 39 039 667 125 Japan Alcatel ITS JAPAN High Vacuum Technology Division Ebisu MT Building 5 Floor 3 15 7 Higashi 3 Chome Shibuya ku TOKYO 150 0011 Tel 81 3 5468 1621 Fax 81 3 5468 1603 Korea Alcatel Vacuum Technology Korea 5th Floor Sunghyun B D 10 5 Karak Dong Songpa ku Seoul SOUTH KO REA Tel 82 2 409 6277 Fax 82 2 409 6279 United Kingdom Alcatel Vacuum Technology U K Ltd 8 Bain square Kirkton Campus Livingston W est Lothian EH54 7DQ SCOTLAND Tel 44 1 506 418 000 Fax 44 1 506 418 002 USA Alcatel Vacuum Products 67 Sharp Street HINGHAM MA 02043 Tel 1 781 331 4200 Fax 1 781 331 4230 Yy ALCATEL Alcatel Vacuum Technology France 98 avenue de Brogny B P 2069 74009 ANN ECY Cedex France Tel 33 0 4 50 65 77 77 Fax 33 0 4 50 65 77 89 Telex 385 153 F W eb site www alcatel com Publication Alcatel Realization D O C 74 04 50 64 14 74 Part Number 106298 Ed 02 02 1999
74. ut into storage the inlet and exhaust seals should be left in place Our equipment can be stored without particular storage precautions pump pressurized in nitrogen and sealed only at an ambient temperature between 25 C and 55 C Alcatel Vacuum Technology France User s Manual ADP ADS Series Two Edition O2 February 99 Edition O2 February 99 B 20 Positioning the pump in the pumping installation Pump performance will depend on the kind of accessories used and the quality of the mechanical connections such as the pump fittings As these pumps are typically used in a corrosive atmosphere their reliability will depend on proper installation and maintenance When assembling the vacuum circuit we recommend the installation of maintenance accessories such as shut off valves on the inlet and purge lines For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used Positioning the pump The pump must be operated in the horizontal position with the pumping axis vertical and the inlet opening upwards Risk of tilting Even when compliance with EEC safety rules is guaranted normal range 10 it is recommended to take precautions to reduce the risk of tilting during product handling installaton and operation Each pump is equipped with four locking screw jacks Lock the pump by adjusting these jacks so that all four feet

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