TPS Bench and Mini-IMG Instruction Manual
Contents
1. 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Toll Free 080 222 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Road Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Toll Free 0800 051 342 Fax 886 2 2698 96782 UK amp Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 United States Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1 781 860 5437 Other Countries Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support and Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtl technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 24522. Manual Section 2 TPS Bench Operation 2 1 Purpose To describe a TPS bench startup procedure to ensure long life for the Mini IMG gauge and proper operation of the TPS bench 2 2 TPS Bench operation The system Figure 2 1 is comprised of the following A SH 110 pump backing a V81 turbo pump A V81AG rack controller A Mini IMG high vacuum gauge connected to the turbo through a tee at the inlet The gauge is controlled by the AG controller and connected to it for reading the pressure The system is controlled by two power switches A One switch powers on and initializes the system and also turns the 24 V supply to the gauge even when the pumping switch is on This system then tries to start the ionization and generate the plasma A The other switch pumping starts the pumps where 0 Is off and 1 is on MAY Figure 2 1 V81 AG Front 2 1 TPS Bench and Mini IMG Instruction Manual 2 3 Gauge Operation This cold cathode inverted magnetron gauge works by creating plasma around the anode from the random release of electrons from the cathode These electrons strike the gas molecules and ionize them generating a current for the cathode This current is measured and correlated to the pressure and displayed by the controller The gauge is rated for high vacuum from 103 to 10 T range for pressure There is no direct downside of turning the gauge on at low vacuum which is from atmosphere to 10 however the life
3. This manual covers two topics a Section 2 TPS Bench Operation on page 2 1 which describes a TPS bench startup procedure to ensure long life for the Mini IMG and proper operation of the TPS bench a Section 3 Mini IMG Cleaning on page 3 1 which discusses the cleaning procedure for the Mini IMG Hazard and Safety Information This manual uses the following standard safety protocols WARNING A CAUTION U NOTE 1 The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information Vacuum Equipment and Cleanliness Cleanliness is vital when servicing any vacuum equipment CAUTION U NOTE 1 Do not use silicone oil or silicone grease Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces Do not clean any aluminum parts with Alconox Alconox is not compatible with aluminum and will cause damage Normally it is unnecessary to use vacuum grease However if it must be used avoid silicone types and use it sparingly Apiezon L grease is recommended Varian Part Number 695400004 TPS Bench and Mini IMG Instruction Manual Contacting Varian vi In North America Toll Fr
4. dedicated line vtk technical support varianinc com Taiwan Tel O 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and On line Orders www varianinc com Representatives in most countries ap AS VARIAN
5. TPS Bench and Mini IMG Instruction M anual This document is for users of Varian s Turbo Pumping Systems with Mini IMG gauges installed For systems with IM 500 gauges installed see the M 100 IM 500 Gauge Tube Rebuild Kit instructions Varian P N 699908235 Revision A October 2009 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem fe Agilent Technologies FIELD SERVICE MANUAL TPS Bench and Mini IMG Instruction Manual Mini IMG is a trademark of Varian Inc Copyright 2009 Varian Inc TPS Bench and Mini IMG Instruction Manual Contents INTOGUCUON sep ii V Hazard and Safety Information ccccccscccsseecseeceeeeceeceeseeceseecaucecseeceueesaesesaeesansecseeseueesaeeessas V Vacuum Equipment and Cleanliness ooccconccoccocncocncocnconncocnnocnnnononononnononnnnnnnnnnoncncnnnnnnonons V COLAC TING VANA id E A E EEE vi Section TPS Bench Opera rai Ad 2 1 2 FUR DO SO aida 2 1 22135 Bench Opera dad 2 1 ZAS O peral eel Ebo 2 2 2 PIONS ODO Mia a oli 2 4 SECON 3 MINEIMES Cleaning corta lo lia ei cds 3 1 5 A A aa ee oO oa oe eS eee 3 1 3 2 OVENIEW EP OO REC ORO etic accel Messina A 3 1 e A eer ae eee renee ee ene 3 1 TPS Bench and Mini IMG Instruction Manual This page intentionally left blank TPS Bench and Mini IMG Instruction Manual Introduction
6. ee 1 800 882 7426 Hours 8 00 AM to 7 00 PM Eastern U S time Fax 1 781 860 5405 vtl customer service varianinc com vtl technical support varianinc com Language English Product Return Authorizations vtl ra varianinc com In Japan Toll Free 0120 655 040 Fax 81 3 5232 1263 H ours 08 00 to 18 00 Japan Standard time vtj customer service varianinc com vtj technical support varianinc com Languages Japanese English In Taiwan Toll Free 0 800 051 342 Fax 886 2 2698 9678 H ours 08 00 to 18 00 Chinese Standard time vtw customer service varianinc com viw technical support varianinc com Languages Chinese English See the back cover of this manual for a listing of our sales and service offices Please contact Varian Customer Care for assistance In Europe and other countries Toll Free 00 800 234 234 00 Fax 39 011 997 9 350 H ours 08 00 to 18 00 Central European time vtt customer service varianinc com vit technical support varianinc com Languages French German Italian English In Korea Toll Free 080 222 2452 Fax 82 2 3452 2451 H ours 08 00 to 18 00 Korea Standard time vtk customer support varianinc com vtk technical support varianinc com Languages Korean English In China Toll free 800 820 6556 Fax 86 10 6310 0141 H ours 08 00 to 18 00 Chinese Standard time vtc technical support varianinc com Languages Chinese English TPS Bench and Mini IMG Instruction
7. must be removed and replaced 10 Re assemble in the reverse order Ensure that the marks created earlier on the magnet and the body align Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1 781 860 5437 China Varian Technologies China Ltd Room 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 6310 8550 Toll Free 800 820 6556 Fax 86 10 6310 0141 France Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Benelux Varian Vacuum Technologies Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Germany amp Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 India Varian India Pvt Ltd 205 A A wing of Galleria 2nd floor Hiranandani Gardens Powai Mumbai 400 076 India Tel 91 22 2570 8595 8597 Fax 91 22 2570 8599 Mobile 91 98 679 55969 04 08 Sales and Service Offices Italy Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Toll Free 00 800 234 234 00 Fax 39 011 997 9350 Japan Varian Technologies Japan Ltd
8. of the gauge can be increased if the gauge is turned off when the system Is not in use or by not leaving it on for long durations at low vacuum The gauge generates high voltage of 2 kV from a 24 V supply using the flyback transformer This high voltage is completely contained within the gauge body and Is of no risk as long as the gauge cover is not removed or tampered with while the gauge is still powered The current in the gauge takes some time when P is around the 10 T range to stabilize and provide consistent current for plasma generation During this time there is a high current fluctuation due to excessive collision with the gas molecules If the gauge Is left on for long durations at atmospheric pressure and the system contains highly contaminant gases then the ionization process deposits significant contamination on the gauge collector W hile contamination will occur at high vacuum but because the number of collisions are fewer this slows contamination The amount of contamination depends on the gas being pumped highly contaminating or not duration of gauge operation pressure inside the chamber condition of the collector etc Figure 2 2 shows images of the gauge found on the system which has slight contamination on the collector Slight contamination in the plasma region Contamination on both upper and lower With heavy contamination the surface is sides of the plasma chamber completely discolored and burnt Figure 2 2 C
9. ontaminated Gauge TPS Bench and Mini IMG Instruction Manual Figure 2 3 shows the contaminated collector next to a new collector not much contamination no need for replacement Figure 2 3 Contaminated Collector Figure 2 4 shows the clean collector chamber With heavy contamination this region also discolors Figure 2 4 Clean Collector Chamber TPS Bench and Mini IMG Instruction Manual 2 4 Proper Operation 2 4 To avoid the contamination that occurs when the gauge Is turned on without the pumping system the best practice Is to A Leave the pumping knob at 1 all the time and A Operate the system using the power switch only This ensures that the gauge turns off when the power is turned off and only turns on with the pumping system when the power is turned on Another option is to use both the pumping and power switch to turn on or off at the same time In this situation the gauge is only running for a few seconds while waiting for the pumping to start and avoids any contamination or risk of failure Another benefit of using the power switch Is that all system power is immediately removed when the power switch is toggled Additionally the fan also turns off If the pumping switch is only used with the power switch on the controller gauge and fan stay on all the time TPS Bench and Mini IMG Instruction Manual Section 3 Mini IMG Cleaning 3 1 Purpose This section explains the cleaning procedure for
10. the Mini IMG gauge 3 2 Overview O ver time it is normal for all Inverted Magnetron Gauges IMG to suffer from internal deposits and erosion of the internal parts How fast and to what extent this occurs depends on the chemicals the gauge Is exposed to during operation and the vacuum pressure W hen this happens the gauge often exhibits reading stability problems or may not even start up This cleaning procedure tries to remove all possible contaminants from the gauge elements 3 3 Procedure Tools Required A Clean lint free cotton nitrile gloves or finger cots A Hex key or wrench 1 16 Q 3 16 hex nut driver A Snap ring pliers for internal type 047 tip size a Scotch Brite O Acetone 1 Mark the position of the inlet flange on the magnet so that you don t change the position when re assembling Figure 3 1 This can cause a slight change of the calibration sensitivity Make marks on both ends with a permanent marker Figure 3 1 Mark the Magnet 3 1 TPS Bench and Mini IMG Instruction Manual 2 Remove the electrical connector screws as shown in Figure 3 2 Figure 3 2 Electrical Connector Screws 3 Remove the side screws from the metal cover as shown in Figure 3 3 and remove the cover to reveal the electronics inside Figure 3 3 Electrical Connector Screws 4 Remove the screw which holds the magnet to the inlet flange as shown in Figure 3 4 Ensure that the marker positions do not change Fig
11. ure 3 4 Magnet Retention Screw TPS Bench and Mini IMG Instruction Manual 5 Use the small Allen wrench to loosen the screws holding the gauge body to the electronics assembly Figure 3 5 With these screws loosened slide the gauge body out of the groove with the magnet still attached then slide the magnet out of the flange Figure 3 5 Gauge Body Retention Screws 6 Remove the snap ring inside the gauge inlet containing the pole pieces Figure 3 6 Figure 3 6 Snap Ring 3 3 TPS Bench and Mini IMG Instruction Manual 7 Slide out the two pole pieces and the spacer Figure 3 7 The inner pole piece has a single center hole and the outer pole piece has five holes Ensure that the large side of tapered hole faces inward The poles and spacer are around the long thin anode which is screwed into the gauge body cannot remove this special tool needed These pieces go on top of the anode inside the gauge body Figure 3 7 Pole Pieces and Spacer 8 Look for any contamination on the two pole pieces and also look inside the gauge body around the anode for any contamination Figure 3 8 Figure 3 8 Gauge body with Anode Indicated 9 To clean contaminated surfaces a Soak some cleaning cloth with acetone b Clean the pole pieces with acetone or alcohol You can use Scotch Brite or other similar abrasive material with Acetone to clean parts c Atrdry the parts NOTE If the anode tube is also contaminated it
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