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Vaclon Plus 25 Pumps - Agilent Technologies

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1. Abbildung 2 24 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Anleitung zur Installation 2 WARNUNG Um Personensch den zu vermeiden darf die Hochspannungsleitung der Pumpe erst angeschlossen werden wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgesehener Agilent Steuereinheiten Dual MidiVac oder MiniVac optimiert Vni Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur bei Verwendung von Agilent Steuereinheiten gew hrleistet Die Pumpe Vaclon Plus kann in einer beliebigen Position installiert werden Aus praktischen Gr nden wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut Die Pumpen k nnen auch in einer beliebigen Position an ihrem Eintrittsflansch h ngend eingebaut werden Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 25 82 2 Anleitung zur Installation Gebrauch 26 82 Samtliche Hinweise fur den korrekten Betrieb der Pumpen Vaclon Plus sind im Handbuch der Steuereinheit enthalten Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen Es wird empfohlen die Pumpe auf einen Druck von 1x10 Torr mbar zu bringen um
2. Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High valtage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS H
3. Osservare la tensione la corrente e la pressione Se l avvio avvenuto ad una pressione di 1x10 Torr mbar tipica una tensione di circa 300 400 V Un valore di corrente prossimo alla corrente di corto circuito dell unit di controllo indice dell esistenza di una perdita nella pompa e nel sistema Un temporaneo incremento della pressione di pre vuoto normale durante la fase di avvio Lasciare la valvola di pre vuoto aperta durante l avvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio Se la tensione della pompa ionica scende dopo la chiusura della valvola riaprirla per un pre pompaggio aggiuntivo Appena la pressione diminuisce la tensione cresce nuovamente e la valvola di pre vuoto deve essere chiusa Quando la tensione ha raggiunto i 2 3KV mettere l unit di controllo nello stato PROTECT Il sistema sar cos autoprotetto dall incremento della pressione oltre 1x10 Torr mbar quando la pompa non controllata Nel caso in cui ci fosse un tale incremento l unit di controllo viene spenta automaticamente La pressione nella pompa pu anche essere calcolata leggendo la corrente e convertendo la lettura in pressione tramite l apposito diagramma pressione corrente illustrato nell appendice Technical Information di questo manuale Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 15 82 Procedura per l installazione gradini nel diagramma sono una cara
4. Outline Drawing 59 Stray Magnetic Field 60 Vaclon Plus Pump Installation 64 Typical Installation 66 Inlet Flange Connection 68 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Contents Control Unit Connection 70 Bakeout Operation 71 Pump Speed 72 Maintenance 72 Pump Troubleshooting 74 Vaclon Plus Pump Replacement Parts and Accessories 75 Vaclon Plus Pump Controller 75 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 5 82 Contents 6 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Vaclon Plus 25 Pumps User Manual Procedura per l installazione Informazioni generali 8 Preparazione per l installazione 10 Installazione 12 Uso 14 Procedure di uso 15 Manutenzione 17 Smaltimento 18 Traduzione delle istruzioni originali Es e Agilent Technologies 7 82 1 Procedura per l installazione Informazioni generali 8 82 Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe della serie Vaclon Plus sono pompe ioniche utilizzate comunemente per appli
5. is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 54 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Vaclon Plus 25 Pumps User Manual ee 5 Technical Information Description of the Vaclon Pump 56 Technical Specification 57 Outline Drawing 59 Stray Magnetic Field 60 Vaclon Plus Pump Installation 64 Inspection Procedure 64 Visual Inspection 64 Vacuum Evaluation 65 Short Circuits 66 Typical Installation 66 Inlet Flange Connection 68 Control Unit Connection 70 Bakeout Operation 71 Pump Speed 72 Maintenance 72 Leakage Current Check 72 Hi Potting 73 Pump Troubleshooting 74 Vaclon Plus Pump Replacement Parts and Accessories 75 Vaclon Plus Pump Controller 75 Original Instructions Agilent Technologies 55 22 5 Technical Information Description of the Vaclon Pump The Agilent Vaclon Plus 25 pumps are ion pumps and are available in two types Triode Diode They operate in the pressure
6. mbar lt 1x102 lt 1x103 RS Maximum baking temperature C OO Temperature limits C Pump 400 Magnet ferrite 350 Flange 500 Material Body AISI 304 SST Anode AISI 304 SST Magnet Ferrite Weight lbs kg Net 21 9 5 Shipping 27 12 SERRARA A AASA AASA A ASAS AAA ASAA ASAA ASAS AA A A A A AS SAAS AA A A AAS ARE ARER A AL URGE RANE ARA RANA LLL Ln1 0 0005250259525025252522595255 5252552525255 525250 525250 0 5 60 ve eve veuve ves eu nu dee urs e cu nue ue edu mu ee eue 0 eu esse 52525505 LES Tested according to ISO DIS 3536 1 The following figures show the pumping speed vs pressure diagrams for saturated and unsaturated pumps and the pressure vs current diagrams for the same pump The diagrams are for pumps con trolled by means of a Dual controller Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 57 82 5 Technical Information The steps on the diagrams are characteristic of the Dual step operation steps occur whenever the cur rent reaches a value at which the Dual controller high voltage output changes to optimize pump speed The pumping speed of a newly regenerated 1 e baked sputter ion pump decreases during opera tion until it reaches a stabilized level known as saturation nominal pumping speed To saturate the Vaclon Plus 25 pump it normally requires an amount of gas equal to mbar liters Consequent ly pumps can operate for exte
7. 24 hours after 30 minutes air exposure will only reach 1 x 107 mbar in 24 hours after 20 hours air exposure Vapours and gases admitted to a system are absorbed on the walls of the system and pump Subsequent reduction in pressure depends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and are very difficult to remove even by baking lon pump leakage current causing higher pressure reading System not fully baked Water vapor limits base pressure System not appropriately cleaned for UHV Excessive outgassing from walls limits base pressure Correction procedure Reduce pressure to 10 mbar recommended 10 3 mbar minimum Leak check the vacuum system with a helium leak detector With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see para BAKEOUT OPERATION Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see para BAKEOUT OPERATION Clean all components for UHV and bake the system again Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Vaclon Plus Pump Replacement Parts and Accessories Tab 3 PART NUM
8. Druck Stromstarke Diagramms im Anhang Technical Information des vorliegenden Handbuches in einen Druckwert umgerechnet wird Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 27 82 2 Anleitung zur Installation VORSICHT 28 82 Die Stufen im Diagramm sind eine Charakteristik der Arbeits weise der Pumpe Dual Wenn der von der Pumpe Dual aufgenommene Strom bestimmte Werte erreicht andert die Steuereinheit den Ausgangswert der Hochspannung 7 Wenn die Pumpe auf den atmosph rischen Druck gebracht wird ist trockener Stickstoff zu verwenden um die Aufnahme von Wasserdampf durch die Pumpenwande zu verhindern Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge zu befolgen Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen Darf die Pumpe w hrend der Aufheizung und Abk hlung nicht ber hrt werden Die hohe Temperatur kann zu Personenschaden f hren Keine elektronischen Ger te in die Nahe der Pumpe bringen Das darum befindliche Magnetfeld kann zu Funktionsst rungen der Ger te f hren Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Anleitung zur Installation 2 Wartung Die Pumpen der Serie Vaclon Plus erfordern keine Wartung Samtliche Eingriffe durfen nur von autorisiertem Personal vorgenommen werden WARNUNG Vor Eingriffen an der Pumpe ist diese von der Hochspan nungsquelle zu t
9. Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 O Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 063 01 F P Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacu
10. RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 FIR Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a
11. User Manual 87 900 063 01 F 33 82 3 Proc dure pour l installation Pr paration pour l installation ATTENTION 34 82 La pompe est fournie dans un emballage de protection sp cial si l on constate des signes d endommagement imputables au transport contacter aussitot le revendeur local Pendant l op ration de d ballage veiller tout particuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement En vue d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La pompe ne peut tre endommag e si elle reste simplement expos e l atmosph re Il est quoi qu il en soit conseill de ne pas la retirer de son emballage avant le moment de l installa tion afin d viter toute pollution due la poussi re Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Proc dure pour l installation 3 Pr paration pour l installation Figure 1 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 35 82 3 Proc dure pour l installation Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige
12. billable service 3A LI Non Billable Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair lupgrade Consignment Demo _ calibration _ Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature
13. determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please f
14. effet du vieillissement de la pompe l allongement du temps de d marrage Pendant l exposition l air le d pot du compos de titane absorbe de la vapeur d eau et cette action a pour cons quence qu au d marrage suivant le chauffage de la pompe entrainera la dispersion de la vapeur et d une partie de l hydrog ne pomp e pr c demment ce qui aura pour effet d allonger le temps de d marrage 38 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Proc dure pour l installation 3 Procedure d utilisation Controler que la polarit de l unit de controle soit correcte pour la pompe Se reporter au manuel correspondant et observer la proc dure suivante pour l utilisation de la pompe 1 A l aide d une pompe de pr vide porter le syst me une pression de 1x10 Torrs mbars ou inf rieure Brancher l unit de controle une source d alimentation appropri e et l allumer Contr ler la tension le courant et la pression Lorsque la mise en route est effectu e une pression de 1x10 Torrs mbars la tension est g n ralement d environ 300 400 V Une valeur de courant proche du courant de court circuit de l unit de contr le r vele l existence d une fuite dans la pompe et dans le syst me Au cours de la phase de d marrage un accroissement momentan de la pression de pr vide est normal Laisser la soupape de pr vide ouverte pendant le d marrage de la pompe ionique tant qu une pression de d marrage a
15. einen rascheren Anlauf zu gewahrleisten Zu diesem Zweck empfiehlt es sich keine lversiegelte mechanische Pumpe zu verwenden Falls hingegen eine derartige Pumpe benutzt werden mufs soll an der Vakuumleitung eine Falle eingesetzt werden um den durch die Wasser und ldimpfe aus der mechanischen Pumpe erzeugten Druck zu verringern Es ist zu versuchen die Zeit auf ein Mindestmafs zu reduzieren wahrend der die mechanische Pumpe zum System und zur Ionenpumpe ge ffnet ist da sich ihre D mpfe bei Dr cken unter 1x10 Torr mbar im System verbreiten und dessen Verunreinigung verursachen Bei Systemen die vollkommen lfrei sein m ssen erweisen sich f r den obengenannten Vorgang Turbopumpen als geeigneter Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung k nnen die Anlaufzeit verlangern und eine k rzere Standzeit der Pumpe verursachen Die Ablagerungen der Titanverbindungen absorbieren Wasserdampf wenn sie der Luft ausgesetzt werden Dadurch bewirkt beim anschlie enden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs so dafs sich die Anlaufzeit verl ngert Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Anleitung zur Installation 2 Bedienungsschritte Es ist zu kontrollieren daf die Steuereinheit in bezug auf die Pumpe richtig gepolt ist Es ist nach dem diesbez glichen Handbuch vorzugehen f r den Gebrauch der Pumpe
16. range from 10 to be low 10 mbar The Vaclon Plus Triode pumps allow fast starts from as high as 1x10 mbar because ions are prevented from bombarding the system and pump walls during glow discharge in the starting pres sure range and have higher speed for inert gases The Vaclon Plus Diode pumps require a lower starting pressure i e 10 mbar The Diode contains more titanium than triode pumps and thus has a higher hydrogen capacity and longer life A positive polarity high voltage supply is required to operate Diode pumps A negative polarity high voltage supply is required to operate Triode pumps The anode is grounded and the cathode is held at negative potential The pump can operate in any position and can be supported on the mounting flange The inlet Con Flat flange is a 2 3 4 NW 35 CF The following figure shows the Vaclon Plus 25 pump EI Figure 3 Vaclon Plus 25 pump 56 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Technical Specification The following table details the main technical specifications of the Vaclon Plus 25 pumps Tab 1 Model Specification Triode Diode Nominal pumping speed for 20 24 Operating life at 1x10 6 mbar hours 35 000 50 000 Operating voltage max 5000 Vdc 5000 Vdc 10 10 m Maximum starting pressure
17. 00 063 01 F Procedura per l installazione 1 WAYS 414172 Per evitare lesioni alla persona non collegare l alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse Il funzionamento delle pompe ottimizzato solo con l uso delle apposite unit di controllo Agilent Dual MidiVac o MiniVac Vidal Il rispetto delle normative di sicurezza nell uso delle pompe garantito solo con l uso delle unit di controllo Agilent La pompa Vaclon Plus puo essere installata in qualsiasi posizione Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto o in posizione orizzontale Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso Per informazioni dettagliate sull installazione della pompa vedere l appendice Technical Information Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 13 82 1 Procedura per l installazione Uso Tutte le istruzioni per il corretto funzionamento delle pompe Vaclon Plus sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Si raccomanda di portare la pompa ad una pressione di 1x10 Torr mbar in modo da ottenere un avvio pi rapido A questo scopo meglio non utilizzare una pompa meccanica sigillata con olio ma se deve essere utilizzata una tale pompa si raccomanda di inser
18. BER TRIODE DIODE NENNEN o Garterspring DOGMA Copper gasket for 2 3 4 flange Nut and bolt set for 2 3 4 flange 1 4 28 x 1 1 4 25 pack FB 0275 C12 For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue Vaclon Plus Pump Controller The following controller series are available to supply the Vaclon Plus pumps MiniVac Dual AUHV Please refer to the Agilent Vacuum Catalogue to choose the correct controller for each pump Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 75 82 b Technical Information Vaclon Plus Pump Controller 16 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F d Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will
19. Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened When ready to install the pump release the internal vacuum by using pliers to open the copper tube pinch off The pinch off seal is extremely sharp Be careful when opening Watch your fingers Unscrew the main flange bolts and lift the blank flange with the help of a bolt screwed into the available threaded hole Remove the ConFlat flange and the copper gasket plate Some par ticles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump Connect the pump to the vacuum chamber with a short length and large diameter tubulation in order to retain as much as possible the pumping speed of the pump Proceed as follows Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 1 Inspect the mating flanges for cleanliness and absence of scratches on the knife edge 2 Place a new copper gasket between pump flange and vacuum chamber flange 3 Bolt mating flanges of the pump to the chamber with the screws provided with the ion pump For flanges over NW 35 2 75 o d also mount washers below the nuts and screw heads 4 Use silver plated screws or apply high tempera ture lubricant to the screw threads Lubrication simplifies sealing and disassembly A recom mended lu
20. E presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 18 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Vaclon Plus 25 Pumps User Manual Anleitung zur Installation Allgemeine Hinweise 20 Vor der Installation 22 Installation 24 Gebrauch 26 Bedienungsschritte 27 Wartung 29 Entsorgung 30 bersetzung der Originalanleitungen AP Agilent Technologies 19 82 2 Anleitung zur Installation Allgemeine Hinweise 20 82 Dieses Gerat ist fur den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung Die P
21. F Installation procedure 4 This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 45 82 4 Installation procedure Preparation for Installation 46 82 The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Installation procedure 4 Preparation for Insta
22. Lock the connector to the feedthrough brackets with the screws mounted on the high voltage connector 4 Push the male end of the cable connector into the socket on the control unit rear panel Refer to the control unit instruction manual Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 30 seconds after removing the main power from the control unit to allow capacitors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Bakeout Operation When a Vaclon pump does not reach the desired base pressure and there are no leaks it is neces sary to bake the system to remove water vapour This is done by heating the pump and all the com ponents in the system 1 Heat the pump body with a bakeout oven or heating strips to temperatures between 150 C and 220 C 220 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapour without damaging the magnet and high voltage connector Note that the system components must be compatible with the ba
23. Vaclon Plus 25 Pumps Triode 911 5030 Diode 911 5036 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 063 01 F 05 2011 E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 063 01 F Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty t
24. ation about the pump installation see the appendix Technical Information Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 49 82 4 Installation procedure Use 50 82 All the instructions for the correct use of the Vaclon Plus pumps are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 Torr mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that this pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 Torr mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Installation procedure 4 Operating Procedure Check that the controller HV polarity is correct for the pump Refer to the relevant pump control
25. bricant is Fel Pro C 100 Lubrication is essential to prevent galling of the nut and screw after bakeout 5 Attach the nuts and tighten each one to 6 11 Nm 4 5 8 ft Ibs of torque After tightening a nut always tighten the opposite nut with respect to the center of the flange This will partially close the gap between the flange faces 6 Repeat the sequential tightening for two more cycles 7 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 69 82 5 Technical Information Control Unit Connection 70 82 WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before remov ing it be sure the main power is removed from the control unit To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off Connect the control unit to the ion pump with the coaxial high voltage cable assembly as follows 1 Be sure the garter spring is properly mounted on the pump high voltage feedthrough since the ground connection is made through the garter spring 2 Push the female end of the cable connector over the high voltage feedthrough 3
26. cazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Procedura per l installazione 1 Questo manuale utilizza le seguenti convenzioni ANAS 41202 messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Ian messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 9 82 1 Procedura per l installazione Preparazione per l installazione ATTENZIONE 10 82 La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo ne
27. des poussi res des gaz de combat ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 C et 85 C Puit La pompe doit tre conserv e scell e avec son tuyan d entr e aplati jusqu ce qu elle soit pr te tre branch e au syst me Figure 2 36 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Proc dure pour l installation 3 WIDER AUIANEN Pour viter toute l sion aux personnes ne pas brancher la haute tension la pompe avant que celle ci soit install e dans le syst me et avant que toutes les brides d entr es soient correctement assembl es ou ferm es Le fonctionnement de la pompe n est optimis que si celle ci est utilis e avec l une des unit s de controle Agilent sp cifiques Dual MidiVac ou MiniVac ATTENTION Lors de l utilisation des pompes le respect des normes de s curit est imp rativement subordonn l emploi des unit s de contr le Agilent La pompe Vaclon Plus peut tre install e dans toutes les positions Par facilit elle est g n ralement mont e en position verticale avec bride d entr e en partie haute ou en position horizontale Les pompes peuvent galement tre sus
28. e appendix Technical Information of this manual Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 51 82 4 Installation procedure 52 82 The steps on the charts are characteristic of the Dual step voltage operation When the current drawn by the Vaclon pump reaches the determinated values the controller changes the high voltage output 7 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in the presence of explosive gases Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage Do not put any electronic device near the pump since the magnetic field may cause a device malfunctioning Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Installation procedure 4 Maintenance The Vaclon Plus series pump does not require any mainte nance Any work performed on the pump must be carried out by authorized personnel Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 53 82 4 Installation procedure Disposal Meaning of the WEEE logo found in labels The following symbol
29. e pas utiliser la pompe en pr sence de gaz explosifs WIS EESTI Eviter de toucher la pompe pendant les op rations de chauffage et de refroidissement La temp rature lev e peut provoquer des br lures ald ATTENTION Ne pas approcher de dispositifs lectroniques de la pompe Le champ magn tique environnant cette derni re peut entrainer des dysfonctionnements desdits dispositifs 40 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Proc dure pour l installation 3 Maintenance Les pompes de la s rie Vaclon Plus ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr RUNN Avant toute intervention sur la pompe la d brancher de la haute tension En cas de mise au rebut d une pompe proc der son limination dans le respect des normes nationales en vigueur Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 41 82 3 Proc dure pour l installation Mise au rebut 42 82 Signification du logo WEEE imprim sur les tiquettes Le symbole indiqu ci dessous a t appliqu conform ment la directive CE d nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de ve
30. eater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum ver temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be in
31. erms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly perfor
32. ge leak exists argon is 1 of atmospheric air Cyclical pumping occurs above 10 mbar on argon These pressure variations typically cease when the leak rate of argon is reduced or eliminated Maintenance 72 82 Vaclon Plus pumps are maintenance free In case of life time expiry or accidental premature failure of the pump please contact your nearest Agilent sales service office for repair Leakage Current Check The current value displayed on the controller is the total of the operating current and leakage current from controller cables feedthrough and pump insulators If the pump current reading is to be used as pressure measurement check the pump leakage currents as follows 1 Turn off the pump control unit 2 Remove the pump magnet 3 Turn on the pump control unit and wait for current stabilization The current reading should not be higher than 1 uA Make sure that the control unit and the high voltage cable leakage current is negligible Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 4 If leakage current comes from the pump perform high potting per the procedure below then recheck the pump and install the magnet 5 Ifitis not possible to high pot the pump the pressure reading is biased by the leakage current value Hi Potting A constant pump current when no vacuum leak ex ists is often caused by field emission currents at the pump cathodes which prevent the use of the pum
33. ire una trappola lungo la linea di vuoto per ridurre la pressione causata dai vapori di acqua e di olio provenienti dalla pompa meccanica Cercare di ridurre al minimo il tempo in cui la pompa meccanica aperta verso il sistema e verso la pompa ionica poich i suoi vapori si diffondono nel sistema a pressioni inferiori a 1x10 Torr mbar causando una contaminazione dello stesso Nei sistemi in cui l olio deve essere completamente assente meglio utilizzare pompe Turbo per la suddetta operazione Depositi igroscopici e l assorbimento dell idrogeno all interno del composto di titanio possono provocare l allungamento del tempo di avvio con l invecchiamento della pompa Durante l esposizione all aria il deposito del composto di titanio assorbe vapore acqueo in conseguenza di ci al successivo avvio il riscaldamento della pompa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio 14 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Procedura per l installazione 1 Procedure di uso Controllare che la polarita dell unita di controllo sia corretta per la pompa Fare riferimento al relativo manuale ed osservare la seguente procedura per l uso della pompa 1 Tramite una pompa di pre vuoto portare il sistema ad una pressione di 1x10 Torr mbar od inferiore Collegare l unit di controllo ad una apposita fonte di alimentazione ed accenderla
34. k checked at below 1x10 mbar prior shipping The following information and procedures can be used to establish the vacuum integrity of a Vaclon Plus pump before installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Examine in particular the brazed joints on the high voltage feedthrough Inspect the pinch off seal If it is open the pump is at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful 64 82 A Vaclon Plus pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has otherwise not been damaged The pump is not harmed by such exposure although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Vacuum Evaluation To determine the vacuum level of the new pump before air releasing it 1 Connect the pump to the control unit as directed in the instruction manual of the control unit The high voltage which is present in the ion pump when it is powered from the power unit can cause severe injury or death Be sure the garter spring is mounted on the high voltage feed through because the ground connection is brought from the control unit to the pump body through the garter spring An additional safety gr
35. keout temperature The heating must be approximately even on all vacuum surfaces or water vapour can recondence on the cooler surfaces preventing achievement of UHV vacuum pressures 2 Leave the pump control unit on and monitor the pressure It must never increase above 5x10 mbar if this value is exceeded turn the bake out off and then on again when low pressure is restored To control the heaters and to monitor to high pressure limit during bakeaout in automatic mode a pressure sensitive relay may be used 3 Bake the Vaclon Plus pump for at least eight hours Longer bakeout periods are recom mended when the pump has been used with heavy gas load applications or when UHV pres sure 10 mbar range or less is desired 4 Asthe pump and system cool down to room temperature a drop in pressure should be observed Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 71 82 5 Technical Information Pump Speed Pumping speed varies with pressure and with dif ferent gases Virtually all gases and vapours can be pumped without stopping the pumping action in Vaclon pumps The sputtering action of the pump re moves contaminants and continues to provide fresh titanium for pumping An inert gas load in a vacuum system is typically only volume gas inert gas absorption to surfaces of the system is negligible Thus the need for long term inert gas pumping only occurs when argon or air is introduced continuously into the system or if a lar
36. l Information 5 Figure 6 Stray magnetic field from flange sheet 1 of 3 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 61 82 5 Technical Information Figure 7 Stray magnetic field from flange sheet 2 of 3 62 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Figure 8 Stray magnetic field from flange sheet 3 of 3 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 63 82 5 Technical Information Vaclon Plus Pump Installation Inspection Procedure Vaclon Plus pumps are evacuated baked out sealed and lea
37. ll ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata La pompa non pu essere danneggiata rimanendo semplice mente esposta all atmosfera Si consiglia comunque di mante nerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Procedura per l installazione 1 Preparazione per l installazione Figura 1 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 11 82 1 Procedura per l installazione Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per ottenere le specifiche tecniche dichiarate la temperatura ambiente deve essere compresa tra 0 C e 85 C vg 4 v4 0 3j La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato finch non pronta per essere collegata al sistema Figura 2 12 82 Vaclon Plus 25 Pumps User Manual 87 9
38. llation Figure 1 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 47 82 4 Installation procedure Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C CAUTION The pump should be kept sealed with its pinch off tube until it is ready for attachment to the vacuum system Figure 2 48 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Installation procedure 4 WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using one of the special Agilent controllers Dual MidiVac or MiniVac only CAUTION The safety specifications agreement using the pump Is guaranteed using the Agilent controller only The Vaclon Plus pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up or placed horizontally Pumps can be supported by the mounting flange in any position For detailed inform
39. med or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Contents Contents 1 Procedura per l installazione 7 Informazioni generali 8 Preparazione per l installazione 10 Installazione 12 Uso 14 Procedure diuso 15 Manutenzione 17 Smaltimento 18 2 Anleitung zur Installation 19 Allgemeine Hinweise 20 Vor der Installation 22 Installation 24 Gebrauch 26 Bedienungsschritte 27 Wartung 29 Entsorgung 30 3 Proc dure pour l installation 31 Indications Generales 32 Pr paration pour l installation 34 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 3 82 Contents 4 82 5 Installation 36 Utilisation 38 Proc dure d utilisation 39 Maintenance 41 Mise au rebut 42 Installation procedure 43 General Information 44 Preparation for Installation 46 Installation 48 Use 50 Operating Procedure 51 Maintenance 53 Disposal 54 Technical Information 55 Vaclon Plus Pump Controller 55 Description of the Vaclon Pump 56 Technical Specification 57
40. nded periods of time at low pressures in the non saturated state if they are properly conditioned 58 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Outline Drawing The following figure shows the outline drawing for the Vaclon Plus pump NFLAT FLANGE 3 Ol 19 ENSIONS INCHES mm Figure 4 Vaclon Plus pump outline drawing Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 59 82 5 Technical Information Stray Magnetic Field The following magnetic data for the Vaclon Plus 25 pump is presented 1 Polar plots of field strengths in the plane of the top flange for radii of 5 and 10 inches from the center of the pump 2 Curves of field strength along the center line of the pump and in the plane of the flange as a function of distance from the pump as shown on the individual plots Figure 5 Polar magnetic field 60 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technica
41. nstructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant d utiliser l appareil Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d op rations non autoris es d utilisation impropre par du personnel non form ou contraires aux r glementations nationales sp cifiques Gr ce leur propret leur capacit de pomper tous les types de gaz leur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie Vaclon Plus sont des pompes ioniques g n ralement utilis es pour des applications de vide ultra pouss Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information 32 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Proc dure pour l installation 3 Cette notice utilise les signes conventionnels suivants MISES Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manceuvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage Les notes contiennent des renseignements importants extrapol s du texte Vaclon Plus 25 Pumps
42. nte l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Vaclon Plus 25 Pumps User Manual Installation procedure General Information 44 Preparation for Installation 46 Installation 48 Use 50 Operating Procedure 51 Maintenance 53 Disposal 54 Original Instructions UE Agilent Technologies 43 82 4 Installation procedure General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Vaclon Plus series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information 44 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01
43. ollow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a
44. ound connection for the pump body is made through the fixing screws of the H V cable connector 2 With the main power switch in the OFF position plug the control unit into a suitable power source Turn the power to ON Observe the reading for an indication of one of the following conditions a If the pump is free of leaks and is at a low pressure the pressure indication shall quickly fall to or below the 10 8 mbar range as the volume of gas is pumped b Ifthe pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate If this occurs turn the power OFF immediately 5 Ifthe vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 65 82 5 Technical Information Short Circuits If there is a short circuit between the anode and cathodes in the pump the short circuit current of the control unit will be drawn and zero voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector zero voltage will also be observed when the high voltage connector is disconnected from the pump refer to the control unit manuals Typical Installation A typical installation is shown in the following figure and consists of l 2 66 82 Vaclon Plus p
45. p current as a pressure indicator To reduce this field emission current hi potting should be performed High potting is the term used to de scribe the application of higher than normal operating voltage 10 12 KV 20 50 mA for the purpose of burning off whiskers sharp edges on the pump cathode The output of an appropriately sized AC transformer i e neon sign type may be applied to the pump for a period of about 30 seconds This should effectively remove any wiskers or sharp edges on the pump cathode WARNING Voltages developed in the High Potter power supply are potentially lethal Use caution during opera tion and ensure correct grounding connection Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 73 82 5 Technical Information Pump Iroubleshooting Tab 2 Symptom Slow starting Slow starting more than 30 minutes Slow pump down due to long exposure of viton parts to air Slow pump down due to absorption of vapours on pump and system walls Slow starting or slow pump down Current higher than expected at any given pressure System fails to achieve desired UHV vacuum pressure System fails to achieve desired UHV vacuum pressure Possible cause Starting vacuum pressure too high Air leaks which limit pressure to above 10 6 mbar and cause longer starting time Viton releases considerable gas after long exposure to air A bell jar system which reached 2 x 108 mbar in
46. pendues dans toutes les positions l aide de leur bride d entr e Pour plus de d tails sur l installation de la pompe consulter l appendice Technical Information Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 37 82 3 Proc dure pour l installation Utilisation Toutes les instructions pour le fonctionnement correct de la pompe Vaclon Plus sont fournies dans la notice de l unit de controle Il est conseill de lire attentivement cette notice avant d utiliser la pompe Il est recommand de porter la pompe une pression de 1x10 Torrs mbars de facon obtenir un d marrage plus rapide Pour ce faire il est pr f rable de ne pas utiliser une pompe m canique scell e l huile mais au cas ou il serait n cessaire d utiliser une telle pompe il est recommand d introduire un dispositif de retenue le long de la ligne de vide afin de r duire la pression due aux vapeurs d eau et d huile engendr es par la pompe m canique Essayer de r duire au minimum le temps o la pompe m canique est ouverte vers le systeme et vers la pompe ionique car ses vapeurs se r pandent dans le syst me des pressions inf rieures 1x10 Torrs mbars causant une contamination de celui ci Dans les syst mes ou l huile doit tre compl tement absente il est pr f rable d effectuer ladite op ration l aide d une pompe Turbo Des d p ts hygroscopiques et l absorption d hydrog ne dans le compos de titane peuvent provoquer par
47. ppropri e n a pas t atteinte Si la tension de la pompe ionique descend apr s la fermeture de la soupape la rouvrir pour un pr pompage suppl mentaire D s que la pression diminue la tension remonte et la soupape de pr vide doit tre referm e Lorsque la tension a atteint 2 9 kV mettre l unit de contr le en tat de PROTECT Le syst me sera ainsi prot g contre toute augmentation de pression au del de 1x10 Torrs mbars lorsque la pompe n est pas contr l e Si une telle augmentation devait tre enregistr e l unit de controle s teindrait automatiquement La pression de la pompe peut galement tre calcul e en relevant le courant et en convertissant la lecture en pression l aide du diagramme pression courant illustr dans l appendice Technical Information de ce manuel Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 39 82 3 Proc dure pour l installation Les paliers du diagramme sont caract ristiques du mode de fonctionnement du Dual Lorsque le courant absorb par la pompe atteint des valeurs d termin es l unit de contr le change la valeur de la haute tension en sortie 1 Lorsque l on porte la pompe la pression atmosph rique utiliser de l azote sec de facon viter que les parois de la pompe n absorbent de la vapeur aqueuse MISES Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures appropri es chaque gaz N
48. rennen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschlagigen nationalen Vorschriften zu entsorgen Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 29 82 2 Anleitung zur Installation Entsorgung 30 82 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Schrott von elektrischen und elektronischen Ger ten angebracht Das nur in EU L ndern g ltige Symbol zeigt an dass das betreffende Produkt NICHT zusammen mit normalem Haushalts und Industriem ll entsorgt werden darf sondern einem differenzierten Entsorgungssystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts die Muttergesellschaft oder den Wieder verkaufer kontaktieren um die Abholung und Entsorgung nach Pr fen der Vertrags und Verkaufsbedingungen einzuleiten Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Vaclon Plus 25 Pumps User Manual 3 Procedure pour l installation Indications Generales 32 Pr paration pour l installation 34 Installation 36 Utilisation 38 Proc dure d utilisation 39 Maintenance 41 Mise au rebut 42 Traduction de la mode d emploi originale GE Agilent Technologies 31 82 3 Proc dure pour l installation Indications Generales Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d i
49. setzt wird Das Verpackungsmaterial ist ordnungsgemafs zu entsorgen Es ist vollstandig recyclebar und entspricht der EG Richtlinie 85 399 fur den Umweltschutz Um Entgasungsprobleme zu vermeiden d rfen die Komponenten die mit dem Vakuum in Kontakt kommen nicht mit blof5en Handen ber hrt werden Stets Handschuhe oder einen anderen geeigneten Schutz tragen Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Anleitung zur Installation 2 Vor der Installation Abbildung 1 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 23 82 2 Anleitung zur Installation Installation Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht Wahrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und 85 C betragen um die angegebenen technischen Merkmale zu gew hrleisten Ihi Die Pumpe soll versiegelt und mit flachgedr cktem Eintrittsschlauch gehalten werden bis sie f r den Anschlu an das System bereit ist FALSCH
50. sind die folgenden Bedienungsschritte zu beachten 1 Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10 Torr mbar oder einen niedrigeren Druck bringen Die Steuereinheit an eine entsprechende Versorgungsquelle anschliefsen und einschalten Die Spannung die Stromstarke und den Druck beobachten Wenn der Anlauf bei einem Druck von 1x10 Torr mbar erfolgt ist ist eine Spannung von ca 300 400 V typisch Ein Stromwert der sich dem Kurzschlufsstromwert der Steuereinheit annahert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist wahrend der Anlaufphase nor mal Wahrend des Anlaufes der Ionenpumpe soll das Vorvakuumventil ge ffnet bleiben bis ein angemessener Anlaufdruck erreicht ist Wenn die Spannung der Ionenpumpe nach Schlie ung des Ventils abfallt ist das Ventil f r eine zusatzliche Vorvakuumpumpung zu ffnen Sobald der Druck sinkt steigt die Spannung erneut an und ist das Vorvakuumventil zu schliefsen Wenn die Spannung 2 3 kV erreicht hat ist die Steuereinheit auf den Status PROTECT zu schalten Das System verf gt auf diese Weise ber einen Selbstschutz vor einem Druckanstieg ber 1x10 Torr mbar wenn die Pumpe nicht kontrolliert ist Falls ein solcher Anstieg stattfindet wird die Steuereinheit automatisch ausgeschaltet Der Pumpendruck kann auch berechnet werden indem die Stromstarke abgelesen wird und der abgelesene Wert mittels des
51. tteristica del modo di funzionamento del Dual Quando la corrente assorbita dalla pompa raggiunge determinati valori l unit di controllo cambia il valore dell alta tensione in uscita 7 Quando si porta la pompa alla pressione atmosferica usare azoto secco in modo da evitare l assorbimento di vapore acqueo da parte delle pareti della pompa A4 414172 Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi MUYA Non toccare la pompa durante le operazioni di riscaldamento e di raffreddamento L elevata temperatura pu causare lesioni alle persone PR nids Non avvicinare dispositivi elettronici alla pompa Il campo magnetico attorno ad essa pu provocare dei malfunzionamenti dei dispositivi stessi 16 82 Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Procedura per l installazione 1 Manutenzione Le pompe della serie Vaclon Plus non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AA Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall alta tensione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 17 82 1 Procedura per l installazione Smaltimento Significato del logo WEE
52. um Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
53. ump A Valve to seal off the pump from the rest of the system if required The control unit A clean roughing pump i e oil free turbo A thermocouple gauge capable of indicating pressure from atmosphere to 10 mbar range A valve to seal off the roughing pump from the vacuum chamber Roughing lines are usually made of stainless steel or copper tubing or other low vapor pressure material High voltage cable Backing pump Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Technical Information 5 Figure 9 Typical installation Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 67 82 5 Technical Information Inlet Flange Connection 68 82 The Vaclon pump can be installed with any orienta tion but should be mounted to fulfill two require ments First a minimum of clearance is necessary for the removal of the high voltage connector Second the effect of the pump s fringing magnetic field should be considered see para STRAY MAGNETIC FIELD To avoid accumulation of dust and other particles or foreign material the pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system
54. umpen der Serie Vaclon Plus sind Ionenpumpen die aufgrund ihrer Reinheit ihrer Fahigkeit alle Arten von Gas zu pumpen und ihres vibrations und wartungsfreien Betriebes allgemein f r Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten Vaclon Plus 25 Pumps User Manual 87 900 063 01 F Anleitung zur Installation 2 In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermafsen hervorgehoben Die Warnhinweise richten die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Personenschaden zur Folge haben k nnte VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Vaclon Plus 25 Pumps User Manual 87 900 063 01 F 21 82 2 Anleitung zur Installation Vor der Installation VORSICHT 22 82 Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Beim Auspacken vorsichtig vorgehen damit die Pumpe nicht fallt oder St en oder Vibrationen ausge
55. unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a roughing pressure of 1x10 Torr mbar or lower in the vacuum system Plug the control unit into a suitable power source and switch the power ON Observe the voltage current and roughing pressure If started at 1x10 Torr mbar a controller voltage of approximately 300 to 400 volts is typical A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump and system A temporary rise in roughing pressure will usually be noticed during any starting procedure Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve should be closed When the voltage has increased to 2 3 kV place the control unit in the PROTECT condition The system is now automatically protected against pressure increases to 10 Torr mbar when the pump is left unattended If such an increase should occur the control unit will be turned off automatically The pressure in the pump can also be determined by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in th
56. voiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e l frequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service

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