1. AR20 02G 1 B gt AF20 02 A KQZT08 00A HRG HRS e 0 1MPa HRZ e SMC HRZD HRW Fe HEC HEB 0 1MPa HED AF IDH 2. Bmm 8mm T A i AR20 02G 1 B Nd 0 Nw Wh AF20 02 A 3. ENOKGamzuG0 20 slEUKS encUV fe 50 100 150 200 L min ANR a a NR 0 1MPa 1443 EA700 300 100 4. 30 38 I 18 5 50Hz K 36 34 8 30 18 5 11 5 32 50Hz 30 5 100L min ANR 8 0 50 100 150 200 L min ANR 0 50 100 150 200 L min ANR 1442 HEA 700 p n 5. C DC24V 1A C DC24V 1A 0 40C 35 85 RH 4kg 5kg RS 485 828 1 ER RR RS 1 1 1 A 4 BE 7 ES A CR 0 2m 0 2m 40 6. HEA100 1 04 gm 15 0 0 50 0 0 2C 0 1C 23 100L min ANR 50Hz 100 100L min ANR 22W 74W 20 200L min ANR 0 1MPa 11 100V 0 15MPa Bmm 5m ped ie Pt10003 10m 2 y8 06 6m AC100 10 V 3A 50 60Hz 10 10m 10A DC24V 10mA A T 7. 215 4XM4 20 DC 138 124 1444 Rc1 4 Rc1 4 DC 2000mm 326 0 10 306 10 ot 9 10 10 29 70 M4 4 8. HEA 100 series 0 c Wi By 33 6 ec rna HIND Illl 1 Ke lt II Hl Air Thermo _ 0 50C 0 1C EN 2 2 Ee ODE Horma1 2 ES oe 3 rep i 1 IC HRZ_ DD RW hee HEB HED EA DH 1441 JEA700 IIITNININIY TIN EE i