MEMS Mass Flow Meters User Manual (VA.3)
Contents
1. Figure 6 6 Password menu The password consists of six numeric digits The blinking digit can be assigned a numeric value which can be selected from 0 9 through the up down buttons N After selecting a desirable value press E to conform the selection and the proceed to the next digit After the password is correctly set the meter enters the function setup menu Otherwise the meter returns back to the user mode NOTE The default password is 111111 3 Function setup menu Figure 6 7 A Caution If you want change any settings please refer to the manual otherwise the meter maybe work abnormally Figure 6 7 Function setup menu 8 www Siargo com A B C D MF5600 Series User Manual QE MER qUITE exit from the setup mode this is the default option Mnr JU ILILLIL PROTOCOL select Single device communication or Multi device communication e Press 5 the display will show the protocol menu if the value is 000 the meter is working in Single device communication mode ifthe value is a number between 001 and 255 the meter is working in Multi device communication mode e g if the value is 153 it means the meter is working in Multi device communication mode and the address 18153 Press to switch in two communication modes After selection press f to confirm and exit SET Rod SET Addr Setthe address for Multi devi2. materials together with a water oil proof nano coating for performance and reliability The current models are ready to connect to 12mm or 19mm lines while other pipe diameters can be offered as customized models The meter body is made of stainless steel that is available for applications of most of the gases MF5600 Series MEMS Mass Flow Meters feature Integrated MEMS mass flow sensors Large turn down ratio over 30 1 Excellent repeatability and accuracy Low pressure loss Various user interface for plug and play and remote communication or network Detachable LCD display for offsite data processing Working Principle and Package The MEMS calorimetric sensor is installed at the flow channel wall forming a plate that serves as an additional flow conditioner from the boundary layer configuration resulting in a laminar flow The mass flow measurement is established as the fluid carries heat away from the heater causing the redistribution of the temperature field Accurate flow rate is obtained by calibration with the standard fluid at the preset conditions Flow direction Time averaged velocity profile boundary layer Free stream Turbulent Laminar Sensor 3 www Siargo com 2 Models and Selection MFLI LT L1 L1 L2 MF5600 Series User Manual Gas A air C CO N N O O R Ar for other gases please contact Siargo Di
3. or purchaser s risk of loss and will be returned if at all at Siargo s risk of loss Purchasers or users are deemed to have accepted this limitation of warranty and liability which contains the complete and exclusive limited warranty of Siargo and it shall not be amended modified or its terms waived except by Siargo s sole action This warranty is subject to the following exclusions a Products that have been altered modified or have been subject to unusual physical or electrical circumstances indicated but not limited to those stated in the user s manual or any other actions which cannot be deemed as proper use of the products b Siargo does not provide any warranty on finished goods manufactured by others Only the original manufacturer s warranty applies 11 www Siargo com MF5600 Series User Manual 9 Customer Service and Order information Siargo Ltd is making every effort to ensure the quality of the products In case of questions and or product supports please contact customer service at the address listed below We will respond your request in a timely fashion and will work with you toward your complete satisfaction Customer service and all orders should be addressed to Siargo Ltd 2041 Mission College Blvd Ste 250 Santa Clara CA 95054 USA Tel 1 408 969 0368 Fax 1 408 777 8091 Email Info Siargo com Http www Siargo com For orders please provide accurate and full post address Siargo will not ship t
4. JEN Siargo Ltd P MF5600 Series MEMS Mass Flow Meters SIARGO MEMS FLOW SENSING PRODUCTS User Manual v4 3 2013 Siargo Ltd MF5600 Series User Manual RESTRICTION ON USE 1 This meter is manufactured for general purpose industrial applications for flow measurements Do not alter any hardware and software ofthe product Any modifications might cause damage and unexpected events 2 All practices for electronic device safety should apply 3 Do not use this product in any environments where human safety may be at risk 4 Only a qualified person from Siargo or a person who is accredited by Siargo can perform troubleshooting services to the product Siargo 1s otherwise not liable for any consequences thereafter A SAFETY PRECAUSION The product can be utilized to measure and or monitor in line mass flow rate of any clean dry and preferably gases with constant concentration in industrial applications For other special gases or variable concentration gases the product may not function properly or even can be damaged Please contact Siargo for further information 2 The operational environments of the product are illustrated in the section of product specifications If the product 1s used for other circumstances the product may not function properly or even can be damaged 3 Operation installation storage and maintenance of the product must strictly follow the instructions illustrated i
5. Temperature 10 55 ae Humidity lt 95 RH No icing or condensation Calibration Air 20 C 101 325 kPa Electrical Connection Inputs outputs Cable Detachable LCD Cable DN 12 19 mm Mechanical Connection NPT 1 2 NPT 3 4 Weight 1 62 2 05 kg 5 Installation 5 1 Physical Dimensions Unit mm D L MF5612 50 150 MF5619 10 182 5 5 www Siargo com MF5600 Series User Manual 5 2 Installation Instructions The product at the time of shipment 1s fully inspected for product quality and meets all safety requirements Additional safety measures during the installation should be applied This includes but is not limited to leakage verification procedures standard EDS electrostatic discharge precautions DC voltage precautions and heavy duty precautions Other tasks such as calibration part replacement repair and maintenance must only be performed by trained personnel Upon requests manufacturer will provide necessary technical support and or training of the personnel Do not open the product cover or alter any part of the product Any such actions will forfeit the terms ofthe warranty and cause the liability to any damages thereafter The product is preferably to be installed horizontally Flow direction should be aligned with the arrow mark on the meter body If the flow fluid may have particles or debris a filter is strongly recommended to be installed upstream of the meter Pleas
6. ce communication mode SE 1 PAS SET PAS Set the password Notes Please remember the new password and placed it properly SET DF SET OFFSET reset the offset ofthe meter CLERI CLEAr ACC reset the flow accumulation reading to zero 4 Communication Modes switches Figure 6 8 Figure 6 9 A From Single device communication to B From Multi device communication to Multi device communication e Set the address of the meter value of SE 1 Add as 3 C such as 255 e Set the meter to Multi device communication mode select value of PAT DLL as 3 B After set the address will show on the LCD Single device communication Set the meter to Signal device communication mode select value of PP IFIEDL as 3 B After set no address will show on the LCD Figure 6 9 Single device communication mode 9 www Siargo com MF5600 Series User Manual 7 Safety and Maintenance 7 1 Wetted Materials and Compatibility The meter body and pipe are made of 304 stainless steel Sensors comprise of silicon silicon nitride and silicon dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide The electronic sealing is provided by RTV room temperature vulcanizing silicone sealant WR 704 composed of HOCH3 SiO nCH3H 7 2 Safety Precautions The product is designed for use with general purpose gases such as air and
7. e follow the following steps to complete the installation a Upon opening the package the product physical integrity should be inspected to ensure no visual damage b Before installation of the product please ensure that the pipe debris or particles or any other foreign materials are completed removed c Cautions during installation 1 It is preferably to first install the inlet end of the meter and then the outlet end of the meter To ensure the measurement accuracy an upstream straight pipe of length no less than 10DN and a downstream straight pipe of length no less than 5DN should be in place iiDuring installation please make sure no any foreign materials such as water oil dirty particles etc falling into the pipe d Connect electrical wires for LCD and then electrical wires for inputs outputs Please pay special attention to power supply range 1 e 12 24 VDC and power supply polarization see the description on Electrical Interfaces in this manual e When connect the communication wires please make sure that the wires are correctly connected to the proper ports on your data device equipment f Turn on the power supply and make sure that the LCD works correctly g Slowly open the valves at the both ends ofthe pipeline and the meter should then start to measure the flow in the pipeline h Completion of the installation 5 3 Cautions a Don t try to loose any build in part of the product b Ensure
8. electrical wires for the inputs outputs to be reliably connected c Release all the installation stresses so that no stresses will be exerted on the product d The product should avoid strong electromagnetic interference sources nearby or periodic mechanical shocks to its body or pipeline e Slowly open close valves to prevent abrupt pulse flow impact which may damage the product 6 www Siargo com 6 Operation and Communication 6 1 Cable Definition The electrical interfaces are defined as below Color Definition Red Power Supply 12 24 VDC Black Power GND Green RS485 A Brown RS485 B Violet 4 20mA Flow Signal Output Transparent 4 20mA Pulse GND Figure 6 1 Accessory Cable 1 Yellow Pulse Output for Inputs Outputs 6 2 LCD Display Normally the LCD display looks as Fig 6 3a A standard litre SL represnts a litre of the measured gas at 20 C and 101 325 kPa Total accumulated flow Nm Normal m Alarm code E1 ES Fig 6 3b El Sensor error E2 ADC error E3 RTC error E4 EEPROM error ES Crystal error 6 3 RS485 Communication For purposes of computer control and networking the RS485 is used for communication with the following settings Baud rate Bits per second 57600 Single device communication 9600 Multi device communications Date bits 8 Stop bits 1 Parity None Flow control None 6 4 4 20mA Output For customers who use 4 20mA output The connection of the loop load resi
9. hould be done by trained and certified personnel by Siargo Ltd 10 www Siargo com MF5600 Series User Manual 8 Warranty Siargo warrants the products sold hereunder properly used and properly installed under normal circumstances and service as described in the user s manual shall be free from faulty materials or workmanship for 180 days for OEM products and 365 days for non OEM products from the date of shipment This warranty period is inclusive of any statutory warranty Any repair or replacement serviced product shall bear the same terms in this warranty Siargo makes no other warranty expressed or implied and assumes no liability for any special or incidental damage or charges including but not limited to any damages or charges due to installation dismantling reinstallation or any other consequential or indirect damages of any kind To the extent permitted by Law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses injuries or damages concerning the products including claims based on contract negligence tort strictly liability or otherwise shall be the return of products to Siargo and upon verification by Siargo to prove to be defective at its sole option to refund repair or replacement of the products No Action regardless of form may be brought against Siargo more than 365 days after a cause of action has accrued The products returned under warranty to Siargo shall be at user
10. n this user manual Otherwise unpredicted damage and even injuries or other severe situations could be induced All the installation storage and maintenance of the product must be performed by skilled workers This user manual should be placed near the product for easy access 4 Before using the product the user should read this user manual completely and in details so that the user is well understand all the important instructions Itis recommended that the product should be re calibrated and serviced in every two years or at a time of desire 1 www Siargo com MF5600 Series User Manual Contents RESTRICTION ON USB 2 ettet ehh Eee eB she FERE A a odor cr abo aa hod ee eio eee aSa 1 SAFETY RECAUSION 5 211 3 3 2 restet force detes iet ges aai Ea cete Doleo tela aee t etd old etna fued os l Contents mareyar o aroan rO E E E a ORE a O da 2 OVerfVIeW ugue EARS E E O A OE A A ER 3 2 gt Mod lsand Selection iet tes tete t te ue aieea i Lid aste rs eerta 4 3 Product Description ausos testtoe re Eni endo bete redo enun e gal dene hd vestit edis sda 4 S Bib MEN PET 5 5 Installation uber reto e See Len ER REIR PARTE PIRE ete GG une a rare Os EREUAN e QUE 5 5 1 Physical Dimensions 22 5 eese ener Essa En Totus Deu nd bad aS Ege e E mo asda 5 5 2 Installation Instructions mene mere hes mene e eren sens 6 5 3 Attenti ons isse Geb EAS SE RUE PEE NQU ER RR HUES A ERNTE RS RN ORE SIRO Dres CR S ATER Re OESS 6 6 Operation and Commu
11. nication reta mene near aurea rena hne nennen 7 6 1 Cable Definition agia medo coe or OR ARR DER Dada ER da gana v nea pd tta enl ER RE A Eae RES 7 6 2 LCD Display uniiseu E Fe RN S TERTIA oe RE ERE QUE D UI HIP AT ewes 7 6 3 RS485 Communication isses epe teneor D een De Ex a EORR CIAM de e Yn LETRA Exe Lex n 7 6 4 420m OVPU ed etu eer RH eR Ree ENS P Rue de ea ee TERR E FERRE ea ENSE e aa see ek ER enses 7 6 5 Pulse OUtp t anoesaiotititextider Uxotox tee tod obere bd dE LL eed SDL oet o pesas 7 6 6 Setup via BULLONS episc eet e los e ade een E ugue YR na Denon CU eed x vA oe gts 8 7T Safetyand Maintenance oe orae amete re rre e e a uy oe eee e axe Eee NE rn aer ae 10 7 1 Wetted Materials and Compatibility sss eee 10 7 2 Safety Precautioris 3 5 oor eret des Ee rente DOR CE r pds totu A LS eae 10 To Maintenance sraon P a gana ss Sia Sand aan 10 Mo LC MES reU 11 9 Customer Service and Order information ssssssssssssssssseeeee meme 12 2 www Siargo com MF5600 Series User Manual 1 Overview MF5600 mass flow meters are designed for general purpose precise industrial gas measurement monitor or control The design opts for applications where the display must be separately placed from the meter body or flow channel The meters are operated with the Siargo s proprietary MEMS thermal mass flow sensors together with the smart control electronics The sensor probe surface is passivated with silicon nitride ceramic
12. nitrogen It is advised that the products are best used for non explosive clean gases The sensors cannot be used for gas metrology of fluoride or fluoride containing gases For updates of the product certification information please contact manufacturer or visit www Siargo com Use for other gases such as extreme corrosive and toxic may cause the product malfunctioning or even severe damages The product sealing is ensured to work under working pressure of 1 0 MPa and is leakage proof before the shipment But cautions and further leakage test are important at installation as well since any leakage could cause severe safety issue The power supply for this product is 12 24 VDC all precautions and measures for electrical voltage handling must apply Attention any alternation and or improper use of the product without the permission of the manufacturer can cause unpredicted damages and even injuries or other severe situations Siargo Inc or any of its employees subsidiaries shall not be hold and indemnified against such consequences due to such circumstances via improper use of the product 7 3 Maintenance Attention without prior permission of the manufacturer please do not attempt to alter any parts of the product as it may cause unrecoverable damages If there are questions or doubts please contact manufacturer immediately before further actions Please ensure the DC power is off before disassembling the sensor All maintenance of the sensor s
13. o P O Boxes or via a third party For further information and updates please visit www Siargo com 12 www Siargo com
14. splay D LCD N No display Output A 4 20mA B RS485 D Pulse Options B AB BD ABD Maximum flow rate Selectable for MF5612 200 and 300 for MF5619 600 and 800 Connection N NPT Y Customer specified DN Pipe inner diameter 5612 DN12mm 5619 DN19mm There is flow rate number only for unit SLPM If other unit is selected there must be flow rate number with unit together For CO selectable 200 SLPM without 300 SLPM for MF5612 600 SLPM without 800 SLPM for MF5619 Typical flow range Model Connection Flow Range SCFM MF5612 1 2 7 MF5619 3 4 3 Product description The parts are illustrated as below Control Unit Detachable Display Unit LCD Function Keys User Interface Display Connection A Display Connection B Flow Channel www Siargo com MF5600 Series User Manual 4 Specifications Model MF5612 MF5619 Unit Max Flowrate 200 300 600 800 SLPM Min Flowrate 0 3 0 8 SLPM Turn down ratio 30 1 100 1 customizable Accuracy 1 5 0 2FS Repeatability 0 5 96 Power Supply 12 24 Vdc 50mA Output 4 20mA RS485 Pulse Display LCD Detachable Display Unit Instant flowrate SLPM Flow accumulation Nm h Display Resolution Instant flowrate 0 001SLPM Flow accumulation 0 001Nm h Keyboard 3 Keys Max Pressure 1 0 MPa Storage Temperature 20 60 C Operating
15. stor is illustrated as Figure 6 4 R Gmax 4500 6 5 Pulse Output The pulse output is in the form of even square wave that is composed of 3 3V signal high and OV signal low and each pulse can be programmed to 0 001Nm h 0 01Nm h 0 1 Nm h or INm h respectively Part number IC7 150 USER User Mode Flowrate at Instant flow SLPM standard litre per minute gt MF5600 Series User Manual Figure 6 2 Accessory Cable 2 for Detachable LCD Part number IC7 30 IC7 Length 30 cm Part number IC7 200 IC7 Length 2 m user aBaRaRaE Fonet DODODDO BOUE Figure 6 3a Normal Display Total E1E2E3E4E5 Flowrate Figure 6 3b Error alarm display 4 20mA LOOP Violet Ri 4 20mA GND LOOP Transparent Figure 6 4 4 20mA External Connection www Siargo com MF5600 Series User Manual 6 6 Setup via Buttons 6 6 1 Button definition Three buttons m Selection confirmation of a setting Scrollup the setup menu Scroll down the setup menu 6 6 2 Operation 1 The user interface Figure 6 5 Button m 1s used for function selection After press it the menu asks for password authentication mode Figure 6 5 User Interface 2 Password interface Figure 6 6 In the password menu the flow measurement will not be interrupted whereas the first line of the LCD display will show the password menu as Figure 6 6
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