Olympus OLS3100 User's Manual
Contents
1. a rowostenicoae mn Your Vision Our Future LLEXT OLS3100 NEW Go Welcome to the world of LEXT 3D The name LEXT is formed from the words Laser and Next and means next generation 3D confocal laser microscopes za os ue gt i SONA ANS TESA A S V a e A CTE Orr ten ons Greater simplicity with higher precision The next step in the evolution of three dimensional laser confocal metrology LEXT minimizes manual operation improving ease of use for everyone Even a first time user can operate the system like an expert and obtain fast reliable measurement results The system features not only improved functionality but also an even higher level of measurement performance Constantly evolving toward greater simplicity and higher precision LEXT meets a diverse range of needs in fine surface profile measurement Welcome to the world of LEXT 3D al ee OO A ey eRe ee 2 o ee gt et eee e e 005 oo p ea ia Gee ee aM ar a wpn z i f We Were ae T Oe 5 vey AHMED GE CQ eehvvedsou oo on OLYMPUS OLYMPUS OLS3100 SV Opera ron Automatic operation achieves speedy high precision output Position and magnification settings p gt New Operation Navigator feature is an online wizard 3D image capturing with one click automatically that guides the user in the operation of the LEXT detecting upper and lower limits The operation na2. ations Split screen display An image observed in one observation mode and the same image observed in another observation mode can be displayed Simultaneously during live observation A target point can be located easily by observing a microscopic image with color information and a high resolution LSM Laser Scanning Microscope image simultaneously By using this two screen display function the quality of a specimen can be checked by comparing it with a reference specimen in live observation and whether it is acceptable or not can be determined Measurement Real time distance measurement A distance can be measured in real time by using image intensity profile A distance can be measured in live observation Analysis Particle analysis Particles can be automatically separated using the separator function threshold values can be set and the range of detection can be specified Automatic measurement of all particles can be made using various particle measurement parameters and measured data can be Statistically processed to support advanced particle analyses Welcome to the world of LEXT 3D i d 0 0wa AHeMEM Bh Fa UBPKYVVYVYEVY vce OB SS goog OS 0 eee 0 ra Stud bump ere ns nnd a CROLL GAGE Pesce ces Test patterns Chromium ee A E oi GA SETAA Bie FQUYMYVYUVeVve BB E RD ep cy a ell mi alila rl Corny layer cells era orerey World class resolution and
3. D x620 H mm Weight 56 9 kg 57 5 kg 300 mm x 300 mm stage is optional upon special order basis LEXT unit dimensions Unit mm 520 620 gt E Monitor 406 456 m PC A 353 E Control unit K Ff 349 5 o 350 J 170_ PC amp monitor have slightly different dimensions dependent on the area of region LEXT configuration dimensions A 3 V Y Unit mm eOLYMPUS CORPORATION has obtained ISO09001 ISO14001 Specifications are subject to change without any obligation on the part of the manufacturer Ol YM PU Ss OLYMPUS CORPORATION OLYMPUS AUSTRALIA PTY LTD Shinjuku Monolith 3 1 Nishi Shinjuku 2 chome Shinjuku ku Tokyo Japan 31 Gilby Road Mt Waverley VIC 3149 Melbourne Australia OLYMPUS LIFE AND MATERIAL SCIENCE EUROPA GMBH OLYMPUS LATIN AMERICA INC Postfach 10 49 08 20034 Hamburg Germany 5301 Blue Lagoon Drive Suite 290 Miami FL 33126 U S A OLYMPUS SURGICAL amp INDUSTRIAL AMERICA INC One Corporate Drive Orangeburg NY 10962 U S A OLYMPUS UK LTD www ol ympus com 2 8 Honduras Street London EC1Y OTX United Kingdom Printed in Japan M1619E 0107B
4. of sticky notes Using LEXT such adhesives and paper fiber can be observed and measured without pretreatment in a noncontact manner 3O mo a E 4 he SH a pesi 9995 a a0 aa 2 S Te G la Tag Ivanium LA 66 000um gc m pi 0E ra fie width z z Ma r At Pope jay tle te Haase icii P Mee iis Si Pye EA of A 34 000 4 192 000um Fj Wy Zi re vo J Ta AE r T eS M HA ay Vet a A s oe En H x 9 4 IF 144 000 seemless E as ie Te 153 600 48 000 204 000 256 000um 0000 2 000 51 200 102 400 Su 600 201 0009 256 000 Laser confocal 3D image Cross section measurement Data Courtesy of NISSAN ARC Ltd 12 Otrer PPX prod irets Models to respond to individual needs Motorized stage OLS30 CS150AS OLS3100 Stitching Tiling function to allow the user to make measurements over a wider area LEXT is equipped with the tiling function for integrating a multiple of images into a single image An observational area up to 12 8 mm x 12 8 mm can be viewed as one image Measurement can also be made by viewing a tiled image Furthermore work efficiency can be increased considerably by specifying the image capturing method as a recipe Setting Configuration with a motorized stage age coordinates registration A B Register Coordinates registration Stage Control i a Register Alignment Distance Stage Control Auto acquisition S
5. on an image in an instant Additionally one push gain allows the user to adjust brightness optimally and to complete preparations for 3D image capturing with ease Welcome to the world of LEXT 3D Image Display measurement and capturing p gt analysis Introducing the user to a new 3D world by providing a variety of image presentation patterns high precision measurement and advanced analytical techniques A captured image is rendered to an ideal 3D image by using LEXT s display capabilities High precise measurement high repeatability and advanced analytical techniques related to roughness and particle analyses provide the user with a new dimension of microscopic observation Microlens Wired frame Auto Fine View does it all automatically The brightness and contrast of a captured image are automatical ly adjusted Image conditioning Is typically a manual process requiring an experienced operator Using the auto fine view function of LEXT anybody can acquire ideal high quality 3D images without special training Step height measurement Image intensity profile 2 4 0 2898 AHeYY BH FC a an Oe SRR 3 gaeo o a fr After auto processing Surface Before roughness processing analysis Wafer bump JD rrra ees proces stig Powerful 3D display facilitates measurement and analysis Display Adjustable 3D image The angle of a 3D image can be now changed freely
6. anding needs of diverse fields of research and industry Measurements that can be trusted Highly reliable data can be provided based on the strict traceability system that is linked with the J CSS J apan Calibration Service System Basic concept of a light path in the violet opt system Photomultiplier J Circular confocal T pinhole LED light Objective lens CFO search function The original l Z curve is d eS drawn based on the upper aa high luminance points and maximum luminance values are calculated with high accuracy by using an advanced formula The high repeatability of LEXT is made possible through the height data being obtained in this process Multiple points Aysuaqu Height Traceability chart J apan NMIJ AIST J CSS J apan Calibration Service System OLYMPUS Stabilized He Ne Laser Block Gauge Calibration standard LEXT OLS3100 Calibration block Objective lens designed exclusively for LEXT Confocal Laser Scanning Microscope An apochromatic objective lens exclusively for Confocal Laser Scanning Microscope which enables to improve the optical performance with a 408 nm laser light was developed This Special objective lens developed with the world class optical technology of Olympus has made possible the highest level of observational clarity and measurement accuracy at high magnifications 5 step sensitivity switching functi
7. d observation Surface 1 Surface Light guide plate for LCD Surface 2 Perspective Texture Balance perspective Surface roughness analysis Toner film 2D images Proces sin Versatile observation methods to handle a wide range of applic Display Brightfield observation Color information can be obtained from brightfield color observation Therefore brightfield observation can be used effectively to observe a flaw on a color filter or to locate the position of an area of corrosion on metal Laser printer toner DIC Differential Interference Contrast observation In DIC observation it is possible to observe a scratch or flaw as Small as a few nanometers in height that could not be observed in a brightfield observation Reverse face of a wafer Laser confocal Observation with a much higher level of resolution impracticable with conventional microscopes is now possible through a combination of a 408 nm laser and confocal optics Circuits patterns on wafer Non confocal image Laser confocal DIC Microscopic unevenness on a surface can be observed in three dimensions in real time which is impossible with conventional laser microscopes Observation of surface conditions with the level of dimensional reality comparable to that of an SEM has been made fully possible opening up a new dimension in surface profile observation Polymeric film
8. ll range of measurement analysis functions to meet virtually Spherocrystal of polyamide resin The image shown below is a three dimensional image of a spherocrystal of an injection molded polyamide resin PA66 product observed using the N ARC method Such a Spiral shaped higher order structure is observed in the spherocrystal growth process after injection molding although it is of rare occurrence LEXT with the DIC capability can capture a minute level difference of several nanometers as a clear 3D image as shown in the image to the left Data name aa 008 ols Comment F 126 000um o feu 0 000um e VERN 90 ieee EGS ae gt RY ZANE CRTs fe ei Ba HRERW Ge g e che Laser confocal 3D image Laser confocal DIC image Foam fluoro rubber Foam made by being injected with tiny air bubbles has outstanding properties they are heat insulating flexible and shock absorbing Therefore such foam is widely used as the material of wet suits as packing and weather strips and as the material to make many other products The size of air bubbles and how uniformly the air bubbles are distributed have a great influence on the merchantability of a foam product The image on the left is a 3D image of a cross section cut through a piece of fluoro rubber foam in a cooled condition By processing this image data on the volume and area of this foam can be obtained This type of data can be provided so that the user can use the data to identif
9. on LEXT allows sensitivity to be set at each Z position note and an image to be captured by switching from one level of sensitivity to another In the case of a specimen with multi structure patterns and holes varying reflectances pose a difficulty in measuring the height Using this sensitivity switching function it is possible to obtain information on optimal height and luminance for such types of specimen Note Sensitivity can be set for a maximum of five Z positions Enhanced mode to capture clear images of specimens with different reflectances In the case of a conventional laser microscope it is difficult to turn Specimens with different reflectances into an image such as the Surface of a printed circuit board or copper wiring board or an inclined plane with weak reflection LEXT equipped with the enhanced mode allows such specimens to be turned into clear images ROI Region of Interest noise filter Areas can be specified on the screen and different filtering operations can be performed for each area An ideal 3D image can be obtained 10 Welcome to the world of LEXT 3D ae 4 EW A U4 7 0 FN26 5 Sensitivity setting 5 Sensitivity setting 4 Sensitivity setting 3 Sensitivity setting 2 Sensitivity setting 1 Simulations Enhanced mode ON PCB Printed Circuit Board Enhanced mode OFF a Pane ie a Before processing p var Las et Bon ot ee A 2 Aaa Camel hair Fu
10. precision World s highest level of resolution The optical system designed exclusively for use with 408 nm laser light violet opt system prevents the occurrence of aberrations associated with the use of a short wavelength light source and brings the highest performance out of the 408 nm light source Such a high level of resolution has been made possible by the confocal optical system having an optimized circular pinhole and the high With the world s highest level planar resolution a line or space of 0 12 um can be resolved Additionally the 0 01 um height resolution supports the user in undertaking measurements of k h microscopic surface profiles 0 12 um line and space 14 p g speed XY scanner with the MEMS technology of Olympus 4 400x Basic concept of the two dimensional scanner Scan pattern Incident light Further advanced the world s highest level of repeatability Advanced optical techniques of Olympus accumulated over years have made possible the planar measurement repeatability of 30 0 02 um and the height measurement repeatability of 36 0 04 0 002L mm L measured length in um A guide with high performance in terms of straightness and a high precision linear scale are used for Z axis scanning These parts combined with the further advanced CFO search function contribute to very high level of repeatability The high degree of reliability makes it possible for LEXT to meet the ee dem
11. tart MOVE gt 2D MOVE gt 2D Sample Type MOVE gt AF gt 2D MOVE gt AF gt 3D Wafer 2 inch z MOVE gt AF gt 1 PG gt 2D MOVE gt AF gt 1 PG gt 3D MEE S e o is ete Stitched Tiled paum image Margin xp gs yp as Recipe setting screen Consecutive setting screen Consecutive measurement of multiple points Registered positions on a specimen can be automatically and consecutively captured under the same conditions This makes it possible to automate the taking of measurements Measured image Confocal laser scanning microscope for 300 mm wafer observation OLS3000 300 This product may not be available in your area Please consult your Olympus dealer 13 Welcome to the world of LEXT 3D Specifications Laser scan Universal Observation method Laser Laser Laser confocal DIC Brightfield DIC Microscope stand Illumination Laser 408 nm LD laser Class 2 White light White LED illumination Z stage Vertical movement Maximum height of specimen 70 mm 100 mm Z revolving nosepiece Stroke Resolution Repeatability 10 mm 0 01 um 3 o 0 04 0 002L um Objective lens Total magnification 5x 10x 20x 50x 100x 120x 14400x Field of view 2560x2560 21x21 um Optical zoom 1x 6x Stage Manual stage Motorized stage 100x100 mm 150x100 mm Frame memory Intensity Height 1024x1024x12 bit 1024x1024x16 bit AF Laser reflection type Dimensions 464 W x559
12. vigator provides With LEXT 3D image capturing is performed by just one click of animations to guide the user through the 3D capture button Upper and lower limit settings or other each step of microscopic observation cumbersome preparations are unnecessary A beginner can You can complete a series of steps by obtain a 3D image of the best quality easily For experienced simply operating the mouse in the same users this automated 3D image capturing feature lightens their way as shown in the animations work load and contributes greatly to increasing their work appearing on the screen efficiency gt lt _ lt d lt gt gt The motorized high speed revolving nosepiece ensures lt gt gt the safe and speedy microscopic inspections gt Pn Motorized switching between magnifications helps the user to Te increase work efficiency and to keep the specimen safe an s automatic retracting function prevents an objective lens from ED coming contact with a specimen It also offers excellent parfocality of all objective lenses and an automatic light intensity adjusting function keeps brightness levels unchanged after magnification switching SD Po A High speed automatic focusing and one push gain enable the user to complete preparations for 3D image capturing quickly and easily The speed of the automatic focusing function has been made three times faster so that the user can reach an image or a point
13. with the mouse by grabbing the image In addition the 3D image can be scaled up or down in 100 steps using the mouse wheel This is done using a unique algorithm to prevent the quality of the enlarged image from deteriorating The background color can now also be changed to improve the observation and contrast of the specimen Measurement 3D measurement Step height line width and the distance between two points can now be measured on the 3D image Allowing measurement conditions to be recognized intuitively vi 4 4 S898 itkun Ge FRA UPYLOverve OG 1s gen s Gale Distance between two points measurement Filamentation electrode v4 S898 itkua Be CA a goena g so oeg teene oaee E E j en mm Jio 7e Step height measurement 150 sno mo TI 140 000 Line width measurement ariety of 3D image presentation patterns A variety of 3D image presentation patterns are provided including surface texture real color wired frame etc A 3D image can be rendered to make it more visually effective Corny layer cells Surface Texture Wired frame Analysis Non contact surface roughness measurement can be gathered using the small laser spot Further minute roughness analysis can be made using the unique ROI function Roughness can also be made along a single line much like conventional roughness gauges Stud bump Reverse face of a Si wafer Real color brightfiel
14. y defects in foam products to improve production conditions and for other purposes 449 995 224 998 460 000um 2 4 0 000um nes i Ere 340 000 Jir l 128 000 ee i ff 240 000 ey 120 000 312 000 640 000um Show he 296 000 364 000 Laser confocal 3D image Particle analysis 11 any requirement Solder after ion etching Because solder is very soft years of experience and know how are required to make specimen preparations before observing the composition of solder under a microscope Polished surface techniques using the ion etching method have made considerable progress in recent years The image shown below is the surface of solder processed with the ion etching method This image Shows that the tin Sn layer white part is made smoother by using the ion etching method An SEM requires vapor deposition whereas LEXT does not require pretreatment Therefore by using LEXT a specimen can be observed in its actual state 11 543um 5 782 96 000um 3D image in real color Line roughness analysis Paper applied with an adhesive sticky note Sticky notes are widely used for the convenient feature of applying peeling and applying again Minute spherical adhesives are distributed where an adhesive is applied to a sticky note as shown in the image below The way they are distributed the thickness of an adhesive etc are thought to determine the ease of use merchantability
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