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TwisTorr 304 FS User Manual

1. Figure 40 Model 969 9337 E S bd Figure 41 Model 969 9347 282 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 CAUTION The items of the plastic model kit must be assembled as shown in the following figure in Figure 42 The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm The metallic model is assembled as shown in the figure TwisTorr 304 FS User Manual 87 901 027 01 A 283 309 17 Technical Information Water Cooling Kit Connection Figure 43 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 15 C and 30 C with an inlet pressure between 5 and 5 bar This allows a flow higher than 50 1 h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the
2. Figure 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figure 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 235 309 16 Instructions for Use Installation Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system 236 309 Figure 3 Install this device indoors only and in any case do not use the pump in an environment exposed to atmospheric agents rain ice snow dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C relative humidity 0 90 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TwisTorr 304 FS pumps must be used in conjunction with one of the suitable Agilent controller and they must be connected to a primary pump see Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 Tab 1 CONTROLLER PART NUMBER PRODUCT NAME Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 4
3. Figur 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figur 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 121 309 8 Bruksanvisning Installation Installation asa 3 10 Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet 122 309 A 3 m Bad Figur 3 Installeraden h r apparaten endast i st ngda milj er och anv nd den hur som helst inte i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck temperatur fran 5 C till 35 C relativ luftfuktighet 0 90 utan kondens I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical Information f r ytterligare upplysningar Pumpen TwisTorr 304 FS ska endast anv ndas med en av de speciella Agilent systemen och m ste anslutas till en huvudpump se schemat i bilagan Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A OBSERVER F ljande kontrollsystem finns tillg ngliga Tab 1 Bruksanvisning KONTROLLSYSTEM DELNUMMER PRODUKTNAMN Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with
4. Tab 2 PR RUBA UPEV OVAC MECHANIZMUS PO ET U AHOVAC KR TIACI MOMENT ISO 100 K svorky M10 4 22 Nm ISO 160 K svorky M10 4 22 Nm Turbovyveva so vstupnou prirubou ConFlat musi byt pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TwisTorr 304 FS sa nem e upevni pomocou vlastnej z kladne TwisTorr 304 FS User Manual 87 901 027 01 A 209 309 14 N vod na Obsluhu Pou itie v vevy TwisTorr 304 FS PouzZitie v vevy TwisTorr 304 FS V etky inStrukcie potrebn pre spr vnu prev dzku turbo erpadla s uveden v prirucke kontrolnej jednotky Pred pou it m si t to pr ru ku pozorne pre tudujte Aby sa dosiahli lep ie hrani n hodnoty tlaku mo no syst m vyhria Pri zahrievan v kuovej komory nesmie teplota na vstupnej pr rube prekro i hodnotu 120 C u obrubov ho syst mu ConFlat a 80 C u obrubov ho syst mu ISO Pri vyhrievan pou vajte v dy chladenie vodou NEBEZPE Nikdy nepou vajte turbov vevu ak vstupn priruba nie je pripojen k v kuovej komore alebo ak nie je zablendovan V priebehu zahrievania sa nikdy nedotykajte turbov vevy ani Ziadneho prislu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk
5. 154 309 TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 Huolto TwisTorr 304 FS pumput eiv t vaadi mit n huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen pumpun l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Reguest for Return kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li j rjestelm t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TwisTorr 304 FS User Manual 87 901 027 01 A 155 309 10 Ohjek sikirja H vitt minen H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmait
6. 22 Agilent Technologies i Vacuum Products Division Terms and conditions TERMS AND CONDITIONS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale o Unless otherwise pre negotiated customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier reguirements o Agilent Technologies is not responsible for returning customer provided packaging or containers o Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part o Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number o Units returned for evaluation will be evaluated and a guote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of guotation date Units without a Purchase Order for repair will be returned to the customer and the eva
7. Technical Information 17 Purge Valve Installation Figure 51 TwisTorr 304 FS User Manual 87 901 027 01 A 291 309 17 Technical Information TwisTorr 304 FS On board Controller Installation TwisTorr 304 FS On board Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 Turn the pump upside down 2 Screw the 4 fixing studs provided with the accessories bag in the holes on the bottom of pump 3 Place the controller on the studs aligning the 4 rubber holes on the top of the controller case Press the controller towards the pump Turn the pump again Plug the line cord and connect the pump cable to the pump V G A Connect the mating connector with the jumper on the interlock signal to start the pump 292 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Figure 52 Mounting 1 Side Mounting NOTE The L shaped bracket P N X3500 68012 is available as an option See the following figure 1 Screw the 4 fixing studs provided with the accessories bag in the holes on the L shaped bracket 2 Place the controller on the studs aligning the 4 rubber holes on the top of the controller Press the controller towards the bracket Turn the pump upside down
8. Installation Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschluss der Turbopumpe an das System abnehmen 36 309 A 3 Jom Abbildung 3 Der Apparat nur in geschlossenen R umen installiert werden Er darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind und nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen verwendet werden Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C a Relative Luftfeuchtigkeit 0 90 2 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A VORSICHT Gebrauchsanleitung 2 Die Turbomolekularpumpen TwisTorr 304 FS d rfen nur mit einem der passenden Agilent Controller verwendet werden und missen an eine Prim rpumpe angeschlossen werden siehe Schema im Anhang Technical Information Die verf gbaren Controller sind folgende Tab 1 CONTROLLER PART NUMBER PRODUKTNAMEN Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr
9. Koel tijdens de verwarming altijd met water pV Terie Laat de pomp nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van gassen die gevaarlijke of vervuilende deeltjes bevatten van een speciale poort voorzien met ingebouwde purge vent waardoor de pomp een stroom inert gas stikstof helium of argon moet krijgen ter bescherming van de pomplagers zie bijlage Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 95 309 6 Bedrijfshandleiding Gebruik van de TwisTorr 304 FS VOORZICHTIG Gebruik de pomp nooit in aanwezigheid van bijtende gassen of dampen die de interne materialen van de pomp kunnen beschadigen Wanneer de pomp wordt gebruikt voor het pompen van giftige brandbare of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van expl
10. TwisTorr 304 FS User Manual 87 901 027 01 A 163 309 11 Felhaszn l i K zik nyv Telepit s Telepit s FIGYELEM Ne t vol tsa el az ntapad cs kot s a v d kupakot csak a turb szivatty rendszerre csatlakoztat sa el tt 164 309 bra 3 Ezt a berendez st csak z rt t rbe telep tse s semmik ppen se haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig relat v p ratartalom 0 90 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i Kezik nyv 11 A TwisTorr 304 FS szeria turb molekul ris szivatty it kiz r lag a megfelel Agilent vezerl egys gek egyik vel szabad haszn lni s a szivatty kat el z leg egy els dleges szivatty ra kell k tni l sd a Technical Information mell kletben megadott rajzot Az alkalmazhat vezerl egys gek a k vetkez k Tab 1 VEZERL EGYSEGEK PART NUMBER TERMEK NEVE Controller AG Rack base X3506 64001 TwisTorr 304 FS AG
11. TwisTorr 304 FS User Manual 87 901 027 01 A 31 309 2 Gebrauchsanleitung Allgemeine Informationen In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 32 309 TwisTorr 304 FS User Manual 87 901 027 01 A Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 40 C bis 70 C Relative Feuchtigkeit von 0 bis 90 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen a Die Lagerdauer f r eine Turbomolekularpumpe betr gt 12 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus verschiedenen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ck
12. dois talo Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk stov og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosfarisk trykk Ved pumping av gasser som inneholder svevestov eller etsende stoffer er disse pumpene utstyrt med en spesiell pning integrert rensing vifte Kople en strgm av inaktive gasser nitrogen helium eller argon til denne pningen for beskytte lagrene til pumpen se Technical Information dos are Bruk aldri pumpen i milj er med etsende gass eller damp som kan skade materialene p innsiden av pumpen TwisTorr 304 FS User Manual 87 901 027 01 A 139 309 9 Instruksjon Manual Bruk av TwisTorr 304 FS N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpen skal ikke brukes i eksplosjonsfarlige miljoer Pumpen er utformet for a overfgre nitrogen argon og lettere gasser Ta kontakt med Agilents tekniske kundestotte for mer informasjon hvis du m pumpe gasser som er tyngre enn argon 140 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instruksjon Manual 9 Vedlikehold TwisTorr 304 FS er vedlikeholdsfri Alt arbeid p systemet m kun utfores av autorisert personell ADVARSEL For noe arheid gjores p systemet m det frakoples stromti
13. 229 311 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to eguipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 230 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 General Information This eguipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the eguipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the eguipment or any action contrary to that provided for by specific national standards The TV 304 TwisTorr is a turbo molecular pump for high and ultra high vacuum applications which is able pump any type of non corrosive gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained throug
14. Place the bracket on the pump bottom 61 R Screw a little bit the three screws M4 in the holes on the pump bottom TwisTorr 304 FS User Manual 87 901 027 01 A 293 309 17 Technical Information Connection of the High Vacuum Flange 7 Rotate the bracket until the controller is on the chosen position 8 Tighten the screws properly 9 Turn the pump again 10 Plug the line cord and connect the pump cable to the pump 11 Connect the mating connector with the jumper on the interlock signal to start the pump Figure 53 Mounting 2 Connection of the High Vacuum Flange 294 309 In the case the rotor is suddenly blocked the torque arising from the system and the high vacuum flange must be absorbed Only the components listed in the following can be used to fasten the pump to the high vacuum flange TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 WARNING It is mandatory to connect the pump in such a way to withstand the torgue specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torgue If the pump is fastened on a vacuum chamber with different flange Agilentts there exists the chance of twisting or tearing off in case the rotor is suddenly blocked The combination of different flange types is not allowed in any case Agilent Vacuum will not accept any liability for all damages resulting fr
15. rub syst mu prost ednictv m spoje kter kolem sv osy snese kroutic moment 1000 Nm P rubu ISO K lze upevnit svorkami s oceli s vysokou odolnost jako nap model IC 63250 DCMZ od firmy Agilent N e uveden tabulka obsahuje pot ebn po et svorek IC 63250 DCMZ pro ka dou velikost p ruby spole n s utahovac m momentem Tab 2 P RUBA P CHYTN ZA ZEN PO ET UTAHOVAC MOMENT ISO 100 K P chytky M10 4 22 Nm ISO 160 K P chytky M10 4 22 Nm Turbomolekul rn v v va se vstupn p rubou ConFlat se mus p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v vu TwisTorr 304 FS nelze p ipevnit pomoc jej podstavy 194 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 Pou it v v vy TwisTorr 304 FS Ve ker pokyny pro spr vn pou v n turbo erpadla jsou uveden v p ru ce dic jednotky P ed pou it m erpadla si tuto p ru ku pozorn p e t te Pro dosa en lep ho maxim ln ho tlaku m ete syst m erpadla zah t P i zah v n vakuov komory erpadla nesm teplota na vstupn p rub p ekro it 120 C v p pad p ruby typu ConFlat a 80 C v p pad p ruby ISO P i zah v n pou vejte v dy chlazen vodou NEBEZPE Turbomolekul rn v v vu nikdy nepou vejte nebud
16. 285 TwisTorr 304 AG Rack Controller Compatible Vent Valve mod 969 9844287 Vibration Isolator Installation 289 Purge Valve Installation 290 TwisTorr 304 FS On board Controller Installation 292 Bottom Mounting 292 Side Mounting293 Original Instructions E Agilent Technologies 243 311 17 Technical Information Disposal Connection of the High Vacuum Flange 294 Installation of ISO K Flange 295 Installation of ConFlat Flange 296 Connection of the Fore Vacuum Pump 298 Pump Used with Corrosive Gases 299 Pump Used in Presence of Magnetic Fields 301 Accessories and Spare Parts 302 244 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Description of the TwisTorr 304 FS The TwisTorr 304 FS pump is available in various models that differ in the high vacuum flange The TwisTorr 304 FS pump models are Model X3500 64000 with ISO 100 high vacuum flange with water cooling Model X3500 64001 with ConFlat 6 external diameter high vacuum flange with water cooling Model X3500 64002 with ISO160 high vacuum flange with water cooling Model X3500 64003 with ConFlat 8 external diameter high vacuum flange with water cooling Model X3500 64004 with ISO 100 high vacuum flange without water cooling Model X3500 64005 with ConFlat 6 external diameter high vacuum flange without water cooling Model X3500 64006 with ISO160 high vacuum flange without water cooling Model X3500 64007 with ConFlat 8
17. Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nale y obowiazkowo przestrzega zalecen dotyczacych instalacji opisanych w niniejszej instrukcji obstugi 172 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Og lne Informacje Ta aparatura jest przeznaczona do u ytku zawodowego Uzytkownik musi przeczyta bardzo uwa nie niniejsza instrukcje kazda dodatkowa informacje dostarczona przez firme Agilent przed u ytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialnosci w przypadku czeSciowego lub catkowitego braku przestrzegania instrukcji w przypadku niewtasciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowaznionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych Pompa TV 304 TwisTorr jest pompa turbomolekularna przeznaczona sa do wywolywania wysokiej i ultra wysokiej pr ni jest wstanie pompowa jakikolwiek typ gazu lub mieszanki gazowej nie korozyjnej natomiast nie ma ona zastosowania do pompowania p yn w lub cz stek cia sta ych Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 60000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci Ponpa TwisTorr 304 FS nie zawiera adnych czynnik w zanieczyszczaj cych i dlatego te jest to system odpowiedni do zastosowa w kt rych jest wymagana tzw czysta pr nia W
18. Jeden egzemplarz karty musi by w o ony do opakowania systemu przed jego wysy k W przypadku pojawienia si konieczno ci z omowania systemu nale y go zlikwidowa w spos b zgodny z obowi zuj cymi normami krajowymi dotycz cymi tego zagadnienia TwisTorr 304 FS User Manual 87 901 027 01 A 183 309 12 Podrecznik Instrukcji Przetworstwo odpadow Przetworstwo odpadow 184 309 Obja nienie znajduj cego sie na etykiecie znaczenia logo WEEE U yty poni ej symbol jest zgodny z wymogiem dyrektywy Unii Europejskiej nazywanej WEEE Symbol ten obowi zuj cy tylko w krajach Unii Europejskiej oznacza e wyr b kt ry nim zosta oznaczony NIE mo e by likwidowany razem z innymi odpadami gospodarstw domowych lub odpadami przemys owymi Musi natomiasti by sk adowany w miejscu przeznaczonym dla odpad w segregowanych Dlatego te zaleca si aby u ytkownik ko cowy po uprzedniem sprawdzeniu terminu i warunk w zawartych w kontrakcie sprzeda y skontaktowa si z dostawc lub sprzedawc urz dzenia w celu uruchomienia procesu sk adowania i likwidacji TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v v vy 186 V eobecn informace 187 Uskladn n 189 Piiprava k instalaci 190 Instalace 192 Upevn n vyv vy 194 Pou it v v vy TwisTorr 304 FS 195 Udrzba 197 Likvidace 198 P eklad or
19. Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Folgende styreenheter kan brukes Tab 1 Instruksjon Manual 9 STYREENHET DELENUMMER PRODUKTNAVN Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24V dc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V datana TwisTorr 304 FS h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen For installasjon av tilleggsutstyr vises det til Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 137 309 9 Instruksjon Manual Festing av pumpen Festing av pumpen LV NIE Manglende overholdelse av disse installasjonsinstruksene kan fore til at pumpen l sner fra systemet hvis rotoren gdelegges Dette kan fore til materielle skader alvorlige personskader eller dod TwisTorr 504 FS kan monteres i en valgfri stilling Fest TwisTorr 304 FS i en stabil stilling ved montere turbopumpens inngangsflens p systemets koplingsflens med en kopling som t ler et dreiemoment p 1000 N
20. Veiligheidsinstructies voor Turbomoleculaire pompen Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen MAPPER ONES Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 86 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De pomp TwisTorr 304 FS is een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen die elk soort gas en gasvormige verbindingen kan pompen Deze pomp is niet geschikt voor het pompen van vloeistoffen of v
21. m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku 198 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Likvidace o o e e e ete 9 e e 00 14 0 N vod na Obsluhu e i Bezpe nostn n vod pre Turbomolekul rne v vevy 201 s V eobecn inform cie 202 Uchovavanie 204 Priprava na in talaciu 205 In talacia 207 Upevnenie vyvewy209 Pou itie vyvewy TwisTorr 304 FS 210 Udr ba 212 Likvidacia 213 Preklad originalneho navodu TwisTorr 304 FS User Manual 87 901 027 01 A 199 309 14 N vod na Obsluhu Likvidace 200 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Bezpe nostn n vod pre Turbomolekul rne v vevy Turbomolekul rne v vevy op san v nasleduj cej pr ru ke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade
22. men inte f r att pumpa v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 60000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TwisTorr 304 FS som d rf r passar f r till mpningar som kr ver ett rent vakuum De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 117 309 8 Bruksanvisning Allm n information I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador Nd Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Detta visar p viktig information i texten 118 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 40 C till 70 C Relativ fuktighet O till 90 utan kondens Kunden s
23. n r turbopumpen tilsluttes systemet e x m Ces Figur 3 Installer kun pumpen lukkede milj er og anvend den ikke under nogen omst ndigheder i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 35 C a relativ luftfugtighed 0 90 ikke kondenserende Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger Den turbomolekyl r pumpe TwisTorr 304 FS m kun benyttes med en af de specielle Agilent controller og de skal tilsluttes med en prim r pumpe se skemaet i bilaget Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 107 309 7 Istruktionsbog Installation De controller som st r til r dighed er folgende Tab 1 CONTROLLER VARENUMMER PRODUKTNAVN Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac
24. nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi rpalke iz serije TwisTorr 304 FS so turbomolekularne rpalke za visoko in ultra visoko vakuumsko uporabo Sistem lahko rpa vse tipe plinov in plinskih zmesi ni pa primeren za rpanje teko in ali trdnih delcev Crpanje se izvaja preko hitre turbine maks 60000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TwisTorr 304 FS ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Navodila so napisana po naslednjem standardnem protokolu SVARILO POZOR Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo vse najbolj pomembne informacije iz besedila TwisTorr 304 FS User Manual 87 901 027 01 A 217 309 15 Priro nik za Navodila Shranjevanje Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 40 C
25. pre aplik cie vy aduj ce ist v kuum Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information 202 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 N vod na pou itie obsahuje tieto tandardn ozna enia MA 74214180 Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu TwisTorr 304 FS User Manual 87 901 027 01 A 203 309 14 N vod na Obsluhu Uchov vanie Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spol ahlivy v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce podmienky prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 40 C a 70 C rozsah relat vnej vlhkosti O a 90 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy pou i re im soft tartu skladovate nos turbomolekul rnej v vevy je 12 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v
26. s a hozz tartoz r gzit nyomat kot Tab 2 KARIMA R GZIT ESZK Z N R GZIT NYOMAT K ISO 100 K M10 kapcsok 4 22 Nm ISO 160 K M10 kapcsok 4 22 Nm A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gziteni a v kuumkamr hoz R szletes leir sert l sd Technical Information A TwisTorr 304 FS nem r gzithet az alapjan kereszt l 166 309 TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i Kezik nyv 11 A TwisTorr 304 FS haszn lata A turb szivatty helyes alkalmaz s ra vonatkoz minden utas t st megtal l a vez rl egys g kezik nyveben Miel tt a berendez st haszn ln figyelmesen olvassa el az emlitett k zik nyvet A jobb nyom s hat r rt kek el r se rdek ben a rendszert fel lehet meleg teni A v kuumkamra esetleges felmelegit se sor n a bemeneti nyjl sn l m rt h m rs klet nem lehet magasabb mint 120 C ConFlat t pus illeszt perem eset n illetve a 80 C h m rs kletet ISO illeszt perem eset n Mindig alkalmazzon v zh t st a melegites sor n VESZ LY FIGYELEM Soha ne haszn lja a turb szivatty t ha a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz nem z rja azt le a lez r karima Ne rintse meg a turb szivatty t vagy annak tartoz kait a melegit si folyamat k zben A magas h m rs klet g si s r l seket okozhat Ker lje a szivatty teset r z s t vagy durva mo
27. utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut 56 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 59 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 64 Fijaci n de la bomba 66 Uso de la TwisTorr 304 FS 67 Mantenimiento 69 Eliminaci n 70 Traducci n de las instrucciones originales EE Agilent Technologies 57 311 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cinetica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podria ser liberada A ale Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 58 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Informaci n general Este eguipo es para uso profesiona
28. 01 A N vod na Obsluhu 14 In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann uz ver sk r ne pripoj te turbov vevu k syst mu w lt J F A mesz q Obr zok 3 Toto zariadenie inStalujte v hradne do uzavret ho prostredia a nepou vajte ho v prostred ktor je vystaven vonkaj m vplyvom d sneh Tad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku teplota od 5 C do 35 C relat vna vlhkos 0 90 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 207 309 14 N vod na Obsluhu In tal cia POZOR V vevu TwisTorr 304 FS je mo n pou va v hradne s niektor m z pr slu n ch kontroln ch zariaden Agilent a mus by zapojen na prim rne erpadlo vi sch mu v dodatku Technical Information K dispoz cii s nasleduj ce kontroln zariadenia Tab 1 RIADIACE ZARIADENIE SLO DIELU N ZOV V ROBKU Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with RS232 485 X3506 640
29. 279 309 17 Technical Information Air Cooling Kit Installation Air Cooling Kit Installation An air cooling kit X3500 68011 is available to improve the TwisTorr 304 FS cooling during operational conditions Fan specifications a air flow 147 m h input voltage 24 Vdc dimensions 119 x 119 x 32 mm 4 7 x 4 7 x 1 3 in power 2 6 W Figure 38 The fan bracket is shaped so that it can be mounted close to the pump When the pump is supplied by the rack C U please utilize the special fan extension cable 969 9949 280 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Nie fanlinn Mit etallatin Air Cooling Kit Installatior To fix the fan to the TwisTorr 304 FS case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller Figure 39 TwisTorr 304 FS User Manual 87 901 027 01 A 281 309 17 Technical Information Water Cooling Kit Connection Water Cooling Kit Connection Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metallic model and 969 9347 plastic model
30. 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V Der TwisTorr 304 FS geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht F r die Installation der Optionsteile siehe im Anhang Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 37 309 2 Gebrauchsanleitung Befestigung der Pumpe Befestigung der Pumpe ANA LIAN Im Fall der Nichtbeachtung dieser Installationsanleitung kann sich bei einem Schaden am Rotor die Pumpe vom System l sen was zu Sach oder Personensch den bis hin zu schweren Verletzungen und zum Tod f hren kann Modell TwisTorr 304 FS kann in jeder beliebigen Position installiert werden Die Pumpe ist stabil zu befestigen indem der Flansch am Eingang der Turbopumpe an einen festen Gegenflansch angeschlossen wird der mit einem Drehmoment von 1000 Nm um seine eigene Achse belastbar ist Der ISO K Flansch kann z B mit hochfesten Stahlklammern befestigt werden wie das Agilent Modell IC 63250 DCM2 Die folgende Tabelle zeigt f r jede Flanschgr e die erforderliche Anzahl von Klemmen Modell IC 63250 DCMZ und das jeweilige Anzugsmoment Tab 2 FLANSCH KLEMMSCHELLE ANZ ANZ
31. 304 FS Outline 1 00E 01 1 00E 02 T 3 E 2 3 a a 2 LEG 10 scem 5 secm 1 00E 04 1 00E 02 1 00E 01 1 00E 00 1 00E 01 1 00E 02 Foreline pressure mbar Figure 25 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Argon TwisTorr 304 FS User Manual 87 901 027 01 A 267 309 17 Technical Information TwisTorr 304 FS Outline 1 00E 01 150W 135W 120W 1 00E 02 5 105W E g 3 g a ki 1 00E 03 1 00E 04 1 00E 02 1 00E 01 1 00E 00 1 00E 01 1 00E 02 Foreline pressure mbar Figure 26 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Helium 268 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information TwisTorr 304 FS Outline 17 Inlet pressure mbar 1 00E 00 1 00E 01 1 00E 02 1 00E 03 1 00E 04 1 00E 02 175 Hi 150 seem 125 stem 100 seem 25 sccm 10 seem 1 00E 01 1 00E 00 1 00E 01 Foreline pressure mbar Figure 27 TwisTorr 304 FS User Manual 87 901 027 01 A Graph of Iso Flow TwisTorr 304 FS pump Hydrogen 269 309 17 Technical Information TwisTorr 304 FS Outline 250 Pumping speed l s 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar Figure 28 Split Flow X3500 64010 Graph of Pumping Speed Main Flange IS0100 270 309 TwisTorr 304 FS User Manual 87 901 027 01 A _ Technical Information 17 Iwislo
32. 5 Pump ISO 160 5 7 kg 12 6 Pump CFF 8 9 7 kg 20 9 TwisTorr 304 FS User Manual 87 901 027 01 A 253 309 17 Technical Information Technical Specification Tab 4 Split Flow X3500 64010 Technical Specification Pumping speed Main Flange ISO 100 Side Port KF40 N2 220 1 s 5 1 s He 215 l s 6 5 l s Hz 215 l s 11 s Ar 210 l s 4 l s Compression ratio Total Foreline Side Port N2 gt 1 x 1011 gt 1 x 106 He 1 x 107 2 5 x 104 Hz 1 5 x 105 1 x 103 Ar gt 1 x 1011 gt 1 x 106 Max gas throughput at full rotational speed Air cooling Water cooling with recommended forepump N2 170 sccm Ar 110 sccm Pumping speed measured with fluximeter 254 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline TwisTorr 304 FS Outline The following figures show the TwisTorr 304 FS dimensions are in mm inches OH zv e P 3 n NN ISO 100 TwisTorr 304 FS User Manual 87 901 027 01 A 255 309 17 Technical Information TwisTorr 304 FS Outline Figure 13 TwisTorr 304 FS ISO 100 X3500 64000 256 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline Figure 14 TwisTorr 304 FS X3500 64002 FORELINE FLANGE La TwisTorr 304 FS
33. 64001 TwisTorr 304 FS AG Rack Controller AG Rack with RS232 485 X3506 64002 TwisTorr 304 FS AG Rack RS232 485 Controller AG Rack with RS232 485 amp Profibus X3506 64003 TwisTorr 304 FS AG Rack Profibus Controller V304 onboard 24Vdc X3507 64002 TwisTorr 304 FS onboard 24V Controller V304 onboard 100 240Vac X3507 64003 TwisTorr 304 FS onboard 110 220V POZOR Po direktivi EN 61010 1 spada TwisTorr 304 FS v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo 222 309 Za namestitev opcijski dodatkov glej Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Pritrditev rpalke SVARILO Neupo tevanje teh navodil glede namestitve lahko v primeru okvare rotorja povzro i odklop rpalke s sistema s posledi nimi okvarami hudimi po kodbami ali celo smrtjo TwisTorr 304 FS lahko montirate v tevilne pozicije TwisTorr 304 FS namestite v stabilen polo aj tako da pritrdite vhodno prirobnico turbo rpalke na tevno prirobnico s tako spojko ki lahko prena a navor 1000 Nm okoli svoje osi ISO K prirobnico lahko pritrdite s pomo jo visoko odpornih jeklenih dr al kot pri modelu Agilent IC 63250 DCMZ V naslednji tabeli je za vsako velikost prirobnice navedeno tevilo dr al IC63250DCMZ in navor ki je potrebnen za njihovo pritrditev Tab
34. 64010 Pump Description 250 309 The TwisTorr 304 pump consists of a high freguency motor driving a turbine fitted with 8 bladed stages and 3 TwisTorr drag stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block The TwisTorr stages are in the form of three disks The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The TwisTorr stators are in the form of selfpositioning machined disks On each disk there are parallel spiral pumping channels designed to pump in centrifugal direction on one side and in centripetal direction on the other side These are made of aluminium alloy TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 During normal operation the motor is fed with a voltage of 54 Vac three phase at 1010 Hz To reduce losses during start up to a minimum the freguency increases according to a ramp with a higher initial voltage freguency ratio WARNING The pump must always be cooled before starting using it Running the pump without cooling it could damage inside components The pump can be water cooled or air cooled in the first case the customer c
35. A Istruzioni per l uso 1 Preparazione per l installazione Figura 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figura 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 21 309 1 Istruzioni per uso Installazione Installazione vada aaa Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema 22 309 Figura 3 Installare guesto apparato solo in ambienti chiusi ed in ogni caso non utilizzarlo in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C a umidita relativa 0 90 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere appendice Technical Information per ulteriori dettagli La pompa TwisTorr 304 FS deve essere utilizzata solo con uno degli appositi controller Agilent e devono essere collegate ad una pompa primaria vedere lo schema nell appendice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A I controller disponibili sono i seguenti Tab 1 Istruzioni per l
36. Kezik nyv 11 Karbantart s A TwisTorr 304 FS tipus szivatty k nem igenyelnek karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesziiltsegr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon amig a rotor forg sa le ll s amig a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a gepk nyvh z csatolt Request for Return lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz llit s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlanitani kell a konkr t nemzeti szabv nyoknak megfelel en TwisTorr 304 FS User Manual 87 901 027 01 A 169 309 11 Felhaszn l i K zik nyv Megsemmis t s Megsemmis t s A c mk n jelenl v WEEE logo jelent se A lent l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kka
37. RS232 485 X3506 64002 TwisTorr 304 FS AG Rack RS232 485 Controller AG Rack with RS232 485 amp Profibus X3506 64003 TwisTorr 304 FS AG Rack Profibus Controller V304 onboard 24Vdc X3507 64002 TwisTorr 304 FS onboard 24V Controller V304 onboard 100 240Vac X3507 64003 TwisTorr 304 FS onboard 110 220V TwisTorr 304 FS tillh r en andra installationsklass eller oversp nning som f rutses av standarden SS EN 61010 1 Anslut d rf r anordningen till ett f rs rjningsn t som uppfyller kraven f r den h r klasssen Installation av tillbeh rsutrustning beskrivs i Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 123 3 Bruksanvisning Fasts ttning av pumpen Fasts ttning av pumpen VARNING Om de h r installationsinstruktionerna inte iakttas kan det leda till att pumpen kommer loss fr n systemet om det uppst r en skada p rotorn vilket orsakar allvarliga materialskador kroppsskador eller d den TwisTorr 304 FS kan installeras i valfri position F st TwisTorr 304 FS i ett stabilt l ge genom att montera pumpens intagsfl ns till systemetskontrafl ns med en anslutning som m ste t la ett vridmoment p 1 000 Nm kring sin axel Fl nsen ISO K kan till exempel fixeras med h gh llfasta st lbyglar modell Agilent IC 63250 DCMZ I tabellen nedan beskrivs f r varje fl nsstorlek det antal byglar IC63250DCMZ som erfordras och med vilke
38. S p A Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com chem vacuum Worldwide Web Site Catalog and Order On line www agilent com chem vacuum Representatives in most countries 12 13
39. User Manual 87 901 027 01 A 257 309 17 Technical Information TwisTorr 304 FS Outline Figure 15 TwisTorr 304 FS X3500 64001 Figure 16 TwisTorr 304 FS X3500 64003 258 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 gi a N 392 URG Va S R COOLING N ELECTRICAL CONNECTOR VENT SREW i I j i ER TwisTorr 304 FS User Manual 87 901 027 01 A 259 309 17 Technical Information TwisTorr 304 FS Outline Figure 17 TwisTorr 304 FS X3500 64010 260 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline Figure 18 TwisTorr 304 FS air cooling kit X3500 64004 X3500 68011 7 52 191 7 40 188 TwisTorr 304 FS User Manual 87 901 027 01 A 261 309 17 Technical Information TwisTorr 304 FS Outline Figure 19 TwisTorr 304 FS air cooling kit X3500 64005 X3500 68011 7 17 182 2 7 05 179 2 Figure 20 TwisTorr 304 FS air cooling kit X3500 64006 X3500 68011 262 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline 7 55 191 7 Figure 21 TwisTorr 304 FS air cooling kit X3500 64007 X3500 68011 TwisTorr 304 FS
40. detaljer TwisTorr 304 FS kan ikke fastg res i fundamentet TwisTorr 304 FS User Manual 87 901 027 01 A 109 309 7 Istruktionsbog Anvendelse af TwisTorr 304 FS Anvendelse af TwisTorr 304 FS Alle instruktionerne for den korrekte funktion af turbopumpen er indeholdt i manualen for styreenheden Las omhyggeligt denne manual for den anvendes For at opn bedre begransnings tryk er det muligt at opvarme systemet Under den eventuelle opvarmning af vakuumkammeret m temperaturen p indlobsflangen ikke overskride 120 C med flange ConFlat og ikke overskride 80 C med flange ISO Brug altid vandafkeling under opvarmnings operationerne ADVARSEL Pumpen m aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen Ror aldrig turbopumpen eller dens tilbeher i forbindelse med opvarmningsprocedurerne Den hoje temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af specielle eller forurenende gasser er disse pumper udstyret med en d r til udluftning igennem hvilken det er n dvendigt at fo
41. di immagazzinamento di una pompa turbomolecolare di 12 mesi dalla data di spedizione ATTENZIONE Se per gualsiasi ragione il tempo di immagazzinamento 6 superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 19 309 1 Istruzioni per uso Preparazione per installazione Preparazione per l installazione ATTENZIONE La pompa TwisTorr 304 FS viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa TwisTorr 304 FS e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva per la tutela dell ambiente 94 62 CE e successive modifiche Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata 20 309 La TwisTorr 304 FS non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comungue di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inguinamento da polvere TwisTorr 304 FS User Manual 87 901 027 01
42. f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Instruksjon Manual Sikkerhetsanvisninger for Turbomolekylare pumper 130 Generell informasjon 131 Lagring 133 Klargjore til installasjon 134 Installasjon 136 Festing av pumpen 138 Bruk av TwisTorr 304 FS 139 Vedlikehold 141 Eliminering 142 Oversetting av den opprinnelige samsvarserklaringen SEE Agilent Technologies 129311 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Sikkerhetsanvisninger for Turbomolekyl re pumper De turbomolekylare pumpene som er beskrevet i den folgende Bruksanvisningen har et hoyt kinetisk energiniv som skyldes den hgye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt ANUS For unng skader p utstyret og forebygge operatorskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 130 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bgr lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i
43. gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique Pour le pompage de gaz contenant des particules ou des polluants agressifs ces pompes sont dot es d une purge vent travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote h lium ou argon pour prot ger les paliers voir l annexe Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 53 309 3 Mode d emploi Utilisation de la TwisTorr 304 FS Nara aro N utilisez jamais la pompe en pr sence de gaz ou de vapeurs corrosifs pouvant endommager le mat riau interne de la pompe NE HIRSI Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typigues de chague gaz Ne pas utiliser la pompe en presence de gaz explosifs La pompe a t concue pour assurer un transfert lev d azote d argon et de gaz plus l gers En cas de n cessit de pomper des gaz plus lourds que l argon veuillez contacter l assistance technique Agilent pour plus d informations 54 309 TwisTorr 304 FS User Manual 87 901 027 01 A Entretien Mode d emploi 3 Le TwisTorr 304 FS ne demand aucun entretien Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l
44. indeholder oplysningerne der er ngdvendige for at garantere sikkerhed for operatgren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 I brugsanvisningen anvendes folgende standardrubrikker OKB Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udfgres preecist efter anvisningerne modsat fald er der risiko for sveere personskader midler Denne advarselsmeddelelse vises for procedurer der skal f lges n je for ikke at risikere maskinskader Dette gar opmarksom p vigtig information i teksten TwisTorr 304 FS User Manual 87 901 027 01 A 103 309 7 Istruktionsbog Opbevaring Opbevaring FORSIGTIG Det er ngdvendigt at overholde folgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 40 C til 70 C a relativ fugtighed fra O til 90 ikke kondenserende Kunden skal altid starte de turbomolekylare pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang De turbomolekyl re pumper m opbevares i 12 m neder fra forsendelsesdatoen Hvis opbevaringsperioden af en eller anden grun
45. ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem 190 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 P prava k instalaci Obr zek1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Obr zek2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 191 309 13 N vod k Pou it Instalace Instalace POZOR P ed p ipojen m turbomolekul rn v v vy do syst mu nesund vejte adhezn a ochrann v ko 192 309 Obr zek 3 Toto za zen instalujte v hradn do uzav en ho prost ed a nepou vejte je v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 5 C do 35 C a relativn vlhkost 0 90 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technical Information V v vu TwisTorr 304 FS lze pou vat v hradn ve spojen s n kter m ze speci ln ch dic ch za zen Agilent a mus b t p ipojena k
46. nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 173 309 12 Podrecznik Instrukcji Og lne Informacje W tej instrukcji zastosowano nastepujace umowne znaczenia ZAGROZENIE Komunikaty zagrozeniu przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powazne uszkodzenia ciata Komunikaty zwiekszonej uwagi sa wyswietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne informacje wyci gni te z tekstu 174 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalno ci i niezawodnosci pomp Turbomolekularnych Agilent nale y przestrzega nast puj cych zalece podczas transportu przestawiania i magazynowania pomp nie nale y przekracza nast puj cych warunk w rodowiskowych temperatura od 40 C do 70 C wzgl dna wilgo od 0 do 90 3 bez opar a klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazyno
47. prim rn mu erpadlu viz sch ma v dodatku Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 Jsou k dispozici n sleduj c controllery Tab 1 DIC ZA ZEN SLO D LU N ZEV V ROBKU Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24V dc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V POZOR Podle sm rnice EN 61010 1 pat v v va TwisTorr 304 FS do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du Chcete li informace o dopl kov m p slu enstv viz Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 193 309 13 N vod k Pou it Upevn n v v vy Upevn n v v vy 1 174 1H MM Nedodr en t chto pokyn pro instalaci m e v p pad v skytu poruchy rotoru zp sobit odd len erpadla od syst mu s n sledn m v n m zran n m nebo dokonce smrt V v vu TwisTorr 304 FS lze instalovat do libovoln polohy Upevn te v v vu TwisTorr 304 FS ve stabiln poloze a to tak e vstupn p rubu namontujete k protip
48. prost ed Teplotn rozp t 40 C a 70 C Rozp t vlhkosti O a 90 bez sr en turbomolekularni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekul rni v v vy je 12 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 189 309 13 N vod k Pou it P prava k instalaci P prava k instalaci V v va TwisTorr 304 FS se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby v v va TwisTorr 304 FS nespadla a chra te ji p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice 94 62 ES ve smyslu n sledn ch prav POZOR Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu V v vu TwisTorr 304 FS nelze po kodit jednoduch m vystaven m atmosf rick m vliv m P esto doporu ujeme abyste
49. przekracza 120 C z wywinietym kolnierzem ConFlat oraz 80 C i z wywinietym kolnierzem ISO Zawsze stosowa chlodzenie wodne podczas fazy nagrzewania ZAGROZENIE Absolutnie nie wolno uruchamia pompy w przypadku kiedy ko nierz wej ciowy nie jest pod czony do komory lub nie jest zamkni ty z ko nierzem zamkni cia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa obra enia cielesne os b UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania gaz w zawieraj cych py y zawieszone lub zanieczyszczaj ce pompy te s wyposa one w odpowiedi wlot zintegrowane oczyszczanie wentylowanie poprzez kt ry nale y doprowadzi do pompy gaz oboj tny Azot Hel Argon w celu zabezpieczenia o ysk pompy Patrz dodatek Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 181 309 12 Podrecznik Instrukcji U ytkowanie pompy TwisTorr 304 FS Absolutnie nie wylorzystywa pompy w rodowisku zawieraj cym gazy lub opary powoduj ce korozj poniewa mog oby to doprowadzi do uszkodzenia wewn trznych element w pompy ZA
50. pump rotor to lock TwisTorr 304 FS User Manual 87 901 027 01 A 297 309 17 Technical Information Connection of the Fore Vacuum Pump Connection of the Fore Vacuum Pump A flange KF 16 NW is available to connect the TwisTorr 304 FS pump to the forevacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The TwisTorr 304 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming 298 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar l s This value can be exceeded according to the process requirements Please contact Agilent for specific applications The purge gas throughput with the recommended fore
51. started when received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 12 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TwisTorr 304 FS User Manual 87 901 027 01 A 233 309 16 Instructions for Use Preparation for installation Preparation for installation The TV 304 TwisTorr pump is supplied in a special protective pack ing If this shows signs of damage which may have oc curred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to the TV 304 TwisTorr pump Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 94 62 and subseguent amendments In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TwisTorr 304 FS Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 234 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 Preparation for installation
52. szigor an be kell tartani 158 309 TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i Kezik nyv 11 Altal nos inform ic A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TwisTorr 304 FS szivatty i turb molekul ris szivatty k melyeket magas s rendk v l magas v kuumalkalmaz sokhoz terveztek hogy b rmely t pus nem korrod l g z illetve g zvegy let szivatty z s ra k pes legyen Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 60000 fordulat perc biztos tja A TwisTorr 304 FS szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Infor
53. uso 1 CONTROLLER PART NUMBER PRODUCT NAME Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with RS232 485 X3506 64002 TwisTorr 304 FS AG Rack RS232 485 Controller AG Rack with RS232 485 amp Profibus X3506 64003 TwisTorr 304 FS AG Rack Profibus Controller V304 onboard 24Vdc X3507 64002 TwisTorr 304 FS onboard 24V Controller V304 onboard 100 240Vac X3507 64003 TwisTorr 304 FS onboard 110 220V Yar FAD La TwisTorr 304 FS appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Per l installazione degli accessori opzionali vedere Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 23 3 1 Istruzioni per uso Fissaggio della pompa Fissaggio della pompa OVA NZ La mancata osservazione di queste istruzioni di installazione nel caso in cui si verifichi un guasto del rotore puo provocare il distacco della pompa dal sistema causando danneggiamenti gravi ferite o morte La TwisTorr 304 FS pu essere installata in gualsiasi posizione Fissare la TwisTorr 304 FS in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 1000 Nm attorno al proprio asse La flangia
54. ves Sensitizer LI ves OOOO OI III Other dangerous substances LI ves Goods preparation If you have replied YES to one of the above questions Has the product been purged Lives no If yes which cleaning agent method Has the product been drained from oil O YES LI NOT APPLICABLE confirm to place this declaration on the outside of the shipping box I declare that the above information is true and complete to the best of my knowledge and belief I understand and agree to the terms and conditions on page 2 of this document Name Authorized Signature Position Date NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Page 3 of 3 Agilent VPD Request for Return United States Agilent Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 vpl customerservice Aagilent com Benelux Agilent Technologies Netherlands B V Groenelaan 5 1186 AA Amstelveen The Netherlands Tel 31 20 547 2000 Fax 31 20 547 2093 Brazil Agilent Technologies Brasil Aveni
55. 02 TwisTorr 304 FS AG Rack RS232 485 Controller AG Rack with RS232 485 amp Profibus X3506 64003 TwisTorr 304 FS AG Rack Profibus Controller V304 onboard 24Vdc X3507 64002 TwisTorr 304 FS onboard 24V Controller V304 onboard 100 240Vac X3507 64003 TwisTorr 304 FS onboard 110 220V Zariadenie TwisTorr 304 FS patr do druhej in tala nej prep ovej kateg rie podla smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii 208 309 O in tal cia doplnkovej v bavy pozri pr ru ku Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Upevnenie v vevy NMA 17424180 Nedodr anie t chto pokynov pre in tal ciu m e v pr pade v skytu poruchy rotora sp sobi oddelenie v vevy od syst mu s n sledn m v nym zranen m alebo dokonca smr ou V vevu TwisTorr 304 FS je mo n in talova v ubovo nej polohe Upevnite v vevu TwisTorr 304 FS do stabilnej polohy a to tak e vstupn pr rubu namontujete k protipr rube syst mu prostredn ctvom spoja ktor znesie kr tiaci moment 1000 Nm okolo svojej osi Pr rubu ISO K je mo n upevni svorkami z ocele s vysokou odolnos ou ako napr model IC 63250 DCMZ od firmy Agilent Ni ie uveden tabu ka obsahuje potrebn po et svoriek IC 63250 DCMZ pre ka d ve kos pr ruby spolu s u ahovac m momentom
56. 04 FS ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen 148 309 TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 Valmistelut asennusta varten Kuva 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Kuva 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 149 309 10 Ohjekasikirja Asennus Asennus Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n 150 309 Kuva 3 Laite tulee asentaa vain suljettuihin tiloihin Sit ei saa miss n tapauksessa k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C suhteellinen kosteus 0 90 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 TwisTorr 30
57. 04 FS nale y zamocowa w stabilnej pozycji cz c ko nierz wej ciowy turbopompy do ko nierza sta ego wytrzyma ego na obci enie 1000 Nm wok w asnej osi Ko nierz ISO K mo e by zamocowany za pomoc zacisk w stalowych o wysokiej wytrzymalno ci typ modelu Agilent IC 63250 DCMZ Niniejsza tabela podaje dla ka dego rozmiaru ko nierza ilo potrzebnych zacisk w IC63250DCMZ i moment jakim nale y je dokr ci Tab 2 KO NIERZ TYP ZACISKU ILO MOMENT DOKRECENIA ISO 100K Podw jny zacisk z gwintem M10 4 22 Nm ISO 160K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z kolnierzem wej ciowym ConFlat musi by zamocowana do komory pr niowej poprzez odpowiednie drobne uklady mechaniczne firmy Agilent W celu dodatkowych informacji nale y zapozna sie z dodatkiem Technical Information Pompa TwisTorr 304 FS nie mo e by mocowana z wykorzystaniem jej w asnej podstawy 180 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Uzytkowanie pompy TwisTorr 304 FS Wszystkie instrukcje dotyczace prawidtowego funkcjonowania pompy turbinowej zostaty opisane w instrukcji uzytkowania jednostki kontroli Przed uzytkowaniem uwa nie przeczyta wspomniane instrukcje By uzyska optymalne dopuszczalnie cisnienie przewidziane zostalo ewentualne nagrzanie systemu Podczas ewentualnego nagrzewania kamery pr niowej temperatura na ko nierzu z cznym nie powinna
58. 1 A 7 309 Contents 8 309 Generel information 102 Opbevaring 104 Forberedelser for installation 105 Installation 107 Fastggring af pumpen 109 Anvendelse af TwisTorr 304 FS 110 Vedligeholdelse 112 Bortskaffelse 113 Bruksanvisning 115 S kerhetsanvisningar f r Molekyl ra turbopumpar 116 Allm n information 117 F rvaring 119 F rberedelser f r installation 120 Installation 122 Fasts ttning av pumpen 124 Anv ndning av TwisTorr 304 FS 125 Underh ll 127 Bortskaffning 128 Instruksjon Manual 129 Sikkerhetsanvisninger for Turbomolekylare pumper 130 Generell informasjon 131 Lagring 133 TwisTorr 304 FS User Manual 87 901 027 01 A Contents Klargjore til installasjon 134 Installasjon 136 Festing av pumpen 138 Bruk av TwisTorr 304 FS 139 Vedlikehold 141 Eliminering 142 10 Ohjek sikirja 143 Turbomolekyylipumppujen Turvaohjeet 144 Yleisi tietoja 145 Varastointi 147 Valmistelut asennusta varten148 Asennus 150 Pumpun kiinnitys 152 TwisTorr 304 FS k ytt 153 Huolto 155 H vitt minen 156 11 Felhaszn l i K zik nyv 157 Biztons gi tmutat Turb molekul ris szivatty khoz 158 ltal nos inform ic 159 T rol s 161 El keszites telepitesre 162 Telepit s 164 TwisTorr 304 FS User Manual 87 901 027 01 A 9 309 Contents 10 309 12 13 A szivatty r gzitese 166 A TwisTorr 304 FS haszn lata 167 Karbantart s 169 Megsemmisites 170 Podrecznik Instrukcji 171 W
59. 110 220V UGES hye TwisTorr 304 FS h rer til den anden installationsklasse eller overspeendingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse Der henvises til bilaget Technical Information for oplysninger vedrgrende installation af ekstraudstyret 108 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 Fastgoring af pumpen VNG SIE Manglende ovreholdelse af denne monteringsvejledning kan i tilf lde af at rotoren g r i stykker medfore at pumpen losrives fra systemet og for sager skader alvorlige kv stelser eller d dsfald TwisTorr 304 FS kan installeres i en hvilken som helst position Fastg r TwisTorr 304 FS i en stabil position ved at montere turbopumpens indl bsflange p systemets kontraflange med en tilslutning der t ler et moment p 1000 Nm omkring akslen Flangen ISO K kan fastg res med klemmer af h jstyrkest l type Agilent model IC 63250 DCMZ Nedenst ende tabel viser for hver flangest rrelse hvor mange 1C63250DCMZ klemmer der kr ves samt med hvilket sp ndingsmoment de skal strammes Tab 2 FLANGE KLEMMETYPE ANT DREJNINGS MOMENT ISO 100K Dobbelt klemme gevind M10 4 22 Nm ISO 160 K Dobbelt klemme gevind M10 4 22 Nm Turbopumpen med ConFlat indl bsflange skal tilsluttes p vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere
60. 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS Pump TwisTorr 304 FS Pump TwisTorr 304 FS User Manual 87 901 027 01 A 3 309 TwisTorr 304 FS Pump 4 309 TwisTorr 304 FS User Manual 87 901 027 01 A Contents 1 Contents Istruzioni per uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 22 Fissaggio dellapompa 24 Uso della TwisTorr 304 FS 25 Manutenzione 27 Smaltimento 28 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine Inf
61. 160 X3500 68001 Inlet screen CFF 8 969 9304 Water cooling kit 969 9337 Plastic water cooling kit 969 9347 Air cooling kit for On board Controller X3500 68010 Air cooling kit for Rack AG Controller X3500 68011 Fan extension cable 969 9949 Bracket for On Board Controller side mounting X3500 68012 Vibration isolator ISO 100 969 9344 Vibration isolator CF 6 969 9334 Vibration isolator ISO 160 969 9345 Vibration isolator CF 8 969 9335 Vent flange NW 10 KF M8 969 9108 Vent valve for AG Rack Controller 969 9844 Vent valve for on board Controller 969 9834 Purge valve 10 SCCM NW16KF M12 969 9239 Purge valve 10 SCCM Swagelok M12 969 9240 Purge valve 20 SCCM NW16KF M12 969 9241 Purge valve 20 SCCM Swagelok M12 969 9242 Purge valve 10 SCCM Swagelok Swagelok 9699232 Purge valve 20 SCCM Swagelok Swagelok 9699236 TwisTorr 304FS foreline flange KF25 X3500 68002 Active Gauges Ask Agilent for details 302 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Accessories and Spare Parts TwisTorr 304 FS User Manual 87 901 027 01 A 303 309 Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any
62. 2 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR ISO 100 K M10 drzala 4 22 Nm ISO 160 K M10 drzala 4 22 Nm Turbo amp rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information Naprave TwisTorr 304 FS ne morete fiksirati z njegovo lastno spodnjo ploskvijo TwisTorr 304 FS User Manual 87 901 027 01 A 223 309 15 Priro nik za Navodila Uporaba rpalke TwisTorr 304 FS Uporaba rpalke TwisTorr 304 FS Vsa navodila za pravilno delovanje turbo rpalke se nahajajo v priro niku kontrolne enote Pazljivo preberite ta priro nik pred uporabo Za dosego bolj ih mejnih pritiskov je mo no segreti sistem Pri morebitnem segrevanju vakuumske komore temperatura dovodne prirobnice ne sme prese i 120 stopinj C s prirobnicami ConFlat in 80 stopinj C s prirobnicami ISO Vedno morate uporabiti vodno hlajenje med segrevanjem SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline POZOR Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosf
63. 32 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 vpj customerservice agilent com Korea Agilent Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 2194 9449 Fax 82 0 2 3452 3947 Toll free 080 222 2452 vpk customerservice Aagilent com Mexico Agilent Technologies Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Toll free 1 800 2762622 vps customerservice Aagilent com Agilent Technologies Inc 2014 Printed in ITALY 01 2014 Publication Number 87 901 027 01 Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Toll free 1 800 880 805 vps customerservice agilent com Taiwan Agilent Technologies Taiwan Limited 20 Kao Shuang Road Ping Chen City Tao Yuan Hsien 32450 Taiwan R 0 C Tel 886 3 4959004 Toll free 0800 018 768 vpw customerservice agilent com UK and Ireland Agilent Technologies UK Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Other Countries Agilent Technologies Italia
64. 4 CONNECTOR X Figure 32 Earth Ground Connection We recommend that you fit a separate earth ground conductor to the TwisTorr 304 FS Use a separate insulated green yellow conductor and use a M5 x 10 screw and shake proof washer fitted to the earth hole on the pump to secure the earth conductor to the pump The screw must be fixed with a 2 Nm torgue The impedance between the pump body and the earth connection point must be lt 0 1 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Connection C Electrical Figure 33 The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KO resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TwisTorr 304 FS User Manual 87 901 027 01 A 275 309 17 Technical Information Soft Start Soft Start Soft Start mode is provided to start the pump after a protracted stop of the TwisTorr 304 FS This allows a better grease distribution in the bearings The Soft Start mode is disabled by default To enable the Soft Start mode it must be a
65. 4 FS turbomolekyylipumppuja saa k ytt ainoastaan yhdess tarkoitusta varten olevien Agilent valvojien kanssa ja ne on kytkett v p pumppuun ks Technical Information liitteen kaaviota Saatavilla on seuraavan tyyppisi valvojia Tab 1 VALVOJA OSANUMERO TUOTTEEN NIMI Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V HUOMIO TwisTorr 304 FS kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset Ks Technical Information liitett lis varusteiden asentamista varten TwisTorr 304 FS User Manual 87 901 027 01 A 151 309 10 Ohjekasikirja Pumpun kiinnitys Pumpun kiinnitys VU Asennusohjeiden noudattamatta j tt minen mik li roottorissa syntyy vika voi aiheuttaa pumpun irtoamisen j rjestelm st ja n in ollen vahinkoja vakavia vammoja tai kuoleman TwisTorr 304 FS voidaan asentaa mihin tahansa asentoon Kiinnitt k TwisTorr 304 FS vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n va
66. 85 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V CAUTION The TwisTorr 304 FS belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category For installation of optional accessories see Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 237 309 16 Instructions for Use Pump Fixing Pump Fixing WARNING Failure to comply with these installation instructions could result in the pump detaching from the system in the event of a rotor failure which could cause property damage or serious injury or death The TwisTorr 304 FS can be installed in any position Fix the TwisTorr 304 FS in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torgue of 1000 Nm around its axis The ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque Tab 2 FLANGE FIXING DEVICE N FIXING TOROUE ISO 100 K M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm The turbopump with C
67. ENCI N La TwisTorr 304 FS pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a Para instalar los accesorios opcionales v ase Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 65 309 4 Manual de istrucciones Fijaci n de la bomba Fijaci n de la bomba LU AVR La falta de cumplimiento de estas instrucciones de instalaci n en caso de gue se produzca una averia en el rotor puede implicar la separaci n de la bomba del sistema causando da os heridas graves o la muerte La TwisTorr 304 FS puede instalarse en cualguier posici n Fijar la TwisTorr 304 FS en posici n estable montando la brida de entrada de la turbobomba a la contrabrida del sistema con una conexi n gue pueda resistir a un par de 1000 Nm alrededor de su eje La brida ISO K puede ser fijada utilizando mordazas de acero de alta resistencia tipo modelo Agilent IC 63250 DCM2 La siguiente tabla indica para cada tama o de brida el n mero de mordazas IC63250DCMZ necesarias y el par de apriete para apretarlas Tab 2 BRIDA TIPO DE MORDAZA N PAR DE APRIETE ISO 100 K Mordaza doble con rosca M10 4 22 Nm ISO 160 K Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vacio mediante los accesorios m
68. FS est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber la TwisTorr 304 FS et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive en mati re de protection de l environnement 94 62 CE et modifications successives Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La TwisTorr 304 FS ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 48 309 TwisTorr 304 FS User Manual 87 901 027 01 A Mode d emploi 3 Preparation pour installation Figure 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figure 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 49 309 3 Mode d emploi Installation Installation atv Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de branche
69. GROZENIE Kiedy pompa jest stosowana do pompowania gaz w toksycznych tatwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych Pompa jest zaprojektowana w taki spos b aby mo liwy byt szybki przesyt Azotu Argonu i gaz w I ejszych Gdyby pojawita sie konieczno pompowania gaz w ci szych ni Argon nale y skontaktowa si z dzia em Obs ugi Technicznej firmy Agilent w celu uzyskania koniecznych informacji 182 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Konserwacja Pompa TwisTorr 304 FS nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGROZENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y odtaczy go od zasilania otworzy odpowiedni zaw r wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego systemu Przed wysy k systemu do konstruktora celem naprawy lub advanced exchange service nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Request for Return za czon do niniejszej instrukcji
70. ISO K pu essere fissata usando morsetti in acciaio ad alta resistenza tipo modello Agilent IC 63250 DCMZ La seguente tabella descrive per ogni dimensione di flangia il numero di morsetti IC63250DCMZ necessari e con guale coppia di serraggio serrarli Tab 2 FLANGIA TIPO DI MORSETTO N COPPIA DI SERRAGGIO ISO 100K Morsetto doppio con filettatura M10 4 22 Nm ISO 160 K Morsetto doppio con filettatura M10 4 22 Nm La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere l appendice Technical Information La TwisTorr 304 FS non pu essere fissata tramite la sua base 24 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruzioni per l uso 1 Uso della TwisTorr 304 FS Tutte le istruzioni per il corretto funzionamento della turbopompa sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Per raggiungere migliori pressioni limite possibile riscaldare il sistema Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C con flangiatura ConFlat e a 80 C con flangiatura ISO Usare sempre il raffreddamento ad acqua durante le operazioni di riscaldamento Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa c
71. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 901 027 01 A 01 2014 TwisTorr 304 FS Pump models X3500 64000 X3500 64001 X3500 64002 X3500 64003 X3500 64004 X3500 64005 X3500 64006 X3500 64007 X3500 64010 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pou it N vod na obsluhu Prirocnik za navodila User Manual E Agilent Technologies Notices Agilent Technologies Inc 2013 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 027 01 A Edition Edition 01 2014 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the impli
72. Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V 1973831115 A TwisTorr 304 FS a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz Opcion lis tartoz kok telep t s hez v lassza a Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 165 309 11 Felhaszn l i K zik nyv A szivatty r gz t se A szivatty r gz t se Ezeknek a telep t si utas t soknak figyelmen k v l hagy sa amennyiben a rotor meghib sodik a szivatty nak a rendszerr l val lev l s t eredm nyezheti gy hogy a dolgokban k rt s lyos s r l st vagy hal lt okozhat A TwisTorr 304 FS b rmely helyzetben telep thet R gz tse a TwisTorr 304 FSt stabil helyzetben a turb szivatty bemeneti karim j t egy r gz tett ellenkarim ra csatlakoztatva amely k pes ellen llni 1000 Nm tengely k r li nyomat knak P ld ul az ISO K karima r gz thet nagy teherb r s ac lkapcsokkal mint az IC 63250 DCMZ Agilent t pus A k vetkez t bl zat megmutatja a kapcsok sz ks ges sz m t
73. TEL N FAXN E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ss Agilent Technologies ge Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to include the completed Health and Safety declaration Section No work can be started on your unit until we receive a completed copy of this form After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Product preparation o Remove all accessories from the core product e g inlet screens vent valves Prior to shipment and if applicable for your product drain any oils or other liguids purge or flush all gasses and wipe off any excess residue o If ordering an Advance Exchange produc
74. Torr 304 FS User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 144 Yleisi tietoja 145 Varastointi 147 Valmistelut asennusta varten 148 Asennus 150 Pumpun kiinnitys 152 TwisTorr 304 FS k ytt 153 Huolto 155 H vitt minen 156 Alkuper isen ohjeiden k nn s RE Agilent Technologies 143 311 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k yttoohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 144 309 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansa
75. Torr 304 FS User Manual 87 901 027 01 A 287 309 17 Technical Information Vent Accessories Figure 48 Screw the flange mod 969 9108 on the pump taking care of the oring right position Assemble the seal ring and lock the vent device in position using the KF klamp 0777 IVE Figure 49 288 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Vibration Isolator Installation Four vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 969 9344 for ISO 100 flange model 969 9345 for ISO 160 flange model 969 9334 for CFF 6 flange model 969 9335 for CFF 8 flange They typically reduce the vibration transmitted from the TwisTorr 304 FS to the system by a factor of 20 Please refer to the relevant instruction manual TwisTorr 304 FS User Manual 87 901 027 01 A 289 309 17 Technical Information Purge Valve Installation Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 50 and then screw the gas purge valve with a torgue of 2 5 Nm as shown in the following figure 290 309 TwisTorr 304 FS User Manual 87 901 027 01 A
76. UGSMOMENT ISO 100 K Doppelschelle mit NM10 Gewinde 4 22 Nm ISO 160 K Doppelschelle mit NM10 Gewinde 4 22 Nm Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschlie en F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TwisTorr 304 FS kann nicht mittels seines Sockels befestigt werden 38 309 TwisTorr 304 FS User Manual 87 901 027 01 A Gebrauchsanleitung 2 Verwendung TwisTorr 304 FS Alle Anweisungen f r den korrekten Betrieb der Turbopumpe sind im Handbuch der Kontrolleinheit enthalten Bitte lesen Sie das Handbuch aufmerksam vor dem Gebrauch F r den Erhalt besserer Grenzdruckwerte ist es m glich das System zu erhitzen Bei einer eventuellen Erhitzung der Vakuumkammer darf die Temperatur an dem Eintrittsflansch bei einem Flansch ConFlat nicht ber 120 C und bei einem ISO Flansch nicht ber 80 C liegen W hrend der Erhitzungsvorg nge immer die Abk hlung mit Wasser verwenden WARNUNG Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist W hrend des Aufheizens diirfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr sl W hrend des Betriebs sind Sto und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die L
77. User Manual 87 901 027 01 A 263 309 17 Technical Information TwisTorr 304 FS Outline 250 200 z E H2 m 150 H E e 2 N2 2 100 50 o I Lun 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Inlet pressure mbar Figure 22 Graph of Pumping Speed vs Inlet Pressure for TwisTorr 304 FS pump 264 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline Compression Ratio 1 E 13 1 E 12 LE 11 1 E 10 1E 09 1E 06 kolusi Ua U JL II leta LB 1 E 07 42 ke 1 E 06 1 E 05 Ar 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 1 E 01 1 E 02 Foreline pressure mbar Figure 23 Graph of Compression ratio vs Foreline Pressure for TwisTorr 304 FS pump TwisTorr 304 FS User Manual 87 901 027 01 A 265 309 17 Technical Information TwisTorr 304 FS Outline 1 00E 01 175 stem 150W mui 125 seem 135W 1 00E 02 100 sccm 120W es 75 sccm W A 105w 2 50sccm s Ve 2 2 4 25sccm a 20 sccm 15 scem 1 00E 03 1 00E 04 1 00E 01 1 00E 00 1 00E 01 1 00E 02 Foreline pressure mbar Figure 24 Graph of Iso Flow Iso Power TwisTorr 304 FS pump Nitrogen 266 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr
78. Vyvevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni ne 2 bar pretlakov Pre erpanie plynov s obsahom pevn ch ast c alebo agres vnych zne is uj cich l tok s tieto v vevy vybaven peci lnym otvorom vstavan m pre istenie odvzdu nenie potrebn m pre zaistenie pr toku inertn ho plynu Dus ku H lia alebo Arg nu kv li ochrane lo sk v vevy vi dodatok Technical Information POZOR Nikdy nepou vajte v vevu za pr tomnosti koroz vnych plynov alebo v parov ktor by mohli po kodi jej vn torn materi ly 210 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Ak v vevu pou vate na od erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov V veva bola navrhnut pre vysok prenos Dus ka Arg nu a al ch ah ch plynov V pr pade ke by bolo potrebn erpa jej prostredn ctvom a ie plyny obr te sa oh adom al ch inform ci na Servisn slu bu firmy Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 211 309 14 N vod na Obsluhu dr ba dr ba Vyveva TwisTorr 304 FS nevy aduje iadnu dr bu Ak kolvek pravy a opravy syst mu mus vykona autorizovan person
79. a tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 156 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual 11 Felhaszn l i Kezik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 158 ltal nos inform ic 159 T rol s 161 El keszites telepitesre 162 Telepites 164 A szivatty r gzitese 166 A TwisTorr 304 FS haszn lata 167 Karbantart s 169 Megsemmisites 170 Az eredeti utasitas fordit sa EE Agilent Technologies 157 311 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz Biztons gi tmutat Turb molekul ris szivatty khoz A jelen g pk nyvben le rt turb molekul ris szivatty k nagy mozg si energi val rendelkeznek nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat
80. ager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von Gasen mit Partikeln oder aggressiven Verunreinigungen sind die Pumpen mit einer ffnungsklappe Sperrgas Bel ftung integriert ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff Helium oder Argon zuzuleiten ist siehe Anhang Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 39 309 2 Gebrauchsanleitung Verwendung TwisTorr 304 FS Waste iy Verwenden Sie die Pumpe nie wenn korrosives Gas oder korrosive D mpfe in der Luft sind die die Materialien der Pumpe sch digen k nnten Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder WARNUNG radioaktiven Gasen benutzt wird sind die fiir das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Die Pumpe wurde f r den Durchsatz von leichten Gasen wie Stickstoff Argon und leichteren Gasen konzipiert Wenn Gase gepumpt werden sollen die schwerer sind als Argon wenden Sie sich bitte an den technischen Kundendienst von Agilent f r weitere Informationen 40 309 TwisTorr 304 FS User Manual 87 901 027 01 A Wartung Gebrauchsanleitung 2 Die Pumpen TwisTorr 504 FS erfordern k
81. air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommage Avant de renvoyer une pompe au constructeur pour r amp paration ou advanced exchange service remplir et faire parvenir au bureau de vente local la fiche Request for Return jointe au present manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition En cas de mise au rebut de un syst me proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TwisTorr 304 FS User Manual 87 901 027 01 A 55 309 3 Mode d emploi Mise au rebut Mise au rebut Signification du logo WEEE figurant sur les tiguettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indigue gue le produit sur leguel il est appligu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l
82. al 87 901 027 01 A 219 309 15 Priro nik za Navodila Priprava za monta o Slika 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Slika 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 220 309 TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Slika 3 To napravo lahko namestite le v zaprte prostore v nobenem primeru pa je ne uporabljajte v prostorih ki so izpostavljeni vremenskim dejavnikome de sneg led prahu agresivnim plinom ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura od 5 C do 35 C a Relativna vla nost 0 90 brez kondenza V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information Turbomolekularne rpalke TwisTorr 304 FS se lahko uporabljajo samo s primernimi krmilniki Agilent in morajo biti priklju ene na primarno rpalko glej sliko v dodatku Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 221 309 15 Priro nik za Navodila Monta a Primerni krmilniki so slede i Tab 1 KRMILNIK T DELA IME IZDELKA Controller AG Rack base X3506
83. al a ficha Reguest for Return anexa ao presente manual de instruc es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso um sistema tenha que ser destru do proceder sua eliminac o respeitando as normas nacionais espec ficas TwisTorr 304 FS User Manual 87 901 027 01 A 83 309 5 Manual de Istruc es Eliminac o Eliminac o 84 309 Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este simbolo v lido apenas para os paises da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 87 Opslag 89 Uitpakken 90 Installatie 92 Bevestiging van de pomp 94 Gebruik van de TwisTorr 304 FS 95 Onderhoud 97 Afvalverwerking 98 Vertaling van de originele instructies EE Agilent Technologies 85 311 6 Bedrijfshandleiding
84. an use the dedicated channels on the pump body in the second case an external optional fan is available model X3500 68011 A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating If the thermistor reading exceeds 60 C the pump fails and stops with Error Code 2 If the thermistor reading is below 0 C the pump fails and stops with Error Code 1 see Controller Manual The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 16 NW flange KF25 optional TwisTorr 304 FS User Manual 87 901 027 01 A 251 309 17 Technical Information Technical Specification Technical Specification e Max gas throughput o water cooling water temperature 25 C backing pump 5 m3 h o air cooling ambient temperature 25 C backing pump 5 m3 h Tab 3 Technical Specification Pumping speed ISO 100 CF 6 ISO 160 CF 8 N2 250 l s 250 l s He 255 l s 255 l s H gt 220 1 s 220 1 s Ar 250 l s 250 l s Max gas throughput at full rotational speed Air cooling Water cooling with recommended forepump N2 170 sccm 170 sccm Ar 110 sccm 110 sccm Compression ratio N2 gt 1 x 1011 He gt 1 x 108 H2 1 5 x 106 Ar gt 1 x 1011 Base pressure with recommended forepump lt 1 x 10 10 mbar lt 1 x 10 19 Torr According to standard DIN 28 428 the base pressure is that measured in a leak fre
85. assende verneutstyr Normale miljomessige belastninger kan ikke gdelegge TwisTorr 304 FS Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedstoving 134 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instruksjon Manual 9 Klargjore til installasjon Figur 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figur 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 135 309 9 Instruksjon Manual Installasjon Installasjon dataa Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet 136 309 3 SE J E o 6e P A ea W EK o Figur 3 Dette apparatet skal bare installeres i lukkede miljger og skal ikke installeres eller brukes systemet i miljoer som utsettes for regn sng eller is stov aggressive gasser eksplosjonsfarlige miljoer eller milj er med stor brannfare Under bruk m folgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C relativ fuktighet 0 90 uten kondens Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer Pumpen TwisTorr 304 FS skal kun brukes sammen med en av de egnede Agilent styreenhetene 0g den m koples til en hovedpumpe se skjema i tillegget
86. aste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 60000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TwisTorr 304 FS is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 87 309 6 Bedrijfshandleiding Algemene informatie Deze handleiding maakt van de volgende symbolen gebruik VZV R H UN AN Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken mya nite Bij dit synbool staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 88 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingsco
87. bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfolging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TwisTorr 304 FS er en turbomolekyl r pumpe for h ye og ultrah ye vakuumanlegg som kan pumpe alle typer gasser eller gassblandinger Den egner seg ikke for pumping av veesker eller faste partikler Pumpingen oppn s med en hgyhastighetsturbin maks 60000 opm koplet til en trefaset elektrisk motor TwisTorr 304 FS har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum De folgende avsnitt inneholder all informasjon som er ngdvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 131 309 9 Instruksjon Manual Generell informasjon Denne manualen bruker folgende standardprotokoll OKR Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader isla e Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten 132 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instruks
88. ctivated by the suitable software or Remote I O command see Controller Manual Soft Start freguency steps are as follow 300 Hz 400 Hz 800 Hz 900 Hz For more details see Controller Manual 276 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Inlet screen installation Figure 34 Model 969 9302 and 969 9303 Figure 35 Model X3500 68000 and X3500 68001 The inlet screens mod X3500 68000 ISO 100 X3500 68001 ISO 160 TwisTorr 304 FS User Manual 87 901 027 01 A 277 309 17 Technical Information Inlet screen installation 278 309 969 9302 CFF 6 969 9304 CFF 8 prevent the blades of the pump from being damaged by debris The inlet screen however does reduce the pumping speed as followed Reduction in pumping speed Ar N2 He H2 X3500 68000 20 18 7 5 X3500 68001 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 36 The screen can be mounted on each pump The screen can be removed as shown in the following figure TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Inlet screen installation Figure 37 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains integrated into the center ring TwisTorr 304 FS User Manual 87 901 027 01 A
89. d er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent reprasentant 104 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 Forberedelser for installation FORSIGTIG TwisTorr 304 FS leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TwisTorr 304 FS ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 94 62 EF og efterf lgende ndringer om miljobeskyttelse Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Normal atmosf risk p virkning kan ikke skade TwisTorr 304 FS Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer stov i pumpen TwisTorr 304 FS User Manual 87 901 027 01 A 105 309 7 Istruktionsbog Forberedelser for installation Figur 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figur 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 106 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 Installation SSE Tapen og beskyttelsesproppen fjernes f rst
90. da Marcos Penteado de Ulhoa Rodrigues 939 6 andar Castelo Branco Office Park Torre Jacarand Tambor Barueri Sao Paulo CEP 06460 040 Toll free 0800 728 1405 China Agilent Technologies China Co Ltd No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 vacuum cnmarketingQagilent com vpc customerservice agilent com France Agilent Technologies Parc Technopolis Z A de Courtaboeuf 3 avenue du Canada CS 90263 91978 Les Ulis cedex France Tel 33 0 1 64 53 61 15 Fax 33 0 1 64 53 50 01 vpf sales agilent com Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Agilent Vacuum Products Division Sales and Service Offices India Agilent Technologies India Pvt Ltd Unit Nos 105 116 First Floor Splendor Forum Plot No 3 District Centre Jasola New Delhi 110025 Ph 91 11 4623 7100 Fax 91 4623 7105 Toll Free 18001801517 Italy Agilent Technologies Italia S p A Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 9979 111 Fax 39 011 9979 350 Toll free 00 800 234 234 00 vpt customerservice agilent com Japan Agilent Technologies Japan Ltd 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 52
91. de Istruc es Utilizac o do TwisTorr 304 FS CUIDADO Nunca usar a bomba na presenca de gases ou vapores corrosivos gue possam danificar os materiais internos da bomba Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adeguados tipicos para cada g s N o usar a bomba na presenca de gases explosivos A bomba 6 projectada para ter uma alta transfer ncia de nitrog nio arg nio e gases mais leves Se for necess rio bombear gases mais pesados gue o arg nio pede se entrar em contacto com a Assistencia T cnica da Agilent para informac es 82 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Manutenc o O TwisTorr 304 FS n o necessita de gualguer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar gualguer operac o no sistema deslig lo da alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at gue a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito 6 poss vel usufruir do servico de assistencia Agilent ou do Agilent advanced exchange service gue permite obter um sistema regenerado gue substitua a bomba com defeito Antes de reenviar ao fabricante uma bomba para as reparac es ou o advanced exchange service 6 indispens vel preencher e enviar ao escrit rio de vendas loc
92. dio Durante o funcionamento 6 necess rio gue sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C a humidade relativa 0 90 n o condensante Na presenca de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adeguadas Para ulteriores detalhes consultar o apendice Technical Information As bombas TwisTorr 304 FS devem ser utilizadas somente com um dos adeguados controller Agilent e devem ser ligadas numa bomba prim ria ver o esguema no ap ndice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Os controller disponiveis s o os seguintes Tab 1 CONTROLLER N MERO DA PECA NOME DO PRODUTO Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24V dc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V CUIDADO O TwisTorr 304 FS pertence segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria Para a instalac o dos acess rios opcionais co
93. do 70 C obmo je relativne vla nosti 0 do 90 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 12 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum 218 309 TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Priprava za monta o rpalka TwisTorr 304 FS je dobavljena v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju embala e pazite pazite da vam rpalka TwisTorr 304 FS ne pade iz rok in ne izpostavljajte je udarcem ali tresljajem Embala e ne odlagajte v okolje Material je mogo e v celoti reciklirati in izpolnjuje zahteve Direktive Evropskega parlamenta in Sveta 94 62 ES o embala i in odpadni embala i ter nadnadnih sprememb POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna izpostavljenost na okolje ne more po kodovati naprave TwisTorr 304 FS Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom TwisTorr 304 FS User Manu
94. e P A ea WK EK o Figura 3 Instalar esta bomba s lo en ambientes cerrados y en ning n caso utilizarla en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario gue se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C humedad relativa 0 90 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles La bomba TwisTorr 304 FS debe usarse exclusivamente con uno de los controladores Agilent y debe conectarse a una bomba primaria v ase esguema en el anexo Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Los controladores disponibles son los siguientes Tab 1 CONTROLADORES NUMERO DE PIEZA NOMBRE DEL PRODUCTO Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24V dc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V AT
95. e d entr e ConFlat doit tre fix e a la chambre a vide a l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter l appendice Technical Information Le TwisTorr 304 FS ne peut tre fix par sa base 52 309 TwisTorr 304 FS User Manual 87 901 027 01 A Mode d emploi 3 Utilisation de la TwisTorr 304 FS AVERTISSEMENT Toutes les instructions pour le fonctionnement correct de la turbo pompe sont contenues dans le manuel de l unit de contr le Lire attentivement ce manuel avant l emploi Pour atteindre des pressions limites meilleures on peut chauffer le syst me Pendant le chauffage ventuel de la chambre vide la temp rature sur la collerette d entr e ne doit pas tre sup rieure 120 C avec collerette ConFlat et 80 C avec collerette ISO Utiliser toujours le refroidissement a eau pendant les op rations de chauffage Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves ATTENTION Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du
96. e li p vodn p ruba p ipojen k vakuov komo e nebo nem li uta enou zav rac p rubu B hem zah v n se turbomolekul rn v v vy ani jej ho p islu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n plyn s obsahem pevn ch stic nebo agresivn ch zne i uj c ch l tek jsou tyto v v vy vybaveny speci ln m otvorem vestav n m pro i t n odvzdu n n pot ebn m pro zaji t n p toku inertn ho plynu dus ku h lia nebo argonu za elem ochrany lo isek v v vy viz dodatek Technical Information POZOR V v vu nikdy nepou vejte za p tomnosti korozivn ch plyn nebo v par kter by mohly po kodit jej vnit n materi ly TwisTorr 304 FS User Manual 87 901 027 01 A 195 309 13 N vod k Pou it Pou it v v vy TwisTorr 304 FS Pokud pou v te v v vu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn V v va byla navr ena pro vysok p enos dus ku argonu a dal c
97. e richiedono un vuoto pulito Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 17 309 1 Istruzioni per uso Informazioni Generali Ouesto manuale utilizza le seguenti convenzioni WAYS ALIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Patti messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 18 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruzioni per uso 1 Immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 40 C a 70 C umidit relativa da 0 a 90 non condensante a jl cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start guando ricevute e messe in funzione per la prima volta a il tempo
98. e test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange CFF 8 0 D ISO 160 CFF 6 0 D ISO 100 Foreline flange KF16 NW KF25 optional Rotational speed 60000 rpm 1010 Hz driving freguency Start up time lt 3 minutes Recommended forepump mechanical Agilent DS 102 mechanical Agilent DS 302 dry pump Agilent SH 110 252 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Operating position Any Operating ambient temperature 5 C to 35 C Relative humidity of air 0 90 not condensing Bakeout temperature 80 C at inlet flange max Lubricant Permanent lubrication Cooling requirements Natural convection only with no gas load Forced air 5 35 C ambient temperature Water mandatory if ambient temperature gt 35 C Coolant water Minimum flow 50 l h 0 89 GPM Temperature 15 C to 30 C Pressure 3 to 5 bar 45 to 75 psi Noise Pressure level lt 50 dB A at 1 meter Pwr supply mains Max input pwr Stand by pwr Max oper power 300 VA 10 W 150 W with water or air cooling Installation category Pollution degree 2 Storage temperature 40 C to 70 C Max altitude 3000 m Weight kg lbs Pump ISO 100 5 5 kg 12 3 Pump CFF 6 7 5 kg 16
99. ec nicos especificos Agilent Para m s detalles v ase el anexo Technical Information La TwisTorr 304 FS no puede fijarse utilizando su base 66 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Uso de la TwisTorr 304 FS En el manual de la unidad de control se encuentran todas las instrucciones para el correcto funcionamiento de la turbo bomba Leer atentamente este manual antes de su uso Para obtener mejores presiones de m xima es posible calentar el sistema Durante el calentamiento de la c mara de vac o la temperatura en la brida de entrada no debe superar los 120 C con acoplamiento ConFlat y los 80 C con acoplamiento ISO Usar siempre refrigeraci n por agua durante las operaciones de calentamiento iADVERTENCIA ATENCI N No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podrian dafiarse Para el envio de aire de la bomba utilizar aire o gas inerte sin polvo o particulas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases gue contengan particulas o contam
100. echnical Information mrd 2 Never use the pump with corrosive gases or vapor to avoid damage to the internal materials of the pump TwisTorr 304 FS User Manual 87 901 027 01 A 239 309 16 Instructions for Use Use of TwisTorr 304 FS WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the reguired procedures for each gas disposal Do not use the pump in presence of explosive gases The pump is designed to pump high throughput of Nz Ar and lighter gas Should you need to pump gases heavier than Ar please contact Agilent technical support for information 240 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 Maintenance The TwisTorr 304 FS does not reguire any maintenance Any work must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center or Agilent advanced exchange service who can supply a reconditioned system to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Reguest for Return sheet attached to this instruction manual must be filled in and sent to the local sales off
101. ecifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NAAN Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La TV 304 TwisTorr una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto capace di pompare aualsiasi tipo di gas o di composto gassoso ma non adatta per il pompaggio di liguidi o di particelle solide L effetto pompante e ottenuto tramite una turbina rotante ad elevata velocit 60000 giri min max mossa da un motore elettrico trifase ad alto rendimento La TwisTorr 304 FS e totalmente priva di agenti contaminanti ed amp guindi adatto per applicazioni ch
102. ecifikke veegt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes WONING KIN For at undg materielle skader samt at operatorerne kommer til skade er det strengt nodvendigt noje at overholde installeringsvejledningen i denne brugsanvisning TwisTorr 304 FS User Manual 87 901 027 01 A 101 309 7 Istruktionsbog Generel information Generel information 102 309 Dette udstyr er beregnet til professionel anvendelse Brugeren bor leese denne brugsanvisning og anden yderligere information fra Agilent for udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som folge af tilsidesattelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod galdende lokale regler Pumpen TwisTorr 304 FS er en turbomolekyl r pumpe til anvendelse med hgj og ultrahgj vakuumtilpasning som er i stand til at pumpe en hvilken som helst type gas eller ikke tsende gasholdige blandinger men som ikke er egnet til pumpning af veesker eller faste partikler Pumpningen sker ved hjalp af en hurtigroterende turbine 60000 omdr min Turbinen drives af en elektrisk trefasemotor med hgj effekt TwisTorr 304 FS er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum De folgende afsnit
103. ed warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or conseguential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any eguivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227
104. eine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Request for Return das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung des Systems hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TwisTorr 304 FS User Manual 87 901 027 01 A 41 309 2 Gebrauchsanleitung Entsorgung Entsorgung 42 309 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den L
105. elds Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TwisTorr 304 FS User Manual 87 901 027 01 A 301 309 17 Technical Information Accessories and Spare Parts Accessories and Spare Parts Tab 5 Accessories and spare parts DESCRIPTION PART NUMBER Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Software 969 9883 Inlet screen ISO 100 X3500 68000 Inlet screen CFF 67 969 9302 Inlet screen ISO
106. ell Argon si prega di prendere contatti con I Assistenza Tecnica della Agilent per informazioni 26 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruzioni per l uso 1 Manutenzione La TwisTorr 304 FS non richiede alcuna manutenzione Oualsiasi intervento deve essere eseguito da personale autorizzato Prima di effettuare gualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione di guello guasto Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service 6 indispensabile compilare e far pervenire al locale ufficio vendite la scheda Reguest for Return allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TwisTorr 304 FS User Manual 87 901 027 01 A 27 309 1 Istruzioni per uso Smaltimento Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato amp applicato in ottemperan
107. en sistem z novim Preden odnesete rpalko na popravilo ali zamenjavo z drugo enoto morate izpolniti Reguest for Return obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi 226 309 TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe TwisTorr 304 FS User Manual 87 901 027 01 A 227 309 15 Priro nik za Navodila Odlaganje opadkov 228 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Instructions for Use Safety Guideline for Turbomolecular Pumps 230 General Information 231 Storage 233 Preparation for installation 234 Installation 236 Pump Fixing238 Use of TwisTorr 304 FS239 Maintenance 241 Disposal 242 Original Instructions EE Agilent Technologies
108. er a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 73 Armazenagem 75 Preparac o para a instalac o 76 Instalac o 78 Fixac o da bomba 80 Utilizac o do TwisTorr 304 FS 81 Manutenc o 83 Eliminac o 84 Traduc o das instruc es originais EE Agilent Technologies 71 311 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es t m uma alta quantidade de energia cin tica devida a alta velocidade de rotac o unida a massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o poderia ser liberada ATENCAO Para evitar danos a aparelhagem e prevenir les es aos operadores amp necess rio seguir atentamente as instruc es de instalac o descritas neste manual 72 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas a
109. ere Za rpanje plinov z agresivnimi delci ali onesna evali so te rpalke opremljene s posebnim vgrajenim odvodnim odzra evalnim priklju kom ki omogo a stalen dovod inertnega plina du ik helij ali argon za za ito le ajev rpalke glej prilogo Technical Information POZOR Nikoli ne uporabljajte rpalke v primeru jedkih plinov ali hlapov ki lahko po kodujejo notranje strukture rpalke 224 309 TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov rpalka je zasnovana za prenos velike koli ine du ika argona in la jih plinov e bi eleli rpati pline ki so te ji od argona se posvetujte s slu bo za tehni no pomo Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 225 309 15 Priro nik za Navodila Vzdr evanje Vzdr evanje rpalke TwisTorr 304 FS ne potrebujejo nikakr nega vzdr evanja Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarj
110. erking 98 309 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 101 Generel information 102 Opbevaring 104 Forberedelser for installation 105 Installation 107 Fastggring af pumpen 109 Anvendelse af TwisTorr 304 FS 110 Vedligeholdelse 112 Bortskaffelse 113 Oversattelse af originalinstruktionerne v Agilent Technologies 99 311 7 Istruktionsbog Afvalverwerking 100 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 Sikkerhedsanvisninger for Molekyl re turbopumper De molekylare turbopumper der er beskrevet i neerveerende brugsanvisning har en stor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers sp
111. f ras av auktoriserad personal Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat system Innan systemet l mnas in till tillverkaren f r reparation eller advanced exchange service m ste Reguest for Return som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av ett system skall ske enligt g llande lagstiftning TwisTorr 304 FS User Manual 87 901 027 01 A 127 309 8 Bruksanvisning Bortskaffning Bortskaffning 128 309 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren
112. forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez TwisTorr 304 FS User Manual 87 901 027 01 A 161 309 11 Felhaszn l i K zik nyv El keszites telepitesre El keszites telepitesre FIGYELEM A TwisTorr 304 FSt k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz TwisTorr 304 FS A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel a k rnyezetv delemr l sz l 94 62 EK ir nyelvnek s tov bbi m dos t sainak G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TwisTorr 304 FSt M gis aj nlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali szennyez d s b rmely form j t 162 309 TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i K zik nyv 11 El keszites telepit sre bra 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 bra 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007
113. h a high speed turbine max 60000 rpm driven by a high performance 3 phase electric motor The T TV 304 TwisTorr is free of contaminating agents and therefore is suitable for applications reguiring a clean vacuum The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the appendix Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 231 309 16 Instructions for Use General Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the eguipment The notes contain important information taken from the text 232 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded a temperature range 40 C to 70 C relative humidity range 0 to 90 non condensing a the turbomolecular pumps must be always soft
114. h leh ch plyn V p pad e by s n bylo t eba erpat t plyny obra te se ohledn dal ch informac na servisn slu bu firmy Agilent 196 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 dr ba V v va TwisTorr 304 FS nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby 331242341 Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan P ed odesl n m v v vy v robci na opravu nebo v m nu za repasovan kus mus te list Reguest for Return p ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud je t eba syst m definitivn vy adit z provozu mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TwisTorr 304 FS User Manual 87 901 027 01 A 197 309 13 N vod k Pou it Likvidace Likvidace V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan
115. high vacuum flange without water cooling Model X3500 64010 Split Flow with ISO 100 high vacuum flange and KF40 side port flange with water cooling The following figures shows the 9 models TwisTorr 304 FS User Manual 87 901 027 01 A 245 309 17 Technical Information Description of the TwisTorr 304 FS Figure 4 Model X3500 64000 De og Figure 5 Model X3500 64001 246 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Description of the TwisTorr 304 FS Figure 6 Model X3500 64002 Figure 7 Model X3500 64003 TwisTorr 304 FS User Manual 87 901 027 01 A 247 309 17 Technical Information Description of the TwisTorr 304 FS Figure 8 Model X3500 64004 Figure 9 Model X3500 64005 248 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Description of the TwisTorr 304 FS Figure 10 Model X3500 64006 Figure 11 Model X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 249 309 17 Technical Information Description of the TwisTorr 304 FS Figure 12 Model X3500
116. ice A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards TwisTorr 304 FS User Manual 87 901 027 01 A 241 309 16 Instructions for Use Disposal Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Eguipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 242 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual 17 Technical Information Description of the TwisTorr 304 FS 245 Pump Description 250 Technical Specification 252 TwisTorr 304 FS Outline 255 Interconnections 274 Earth Ground Connection 274 Connection C Electrical 275 Soft Start 276 Inlet screen installation 271 Air Cooling Kit Installation 280 Water Cooling Kit Connection 282 Vent Accessories 285 TwisTorr 304 FS on board controller compatible Vent Valve mod 969 9834
117. iecia zanieczyszczenia jej pytem 176 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Przygotowanie do instalacji Posta amp 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Posta 62 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 177 309 12 Podrecznik Instrukcji Instalacja Instalacja Usun ta m klej c i zdj korek zabezpieczaj cy dopiero w momencie po czenia pompy do systemu 178 309 Posta 63 To urz dznie nale y instalowa wy cznie w pomieszczeniach zamkni tych i w adnym przypadku nie wykorzystywa pompy w pomieszczeniach nara onych na oddzia ywanie czynnik w atmosferycznych deszcz mr z nieg py y gazy chemiczne w pomieszczeniach z atmosfer wybuchow lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 5 C do 35 C a wzgl dna wilgo 0 90 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Pompy turbomolekularnej TwisTorr 304 FS nale
118. ieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen geprift hat TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Mode d emploi Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 50 Fixation de la pompe 52 Utilisation de la TwisTorr 304 FS53 Entretien 55 Mise au rebut 56 Traduction de la mode d emploi originale v Agilent Technologies 43 311 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une Energie cin tigue lev e due a la grande vitesse de rotation associ e a la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait amp tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 44 309 TwisTorr 304 FS User Manual 87 901 027 01 A Mode d emploi 3 Indications generales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute util
119. igin ln ho n vodu RE Agilent Technologies 185 311 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v v vy Bezpe nostn n vod pro Turbomolekul rn v v vy Turbomolekul rn v v vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie 3372415188 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 186 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 V eobecn informace Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch TwisTorr 304 FS je turbomolekul rn v v va pro vysokovakuov a ultra vysokovakuov aplikace kter je schopna erpat jak koli druh nekorozivn ho p
120. inantes agresivos estas bombas est n dotadas de una puerta especifica de purge vent integrado mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno Helio o Arg n para proteger los rodamientos de la misma v ase el anexo Technical Information ATENCI N No utilizar en ning n caso la bomba en presencia de gases o vapores corrosivos que puedan da ar los materiales internos de la misma TwisTorr 304 FS User Manual 87 901 027 01 A 67 309 4 Manual de istrucciones Uso de la TwisTorr 304 FS Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos La bomba est dise ada para tener una alta transferencia de Nitr geno Arg n y gases m s livianos En caso de gue fuere necesario bombear gases m s pesados gue el Arg n se ruega contactar con la Asistencia T cnica de Agilent para solicitar informaci n 68 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Mantenimiento La TwisTorr 304 FS no requiere ning n mantenimiento Cualguier operaci n deber ser realizada por personal autorizado iADVERTENCIA Antes de realizar cualguier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta gue el rotor se pare completamente y esperar a gue la tem
121. ionamento da turbobomba est o contidas no manual da unidade de controlo Ler com muita atenc o este manual antes do uso Para alcancar melhores press es limite possivel aquecer o sistema Durante o eventual aquecimento da c mara de v cuo a temperatura na flange de ingresso n o deve ser superior a 120 C com flange ConFlat e a 80 C com flange ISO Use sempre o arrefecimento a gua durante as operac es de aguecimento Nunca activar a bomba se a flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com a flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as operac es de aguecimento A elevada temperatura pode causar les es s pessoas Evitar colis es oscilac es ou deslocamentos bruscos da turbobomba guando est a funcionar Os rolamentos poderiam sofrer danos Para a saida de ar da bomba utilizar ar ou g s inerte sem poeiras ou particulas A press o de entrada atraves da porta especifica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases gue cont m particulas ou poluidores agressivos estas bombas est o eguipadas com uma porta especifica de purga ventilac o integrada atrav s da qual necess rio fornecer bomba um fluxo de g s inerte nitrog nio h lio ou arg nio para proteger os rolamentos da bomba consultar o ap ndice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 81 309 5 Manual
122. isTorr 304 FS 125 Underh ll 127 Bortskaffning 128 vers ttning av originalinstruktionerna RE Agilent Technologies 115 311 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 116 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bruksanvisning 8 Allm n information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter TV 304 TwisTorr r en turbomolekyl rpump f r h ga och mycket h ga vakuumtill mpningar Systemet kan pumpa alla typer av gaser
123. isation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques La TwisTorr 304 FS est une pompe turbomol culaires pour des applications de vide pouss et ultrapouss en mesure de pomper n importe quel type de gaz ou de compos non corrosif Elles ne sont pas adapt es au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 60000 tr min maxi mue par un moteur lectrique triphas haut rendement Le TwisTorr 304 FS est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de appareillage Des renseignements plus d taill s se trouvent dans l appen dice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 45 309 3 Mode d emploi Indications g n rales Cette notice utilise les signes conventionnels suivants VALSSIA Les messages d avertissement attirent
124. isualizadas antes de proceder que se n o observadas poderiam causar danos aparelhagem As notas cont m informa es importantes estrapoladas pelo texto 74 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescric es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 40 C a 70 C humidade relativa de 0 a 90 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start 0 tempo maximo de armazenagem de uma bomba turbomolecular de 12 meses a contar da data da expedi o CUIDADO Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informa es contatar o representante local da Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 75 309 5 Manual de Istruc es Preparac o para a instalac o Preparac o para a instalac o O TwisTorr 304 FS fornecido numa embalagem protectora especial se esta apresentar sinais de danos gue poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado pa
125. jon Manual 9 Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m folgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke folgende miljoforhold overstiges Temperatur fra 40 C til 70 C Relativ fuktighet fra 0 til 90 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp fgrste gang Lagringstiden for en turbomolekyl r pumpe er 12 m neder fra sendedato dis laa Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon TwisTorr 304 FS User Manual 87 901 027 01 A 133 309 9 Instruksjon Manual Klargjore til installasjon Klargjore til installasjon FORSIKTIG TwisTorr 304 FS leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TwisTorr 304 FS pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for stgt Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 94 62 EF om emballasje og emballasjeavfall samt etterfolgende endringer For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og p
126. ka alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 12 m nader fr n leveransdatumet MATIN Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information TwisTorr 304 FS User Manual 87 901 027 01 A 119 309 8 Bruksanvisning F rberedelser f r installation F rberedelser f r installation OBSERVER Pumpen TwisTorr 304 FS levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TwisTorr 304 FS inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller direktiv 94 62 EG om milj skydd och f ljande ndringar Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder pga kontamineringsrisken Anv nd alltid handskar eller liknande skydd Normal p verkan fr n omgivningen kan inte skada TwisTorr 304 FS Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den 120 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bruksanvisning 8 F rberedelser f r installation
127. l NEBEZPE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Request for Return Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m 212 309 Pokia je potrebn system definit vne vyradi z prev dzky likvid cia mus prebehn v s lade so pecifick mi predpismi danej krajiny TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu EU s n zvom WEEE Tento symbol platn iba pre St ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho uZivatela aby sa skontaktoval s dod vatel om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja TwisTo
128. l EI usuario ha de leer atentamente el presente manual de instrucciones y cualguier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas La TV 304 TwisTorr es una bomba turbomolecular para aplicaciones de alto y ultra alto vac o capaz de bombear cualquier tipo de gas o compuesto gaseoso pero no es adecuada para bombear l guidos ni part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 60000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento La TwisTorr 304 FS no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones gue requieren un vacio limpio A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TwisTorr 304 FS User Manual 87 901 027 01 A 59 309 4 Manual de istrucciones Informaci n general Este manual utiliza las convenciones siguientes LLA TUN Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica gue al no realizarse correctamente
129. l Information 243 Description of the TwisTorr 304 FS 245 Technical Specification 252 TwisTorr 304 FS Outline 255 Interconnections 274 Soft Start 276 Inlet screen installation 277 Air Cooling Kit Installation 280 Water Cooling Kit Connection 282 Vent Accessories 285 Vibration Isolator Installation 289 Purge Valve Installation 290 TwisTorr 304 FS User Manual 87 901 027 01 A Contents TwisTorr 304 FS On board Controller Installation 292 Connection of the High Vacuum Flange 294 Connection of the Fore Vacuum Pump 298 Pump Used with Corrosive Gases299 Pump Used in Presence of Magnetic Fields 301 Accessories and Spare Parts 302 TwisTorr 304 FS User Manual 87 901 027 01 A 13 309 Contents 14 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per installazione 20 Installazione 22 Fissaggio della pompa 24 Uso della TwisTorr 304 FS 25 Manutenzione 27 Smaltimento 28 Traduzione delle istruzioni originali SEE Agilent Technologies 15 311 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata guantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa sp
130. l attention de l op rateur sur une procedure ou une manoeuvre sp ciale gui effectu e de facon impropre risgue de provoguer de graves l sions mailta Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement appareillage Les notes contiennent des renseignements importants isol s du texte 46 309 TwisTorr 304 FS User Manual 87 901 027 01 A Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes Turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 40 C 70 C humidit relative de 0 a 90 non condensante Ala premiere utilisation les pompes turbomol culaires doivent toujours tre mises en marche par le client en mode soft Start Le temps de stockage d une pompe turbomol culaire est de 12 mois a compter de la date d exp dition unfall En cas de d passement du temps de stockage pour toutes raisons la pompe doit tre retournee en usine Pour tout renseignement contacter le representant Agilent de zone TwisTorr 304 FS User Manual 87 901 027 01 A 47 309 3 Mode d emploi Pr paration pour l installation Pr paration pour l installation ATTENTION La pompe TwisTorr 304
131. l egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad 170 309 TwisTorr 304 FS User Manual 87 901 027 01 A Podrecznik Instrukcji 12 Megsemmisites 1 0 Podrecznik Instrukcji e i Wskaz wki dotyczace bezpieczeristwa dla Pomp Turbomolekularnych 172 Og lne Informacje 173 Magazynowanie 175 Przygotowanie do instalacji 176 Instalacja 178 Mocowanie pompy 180 U ytkowanie pompy TwisTorr 304 FS 181 Konserwacja 183 Przetworstwo odpadow 184 Ttumaczenie instrukcji oryginalnej TwisTorr 304 FS User Manual 87 901 027 01 A 171 309 12 Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych Wskaz wki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaj wysok ilo energii kinetycznej spowodowanej bardzo wysok pr dko ci obrotow razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE
132. lforselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det gdelagte systemet For systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Reguest for Return fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TwisTorr 304 FS User Manual 87 901 027 01 A 141 309 9 Instruksjon Manual Eliminering Eliminering Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverandgren av anordningen som kan veere et firma eller en forhandler som sgrger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten 142 309 TwisTorr 304 FS User Manual 87 901 027 01 A Twis
133. llisen lains d nn n vastaisesta k yt st TwisTorr 304 TV on turbomolekyylipumppu korkean ja ultrakorkean tyhji n k ytt varten joka kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasuyhdisteit mutta ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 60000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TwisTorr 304 FS j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 145 309 10 Ohjekasikirja Yleisi tietoja T m k sikirja k ytt seuraavanlaisia merkint j TANIA Varoitus merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen Huomiot sis lt v t t rke tekstist otettua tietoa 146 309 TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pump
134. luation fee will be invoiced o Products returned that have not been drained from oil will be disposed o A Special Cleaning fee will apply to all exposed products o If reguesting a calibration service units must be functionally capable of being calibrated Page 2 of 3 Agilent VPD Request for Return Agilent Technologies Vacuum Products Division Reguest for Return Form Customer information Company Contact Name Address Tel Email Eguipment Product description Agilent PartNo Agilent Serial No Original Purchasing Reference Failure description Type of process for which the eguipment was used Type of return CI Non Billable Billable New PO hard copy must be submitted with this form Exchange I Repair 1 Upgrade Demo O Calibration Evaluation Return for Credit Health and safety Substances please refer to MSDS forms Agilent will not accept delivery of any product that is exposed to radioactive biological The product has been exposed to the following substances explosive substances or dioxins PCB s without written evidence of decontamination by selecting VES pan MUST complete Wo table uo the rignt Trade name Chemical name Chemical Symbol CAS Number Toxic ves Harmful ves Corrosive ves Reactive O YES Flammable ves Explosive Ll ves Radioactive Ll ves Biological Ll ves Oxidizing Ll
135. lynu nebo plynn slou eniny ale nehod se pro erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 60000 ot min poh n n vysoce v konn m trojf zov m elektromotorem V v va TwisTorr 304 FS neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 187 309 13 N vod k Pou it V eobecn informace Tento manu l pou v n sleduj c standardn protokol 31711918 Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz POZOR V stra n hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Pozn mky obsahuj d le it informace p evzat z textu 188 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod k Pou it 13 Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr ovat n sleduj c pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky
136. m rundt aksen ISO K flensen kan festes ved bruke ekstra resistente st lklemmer som Agilent modell IC 63250 DCMZ Folgende tabell viser det ngdvendige antallet klemmer av typen IC63250DCMZ for hver flensst rrelse samt dreiemomentet for stramme dem Tab 2 FLENS TYPE KLEMME ANT STRAMME MOMENT ISO 100 K Dobbel klemme gjenge M10 4 22 Nm ISO 160 K Dobbel klemme gjenge M10 4 22 Nm Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Technical Information TwisTorr 304 FS kan monteres i en valgfri stilling TwisTorr 304 FS m ikke festes gjennom fundamentet 138 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instruksjon Manual 9 Bruk av TwisTorr 304 FS Anvisningene for korrekt bruk av turbopumpen er beskrevet i styreenhetens bruksanvisning Les ngye denne manualen for du bruker pumpen For forbedre grensetrykket er det mulig varme opp pumpen Mens oppvarmingen av vakuumkammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C for en ConFlat flens og 80 C for en ISO flens Man m alltid bruke vannkjeling under oppvarmingsoperasjonene Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De hoye temperaturene kan fore til brannskader
137. mation f ggel kben TwisTorr 304 FS User Manual 87 901 027 01 A 159 309 11 Felhaszn l i K zik nyv ltal nos inform ic Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VESZ LY A vesz lyt zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet dleddidii A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak 160 309 TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i Kezik nyv 11 T rol s A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartom ny 40 C 70 C relativ p ratartalom 0 90 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti ket Egy turbomolekul ris szivatty rakt roz si ideje 12 h nap a sz ll t s d tum t l sz m tva FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt
138. mningen f r att undvika br nnskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fr n damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf riska trycket F r pumpning av gaser inneh llande partiklar eller aggressiva f rorenande medel r dessa pumpar f rsedda med en speciell ppning integrerad rensning ventilation igenom vilken man ska leda en str m av delgas kv ve helium eller argon f r att skydda pumpens lager se bilagan Technical information TwisTorr 304 FS User Manual 87 901 027 01 A 125 309 8 Bruksanvisning Anv ndning av TwisTorr 304 FS Nd Anv ndn aldrig pumpen om det finns fr tande gas eller ngor som kan skada materialen inuti pumpen VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Pumpen skyddas f r att f en h g verf ring av kv ve argon och l ttare gaser Om tyngre gas r argon m ste pumpas kontakta Agilens tekniska support f r information 126 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bruksanvisning 8 Underh ll TwisTorr 304 FS kr ver inget som helst underh ll Allt servicearbete m ste ut
139. mppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu hiukkasia tai saasteita sis lt vien aggressiivisten kaasujen pumppausta varten aukolla integroitu purge vent jonka l pi pumppuun kuljetetaan jalokaasuja typpi helium tai argon laakereiden suojaamiseksi katso Technical Information liite HUOMIO lk koskaan k ytt k pumppua jos paikalla on sy vytt vi kaasuja tai h yryj jotka voivat vahingoittaa pumpun sis ll olevia materiaaleja TwisTorr 304 FS User Manual 87 901 027 01 A 153 309 10 Ohjek sikirja TwisTorr 304 FS k ytt Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell Pumppu on suunniteltu typen argonin tai kevyempien kaasujen pumppaamiseen Mik li argoniin n hden painavampia kaasuja joudutaan pumppaamaan ottakaa yhteytt Agilentin tekniseen huoltoon lis tietoja varten
140. n De TwisTorr 304 FS kan in alle standen worden geinstalleerd Bevestig de TwisTorr 304 FS in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een koppel van 1000 Nm rondom de eigen as kan verdragen De flens ISO K kan bijvoorbeeld worden bevestigd met stalen klemmetjes met grote weerstand zoals model Agilent IC 63250 DCM2 De volgende tabel geeft het benodigde aantal klemmetjes en het juiste aandraaimoment Tab 2 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm ISO 160 K Dubbele klem met M10 schroefdraad 4 22 Nm De turbompomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical Information De TwisTorr 304 FS kan niet met behulp van zijn eigen basis worden bevestigd 94 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 Gebruik van de TwisTorr 304 FS Alle instructies voor de correcte werking van de turbopomp staan in de handleiding van de controle eenheid Lees de handleiding aandachtig alvorens de pomp in gebruik te nemen Om een betere limietdruk te bereiken kan het systeem verwarmd worden Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer bedragen dan 120 C met ConFlat flens en niet meer dan 80 C met ISO flens
141. ndities worden voldaan temperatuur van 40 C tot 70 C relatieve vochtigheid van 0 tot 90 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 12 maanden vanaf de verzenddatum al Vale tite Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 89 309 6 Bedrijfshandleiding Uitpakken Uitpakken OORZICHTIG De TwisTorr 304 FS wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TwisTorr 304 FS niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 94 62 CE en daaropvolgende wijzigingen Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming De TwisTor
142. nistra en un embalaje especial de protecci n si se observan dafios que podrian haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga La TwisTorr 304 FS y de no someterla a golpes o vibraciones No abandonar el embalaje en el medio ambiente EI material es completamente reciclable y cumple con la directiva para la preservaci n del medio ambiente 94 62 CE y modificaciones siguientes Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada La TwisTorr 304 FS no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta gue se instale en el sistema para evitar su posible contaminaci n por polvo 62 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Preparaci n para la instalaci n Figura 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figura2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 63 309 4 Manual de istrucciones Instalaci n Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema 64 309 za saa J 3 o le
143. nsultar Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 79 309 5 Manual de Istruc es Fixac o da bomba Fixac o da bomba ATENCAO A n o observ ncia destas instruc es de instalac o no caso de haver uma avaria do rotor pode provocar a desconex o da bomba do sistema causando danos ferimentos graves ou morte O TwisTorr 304 FS pode ser instalado em gualguer posic o Fixar o TwisTorr 304 FS em posic o est vel ligando o flange de entrada da turbobomba ao contraflange do sistema com uma conex o capaz de resistir a um torgue de 1000 Nm ao redor do pr prio eixo O flange ISO K pode ser fixado com grampos de aco de alta resist ncia como o modelo Agilent IC 63250 DCMZ A tabela seguinte descreve para gualguer dimens o de flange o n mero de grampos IC 63250 DCMZ necess rios e o torgue de aperto a utilizar Tab 2 FLANGE TIPO DE BORNE N TOROUE DE APERTO ISO 100 K Borne duplo com rosca M10 4 22 Nm ISO 100 K Borne duplo com rosca M10 4 22 Nm A turbobomba com flange de entrada ConFlat deve ser fixada na c mara de v cuo atrav s de parafusos espec ficos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information O TwisTorr 304 FS n o pode ser fixado atraves da sua base 80 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Utilizac o do TwisTorr 304 FS Todas as instruc es para o correcto func
144. om not allowed fastening Installation of ISO K Flange For ISO K flange connections fix the two flanges with the clamps as shown in the following figure a protective screen can optionally be used TwisTorr 304 FS User Manual 87 901 027 01 A 295 309 17 Technical Information Connection of the High Vacuum Flange Figure 54 Use the reguired number of claw clamps a 4 for ISO 100 flange 4 for ISO 160 flange Tighten the claw clamps with a torque of 22 Nm Installation of ConFlat Flange For ConFlat flange connections fix the two flanges with the screws as shown in the following figures a protective screen can optionally be used 296 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Figure 55 Use the reguired number of screws 16 for CFF 6 20 for CFF 8 Attach the units and tighten each screw in turn Repeat the sequential tightening until the flange faces meet Tighten the screws with a torque of 20 Nm For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Felpro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that in some cases the connections can be made only with the bolt in the lower side Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the
145. on la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone agaia a Evitare urti oscillazioni o bruschi spostamenti della pompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas contenenti particolato o inquinanti aggressivi per i cuscinetti queste pompe sono dotate di una apposita porta di purge vent integrato attraverso la quale necessario fornire alla pompa un flusso di gas inerte Azoto Elio o Argon per proteggere i cuscinetti della pompa vedere l appendice Technical Information egg dpd 014 Non usare mai la pompa in presenza di gas o vapori corrosivi che possano danneggiare i materiali interni alla pompa TwisTorr 304 FS User Manual 87 901 027 01 A 25 309 1 Istruzioni per uso Uso della TwisTorr 304 FS Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi La pompa progettata per avere un alto trasferimento di Azoto Argon e gas pi leggeri Nel caso in cui ci fosse la necessit di pompare gas pi pesanti d
146. onFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TwisTorr 304 FS cannot be fixed by means of its base 238 309 TwisTorr 304 FS User Manual 87 901 027 01 A Instructions for Use 16 Use of TwisTorr 304 FS All the instructions to correctly use the turbopump are contained in the controller manual Read carefully this manual before use the pump To obtain better limit pressures it is possible to heat the pump While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C for a ConFlat flange and 80 C for a ISO flange While heating always use the water cooling Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping gases containing particulate or aggressive pollutants for the bearings these pumps are fitted with a special port integrated purge vent device to allow a steady flow of inert gas He N2 Ar for pump bearing protection see the annex T
147. ormationen 31 Lagerung 33 Vor der Installation 34 Installation 36 Befestigung der Pumpe 38 Verwendung TwisTorr 304 FS 39 Wartung 41 TwisTorr 304 FS User Manual 87 901 027 01 A 5 309 Contents 6 309 Entsorgung 42 Mode d emploi 43 Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 50 Fixation de la pompe52 Utilisation de la TwisTorr 304 FS 53 Entretien 55 Mise au rebut 56 Manual de istrucciones 57 Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 59 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 64 Fijaci n de la bomba 66 Uso de la TwisTorr 304 FS 67 Mantenimiento 69 Eliminaci n 70 TwisTorr 304 FS User Manual 87 901 027 01 A Contents 5 Manual de Istruc es 71 Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 73 Armazenagem 75 Preparac o para a instalac o 76 Instalac o 78 Fixac o dabomba 80 Utiliza o do TwisTorr 304 FS 81 Manutenc o 83 Eliminac o 84 6 Bedrijfshandleiding 85 Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 87 Opslag 89 Uitpakken 90 Installatie 92 Bevestiging van depomp 94 Gebruik van de TwisTorr 304 FS 95 Onderhoud 97 Afvalverwerking 98 7 Istruktionsbog 99 Sikkerhedsanvisninger for Molekyl re turbopumper 101 TwisTorr 304 FS User Manual 87 901 027 0
148. osieve gassen De pomp is ontworpen voor een hoge overdracht van Stikstof Argon en lichtere gassen Indien het nodig mocht zijn zwaardere gassen te pompen dan Argon neem dan contact op met de Technische Dienst van Agilent voor meer informatie 96 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 Onderhoud De pompen TwisTorr 304 FS zijn onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de voeding loskoppelen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Reguest for Return volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij het systeem in de verpakking worden gevoegd Mocht een systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TwisTorr 304 FS User Manual 87 901 027 01 A 97 309 6 Bedrijfshandleiding Afvalverwerking Afvalverw
149. peratura superficial de la bomba sea inferior a 50 C En caso de averia se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service gue permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Request for Return adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de gue un sistema se tenga gue desguazar eliminarla respetando las normas nacionales espec ficas TwisTorr 304 FS User Manual 87 901 027 01 A 69 309 4 Manual de istrucciones Eliminaci n Eliminaci n 70 309 Significado del logotipo WEEE presente en las etiguetas EI simbolo gue se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo v lido s lo para los paises miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y gue por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder prove
150. podria provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto 60 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 40 C y 70 C humedad relativa entre 0 y 90 no condensante a el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el periodo m ximo de almacenamiento de una bomba turbomolecular es de 12 meses a contar de la fecha de envio al cliente iATENCI N En caso de superarse por cualquier motivo el periodo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 61 309 4 Manual de istrucciones Preparaci n para la instalaci n Preparaci n para la instalaci n ATENCI N La TwisTorr 304 FS se sumi
151. problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action reguest form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adeguate or timely manner Upon receipt of your Corrective Action Reguest we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Es Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REOUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO OUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS
152. pu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 40 C 70 C suhteellinen kosteus O 90 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 12 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta TwisTorr 304 FS User Manual 87 901 027 01 A 147 309 10 Ohjek sikirja Valmistelut asennusta varten Valmistelut asennusta varten TwisTorr 304 FS pumppu toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TwisTorr 304 FS in putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 94 62 EY ymp rist n suojelusta ja seuraavia muutoksia Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta TwisTorr 3
153. pump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system Turn off the Turbopump 4 Open the Turbo vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo pump with the chamber or the Turbo vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TwisTorr 304 FS User Manual 87 901 027 01 A 299 309 17 Technical Information Pump Used with Corrosive Gases Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump NES N a Vent valve Figure 56 Purge layout 300 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Pump Used in Presence of Magnetic Fi
154. r 304 FS kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 90 309 TwisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 Uitpakken Figuur 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figuur 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 91 309 6 Bedrijfshandleiding Installatie Installatie OORZICHTIG Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden 92 309 Figuur 3 Installeer dit apparaat alleen in afgesloten ruimten In geen geval mag de pomp niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn a max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C relatieve vochtigheid 0 90 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie T
155. r la turbopompe au syst me 50 309 Figure 3 Installer cet appareil dans un endroit clos et ne jamais installer et ou utiliser la pompe dans un endroit expos aux agents atmosph rigues pluie gel neige a la poussi re a des gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 35 C a humidit relative 0 90 non condensante En pr sence de champs magn tiques la pompe doit tre prot g e a l aide d crans appropri s Pour tout autre renseignement se reporter a l opuscule Technical Information La pompe TwisTorr 304 FS doit amp tre utilis es uniquement avec un des contr leurs pr vus Agilent et doivent amp tre reli es a une pompe primaire voir le sch ma en annexe Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A Mode d emploi 3 Les contr leurs disponibles sont les suivants Tab 1 CONTR LEUR N DE REF DESIGNATION Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24V dc 24V Cont
156. ra n o deixar cair o TwisTorr 304 FS e para n o submet la a chogues ou vibrac es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma para a protecc o do meio ambiente 94 62 CE e modificac es sucessivas Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposic o do v cuo Utilizar sempre luvas ou outra protecc o adeguada O TwisTorr 304 FS n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p 76 309 TwisTorr 304 FS User Manual 87 901 027 01 A Manual de Istruc es 5 Preparac o para a instalac o Figura 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Figura2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 71 309 5 Manual de Istruc es Instalac o Instalac o CUIDADO Remover a etigueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 78 309 Figura 3 Instalar este aparelho somente em ambientes fechados e nunca usar a bomba em ambientes expostos a agentes atmosfericos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc n
157. roller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V Faite Le TwisTorr 304 FS appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif a une ligne d alimentation compatible avec cette cat gorie Pour l installation des accessoires en option se reporter Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 51 309 3 Mode d emploi Fixation de la pompe Fixation de la pompe TNA KIV E En cas de panne du rotor tout manquement au respect de ces instructions comporte des risgues de d crochage de la pompe du syst me pouvant entrainer des dommages des blessures graves ou la mort Le TwisTorr 304 FS peut amp tre install e dans n importe quelle position Fixer le TwisTorr 304 FS dans une position stable en reliant la bride d entr e de la turbopompe une contre bride fixe pouvant supporter un couple de serrage de 1000 Nm autour de son axe Le flasgue ISO K peut tre fix a l aide d triers en acier haute r sistance comme le mod le Agilent IC 63250 DCMZ Le tableau suivant indigue pour chague dimension de flasgue le nombre de brides IC 63250 DCMZ n cessaires et le couple de fixation correspondant Tab 2 BRIDE TYPE DE COLLIER N COUPLE DE SERRAGE ISO 100 K Collier double filetage M10 4 22 Nm ISO 160 K Collier double filetage M10 4 22 Nm La turbopompe brid
158. rr 304 FS Pumping speed Side Port l s w 1 E 03 1 E 02 1 E 01 Inlet pressure mbar 1 E 00 Figure 29 Split Flow X3500 64010 Graph of Pumping Speed Side Port KF4 TwisTorr 304 FS User Manual 87 901 027 01 A 271 309 17 Technical Information TwisTorr 304 FS Outline 1E 12 LEIL memmen W LE 10 1 E 09 1 E 08 15 07 me amma i i L 2 H2 a 1 E 06 He E N2 S 1505 Ar 1E 04 1 E 03 1 E 02 1 E 01 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1E 01 1 E400 1E 01 1 E 02 Foreline pressure mbar Figure 30 Split Flow X3500 64010 Graph of Compression Ratio Total 272 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 TwisTorr 304 FS Outline 1E 06 1 E 05 1 E 04 1 E 03 Compression Ratio Side Port 1E 02 1 E 01 LE 0O n o 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 1 E 01 1 E 02 Foreline pressure mbar Figure 31 Split Flow X3500 64010 Graph of Compression Ratio Foreline Side port TwisTorr 304 FS User Manual 87 901 027 01 A 273 309 17 Technical Information Interconnections Interconnections 274 309 The following figure shows the TwisTorr 304 FS interconnections EARTH GROUND zal y f N FORELINE CONTROLLER
159. rr 304 FS User Manual 87 901 027 01 A 213 309 14 N vod na Obsluhu Likvid cia 214 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual 15 Prirocnik za Navodila Varnostna navodila za Turbomolekularne rpalke 216 Splo ne informacije 217 Shranjevanje 218 Priprava za monta o 219 Monta a 221 Pritrditev rpalke 223 Uporaba rpalke TwisTorr 304 FS 224 Vzdr evanje 226 Odlaganje opadkov 227 Prevod navodil v izvirniku RE Agilent Technologies 215 311 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 216 309 TwisTorr 304 FS User Manual 87 901 027 01 A Priro amp nik za Navodila 15 Splo ne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil
160. rsyne pumpen med delgasser kv lstof helium eller argon for at beskytte pumpens lejer se bilaget Technical Information FORSIGTIG Anvend aldrig pumpen ved tilstedev relse af tsende gasser eller dampe som kan skade pumpens indvendige materialer 110 309 TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser folges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Pumpen er konstrueret til at have en hoj overforsel af kvaelstof argon og lettere gasser S fremt der er behov for at pumpe gasser som er tungere end argon skal man kontakte den tekniske kundeservice hos Agilent for yderligere oplysninger TwisTorr 304 FS User Manual 87 901 027 01 A 111 309 7 Istruktionsbog Vedligeholdelse Vedligeholdelse Pumpen TwisTorr 304 FS kraver ikke nogen form for vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale ADVARSEL Inden der foretages noget som helst indgreb p systemet skal strommen forst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsveerksted eller Agilent advanced exchange service der udskifter systemet med et repareret system Inden pumpen
161. s informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contr rio as normas nacionais especificas As bombas TwisTorr TV 304 s o bombas turbomoleculares para aplicac es de alto e ultra alto v cuo capazes de bombear qualquer tipo de g s ou de composto gasoso mas n o s o adeguadas para aspirar liguidos ou particulas s lidas O efeito da bomba 6 obtido atrav s de uma turbina rotativa de alta velocidade 60000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TwisTorr 304 FS 6 totalmente isentos de agentes contaminadores e portanto 6 adeguado para aplicac es gue reguerem um v cuo limpo Nos seguintes par grafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas s o fornecidas no ap ndice Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 73 309 5 Manual de Istruc es Informac es gerais Este manual utiliza as seguintes convenc es ALUN As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica espec fica que se n o executada de modo correto poderiam provocar graves les es pessoais CUIDADO As mensagens de cuidado s o v
162. sendes til konstruktgrens reparationsv rksted eller advanced exchange service skal Reguest for Return der er vedlagt denne instruktionsmanual udfyldes og sendes til den lokale forhandler En kopi af dette dokument skal indsattes i systemets emballage inden afsendelse 112 309 Skrotning af et system skal foreg i overensstemmelse med det p geeldende lands seerlige love TwisTorr 304 FS User Manual 87 901 027 01 A Istruktionsbog 7 Bortskaffelse Betydningen af WEEE logoet p meerkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun geeldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter ngje at have kontrolleret betingelserne i salgskontrakten TwisTorr 304 FS User Manual 87 901 027 01 A 113 309 7 Istruktionsbog Bortskaffelse 114 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 116 Allman information 117 F rvaring 119 F rberedelser f r installation 120 Installation 122 Fasts ttning av pumpen 124 Anv ndning av Tw
163. skaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 172 Og lne Informacje 173 Magazynowanie 175 Przygotowanie do instalacji 176 Instalacja 178 Mocowanie pompy 180 U ytkowanie pompy TwisTorr 304 FS 181 Konserwacja 183 Przetworstwo odpadow 184 N vod k Pouziti 185 Bezpe nostn n vod pro Turbomolekul rn v v vy 186 V eobecn informace 187 Uskladn n 189 P prava k instalaci 190 Instalace 192 Upevn n vyv vy 194 Pou it v v vy TwisTorr304FS 195 TwisTorr 304 FS User Manual 87 901 027 01 A Contents dr ba 197 Likvidace 198 14 N vod na Obsluhu 199 Bezpe nostn n vod pre Turbomolekul rne v vevy 201 V eobecn inform cie 202 Uchov vanie 204 Pr prava na in tal ciu 205 In tal cia 207 Upevnenie vyvevy 209 Pou itie v vevy TwisTorr 304 FS 210 dr ba 212 Likvid cia 213 15 Priro amp nik za Navodila 215 Varnostna navodila za Turbomolekularne rpalke 216 Splo ne informacije 217 Shranjevanje 218 Priprava za monta o 219 Monta a 221 Pritrditev rpalke 223 Uporaba rpalke TwisTorr 304 FS 224 Vzdr evanje 226 Odlaganje opadkov 227 TwisTorr 304 FS User Manual 87 901 027 01 A 11 309 Contents 12 309 16 Instructions for Use 229 Safety Guideline for Turbomolecular Pumps 230 General Information 231 Storage 233 Preparation for installation 234 Installation 236 Pump Fixing 238 Use of TwisTorr 304 FS 239 Maintenance 241 Disposal 242 17 Technica
164. stalaippaan liit nn ll joka kest 1000 Nm n momentin akselinsa ymp ri Laippa ISO K voidaan kiinnitt suurta rasitusta kest vill ter spuristimilla tyyppi Agilent IC 63250 DCMZ Seuraavassa taulukossa on lueteltu jokaista laippakokoa kohti tarvittavien puristinten IC63250DCMZ lukum r sek momentti johon puristimet kiristet n Tab 2 LAIPPA KIINNIKE MAA RA KIRISTYS MOMENTTI ISO 100K Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 160 K Kaksoiskiinnike kierteitys M10 4 22 Nm Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TwisTorr 304 FSia ei voida kiinnitt perustansa kautta 152 309 TwisTorr 304 FS User Manual 87 901 027 01 A Ohjek sikirja 10 TwisTorr 304 FS k ytt Kaikki turbopumpun oikeaan toimintaan liittyv t ohjeet l yd t valvontayksik n k ytt oppaasta Lue t m k ytt opas huolellisesti ennen k yt n aloittamista Voit saavuttaa parhaat rajapaineet l mmitt m ll j rjestelm n Tyhji kammion mahdollisen l mmitt misen yhteydess imulaipan l mp tilan ei tule nousta 120 C yl puolelle ConFlat laipoituksella ja 80 C yl puolelle ISO laipoituksella K yt vesij hdytyst aina l mmitystoimenpiteiden aikana VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pu
165. syst movej poruchy napr pri kontakte rotora a statora alebo pri zlomen rotora sa mo e uvolni rota n energia 4 74 4H MW Pokyny k in tal cii uveden v tomto n vode musia by dosledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy TwisTorr 304 FS User Manual 87 901 027 01 A 201 309 14 N vod na Obsluhu V eobecn inform cie V eobecn inform cie Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednost za ak kolvek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s tymito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny TwisTorr 304 FS je turbomolekul rna v veva pre vysokov kuov a ultra vysokov kuov aplik cie ktor je schopn erpa ak ko vek druh nekoroz vneho plynu alebo plynn zl eniny ale nehod sa na erpanie tekut n alebo pevn ch ast c Vy erp vanie zabezpe uje ve mi r chla turb na max 60000 ot ok min tu poh an vysokov konn m 3 f zovym elektrick m motorom V veva TwisTorr 304 FS neobsahuje iadne kontamina n inidl a preto sa hod
166. t please use the packaging from the Advance Exchange to return the defective product o Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit o Include a copy of the Health and Safety Declaration in the shipping documentation on the outside of the shipping box of your returning product o Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned o Return only products for which the RA was issued Shipping o Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the reguired information Customer is responsible for freight charges on returning product o Return shipments must comply with all applicable Shipping Regulations IATA DOT ADR etc and carrier reguirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1781 860 9252 Please visit our website for Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 individual office information vpt customercare agilent com vpl ra agilent com http www agilent com Page 1 of 3 Agilent VPD Request for Return
167. t moment de ska dras t Tab 2 FL NS TYP AV KLAMMER ANT ATDRAGNINGS MOMENT ISO 100K Dubbel klammer med g nga M10 4 22 Nm ISO 160 K Dubbel klammer med g nga M10 4 22 Nm Turbopumparna med intagsfl ns ConFlat ska f stas till vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TwisTorr 304 FS systemet kan inte fastsp nnas med sin egen bas 124 309 AAA Turbo V 81 M TwisTorr 304 FS tillh r en andra installationsklass eller versp nning som f rutses av standarden SS EN 61010 1 Anslut d rf r anordningen till ett f rs rjningsn t som uppfyller kraven f r den h r klasssen TwisTorr 304 FS User Manual 87 901 027 01 A Bruksanvisning 8 Anv ndning av TwisTorr 304 FS OBSERVER Alla instruktioner f r en optimal prestanda och drifts kerhet av turbopumparna finns i kontrollenhetens bruksanvisning Instruktionsboken b r l sas mycket noggrannt innan anv ndning F r att uppn h gre tryckniv er kan systemet v rmas upp Under en eventuell uppv rmning av vakuumkammaren b r ej temperaturen p intagningsfl nsen verstiga 120 C med ConFlat fl ns och 80 C med ISO fl ns Anv nd alltid vattenkylning under uppv rmningsf rloppen S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv r
168. t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise TwisTorr 304 FS User Manual 87 901 027 01 A Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und MifSachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung TwisTorr 304 FS ist eine Turbomolekularpumpe f r Hoch und H chstvakuumanwendungen die jede beliebige Art von Gasen oder gasf rmigen Gemischen pumpen k nnen Sie sind nicht f r das Pumpen von Fl ssigkeiten oder Festk rperpartikeln geeignet Die Pumpwirkung wird durch eine hochtourige Turbine max 60000 1 min erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird Modell TwisTorr 304 FS enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten
169. use of up to 20 of Ethyl Glycole is suggested 284 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TwisTorr 304 FS on board controller compatible Vent Valve mod 969 9834 Figure 44 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the controller software optional To install the vent valve unscrew the threaded plug see figure below TwisTorr 304 FS User Manual 87 901 027 01 A 285 309 17 Technical Information Vent Accessories Figure 45 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torgue of 2 5 Nm Figure 46 286 309 TwisTorr 304 FS User Manual 87 901 027 01 A Technical Information 17 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller TwisTorr 304 AG Rack Controller Compatible Vent Valve mod 969 9844 CONNECT TO PIN 2 it PIN 4 PIN 1 Figure 47 For further details refers to the Rack Controller manual To install the vent valve unscrew and remove the threaded plug see figure below Twis
170. vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis 204 309 TwisTorr 304 FS User Manual 87 901 027 01 A N vod na Obsluhu 14 Priprava na in tal ciu V veva TwisTorr 304 FS sa dod va v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Pri vybal ovani d vajte pozor aby v veva TwisTorr 304 FS nespadla a chr te ju pred n hodn mi n razmi otrasmi alebo vibr ciami Obalov materi l zlikvidujte predpisanym sp sobom Materi l je 100 recyklovate n a sp a po iadavky smernice 94 62 ES v zmysle n sledn ch prav POZOR Ak chcete predist probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo inu vhodn ochranu V vevu TwisTorr 304 FS nie je mo n po kodi jednoduch m vystaven m atmosferickym vplyvom Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom TwisTorr 304 FS User Manual 87 901 027 01 A 205 309 14 N vod na Obsluhu Priprava na in tal ciu Obr zok 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Obr zok2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 206 309 TwisTorr 304 FS User Manual 87 901 027
171. wania danej pompy turbomolekularnej wynosi 12 miesi cy od daty wysy ki Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a pomp do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem firmy Agilent TwisTorr 304 FS User Manual 87 901 027 01 A 175 309 12 Podrecznik Instrukcji Przygotowanie do instalacji Przygotowanie do instalacji Ponpa TwisTorr 304 FS jest dostarczana w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie upu ci pompy TwisTorr 304 FS i zabezpieczy j przed uderzeniami i wibracjami Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu i jest zgodny z dyrektyw dotycz c ochrony rodowiska w sprawie opakowa i materia w opakowaniowych 94 62 WE wraz kolejnymi zmianami UWAGA Aby unikna problem w odgazowywania nalezy nie dotyka gotymi rekoma czesci przeznaczonych do wytwarzania pr zni Nalezy zawsze stosowa odpowiednie rekawice ochronne lub odpowiednie zabezpieczenie Pompa TwisTorr 304 FS nie mo e zosta uszkodzona poprzez wystawienie jej na dziatanie atmosfery Mimo to zaleca sie aby pompa do momentu jej instalacji na systemie pozostata zamknieta w celu unikn
172. wisTorr 304 FS User Manual 87 901 027 01 A Bedrijfshandleiding 6 De turbomoleculaire pompen TwisTorr 304 FS moeten uitsluitend met een van de speciale controllers van Agilent gebruikt worden en op een primaire pomp aangesloten worden zie schema in de bijlage Technical Information De beschikbare controllers zijn de volgende Tab 1 CONTROLLERS ONDERDEELNUMMER PRODUCTNAAM Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V ode jie De TwisTorr 304 FS behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TwisTorr 304 FS User Manual 87 901 027 01 A 93 309 6 Bedrijfshandleiding Bevestiging van de pomp Bevestiging van de pomp ASS HINTA Indien deze instructies voor de installatie niet nageleefd worden en zich een defect van de rotor voordoet kan de pomp loskomen van het systeem en schade ernstige letsels of de dood veroorzake
173. za alla direttiva CE denominata WEEE Ouesto simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 28 309 TwisTorr 304 FS User Manual 87 901 027 01 A TwisTorr 304 FS User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine 31 Lagerung 33 Vor der Installation 34 Installation 36 Befestigung der Pumpe 38 Verwendung TwisTorr 304 FS 39 Wartung 41 Entsorgung 42 bersetzung der Originalanleitungen RE Agilent Technologies 29 311 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Sicherheitshinweise f r Turbomolekularpumpen 30 309 Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden Um Sch den am Ger
174. zgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd reszekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a legk ri nyom s f l tt A partikul tumot vagy agressz v szennyez d st tartalmaz g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal integr lt purge vent amelyen kereszt l a szivatty csap gyainak v delm re k z mb s g zt pl nitrogen h lium argon kell bevezetni l sd Technical Information f ggel k TwisTorr 304 FS User Manual 87 901 027 01 A 167 309 11 Felhaszn l i K zik nyv A TwisTorr 304 FS haszn lata TATIRAITIN Soha ne haszn lja a szivatty t olyan mar g zok vagy g z k jelenl t ben amelyek a szivatty belsej ben l v anyagokat k ros thatj k Amikor a szivatty t m rgez t zvesz lyes vagy radioakt v g zok szivatty z s ra haszn lja k vesse az egyes g zok kezel s re vonatkoz elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben A szivatty t gy tervez tk hogy nitrog n argon s m s k nnyebb g zok j tvitel t biztos tsa Amennyiben az argonn l nehezebb g zok szivatty z s ra lenne sz ks g k rj k forduljon az Agilent gyf lszolg lat hoz t j koztat s v gett 168 309 TwisTorr 304 FS User Manual 87 901 027 01 A Felhaszn l i
175. zusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TwisTorr 304 FS User Manual 87 901 027 01 A 33 309 2 Gebrauchsanleitung Vor der Installation Vor der Installation Die Pumpe TwisTorr 304 FS wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Die TwisTorr 304 FS ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Umweltschutzrichtlinie 94 62 EWG und deren sp teren Anpassungen VORSICHT Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Die TwisTorr 304 FS kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 34 309 TwisTorr 304 FS User Manual 87 901 027 01 A Gebrauchsanleitung 2 Vor der Installation Abbildung 1 X3500 64000 X3500 64002 X3500 64004 X3500 64006 X3500 64010 Abbildung 2 X3500 64001 X3500 64003 X3500 64005 X3500 64007 TwisTorr 304 FS User Manual 87 901 027 01 A 35 309 2 Gebrauchsanleitung
176. zy u ywa wylacznie wraz ze specjalnym kontrolerem Agilent i nale y ja podtaczy do pompy gt wnej patrz schemat w zataczniku Technical Information Kontrolery bedace w dyspozycji sa nastepujace Tab 1 KONTROLER NR CZESCI NAZWA WYROBU Controller AG Rack base X3506 64001 TwisTorr 304 FS AG Rack Controller AG Rack with X3506 64002 TwisTorr 304 FS AG Rack RS232 485 RS232 485 Controller AG Rack with X3506 64003 TwisTorr 304 FS AG Rack RS232 485 amp Profibus Profibus Controller V304 onboard X3507 64002 TwisTorr 304 FS onboard 24Vdc 24V Controller V304 onboard 100 X3507 64003 TwisTorr 304 FS onboard 240Vac 110 220V UWAGA Pompa TwisTorr 304 FS nale y do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norm EN 61010 1 Dlatego te nale y pod czy urz dzenie do linii zasilania kt ra spe nia te wymogi Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information TwisTorr 304 FS User Manual 87 901 027 01 A 179 309 12 Podrecznik Instrukcji Mocowanie pompy Mocowanie pompy ZAGROZENIE Nieprzestrzeganie tych instrukcji dotycz cych instalacji mo e w przypadku powstania usterki wirnika spowodowa od czenie si pompy od systemu a w konsekwencji doprowadzi do uszkodze sprz tu obra e cielesnych os b a nawet mierci Pompa TwisTorr 304 FS mo e by zainstalowana w jakiejkolwiek pozycji Pomp TwisTorr 3

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