半導体用静電気試験器 ESS-606A 取扱説明書の
Contents
1. s LED kV PE V CS ON TITI LED 1 OF H GH VOLTAGE l l CF TI LON HH LED 5 e EMK 90 ON CFF POLARITY RANE MEASURE 1111 LED RANGE IIT D UIII LED Bb 2 7 CPERATI NG MDE 01 VTS INTERAL Dap PALBE IB m LED NTERVAL 1 x LED DO N UP RESET START 7 OSG 11 LED f PALBE LED ZE J i START E i M RESET 11111 00000000 IU LED 000 1070 05 5585 0O 5 RT RE AN 31 0 RARE AS CO WERE 00000000000000000000000 000 000000000000V00 LEDO kv 0 0 00000 70 0000000000000000000 V LED ste Une PE ere eens vers seawall 00000 1 11 1 1 VI 00000000000000 Goo 710 000 kV LED a EE EE DOG LEDOOOOOOOOOODODOD kV 000000000000000000 000 1 0kVO 0000 7 LED 00 e UDUUUUI 00000 1 LED D 0000 100 00000 LED e2. UUIUIUUUUUDUDDUUUUUUUUUUUUUUUUUDDDUUD UUUUUUUUUUUUUUUUUUUU UUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUU 0 0 0000000000000 00 4 1 LU 000000000000000000000000000000 GND DODODO 0 UUUUUUUUDDDUUUUUUUUUUUUUUUUDDUUUUUDUD UUIDUIUUUUDUDUUUDDDUUUUUUUUUDDDUDUUUUD 0 4 310 1 OO 4 0000 1 4 0 0 DODODO O 1 0 0 7 5 0 0 0 0 1 70 1 760 DODODO UU 0 730 A CAM CN 14 15 16 17 18 19 20 21 UUIUUUUUUDDDDUUUUUUUUUUUUUUUUDUUDODDUD UUIUIUUUUUUDDDDUUUUUUUUDUUUUUUUUDUUUDOLD 1 100 0 1 1 5 1 L 0 0 000 0710 0 Ul 0 8730 0 4 iiu 0 7007 60 0 70 000 0 0 0 1 10769 111 6 1 1 4 UIUUUUUUUUUUUDUUUDUUUUDUUUUUUIUDUDUD OU 151 851 1 1 250 1101 1 1 0 LU
3. 0 0 7 0000 1 10 70 O 71 0000 710 000000000000000000 1 0000000 ESS606A0000000000400000000000000000 00000000000000000E5S606A000000000000000000 00000000000000000000000000000 6000000 e UI 000000000000000000000000000000000000000 0 1 0 1 o 10 O 0 0V enr 00 e 10 U 5 0s 0 LOW 8 1 0 000 O0000000 0000000000040 8770 e 0 1 000 e 00000 000000000000000000000000000000000000000 000000000000000000000000000000000000000 00000000 e DOOD 0000000000000000000000 00000000000000000 1 1 U 1 1 1 0 e 00000 000000000000000000000000000000000000000 000 70 0 11 D 111 0000000 0 6 ESS 606A0000000000 e ESS606A700000000000 60000 000000000000000000 0000000000000000000000000000000000000 000000000000000000000000000000000000 4 0000000000000000000000000
4. 1 0000 1 380 0 4 gt 0 1 4 0 0 1 0 OO 188770 0 L AN CAUTI CN 22 23 24 25 26 DODODO0 00000 000000000000 0000000000 DODODO DO 0000000 000000000000 000000 00 10 0 180 0 0 1 70 1 11 L DODODO0 00000 000000000 0000000000000 0 000000000 00000000000 0 4 70 ODO OD 108707761 0 OU OU 00000 00000 00000 0000000000 UU 0 00000 ESS 606A 0 ooooo i i i 1000 OUUUUUUU 0000 um uu 020000 0 HB 111111 1 HUDUDDUDUDUUUUDUD 0000000000000000000000000000000000 706 70 00000 OU 0000 000000000000000 6 000000 kss 60sAQOOOOOOOOOOOOOOOOOOOOMOOOOOOOOOOOO 1 06 1 1 1 1 111 0 R 5 00 A aa 1 RESEDA sma 3 SN RASS 5 ERBEN TONER 7 E 9 SEO SETA RS RA elle 97 1 rb 8 pr AS e 15 IRE read PUN BER dq A uu aas rie e EF
5. OOO L3 L3 L3 L3 L3 CICOCO Co L3 L3 COCO L3 L3 A L3 LLL OOO L3 LLL Eri ooo Ei ooo FE Sars OOD ooo ooo EX ooo ooo EJETEJ do d F3 OHOOO o C3 L3 OHOOO OHOOO L3 L3 L3 1 OHOOO L3 1 L3 1 L3 1 L3 E L3 LLL L3 LLL OOO L3 LLL 000000000000000000000 00 7308 nc 000000001 AN MARN NG U 00000000000000000000 000000000000000000000 00 70 0 0 1 1 1 1 710 00 0 0 i 000000000 6000 0 314 10888730 1 47 4 0 0 DODODO O 11 4 4 1 2 000000000000000000000000000000000 1 DO 1 3 000000000000000000000000000000000 DO O 1 1 0 1 0 0 1 4 77770 000 11 1 1 i i 10 0 000 1 0 70 000000 gt 1 0 6 10 11 12 13 0 4 4 7102 DODODO 1 1 8 d d D dg 000 0 1180 UDUUDUUDDDUUD 1 1 7
6. 11780 e IC0000000 1 10 00 e 0 1 7 ON 0000000 0 1 7 gt 000 0000000000 DUDU 710 00000000000000000000 GROUND 000 0 0 70 0000000000000 2000 MIL 883D EIAJ B 000 MEASURE EAJ A00000 1000000 0000000000000000000000000 2 L1 000000000000000000000040 0000000000000000000040 e 900000000 NA 000000000000000000000000 000000000000000000000000 000000000000000000000000 000000000000000000000040 CEA ed E OO OOO ENE ESI E L1 L1 4 000000 EES 0 W 0000000000000 20000000000 000000000000000000000000 0 MILCEAJ B00000000000000000000000000000000 0000000000000000000 MEASURED 71 1 1 0 88 1 1 woo 4 760 14 8 1 TERE ESS 606A Q 0000000000 0000 100VD 6 0kV O HIGH LOW 00000000000000000000000000000000000 2000 0 00000000 0 50 99900200000000 1090000 ESS 606AQ 00000000000000 00000 4 00000 00 MIL STD 883D METHOD 3015 7 EIAJ ED 4701 1 C 111A EIAJ ED 4701 1 C 111A 000
7. 16 18 ux 1 R ESS 606A TTEAIE ESS 606AU 10 IU IU UU IU UU kVg0000000000000 000000000000000000000001C000000000000000 000000000000000000000000000000000000 10 00 0 8 08 0000 1C000000000 48000 1C000000000000000 e 258 606 70 000000000000000000000 1 7 0 1 4 4 1 00000000000000000000000000000 606 0000 000 00000000000 MIL STD 883D METHOD 3015 7 EIAJ ED 4701 1 0000 111 e 1 000000000000000000000000000000000000000 000000E55 606A00000000000000000000000000 CR 000000000000000000000000000000000000000 CR 00070 1 100 6 1080 0000000000 0 48000 00000000000000000000000000000000 sp DODODODDOO Sa 8 Ss 0000000 Re 70 Rd 00 Sm 1710 0 Sc 710 ca 70 01 72020 01 01108 CR UU uU uuu d 100 pF 1 5kQ MIL STD 883D EIAJ ED 4701 C 111A 2 200 pF 0O EIAJ ED 4701 1C 111AD 000 e J0000000U ESS 606A00700000000000000000000000000 2000000 0000000000000000000000000000000000000000 000000000000000000000000000000000000000 02 000000000 0000 50 6 2kV 000 0 0000 10 990 0000 0 50 99s 1 0
8. L3 C3 E3 Oooo Oooo Oooo Ooo 0 EJ EJ E m OOOO EJ EJ EJ OOOO E CJ EE ELE L3 r3 L3 r3 L3 L3 r3 EISE 3 E15 ERI an Jaa Fc ca EIE Ed EJ E3 Ed EI EH L3 r3 r3 pc O E3 EJ E3 p3 2 p3 E 0 E E E E E EET E D ED U 710 0000000000000000000000000000000000040 0000000000000000000000000000000000040 0 0 008070 0000000000000000000000000000000000040 000 0 L3 L3 E3 16 6 00000000 00000 00 8080778380 U 870870 0830 U 0008081278770 0730 U 8 70 0 1 0000000000000000000000000000000000000040 000000000000000000000000000000000000000 000 0 0000 00000000000U00U000U0000U0 0000040 000 1 11 0 0 88888 000 730 0000 0 80 000 1 1 1 1 1 70 0000000000000 1 1 1 0 00000000000000000000000000000000 0 000000000000000000000000000000000 000000000040 0 000000000000000000000000000000000 000000000000000000U0040 0 000000000000000000000000000000000 0 110 7380 G
9. 0 HIGH 100V 6 0kV zoll LOW E i 1 5kV MM 000000 100pF 10 20007 10 00 1 5kQ 196 00 0 50 9 9s 0 15 0 T 100 99 1s O O 10990010000 0000 00000 3120 0000 AC85 264V 50Hz 60Hz 0000 140VA 00 150 858 0 O 250 75 0000 O 420mmx 500mmx D 150mm 0000 10kg UU 0000000000000000000000000000000000000 15 0000 0000000000000006m0U0000600000000000000000 000000 0000000000000000000040 a 120000 0 0 0000000000000000000000000000000000040 0000 08000000 ELE El ET 0000040 00000000000000000000000000000000000 00000000000000000000000000000000000 00000000000000040 L3 L3 r3 ET ELI OOo ET ELE L3 EZ 5 1 EE El EX L3 E ET EET EE L3 L3 E3 p4 L3 E3 EA EHE E E CT k OOO EE EREB p ELE ET OOO 1 r3 C3 OOOO OOD Oa L3 E3 p4 OOO L3 E3 OOO E3 OOO OOOO OOO E3 E3 p L3 E3 E Er onanan
10. 1 0 6 0kV 0 0 2 FARROA CBRE ESS 606A 100000000000000000000000000000000 000000000000000000000000000000000IC00000 00000001C00000000000000000000000000000 CR 000000000000000000000000000000000000000 0000000 0 000000000000000000000U00000000000 000 0 0 00 0 1 0 0080 0001C00000000000000000000000000000 760 00000000C0000000000000000000000 0 0000 e UUDDUUUUI 000000000000000000000000000000000000000 0000000000000 LD0000000000 000 00000 0 70 0000040 00000 00 8770 000 Fo 00000 r 2 cROOOO c Tr 000000000 00000000 nnn 0000 ODO DDO O BNC OID 4 mm d T 0000 0000 1707 88 6006 2 0 3 RARE ESS 606A00000000000000100 ROODOO 200200 MI0000 OOO 100000000 200000000 10000000 10000000000 D100000000000 e 00001 0 710 e 00 MIL STD 883D EIAJ ED 4701000000000000000 1009 1 580 EIAJ ED 47010 00000000000000 0 06 00000000 OBA 200 0 4 e 1 11 1 1 0 48000 1008000000111000 0 8 ve ee 4 e H0000 AC100V0 000 01000000 00 DE esses 3 e 1 1 03 e 000000 MIL STD 883D EIAJ ED 4701 DO 8000000000000 0000 EA ED 4701 po 4090909008 00 00000000 00000 00000000 03 1 70
11. DO 1111111111 1 0000 D uuu 00000000000 0000000 000000000 00Vvg0000000 Oso OOO 0000 D Iun 0000 0000 0000 6 600000000000000000000000000000000000 0 1 1 11111 7020 0000000000000000000000000 1C0000000000 00 70 12 7 RUEAZRUERSA 0 10110100000000 288 606 Dag 1 1 0 1 0000000000 1706 000000 0000000000000000000000900490000000000000 A LA IL M 1111111010 0 HOTOO GROUND I 0000 770 000 60 AA 0000000000000000040 4 10800801 er 0 0 87307 e Peres 0000000000000000000000000U000000 1 000 0000 AC85 264V 50Hz 60H2 00000 00 150 5 0 250 7340 0000000000000 L L Ke 0000000000000000000000000000000 0000 1 0 8 13 e DUIDDUDDUDDUDUDUDBDUDUDDUDUDUUUDUUDDBUDUUUDUDUIDDUDUDDBUDUDUDLU 0 1 0000 8078390 0 000080 e cROOOOOOO Czk0000000000000000000000000000000000000 000000 1 1 1 7 1 1 0 08 20000 LL
12. OLU EE ELH 17 1 000000000000000000000000000000000000000000 00000000000 2 0000000000000000000000000000000000000 a 000000000000000000000000000000000000000000 0000000 OFFO000000000000000000 4 10000000000000 0 00000000000 5 00000000000000000000000000000000000000 0000000000000000000000000 18 11 BELH LENDERF 00000000000000000000000000000000000040 00000 0 0 0 00000000000000000000000000000000000040 00000000000000000000000000000000000040 000 110 000 1 uu TEL 0088 25 3939 TITIT 042 712 2021 FAX 042 712 2020 19 000 0000 000000
13. UUudutl OUOU LEE MODEL ESS 606A 111 00000 1 08 AECO0013 001 0I E EI EL CL I EL E E ET EI EI Eh 3 000 00000000000000000000000 000000000000000000000000000000000000000000 000000000000000000000000000000000000000000000 00000000000000000000000 000000000000000000000000000000000000000000000 0000000000000000000000000000000000000000000000 0000000000000000000000000000000 000000000000000000000000000000000000000000000 00000000 000000000000000000000000000000000000000000000 0000000000000000000000000000000000000000000000 0000000000000000000000000 0000000000 00000000000000000 000000000000000 01500000000000000000 1600000000 000000000000000000000000000000000000000000000 000000000000000000000000000000000000000000000 0 1 1 0 070 0000000 707 000000000000000000000000000000000000000000000 000000000000000000000000000 000000000000000 0000000000000000000000000000 0 00000 0 0000000000000 0000000 00000 0 00000 00000 1200000 020000000000000000000000000000000000 2 1 21 0 8800 O OD DD OOD OO OOD COCO OOD OOD OOD L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3 L3
14. gt 0000000000000000000 000000000FFOOO0 00 70 10 00000000 000 1890910000 gt 00000 LEDU UUDUUDUDD 0000000 LED 0000000000 HIGH 0000000000000 HIGH UO 0 0 U 5OVU 6 2kv0 000000 00 HIGHQOO 0 0 0 1 10000050 1 700 OO LOWOOO DDUDDUDD 100 0 6 0kV 10 1 LED 0 U Oo DO 000 Le po00000000000 000 1 1 102 0 0 0 0001 8 0 1 000 10 0 000 10 10150106 0 0 LE 110803027 OOOOOCOCOOO ee OOOO LED 00 70 Oo oo Oo oo Ono poo poo an Co Ono pa cH E Ono goH E poo 3 pj an Co gab co ES O g O goH E L E poo EI an Co On p cH E Ono pac H E poo Co an 3 Ono p cH L1 Ono goH Oo Ooo Ooo E E El EJ Esa EHE L3 L3 EJ Ca EJ EJ DO m m E 11 E Oo EJ Oo A o E Oo Oo Oo ET ET EJ EJ L3 oo e 3 10 6 Far DEERE EN KIBET OOD 4000000000 11100 6 0000000000 9 2 000 0 1 0 0 gt 7
15. x d 100pF 1 5kQ 200pF 0Q MIL STD 883D EIAJ ED 4701 00 BOO EIAJ ED 4701 ADD inii c jy y JT P d p y eg 2 2 2 T id l 5 y A a Z 48000 CO z 000000 00 nnnnnntinn 0200 JJ NS gt 4 000000CR00000 Icooooooo D D MIL EIAJ B MIL STD 883D EIAJ ED 4701 BO ll ll MEASURE EIAJ A 0000 EIAJ ED 4701 jt Al U A ER EL S ZOEK 8 11 1 6 LEDO 000000000000000000000000000000000 00000 05000000000000000000000000 0000000000000 3000000000000000000000005000000000 0000 03 00000000000000000 UU OOOO LEDO 10 000000 LED V LED kV LED 00 LED LED s LED 0000 ONODOOOOOOD LED OOOO 1 1000 8 0 8 LED 000000000000 LED 0000000000000 LED 70 0 LED 1 8 0 LED 1 8 0 LED 0000000 000000000000 LED 0000000 00000000 00000 LED 0 0 0 0 ICO O 0 0 00000 00000400 Io T Il T EJ NO O kVU v LED 00000 LED 00000000000 LED
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