垂直配向多層カーボンナノチューブフォレストの 初期成長
Contents
1. 2012 9 CNT 2013 lt 60 gt H Koji H Furuta K Sekiya N Nitta and T Harigai A Hatta Increas2. 19 FTR 2 2 1 6
3. 45 1 I 1 1 1 40 SSS 35 fast1 e Sv 30 fast2 zx ze b amm fast3 20 fast4 S9 15 slow1 5 10 t e slow2 5 1 slow3 0 slow4 150 250 350 450 550 650 750 850 wave length nm 5 2 1 fast1 c AA Am fast2 fast3 9 fast4 Ee et slow1 slow2 slow3 slow4 500 2500 4500 6500 Wave number 1 cm 5 2 2 FTTR 159 43 5 2 1 5 2 2 FITR slowl slow4 CNTD fast1 lt fast4 CNT fastl fast4 slowl slow4 FTIR fastl fast4
4. 3 1 17 Cathode TS l l l V b e O sample Anode X 3 1 20 CNT HITACHLU 3900 D WD 2 sample 100 Abs 0 3 2 18 3 2 3 3 Fourier transform Infrared Spectroscopy FTIR CNT FTIR JASCO FT7IR 6100 FITR
5. lk 19 p26 27 28 Ti y o ol QUEM x uk gt F Ld LE 3 3 34 4 p s 4 p s 4 ps p tan Vexp 4Z rp rs Erp Eipi Ers Eis UN Q 1 A 3 2 3 3
6. t OUS Ze T o Tc 44 1 CVD X 4 1 1 CVD Bd 4 1 2 CVD 4 1 1 CVD CVD Vi 4 1 OPEN Ux Vj 4 2 CLOSE 1 4 NW40 e42 7mm V3 Cali Belt ROM Id 2 4 1 2 CVD CVD 4 1 3
7. 1130087 3996 Y IESU 25 2 8 1 T Pr pL Dx 1 1 1 1 2 1 3 2 ERE D 10202 3 2l gem cb Eee 22 UN bu 23 d Rhwb Ta 7 0JCEEE 3 ETE A ER eda UE cE a URS d ERIS Ue ch NE cUR UE nx ae UE cR M ecd Je X 5 31 X2 2 JRE 32 3 3 Fourier transform Infrared Spectroscopy FTIR sup vos T 4 CVD ARRORA o 9 4 1 CVD 4 1 1 4 1 2 4 1 3 4 2 CNT 4 2 1 4 2 2 CNT 4 2 3 CNT
8. 22 23 X 4 6 CNT 4 6 CVD IENNE C2H2 5 0x10 Pa 730 C 3 5min 21 422 CNT 4 2 2 CNT 4 2 3 CNT CNT fast slow fast slow CNT length um Time sec 42 CNT 6 EE EE EE EE EE EE EE EE EE EE EE EE EE EE EE EE un IA B fast NJ slow CNT length pum
9. IVB40CA 1 4 NW40 MSK Baratron 626 4 4 20m x 4 1 10 17 4 4 23 0 005 X 4 1 11 8 0 3 4 1 12 CoO 5 31 35
10. 44 6 5E CVD CVD CNT GD G CNT CNT CNT CNT FTIR CNT CNT CNT sp CNT 3um 69 360 45
11. 10 5 3 FITR Si 5 4 s p Ref Al CNT 5 1 31 Benin 7 e Al 0 Ix 5 2 i s T 5 3 xi FITR XS i X54 5 1 R CNT 4 CNT fastl fast4 5 1 1 fast1 fast2 fast3 fastd Fe Al Si 5 15 39 IN co N 1 6 WE N e Reflectance R oooo ho o0 eo wave length nm 5 1 1 5 1 1 220nm
12. CVD CVD CVD CNT CNT 2 2 CNT 2 3 14 NENNEN CNT If 5 5 2 1 CVD E 2 2 x 2 3 23 SWNTs CNT 15 s p SWNT
13. 0 3 60 3 8 un e e Pressure Pa S e N eo mpm HE o 5 10 15 Time sec 4 1 11 C d pressure Pa 3 Time sec 4 1 12 pc P 18 4 1 11 Pc 4 3 4 1 13 4 1 14 Pc t Po 1 exp t x 4 3 I z 0 10 E i 1 0 0 05 0 1 0 15 0 2 0 25 0 3 Time sec 4 1 13 lii TT Uem 1 2 3 A 5 6 8 1 0 Log P Pc t Time sec x 4 1 14 19 4 1 13 4 1 14
14. 5 19 a CNT 1um b CNT 2um c CNT3um d CNT 3 6um CNT 0 63 75 3 41 a CNT lum WO WW Oo iu c NN sag 8aD ul rh Energy eV Energy eV lum b CNT 2 n 8 S33433p ul y a t N i O O0 N x ONON c cO C CN e s33433p UI rh 75 Energy eV Energy eV c CNT 3um 99J489p UI A 100 Energy eV Energy eV um d CNT 3 o o o o mM WwW C N O O WwW N m x Br n 63 a 66 69 x 72 s 13 p Ul rh x 75 Energy eV Energy eV t 4 4E V A JA PY v 13 X 5 1 42 5 1 43 40 VIX AJ CNT 4 4 R 3um CNT 69 360
15. 16 12 S Iijma Nature 354 1991 56 58 3 14 15 K Mizuno et al PNAS 106 2009 6044 6047 16 Y Murakami et al Carbon 43 13 2005 2664 2676 3 5E 3 1 CNT DC mM
16. CNT slow1 lt slow4 CNT fastl fast4 CNT CNT 23 26 4 2 13
17. L CNT 429 28 CNT fastl fast4 CNT slow1 slow4 CNT fast1 lt fast4 CNT CNT CNT CNT fast slow CNT CNT CNT CNT CNT CNT Gfast1 fast4
18. 7 Ife D P t Po e 0 13 2 3 2 17 4 1 15 CVD Da 0 4 1 15 Pt A De TIA ZATO M F C G1 V1 V2 tM A S E C gt AN o co DOD Pt Pc Z 4 1 15 CVD z CxZA GI Gi Pt t Pt 165Pa PP 193Pa Gi 165 0 13 1300 Pa sec G 193 2 3 84 Pa sec BEA oy 4 2 CNT
19. CNT slow1 slow4 2690cm CNT G D CNT EAL CNT GD G CNT 24 4 2 11 GD CNT fastl lt fast4 G D 4 2 12 CNT fast1 fast4 CNT 4 2 6 4 2 11 CNT CNT fast1 fast4 CNT slow1 slow4 CNT 4 2 7 1x10 4x10 cm
20. 73 4 3 114 NW40 e42 7mm 4 1 1 VQ 4 1 4 CVD 4 1 2 4 1 2 Cp x Vr Cg C x Vcvp 4 1 Vcp Vcvp Cg Cg C x Vr ia 2 PTIPO nC Wu ZEE Vayp 4003E 4520 FE LES SEV Ww S AB D A D R VW Pzr heater ba n eS sarYiple A a a ac 1 e mis i i n r 7 f Fi i pP F P pP P F 4 1 1 CVD C2H2 M F C cy WP GB LT PL cel CB
21. 5 1 4 Boe 94 1 8 1 6 p 1um 14 i Arr eur rea c 21um 4 a 0 8 pe i 0 6 0 4 0 2 E 0 150 250 350 450 550 0650 750 850 Lof of reflectance wave length nm 5 1 4 CNT 5 1 4 CNT 220nm Z lum 0 35 2 1um 0 34 3um 0 29 4um 0 23 CNT 0 52 0 32 0 13 0 06 CNT KZ CNT 220nm 555nm 220nm 555nm 5 1 5 1 8 1 6 1 4 1 2 s 4 555nm 0 6 0 4 m20nm Log of
22. TLP3S1 FF CLOSE FF OPEN t R C 7 1 1 xxC 21 H y FF i L fi di H 1 Ed lt gt l ma RENE H TI am FE Pa gt V1 V2 V1 V2 V1 V2 B 417 15 CVD 4 1 8 OPEN CLOSE CLOSE
23. CNT CNT lum 2um 3um 4um CNT CNTGfastl fast4 CNT slow1 slow4 Bd 4 2 7 SEM CNT 1 4x10 cm 24 a fastl fast2 fast3 fast4 b slowl slow2 slow3 slow4 Un m fast slow P a FN w hp e Density cm2 X 1011 O ul CNT length um 4 2 7 SEM CNT 4 2 8 fast3 slow3 SEM 4 29 SEM 25 4 2 8 fast3 slow3 SEM 20 19 18 17 16 15 14 13 12 11 10 E fast slow Diameter nm 0 1 2 3 4 5 CNT length um x 4 2 0 SEM CNT
24. CNT CNT CNT 4 2 1 CNT DC Si 2nm 3nm 8 0x107Pa 20mA 0 8Pa HELIX 76mm 4 2 1 DC 4 5 20 coolant target DC Power source sample coolant 421 DC 4 5 Fe domm 8 0xl04Pa 0 8Pa 20mA Ar Al 3mm CVD CNT CVD 4 2 477 CsHs 0x10 Pa 54Pa 730C 3 30
25. CNT 8 CNT 9 10 11 CNT CNT 1 2 CNT Hyd e 1 3 1 2 CNT 3 4 CVD CNT 5 CNT 6
26. 4 1 6 4 1 5 EE 5 1kQ 10kO S IKO 4 1 5 a 4 1 6 a TLP351 MOS K2382 OPEN 14 CLOSE HL FF FF CLOSE CLOSE 4 1 6 b Trigger 4 1 5 c 4 1 6 c TLP351 K2382 OPEN
27. CNT CNT CNT e o X Ww e X 4 Sel e Ce 254 Si Si n 4 2 13 f 0o pe SS ACC T UV 29 43 JI EJ MEI BODI Lt CNT CNT CNT G D 21 LMC555 CMOS 4 22 Nakayama et al Jpn J Appl Phys 45 1A 2006 369 371 23 K B K Teo C Singh M Chhowalla and W I Milne Catalystic Synthesis of Carbon Nanotubes and Nanofibers American Scientific Publishers 2011 vol 1 2
28. 1 4 2 3 CNT CNT 0 6um CNT CNT K 4 1 11 4 4 4 2 4 B 4 2 5 CNT OO 4 4 IB Un eo IB e UJ un o N wW o d O O E fast 150 B slow
29. 473 5 MWNTs D eororoeororocrorororororr ennes 31 1 R CNT 1 1 5 1 2 3953 FTIR 9 52 CNT 2 9 295 e 0D 6 WW 46 47 1 1 1 RFD d 1 CND 2 3 4 5 6 71 AFM
30. OPEN CLOSE OPEN ON OPEN CLOSE no Pt yes CLOSE OPEN no t yes CLOSE L 3 OPEN 88 4 1 8 16 4 1 3 CVD 4 1 9 CVD 4 1 10
31. 5 10 15 CNT 0 08 0 07 a CNT lum 0 06 c O 0 05 P 0 04 1um 5 0 03 Absorp 0 02 1um_15 0 01 500 2500 4500 6500 2 1um 5 Absorption e Q 2 1um 10 eo NO 2 1um 15 eo 0 02 500 2500 4500 6500 Wave number cm 40 0 18 0 16 0 14 0 12 0 1 0 08 3pgm 5 p 0 06 0 04 0 02 bsorptio 3um 10 3um 15 500 2500 4500 6500 Wave number cm1 0 22 0 2 d CNT 3 6um 0 18 0 16 0 14 0 12 500 2500 4500 6500 Wave number cm1 T p e 3 6hm 5 Absorption o 0 08 0 06 0 04 0 02 2 3 6hm 10 3 6um 15 5 1 12 5 10 1S CNT 2 1um CNT lum CNT 10 lum CNT 2 1um CNT CNT R 10 2 5 1 3 P s
32. 250nm CNT CNT lum 270nm Si CNT 109 5 1 2 5 1 3 109 33 CNT gt i Log of diffuse reflection 2 lium 3Lm 3 6um 150 250 350 450 550 650 750 850 wave length nm 5 1 2 2 1 8 9 16 1 4 12 1 i 2 1um 0 8 in 0 6 3um 0 4 3 Hum 150 250 350 450 550 650 750 850 wave length nm 5 1 3 109 Ix 5 1 2 CNT CNT 2um WR 220nm CNT 220nm lum 0 52 0 32 0 13 0 06 5 1 3 CNT 220nm 250nm
33. 96 5 1 7 CNT 1um CNT CNT 5 1 5 CNT Ium 4 4 2 7 SEM CNT CNT Ium 2um CNT SEM 5 1 9 CNT 3 6um 5 1 8 CNT 5 1 8 2 5 lum CNT 5 1 6 CNT lum CNT L Si CNT Ium CNT D CNT CNT 37 5 1 2
34. CNT Single walled Carbon Nanotube SWNT CNT Mult walled Carbon Nanotube MWNT SWNT mm EZIK Inm 5nm SWNT 1 WS i SWNT MWNT 2 1uum mm 4nm 50nm 13 14 22 CNT CVD CVD 2 1 CVD
35. 5 2 CNT 4 slow1 slow4 fast1 fast4 5 FTTR 15 5 2 1 5 5 2 2 FITR 159 slow1 slow4 CNT KART fast1 fast4 CNT
36. Integrate value of C2H2 pressure in chamber Pa s e e Time sec 4 2 4 fast slow 23 e bo 3 T e fast Z Q slow HI 0 I L 1I 1 0 100 200 300 400 500 Integrate value of C2H2 pressure in chamber Pa s X 4 2 5 CNT fast slow X 4 2 4 fasD slow 4 2 5 CNT 6 CNT CNT
37. slow1 slow4 fastl lt fast4 FTIR slow1 slow4 4 4 2 CNT fast1 fast4 slowl slow4 fastl1 lt fast4 slowl slow4 ETTIR Dag CNT CNT CNT 2um CNT CNT CNT lum FTTR HETI F CNT CNT CNT
38. CNT 4 2 3 CNT CNT CNT lum 2um 3um 4um CNT fastl fas2 fast3 fast4 CNT slow1 slow2 slow3 slow4 4 2 6 a fastl fast4 SEM b slow1 slow4 SEM 4 2 7 SEM 18 2825 5 ib 3 UL CNT 4 2 6 SEM CNT lum 2 lum 3um 3 65um
39. 3 6um 4 02um R 5 1 SEM CNT 2 m 1 g SEM nin max LT EIZ n ncNT2um 1 19 0 2 ncNT3m 1 07 0 1 ncNT3 eum 1 12 0 07 n 1 1 SEM CNT 10 5 3 FTIR AHE 1 5 1 11 CNT 3 I2lIoexpCax WHE A logoo A logioexp ax 0 434ax2d e XXG 3 39 0 08 007 S 0 06 oos 8 0 c 0 04 o 2 um 0 03 mE E 3um 0 02 LI 2 6 Lum t 500 2500 4500 6500 Wave number cm x 5 1 11 CNT KIZ FTIR 5 10 15 KI 5 1 12 a CNT 1um b CNT 2um c CNT 3um d CNT 3 6um
40. 4 2 8 SEM 4 2 9 SEM CNT CNT fastl fast4 13nm CNT slow1 slow4 15nm CNT Ix 4 2 10 CNT CNT a fast1 fast4 b slow1 slow4 G D 4 2 11 G D 4 2 12 a fast1 slow1 b fast2 slow2 c fast1 slow1 a fast4 slow4 G 26 S gt eo o 8 eo eo eo Intensity a u 8 Intensity a u 13s 1 fast2 f fast3 fast4 D band G Band 1000 1200 1400 1600 1800 Wave number 1 cm slow1 slow2 slow3 slow4 D ban
41. FTIR FTIR CNT 5 1 9 FTIR 15 0 2 0 18 0 16 0 14 0 12 bm 2 1um f Las 0 08 Boe d mm 0 04 j 3 6um SERT 2500 4500 6500 Absorption e Wave number cm 5 1 9 FTIR 15 5 1 9 CNT CNT iine CNT 5 1 10 CNT WCCRM dv 5SROI d D 2 CNT Fe Al Si 5 1 10 CNT CF BARS ZA ALEZ56 x62 mHw REZA LE 5 1 m 1 n 1 2ndcos 0 m 1 2 A d m 1 2 4 2n cos 5 2 5 1 SEM 2um 2 38um 3um 3 23um
42. 1 C Li et al Appl Phys Express 2 2009 091601 091603 2 H Furuta etal J Vac Sci Technol B 28 4 2010 878 881 selected paper for the issue of Virtual Journal of Nanoscale Science amp Technology 22 7 16 Aug 2010 3 H Furuta et al e J Surf Sci Nanotech 8 2010 336 339 4 S Fujii et al Appl Phys Lett 90 2007 153108 5 H Furuta et al Physica B 323 2002 299 302 6 T Ikuno et al Physica B 323 2002 171 173 7 T Hirao et al Jpn J Appl Phys 40 Part 2 No 6B 2001 L631 L634 8 K Mizuno et al PNAS 106 2009 6044 6047 9 H Koji et al Trans MRS J 37 4 2012 511 514 10 T Harigai et al Jpn J Appl Phys 50 2011 08JF12 11 H Furuta et al Appl Phys Express 3 2010 105101 23 2l 2gesq uec apes 7 qur Carbon Nanotube CNTD Ceo 1991 12 1 graphene CNT 1
43. reflectance 0 2 CNT length nm 5 1 5 220nm 555nm 3o 5 1 5 220nm 555nm CNT 2um 3 6um CNT lum CNT 2um 3 6um CNT 2um 3 6um CNT Ium CNT 5 1 6 CNT lum 1 CNT lum 5 1 7 POTATO 2 a NIORT NE NN d a Log a lb 2 a b 3X 5 1 la Ip CNT a b ONT lo CNT1hm o 5 1 6 CNT Absorption coefficient wave length nm 5 1 7 3 6um 3 6um O CNT lum
44. tanY lIrpl Ir 5X 3 2 A p s UN G 3 20 7 7 18 INSTRUCTION MANUAL U 390073900H 19 FT IR 2 20 2 4 CVD 4 1 CVD CNT CNTD CVD
45. 4 D Futaba et al Phys Rev Lett 95 5 2005 1 4 25 Graf et al Nano Lett 2006 26 A A PURETZKY et al Appl Phys A 81 223 240 2005 30 5 MWNTs CNT CNT ECER CNTD 5 CNT fastl fast4 FE HITACHLU 3900 5 HITACHI U 3900 960 105 HTITACHIU 3900 60 FITR JASCO FT IR 6100 J A Woollam M 2000DI 2 CNT fastl fast4 slowl1 slow4 iE dei FITR 5 1 Al 5 5 2 0
46. 4 1 2 CVD 4 1 4 2 IE CETT RE 4 3 DL 11 O C 9 E mtm LED 4 1 3 CVD 4 1 2 RLU 4 1 5 4 1 6 4 4 5 4 1 6 12 V JT LMc555 DL Q E 5 1k b 1n 4 5 19 Wy a u uA uns mm m mm mmm mm mm mm mmm mm mm mm m ew 2 V2 V1 ir E L Jes a i a Es E m 3 ee 4 1 6 4 1 7 4 1 5
47. HEEEELELELELEELEEEEEEEELE LT T T i TT TT Time sec 42 3 CNT 4 2 2 CNT 2 CNT LA Lo expl t amp X x 2 p4 CNT 20 7 t CNT R t 7 CNT CNT 1 20 CNT KI B 4 2 3 CNT
48. d G Band 1000 1200 1400 1600 1800 Wave number 1 cm 42 10 GG D a fastl fast4 b slowl slow4 T RE s oo e N BR a E fast G D ratio o e slow o 9 N 5 o CNT length um 42 41 G D CNT 27 50 c a 500 b 2400 2500 2600 2700 2800 2900 3000 2400 2500 2600 2700 2800 2900 3000 Wave number 1 cm Wave number 1 cm so so d 450 450 E fast4 fast3 Sslow3 slow4 2400 2500 2600 2700 2800 2900 3000 2400 2500 2600 2700 2800 2900 3000 Wave number 1 cm Wave number 1 cm 4 2 12 a fastl slowl b fast2 slow2 c fast3 slow3 d fast4 slow4 G 4 2 11 GD CNT fast1 fast4 G D 1 0 1 2 CNT slow1 slow4 G D 1 3 1 4 CNT GD 4 2 12 G CNT fast1 fast4 2750cm
49. ed CNT Growth Density with an Additional Thin Ni Layer on the Fe AI Catalyst Film Dia Rel Mat 2013 accepted VR RBS AE de H Koji K Sekiya T Harigai N Nitta H Furuta and A Hatta Growth of high density long length and uniform CNTS by an additional thin Ni layer on the Fe AI catalyst film Int Conf Dia Carbon Mat 2012 Sept 3 2012 Granada SPAIN H Furuta H Koji K Sekiya A Hatta High density Short height Carbon Nanotube Forests Approach to Optical Metamaterial Japan Korea Metamaterial Forum Jun 2012 Tsukuba JAPAN 46
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